WO2018207310A1 - Position measurement method and component - Google Patents

Position measurement method and component Download PDF

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Publication number
WO2018207310A1
WO2018207310A1 PCT/JP2017/017867 JP2017017867W WO2018207310A1 WO 2018207310 A1 WO2018207310 A1 WO 2018207310A1 JP 2017017867 W JP2017017867 W JP 2017017867W WO 2018207310 A1 WO2018207310 A1 WO 2018207310A1
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WO
WIPO (PCT)
Prior art keywords
groove
angle
image
base
column
Prior art date
Application number
PCT/JP2017/017867
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French (fr)
Japanese (ja)
Inventor
孝弘 藤岡
宏則 堀切
賢元 池田
Original Assignee
ナルックス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by ナルックス株式会社 filed Critical ナルックス株式会社
Priority to PCT/JP2017/017867 priority Critical patent/WO2018207310A1/en
Priority to JP2017239493A priority patent/JP6989950B2/en
Priority to US15/967,974 priority patent/US10295754B2/en
Priority to CN201810430660.1A priority patent/CN108896276B/en
Priority to CN202111208827.8A priority patent/CN113933030A/en
Priority to DE102018111233.5A priority patent/DE102018111233A1/en
Publication of WO2018207310A1 publication Critical patent/WO2018207310A1/en
Priority to JP2021190918A priority patent/JP7244954B2/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques

Definitions

  • the present invention relates to a position measuring method based on an image of a measuring apparatus provided with an imaging optical system using coaxial epi-illumination, and a component suitable for the above measuring method.
  • the lens and the optical fiber are aligned on the corresponding surface of the component.
  • the position reference portion which is the provided columnar convex portion is fitted into the concave portion provided in the connector.
  • a measuring device such as a CNC (Computer Numerical Control) image measuring machine (for example, Patent Document 1).
  • An object of the present invention is to provide a position measurement method for obtaining the position of a lens or the like with high accuracy using the position of a position reference portion of a component in an image of a measurement apparatus, and a component suitable for the measurement method described above. It is.
  • the position measurement method observes the position of a position reference portion on a plane and an arbitrary point in an image of a measurement apparatus including an imaging optical system using coaxial incident illumination, and the position This is a position measurement method for determining the position of the arbitrary point on the basis of the position of the reference portion.
  • the position reference portion has a columnar shape at least at the base, and includes a groove having a constant width around the base of the column, the bottom surface of the groove is parallel to the plane, and the outer periphery of the bottom surface of the groove Is provided with an inclined surface that rises from the bottom surface to the bottom surface at an angle ⁇ and reaches the flat surface.
  • the position measuring method of the present invention is a step of determining the position of the base periphery of the column from the position of the outer periphery of the bottom surface of the groove and the position of the reflection image of the outer periphery of the groove in the image of the measuring device. And determining the position of the position reference part from the position of the periphery of the base of the pillar, and determining the position of the arbitrary point with reference to the position of the position reference part.
  • the position of the peripheral edge at the base of the column is determined from the position of the outer peripheral edge of the bottom surface of the groove and the position of the reflected image of the outer peripheral edge. Since the position of the position reference part is determined from the position of the periphery of the base of the pillar, the position measurement error can be greatly reduced as compared with the case of determining the position of the position reference part from the position of the tip of the pillar. Can do.
  • ⁇ is the opening angle of the imaging optical system, ⁇ and the unit of the angle is ⁇ , Meet.
  • the light beam reflected by the inclined surface does not enter the measuring device. Therefore, it is preferable because the boundary between the bottom surface region and the inclined surface region becomes clear in the image obtained by the measuring apparatus.
  • ⁇ is the opening angle of the imaging optical system
  • ⁇ is the unit of angle
  • ⁇ is Meet.
  • NA is the numerical aperture of the microscope
  • W is the width of the groove
  • L is the length of the column.
  • the position of the arbitrary point is the position of the optical element.
  • the position of the optical element can be determined with high accuracy using the position of the position reference portion as a reference.
  • the component according to the second aspect of the present invention is a component including at least two position reference portions and an optical element on at least one plane.
  • the position reference portion has a columnar shape at least at the base, and includes a groove having a constant width around the base of the column, the bottom surface of the groove is parallel to the plane, and the outer periphery of the bottom surface of the groove Includes an inclined surface that rises from the bottom surface to the bottom surface at an angle ⁇ and reaches the flat surface, and the angle ranges from 20 degrees to 70 degrees.
  • the component according to this aspect is suitable for measuring the position of the optical element with high accuracy based on the position of the position reference unit based on the image of a measurement apparatus including an imaging optical system using coaxial incident illumination. .
  • FIG. 1 is a diagram illustrating a component 100 including a position reference unit 110 according to an embodiment of the present invention.
  • the two position reference parts 110 are substantially cylindrical.
  • the component 100 including the plurality of lenses 150 is connected to, for example, a connector including a plurality of optical fibers.
  • the two position reference parts 110 are used for connecting the component 100 and the connector.
  • the connector may include two concave portions corresponding to the two columnar position reference portions 110, and the position reference portions may be accommodated in the concave portions.
  • FIG. 2 is a view showing a cross section including the central axis of the position reference portion 110 ′ of the conventional component.
  • the measurement of the positions of the plurality of lenses 150 is performed using a measuring device such as a CNC (Computer Numerical Control) image measuring machine.
  • a measuring device such as a CNC (Computer Numerical Control) image measuring machine.
  • the position of the position reference unit 110 ′ is determined by observing the tip end portion of the column surrounded by a circle in FIG. 2 in an image acquired by a measuring apparatus such as an image measuring machine.
  • FIG. 3 is a view showing a cross section including the central axis of the position reference portion 110 of the component 100 according to the embodiment of the present invention.
  • the component 100 according to the embodiment of the present invention is different from the conventional component in that an annular groove 120 is provided around the base of the column 115 of the position reference unit 110.
  • 3 is a diagram showing a cross section of the groove 120 including the central axis of the position reference portion 110.
  • the width of the groove 120 is indicated by W, and the depth of the groove 120 is indicated by D.
  • the bottom surface 121 of the groove 120 is formed in parallel with the plane 101 of the component 100.
  • the roughness of the bottom surface 121 is preferably finished to 30 nm or less.
  • the outer periphery of the bottom surface 121 is provided with an inclined surface 123 that rises from the bottom surface 121 to the bottom surface 121 at a predetermined angle and reaches the surface 101.
  • the bottom surface 121 preferably defines the depth D of the groove 120 so as to form the same plane as the plane on which the lens 150 is disposed.
  • the corners indicated by A1 and A2 are preferably formed such that the cross section does not have a so-called R portion on the arc.
  • FIG. 4 is a diagram showing a measuring apparatus using coaxial epi-illumination used in the measuring method of the present invention.
  • the measuring device may be a CNC image measuring device.
  • the measurement apparatus includes a light source 301, a field lens 303, a half mirror 304, a condenser lens 305, an imaging lens 307, and an image acquisition unit 309.
  • the condenser lens 305, the half mirror 304, and the imaging lens 307 form an imaging optical system of the measuring device.
  • a surface of the component 100 including the position reference unit 110 is denoted by 101.
  • the light from the light source 301 forms an image of the light source at the pupil position of the condenser lens 305 via the field lens 303 and the half mirror 304.
  • Illumination of the surface 101 of the component 100 is performed via the condenser lens 305 using the image of the light source as a light source.
  • the light reflected by the surface 101 of the component 100 passes through the condenser lens 305, passes through the half mirror 304 and the imaging lens 307, and reaches the image acquisition unit 309.
  • FIG. 5 is a diagram showing a path of illumination light and reflected light for imaging of the coaxial epi-illumination of the measurement apparatus.
