CN207552439U - A kind of vacuum evaporation apparatus of semiconductor film material - Google Patents
A kind of vacuum evaporation apparatus of semiconductor film material Download PDFInfo
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- CN207552439U CN207552439U CN201721196073.8U CN201721196073U CN207552439U CN 207552439 U CN207552439 U CN 207552439U CN 201721196073 U CN201721196073 U CN 201721196073U CN 207552439 U CN207552439 U CN 207552439U
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- electric cabinet
- semiconductor film
- film material
- upper plate
- plate lid
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Abstract
The utility model discloses a kind of vacuum evaporation apparatus of semiconductor film material,Its structure includes electric cabinet,Main screen,Timing means,Status indicator lamp,Vacuum chamber,Pedestal,Pipeline,Evaporator,Electric cabinet surface stage casing is equipped with timing means,A kind of vacuum evaporation apparatus of semiconductor film material of the utility model,Equipped with timing means,The time of timing needed for being set by pressing regularly button,Then it is shown through display screen,Then set instruction is being explained into processing through processor,Carry out execute instruction in cooperation actuator,Control device is run,Make it that can be timed at runtime to semiconductor film material evaporation time,Improve semiconductor film material evaporative mass,Staff is avoided to cause semiconductor film material evaporation long due to forgetting and influence plated film,And overall process is kept an eye on without personnel,Alleviate the operating pressure and working strength of staff,Save more manpower waste,It is saves time and effort.
Description
Technical field
The utility model is a kind of vacuum evaporation apparatus of semiconductor film material, belongs to vacuum evaporation apparatus technology neck
Domain.
Background technology
Vaporation-type vacuum coating is that certain substance makes it be deposited on the surface of solids, referred to as evaporation coating by heating evaporation.
This method was proposed that the modern times have become one of common coating technique by M. faraday in 1857 earliest.Evaporating and coating equipment steams
Stimulating food matter such as metal, compound are placed in crucible or hung on heated filament as evaporation source, workpiece to be plated, such as metal, ceramics, modeling
The substrates such as material are placed in front of crucible.
Prior art discloses application No. is：A kind of vacuum evaporation of semiconductor film material of CN201220124041.8
Equipment including vacuum chamber and evaporator, is provided with driving shaft and driven shaft below evaporator, driving shaft drives base material to pass through evaporation
Evaporating area under device, and to batching by evaporating area base material, only need to roll up on driving shaft just by the base material of evaporating area
Can, opening vacuum chamber repeatedly is not needed to take out base material, improves the efficiency of plated film.The invention also discloses prepare OLED
The method of conductive layer, includes the following steps：(1) by OLED base materials volume on driven shaft, base material pass through carrying roller and chill roll it
Between, then it is connected on driving shaft；(2) vacuum chamber is vacuumized, keeps vacuum degree 30-50Pa；(3) evaporator is opened；
(4) start motor and drive driving shaft, base material is kept at the uniform velocity to walk；(5) driving shaft is right while the walking of OLED base materials is driven
OLED base materials are batched；(6) when evaporating, evaporator and active spindle motor are closed, opens vacuum chamber, takes out base material.But
It is disadvantage is that personnel is needed at every moment to wait in the process of running, more puzzlement is added to staff.
Utility model content
In view of the deficienciess of the prior art, the vacuum that the utility model aim is to provide a kind of semiconductor film material is steamed
Equipment is sent out, personnel is needed at every moment to wait in the process of running to solve above equipment, is added to staff more
The problem of puzzlement.
