WO2018193738A1 - Dispositif de détection de position et son procédé de fabrication - Google Patents

Dispositif de détection de position et son procédé de fabrication Download PDF

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Publication number
WO2018193738A1
WO2018193738A1 PCT/JP2018/008731 JP2018008731W WO2018193738A1 WO 2018193738 A1 WO2018193738 A1 WO 2018193738A1 JP 2018008731 W JP2018008731 W JP 2018008731W WO 2018193738 A1 WO2018193738 A1 WO 2018193738A1
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WO
WIPO (PCT)
Prior art keywords
magnetic
magnetic field
detection element
magnet
detection device
Prior art date
Application number
PCT/JP2018/008731
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English (en)
Japanese (ja)
Inventor
隆博 馬籠
一郎 徳永
拓 齊藤
命 福井
Original Assignee
アルプス電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
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Application filed by アルプス電気株式会社 filed Critical アルプス電気株式会社
Publication of WO2018193738A1 publication Critical patent/WO2018193738A1/fr

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/18Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying effective impedance of discharge tubes or semiconductor devices
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02MSUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M26/00Engine-pertinent apparatus for adding exhaust gases to combustion-air, main fuel or fuel-air mixture, e.g. by exhaust gas recirculation [EGR] systems
    • F02M26/45Sensors specially adapted for EGR systems
    • F02M26/48EGR valve position sensors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage

Definitions

  • the present invention relates to a position detection apparatus that detects the position of an object to which a magnet is attached using a change in a magnetic field detected by a magnetic detection element, and a method for manufacturing the position detection apparatus.
  • a magnetic sensor incorporated in a flow control valve detects opening / closing of a valve (valve) using a change in a magnetic field accompanying a change in position of a shaft driven by an actuator along a straight line.
  • Patent Document 1 discloses a magnetic field detected by a Hall element provided to face a permanent magnet in response to a change in position of a permanent magnet attached to an end of a drive shaft that drives an intake / exhaust valve.
  • An electromagnetic intake / exhaust valve drive system that detects the position of an intake / exhaust valve using a change in strength is described.
  • the electromagnetic intake / exhaust valve drive system described in Patent Document 1 specifies the position of the permanent magnet at the end of the drive shaft based on the change in the strength of the magnetic field detected by the Hall element, thereby opening and closing the valve. Is detected.
  • a leakage magnetic field generated by the electromagnetic actuator that drives the drive shaft becomes noise and a detection error tends to occur in the Hall element.
  • the present invention solves the above-described conventional problems, and is a non-contact type position detection device capable of accurately detecting the position of a movable part interlocked with a drive shaft of a solenoid actuator by detecting a change in a magnetic field, and It aims at providing the manufacturing method.
  • a position detection device includes a movable portion interlocking with a drive shaft of a solenoid actuator, a magnet, and a magnetic detection element capable of detecting a magnetic field generated by the magnet, and the magnet and the magnetic detection element
  • the position detection device one is provided in the movable part and the other is provided in the fixed part, and the position of the movable part interlocked with the drive shaft is detected based on the magnetic field detected by the magnetic detection element.
  • the magnetic sensing direction in which a magnetic field can be detected by the magnetic detection element is different from the direction of a leakage magnetic field generated by the solenoid actuator.
  • the magnetic detection element divides the leakage magnetic field into a magnetosensitive direction component parallel to the magnetosensitive direction and a vertical component perpendicular to the magnetosensitive direction, the vertical component is more than the magnetosensitive direction component. It is good also as a structure provided in the position provided in the position which becomes large, or the position where the direction of the said leakage magnetic field is orthogonal to the said magnetosensitive direction.
  • the magnetic detection element detects noise as the magnetic detection element, and the vertical component is not detected by the magnetic detection element. For this reason, the influence of the leakage magnetic field from a solenoid actuator can be suppressed by arrange
  • the magnetic sensitive direction has a first magnetic sensitive direction and a second magnetic sensitive direction perpendicular to the first magnetic sensitive direction, and the first magnetic sensitive direction and the second magnetic sensitive direction. All may be configured to be orthogonal to the leakage magnetic field direction.
  • the magnetic detection element detects a magnetic field generated by the magnet and parallel to the drive direction of the drive shaft, and a position where a leakage magnetic field of the solenoid actuator is formed in a direction orthogonal to the drive direction of the drive shaft Is preferably provided. With this configuration, the leakage magnetic field is prevented from being detected as noise, and the detection accuracy is improved.
  • the one provided in the movable part is provided at a position shifted (offset) from the extension line of the drive shaft in a direction perpendicular to the extension line. Also good.
  • the magnet or magnetic detection element provided in the movable part is provided at a position shifted in the direction perpendicular to the extension line of the drive shaft, the magnetic field of the leakage magnetic field is more sensitive than that provided with the magnetic detection element on the extension line.
  • the direction component can be reduced and the vertical direction component can be increased.
  • the magnetic detection element can be configured using a magnetoresistive element that detects the magnetic field by changing an electric resistance value, or a Hall element having a detection surface that can detect a magnetic component.
  • the manufacturing method of the position detection device of the present invention includes a calculation step of calculating a leakage magnetic field of a solenoid actuator, and an arrangement step of installing a magnetic detection element based on the leakage magnetic field calculated in the calculation step. It is characterized by being.
  • the position detection device has an arrangement in which the direction of the leakage magnetic field generated by the solenoid actuator is different from the direction in which the magnetic detection element can detect the magnetic field.
  • the influence of the leakage magnetic field on the magnet detected by can be suppressed. Therefore, based on the relative position between the magnetism detection element and the magnet, the position of the movable part linked to the drive shaft can be detected with high accuracy, and the position detection device can detect the position of the detection target with high accuracy.
  • the magnetic detection element is installed at a position where the influence of the leakage magnetic field on the detection result is small by calculating the leakage magnetic field of the solenoid actuator in advance in the calculation step. can do. Therefore, it is possible to easily manufacture a position detection device with good detection accuracy in which the influence of the leakage magnetic field from the solenoid actuator is suppressed.
