CN206127414U - Vacuum coating system and flexible product optical coating frock thereof - Google Patents
Vacuum coating system and flexible product optical coating frock thereof Download PDFInfo
- Publication number
- CN206127414U CN206127414U CN201621111145.XU CN201621111145U CN206127414U CN 206127414 U CN206127414 U CN 206127414U CN 201621111145 U CN201621111145 U CN 201621111145U CN 206127414 U CN206127414 U CN 206127414U
- Authority
- CN
- China
- Prior art keywords
- flexible
- dividing plate
- product optical
- plate
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The utility model discloses a vacuum coating system and flexible product optical coating frock thereof, this frock include drive assembly under drive assembly's the effect pivoted revolving rack device and detachably install in anchor clamps on the revolving rack device treat that coating film work piece centre gripping is fixed in in the anchor clamps, the revolving rack device including drive connecting piece and a plurality of detachably install in the all ascending baffles of drive connecting piece, anchor clamps detachably installs in adjacent two on the baffle, just the coating film of treating the coating film work piece face to the coating materials source of vacuum coating system. Like this, convenient operation during this frock production, anchor clamps can form great area, reduce anchor clamps quantity, have reduced a large amount of operating time, have reduceed the operation degree of difficulty simultaneously, have practiced thrift a large amount of human costs.
Description
Technical field
This utility model is related to the technical field of optical coating of optical instrument, and in particular to one kind is used for vacuum coating system
Flexible product optical coating frock.This utility model further relates to a kind of Vacuum Deposition including the flexible product optical coating frock
Membranous system.
Background technology
With the emergence of China's modern manufacturing industry, optical articles are widely used the actual production of people and life is worked as
In, optical articles need to carry out plated film on the surface of optical articles when in use according to different use demands.
When plated film is carried out to flexible product, need that flexible workpiece is arranged on into vacuum intracavity by frock, such as Fig. 1 institutes
Show, existing flexible product optical coating frock includes driving 101 and drives 101 cooker racks 103 being connected, is arranged on pot
Hanging hook assembly 102 on frame, the pot 104 in cooker racks 103, and the piece support formula fixture 105 being arranged in pot 104；
As shown in Fig. 2 need for flexible product 108 to be processed into the size that (artificial or machine) meets piece support formula fixture 105 during plated film,
Then manually the flexible product 108 for processing is attached between two intermediate plates 107, and covers antifouling 106, then it is corresponding fill it is whole
Individual pot, is co-mounted to whole pot band cooker racks in vacuum cavity finally by Shang Guo mechanisms (similar forklift device).Due to piece
Support formula fixture work in-process needs to be laid in pot, and needs for flexible product to be processed as the rule that match with piece support formula fixture
Lattice, cause single support formula fixture institute's plated product area and effective rate of utilization relatively low, affect plating membrane efficiency；And one needed for stove
Piece support formula fixture is more, causes to waste larger by the edge of plated product, and space availability ratio is relatively low.
Therefore it provides a kind of flexible product optical coating frock for vacuum coating system, to reducing the peace of workpiece
Dress difficulty, reduction manpower and time cost, while improving finished product area and space availability ratio, improve plating membrane efficiency, just become this
Art personnel's problem demanding prompt solution.
Utility model content
The purpose of this utility model is to provide a kind of flexible product optical coating frock for vacuum coating system, to
The installation difficulty of workpiece, reduction manpower and time cost are reduced, while improving finished product area and space availability ratio, plated film effect is improved
Rate.Another object of the present utility model is to provide a kind of vacuum coating system including above-mentioned flexible product optical coating frock.
For achieving the above object, this utility model provides a kind of flexible product optical coating frock, for vacuum coating
System, including drive component, the rotary frame device that rotates in the presence of the drive component, and it is removably installed in described turning
Flexible fixture on rack device, piece-holder to be coated is fixed in the flexible fixture；The rotary frame device includes the company of driving
Fitting, and multiple dividing plates being removably installed in the drive connection part circumference, the flexible fixture is removably installed
On dividing plate described in adjacent two, and the coated surface of the workpiece to be coated is towards the coating materials source of the vacuum coating system.
