WO2019001413A1 - Appareil et procédé de régulation de température de liquide - Google Patents

Appareil et procédé de régulation de température de liquide Download PDF

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Publication number
WO2019001413A1
WO2019001413A1 PCT/CN2018/092819 CN2018092819W WO2019001413A1 WO 2019001413 A1 WO2019001413 A1 WO 2019001413A1 CN 2018092819 W CN2018092819 W CN 2018092819W WO 2019001413 A1 WO2019001413 A1 WO 2019001413A1
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WO
WIPO (PCT)
Prior art keywords
unit
circulating
cooling
heat exchange
temperature
Prior art date
Application number
PCT/CN2018/092819
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English (en)
Chinese (zh)
Inventor
王明
郝保同
杜留洋
Original Assignee
上海微电子装备（集团）股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 上海微电子装备（集团）股份有限公司 filed Critical 上海微电子装备（集团）股份有限公司
Priority to US16/627,580 priority Critical patent/US20200149792A1/en
Priority to KR1020207002829A priority patent/KR102245550B1/ko
Priority to SG11201913037PA priority patent/SG11201913037PA/en
Priority to JP2019570525A priority patent/JP6931093B2/ja
Publication of WO2019001413A1 publication Critical patent/WO2019001413A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B25/00—Machines, plants or systems, using a combination of modes of operation covered by two or more of the groups F25B1/00 - F25B23/00
    • F25B25/005—Machines, plants or systems, using a combination of modes of operation covered by two or more of the groups F25B1/00 - F25B23/00 using primary and secondary systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B41/00—Fluid-circulation arrangements
    • F25B41/30—Expansion means; Dispositions thereof
    • F25B41/31—Expansion valves
    • F25B41/34—Expansion valves with the valve member being actuated by electric means, e.g. by piezoelectric actuators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B49/00—Arrangement or mounting of control or safety devices
    • F25B49/02—Arrangement or mounting of control or safety devices for compression type machines, plants or systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B49/00—Arrangement or mounting of control or safety devices
    • F25B49/02—Arrangement or mounting of control or safety devices for compression type machines, plants or systems
    • F25B49/027—Condenser control arrangements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D17/00—Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces
    • F25D17/02—Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces for circulating liquids, e.g. brine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2339/00—Details of evaporators; Details of condensers
    • F25B2339/04—Details of condensers
    • F25B2339/047—Water-cooled condensers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2600/00—Control issues
    • F25B2600/25—Control of valves
    • F25B2600/2513—Expansion valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2700/00—Sensing or detecting of parameters; Sensors therefor
    • F25B2700/21—Temperatures
    • F25B2700/2117—Temperatures of an evaporator
    • F25B2700/21171—Temperatures of an evaporator of the fluid cooled by the evaporator
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
    • Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating

Definitions

  • the invention relates to the field of refrigeration, and in particular to a liquid temperature control device and method.
  • the accuracy of the existing liquid temperature control system in the lithography machine is achieved by applying the heater duty cycle, and the energy saving performance is general due to the use of the heater.
  • the general practice is to add a condenser between the internal compressor outlet of the refrigeration unit and the condenser to recover heat.
  • the heat recovered is generally simple for heat supply, and the accuracy is generally ⁇ 1°C; to achieve high-precision control, a more complex control-refrigerant flow structure must be added to the refrigeration unit, which complicates its structure, increases capacity, and reduces reliability.
  • the invention provides a liquid temperature control device and method, which solves the problem that the structure of the prior art refrigeration unit is too complicated when performing high precision control.
  • a liquid temperature control device comprising:
  • a circulation refrigeration unit for providing thermal energy and cooling capacity to the object to be cooled
  • a circulation cooling unit connected to the circulating refrigeration unit for cooling the object to be cooled
  • a heat exchange unit for heat exchange between the circulating refrigeration unit and the circulating cooling unit
  • a temperature detecting control unit for monitoring temperatures of the circulating refrigeration unit and the circulating cooling unit.
  • the heat generating end of the circulating refrigeration unit supplies heat energy to the circulating cooling unit.
  • the heat exchange unit comprises a first heat exchange module and a second heat exchange module, the circulating refrigeration unit and the first heat exchange module providing cooling for the circulating cooling unit, the circulating refrigeration unit And the second heat exchange module provides thermal energy to the circulating cooling unit.
  • the heat-generating end of the circulating refrigeration unit is connected with a three-way valve, one water outlet end of the three-way valve is connected to the second heat exchange module, and the other water outlet end of the three-way valve is used as a bypass line.
  • the temperature detecting control unit realizes supply regulation of thermal energy of the circulating refrigeration unit by controlling the three-way valve.
  • the temperature detecting control unit is disposed at a heat generating end and/or a cooling end of the circulating refrigeration unit.
  • the temperature detecting control unit is disposed in the circulation cooling unit to detect and control cooling of the object to be cooled.
  • the circulating refrigeration unit comprises a series connection: a condenser, an expansion valve, a first heat exchange module and a compressor, wherein the outlet end of the condenser is provided with a second heat exchange module, the expansion valve and The temperature detecting control unit is connected, and the first heat exchange module is connected to the circulating cooling unit.
  • the outlet end and/or the inlet end of the condenser employ a bypass tube.
  • the temperature detecting control unit realizes supply regulation of the cooling amount of the circulating refrigeration unit by controlling the expansion valve.
  • the circulation cooling unit comprises: a water tank and a water pump disposed between the water tank and the object to be cooled, the water pump driving the cooling medium to circulate in the circulation cold unit.
  • the invention also provides a liquid temperature control method, comprising:
  • the temperature detection data is detected by the temperature detection control unit and controls the ratio of the thermal energy to the cooling amount provided by the circulation cooling unit.
  • the heat exchange unit comprises a first heat exchange module and a second heat exchange module, the first heat exchange module for the circulating refrigeration unit to provide a cooling capacity for the circulating cooling unit, the second A heat exchange module is used for the circulating refrigeration unit to provide thermal energy to the refrigeration unit for circulation.
  • said temperature detection control unit comprises: a first temperature detection control module that detects a temperature of a cooling medium that controls entry into the object to be cooled.
  • the temperature detecting control unit further includes: a second temperature detecting control module that detects and controls a temperature of the cooling medium after the circulating cooling device is cooled.
  • the temperature detecting control unit is controlled in that the temperature detecting control unit detects the inlet end temperature of the object to be cooled by the first temperature detecting control module, and adjusts the circulating cooling unit to supply the circulating cooling unit.
  • the ratio of thermal energy to cooling capacity is as high as the temperature at the inlet end of the object to be cooled.
  • the temperature detecting control unit is controlled in that the temperature detecting control unit detects the inlet end temperature of the object to be cooled by the first temperature detecting control module, and adjusts the circulating cooling unit to supply the circulating cooling unit.
  • the temperature detecting control unit detects the temperature of the cooling medium after the circulating cooling unit is cooled by the second temperature detecting control module, and adjusts the cooling amount supplied by the circulating cooling unit to the circulating cooling unit.
  • the temperature at the inlet end of the cooling object is as required.
  • the heat-receiving end of the circulating refrigeration unit is connected with a three-way valve, and the temperature detecting control unit realizes adjustment of the thermal energy supplied by the circulating refrigeration unit to the circulating cooling unit by controlling the three-way valve.
  • the present invention has the following advantages:
  • the invention adopts the most basic circulating refrigeration unit, and does not need to weld and add components in the circulating refrigeration unit, the welding points in the circulating refrigeration unit are less, the refrigerant has no risk of leakage, and the reliability is relatively improved;
  • the heat in the circulating refrigeration unit if not used, returns directly to the chiller on the side of the plant, and the load is large, and the heat in the recovery condenser of the present invention reduces the burden on the chiller to a certain extent, and is small.
  • the system calculates 1 to 2 kW per hour, saving 8760 to 17520 kWh per year;
  • the invention uses the temperature detection control unit to feed back the flow distribution in the liquid temperature control device, which can realize high precision (better than ⁇ 0.1 ° C) temperature control, which is higher than the traditional heat recovery accuracy ( ⁇ 1 ° C);
  • the invention utilizes the heat exchange between the heat energy of the condenser outlet in the circulating refrigeration unit and the cold heat of the outlet of the first heat exchange module to realize the heat recovery of the condensation, and replaces the traditional electric heater heating with the recovered condensation heat, thereby saving energy. ;
  • the invention achieves high precision control by adding a three-way valve at the outlet end of the condenser to control the heat energy entering the second heat exchange module.
  • FIG. 1 is a schematic structural view of a liquid temperature control device according to Embodiment 1 of the present invention.
  • FIG. 2 is a schematic diagram of control of a liquid temperature control device according to Embodiment 1 of the present invention.
  • Fig. 3 is a schematic view showing the control of the liquid temperature control device in the second embodiment of the present invention.
  • the figure shows: 1-compressor, 2-condenser, 3-expansion valve, 4-first heat exchange module, 5-to-be-cooled object, 6-water pump, 7-water tank, 8-three-way valve, 9- Second heat exchange module, 10-pass pipe, 11-control unit, 12-first temperature sensor, 13-second temperature sensor.
  • cooling is described as providing cooling capacity
  • heating is described as providing thermal energy for convenience of expression.
  • drawings of the present invention are in a simplified form and both use non-precise proportions, and are merely for convenience and clarity of the purpose of the embodiments of the present invention.
  • the liquid control apparatus of this embodiment includes a circulation refrigeration unit, a circulation cold unit, a temperature detection control unit, and a heat exchange unit.
  • the circulating refrigeration unit is configured to provide thermal energy and cooling capacity for the circulating cooling unit
  • the heat exchange unit is configured to implement heat exchange between the circulating refrigeration unit and the circulating cooling unit
  • temperature The detection control unit is configured to detect the temperature of the cooling medium to control the supply ratio of the thermal energy to the cooling amount, thereby achieving high-precision cooling of the object to be cooled.
  • the circulating refrigeration unit cools the circulating cooling unit, it also takes away its thermal energy, and uses the thermal energy to reheat the cooling medium in the circulating cooling unit by the detection control of the temperature detecting control unit. Compensation to achieve precise control of the temperature of the cooling medium in the circulating cooling unit.
  • the heat exchange unit includes a first heat exchange module 4 and a second heat exchange module 9, in which the circulating refrigeration unit supplies cooling to the cooling medium in the circulating cooling unit to In the refrigeration, in the second heat exchange module 9, the circulating refrigeration unit supplies thermal energy to the cooling medium in the circulating cooling unit to achieve thermal compensation.
  • first heat exchange module 4 may be an evaporator
  • second heat exchange module 9 may be a heat exchanger
  • the apparatus includes a three-way valve 8 that is coupled to the outlet end of the recirculating refrigeration unit and the second heat exchange module 9, respectively, and the third path of the three-way valve 8 is a bypass line To discharge cooling water carrying excess heat energy.
  • the temperature detection control unit includes a first temperature sensor 12, a second temperature sensor 13, and a control unit 11, wherein the first temperature sensor 12 can be used as a parameter consideration for temperature detection feedback control or only as a cooling unit for circulation. Detection of the temperature of the internal cooling medium.
  • the temperature detecting control unit adjusts the heat exchange unit according to the detected temperature parameter to achieve precise temperature control of the device to be cooled.
  • the temperature detection control unit controls the heat exchange unit by means of control of the three-way valve 8 and the circulating refrigeration unit.
  • An expansion valve 3 is disposed in the circulation refrigeration unit, and the amount of the refrigerant medium flowing into the first heat exchange module 4 of the circulation refrigeration unit is determined by the duty ratio of the expansion valve 3, and the temperature detection control unit controls the circulation refrigeration unit through the expansion valve.
  • the first temperature sensor 12 is disposed at the outlet end of the circulating cooling unit and the first heat exchange module 4 for detecting the temperature of the outlet end of the first heat exchange module 4, and transmitting the temperature data to the
  • the control unit 11 is located at the inlet end of the object 5 to be cooled, detects the temperature of the inlet end of the object 5 to be cooled, and simultaneously detects and adjusts the temperature of the cooling medium to ensure cooling of the object 5 to be cooled.
  • the temperature of the medium is stable.