  • the above path is determined by the aperture angle of the imaging optical system of the measurement apparatus, that is, the aperture angle of the condenser lens 305.
  • chief rays are represented by L1 and L2, and an aperture angle is represented by ⁇ .
  • ⁇ is represented by a light beam whose angle with the normal of the plane 101 exceeds the opening angle ⁇ is not taken into the measuring device.
  • FIG. 6 is a diagram showing a path of light rays that travel perpendicularly to the bottom surface 121 of the groove 120 in the illumination light and an image of the light rays.
  • the reflected light of the light incident perpendicularly to the bottom surface 121 travels perpendicularly to the bottom surface 121 and therefore reaches the image acquisition unit 309.
  • the reflected light that is perpendicularly incident on the surface 101 also reaches the image acquisition unit 309.
  • the light beam traveling vertically to the bottom surface 121 is reflected by the inclined surface 123, it is further reflected by the side surface of the column 115 and does not reach the image acquisition unit 309.
  • the area of the bottom surface 121 and the plane 101 becomes bright, and the area of the inclined surface 123 becomes dark.
  • the boundary E between the region of the bottom surface 121 and the region of the inclined surface 123 is clearly shown.
  • FIG. 7 is a diagram showing a path of light rays that travel at an angle within a predetermined range with respect to the bottom surface 121 of the groove 120 in the illumination light, and an image of the light rays.
  • the reflected light of the light ray incident on the bottom surface 121 at an angle within the predetermined range is reflected by the bottom surface 121 and the side surfaces of the pillar 115 and then reaches the image acquisition unit 309.
  • the reflected light incident on the surface 101 also reaches the image acquisition unit 309.
  • the light ray traveling at an angle within the predetermined range with respect to the bottom surface 121 is reflected by the inclined surface 123, it is further reflected by the side surface of the column 115 and does not reach the image acquisition unit 309.
  • the reflected image obtained by the light beam reflected by the side surface of the column 115 acquired by the image acquisition unit 309 the area of the bottom surface 121 and the plane 101 becomes bright, and the area of the inclined surface 123 becomes dark.
  • the boundary E ′ between the reflected image in the area of the bottom surface 121 and the reflected image in the area of the inclined surface 123 is clearly shown.
  • FIG. 8 is a diagram showing a path of a light beam for illumination and an image by the light beam.
  • FIG. 8 is a combination of FIGS. 6 and 7.
  • the boundary E ′ is an image obtained by reflection on the side surface of the column 115 of the boundary E between the bottom surface 121 region and the inclined surface 123 region. Therefore, the midpoint of the line segment connecting the point on the boundary E and the corresponding point in the shape of the boundary E ′ corresponds to the position of the point at the periphery of the base of the column 115. In this manner, the position of the base periphery of the pillar 115 can be obtained from the image shown in FIG. A method for obtaining the position of the base periphery of the pillar 115 will be described later.
  • the angle of the inclined surface 123 of the groove 120 with respect to the bottom surface 121 will be described.
  • the unit of angle is degrees.
  • FIG. 9A is a diagram for explaining the relationship between the angle ⁇ of the inclined surface 123 of the groove 120 with respect to the bottom surface 121 and the aperture angle ⁇ of the imaging optical system of the measuring apparatus.
  • ⁇ ⁇ 90- ⁇ Satisfy the relationship. In this case, most of the irradiated light reaches the bottom surface 121 of the groove 120.
  • FIG. 9B is a diagram for explaining the relationship between the angle ⁇ of the inclined surface 123 of the groove 120 with respect to the bottom surface 121 and the aperture angle ⁇ of the imaging optical system of the measuring apparatus.
  • 90- ⁇ ⁇ Satisfy the relationship.
  • some of the irradiated light beams cannot reach the bottom surface 121 of the groove 120 due to vignetting caused by the flat surface 101. Therefore, this state is not preferable from the viewpoint of the efficiency of irradiation.
  • FIG. 10A is a diagram for explaining the relationship between the angle ⁇ of the inclined surface 123 of the groove 120 with respect to the bottom surface 121 and the aperture angle ⁇ of the imaging optical system of the measuring apparatus.
  • ⁇ ⁇ ⁇ Satisfy the relationship In this case, a part of the light beam reflected by the inclined surface 123 enters the measuring device. In this case, the boundary between the region of the bottom surface 121 and the region of the inclined surface 123 becomes unclear in the image obtained by the measuring apparatus. Therefore, this state is not preferable from the viewpoint of measurement by an image.
  • FIG. 10B is a diagram for explaining the relationship between the angle ⁇ of the inclined surface 123 of the groove 120 with respect to the bottom surface 121 and the aperture angle ⁇ of the imaging optical system of the measuring apparatus.
  • ⁇ Satisfy the relationship.
  • the light beam reflected by the inclined surface 123 does not enter the measuring device. Therefore, the boundary between the region of the bottom surface 121 and the region of the inclined surface 123 becomes clear in the image obtained by the measuring apparatus.
  • the angle ⁇ of the inclined surface 123 of the groove 120 with respect to the bottom surface 121 and the aperture angle ⁇ of the imaging optical system of the measuring device satisfy the following relationship.
  • ⁇ ⁇ ⁇ 90- ⁇ Note that the aperture angle ⁇ of the imaging optical system of the measuring apparatus is generally in the range of 10 degrees to 20 degrees. Therefore, the angle of the inclined surface 123 with respect to the bottom surface 121 is preferably 20 degrees to 70 degrees.
  • FIG. 11 is a diagram for explaining the relationship between the width W of the groove 120 and the length L of the column 115.
  • the following relationship needs to be satisfied with the aperture angle of the imaging optical system of the measuring device as ⁇ . is there.
  • the width W is preferably 0.04 mm or more from the viewpoint of the resolution of the measuring apparatus.
  • FIG. 12 is a flowchart for explaining a measurement method according to an embodiment of the present invention.
  • FIG. 13 is a diagram showing the relationship between the measurement method shown in the flowchart of FIG. 12 and the boundaries E and E ′.
  • step S1010 of FIG. 12 in the image of the measurement apparatus, the boundary E is defined from three points on the outer periphery of the groove 120 of the position reference unit 110, that is, the boundary E between the region of the bottom surface 121 and the region of the inclined surface 123. Determine the circle to be formed.
  • step S1020 in FIG. 12 an axis A passing through the center of the circle is determined.
  • the axis A is the horizontal direction.
  • step S1030 of FIG. 12 on the right side of the circle, the intersections of the axis A, the boundary E, and the boundary E ′ are set as A1 and A1 ′.
  • the boundary E ′ is an image obtained by reflection on the side surface of the column 115 of the boundary E between the bottom surface 121 region and the inclined surface 123 region.
  • step S1040 of FIG. 12 the midpoint of the line segment connecting point A1 and point A1 'is AC1.
  • step S1050 in FIG. 12 on the left side of the circle, intersections of the axis A, the boundary E, and the boundary E ′ are set as A2 and A2 ′.
  • step S1060 of FIG. 12 the midpoint of the line segment connecting point A2 and point A2 'is AC2.
  • step S1070 in FIG. 12 the midpoint of the line segment connecting the points AC1 and AC2 is AC.
  • step S1080 in FIG. 12 an axis B orthogonal to the axis A is determined.
  • step S1090 of FIG. 12 for the axis B, the points BC1, BC2, and BC are obtained according to the procedure from step S1030 to step S1070.
  • step S1100 of FIG. 12 the position of the position reference unit 110 is determined from the point AC and the point BC.
  • the main part of the position reference unit 110 is a cylinder, a point having the coordinates of the point AC in the axis A direction and the point BC in the axis B direction is the center of the cross section perpendicular to the cylinder axis. By setting the position, the position of the position reference unit 110 can be determined.
