WO2018150598A1 - Procédé de fabrication de cellule de batterie solaire et cellule de batterie solaire - Google Patents

Procédé de fabrication de cellule de batterie solaire et cellule de batterie solaire Download PDF

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Publication number
WO2018150598A1
WO2018150598A1 PCT/JP2017/017399 JP2017017399W WO2018150598A1 WO 2018150598 A1 WO2018150598 A1 WO 2018150598A1 JP 2017017399 W JP2017017399 W JP 2017017399W WO 2018150598 A1 WO2018150598 A1 WO 2018150598A1
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Prior art keywords
electrode
receiving surface
paste
solar cell
bus
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PCT/JP2017/017399
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English (en)
Japanese (ja)
Inventor
土井　誠
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三菱電機株式会社
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Application filed by 三菱電機株式会社 filed Critical 三菱電機株式会社
Priority to JP2019500171A priority Critical patent/JP6735894B2/ja
Priority to CN201780085042.1A priority patent/CN110268532A/zh
Priority to TW107104496A priority patent/TWI667806B/zh
Publication of WO2018150598A1 publication Critical patent/WO2018150598A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0224—Electrodes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Definitions

  • the present invention relates to a method of manufacturing a solar battery cell and a solar battery cell, and more particularly to formation of an electrode of the solar battery cell.
  • Patent Document 1 employs the following procedure. First, an uneven structure called a texture for changing the reflection angle of sunlight on the surface of a substrate material such as silicon and taking reflected light into the substrate is formed by a technique such as etching. Next, a pn junction is formed by a technique such as diffusion, and an antireflection film made of a high refractive index thin film such as a silicon nitride film is formed on at least one surface of the substrate material in order to reduce reflection of sunlight by the light interference effect. To do.
  • a conductive paste such as a metal paste as an electrode material is applied on the antireflection film so as to have a desired pattern, the paste is heated, and the antireflection film is melted by the glass contained in the paste to form a substrate.
  • the electrode is formed by carrying out firing for obtaining electrical connection with the electrode. Further, the substrate material is immersed in an etching solution for dissolving the glass component, and the glass component contained in the electrode is dissolved to reduce the electrical resistance of the electrode.
  • the electrode material is generally called a paste, and is mainly composed of a conductive material made of metal powder, an inorganic material that is a glass component, an organic material that is a resin component, and an organic solvent.
  • the paste is formed into a desired electrode shape by various printing methods such as a screen printing method, and the antireflection film is melted by a glass component contained in a heating process called baking to electrically connect the substrate material and the Bonding is performed to form an electrode.
  • the conductive material silver is usually used, but it is also a noble metal, is easily influenced by the market price, and is not cheap in price.
  • the performance of solar cells is largely dependent on the electrode made of this silver paste, and electrodes made of other materials are not the mainstream in the world. Therefore, manufacturers that develop, manufacture and sell this paste are competing day by day to determine how efficient solar cells can be manufactured with a small amount of paste and a small amount of silver. Is the current situation.
  • a thin grid electrode for collecting the generated current and a thick bus electrode for inter-substrate connection are arranged so as to be orthogonal to the grid electrode.
  • the method of molding is the mainstream.
  • the high performance of the paste is the molding of a thin and high grid electrode, which is different from the molding required to reduce the thickness of the bus electrode, that is, to suppress the coating amount. Techniques for molding are being studied.
  • a solar cell module is formed by joining a plurality of solar cells having current collecting electrodes formed on the light receiving surface side and the back surface side with tab wires.
  • the tab wire is electrically and mechanically joined to the bus electrode. Therefore, the shape of the bus electrode has been studied from the viewpoint of the mechanical strength of the solar cell module as disclosed in Patent Document 2.
  • This invention is made
  • a method for manufacturing a solar cell of the present invention includes a step of forming a pn junction on a semiconductor substrate to form a solar cell substrate, and a conductive material that is an electrode material.
  • An electrode forming step including a coating step of applying a paste containing a conductive material to the electrode forming surface of the substrate for a solar cell and a baking step of baking the applied paste.
  • the application process includes a substrate placement process for placing the solar cell substrate on a stage whose position can be controlled, a first direction control process for controlling the position of the stage in the first direction, and a stage orthogonal to the first direction. Apply the paste to the electrode forming surface while controlling the application amount with the discharge amount per time from the discharge nozzle using a liquid application device equipped with a discharge nozzle that discharges the paste while controlling the position in the second direction And a paste discharging step.
  • the present invention it is possible to realize low-cost electrode formation on a solar battery cell without reducing the mechanical strength of the solar battery module.
  • FIG. 1 is a diagram illustrating a surface that is a light receiving surface of a solar battery cell 10 that includes an electrode formed by the method for forming an electrode of a solar battery cell according to a first embodiment of the present invention.
  • the surface that is the light receiving surface is referred to as a first main surface.
  • FIG. 2 is a diagram illustrating a back surface opposite to the light receiving surface of the solar battery cell 10 illustrated in FIG. 1. The back surface is referred to as the second main surface.
  • 3 is a VV cross-sectional view of FIGS. 1 and 2
  • FIG. 4 is a WW cross-sectional view of FIGS.
  • the light receiving surface 31 which is the first main surface of the solar battery cell 10 is provided with a light receiving surface electrode 34 as a first current collecting electrode including a light receiving surface grid electrode 32 and a light receiving surface bus electrode 33.
