WO2018223852A1 - 电荷输出元件及环形剪切式压电加速度传感器 - Google Patents

电荷输出元件及环形剪切式压电加速度传感器 Download PDF

Info

Publication number
WO2018223852A1
WO2018223852A1 PCT/CN2018/088449 CN2018088449W WO2018223852A1 WO 2018223852 A1 WO2018223852 A1 WO 2018223852A1 CN 2018088449 W CN2018088449 W CN 2018088449W WO 2018223852 A1 WO2018223852 A1 WO 2018223852A1
Authority
WO
WIPO (PCT)
Prior art keywords
connecting member
bracket
piezoelectric element
charge output
piezoelectric
Prior art date
Application number
PCT/CN2018/088449
Other languages
English (en)
French (fr)
Inventor
聂泳忠
聂川
Original Assignee
西人马（厦门）科技有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 西人马（厦门）科技有限公司 filed Critical 西人马（厦门）科技有限公司
Priority to US16/614,458 priority Critical patent/US20200182902A1/en
Publication of WO2018223852A1 publication Critical patent/WO2018223852A1/zh

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/02—Housings
    • G01P1/023—Housings for acceleration measuring devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G01P15/0915—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the shear mode type

Definitions

  • the present invention relates to the field of piezoelectric acceleration sensor technology, and in particular to a charge output element and a ring shear type piezoelectric acceleration sensor.
  • Piezoelectric accelerometers also known as piezoelectric accelerometers, are also inertial sensors.
  • the principle of the piezoelectric acceleration sensor is to use the piezoelectric effect of the piezoelectric element.
  • the accelerometer is vibrated, the force of the mass applied to the piezoelectric element also changes.
  • the measured vibration frequency is much lower than the natural frequency of the accelerometer, the change in force is proportional to the measured acceleration.
  • the piezoelectric acceleration sensor is mainly composed of a centrally mounted compression type, a flip-chip center-compressed type, and a ring-shear type.
  • the ring-shear type piezoelectric acceleration sensor has a simple structure and can be made into an extremely small, high-resonance accelerometer. The application is more extensive.
  • the ring-shear piezoelectric accelerometer in the prior art utilizes the shear deformation of the piezoelectric element to generate an electrical signal proportional to the acceleration value.
  • the ring-shear piezoelectric accelerometer is mainly composed of a charge output component and a circuit board, and the charge output component includes a base, a piezoelectric component and a mass.
  • the connecting member needs to be installed in the charge output element, and the mounting of the connecting member causes the base to strain and transmit stress to the piezoelectric element, resulting in the use of the ring-shear piezoelectric accelerometer.
  • the frequency response and lateral sensitivity are unstable, the detection result is affected.
  • Embodiments of the present invention provide a charge output element and a ring shear type piezoelectric acceleration sensor, which can avoid the influence of the connecting member on the piezoelectric element, and ensure the frequency response and the stability of the lateral sensitivity of the ring-shear piezoelectric acceleration sensor. In turn, the accuracy of the test results is guaranteed.
  • An embodiment of the present invention provides a charge output element, comprising a base, comprising a support member and a connecting member disposed on the support member, the connecting member is provided with a mounting hole; the bracket is sleeved on the connecting member and There is a gap between the connecting members, the bracket is connected with the supporting member; the piezoelectric element is sleeved on the bracket; the mass is sleeved on the piezoelectric element and suspended above the supporting member.
  • a ring-shear piezoelectric acceleration sensor comprising: the above-mentioned charge output element; a circuit board, a circuit board and a piezoelectric element and a mass block disposed at a predetermined distance, and a piezoelectric element and a circuit board Electrically coupled to transmit an electrical signal of the piezoelectric element to the circuit board.
  • a charge output element and a ring shear type piezoelectric acceleration sensor include a base, a bracket, a piezoelectric element, and a mass.
  • the connector is assembled in the mounting hole on the connecting part of the base, and the piezoelectric element is sleeved on the bracket, and the bracket is sleeved on the connecting part of the base and has a gap between the connecting part, so even
  • the connecting member is installed in the mounting hole to strain the base, the stress is not transmitted to the piezoelectric element, the influence of the connecting member on the piezoelectric element can be avoided, and the frequency response and lateral direction of the ring-shaped piezoelectric acceleration sensor can be ensured.
  • the stability of the sensitivity in order to ensure the accuracy of the test results.
  • FIG. 1 is a schematic perspective view showing the structure of a charge output element according to an embodiment of the present invention
  • FIG. 2 is a schematic cross-sectional structural view of a charge output element according to an embodiment of the present invention
  • FIG. 3 is a schematic structural view of a base according to an embodiment of the present invention.
  • FIG. 4 is a schematic structural view of a bracket according to an embodiment of the present invention.
  • Figure 5 is a schematic structural view of a piezoelectric element according to an embodiment of the present invention.
  • FIG. 6 is a schematic structural view of a mass according to an embodiment of the present invention.
  • FIG. 7 is a perspective structural view of a ring shear type piezoelectric acceleration sensor according to an embodiment of the present invention.
  • Fig. 8 is a cross-sectional structural view showing a ring shear type piezoelectric acceleration sensor according to an embodiment of the present invention.
  • 30-piezoelectric element 31-inner ring surface; 32-outer ring surface;
  • FIGS. 1 through 6 For a better understanding of the present invention, a detailed description will be made below in conjunction with FIGS. 1 through 6 in accordance with an embodiment of the present invention.
  • an embodiment of the present invention provides a charge output element 1 including a base 10, a bracket 20, a piezoelectric element 30, and a mass 40.
  • the base 10 includes a support member 11 and is disposed on the support member 11.