  • FIG. 1A is a perspective explanatory view illustrating the positional relationship between a magnet and a magnetic detection element included in the position detection device of FIG.
  • FIG. 3A is an explanatory perspective view illustrating the positional relationship between the magnet and the magnetic detection element included in the position detection device of FIG.
  • FIGS. 6A and 6B are schematic diagrams for explaining a magnetic sensing direction component and a vertical direction component of a leakage magnetic field, where (A) an installation position 13A in FIG. 5, (B) an installation position 13B in FIG. 5, and (C) an installation position 13C in FIG.
  • an exhaust gas recirculation valve (hereinafter also referred to as “EGR valve” as appropriate) has been used for the purpose of removing harmful components contained in the exhaust gas of an internal combustion engine.
  • EGR valves use a solenoid actuator to control the open / close state of the valve, and the valve is opened / closed by linear movement of the drive shaft of the solenoid actuator. For this reason, the open / closed state of the valve can be detected by detecting the position of the drive shaft of the solenoid actuator.
  • FIG. 3A is an explanatory diagram conceptually showing the configuration of a position detection device that detects the position of the drive shaft of the solenoid actuator
  • FIG. 3B is a diagram illustrating a magnet and a magnetic detection element in FIG. It is an enlarged view which shows the surrounding magnetic field
  • FIG. 4 is an explanatory perspective view for explaining the positional relationship between the magnet and the magnetic detection element provided in the position detection device of FIG.
  • the shaft (movable part) 11 of the position detection device 100 is attached to the drive shaft 22 so as to be interlocked with the drive shaft 22 of the solenoid actuator 2. Along with the change in the position of the drive shaft 22, the relative position between the magnet 12 attached to the shaft 11 and the magnetic detection element 13 disposed in the fixed portion 14 facing the vicinity of the magnet 12 changes.
  • the position detection device 100 detects the position of the drive shaft 22 of the solenoid actuator 2 when the magnetic detection element 13 detects a change in the magnetic field M due to a change in the relative position between the magnetic detection element 13 and the magnet 12.
  • a magnet 12 and a magnetic detection element 13 are disposed in the vicinity of the center line (extension line) C of the drive shaft 22 of the solenoid actuator 2.
  • the direction of the leakage magnetic field L (leakage magnetic field direction) generated by the body 21 of the solenoid actuator 2 is the magnetic field M of the magnet 12 and the sensitivity of the magnetic detection element 13. It coincides with the magnetic direction S. For this reason, there is a problem that an error is likely to occur due to the leakage magnetic field L generated by the solenoid actuator 2 being detected by the magnetic detection element 13 as noise of the magnetic field M of the magnet 12.
  • the position detection apparatus 1 of the present invention prevents the leakage magnetic field L from being detected as noise so that the magnetic field M and the magnetic sensing direction S do not coincide with the direction of the leakage magnetic field L of the solenoid actuator 2.
  • a magnet 12 and a magnetic detection element 13 are arranged (see FIG. 1A).
  • FIG. 1A is an explanatory diagram conceptually showing the configuration of the position detection device of the present embodiment
  • FIG. 1B is a view of the periphery of the magnet and the magnetic detection element provided in the position detection device of FIG. It is an enlarged view which shows a magnetic field etc.
  • FIG. 2 is a perspective explanatory view for explaining the positional relationship between the magnet and the magnetic detection element provided in the position detection device of FIG.
  • the position detection device 1 of this embodiment includes a shaft 11, a magnet 12, and a magnet 12 that are linked to the drive shaft 22 of the solenoid actuator 2. And a magnetic detection element 13 capable of detecting the generated magnetic field M.
  • the shaft 11 is connected to one end 22 ⁇ / b> A of the drive shaft 22 of the solenoid actuator 2, and has a main body 111 extending along the center line C of the drive shaft 22, and the main body 111 opposite to the drive shaft 22. And an offset portion 112 extending from the end portion 111A in a direction orthogonal to the center line C.
  • a magnet 12 is attached to the tip 112 ⁇ / b> A of the offset portion 112.
  • the magnet 12 is provided so that the leakage magnetic field L from the solenoid actuator 2 is orthogonal to the direction of the magnetic field M generated by the magnet 12. Further, the magnetic detection element 13 is also provided in the fixed portion 14 surrounding the shaft 11 so that the magnetic sensing direction S is orthogonal to the leakage magnetic field L.
  • the position detection device 1 accurately detects the position of the shaft 11 linked to the drive shaft 22 from the change in the relative position between the magnet 12 and the magnetic detection element 13 due to the displacement of the drive shaft 22 of the solenoid actuator 2. It is possible.
  • the magnet 12 generates a magnetic field M in the X1 direction of FIG. 1A, and the magnetic detection element 13 similarly has a magnetosensitive direction S in the X1 direction.
  • the magnet 12 is linked to the drive shaft 22 via the shaft 11, whereas the magnetic detection element 13 is provided on the fixed portion 14 that is not linked to the drive shaft 22. For this reason, when the drive shaft 22 moving linearly moves, the relative position between the magnet 12 and the magnetic detection element 13 changes, and the magnetic field M of the magnet 12 detected by the magnetic detection element 13 also changes. Since the change of the magnetic field M is due to the movement of the drive shaft 22, the position of the drive shaft 22 can be detected based on the magnetic field M detected by the magnetic detection element 13.