  • the light receiving surface grid electrode 32 and the light receiving surface bus electrode 33 are orthogonal to each other.
  • the back surface 41 as the second current collecting electrode including the back surface aluminum electrode 42 and the back surface bus electrode 43 is provided on the back surface 41 which is the second main surface of the solar battery cell 10.
  • the first direction which is the horizontal direction indicated by the arrow X in FIGS. 1 and 2
  • the second direction which is the vertical direction, indicated by the arrow Y in FIGS. This is the longitudinal direction of the surface grid electrode 32.
  • a direction perpendicular to the light receiving surface 31 is defined as a Z direction.
  • FIG. 3 is a cross-sectional view of a main part of the solar battery cell 10 according to the first embodiment of the present invention, and is a VV cross-sectional view in FIGS. 1 and 2.
  • FIG. 3 is a view showing a cross section where the light receiving surface bus electrode 33 exists.
  • the upper side is the light receiving surface 31.
  • FIG. 4 is a cross-sectional view of a main part of the solar battery cell 10 according to the first embodiment of the present invention, and is a WW cross-sectional view in FIGS. 1 and 2.
  • FIG. 4 is a view showing a cross section where the light receiving surface bus electrode 33 is not present.
  • the upper side is the light receiving surface 31.
  • FIG. 5 is an enlarged perspective view of a main part of the light-receiving surface electrode 34 according to the first embodiment of the present invention.
  • the solar battery cell 10 has an n-type impurity diffusion layer 2 formed by phosphorus diffusion on the upper surface of a p-type single crystal silicon substrate 1 having a texture structure, and a photoelectric conversion part is formed by a pn junction.
  • An antireflection film 3 is formed on the light receiving surface side of the n-type impurity diffusion layer 2.
  • a light receiving surface bus electrode 33 and a light receiving surface grid electrode 32 are provided on the antireflection film 3.
  • the antireflection film 3 under the light receiving surface bus electrode 33 and the light receiving surface grid electrode 32 is melted by baking, and the light receiving surface bus electrode 33 and the light receiving surface grid electrode 32 are electrically joined to the n-type impurity diffusion layer 2.
  • Solar cell 10 may form a pn junction by an n-type single crystal silicon substrate and a p-type impurity diffusion layer on the upper surface thereof.
  • the light-receiving surface electrode 34 provided on the light-receiving surface 31 (first main surface) side of the p-type single crystal silicon substrate 1 extends in the X direction, which is the first direction, and is formed in a plurality in parallel to the Y direction.
  • the electrode 33 includes a plurality of light-receiving surface grid electrodes 32 extending in the Y direction, which is a second direction intersecting the light-receiving surface bus electrode 33 at a right angle, and formed in parallel with the X direction.
  • the light receiving surface bus electrode 33 includes a low bus portion 35 whose height in the direction perpendicular to the light receiving surface 31 is lower than the height of the light receiving surface grid electrode 32 and a height in the direction perpendicular to the light receiving surface 31.
  • a high bus portion 36 that is higher than the height of the bus portion 35.
  • a plurality of high bus portions 36 are provided in the X direction.
  • the plurality of light-receiving surface bus electrodes 33 are provided with a high bus portion 36 at the same position in the X direction.
  • the back surface electrode 44 provided on the back surface 41 (second main surface) side of the p-type single crystal silicon substrate 1 includes a back surface aluminum electrode 42 and a back surface bus electrode 43.
  • the back surface bus electrodes 43 are provided in a scattered manner at positions corresponding to the light receiving surface bus electrodes 33.
  • the position of the back surface bus electrode 43 in the Y direction is provided at a position where the center of the back surface bus electrode 43 in the Y direction is seen through from the Z direction that is perpendicular to the light receiving surface 31 and overlaps the light receiving surface bus electrode 33.
  • the position of the back surface bus electrode 43 in the X direction is such that the center of the back surface bus electrode 43 in the X direction is seen through from the Z direction perpendicular to the light receiving surface 31 and overlaps the high bus portion 36 of the light receiving surface bus electrode 33. Provided.
  • the back surface aluminum electrode 42 is provided on the entire surface of the back surface 41 other than the back surface bus electrode 43 so as to contact the back surface bus electrode 43 with, for example, an overlap width of 0.1 mm to 0.9 mm.
  • FIG. 3 shows a cross section along the longitudinal direction of the light receiving surface bus electrode 33, and the light receiving surface grid electrode 32 is not shown.
  • FIG. 4 shows a cross section at a position in the Y direction where the light receiving surface bus electrode 33 is not provided, and the light receiving surface bus electrode 33 and the back surface bus electrode 43 are not shown.
  • the solar battery cell 10 has, for example, a thickness of 200 ⁇ m, an X direction width of 156 mm, and a Y direction width of 156 mm.
  • Four sets of light-receiving surface bus electrodes 33 and back surface bus electrodes 43 are provided on the front and back surfaces of the solar battery cell 10 at an equal pitch of 39 mm.
  • the light-receiving surface bus electrodes 33 are provided, for example, with a width of 1 mm ⁇ a length of 155 mm and at a regular interval of 39 mm pitch.
  • the light-receiving surface grid electrode 32 has, for example, a width of 30 ⁇ m to 100 ⁇ m, a length of 154 mm, and a height of 10 to 20 ⁇ m.