  • the connecting member 12 is provided with a mounting hole 13 on the connecting member 12, the bracket 20 is sleeved on the connecting member 12 and has a gap between the connecting member 12, the bracket 20 is connected to the supporting member 11, and the piezoelectric element 30 is sleeved.
  • Attached to the bracket 20, the mass 40 is sleeved on the piezoelectric element 30 and suspended above the support member 11, and the "upper” as used herein refers to the upper portion shown in Fig. 2, as described herein.
  • the dangling setting can be understood as a certain gap between the mass 40 and the support member 11.
  • the connecting member 12 has a columnar structure, and the mounting hole 13 is disposed along the axial direction of the connecting member 12 and penetrates the connecting member 12, and the supporting member 11 is a disk set around the connecting member 12.
  • the structure is located at one end of the connecting member 12, that is, the mounting hole 13 also penetrates the supporting member 11.
  • the bracket 20 is an annular structural member disposed around the connecting member 12 and is made of a titanium alloy material, and includes an inner ring surface 21 and an outer ring surface 22 .
  • the bracket 20 is An annular structural member continuously disposed around the connecting member 12, the inner annular surface 21 is an inner wall surface of the annular structural member, and the outer annular surface 22 is an outer wall surface of the annular structural member, and the cross-sectional shape of the inner annular surface 21 and the connecting member 12
  • the cross-sectional shape of the outer wall surface is circular, and the cross-sectional diameter of the inner annular surface 21 is larger than the cross-sectional diameter of the outer wall surface of the connecting member 12 so that the inner circumferential surface of the bracket 20 is provided when the bracket 20 is sleeved on the connecting member 12. A gap is left between the 21 and the outer wall surface of the connecting member 12.
  • the piezoelectric element 30 is an annular structure and is made of piezoelectric ceramic, and includes an inner ring surface 31 and an outer ring surface 32, and an inner annular surface 31 and an outer annular surface of the piezoelectric element 30.
  • 32 is plated with a conductive layer, the conductive layer is gold or other material capable of conducting electricity, and the inner annular surface 31 of the piezoelectric element 30 is sleeved on the outer annular surface 22 of the bracket 20.
  • the mass 40 is an annular structure and is made of a tungsten alloy material, and includes an inner ring surface 41 and an outer ring surface 42.
  • the inner ring surface 41 of the mass 40 is sleeved on the piezoelectric layer.
  • the sleeve is sleeved on one part and connected to the other part.
  • the piezoelectric element 30 is sleeved on the bracket 20 and connected to the bracket 20, and the mass 40 is sleeved on the sleeve 40.
  • the piezoelectric element 30 is connected to the piezoelectric element 30.
  • the piezoelectric element 30 is bonded and fixed to the holder 20 by the adhesive, and the mass 40 is bonded and fixed to the piezoelectric element 30 by the adhesive.
  • the outer ring surface 22 of the bracket 20 is provided with a support flange 23 along its circumferential direction.
  • the height of the support flange 23 is higher than the height of the support member 11, and the piezoelectric element 30 is provided. It abuts against the support flange 23. It should be noted that the height direction here is along the axial direction of the connecting member 12.
  • the charge output element 1 provided by the embodiment of the present invention, in use, fits the connector into the mounting hole 13 of the connecting member 12, since the piezoelectric element 30 is sleeved on the bracket 20, and the bracket 20 is sleeved on the bracket 20 A gap is left between the connecting member 12 and the connecting member 12, and even if the connecting member is loaded into the mounting hole 13 to strain the base 10, stress is not transmitted to the piezoelectric member 30, and the pressing of the connecting member can be avoided.
  • the influence of the electrical component 30 ensures the frequency response of the ring-shaped piezoelectric acceleration sensor and the stability of the lateral sensitivity, thereby ensuring the accuracy of the detection result.
  • the bracket 20 is not limited to an annular structure that is continuously disposed around the connecting member 12.
  • the bracket 20 may also be a curved single set that is intermittently disposed by two or more surrounding connecting members 12.
  • the annular structure is formed by the body structure.
  • the inner annular surface 21 of the bracket 20 is formed by the inner wall surfaces of two or more curved single bodies, and the outer annular surface 22 of the bracket 20 is two or more curved singles.
  • the piezoelectric element 30 is not limited to being made of piezoelectric ceramics, and in some optional embodiments, It is also possible to use a single crystal such as a quartz crystal.
  • a positioning groove 14 is disposed on the supporting member 11, and the positioning groove 14 is an annular groove provided around the outer wall surface of the connecting member 12, and is disposed on the bracket 20.
  • the positioning block 24 is located at one end of the bracket 20 near the support member 11, the positioning block 24 is a disc-like structure disposed around the bracket 20, and the positioning block 24 matches the shape of the positioning slot 14, when the bracket 20 is sleeved in the connection
  • the positioning block 24 is inserted into the positioning slot 14 and the positioning slot 14 is engaged with each other.
  • the side wall surface of the positioning block 24 abuts against the sidewall surface of the positioning slot 14, and the two are fixed.
  • the connection is made to position the bracket 20 coaxially with the connecting member 12, and when the bracket 20 is sleeved on the connecting member 12, the inner annular surface 21 of the bracket 20 does not contact the outer wall surface of the connecting member 12, further ensuring installation.
  • the piezoelectric element 30 is not affected when the bolt is attached.
  • the bracket 20, the support flange 23, and the positioning block 24 are of unitary construction.
  • a positioning block may be disposed on the support member 11, and a positioning slot is disposed on the bracket 20 when the bracket 20 is sleeved.
  • the connecting member 12 is connected to the supporting member 11, the positioning groove on the bracket 20 and the positioning block on the supporting member 11 are matched and fixedly connected, and the positioning requirement for the bracket 20 can also be satisfied, so that the bracket 20 and the bracket 20 are The connecting member 12 is coaxial, ensuring that the inner annular surface 21 of the bracket 20 does not come into contact with the outer wall surface of the connecting member 12.
