WO2019052131A1 - 低碳、无油大抽速真空抽气机组 - Google Patents

低碳、无油大抽速真空抽气机组 Download PDF

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Publication number
WO2019052131A1
WO2019052131A1 PCT/CN2018/078670 CN2018078670W WO2019052131A1 WO 2019052131 A1 WO2019052131 A1 WO 2019052131A1 CN 2018078670 W CN2018078670 W CN 2018078670W WO 2019052131 A1 WO2019052131 A1 WO 2019052131A1
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Prior art keywords
vacuum
pump
pumping
unit
disposed
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PCT/CN2018/078670
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English (en)
French (fr)
Inventor
储昕
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储昕
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Publication of WO2019052131A1 publication Critical patent/WO2019052131A1/zh

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/28—Rotors specially for elastic fluids for centrifugal or helico-centrifugal pumps for radial-flow or helico-centrifugal pumps
    • F04D29/30—Vanes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
    • F04D29/4206—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps

Definitions

  • the invention belongs to the field of vacuum technology, and in particular relates to a low-carbon, oil-free large pumping speed vacuum pumping unit.
  • the object of the present invention is to adopt a low-carbon, oil-free and high-speed vacuum pumping unit that can significantly reduce oil vapor pollution and energy consumption.
  • a low-carbon, oil-free, high-pumping vacuum pumping unit comprising a vacuum chamber, respectively, with a rough pumping unit, a vacuum housing, a chemical adsorption pump unit, a bleed valve, and a vacuum gauge is connected, a first vacuum valve is disposed between the vacuum chamber and the rough pumping unit, a second vacuum valve is disposed between the vacuum chamber and the vacuum casing, and a deep cold water is disposed above the vacuum casing a steam pump, a radial flow pump unit is arranged below the vacuum casing, and the radial flow pump unit is composed of a plurality of parallel pumping vertical composite runoff molecular pumps, wherein the exhaust port of the radial flow pump unit passes through a third vacuum valve
  • the foreline pump is connected, and a fourth vacuum valve is arranged between the vacuum chamber and the chemisorption pump unit.
  • the chemical adsorption pump unit is composed of a plurality of arc titanium pumps in parallel.
  • the vertical composite runoff molecular pump includes a pump cylinder with an open upper end, an air inlet and an exhaust port are defined in a sidewall of the pump cylinder, and a radial drafting unit is disposed in the pump cylinder.
  • the runoff pumping unit comprises a rotor, a static wheel and a dynamic seal.
  • the rotor is fixed with two flat disc-shaped moving wheels, and the two moving wheels are arranged in parallel and at intervals.
  • the static wheel is disposed between the two moving wheels.
  • the static wheel is disposed in parallel with the two moving wheels, the dynamic seal is located below the moving wheel, the static wheel and the dynamic seal are fixed on the side wall of the pump cylinder;
  • the outer side of the moving wheel is provided with a set of turbine blade rows, and the turbine blade row is pumped from top to bottom;
  • the static wheel is provided with a plurality of suction grooves formed by spiral blades, and the middle portion of the static wheel is not provided with a partition plate.
  • the invention also provides another low carbon, oil-free high pumping speed vacuum pumping unit, comprising a vacuum chamber, which is respectively connected with a rough pumping unit, a vacuum housing, a venting valve and a vacuum gauge, A first vacuum valve is disposed between the vacuum chamber and the rough pumping unit, and a second vacuum valve is disposed between the vacuum chamber and the vacuum casing, wherein the vacuum casing is provided with a radial flow pump unit and chemical adsorption from bottom to top.
  • a pump unit and a cryogenic water vapor pump wherein the radial pump unit is composed of a plurality of parallel pumping flow pumps, each of which shares a foreline pump, an exhaust port of the runoff pump unit and the foreline pump
  • a third vacuum valve is provided between the cryogenic water vapor pumps in a single cooling mode.
  • the chemisorption pump unit is composed of a plurality of parallel arc titanium pumps.
  • the vertical composite runoff molecular pump includes a pump cylinder with an open upper end, an air inlet and an exhaust port are defined in a sidewall of the pump cylinder, and a radial drafting unit is disposed in the pump cylinder.
  • the runoff pumping unit comprises a rotor, a static wheel and a dynamic seal.
  • the rotor is fixed with two flat disc-shaped moving wheels, and the two moving wheels are arranged in parallel and at intervals.
  • the static wheel is disposed between the two moving wheels.
  • the static wheel is disposed in parallel with the two moving wheels, the dynamic seal is located below the moving wheel, the static wheel and the dynamic seal are fixed on the side wall of the pump cylinder;
  • the outer side of the moving wheel is provided with a set of turbine blade rows, and the turbine blade row is pumped from top to bottom;
  • the static wheel is provided with a plurality of suction grooves formed by spiral blades, and the middle portion of the static wheel is not provided with a partition plate.
  • the invention also provides another low carbon, oil-free large pumping speed vacuum pumping unit, comprising a vacuum chamber, respectively, which is combined with a rough pumping unit, a chemical adsorption pump unit, a cryogenic water vapor pump, a radial flow pump unit, a venting valve is connected to the vacuum gauge, a first vacuum valve is disposed between the vacuum chamber and the rough pumping unit, and a second vacuum valve is disposed between the vacuum chamber and the chemisorption pumping unit, the vacuum chamber and the deep a third vacuum valve is disposed between the cold water vapor pump, and a fourth vacuum valve is disposed between the vacuum chamber and the radial flow pump unit, wherein the radial flow pump unit is composed of a plurality of parallel pumping vertical composite runoff molecular pumps, The exhaust port of the radial pump unit is connected to the foreline pump through a fifth vacuum valve.