To achieve these goals, the utility model is to realize by the following technical solutions：A kind of semiconductive thin film
The vacuum evaporation apparatus of material, structure include electric cabinet, main screen, timing means, status indicator lamp, vacuum chamber, pedestal, pipe
Road, evaporator, the electric cabinet generally rectangular parallelepiped structure, the electric cabinet top is parallelogram, and the electric cabinet is left
Right two sides is parallel each other, and electric cabinet four sides is vertical each other in 90 °, and the electric cabinet height is 1.85cm, width 46cm,
Electric cabinet surface epimere is equipped with main screen, and the main screen surface is rectangle, and main screen surface quadrangle is 90 °, institute
Main screen length surface 26cm is stated, electric cabinet surface stage casing is equipped with timing means, and the timing means surface is rectangle,
Electric cabinet surface hypomere is equipped with status indicator lamp, and the status indicator lamp is equipped with several altogether, the status indicator lamp table
Face is circle, and the electric cabinet side is equipped with vacuum chamber, and the vacuum chamber is rectangular parallelepiped structure, and the vacuum chamber surfaces length is
42cm is highly 56cm, and the vacuum chamber bottom and base top are using being interference fitted, and the pedestal is rectangular parallelepiped structure, institute
Substructure height is stated as 64cm, the pedestal four sides is parallel each other and equal, and the vacuum chamber side end surfaces are used with pipeline one end
Interference fit, the pipeline are cylindrical-shaped structure, and the pipe diameter is 6.5cm, and the pipeline other end is used with evaporator
Interference fit, the evaporator as a whole be cylindrical structure, a diameter of 8.5cm of evaporator surface；The timing means by
Shell, upper plate lid, display screen, regularly button, wiring board, processor, actuator composition, the case nose surface and upper plate lid
Bottom end surface using interference fit, the shell be rectangular parallelepiped structure wide at the top and narrow at the bottom, the upper plate lid be rectangular parallelepiped structure, institute
It is parallel each other and equal to state four side of upper plate cap surface, the upper plate cover length be 22cm, width 8cm, the upper plate cap surface
Display screen is equipped with, the display screen surface is rectangle, and four side of display screen surface is parallel each other and equal each other, described
Display screen lower end is equipped with regularly button, and the regularly button surface is rectangle, there are five the regularly button is set altogether, described five
Regularly button is in same horizontal line, and wiring board, the circuit board electrical connection processor, institute are equipped in the upper plate cover back-end
Processor electrical connection actuator is stated, the actuator is rectangular parallelepiped structure, and upper plate base portion's surrounding is adopted with electric cabinet surface
With interference fit.
Further, both sides are parallel each other up and down on the main screen surface.
Further, the status indicator lamp is mutually in equidistant arrangement.
Further, described vacuum chamber or so two sides is equal.
Further, the pipe surface forms a right angle.
Further, the evaporator electrical connection electric cabinet.
Further, the status indicator lamp is used to intuitively know the device of operation conditions.
Further, the pipeline is for conveying gas, liquid or the device of fluid with solid particle.
Advantageous effect
A kind of vacuum evaporation apparatus of semiconductor film material of the utility model, equipped with timing means, by pressing timing
Button then shows through display screen come the time of timing needed for setting, then through processor by set instruction into
Row interpretation process carrys out execute instruction in cooperation actuator, and control device operation makes it at runtime can be to semiconductor film material
Evaporation time is timed, and improves semiconductor film material evaporative mass, and staff is avoided to lead to semiconductor due to forgetting
Thin-film material evaporation is long and influences plated film, and overall process is kept an eye on without personnel, alleviates the operating pressure and work of staff
Make intensity, save more manpower waste, it is saves time and effort.
Description of the drawings
Upon reading the detailed description of non-limiting embodiments with reference to the following drawings, other spies of the utility model
Sign, objects and advantages will become more apparent upon：
Fig. 1 is a kind of structure diagram of the vacuum evaporation apparatus of semiconductor film material of the utility model；
Fig. 2 is the vacuum chamber schematic diagram of the utility model.
Fig. 3 is the timing means schematic diagram of the utility model.
In figure：Electric cabinet -1, main screen -2, timing means -3, shell -301, upper plate lid -302, display screen -303, timing
Button -304, wiring board -305, processor -306, actuator -307, status indicator lamp -4, vacuum chamber -5, pedestal -6, pipeline -
7th, evaporator -8.
