CN101776063A - 大型高真空抽气机组 - Google Patents
大型高真空抽气机组 Download PDFInfo
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- CN101776063A CN101776063A CN201010100309A CN201010100309A CN101776063A CN 101776063 A CN101776063 A CN 101776063A CN 201010100309 A CN201010100309 A CN 201010100309A CN 201010100309 A CN201010100309 A CN 201010100309A CN 101776063 A CN101776063 A CN 101776063A
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- pump
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- 238000005086 pumping Methods 0.000 title claims abstract description 25
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims abstract description 50
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 50
- 239000010936 titanium Substances 0.000 claims abstract description 49
- 238000010891 electric arc Methods 0.000 claims description 37
- 230000000740 bleeding effect Effects 0.000 claims description 27
- 238000001704 evaporation Methods 0.000 claims description 23
- 230000008020 evaporation Effects 0.000 claims description 23
- 239000007789 gas Substances 0.000 claims description 22
- 238000004821 distillation Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 5
- 230000008569 process Effects 0.000 claims description 4
- 239000011261 inert gas Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 238000009792 diffusion process Methods 0.000 abstract description 8
- 239000000463 material Substances 0.000 abstract description 7
- 230000008901 benefit Effects 0.000 abstract description 6
- 230000005068 transpiration Effects 0.000 abstract 1
- 238000005265 energy consumption Methods 0.000 description 10
- 238000001816 cooling Methods 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 2
- 238000004134 energy conservation Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 150000001875 compounds Chemical group 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Abstract
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CN201010100309XA CN101776063B (zh) | 2010-01-21 | 2010-01-21 | 大型高真空抽气机组 |
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CN201010100309XA CN101776063B (zh) | 2010-01-21 | 2010-01-21 | 大型高真空抽气机组 |
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CN101776063A true CN101776063A (zh) | 2010-07-14 |
CN101776063B CN101776063B (zh) | 2012-01-04 |
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CN201010100309XA Expired - Fee Related CN101776063B (zh) | 2010-01-21 | 2010-01-21 | 大型高真空抽气机组 |
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Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101936278A (zh) * | 2010-09-13 | 2011-01-05 | 储继国 | 一种电弧钛泵及包括该电弧钛泵的真空抽气机组 |
CN102691640A (zh) * | 2012-05-29 | 2012-09-26 | 储琦 | 一种抽气系统及工艺 |
CN103291586A (zh) * | 2013-06-19 | 2013-09-11 | 储继国 | 真空炉抽气系统及其抽气工艺 |
CN103290388A (zh) * | 2013-06-19 | 2013-09-11 | 储昕 | 等离子体镀膜设备及其抽气工艺 |
CN103320752A (zh) * | 2013-06-19 | 2013-09-25 | 储琦 | 蒸发镀膜设备及其抽气工艺 |
CN104832398A (zh) * | 2015-04-14 | 2015-08-12 | 山西南烨立碁光电有限公司 | 抽真空设备 |
CN105181900A (zh) * | 2015-09-21 | 2015-12-23 | 北京航天长征飞行器研究所 | 大容积温度和压力可同步连续调节的高温热辐射试验装置及方法 |
CN107489605A (zh) * | 2017-09-18 | 2017-12-19 | 储昕 | 低碳、无油大抽速真空抽气机组 |
CN107939641A (zh) * | 2017-12-20 | 2018-04-20 | 东莞市晋旭机电设备有限公司 | 一种二十四站式真空除气机 |
CN109751233A (zh) * | 2018-12-06 | 2019-05-14 | 兰州空间技术物理研究所 | 一种基于微型真空泵测量惰性气体抽速的装置及方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2239511Y (zh) * | 1995-10-24 | 1996-11-06 | 袁哲 | 真空电弧钛泵 |
CN2725567Y (zh) * | 2004-09-07 | 2005-09-14 | 沈阳三之环真空设备有限公司 | 高真空机组 |
CN101518693A (zh) * | 2009-03-31 | 2009-09-02 | 储继国 | 分子蒸馏设备 |
CN101560645B (zh) * | 2009-05-08 | 2011-01-19 | 深圳大学 | 大型真空镀膜设备 |
-
2010
- 2010-01-21 CN CN201010100309XA patent/CN101776063B/zh not_active Expired - Fee Related
Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101936278A (zh) * | 2010-09-13 | 2011-01-05 | 储继国 | 一种电弧钛泵及包括该电弧钛泵的真空抽气机组 |
CN102691640B (zh) * | 2012-05-29 | 2015-12-02 | 储琦 | 一种抽气系统及工艺 |
CN102691640A (zh) * | 2012-05-29 | 2012-09-26 | 储琦 | 一种抽气系统及工艺 |
CN103290388B (zh) * | 2013-06-19 | 2016-02-03 | 储昕 | 等离子体镀膜设备及其抽气工艺 |
CN103290388A (zh) * | 2013-06-19 | 2013-09-11 | 储昕 | 等离子体镀膜设备及其抽气工艺 |
CN103320752A (zh) * | 2013-06-19 | 2013-09-25 | 储琦 | 蒸发镀膜设备及其抽气工艺 |
CN103291586A (zh) * | 2013-06-19 | 2013-09-11 | 储继国 | 真空炉抽气系统及其抽气工艺 |
CN103320752B (zh) * | 2013-06-19 | 2016-02-03 | 储琦 | 蒸发镀膜设备及其抽气工艺 |
CN103291586B (zh) * | 2013-06-19 | 2016-03-30 | 储继国 | 真空炉抽气系统及其抽气工艺 |
CN104832398B (zh) * | 2015-04-14 | 2018-02-06 | 山西南烨立碁光电有限公司 | 抽真空设备 |
CN104832398A (zh) * | 2015-04-14 | 2015-08-12 | 山西南烨立碁光电有限公司 | 抽真空设备 |
CN105181900A (zh) * | 2015-09-21 | 2015-12-23 | 北京航天长征飞行器研究所 | 大容积温度和压力可同步连续调节的高温热辐射试验装置及方法 |
CN107489605A (zh) * | 2017-09-18 | 2017-12-19 | 储昕 | 低碳、无油大抽速真空抽气机组 |
WO2019052131A1 (zh) * | 2017-09-18 | 2019-03-21 | 储昕 | 低碳、无油大抽速真空抽气机组 |
CN107489605B (zh) * | 2017-09-18 | 2019-07-12 | 储昕 | 低碳、无油大抽速真空抽气机组 |
CN107939641A (zh) * | 2017-12-20 | 2018-04-20 | 东莞市晋旭机电设备有限公司 | 一种二十四站式真空除气机 |
CN109751233A (zh) * | 2018-12-06 | 2019-05-14 | 兰州空间技术物理研究所 | 一种基于微型真空泵测量惰性气体抽速的装置及方法 |
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CN101776063B (zh) | 2012-01-04 |
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Owner name: SHENZHEN MOER VACUUM TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: CHU JIGUO Effective date: 20141016 |
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Effective date of registration: 20141016 Address after: 518000, building 2, four West of a shore, 7 District, Shenzhen, Guangdong, Baoan District Patentee after: SHENZHEN MOL VACUUM TECH CO., LTD. Address before: 518000 Nanhai Road, Guangdong, Shenzhen, No. 3688, No. Patentee before: Chu Jiguo |
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Granted publication date: 20120104 Termination date: 20210121 |