  • the chemical adsorption pump unit is composed of a plurality of arc titanium pumps in parallel.
  • the vertical composite runoff molecular pump includes a pump cylinder with an open upper end, an air inlet and an exhaust port are defined in a sidewall of the pump cylinder, and a radial drafting unit is disposed in the pump cylinder.
  • the runoff pumping unit comprises a rotor, a static wheel and a dynamic seal.
  • the rotor is fixed with two flat disc-shaped moving wheels, and the two moving wheels are arranged in parallel and at intervals.
  • the static wheel is disposed between the two moving wheels.
  • the static wheel is disposed in parallel with the two moving wheels, the dynamic seal is located below the moving wheel, the static wheel and the dynamic seal are fixed on the side wall of the pump cylinder;
  • the outer side of the moving wheel is provided with a set of turbine blade rows, and the turbine blade row is pumped from top to bottom;
  • the static wheel is provided with a plurality of suction grooves formed by spiral blades, and the middle portion of the static wheel is not provided with a partition plate.
  • the low-carbon, oil-free and high-speed vacuum pumping unit of the present invention utilizes the complementarity of the pumping capacity of the radial flow pump unit, the cryogenic water vapor pump and the chemical adsorption pump unit to the runoff pump unit, the cryogenic water vapor pump and the chemical adsorption pump unit.
  • the pumping capacity is optimized to replace the traditional high-energy, high-oil-to-oil-contaminated diffusion pump + Roots pump unit, eliminating oil vapor pollution, eliminating oil vapor pollution, significantly improving vacuum product quality, and reducing pumping energy consumption by approximately 80. %the goal of.
  • FIG. 1 is a schematic view of a low carbon, oil-free, large pumping vacuum pumping unit according to a first embodiment of the present invention.
  • FIG. 2 is a schematic view of a low carbon, oil-free, large pumping vacuum pumping unit provided in Embodiment 2 of the present invention.
  • Embodiment 3 is a schematic view of a low carbon, oil-free, large pumping vacuum pumping unit provided in Embodiment 3 of the present invention.
  • FIG. 4 is a schematic view of a pump cylinder of a low carbon, oil-free high pumping vacuum pumping unit provided in Embodiments 1, 2, and 3 of the present invention.
  • Figure 5 is a cross-sectional view taken along line A-A of Figure 4 .
  • Figure 6 is a cross-sectional view of a low carbon, oil-free, high pumping vacuum pumping unit provided in the first, second, and third embodiments of the present invention.
  • FIG. 7 is a schematic structural view of a static wheel of a low-carbon, oil-free high-pumping vacuum pumping unit provided in Embodiments 1, 2, and 3 of the present invention.
  • a low-carbon, oil-free high-speed vacuum pumping unit provided in the first embodiment of the present invention includes a vacuum chamber 11 , a vacuum chamber 11 and a rough pump unit 12 , a vacuum housing 13 , and a chemistry unit.
  • the adsorption pump unit 14, the deflation valve 15 and the vacuum gauge 16 are connected, a first vacuum valve 17 is arranged between the vacuum chamber 11 and the rough pump unit 12, and a second vacuum valve is arranged between the vacuum chamber 11 and the vacuum housing 13. 18.
  • a vacuum pumping unit 19 is disposed above the vacuum housing 13 , and a radial pump unit 110 is disposed below the vacuum housing 13 .
  • the radial pump unit 110 is composed of four vertical compound flow molecular pumps that are parallelly pumped, and the radial flow pump
  • the exhaust port of the unit 110 is connected to the foreline pump 111 through the third vacuum valve 112, the fourth vacuum valve 113 is disposed between the vacuum chamber 11 and the chemisorption pump unit 14, and the chemical adsorption pump unit 14 is connected in parallel by six arc titanium pumps. composition.
  • the vertical composite runoff molecular pump of the first embodiment includes a pump cylinder 41 having an open upper end, and a sidewall of the pump cylinder 41 is provided with an air inlet 42 and an exhaust port (not shown).
  • the pump cylinder 41 is provided with a radial air suction unit including a rotor 43, a static wheel 44 and a dynamic seal 45.
  • the rotor 43 is fixed with two flat disk-shaped moving wheels 46, and the two moving wheels 46 are parallel and spaced.
  • the static wheel 44 is disposed between the two movable wheels 46, the static wheel 44 is disposed in parallel with the two moving wheels 46, the dynamic seal 45 is located below the lower moving wheel 46, and the static wheel 44 and the dynamic seal 45 are fixed on the side of the pump cylinder 41.
  • a plurality of turbine blade rows 47 are disposed on the outer side of the upper movable wheel 46.
  • the turbine blade row 47 is pumped from the top to the bottom; the static wheel 44 is provided with a plurality of suction grooves 441 formed by spiral blades, and the static wheel 44
  • the middle portion of the static wheel 44 is not provided with a partition, so that the pumping speed of the gas is increased.
  • the working principle of the vertical composite runoff molecular pump of the first embodiment is as follows:
  • the air inlet 42 of the first embodiment is disposed on the side wall of the pump cylinder 41, and the gas outside the pump cylinder 41 is sequentially drawn to the lower side of the radial air suction unit through the air inlet 42 and the air suction groove 441;
  • the vertical composite runoff molecular pump of the first embodiment can simultaneously draw air from the upper side and the side wall of the pump cylinder 41, and the middle portion of the static wheel 44 is not provided with a partition plate, the pumping speed of the vertical composite runoff molecular pump is higher.
  • the traditional runoff molecular pump is about 80%.
  • the vertical composite runoff molecular pump also has the advantages of simple structure and low manufacturing cost.
  • the rough pump unit 12 of the first embodiment is the same as the rough pump unit of the conventional diffusion pump unit.
  • the low-carbon, oil-free high-pumping vacuum pumping unit of the first embodiment adopts the following intelligently controlled pumping process:
  • Preparation stage closing the vacuum chamber 11, the purge valve 15 and the second vacuum valve 18, opening the first vacuum valve 17, the third vacuum valve 112, and the fourth vacuum valve 113, and simultaneously starting the radial flow pump unit 110, the front stage
  • the pump 111 and the cryogenic water vapor pump 19, the pumping time of the radial pump unit 110 and the foreline pump 111 are 4-6 min, and the pumping time of the cryogenic water vapor pump 19 is 8-12 min;
  • Fine extraction stage (0.1 ⁇ 0.05 Pa): open the fourth vacuum valve 113, start the chemical adsorption pump unit 14+ radial flow pump unit 110+ cryogenic water vapor pump 19 to pump air, wherein the deep-cooled water vapor pump 19 can be removed.
  • a condensable gas the chemical adsorption pump unit 14 removes the reactive gas
  • the radial flow pump unit 110 removes residual inert gas and permanent gas;
  • the low-carbon, oil-free and high-speed vacuum pumping unit of the first embodiment utilizes the complementarity of the pumping capacity of the three oil-free vacuum pumps (the radial pump unit 110, the cryogenic water pump 19, and the chemical adsorption pump unit 14), and the intelligence
  • the pumping process is controlled to optimize the pumping capacity of the radial pump unit 110, the cryogenic water vapor pump 19 and the chemical adsorption pump unit 14, thereby replacing the conventional high energy consumption and high oil vapor pollution diffusion pump + Roots pump unit.
  • Eliminate oil vapor pollution significantly improve the quality of vacuum products, and reduce the energy consumption of pumping by about 80%.
  • a low-carbon, oil-free high-speed vacuum pumping unit provided in the second embodiment of the present invention includes a vacuum chamber 21, which is respectively connected to the rough pump unit 22, the vacuum housing 23, and The gas valve 24 is connected to the vacuum gauge 25, a first vacuum valve 26 is disposed between the vacuum chamber 21 and the rough pump unit 22, and a second vacuum valve 27 is disposed between the vacuum chamber 21 and the vacuum housing 23, and the vacuum housing 23 is provided.
  • the radial flow pump unit 212, the chemical adsorption pump unit 28 and the cryogenic water vapor pump 29 are arranged from bottom to top.
  • the radial flow pump unit 212 is composed of four parallel pumping flow pumps, and each runoff pump shares a fore pump 210.
  • a third vacuum valve 211 is disposed between the exhaust port of the radial flow pump unit 212 and the foreline pump 210.
  • the chemical adsorption pump unit 28 is composed of six parallel arc titanium pumps, and the cryogenic water vapor pump 29 adopts a single cooling mode.
  • the vertical composite runoff molecular pump of the second embodiment includes a pump cylinder 41 with an open upper end, and an air inlet 42 and an exhaust port (not shown) are opened on the side wall of the pump cylinder 41.
  • the pump cylinder 41 is provided with a radial air suction unit including a rotor 43, a static wheel 44 and a dynamic seal 45.
  • the rotor 43 is fixed with two flat disk-shaped moving wheels 46, and the two moving wheels 46 are parallel and spaced.
  • the static wheel 44 is disposed between the two movable wheels 46, the static wheel 44 is disposed in parallel with the two moving wheels 46, the dynamic seal 45 is located below the lower moving wheel 46, and the static wheel 44 and the dynamic seal 45 are fixed on the side of the pump cylinder 41.
  • a plurality of turbine blade rows 47 are disposed on the outer side of the upper movable wheel 46.
  • the turbine blade row 47 is pumped from the top to the bottom; the static wheel 44 is provided with a plurality of suction grooves 441 formed by spiral blades, and the static wheel 44
  • the middle portion of the static wheel 44 is not provided with a partition, so that the pumping speed of the gas is increased.
  • the working principle of the vertical composite runoff molecular pump of the second embodiment is as follows:
  • the air inlet 42 of the second embodiment is disposed on the side wall of the pump cylinder 41, and the gas outside the pump cylinder 41 is sequentially drawn to the lower side of the radial air suction unit via the air inlet 42 and the air suction groove 441;
  • the vertical composite runoff molecular pump of the second embodiment can simultaneously draw air from the upper side and the side wall of the pump cylinder 41, and the middle portion of the static wheel 44 is not provided with a partition plate, the pumping speed of the vertical composite runoff molecular pump is higher.
  • the traditional runoff molecular pump is about 80%.
  • the vertical composite runoff molecular pump also has the advantages of simple structure and low manufacturing cost.
  • the rough pump unit 22 of the second embodiment is the same as the rough pump unit 12 of the first embodiment.
  • the radial flow pump unit 212, the chemical adsorption pump unit 28 and the cryogenic water vapor pump 29 of the second embodiment are assembled in the same vacuum housing 23, simplifying the structure of the pumping system and reducing equipment costs, and is particularly suitable. High vacuum equipment for traditional single unit pumping.
  • the low-carbon, oil-free and high-speed vacuum pumping unit of the second embodiment adopts the following intelligently controlled pumping process:
  • Preparation stage closing the vacuum chamber 21, the purge valve 24, and the second vacuum valve 27, opening the first vacuum valve 26 and the third vacuum valve 211, and starting the radial flow pump unit 212, the foreline pump 210, and the cryogenic water vapor pump 29, the pumping time of the radial pump unit 212 and the foreline pump 210 is 4 ⁇ 6min, and the pumping time of the cryogenic water vapor pump 29 is 8 ⁇ 12min;
  • Roughing stage (atmospheric pressure ⁇ 50 Pa): start the rough pumping unit 22 to pump air, and the pressure of the vacuum chamber 21 is reduced to 100 Pa, that is, the first vacuum valve 26 and the rough pumping unit 22 are closed, and the rough pump is stopped. The unit 22 is operated;
  • Fine extraction stage (0.1 ⁇ 0.05 Pa): pumping with a chemical adsorption pump 28+ radial flow pump unit 212+ cryogenic water vapor pump 29, wherein the cryogenic water vapor pump 29 removes water vapor, and the chemical adsorption pump 28 is pumped out.
