WO2019001413A1 - 液体温控装置和方法 - Google Patents
液体温控装置和方法 Download PDFInfo
- Publication number
- WO2019001413A1 WO2019001413A1 PCT/CN2018/092819 CN2018092819W WO2019001413A1 WO 2019001413 A1 WO2019001413 A1 WO 2019001413A1 CN 2018092819 W CN2018092819 W CN 2018092819W WO 2019001413 A1 WO2019001413 A1 WO 2019001413A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- unit
- circulating
- cooling
- heat exchange
- temperature
- Prior art date
Links
- 239000007788 liquid Substances 0.000 title claims abstract description 34
- 238000000034 method Methods 0.000 title claims abstract description 15
- 238000001816 cooling Methods 0.000 claims abstract description 110
- 238000001514 detection method Methods 0.000 claims abstract description 21
- 238000012544 monitoring process Methods 0.000 claims abstract description 5
- 238000005057 refrigeration Methods 0.000 claims description 74
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 22
- 239000002826 coolant Substances 0.000 claims description 18
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000003507 refrigerant Substances 0.000 abstract description 4
- 238000003466 welding Methods 0.000 abstract description 2
- 238000011084 recovery Methods 0.000 description 4
- 230000033228 biological regulation Effects 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 230000003134 recirculating effect Effects 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B25/00—Machines, plants or systems, using a combination of modes of operation covered by two or more of the groups F25B1/00 - F25B23/00
- F25B25/005—Machines, plants or systems, using a combination of modes of operation covered by two or more of the groups F25B1/00 - F25B23/00 using primary and secondary systems
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B41/00—Fluid-circulation arrangements
- F25B41/30—Expansion means; Dispositions thereof
- F25B41/31—Expansion valves
- F25B41/34—Expansion valves with the valve member being actuated by electric means, e.g. by piezoelectric actuators
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B49/00—Arrangement or mounting of control or safety devices
- F25B49/02—Arrangement or mounting of control or safety devices for compression type machines, plants or systems
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B49/00—Arrangement or mounting of control or safety devices
- F25B49/02—Arrangement or mounting of control or safety devices for compression type machines, plants or systems
- F25B49/027—Condenser control arrangements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D17/00—Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces
- F25D17/02—Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces for circulating liquids, e.g. brine
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2339/00—Details of evaporators; Details of condensers
- F25B2339/04—Details of condensers
- F25B2339/047—Water-cooled condensers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2600/00—Control issues
- F25B2600/25—Control of valves
- F25B2600/2513—Expansion valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2700/00—Sensing or detecting of parameters; Sensors therefor
- F25B2700/21—Temperatures
- F25B2700/2117—Temperatures of an evaporator
- F25B2700/21171—Temperatures of an evaporator of the fluid cooled by the evaporator
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
- Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
- Devices That Are Associated With Refrigeration Equipment (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US16/627,580 US20200149792A1 (en) | 2017-06-29 | 2018-06-26 | Liquid temperature-control apparatus and method |
SG11201913037PA SG11201913037PA (en) | 2017-06-29 | 2018-06-26 | Liquid temperature-control apparatus and method |
KR1020207002829A KR102245550B1 (ko) | 2017-06-29 | 2018-06-26 | 액체 온도 제어 장치 및 방법 |
JP2019570525A JP6931093B2 (ja) | 2017-06-29 | 2018-06-26 | 液体温度制御装置及び方法 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710517728.5A CN109210836A (zh) | 2017-06-29 | 2017-06-29 | 液体温控装置和方法 |
