WO2018161948A1 - 立式复合径流分子泵 - Google Patents

立式复合径流分子泵 Download PDF

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Publication number
WO2018161948A1
WO2018161948A1 PCT/CN2018/078511 CN2018078511W WO2018161948A1 WO 2018161948 A1 WO2018161948 A1 WO 2018161948A1 CN 2018078511 W CN2018078511 W CN 2018078511W WO 2018161948 A1 WO2018161948 A1 WO 2018161948A1
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WIPO (PCT)
Prior art keywords
wheel
radial flow
pump cylinder
pump
molecular pump
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PCT/CN2018/078511
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English (en)
French (fr)
Inventor
储继国
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储继国
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 储继国 filed Critical 储继国
Publication of WO2018161948A1 publication Critical patent/WO2018161948A1/zh

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/10—Centrifugal pumps for compressing or evacuating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
    • F04D29/4206—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps

Definitions

  • the invention belongs to the technical field of vacuum acquisition, and in particular relates to a vertical composite runoff molecular pump.
  • Patent ZL201620118209.2 provides a vertical composite runoff molecular pump (referred to as a radial flow pump), which has the advantages of simple structure, low energy consumption and dual capacity of medium and high vacuum pumps.
  • a radial flow pump which has the advantages of simple structure, low energy consumption and dual capacity of medium and high vacuum pumps.
  • the inlet of the radial pump is located on the side of the pump cylinder, resulting in no increase in the area of the inlet, which limits the increase of the pumping speed of the radial pump; 2.
  • the middle of the static wheel of the radial flow pump is provided with a partition plate, which affects the pumping speed of the gas; 3.
  • the length of the suction pump of the radial flow pump is short, which limits the improvement of the compression capacity of the radial flow pump.
  • An object of the present invention is to overcome the above-mentioned deficiencies of the prior art and to provide a vertical composite radial flow molecular pump capable of improving pumping speed and compression capability.
  • a vertical composite runoff molecular pump comprising a pump cylinder with an open upper end, the side wall of the pump cylinder is provided with an air inlet and an exhaust port, and the pump cylinder is provided with a radial flow pumping a gas unit, the radial flow pumping unit comprises a rotor, a static wheel and a dynamic seal, wherein the rotor is fixed with two flat disc-shaped moving wheels, and the two moving wheels are arranged in parallel and at intervals, and the static wheel is arranged in two Between the moving wheels, the static wheel is disposed in parallel with the two moving wheels, the dynamic seal is located below the moving wheel, and the static wheel and the dynamic seal are fixed on the side wall of the pump cylinder; a plurality of turbine blade rows are disposed on an outer side of the upper movable wheel, and the turbine blade row is pumped from top to bottom; The static wheel is provided with a plurality of suction grooves formed by spiral blades, and the middle portion of the static wheel is not
  • the suction groove is composed of three parts, wherein a portion close to the intake port of the suction groove is a first portion, a middle portion of the suction groove is a second portion, and the second portion is The annular passage, the portion near the air outlet of the suction groove, is the third portion.
  • the vertical composite runoff molecular pump provided by the invention has the following advantages: 1. Increase the pumping speed of the vertical composite runoff molecular pump by about 80%; 2. Increase the compression capacity of the vertical composite runoff molecular pump by approximately 50%.
  • FIG. 1 is a schematic view of a pump cylinder of a vertical composite radial flow molecular pump according to a first embodiment of the present invention.
  • Fig. 2 is a cross-sectional view taken along line A-A of Fig. 1.
  • FIG 3 is a cross-sectional view of a vertical composite radial flow molecular pump according to a first embodiment of the present invention.
  • FIG. 4 is a schematic structural view of a static wheel of a vertical composite radial flow molecular pump according to a first embodiment of the present invention.
  • FIG. 5 is a schematic structural view of a static wheel of a vertical composite radial flow molecular pump according to a second embodiment of the present invention.
  • the radial pumping unit comprises a rotor 13 , a static wheel 14 and a dynamic seal 15 .
  • the rotor 13 is provided with two flat disc-shaped moving wheels 16 and two moving wheels.
  • the static wheel 14 is parallel and spaced apart, the static wheel 14 is disposed between the two moving wheels 16, the static wheel 14 is disposed in parallel with the two moving wheels 16, the dynamic seal 15 is located below the moving wheel 16 below, and the static wheel 14 and the dynamic seal 15 are fixed to the pump.
  • a plurality of turbine blade rows 17 are disposed on the outer side of the upper movable wheel 16, and the turbine blade row 17 is pumped from the top to the bottom;
  • the static wheel 14 is provided with a plurality of suction grooves 141 formed by spiral blades, and no partition is provided in the middle portion of the stationary wheel 14. Since the partition is not provided in the middle of the stationary wheel 14, the pumping speed of the gas is increased.
  • the working principle of the runoff molecular pump of the first embodiment is as follows: (1) The intake port 12 of the first embodiment is provided on the side wall of the pump cylinder 11, and the gas outside the pump cylinder 11 is sequentially drawn to the lower side of the radial flow suction unit via the intake port 12 and the suction groove 141.
  • the runoff molecular pump of the first embodiment can simultaneously draw air from the upper side and the side wall of the pump cylinder 11, and the middle portion of the static wheel 14 is not provided with a partition plate, the pumping speed of the runoff molecular pump is higher than the conventional one.
  • the runoff molecular pump is about 80%.
  • the runoff molecular pump of the first embodiment has the advantages of simple structure and low manufacturing cost.
  • the structure of the second embodiment is substantially the same as that of the first embodiment, and the difference is that the air suction groove 241 of the static wheel 24 of the second embodiment is composed of three parts, wherein the pumping is close to the pumping.
  • the portion of the intake port of the groove 241 is the first portion 2411
  • the intermediate portion of the suction groove 241 is the second portion 2412
  • the second portion 2412 is an annular passage
  • the portion near the air outlet of the suction groove 241 is the third portion 2413.
  • the suction groove 241 of the static wheel 24 of the second embodiment increases the second portion 1412 of the annular passage, thereby increasing the effective length of the suction groove 241 and improving the effective length.
  • the runoff molecular pump has a compression capacity of about 50%.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