  • the reactive gas, radial pump unit 212 removes residual inert gas and permanent gases.
  • the low-carbon, oil-free high-pumping vacuum pumping unit of the second embodiment utilizes the complementarity of the pumping capacity of the three oil-free vacuum pumps (the radial pump unit 212, the cryogenic water pump 29 and the chemical adsorption pump 28) and the intelligent control pumping
  • the gas process optimizes the pumping capacity of the radial pump unit 212, the cryogenic water vapor pump 29 and the chemical adsorption pump 28, thereby replacing the conventional high energy consumption, high oil vapor pollution diffusion pump + Roots pump unit to achieve elimination of oil vapor Pollution, significantly improve the quality of vacuum products, and reduce the energy consumption of pumping by about 80%.
  • a low-carbon, oil-free high-speed vacuum pumping unit provided in the third embodiment of the present invention includes a vacuum chamber 31, and a vacuum chamber 31 and a rough pump unit 32, a chemical adsorption pump unit 33, respectively.
  • the cryogenic water vapor pump 34, the radial flow pump unit 35, the deflation valve 36 and the vacuum gauge 37 are connected, and the first vacuum valve 38, the vacuum chamber 31 and the chemical adsorption pump unit 33 are disposed between the vacuum chamber 31 and the rough pump unit 32.
  • a second vacuum valve 39 is disposed between the vacuum chamber 31 and the cryogenic water vapor pump 34, and a fourth vacuum valve 311 is disposed between the vacuum chamber 11 and the radial flow pump unit 35.
  • the chemical adsorption pump unit 33 is composed of six arc-titanium pumps in parallel, and the radial flow pump unit 35 is composed of four parallel-combustion vertical composite radial flow molecular pumps, and the exhaust port of the radial flow pump unit 35 is connected to the foreline pump 313 through the fifth vacuum valve 312.
  • the vertical composite runoff molecular pump of the third embodiment includes a pump cylinder 41 that is open at the upper end, and the side wall of the pump cylinder 41 is provided with an air inlet 42 and an exhaust port (not shown).
  • the pump cylinder 41 is provided with a radial air suction unit including a rotor 43, a static wheel 44 and a dynamic seal 45.
  • the rotor 43 is fixed with two flat disk-shaped moving wheels 46, and the two moving wheels 46 are parallel and spaced.
  • the static wheel 44 is disposed between the two movable wheels 46, the static wheel 44 is disposed in parallel with the two moving wheels 46, the dynamic seal 45 is located below the lower moving wheel 46, and the static wheel 44 and the dynamic seal 45 are fixed on the side of the pump cylinder 41.
  • a plurality of turbine blade rows 47 are disposed on the outer side of the upper movable wheel 46.
  • the turbine blade row 47 is pumped from the top to the bottom; the static wheel 44 is provided with a plurality of suction grooves 441 formed by spiral blades, and the static wheel 44
  • the middle portion of the static wheel 44 is not provided with a partition, so that the pumping speed of the gas is increased.
  • the working principle of the runoff molecular pump of the third embodiment is as follows:
  • the air inlet 42 of the third embodiment is disposed on the side wall of the pump cylinder 41, and the gas outside the pump cylinder 41 is sequentially drawn to the lower side of the radial air suction unit through the air inlet 42 and the air suction groove 441;
  • the vertical composite runoff molecular pump of the third embodiment can simultaneously draw air from the upper side and the side wall of the pump cylinder 41, and the middle portion of the static wheel 44 is not provided with a partition plate, the pumping speed of the vertical composite runoff molecular pump is higher.
  • the traditional runoff molecular pump is about 80%.
  • the vertical composite runoff molecular pump also has the advantages of simple structure and low manufacturing cost.
  • the rough pump unit 32 of the third embodiment is the same as the rough pump unit of the conventional vacuum pumping unit.
  • the chemical adsorption pump unit 33 and the radial flow pump unit 35 are separated, the pollution generated by the chemical adsorption pump unit 33 to the radial flow pump unit 35 is eliminated, and the time during which the radial flow machine 35 operates without failure can be improved.
  • the third embodiment is particularly suitable for a large vacuum pumping unit for double unit pumping.
  • the low-carbon, oil-free and high-speed vacuum pumping unit of the third embodiment adopts the following intelligently controlled pumping process:
  • Preparation stage closing the vacuum chamber 31, the purge valve 36, the third vacuum valve 310, and the fourth vacuum valve 311, opening the first vacuum valve 38, the second vacuum valve 39, and the fifth vacuum valve 312 while starting the deep
  • the pumping time of the cold water vapor pump 34, the radial flow pump unit 35 and the foreline pump 313, the radial flow pump unit 35 and the foreline pump 313 is 4-6 min, and the pumping time of the cryogenic water vapor pump 34 is 8-12 min;
  • Fine extraction stage (0.1 ⁇ 0.05 Pa): the second vacuum valve 39 is opened, and the chemical adsorption pump unit 33+ radial flow pump unit 35+ cryogenic water vapor pump 34 is started, wherein the deep-cooled water vapor pump 34 can be pumped out.
  • the condensable gas, the chemical adsorption pump unit 33, in addition to the active gas, the radial flow pump unit 35 removes residual inert gas and permanent gas.
  • the low-carbon, oil-free and high-speed vacuum pumping unit of the third embodiment utilizes the complementarity and intelligent control of the pumping capacity of three oil-free vacuum pumps (runoff pump unit 35, cryogenic water vapor pump 34 and chemical adsorption pump unit 33).
  • the pumping process optimizes the pumping capacity of the radial pump unit 35, the cryogenic water vapor pump 34 and the chemisorption pump unit 33, thereby replacing the conventional high-energy, high-oil-soil diffusion pump + Roots pump unit to achieve elimination.
  • Oil vapor pollution significantly improves the quality of vacuum products and reduces the energy consumption of pumping by about 80%.