  • the Y direction orthogonal to the X direction which is the longitudinal direction of the light-receiving surface bus electrode 33, is the longitudinal direction at equal intervals. 155 to 78 lines are provided at a pitch of 1 to 2 mm. A plurality of high bus portions 36 of the light receiving surface grid electrode 32 are provided at equal intervals with a length of 6 mm in the X direction.
  • the back surface bus electrodes 43 are, for example, 3 mm wide in the Y direction and 6 mm long in the X direction. For example, 4 rows, 6 to 10 in the position corresponding to the light receiving surface bus electrodes 33, and 26 to 26 in the X direction. They are evenly provided at a pitch of 15 mm.
  • a plurality of solar cells 10 are arranged side by side, and the light receiving surface bus electrode 33 of the solar cell 10 and the back surface bus electrode 43 of the adjacent solar cell 10 are electrically connected by the tab wire 20, and the solar cell module Is formed.
  • the tab wire 20 is formed by coating solder around the copper wire.
  • FIG. 6 shows a cross-sectional view of the light-receiving surface bus electrode 33 formed in the first embodiment.
  • the light-receiving surface bus electrode 33 When the light-receiving surface bus electrode 33 is applied by this method, the light-receiving surface bus electrode 33 having a very thin electrode thickness can be formed by reducing the coating amount. However, the electrode is joined to the tab wire 20. At this time, even when soldering cannot be performed well, even when bonding is possible, the mechanical strength of the bonding is remarkably reduced.
  • the high bus portion 36 whose height in the direction perpendicular to the light receiving surface 31 is higher than the height of the low bus portion 35 in the X direction which is the longitudinal direction of the light receiving surface bus electrode 33.
  • L1 is the length in the X direction of the high bus portion 36
  • L2 is the length in the X direction at the center of the low bus portion 35
  • L3 is the length in the X direction at the end of the low bus portion 35. It is.
  • L1 is 6 mm, 8 locations, L2 is 12 mm, 7 locations, L3 is 11 mm, and 2 locations are provided at both ends.
  • the height of the high bus portion 36 of the light receiving surface bus electrode 33 is approximately the same as the height of the light receiving surface grid electrode 32.
  • the light-receiving surface bus electrode 33 is formed after the light-receiving surface grid electrode 32 is formed, even if an attempt is made to form the light-receiving surface bus electrode 33 higher than the light-receiving surface grid electrode 32, the light-receiving surface is spread in the Y direction when applying the paste. It is difficult to form the light-receiving surface bus electrode 33 having a height higher than that of the grid electrode 32. On the other hand, when the height is lowered, it becomes difficult to join the tab wire 20.
  • the height of the high bus portion 36 of the light-receiving surface bus electrode 33 is set to be approximately the same as the height of the light-receiving surface grid electrode 32, so that electrode formation can be facilitated and bonding to the tab wire 20 can be facilitated. it can.
  • the height of the low bus portion 35 of the light receiving surface bus electrode 33 is desirably higher than the texture height of the light receiving surface 31.
  • the current collected by the light receiving surface grid electrode 32 connected to the low bus portion 35 flows from the low bus portion 35 to the high bus portion 36, and is adjacent to the solar cell by the tab wire 20 joined by the high bus portion 36. Flow into the cell. Therefore, when the electric resistance of the low bus portion 35 increases, the resistance loss increases and the output characteristics of the solar battery cell deteriorate. In particular, when a texture is formed on the light receiving surface 31, the electrical resistance tends to increase due to the texture irregularities.
  • the light-receiving surface bus electrode with low electrical resistance 33 can be obtained.
  • the texture has a quadrangular pyramid shape, and the size is, for example, about 3 ⁇ m on one side of the regular square on the bottom surface and about 2 ⁇ m in height.
  • the height of the low bus portion 35 of the light receiving surface bus electrode 33 is increased, the amount of electrode paste used is increased and the cost is increased. Therefore, it is desirable to reduce the height within a range that does not significantly affect the electrical resistance. . Therefore, the height of the low bus portion 35 of the light receiving surface bus electrode 33 is preferably about 1/3 to 2/3 of the height of the light receiving surface grid electrode 32. It is most desirable to be about 1/2.
  • the heat capacity of the high bus portion 36 is increased, and the tab wire 20 in the high bus portion 36 is The bonding strength of can be increased. It is desirable that the height of the high bus portion 36 and the height of the low bus portion 35 of the light receiving surface bus electrode 33 be different from each other by 5 ⁇ m or more.
  • the length of the high-bus portion 36 of the light-receiving surface bus electrode 33 in the X direction increases as the length increases, while the peel strength decreases as the length decreases. It is desirable to select.
  • the length of the high bus portion 36 in the X direction is preferably shorter than the length of the low bus portion 35 in the X direction.
  • by making at least one portion between the grids the high bus portion 36 it is possible to suppress a decrease in peel strength.
  • it is desirable that the length of the high bus portion 36 in the X direction is at least twice the grid pitch. If the grid pitch is 1 mm, the length of the high bus portion 36 in the X direction is desirably 2 mm or more.
  • the number of the high-bus portions 36 of the light-receiving surface bus electrode 33 in the X direction increases as the number increases, but the peel strength decreases as the number decreases. Therefore, an appropriate number should be selected in consideration of both. Is desirable. Therefore, the number of high bus portions 36 in the X direction is preferably 6 to 10.