  • the charge output element 1 of the embodiment of the present invention in use, fits the connector into the mounting hole 13 of the connecting member 12, since the piezoelectric element 30 is sleeved on the bracket 20, and the bracket 20 is sleeved on the base 10. There is a gap between the connecting member 12 and the connecting member 12, and even if the connecting member is loaded into the mounting hole 13 to strain the base 10, the stress will not be exerted due to the gap between the bracket 20 and the connecting member 12.
  • the transfer to the piezoelectric element 30 can avoid the influence of the connecting member on the piezoelectric element 30; the correspondingly disposed support flange 23 on the bracket 20 facilitates positioning and bonding of the piezoelectric element 30, and enables the mass 40 to be
  • the positioning member 24 and the positioning groove 14 which are matched with each other on the bracket 20 and the supporting member 11 can ensure that the bracket 20 and the connecting member 12 are coaxially disposed, and the bracket 20 is further ensured. There is a need to leave a gap with the connecting member 12.
  • an embodiment of the present invention further provides a ring-shear piezoelectric acceleration sensor, including the charge output element 1 and the circuit board 2 of any of the above embodiments, on the outer circumference of the charge output element 1.
  • the surrounding charge output element 1 is further provided with a casing 3, and a notch is provided along the circumferential direction thereof below the inner wall of the casing 3, and the notch is engaged with the support member 11 of the base 10, and is clamped at the top of the casing 3.
  • the charge output element 1 and the circuit board 2 are both located in the housing 3.
  • the housing 3 is further provided with a connector 5, and the piezoelectric element 30 and the connector 5 are electrically connected to the circuit board 2.
  • a partition plate 4 is provided at a predetermined distance above the piezoelectric element 30 and the mass 40, and the partition plate 4 is an annular plate continuously disposed in the circumferential direction of the casing 3, and the partition plate 4 is horizontally disposed and fixed to the inner wall surface of the casing 3.
  • the circuit board 2 is a printed circuit board, and the circuit board 2 is disposed around the connecting member 12, the circuit board is located on one side of the partition plate, and the piezoelectric element and the mass block are located on the other side of the partition plate.
  • the circuit board 2 and the piezoelectric element 30 and the mass 40 are disposed at a predetermined distance, and are not in contact with the piezoelectric element 30 and the mass 40, thereby avoiding the unevenness of the weight of the circuit board 2 to the mass 40 and the piezoelectric element 30.
  • the effect is to ensure the stability of the frequency response and lateral sensitivity of the ring-shear piezoelectric acceleration sensor.
  • the partition 4 is not limited to an annular plate that is continuously disposed in the circumferential direction of the casing 3, and is horizontally disposed and fixed to the inner wall surface of the casing 3.
  • the partition 4 may also be an annular plate that is continuously disposed in the circumferential direction of the connecting member 12, and the partition 4 is horizontally disposed and fixed to the outer wall surface of the connecting member 12.
  • the partition plate 4 is provided, and the partition plate 4 on the inner wall surface of the casing 3 is placed on the same plane as the partition plate 4 on the outer wall surface of the connecting member 12 to better complete the support of the circuit board 2.
  • the structure of the partition 4 is not limited to an annular plate that is continuously disposed in the circumferential direction of the casing 3 and/or the connecting member 12.
  • the partition 4 may be disposed at two or more intervals.
  • the curved plates in the circumferential direction of the connecting member 12, preferably two or more curved plates are evenly distributed on the outer wall of the connecting member 12; or, may be provided on the inner wall surface of the casing 3 and the outer wall surface of the connecting member 12
  • the structure and the mounting form of the partition plate 4 can satisfy the support function of the circuit board 2, so that it does not contact the piezoelectric element 30 and the mass block 40, and the unevenness of the weight due to the weight of the circuit board 2 is avoided.
  • the electrical component 30 and the mass 40 have an effect.
  • the circuit board 2 is not limited to the use of a printed circuit board.
  • the circuit board 2 can also be a thick film circuit board, which is small in size and light in weight.
  • the circuit board 2 is not limited to being disposed around the connecting member 12 and supported on the partition 4. In some embodiments, when the space is sufficiently large, the circuit board 2 can be disposed at any position as long as it is disposed at a predetermined distance from the mass 40 and the piezoelectric element 30, and is not in contact with the mass 40 and the piezoelectric element 30. can.
  • a ring-shear piezoelectric acceleration sensor including the charge output element 1 of any of the above embodiments, has the same advantages as the charge output element 1, so the same parts are not described herein;
  • the piezoelectric piezoelectric acceleration sensor further includes a circuit board 2, and the piezoelectric element 30 is electrically connected to the circuit board 2 to transmit an electrical signal of the piezoelectric element to the circuit board, where the electrical signal is usually a charge signal or voltage. signal.
  • the circuit board 2 is capable of amplifying an extremely weak charge (or voltage) generated after the piezoelectric element 30 is stressed to meet the use requirements.
  • the circuit board 2 and the mass 40 and the piezoelectric element 30 are disposed at a predetermined distance so as not to contact the piezoelectric element 30 and the mass 40, thereby avoiding unevenness of the weight of the circuit board 2 to the mass 40 and the piezoelectric element. 30 causes the influence, thereby ensuring the frequency response of the ring-shear piezoelectric acceleration sensor and the stability of the lateral sensitivity.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Pressure Sensors (AREA)

