200815196 九、發明說明 【發明所屬之技術領域】 本發明是有關網版印刷裝置，尤其是關於具備可塡充 到高長寬比的開口部之塡充頭的網版印刷裝置其及印刷方 法。 【先前技術】 以往，專利文獻1中，揭示對於具有對應小型配線圖 案的小直徑孔的謄寫版等的孔版也可以簡單且確實印刷的 軟焊印刷裝置。該專利文獻1是形成藉著控制部控制對塗 敷在謄寫版的糊料施加壓力之加壓部的動作及驅動謄寫版 的謄寫版驅動部動作的構成。 並且，專利文獻2中，揭示有具備將印刷裝置整體設 置在真空室內，藉著以刮刀將油墨薄層覆蓋在印刷用網版 表面的塗敷步驟，越過滯留在網版表面一端側的油墨滯留 物而藉著滑動台將塗敷在印刷用網版表面的油墨印刷在被 印刷物的印刷步驟，塗敷結束後在印刷步驟之前，設有在 高真空與大氣壓或低真空之間變化，使藉著塗敷步驟所塗 敷油墨中的氣泡脫泡的脫泡步驟，同時在真空周圍環境進 行印刷步驟。 〔專利文獻1〕 日本特開2003- 1 1 8070號公報 〔專利文獻2〕 日本特開2003-300302號公報 【發明內容】 -5- 200815196 〔發明所欲解決之課題〕 上述專利文獻1具有在謄寫版上部具備腔室的加壓 部，加壓腔室，藉著設置在該腔室內的滑動台將糊料塡充 到設置在謄寫版的開口，在謄寫版下部所設定的配線板上 印刷糊料。此時，固定腔室構成使謄寫版及印刷配線板移 動。 如上述，加壓腔室將糊料印刷到印刷配線板時，會有 因加壓力使得腔室上浮，發生獲得加壓效果困難的場合。 並且，必須要構成大的腔室。又，印刷後的印刷配線板通 過腔室時，也會導致好不容易推入的糊料上浮，產生孔隙 的場合。 並且，如專利文獻2在真空腔室內設置印刷裝置，印 刷前呈真空狀態進行糊料的脫泡處理時，雖然可獲得高精 度的印刷，但是會有被印刷物的運入運出耗費工時@ _ 時，並耗費使得真空腔室內真空的時間，同時會有裝置大 型化的問題。 本發明的目的是提供即使在使用高長寬比網版的場 合，仍可高精度進行高速印刷的網版印刷裝g。 〔解決目的的手段〕 載放在台上的基板面上抵接形成預定圖案的開口部白勺 掩模’從掩模上面藉著滑動台’經開口將糊料印刷在g卞反 面上’以密閉式滑動頭作爲從掩模面上的開〇供給糊_ @ Μ動頭，設置對滑動頭內供給負壓的負壓供給機__ _ 200815196BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a screen printing apparatus, and more particularly to a screen printing apparatus having a head which can be filled with an opening having a high aspect ratio and a printing method. [Prior Art] Conventionally, Patent Document 1 discloses a soldering and printing apparatus which can be easily and reliably printed on a stencil such as a lithographic plate having a small-diameter hole corresponding to a small-sized wiring pattern. Patent Document 1 is a configuration in which an operation of a pressurizing unit that applies pressure to a paste applied to a writing plate by a control unit and an operation of a transcription driving unit that drives a transcription plate are formed. Further, Patent Document 2 discloses a coating step in which the entire printing apparatus is installed in a vacuum chamber and the ink thin layer is covered on the surface of the printing screen by a doctor blade, and the ink stays on one end side of the screen surface. And printing the ink coated on the surface of the printing screen by the sliding table on the printing step of the printed matter, and after the printing is finished, before the printing step, changing between high vacuum and atmospheric pressure or low vacuum is used to make The defoaming step of bubble defoaming in the ink applied by the coating step is performed while the printing step is performed in the vacuum surrounding environment. [Patent Document 1] Japanese Patent Laid-Open Publication No. JP-A-2003-300302 (Patent Document 2) Japanese Laid-Open Patent Publication No. 2003-300302-1995-199515196 [Problems to be Solved by the Invention] Patent Document 1 described above has The upper part of the writing plate has a pressurizing portion of the chamber, and the pressurizing chamber is filled with the paste placed in the opening of the writing plate by the sliding table provided in the chamber, and printed on the wiring board set in the lower part of the writing plate. Paste. At this time, the fixed chamber is configured to move the writing plate and the printed wiring board. As described above, when the pressurizing chamber prints the paste onto the printed wiring board, the chamber may be floated due to the pressing force, and it may be difficult to obtain a pressurizing effect. Also, it is necessary to form a large chamber. Further, when the printed wiring board after printing passes through the chamber, it also causes the paste which is hard to be pushed up to float, and voids are generated. Further, as disclosed in Patent Document 2, a printing apparatus is provided in a vacuum chamber, and when the paste is defoamed in a vacuum state before printing, high-precision