WO2019100557A1 - Part switching device and evaporation system - Google Patents

Abstract

Disclosed is a part switching device (20) and an evaporation system. The part switching device (20) includes a base device (21) and a base sleeve (22) surrounding the base device (21), in which the base device (21) comprises a base (211) and a rotating shaft (212). A plurality of receiving grooves (211c) for accommodating parts is disposed on a base sidewall (211b). The rotating shaft (212) is vertically fixed to the base plate (211a) and is for rotating the base (211) when rotating. The base sleeve (22) is provided with a window (221). Each receiving groove (211c) is sequentially aligned with the window (221) when the base (211) is rotated along with the rotating shaft (212), such that the parts in the receiving grooves (211c) are exposed for processing or other operations. The method can effectively increase the number of parts that can be accommodated in the part switching device (20) and the use efficiency of the corresponding equipment, thereby increasing the efficiency of industrial production.

Description

Part switching device and evaporation system

[Technical Field]

The present application relates to the field of machining technology, and in particular to a part switching device and an evaporation system.

 【Background technique】

With the development of industrial technology and mechanical technology, industrial production or part processing are mostly mechanized pipeline operations. During the operation of the pipeline, the machined machinery is generally stationary, but a part transfer device is used to transport the parts to be machined, and each part is transferred one by one to the machine for processing.

 [Summary of the Invention]

The technical problem mainly solved by the present application is to provide a part switching device and an evaporation system, which can effectively increase the number of parts that can be accommodated in the part switching device, improve the use efficiency of the corresponding equipment, and thereby improve the efficiency of industrial production.

In order to solve the above technical problem, a technical solution adopted by the present application is to provide an evaporation system, which includes at least a coating cavity, an evaporation source, a substrate, a film thickness monitor, and the vapor deposition system further includes a part switching device. The part switching device includes a base device and a base sleeve surrounding the base device; the base device includes a base, a first type of rotating shaft, and a controller, the base includes a bottom plate and a side wall perpendicular to the edge of the bottom plate, and the side wall is disposed There are a plurality of accommodating grooves for accommodating the parts, and the opening direction of the accommodating grooves is perpendicular to the side walls and away from the bottom plate; wherein the bottom plate is circular, the side walls are vertically disposed along the circumferential edge of the bottom plate, and face one side of the bottom plate The first type of rotating shaft is vertically fixed to the bottom plate for driving the base to rotate when rotating; the controller is connected to the first type of rotating shaft for controlling the first type of rotating shaft to rotate in a preset manner; wherein the base sleeve is set a window is provided for enabling the plurality of accommodating grooves to be sequentially aligned with the window when the first type of rotating shaft drives the base to rotate, so that the parts in the receiving groove are exposed for processing or other operations; Part switching device is housed crystal film, switching means for switching components crystal film when required.

In order to solve the above technical problem, a technical solution adopted by the present application is to provide a part switching device including a base device and a base cover surrounding the base device; wherein the base device includes a base and a rotating shaft The base includes a bottom plate and a side wall perpendicular to the edge of the bottom plate. The side wall is provided with a plurality of receiving grooves for accommodating the components. The opening direction of the receiving groove is perpendicular to the side wall and away from the bottom plate, and the rotating shaft is vertically fixed to the bottom plate. For rotating the base during rotation; wherein the base sleeve is provided with a window for sequentially aligning the plurality of receiving slots with the window when the rotating shaft drives the base to rotate, so as to facilitate the receiving of the slot Parts are exposed for processing or other operations.

In order to solve the above technical problem, another technical solution adopted by the present application is to provide a part switching device including a plurality of base devices and a base cover surrounding the plurality of base devices; wherein each base The seat device comprises: a base, comprising a bottom plate and a side wall perpendicular to the edge of the bottom plate; the side wall is provided with a plurality of receiving grooves for accommodating the components, the opening direction of the receiving groove is perpendicular to the side wall and away from the bottom plate; A type of rotating shaft is vertically fixed to the bottom plate for driving the base to rotate when rotating; the first type of rotating shaft of each base device is vertically fixed on a second type of rotating shaft to drive when the second type of rotating shaft rotates The plurality of bases rotate around the second type of rotating shaft; wherein the base sleeve is provided with a window for sequentially aligning the plurality of receiving slots when the first type of rotating shaft and the second type of rotating shaft drive the base to rotate It is convenient for the parts in the receiving groove to be exposed for processing or other operations.

