WO2019049250A1 - Dispositif de spectrométrie - Google Patents

Dispositif de spectrométrie Download PDF

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Publication number
WO2019049250A1
WO2019049250A1 PCT/JP2017/032204 JP2017032204W WO2019049250A1 WO 2019049250 A1 WO2019049250 A1 WO 2019049250A1 JP 2017032204 W JP2017032204 W JP 2017032204W WO 2019049250 A1 WO2019049250 A1 WO 2019049250A1
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Prior art keywords
unit
probe light
beam diameter
measurement
detection
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PCT/JP2017/032204
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English (en)
Japanese (ja)
Inventor
茉佑子 高井
啓太 山口
Original Assignee
株式会社日立ハイテクノロジーズ
茉佑子 高井
啓太 山口
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Application filed by 株式会社日立ハイテクノロジーズ, 茉佑子 高井, 啓太 山口 filed Critical 株式会社日立ハイテクノロジーズ
Priority to PCT/JP2017/032204 priority Critical patent/WO2019049250A1/fr
Priority to JP2019540191A priority patent/JP6782849B2/ja
Publication of WO2019049250A1 publication Critical patent/WO2019049250A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation

Definitions

  • the present invention relates to a spectrometer which reduces or eliminates the influence of scattering of an object to be measured.
  • Patent Document 1 states that "a sample inspection apparatus capable of suppressing a decrease in detection accuracy due to scattering of terahertz waves is provided” as a problem, and a solution means "a sample inspection apparatus according to the present invention is a terahertz wave
  • a transport unit configured to transport the sample in the in-plane direction of the transport surface, the transport unit configured to transport the specimen in the in-plane direction of the transport surface;
  • An irradiation direction changing unit that changes the irradiation direction of the terahertz wave that is emitted from the generation unit and is irradiated to the sample placed on the transport surface, and the sample placed on the transport surface is irradiated or transmitted
  • a terahertz wave detection unit that detects the reflected terahertz wave, and the irradiation direction changing unit changes the irradiation direction by changing the position of the terahertz wave generation unit.
  • An object of the present invention is to provide a technique for reducing or eliminating the influence of scattering by particles constituting an object to be measured in spectrometry.
  • the above problems include, for example, an electromagnetic wave irradiation unit that emits an electromagnetic wave, a light reception unit that receives an electromagnetic wave, a probe light irradiation unit that emits a probe light, and a probe light detection unit that detects the probe light and outputs a detection signal.
  • the arithmetic unit for calculating the detection intensity of the electromagnetic wave from the detection signal, and the beam diameter control unit for adjusting the beam diameter of the probe light the electromagnetic wave irradiation unit irradiates the electromagnetic wave to the object to be measured, and the light reception
  • the unit receives the electromagnetic wave emitted to the object to be measured
  • the probe light irradiating unit irradiates the probe light to the light receiving unit
  • the probe light detecting unit irradiates the probe light irradiated to the light receiving unit.
  • the detection unit outputs a detection signal
  • the calculation unit calculates the detection intensity based on the detection signal and the beam diameter of the probe light, and the beam is calculated based on the calculated detection intensity. Adjusting portion is solved by the spectral measurement device and controls the beam diameter of the probe light.
  • FIG. 2 is a schematic view showing an example of a beam diameter adjustment unit 20.
  • A First adjustment flow of probe light beam diameter in the first embodiment.
  • B Detailed flow of the first adjustment flow S2 of the probe light beam diameter in the first embodiment.
  • FIG. 6 is a diagram showing the relationship between a probe light beam diameter and a calculated value in Embodiment 1. List of known parameters used to adjust probe light beam diameter
  • A Second adjustment flow of probe light beam diameter in the first embodiment.
  • FIG. 14 is a configuration diagram showing a case where the position of the detection nonlinear optical crystal 102 is controlled in the second embodiment of the spectrometry device.
  • FIG. 14 is a block diagram of an image sensor in a fourth embodiment.
