CN206127415U - Vacuum coating machine and little area product optical coating frock thereof - Google Patents
Vacuum coating machine and little area product optical coating frock thereof Download PDFInfo
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- CN206127415U CN206127415U CN201621111716.XU CN201621111716U CN206127415U CN 206127415 U CN206127415 U CN 206127415U CN 201621111716 U CN201621111716 U CN 201621111716U CN 206127415 U CN206127415 U CN 206127415U
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- optical coating
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Abstract
The utility model discloses a vacuum coating machine and little area product optical coating frock thereof, include by support frame, detachably install in on the support frame stand to the backup pad and install in found the substrate anchor clamps to the side guard plate formation of backup pad tip, each stand to backup pad parallel arrangement, and it is adjacent stand to forming the accommodation space between the backup pad, install a plurality of baffles in the accommodation space, adjacent two form the work piece inserting groove between the baffle, seted up the coating film hole on the baffle, each coating film hole homogeneous phase exposes to adjacent baffle. The work piece inserting groove is range upon range of formula structure, on the basis of guaranteeing the substrate coating film, and effective quantity that sets up the substrate that increases for the space utilization of anchor clamps increases substantially during little area coating film, and the productivity strengthens greatly.
Description
Technical field
The utility model is related to the technical field of vacuum plating of optical instrument, and in particular to a kind of for vacuum coating equipment
Micro- area product optical coating frock.The utility model further relates to a kind of vacuum including micro- area product optical coating frock
Coating machine.
Background technology
With the emergence of China's modern manufacturing industry, optical articles are widely used the actual production of people and life is worked as
In, optical articles need to carry out plated film on the surface of optical articles when in use according to different use demands.In actual life
In product, many substrates area itself is larger, but is actually needed the region very little of plated film, and the area of plated film is in certain space
Limited, the way that this kind of situation is typically adopted is, the plated film on plated film or multilayer planar above the umbrella shape fixture；Such as Fig. 1 institutes
Show, its plated film frock umbrella hood 10, substrate 20, need to plate film location 30, this needs plating film location 30 to be opened up according to needs
Micropore.The stepped hole as sizes of substrate is opened on umbrella hood, plated substrate is placed on above, while handle does not need plated film
Position shelter from.But when realizing micro- area plated film using this kind of plated film frock, the area of most of substrate is to waste, and is led
Uniform space utilization rate is relatively low, and Coating Materials is wasted in a large number, and the installation and removal of substrate are more inconvenient, while on a single product
Waste coating materials.
Therefore it provides a kind of micro- area product optical coating frock, the sky of fixture during area plated film micro- to raising substrate
Between utilization rate, reduce Coating Materials waste, improve production capacity, be easy to the installation and removal of substrate, while avoiding on single product
The waste of coating materials, and then operating efficiency is improved, the cost manufactured is reduced, just become those skilled in the art urgently to be resolved hurrily
Problem.
Utility model content
The purpose of this utility model is to provide a kind of micro- area product optical coating frock, to improving the micro- area plating of substrate
The space availability ratio of fixture during film, reduces the waste of Coating Materials, improves production capacity, is easy to the installation and removal of substrate, while keeping away
Exempt from the waste of coating materials on single product, and then improve operating efficiency, reduce the cost manufactured.Another mesh of the present utility model
Be to provide a kind of vacuum coating equipment including above-mentioned micro- area product optical coating frock.
For achieving the above object, the utility model provides a kind of micro- area product optical coating frock, for Vacuum Deposition
Film machine, including the fixed mount being connected with the power set of the vacuum coating equipment and is removably installed in the fixed mount
Substrate fixture；
The substrate fixture includes bracing frame, is removably installed in standing to gripper shoe on support frame as described above, and installs
In the side guard plate stood to gripper shoe end；
The quantity stood to gripper shoe is some, and each described standing to gripper shoe be arranged in parallel, and it is adjacent it is described stand to
Accommodation space is formed between fagging, multiple baffle plates are installed in the accommodation space, each baffle plate forms stacked structure, phase
Workpiece inserting groove is formed described in adjacent two between baffle plate, plating film hole is offered on the baffle plate, each plating film hole is both with respect to phase
Adjacent baffle plate exposes.
Further, the substrate fixture is split-type structural, and it includes that multi-disc sub-folder has, and each sub-folder has in circumference
It is spliced to form umbrella-shaped structure.