printing can be obtained, but it takes a lot of time to carry in and out of the printed matter. At the time of _, it takes time to vacuum the vacuum chamber, and at the same time there is a problem that the device is enlarged. SUMMARY OF THE INVENTION An object of the present invention is to provide a screen printing apparatus which can perform high-speed printing with high precision even in the case of using a high aspect ratio screen. [Means for Solving the Purpose] The mask on the surface of the substrate placed on the stage abuts the opening portion forming the predetermined pattern, and the paste is printed on the opposite surface of the g-substrate from the upper surface of the mask through the sliding table. The closed sliding head serves as a negative pressure supply machine for supplying a negative pressure to the sliding head as a supply of the paste from the opening on the mask surface _ @ _ _ _ 200815196
〔發明效果〕 對於開口圖案供給糊料時使滑動台內形成負壓狀態進 行，因此在被印刷部底部側不會殘留有氣泡，並且滑動台 通過後對於塡充糊料後的開口部立即施以大氣壓，藉著大 氣壓的推壓力將糊料確實地轉印到被印刷部側，因此即使 小的密集的開口圖案仍可形成高精度的印刷。 【實施方式】 第1圔是表示網版印刷裝置的整體構成的槪略圖。 本發明的網版印刷機1的主體框架上設有未圖示的版 框承架，板框承架上設定有將作爲開口部而具備的網版 21張設在印刷圖案上的掩模20(以下也有含網版說明掩模 的場合）所構成。掩模20的上方配置有滑動頭2，滑動頭 2安裝有滑動台3。滑動頭2藉著滑動台移動機構6可在 水平方向移動，滑動台3可藉著滑動台升降機構4在上下 方向移動。本實施例是以該滑動台升降機構4使用空氣汽 缸的構成爲例來表示（以後，有滑動台升降機構僅單純稱 空氣汽缸，或稱爲印壓汽缸的場合）。掩模20的下方，設 有載放與掩模2 0相對之印刷對象物的基板5而保持的印 刷台1 0。該印刷台1 0，具備：使基板5水平方向移動進 行與掩模20對位的XY (9台Π，及從承接輸送帶26在印 刷台1 0上承接基板5，並使得基板5接近或接觸網版2 ! -7- 200815196 面用的台升降機構1 2。印刷台1 〇的搬運方向兩側設有基 板承接輸送帶26，承接藉基板運入輸送帶25所運入的基 板5，傳遞到印刷台10上。並且，基板承接輸送帶26在 印刷台1 〇上一*旦結束印刷時’ iib印刷台1 〇承接基板’將 基板5排出到基板運出輸送帶27。 '全自動網版印刷機1具備自動進行掩模20與基板5 對位的功能。亦即，藉著CCD攝影機1 5攝影分別設置在 φ 掩模20與基板5對位用掩模，影像處理求得偏位量，驅 動XY 0台進行對位以修正其偏位量。 另外，具備各部驅動用的印刷控制部3 6及處理來自 CCD攝影機1 5的影像訊號的影像輸入部3 7等的印刷控 制部3 0是設置在印刷機主體框架的內部，在印刷機的外 側配置有進行控制用數據的改寫、印刷條件的變更等用的 數據輸入部5 0，及顯示印刷狀況等或所接收辨識標誌用 的顯示部4 0。 φ 印刷糊料的基板5藉著基板運入輸送帶25供給到基 板承接輸送帶26，固定在印刷台1 0上的預定位置。基板 5在印刷台1 0固定後，在預先註冊所設定的基板標誌位 置移動CCD攝影機15。接著CCD攝影機15攝影設置在 基板5及掩模20(或網版21的面上）的位置辨識用標誌（未 圖示），轉印到印刷機控制部3 0。控制部內的影像輸入部 37是從影像數據求得掩模與基板的偏位量。根據其結 果，印刷機控制部3 0從XY 0台控制部將驅動訊號傳送到 XY 0台1 1，根據其訊號使XY 0台1 1動作將相對於掩模 -8 - 200815196 2〇的基板5的位置修正•對位。對位動作結束後’ CCD 攝影機1 5以預定量退避動作到不與印刷台1 〇干涉的位置 爲止。CCD攝影機15的退避結束後，印刷台1〇上升與 基板5及網版21接觸。隨後，藉著滑動台升降機構4使 得滑動台3下降到接觸掩模20的網版21面上爲止。接 著，根據滑動頭2的移動將供給至網版21面上的糊料塡 充至網版21的開口部，轉印到基板上。滑動台3在水平 方向以一定距離的行程後上升。並且，印刷台1 0下降， 使得網版2 1與基板5分開，將塡充到網版21的開口部後 的糊料轉印到基板5。 並且，印刷有糊料的基板5是從基板承接輸送帶25 經由基板運出輸送帶27送到接著的步驟。 另外，基板5與掩模21在相對的相同位置上設置2 個以上的辨識對位用標誌。該等雙方的標誌分別以具有上 下方向雙視野的特殊的CCD攝影機1 5，從下方辨識掩模 2〇的標誌，從上方辨識基板的標誌，對於設置在預定處 的所有標誌讀取位置座標，對於掩模20的基板5的偏位 量進行位置運算•修正，相對於基板5進行對位。 第1 (b)圖表示的印刷機控制部3 0是藉著影像輸入部 37接收CCD攝影機15所攝影的任意圖案，在任意圖案 的周圍即使存在有類似圖案，仍然可以藉著相關値計算部 31來運算辭典38預先所準備的範本與CCD攝影機15所 攝影的任意圖案的相關値。根據相關値計算部31所求得 的相關値’利用形狀推定部32進行範本的形狀推定。將 _ 9 - 200815196 所推定的形狀作爲複數個假基準圖案加以記憶設定。並 且，具備藉著圖案位置座標運算部33和目標基準圖案間 距離比較’並以尺寸計算部3 4求得形狀尺寸，將差最小 的組合的標誌作爲基準圖案註冊在辭典3 8的手段。 並且’在印刷機控制部3 0上具備控制滑動頭2等的 動作的印刷控制部3 6。 但是’最近的基板將供給糊料的軟焊區域加以微細 化。因此’藉著網版印刷使得供給糊料的長寬比形成1以 上，並且在供給基板側的糊料產生氣泡而不能供給足夠量 的糊料。由此’本發明在滑動頭2是使用密閉式滑動台構 造，使滑動頭2的內部形成負壓狀態，將糊料供給至掩模 開口部的構成，藉以防止氣泡產生的同時，並可容易進行 對被印刷物的轉印。 接著’針對本實施例的滑動頭2使用第2圖說明如 下。第2圖是表示本發明網版印刷機所使用的密閉式滑動 頭的部份剖視圖。箭頭7是表示糊料塗敷時的滑動台3的 移動方向。本發明的滑動頭2在滑動台外筒3a的內側兩 端部安裝有滑動台3。以後以該滑動台外筒3 a內作爲滑 動頭內部1 7稱之加以說明。再者，滑動台3是形成在移 動方向（箭頭7)的直角方向對應網版21的寬度形成長形， 並在兩端部與滑動台3大致相同的高度設置蓋體的密閉式 的滑動頭構造。 網版21接觸到基板5面的同時，在滑動台3接觸網 版2 1的狀態下，滑動頭內部1 7是形成大致密閉狀態。在 -10- 200815196 # $態、下’空壓控制機構（負壓供給機構）動作使滑動頭內 部1 7形成負壓狀態而藉著排氣配管8進行滑動頭內部i 7 空氣的排氣8a。滑動頭內部1 7減壓至預定的壓力時，滑 動台移動機構6動作使得網版2丨面上朝著箭頭7方向移 動’將糊料1 9壓入網版2 1面設有的開口部1 6。此時， 由於滑動頭內部17是形成負壓，因此大氣壓9對於滑動 頭2通過之後的基板5與網版21作用的同時，對於開口 部16的糊料同時有大氣壓的作用，可確實將糊料19塡充 於基板5面或設置在基板5的孔內。此外，隨著滑動頭2 朝著箭頭7方向的移動轉動力作用於糊料1 9而轉動。此 時周圍爲大氣狀態的場合，同時會有捲入空氣而產生氣泡 的場合，但是周圍形成負壓而可防止其產生。如上述，轉 動糊料可提升糊料的流動性。 以下，使用第3圖詳細說明有關滑動頭2內部的空壓 控制與其動作。