WO2019000823A1 - 涂胶设备 - Google Patents

涂胶设备 Download PDF

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Publication number
WO2019000823A1
WO2019000823A1 PCT/CN2017/112937 CN2017112937W WO2019000823A1 WO 2019000823 A1 WO2019000823 A1 WO 2019000823A1 CN 2017112937 W CN2017112937 W CN 2017112937W WO 2019000823 A1 WO2019000823 A1 WO 2019000823A1
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WO
WIPO (PCT)
Prior art keywords
mask
substrate
moving
gumming
carrying
Prior art date
Application number
PCT/CN2017/112937
Other languages
English (en)
French (fr)
Inventor
蔡丰豪
卢连杰
金东焕
金映秀
吴建霖
曹绪文
Original Assignee
武汉华星光电半导体显示技术有限公司
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Publication date
Application filed by 武汉华星光电半导体显示技术有限公司 filed Critical 武汉华星光电半导体显示技术有限公司
Priority to US15/745,430 priority Critical patent/US20200078823A1/en
Publication of WO2019000823A1 publication Critical patent/WO2019000823A1/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
    • B05B12/16—Arrangements for controlling delivery; Arrangements for controlling the spray area for controlling the spray area
    • B05B12/20—Masking elements, i.e. elements defining uncoated areas on an object to be coated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C3/00—Apparatus in which the work is brought into contact with a bulk quantity of liquid or other fluent material
    • B05C3/20—Apparatus in which the work is brought into contact with a bulk quantity of liquid or other fluent material for applying liquid or other fluent material only at particular parts of the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J3/00—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
    • B41J3/407—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed for marking on special material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B05C11/08—Spreading liquid or other fluent material by manipulating the work, e.g. tilting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/02—Processes for applying liquids or other fluent materials performed by spraying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/32—Processes for applying liquids or other fluent materials using means for protecting parts of a surface not to be coated, e.g. using stencils, resists
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages

Definitions

  • the invention relates to the technical field of rubber coating manufacturing, in particular to a rubber coating device.
  • the gluing process is used in electronic processes such as semiconductors, displays, touch screens, etc.
  • coating methods used in electronic processes such as semiconductors, displays, touch screens, etc.
  • the traditional gluing equipment has rolling, netting, letterpress printing, etc.
  • the inkjet printing gluing method has the feature of printing on demand, and can directly print the approximate graphic, which saves the material cost; but it is difficult to ensure the accuracy of the gluing.
  • the invention provides a rubber coating device which improves the precision of coating.
  • the present invention relates to a gluing device, comprising a mobile carrying platform carrying a substrate, a mask having a hollow pattern, a registration system, and a coating nozzle, the mask being located above the moving platform and between the substrates a gap, the orthographic projection of the mask on the moving platform completely covers the substrate, the alignment system is located on a side of the mask above the moving platform, and the paint nozzle is located on the mask Just above it is used to spray the paint onto the mask.
  • the glue coating device includes a bearing frame, and the bearing frame is supported above the mobile loading platform.
  • the bearing frame includes a bearing edge, and the periphery of the masking plate is supported by the bearing edge.
  • the bearing frame is provided with a vacuum hole, and the mask plate is adsorbed and fixed to prevent the mask plate from moving during the use of the alignment plate, thereby affecting the alignment accuracy.
  • the mask and the substrate are each provided with a positioning mark for the mask and the base The alignment of the board.
  • the positioning mark is a static mark or a position sensor.
  • the moving carrier includes a platen and a moving portion supporting and moving the platen, and the moving portion drives the platen to move relative to the mask to achieve alignment of the substrate and the mask.
  • the plate has a vacuum hole to adsorb the substrate to avoid substrate movement.
  • the moving part includes a sliding rail and a sliding slot matched with the sliding rail, and the sliding plate is supported on the sliding rail or the sliding slot; or the moving part includes a screw and a sliding sliding on the screw a block, the platen being supported on the slider.
  • the mask plate is provided with a pattern formed by a plurality of hollow regions, and the region of the paint nozzle spray region corresponding to the hollow region is larger than the size of the hollow region.