Further, the substrate fixture also includes being arranged on the annular guard board of outer circumferential, and the annular guard board is arranged
In the outermost outside stood to gripper shoe.
Further, outermost described standing is provided with supporting screw in gripper shoe, offers on the annular guard board
Draw-in groove, and the supporting screw is connected in by the draw-in groove.
Further, the bottom land of the accommodation space that each baffle plate is located both with respect to it inclines predetermined angle.
Further, the predetermined angle is 10 ° -45 °.
Further, each described standing offers the multiple positions matched with the position of baffle plate and quantity in gripper shoe
Hole.
Further, stand to the multiple location holes in gripper shoe in same, in the center of bracing frame as the center of circle
On arcwall face.
Further, accommodation space described in multilayer forms stepped construction.
The utility model also provides a kind of vacuum coating equipment, including micro- area product optical coating frock as above.
Micro- area product optical coating frock provided by the utility model, for vacuum coating equipment, including true with described
The fixed mount that the power set of empty coating machine are connected and the substrate fixture for being removably installed in the fixed mount；The base
Plate clamp includes bracing frame, is removably installed in standing to gripper shoe on support frame as described above, and is installed on described standing to support
The side guard plate of plate end；Described standing to the quantity of gripper shoe is some, and each described standing to gripper shoe be arranged in parallel, and adjacent described
Stand to accommodation space is formed between gripper shoe, the accommodation space is interior to be removably provided with multiple baffle plates, each baffle plate shape
Into stacked structure, workpiece inserting groove is formed described in adjacent two between baffle plate, plating film hole, each plating are offered on the baffle plate
Fenestra exposes both with respect to adjacent screen.
Micro- area product optical coating frock needs to be installed on power set when in use so that fixed mount with
The output end of power set is fixedly connected, according to the width adjustment accommodation space of required film plating substrate, while according to by plated film base
The space of the workpiece inserting groove between the thickness adjustment adjacent screen of piece so that above-mentioned two is applied to by film plating substrate, will be by
Film plating substrate is sequentially inserted in workpiece inserting groove.Start power set during plated film, in micro- face under the drive of power set
Product product optical coating frock is rotated around its own center of circle, starts electron gun evaporation coating materials, and coating materials reaches plated by plating film hole
The surface of film substrate, so as to realize micro- area plated film of substrate surface.After the completion of substrate coating, stop electron gun and power dress
Put, substrate is taken out successively from micro- area plated film frock and enters lower one production process.Micro- area plated film tool structure
In, workpiece inserting groove is stacked structure, on the basis of substrate coating is ensured, is effectively increased the quantity for arranging substrate so that
The space availability ratio of fixture is increased substantially during micro- area plated film, and production capacity is greatly enhanced, while set up regulable ring-shaped backplate causing
The uniformity of plated film is significantly lifted, and effectively increases the quality of plated film；The structure is easy to the installation and removal of substrate, while keeping away
Exempt from the waste of coating materials on single product, and then improve production capacity, reduce the cost manufactured.
In a preferred embodiment, micro- area product optical coating frock provided by the utility model, described
Substrate fixture is split-type structural, and it includes that multi-disc sub-folder has, and each sub-folder tool is circumferentially being spliced to form umbrella-shaped structure.This is micro-
Area product optical coating frock is formed for four part spelling groups, is on the one hand easy to the peace of micro- area product optical coating frock itself
Assembly and disassembly, are on the other hand easy to, by the installation of film plating substrate and dismounting, effectively raise the efficiency of production, are greatly lowered
The cost of the manufacturing.Micro- area product optical coating frock is beveled structure, and electron gun sends out when effectively matching plated film
Firing angle degree, it is ensured that the quality of plated film, effectively improves the space availability ratio of whole micro- area product optical coating frock.
In a preferred embodiment, micro- area product optical coating frock provided by the utility model, described
Substrate fixture also includes being arranged on the annular guard board of outer circumferential, and the annular guard board is arranged at outermost described stand to support
The outside of plate.On the one hand the annular guard board can control the uniformity of plated film by adjustment, and substrate surface plated film is effectively ensured
Quality, on the other hand ensure that stability of the substrate in rotary plating, effectively prevent coming off for substrate.