第3圖是表示滑動頭周圍的空氣控制系。 本發明的空壓控制是使用空氣汽缸（以後有稱爲印壓汽缸 4的場合）構成上下驅動滑動頭2的滑動台升降機構，同 時設有滑動頭內部1 7形成負壓的真空泵4 6。並將測量滑 動頭內部1 7的壓力用的真空感測器45設置在連接於真空 栗46的排氣配管8。並在排氣配管8設置電動氣動調節 器4 3，以真空感測器4 5對應測定後滑動頭內部1 7的負 壓力，控制真空調節器46及電動氣動調節器43，將滑動 頭內部1 3的負壓力保持一定。如上述滑動頭內部1 7 —旦 形成負壓時，對於滑動頭2施加負壓力與大氣壓9的壓力 -11 - 200815196 差，將滑動台3推向網版21側。因此’對於滑動 前端部會有施加過剩的壓力’增加印壓而有不能形 印壓的場合。因此，必須要設置適當控制印壓用的 整機構。 例如，負壓爲〇 ·0 5 MP滑動頭2的受壓面積爲 的場合，形成66kg而形成較適當印壓6.6kg爲大 進行適當的印刷。因此’調整印壓以進行適當的印 壓調整機構是使用先前說明的滑動台升降機構4 ’ 感測器4 5測量滑動頭內部1 7的負壓力，使滑動頭 來進行。亦即，本實施例是對於印壓汽缸施加背壓 負壓力的一部份控制使其形成適當印壓的構成。因 印壓汽缸4內活塞的下壓側4d與上推側4u分別配 配管18d、18u，詳細爲從未圖示的壓縮機47供給 氣的構成。下壓側的空氣配管1 8d設有電磁閥44 氣動調節器4 1。下壓側的空氣配管1 8u僅顯示有 動調節器42，但是也可以設置電磁閥。並且，圖 在設置真空泵4 6的排氣配管8設置電動氣動調節I 構成’但是只要真空泵爲一定排氣則可以省略電動 節器43。並且各電動氣動調節器41、42、43或電 被連接在印刷機控制部3 0內的印刷控制部3 6上。 制部3 6是根據真空感測器45的檢測訊號，控制各 動調節器41、42、43或電磁閥44的構成。此外， 不設置壓縮機4 7，形成從真空泵4 6的排氣側傳送 氣的構成。 台3的 成適當 印壓調 133cm2 ，不能 刷。印 以真空 2上下 ，取消 此，在 置空氣 壓縮空 與電動 電動氣 中雖然 蓉43的 氣動調 磁閥44 印刷控 電動氣 也可以 壓縮空 -12- 200815196 此外，使滑動頭內部17形成負壓，以運用本實施例 的裝置進行實驗。其結果，將滑動頭內部1 7的負壓力控 制在0.0 1〜0·05 Mp的範圍，進行塗敷後獲得良好的結果。 另外，如本實施例滑動頭內部1 7形成負壓時，糊料 內的溶劑成分較大氣壓環境下更爲容易揮發，因此減少溶 劑的種類或量，使用抑制揮發成份的特性變化少的糊料。 並且，進行印刷動作以外的時間，預先將滑動頭內部i 7 _ 形成大氣壓，使得糊料暴露在負壓環境下的時間盡量地縮 短來抑制糊料的特性變化爲佳。 再者，上述的實施例雖是表示使用印壓汽缸以空氣壓 控制滑動頭2的滑動台升降機構4的構成，但是也可以使 用電動馬達的構成來取代印壓汽缸，也可以設置動作傳動 方式的驅動機構的滑動台升降機構。 接著，有關本發明的印刷動作，使用第1圖〜第3圖 說明。 • 首先，在基板運入輸送帶25上搭載有印刷對象物的 基板5時，驅動基板運入輸送帶25，使基板5在基板承 _ 接輸送帶26上移動。基板承接輸送帶26在基板5到達印 刷台10上爲止時停止。基板承接輸送帶26 —旦停止時， 印刷台1 0上升藉著基板承接輸送帶26在印刷台1 0面上 接受基板5。接著，以CCD攝影機15攝影設置在基板5 及網版21面上的對位標誌。攝影後的數據傳送到印刷機 控制部30，在此運算各個標誌位置座標，求得偏位量。 對應所求得的偏位量驅動XY 0台1 1進行對位。一旦結束 -13- 200815196 對位時，使CCD攝影機15退避到標誌20以外的位置。 c c D攝影機1 5退避後，印刷台1 〇更上升使得基板5接 觸到網版2 1的內面。接著供給糊料至網版2 1的表面單側 (印刷開始位置）。隨後，將滑動頭2移動到內包糊料的位 置，且滑動台3接觸掩模2 0的表面而下降到對於滑動台 施以預定的壓力爲止。 接著，藉負壓供給機構供給負壓至滑動頭2內。滑動 頭內部1 7 —旦形成負壓狀態時，確認印壓是否形成預定 的値，如爲預定的印壓時，開始滑動頭2的移動將糊料壓 入設置在網版21的開口部。並且，爲了使得隨著滑動頭 2的移動之滑動頭內的負壓變動減少，即使移動中仍持續 供給負壓。又，印壓形成過大的場合，則對於印壓汽缸4 施加背壓使得上推滑動台方向的力作用以控制形成預定的 印壓。預先以實驗求得上述印壓與負壓力的關係，預先加 以記憶，也可以對應測量的負壓力控制適當的印壓。爲測 量印壓在空壓汽缸與滑動頭之間設置壓力感測器，可測量 正確的印壓。 供給該網版開口部的糊料在滑動頭2經過時直接施加 大氣壓9，並推壓至網版開口部的基板側。滑動頭2移動 到網版2 1的預定區域結束時，停止對於滑動頭2負壓的 供給，使滑動頭2上升。接著，使印刷台1 0下降從基板 面剝下網版21將糊料轉印到基板5上。隨後，更使得印 刷台1 0下降，將基板5傳遞到基板承接輸送帶26。基板 承接輸送帶26 —旦接受基板時即開始移動，將基板5傳 -14- 200815196 遞到基板運出輸送帶27。從基板運出輸送帶27將基板5 排出到緊接的步驟。 如上述，使用本發明的裝置印刷時，以滑動頭對於網 版開口部塡充糊料之後，立即對塡充部施以大氣壓，因此 * 在糊料流動性大的期間形成大氣壓的施加，可確實地去除 * 氣泡。因此，印刷後的糊料不會殘留氣泡，並可形成細緻 的印刷。 【圖式簡單說明】 第1圖是說明網版印刷裝置的整體構成用的圖。 第2圖爲滑動頭部的剖面圖。 第3圖示說明滑動頭部的空壓控制系用的圖。 【主要元件符號說明】 1 :網版印刷機 _ 2:滑動頭 3 :滑動台 4 :滑動台升降機構（印刷汽缸） 5 :基板 6 :滑動台移動機構 8 :排氣配管 9 :大氣壓 1 0 :印刷台 46 :真空泵 -15-[Effect of the Invention] When the paste is supplied to the opening pattern, a negative pressure state is formed in the slide table. Therefore, air bubbles do not remain on the bottom side of the portion to be printed, and the opening portion of the paste is immediately applied after the slide table passes. At a pressure of atmospheric pressure, the paste is reliably transferred to the side of the portion to be printed by the pressing force of the atmospheric pressure, so that even a small dense opening pattern can form high-precision printing. [Embodiment] The first embodiment is a schematic diagram showing the overall configuration of a screen printing apparatus. A screen frame (not shown) is provided on a main body frame of the screen printing machine 1 of the present invention, and a mask 20 for laying a screen 21 provided as an opening on a printing pattern is set on the frame carrier. (There is also a case where the screen is included in the screen). A slider 2 is disposed above the mask 20, and the slider 3 is attached to the slider 2. The slide head 2 is movable in the horizontal direction by the slide table moving mechanism 6, and the slide table 3 