  • the uniformity of the pattern of the paint nozzle after the substrate is sprayed is adjusted by adjusting the size of the gap.
  • the paint sprayed by the paint nozzle is an ink.
  • the glue application device includes a controller, and the controller is connected to the alignment system, the carrier frame, and the mobile carrier, and is configured to control the alignment system to align the mask plate on the carrier frame with the substrate on the mobile carrier.
  • the coating device of the invention adopts the alignment system to position the mask plate and the substrate multiple times on the moving carrier, and at the same time, can adjust the distance between the mask plate and the substrate to accurately measure the size of the range, and achieve accurate alignment. To ensure the quality of spray printing.
  • Figure 1 is a schematic illustration of a gumming apparatus of the present invention.
  • the invention provides a glue coating device, which is suitable for the shape of a layer structure graphic of a liquid crystal display, a touch screen and the like.
  • the glue application refers to spraying ink, and is suitable for forming a layer structure pattern on a glass substrate of a liquid crystal display.
  • the gumming apparatus includes a carrier substrate 10 , a moving carrier 12 , a mask 13 having a hollow pattern, a registration system 14 , and a paint head 15 .
  • the masking plate 13 is located above the moving carrying platform 12 and has a gap S between the substrate 10, and the orthographic projection of the masking plate 13 at the moving carrying platform 12 completely covers the substrate 10,
  • the alignment system 14 is located on the side of the masking plate 13 above the moving stage 12, and the paint head 15 is located directly above the masking plate 13 for spraying paint onto the masking plate 13.
  • the coating of the paint head 15 is an ink.
  • the mask 13 is a metal mask.
  • the alignment system 14 can be a CCD image sensor.
  • the alignment system includes a camera and a graphics processor and a moving component (not shown). Before the nozzle starts to be ejected, the moving component moves the camera to the vicinity of the alignment mark to perform image acquisition and data alignment, and completes the alignment. After the action, the moving component moves the camera over the mask to prevent the camera from moving to the nozzle and jetting interference.
  • two alignment systems are used for alignment, and two alignment systems are respectively located on opposite sides of the mask plate 13. After the alignment is completed, the alignment systems on both sides of the alignment system are removed from the mask plate 13. The alignment system 14 accurately aligns the position of the mask 13 relative to the substrate 10.
  • the coating device uses the mask 13 as a master, and the coating nozzle 15 first moves to a position above the mask that needs to be sprayed to spray the coating onto the mask 13.
  • the hollow portion of the pattern of the mask exposes the substrate 10.
  • the surface is coated with the paint, which is equivalent to the transfer mode, so that the portion that does not need to be sprayed is blocked by the mask, so that the mass transferred to the substrate 10 is more precise.
  • the glue coating device includes a carrying frame 16 supported on the moving carrying platform 12, and the carrying frame 16 is a quadrilateral or polygonal frame, and includes a bearing edge 161, and the periphery of the masking plate 13 Supported by the carrying edge 161, the pattern of the mask 13 is leaked out. At the same time, the vacuum hole on the bearing frame 16 adsorbs the mask plate 13 to prevent the mask plate from affecting the alignment accuracy.
  • the glue application device includes a controller, and the controller is connected to the alignment system 14, the carrier frame 16, and the mobile carrier, for controlling the alignment system 14 to align the mask 13 and the mobile carrier on the carrier frame 16.
  • the substrate 10 on the stage 12.
  • the controller controls the preliminary positioning of the carrying frame 16 and the mobile carrying platform 10, and controls the displacement of the carrying frame 16 and the mobile carrying platform 10 according to the human eye recognition positioning mark or the data of the position sensor according to the position sensor, and then passes through the alignment system 14 After the position of the mask 13 on the substrate 10 is accurately positioned, the data is transmitted to the controller, and then the controller adjusts the position of the mobile platform 10. To adjust the position of the substrate 10, it is ensured that the orthographic projection of the mask completely covers the substrate 10 while the pattern of the mask is aligned with the patterned area of the substrate 10.