  • the position detection device 1 By detecting the position of the drive shaft 22, the state of the object connected to the other end 22B of the drive shaft 22 can be detected. For example, when an EGR valve is joined to the other end 22B of the drive shaft 22, the position detection device 1 functions as a sensor that detects the open / closed state of the EGR valve.
  • the magnetic detection element 13 has two perpendicular magnetic sensing directions Sx1 and Sy. For this reason, when the relative position between the magnet 12 and the magnetic detection element 13 changes, the magnetic field M from the magnet 12 detected by the magnetic detection element 13 changes, and thus the magnet 12 in the magnetic sensitive direction Sx1 and the magnetic sensitive direction Sy. Can be detected.
  • the magnetic sensing surface formed (specified) by the magnetic sensing direction Sx1 and the magnetic sensing direction Sy by arranging the magnetic detection element 13 so that the leakage magnetic field L is orthogonal to both the magnetic sensing direction Sx1 and the magnetic sensing direction Sy.
  • the magnetic sensing direction S of the magnetic detection element 13 shown in FIG. 1B is a magnetic sensing direction (first magnetic sensing direction) Sx1 and a magnetic sensing direction (second magnetic sensing direction) Sy. It consists of two directions.
  • the magnetic sensing direction Sx1 and the magnetic sensing direction Sy are both orthogonal to the leakage magnetic field L from the solenoid actuator 2. Therefore, the leakage magnetic field L can be prevented from being detected by the magnetic detection element 13 as noise when the magnetic field M from the magnet 12 is detected.
  • FIG. 1A and 1B show a mode in which the magnet 12 is provided on the shaft 11 and the magnetic detection element 13 is provided on the fixed portion 14.
  • the magnetic field M of the magnet 12 detected by the magnetic detection element 13 may be changed by a change in the relative position between the magnet 12 and the magnetic detection element 13. For this reason, it is good also as a structure which provided the magnetism detection element 13 in the shaft 11, and the magnet 12 in the fixing
  • the magnetic detection element 13 can be configured using a magnetoresistive effect element that detects the magnetic field M by a change in electric resistance value.
  • the magnetoresistive effect element include a giant magnetoresistive effect element (GMR element).
  • GMR element giant magnetoresistive effect element
  • the magnetic detection element 13 having two magnetosensitive directions S is used as the magnetic detection element.
  • the magnetic detection element is not limited to this, and for example, a Hall element having a detection surface capable of detecting a magnetic component can be used. Even when the Hall element is used, the leakage magnetic field L can be prevented from being detected as noise by arranging the magnetic sensing direction to be different from the direction of the leakage magnetic field L generated by the solenoid actuator 2.
  • FIG. 5 is an explanatory diagram showing a simulation result of the magnetic field generated by the solenoid actuator.
  • the solenoid actuator 2 (see FIG. 1A) includes a coil 23 inside the main body 21, and drives the drive shaft 22 (see FIG. 1A) by a magnetic force generated by passing a current through the coil 23. .
  • a part of the magnetic field generated when the drive shaft 22 is driven by the coil 23 becomes the leakage magnetic field L.
  • the arrow in the figure indicates the direction of the leakage magnetic field L.
  • the coil 23 of the solenoid actuator 2 is supplied with a current having a predetermined value corresponding to the position of the drive shaft 22 (see FIGS. 1A and 3A). Although the intensity of the above-described leakage magnetic field L changes depending on the magnitude of the current flowing through the coil 23, the direction is substantially constant.
  • the simulation result of FIG. 5 schematically shows the direction of the leakage magnetic field L.
  • the direction of the leakage magnetic field L varies greatly depending on the distance from the center line C of the drive shaft 22.
  • 5A is an installation position of the magnetic detection element 13 in the position detection apparatus 1 (see FIGS. 1A and 2)
  • 13B is an installation position of the magnetic detection element 13 in the position detection apparatus 100 (see FIG. 5).
  • 3 (A), see FIG. 4) Differences in the direction of the leakage magnetic field L depending on the installation position of the magnetic detection element 13 will be described for 13A, 13B, and 13C between them.
  • FIG. 6A and 6B are schematic diagrams for explaining the magnetic sensing direction component and the vertical direction component of the leakage magnetic field.
  • FIG. 6A shows the leakage magnetic field L at the installation position 13A in FIG. 5
  • FIG. 6B shows the installation in FIG.
  • the leakage magnetic field L at the position 13B and FIG. 6C show the leakage magnetic field L at the installation position 13C in FIG.
  • the leakage magnetic field L when the leakage magnetic field L is composed only of the vertical direction component Lz1 orthogonal to the magnetic sensing direction Sx1 of the magnetic detection element 13, the leakage magnetic field L becomes noise in the detection of the magnetic detection element 13. Can be suppressed.
  • the position detection device 1 in which the magnetic detection element 13 is provided at the installation position 13A accurately detects a change in the magnetic field caused by a change in the relative position with respect to the magnet 12. be able to.
  • the position detection device 100 in which the magnetic detection element 13 is provided at the installation position 13 ⁇ / b> B has a leakage magnetic field in detecting a change in the magnetic field caused by a change in the relative position with respect to the magnet 12. L becomes noise and accuracy decreases.
  • the magnetic detection element 13 is installed at a position where the magnetic sensitive direction component Lx1 parallel to the magnetic sensitive direction Sx1 is as small as possible. Is preferred.