can be moved in the up and down direction by the slide table elevating mechanism 4. In the present embodiment, the configuration in which the slide table elevating mechanism 4 uses an air cylinder is shown as an example (hereinafter, the slide table elevating mechanism is simply referred to as an air cylinder or a press cylinder). Below the mask 20, a printing table 10 held by a substrate 5 on which a printing object is opposed to the mask 20 is placed. The printing table 10 includes XY (9 sets of the substrate 5 that is moved in the horizontal direction and aligned with the mask 20, and the substrate 5 is received from the receiving conveyance belt 26 on the printing table 10, and the substrate 5 is brought close to or Contact screen 2 ! -7- 200815196 Table lifting mechanism 1 2. The printing table 1 is provided with a substrate receiving conveyor belt 26 on both sides of the conveying direction, and carries the substrate 5 carried by the conveying belt 25 by the substrate. It is transferred to the printing table 10. Further, when the substrate receiving conveyor belt 26 finishes printing on the printing table 1 'iib printing table 1 〇 receiving substrate' discharges the substrate 5 to the substrate transporting conveyor belt 27. The screen printing machine 1 has a function of automatically aligning the mask 20 with the substrate 5. That is, the CCD camera 15 is provided with a mask for aligning the φ mask 20 and the substrate 5, and the image processing is offset. In the XY 0 position, the XY 0 is aligned to correct the amount of eccentricity. The printing control unit 36 for driving each unit and the print control unit for processing the video input unit 3 7 from the CCD camera 15 3 0 is set inside the main frame of the printing press, in the printing press The data input unit 50 for rewriting the control data, changing the printing conditions, and the like, and the display unit 40 for displaying the printing status or the received identification mark are disposed on the outer side. φ The substrate 5 of the printing paste is supported by the substrate. The carry-in conveyor 25 is supplied to the substrate receiving conveyor 26 and fixed to a predetermined position on the printing table 10. After the printing table 10 is fixed, the substrate 5 is moved to the CCD camera 15 by registering the set substrate mark position in advance. The camera 15 photographs a position recognition flag (not shown) provided on the substrate 5 and the mask 20 (or the surface of the screen 21), and transfers it to the printer control unit 30. The image input unit 37 in the control unit is a slave. The image data determines the amount of deviation between the mask and the substrate. Based on the result, the printer control unit 30 transmits the drive signal from the XY 0 control unit to the XY 0 unit 1 1, and operates the XY 0 unit 1 1 according to the signal. The position of the substrate 5 with respect to the mask -8 - 200815196 2〇 is corrected and aligned. After the alignment operation is completed, the CCD camera 15 is evacuated by a predetermined amount to a position that does not interfere with the printing table 1 CCD camera. End of 15 retreat The printing table is lifted in contact with the substrate 5 and the screen 21. Then, the slide table 3 is lowered by the slide table elevating mechanism 4 to contact the face of the screen 21 of the mask 20. Then, according to the movement of the slider 2 The paste supplied to the surface of the screen 21 is charged to the opening of the screen 21 and transferred onto the substrate. The slide table 3 is lifted after a certain distance in the horizontal direction, and the printing table 10 