  • the mask plate 13 having the pattern to be formed on the substrate 10 is mounted on the carrier frame 16 for vacuum adsorption to fix the mask plate 13, and the substrate 10 to be sprayed is placed on the moving stage 12 for vacuum adsorption. Fixing the substrate 10, and then adjusting the gap size S of the substrate 10 with respect to the mask plate.
  • the carrying platform has a lifting portion, and the lifting portion drives the platen to be lifted and lowered relative to the mask to achieve the The size of the gap between the substrate and the mask is adjusted.
  • the controller adjusts the position of the carrying frame 16 and the moving carrier 12 to initially align the mask 13 with the substrate 10. Then, the controller controls the alignment system 14 to realign the position of the substrate 10 and the mask 13 and then adjusts again.
  • the position of the loading platform 12 is moved so that the area to be coated of the substrate 10 and the pattern area of the mask 13 are accurately aligned, and then the paint head 15 is controlled to move to a position above the mask where spraying is required for spraying.
  • the controller controls the ejection amount of the ejection head to adjust the thickness of the ink sprayed onto the substrate to ensure that the thickness of the ejection film reaches a requirement.
  • the amount and position of the spray head 15 can be adjusted by the controller to realize the size of the sprayed area of the spray head on the mask plate 13. It is also possible to accurately measure the size of each pattern area.
  • the distance between the mask 13 and the substrate 10 can be adjusted to be small, preferably 50 um, so that By narrowing the ink diffusion distance of the gap between the mask 13 and the substrate 10, it is possible to ensure that the mother mask 11 is more accurately printed on the substrate 10 and the overall uniformity of the coating, as long as the complete coating of the pattern can be ensured.
  • the ink is sprayed onto the mask 13 through the head, and the ink located in the pattern area forms an ink pattern on the substrate 10.
  • the uniformity and precision of the pattern of the paint head 15 after the substrate 10 is sprayed are adjusted.
  • the range in which the paint head 15 is sprayed onto the substrate 10 through the mask 13 is increased, and the range is decreased, so that it can be more precise.
  • the size of the outline of the pattern formed on the substrate is adjusted.
  • the spray nozzle 15 is sprayed on the mask plate to a slightly larger extent than the hollow pattern of the mask 13 to ensure that the hollowed out position is all sprayed.
  • the mask plate 13 is provided with a pattern of a plurality of hollow regions, and the paint spray The area of the head 15 corresponding to the hollow area is larger than the size of the hollow area, so that the integrity of the spraying can be ensured.
  • the mask plate 13 and the substrate 10 are each provided with positioning marks for alignment of the mask plate 13 and the substrate 10.
  • the positioning mark is a static mark (such as a tick mark) or a position sensor.
  • the position sensor is used to transmit data to the controller by the mask 13 and the substrate 10 alignment position sensor, and the controller controls the displacement of the moving stage 12.
  • the moving carrier 12 includes a platen 121 and a moving portion (not shown) that supports and moves the platen 121.
  • the moving portion drives the platen 121 to move relative to the mask 13 to implement the substrate 10 and The alignment of the mask 13 is performed.
  • the moving portion includes a sliding rail and a sliding slot that cooperates with the sliding rail, and the sliding plate is supported on the sliding rail or the sliding slot; or the moving portion includes a screw and a sliding slider disposed on the screw.
  • the platen is supported on the slider.
  • the coating device of the invention adopts the alignment system to position the mask plate and the substrate multiple times on the moving carrier, and at the same time, can adjust the distance between the mask plate and the substrate to accurately measure the size of the range, and achieve accurate alignment. To ensure the quality of spray printing.