In a preferred embodiment, micro- area product optical coating frock provided by the utility model, outermost
Described the standing of side is provided with supporting screw in gripper shoe, and draw-in groove is offered on the annular guard board, and by the draw-in groove card
It is connected to the supporting screw.It is easy to the dismounting of annular guard board in the structure, has effectively saved micro- area product optical coating work
The time of assembly and disassembly group, the production efficiency of substrate coating is substantially increased, and then effectively reduce the cost of the manufacturing.
In a preferred embodiment, micro- area product optical coating frock provided by the utility model, each institute
The bottom land for stating the accommodation space that baffle plate is located both with respect to it inclines predetermined angle.The setting of the predetermined angle is effectively protected
The quantity that substrate is arranged in micro- area product optical coating frock is demonstrate,proved, different productions has been met by adjusting predetermined angle and is added
Work demand, is the effective reduces cost of production, and the space availability ratio of micro- area product optical coating frock is performed to into maximum.
In a preferred embodiment, micro- area product optical coating frock provided by the utility model, described
Predetermined angle is 10 ° -45 °.The selection of the predetermined angle is determined according to specific production requirement, certain 10 ° -45 ° of area
Between it is optimal for coating quality, micro- area product optical coating frock space availability ratio is maximum.
In a preferred embodiment, micro- area product optical coating frock provided by the utility model, each institute
State to stand and the multiple location holes matched with the position of baffle plate and quantity are offered in gripper shoe.The setting of location hole is effectively protected
Demonstrate,prove the workpiece inserting groove uniformity between the setting angle of baffle plate and adjacent screen, and then ensure that the quality of substrate coating,
Effectively improve the efficiency and quality of product.
In a preferred embodiment, micro- area product optical coating frock provided by the utility model, is in
It is same to stand to the multiple location holes in gripper shoe, on the arcwall face with the center of bracing frame as the center of circle.It is same to stand to support
Board position hole is on the arcwall face with the center of bracing frame as the center of circle, is effectively guaranteed the uniformity of baffle plate setting position,
And then the uniformity of the substrate position for ensureing to be arranged in workpiece inserting groove, the quality of substrate coating is effectively ensured, it is to avoid film
The waste of material, has greatly saved the cost manufactured.
In a preferred embodiment, micro- area product optical coating frock provided by the utility model, multilayer
The accommodation space forms stepped construction.The structure is effectively guaranteed micro- area product optical coating frock space utilization
Rate so that the space availability ratio of micro- area product optical coating frock performs to maximum, and then reduces the cost manufactured.
Description of the drawings
Fig. 1 is a kind of structural representation of typical plated film frock in prior art；
Fig. 2 is a kind of structural representation of specific embodiment of plated film frock provided by the utility model；
Fig. 3 is view of the plated film frock in other direction shown in Fig. 2；
Fig. 4 is adjacent two structural representation for standing to gripper shoe in plated film frock shown in Fig. 2；
Fig. 5-Fig. 8 is all directions structural representation of monolithic sub-folder tool in plated film frock shown in Fig. 2；
Fig. 9 is the structural representation of the vacuum coating equipment that plated film frock provided by the utility model is located.
Description of reference numerals：
10- umbrella hood 20- umbrella shaped pieces 30- plates film location
1- fixed mount 2- substrate fixture 21- bracing frame 22- are stood to gripper shoe 221- location hole
23- accommodation space 24- baffle plate 241- plating film hole 25- supporting screws
The micro- area product optical coating frock 101- power set 102- vacuum chambers of 100-
Specific embodiment
Embodiment of the present utility model is described below in detail, the example of the embodiment is shown in the drawings, wherein ad initio
Same or similar element is represented to same or similar label eventually or the element with same or like function.Below by ginseng
The embodiment for examining Description of Drawings is exemplary, it is intended to for explaining the utility model, and it is not intended that to the utility model
Restriction.
Fig. 1-Fig. 9 is refer to, in a kind of specific embodiment, micro- area product optics plating provided by the utility model
Film frock 100, for vacuum coating equipment, is arranged in the vacuum chamber 102 of coating machine, including the power with the vacuum coating equipment
The fixed mount 1 that device 101 is connected and the substrate fixture 2 for being removably installed in the fixed mount 1；The substrate fixture 2
Including bracing frame 21, standing to gripper shoe 22 on support frame as described above 21 is removably installed in, and is installed on described standing to support
The side guard plate of the end of plate 22；Described standing to the quantity of gripper shoe 22 is some, and each described standing to gripper shoe 22 be arranged in parallel, and phase
Adjacent described standing is provided with multiple baffle plates 24 into formation accommodation space 23, the accommodation space 23 between gripper shoe 22, each described
Baffle plate 24 forms stacked structure, forms workpiece inserting groove described in adjacent two between baffle plate 24, and plating is offered on the baffle plate 24
Fenestra 241, each plating film hole 241 exposes both with respect to adjacent screen 24.