  • the measurement is performed based on the position of the tip end portion of the column of the position reference portion 110 '. For this reason, the deviation of the reference position is caused by the inclination angle of the column.
  • Table 1 is a table showing the deviation of the reference position with respect to the inclination angle of the column for the conventional part and the part of the present invention.
  • the tilt angle of the column is an angle of the axis in the longitudinal direction of the column with respect to the normal line of the plane 101.
  • the unit of length in Table 1 is millimeter.
  • the column length is 2.67 millimeters.
  • FIG. 14 is a diagram showing the deviation of the reference position with respect to the inclination angle of the column for the conventional part and the part of the present invention.
  • the deviation of the conventional part is indicated by a broken line
  • the deviation of the part of the present invention is indicated by a solid line.
  • the deviation of the reference position due to the inclination angle of the column is greatly reduced.
  • a tolerance of lens position ⁇ 3 micrometers can be realized.
  • FIG. 15 is a diagram showing a component 100A including a position reference portion 110A according to another embodiment of the present invention.
  • the two position reference portions 110A have a quadrangular prism shape.
  • the cross section perpendicular to the longitudinal direction of the position reference portion may be circular or polygonal.
  • the cross section of the column corresponding to the length of L from the root described with reference to FIG. 11 needs to have the same shape. Even if the cross section of the column of the position reference portion is polygonal, the position of the position reference portion can be determined by a measurement method similar to the measurement method shown in FIG.

Abstract

Provided is a position measurement method for highly accurately determining the position of a lens, or the like, using a position reference part of a component. In this position measurement method, the position of a given point in an image of a measurement device provided with an imaging optical system using coaxial epi-illumination is determined using the position of a position reference part as a reference. At least a base part of the position reference part has a columnar shape. A groove of a fixed width is provided around the base of the column 115. The bottom surface 121 of the groove is parallel to a flat surface. An inclined surface 123 that rises from the bottom surface at an angle θ in relation to the bottom surface and reaches the flat surface is provided at the outer circumferential edge of the bottom surface. This method includes, in an image of the measurement device, determining the position of the circumferential edge of the base of the column from the position of the outer circumferential edge E of the bottom surface and the position of a reflected image E' of the outer circumferential edge, determining the position of the position reference part from the position of the circumferential edge of the base of the column, and determining the position of the given point using the position of the position reference part as a reference.

Description

位置測定方法及び部品Position measuring method and parts
　本発明は、同軸落射照明を使用する撮像光学系を備えた測定装置の画像による位置測定方法、及び上記の測定方法に適した部品に関する。 The present invention relates to a position measuring method based on an image of a measuring apparatus provided with an imaging optical system using coaxial epi-illumination, and a component suitable for the above measuring method.
　たとえば、一つの面に複数のレンズが配列された部品と、複数の光ファイバを備えたコネクタと、を結合する際に、レンズと光ファイバとの位置合わせを行うために、部品の当該面に設けた柱状の凸部である位置基準部をコネクタに設けた凹部に勘合させる場合がある。このような場合に、個々のレンズと個々の光ファイバとの位置合わせを行うには、部品の面上の位置基準部と個々のレンズとの間の距離を高い精度で保証する必要がある。そのため、部品の位置基準部と個々のレンズとの間の距離の高精度の測定が必要となる。このような測定は、ＣＮＣ（Computer Numerical Control）画像測定機などの測定装置を使用して実施される（たとえば、特許文献１）。 For example, when a component having a plurality of lenses arranged on one surface and a connector having a plurality of optical fibers are coupled, the lens and the optical fiber are aligned on the corresponding surface of the component. There is a case where the position reference portion which is the provided columnar convex portion is fitted into the concave portion provided in the connector. In such a case, in order to align the individual lenses and the individual optical fibers, it is necessary to guarantee the distance between the position reference portion on the surface of the component and the individual lenses with high accuracy. Therefore, it is necessary to measure the distance between the position reference portion of the component and each lens with high accuracy. Such a measurement is performed using a measuring device such as a CNC (Computer Numerical Control) image measuring machine (for example, Patent Document 1).
　部品の面上の位置基準部と個々のレンズとの間の距離の測定においては、測定装置の画像において、当該面における柱状の位置基準部の位置を正確に定める必要がある。従来、測定装置の画像において、位置基準部の柱の根元の部分を識別するのは困難であったので、位置基準部の柱の先端の部分を識別し、先端部分の位置から位置基準部の位置を定め、当該位置を基準としてレンズの位置を定めていた。 In measuring the distance between the position reference portion on the surface of the component and each lens, it is necessary to accurately determine the position of the columnar position reference portion on the surface in the image of the measuring apparatus. Conventionally, since it has been difficult to identify the base part of the column of the position reference part in the image of the measuring device, the tip part of the column of the position reference part is identified, and the position of the position reference part is determined from the position of the tip part. The position is determined, and the position of the lens is determined based on the position.
　しかし、たとえば、位置基準部の柱が当該面の法線に対して傾斜していると、測定装置の画像において、位置基準部の柱の根元の位置と先端の位置とのあいだに間隔が生じる。したがって、先端部分の位置から位置基準部の位置を定め、当該位置を基準としてレンズの位置を定めると、上記の間隔に対応する距離の誤差が生じる。 However, for example, if the column of the position reference portion is inclined with respect to the normal line of the surface, an interval is generated between the position of the base of the column of the position reference portion and the position of the tip in the image of the measuring apparatus. . Therefore, when the position of the position reference portion is determined from the position of the tip portion and the position of the lens is determined with reference to the position, an error in distance corresponding to the above-described interval occurs.
　このように、測定装置の画像において、部品の位置基準部の位置を使用して、レンズなどの位置を高い精度で求める位置測定方法、及び上記の測定方法に適した部品は開発されていない。 As described above, a position measuring method for obtaining the position of a lens or the like with high accuracy using the position of the position reference portion of the part in the image of the measuring apparatus and a part suitable for the above measuring method have not been developed.
特開2004-4055号公報Japanese Patent Laid-Open No. 2004-4055
　したがって、測定装置の画像において、部品の位置基準部の位置を使用して、レンズなどの位置を高い精度で求める位置測定方法、及び上記の測定方法に適した部品に対するニーズがある。本発明の課題は、測定装置の画像において、部品の位置基準部の位置を使用して、レンズなどの位置を高い精度で求める位置測定方法、及び上記の測定方法に適した部品を提供することである。 Therefore, there is a need for a position measuring method for obtaining the position of a lens or the like with high accuracy using the position of the position reference portion of the part in the image of the measuring apparatus, and a part suitable for the above measuring method. An object of the present invention is to provide a position measurement method for obtaining the position of a lens or the like with high accuracy using the position of a position reference portion of a component in an image of a measurement apparatus, and a component suitable for the measurement method described above. It is.
　本発明の第１の態様の位置測定方法は、同軸落射照明を使用する撮像光学系を備えた測定装置の画像において、平面上の位置基準部の及び任意の点の位置を観察し、該位置基準部の位置を基準として該任意の点の位置を定める位置測定方法である。該位置基準部は、少なくとも根元の部分が柱状であり、柱の根元の周囲に一定の幅の溝を備え、該溝の底面は該平面に平行であり、該溝の該底面の外側の周縁には、該底面から該底面に対して角度θで立ち上がり、該平面に至る傾斜面を備える。本発明の位置測定方法は、該測定装置の画像において、該溝の該底面の外側の周縁の位置、及び該外側の周縁の反射像の位置から、該柱の根元の周縁の位置を定めるステップと、該柱の根元の周縁の位置から該位置基準部の位置を定めるステップと、該位置基準部の位置を基準として該任意の点の位置を定めるステップと、を含む。 The position measurement method according to the first aspect of the present invention observes the position of a position reference portion on a plane and an arbitrary point in an image of a measurement apparatus including an imaging optical system using coaxial incident illumination, and the position This is a position measurement method for determining the position of the arbitrary point on the basis of the position of the reference portion. The position reference portion has a columnar shape at least at the base, and includes a groove having a constant width around the base of the column, the bottom surface of the groove is parallel to the plane, and the outer periphery of the bottom surface of the groove Is provided with an inclined surface that rises from the bottom surface to the bottom surface at an angle θ and reaches the flat surface. The position measuring method of the present invention is a step of determining the position of the base periphery of the column from the position of the outer periphery of the bottom surface of the groove and the position of the reflection image of the outer periphery of the groove in the image of the measuring device. And determining the position of the position reference part from the position of the periphery of the base of the pillar, and determining the position of the arbitrary point with reference to the position of the position reference part.