  • FIG. 1 is a block diagram schematically showing a first embodiment of the terahertz spectrometer of the present invention.
  • the terahertz spectrometry apparatus according to the present embodiment is configured as an apparatus for irradiating the terahertz wave T1 to the measurement object 101 and measuring the amplitude of the transmitted terahertz wave T2 absorbed or scattered by the substance constituting the measurement object 101.
  • the terahertz wave T ⁇ b> 1 emitted from the terahertz wave generation unit 1 is focused on the measurement target object 101 by the focusing element 111.
  • the transmitted terahertz wave T2 absorbed or scattered by the substance constituting the measurement object 101 is incident on the non-linear optical crystal 102 for detection.
  • the probe light source 2 of FIG. 1 emits a probe light L1 for detecting a terahertz wave.
  • the probe light L1 enters the beam diameter adjustment unit 20, and the beam diameter is expanded or reduced to become probe light L2 having a beam diameter B. Thereafter, the probe light L2 is polarized by the polarizer 301, is reflected by the beam splitter 311, and is incident on the non-linear optical crystal 102 for detection.
  • a wavelength selection mirror may be inserted between the measurement object 101 and the detection nonlinear optical crystal 102, and the probe light L2 may be incident from the surface of the detection nonlinear optical crystal 102.
  • the wavelength selection mirror is an optical element that transmits the terahertz wave T2 and reflects the probe light L2, and includes, for example, a pellicle or a silicon plate.
  • the detecting nonlinear optical crystal 102 When the terahertz wave T2 is incident on the detecting nonlinear optical crystal 102, an electro-optical effect is generated, and the birefringence of the detecting nonlinear optical crystal 102 changes according to the amplitude of the incident terahertz wave T2.
  • the probe light transmitted or reflected by the detection nonlinear optical crystal 102 changes its polarization state in accordance with the change in birefringence.
  • the probe light L2 transmitted from the beam splitter 311 among the probe light L2 reflected from the detection nonlinear optical crystal 102 and whose polarization state has changed is analyzed by the compensator 302 and the polarizer 303 to detect the change in polarization state, and the detector 304
  • the intensity of the probe light L2 is detected by
  • the component of the probe light incident on the detector 304 is converted into, for example, a voltage, and is input to the measurement unit 321 of the processing unit 3.
  • the signal input to the measurement unit 321 is proportional to the electric field or the intensity of the terahertz wave T2 incident on the detection nonlinear optical crystal 102.
  • the transmission axes of the polarizer 301 and the polarizer 303 orthogonal and making the fast axis or the slow axis of the compensator 302 coincide with the transmission axis of the polarizer 303.
  • the transmission axes of the polarizers 301 and 303 can be orthogonal to each other, and the fast or slow axis of the compensator 302 can be obtained by making the transmission axis of the polarizer 303 an angle larger than 0 degrees.
  • a Wollaston prism is disposed instead of the polarizer 303, the probe light is divided into two paths, the detector 304 is a balance detector, and the detection efficiency is improved by detecting the intensity difference of the probe light of each optical path. Also good.
  • FIG. 2 shows a schematic view of a beam spot L3 of probe light distributed on the detection nonlinear optical crystal 102 and a spatial distribution T3 of the terahertz wave T2 spread by the scattering on the measurement object.
  • FIG. 3 shows a schematic view of the probe light beam diameter adjusting unit 20 in the present embodiment.
  • the case where the probe light beam diameter adjustment unit 20 includes the concave lens 201 and the convex lenses 202 and 203 forming the focus variable optical system is shown.
  • any combination of lenses and optical elements may be used as long as the ratio of the beam diameters A and B is variable.
  • These lenses are disposed on the rails 211, are driven by the controller 212, and are movable in parallel on the optical axis of the probe lights L1 and L2.
  • the refractive index of the lens 202 is f 1
  • the refractive index of the lens 203 is f 2
  • the distance between the lenses is d 2
  • the lenses 202 and 203 are combined, it can be regarded as a convex lens of the focal distance f.
