WO2018170964A1 - 一种处理光阻沉积的搅拌装置及光阻桶 - Google Patents

一种处理光阻沉积的搅拌装置及光阻桶 Download PDF

Info

Publication number
WO2018170964A1
WO2018170964A1 PCT/CN2017/080236 CN2017080236W WO2018170964A1 WO 2018170964 A1 WO2018170964 A1 WO 2018170964A1 CN 2017080236 W CN2017080236 W CN 2017080236W WO 2018170964 A1 WO2018170964 A1 WO 2018170964A1
Authority
WO
WIPO (PCT)
Prior art keywords
stirring
shaft
photoresist
sleeve shaft
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2017/080236
Other languages
English (en)
French (fr)
Inventor
唐宁林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wuhan China Star Optoelectronics Technology Co Ltd
Original Assignee
Wuhan China Star Optoelectronics Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wuhan China Star Optoelectronics Technology Co Ltd filed Critical Wuhan China Star Optoelectronics Technology Co Ltd
Priority to US15/539,732 priority Critical patent/US10730025B2/en
Publication of WO2018170964A1 publication Critical patent/WO2018170964A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
    • B01F27/05—Stirrers
    • B01F27/051—Stirrers characterised by their elements, materials or mechanical properties
    • B01F27/054—Deformable stirrers, e.g. deformed by a centrifugal force applied during operation
    • B01F27/0541—Deformable stirrers, e.g. deformed by a centrifugal force applied during operation with mechanical means to alter the position of the stirring elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
    • B01F27/21—Mixers with rotary stirring devices in fixed receptacles; Kneaders characterised by their rotating shafts
    • B01F27/2124—Shafts with adjustable length, e.g. telescopic shafts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
    • B01F27/23—Mixers with rotary stirring devices in fixed receptacles; Kneaders characterised by the orientation or disposition of the rotor axis
    • B01F27/231—Mixers with rotary stirring devices in fixed receptacles; Kneaders characterised by the orientation or disposition of the rotor axis with a variable orientation during mixing operation, e.g. with tiltable rotor axis
    • B01F27/2312—Mixers with rotary stirring devices in fixed receptacles; Kneaders characterised by the orientation or disposition of the rotor axis with a variable orientation during mixing operation, e.g. with tiltable rotor axis the position of the rotating shaft being adjustable in the interior of the receptacle, e.g. to locate the stirrer in different locations during the mixing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
    • B01F27/80—Mixers with rotary stirring devices in fixed receptacles; Kneaders with stirrers rotating about a substantially vertical axis
    • B01F27/90—Mixers with rotary stirring devices in fixed receptacles; Kneaders with stirrers rotating about a substantially vertical axis with paddles or arms 
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/20—Measuring; Control or regulation
    • B01F35/22—Control or regulation
    • B01F35/221—Control or regulation of operational parameters, e.g. level of material in the mixer, temperature or pressure
    • B01F35/2216—Time, i.e. duration, of at least one parameter during the operation
    • B01F35/22161—Time, i.e. duration, of at least one parameter during the operation duration of the mixing process or parts of it
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/30—Driving arrangements; Transmissions; Couplings; Brakes
    • B01F35/32—Driving arrangements
    • B01F35/32005—Type of drive
    • B01F35/3202—Hand driven
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/30—Driving arrangements; Transmissions; Couplings; Brakes
    • B01F35/32—Driving arrangements
    • B01F35/32005—Type of drive
    • B01F35/3204—Motor driven, i.e. by means of an electric or IC motor