　本発明の第１の態様の位置測定方法においては、測定装置の画像において、溝の底面の外側の周縁の位置、及び該外側の周縁の反射像の位置から、柱の根元の周縁の位置を定め、該柱の根元の周縁の位置から位置基準部の位置を定めるので、柱の先端部の位置から位置基準部の位置を定める場合と比較して、位置測定の誤差を大幅に低減することができる。 In the position measuring method according to the first aspect of the present invention, in the image of the measuring apparatus, the position of the peripheral edge at the base of the column is determined from the position of the outer peripheral edge of the bottom surface of the groove and the position of the reflected image of the outer peripheral edge. Since the position of the position reference part is determined from the position of the periphery of the base of the pillar, the position measurement error can be greatly reduced as compared with the case of determining the position of the position reference part from the position of the tip of the pillar. Can do.
　本発明の第１の態様の第１の実施形態の位置測定方法において、該撮像光学系の開口角をφ、角度の単位を度として、θが、
Figure JPOXMLDOC01-appb-M000004
 を満たす。 In the position measurement method according to the first embodiment of the first aspect of the present invention, θ is the opening angle of the imaging optical system, φ and the unit of the angle is θ,
Figure JPOXMLDOC01-appb-M000004
 Meet.
　上記の関係が満たされると、傾斜面で反射された光線は、測定装置に入射しない。したがって、測定装置による画像において、底面の領域と傾斜面の領域との境界が明確になるので好ましい。 When the above relationship is satisfied, the light beam reflected by the inclined surface does not enter the measuring device. Therefore, it is preferable because the boundary between the bottom surface region and the inclined surface region becomes clear in the image obtained by the measuring apparatus.
　本発明の第１の態様の第２の実施形態の位置測定方法において、該撮像光学系の開口角をφ、角度の単位を度として、θが、
Figure JPOXMLDOC01-appb-M000005
 を満たす。 In the position measurement method according to the second embodiment of the first aspect of the present invention, θ is the opening angle of the imaging optical system, φ is the unit of angle, and θ is
Figure JPOXMLDOC01-appb-M000005
 Meet.
　上記の関係が満たされると、照射される光線の大部分は、溝の底面に到達するので、照射の効率の観点から好ましい。 When the above relationship is satisfied, most of the irradiated light beam reaches the bottom surface of the groove, which is preferable from the viewpoint of irradiation efficiency.
　本発明の第３の実施形態の位置測定方法において、該顕微鏡の開口数をＮＡ、該溝の幅をＷ、該柱の長さをＬとして、
Figure JPOXMLDOC01-appb-M000006
 を満たす。 In the position measurement method according to the third embodiment of the present invention, NA is the numerical aperture of the microscope, W is the width of the groove, and L is the length of the column.
Figure JPOXMLDOC01-appb-M000006
 Meet.
　上記の関係が満たされると、溝の底面で反射された光線の大部分が、位置基準部の柱の側面で反射され、測定装置に到達する。 When the above relationship is satisfied, most of the light beam reflected by the bottom surface of the groove is reflected by the side surface of the column of the position reference portion and reaches the measuring device.
　本発明の第１の態様の第３の実施形態の位置測定方法において、該任意の点の位置が光学素子の位置である。 In the position measurement method according to the third embodiment of the first aspect of the present invention, the position of the arbitrary point is the position of the optical element.
　本実施形態によれば、位置基準部の位置を基準として、光学素子の位置を高い精度で定めることができる。 According to this embodiment, the position of the optical element can be determined with high accuracy using the position of the position reference portion as a reference.
　本発明の第２の態様の部品は、少なくとも一つの平面上に少なくとも二つの位置基準部と光学素子とを備えた部品である。該位置基準部は、少なくとも根元の部分が柱状であり、柱の根元の周囲に一定の幅の溝を備え、該溝の底面は該平面に平行であり、該溝の該底面の外側の周縁には、該底面から該底面に対して角度θで立ち上がり、該平面に至る傾斜面を備え、該角度は20度から70度の範囲である。 The component according to the second aspect of the present invention is a component including at least two position reference portions and an optical element on at least one plane. The position reference portion has a columnar shape at least at the base, and includes a groove having a constant width around the base of the column, the bottom surface of the groove is parallel to the plane, and the outer periphery of the bottom surface of the groove Includes an inclined surface that rises from the bottom surface to the bottom surface at an angle θ and reaches the flat surface, and the angle ranges from 20 degrees to 70 degrees.
　本態様による部品は、同軸落射照明を使用する撮像光学系を備えた測定装置の画像により、該位置基準部の位置を基準として、該光学素子の位置を高い精度で測定するのに適している。 The component according to this aspect is suitable for measuring the position of the optical element with high accuracy based on the position of the position reference unit based on the image of a measurement apparatus including an imaging optical system using coaxial incident illumination. .
本発明の一実施形態の、位置基準部を備えた部品を示す図である。It is a figure which shows the components provided with the position reference part of one Embodiment of this invention. 従来の部品の位置基準部の中心軸を含む断面を示す図である。It is a figure which shows the cross section containing the central axis of the position reference part of the conventional components. 本発明の一実施形態の部品の位置基準部の中心軸を含む断面を示す図である。It is a figure which shows the cross section containing the central axis of the position reference part of the components of one Embodiment of this invention. 本発明の測定方法において使用される、同軸落射照明を使用する測定装置を示す図である。It is a figure which shows the measuring apparatus which uses the coaxial epi-illumination used in the measuring method of this invention. 上記の測定装置の同軸落射照明の照明用の光、及び撮像用の反射光の経路を示す図である。It is a figure which shows the path | route of the illumination light of the coaxial epi-illumination of said measuring apparatus, and the reflected light for imaging. 照明用の光のうち溝の底面に垂直に進行する光線の経路及びその光線による画像を示す図である。It is a figure which shows the path | route of the light ray which advances perpendicularly | vertically to the bottom face of a groove | channel among the lights for illumination, and the image by the light ray. 照明用の光のうち溝の底面に対して所定の範囲の角度で進行する光線の経路及びその光線による画像を示す図である。It is a figure which shows the path | route of the light ray which advances at an angle of the predetermined range with respect to the bottom face of a groove | channel among the lights for illumination, and the image by the light ray. 照明用の光の光線の経路及びその光線による画像を示す図である。It is a figure which shows the path | route of the light ray of the light for illumination, and the image by the light ray. 溝の傾斜面の、底面に対する角度θと測定装置の撮像光学系の開口角φとの関係を説明するための図である。It is a figure for demonstrating the relationship between angle (theta) with respect to a bottom face of the inclined surface of a groove | channel, and opening angle (phi) of the imaging optical system of a measuring device. 溝の傾斜面の、底面に対する角度θと測定装置の撮像光学系の開口角φとの関係を説明するための図である。It is a figure for demonstrating the relationship between angle (theta) with respect to a bottom face of the inclined surface of a groove | channel, and opening angle (phi) of the imaging optical system of a measuring device. 溝の傾斜面の、底面に対する角度θと測定装置の撮像光学系の開口角φとの関係を説明するための図である。It is a figure for demonstrating the relationship between angle (theta) with respect to a bottom face of the inclined surface of a groove | channel, and opening angle (phi) of the imaging optical system of a measuring device. 溝の傾斜面の、底面に対する角度θと測定装置の撮像光学系の開口角φとの関係を説明するための図である。It is a figure for demonstrating the relationship between angle (theta) with respect to a bottom face of the inclined surface of a groove | channel, and opening angle (phi) of the imaging optical system of a measuring device. 溝の幅Ｗと柱１１５の長さＬとの関係を説明するための図である。It is a figure for demonstrating the relationship between the width W of a groove | channel, and the length L of the pillar 115. FIG. 本発明の一実施形態の測定方法を説明するための流れ図である。It is a flowchart for demonstrating the measuring method of one Embodiment of this invention. 図１２の流れ図に示した測定方法と境界Ｅ及びＥ’との関係を示す図である。It is a figure which shows the relationship between the measuring method shown to the flowchart of FIG. 12, and the boundary E and E '. 従来の部品及び本発明の部品について、柱の傾斜角度に対する基準位置の偏差を示す図である。It is a figure which shows the deviation of the reference | standard position with respect to the inclination angle of a pillar about the conventional components and the components of this invention. 本発明の他の実施形態の、位置基準部を備えた部品を示す図である。It is a figure which shows the components provided with the position reference part of other embodiment of this invention.