is lowered, so that The screen plate 21 is separated from the substrate 5, and the paste which is charged to the opening of the screen 21 is transferred to the substrate 5. Further, the substrate 5 on which the paste is printed is transported from the substrate receiving conveyor 25 through the substrate. The belt 27 is sent to the next step. Further, the substrate 5 and the mask 21 are provided with two or more identification alignment marks at the same positions. Each of the two logos is a special CCD camera 15 having a double field of view in the vertical direction, and the mark of the mask 2 is recognized from below, and the mark of the substrate is recognized from above, and the position coordinates are read for all the marks placed at the predetermined position. The positional calculation and correction of the amount of deflection of the substrate 5 of the mask 20 are aligned with respect to the substrate 5. The printer control unit 30 shown in Fig. 1(b) receives an arbitrary pattern photographed by the CCD camera 15 via the video input unit 37, and even if there is a similar pattern around the arbitrary pattern, the correlation unit can still be used by the correlation unit. 31. The correlation between the template prepared in advance by the dictionary 38 and the arbitrary pattern photographed by the CCD camera 15 is calculated. The shape estimation unit 32 estimates the shape of the template based on the correlation 値' obtained by the correlation unit calculation unit 31. The shape estimated by _ 9 - 200815196 is set as a plurality of false reference patterns. Further, a means for obtaining a shape size by the size calculating unit 34 by the pattern position coordinate calculating unit 33 and the distance between the target reference patterns and having the combination of the smallest difference is registered as a reference pattern in the dictionary 38. Further, the printing machine control unit 30 is provided with a print control unit 36 that controls the operation of the slider 2 or the like. However, the nearest substrate refines the solder joint region to which the paste is supplied. Therefore, by the screen printing, the aspect ratio of the supply paste is made 1 or more, and the paste on the supply substrate side generates bubbles to supply a sufficient amount of the paste. According to the present invention, in the sliding head 2, the closed sliding table structure is used, and the inside of the sliding head 2 is formed in a negative pressure state, and the paste is supplied to the opening of the mask, thereby preventing the occurrence of bubbles and being easy. Transferring the printed matter is performed. Next, the slider 2 of the present embodiment will be described below using Fig. 2 . Fig. 2 is a partial cross-sectional view showing the sealed type slider used in the screen printing machine of the present invention. The arrow 7 indicates the moving direction of the slide table 3 when the paste is applied. In the slide head 2 of the present invention, a slide table 3 is attached to both inner end portions of the slide table outer cylinder 3a. Hereinafter, the inside of the slide table outer cylinder 3a will be referred to as the inner portion of the slider. Further, the slide table 3 is a closed type slider in which a width is formed in a direction perpendicular to the moving direction (arrow 7) corresponding to the width of the screen 21, and the lid body is provided at substantially the same height at both end portions as the slide table 3. structure. While the screen 21 is in contact with the surface of the substrate 5, the slider inner portion 17 is formed in a substantially sealed state in