WO2019093039A1 - Capteur de pression - Google Patents

Capteur de pression Download PDF

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Publication number
WO2019093039A1
WO2019093039A1 PCT/JP2018/037314 JP2018037314W WO2019093039A1 WO 2019093039 A1 WO2019093039 A1 WO 2019093039A1 JP 2018037314 W JP2018037314 W JP 2018037314W WO 2019093039 A1 WO2019093039 A1 WO 2019093039A1
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WO
WIPO (PCT)
Prior art keywords
pressure
pressure sensor
cable
sensor according
inner cap
Prior art date
Application number
PCT/JP2018/037314
Other languages
English (en)
Japanese (ja)
Inventor
和哉 滝本
Original Assignee
株式会社鷺宮製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社鷺宮製作所 filed Critical 株式会社鷺宮製作所
Priority to CN201880068617.3A priority Critical patent/CN111279170A/zh
Publication of WO2019093039A1 publication Critical patent/WO2019093039A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings

Definitions

  • the present invention relates to a pressure sensor, and more particularly to a pressure sensor requiring waterproofness and air tightness.
  • pressure sensors for fluid pressure detection pressure sensors that are required to be waterproof and airtight, such as refrigerant pressure sensors for refrigeration, refrigeration, air conditioning equipment, etc., are conventionally known.
  • an oil filled pressure sensor 800 shown in FIG. 8 and a capacitance detection pressure sensor 900 shown in FIG. 9 are known.
  • these conventional pressure sensors 800 and 900 will be described.
  • the conventional oil filled pressure sensor 800 includes a pressure introducing unit 810, a pressure detecting unit 820, and a signal transmitting unit 830.
  • the pressure introducing unit 810 is connected to a pipe, and a joint 811 for introducing a fluid such as a refrigerant to be pressure-detected, a lower cover 812 connected to the joint 811 and having a bowl shape, the joint 811, the lower cover 812, and And a pressure chamber 813 partitioned by a diaphragm 823.
  • the pressure detection unit 820 mainly includes a semiconductor sensor chip 821, a liquid sealing chamber 822, a diaphragm 823, a housing 824 made of metal, and the like.
  • the pressure of a fluid such as a refrigerant introduced from the piping into the pressure chamber 813 via the joint 811 is detected by the semiconductor sensor chip 821 via the diaphragm 823 and the liquid sealing chamber 822.
  • the detailed description of the pressure detection unit 820 is omitted because it is well known to those skilled in the art.
  • the signal transmission unit 830 insulates the connection substrate 831 electrically connected to the semiconductor sensor chip 821, the connection material and contact pins 832 connected to the connection substrate 831, and the connection substrate 831 and the contact pins 832.
  • a main body 833 to be held a spacer 834 for securing insulation between the pressure detection portion 820 and the connection substrate 831, a case 835 for fixing the outer circumference of the pressure detection portion 820 and the main body 833, and a portion between the main body 833 and the case 835
  • an atmosphere-side O-ring 836 for ensuring waterproofness.
  • the conventional capacitance detection type pressure sensor 900 includes a pressure introducing unit 910, a pressure detecting unit 920, and a signal transmitting unit 930.
  • the pressure introducing unit 910 includes a protective cover 911, an O-ring 912 that seals the pressure of a fluid such as a refrigerant, and a pressure chamber 913.
  • the protective cover 911 is integrally formed so as to have the joint portion 911a, the pressure chamber concave portion 911b, the case portion 911c, and the caulking portion 911d, but is not limited thereto, and the joint portion 911a, the pressure chamber concave portion 911b, The case portions 911c may be formed separately or in any combination, and connected by an adhesive or welding.
  • the pressure chamber 913 is formed between a sensor element 921 described later and a pressure chamber recess 911 b of the protective cover 911.
  • the pressure detection unit 920 includes a sensor element 921 of a capacitance detection type, and a spacer 922 formed of an insulating material and disposed in a case portion 911 c of the protective cover 911.
  • the sensor element 921 reads the pressure of a fluid such as a refrigerant introduced into the pressure chamber 913 as a change in capacitance between the electrodes due to the fluctuation of the electrodes, and sends it out as a pressure signal.
  • the sensor element 921 mainly includes two electrodes, an insulator disposed between the two electrodes, a lead wire connected to the two electrodes, an adhesive, a member for securing a gap between the electrodes, and the like. However, the detailed description is omitted as it is well known to those skilled in the art.
  • the signal transmission unit 930 insulates and holds the connection substrate 931 electrically connected to the sensor element 921, the connection material and contact pins 932 connected to the connection substrate 931, and the connection substrate 931 and the contact pins 932. And an atmosphere-side O-ring 936 which is sandwiched between the body 933 and the case portion 911 c of the protective cover 911 to ensure waterproofness.
  • atmosphere-side O-rings 836, 936 or other packings have been used as described above to achieve waterproofness and tightness.