Abstract

一种电荷输出元件（1），包括底座（10），包括支撑部件（11）及设置在所述支撑部件（11）上的连接部件（12），所述连接部件（12）上设置有安装孔（13）；支架（20），套设在所述连接部件（12）上且与所述连接部件（12）之间留有间隙设置，所述支架（20）与所述支撑部件（11）连接；压电元件（30），套接在所述支架上（20）；质量块（40），套接在所述压电元件（30）上且在所述支撑部件（11）上方悬空设置。还公开了环形剪切式压电加速度传感器。该电荷输出元件（1）及环形剪切式压电加速度传感器，能够避免连接件对压电元件（30）的影响，保证环形剪切式压电加速传感器的频率响应及横向灵敏度的稳定性，进而保证检测结果的准确性。

Description

电荷输出元件及环形剪切式压电加速度传感器
相关申请的交叉引用
本申请要求享有于2017年06月07日提交的名称为“电荷输出元件及环形剪切式压电加速度传感器”的中国专利申请201710423718.5的优先权，该申请的全部内容通过引用并入本文中。
技术领域
本发明涉及压电加速度传感器技术领域，特别是涉及一种电荷输出元件及环形剪切式压电加速度传感器。
背景技术
压电加速度传感器又称压电加速度计，也属于惯性式传感器。压电加速度传感器的原理是利用压电元件的压电效应，在加速度计受振时，质量块加在压电元件上的力也随之变化。当被测振动频率远低于加速度计的固有频率时，则力的变化与被测加速度成正比。
压电加速度传感器的结构形式主要有中央安装压缩式、倒装中心配合压缩式以及环形剪切式，环形剪切式压电加速度传感器结构简单，能做成极小型、高共振频率的加速度计，应用较为广泛。
现有技术中的环形剪切式压电加速度传感器是利用压电元件剪切变形产生电信号与加速度值成正比。环形剪切式压电加速度传感器主要由电荷输出元件及电路板组成，电荷输出元件包括底座、压电元件及质量块。环形剪切式压电加速度传感器在使用时，电荷输出元件内需要装入连接件，连接件的装入会使底座产生应变并对压电元件传递应力，导致环形剪切式压电加速度传感器在使用时，频率响应及横向灵敏度不稳定，影响检测结果。
发明内容
本发明实施例提供一种电荷输出元件及环形剪切式压电加速度传感器，能够避免连接件对压电元件的影响，保证环形剪切式压电加速传感器的频率响应及横向灵敏度的稳定性，进而保证检测结果的准确性。
本发明实施例一方面提出了一种电荷输出元件，包括底座，包括支撑部件及设置在所述支撑部件上的连接部件，连接部件上设置有安装孔；支架，套设在连接部件上且与连接部件之间留有间隙设置，支架与支撑部件连接；压电元件，套接在支架上；质量块，套接在压电元件上且在支撑部件上方悬空设置。
本发明实施例另一方面提出了一种环形剪切式压电加速度传感器，包括：上述电荷输出元件；电路板，电路板与压电元件及质量块按预定距离设置，压电元件与电路板电连接，以将所述压电元件的电信号发送至所述电路板。
根据本发明实施例提供的电荷输出元件及环形剪切式压电加速度传感器，其包括底座、支架、压电元件及质量块。使用时，连接件装配在底座的连接部件上的安装孔内，由于压电元件套接在支架上，而支架套设在底座的连接部件上且与连接部件之间留有间隙，因此，即使当连接件装入安装孔内使底座产生应变，也不会将应力传递至压电元件中，能够避免连接件对压电元件的影响，保证环形剪切式压电加速传感器的频率响应及横向灵敏度的稳定性，进而保证检测结果的准确性。
附图说明
下面将参考附图来描述本发明示例性实施例的特征、优点和技术效果。
图1是本发明实施例的电荷输出元件的立体结构示意图；
图2是本发明实施例的电荷输出元件的剖面结构示意图；
图3是本发明实施例的底座的结构示意图；
图4是本发明实施例的支架的结构示意图；
图5是本发明实施例的压电元件的结构示意图；
图6是本发明实施例的质量块的结构示意图；
图7是本发明实施例的环形剪切式压电加速度传感器的立体结构示意图；
图8是本发明实施例的环形剪切式压电加速度传感器的剖面结构示意图。
图中：
1-电荷输出元件；
10-底座；11-支撑部件；12-连接部件；13-安装孔；14-定位槽；
20-支架；21-内环面；22-外环面；23-支撑凸缘；24-定位块；
30-压电元件；31-内环面；32-外环面；
40-质量块；41-内环面；42-外环面；
2-电路板；
3-壳体；
4-隔板；
5-连接器；
6-密封盖。
具体实施方式
下面将详细描述本发明的各个方面的特征和示例性实施例。在下面的详细描述中，提出了许多具体细节，以便提供对本发明的全面理解。但是，对于本领域技术人员来说很明显的是，本发明可以在不需要这些具体细节中的一些细节的情况下实施。下面对实施例的描述仅仅是为了通过示出本发明的示例来提供对本发明的更好的理解。在附图和下面的描述中，至少部分的公知结构和技术没有被示出，以便避免对本发明造成不必要的模糊；并且，为了清晰，可能夸大了部分结构的尺寸。此外，下文中所描述的特征、结构或特性可以以任何合适的方式结合在一个或更多实施例中。