a state where the slide table 3 contacts the screen 221. In the -10-200815196 # $ state, the lower air pressure control mechanism (negative pressure supply mechanism) operates to make the inside of the slider head 17 a negative pressure state, and the exhaust pipe 8 is used to perform the exhaust air 8a of the air inside the slider head i 7 . When the inside of the slider head is depressurized to a predetermined pressure, the slide table moving mechanism 6 operates to move the screen surface of the screen 2 toward the arrow 7 to press the paste 1 9 into the opening provided on the surface of the screen 2 1 1 6. At this time, since the sliding head inner portion 17 is formed with a negative pressure, the atmospheric pressure 9 acts on the substrate 5 and the screen 21 after the sliding head 2 passes, and the paste of the opening portion 16 has an atmospheric pressure at the same time, so that the paste can be surely The material 19 is filled on the surface of the substrate 5 or placed in the hole of the substrate 5. Further, the rotational force is applied to the paste 19 as the sliding head 2 moves in the direction of the arrow 7 to rotate. In this case, when the atmosphere is around, there is a case where air is trapped and air bubbles are generated, but a negative pressure is formed around it to prevent it from occurring. As described above, the rotary paste can improve the fluidity of the paste. Hereinafter, the air pressure control inside the slider 2 and its operation will be described in detail using Fig. 3. Figure 3 is a diagram showing the air control system around the slider. The air pressure control according to the present invention is a slide table elevating mechanism that constitutes the upper and lower drive sliders 2 by using an air cylinder (hereinafter referred to as a press cylinder 4), and is provided with a vacuum pump 46 that forms a negative pressure inside the slider head. The vacuum sensor 45 for measuring the pressure inside the slider 1 is placed in the exhaust pipe 8 connected to the vacuum pump 46. The electro-pneumatic regulator 43 is disposed in the exhaust pipe 8, and the vacuum sensor 45 is used to measure the negative pressure of the inner portion of the sliding head, and the vacuum regulator 46 and the electro-pneumatic regulator 43 are controlled to move the inside of the sliding head 1 The negative pressure of 3 remains constant. When the inside of the slider head 7 is a negative pressure, the negative pressure applied to the slider 2 is different from the pressure -11 - 200815196 of the atmospheric pressure 9, and the slide table 3 is pushed toward the screen 21 side. Therefore, there is a case where an excessive pressure is applied to the front end portion of the sliding portion, and the printing pressure is increased to prevent the printing pressure from being formed. Therefore, it is necessary to set the entire mechanism for proper control of the printing. For example, when the negative pressure is 〇 · 0 5 MP, the pressure receiving area of the slider 2 is set to 66 kg, and a suitable printing pressure of 6.6 kg is formed to perform appropriate printing. Therefore, the adjustment of the printing pressure to perform the appropriate printing adjustment mechanism is performed by measuring the negative pressure of the sliding head inner portion 17 using the slide table lifting mechanism 4' sensor 450 described previously. That is, the present embodiment is a configuration in which a part of the back pressure negative pressure is applied to the press cylinder to form a proper stamp. The tubes 18d and 18u are respectively disposed on the pressing side 4d and the pushing-up side 4u