Abstract

一种低碳、无油大抽速真空抽气机组，包括若干立式复合径流分子泵、深冷水汽泵（19）和化学吸附泵抽气机组（14），获得能与传统扩散泵相当的抽速，具体包括真空室（11），其分别与粗抽泵机组（12）、真空壳体（13）、化学吸附泵机组（14）、放气阀（15）和真空规（16）连接，真空室（11）和粗抽泵机组（12）之间设有第一真空阀（17），真空室（11）和真空壳体（13）之间设有第二真空阀（18），真空壳体（13）内部上方设有深冷水汽泵（19），真空壳体（13）内部下方设有径流泵机组（110），其排气口通过第三真空阀（112）与前级泵（111）连接，真空室（11）和化学吸附泵机组（14）之间设有第四真空阀（113）。该真空抽气机组具有节省抽气能耗，缩短抽气时间和消除油蒸汽污染的优点。

Description

低碳、无油大抽速真空抽气机组
本发明属于真空技术领域，尤其涉及一种低碳、无油大抽速真空抽气机组。
传统扩散泵具有抽速大、价格低和维护方便等优点，几十年来，一直是大型工业高真空设备的主流泵种，然而，该扩散泵存在如下缺点：
1．油蒸汽污染大：扩散泵利用油蒸汽喷射流抽气，油蒸汽污染严重，影响真空产品的质量。
2. 能耗高：一台几万L/s的扩散泵抽气机组，耗电高达30~50万度/年。
上述缺点是当今真空产业亟待解决，但一直未能攻克的难题。
发明内容
本发明的目的在于采用一种可显著降低油蒸汽污染和能耗的低碳、无油大抽速真空抽气机组。
本发明是这样实现的，一种低碳、无油大抽速真空抽气机组，包括真空室，所述真空室分别与粗抽泵机组、真空壳体、化学吸附泵机组、放气阀和真空规连接，所述真空室和粗抽泵机组之间设有第一真空阀，所述真空室和真空壳体之间设有第二真空阀，所述真空壳体内部上方设有深冷水汽泵，所述真空壳体内部下方设有径流泵机组，所述径流泵机组由若干并联抽气的立式复合径流分子泵组成，所述径流泵机组的排气口通过第三真空阀与前级泵连接，所述真空室和化学吸附泵机组之间设有第四真空阀。
具体地，所述化学吸附泵机组由若干电弧钛泵并联组成。
具体地，所述立式复合径流分子泵包括上端敞口的泵筒，所述泵筒的侧壁开设有进气口和排气口，所述泵筒内设有径流抽气单元，所述径流抽气单元包括转子、静轮和动密封，所述转子上固设有两平圆盘状的动轮，两所述动轮平行且间隔设置，所述静轮设于两所述动轮之间，所述静轮与两所述动轮平行设置，所述动密封位于下方的所述动轮的下方，所述静轮和动密封均固设于所述泵筒的侧壁上；位于上方的所述动轮的外侧设有一组涡轮叶列，所述涡轮叶列由上向下抽气；所述静轮上设有若干由螺旋状叶片构成的抽气槽，所述静轮的中部未设置隔板。
本发明还提供了另一种低碳、无油大抽速真空抽气机组，包括真空室，所述真空室分别与粗抽泵机组、真空壳体、放气阀和真空规连接，所述真空室和粗抽泵机组之间设有第一真空阀，所述真空室和真空壳体之间设有第二真空阀，所述真空壳体内由下向上依次设有径流泵机组、化学吸附泵机组和深冷水汽泵，所述径流泵机组由若干并联抽气的径流泵组成，各所述径流泵共用一台前级泵，所述径流泵机组的排气口与所述前级泵之间设有第三真空阀，所述深冷水汽泵采用单制冷模式。
具体地，所述化学吸附泵机组由若干并联的电弧钛泵组成。
具体地，所述立式复合径流分子泵包括上端敞口的泵筒，所述泵筒的侧壁开设有进气口和排气口，所述泵筒内设有径流抽气单元，所述径流抽气单元包括转子、静轮和动密封，所述转子上固设有两平圆盘状的动轮，两所述动轮平行且间隔设置，所述静轮设于两所述动轮之间，所述静轮与两所述动轮平行设置，所述动密封位于下方的所述动轮的下方，所述静轮和动密封均固设于所述泵筒的侧壁上；位于上方的所述动轮的外侧设有一组涡轮叶列，所述涡轮叶列由上向下抽气；所述静轮上设有若干由螺旋状叶片构成的抽气槽，所述静轮的中部未设置隔板。
本发明还提供了另一种低碳、无油大抽速真空抽气机组，包括真空室，所述真空室分别与粗抽泵机组、化学吸附泵机组、深冷水汽泵、径流泵机组、放气阀和真空规连接，所述真空室和粗抽泵机组之间设有第一真空阀，所述真空室和化学吸附泵机组之间设有第二真空阀，所述真空室和深冷水汽泵之间设有第三真空阀，所述真空室和径流泵机组之间设有第四真空阀，所述径流泵机组由若干并联抽气的立式复合径流分子泵组成，所述径流泵机组的排气口通过第五真空阀与前级泵连接。
具体地，所述化学吸附泵机组由若干电弧钛泵并联组成。
具体地，所述立式复合径流分子泵包括上端敞口的泵筒，所述泵筒的侧壁开设有进气口和排气口，所述泵筒内设有径流抽气单元，所述径流抽气单元包括转子、静轮和动密封，所述转子上固设有两平圆盘状的动轮，两所述动轮平行且间隔设置，所述静轮设于两所述动轮之间，所述静轮与两所述动轮平行设置，所述动密封位于下方的所述动轮的下方，所述静轮和动密封均固设于所述泵筒的侧壁上；位于上方的所述动轮的外侧设有一组涡轮叶列，所述涡轮叶列由上向下抽气；所述静轮上设有若干由螺旋状叶片构成的抽气槽，所述静轮的中部未设置隔板。
本发明的低碳、无油大抽速真空抽气机组利用径流泵机组、深冷水汽泵和化学吸附泵机组抽气能力的互补性将径流泵机组、深冷水汽泵和化学吸附泵机组的抽气能力实现最优化，从而取代传统高能耗、高油蒸汽污染的扩散泵+罗茨泵机组，消除油蒸汽污染，实现消除油蒸汽污染，显著提高真空产品质量，降低抽气能耗约80%的目的。
附图说明
为了更清楚地说明本发明的技术方案，下面将对实施例中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1是本发明实施例一提供的低碳、无油大抽速真空抽气机组的示意图。
图2是本发明实施例二提供的低碳、无油大抽速真空抽气机组的示意图。
图3是本发明实施例三提供的低碳、无油大抽速真空抽气机组的示意图。
图4是本发明实施例一、二、三提供的低碳、无油大抽速真空抽气机组的泵筒的示意图。
图5是沿图4中的A-A方向的剖视图。
图6是本发明实施例一、二、三提供的低碳、无油大抽速真空抽气机组的剖视图。