Definitions

  • the invention relates to the technical field of agitating devices, in particular to a stirring device for treating photodeposition and a photoresist barrel.
  • TFT-LCD liquid crystal display
  • RGB color resist photoresist required for the production of CF (color filter) substrate
  • CF color filter
  • High requirements Due to the long-distance transport of the photoresist and long-term storage, the photoresist will be deposited. The photoresist content in the photoresist barrel is lower than the lower one. Because CF uses a negative photoresist (ie, part of the photoresist will be exposed).
  • the present invention provides a stirring device and a photoresist barrel for treating light deposition.
  • the present invention provides a stirring apparatus for treating light deposition, comprising:
  • the rotating rod is mounted on an upper end of the sleeve shaft for driving the sleeve shaft to rotate, and the stirring assembly is disposed at The lower end of the sleeve shaft rotates with the sleeve shaft, and the inner telescopic shaft is disposed inside the sleeve shaft to be connected with the stirring assembly for controlling opening and closing of the stirring assembly.
  • the stirring assembly comprises two stirring pieces of the same structure, and the two stirring pieces are symmetrically arranged;
  • the stirring piece has a semicircular shape at one end and a vertical shape at the other end, and the groove processing is connected to the semicircular shape on the upper side of the stirring piece.
  • the two agitating sheets are "one" straight line when they are opened.
  • the sleeve shaft is in the shape of a drum.
  • a slit is formed on both sides of the lower portion of the sleeve shaft.
  • the lower end of the inner telescopic shaft is mounted with a movable shaft joint, two connecting pieces are disposed in the gap, and the upper ends of the two connecting pieces are respectively connected with the movable shaft joint, two The lower ends of the connecting sheets are respectively connected to the stirring assembly.
  • the two connecting pieces are inclined.
  • the height of the sleeve shaft is smaller than the height of the inner telescopic shaft.
  • the rotating rod has a lateral "L" shape.
  • a photoresist barrel includes a light-resistance outlet formed on a barrel body, and a circular opening for the agitation device for treating the light deposition is further formed on the barrel body.
  • the stirring device for treating light deposition opens the stirring assembly through the inner telescopic shaft, the rotating rod drives the sleeve shaft to rotate, and the stirring assembly rotates with the sleeve shaft, and the stirring device is opened from the bottom step by step.
  • Stirring makes the photoresist better and evener, easy to use, saves a lot of manpower and material resources, fast mixing speed and high safety.
  • the photoresist barrel including the device should also have a corresponding technical effect.
  • FIG. 1 is a schematic view showing the structure of a stirring apparatus for treating light deposition in an embodiment of the present application.
  • FIG. 2 is a schematic view showing the structure of a stirring sheet for a stirring device for treating light deposition in an embodiment of the present application; Figure.
  • FIG. 3 is a schematic structural view of a barrel of a photoresist barrel according to an embodiment of the present application.
  • FIG. 4 is a schematic structural view of a photoresist barrel according to an embodiment of the present application.
  • FIG. 1 schematically shows the stirring device for treating light deposition, comprising:
  • the rotating rod 11 is mounted on the upper end of the sleeve shaft 13 for driving the sleeve shaft 13 to rotate, and the stirring assembly is disposed at the lower end of the sleeve shaft 13 to rotate with the sleeve shaft 13.
  • the inner telescopic shaft 12 is disposed inside the sleeve shaft 13 and connected with the stirring assembly for control.
  • the mixing assembly opens and closes. The mixing effect is good, the structure is simple, the operation is convenient and quick, and the safety performance is improved.
  • the sleeve shaft 13 is in the shape of a drum for easy installation and convenient operation.
  • the sleeve shaft 13 is made of metal or hard plastic, which is convenient for installation and convenient to operate.
  • the height of the sleeve shaft 13 is less than the height of the inner telescoping shaft 12. It is convenient to take out the inner telescopic shaft 12 and the stirring assembly, and it is convenient and quick to repair and assemble.
  • the rotary rod 11 is in the transverse "L" shape.
  • the hand-held is convenient, the synergistic effect is good, and the sleeve shaft 13 is better powered.
  • the rotary rod 11 is welded to the upper end side of the sleeve shaft 13, and has better firmness and is not easily damaged.
  • the rotating rod 11 can also be connected to the mechanical arm, and the rotation of the rotating rod 11 by the mechanical arm saves manpower.
  • a slit (not shown) is further formed on both sides of the lower portion of the sleeve shaft 13.
  • the agitation assembly includes two agitating blades 16 of identical construction, the two agitating blades 16 being symmetrically disposed.
  • the one end of the stirring piece 16 has a semicircular shape and the other end has a vertical shape, and the groove 161 is processed on the upper side of the stirring piece 16 to be connected to the semicircular shape. It is convenient to put the two stirring pieces 16 up and open, and there is no sticking phenomenon, and the folding is flexible.
  • the width of the two stirring pieces 16 and the diameter of the inner telescopic shaft 12 are smaller than the diameter of the sleeve shaft 13.
  • the two stirring pieces 16 and the inner telescopic shaft 12 can be received into the sleeve shaft 13, which is convenient for disassembly and maintenance.
  • the agitating piece 16 is retracted and then attached to the inner telescopic shaft 12, and the sleeve shaft 13 can be directly taken out without taking out the sleeve shaft 13
  • the inner telescopic shaft 12 and the stirring piece 16 are taken out together, which is convenient and quick to use, convenient for maintenance and convenient to store.
  • the two connecting pieces 15 are inclined.
  • the two connecting pieces 15 open the two stirring pieces 16, and the two stirring pieces 16 are in a "one" straight line when the two stirring pieces 16 are opened, the two connecting pieces 15 and the two stirring pieces 16 are triangular, the supporting force is more concentrated, and the stability is more stable. it is good. Different sizes of the stirring piece 16 can be replaced according to actual needs.
  • the lower end of the inner telescopic shaft 12 is mounted with a movable shaft joint 14, two connecting pieces 15 are disposed in the gap, and the upper ends of the two connecting pieces 15 are respectively connected with the movable shaft joint 14.
  • the lower ends of the two connecting pieces 15 are respectively connected to the stirring assembly. It is easy to fold and does not appear to be stuck.
  • a collar design is adopted between the stirring piece 16 and the inner telescopic shaft 12 to facilitate opening and closing of the stirring piece 16.
  • an electronic timepiece can also be mounted on the rotating rod 11 to conveniently view the stirring time, and the stirring time is preferably 3-5 minutes, thereby improving work efficiency.
  • the photoresist barrel is schematically shown, including a light-resistance outlet 22 formed on the barrel 20, and a barrel having a stirring device for processing light deposition is also formed on the barrel 20. twenty one.
  • the length of the two stirring sheets 16 in the stirring device added together is smaller than the diameter of the barrel 20.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mixers Of The Rotary Stirring Type (AREA)