Further, guide rail is offered on the dividing plate, the flexible fixture is plugged in described in adjacent two with its edge and is led
Rail.
Further, the first mounting part is provided with the flexible fixture, is provided with the dividing plate and is hung with described first
The second mounting part that socket part coordinates.
Further, the drive connection part is ring flange, and the circumference of the ring flange is evenly arranged with multiple draw-in grooves, respectively
The dividing plate is plugged in correspondingly is installed in the draw-in groove respectively.
Further, the rotary frame device also includes enclosing 303 and baffle plate, and the enclosing 303 and the baffle plate pass through
Guiding screw pole is fixed on the surrounding of the dividing plate.
Further, the dividing plate has default radian towards the side side in the coating materials source, and each dividing plate exists
Circumferential uniform formation umbrella skeleton structure.
Further, the flexible fixture includes flexible clamping plate, and the workpiece to be coated is installed on into the flexible folder
The clip of plate, in installment state when, edge and the edge of the dividing plate of the flexible clamping plate fit.
Further, the flexible fixture also includes the light control plate fitted with the flexible clamping plate, the light control plate
Predeterminated position offers at least one loophole.
Further, the light control plate is flexible material board.
This utility model also provides a kind of vacuum coating system, including vacuum chamber and the coating materials for being arranged at the vacuum chamber
Source, also including flexible product optical coating frock as above, the flexible product optical coating frock is arranged at described true
In cavity, and positioned at the top in the coating materials source.
A kind of flexible product optical coating frock provided by the utility model, for vacuum coating system, the frock bag
Drive component, the rotary frame device rotated in the presence of the drive component are included, and is removably installed in the rotary frame device
On flexible fixture, piece-holder to be coated is fixed in the flexible fixture；The rotary frame device includes drive connection part, and
Multiple dividing plates being removably installed in the drive connection part circumference, the flexible fixture is removably installed in adjacent
On dividing plate described in two, and the coated surface of the workpiece to be coated is towards the coating materials source of the vacuum coating system.
In assembling process, first rotary frame device is assembled, dividing plate is circumferential to be uniformly arranged in drive connection part, and two
Flexible fixture installation site is formed between dividing plate, then is connected by screw mode and the rotary frame device for entirely assembling is installed to into drive
On dynamic, the precalculated position flexible fixture with workpiece to be coated being arranged between two dividing plates can complete assembling.So, should
Easy to operate during tooling production, flexible fixture can form larger area, reduce flexible fixture quantity, reduce substantial amounts of operation
Time, while reducing operation difficulty, substantial amounts of human cost is saved.Also, finished product area and effectively utilizes area are big, single
The finished product area of piece can improve greatly the competitiveness of finished product, have strong advantage, whole stove effective area on large area product
Greatly improve, than original 40% is improve, drastically increase the utilization rate and production capacity of equipment.
Description of the drawings
Fig. 1 is the structural representation of plated film frock in prior art；
Fig. 2-Fig. 3 is the structural representation that plated film frock provided by the utility model uses guide rail connected mode；
Fig. 4-Fig. 5 is the structural representation that plated film frock provided by the utility model uses hanging structure connected mode；
Fig. 6 is the structural representation of flexible fixture provided by the utility model；
Fig. 7 is the structural representation of the vacuum coating system that plated film frock provided by the utility model is located.
Specific embodiment
Embodiment of the present utility model is described below in detail, the example of the embodiment is shown in the drawings, wherein ad initio
Same or similar element is represented to same or similar label eventually or the element with same or like function.Below by ginseng
The embodiment for examining Description of Drawings is exemplary, it is intended to for explaining this utility model, and it is not intended that to this utility model
Restriction.
Fig. 3-Fig. 6 is refer to, Fig. 3-Fig. 4 is the knot that plated film frock provided by the utility model uses guide rail connected mode
Structure schematic diagram；Fig. 5-Fig. 6 is the structural representation that plated film frock provided by the utility model uses hanging structure connected mode.