  • the material of O-ring and packing shrinks and expands by repeating heat shock in water and freezing / thawing, a problem occurs that a gap occurs and moisture intrudes into the inside and a problem occurs. was there.
  • Patent Document 1 is mounted from the joint member side
  • the invention of a pressure sensor which comprises a cover member which is open at one end and whose proximal end on the other side abuts on the joint member, and the inside of the cover member is filled with a sealing adhesive.
  • the present invention uses a sealing adhesive to improve waterproofness and airtightness without using an O-ring or packing, and further uses the amount of this sealing adhesive to reduce the number of operation steps.
  • An object of the present invention is to provide a pressure sensor that can be reduced.
  • the pressure sensor of the present invention is the flow path where fluid is introduced from piping, the joint part in which a pressure chamber is formed, and the pressure of the fluid introduced into the pressure chamber.
  • a pressure detection unit to be detected a case unit having a cylindrical shape disposed on the side of the pressure detection unit facing the pressure chamber, and a pressure signal to the outside from the pressure detection unit.
  • a pressure sensor comprising: a signal transmission unit for sending a signal to the outside by a conductive member including a cable to be sent out, the pressure sensor further comprising an inner cap disposed inside the case, the inner cap being on the pressure detection unit side And at least one opening provided between the internal cavity and the exterior, wherein the conductive member is disposed in the internal cavity, The cable is disposed through the two openings, and a sealing adhesive is enclosed around the cable at the opening and between the outer periphery of the inner cap and the inner periphery of the case. It is characterized by
  • the inner cap may be fixed by caulking the case portion, and a sealing adhesive may be enclosed all around the caulked portion.
  • the signal transmission unit may include a connection substrate that connects the pressure detection unit and the cable.
  • the cable and the connection substrate may be connected by soldering.
  • the signal transmission unit may further include an electrical connector for connecting the cable and the connection substrate.
  • the electrical connector may be integrally fixed to the inner cap.
  • joint portion and the case portion may be integrally formed.
  • connection substrate may be protected by resin coating.
  • the pressure detection unit may be an oil filled type.
  • the pressure detection unit may be of an electrostatic capacitance detection type.
  • the sealing adhesive is used to enhance the waterproofness and airtightness without using the O-ring and the packing, and the amount of the sealing adhesive used is reduced. Workability can be improved.
  • FIG. 1A is a longitudinal sectional view showing an oil-filled pressure sensor 100 as a pressure sensor according to a first embodiment of the present invention
  • FIG. 1B is a top view of the pressure sensor 100 shown in FIG. 1A.
  • the pressure sensor 100 includes a pressure introducing unit 110, a pressure detecting unit 120, and a signal transmitting unit 130.
  • the pressure introducing unit 110 is connected to a pipe, introduces a fluid such as a refrigerant whose pressure is to be detected, is connected to a joint 111 formed of a metal material such as brass, for example, and the joint 111 and has a bowl shape.
  • the lower cover 112 is made of a metal material such as stainless steel, and the pressure chamber 113 is divided by the joint 111, the lower cover 112, and a diaphragm 123 described later.
  • the joint portion includes the joint 111 and the lower cover 112.
  • the pressure detection unit 120 mainly includes a semiconductor sensor chip 121, a liquid sealing chamber 122 filled with oil or the like, a diaphragm 123 that divides the pressure chamber 113 described above, a housing 124 made of metal, and the like.
  • the pressure detection unit 120 detects the pressure of a fluid such as a refrigerant introduced into the pressure chamber 113 with the semiconductor sensor chip 121 disposed in the liquid sealing chamber 122 filled with oil or the like via the diaphragm 123.
  • the detailed operation of the pressure detection unit 120 of the oil-filled pressure sensor 100 is well known to those skilled in the art, and for example, the description of Patent Document 1 etc. is referred to and the detailed description is omitted.
  • the signal transmission unit 130 includes a connection substrate 131, electrical connectors 132 and 132A, a cable 133, a spacer 134, a case 135, an inner cap 136, and a sealing adhesive 137.
  • connection substrate 131 is electrically connected to the semiconductor sensor chip 121 of the pressure detection unit 120 through lead pins and wire bonding, and sends a pressure detection signal to the outside through the electrical connectors 132 and 132A and the cable 133.
  • the connection sensor 131 may be built in the semiconductor sensor chip 121 without preparing the connection substrate 131 in particular.
  • the electrical connectors 132 and 132A are composed of a receptacle side electrical connector 132 mounted on the connection substrate 131, and a plug side electrical connector 132A connected to the cable 133 and removably disposed in the receptacle side electrical connector 132.
  • the cable 133 is drawn out from an opening 136 b of an inner cap 136 described later. As shown in FIG. 1B, three cables (VCC, GND, VOUT) are pulled out of the cable 133.