Baffle plate 24 can be removably installed in accommodation space 23 by modes such as clamping or bolt connections, it is also possible to
Stand to gripper shoe and be formed in one formula structure.Above-mentioned accommodation space 23 can be loop configuration, could be arranged to longitudinal direction stacked
Structure.
Micro- area product optical coating frock 100 needs to be installed on power set when in use so that fixed
Frame 1 is fixedly connected with the output end of power set, according to the width adjustment accommodation space 23 of required film plating substrate, while according to quilt
The space of the workpiece inserting groove between the thickness adjustment adjacent screen 24 of film plating substrate so that above-mentioned two is applied to by plated film base
Piece, will be sequentially inserted in workpiece inserting groove by film plating substrate.Start power set during plated film, under the drive of power set
Micro- area product optical coating frock 100 is rotated around its own center of circle, starts electron gun evaporation coating materials, and coating materials passes through plating film hole
241 reach by the surface of film plating substrate, so as to realize micro- area plated film of substrate surface, further quilt are realized by regulating fender 24
The uniformity of film plating substrate plated film.
After the completion of substrate coating, stop electron gun and power set, by substrate from micro- area plated film frock successively
Take out and enter lower one production process.In micro- area plated film tool structure, workpiece inserting groove is stacked structure, is ensureing base
On the basis of piece plated film, the quantity that substrate is set is effectively increased so that the space availability ratio of fixture is significantly during micro- area plated film
Improve, production capacity greatly enhances, while setting up regulable ring-shaped backplate so that the uniformity of plated film is significantly lifted, effectively increase plating
The quality of film；The structure is easy to the installation and removal of substrate, while avoiding the waste of coating materials on single product, and then improves product
Can, reduce the cost manufactured.
It is to be appreciated that the substrate fixture 2 is split-type structural, it includes that multi-disc sub-folder has, each sub-folder tool
Circumferentially it is being spliced to form umbrella-shaped structure.By taking the structure including four slice, thin piece fixtures as an example, micro- area product optical coating frock 100
Form for four part spelling groups, be on the one hand easy to micro- area product optical coating frock 100 installation and removal of itself, on the other hand
It is easy to, by the installation of film plating substrate and dismounting, effectively raise the efficiency of production, the cost of the manufacturing is greatly lowered.Should
Micro- area product optical coating frock 100 is beveled structure, the launch angle of electron gun when effectively matching plated film, it is ensured that plating
The quality of film, effectively improves the space availability ratio of whole micro- area product optical coating frock 100.Certainly said structure is
A kind of embodiment, the structure is not limited solely to this, can be able to be a piece of to be adjusted according to specific Production requirement
The structures such as formula, two-piece type or three-chip type.
In the structure, the substrate fixture 2 also includes being arranged on the annular guard board of outer circumferential, and the annular guard board is arranged
In the outermost outside stood to gripper shoe 22.On the one hand the annular guard board can control the uniform of plated film by adjustment
Property, the quality of substrate surface plated film is effectively ensured, stability of the substrate in rotary plating is on the other hand ensure that, it is prevented effectively from
The coming off of substrate.Certainly said structure is also an option that other structures as the alternative at this, for example, install annular shield additional
Net etc..
It is further understood that, outermost described standing is provided with supporting screw 25 in gripper shoe 22, the annular shield
Draw-in groove is offered on plate, and the supporting screw 25 is connected in by the draw-in groove.It is easy to the dismounting of annular guard board in the structure,
The time that micro- area product optical coating frock 100 tears group open has effectively been saved, the production efficiency of substrate coating has been substantially increased,
Further effectively reduce the cost of the manufacturing.Said structure can also be taken other form as the replacement scheme at this,
For example arrange the structures such as clamp button of the spring to realize the above-mentioned purpose be easy to and dismount and fix.