Specific embodiment
To be easy to understand technical means, creative features, achievable purpose and effectiveness of the utility model, below
With reference to specific embodiment, the utility model is expanded on further.
- Fig. 3 is please referred to Fig.1, the utility model provides a kind of technical solution：A kind of vacuum evaporation of semiconductor film material
Equipment, structure include electric cabinet 1, main screen 2, timing means 3, status indicator lamp 4, vacuum chamber 5, pedestal 6, pipeline 7, evaporation
Device 8, the electric cabinet 1 generally rectangular parallelepiped structure, 1 top of the electric cabinet are parallelogram, the electric cabinet 1 or so two
Face is parallel each other, and 1 four sides of the electric cabinet is vertical each other in 90 °, and 1 height of electric cabinet is 1.85cm, width 46cm, institute
1 surface epimere of electric cabinet is stated equipped with main screen 2,2 surface of main screen is rectangle, and the 2 surface quadrangle of main screen is 90 °,
The 2 length surface 26cm of main screen, the 1 surface stage casing of electric cabinet are equipped with timing means 3, and 3 surface of timing means is
Rectangle, the 1 surface hypomere of electric cabinet are equipped with status indicator lamp 4, and the status indicator lamp 4 is equipped with several altogether, the shape
4 surface of state indicator light is circle, and 1 side of electric cabinet is equipped with vacuum chamber 5, and the vacuum chamber 5 is rectangular parallelepiped structure, described true
5 length surface of empty room is 42cm, is highly 56cm, and 5 bottom of vacuum chamber is with 6 top of pedestal using interference fit, the bottom
Seat 6 is rectangular parallelepiped structure, and 6 height of pedestal is 64cm, 6 parallel each other and equal, 5 side of vacuum chamber in four sides of pedestal
End surfaces are with 7 one end of pipeline using being interference fitted, and the pipeline 7 is cylindrical-shaped structure, and 7 a diameter of 6.5cm of pipeline is described
7 other end of pipeline is with evaporator 8 using interference fit, the evaporator 8 generally cylindrical structure, 8 surface of evaporator
A diameter of 8.5cm；The timing means 3 by shell 301, upper plate lid 302, display screen 303, regularly button 304, wiring board 305,
Processor 306, actuator 307 form, and 301 front-end surface of shell is with 302 bottom end surface of upper plate lid using interference fit, institute
Shell 301 is stated as rectangular parallelepiped structure wide at the top and narrow at the bottom, the upper plate lid 302 is rectangular parallelepiped structure, 302 surface four of upper plate lid
Side is parallel each other and equal, and 302 length of upper plate lid is 22cm, and width 8cm, 302 surface of upper plate lid is equipped with aobvious
Display screen 303,303 surface of display screen are rectangle, and 303 surface of display screen, four side is parallel each other and equal each other, institute
303 lower end of display screen is stated equipped with regularly button 304,304 surface of regularly button is rectangle, and the regularly button 304 is set altogether
There are five, five regularly buttons 304 are in same horizontal line, and wiring board 305 is equipped in 302 rear end of upper plate lid,
The wiring board 305 is electrically connected processor 306, and the processor 306 is electrically connected actuator 307, and the actuator 307 is rectangular
Body structure, the 302 bottom surrounding of upper plate lid are used with 1 surface of electric cabinet and are interference fitted, both sides above and below 2 surface of main screen
Parallel each other, the status indicator lamp 4 is mutually in equidistant arrangement, and 5 or so the two sides of vacuum chamber is equal, 7 surface of pipeline
A right angle is formed, the evaporator 8 is electrically connected electric cabinet 1.
Display screen 303 described in this patent it be a kind of to be shown to certain electronic document by specific transmission device
The show tools of human eye is re-reflected on screen, the actuator 307 is to receive control signal and apply controll plant to control
The device of operation effect.
