CN101985736B - Multistation gradient film coating equipment - Google Patents
Multistation gradient film coating equipment Download PDFInfo
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- CN101985736B CN101985736B CN2010105335323A CN201010533532A CN101985736B CN 101985736 B CN101985736 B CN 101985736B CN 2010105335323 A CN2010105335323 A CN 2010105335323A CN 201010533532 A CN201010533532 A CN 201010533532A CN 101985736 B CN101985736 B CN 101985736B
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Abstract
The invention belongs to the field of vacuum coating equipment, in particular relating to a multistation gradient film coating equipment, which comprises a driving module, a base plate (8), a workpiece disc (7), a mask mechanism (10) and a balancing mechanism (11), wherein the workpiece disc (7) is arranged on the base plate (8), can rotate around the axis thereof, and has a constant gap with the base plate (8); the workpiece (7) is fixedly provided with a coating station; a coating hole is arranged on the position of the base plate (8) corresponding to the coating station; the mask mechanism (10) is fixedly arranged between the coating station and the coating hole; the balancing mechanism (11) is fixedly arranged on the base plate (8) at the lower part of the coating hole; and the working end of the driving module is fixedly connected with the workpiece disc (7). The coating equipment of the invention can realize steady and accurate rotation transformation for stations (chips to be coated), and improve the product quantity coated by single vacuumization, thus improving the production efficiency of the whole system.
Description
Technical field
the invention belongs to the vacuum coating film equipment field, relate in particular to a kind of multi-work-station film with gradually variable plating equipment.
Background technology
Advantages such as
VD sheet is a kind of energy beam splitter, and optical signal is played the decay regulating effect, has simple in structurely, uses wavelength region wide, and neutral degree is good are used widely in all kinds of opticinstruments and Experiments of Optics.
for realizing specific energy decrement effect, the optical density(OD) of VD sheet is with change in location, and promptly thicknesses of layers is with change in location.VD sheet commonly used divides according to the version of optical density(OD) with the position, can be divided into six kinds usually: circular graded density sheet, bar shaped graded density sheet, circular ladder density sheet, bar shaped ladder density sheet, " buphthalmos " density sheet and anti-" buphthalmos " density sheet.Referring to Fig. 1-a, Fig. 1-b, Fig. 1-c, Fig. 1-d, shown in Fig. 1-e, wherein, Fig. 1-a is circular graded density sheet; Fig. 1-b is circular ladder density sheet; Fig. 1-c is " buphthalmos " density sheet; Fig. 1-d is anti-" buphthalmos " density sheet; Fig. 1-f is a bar shaped ladder density sheet.
thicknesses of layers that vacuum plating was coated with all is even or uniformly approaching usually; And the VD sheet will painstakingly be realized the film of non-homogeneous (gradual change) under the condition of even plated film, and this just need just can add realization by special mask mechanism.Dissimilar VD sheets need use different mask mechanisms, and a cover mask mechanism can only process at a time that to be coated with a substrate be circular VD sheet, and it is also more limited that the single of bar shaped VD sheet is coated with quantity.The process of being coated with of VD sheet can be divided into three: preparing before the plated film, vacuumize and be coated with, in whole coating process, vacuumize holding time, is very low so take out the production efficiency that vacuum only is coated with the mode of production of a slice VD sheet.The technical scheme that realizes: many cover mask mechanisms and coating source are installed in Vakuumkammer, after having plated at every turn, the broken empty substrate of changing.Such scheme adopts the complexities that mask mechanism certainly will increase coating system of overlapping more, and in addition, the relative substrate of mask mechanism is many greatly, and this makes the space availability ratio of Vakuumkammer reduce.
Summary of the invention
the present invention be intended to overcome the weak point of prior art and a kind of steadily rotation transformation accurately of station (substrate to be plated) that can realize be provided; Improve single and vacuumize the product amount that is coated with, and then the multi-work-station film with gradually variable plating equipment of lifting system production efficient.
for achieving the above object, the present invention is achieved in that multi-work-station film with gradually variable plating equipment, and it comprises driver module, substrate, workpiece plate, mask mechanism and even mechanism; Said workpiece plate is positioned on the substrate; Said workpiece plate can the rotation around its axle center, and the interval of itself and substrate is constant; On said workpiece plate, be fixed with the plated film station; Corresponding said plated film station position is provided with plating film hole on said substrate; Between said plated film station and plating film hole, be fixed with mask mechanism, to realize that film with gradually variable is coated with; Bottom at said plating film hole is fixed with even mechanism on substrate, to solve the uneven problem of coating materials deposition; The working end and the workpiece plate of said driver module are fixedly connected.