The beneficial effects of the present application are: different from the prior art, the present application discloses a part switching device and an evaporation system. The part switching device comprises a base device and a base sleeve surrounding the base device; wherein the base device comprises a base and a rotating shaft, the base comprises a bottom plate and a side wall perpendicular to the edge of the bottom plate, and the side wall is provided with a plurality of In the accommodating groove of the accommodating part, the opening direction of the accommodating groove is perpendicular to the side wall and away from the bottom plate, and the rotating shaft is vertically fixed to the bottom plate for rotating the pedestal when rotating; wherein the pedestal sleeve is provided with a window for When the rotating shaft drives the base to rotate, the plurality of receiving grooves can be sequentially aligned with the window, so that the parts in the receiving groove are exposed for processing or other operations. In the present application, by arranging the accommodating groove on the side wall of the pedestal, in the case of the same size of the bottom surface of the pedestal, more accommodating grooves can be provided, and the multiple pedestal devices can be multiplied by multiple times. The number of parts that can be accommodated by the part switching device is increased, the frequency of replacement of parts is effectively reduced, the use efficiency of the corresponding equipment is improved, and the efficiency of industrial production is improved.

 [Description of the Drawings]

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the description of the prior art will be briefly described below. Obviously, the drawings in the following description are only It is a certain embodiment of the present invention, and other drawings can be obtained from those skilled in the art without any creative work.

Figure 1 is a front elevational view of a conventional part switching device;

2 is a schematic plan view of a conventional part switching device;

3 is a side view showing an embodiment of a part switching device provided by the present application;

4 is a front elevational view showing an embodiment of a part switching device provided by the present application;

Figure 5 is a front elevational view showing another embodiment of the part switching device provided by the present application;

6 is a top plan view of another embodiment of the part switching device provided by the present application;

7 is a top plan view of still another embodiment of the part switching device provided by the present application;

FIG. 8 is a schematic diagram of an embodiment of a coating system provided by the present application.

【Detailed ways】

The technical solutions in the embodiments of the present invention are clearly and completely described in the following with reference to the accompanying drawings in the embodiments of the present invention. It is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative efforts are within the scope of the present invention.

The terms "first", "second", and "third" in the embodiments of the present invention are used for descriptive purposes only, and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, features defining "first", "second", and "third" may include at least one of the features, either explicitly or implicitly. In the description of the present invention, the meaning of "a plurality" is at least two, such as two, three, etc., unless specifically defined otherwise. Furthermore, the terms "comprises" and "comprising" and "comprising" are intended to cover a non-exclusive inclusion. For example, a process, method, system, product, or device that comprises a series of steps or units is not limited to the listed steps or units, but optionally also includes steps or units not listed, or alternatively Other steps or units inherent to these processes, methods, products or equipment.

References to "an embodiment" herein mean that a particular feature, structure, or characteristic described in connection with the embodiments can be included in at least one embodiment of the invention. The appearances of the phrases in various places in the specification are not necessarily referring to the same embodiments, and are not exclusive or alternative embodiments that are mutually exclusive. Those skilled in the art will understand and implicitly understand that the embodiments described herein can be combined with other embodiments.

Please also refer to FIG. 1 and FIG. 2 for a schematic diagram of a conventional part switching device.

1 and 2 are a front view and a plan view of a conventional mechanical device in which a plurality of quartz crystal oscillation plates are placed. The mechanical device 10 is composed of a disk-shaped base 11, a rotating shaft 12, and a base cover 13.

On the disc-shaped plane of the susceptor 11, a plurality of accommodating grooves 111 are provided at equidistant and evenly distributed positions from the center of the susceptor 11 for placing quartz crystal oscillator pieces. The bottom of the pedestal sleeve 13 has an opening 131 which can be concentric with any accommodating groove 111 in use. The quartz crystal oscillator piece is switched by the rotating shaft 12 to face the opening 131, and only one crystal piece is at the position of the opening 131 at the same time.