  • the spacer 134 is formed of, for example, an insulating material such as a resin, and is disposed between the pressure detection unit 120 and the connection substrate 131 to ensure insulation of the connection substrate 131 and the like.
  • the case 135 has a cylindrical shape and is disposed on the side of the pressure detection unit 120 facing the pressure chamber 113.
  • a metal material is used, and it is desirable to be welded to the metal housing 124, and in particular, brass, copper, iron nickel having good adhesiveness with the sealing adhesive 137 described later is desirable. Furthermore, a projection may be provided on the welding portion in order to ensure bonding.
  • the case 135 constitutes a case portion.
  • the inner cap 136 is disposed inside the case 135, and is formed of, for example, an insulating material such as a resin.
  • the inner cap 136 is formed with an internal cavity 136a formed on the pressure detection unit 120 side and at least one opening 136b provided between the internal cavity 136a and the outside.
  • Conducting members such as the cable 133 of the signal delivery unit 130 and the electrical connectors 132 and 132A are disposed in the internal cavity 136a, and the cable 133 of the signal delivery unit 130 is disposed to pass through at least one opening 136b.
  • one opening 136 b for drawing out the three cables 133 is formed in the inner cap 136, but the invention is not limited thereto.
  • a plurality of openings 136b may be provided in combination.
  • the inner cap 136 is fixed to the case 135 by caulking. However, the present invention is not limited to this, and the inner cap 136 may be fixed by another method.
  • the sealing adhesive 137 is sealed around the cable 133 of the opening 136 b of the inner cap 136 and between the outer circumference of the inner cap 136 and the inner circumference of the case 135 as shown in FIG. 1B. As shown in FIG. 1A, if the sealing adhesive 137 is sealed over the entire circumference between the outer circumference of the inner cap 136 and the inner circumference of the caulked portion of the case 135, high waterproofness is achieved. The amount of sealing adhesive 137 used can be reduced while maintaining the properties, and the cost can be reduced. Moreover, as a material of the sealing adhesive 137, a silicone type, an epoxy type, a urethane type, a fluorine type, and an acrylic type adhesive can be used.
  • the joint 111, the lower cover 112, the housing 124 of the pressure detection unit 120, and the case 135, which are separate members, are prepared as parts constituting the exterior, and these are integrated by welding or the like.
  • a protective cover 511 or the like having all of these shapes and integrally molded of a metal material such as brass. Good.
  • the sealing adhesive 137 is used to enhance waterproofness and airtightness without using an O-ring or packing, and further, By using the inner cap 136, the sealing adhesive 137 can be reduced while maintaining high waterproofness and airtightness, and the workability can be improved.
  • FIG. 2 is a longitudinal sectional view showing an oil filled pressure sensor 200 as a pressure sensor according to a second embodiment of the present invention.
  • the pressure sensor 200 is different from the pressure sensor 100 shown in FIGS. 1A and 1B in that the solder connection portion 233a of the cable 233 is soldered to the connection substrate 231 of the signal transmission portion 230. Point is the same as the pressure sensor 100.
  • the same components are denoted by the same reference symbols and the description thereof is omitted.
  • pressure sensor 200 of a 2nd embodiment of the present invention the same operation effect as pressure sensor 100 of a 1st embodiment can be produced. Furthermore, the electrical connectors 132, 132A can be removed, and the cost can be reduced.
  • FIG. 3 is a longitudinal sectional view showing an oil filled pressure sensor 300 as a pressure sensor according to a third embodiment of the present invention.
  • the pressure sensor 300 differs from the pressure sensor 100 shown in FIGS. 1A and 1B in that the plug side electrical connector 332A is integrally fixed to the inner cap 336 of the signal transmission unit 330,
  • the points are the same as the pressure sensor 100.
  • the same components are denoted by the same reference symbols and the description thereof is omitted.
  • pressure sensor 300 of a 3rd embodiment of the present invention the same operation effect as pressure sensor 100 of a 1st embodiment can be produced. Furthermore, the inner cap 336 and the plug side electrical connector 332A can be attached at the same time, and the number of operation steps can be reduced.
  • FIG. 4 is a longitudinal sectional view showing an oil filled pressure sensor 400 as a pressure sensor according to a fourth embodiment of the present invention.
  • the pressure sensor 400 has a resin coating 438 applied to the connection substrate 131 in comparison with the pressure sensor 300 shown in FIG. 3 to prevent the insulation decrease due to condensation, and the pressure detection unit 120.
  • the resin coating 439 is also applied to the housing 124 of the second embodiment to increase the electrostatic resistance of the semiconductor sensor chip 121, and the other points are the same as the pressure sensor 300.
  • the same components are denoted by the same reference symbols and the description thereof is omitted.