Abstract

一种处理光阻沉积的搅拌装置及光阻桶，包括套轴（13）、内伸缩轴（12）、搅拌组件和旋杆（11）；其中，旋杆（11）安装在套轴（13）上端用于带动套轴（13）转动，搅拌组件设置在套轴（13）下端随着套轴（13）转动，内伸缩轴（12）设置在套轴（13）内部与搅拌组件连接，用于控制搅拌组件开合。搅拌片（16）靠近光阻桶底部，此时手控制搅拌装置从底部开启逐步向上搅拌，从而达到光阻成分均一的目的，使光刻胶搅拌更佳均匀，节省大量人力物力，搅拌速度快，安全性高。

Description

[根据细则37.2由ISA制定的发明名称]　一种处理光阻沉积的搅拌装置及光阻桶
相关申请的交叉引用
本申请要求享有于2017年03月24日提交的名称为“一种处理光沉积的搅拌装置及光阻桶”的中国专利申请CN201710181986.0的优先权，该申请的全部内容通过引用并入本文中。
技术领域
本发明涉及搅拌装置技术领域，尤其涉及一种处理光沉积的搅拌装置及光阻桶。
背景技术
TFT-LCD(液晶显示器)的生产中，需要用到光刻胶，其中CF(彩膜滤光片)基板的生产中所需要的RGB色阻的光刻胶对光阻含量的均一性有着很高的要求。由于光阻长距离的运输和长时间的存储，会导致光阻有一定沉积，光阻桶内光阻含量上面比下面低，由于CF采用的为负性光阻(即曝光的部分光阻会保留下来)，如果光阻均一性不好，在经过抽真空和预加热工序之后，由于光阻内溶剂的挥发，会使留下的光阻成分含量有差异，从而导致特性值有差异，影响产品品质。
现有的光阻桶没有防止或处理光阻沉积的设计。常用的处理方式是滚动或者摇晃光阻桶，由于光阻桶较重，所以操作不够方便，且由于光阻易燃，具有一定的毒性，所以操作也存在安全问题。
发明内容
针对上述问题中存在的不足之处，本发明提供一种处理光沉积的搅拌装置及光阻桶。
为实现上述目的，本发明提供一种处理光沉积的搅拌装置，包括：
套轴、内伸缩轴、搅拌组件和旋杆；其中，
所述旋杆安装在所述套轴上端用于带动所述套轴转动，所述搅拌组件设置在 所述套轴下端随着所述套轴转动，所述内伸缩轴设置在所述套轴内部与所述搅拌组件连接，用于控制所述搅拌组件开合。
上述的处理光沉积的搅拌装置，所述搅拌组件包括两个结构相同的搅拌片，两个所述搅拌片对称设置；
所述搅拌片一端为半圆形状另一端为垂直形状，凹槽加工在所述搅拌片上面一侧与所述半圆形状相连接。
上述的处理光沉积的搅拌装置，两个所述搅拌片撑开时呈“一”直线。
上述的处理光沉积的搅拌装置，所述套轴为圆桶形状。
上述的处理光沉积的搅拌装置，在所述套轴下部两侧均加工有豁口。
上述的处理光沉积的搅拌装置，所述内伸缩轴的下端安装有活动轴节，两个连接片设置在所述豁口内，两个所述连接片上端分别与所述活动轴节连接，两个所述连接片下端分别与所述搅拌组件连接。
上述的处理光沉积的搅拌装置，两个所述连接片为倾斜设置。
上述的处理光沉积的搅拌装置，所述套轴的高度小于所述内伸缩轴的高度。
上述的处理光沉积的搅拌装置，所述旋杆为横向的“L”形状。
一种光阻桶，包括构造在桶体上的光阻出口，在所述桶体上还构造有供所述的处理光沉积的搅拌装置出入的圆口。
在上述技术方案中，本发明提供的处理光沉积的搅拌装置，通过内伸缩轴将搅拌组件撑开，旋杆带动套轴转动，搅拌组件随着套轴转动，制搅拌装置从底部开启逐步向上搅拌，使光刻胶搅拌更佳均匀，使用方便快捷，节省大量人力物力，搅拌速度快，安全性高。
由于上述处理光沉积的搅拌装置具有上述技术效果，包含该装置的光阻桶也应具有相应的技术效果。
上述技术特征可以各种适合的方式组合或由等效的技术特征来替代，只要能够达到本发明的目的。
附图说明
在下文中将基于实施例并参考附图来对本发明进行更详细的描述。