The largest commercially available quartz crystal plate base has 12 crystal oscillators. After 12 crystal oscillators are used, it is necessary to stop the use of the device and replace the crystal oscillator. Quartz crystal oscillators are usually used in high vacuum environments. The frequency of replacing quartz crystal oscillators will affect the efficiency of the equipment and affect the efficiency of industrial production.

Please refer to FIG. 3 and FIG. 4 simultaneously. FIG. 3 and FIG. 4 are schematic diagrams showing a left side view and a front view of an embodiment of the part switching device provided by the present application.

The part switching device 20 includes a base device 21 and a base cover 22 that surrounds the base device 21. The base device 21 includes a base 211 and a rotating shaft 212.

The base 211 includes a bottom plate 211a and a side wall 211b perpendicular to the edge of the bottom plate 211a. The side wall 211b is provided with a plurality of receiving grooves 211c for accommodating the components, and the opening direction of the receiving groove 211c is perpendicular to the side wall 211b. And away from the bottom plate 211a.

Alternatively, the bottom plate 211a may be configured as a circular bottom plate, a regular polygonal bottom plate, or a bottom plate of other shapes. The side wall 211b is perpendicular to the edge of the bottom plate 211a. It can be understood that the edge of the side wall 211b is perpendicular to the edge of the bottom plate 211a or the middle portion of the side wall 211b is perpendicular to the edge of the bottom plate 211a, and the middle portion of the side wall 211b is perpendicularly connected to the edge of the bottom plate 211a. The wall 211b extends toward both sides of the bottom plate 211a so that the side view assumes a "T" shape. The combination of the side wall 211b and the bottom plate 211a is various and is not limited herein.

Specifically, in the present embodiment, the base 211 has a "dish dish" shape in which the circular bottom plate 211a is added with the vertical side wall 211b, that is, the side wall 211b is vertically disposed along the circumferential edge of the bottom plate 211a and extends toward one side surface of the bottom plate 211a. In this embodiment, the circular bottom plate 211a of the base 211 is a solid planar circular bottom plate. In other embodiments, it may also be arranged in a grid-like circular bottom plate, that is, the inner side of the bottom plate 211a (facing the side wall 211b side). The circular flat plate has a grid-like support structure on the outer side of the bottom plate 211a. This is applicable to the large-diameter base. Under the premise of ensuring the rigidity of the large-diameter base, the thickness of the circular bottom plate 211a and the material cost can be reduced. .

The accommodating groove 211c is formed on the side wall 211b. The accommodating groove 211c does not penetrate the side wall 211b, and then a small through hole is inserted into the accommodating groove 211c to penetrate the side wall 211b. The groove 211c is concentric, and the convex portion formed by the through hole and the receiving groove 211c is just enough to block the part from slipping out of the base 211. The depth of the accommodating groove 211c can accommodate the parts or accommodate most of the parts to meet the work requirements. The thickness of the side wall 211b needs to satisfy the rigidity requirement under the above conditions, or increase the thickness as needed, or provide reinforcing ribs on the side wall 211b. In addition, according to the diameter of the circular bottom plate 211a, the rigidity of the side wall 211b, and the overall cost, the number of the accommodating grooves 211c is appropriately set, and the plurality of accommodating grooves 211c are uniformly distributed on the side wall 211b, so as to be integrated. Maximize benefits.