  • the resin coating 438 can prevent the insulation drop due to condensation, and the resin coating 439 can increase the electrostatic resistance of the semiconductor sensor chip 121.
  • FIG. 5 is a longitudinal sectional view showing an oil filled pressure sensor 500 as a pressure sensor according to a fifth embodiment of the present invention.
  • the pressure sensor 500 has a joint portion 511a, instead of the joint 111, the lower cover 112, the housing 124 of the pressure detection portion 120, and the case 135, as compared with the pressure sensor 100 shown in FIGS. 1A and 1B.
  • the pressure chamber recess 511 b is provided with a protective cover 511 which is integrally formed of, for example, a metal material such as brass so as to have a pressure chamber recess 511 b, a case portion 511 c, and a caulking portion 511 d. , And the other points are the same as the pressure sensor 100.
  • O-ring 512 is used for sealing a refrigerant or the like, conventional problems such as underwater heat shock and repeated freezing / thawing do not occur.
  • the same components are denoted by the same reference symbols and the description thereof is omitted.
  • the pressure sensor 500 of the 5th Embodiment of this invention there can exist an effect similar to the pressure sensor 100 of 1st Embodiment. Furthermore, since the protective cover 511 constituting the exterior of the pressure sensor 500 can be made as one component, the number of operation steps can be reduced, and the airtightness waterproofness is also improved.
  • FIG. 6 is a longitudinal sectional view showing a capacitance detection type pressure sensor 600 as a pressure sensor according to a sixth embodiment of the present invention.
  • the pressure sensor 600 includes a pressure introducing unit 610, a pressure detecting unit 620, and a signal transmitting unit 630.
  • the pressure sensor 600 is different from the pressure sensor 500 shown in FIG. 5 in that a pressure detection unit 620 of capacitance detection type is used instead of the pressure detection unit 120 of oil filled type, The point is substantially the same as that of the pressure sensor 500.
  • the same components are denoted by the same reference symbols and the description thereof is omitted.
  • the capacitance detection type pressure detection unit 620 is formed of a capacitance detection type sensor element 621 and an insulating material, and is an insulating spacer inserted in the case portion 611 c of the protective cover 611 to hold the O-ring 612. And 622.
  • the sensor element 621 reads the pressure of a fluid such as a refrigerant introduced into the pressure chamber 613 as a change in capacitance between the electrodes due to the fluctuation of the electrodes, and sends it out as a pressure signal.
  • the sensor element 621 mainly includes two electrodes, an insulator disposed between the two electrodes, a lead wire connected to the two electrodes, an adhesive, a member for securing a gap between the electrodes, and the like.
  • the electrostatic capacitance detection type pressure sensor 600 of the sixth embodiment of the present invention As described above, according to the electrostatic capacitance detection type pressure sensor 600 of the sixth embodiment of the present invention, the same function and effect as those of the oil filled pressure sensor 100 of the first embodiment can be obtained.
  • FIG. 7 is a longitudinal sectional view showing an oil filled pressure sensor 700 as a pressure sensor according to a seventh embodiment of the present invention.
  • pressure sensor 700 has a shape that covers lower cover 112, pressure detection unit 120, and inner cap 136, instead of case 135, as compared with pressure sensor 200 shown in FIG. Is the same as the pressure sensor 200 except for the provision of The same components are denoted by the same reference symbols and the description thereof is omitted.
  • the caulking plate 735 is formed of a metal material or the like in a substantially cylindrical shape, and a flange portion 735b bent to the inner peripheral side is formed at an end portion on the pressure introducing portion 110 side.
  • the caulking plate 735 is disposed such that the flange portion 735b contacts the lower cover 112, and is fixed to the lower cover 112 by, for example, welding or press fitting. Ru.
  • a caulking portion 735a for fixing the inner cap 136 by caulking is formed on the side of the caulking plate 735 opposite to the flange portion 735b.
  • the sealing adhesive 137 is sealed at the same position as the pressure sensor 200 shown in FIG. 2, but further, the outer periphery of the lower cover 112 and the inner periphery of the flange portion 735 b 737 may be enclosed in between.
  • the material of the sealing adhesive 737 may be the same as or different from that of the sealing adhesive 137.
  • the same function and effect as those of the pressure sensor 200 of the second embodiment can be obtained. Furthermore, by providing the lower cover 112, the pressure detection unit 120, and the caulking plate 735 having a shape covering the periphery of the inner cap 136, the waterproof performance can be enhanced without increasing the number of operation steps.
  • the sealing adhesive is used to improve waterproofness and airtightness without using the O-ring and the packing, and further by using the inner cap,
  • the sealing adhesive can be reduced while maintaining high waterproofness and airtightness, and the workability can be improved.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