图1为本申请的一个实施例中处理光沉积的搅拌装置的结构示意图。
图2为本申请的一个实施例中处理光沉积的搅拌装置的搅拌片的结构示意 图。
图3为本申请的一个实施例光阻桶的桶体的结构示意图。
图4为本申请的一个实施例光阻桶的结构示意图。
具体实施方式
下面将结合附图对本发明作进一步说明。
如图1所示，图1示意性地显示了该处理光沉积的搅拌装置，包括：
套轴13、内伸缩轴12、搅拌组件和旋杆11；其中，
旋杆11安装在套轴13上端用于带动套轴13转动，搅拌组件设置在套轴13下端随着套轴13转动，内伸缩轴12设置在套轴13内部与搅拌组件连接，用于控制搅拌组件开合。搅拌效果好，结构简单，操作方便快捷，提高了安全性能。
如图1所示，在一个优选实施例中，套轴13为圆桶形状，便于安装，操作方便。套轴13为金属或硬塑料材质，都是为了提高安装方便，操作便捷。
如图1所示，在一个优选实施例中，套轴13的高度小于内伸缩轴12的高度。便于将内伸缩轴12和搅拌组件取出，维修、组装方便快捷。
如图1所示，在一个优选实施例中，旋杆11为横向的“L”形状。手持方便，合力效果好，更好的为套轴13提供动力。此旋杆11焊固在套轴13上端一侧，牢固性更好，不易损坏。
进一步的，旋杆11还可以与机械臂连接，通过机械臂带动旋杆11转动节省人力。
如图1所示，在一个实施例中，进一步的在套轴13下部两侧均加工有豁口(图中未示出)。使搅拌组件开合，搅拌组件转动时与豁口形成力矩传递，使搅拌效果更佳。
如图1和2所示，在一个实施例中，搅拌组件包括两个结构相同的搅拌片16，两个搅拌片16对称设置。搅拌片16一端为半圆形状另一端为垂直形状，凹槽161加工在搅拌片16上面一侧与半圆形状相连接。便于将两个搅拌片16收起打开，不会出现卡顿现象，折叠灵活。
进一步的，两个搅拌片16的宽度及内伸缩轴12的直径小于套轴13直径。可将两个搅拌片16及内伸缩轴12收进套轴13内，拆卸、维修方便。例如：将搅拌片16收回后与内伸缩轴12贴合，在不取出套轴13的情况下也可以直接将 内伸缩轴12和搅拌片16一起取出，使用方便快捷，便于维修，存放方便。
进一步的，两个连接片15为倾斜设置。两个连接片15将两个搅拌片16撑开，两个搅拌片16撑开时呈“一”直线，两个连接片15和两个搅拌片16呈三角形，支撑力更集中，稳定性更好。可根据实际需求更换不同尺寸的搅拌片16。
如图1所示，在一个优选的实施例中，内伸缩轴12的下端安装有活动轴节14，两个连接片15设置在豁口内，两个连接片15上端分别与活动轴节14连接，两个连接片15下端分别与搅拌组件连接。折叠方便，不会出现卡顿。搅拌片16与内伸缩轴12之间采用轴环设计，便于搅拌片16开合。
在一个优选的实施例中，在旋杆11上还可以安装电子计时器，方便查看搅拌时间，搅拌时间优选3-5分钟，提高工作效率。
如图3和4所示，示意性地显示了该光阻桶，包括构造在桶体20上的光阻出口22，在桶体20上还构造有供处理光沉积的搅拌装置出入的圆口21。搅拌装置内的两个搅拌片16加在一起的长度小于桶体20的直径。
具体使用时：打开光阻桶的圆口21，将搅拌装置置于光阻桶内，内伸缩轴12向下压打开两个搅拌片16，旋转旋杆11带着套轴13搅拌片16转动，搅拌片16靠近光阻桶底部，此时手控制搅拌装置从底部开启逐步向上搅拌，从而到达光阻成分均一的目的。使光刻胶搅拌更佳均匀，使用方便快捷，节省大量人力物力，搅拌速度快，安全性高。
虽然已经参考优选实施例对本发明进行了描述，但在不脱离本发明的范围的情况下，可以对其进行各种改进并且可以用等效物替换其中的部件。尤其是，只要不存在结构冲突，各个实施例中所提到的各项技术特征均可以任意方式组合起来。本发明并不局限于文中公开的特定实施例，而是包括落入权利要求的范围内的所有技术方案。