  • the focal length f can be expressed as equation 1.
  • f f 1 f 2 / (f 1 + f 2 -d 2 )
  • the focal length F is the distance from the principal point P of the compound lenses 202 and 203 to the focal point.
  • the principal point P is at a distance h 1 from the lens 202 and a distance h 2 from the lens 203.
  • the ratio of h 1 to h 2 is expressed by Equation 2.
  • the controller 212 holds the position information of the complex lenses 202 and 203 and the concave lens 201, and has a function of calculating the probe beam diameter B from the position information and the value of the probe beam diameter A determined by the probe light source 2.
  • the method of calculating the probe beam diameter B is not limited to the above.
  • the controller 212 holds only the position information of the compound lenses 202 and 203 and the concave lens 201, and the calculation of the probe light beam diameter B is performed by the calculation unit 322 of FIG. You may
  • the method of changing the beam diameter ratio A / B of the probe lights L1 and L2 by changing the position of the lens whose focal length is fixed has been described as a method of changing the beam diameter B by the beam diameter adjusting unit 20 as described above.
  • a method of changing the beam diameter B by the beam diameter adjusting unit 20 as described above.
  • convex lenses of different focal lengths are set in an exchangeable holder to make the focal length and the lens position variable, and the distance of the concave lens 201 corresponds to the focal length of the convex lens.
  • FIG. 4A shows a flowchart of probe light adjustment in the present embodiment.
  • the detection intensity proportional to the electric field or intensity of the terahertz wave T2 is calculated from the signal inputted to the measurement unit 321, and the probe light beam diameter B is adjusted to the beam diameter adjustment unit so that the terahertz wave detection intensity becomes large. Adjust by 20.
  • the correspondence between the probe light beam diameter B and the detected intensity (calculated value) of the tera-hertz wave is determined.
  • step S22 the probe light beam diameter 603 in FIG. 5 is determined from the correspondence relationship determined in step S21 so that the calculated value calculated by the calculation unit 322 is maximum and the beam diameter is reduced.
  • the calculated value may have a width such as ⁇ 20% variation with respect to the maximum value.
  • step S23 a control signal is output from the control unit 323 to the probe light beam shape adjustment unit 20 so as to be close to the probe light beam diameter 603 obtained in step S22, and the probe light beam system is changed.
  • the probe light beam diameter B may be adjusted continuously without performing adjustment.
  • the correspondence between the probe light beam diameter B and the calculation value calculated by the calculation unit 322 is once acquired under the same measurement conditions and stored in the storage unit 324 of FIG. You may omit it.
  • the value of the beam diameter 603 in FIG. 5 may be directly input from the input unit 325 to the calculation unit 322, and the process may proceed to S24 without performing S22 and S23.
  • FIG. 4B shows the details of step S22.
  • the number of times of measurement is set in S201.
  • the measurement unit 321 determines the intensity of the probe light incident on the detector 304 as a measurement value, and in S203 the measurement value of the probe light obtained by the calculation unit 322 and the beam diameter B of the probe light obtained from the beam diameter adjustment unit 20 Calculate the product of Here, this operation is not limited to a product, but may be division.
  • a curve 601 in FIG. 5 is a curve showing the correspondence between the probe light beam diameter B and the calculation value calculated by the calculation unit 322.
  • the probe light beam diameter B starts to change from the small beam diameter 602 or the large beam diameter 604, and measurement is performed, and the result is stored in the storage unit 324.
  • the flowchart of the probe light adjustment in this case is as follows. First, as parameters to be input to the input unit 325 of FIG. 1 in S21, for example, there are the average particle diameter and the refractive index of the particles that constitute the object to be measured.
  • the input parameter is acquired by the calculation unit 322 and stored in the storage unit 324.
  • the wavelength or frequency of the terahertz wave T1 emitted from the terahertz wave irradiation unit 1 is acquired by the calculation unit 322, and is similarly recorded in the storage unit 324.