  • the installation position of the magnetic detection element 13 is most preferably the installation position 13A where the magnetic sensing direction component Lx1 of the leakage magnetic field L is eliminated.
  • the magnetic sensing direction component Lx1 (noise component) of the leakage magnetic field L at the installation position 13C of the magnetic detection element 13 is larger than the installation position 13A and smaller than the installation position 13B. As it moves from the installation position 13A to the installation position 13B, the magnetic sensing direction component Lx1 (noise component) of the leakage magnetic field L increases and the vertical direction component Lz1 (non-noise component) decreases. In the region where the vertical direction component Lz1 of the leakage magnetic field L is larger than the magnetosensitive direction component Lx1, it can be said that the ratio of the noise component in the leakage magnetic field L is relatively small. For this reason, the magnetic detection element 13 is preferably installed at a position where the vertical direction component Lz1 of the leakage magnetic field L is larger than the magnetosensitive direction component Lx1.
  • the magnetic sensing direction component Lx1 of the leakage magnetic field L By reducing the magnetic sensing direction component Lx1 of the leakage magnetic field L, it is possible to reduce noise when the magnetic detection element 13 detects the magnetic field M of the magnet 12 and to suppress a decrease in detection accuracy. That is, by making the magnetic sensing direction S in which the magnetic field M can be detected by the magnetic detection element 13 different from the direction of the leakage magnetic field L, compared with the case where the magnetic sensing direction S and the direction of the leakage magnetic field L match, The influence of the leakage magnetic field L can be suppressed. For this reason, the direction of the leakage magnetic field L does not have to be completely orthogonal to the magnetic field M and the magnetic sensing direction S.
  • the magnetic field M, the magnetic sensing direction S, and the direction of the leakage magnetic field L may be set according to the required detection accuracy.
  • the present invention includes a calculation step for calculating the leakage magnetic field L generated by the solenoid actuator 2 and a placement step for providing the magnetic detection element 13 based on the direction of the leakage magnetic field L calculated in the calculation step. It can implement as a manufacturing method of the detection apparatus 1 (refer FIG. 1 (A) and FIG. 1 (B)).
  • the leakage magnetic field generated by the solenoid actuator 2 is calculated in advance, and in the placement step, the direction of the leakage magnetic field L generated by the solenoid actuator 2 based on the direction of the leakage magnetic field L calculated in the calculation step;
  • the magnetic detection element 13 By arranging the magnetic detection element 13 at a position where the direction of the magnetic field M detected by the magnetic detection element 13 is different, the detection error due to the noise of the leakage magnetic field L generated by the solenoid actuator 2 is suppressed, and the detection accuracy is improved. It becomes easy to manufacture a good position detection apparatus 1.
  • the position detection in which the magnetic detection element 13 is installed by changing the offset distance O from the center line C of the drive shaft 22 to the end 12E of the magnet 12.
  • the apparatus 1 was manufactured (refer FIG. 1 (A)), and the linearity of the output voltage from the magnetic detection element 13 of the position detection apparatus 1 by the position of the shaft 11 was investigated.
  • the position detection device 1 provided with the magnetic detection element 13 at a position where the leakage magnetic field L is perpendicular to the magnetic sensing direction S was manufactured, and the output voltage linearity was evaluated by changing the position of the shaft 11.
  • the magnetic detection element 13 was installed at a position where the offset distance O from the center line C of the drive shaft 22 was 25 mm using a coil 23 having a diameter of 40 mm.
  • the position detection device 1 provided with the magnetic detection element 13 at a position where the leakage magnetic field L is parallel to the magnetic sensing direction S was manufactured, and the output voltage linearity was evaluated by changing the position of the shaft 11.
  • the magnetic detection element 13 was installed at a position where the offset distance O from the center line C of the drive shaft 22 was 6 mm using a coil 23 having a diameter of 40 mm.
  • FIG. 7 is a graph showing linearity between the shaft position and the output voltage of the position detection device according to the example of the present invention and the comparative example.
  • the linearity of the output voltage decreased as the displacement of the shaft position increased.
  • the position detection device of the example the linearity of the output voltage did not decrease even when the change in the shaft position became large. From this result, it was found that by installing the magnetic detection element 13 at a position perpendicular to the magnetic sensing direction S, a position detection device with high accuracy can be obtained.
  • Position detection device 11 Shaft (movable part) 111 Body portion 111A Opposite end 112 Offset portion 112A Tip 12 Magnet 12E Magnet end 13 Detection element (magnetoresistance effect element) 13A, 13B, 13C Detection element installation position 14 Fixed portion 2 Solenoid actuator 21 Main body 22 Drive shaft, 22A One end, 22B Other end 23 Coil M Magnet magnetic field L Leakage magnetic field, Lx1 Leakage magnetic field direction component, Lz1 Leakage magnetic field Vertical component S of magnetic field, Sx1 Magnetic direction (first magnetic direction) Sy Magnetic direction (second magnetic direction) R Drive shaft drive direction C Drive shaft centerline (extension of drive shaft) line) O Offset distance