In progress in use, be first turned on vacuum chamber 5 is put into disengaging by semiconductor film material, protected closing vacuum chamber 5
Its leakproofness is demonstrate,proved, then equipment is opened in electric cabinet 1 again, equipment is allowed to run, then starting evaporator 8 runs evaporator 8, and
Evaporation heat is transferred to by pipeline 7, semiconductor film material is evaporated in vacuum chamber 5, and because pacifying on electric cabinet 1
Equipped with timing means 3, it is to first pass through the time for pressing 304 buttons of timing to set required timing, then aobvious through display screen 303
It shows to come, set instruction is then being explained into processing through processor 306, carry out execute instruction in cooperation actuator 307,
Control device is run, and is made it that can be timed at runtime to semiconductor film material evaporation time, is improved semiconductive thin film
Material evaporative mass avoids staff from causing semiconductor film material evaporation long due to forgetting and influence plated film, and full mistake
Cheng Wuxu personnel keep an eye on, and alleviate the operating pressure and working strength of staff, save more manpower waste, both time saving
It is again laborsaving.
The electric cabinet 1, main screen 2, timing means 3, status indicator lamp 4, vacuum chamber 5, pedestal 6, pipeline of the utility model
7th, evaporator 8, the component that component is universal standard part or those skilled in the art know, structure and principle are all this technology
Personnel by technical manual can learn or know by routine experiment method the utility model solves the problems, such as it is to run
Personnel is needed at every moment to wait in journey, more puzzlement is added to staff, the utility model passes through above-mentioned component
It is combined with each other, makes it that can be timed at runtime to semiconductor film material evaporation time, improve semiconductor film material
Evaporative mass avoids staff from causing semiconductor film material evaporation long and influence plated film due to forgetting, and overall process without
Personnel is needed to keep an eye on, alleviate the operating pressure and working strength of staff, save more manpower waste, not only time saving but also province
Power.It is described in detail below:
For 301 front-end surface of shell with 302 bottom end surface of upper plate lid using being interference fitted, the shell 301 is upper width
Under narrow rectangular parallelepiped structure, the upper plate lid 302 is rectangular parallelepiped structure, and 302 surface of upper plate lid, four side is parallel each other and phase
It is 22cm, width 8cm Deng, 302 length of upper plate lid, 302 surface of upper plate lid is equipped with display screen 303, described aobvious
303 surface of display screen is rectangle, and 303 surface of display screen, four side is parallel each other and equal each other, 303 lower end of display screen
Equipped with regularly button 304,304 surface of regularly button is rectangle, there are five the regularly button 304 is set altogether, described five
Regularly button 304 is in same horizontal line, and wiring board 305,305 electricity of wiring board are equipped in 302 rear end of upper plate lid
Connection processing device 306, the processor 306 are electrically connected actuator 307, and the actuator 307 is rectangular parallelepiped structure, the upper plate
302 bottom surrounding of lid is with 1 surface of electric cabinet using interference fit.
The basic principle of the utility model and main feature and the advantages of the utility model has been shown and described above, for
For those skilled in the art, it is clear that the utility model is not limited to the details of above-mentioned exemplary embodiment, and without departing substantially from this
In the case of the spirit or essential attributes of utility model, the utility model can be realized in other specific forms.Therefore, no matter
From the point of view of which point, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the utility model is by institute
Attached claim rather than above description limit, it is intended that will fall within the meaning and scope of the equivalent requirements of the claims
All changes are embraced therein.Any reference numeral in claim should not be considered as to the involved right of limitation
It is required that.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
It considers the specification as a whole, the technical solutions in each embodiment can also be properly combined, forms those skilled in the art
The other embodiment being appreciated that.