  • the scattering angle range of the terahertz wave T2 is estimated according to the theoretical formula of Mie scattering, and the determined scattering angle range and measurement From the distance between the object 101 and the detection nonlinear optical crystal 102, the magnitude of the spread angle T3 of the spatial distribution of the terahertz wave on the detection nonlinear optical crystal 102 may be determined using a trigonometric function.
  • the target probe beam diameter is determined so that the spatial distribution T3 of the terahertz wave can be widely acquired.
  • control unit 323 outputs a control signal so as to approach the probe beam diameter 603, and the probe light beam diameter adjustment unit 20 changes the probe light beam diameter B.
  • known parameters used to adjust the probe light beam diameter may be stored in the storage unit 324 as a list, and may be called by the control unit 323 as needed.
  • FIG. 6 shows a schematic view of the list. The parameters shown in this schematic diagram are not limited to this.
  • the optimum probe light beam diameter may be automatically learned from the measurement result and the name of the measurement object input to the input unit 325, and a list may be generated and stored.
  • Known parameters used to adjust the probe light beam diameter include, for example, the probe light beam diameter and the position of the optical element included in the beam diameter adjustment unit 20.
  • measurement conditions for example, measurement object name, probe light beam diameter, etc.
  • the calculation unit searches past measurement results based on the list, and measurement conditions (past measurement conditions)
  • measurement conditions past measurement conditions
  • the lens position or the like included in the beam diameter adjustment unit 20 may be applied to this measurement.
  • a distance measurement unit that acquires the distance between the detection nonlinear optical crystal 102 and the measurement object 101 and a distance adjustment unit that adjusts the distance are added, and control signals are transmitted from the control unit 323 to the distance adjustment unit.
  • the distance between the detection nonlinear optical crystal 102 and the measurement object 101 may be reduced, and the spread angle of the scattered light by the measurement object may be suppressed.
  • an example of performing measurement for probe light beam diameter adjustment will be shown below. According to this configuration, it is possible to perform the spectroscopic measurement after confirming the reduction of the influence of the scattering.
  • a measurement target (reference sample) to be a reference which is a component similar to the original measurement target (target sample) and has less scattering, is separately prepared as the measurement target object 101.
  • the same tablet as the target sample is ground in a mortar, sieved to a sufficiently small particle size, and compressed again.
  • FIG. 7A shows a flowchart of the probe light adjustment in this case.
  • step S21 the terahertz wave detection intensity (calculation value) of the reference sample is measured and stored in the storage unit 324.
  • step S22 the calculated value of the target sample is repeatedly measured while changing the size of the probe light beam diameter B. Details will be described later.
  • the result is stored in the storage unit 324.
  • the measurement may be performed not at a plurality of frequencies but at a single frequency.
  • the control unit 323 outputs a control signal so as to approach the probe beam diameter 803 obtained in S23, and the probe light beam diameter adjustment unit 20 changes the probe light beam diameter B.
  • FIG. 7B shows the details of step S22.
  • the number of times of measurement is set in S201.
  • the measurement unit 321 acquires the intensity of the probe light incident on the detector 304 as a measurement value
  • the calculation unit 322 obtains terahertz wave detection intensities (calculation values) at a plurality of or single frequencies. Further, a difference value is calculated by subtracting the calculated value of the reference sample stored in S21 from the calculated value of the target sample.
  • the difference value obtained in S213 is stored.
  • a curve 801 in FIG. 8 is a curve showing the correspondence between the probe light beam diameter B and the difference value calculated by the calculation unit 322.
  • the probe light beam diameter B starts to change from the small beam diameter 602 or the large beam diameter 604, the measurement is performed, and the result is stored in the storage unit 324 as described above.
  • S205 it is determined whether or not the number set in S201 has been reached, and the beam diameter B is changed by the beam diameter adjusting unit 20 in S206 to repeat the procedure of S202 to S204 until the set number is reached.