In a kind of specific embodiment, a kind of flexible product optical coating frock provided by the utility model is used for
Vacuum coating system, the frock includes drive component 200, the rotary frame device rotated in the presence of the drive component 200
300, and the flexible fixture 400 being removably installed on the rotary frame device 300, workpiece to be coated 500 is clamped and fastened on institute
State in flexible fixture 400；The rotary frame device 300 includes drive connection part 301, and multiple is removably installed in the driving
Dividing plate 302 in the circumference of connector 301, the flexible fixture 400 is removably installed on dividing plate 302 described in adjacent two,
And the coated surface of the workpiece to be coated 500 is towards the coating materials source 600 of the vacuum coating system.
Specifically, above-mentioned drive connection part 301 is the ring flange being connected with the output shaft of drive component 200, described
The circumference of ring flange is evenly arranged with multiple draw-in grooves, and each dividing plate 302 is plugged in correspondingly is installed on the card respectively
In groove, dividing plate 302 is arranged on around ring flange by way of draw-in groove clamping, connects more convenient, simple structure, is easy to tear open
Dress.In theory, drive connection part 301 is not limited to ring flange, and it can also be other knots being connected with drive component 200
Structure, such as adapter etc.；Dividing plate 302 is also not limited to be installed on ring flange by inserting form, for example, it is also possible in ring flange
Upper installation buckle, on dividing plate 302 grab is arranged, and realizes being detachably connected with the clamping form of buckle by grab.
In order to improve structural stability, above-mentioned rotary frame device 300 also includes enclosing 303 and baffle plate 304, the enclosing 303
With the surrounding that the baffle plate 304 is fixed on the dividing plate 302 by guiding screw pole, to form complete disc-shaped structure.
In assembling process, first rotary frame device 300 is assembled, dividing plate 302 is circumferential to be uniformly arranged on drive connection part 301
On, and flexible fixture 400 installation site is formed between two dividing plates 302, then be connected by screw mode and will entirely be assembled
Rotary frame device 300 is installed in driving, and the flexible fixture 400 with workpiece to be coated 500 is arranged between two dividing plates 302
Precalculated position can complete assembling.So, easy to operate during the tooling production, flexible fixture 400 can form larger area, subtract
Few quantity of flexible fixture 400, reduces the substantial amounts of operating time, while reduce operation difficulty, saved substantial amounts of manpower into
This.Also, finished product area and effectively utilizes area are big, and the finished product area of monolithic can improve greatly the competitiveness of finished product, in big face
Has strong advantage on product product, whole stove effective area is greatly improved, and can improve 40% than original, is greatly enhanced
The utilization rate and production capacity of equipment.
Above-mentioned flexible fixture 400 can be arranged on dividing plate 302 by way of slide guide connects, specifically, can on dividing plate 302
To offer guide rail, the flexible fixture 400 is plugged in guide rail described in adjacent two, the setting direction of each dividing plate 302 with its edge
Outwards radially it is distributed by origin of the center of ring flange, guide rail is opened up along the radiation direction of dividing plate 302.
In theory, flexible fixture 400 is also not limited to the mode of above-mentioned slide guide connection, and it can also be using mounting
Mode is arranged on dividing plate 302, i.e., be provided with the first mounting part on flexible fixture 400, and first mounting part is specifically opened in soft
Property fixture 400 tray rack 401 on, the second mounting part coordinated with first mounting part is provided with dividing plate 302, by the
The connection of flexible fixture 400 and dividing plate 302 is realized with the mounting of the second mounting part in one mounting part.
Further, aforementioned barriers 302 have default radian towards the side side in the coating materials source 600, and each described
In circumferential uniform formation umbrella skeleton structure, dividing plate 302 forms default radian to dividing plate 302, to improve the uniformity of plated film.
For the ease of being adapted with the arcuate structure of dividing plate 302 so that when flexible fixture 400 pushes dividing plate by guide rail
302 or by hanging structure be arranged on dividing plate 302 on when, can well fit with the edge of dividing plate 302, as shown in fig. 7, on
Stating flexible fixture 400 includes flexible clamping plate 402, and the workpiece to be coated 500 is installed on into the clip of the flexible clamping plate 402
403, in installment state when, edge and the edge of the dividing plate 302 of the flexible clamping plate 402 fit.The flexible fixture
400 also include the light control plate 404 that fits with the flexible clamping plate 402, and the predeterminated position of the light control plate 404 is offered at least
One loophole 4041, to adjust coating film thickness as needed, specifically, the light control plate 404 is flexible material board.