In the frock, the bottom land of the accommodation space 23 that each baffle plate 24 is located both with respect to it inclines preset angle
Degree.The setting of the predetermined angle is effectively guaranteed the quantity that substrate is arranged in micro- area product optical coating frock 100, passes through
Adjust predetermined angle to meet different production and processing demands, be the effective reduces cost of production, by micro- area product optical coating
The space availability ratio of frock 100 performs to maximum.The predetermined angle is 10 ° -45 °.The selection of the predetermined angle is according to concrete
Production requirement be determined, certain 10 ° -45 ° of interval is that coating quality is optimal, micro- area product optical coating frock 100
Space availability ratio is maximum.
Specifically, each described standing offers multiple positions that position with baffle plate 24 and quantity match in gripper shoe 22
Hole 221.The setting of location hole 221 is effectively guaranteed the workpiece inserting groove between the setting angle of baffle plate 24 and adjacent screen 24
Uniformity, and then the quality of substrate coating is ensure that, effectively improve the efficiency and quality of product.Stand to gripper shoe 22 in same
On multiple location holes 221, on the arcwall face with the center of bracing frame 21 as the center of circle.It is same to stand to the location hole of gripper shoe 22
221 are on the arcwall face with the center of bracing frame 21 as the center of circle, are effectively guaranteed the uniformity of the set location of baffle plate 24, enter
And the uniformity of the substrate position for ensureing to be arranged in workpiece inserting groove, the quality of substrate coating is effectively ensured, it is to avoid coating materials
Waste, greatly saved manufacture cost.
In the structure, accommodation space 23 described in multilayer forms stepped construction.The structure is effectively guaranteed micro- area and produces
The space availability ratio of product optical coating frock 100 so that the space availability ratio of micro- area product optical coating frock 100 is performed to most
Greatly, so reduce manufacture cost.Certainly said structure can also be other forms, and such as arc etc. is used as replacing at this
For scheme.
In description of the present utility model, it is to be understood that term " " center ", " longitudinal direction ", " horizontal ", " length ", " width
Degree ", " thickness ", " on ", D score, "front", "rear", "left", "right", " vertical ", " level ", " top ", " bottom " " interior ", " outward ", " suitable
The orientation or position relationship of the instruction such as hour hands ", " counterclockwise ", " axial direction ", " radial direction ", " circumference " is based on orientation shown in the drawings
Or position relationship, be for only for ease of description the utility model and simplify description, rather than indicate or imply indication device or
Element must have specific orientation, with specific azimuth configuration and operation, therefore it is not intended that to limit of the present utility model
System.
Additionally, term " first ", " second " are only used for describing purpose, and it is not intended that indicating or implying relative importance
Or the implicit quantity for indicating indicated technical characteristic.Thus, define " first ", the feature of " second " can express or
Implicitly include one or more this feature.In description of the present utility model, " multiple " are meant that two or more, remove
It is non-separately to have clearly specific restriction.
In the utility model, unless otherwise clearly defined and limited, term " installation ", " connected ", " connection ", " Gu
It is fixed " etc. term should be interpreted broadly, it is for example, it may be fixedly connected, or be detachably connected or integral；Can be
It is mechanically connected, or electrically connects；Can be joined directly together, it is also possible to be indirectly connected to by intermediary, can be two
The connection of element internal or the interaction relationship of two elements.For the ordinary skill in the art, can basis
Concrete condition understands concrete meaning of the above-mentioned term in the utility model.
In the utility model, unless otherwise clearly defined and limited, fisrt feature second feature " on " or D score
Can be the first and second feature directly contacts, or the first and second features are by intermediary mediate contact.And, first is special
Levy second feature " on ", " top " and " above " but fisrt feature directly over second feature or oblique upper, or only
Represent that fisrt feature level height is higher than second feature.Fisrt feature second feature " under ", " lower section " and " below " can be with
Be fisrt feature immediately below second feature or obliquely downward, or be merely representative of fisrt feature level height less than second feature.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show
The description of example " or " some examples " etc. means to combine specific features, structure, material or spy that the embodiment or example are described
Point is contained at least one embodiment of the present utility model or example.In this manual, to the schematic table of above-mentioned term
State and be necessarily directed to identical embodiment or example.And, the specific features of description, structure, material or feature can be with
Combine in an appropriate manner in any one or more embodiments or example.Additionally, in the case of not conflicting, this area
Technical staff the feature of the different embodiments or example described in this specification and different embodiment or example can be entered
Row is combined and combined.