  • the process proceeds to S207 and the curve 801 is obtained. Thereafter, the beam diameter 803 in which the difference value of the difference values stored in S23 is the smallest is calculated and acquired in S21.
  • the influence of scattering generated in the substance constituting the object to be measured 101 can be reduced or eliminated more accurately. Spectral measurement is possible.
  • FIG. 9 is a block diagram schematically showing a second embodiment of the terahertz spectrometer of the present invention.
  • the present embodiment differs from the first embodiment in that the imaging result of the spatial distribution of the terahertz wave is used to adjust the probe light beam diameter B.
  • the beam diameter of the probe light can be controlled while observing the actual spatial distribution of the terahertz wave, it is not necessary to perform a plurality of measurements and accurate adjustment becomes possible.
  • the difference from the first embodiment will be described.
  • An imaging lens 312 is disposed behind the non-linear optical crystal 102 for detection, a beam is divided by a half mirror 313, one is incident on an image sensor 305, and the other is incident on a detector 304.
  • both imaging and intensity measurement of the spatial distribution T3 of the terahertz wave on the detection crystal may be performed by the image sensor 305.
  • FIG. 10 shows a flowchart of probe light adjustment in the present embodiment.
  • the probe light beam diameter B is set to the maximum value 604 in S11.
  • the probe light beam diameter B is changed to a diameter at which imaging is possible.
  • the size of the terahertz wave irradiation portion T3 on the detection crystal becomes larger than the probe light beam diameter B, the distance between the measurement object and the detection nonlinear optical crystal 102 is adjusted using the method described in the seventh embodiment. And the size of T3 may be reduced.
  • the detecting nonlinear optical crystal 102 When the terahertz wave T2 is incident on the detecting nonlinear optical crystal 102, an electro-optical effect is generated, and the birefringence of the detecting nonlinear optical crystal 102 changes according to the amplitude of the incident terahertz wave T2.
  • the probe light transmitted or reflected by the detection nonlinear optical crystal 102 changes its polarization state in accordance with the change in birefringence.
  • the probe light incident on the image sensor 305 is imaged by the measurement unit 321 of the processing unit 3 and is output as a detection image. Similar to the method described in the first embodiment, the calculation unit 322 calculates the spatial distribution T3 on the nonlinear optical crystal 102 for detection of the electric field or intensity of the terahertz wave from the detection image.
  • the difference between the size of the spatial distribution of the terahertz wave irradiated to the light receiving unit and the beam diameter of the probe light obtained from the beam diameter adjusting unit is calculated by the calculation unit 322 from the detected image, and the difference becomes smaller
  • the probe light beam diameter B is determined as follows.
  • the control unit 323 outputs a control signal so as to approach the probe beam diameter obtained in S13, and changes the probe light beam diameter B. According to the above-described procedure, after the adjustment of the probe light beam diameter B is performed, by starting the measurement, it is possible to perform the spectral measurement in which the influence of the scattering generated in the substance constituting the measurement object 101 is reduced or eliminated.
  • S13 of FIG. 1 For example, in S13 of FIG.
  • FIG. 10 schematically shows the terahertz spectrometer in this example.
  • FIG. A different point from FIG. 9 is that the position of the detection nonlinear optical crystal 102 is controlled in addition to the beam diameter adjustment unit 20 by the control signal from the control unit 323.
  • the non-linear optical crystal 102 for detection is driven by a motor 1021, and the position information is held by the motor 1021.
  • the thickness of the measurement object 101 is input to the input unit 325 of FIG.
  • FIG. 12 is a block diagram schematically showing a third embodiment of the terahertz spectrometer of the present invention.
  • the present embodiment differs from the first embodiment in that an interference optical system is combined as a detector. According to this configuration, when the amplitude of the terahertz wave T2 to be detected is weak, the signal can be amplified and measured, and the sensitivity of the measurement can be improved. In this embodiment, the difference from the first embodiment will be described.
  • Interferometric optics 306 of FIG. 12 includes a detector.