Claims (16)

  1. 一种处理光沉积的搅拌装置，其中，包括：
    套轴(13)、内伸缩轴(12)、搅拌组件和旋杆(11)；其中，
    所述旋杆(11)安装在所述套轴(13)上端用于带动所述套轴(13)转动，所述搅拌组件设置在所述套轴(13)下端随着所述套轴(13)转动，所述内伸缩轴(12)设置在所述套轴(13)内部与所述搅拌组件连接，用于控制所述搅拌组件开合。
  2. 根据权利要求1所述的处理光沉积的搅拌装置，其中，所述搅拌组件包括两个结构相同的搅拌片(16)，两个所述搅拌片(16)对称设置；
    所述搅拌片(16)一端为半圆形状另一端为垂直形状，凹槽(161)加工在所述搅拌片(16)上面一侧与所述半圆形状相连接。
  3. 根据权利要求2所述的处理光沉积的搅拌装置，其中，两个所述搅拌片(16)撑开时呈“一”直线。
  4. 根据权利要求1所述的处理光沉积的搅拌装置，其中，所述套轴(13)为圆桶形状。
  5. 根据权利要求1所述的处理光沉积的搅拌装置，其中，在所述套轴(13)下部两侧均加工有豁口。
  6. 根据权利要求5所述的处理光沉积的搅拌装置，其中，所述内伸缩轴(12)的下端安装有活动轴节(14)，两个连接片(15)设置在所述豁口内，两个所述连接片(15)上端分别与所述活动轴节(14)连接，两个所述连接片(15)下端分别与所述搅拌组件连接。
  7. 根据权利要求6所述的处理光沉积的搅拌装置，其中，两个所述连接片(15)为倾斜设置。
  8. 根据权利要求1所述的处理光沉积的搅拌装置，其中，所述套轴(13)的高度小于所述内伸缩轴(12)的高度。
  9. 根据权利要求1所述的处理光沉积的搅拌装置，其中，所述旋杆(11)为横向的“L”形状。
  10. 一种光阻桶，包括构造在桶体(20)上的光阻出口(22)，其中，
    在所述桶体(20)上还构造有供处理光沉积的搅拌装置出入的圆口(21)；
    所述搅拌装置包括，套轴(13)、内伸缩轴(12)、搅拌组件和旋杆(11)；其中，
    所述旋杆(11)安装在所述套轴(13)上端用于带动所述套轴(13)转动，所述搅拌组件设置在所述套轴(13)下端随着所述套轴(13)转动，所述内伸缩轴(12)设置在所述套轴(13)内部与所述搅拌组件连接，用于控制所述搅拌组件开合。
  11. 根据权利要求10所述的光阻桶，其中，所述搅拌组件包括两个结构相同的搅拌片(16)，两个所述搅拌片(16)对称设置；
    所述搅拌片(16)一端为半圆形状另一端为垂直形状，凹槽(161)加工在所述搅拌片(16)上面一侧与所述半圆形状相连接。
  12. 根据权利要求11所述的光阻桶，其中，两个所述搅拌片(16)撑开时呈“一”直线。
  13. 根据权利要求10所述的光阻桶，其中，所述套轴(13)为圆桶形状。
  14. 根据权利要求10所述的处理光沉积的搅拌装置，其中，在所述套轴(13)下部两侧均加工有豁口。
  15. 根据权利要求14所述的光阻桶，其中，所述内伸缩轴(12)的下端安装有活动轴节(14)，两个连接片(15)设置在所述豁口内，两个所述连接片(15)上端分别与所述活动轴节(14)连接，两个所述连接片(15)下端分别与所述搅拌组件连接。
  16. 根据权利要求15所述的光阻桶，其中，两个所述连接片(15)为倾斜设置。
PCT/CN2017/080236 2017-03-24 2017-04-12 一种处理光阻沉积的搅拌装置及光阻桶 Ceased WO2018170964A1 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US15/539,732 US10730025B2 (en) 2017-03-24 2017-04-12 Stirring device for treatment of photoresist settlement and photoresist tank