  • the liquid temperature control device of the embodiment includes: a circulation refrigeration unit, a circulation cooling unit, a three-way valve 8, a heat exchanger, and a temperature detection control unit.
  • the circulating refrigeration unit is configured to provide thermal energy and cooling capacity for the circulating cooling unit
  • the three-way valve 8 is disposed at a heat receiving end of the circulating refrigeration unit
  • the circulating cooling unit is connected to the circulating refrigeration unit
  • the heat exchanger is used to mix the heat energy and the cooling capacity of the circulating refrigeration unit, and then supplied to the circulating cooling unit
  • the temperature detecting control unit is used for monitoring The temperature of the circulating refrigeration unit and the circulating cooling unit
  • the control unit 11 is respectively connected to the circulating refrigeration unit, the three-way valve 8 and the temperature detecting control unit, thereby precisely controlling the cooling temperature of the object 5 to be cooled .
  • the circulating refrigeration unit includes a compressor 1, a condenser 2, an expansion valve 3, and a first heat exchange module 4; wherein an outlet end of the condenser 2 is connected to the three-way valve 8 for use Providing thermal energy for the circulating cooling unit; the first heat exchange module 4 is configured to supply a cooling amount to the circulating cooling unit, and an outlet temperature thereof is occupied by the temperature detecting control unit through the expansion valve 3 Than control.
  • the circulation cooling unit includes a water tank 7 and a water pump 6 disposed between the water tank 7 and the object 5 to be cooled, and the water pump 6 drives the cooling medium to circulate in the circulation cold unit.
  • the water pump 6 drives the cooling medium from the water tank 7 into the object to be cooled 5, takes out the heat of the object to be cooled 5, and then enters the first heat exchange module 4 to cool, and then enters the
  • the heat exchanger is also the second heat exchange module 9, the other inlet of the second heat exchange module 9 is also in communication with the three-way valve 8, and the second heat exchange module 9 will flow out of the medium from the condenser 2.
  • the thermal energy is compensated to the circulating cooling medium that has been cooled by the first heat exchange module 4, and is supplied to the water tank 7 to complete the cycle.
  • bypass pipe 10 is adopted at the outlet and the inlet end of the condenser 2 to ensure that the flow rate of the inlet and outlet of the condenser 2 is constant, so as to ensure that the heat dissipation effect is not affected.
  • the embodiment further provides a liquid temperature control method, which specifically includes:
  • the water tank 7 and the water pump 6 are provided as a circulating cooling unit for circulating cooling for the object 5 to be cooled;
  • a condenser 2 Providing a condenser 2, an expansion valve 3, a first heat exchange module 4 and a compressor 1 as a circulating refrigeration unit for supplying thermal energy and cooling capacity to the circulating cooling unit;
  • a three-way valve 8 is disposed at the outlet end of the condenser 2 at the circulating refrigeration unit;
  • a heat exchange unit is provided, and the heat exchange unit is supplied to the refrigeration unit for circulation after mixing the heat energy and the cooling capacity of the circulation refrigeration unit;
  • a temperature detecting control unit configured to monitor and control the temperature of the circulating cooling unit; specifically, the temperature detecting control unit includes a first temperature disposed at an exit end of the circulating cooling unit and the first heat exchange module 4 The sensor 12 and a second temperature sensor 13 at the inlet end of the object 5 to be cooled and a control unit 11.
  • the liquid temperature control method is:
  • the control unit 11 detects, by the second temperature sensor 13, whether the temperature of the inlet end of the object to be cooled 5 meets the requirement. If the temperature is not met, the first temperature sensor 12 first measures the cold end of the circulating refrigeration unit, that is, the first heat. Switching the temperature of the outlet end of the module 4, and adjusting the duty ratio of the expansion valve 3 according to the temperature, thereby adjusting the temperature of the outlet end of the first heat exchange module 4, thereby achieving the purpose of adjusting the cooling capacity of the circulating refrigeration unit, and then, The thermal energy of the circulating refrigeration unit is adjusted by the three-way valve 8, that is, the thermal energy supplied from the outlet end of the condenser 3 to the second heat exchange module 9. Finally, the second temperature sensor 13 is used again to measure the cooling. The temperature at the inlet end of the object 5 causes the temperature at the inlet end of the object 5 to be cooled to reach the required level.
  • Embodiment 1 The difference between this embodiment and Embodiment 1 is that the control mode of the control unit 11 is different.
  • the detection data of the first temperature sensor 12 in this embodiment is not used for feedback, but is used only for temperature monitoring. That is to say, the present embodiment uses only the second temperature sensor 13 to simultaneously feed back the opening degrees of the expansion valve 3 and the three-way valve 8, and the precise temperature control is realized by the control unit 11. Specifically, the control unit 11 is controlled by: detecting, by the second temperature sensor 13, whether the temperature of the inlet end of the object to be cooled 5 meets the requirement, and if the requirements are not met, adjusting the three-way valve 8 and the expansion valve 3 at the same time, The temperature at the inlet end of the object to be cooled 5 is brought to the required level.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)
  • Devices That Are Associated With Refrigeration Equipment (AREA)