图7是本发明实施例一、二、三提供的低碳、无油大抽速真空抽气机组的静轮的结构示意图。
具体实施方式
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述。
实施例一 无油真空泵组装在二个真空壳体内的低碳、无油大抽速真空抽气机组
如图1所示，本发明实施例一提供的一种低碳、无油大抽速真空抽气机组，包括真空室11，真空室11分别与粗抽泵机组12、真空壳体13、化学吸附泵机组14、放气阀15和真空规16连接，真空室11和粗抽泵机组12之间设有第一真空阀17，真空室11和真空壳体13之间设有第二真空阀18，真空壳体13内部上方设有深冷水汽泵19，真空壳体13内部下方设有径流泵机组110，径流泵机组110由四台并联抽气的立式复合径流分子泵组成，径流泵机组110的排气口通过第三真空阀112与前级泵111连接，真空室11和化学吸附泵机组14之间设有第四真空阀113，化学吸附泵机组14由六台电弧钛泵并联组成。
如图4~图7所示，本实施例一的立式复合径流分子泵包括上端敞口的泵筒41，泵筒41的侧壁开设有进气口42和排气口（未示出），泵筒41内设有径流抽气单元，该径流抽气单元包括转子43、静轮44和动密封45，转子43上固设有两平圆盘状的动轮46，两动轮46平行且间隔设置，静轮44设于两动轮46之间，静轮44与两动轮46平行设置，动密封45位于下方的动轮46的下方，静轮44和动密封45均固设于泵筒41的侧壁上；位于上方的动轮46的外侧设有一组涡轮叶列47，涡轮叶列47由上向下抽气；静轮44上设有若干由螺旋状叶片构成的抽气槽441，静轮44的中部未设置隔板，由于静轮44的中部未设置隔板，从而提高了气体的抽速。
如图4~图7所示，本实施例一的立式复合径流分子泵的工作原理如下：
（1）本实施例一的进气口42设在泵筒41的侧壁，泵筒41外侧的气体依次经进气口42和抽气槽441抽至径流抽气单元的下方；
（2）同时，由于本实施例一的泵筒41上端为敞口，在泵筒41上方增添了抽气通道，泵筒41上方的气体依次经其上方的敞口、涡轮叶列47和抽气槽441抽至径流抽气单元的下方。
由于本实施例一的立式复合径流分子泵可以从泵筒41的上方和侧壁同时抽气，且静轮44的中部未设置隔板，因此，立式复合径流分子泵的抽速高出传统径流分子泵约80%。另外，立式复合径流分子泵还具有结构简单和制造成本低的优点。
图1所示，本实施例一的粗抽泵机组12与传统扩散泵机组的粗抽泵机组相同。
本实施例一的低碳、无油大抽速真空抽气机组采用如下智能控制的抽气工艺：
（1）准备阶段：关闭真空室11、放气阀15和第二真空阀18，打开第一真空阀17、第三真空阀112和第四真空阀113，同时启动径流泵机组110、前级泵111和深冷水汽泵19，径流泵机组110和前级泵111的抽气时间为4~6min，深冷水汽泵19的抽气时间为8~12min；
（2）粗抽阶段（大气压~50 Pa）：启动粗抽泵机组12抽气，真空室11压强降至50Pa后，即先、后关闭第一真空阀17和粗抽泵机组12；
（3）中真空阶段（50~0.1 Pa）：打开第二真空阀18，真空室11由径流泵机组110和深冷水汽泵19抽气；
（4）精抽阶段（0.1~0.05 Pa）：打开第四真空阀113，启动化学吸附泵机组14+径流泵机组110+深冷水汽泵19抽气，其中，深冷水汽泵19抽除可凝性气体，化学吸附泵机组14抽除活性气体，径流泵机组110抽除残留的惰性气体和永久气体；
（5）停机阶段：高真空的工序完成后，关闭第二真空阀18和第四真空阀113，打开放气阀15，真空室11压强升至大气压后，打开真空室11，准备下一次真空抽气。
本实施例一的低碳、无油大抽速真空抽气机组利用三种无油真空泵（径流泵机组110、深冷水汽泵19和化学吸附泵机组14）抽气能力的互补性，以及智能控制抽气工艺，将径流泵机组110、深冷水汽泵19和化学吸附泵机组14的抽气能力实现最优化，从而取代传统高能耗、高油蒸汽污染的扩散泵+罗茨泵机组，实现消除油蒸汽污染，显著提高真空产品质量，降低抽气能耗约80%的目的。
实施例二 无油真空泵组装在同一真空壳体内的低碳、无油大抽速真空抽气机组
如图2所示，本发明实施例二提供的一种低碳、无油大抽速真空抽气机组，包括真空室21，真空室21分别与粗抽泵机组22、真空壳体23、放气阀24和真空规25连接，真空室21和粗抽泵机组22之间设有第一真空阀26，真空室21和真空壳体23之间设有第二真空阀27，真空壳体23内由下向上依次设有径流泵机组212、化学吸附泵机组28和深冷水汽泵29，径流泵机组212由四台并联抽气的径流泵组成，各径流泵共用一台前级泵210，径流泵机组212的排气口与前级泵210之间设有第三真空阀211，化学吸附泵机组28由六台并联的电弧钛泵组成，深冷水汽泵29采用单制冷模式。
如图4~图7所示，本实施例二的立式复合径流分子泵包括上端敞口的泵筒41，泵筒41的侧壁开设有进气口42和排气口（未示出），泵筒41内设有径流抽气单元，该径流抽气单元包括转子43、静轮44和动密封45，转子43上固设有两平圆盘状的动轮46，两动轮46平行且间隔设置，静轮44设于两动轮46之间，静轮44与两动轮46平行设置，动密封45位于下方的动轮46的下方，静轮44和动密封45均固设于泵筒41的侧壁上；位于上方的动轮46的外侧设有一组涡轮叶列47，涡轮叶列47由上向下抽气；静轮44上设有若干由螺旋状叶片构成的抽气槽441，静轮44的中部未设置隔板，由于静轮44的中部未设置隔板，从而提高了气体的抽速。
如图4~图7所示，本实施例二的立式复合径流分子泵的工作原理如下：
（1）本实施例二的进气口42设在泵筒41的侧壁，泵筒41外侧的气体依次经进气口42和抽气槽441抽至径流抽气单元的下方；
（2）同时，由于本实施例二的泵筒41上端为敞口，在泵筒41上方增添了抽气通道，泵筒41上方的气体依次经其上方的敞口、涡轮叶列47和抽气槽441抽至径流抽气单元的下方。