　図１は、本発明の一実施形態の、位置基準部１１０を備えた部品１００を示す図である。部品１００の一つの面１０１には、２個の位置基準部１１０及び複数のレンズ１５０が設置されている。２個の位置基準部１１０は、ほぼ円柱状である。複数のレンズ１５０を備えた部品１００は、たとえば、複数の光ファイバを備えたコネクタに接続される。２個の位置基準部１１０は、部品１００とコネクタとの接続に使用される。たとえば、コネクタが、２個の柱状の位置基準部１１０に対応する２個の凹部を備えており、位置基準部が凹部に収納されるようにしてもよい。その際に、複数のレンズ１５０と複数の光ファイバとを、高い精度で位置合わせする必要がある。このため、高い精度での位置合わせを保証するために、複数のレンズ１５０の位置を、２個の位置基準部１１０を基準として正確に測定する必要がある。 FIG. 1 is a diagram illustrating a component 100 including a position reference unit 110 according to an embodiment of the present invention. On one surface 101 of the component 100, two position reference portions 110 and a plurality of lenses 150 are installed. The two position reference parts 110 are substantially cylindrical. The component 100 including the plurality of lenses 150 is connected to, for example, a connector including a plurality of optical fibers. The two position reference parts 110 are used for connecting the component 100 and the connector. For example, the connector may include two concave portions corresponding to the two columnar position reference portions 110, and the position reference portions may be accommodated in the concave portions. At that time, it is necessary to align the plurality of lenses 150 and the plurality of optical fibers with high accuracy. For this reason, in order to guarantee alignment with high accuracy, it is necessary to accurately measure the positions of the plurality of lenses 150 with reference to the two position reference units 110.
　図２は、従来の部品の位置基準部１１０’の中心軸を含む断面を示す図である。 FIG. 2 is a view showing a cross section including the central axis of the position reference portion 110 ′ of the conventional component.
　ここで、複数のレンズ１５０の位置の測定は、ＣＮＣ（Computer Numerical Control）画像測定機などの測定装置を使用して実施される。画像測定機などの測定装置で取得した画像において、従来の部品の位置基準部１１０’の柱の根元部分は、周囲の平面と区別するのが困難である。そこで、画像測定機などの測定装置で取得した画像において、図２において円で囲った、柱の先端部分を観察することにより位置基準部１１０’の位置を定めている。 Here, the measurement of the positions of the plurality of lenses 150 is performed using a measuring device such as a CNC (Computer Numerical Control) image measuring machine. In an image acquired by a measuring apparatus such as an image measuring machine, it is difficult to distinguish the base portion of the pillar of the position reference portion 110 ′ of the conventional component from the surrounding plane. In view of this, the position of the position reference unit 110 ′ is determined by observing the tip end portion of the column surrounded by a circle in FIG. 2 in an image acquired by a measuring apparatus such as an image measuring machine.
　図３は、本発明の一実施形態の部品１００の位置基準部１１０の中心軸を含む断面を示す図である。本発明の一実施形態の部品１００は、位置基準部１１０の柱１１５の根元の周囲に環状の溝１２０を備える点で従来の部品と異なる。図３の円で囲まれた図は、溝１２０の、位置基準部１１０の中心軸を含む断面を示す図である。溝１２０の幅はＷ、溝１２０の深さはＤで示す。溝１２０の底面１２１は、部品１００の平面１０１と平行に形成される。底面１２１の粗さは、３０ｎｍ以下に仕上げるのが好ましい。底面１２１の外側の周縁には、底面１２１から底面１２１に対して所定の角度で立ち上がり、面１０１に至る傾斜面１２３が備わる。底面１２１は、レンズ１５０が配置される平面と同一の平面を形成するように、溝１２０の深さＤを定めるのが好ましい。 FIG. 3 is a view showing a cross section including the central axis of the position reference portion 110 of the component 100 according to the embodiment of the present invention. The component 100 according to the embodiment of the present invention is different from the conventional component in that an annular groove 120 is provided around the base of the column 115 of the position reference unit 110. 3 is a diagram showing a cross section of the groove 120 including the central axis of the position reference portion 110. The width of the groove 120 is indicated by W, and the depth of the groove 120 is indicated by D. The bottom surface 121 of the groove 120 is formed in parallel with the plane 101 of the component 100. The roughness of the bottom surface 121 is preferably finished to 30 nm or less. The outer periphery of the bottom surface 121 is provided with an inclined surface 123 that rises from the bottom surface 121 to the bottom surface 121 at a predetermined angle and reaches the surface 101. The bottom surface 121 preferably defines the depth D of the groove 120 so as to form the same plane as the plane on which the lens 150 is disposed.
　図３において、Ａ１及びＡ２で示される隅部は、断面が円弧上の部分、いわゆるＲを有さないように形成されるのが好ましい。 In FIG. 3, the corners indicated by A1 and A2 are preferably formed such that the cross section does not have a so-called R portion on the arc.
　図４は、本発明の測定方法において使用される、同軸落射照明を使用する測定装置を示す図である。測定装置は、ＣＮＣ画像測定器であってもよい。測定装置は、光源３０１と、視野レンズ３０３と、ハーフミラー３０４と、コンデンサレンズ３０５と、結像レンズ３０７と、画像取得部３０９と、を含む。コンデンサレンズ３０５、ハーフミラー３０４、及び結像レンズ３０７は、測定装置の撮像光学系を形成する。位置基準部１１０を備えた部品１００の面を１０１で表す。光源３０１からの光は、視野レンズ３０３及びハーフミラー３０４を介して、コンデンサレンズ３０５の瞳位置に光源の像を形成する。この光源の像を光源として、コンデンサレンズ３０５を介して、部品１００の面１０１への照明が実施される。部品１００の面１０１で反射された光は、コンデンサレンズ３０５を通過した後、ハーフミラー３０４及び結像レンズ３０７を通過して画像取得部３０９に到達する。 FIG. 4 is a diagram showing a measuring apparatus using coaxial epi-illumination used in the measuring method of the present invention. The measuring device may be a CNC image measuring device. The measurement apparatus includes a light source 301, a field lens 303, a half mirror 304, a condenser lens 305, an imaging lens 307, and an image acquisition unit 309. The condenser lens 305, the half mirror 304, and the imaging lens 307 form an imaging optical system of the measuring device. A surface of the component 100 including the position reference unit 110 is denoted by 101. The light from the light source 301 forms an image of the light source at the pupil position of the condenser lens 305 via the field lens 303 and the half mirror 304. Illumination of the surface 101 of the component 100 is performed via the condenser lens 305 using the image of the light source as a light source. The light reflected by the surface 101 of the component 100 passes through the condenser lens 305, passes through the half mirror 304 and the imaging lens 307, and reaches the image acquisition unit 309.