In this embodiment, the rotating shaft 212 is fixed to the center of the bottom plate 211a. If the bottom plate has a circular shape in other embodiments, the rotating shaft 212 is fixed at the center of the bottom plate 211a. The connection mode of the rotating shaft 212 and the base 211 can be detachable or non-detachable. In this embodiment it is a detachable connection, such as a threaded connection, and in other embodiments a non-detachable connection, such as welding, may be used. The detachable connection facilitates the replacement of the base 211 and the components. In the embodiment, the center of the circular bottom plate 211a is provided with a threaded hole, and one end of the rotating shaft 212 connected to the base 211 is provided with a thread matched with the threaded hole. After they are connected, tighten them with nuts to prevent loosening. In the present embodiment, the rotating shaft 212 is disposed inside the bottom plate 211a, that is, the rotating shaft 212 and the side wall 211b are located on the same side of the bottom plate 211a. In other embodiments, in order to facilitate the replacement of the parts, the rotating shaft 212 may be disposed on the outer side of the bottom plate 211a, and the parts can be easily replaced without removing the base 211. The rotating shaft 212 can be set as a solid shaft or a hollow shaft according to the weight of the base 211, the length of the rotating shaft 212, and the diameter of the base 211. In this embodiment, the rotating shaft 212 is a solid shaft.

The base cover 22 encloses at least the base 211, and has a size and shape suitable for the size and shape of the base 211, and a window 221 is disposed on a side of the base cover 22 opposite to the side wall 211b. In other embodiments, a plurality of windows 221 may also be provided to increase the processing efficiency of the part. The shape, the size and the position of the window 221 correspond to the accommodating groove 211c, that is, when the rotating shaft 212 rotates the base 211, the plurality of accommodating grooves 211c can be sequentially aligned with the window 221 to facilitate the accommodating groove 211c. The parts are exposed for processing or other operations. It should be emphasized that only one part is in the window 221 at the same time in this embodiment. The base sleeve 22 is of a detachable structure and is fixed to the part switching device 20, that is, the spatial position of the window 221 is fixed. In this embodiment, the pedestal sleeve 22 is detachable from the outer side of the circular bottom plate 211a, and is screwed to another portion of the pedestal sleeve 22.

The part switching device 20 further includes a controller (not shown). The controller is coupled to the rotating shaft 212 for controlling the rotating shaft 212 to rotate in a preset manner.

In the present embodiment, the rotating shaft 212 is driven by a servo motor. The controller controls the servo motor by a program to cause the base 211 to rotate the switching part to the window 221 as needed. Specifically, after detecting that the part is processed, the controller controls the rotating shaft 212 to rotate by a certain angle, so that the part at the window 221 on the base 211 is staggered from the window 221 to prevent the processed part from being over-processed, or in detecting the window 221 There is no part to be processed, the control shaft 212 is rotated by a certain angle, and the part to be processed is rotated to the window 221 for processing.

For example, in the field of the film industry, precise control of the evaporation rate and film thickness of the film material is required. For example, when the substrate is coated, the vapor deposition apparatus simultaneously coats the substrate and the quartz crystal oscillator, and the evaporation material is deposited on the substrate and also deposited on the crystal oscillator. Therefore, the substrate can be monitored by the thickness/rate of the deposited film on the quartz crystal oscillator. The thickness/rate of the deposited film on the material. The monitor collects the film thickness information through the quartz crystal oscillator. This is because the change of the film thickness of the material deposited on the quartz crystal oscillator is proportional to the change value of the vibration frequency of the quartz crystal oscillator. By detecting the change of the vibration frequency of the quartz crystal oscillator, The thickness/rate of the deposited film on the quartz crystal plate is obtained, thereby monitoring the thickness/rate of the deposited film on the substrate, and the quartz crystal plate is placed in the part switching device 20.

Specifically, the quartz crystal oscillator has two faces, a working surface and an electrode contact surface, and the quartz crystal oscillator is placed in the accommodating groove 211c, and the working surface faces the direction in which the coating material adheres (ie, the side facing the susceptor sleeve 22). The electrode surface is electrically connected to the monitor, so that the quartz crystal oscillator piece is fixed and fixed in the base 211, and then the base 211 is packaged by the base sleeve 22 to prevent the quartz crystal oscillator piece in the non-working position from being coated. Thereafter, if it is detected that there is no quartz crystal oscillator plate at the window 221, the controller controls the servo motor to rotate the rotating shaft 212 to make a quartz crystal oscillator plate at the window 221, and the coating device starts to simultaneously coat the substrate and the quartz crystal oscillator plate; if the window is detected; At 221, there is a quartz crystal oscillator, and the coating equipment starts to coat the substrate and the quartz crystal oscillator simultaneously. At the same time, the monitor monitors the change value of the vibration frequency of the quartz crystal oscillator. When the variation value of the vibration frequency of the quartz crystal oscillator reaches the first threshold value, it indicates that the film thickness of the substrate reaches the requirement, the coating is stopped, and the next substrate to be coated is replaced. If the total variation value of the vibration frequency of the quartz crystal oscillator reaches the second threshold value, the quartz crystal oscillator is indicated. The blade reaches the end of its life, and the controller controls the rotation of the shaft 212 to rotate another unused quartz crystal piece to the window 221 on the base cover 22. In this way, after all the quartz crystal oscillators have reached the service life, the quartz crystal oscillator pieces are replaced.