  • the back surface bus electrode 43 is provided in a scattered manner at a position corresponding to the high bus portion 36 of the light receiving surface bus electrode 33.
  • the back surface side tab wire 20, the solar battery cell 10, and the light receiving surface side tab wire 20 are sequentially laminated, and the light receiving surface side tab wire. Bonding is formed by heating with a lamp heater while pressing 20 from the top and in close contact with each other. Therefore, by providing the high bus portion 36 and the back surface bus electrode 43 at the corresponding positions, the tab joint positions are the same on the light receiving surface side and the back surface side, and the tab wire 20 on the light receiving surface side is pressed from above. Since the light-receiving surface side and the back surface side can be brought into close contact with each other at the same time, the solar battery cell 10 and the tab wire 20 can be easily joined.
  • the present embodiment is characterized in that when the light-receiving surface bus electrode is formed, a paste containing a conductive material as an electrode material is applied to the electrode forming surface of the substrate material without using a printing mask. In the application process, the paste is applied using a liquid ejection device while controlling the amount of application per hour.
  • the p-type single crystal silicon substrate 1 is immersed in an aqueous solution of sodium hydroxide heated to about 90 ° C. Thereby, the surface of the p-type single crystal silicon substrate 1 is etched, and a texture that is a minute uneven structure is formed on the surface layer of the p-type single crystal silicon substrate 1.
  • the texture has a quadrangular pyramid shape, and the size is, for example, about 3 ⁇ m on one side of the regular square on the bottom surface and about 2 ⁇ m in height.
  • the surface of the p-type single crystal silicon substrate 1 is the (100) plane, and each surface of the quadrangular pyramid is the (111) plane.
  • the p-type single crystal silicon substrate 1 is put into a thermal oxidation furnace and heated to about 800 ° C. to 900 ° C. in the presence of phosphorus oxychloride (POCl 3) vapor.
  • phosphorus glass is formed on the surface of the p-type single crystal silicon substrate 1
  • phosphorus is diffused into the p-type single crystal silicon substrate 1
  • an n-type impurity diffusion layer 2 is formed on the surface layer of the p-type single crystal silicon substrate 1. It is formed.
  • a silicon nitride film (SiN film) is formed on the n-type impurity diffusion layer 2 as an antireflection film 3 by, for example, plasma CVD. Form.
  • the film thickness and refractive index of the antireflection film 3 are set to values that most suppress light reflection. Note that two or more layers having different refractive indexes may be stacked.
  • the antireflection film 3 may be formed by a different film forming method such as a sputtering method.
  • a paste containing silver is printed on the back surface 41 of the p-type single crystal silicon substrate 1 by screen printing in a region where the back surface bus electrode 43 is to be formed, and the entire region other than the back surface bus electrode 43 is paste containing aluminum. Is printed on the entire surface by screen printing.
  • a paste containing silver is printed on the light-receiving surface 31 of the p-type single crystal silicon substrate 1 by screen printing to form the light-receiving surface grid electrode 32, and then using the coating apparatus shown in FIGS.
  • a light receiving surface bus electrode 33 is applied. After the light-receiving surface bus electrode 33 is applied, a baking process is performed to form the light-receiving surface electrode 34 and the back electrode 44.
  • the antireflection film 3 under the light receiving surface electrode 34 is melted by baking, and the light receiving surface electrode 34 is in electrical contact with the n-type impurity diffusion layer 2.
  • the solar battery cell 10 shown in FIGS. 1 to 4 is manufactured.
  • the paste applied to the solar cell substrate 1S becomes an electrode by a process generally called firing.
  • heat treatment is performed so that the peak temperature is 800 ° C. or lower, desirably 720 ° C. to 770 ° C.
  • the heat treatment time in the firing furnace is generally within 2 minutes.
  • FIG. 7 is a schematic diagram illustrating a printing machine used in the electrode forming method of the present embodiment, and is used in a printing process for forming electrodes without using a printing mask.
  • the paste 51 for the light-receiving surface bus electrode 33 is applied to the electrode forming surface of the substrate material without using a printing mask.
  • the material of the substrate on which the electrode is formed by the method of the present embodiment for example, a silicon wafer that is thin plate silicon is used.
  • a shape of the substrate for example, a square shape or a rounded square shape in which the four corners of the square are arc shapes are used.
  • the width corresponding to one side of the square shape and the rounded square shape is, for example, 156 mm.
  • the substrate material may be any material as long as the electrode can be formed by a usual screen printing process, and the substrate material used in the usual method. There is no difference between
  • the printing machine includes a print head 101 including a liquid ejection unit 102 that ejects a paste 51 constituting an electrode material, and a pn junction that is a substrate material, that is, a substrate for a solar cell. And a stage 104 on which the formed p-type single crystal silicon substrate 1 is placed.
  • a discharge nozzle 103 is provided at the tip of the liquid discharge unit 102, and the paste 51 adjusted to a desired viscosity is discharged from the discharge nozzle 103.
  • the discharge amount of the paste 51 per unit time can be changed by a signal from the control unit 105.
  • the stage 104 is an XY table that can move in the X direction and the Y direction, and can be moved continuously by designating coordinates by a signal from the control unit 105. Also, the moving speed of the XY table can be changed by a signal from the control unit 105.