Above-mentioned flexible clamping plate 402 and clip 403 are processed using thin plate, and simple structure is easy to process, and is hardly damaged,
Can be so that according to the random molding of the arc of guide rail, the finished product area of workpiece to be coated 500 be big, and integral installation is convenient；Adopt during plated film
Light-operated detection coating film thickness, the light control plate 404 that flexible material board is formed, can be according to leading used as the carrier for carrying light-operated monitoring piece
The shape of rail and molding, can form identical radian with flexible flexible fixture 400.
Below by taking above-mentioned specific embodiment as an example, the assembling process of plated film frock provided by the utility model is sketched：
Rotary frame device 300 is assembled, and light control plate 404 is installed on rotary frame device 300, be connected by screw mode
The rotary frame device 300 for entirely assembling is installed on drive component 200, the flexible fixture 400 of workpiece to be coated 500 will be installed
Predetermined position is imported by guide rail or is secured on dividing plate 302 by hanging structure.
Wherein, the dividing plate 302 of rotary frame device 300 is arranged on the circumference of ring flange by draw-in groove, and dividing plate 302 can be 12 pieces
(i.e. guide rail can be plural any, be confirmed according to formed product area, and such as dividing plate is 12PC, then can install
11 fixture flexible fixtures 400), it is overall into umbrella-shaped structure, enclosing 303 and baffle plate 304 by screw lock, it is not necessary to adjust
The surrounding of dividing plate 302 is fixed on by guiding screw pole so that overall into a circle for completing, can prevent abrasive material from splashing in plated film
To workpiece to be coated 500 without the need for plated film one side, while stability in the large can also be strengthened.
The flexible clamping plate 402 and clip 403 of flexible fixture 400 is processed using special sheet material (such as thin plate), structure letter
It is single, it is hardly damaged, can be big according to the random molding of the arc of guide rail, the finished product area of workpiece to be coated 500, integral installation is convenient.
Installation process during plated film is：Cutting is consistent the workpiece to be coated 500 of size with flexible fixture, installs clamping, (altogether
11)；Baffle plate 304 is pulled open upwards, is slowly introduced by the guide groove on guide rail, until pushing position (tying for mounting again
During structure, by the way that the second hanging part is articulated on the first hanging part), baffle plate 304 is left behind, terminate a piece of installation, in repetition
State and install 11, confirm in guide groove, antifouling board or anti-soil film to be covered.
Except above-mentioned flexible product optical coating frock, this utility model also provides a kind of including flexible product optical coating
The vacuum coating system of frock, the vacuum coating system includes vacuum chamber 700 and the coating materials source 600 for being arranged at the vacuum chamber,
Flexible product optical coating frock is arranged at the vacuum intracavity, and positioned at the top in the coating materials source 600, flexible product optics
Plated film frock is connected with drive component, drives whole frock rotation, evaporates abrasive material by coating materials source 600 and forms atom, is formed and is produced
The film layer on product surface, energy source is attached to the atom more consolidation of product surface, while both sides have uniform baffle plate 800 to adjust product
Uniformity, the coating film thickness of product surface is detected by monitoring system, temperature supply part 900 plays regulation coating temperature
Effect.
In description of the present utility model, it is to be understood that term " " center ", " longitudinal direction ", " horizontal ", " length ", " width
Degree ", " thickness ", " on ", D score, "front", "rear", "left", "right", " vertical ", " level ", " top ", " bottom " " interior ", " outward ", " suitable
The orientation or position relationship of the instruction such as hour hands ", " counterclockwise ", " axial direction ", " radial direction ", " circumference " is based on orientation shown in the drawings
Or position relationship, be for only for ease of description this utility model and simplify description, rather than indicate or imply indication device or
Element must have specific orientation, with specific azimuth configuration and operation, therefore it is not intended that to limit of the present utility model
System.
Additionally, term " first ", " second " are only used for describing purpose, and it is not intended that indicating or implying relative importance
Or the implicit quantity for indicating indicated technical characteristic.Thus, define " first ", the feature of " second " can express or
Implicitly include one or more this feature.In description of the present utility model, " multiple " are meant that two or more, remove
It is non-separately to have clearly specific restriction.