一种立式复合径流分子泵，包括上端敞口的泵筒（11），泵筒（11）的侧壁开设有进气口（12）和排气口，泵筒内设有径流抽气单元，径流抽气单元包括转子（13）、静轮（14）和动密封（15），转子（13）上固设有两平圆盘状的动轮（16），两动轮（16）平行且间隔设置，静轮（14）设于两动轮（16）之间，静轮（14）与两动轮（16）平行设置，动密封（15）位于下方的动轮（16）的下方，静轮（14）和动密封（15）均固设于泵筒（11）的侧壁上；位于上方的动轮（16）的外侧设有一组涡轮叶列（17），涡轮叶列（17）由上向下抽气；静轮（14）上设有若干由螺旋状叶片构成的抽气槽（141），静轮（14）的中部未设置隔板。由于立式复合径流分子泵可以从泵筒（11）的上方和侧壁同时抽气，且静轮（14）的中部未设置隔板，因此，径流分子泵的抽速高出传统径流分子泵约80％，压缩能力提高约50％。

Description

立式复合径流分子泵
本发明属于真空获得技术领域，尤其涉及一种立式复合径流分子泵。
专利ZL201620118209.2提供了一种立式复合径流分子泵（简称径流泵），该径流泵具有结构简单、能耗低和兼有中、高真空泵双重性能力等优点，然而，也存在如下缺点：
1. 该径流泵的进气口均设在泵筒的侧面，导致进气口面积无增加的空间，限制了径流泵抽速的提高；
2. 该径流泵的静轮的中部设有隔板，影响气体的抽速；
3. 该径流泵的抽气槽长度较短，限制了径流泵压缩能力的提高。
发明内容
本发明的目的在于克服上述现有技术的不足，提供一种能提高抽速和压缩能力的立式复合径流分子泵。
本发明是这样实现的，一种立式复合径流分子泵，包括上端敞口的泵筒，所述泵筒的侧壁开设有进气口和排气口，所述泵筒内设有径流抽气单元，所述径流抽气单元包括转子、静轮和动密封，所述转子上固设有两平圆盘状的动轮，两所述动轮平行且间隔设置，所述静轮设于两所述动轮之间，所述静轮与两所述动轮平行设置，所述动密封位于下方的所述动轮的下方，所述静轮和动密封均固设于所述泵筒的侧壁上；
位于上方的所述动轮的外侧设有一组涡轮叶列，所述涡轮叶列由上向下抽气；
所述静轮上设有若干由螺旋状叶片构成的抽气槽，所述静轮的中部未设置隔板。
进一步地，所述抽气槽由三部分组成，其中，靠近所述抽气槽的进气口的部分为第一部分，所述抽气槽的中间部分为第二部分，所述第二部分为环形通道，靠近所述抽气槽的出气口的部分为第三部分。
本发明提供的立式复合径流分子泵具有如下优点：
1. 提高立式复合径流分子泵的抽速约80%；
2. 提高立式复合径流分子泵的压缩能力约50%。
附图说明
为了更清楚地说明本发明的技术方案，下面将对实施例中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1是本发明实施例一提供的立式复合径流分子泵的泵筒的示意图。
图2是沿图1中的A-A方向的剖视图。
图3是本发明实施例一提供的立式复合径流分子泵的剖视图。
图4是本发明实施例一提供的立式复合径流分子泵的静轮的结构示意图。
图5是本发明实施例二提供的立式复合径流分子泵的静轮的结构示意图。
具体实施方式
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述。
实施例一
如图1至图4所示，本发明实施例提供的一种立式复合径流分子泵，包括上端敞口的泵筒11，泵筒11的侧壁开设有进气口12和排气口（未示出），泵筒11内设有径流抽气单元，该径流抽气单元包括转子13、静轮14和动密封15，转子13上固设有两平圆盘状的动轮16，两动轮16平行且间隔设置，静轮14设于两动轮16之间，静轮14与两动轮16平行设置，动密封15位于下方的动轮16的下方，静轮14和动密封15均固设于泵筒11的侧壁上；