  • the printing machine also includes a print head 101 for disposing the liquid discharge unit 102 above the stage 104. The print head 101 can also be moved in the Y direction and the Z direction by a signal from the control unit 105.
  • the printing machine has a stage on which the liquid ejection unit 102 and the solar cell substrate 1S are placed while applying pressure to the liquid ejection unit 102 filled with the paste 51 disposed in the print head 101 according to a pre-programmed print pattern.
  • the paste 51 is applied to the electrode forming surface of the solar cell substrate 1S.
  • the substrate 1S for solar cells refers to a substrate in which a pn junction is formed on the p-type single crystal silicon substrate 1 and an antireflection film 3 is formed.
  • FIG. 10 shows a flowchart of the coating process.
  • a substrate mounting step S1 is performed in which the solar cell substrate 1S is mounted on the stage 104 with the longitudinal direction of the light-receiving surface bus electrode 33 as the X direction.
  • an X-direction (first direction) control step S ⁇ b> 2 is performed in which the liquid ejection unit 102 is moved to the paste application start position that becomes the end of the light receiving surface bus electrode 33 by moving the stage 104 and the liquid ejection unit 102. Do.
  • a discharge nozzle lowering step S3 is performed in which the liquid discharge unit 102 is lowered in the Z direction so that the distance between the solar cell substrate 1S and the lower end of the discharge nozzle 103 is a suitable position for paste application.
  • the height of the lower end of the discharge nozzle 103 of the liquid discharge unit 102 is appropriately set to the same position as the height of the upper end of the light receiving surface grid electrode 32. If the height is lowered, the light receiving surface grid electrode 32 is scraped by the lower end of the discharge nozzle 103, which is inappropriate. On the other hand, if the distance between the solar cell substrate 1S and the lower end of the discharge nozzle 103 is increased, the position accuracy of paste application is lowered, which is inappropriate. Therefore, it is most appropriate that the height of the lower end of the discharge nozzle 103 is the same as the height of the upper end of the light receiving surface grid electrode 32.
  • the paste 51 is discharged onto the solar cell substrate 1S, and the paste discharge step S4 for forming the light receiving surface grid electrode 32 is performed.
  • the height of the low bus portion 35 is reduced by lowering the pressure applied to the liquid ejection portion 102 as compared with the position corresponding to the high bus portion 36. Can be made lower than the height of the high bus portion 36.
  • the discharge amount per time from the discharge nozzle 103 at the first position in the second direction, which is the low bus portion 35, is defined as the first discharge amount
  • the discharge at the second position in the second direction, which is the high bus portion 36 is defined as the first discharge amount
  • the discharge at the second position in the second direction, which is the high bus portion 36 is defined as the first discharge amount
  • the discharge at the second position in the second direction, which is the high bus portion 36 is the discharge amount per hour from the nozzle 103 to a second discharge amount that is larger than the first discharge amount
  • the moving speed of the stage 104 is increased compared with the position corresponding to the high bus portion 36, so that the height of the low bus portion 35 is increased.
  • the height may be lower than 36.
  • both the pressure applied to the liquid ejection unit 102 and the moving speed of the stage 104 may be controlled.
  • the moving speed of the stage 104 at the first position in the second direction which is the low bus portion 35 is defined as the first stage moving speed
  • the moving speed of the stage 104 at the second position in the second direction which is the high bus portion 36 is defined as the first stage moving speed
  • the height of the low bus portion 35 can be made lower than the height of the high bus portion 36.
  • the discharge nozzle raising step S5 is performed in which the liquid discharge unit 102 is raised in the Z direction so that the distance between the solar cell substrate 1S and the liquid discharge unit 102 does not interfere with each other.
  • Paste application is completed by repeating the paste discharge by the number of the light-receiving surface bus electrodes 33.
  • the stage 104 and the liquid discharge unit 102 are moved in the Y direction to become the end portions of the adjacent light receiving surface bus electrodes 33.
  • An X-direction (first direction) control step S2 for moving the liquid ejection unit 102 to the paste application start position is performed. Since the light receiving surface bus electrodes 33 have the end portions at the same position in the X direction, they can be moved to the end portions of the adjacent light receiving surface bus electrodes 33 only by movement in the Y direction.
  • the paste application to the light receiving surface bus electrodes 33 is completed.
  • a substrate take-out process S7 for taking out the solar cell substrate 1S to which the paste has been applied from the stage 104 is performed.
  • the coating process is completed by the substrate placement process, the first direction control process, the discharge nozzle lowering process, the paste discharging process, the discharge nozzle rising process, the application completion determining process, and the substrate taking-out process.
  • FIG. 8 is an enlarged schematic cross-sectional view of the stage portion of the printing press.
  • the light receiving surface bus electrode 33 is formed on the solar cell substrate 1S is taken as an example.
  • the present embodiment is applied to the formation of the light receiving surface bus electrode 33, the light receiving surface grid electrode 32 is formed in advance.
  • the light receiving surface grid electrode 32 it may be formed by a screen printing method which is a conventional method conventionally used, or the electrode forming method of the present embodiment may be used.
  • the light receiving surface grid electrode 32 may be formed after the light receiving surface bus electrode 33 is formed.
  • the solar cell substrate 1 ⁇ / b> S is placed on the stage 104.
  • the stage 104 is provided with a suction unit 108 that constitutes a suction mechanism 107 that performs air suction, and the solar cell substrate 1S is fixed to the stage 104 by exhausting the suction holes with a vacuum pump.