Abstract

L'invention concerne un appareil et un procédé de régulation de température de liquide. L'appareil de régulation de température de liquide comprend: une unité de refroidissement à circulation pour fournir de l'énergie thermique et une puissance frigorifique à un objet à refroidir; une unité d'application de refroidissement à circulation reliée à l'unité de refroidissement à circulation et utilisée pour fournir de manière circulaire un refroidissement à l'objet à refroidir; une unité d'échange de chaleur pour effectuer un échange de chaleur entre l'unité de refroidissement à circulation et l'unité d'application de refroidissement à circulation; et une unité de détection et de régulation de température pour surveiller la température de l'unité de refroidissement à circulation et celle de l'unité d'application de refroidissement à circulation. Avec l'unité de refroidissement à circulation, le plus fondamental est, qu'il n'est pas nécessaire de souder et d'ajouter n'importe quel composant à l'unité de refroidissement à circulation, qu'il y a moins de points de soudure dans l'unité de refroidissement à circulation, et qu'il n'y a pas de risque de fuite de réfrigérant, de telle sorte que la fiabilité est relativement améliorée.
PCT/CN2018/092819 2017-06-29 2018-06-26 Appareil et procédé de régulation de température de liquide WO2019001413A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US16/627,580 US20200149792A1 (en) 2017-06-29 2018-06-26 Liquid temperature-control apparatus and method
KR1020207002829A KR102245550B1 (ko) 2017-06-29 2018-06-26 액체 온도 제어 장치 및 방법
SG11201913037PA SG11201913037PA (en) 2017-06-29 2018-06-26 Liquid temperature-control apparatus and method
JP2019570525A JP6931093B2 (ja) 2017-06-29 2018-06-26 液体温度制御装置及び方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201710517728.5A CN109210836A (zh) 2017-06-29 2017-06-29 液体温控装置和方法
CN201710517728.5 2017-06-29

Publications (1)

Publication Number Publication Date
WO2019001413A1 true WO2019001413A1 (fr) 2019-01-03

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US (1) US20200149792A1 (fr)
JP (1) JP6931093B2 (fr)
KR (1) KR102245550B1 (fr)
CN (1) CN109210836A (fr)
SG (1) SG11201913037PA (fr)
TW (1) TWI675263B (fr)
WO (1) WO2019001413A1 (fr)

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CN112058332B (zh) * 2019-06-10 2022-02-11 上海微电子装备（集团）股份有限公司 一种恒温液槽
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