as a kind of preferred version, driver module according to the invention comprises motor, resilient coupling and workpiece plate adaptor; The output shaft of said motor is fixedly connected through resilient coupling and workpiece plate adaptor.
as another kind of preferred version, the present invention has the V-type circular groove on said substrate; Corresponding said V-type circular groove position has Λ type circular groove on said workpiece plate; In said V-type circular groove and Λ type circular groove, be provided with ball.
further, workpiece plate according to the invention, mask mechanism and even mechanism have common symmetry axle center.
are accurate for guaranteeing that film with gradually variable is coated with the position, station accurate positioning when necessarily requiring the station conversion, and this proposes very high requirement to the station transformation system.For example be coated with circular graded density sheet and just require substrate, mask mechanism, the even three of mechanism to have the common axle center, the axle center deviation must not be above 0.1 millimeter.Preparation multi-disc substrate to be plated in the Vakuumkammer of the present invention only adopts a cover mask mechanism and a coating source, increases by a cover substrate inversion mechanism again; Substrate to be plated can in Vakuumkammer, be realized changing automatically; Rather than broken empty artificial the replacing, it has only a cover mask mechanism, and coating system is simple relatively; And substrate is arranged by its physical size, and the space availability ratio of Vakuumkammer is higher.
compared with prior art; The present invention has following characteristics at technological layer: (1) mask mechanism, even mechanism and workpiece plate all are installed on the substrate; The three has a common benchmark, can guarantee that workpiece plate, mask mechanism, even mechanism have common symmetry axle center.
(2) V-shaped groove adds the workpiece plate supporting structure of ball, makes workpiece plate keep axis of rotation constant according to deadweight.
(3) workpiece plate adopts resilient coupling to the connection of drive-motor.Resilient coupling can be eliminated the driving rotating shaft and rock the radially disturbance to workpiece plate that is brought.
Description of drawings
are described further the present invention below in conjunction with accompanying drawing and embodiment.Protection scope of the present invention not only is confined to the statement of following content.
Fig. 1-a is circular graded density sheet synoptic diagram.
Fig. 1-b is circular ladder density sheet synoptic diagram.
Fig. 1-c is " buphthalmos " density sheet synoptic diagram.
Fig. 1-d is anti-" buphthalmos " density sheet synoptic diagram.
Fig. 1-e is a bar shaped graded density sheet synoptic diagram.
Fig. 1-f is a bar shaped ladder density sheet synoptic diagram.
Fig. 2 is an one-piece construction synoptic diagram of the present invention.
Fig. 3 is a workpiece plate structural representation of the present invention.
Among
figure: 1 is motor; 2 is shaft coupling; 3 are rotating shaft; 4 is bearing; 5 is resilient coupling; 6 is the workpiece plate interconnecting device; 7 is workpiece plate; 8 is substrate; 9 is ball; 10 is mask mechanism; 11 is even mechanism; 12 is plating film hole; 13 is the plated film station.
Embodiment
referring to Fig. 2 and shown in Figure 3, multi-work-station film with gradually variable plating equipment, and it comprises driver module, substrate 8, workpiece plate 7, mask mechanism 10 and even mechanism 11; Said workpiece plate 7 is positioned on the substrate 8; Said workpiece plate 7 can the rotation around its axle center, and the interval of itself and substrate 8 is constant; On said workpiece plate 7, be fixed with plated film station 13; Corresponding said plated film station position is provided with plating film hole on said substrate 8; Between said plated film station and plating film hole 12, be fixed with mask mechanism 10; Bottom at said plating film hole 12 is fixed with even mechanism 11 on substrate 8; The working end of said driver module and workpiece plate 7 are fixedly connected.Driver module according to the invention comprises motor 1, resilient coupling 5 and workpiece plate adaptor 6; The output shaft of said motor 1 is fixedly connected through resilient coupling 5 and workpiece plate adaptor 6.The present invention has the V-type circular groove on said substrate 8; Corresponding said V-type circular groove position has Λ type circular groove on said workpiece plate 7; In said V-type circular groove and Λ type circular groove, be provided with ball 9; Said workpiece plate 7, mask mechanism 10 and even mechanism 11 have common symmetry axle center.
the present invention adopts the benchmark of a substrate as the workpiece plate rotation transformation, on substrate and workpiece plate, processes the V-arrangement circular groove that is complementary.Substrate is following, and the V-arrangement circular groove upwards; Workpiece plate is last, and the V-arrangement circular groove is downward.In circular groove, put into an amount of ball so that the supporting workpiece dish makes between substrate and the workpiece plate and leaves certain interval, workpiece plate and then can rotate freely by ball.Because the groove width of optional position is all the same with groove depth on the workpiece plate; The groove width of optional position is also all the same with groove depth on the substrate; And passive ball also all is equal size, is fixed so can guarantee on the workpiece plate station arbitrarily to the distance of substrate.In addition, because the constructional feature of V-shaped groove and the deadweight of workpiece plate make the axis of rotation of workpiece plate also can keep constant.