由于本实施例二的立式复合径流分子泵可以从泵筒41的上方和侧壁同时抽气，且静轮44的中部未设置隔板，因此，立式复合径流分子泵的抽速高出传统径流分子泵约80%。另外，立式复合径流分子泵还具有结构简单和制造成本低的优点。本实施例二的粗抽泵机组22与实施例一的粗抽泵机组12相同。
如图2所示，本实施例二的径流泵机组212、化学吸附泵机组28和深冷水汽泵29组装在同一个真空壳体23内，简化抽气系统的结构，降低设备费用，尤其适合用于传统单机组抽气的高真空设备。
如图2所示，本实施例二的低碳、无油大抽速真空抽气机组采用如下智能控制的抽气工艺：
（1）准备阶段：关闭真空室21、放气阀24和第二真空阀27，打开第一真空阀26和第三真空阀211，启动径流泵机组212、前级泵210和深冷水汽泵29，径流泵机组212和前级泵210的抽气时间为4~6min，深冷水汽泵29的抽气时间为8~12min；
（2）粗抽阶段（大气压~50 Pa）：启动粗抽泵机组22抽气，真空室21压强降至100 Pa，即先后关闭第一真空阀26和粗抽泵机组22，停止粗抽泵机组22运行；
（3）中真空阶段区段（50~0.1 Pa）：打开第二真空阀27，真空室11由径流泵机组212和深冷水汽泵29抽气；
（4）精抽阶段（0.1~0.05 Pa）：采用化学吸附泵28+径流泵机组212+深冷水汽泵29抽气，其中，深冷水汽泵29抽除水蒸汽，化学吸附泵28抽除活性气体，径流泵机组212抽除残留的惰性气体和永久气体。
本实施例二的低碳、无油大抽速真空抽气机组利用三种无油真空泵（径流泵机组212、深冷水汽泵29和化学吸附泵28）抽气能力的互补性以及智能控制抽气工艺，将径流泵机组212、深冷水汽泵29和化学吸附泵28的抽气能力实现最优化，从而取代传统高能耗、高油蒸汽污染的扩散泵+罗茨泵机组，实现消除油蒸汽污染，显著提高真空产品质量，降低抽气能耗约80%的目的。
实施例三 无油真空泵组分别装在一个真空壳体内的低碳、无油大抽速真空抽气机组
如图3所示，本发明实施例三提供的一种低碳、无油大抽速真空抽气机组，包括真空室31，真空室31分别与粗抽泵机组32、化学吸附泵机组33、深冷水汽泵34、径流泵机组35、放气阀36和真空规37连接，真空室31和粗抽泵机组32之间设有第一真空阀38，真空室31和化学吸附泵机组33之间设有第二真空阀39，真空室31和深冷水汽泵34之间设有第三真空阀310，真空室11和径流泵机组35之间设有第四真空阀311，化学吸附泵机组33由六台电弧钛泵并联组成，径流泵机组35由四台并联抽气的立式复合径流分子泵组成，径流泵机组35的排气口通过第五真空阀312与前级泵313连接。
如图4~图7所示，本实施例三的立式复合径流分子泵包括上端敞口的泵筒41，泵筒41的侧壁开设有进气口42和排气口（未示出），泵筒41内设有径流抽气单元，该径流抽气单元包括转子43、静轮44和动密封45，转子43上固设有两平圆盘状的动轮46，两动轮46平行且间隔设置，静轮44设于两动轮46之间，静轮44与两动轮46平行设置，动密封45位于下方的动轮46的下方，静轮44和动密封45均固设于泵筒41的侧壁上；位于上方的动轮46的外侧设有一组涡轮叶列47，涡轮叶列47由上向下抽气；静轮44上设有若干由螺旋状叶片构成的抽气槽441，静轮44的中部未设置隔板，由于静轮44的中部未设置隔板，从而提高了气体的抽速。
如图4~图7所示，本实施例三的径流分子泵的工作原理如下：
（1）本实施例三的进气口42设在泵筒41的侧壁，泵筒41外侧的气体依次经进气口42和抽气槽441抽至径流抽气单元的下方；
（2）同时，由于本实施例三的泵筒41上端为敞口，在泵筒41上方增添了抽气通道，泵筒41上方的气体依次经其上方的敞口、涡轮叶列47和抽气槽441抽至径流抽气单元的下方。
由于本实施例三的立式复合径流分子泵可以从泵筒41的上方和侧壁同时抽气，且静轮44的中部未设置隔板，因此，立式复合径流分子泵的抽速高出传统径流分子泵约80%。另外，立式复合径流分子泵还具有结构简单和制造成本低的优点。
如图3所示，本实施例三的粗抽泵机组32与传统真空抽气机组的粗抽泵机组相同。本实施例三将化学吸附泵机组33和径流泵机组35分开，消除了化学吸附泵机组33产生的粉尘对径流泵机组35的污染，能提高径流泵机35无故障运行的时间。实施例三特别适合用于双机组抽气的大型真空抽气机组。
如图3所示，本实施例三的低碳、无油大抽速真空抽气机组采用如下智能控制的抽气工艺：
（1）准备阶段：关闭真空室31、放气阀36、第三真空阀310和第四真空阀311，打开第一真空阀38、第二真空阀39和第五真空阀312，同时启动深冷水汽泵34、径流泵机组35和前级泵313，径流泵机组35和前级泵313的抽气时间为4~6min，深冷水汽泵34的抽气时间为8~12min；
（2）粗抽阶段（大气压~50 Pa）：启动粗抽泵机组32抽气，真空室31压强降至50Pa后，即先、后关闭第一真空阀38和粗抽泵机组32；
（3）中真空阶段（50~0.1 Pa）：打开第三真空阀310和第四真空阀311，真空室31由径流泵机组35和深冷水汽泵34抽气；
（4）精抽阶段（0.1~0.05 Pa）：打开第二真空阀39，启动化学吸附泵机组33+径流泵机组35+深冷水汽泵34抽气，其中，深冷水汽泵34抽除可凝性气体，化学吸附泵机组33除活性气体，径流泵机组35抽除残留的惰性气体和永久气体。
本实施例三的低碳、无油大抽速真空抽气机组利用三种无油真空泵（径流泵机组35、深冷水汽泵34和化学吸附泵机组33）抽气能力的互补性以及智能控制抽气工艺，将径流泵机组35、深冷水汽泵34和化学吸附泵机组33的抽气能力实现最优化，从而取代传统高能耗、高油蒸汽污染的扩散泵+罗茨泵机组，实现消除油蒸汽污染，显著提高真空产品质量，降低抽气能耗约80%的目的。
以上所述是本发明的优选实施方式，应当指出，对于本技术领域的普通技术人员来说，在不脱离本发明原理的前提下，还可以做出若干改进和润饰，这些改进和润饰也视为本发明的保护范围。