位于上方的动轮16的外侧设有一组涡轮叶列17，涡轮叶列17由上向下抽气；
静轮14上设有若干由螺旋状叶片构成的抽气槽141，静轮14的中部未设置隔板。由于静轮14的中部未设置隔板，从而提高了气体的抽速。
本实施例一的径流分子泵的工作原理如下：
（1）本实施例一的进气口12设在泵筒11的侧壁，泵筒11外侧的气体依次经进气口12和抽气槽141抽至径流抽气单元的下方。
（2）同时，由于本实施例一的泵筒11上端为敞口，在泵筒11上方增添了抽气通道，泵筒11上方的气体依次经其上方的敞口、涡轮叶列17和抽气槽141抽至径流抽气单元的下方。
综上所述，由于本实施例一的径流分子泵可以从泵筒11的上方和侧壁同时抽气，且静轮14的中部未设置隔板，因此，径流分子泵的抽速高出传统径流分子泵约80%。另外，本实施例一的径流分子泵还具有结构简单和制造成本低的优点。
实施例二
如图5所示，本实施例二的结构与实施例一的结构大致相同，其不同之处在于：本实施例二的静轮24的抽气槽241由三部分组成，其中，靠近抽气槽241的进气口的部分为第一部分2411，抽气槽241的中间部分为第二部分2412，第二部分2412为环形通道，靠近抽气槽241的出气口的部分为第三部分2413。与现有的静轮的抽气槽结构相比，本实施例二的静轮24的抽气槽241增加了环形通道的第二部分1412，从而增加了抽气槽241的有效长度，提高了径流分子泵的压缩能力约50%。
以上所述是本发明的优选实施方式，应当指出，对于本技术领域的普通技术人员来说，在不脱离本发明原理的前提下，还可以做出若干改进和润饰，这些改进和润饰也视为本发明的保护范围。

Claims (2)

  1. 一种立式复合径流分子泵，其特征在于，包括上端敞口的泵筒，所述泵筒的侧壁开设有进气口和排气口，所述泵筒内设有径流抽气单元，所述径流抽气单元包括转子、静轮和动密封，所述转子上固设有两平圆盘状的动轮，两所述动轮平行且间隔设置，所述静轮设于两所述动轮之间，所述静轮与两所述动轮平行设置，所述动密封位于下方的所述动轮的下方，所述静轮和动密封均固设于所述泵筒的侧壁上；
    位于上方的所述动轮的外侧设有一组涡轮叶列，所述涡轮叶列由上向下抽气；
    所述静轮上设有若干由螺旋状叶片构成的抽气槽，所述静轮的中部未设置隔板。
  2. 根据权利要求1所述的立式复合径流分子泵，其特征在于：所述抽气槽由三部分组成，其中，靠近所述抽气槽的进气口的部分为第一部分，所述抽气槽的中间部分为第二部分，所述第二部分为环形通道，靠近所述抽气槽的出气口的部分为第三部分。
PCT/CN2018/078511 2017-03-09 2018-03-09 立式复合径流分子泵 WO2018161948A1 (zh)

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CN106762713B (zh) * 2017-03-09 2018-12-14 苏州摩星真空科技有限公司 立式复合径流分子泵
CN107400857A (zh) * 2017-09-18 2017-11-28 储琦 低碳、无油蒸发镀膜设备
CN107489605B (zh) * 2017-09-18 2019-07-12 储昕 低碳、无油大抽速真空抽气机组

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