In this utility model, unless otherwise clearly defined and limited, term " installation ", " connected ", " connection ", " Gu
It is fixed " etc. term should be interpreted broadly, it is for example, it may be fixedly connected, or be detachably connected or integral；Can be
It is mechanically connected, or electrically connects；Can be joined directly together, it is also possible to be indirectly connected to by intermediary, can be two
The connection of element internal or the interaction relationship of two elements.For the ordinary skill in the art, can basis
Concrete condition understands concrete meaning of the above-mentioned term in this utility model.
In this utility model, unless otherwise clearly defined and limited, fisrt feature second feature " on " or D score
Can be the first and second feature directly contacts, or the first and second features are by intermediary mediate contact.And, first is special
Levy second feature " on ", " top " and " above " but fisrt feature directly over second feature or oblique upper, or only
Represent that fisrt feature level height is higher than second feature.Fisrt feature second feature " under ", " lower section " and " below " can be with
Be fisrt feature immediately below second feature or obliquely downward, or be merely representative of fisrt feature level height less than second feature.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show
The description of example " or " some examples " etc. means to combine specific features, structure, material or spy that the embodiment or example are described
Point is contained at least one embodiment of the present utility model or example.In this manual, to the schematic table of above-mentioned term
State and be necessarily directed to identical embodiment or example.And, the specific features of description, structure, material or feature can be with
Combine in an appropriate manner in any one or more embodiments or example.Additionally, in the case of not conflicting, this area
Technical staff the feature of the different embodiments or example described in this specification and different embodiment or example can be entered
Row is combined and combined.
Although embodiment of the present utility model has been shown and described above, it is to be understood that above-described embodiment is
Exemplary, it is impossible to it is interpreted as to restriction of the present utility model, one of ordinary skill in the art is in scope of the present utility model
It is interior above-described embodiment to be changed, be changed, being replaced and modification.
Claims (9)
1. a kind of flexible product optical coating frock, for vacuum coating system, it is characterised in that including drive component, in institute
The rotary frame device rotated in the presence of drive component, and the flexible fixture being removably installed on the rotary frame device are stated, is treated
Film-coating workpiece is clamped and fastened in the flexible fixture；The rotary frame device includes drive connection part, and multiple removably pacifies
Loaded on the dividing plate in the drive connection part circumference, the flexible fixture is removably installed on dividing plate described in adjacent two,
And the coated surface of the workpiece to be coated is towards the coating materials source of the vacuum coating system；The flexible fixture includes flexible folder
Plate, and the workpiece to be coated is installed on into the clip of the flexible clamping plate, in installment state when, the side of the flexible clamping plate
Edge fits with the edge of the dividing plate.
2. flexible product optical coating frock according to claim 1, it is characterised in that offer on the dividing plate and lead
Rail, the flexible fixture is plugged in guide rail described in adjacent two with its edge.
3. flexible product optical coating frock according to claim 1, it is characterised in that be provided with the flexible fixture
First mounting part, is provided with the second mounting part coordinated with first mounting part on the dividing plate.
4. the flexible product optical coating frock according to any one of claim 1-3, it is characterised in that the drive connection
Part is ring flange, and the circumference of the ring flange is evenly arranged with multiple draw-in grooves, and each dividing plate is plugged in correspondingly respectively
It is installed in the draw-in groove.
5. flexible product optical coating frock according to claim 4, it is characterised in that the rotary frame device also includes enclosing
Gear and baffle plate, the enclosing and the baffle plate are fixed on the surrounding of the dividing plate by guiding screw pole.
6. the flexible product optical coating frock according to any one of claim 1-3, it is characterised in that the dividing plate direction
The side side in the coating materials source has default radian, and each dividing plate in circumferential uniform formation umbrella skeleton structure.
7. flexible product optical coating frock according to claim 6, it is characterised in that the flexible fixture also include with
The light control plate that the flexible clamping plate fits, the predeterminated position of the light control plate offers at least one loophole.
8. flexible product optical coating frock according to claim 7, it is characterised in that the light control plate is flexible material
Plate.