of the piston in the cylinder 4, and the air is supplied to the compressor 47 (not shown) in detail. The air piping 1 8d on the lower pressing side is provided with a solenoid valve 44 pneumatic regulator 41. The air pipe 1 8u on the lower pressing side only shows the movable regulator 42, but a solenoid valve may be provided. Further, the figure is provided with an electropneumatic adjustment I in the exhaust pipe 8 in which the vacuum pump 46 is provided. However, the motor stator 43 can be omitted as long as the vacuum pump is exhausted. Further, each of the electro-pneumatic regulators 41, 42, 43 or the electric power is connected to the printing control unit 36 in the printing machine control unit 30. The portion 36 controls the configuration of each of the actuators 41, 42, 43 or the solenoid valve 44 based on the detection signal of the vacuum sensor 45. Further, the compressor 47 is not provided, and the configuration is such that the air is supplied from the exhaust side of the vacuum pump 46. The appropriate printing pressure of the table 3 is 133cm2, which cannot be brushed. Printing with vacuum 2 up and down, cancel this, in the air compression air and electric electric air, although the pneumatic control valve 44 of the Rong 43 can also compress the air to compress the air-12-200815196 In addition, the internal pressure of the sliding head 17 is negative. Experiments were carried out using the apparatus of the present embodiment. As a result, the negative pressure inside the slider head 17 was controlled in the range of 0.01 to 5.0 Mp, and good results were obtained after coating. Further, when the negative pressure is formed in the inside of the slider head in the present embodiment, the solvent component in the paste is more likely to volatilize under a large pressure atmosphere, so that the type or amount of the solvent is reduced, and the paste having less variation in the characteristics of the volatile component is used. . Further, in the time other than the printing operation, the inside of the slider head i 7 _ is formed into an atmospheric pressure, and the time during which the paste is exposed to the negative pressure environment is shortened as much as possible to suppress the change in the characteristics of the paste. Further, the above-described embodiment is a configuration in which the slide table elevating mechanism 4 for controlling the slider 2 by air pressure is used. However, the configuration of the electric motor may be used instead of the press cylinder, and the operation transmission mode may be provided. The sliding mechanism lifting mechanism of the drive mechanism. Next, the printing operation of the present invention will be described using Figs. 1 to 3 . First, when the substrate 5 on which the object to be printed is mounted is carried on the substrate conveyance belt 25, the drive substrate is carried into the conveyance belt 25, and the substrate 5 is moved on the substrate conveyance belt 26. The substrate receiving conveyor belt 26 is stopped when the substrate 5 reaches the printing table 10. When the substrate receiving conveyor belt 26 is stopped, the printing table 10 is raised by the substrate receiving conveyor belt 26 to receive the substrate 5 on the printing table 10 surface. Next, the alignment mark provided on the surface of the substrate 5 and the screen 21 is photographed by the CCD camera 15. The photographed data is sent to the printer control unit 30, where the coordinates of each mark position are calculated to obtain the amount of misalignment. Corresponding to the obtained amount of offset, the XY 0 stage 11 is driven to perform alignment. When the -13-200815196 is finished, the CCD camera 15 is retracted to a position other than the flag 20. After the c c D camera 1 is retracted, the printing table 1 is further raised so that the substrate 5 is in contact with the inner surface of the screen 21. Next, the paste is supplied to the one side of the surface of the screen 21 (printing start position). Subsequently, the slider 2 is moved to the position where the paste is applied, and the slide table 3 contacts the surface of the mask 20 to drop to a predetermined pressure for the slide table. Next, the negative pressure is supplied to the slider 2 by the negative pressure supply mechanism. When the inside of the sliding head is formed into a negative pressure state, it is confirmed whether or not the printing press forms a predetermined flaw. When the printing is performed for a predetermined printing, the movement of the slider 2 is started to press the paste into the opening portion of the screen 21. Further, in order to reduce the negative pressure fluctuation in the slider as the slider 2 moves, the negative pressure is continuously supplied even during the movement. Further, when the printing pressure is excessively formed, a back pressure is applied to the printing cylinder 4 so that the force in the direction of the sliding table is pushed up to control the formation of a predetermined printing pressure. The relationship between the above-mentioned printing pressure and the negative pressure is obtained experimentally in advance, and the memory is added in advance, and the appropriate printing pressure can be controlled in accordance with the measured negative pressure. To measure the press pressure, a pressure sensor is placed between the air cylinder and the slider to measure the correct stamp. The paste supplied to the opening of the screen directly applies atmospheric pressure 9 when the slider 2 passes, and is pressed to the substrate side of the screen opening. When the slider 2 is moved to the end of the predetermined area of the screen 21, the supply of the negative pressure to the slider 2 is stopped, and the slider 2 is raised. Next, the printing table 10 is lowered to peel off the screen 21 from the substrate surface to transfer the paste onto the substrate 5. Subsequently, the printing table 10 is lowered to transfer the substrate 5 to the substrate receiving conveyor belt 26. The substrate receiving conveyor belt 26 starts to move as soon as the substrate is received, and the substrate 5 is transferred to the substrate transporting belt 27 from -14 to 200815196. The conveyor belt 27 is carried out from the substrate to discharge the substrate 5 to the next step. As described above, when printing is performed by the apparatus of the present invention, the squeezing portion is subjected to atmospheric pressure immediately after the sliding head is filled with the screen opening portion. Therefore, * the atmospheric pressure is applied during the period in which the paste fluidity is large. Make sure to remove * bubbles. Therefore, the printed paste does not leave bubbles and can form fine prints. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view for explaining the overall configuration of a screen printing apparatus. Figure 2 is a cross-sectional view of the sliding head. Fig. 3 is a view for explaining the air pressure control system of the sliding head. [Description of main component symbols] 1 : Screen printing machine _ 2: Slide head 3 : Slide table 4 : Slide table lifting mechanism (printing cylinder) 5 : Base plate 6 : Slide table moving mechanism 8 : Exhaust pipe 9 : Atmospheric pressure 1 0 : Printing station 46: Vacuum pump-15-