  • the interference optical system 306 receives the probe light transmitted or reflected by the detection nonlinear optical crystal 102 and the reference light L4 for causing the probe light to interfere.
  • the detector included in the interference optical system 306 detects interference light in which the probe light and the reference light L4 interfere with each other.
  • An independent laser may be used as the reference light source 4, or light may be branched from a laser included in a probe light source or a terahertz wave light source using a beam splitter or the like to be the reference light L4.
  • the frequency of the reference light L4 for example, there is a heterodyne method not matched with the frequency of the probe light or a homodyne method matched with the frequency of the probe light.
  • the homodyne method there is a method of separating and measuring the phase and amplitude of the interference light by, for example, a four-phase simultaneous detection method or a phase shift method. According to the above-described method, it is possible to perform the spectral measurement and the sensitivity improvement in which the influence of the scattering generated in the substance constituting the measuring object 101 is reduced or eliminated.
  • FIG. 13 is a configuration diagram schematically showing a fourth example of the terahertz spectrometry apparatus of the present invention.
  • the present embodiment differs from the first embodiment in that the detector is replaced by an image sensor. Moreover, what is to be measured is an electric field of terahertz wave (terahertz electric field).
  • terahertz electric field When measuring the terahertz electric field, when the phase is not uniform in the beam spot T3, the spatial distribution of the terahertz electric field is integrated in the measurement of the single detector, so that the positive and negative electric fields cancel each other and the measurement is performed.
  • the signal proportional to the terahertz electric field may be small. According to this configuration, the influence can be eliminated from the result of the spectroscopic measurement. In this embodiment, the difference from the first embodiment will be described.
  • FIG. 3 A schematic view of the image sensor 305 is shown in FIG.
  • the probe light beam spot L3 on the detection crystal is imaged on the image sensor 305, and a signal proportional to the terahertz wave electric field spatial distribution T3 is measured at each pixel.
  • the result of each pixel is converted to an intensity and then the average value of the intensity at the required pixel is obtained.
  • phase measurement that is, measuring the time waveform of the electric field, such as terahertz time domain spectroscopy
  • Each is subjected to time-wise Fourier transformation to obtain an intensity for each wavelength and then integration is performed.
  • FIG. 15 is a block diagram schematically showing a fifth embodiment of the terahertz spectrometer of the present invention.
  • the present embodiment is different from the first embodiment in that a condensing element 112 is inserted between the measuring object 101 and the non-linear optical crystal 102 for detection. According to this configuration, it is possible to separate and measure the distance between the light collecting element 112 and the object to be measured 101. In this embodiment, the difference from the first embodiment will be described.
  • the numerical aperture (NA) of the focusing element 112 is designed as large as possible so as to sufficiently collect the scattered light of the object to be measured.
  • NA numerical aperture
  • the beam diameter B of the probe light has a difference with the size of the terahertz wave spatial distribution T3 including the scattering component focused on the detection nonlinear optical crystal 102 by the focusing element 112 according to the first and second embodiments. It is controlled to be smaller.
  • the measurement object 101 is obtained in order to obtain the terahertz wave spatial distribution T3 including the scattered component collected on the detection nonlinear optical crystal 102.
  • the effect of light collection by the light collection element 112 may be determined by ray tracing.
  • the size of the spatial distribution T3 may be calculated as follows.
  • the approximate size 2D SAMPLE tan ⁇ of the spatial distribution T3 of the terahertz wave formed on the detection nonlinear optical crystal 102 by the element 112 is determined.
  • the distance between the object to be measured 101 and the light collecting element 112 can be separated, it is possible to cope with the case where the thickness of the object to be measured 101 is thick. Spectroscopic measurement with reduced or eliminated influence is possible.
  • an optical axis adjustment unit for adjusting the optical axis of the probe light and an intensity distribution adjustment unit are provided in the probe light beam diameter adjustment unit 20 and adjustment is performed.
  • This configuration can increase the detection efficiency of the signal detected by the detector 304.