CN201710517728.5 | 2017-06-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2019001413A1 true WO2019001413A1 (zh) | 2019-01-03 |
Family
ID=64741128
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/CN2018/092819 WO2019001413A1 (zh) | 2017-06-29 | 2018-06-26 | 液体温控装置和方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20200149792A1 (ja) |
JP (1) | JP6931093B2 (ja) |
KR (1) | KR102245550B1 (ja) |
CN (1) | CN109210836A (ja) |
SG (1) | SG11201913037PA (ja) |
TW (1) | TWI675263B (ja) |
WO (1) | WO2019001413A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112058332B (zh) * | 2019-06-10 | 2022-02-11 | 上海微电子装备(集团)股份有限公司 | 一种恒温液槽 |
US11231198B2 (en) | 2019-09-05 | 2022-01-25 | Trane International Inc. | Systems and methods for refrigerant leak detection in a climate control system |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101270909A (zh) * | 2008-05-16 | 2008-09-24 | 广州恒雅空调工程有限公司 | 一种冷凝热的应用方法 |
CN103294086A (zh) * | 2012-02-27 | 2013-09-11 | 上海微电子装备有限公司 | 一种恒温液循环装置及温控方法 |
CN103398457A (zh) * | 2013-08-21 | 2013-11-20 | 广州同方瑞风空调有限公司 | 一种制冷系统冷凝热无极热回收装置及制冷系统 |
CN104729036A (zh) * | 2015-03-19 | 2015-06-24 | 合肥天鹅制冷科技有限公司 | 精确控温的冷凝热回收系统 |
CN205925525U (zh) * | 2016-08-24 | 2017-02-08 | 重庆亘祥科技有限公司 | 恒温涂料搅拌机 |
CN206160550U (zh) * | 2016-10-18 | 2017-05-10 | 杭州卡塞尔机械有限公司 | 冷热一体机 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
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CN100511883C (zh) * | 2006-09-29 | 2009-07-08 | 武汉楚天激光(集团)股份有限公司 | 高精度水冷却系统及其控制方法 |
JP2008292026A (ja) * | 2007-05-23 | 2008-12-04 | Ats Japan Corp | 恒温維持装置。 |
JP5111221B2 (ja) | 2008-04-24 | 2013-01-09 | 三菱電機株式会社 | 給湯機 |
KR20090115627A (ko) * | 2008-05-02 | 2009-11-05 | 왕화식 | 다단 응축 난방시스템 |
CN201212760Y (zh) * | 2008-06-03 | 2009-03-25 | 杭州电子科技大学 | 一种液体冷却温度控制装置 |
KR101577125B1 (ko) * | 2010-10-27 | 2015-12-11 | 오르가노 가부시키가이샤 | 수처리 시스템 및 수처리 방법 |
EP2515170B1 (en) * | 2011-04-20 | 2020-02-19 | ASML Netherlands BV | Thermal conditioning system for thermal conditioning a part of a lithographic apparatus and a thermal conditioning method |
KR101357469B1 (ko) * | 2011-11-28 | 2014-02-03 | 엘지전자 주식회사 | 히트펌프 연동 급탕장치 |
CN202371848U (zh) * | 2011-12-22 | 2012-08-08 | 宁波惠康实业有限公司 | 恒温冷却水箱系统 |
JP2013162008A (ja) * | 2012-02-07 | 2013-08-19 | Nuflare Technology Inc | 温度調節システムおよび荷電粒子ビーム描画装置 |
CN103363745B (zh) * | 2012-04-06 | 2016-04-20 | 上海微电子装备有限公司 | 制冷装置及其温控方法 |
CN104121736A (zh) * | 2014-07-18 | 2014-10-29 | 合肥天鹅制冷科技有限公司 | 具有精确控制温度的液冷源机组及控制方法 |
CN104571223B (zh) * | 2015-02-10 | 2016-08-31 | 广东吉荣空调有限公司 | 应用于高端装备冷却用超精密水温控制装置 |
CN105158003A (zh) * | 2015-09-17 | 2015-12-16 | 中国船舶重工集团公司第七〇三研究所无锡分部 | 一种节能型蒸汽喷射制冷机组测试装置 |
-
2017
- 2017-06-29 CN CN201710517728.5A patent/CN109210836A/zh active Pending
-
2018
- 2018-06-26 US US16/627,580 patent/US20200149792A1/en not_active Abandoned
- 2018-06-26 SG SG11201913037PA patent/SG11201913037PA/en unknown
- 2018-06-26 JP JP2019570525A patent/JP6931093B2/ja active Active
- 2018-06-26 KR KR1020207002829A patent/KR102245550B1/ko active IP Right Grant
- 2018-06-26 WO PCT/CN2018/092819 patent/WO2019001413A1/zh active Application Filing
- 2018-06-28 TW TW107122419A patent/TWI675263B/zh active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101270909A (zh) * | 2008-05-16 | 2008-09-24 | 广州恒雅空调工程有限公司 | 一种冷凝热的应用方法 |
CN103294086A (zh) * | 2012-02-27 | 2013-09-11 | 上海微电子装备有限公司 | 一种恒温液循环装置及温控方法 |
CN103398457A (zh) * | 2013-08-21 | 2013-11-20 | 广州同方瑞风空调有限公司 | 一种制冷系统冷凝热无极热回收装置及制冷系统 |
CN104729036A (zh) * | 2015-03-19 | 2015-06-24 | 合肥天鹅制冷科技有限公司 | 精确控温的冷凝热回收系统 |
CN205925525U (zh) * | 2016-08-24 | 2017-02-08 | 重庆亘祥科技有限公司 | 恒温涂料搅拌机 |
CN206160550U (zh) * | 2016-10-18 | 2017-05-10 | 杭州卡塞尔机械有限公司 | 冷热一体机 |
Also Published As
Publication number | Publication date |
---|---|
KR20200022487A (ko) | 2020-03-03 |
JP6931093B2 (ja) | 2021-09-01 |
CN109210836A (zh) | 2019-01-15 |
SG11201913037PA (en) | 2020-01-30 |
TW201905597A (zh) | 2019-02-01 |
TWI675263B (zh) | 2019-10-21 |
US20200149792A1 (en) | 2020-05-14 |
KR102245550B1 (ko) | 2021-04-27 |
JP2020525746A (ja) | 2020-08-27 |
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