  • the stage 104 includes a plurality of pressure sensors 109 corresponding to positions along the light receiving surface bus electrodes 33 of the solar battery cells 10.
  • the liquid ejection unit 102 disposed in the print head 101 is filled with the paste 51, pressure is applied to the liquid ejection unit 102, and the paste 51 is pushed out from the ejection nozzle 103 provided at the tip of the liquid ejection unit 102.
  • a pattern of the light-receiving surface bus electrode 33 programmed in advance is drawn on the light-receiving surface 31 that is the electrode formation surface of the solar cell substrate 1S.
  • the liquid discharge unit 102 can control the coating amount per hour by the control unit 105 of the printing press. Further, the pressure sensed by the pressure sensor 109 provided in the stage 104 is fed back to the liquid ejection unit 102 through the control unit 105, and the coating amount can be controlled.
  • the material, size, and shape of the discharge nozzle 103 mounted on the liquid discharge unit 102 are properly selected depending on the line to be drawn.
  • Typical materials used for the discharge nozzle 103 include metals such as stainless steel and resins such as polyethylene.
  • the nozzle diameter is selected according to the line width to be drawn, and the nozzle shape is selected from a normal round shape, a square shape, a branch nozzle, a multiple nozzle, a flat nozzle, and the like.
  • the light-receiving surface grid electrode 32 is formed in advance by a screen printing method, the solar cell substrate 1S subjected to the drying process is placed on the stage 104, and fixed by the suction unit 108.
  • the light-receiving surface bus electrode 33 is drawn on the light-receiving surface 31 of the solar cell substrate 1S so as to be orthogonal to the light-receiving surface grid electrode 32 in accordance with a pre-programmed print pattern.
  • the width of the light-receiving surface bus electrode 33 is 1 mm and the light-receiving surface grid electrode 32 is formed in advance, so that the applied nozzle has a high-density polyethylene tapered nozzle 0.8 diameter.
  • the light-receiving surface bus electrode 33 can be formed by supplying the paste 51 directly from the ejection nozzle 103 without using a printing mask.
  • FIG. 9 is a schematic cross-sectional view of a portion where the light-receiving surface bus electrode 33 is drawn and its periphery in the printer of the first embodiment.
  • the paste 51 is discharged from the discharge nozzle 103 of the liquid discharge unit 102 while controlling the discharge amount per time, and the light-receiving surface bus electrode 33 is drawn. At that time, by controlling the pressure of the liquid discharge unit 102 corresponding to the drawing position, it is possible to draw while changing the discharge amount finely.
  • FIG. 11 is a schematic cross-sectional view of the stage portion of the screen printer used for forming the light receiving surface grid electrode 32 in the present embodiment.
  • the paste 52 for the light receiving surface grid electrode 32 is applied to the electrode forming surface of the solar cell substrate 1S through the printing mask 202.
  • FIG. 12 is an enlarged view of FIG. 11 and 12 includes a stage 104 on which the solar cell substrate 1S is placed, and the stage 104 includes a suction unit 108 for fixing the solar cell substrate 1S.
  • the suction unit 108 fixes the solar cell substrate 1 ⁇ / b> S to the stage 104 by sucking air at the stage 104.
  • the printing mask 202 includes a mask frame 203, warp yarns 200A, and weft yarns 200B, and includes a screen mesh 200 attached to the printing surface side of the mask frame 203 and a photosensitive emulsion 200S.
  • the stage 104 and the mask frame 203 are omitted.
  • the printing machine scans the squeegee 201 on the print mask 202 on which the paste 52 is placed, thereby applying the paste 52 to the electrode formation surface of the solar cell substrate 1S through the print mask 202.
  • the paste 52 is not allowed to pass through, but the portion of the printing mesh 202 where the screen mesh 200 is exposed is allowed to pass through the paste 52.
  • the light receiving surface grid electrode 32 is formed by transferring onto the electrode forming surface.
  • the pastes 51 and 52 include a conductive material that is an electrode material.
  • Typical conductive materials used for the pastes 51 and 52 include metal materials such as gold, silver, copper, platinum and palladium.
  • the pastes 51 and 52 include one or more of these conductive materials.
  • the electrode forming method of the first embodiment it is possible to select the optimum pastes 51 and 52 for the light receiving surface grid electrode 32 and the light receiving surface bus electrode 33. In the present embodiment, it is possible to reduce the amount of coating required for the light-receiving surface bus electrode 33.
  • the weight of the paste applied through the print mask 202 to the light receiving surface bus electrode 33 is determined by the weight of the light receiving surface grid. It is determined by the mask specification for expressing the performance of the electrode 32.
  • optimization can be achieved by forming each independently.
  • the function can be expressed with a smaller amount of conductive material than the paste used in the light-receiving surface grid electrode 32 because of the required performance. is there. That is, this is nothing but reducing the total price of the pastes 52 and 51. Therefore, by separately forming the light receiving surface grid electrode 32 and the light receiving surface bus electrode 33, the cost can be reduced from both sides in terms of coating amount and price.
  • the specifications of the print mask 202 and the paste are set uniformly.
  • the performance required for the light receiving surface grid electrode 32 and the light receiving surface bus electrode 33 is not the same.
  • the former is to collect the current generated in the solar cell substrate 1S, and the latter is to flow the collected current through the tab wire.