Claims (9)

  1. 一种低碳、无油大抽速真空抽气机组，其特征在于，包括真空室，所述真空室分别与粗抽泵机组、真空壳体、化学吸附泵机组、放气阀和真空规连接，所述真空室和粗抽泵机组之间设有第一真空阀，所述真空室和真空壳体之间设有第二真空阀，所述真空壳体内部上方设有深冷水汽泵，所述真空壳体内部下方设有径流泵机组，所述径流泵机组由若干并联抽气的立式复合径流分子泵组成，所述径流泵机组的排气口通过第三真空阀与前级泵连接，所述真空室和化学吸附泵机组之间设有第四真空阀。
  2. 根据权利要求1所述的低碳、无油大抽速真空抽气机组，其特征在于，所述化学吸附泵机组由若干电弧钛泵并联组成。
  3. 根据权利要求1所述的低碳、无油大抽速真空抽气机组，其特征在于，所述立式复合径流分子泵包括上端敞口的泵筒，所述泵筒的侧壁开设有进气口和排气口，所述泵筒内设有径流抽气单元，所述径流抽气单元包括转子、静轮和动密封，所述转子上固设有两平圆盘状的动轮，两所述动轮平行且间隔设置，所述静轮设于两所述动轮之间，所述静轮与两所述动轮平行设置，所述动密封位于下方的所述动轮的下方，所述静轮和动密封均固设于所述泵筒的侧壁上；位于上方的所述动轮的外侧设有一组涡轮叶列，所述涡轮叶列由上向下抽气；所述静轮上设有若干由螺旋状叶片构成的抽气槽，所述静轮的中部未设置隔板。
  4. 一种低碳、无油大抽速真空抽气机组，其特征在于，包括真空室，所述真空室分别与粗抽泵机组、真空壳体、放气阀和真空规连接，所述真空室和粗抽泵机组之间设有第一真空阀，所述真空室和真空壳体之间设有第二真空阀，所述真空壳体内由下向上依次设有径流泵机组、化学吸附泵机组和深冷水汽泵，所述径流泵机组由若干并联抽气的径流泵组成，各所述径流泵共用一台前级泵，所述径流泵机组的排气口与所述前级泵之间设有第三真空阀，所述深冷水汽泵采用单制冷模式。
  5. 根据权利要求4所述的低碳、无油大抽速真空抽气机组，其特征在于，所述化学吸附泵机组由若干并联的电弧钛泵组成。
  6. 根据权利要求4所述的低碳、无油大抽速真空抽气机组，其特征在于，所述立式复合径流分子泵包括上端敞口的泵筒，所述泵筒的侧壁开设有进气口和排气口，所述泵筒内设有径流抽气单元，所述径流抽气单元包括转子、静轮和动密封，所述转子上固设有两平圆盘状的动轮，两所述动轮平行且间隔设置，所述静轮设于两所述动轮之间，所述静轮与两所述动轮平行设置，所述动密封位于下方的所述动轮的下方，所述静轮和动密封均固设于所述泵筒的侧壁上；位于上方的所述动轮的外侧设有一组涡轮叶列，所述涡轮叶列由上向下抽气；所述静轮上设有若干由螺旋状叶片构成的抽气槽，所述静轮的中部未设置隔板。
  7. 一种低碳、无油大抽速真空抽气机组，其特征在于，包括真空室，所述真空室分别与粗抽泵机组、化学吸附泵机组、深冷水汽泵、径流泵机组、放气阀和真空规连接，所述真空室和粗抽泵机组之间设有第一真空阀，所述真空室和化学吸附泵机组之间设有第二真空阀，所述真空室和深冷水汽泵之间设有第三真空阀，所述真空室和径流泵机组之间设有第四真空阀，所述径流泵机组由若干并联抽气的立式复合径流分子泵组成，所述径流泵机组的排气口通过第五真空阀与前级泵连接。
  8. 根据权利要求7所述的低碳、无油大抽速真空抽气机组，其特征在于，所述化学吸附泵机组由若干电弧钛泵并联组成。
  9. 根据权利要求7所述的低碳、无油大抽速真空抽气机组，其特征在于，所述立式复合径流分子泵包括上端敞口的泵筒，所述泵筒的侧壁开设有进气口和排气口，所述泵筒内设有径流抽气单元，所述径流抽气单元包括转子、静轮和动密封，所述转子上固设有两平圆盘状的动轮，两所述动轮平行且间隔设置，所述静轮设于两所述动轮之间，所述静轮与两所述动轮平行设置，所述动密封位于下方的所述动轮的下方，所述静轮和动密封均固设于所述泵筒的侧壁上；位于上方的所述动轮的外侧设有一组涡轮叶列，所述涡轮叶列由上向下抽气；所述静轮上设有若干由螺旋状叶片构成的抽气槽，所述静轮的中部未设置隔板。
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111965389A (zh) * 2020-06-24 2020-11-20 合肥工业大学 一种基于stm32单片机的旋片泵抽速校准装置及其使用方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107489605B (zh) * 2017-09-18 2019-07-12 储昕 低碳、无油大抽速真空抽气机组
CN109545420B (zh) * 2018-11-21 2021-01-26 中国科学院合肥物质科学研究院 一种离子束生物辐照装置及方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101776063A (zh) * 2010-01-21 2010-07-14 储继国 大型高真空抽气机组
KR20120117657A (ko) * 2011-04-14 2012-10-24 스미도모쥬기가이고교 가부시키가이샤 크라이오펌프 및 진공배기방법
CN103290388A (zh) * 2013-06-19 2013-09-11 储昕 等离子体镀膜设备及其抽气工艺
CN103758733A (zh) * 2014-01-29 2014-04-30 储继国 大型中、高真空抽气机组及其抽气工艺
CN106762713A (zh) * 2017-03-09 2017-05-31 苏州摩星真空科技有限公司 立式复合径流分子泵
CN107489605A (zh) * 2017-09-18 2017-12-19 储昕 低碳、无油大抽速真空抽气机组

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN207363840U (zh) * 2017-09-18 2018-05-15 储昕 低碳、无油大抽速真空抽气机组

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101776063A (zh) * 2010-01-21 2010-07-14 储继国 大型高真空抽气机组
KR20120117657A (ko) * 2011-04-14 2012-10-24 스미도모쥬기가이고교 가부시키가이샤 크라이오펌프 및 진공배기방법
CN103290388A (zh) * 2013-06-19 2013-09-11 储昕 等离子体镀膜设备及其抽气工艺
CN103758733A (zh) * 2014-01-29 2014-04-30 储继国 大型中、高真空抽气机组及其抽气工艺
CN106762713A (zh) * 2017-03-09 2017-05-31 苏州摩星真空科技有限公司 立式复合径流分子泵
CN107489605A (zh) * 2017-09-18 2017-12-19 储昕 低碳、无油大抽速真空抽气机组

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111965389A (zh) * 2020-06-24 2020-11-20 合肥工业大学 一种基于stm32单片机的旋片泵抽速校准装置及其使用方法
CN111965389B (zh) * 2020-06-24 2022-02-15 合肥工业大学 一种基于stm32单片机的旋片泵抽速校准装置及其使用方法

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