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  • Coating Apparatus (AREA)
  • Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

一种涂胶设备，包括承载基板（10）的移动承载台（12）、具有镂空图案的掩膜板（13）、对位系统（14）以及涂料喷头（15），所述掩膜板（13）位于所述移动承载台（12）上方与所述基板（10）之间具有间隙，所述掩膜板（13）在所述移动承载台（12）的正投影完全覆盖所述基板（10），所述对位系统（14）位于所述移动承载台（12）上方掩膜板（13）一侧，所述涂料喷头（15）位于所述掩膜板（13）正上方用于喷射涂料至掩膜板（13）上。

Description

涂胶设备
本发明要求2017年6月28日递交的发明名称为“涂胶设备”的申请号201710513523X的在先申请优先权，上述在先申请的内容以引入的方式并入本文本中。
技术领域
本发明涉及涂胶制造技术领域，尤其涉及一种涂胶设备。
背景技术
电子行业加工生产中经常需要使用到涂胶的制程。涂胶制程使用在半导体、显示器、触摸屏等电子制程中，目前采用的涂胶方式比较多，传统的涂胶设备有滚动、结网、凸版印刷等，随着电子行业节约成本的发展，有一些厂商开始使用喷墨印刷的方式做涂胶制程，该喷墨印刷涂胶方式有可以按需打印的特点，可以直接打印出大概图形，该方式节约材料成本；但是确难以保证涂胶的精度。
发明内容
本发明提供一种提高涂胶精度的涂胶设备。
本申请一种涂胶设备，包括承载基板的移动承载台、具有镂空图案的掩膜板、对位系统以及涂料喷头，所述掩膜板位于所述移动承载台上方与所述基板之间具有间隙，所述掩膜板在所述移动承载台的正投影完全覆盖所述基板，所述对位系统位于所述移动承载台上方掩膜板一侧，所述涂料喷头位于所述掩膜板正上方用于喷射涂料至掩膜板上。
其中，所述涂胶设备包括承载框，所述承载框支撑于移动承载台的上方，所述承载框包括承载边，所述掩膜板的周边通过所述承载边支撑。所述承载框带有真空孔，对所述掩膜板进行吸附固定，避免掩膜板对位使用过程中移动，影响对位精度。
其中，所述掩膜板和所述基板均设有定位标记，用于所述掩膜板和所述基 板的对位。
其中，所述定位标记为静态标记，或者为位置感应器。
其中，所述移动承载台包括台板及支撑并带动台板移动的移动部，所述移动部带动台板相对所述掩膜板移动以实现所述基板与掩膜板的对位。所述台版带有真空孔对所述基板进行吸附避免基板移动。
其中，所述移动部包括滑轨及与滑轨配合的滑槽，所述台板支撑于所述滑轨或者滑槽上；或者，所述移动部包括丝杠及滑动设于丝杠的滑块，所述台板支撑于所述滑块上。
其中，所述掩膜板上设有数个镂空区域构成的图案，所述涂料喷头喷射区域对应镂空区域喷射的区域大于该镂空区域的尺寸。
其中，通过调整所述间隙的尺寸调整所述涂料喷头在所述基板喷涂后的图案的均匀性。
其中，所述涂料喷头喷射的涂料为油墨。
所述涂胶设备包括控制器，所述控制器连接对位系统、承载框及移动承载台，用于控制对位系统对位所述承载框上的掩膜板与移动承载台上的基板。
本发明所述的涂胶设备采用对位系统于移动承载台对掩膜板与基板进行多次定位，同时可以调整掩膜板与基板之间的距离来精确喷涂范围的大小，实现精准对位，保证了喷涂印刷的品质。
附图说明
为更清楚地阐述本发明的构造特征和功效，下面结合附图与具体实施例来对其进行详细说明。
图1是本发明涂胶设备的示意图。
具体实施方式
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述。其中，附图仅用于示例性说明，表示的仅是示意图，不能理解为对本专利的限制。