  • using a paste that is adjusted to maximize the performance of the light-receiving surface grid electrode 32 for the light-receiving surface bus electrode 33 is of excessive quality and expensive.
  • FIG. 13 is a table comparing the performance of the solar battery cell produced by the method of the comparative example and the performance of the solar battery cell of the first embodiment.
  • the voltage (Voc) is improved by 2 mV
  • the current (Jsc) is improved by 0.4 mA / cm 2
  • the fill factor (FF) is reduced by 1/100, resulting in the same efficiency (Eff). .
  • the bonding strength when the light-receiving surface bus electrode 33 was formed without considering the thickness of the bonding portion, the strength of the conventional method could not be exceeded, but in the first embodiment, the thickness of the bonding portion was considered. As a result of changing to the structure, a value equal to or greater than that of the comparative example was secured.
  • FIG. 14 is a comparison diagram comparing the weight of the paste applied to the light-receiving surface bus electrode 33 of the solar battery cell manufactured by the method of the comparative example and the coating weight of the first embodiment.
  • the paste 51 for the light-receiving surface bus electrode 33 used in the present embodiment is 30% of the amount of the conductive material contained compared to the amount of the conductive material contained in the paste for the light-receiving surface bus electrode 33 of the comparative example. The degree is reduced.
  • the height of the electrode can be changed by changing the pressure applied to the liquid discharge unit 102 between the low bus portion 35 and the high bus portion 36 to change the flow rate of the paste to be discharged. .
  • the coating amount was 0.05 g, but in the method of the present embodiment, it was 0.034 g, and the coating amount can be reduced by about 30% compared to the method of the comparative example.
  • the performance of the solar cell produced by this method is equivalent to the method of the comparative example, which is 30% less than the amount of paste applied in the method of the comparative example, and this is a paste obtained by reducing the conductive material by 30%. It is achieved at 51.
  • FIG. 15 shows the relative value of the manufacturing cost by the method of the first embodiment when the manufacturing cost in the method of the comparative example is divided into three items of paste, printing mask, and printing machine and each is set to 1.
  • the electrode manufacturing method of the present embodiment is applied to the light-receiving surface bus electrode 33
  • the conventional method is applied to the light-receiving surface grid electrode 32
  • the cost of the paste is reduced
  • the printing mask is changed. None, printing presses are costly.
  • the introduction cost is recovered in about one year even when the printing press according to the present embodiment is additionally introduced by improving the output of the solar battery cell and reducing the cost and amount of use of the paste. After that, it will be profitable.
  • terms are omitted such that the light-receiving surface bus electrode paste is a light-receiving surface bus paste, and the light-receiving surface bus electrode printer is a light-receiving surface bus printer.
  • FIG. 16 and 17 are schematic cross-sectional views for explaining the procedure of the method for manufacturing the solar cell module according to the present embodiment.
  • a plurality of solar cells 10 having current collecting electrodes formed on the light receiving surface side and the back surface side are connected by tab wires 20.
  • the solar cell 10 with wiring is sandwiched between the translucent substrate 22 and the back sheet 23 via the translucent resin members 21A and 21B, and these members are pressure-bonded.
  • the translucent resin member 21 in which the solar cell 10 with wiring is sealed, the translucent substrate 22, and the back sheet 23 are integrated.
  • a solar cell module is produced.
  • a solar battery module having high power generation efficiency can be obtained by using the solar battery cell 10 including the electrode formed by the above electrode forming method.
  • This embodiment is very useful industrially because high-performance solar cells and solar cell modules can be obtained by a simple method without requiring expensive equipment.
  • the cost for the print mask is not required because the print mask is not used.
  • a desired electrode can be formed by a system cheaper than a screen printer.
  • the paste can be applied while controlling the amount of application per time, so that the necessary amount of paste can be discharged to the electrode formation position. This makes it possible to supply the necessary and sufficient paste to improve the characteristics and reduce the amount of paste to be supplied as a result. In other words, it is possible to form solar cell electrodes that combine cost reduction and efficiency improvement.
  • the electrode forming method of the first embodiment is a simple and inexpensive method, and the design change can be made to the arrangement of the electrode pattern or the line width and thickness by replacing the conventional method or adding to the conventional method. Even if there is, it can be carried out immediately and a reliable electrode can be easily formed.
  • the light receiving surface grid electrode 32 is formed by screen printing, and only the light receiving surface bus electrode 33 is formed while controlling the ejection amount using the liquid ejection unit 102 without using a screen. Also, the liquid discharge unit 102 may be used to control the discharge amount.
  • the height of the light-receiving surface bus electrode 33 can be easily controlled by controlling the ejection amount of the liquid ejection unit 102 and the moving speed of the stage 104.
  • the control unit 105 draws the bus electrode efficiently while maintaining the high-precision line width and position by controlling the supply amount of the paste from the discharge nozzle 103 from 0.1 ml / min to 1 ml / min. can do.
  • the supply amount of the paste from the discharge nozzle 103 is desirably controlled within a range of 0.1 to 0.3 ml per minute, and the bus electrode is drawn, so that high accuracy can be achieved without using the pressure sensor 109.
  • Bus electrode formation is realized.
  • it is possible to draw a high-accuracy bus electrode pattern by controlling the supply amount with high accuracy from 0.1 ml to 1 ml per minute. .