Afin d'utiliser un adhésif d'étanchéité pour augmenter les propriétés d'imperméabilisation et l'étanchéité à l'air sans utiliser de joint torique ou de garniture d'étanchéité, et afin en outre de réduire le nombre de processus, le but de la présente invention est de fournir un capteur de pression (100) permettant de réduire la quantité d'adhésif d'étanchéité utilisé. Le capteur de pression (100) est pourvu d'un capuchon interne (136) situé à l'intérieur d'un boîtier (135). Le capuchon interne (136) comporte une cavité intérieure (136a) formée sur un côté détecteur de pression (120), et au moins une ouverture (136b) prévue entre la cavité intérieure (136a) et l'extérieur. Une unité de distribution de signal (130) est située dans la cavité intérieure (136a), un câble (133) est situé de manière à passer à travers l'ouverture ou les ouvertures (136b), et un adhésif d'étanchéité (137) est scellé dans l'ouverture (136b) autour du câble (133) et entre la périphérie externe du capuchon interne (136) et la périphérie interne du boîtier (135).
PCT/JP2018/037314 2017-11-13 2018-10-05 Capteur de pression WO2019093039A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201880068617.3A CN111279170A (zh) 2017-11-13 2018-10-05 压力传感器

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017218309A JP6793624B2 (ja) 2017-11-13 2017-11-13 圧力センサ
JP2017-218309 2017-11-13