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201710181986.0 2017-03-24
CN201710181986.0A CN106823927B (zh) 2017-03-24 2017-03-24 一种处理光阻沉积的搅拌装置及光阻桶

Publications (1)

Publication Number Publication Date
WO2018170964A1 true WO2018170964A1 (zh) 2018-09-27

Family

ID=59130822

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2017/080236 Ceased WO2018170964A1 (zh) 2017-03-24 2017-04-12 一种处理光阻沉积的搅拌装置及光阻桶

Country Status (3)

Country Link
US (1) US10730025B2 (zh)
CN (1) CN106823927B (zh)
WO (1) WO2018170964A1 (zh)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112076652A (zh) * 2020-10-09 2020-12-15 贾凤霞 一种实验室的煤炭粘结指数测定用搅拌装置
CN114272824A (zh) * 2022-02-11 2022-04-05 北京路丝奇新材料技术开发有限公司 一种水性环保胶粘剂生产装置及其生产方法
CN114849625A (zh) * 2022-04-22 2022-08-05 山东特检科技有限公司 酚醛树脂提纯用杂质分离装置
CN114870687A (zh) * 2022-07-08 2022-08-09 山东道简环保科技有限公司 一种循环式工业废水氧化还原处理装置

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107875921A (zh) * 2017-12-14 2018-04-06 江苏和合环保集团有限公司 一种带挡泥装置的污泥搅拌机
CN109699401B (zh) * 2019-03-11 2023-11-17 山东省农业科学院农业资源与环境研究所 食用菌接种后培养方法及所用装置
CN110624448A (zh) * 2019-11-05 2019-12-31 山东金沂蒙生态肥业有限公司 用于含有木薯渣原料的有机复合肥混合搅拌装置
CN111661452B (zh) * 2020-06-23 2024-06-28 芯米(厦门)半导体设备有限公司 一种光刻胶保湿系统
EP4182431A4 (en) * 2020-07-15 2024-08-07 Entegris, Inc. KIT FOR INSTALLATION OF AN IMPELLER IN A PROCESS VESSEL
CN111905585A (zh) * 2020-07-15 2020-11-10 浙江嘉化新材料有限公司 一种可伸缩搅拌器
CN112206732B (zh) * 2020-09-22 2022-09-09 临沂馨悦香料有限公司 一种化工机械用高性能反应釜搅拌器
CN112169741B (zh) * 2020-11-16 2022-03-22 杭州重力脚轮科技有限公司 聚氨酯搅拌反应釜
CN113715167B (zh) * 2020-12-24 2024-09-24 安徽丰林建设工程有限公司 一种桥梁用混凝土搅拌设备
CN112742249A (zh) * 2021-01-05 2021-05-04 上海中欣晶圆半导体科技有限公司 一种小型研磨搅拌桶及提高小型研磨搅拌桶使用效率的方法
CN112871041A (zh) * 2021-03-22 2021-06-01 西北农林科技大学 一种便携手持电动式厌氧反应搅拌器
CN113028783B (zh) * 2021-04-01 2022-08-09 南通德上汽车零配件制造有限公司 一种用于滚镀电泳工艺的烘干装置及烘干工艺
CN114307744A (zh) * 2022-01-14 2022-04-12 张红叶 一种用于纺织的纺织浆液搅拌装置
CN115193078B (zh) * 2022-07-13 2023-03-21 中检集团南方测试股份有限公司 一种多用型智能蒸馏仪
CN115888457B (zh) * 2022-11-08 2023-10-27 苏州开普岩土工程有限公司 一种预制桩加工用搅拌装置
CN118948683A (zh) * 2024-09-20 2024-11-15 广州芊植本草化妆品有限公司 一种净透彩泥面膜制备工艺