  • the difference from the first embodiment will be described.
  • FIG. 16 shows a flowchart of probe light adjustment in the present embodiment.
  • the probe light diameter B is set to the minimum value 302, and at S31, the central portion of the spatial distribution T3 of the electric field or intensity of the terahertz wave, that is, the detection intensity of the terahertz wave detected by the detector 304 is maximized Control the adjustment unit.
  • the probe light beam diameter B is adjusted by the control of the beam diameter adjusting unit 20 according to the first to third embodiments.
  • the intensity distribution adjustment unit makes the intensity distribution of the probe light uniform in the plane.
  • a method of adjusting the intensity distribution for example, there is a method of cutting out only the center portion of the probe light beam with an iris.
  • the adjustment result of the optical axis or the intensity distribution of the probe light may be confirmed by imaging the beam spot T2 of the probe light on the crystal 102 using the image sensor 305 in the same configuration as that of the second embodiment or the fourth embodiment. .
  • the compensator 302 or the polarizer 301 or 303 is Or manually rotate it so that the entire probe light beam spot L3 is captured and then imaged.
  • the detection efficiency of the signal detected by the detector 304 can be increased. Furthermore, it is possible to perform spectroscopic measurement with reduced or eliminated the influence of scattering generated by the substance constituting the measurement object 101.
  • the present invention can be applied to measurements other than spectrometry. Applications include, for example, measurements that are affected by scattered light, such as terahertz CT scanning and imaging with absorptivity and reflectivity.
  • the wavelength of incident light used for measurement is not limited to terahertz waves, and may be infrared rays or electromagnetic waves having a wavelength shorter than infrared rays, for example, or wavelengths longer than millimeter waves or millimeter waves Even electromagnetic waves of In this case, if the terahertz wave is replaced with an electromagnetic wave in the above description, the above description is applied as it is. Therefore, the description of electromagnetic waves other than terahertz waves is omitted here.
  • 101 measurement object
  • 102 nonlinear optical crystal for detection
  • 111 focusing element
  • 20 probe light beam diameter control unit
  • 3 beam control signal generation unit
  • Polarizer 302 Compensator 303
  • Polarizer 304 Detector T1 Incident terahertz wave
  • T2 Emitted terahertz wave

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Abstract

L'objectif de la présente invention est de réduire ou d'éliminer l'influence, sur la spectrométrie, de la diffusion par des particules composant un objet de mesure. Cet objectif est atteint par un dispositif de spectrométrie comprenant une unité d'irradiation d'ondes électromagnétiques pour irradier des ondes électromagnétiques, une unité de réception de lumière pour recevoir des ondes électromagnétiques, une unité d'irradiation de lumière de sonde pour irradier une lumière de sonde, une unité de détection de lumière de sonde pour détecter une lumière de sonde et délivrer en sortie un signal de détection, une unité de calcul pour calculer l'intensité détectée des ondes électromagnétiques à partir du signal de détection, et une unité de commande de diamètre de faisceau pour commander le diamètre de faisceau de la lumière de sonde, ledit dispositif de spectrométrie étant caractérisé en ce que l'unité d'irradiation d'ondes électromagnétiques irradie des ondes électromagnétiques sur un objet de mesure, l'unité de réception de lumière reçoit les ondes électromagnétiques irradiées sur l'objet de mesure, l'unité d'irradiation de lumière de sonde irradie la lumière de sonde sur l'unité de réception de lumière, l'unité de détection de lumière de sonde détecte la lumière de sonde irradiée sur l'unité de réception de lumière et délivre en sortie un signal de détection, l'unité de calcul calcule l'intensité détectée, sur la base du signal de détection et du diamètre de faisceau de la lumière de sonde, et l'unité de commande de diamètre de faisceau commande le diamètre de faisceau de la lumière de sonde sur la base de l'intensité détectée calculée.
PCT/JP2017/032204 2017-09-07 2017-09-07 Dispositif de spectrométrie WO2019049250A1 (fr)

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