　図５は、上記の測定装置の同軸落射照明の照明用の光、及び撮像用の反射光の経路を示す図である。上記の経路は、上記の測定装置の撮像光学系の開口角、すなわちコンデンサレンズ３０５の開口角によって定まる。図５において、主光線をＬ１、Ｌ２で表し、開口角をφで表す。反射光のうち、平面１０１の法線となす角度が開口角φを超える光線は、測定装置に取り込まれない。 FIG. 5 is a diagram showing a path of illumination light and reflected light for imaging of the coaxial epi-illumination of the measurement apparatus. The above path is determined by the aperture angle of the imaging optical system of the measurement apparatus, that is, the aperture angle of the condenser lens 305. In FIG. 5, chief rays are represented by L1 and L2, and an aperture angle is represented by φ. Of the reflected light, a light beam whose angle with the normal of the plane 101 exceeds the opening angle φ is not taken into the measuring device.
　図６は、照明用の光のうち溝１２０の底面１２１に垂直に進行する光線の経路及びその光線による画像を示す図である。底面１２１に垂直に入射する光線の反射光は、底面１２１に垂直に進行するので画像取得部３０９に到達する。同様に、面１０１に垂直に入射する反射光も画像取得部３０９に到達する。他方、底面１２１に垂直に進行する光線が、傾斜面１２３に反射されると、さらに、柱１１５の側面に反射され画像取得部３０９に到達することはない。そこで、画像取得部３０９で取得された画像において、底面１２１及び平面１０１の領域は明るくなり、傾斜面１２３の領域は暗くなる。この結果、上記の画像において、底面１２１の領域と傾斜面１２３の領域との境界Ｅが明確に示される。 FIG. 6 is a diagram showing a path of light rays that travel perpendicularly to the bottom surface 121 of the groove 120 in the illumination light and an image of the light rays. The reflected light of the light incident perpendicularly to the bottom surface 121 travels perpendicularly to the bottom surface 121 and therefore reaches the image acquisition unit 309. Similarly, the reflected light that is perpendicularly incident on the surface 101 also reaches the image acquisition unit 309. On the other hand, when the light beam traveling vertically to the bottom surface 121 is reflected by the inclined surface 123, it is further reflected by the side surface of the column 115 and does not reach the image acquisition unit 309. Therefore, in the image acquired by the image acquisition unit 309, the area of the bottom surface 121 and the plane 101 becomes bright, and the area of the inclined surface 123 becomes dark. As a result, in the above image, the boundary E between the region of the bottom surface 121 and the region of the inclined surface 123 is clearly shown.
　図７は、照明用の光のうち溝１２０の底面１２１に対して所定の範囲の角度で進行する光線の経路及びその光線による画像を示す図である。底面１２１に上記所定の範囲の角度入射する光線の反射光は、底面１２１及び柱１１５の側面で反射された後、画像取得部３０９に到達する。同様に、面１０１に入射する反射光も画像取得部３０９に到達する。他方、底面１２１に対して上記所定の範囲の角度で進行する光線は、傾斜面１２３に反射されたとしても、さらに、柱１１５の側面に反射され画像取得部３０９に到達することはない。そこで、画像取得部３０９で取得された、柱１１５の側面で反射された光線による反射像において、底面１２１及び平面１０１の領域は明るくなり、傾斜面１２３の領域は暗くなる。この結果、上記の画像において、底面１２１の領域の反射像と傾斜面１２３の領域の反射像との境界Ｅ’が明確に示される。 FIG. 7 is a diagram showing a path of light rays that travel at an angle within a predetermined range with respect to the bottom surface 121 of the groove 120 in the illumination light, and an image of the light rays. The reflected light of the light ray incident on the bottom surface 121 at an angle within the predetermined range is reflected by the bottom surface 121 and the side surfaces of the pillar 115 and then reaches the image acquisition unit 309. Similarly, the reflected light incident on the surface 101 also reaches the image acquisition unit 309. On the other hand, even if the light ray traveling at an angle within the predetermined range with respect to the bottom surface 121 is reflected by the inclined surface 123, it is further reflected by the side surface of the column 115 and does not reach the image acquisition unit 309. Therefore, in the reflected image obtained by the light beam reflected by the side surface of the column 115 acquired by the image acquisition unit 309, the area of the bottom surface 121 and the plane 101 becomes bright, and the area of the inclined surface 123 becomes dark. As a result, in the above image, the boundary E ′ between the reflected image in the area of the bottom surface 121 and the reflected image in the area of the inclined surface 123 is clearly shown.
　図８は、照明用の光の光線の経路及びその光線による画像を示す図である。図８は、図６及び図７を組み合わせたものである。図８において、境界Ｅ’は、底面１２１領域と傾斜面１２３の領域との境界Ｅの、柱１１５の側面における反射による像である。そこで、境界Ｅの上の点とそれに対応する境界Ｅ’状の点とを結ぶ線分の中点は、柱１１５の根元の周縁の点の位置に対応する。このようにして、図８に示す画像から、柱１１５の根元の周縁の位置を求めることができる。なお、柱１１５の根元の周縁の位置の求め方については後で説明する。 FIG. 8 is a diagram showing a path of a light beam for illumination and an image by the light beam. FIG. 8 is a combination of FIGS. 6 and 7. In FIG. 8, the boundary E ′ is an image obtained by reflection on the side surface of the column 115 of the boundary E between the bottom surface 121 region and the inclined surface 123 region. Therefore, the midpoint of the line segment connecting the point on the boundary E and the corresponding point in the shape of the boundary E ′ corresponds to the position of the point at the periphery of the base of the column 115. In this manner, the position of the base periphery of the pillar 115 can be obtained from the image shown in FIG. A method for obtaining the position of the base periphery of the pillar 115 will be described later.
　以下において、溝１２０の傾斜面１２３の、底面１２１に対する角度について説明する。本明細書において角度の単位は度である。 Hereinafter, the angle of the inclined surface 123 of the groove 120 with respect to the bottom surface 121 will be described. In this specification, the unit of angle is degrees.
　図９Ａは、溝１２０の傾斜面１２３の、底面１２１に対する角度θと測定装置の撮像光学系の開口角φとの関係を説明するための図である。図９Ａにおいて、
　θ≦９０-φ
の関係を満たす。この場合に、照射される光線の大部分は、溝１２０の底面１２１に到達する。 FIG. 9A is a diagram for explaining the relationship between the angle θ of the inclined surface 123 of the groove 120 with respect to the bottom surface 121 and the aperture angle φ of the imaging optical system of the measuring apparatus. In FIG. 9A,
θ ≦ 90-φ
Satisfy the relationship. In this case, most of the irradiated light reaches the bottom surface 121 of the groove 120.
　図９Ｂは、溝１２０の傾斜面１２３の、底面１２１に対する角度θと測定装置の撮像光学系の開口角φとの関係を説明するための図である。図９Ｂにおいて、
　９０-φ＜θ
の関係を満たす。この場合に、照射される光線の一部は、平面１０１によるケラレによって溝１２０の底面１２１に到達することができない。したがって、この状態は照射の効率の観点から好ましくない。 FIG. 9B is a diagram for explaining the relationship between the angle θ of the inclined surface 123 of the groove 120 with respect to the bottom surface 121 and the aperture angle φ of the imaging optical system of the measuring apparatus. In FIG. 9B,
90-φ <θ
Satisfy the relationship. In this case, some of the irradiated light beams cannot reach the bottom surface 121 of the groove 120 due to vignetting caused by the flat surface 101. Therefore, this state is not preferable from the viewpoint of the efficiency of irradiation.