Publications (1)

Publication Number Publication Date
WO2019093039A1 true WO2019093039A1 (fr) 2019-05-16

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ID=66438297

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2018/037314 WO2019093039A1 (fr) 2017-11-13 2018-10-05 Capteur de pression

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JP (1) JP6793624B2 (fr)
CN (1) CN111279170A (fr)
WO (1) WO2019093039A1 (fr)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002333377A (ja) * 2001-05-07 2002-11-22 Fuji Koki Corp 圧力センサ
JP2004012142A (ja) * 2002-06-03 2004-01-15 Omron Corp 圧力センサの組立構造およびその組立方法
JP2004205514A (ja) * 2002-12-20 2004-07-22 Texas Instruments Inc 気密圧力変換器
JP2004264093A (ja) * 2003-02-28 2004-09-24 Nippon Seiki Co Ltd 圧力センサ
JP2005188958A (ja) * 2003-12-24 2005-07-14 Denso Corp 圧力センサ
JP2006145468A (ja) * 2004-11-24 2006-06-08 Nagano Keiki Co Ltd センサのシール構造及びセンサのシール方法
US20160146689A1 (en) * 2013-07-05 2016-05-26 Inficon Gmbh Sensor unit

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7270010B2 (en) * 2004-08-27 2007-09-18 Ashcroft-Nagano, Inc. System and method for pressure measurement
KR101483279B1 (ko) * 2012-06-11 2015-01-14 가부시키가이샤 사기노미야세이사쿠쇼 압력 센서 및 압력 센서의 제조 방법
KR101483280B1 (ko) * 2012-06-13 2015-01-14 가부시키가이샤 사기노미야세이사쿠쇼 압력 센서

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002333377A (ja) * 2001-05-07 2002-11-22 Fuji Koki Corp 圧力センサ
JP2004012142A (ja) * 2002-06-03 2004-01-15 Omron Corp 圧力センサの組立構造およびその組立方法
JP2004205514A (ja) * 2002-12-20 2004-07-22 Texas Instruments Inc 気密圧力変換器
JP2004264093A (ja) * 2003-02-28 2004-09-24 Nippon Seiki Co Ltd 圧力センサ
JP2005188958A (ja) * 2003-12-24 2005-07-14 Denso Corp 圧力センサ
JP2006145468A (ja) * 2004-11-24 2006-06-08 Nagano Keiki Co Ltd センサのシール構造及びセンサのシール方法
US20160146689A1 (en) * 2013-07-05 2016-05-26 Inficon Gmbh Sensor unit

Also Published As

Publication number Publication date
CN111279170A (zh) 2020-06-12
JP2019090651A (ja) 2019-06-13
JP6793624B2 (ja) 2020-12-02

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