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201997280U (zh) * 2011-01-21 2011-10-05 广东启光集团有限公司 一种油漆搅拌器
CN103831042A (zh) * 2012-11-21 2014-06-04 陕西天豪科技发展有限公司 一种浊度液配制仪的设计
CN204352825U (zh) * 2014-11-28 2015-05-27 合肥华越新材料科技有限公司 一种用于容器内搅拌的搅拌转子
CN204406030U (zh) * 2015-01-29 2015-06-17 昆山龙腾光电有限公司 盛装涂布光阻的光阻车
CN205386421U (zh) * 2016-01-15 2016-07-20 浙江机电职业技术学院 一种上下滑动的搅拌器
CN205538860U (zh) * 2016-04-21 2016-08-31 武汉华正环境检测技术有限公司 一种高效液相色谱仪
WO2017021653A1 (fr) * 2015-08-03 2017-02-09 Sartorius Stedim Fmt Sas Recipient-melangeur et procede d'assemblage d'un recipient-melangeur comprenant un arbre telescopique

Family Cites Families (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US364059A (en) * 1887-05-31 stauffert
US346059A (en) * 1886-07-20 muepht
US955978A (en) * 1909-02-10 1910-04-26 Eben A Mitchell Agitator.
US1734120A (en) * 1926-06-24 1929-11-05 Charles E Farrington Stirring device
US1711114A (en) * 1928-04-21 1929-04-30 Joseph W Hunt Agitator
US1827004A (en) * 1929-08-15 1931-10-13 Fanner Mfg Co Agitator
US2896926A (en) * 1956-01-10 1959-07-28 Chapman Harold Eric Device for mixing or treating fluids or free-flowing powders
US3132850A (en) * 1962-04-16 1964-05-12 Frank J Puchalski Articulated stirring or mixing device
US3455540A (en) * 1968-01-04 1969-07-15 Emil G Marcmann Stirring device
US3559962A (en) * 1968-06-10 1971-02-02 Binks Res & Dev Stirring device
US4264215A (en) * 1979-09-17 1981-04-28 Sybron Corporation Separable blade impeller
US4519714A (en) * 1984-06-04 1985-05-28 Glenwood Manufacturing Corporation Waste material agitator
US6047846A (en) * 1991-02-25 2000-04-11 Greif Bros. Corp. Of Ohio Plastic drum with drain sump
DE4131899A1 (de) * 1991-09-25 1993-04-01 Rheinpfaelzische Emballagenfab Stahlfass und verfahren zu seiner herstellung
US5192131A (en) * 1992-07-08 1993-03-09 Hatfield Charlotte A Stirring device
US5282681A (en) * 1992-07-29 1994-02-01 Cadence Environmental Energy, Inc. Portable agitator for fluidizing bottom solids in tanks
US5411331A (en) * 1993-06-01 1995-05-02 Westinghouse Electric Corporation Device for promoting gravity flow of non-free-flowing solids
US5402909A (en) * 1993-07-23 1995-04-04 Walbro Corporation Drum for storing and dispensing liquids
US5489151A (en) * 1994-11-14 1996-02-06 Uniroyal Chemical Company, Inc. Portable mixing device for use with fluid container having threaded opening
US5885001A (en) * 1997-06-13 1999-03-23 Cadence Technologies, Inc. Agitator assembly with a retractable blade assembly
US5941636A (en) * 1998-03-19 1999-08-24 Lu; Chen-Yi Mixer having mixing blades capable of expanding automatically
US6749331B1 (en) * 2002-03-28 2004-06-15 Hughes Product Designs Fluid driven rotary agitator with suction conduit
US20100195432A1 (en) * 2009-02-02 2010-08-05 Kevin Laurence Pouring and mixing lid for cylindrical containers
FR2943355B1 (fr) * 2009-03-18 2011-04-08 Sartorius Stedim Biotech Sa Recipient-melangeur avec palier d'arbre en partie superieure
US8408418B2 (en) * 2010-11-05 2013-04-02 Michael D. Stolzman Drum cover with center support
WO2013080969A1 (ja) * 2011-11-28 2013-06-06 旭化成ケミカルズ株式会社 スチームストリッピング装置及びこれを用いたスチームストリッピング仕上げ方法
CN103176308B (zh) 2013-04-03 2015-10-14 上海交通大学 基于液晶棱镜阵列的全分辨率自由立体显示设备及方法
EP3083023A1 (en) * 2013-12-17 2016-10-26 Bayer Cropscience LP Mixing systems, methods, and devices with extendible impellers
CN103941469B (zh) 2014-04-09 2023-03-03 京东方科技集团股份有限公司 显示面板及其制作方法、显示装置
US9604183B2 (en) * 2015-01-01 2017-03-28 Jay G. Dinnison Folding mixing impeller
CN104795434B (zh) 2015-05-12 2019-01-29 京东方科技集团股份有限公司 Oled像素单元、透明显示装置及制作方法、显示设备
US10105662B1 (en) * 2017-12-19 2018-10-23 Bayer Cropscience Lp Mixing systems, methods, and devices with extendible impellers