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Exhaust-Gas Circulating Devices (AREA)

Abstract

Ce dispositif de détection de position (1) comprend une partie mobile (11) qui se déplace conjointement avec un arbre d'entraînement (22) d'un actionneur à solénoïde (2), un aimant (12) et un élément de détection magnétique (13) qui est capable de détecter le champ magnétique généré par l'aimant (12). L'aimant (12) est disposé sur la partie mobile (11). L'élément de détection magnétique (13) est disposé sur une partie fixe (14). Le dispositif de détection de position (1) détecte la position de la partie mobile (11), qui se déplace conjointement avec l'arbre d'entraînement (22), sur la base du champ magnétique (M) détecté par l'élément de détection magnétique (13). Comme la direction de détection du magnétisme (S) de l'élément de détection magnétique (13) et la direction du champ magnétique de fuite (L) généré par l'actionneur à solénoïde (2) sont différentes, il est possible de détecter avec précision la position de la partie mobile, qui se déplace conjointement avec l'arbre d'entraînement de l'actionneur à solénoïde, par la détection d'une variation du champ magnétique.
PCT/JP2018/008731 2017-04-17 2018-03-07 Dispositif de détection de position et son procédé de fabrication WO2018193738A1 (fr)

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JP2017-081320 2017-04-17
JP2017081320A JP2020106269A (ja) 2017-04-17 2017-04-17 位置検出装置およびその製造方法

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003014407A (ja) * 2001-06-29 2003-01-15 Sony Precision Technology Inc 位置検出装置
JP2010060338A (ja) * 2008-09-02 2010-03-18 Alps Electric Co Ltd 磁石を使用した移動検出装置
JP2011017598A (ja) * 2009-07-08 2011-01-27 Alps Electric Co Ltd 移動検出装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003014407A (ja) * 2001-06-29 2003-01-15 Sony Precision Technology Inc 位置検出装置
JP2010060338A (ja) * 2008-09-02 2010-03-18 Alps Electric Co Ltd 磁石を使用した移動検出装置
JP2011017598A (ja) * 2009-07-08 2011-01-27 Alps Electric Co Ltd 移動検出装置

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