下述描述中出现的方位词均为图中示出的方向，并不是对本发明的电 荷输出元件的具体结构进行限定。在本发明的描述中，还需要说明的是，除非另有明确的规定和限定，术语“安装”、“连接”应做广义理解，例如，可以是固定连接，也可以是可拆卸连接；可以是直接相连，也可以间接相连。对于本领域的普通技术人员而言，可视具体情况理解上述术语在本发明中的具体含义。
为了更好地理解本发明，下面结合图1至图6根据本发明实施例的电荷输出元件进行详细描述。
如图1-图4所示，本发明实施例提出了一种电荷输出元件1，包括底座10、支架20、压电元件30及质量块40，底座10包括支撑部件11及设置在支撑部件11上的连接部件12，连接部件12上设置有安装孔13，支架20套设在连接部件12上且与连接部件12之间留有间隙设置，支架20与支撑部件11连接，压电元件30套接在支架20上，质量块40套接在压电元件30上，且在支撑部件11上方悬空设置，这里所述的“上方”是指以图2中所示的上方，这里所述的“悬空设置”可以理解为质量块40与支撑部件11之间具有一定的间隙。
具体的，如图3所示，本实施例中连接部件12具有柱状结构，安装孔13沿着连接部件12的轴线方向设置且贯通连接部件12，支撑部件11为围绕连接部件12设置的盘类结构且位于连接部件12的一端，即安装孔13同时也贯通支撑部件11。
如图2、图4所示，支架20为环绕连接部件12设置的环形结构件，由钛合金材质制成，包括相对的内环面21及外环面22，本实施例中，支架20为环绕连接部件12连续设置的环形结构件，内环面21即为环形结构件的内壁面，外环面22即为环形结构件的外壁面，内环面21的横截面形状与连接部件12的外壁面的横截面形状均为圆形，内环面21的横截面直径大于连接部件12的外壁面的横截面直径，以使支架20套设在连接部件12上时，支架20的内环面21与连接部件12的外壁面之间留有间隙。
如图2、图5所示，压电元件30为环形结构体且由压电陶瓷构成，包括相对的内环面31及外环面32，压电元件30的内环面31及外环面32上镀有导电层，导电层为金或者其他能够起到导电作用的材料均可，压电元 件30的内环面31套接在支架20的外环面22上。
如图2、图6所示，质量块40为环形结构体且采用钨合金材质制成，包括相对的内环面41及外环面42，质量块40的内环面41套接在压电元件30的外环面32上。
所说的套接为一个部件套设在另一个部件上且与另一个部件连接，即本实施例中，压电元件30套设在支架20上且与支架20连接，质量块40套设在压电元件30上且与压电元件30连接。为了保证电荷输出元件1结构的刚性及稳定性，本实施例中，压电元件30通过粘胶与支架20粘接固定，质量块40通过粘胶与压电元件30粘接固定。为了便于对压电元件30的定位及粘接，在支架20的外环面22沿其周向设置有支撑凸缘23，支撑凸缘23所在高度高于支撑部件11所在高度，压电元件30抵靠在支撑凸缘23上。需要说明的是这里的高度方向沿连接部件12的轴向方向。
由此，本发明实施例提供的电荷输出元件1在使用时，将连接件装配在连接部件12上的安装孔13内，由于压电元件30套接在支架20上，而支架20套设在连接部件12上且与连接部件12之间留有间隙，即使当连接件装入安装孔13内使底座10产生应变，也不会将应力传递至压电元件30中，能够避免连接件对压电元件30的影响，保证环形剪切式压电加速传感器的频率响应及横向灵敏度的稳定性，进而保证检测结果的准确性。
可以理解的是，支架20并不限于为环绕连接部件12连续设置的环形结构件，在一些可选的实施例中，支架20还可以为由两个以上环绕连接部件12间断设置的弧形单体结构围成的环形结构件，此时，支架20的内环面21即为两个以上弧形单体的内壁面共同围成，支架20的外环面22即为两个以上弧形单体的外壁面共同围成，支架20采用上述结构，也能够保证电荷输出元件1的使用要求；同时，压电元件30并不限于由压电陶瓷制成，在一些可选的实施例中，还可以采用单晶，如石英晶体制成。
作为一种可选的实施方式，如图2-图4所示，在支撑部件11上设置有定位槽14，定位槽14为环绕连接部件12外壁面设置的环形凹槽，在支架20上设置有定位块24，定位块24位于支架20靠近支撑部件11的一端，定位块24为围绕支架20设置的盘类结构，定位块24与定位槽14的 形状相匹配，当支架20套设在连接部件12上并与支撑部件11相连接时，定位块24插接进入定位槽14内与定位槽14彼此配合，此时，定位块24的侧壁面紧贴定位槽14的侧壁面，两者固定连接，以将支架20定位，使其与连接部件12同轴，保证支架20套设在连接部件12上时，支架20的内环面21不与连接部件12的外壁面接触，进一步保证在安装孔13内装连接件时，如装螺栓时，不会对压电元件30产生影响。为了便于加工，支架20、支撑凸缘23及定位块24为一体式结构。