　図１０Ａは、溝１２０の傾斜面１２３の、底面１２１に対する角度θと測定装置の撮像光学系の開口角φとの関係を説明するための図である。図１０Ａにおいて、
　φ≧θ
の関係を満たす。この場合に、傾斜面１２３で反射された光線の一部は、測定装置に入射する。この場合に、測定装置による画像において、底面１２１の領域と傾斜面１２３の領域との境界が明確でなくなる。したがって、この状態は、画像による測定の観点から好ましくない。 FIG. 10A is a diagram for explaining the relationship between the angle θ of the inclined surface 123 of the groove 120 with respect to the bottom surface 121 and the aperture angle φ of the imaging optical system of the measuring apparatus. In FIG. 10A,
φ ≧ θ
Satisfy the relationship. In this case, a part of the light beam reflected by the inclined surface 123 enters the measuring device. In this case, the boundary between the region of the bottom surface 121 and the region of the inclined surface 123 becomes unclear in the image obtained by the measuring apparatus. Therefore, this state is not preferable from the viewpoint of measurement by an image.
　図１０Ｂは、溝１２０の傾斜面１２３の、底面１２１に対する角度θと測定装置の撮像光学系の開口角φとの関係を説明するための図である。図１０Ｂにおいて、
　φ＜θ
の関係を満たす。この場合に、傾斜面１２３で反射された光線は、測定装置に入射しない。したがって、測定装置による画像において、底面１２１の領域と傾斜面１２３の領域との境界が明確になる。 FIG. 10B is a diagram for explaining the relationship between the angle θ of the inclined surface 123 of the groove 120 with respect to the bottom surface 121 and the aperture angle φ of the imaging optical system of the measuring apparatus. In FIG. 10B,
φ <θ
Satisfy the relationship. In this case, the light beam reflected by the inclined surface 123 does not enter the measuring device. Therefore, the boundary between the region of the bottom surface 121 and the region of the inclined surface 123 becomes clear in the image obtained by the measuring apparatus.
　したがって、溝１２０の傾斜面１２３の、底面１２１に対する角度θと測定装置の撮像光学系の開口角φとは、以下の関係を満たすのが好ましい。
　φ＜θ≦９０-φ
なお、測定装置の撮像光学系の開口角φは、一般的に10度から20度の範囲である。したがって、底面１２１に対する傾斜面１２３の角度は、20度から70度であるのが好ましい。 Therefore, it is preferable that the angle θ of the inclined surface 123 of the groove 120 with respect to the bottom surface 121 and the aperture angle φ of the imaging optical system of the measuring device satisfy the following relationship.
φ <θ ≦ 90-φ
Note that the aperture angle φ of the imaging optical system of the measuring apparatus is generally in the range of 10 degrees to 20 degrees. Therefore, the angle of the inclined surface 123 with respect to the bottom surface 121 is preferably 20 degrees to 70 degrees.
　図１１は、溝１２０の幅Ｗと柱１１５の長さＬとの関係を説明するための図である。溝１２０の底面１２１で反射された光線が、柱１１５の側面で反射され、測定装置に到達するためには、測定装置の撮像光学系の開口角をφとして、以下の関係が満たされる必要がある。
　Ｗ≦Ｌ×tanθ
また、幅Ｗは、測定装置の解像度の観点から０．０４ｍｍ以上であるのが望ましい。 FIG. 11 is a diagram for explaining the relationship between the width W of the groove 120 and the length L of the column 115. In order for the light beam reflected by the bottom surface 121 of the groove 120 to be reflected by the side surface of the pillar 115 and reach the measuring device, the following relationship needs to be satisfied with the aperture angle of the imaging optical system of the measuring device as φ. is there.
W ≦ L × tanθ
The width W is preferably 0.04 mm or more from the viewpoint of the resolution of the measuring apparatus.
　図１２は、本発明の一実施形態の測定方法を説明するための流れ図である。 FIG. 12 is a flowchart for explaining a measurement method according to an embodiment of the present invention.
　図１３は、図１２の流れ図に示した測定方法と境界Ｅ及びＥ’との関係を示す図である。 FIG. 13 is a diagram showing the relationship between the measurement method shown in the flowchart of FIG. 12 and the boundaries E and E ′.
　図１２のステップＳ１０１０において、測定装置の画像において、位置基準部１１０の溝１２０の外側の周縁、すなわち、底面１２１の領域と傾斜面１２３の領域との境界Ｅ上の３点から、境界Ｅを形成する円を定める。 In step S1010 of FIG. 12, in the image of the measurement apparatus, the boundary E is defined from three points on the outer periphery of the groove 120 of the position reference unit 110, that is, the boundary E between the region of the bottom surface 121 and the region of the inclined surface 123. Determine the circle to be formed.
　図１２のステップＳ１０２０において、上記の円の中心を通る軸Ａを定める。ここでは、軸Ａを水平方向とする。 In step S1020 in FIG. 12, an axis A passing through the center of the circle is determined. Here, the axis A is the horizontal direction.
　図１２のステップＳ１０３０において、上記の円の右側において、軸Ａと境界Ｅ及び境界Ｅ’との交点をＡ１及びＡ１’とする。上述のように、境界Ｅ’は、底面１２１領域と傾斜面１２３の領域との境界Ｅの、柱１１５の側面における反射による像である。 In step S1030 of FIG. 12, on the right side of the circle, the intersections of the axis A, the boundary E, and the boundary E ′ are set as A1 and A1 ′. As described above, the boundary E ′ is an image obtained by reflection on the side surface of the column 115 of the boundary E between the bottom surface 121 region and the inclined surface 123 region.
　図１２のステップＳ１０４０において、点Ａ１及び点Ａ１’を結ぶ線分の中点をＡＣ１とする。 In step S1040 of FIG. 12, the midpoint of the line segment connecting point A1 and point A1 'is AC1.
　図１２のステップＳ１０５０において、上記の円の左側において、軸Ａと境界Ｅ及び境界Ｅ’との交点をＡ２及びＡ２’とする。 In step S1050 in FIG. 12, on the left side of the circle, intersections of the axis A, the boundary E, and the boundary E ′ are set as A2 and A2 ′.
　図１２のステップＳ１０６０において、点Ａ２及び点Ａ２’を結ぶ線分の中点をＡＣ２とする。 In step S1060 of FIG. 12, the midpoint of the line segment connecting point A2 and point A2 'is AC2.
　図１２のステップＳ１０７０において、点ＡＣ１及び点ＡＣ２を結ぶ線分の中点をＡＣとする。 In step S1070 in FIG. 12, the midpoint of the line segment connecting the points AC1 and AC2 is AC.
　図１２のステップＳ１０８０において、軸Ａと直交する軸Ｂを定める。 In step S1080 in FIG. 12, an axis B orthogonal to the axis A is determined.
　図１２のステップＳ１０９０において、軸Ｂについて、ステップＳ１０３０からステップＳ１０７０までの手順にしたがって、点ＢＣ１、点ＢＣ２及び点ＢＣを求める。 In step S1090 of FIG. 12, for the axis B, the points BC1, BC2, and BC are obtained according to the procedure from step S1030 to step S1070.
　図１２のステップＳ１１００において、点ＡＣ及び点ＢＣから位置基準部１１０の位置を定める。本実施形態においては、位置基準部１１０の主要部は円柱であるので、点ＡＣの軸Ａ方向の座標及び点ＢＣの軸Ｂ方向の座標を有する点を、円柱の軸に垂直な断面の中心位置とすることによって、位置基準部１１０の位置を定めることができる。 In step S1100 of FIG. 12, the position of the position reference unit 110 is determined from the point AC and the point BC. In the present embodiment, since the main part of the position reference unit 110 is a cylinder, a point having the coordinates of the point AC in the axis A direction and the point BC in the axis B direction is the center of the cross section perpendicular to the cylinder axis. By setting the position, the position of the position reference unit 110 can be determined.