Although embodiment of the present utility model has been shown and described above, it is to be understood that above-described embodiment is
Exemplary, it is impossible to it is interpreted as to restriction of the present utility model, one of ordinary skill in the art is in scope of the present utility model
It is interior above-described embodiment to be changed, be changed, being replaced and modification.
Claims (10)
1. a kind of micro- area product optical coating frock, for vacuum coating equipment, it is characterised in that include and the vacuum coating
The fixed mount that the power set of machine are connected and the substrate fixture for being removably installed in the fixed mount；
The substrate fixture includes bracing frame, is removably installed in standing to gripper shoe on support frame as described above, and is installed on institute
State the side guard plate stood to gripper shoe end；
The quantity stood to gripper shoe is some, and each described standing to gripper shoe be arranged in parallel, and adjacent described is stood to gripper shoe
Between form accommodation space, multiple baffle plates are installed in the accommodation space, each baffle plate forms stacked structure, adjacent two
Workpiece inserting groove is formed between the baffle plate, plating film hole is offered on the baffle plate, each plating film hole is both with respect to adjacent gear
Plate exposes.
2. micro- area product optical coating frock according to claim 1, it is characterised in that the substrate fixture is split
Formula structure, it includes that multi-disc sub-folder has, and each sub-folder tool is circumferentially being spliced to form umbrella-shaped structure.
3. micro- area product optical coating frock according to claim 2, it is characterised in that the substrate fixture also includes
The annular guard board of outer circumferential is arranged on, the annular guard board is arranged at the outermost outside stood to gripper shoe.
4. micro- area product optical coating frock according to claim 3, it is characterised in that it is outermost it is described stand to
Supporting screw is provided with fagging, draw-in groove is offered on the annular guard board, and the support spiral shell is connected in by the draw-in groove
Nail.
5. the micro- area product optical coating frock according to any one of claim 1-4, it is characterised in that each baffle plate
The bottom land of the accommodation space being located both with respect to it inclines predetermined angle.
6. micro- area product optical coating frock according to claim 5, it is characterised in that the predetermined angle is 10 °-
45°。
7. the micro- area product optical coating frock according to any one of claim 1-4, it is characterised in that it is each it is described stand to
The multiple location holes matched with the position of baffle plate and quantity are offered in gripper shoe.
8. micro- area product optical coating frock according to claim 7, it is characterised in that stand to gripper shoe in same
On multiple location holes, on the arcwall face with the center of bracing frame as the center of circle.
9. the micro- area product optical coating frock according to any one of claim 1-4, it is characterised in that hold described in multilayer
Stepped construction is formed between being empty.
10. a kind of vacuum coating equipment, including vacuum chamber, power set, and be arranged in the vacuum chamber and fill with the power
Put the plated film frock being connected, it is characterised in that the plated film frock is the micro- area as described in any one of claim 1-9
Product optical coating frock.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621111716.XU CN206127415U (en) | 2016-10-10 | 2016-10-10 | Vacuum coating machine and little area product optical coating frock thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621111716.XU CN206127415U (en) | 2016-10-10 | 2016-10-10 | Vacuum coating machine and little area product optical coating frock thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206127415U true CN206127415U (en) | 2017-04-26 |
Family
ID=58571348
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621111716.XU Active CN206127415U (en) | 2016-10-10 | 2016-10-10 | Vacuum coating machine and little area product optical coating frock thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206127415U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107916409A (en) * | 2017-11-27 | 2018-04-17 | 深圳市华星光电半导体显示技术有限公司 | A kind of part switching device and deposition system |
-
2016
- 2016-10-10 CN CN201621111716.XU patent/CN206127415U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107916409A (en) * | 2017-11-27 | 2018-04-17 | 深圳市华星光电半导体显示技术有限公司 | A kind of part switching device and deposition system |
| CN107916409B (en) * | 2017-11-27 | 2019-11-26 | 深圳市华星光电半导体显示技术有限公司 | A kind of part switching device and deposition system |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP02 | Change in the address of a patent holder | ||
| CP02 | Change in the address of a patent holder |
Address after: 100176 Building No. 2, Yongchang South Road, Daxing District, Beijing Economic and Technological Development Zone Patentee after: Buhler equipment (Beijing) Leybold optics Co. Ltd. Address before: 101102 25 Building, No. 11 Kangding Street, Daxing Economic and Technological Development Zone, Beijing Patentee before: Buhler equipment (Beijing) Leybold optics Co. Ltd. |