The beneficial effects of the present application are: Different from the prior art, the present application discloses a part switching device. The part switching device comprises a base device and a base sleeve surrounding the base device; wherein the base device comprises a base and a rotating shaft, the base comprises a bottom plate and a side wall perpendicular to the edge of the bottom plate, and the side wall is provided with a plurality of In the accommodating groove of the accommodating part, the window direction of the accommodating groove is perpendicular to the side wall and away from the bottom plate, and the rotating shaft is vertically fixed to the bottom plate for rotating the pedestal when rotating; wherein the pedestal sleeve is provided with a window for When the rotating shaft drives the base to rotate, the plurality of receiving grooves can be sequentially aligned with the window, so that the parts in the receiving groove are exposed for processing or other operations. In the present application, the accommodating groove is disposed on the side wall of the base, and in the case of the same size of the bottom surface of the base, more accommodating grooves can be provided, which increases the number of parts that the component switching device can accommodate, and effectively reduces the number of parts. The frequency of replacement of parts increases the efficiency of use of the corresponding equipment, thereby increasing the efficiency of industrial production.

Please refer to FIG. 5 and FIG. 6 simultaneously, a front view and a top view of another embodiment of the part switching device provided by the present application.

The part switching device 30 includes three base units (32, 33, 34) and a base sleeve 35 surrounding the three base units (32, 33, 34).

Each of the base units (32/33/34) includes a base (321/331/341), a first type of shaft (322/332/342), and each base unit (32/33) The first type of shafts (322/332/342) of /34) are vertically fixed to a second type of rotating shaft 31 to drive a plurality of bases (32, 33, 34) around when the second type of rotating shaft 31 rotates. The second type of shaft 31 rotates.

In this embodiment, the base sleeve 35 has a window 351 thereon. In other embodiments, a plurality of windows 351 may be disposed on the base sleeve 35 to increase the processing efficiency of the parts.

The base unit (32, 33, 34) is a base unit as described in the above embodiment. The rotating shaft and the base sleeve described in the previous embodiment are applicable to the first type of rotating shafts (322, 332, 342) and the base sleeve 35 of the present embodiment, and are not described herein.

Alternatively, a plurality of base devices means that the number of base devices is greater than one. In this embodiment, the number of pedestals is three. In other embodiments, the number of pedestals may be two, four, five, etc., which is not limited in this application. The plurality of pedestals are equidistant from the second type of rotating shaft and are evenly distributed in the same spatial range around the second type of rotating shaft, that is, the plurality of first type of rotating shafts (322, 332, 342) surround the second type of rotating shaft 31 in this embodiment. Evenly distributed.

In the present embodiment, the first type of rotating shafts (322, 332, 342) are inner jacket layers. The outer layer is connected to the second type of rotating shaft 31, and the inner layer is rotatable by a motor. Specifically, the outer layer of the first type of rotating shafts (322, 332, 342) is fixed relative to the second type of rotating shaft 31, so that the second type of rotating shaft 31 can rotate and switch the respective bases (321, 331, 341) to the window 351. The inner shaft of the first type of rotating shafts (322, 332, 342) is rotated relative to the window 351 according to the rotation of the accommodating grooves (321a, 331a, 341a).

The outer layer of the first type of rotating shafts (322, 332, 342) is detachably connected to the second type of rotating shaft 31, and is fixed to the second type of rotating shaft 31 by a connecting member, and the first type of rotating shafts (322, 332, 342) The inner jacket layer is relatively rotatable and axially non-displaceable.