mask mechanism, even mechanism and workpiece plate all are installed on the substrate, and the three has a common benchmark, can guarantee that workpiece plate, mask mechanism, even mechanism have common symmetry axle center.
workpiece plate adopts resilient coupling to the connection of drive-motor.Resilient coupling can be eliminated the driving rotating shaft and rock the radially disturbance to workpiece plate that is brought.
are as shown in Figure 2, and workpiece plate relies on own wt, under the support of ball, keep the constant gap with substrate.V-shaped groove has the effect of self-aligning, makes workpiece plate have the constant axis of rotation.Resilient coupling can absorb the swivel disturbance of the axis of rotation, makes workpiece plate in the engineering of conversion plated film station, can not receive the radial disturbance and keeps the axle center constant, thereby guaranteed station conversion locating accuracy.
are as shown in Figure 3, and the unique plating film hole on the substrate is used to make coating materials to arrive current plated film from following through substrate, effectively block and other station formed, and avoid the mistake plating.Station 0 on the workpiece plate to station N can through dragging of motor realize station to be plated by turns, it all is under the condition of vacuum, to accomplish that all stations are changed, thereby has realized single to vacuumize and be coated with the multi-disc film product.
The above is merely the preferred embodiments of the present invention
, is not limited to the present invention, and for a person skilled in the art, the present invention can have various changes and variation.All within spirit of the present invention and principle, any modification of being done, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (4)
1. multi-work-station film with gradually variable plating equipment is characterized in that, comprises driver module, substrate (8), workpiece plate (7), mask mechanism (10) and even mechanism (11); Said workpiece plate (7) is positioned on the substrate (8); Said workpiece plate (7) can the rotation around its axle center, and the interval of itself and substrate (8) is constant; On said workpiece plate (7), be fixed with the plated film station; Go up corresponding said plated film station position at said substrate (8) and be provided with a plating film hole; Between said plated film station and plating film hole, be fixed with mask mechanism (10); Bottom at said plating film hole is fixed with even mechanism (11) on substrate (8); The working end of said driver module and workpiece plate (7) are fixedly connected.
2. multi-work-station film with gradually variable plating equipment according to claim 1 is characterized in that: said driver module comprises motor (1), resilient coupling (5) and workpiece plate adaptor (6); The output shaft of said motor (1) is fixedly connected through resilient coupling (5) and workpiece plate adaptor (6).
3. multi-work-station film with gradually variable plating equipment according to claim 2 is characterized in that: on said substrate (8), have the V-type circular groove; Go up corresponding said V-type circular groove position at said workpiece plate (7) and have Λ type circular groove; In said V-type circular groove and Λ type circular groove, be provided with ball (9).
4. multi-work-station film with gradually variable plating equipment according to claim 2 is characterized in that: said workpiece plate (7), mask mechanism (10) and even mechanism (11) have common symmetry axle center.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105335323A CN101985736B (en) | 2010-11-06 | 2010-11-06 | Multistation gradient film coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105335323A CN101985736B (en) | 2010-11-06 | 2010-11-06 | Multistation gradient film coating equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101985736A CN101985736A (en) | 2011-03-16 |
| CN101985736B true CN101985736B (en) | 2012-02-29 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010105335323A Expired - Fee Related CN101985736B (en) | 2010-11-06 | 2010-11-06 | Multistation gradient film coating equipment |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106435471A (en) * | 2016-09-30 | 2017-02-22 | 东莞市联洲知识产权运营管理有限公司 | Film coating mechanism capable of coating one plate with two films |
| CN107916409B (en) * | 2017-11-27 | 2019-11-26 | 深圳市华星光电半导体显示技术有限公司 | A kind of part switching device and deposition system |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US5329435A (en) * | 1993-01-28 | 1994-07-12 | Tailored Lighting Company, Inc. | Apparatus for producing light distributions |
| CN2791665Y (en) * | 2005-04-22 | 2006-06-28 | 沈阳汇博光学技术有限公司 | Apparatus for processing density-variabl sheet |
| US20080316628A1 (en) * | 2007-06-25 | 2008-12-25 | Nisca Corporation | Density filter, method of forming the density filter and apparatus thereof |
| CN201327540Y (en) * | 2008-11-26 | 2009-10-14 | 沈阳汇博光学技术有限公司 | Density filter wheel set |
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| CN101985736A (en) | 2011-03-16 |
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Granted publication date: 20120229 Termination date: 20121106 |