　図２を使用して説明した通り、従来の部品においては、位置基準部１１０’の柱の先端部分の位置を基準として測定を実施していた。このため、柱の傾斜角度により基準位置の偏差が生じる。 As described with reference to FIG. 2, in the conventional part, the measurement is performed based on the position of the tip end portion of the column of the position reference portion 110 '. For this reason, the deviation of the reference position is caused by the inclination angle of the column.
　表１は、従来の部品及び本発明の部品について、柱の傾斜角度に対する基準位置の偏差を示す表である。柱の傾斜角度とは、柱の長手方向の軸の、平面１０１の法線に対する角度である。表１における長さの単位はミリメータである。柱の長さは、２．６７ミリメータである。
Figure JPOXMLDOC01-appb-T000007
 Table 1 is a table showing the deviation of the reference position with respect to the inclination angle of the column for the conventional part and the part of the present invention. The tilt angle of the column is an angle of the axis in the longitudinal direction of the column with respect to the normal line of the plane 101. The unit of length in Table 1 is millimeter. The column length is 2.67 millimeters.
Figure JPOXMLDOC01-appb-T000007
　図１４は、従来の部品及び本発明の部品について、柱の傾斜角度に対する基準位置の偏差を示す図である。図１４において、従来の部品の偏差を破線で示し、本発明の部品の偏差を実線で示す。従来の部品と比較して、本発明の部品においては、柱の傾斜角度による基準位置の偏差が大幅に低減される。本発明によれば、一例として、レンズ位置の公差±３マイクロメータを実現することができる。 FIG. 14 is a diagram showing the deviation of the reference position with respect to the inclination angle of the column for the conventional part and the part of the present invention. In FIG. 14, the deviation of the conventional part is indicated by a broken line, and the deviation of the part of the present invention is indicated by a solid line. Compared with the conventional part, in the part of the present invention, the deviation of the reference position due to the inclination angle of the column is greatly reduced. According to the present invention, as an example, a tolerance of lens position ± 3 micrometers can be realized.
　また、位置基準部１１０の柱の周縁の位置と溝１２０の外側の周縁の位置とが同心状に形成されていない場合であっても、図１２及び図１３に示した測定方法によれば、溝の周縁の位置に起因する誤差を低減することができる。 Further, even if the position of the peripheral edge of the column of the position reference portion 110 and the position of the outer peripheral edge of the groove 120 are not formed concentrically, according to the measurement method shown in FIGS. Errors due to the position of the peripheral edge of the groove can be reduced.
　図１５は、本発明の他の実施形態の、位置基準部１１０Ａを備えた部品１００Ａを示す図である。２個の位置基準部１１０Ａは四角柱状である。一般的に、位置基準部の長手方向に垂直な断面は、円形、または多角形でよい。ただし、図１１を使用して説明した根元からＬの長さに相当する柱の断面は、同一の形状である必要がある。位置基準部の柱の断面が多角形であっても、図１２に示した測定方法と同様の測定方法で位置基準部の位置を定めることができる。 FIG. 15 is a diagram showing a component 100A including a position reference portion 110A according to another embodiment of the present invention. The two position reference portions 110A have a quadrangular prism shape. In general, the cross section perpendicular to the longitudinal direction of the position reference portion may be circular or polygonal. However, the cross section of the column corresponding to the length of L from the root described with reference to FIG. 11 needs to have the same shape. Even if the cross section of the column of the position reference portion is polygonal, the position of the position reference portion can be determined by a measurement method similar to the measurement method shown in FIG.

Claims (6)

  1. 　同軸落射照明を使用する撮像光学系を備えた測定装置の画像において、平面上の位置基準部の及び任意の点の位置を観察し、該位置基準部の位置を基準として該任意の点の位置を定める位置測定方法であって、該位置基準部は、少なくとも根元の部分が柱状であり、柱の根元の周囲に一定の幅の溝を備え、該溝の底面は該平面に平行であり、該溝の該底面の外側の周縁には、該底面から該底面に対して角度θで立ち上がり、該平面に至る傾斜面を備え、
    　該測定装置の画像において、該溝の該底面の外側の周縁の位置、及び該外側の周縁の反射像の位置から、該柱の根元の周縁の位置を定めるステップと、
    　該柱の根元の周縁の位置から該位置基準部の位置を定めるステップと、
    　該位置基準部の位置を基準として該任意の点の位置を定めるステップと、を含む位置測定方法。     In an image of a measuring apparatus equipped with an imaging optical system that uses coaxial epi-illumination, the position of the position reference part on the plane and the position of an arbitrary point are observed, and the position of the arbitrary point with reference to the position of the position reference part Wherein the position reference portion has a columnar shape at least at the base, a groove having a constant width around the base of the column, and the bottom surface of the groove is parallel to the plane. The outer periphery of the bottom surface of the groove has an inclined surface that rises from the bottom surface to the bottom surface at an angle θ and reaches the flat surface,
    In the image of the measuring device, determining the position of the base periphery of the pillar from the position of the outer periphery of the bottom surface of the groove and the position of the reflection image of the outer periphery;
    Determining the position of the position reference portion from the position of the periphery of the base of the pillar;
    Determining a position of the arbitrary point on the basis of the position of the position reference unit.
  2. 　該撮像光学系の開口角をφ、角度の単位を度として、θが、
    Figure JPOXMLDOC01-appb-M000001
     を満たす請求項１に記載の位置測定方法。     The aperture angle of the imaging optical system is φ, the unit of the angle is degrees, and θ is
    Figure JPOXMLDOC01-appb-M000001
     The position measuring method according to claim 1, wherein:
  3. 　該撮像光学系の開口角をφ、角度の単位を度として、θが、
    Figure JPOXMLDOC01-appb-M000002
     を満たす請求項１または２に記載の位置測定方法。     The aperture angle of the imaging optical system is φ, the unit of the angle is degrees, and θ is
    Figure JPOXMLDOC01-appb-M000002
     The position measuring method according to claim 1 or 2, satisfying
  4. 　該顕微鏡の開口数をＮＡ、該溝の幅をＷ、該柱の長さをＬとして、
    Figure JPOXMLDOC01-appb-M000003
     を満たす請求項１から３のいずれかに記載の位置測定方法。     The numerical aperture of the microscope is NA, the width of the groove is W, and the length of the column is L.
    Figure JPOXMLDOC01-appb-M000003
     The position measuring method according to claim 1, wherein:
  5. 　該任意の点の位置が光学素子の位置である請求項１から４のいずれかに記載の位置測定方法。 The position measurement method according to any one of claims 1 to 4, wherein the position of the arbitrary point is the position of the optical element.
  6. 　少なくとも一つの平面上に少なくとも二つの位置基準部と光学素子とを備えた部品であって、該位置基準部は、少なくとも根元の部分が柱状であり、柱の根元の周囲に一定の幅の溝を備え、該溝の底面は該平面に平行であり、該溝の該底面の外側の周縁には、該底面から該底面に対して角度θで立ち上がり、該平面に至る傾斜面を備え、該角度は20度から70度の範囲である部品。 A component having at least two position reference portions and an optical element on at least one plane, wherein the position reference portion has a columnar shape at least at the base, and a groove having a constant width around the base of the column. A bottom surface of the groove is parallel to the plane, and an outer peripheral edge of the bottom surface of the groove has an inclined surface that rises from the bottom surface to the bottom surface at an angle θ and reaches the plane, Parts whose angle ranges from 20 degrees to 70 degrees.
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