9. a kind of vacuum coating system, including vacuum chamber and the coating materials source for being arranged at the vacuum chamber, it is characterised in that also include
Flexible product optical coating frock as described in any one of claim 1-8, the flexible product optical coating frock is arranged at
The vacuum intracavity, and positioned at the top in the coating materials source.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621111145.XU CN206127414U (en) | 2016-10-10 | 2016-10-10 | Vacuum coating system and flexible product optical coating frock thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621111145.XU CN206127414U (en) | 2016-10-10 | 2016-10-10 | Vacuum coating system and flexible product optical coating frock thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206127414U true CN206127414U (en) | 2017-04-26 |
Family
ID=58572125
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621111145.XU Active CN206127414U (en) | 2016-10-10 | 2016-10-10 | Vacuum coating system and flexible product optical coating frock thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206127414U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107805781A (en) * | 2017-11-27 | 2018-03-16 | 吴肖颜 | A kind of vacuum coating equipment cage |
| CN110684956A (en) * | 2019-10-21 | 2020-01-14 | 江苏菲沃泰纳米科技有限公司 | Flexible article coating film tool and cover body thereof |
-
2016
- 2016-10-10 CN CN201621111145.XU patent/CN206127414U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107805781A (en) * | 2017-11-27 | 2018-03-16 | 吴肖颜 | A kind of vacuum coating equipment cage |
| CN110684956A (en) * | 2019-10-21 | 2020-01-14 | 江苏菲沃泰纳米科技有限公司 | Flexible article coating film tool and cover body thereof |
| TWI802821B (en) * | 2019-10-21 | 2023-05-21 | 大陸商江蘇菲沃泰納米科技股份有限公司 | Coating jig for flexible articles and its cover |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN206127414U (en) | Vacuum coating system and flexible product optical coating frock thereof | |
| CN206127416U (en) | Vacuum coating equipment and work piece linkage thereof | |
| CN106563991B (en) | A kind of collection grips, is ground, smears and is discharged to integrated processing unit (plant) | |
| CN208358489U (en) | Moulding grinding device | |
| CN209872381U (en) | Silica gel surface smoothness treatment facility | |
| CN105127065B (en) | PVD coating is with dress sword anchor clamps | |
| CN204874718U (en) | Rotatory furnace frame of vacuum coating | |
| CN206168663U (en) | Coating device | |
| CN209602625U (en) | A kind of coating apparatus | |
| CN208136328U (en) | A kind of PVD film-coating workpiece rotating suspension device | |
| CN207435540U (en) | A kind of rotary body coating clamp | |
| CN214612430U (en) | A simple and easy board auxiliary device that scribbles for molecular cloning experiment | |
| CN216378374U (en) | Coating device with left and right gradient colors | |
| CN202181347U (en) | Improved transmission mechanism of vacuum coating machine | |
| CN206127415U (en) | Vacuum coating machine and little area product optical coating frock thereof | |
| CN207172452U (en) | A kind of chamfering machining feeding device | |
| CN211522312U (en) | Coating film storage rack and coating film mechanism | |
| CN208857360U (en) | A kind of plasma surface treatment all-directional rotation workpiece target platform | |
| CN206937017U (en) | A kind of 3D products clear off equipment | |
| CN111745494A (en) | I-steel cut surface burr treatment device | |
| CN218435936U (en) | Multi-component product coating switching device | |
| CN206516430U (en) | A kind of specialty polyesters enamel-covered wire bucket paint removing device | |
| CN215107445U (en) | Assembled indoor metal partition module installation transportation integrated device | |
| CN206486589U (en) | Vacuum automobile coating machine | |
| CN213652488U (en) | Liver cancer cell multilayer separation device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP02 | Change in the address of a patent holder | ||
| CP02 | Change in the address of a patent holder |
Address after: 100176 Building No. 2, Yongchang South Road, Daxing District, Beijing Economic and Technological Development Zone Patentee after: Buhler equipment (Beijing) Leybold optics Co. Ltd. Address before: 101102 25 Building, No. 11 Kangding Street, Daxing Economic and Technological Development Zone, Beijing Patentee before: Buhler equipment (Beijing) Leybold optics Co. Ltd. |