The second type of rotating shaft 31 is perpendicular to the plane formed by the rotating shafts (33, 35, 37), and the switching base (32, 34, 36) is driven at the window 351 by the servo motor.

The part switching device 30 further includes a controller (not shown). The controller connects a plurality of first type of rotating shafts (322, 332, 342) and a second type of rotating shaft 31 for controlling the first type of rotating shafts (322, 332, 342) and the second type of rotating shafts 31 to rotate in a preset manner.

Specifically, the second type of rotating shaft 31 and the first type of rotating shafts (322, 332, 342) are each provided with an independent servo motor and electrically connected to the controller. The controller controls each servo motor through the program, so that the base (321, 331, 341) rotates the parts to the window 351 as needed. Specifically, after detecting that the part is processed, the controller controls the first type of rotating shafts (322, 332, 342) to rotate by a certain angle, so that the parts at the window 351 on the base (321, 331, 341) are staggered from the window 351. To prevent the processed parts from being over-processed, or to detect the parts that are not to be processed at the window 351, control the first type of rotating shafts (322, 332, 342) to rotate by a certain angle, and rotate the parts to be processed to the window 351 for processing. Or, after detecting that the parts on the base (321 or 331 or 341) have been processed, the second type of rotating shaft 31 is controlled to rotate at an angle to rotate the other base (331 or 341 or 321) to the window 351.

The coating thickness control in the field of the film industry is still taken as an example. The controller detects whether there is a pedestal (321, 331, 341) at the window 351. If there is no pedestal (321, 331, 341), the controller controls the servo motor to drive the second type of rotating shaft 31 to rotate, so that a pedestal (321 or 331 or 341) is located at the position of the window 351, and the controller re-detects whether there is a quartz crystal oscillator plate at the window 351. If so, the coating device starts coating the substrate and the quartz crystal oscillator simultaneously. If not, the controller controls the first type of rotating shaft ( Rotating 322 or 332 or 342) so that a quartz crystal oscillator is at the window 351, and the coating device starts to simultaneously coat the substrate with the quartz crystal oscillator; if the base 321 (321 or 331 or 341) is detected at the window 351, the same After processing, a quartz crystal oscillator is placed at the window 351, and the coating device starts coating the substrate and the quartz crystal oscillator simultaneously. At the same time, the monitor monitors the change value of the vibration frequency of the quartz crystal oscillator. When the variation value of the vibration frequency of the quartz crystal oscillator reaches the first threshold value, it indicates that the film thickness of the substrate reaches the requirement, the coating is stopped, and the next substrate to be coated is replaced. If the total variation value of the vibration frequency of the quartz crystal oscillator reaches the second threshold value, the quartz crystal oscillator is indicated. When the sheet reaches the service life, the controller controls the rotation of the first type of shaft (322 or 332 or 342) to rotate another quartz crystal oscillator to be processed to the window 351 on the base sleeve 35. When the quartz crystal oscillator pieces on the base (321 or 331 or 341) reach the service life, the controller controls the second type of rotating shaft 31 to rotate, and rotates the other base (321 or 331 or 341) to the window 351. In this way, all the quartz crystal oscillator pieces on the part switching device 30 reach the service life, and the quartz crystal oscillator piece is replaced.

Still further, referring to Fig. 7, a plurality of part switching devices 30 can be circumferentially mounted on a turntable device 37. At the same time, the controller is also used to control the turntable device 37 to rotate a certain angle to place the other part switching device 30 at the working position after the parts in the part switching device 30 have been processed.