可以理解的是，对于支架20的定位并不限于上述形式，在一些可选的实施例中，还可以在支撑部件11上设置定位块，在支架20上设置有定位槽，当支架20套设在连接部件12上并与支撑部件11相连接时，支架20上的定位槽及支撑部件11上的定位块的形状相匹配并固定连接，也能够满足对支架20的定位要求，使支架20与连接部件12同轴，保证支架20的内环面21不与连接部件12的外壁面接触。
本发明实施例提供的电荷输出元件1，在使用时，将连接件装配在连接部件12上的安装孔13内，由于压电元件30套接在支架20上，而支架20套设在底座10的连接部件12上且与连接部件12之间留有间隙，即使当连接件装入安装孔13内使底座10产生应变，由于支架20与连接部件12之间的间隙的存在，不会将应力传递至压电元件30中，能够避免连接件对压电元件30的影响；在支架20上相应设置的支撑凸缘23，便于对压电元件30的定位及粘接，且能够使得质量块40在支撑部件11上方处于悬空状态；同时，在支架20及支撑部件11上对应设置的能够相互匹配的定位块24及定位槽14，能够保证支架20与连接部件12同轴设置，进一步保证支架20与连接部件12间需要留有间隙的要求。
如图7、图8所示，本发明实施例还提供了一种环形剪切式压电加速度传感器，包括上述任一实施例的电荷输出元件1及电路板2，在电荷输出元件1的外周环绕电荷输出元件1还设置有壳体3，在壳体3的内壁的下方沿着其周向上设置有缺口，缺口与底座10的支撑部件11卡接配合，在壳体3的顶部卡接设置有密封盖6，密封盖6的中部设置有供连接部件12穿过的通孔，连接部件12的顶面与密封盖6的顶面平齐。电荷输出元 件1及电路板2均位于壳体3内，在壳体3上还设置有连接器5，压电元件30及连接器5均与电路板2电连接。在压电元件30及质量块40的上方预定距离设置有隔板4，隔板4为连续设置在壳体3周向上的环形板，隔板4水平布置且固定在壳体3的内壁面上，电路板2采用印制电路板，电路板2环绕连接部件12设置，所述电路板位于所述隔板一侧，所述压电元件及所述质量块位于所述隔板另一侧，以使电路板2与压电元件30及质量块40按预定距离设置，与压电元件30及质量块40均不接触，避免因电路板2的重量不均匀对质量块40、压电元件30造成影响，进而保证环形剪切式压电加速度传感器的频率响应及横向灵敏度的稳定性。
可以理解的是，隔板4并不限于为连续设置在壳体3周向上的环形板，并水平布置且固定在壳体3的内壁面上。在一些可选的实施例中，隔板4还可以为连续设置在连接部件12周向上的环形板，隔板4水平布置且固定在连接部件12的外壁面上。
同时，并不限于只在壳体3的内壁面上或者只在连接部件12的外壁面设置隔板4，有一些实施例中，可以同时在壳体3的内壁面及连接部件12的外壁面设置隔板4，位于壳体3内壁面上的隔板4与位于连接部件12的外壁面上的隔板4位于同一平面上，以更好的完成对电路板2的支撑。
并且，隔板4的结构并不只限为连续设置在壳体3和/或连接部件12周向上的环形板，在一些可选的实施例中，隔板4还可以为两个以上间隔设在壳体3周向上的弧形板，优选两个以上弧形板在壳体3的内壁面上均匀分布，以起到对电路板2的支撑作用；或者，隔板4为两个以上间隔设在连接部件12周向上的弧形板，优选两个以上弧形板在连接部件12的外壁上均匀分布；或者，还可以在壳体3的内壁面上及连接部件12的外壁面上均设置有两个以上间隔布置的弧形板，位于壳体3的内壁面上的弧形板与位于连接部件12的外壁面上的弧形板在同一平面上。隔板4采用上述各实施例的结构及安装形式均能够满足对电路板2的支撑作用，使其与压电元件30及质量块40均不接触，避免因电路板2的重量不均匀对压电元件30、质量块40造成影响。
可以理解的是，电路板2并不限于采用印制电路板，在一些可选的实 施例中，电路板2还可以采用厚膜电路板，体积小且质量轻便。同时，电路板2并不限于环绕连接部件12设置且支撑在隔板4上。有一些实施例中，当空间足够大时，电路板2可以设置在任意位置，只要保证其与质量块40及压电元件30按预定距离设置，不与质量块40及压电元件30接触即可。
本发明实施例提供的一种环形剪切式压电加速度传感器，包括上述任一实施例的电荷输出元件1，具有电荷输出元件1相同的优点，故相同的部分不在加以赘述；同时，环形剪切式压电加速度传感器还包括电路板2，压电元件30与电路板2电连接，以将所述压电元件的电信号发送至所述电路板，这里的电信号通常为电荷信号或电压信号。电路板2能够将压电元件30受力后产生的极其微弱的电荷(或电压)进行放大，以满足使用要求。同时电路板2与质量块40、压电元件30按照预定距离设置，使其与压电元件30及质量块40均不接触，避免因电路板2的重量不均匀对质量块40、压电元件30造成影响，进而保证环形剪切式压电加速度传感器的频率响应及横向灵敏度的稳定性。
虽然已经参考优选实施例对本发明进行了描述，但在不脱离本发明的范围的情况下，可以对其进行各种改进并且可以用等效物替换其中的部件。尤其是，只要不存在结构冲突，各个实施例中所提到的各项技术特征均可以任意方式组合起来。本发明并不局限于文中公开的特定实施例，而是包括落入权利要求的范围内的所有技术方案。