Claims (6)
1. a kind of vacuum evaporation apparatus of semiconductor film material, structure includes electric cabinet (1), main screen (2), timing means
(3), status indicator lamp (4), vacuum chamber (5), pedestal (6), pipeline (7), evaporator (8), the electric cabinet (1) are generally rectangular
Body structure, electric cabinet (1) top is parallelogram, and electric cabinet (1) the left and right two sides is parallel each other, the electric cabinet
(1) four sides is vertical each other in 90 °, and the electric cabinet (1) is highly 1.85cm, width 46cm；It is characterized in that：
Electric cabinet (1) surface epimere be equipped with main screen (2), main screen (2) surface be rectangle, the main screen (2)
Surface quadrangle is 90 °, main screen (2) the length surface 26cm, and electric cabinet (1) the surface stage casing is equipped with timing means (3),
Timing means (3) surface is rectangle, and electric cabinet (1) surface hypomere is equipped with status indicator lamp (4), and the state refers to
Show that lamp (4) is equipped with several altogether, status indicator lamp (4) surface is circle, and electric cabinet (1) side is equipped with vacuum chamber
(5), the vacuum chamber (5) is rectangular parallelepiped structure, and vacuum chamber (5) length surface is 42cm, is highly 56cm, the vacuum
Room (5) bottom is interference fitted with being used at the top of pedestal (6), and the pedestal (6) is rectangular parallelepiped structure, and the pedestal (6) is highly
64cm, pedestal (6) four sides is parallel each other and equal, and vacuum chamber (5) side end surface uses interference with pipeline (7) one end
Cooperation, the pipeline (7) are cylindrical-shaped structure, a diameter of 6.5cm of the pipeline (7), pipeline (7) other end and evaporator
(8) using interference fit, the evaporator (8) generally cylindrical structure, evaporator (8) surface diameter is 8.5cm；
The timing means (3) is by shell (301), upper plate lid (302), display screen (303), regularly button (304), wiring board
(305), processor (306), actuator (307) composition, shell (301) front-end surface and upper plate lid (302) bottom end surface
Using interference fit, the shell (301) is rectangular parallelepiped structure wide at the top and narrow at the bottom, and the upper plate lid (302) is rectangular parallelepiped structure,
Four sides of upper plate lid (302) surface are parallel each other and equal, upper plate lid (302) length be 22cm, width 8cm, institute
Upper plate lid (302) surface is stated equipped with display screen (303), display screen (303) surface is rectangle, the display screen
(303) four side of surface is parallel each other and equal each other, and display screen (303) lower end is equipped with regularly button (304), the timing
Button (304) surface is rectangle, and there are five the regularly button (304) sets altogether, five regularly buttons (304) are in same
On horizontal line, wiring board (305) is equipped in upper plate lid (302) rear end, the wiring board (305) is electrically connected processor
(306), the processor (306) electrical connection actuator (307), the actuator (307) are rectangular parallelepiped structure, the upper plate lid
(302) bottom surrounding is used with electric cabinet (1) surface and is interference fitted.
2. a kind of vacuum evaporation apparatus of semiconductor film material according to claim 1, it is characterised in that：The main screen
Both sides are parallel each other up and down on curtain (2) surface.
3. a kind of vacuum evaporation apparatus of semiconductor film material according to claim 1, it is characterised in that：The state
Indicator light (4) is mutually in equidistant arrangement.
4. a kind of vacuum evaporation apparatus of semiconductor film material according to claim 1, it is characterised in that：The vacuum
Room (5) left and right two sides is equal.
5. a kind of vacuum evaporation apparatus of semiconductor film material according to claim 1, it is characterised in that：The pipeline
(7) surface forms a right angle.
6. a kind of vacuum evaporation apparatus of semiconductor film material according to claim 1, it is characterised in that：The evaporation
Device (8) electrical connection electric cabinet (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721196073.8U CN207552439U (en) | 2017-09-18 | 2017-09-18 | A kind of vacuum evaporation apparatus of semiconductor film material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721196073.8U CN207552439U (en) | 2017-09-18 | 2017-09-18 | A kind of vacuum evaporation apparatus of semiconductor film material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207552439U true CN207552439U (en) | 2018-06-29 |
Family
ID=62676505
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721196073.8U Active CN207552439U (en) | 2017-09-18 | 2017-09-18 | A kind of vacuum evaporation apparatus of semiconductor film material |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207552439U (en) |
-
2017
- 2017-09-18 CN CN201721196073.8U patent/CN207552439U/en active Active
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