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201997280U (zh) * 2011-01-21 2011-10-05 广东启光集团有限公司 一种油漆搅拌器
CN103831042A (zh) * 2012-11-21 2014-06-04 陕西天豪科技发展有限公司 一种浊度液配制仪的设计
CN204352825U (zh) * 2014-11-28 2015-05-27 合肥华越新材料科技有限公司 一种用于容器内搅拌的搅拌转子
CN204406030U (zh) * 2015-01-29 2015-06-17 昆山龙腾光电有限公司 盛装涂布光阻的光阻车
WO2017021653A1 (fr) * 2015-08-03 2017-02-09 Sartorius Stedim Fmt Sas Recipient-melangeur et procede d'assemblage d'un recipient-melangeur comprenant un arbre telescopique
CN205386421U (zh) * 2016-01-15 2016-07-20 浙江机电职业技术学院 一种上下滑动的搅拌器
CN205538860U (zh) * 2016-04-21 2016-08-31 武汉华正环境检测技术有限公司 一种高效液相色谱仪

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112076652A (zh) * 2020-10-09 2020-12-15 贾凤霞 一种实验室的煤炭粘结指数测定用搅拌装置
CN114272824A (zh) * 2022-02-11 2022-04-05 北京路丝奇新材料技术开发有限公司 一种水性环保胶粘剂生产装置及其生产方法
CN114272824B (zh) * 2022-02-11 2023-01-06 湖州绿田新材料有限公司 一种水性环保胶粘剂生产装置及其生产方法
CN114849625A (zh) * 2022-04-22 2022-08-05 山东特检科技有限公司 酚醛树脂提纯用杂质分离装置
CN114870687A (zh) * 2022-07-08 2022-08-09 山东道简环保科技有限公司 一种循环式工业废水氧化还原处理装置

Also Published As

Publication number Publication date
US20190388853A1 (en) 2019-12-26
CN106823927A (zh) 2017-06-13
CN106823927B (zh) 2019-06-11
US10730025B2 (en) 2020-08-04

Similar Documents

Publication Publication Date Title
WO2018170964A1 (zh) 一种处理光阻沉积的搅拌装置及光阻桶
WO2017008261A1 (zh) 一种光阻汲取装置
CN206009379U (zh) 密闭式分散搅拌机的搅拌桶清洗装置
CN207137762U (zh) 一种可连续变径搅拌的化工混合装置
CN211274427U (zh) 一种方便清洁的蜡烛颜料生产用混合装置
CN204912211U (zh) 一种墙体涂料生产搅拌桶桶壁清理装置
CN211537497U (zh) 一种涂料混合装置
CN207913591U (zh) 一种化工料液混合搅拌罐
CN209060669U (zh) 一种钛白粉颜料制备用的固液分离装置
CN211216403U (zh) 一种搅拌均匀的调漆设备
CN209333598U (zh) 恒温不锈钢调漆装置
CN204710401U (zh) 一种化学实验用试管自摆装置
CN206527886U (zh) 道桥施工用混凝土搅拌装置
CN209222010U (zh) 一种搅拌机
CN206837928U (zh) 一种药液搅拌装置
CN210448942U (zh) 一种新型化工用搅拌器
CN213314412U (zh) 一种用于绢云母的混料装置
CN212142309U (zh) 一种水性环氧涂料设备带有过滤功能调漆罐
CN109012373B (zh) 一种涂料加工用搅匀装置
CN216507678U (zh) 便于混搅的艺术设计用颜料调配装置
CN210522397U (zh) 醋酸纤维生产用混料装置
CN207107227U (zh) 一种易于混合的润滑油桶
CN217263354U (zh) 配液间胶水辅助倾倒装置
CN217747106U (zh) 一种改性羟丙基甲基纤维素醚的生产设备
CN221832200U (zh) 一种涂料生产用混合罐

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 17901376

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 17901376

Country of ref document: EP

Kind code of ref document: A1