The beneficial effects of the present application are: Different from the prior art, the present application discloses a part switching device. The part switching device comprises a plurality of base devices and a base sleeve surrounding the plurality of base devices; wherein each base device comprises: a base comprising a bottom plate and side walls perpendicular to the edge of the bottom plate, the side walls are arranged There are a plurality of accommodating grooves for accommodating the parts, and the window direction of the accommodating groove is perpendicular to the side wall and away from the bottom plate; the first type of rotating shaft is vertically fixed to the bottom plate for driving the base to rotate when rotating; each base The first type of rotating shaft of the seat device is vertically fixed on a second type of rotating shaft to drive the plurality of bases to rotate around the second type of rotating shaft when the second type of rotating shaft rotates; wherein the base sleeve is provided with a window for When the first type of rotating shaft and the second type of rotating shaft drive the base to rotate, the plurality of receiving grooves can be sequentially aligned with the window, so that the parts in the receiving groove are exposed for processing or other operations. In the present application, by arranging the accommodating groove on the side wall of the pedestal, in the case of the same size of the bottom surface of the pedestal, more accommodating grooves can be provided, and the multiple pedestal devices can be multiplied by multiple times. The number of parts that can be accommodated by the part switching device is increased, the frequency of replacement of parts is effectively reduced, the use efficiency of the corresponding equipment is improved, and the efficiency of industrial production is improved.

Referring to Figure 8, a schematic diagram of an embodiment of an evaporation system provided by the present application.

The vapor deposition system includes at least a vapor deposition chamber 41, an evaporation source 42, a substrate 43, a crystal plate base device 44, and a film thickness monitor 45 connected thereto. The crystal plate base device 44 of the present embodiment adopts the component switching device described in the foregoing embodiment, and the corresponding component is a crystal oscillator piece, and the crystal oscillator base device is different from the prior art crystal plate base device. 44 is used to switch the crystal oscillator when needed.

The evaporation material is evaporated from the evaporation source 42, deposited on the substrate 43 (target deposition substrate) and the crystal oscillator to form a desired film, and the film thickness on the substrate 43 has a certain relationship with the film thickness on the crystal plate. The film thickness monitor 45 monitors the film thickness on the substrate 43 by the film thickness on the crystal plate. When the film thickness on the crystal oscillator sheet accumulates to a certain extent, the crystal oscillator piece can no longer be used, that is, the life of the crystal oscillator plate is reached, and at this time, the crystal oscillator piece base device 44 can be switched to the next crystal oscillator piece, and all the crystal oscillator pieces in the pedestal are reached. After the service life, the vapor deposition chamber 41 is opened to replace all the crystal oscillator pieces. Since the crystal plate base device 44 in the form of the above-described part switching device is used in the present embodiment, the number of crystal oscillator pieces is multiplied as compared with the prior art, and the frequency of opening the cavity replacement crystal piece is doubled, thereby improving production efficiency.

In the first two embodiments, the switching process of the crystal oscillator is described in detail, and will not be described again.

The above description is only the embodiment of the present application, and thus does not limit the scope of the patent application, and the equivalent structure or equivalent process transformation made by using the specification and the drawings of the present application, or directly or indirectly applied to other related technologies. The fields are all included in the scope of patent protection of this application.

Claims (18)

1. An evaporation system comprising at least a coating chamber, an evaporation source, a substrate, a film thickness monitor, wherein the evaporation system further comprises a part switching device, the part switching device comprising a base device and surrounding the base a base sleeve of the device;

   Wherein the base device comprises:

   a pedestal comprising a bottom plate and a side wall perpendicular to an edge of the bottom plate, wherein the side wall is provided with a plurality of accommodating grooves for accommodating the components, and the opening direction of the accommodating groove is perpendicular to the side wall Far from the bottom plate;

   Wherein the bottom plate is circular, the side walls are vertically disposed along a circumferential edge of the bottom plate, and extend toward a side of the bottom plate;

   a first type of rotating shaft is vertically fixed to the bottom plate for driving the base to rotate when rotating;

   a controller, connected to the first type of rotating shaft, configured to control the first type of rotating shaft to rotate in a preset manner;

   The pedestal sleeve is provided with a window for sequentially aligning the plurality of accommodating slots with the window when the first type of rotating shaft drives the susceptor to rotate, so as to facilitate the accommodating The parts in the slot are exposed for processing or other operations;

   The component housed in the component switching device is a crystal oscillator piece, and the component switching device is used to switch the crystal oscillator plate when needed.
2. The vapor deposition system according to claim 1, wherein

   The first type of rotating shaft is fixed on a center of the bottom plate, and the first type of rotating shaft and the side wall are located on the same side of the bottom plate.
3. The vapor deposition system according to claim 1, wherein