Claims (10)

  1. 一种电荷输出元件，其特征在于：包括
    底座，包括支撑部件及设置在所述支撑部件上的连接部件，所述连接部件上设置有安装孔；
    支架，套设在所述连接部件且与所述连接部件之间留有间隙设置，所述支架与所述支撑部件连接；
    压电元件，套接在所述支架上；
    质量块，套接在所述压电元件上，且在所述支撑部件上方悬空设置。
  2. 根据权利要求1所述的电荷输出元件，其特征在于：所述支架为环绕所述连接部件设置的环形结构件，包括相对的内环面及外环面，所述支架的内环面与所述连接部件之间留有间隙设置，所述压电元件套接在所述支架的外环面上。
  3. 根据权利要求2所述的电荷输出元件，其特征在于：所述支架的外环面沿其周向设置有支撑凸缘，所述支撑凸缘所在高度高于所述支撑部件所在高度，所述压电元件抵靠在所述支撑凸缘上。
  4. 根据权利要求1至3任意一项所述的电荷输出元件，其特征在于：所述支撑部件和所述支架的其中一者设置有定位槽，所述支撑部件和所述支架的其中另一者设置有定位块，所述定位块与所述定位槽在所述支架连接到所述支撑部件时彼此配合，以使所述支架与所述连接部件同轴。
  5. 根据权利要求1所述的电荷输出元件，其特征在于：所述连接部件具有柱状结构，所述安装孔沿着所述连接部件的轴线方向设置，且贯通所述连接部件；所述支撑部件为围绕所述连接部件设置的盘类结构，且位于所述连接部件的一端。
  6. 根据权利要求1所述的电荷输出元件，其特征在于：所述压电元件为由压电陶瓷或石英晶体构成的环形结构体，包括相对的内环面及外环面，所述压电元件的内环面及外环面上镀有导电层，所述质量块套接在所述压电元件的外环面上。
  7. 一种环形剪切式压电加速度传感器，其特征在于：包括
    权利要求1至6任意一项所述的电荷输出元件；
    电路板，所述电路板与所述压电元件及所述质量块按预定距离设置，所述压电元件与所述电路板电连接，以将所述压电元件的电信号发送至所述电路板。
  8. 根据权利要求7所述的环形剪切式压电加速度传感器，其特征在于：还包括壳体，所述壳体环绕所述电荷输出元件设置，所述壳体上和/或所述连接部件上设置有隔板，所述电路板环绕所述连接部件设置且支撑在所述隔板上。
  9. 根据权利要求8所述的环形剪切式压电加速度传感器，其特征在于：所述隔板为连续设置在所述壳体和/或所述连接部件周向上的环形板，或者，所述隔板包括两个以上间隔设置在所述壳体和/或所述连接部件周向上的弧形板。
  10. 根据权利要求8所述的环形剪切式压电加速度传感器，其特征在于：还包括连接器，所述连接器设置在所述壳体上且与所述电路板电连接。
PCT/CN2018/088449 2017-06-07 2018-05-25 电荷输出元件及环形剪切式压电加速度传感器 WO2018223852A1 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US16/614,458 US20200182902A1 (en) 2017-06-07 2018-05-25 Charge output element and annular shear-type piezoelectric accelerometer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201710423718.5 2017-06-07
CN201710423718.5A CN107167631B (zh) 2017-06-07 2017-06-07 电荷输出元件及环形剪切式压电加速度传感器

Publications (1)

Publication Number Publication Date
WO2018223852A1 true WO2018223852A1 (zh) 2018-12-13

Family

ID=59824886

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2018/088449 WO2018223852A1 (zh) 2017-06-07 2018-05-25 电荷输出元件及环形剪切式压电加速度传感器

Country Status (3)

Country Link
US (1) US20200182902A1 (zh)
CN (1) CN107167631B (zh)
WO (1) WO2018223852A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114858268A (zh) * 2022-04-14 2022-08-05 厦门乃尔电子有限公司 一种振动传感器及其制备方法