本发明提供一种涂胶设备，适用于液晶显示器、触摸屏等层结构图文的形 成，本实施例中的涂胶是指喷涂油墨，适用于液晶显示屏的玻璃基板上形成层结构图案。请参阅图1，所述涂胶设备包括承载基板10、移动承载台12、具有镂空图案的掩膜板13、对位系统14以及涂料喷头15。所述掩膜板13位于所述移动承载台12上方与所述基板10之间具有间隙S，所述掩膜板13在所述移动承载台12的正投影完全覆盖所述基板10，所述对位系统14位于所述移动承载台12上方掩膜板13一侧，所述涂料喷头15位于所述掩膜板13正上方用于喷射涂料至掩膜板13上。所述涂料喷头15的涂料为油墨。所述掩膜板13为金属掩膜板。
所述对位系统14可以是CCD图像传感器。所述对位系统包括摄像头及图形处理器和移动部件(图未示)，所述喷头开始喷射前，所述移动部件将摄像头移动到对位标志附近进行摄像获取数据进行对位，完成对位动作后所述移动部件将所述摄像头移开所述掩膜板上方避免所述摄像头对喷头移动及喷射干扰。本实施例中，采用两个对位系统进行对位，两个对位系统分别位于掩膜板13的相对两侧，完成对位后两侧的对位系统会移出掩膜板13上方，所述对位系统14对所述掩膜板13相对基板10的位置进行精确对位。
所述涂胶设备使用掩膜板13作为母版，涂料喷头15先移动到掩膜板上方需要喷射的位置将涂料喷于掩膜板13上，掩膜板的图案的镂空部分露出基板10的表面并被涂料涂满，也就相当于转印的方式，如此不需要喷涂的部分被掩膜板遮挡，使转印至基板10的团更为精确。
所述涂胶设备包括承载框16，所述承载框16支撑于移动承载台12的上方，所述承载框16为四边形或者多边形框体，其包括承载边161，所述掩膜板13的周边通过所述承载边161支撑，这样就是掩膜板13的图案漏出来。同时承载框16上的真空孔对掩膜板13进行吸附，避免掩膜板移动影响对位精度。
所述涂胶设备包括控制器，所述控制器连接对位系统14、承载框16及移动承载台，用于控制对位系统14对位所述承载框16上的掩膜板13与移动承载台12上的基板10。控制器控制承载框16与移动承载台10的初步定位，主要根据人眼识别定位标记或者根据位置感应器给控制器的数据控制承载框16与移动承载台10的位移，然后通过对位系统14对掩膜板13于基板10的位置进行精准定位后将数据传递给控制器，再由控制器调整移动承载台10的位置 来实现基板10的位置的调整，要保证掩膜板的正投影完全覆盖基板10同时掩膜板的图案对准基板10的成图区域。
在所述将具有待形成于基板10的图案的掩膜板13装于承载框16上进行真空吸附对掩膜板13进行固定，移动承载台12上放置好待喷涂的基板10后进行真空吸附对基板10进行固定，然后调整基板10相对于掩膜板的间隙尺寸S，具体的，所述的承载台具有升降部，所述升降部带动台板相对所述掩膜板升降以实现所述的基板和掩膜板的间隙的尺寸调整。
控制器调整承载框16与移动承载台12的位置使掩膜板13与基板10初步对位，然后控制器控制所述对位系统14再进准基板10与掩膜板13的位置后再次调整移动承载台12的位置，使基板10待涂布区域与掩膜板13的图案区域精准对位，再控制涂料喷头15移动到掩膜板上方需要喷涂的位置进行喷涂。所述的控制器控制喷头喷射量对喷射到所述基板的油墨厚度进行调整，保证喷射膜厚达到要求。所述喷头通过所述掩膜板镂空将油墨喷射到基板10上，所述掩膜板13起到母版作用，最终使所述掩膜板上的图案印刷在所述基板上，实现图案的转移。在喷涂过程中，可以通过控制器调整所述喷头15的喷射量及位置，实现喷头在掩膜板13上喷涂区域的大小。也可以精确到喷涂每个图案区域的大小。由于喷头15和掩膜板13的距离尺寸S可控且掩膜板和基板的平整度可以保证，可以将掩膜板13的和基板10的距离调整得很小，优选的是50um，这样可以将掩膜板13和基板10间的间隙的油墨扩散距离缩小，就可以保证母板掩膜板13更精确的印刷在基板10上面和整体喷涂均一性，只要可以保证图案的完整喷涂。油墨经过喷头喷到掩膜板13上，位于图案区域的油墨在基板10上形成了油墨图形。