   A plurality of the accommodating grooves are evenly distributed on the side wall.
4. The vapor deposition system according to claim 1, wherein

   The part switching device may further include a plurality of the base devices, and a plurality of the base devices are disposed in the base sleeve.
5. The vapor deposition system according to claim 4, wherein

   The base device further includes a second type of rotating shaft, and the first type of rotating shaft of each of the base units is vertically fixed to a second type of rotating shaft to drive the plurality of the rotating shafts when the second type of rotating shaft rotates The base rotates about the second type of rotating shaft.
6. The vapor deposition system according to claim 5, wherein

   A plurality of said first type of rotating shafts are evenly distributed around said second type of rotating shaft.
7. The vapor deposition system according to claim 4, wherein

   The controller is further connected to the second type of rotating shaft, and controls the second type of rotating shaft to rotate in a preset manner.
8. A part switching device, comprising: a base device and a base sleeve surrounding the base device;

   Wherein the base device comprises:

   a pedestal comprising a bottom plate and a side wall perpendicular to an edge of the bottom plate, wherein the side wall is provided with a plurality of accommodating grooves for accommodating the components, and the opening direction of the accommodating groove is perpendicular to the side wall Far from the bottom plate;

   a rotating shaft fixed vertically to the bottom plate for driving the base to rotate when rotating;

   The pedestal sleeve is provided with a window for sequentially aligning the plurality of accommodating grooves with the window when the rotating shaft drives the susceptor to rotate, so as to facilitate the accommodating groove. Parts are exposed for processing or other operations.
9. The part switching device according to claim 8, wherein

   The bottom plate is circular, and the side walls are vertically disposed along a circumferential edge of the bottom plate and extend toward a side of the bottom plate.
10. The part switching device according to claim 9, wherein

    The rotating shaft is fixed on a center of the bottom plate, and the rotating shaft and the side wall are located on the same side of the bottom plate.
11. The part switching device according to claim 9, wherein

    A plurality of the accommodating grooves are evenly distributed on the side wall.
12. The part switching device according to claim 8, wherein

    The part switching device further includes a controller;

    The controller is coupled to the rotating shaft for controlling the rotating shaft to rotate in a preset manner.
13. A part switching device, comprising: a plurality of base devices and a base sleeve surrounding the plurality of base devices;

    Wherein each of the base devices comprises:

    a pedestal comprising a bottom plate and a side wall perpendicular to an edge of the bottom plate, wherein the side wall is provided with a plurality of accommodating grooves for accommodating the components, and the opening direction of the accommodating groove is perpendicular to the side wall Far from the bottom plate;

    a first type of rotating shaft is vertically fixed to the bottom plate for driving the base to rotate when rotating;

    a first type of rotating shaft of each of the base devices is vertically fixed on a second type of rotating shaft to drive a plurality of the bases to rotate about the second type of rotating shaft when the second type of rotating shaft rotates;

    Wherein the pedestal sleeve is provided with a window for sequentially aligning the plurality of accommodating grooves when the first type of rotating shaft and the second type of rotating shaft drive the susceptor to rotate A window that facilitates exposing parts in the receiving slot for processing or other operations.
14. The parts switching device according to claim 13, wherein

    The bottom plate is circular, and the side walls are vertically disposed along a circumferential edge of the bottom plate and extend toward a side of the bottom plate.
15. The parts switching device according to claim 14, wherein

    The first type of rotating shaft is fixed on a center of the bottom plate, and the first type of rotating shaft and the side wall are located on the same side of the bottom plate.
16. The parts switching device according to claim 14, wherein

    A plurality of the accommodating grooves are evenly distributed on the side wall.
17. The parts switching device according to claim 13, wherein

    A plurality of said first type of rotating shafts are evenly distributed around said second type of rotating shaft.
18. The parts switching device according to claim 13, wherein

    The part switching device further includes a controller;

    The controller is connected to the first type of rotating shaft and the second type of rotating shaft for controlling the first type of rotating shaft and the second type of rotating shaft to rotate in a preset manner.