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107167631B (zh) * 2017-06-07 2019-09-03 西人马联合测控（泉州）科技有限公司 电荷输出元件及环形剪切式压电加速度传感器
CN109959443B (zh) * 2017-12-14 2021-08-24 苏州长风航空电子有限公司 一种宽频压电振动传感器装配结构
CN108267615B (zh) * 2017-12-18 2021-02-09 北京遥测技术研究所 一种高冲击压电加速度计
CN109212262B (zh) * 2018-10-17 2021-03-12 山东大学 一种基于横向振动模式的高温压电加速度传感器
CN110361563A (zh) * 2019-06-21 2019-10-22 西人马（厦门）科技有限公司 电荷输出元件及压电加速度传感器
CN110987158A (zh) * 2019-11-27 2020-04-10 苏州长风航空电子有限公司 一种压电振动传感器组件
CN111366752A (zh) * 2020-03-16 2020-07-03 深圳华清精密科技有限公司 一种环形剪切压电加速度传感器结构及其制作方法
CN112730891A (zh) * 2021-01-12 2021-04-30 中国工程物理研究院总体工程研究所 一种微型三轴加速度传感器结构
CN113176422A (zh) * 2021-05-10 2021-07-27 河北工程大学 一种三角剪切式电荷输出元件、压电加速度传感器及装配方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN203133108U (zh) * 2013-04-03 2013-08-14 厦门乃尔电子有限公司 一种压电式加速度传感器
CN203133106U (zh) * 2013-04-01 2013-08-14 厦门乃尔电子有限公司 压电式加速度传感器
CN203164202U (zh) * 2013-04-16 2013-08-28 厦门乃尔电子有限公司 集成电路压电式加速度传感器组件
CN203798447U (zh) * 2014-04-29 2014-08-27 厦门乃尔电子有限公司 一种高绝缘耐压振动传感器
CN107110885A (zh) * 2015-06-26 2017-08-29 厦门乃尔电子有限公司 剪切型压电传感器
CN107167631A (zh) * 2017-06-07 2017-09-15 西人马（厦门）科技有限公司 电荷输出元件及环形剪切式压电加速度传感器
CN206906416U (zh) * 2017-06-07 2018-01-19 西人马联合测控（泉州）科技有限公司 电荷输出元件及环形剪切式压电加速度传感器

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3104335A (en) * 1959-09-15 1963-09-17 Endevco Corp Accelerometer
US5473941A (en) * 1993-07-30 1995-12-12 Vibra-Metric, Inc. Encapsulated accelerometer with faraday shielding
JP2004317228A (ja) * 2003-04-15 2004-11-11 Rion Co Ltd 圧電素子保持構造
CN101008654A (zh) * 2006-01-27 2007-08-01 霍尼韦尔国际公司 高性能加速度计的悬挂机构
CN104569490B (zh) * 2015-01-30 2018-01-19 歌尔股份有限公司 一种加速度计的z轴结构及其生产方法
CN204945164U (zh) * 2015-08-24 2016-01-06 深圳市惠贻华普电子有限公司 一种压电式加速度传感器

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN203133106U (zh) * 2013-04-01 2013-08-14 厦门乃尔电子有限公司 压电式加速度传感器
CN203133108U (zh) * 2013-04-03 2013-08-14 厦门乃尔电子有限公司 一种压电式加速度传感器
CN203164202U (zh) * 2013-04-16 2013-08-28 厦门乃尔电子有限公司 集成电路压电式加速度传感器组件
CN203798447U (zh) * 2014-04-29 2014-08-27 厦门乃尔电子有限公司 一种高绝缘耐压振动传感器
CN107110885A (zh) * 2015-06-26 2017-08-29 厦门乃尔电子有限公司 剪切型压电传感器
CN107167631A (zh) * 2017-06-07 2017-09-15 西人马（厦门）科技有限公司 电荷输出元件及环形剪切式压电加速度传感器
CN206906416U (zh) * 2017-06-07 2018-01-19 西人马联合测控（泉州）科技有限公司 电荷输出元件及环形剪切式压电加速度传感器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114858268A (zh) * 2022-04-14 2022-08-05 厦门乃尔电子有限公司 一种振动传感器及其制备方法

Also Published As

Publication number Publication date
CN107167631A (zh) 2017-09-15
CN107167631B (zh) 2019-09-03
US20200182902A1 (en) 2020-06-11

Similar Documents

Publication Publication Date Title
WO2018223852A1 (zh) 电荷输出元件及环形剪切式压电加速度传感器
JP6254120B2 (ja) ジャイロセンサ
WO2018224036A1 (zh) 三轴压电式传感器
KR102269119B1 (ko) 이중 진동막을 포함하는 차동 콘덴서 마이크
US20130205899A1 (en) Combo Transducer and Combo Transducer Package
US9510107B2 (en) Double diaphragm MEMS microphone without a backplate element
WO2018223828A1 (zh) 电荷输出元件、装配方法及压电加速度传感器
JP6806900B2 (ja) 動的にも静的にもなり得る力を同時に測定するための測定センサ
JP2008232886A (ja) 圧力センサ
EP2617677B1 (en) Structure for isolating a microstructure die from packaging stress
DK169653B1 (da) Piezoelektrisk accelerometer af forskydningstypen
CN109212262B (zh) 一种基于横向振动模式的高温压电加速度传感器
JPS5952727A (ja) 半導体圧力センサ
JP2019168456A (ja) 圧力センサ
US3506857A (en) Compressive mode piezoelectric transducer with isolation of mounting base strains from the signal producing means thereof
WO2019200634A1 (zh) 一种压电加速度传感器
JP6224774B1 (ja) 計測用マイクロホンモジュール
US20210091297A1 (en) Piezoelectric sensor
JP5821158B1 (ja) 複合センサデバイス
CN209606461U (zh) 压电加速度传感器
US20150191349A1 (en) Semiconductor secured to substrate via hole in substrate
JPS58213256A (ja) 加速度センサ−
JPH01156669A (ja) 加速度センサ
JPH0755461Y2 (ja) 渦検出器
JP2017207408A (ja) 半導体センサ

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 18812956

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 18812956

Country of ref document: EP

Kind code of ref document: A1