也就是说通过调整所述间隙S的尺寸调整所述涂料喷头15在所述基板10喷涂后的图案的均一性及精度。比如，掩膜板13远离基板12，也就是增加S的距离，那么所述涂料喷头15穿过掩膜板13上喷涂到基板10的范围就增大，反之范围就减小，如此可以更精确的调整在基板上形成图案的外型的大小。优选的，喷涂喷头15在掩膜板上喷涂的范围比掩膜板13镂空图案的范围略大些，保证镂空位置全部被喷涂上。
进一步的，所述掩膜板13上设有数个镂空区域构成的图案，所述涂料喷 头15对应镂空区域喷射的区域大于该镂空区域的尺寸，如此可以保证喷涂的完整性。
进一步的，所述掩膜板13和所述基板10均设有定位标记，用于所述掩膜板13和所述基板10的对位。所述定位标记为静态标记(如刻度线)，或者为位置感应器。比如使用位置感应器对掩膜板13和所述基板10对位位置感应器将数据传递给控制器，控制器控制移动承载台12的位移。
所述移动承载台12包括台板121及支撑并带动台板121移动的移动部(图未示)，所述移动部带动台板121相对所述掩膜板13移动以实现所述基板10与掩膜板13的对位。所述移动部包括滑轨及与滑轨配合的滑槽，所述台板支撑于所述滑轨或者滑槽上；或者，所述移动部包括丝杠及滑动设于丝杠的滑块，所述台板支撑于所述滑块上。
本发明所述的涂胶设备采用对位系统于移动承载台对掩膜板与基板进行多次定位，同时可以调整掩膜板与基板之间的距离来精确喷涂范围的大小，实现精准对位，保证了喷涂印刷的品质。
以上所述是本发明的优选实施例，应当指出，对于本技术领域的普通技术人员来说，在不脱离本发明原理的前提下，还可以做出若干改进和润饰，这些改进和润饰也视为本发明的保护范围。

Claims (10)

  1. 一种涂胶设备，其中，包括承载基板的移动承载台、具有镂空图案的掩膜板、对位系统以及涂料喷头，所述掩膜板位于所述移动承载台上方与所述基板之间具有间隙，所述掩膜板在所述移动承载台的正投影完全覆盖所述基板，所述对位系统位于所述移动承载台上方掩膜板一侧，所述涂料喷头位于所述掩膜板正上方用于喷射涂料至掩膜板上。
  2. 如权利要求1所述的涂胶设备，其中，所述涂胶设备包括承载框，所述承载框支撑于移动承载台的上方，所述承载框包括承载边，所述掩膜板的周边通过所述承载边支撑。
  3. 如权利要求2所述的涂胶设备，其中，所述基板和所述掩模板有定位标记，用于所述基板和所述掩模板的对位。
  4. 如权利要求3所述的涂胶设备，其中，所述定位标记为静态标记，或者为位置感应器。
  5. 如权利要求3所述的涂胶设备，其中，所述移动承载台包括台板及支撑并带动台板移动的移动部，所述移动部带动台板相对所述掩膜板移动以实现所述基板与掩膜板的对位。
  6. 如权利要求5所述的涂胶设备，其中，所述移动部包括滑轨及与滑轨配合的滑槽，所述台板支撑于所述滑轨或者滑槽上；或者，所述移动部包括丝杠及滑动设于丝杠的滑块，所述台板支撑于所述滑块上。
  7. 如权利要求1所述的涂胶设备，其中，所述掩膜板上设有数个镂空区域构成的图案，所述涂料喷头对应镂空区域喷射的区域大于该镂空区域的尺寸。
  8. 如权利要求1所述的涂胶设备，其中，通过调整所述间隙的尺寸调整所述掩膜板在所述基板上形成的图案的均一性。
  9. 如权利要求8所述的涂胶设备，其中，所述涂料喷头喷射的涂料为油墨。
  10. 如权利要求2所述的涂胶设备，其中，所述涂胶设备包括控制器，所述控制器连接对位系统、承载框及移动承载台，用于控制对位系统对位所述承 载框上的掩膜板与移动承载台上的基板。
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