  • the supply amount can be reduced by 30% of the conventional application amount.
  • a bus electrode pattern can be drawn. Therefore, it is possible to provide an electrode with high accuracy and a small amount of paste.
  • the coating amount of 0.012 g corresponds to that applied at about 0.1 ml / min
  • the coating amount of 0.034 g corresponds to that applied at about 0.3 ml / min.
  • the discharge amount can be finely adjusted by adjusting the height of the discharge nozzle 103. Even when the pressure sensor 109 is used, more accurate control can be achieved by drawing the bus electrode pattern while controlling the discharge amount of the paste from the discharge nozzle 103 at 0.1 to 0.3 ml per minute. Is possible.
  • the method for forming a solar cell electrode of the present invention includes a step of applying a paste containing a conductive material as an electrode material to an electrode forming surface of a substrate material without using a printing mask, and the application step includes a liquid ejection device.
  • the liquid ejecting apparatus is moved by a drawing program for obtaining a desired electrode shape while controlling the coating amount for each time using the above, and the paste is applied.
  • the use of a printing mask eliminates the cost for that purpose.
  • a desired electrode can be formed by a system cheaper than a screen printer.
  • the paste can be applied while controlling the amount of application per time, so that the necessary amount of paste can be discharged to the electrode formation position.
  • a paste necessary and sufficient to improve the characteristics is supplied, and as a result, the amount of paste to be supplied can be reduced as compared with the conventional case, and a solar cell electrode having both cost reduction and efficiency improvement can be formed.
  • the electrode forming method of the present invention is a simple and inexpensive system, and can be implemented by replacing the conventional method or adding to the conventional method.
  • the specifications of the printing mask and paste 51 are set uniformly.
  • the performance required for the light receiving surface grid electrode 32 and the light receiving surface bus electrode 33 is not the same.
  • the former is to collect a current generated in the p-type single crystal silicon substrate 1, and the latter is to flow the collected current through a tab wire. For this reason, it is excessive quality to use the paste 51, which has been adjusted to maximize the performance of the light receiving surface grid electrode 32, for the light receiving surface bus electrode 33, and is expensive.
  • the electrode forming method of the present embodiment it is possible to select the optimum pastes 51 and 52 for the light receiving surface grid electrode 32 and the light receiving surface bus electrode 33. In the present embodiment, it is possible to reduce the amount of coating required for the light-receiving surface bus electrode 33.
  • the weight of the paste 51 applied through the printing mask to the light receiving surface bus electrode 33 portion is determined by the mask specification for expressing the performance of the light receiving surface grid electrode 32. In the embodiment, optimization can be achieved by forming the light receiving surface grid electrode 32 and the light receiving surface bus electrode 33 independently of each other.
  • the function can be expressed with a smaller amount of conductive material than the paste 52 of the light-receiving surface grid electrode 32 because of the required performance. It is. That is, this is nothing but reducing the price of the paste 51. Therefore, by separately forming the light receiving surface grid electrode 32 and the light receiving surface bus electrode 33, the cost can be reduced from both sides in terms of coating amount and price.
  • FIG. 18 is a main-portion cross-sectional view of the solar battery cell 310 according to the second embodiment of the present invention, and corresponds to the VV cross-sectional view in FIGS.
  • FIG. 18 is a view showing a cross section where the light receiving surface bus electrode 333 exists. In the drawing, the upper side is the light receiving surface 331.
  • the solar cell 310 has an n-type impurity diffusion layer 302 formed by phosphorus diffusion on the upper surface of a p-type single crystal silicon substrate 301 having a texture structure, and a photoelectric conversion part is formed by a pn junction.
  • An antireflection film 303 is formed on the light receiving surface side of the n-type impurity diffusion layer 302. On the antireflection film 303, a light receiving surface electrode 334 as a first current collecting electrode including a light receiving surface bus electrode 333 and a light receiving surface grid electrode 32 is provided.
  • the antireflection film 303 under the light receiving surface bus electrode 333 and the light receiving surface grid electrode 32 is melted by baking, and the light receiving surface bus electrode 333 and the light receiving surface grid electrode 32 are electrically joined to the n-type impurity diffusion layer 302. .
  • FIG. 19 is a cross-sectional view of the light-receiving surface bus electrode 333 of the solar battery cell 310 according to the second embodiment of the present invention.
  • L6 is the length in the X direction of the high bus portion 336
  • L7 is the length in the X direction at the center portion of the low bus portion 335
  • L8 is the length in the X direction at the intermediate end portion of the low bus portion 335
  • L9 is the length in the X direction at the end of the low bus portion 335.
  • L6 is provided at 8 locations at 6 mm
  • L7 is provided at 17 locations at 5 locations
  • L8 is provided at 5 locations at 2 locations
  • L9 is provided at 2 locations at 5.5 mm.
  • the back surface electrode 44 provided on the back surface 41 (second main surface) side of the p-type single crystal silicon substrate 301 includes a back surface aluminum electrode 342 and a back surface bus electrode 343.
  • the back surface bus electrodes 343 are provided in a scattered manner at positions corresponding to the high bus portions 336 of the light receiving surface bus electrodes 333.
  • the tab joint positions are the same on the light receiving surface side and the back surface side, and the tab wire 20 on the light receiving surface side is pressed from above.
  • the light-receiving surface side and the back surface side can be brought into close contact with each other at the same time, so that the solar cells 310 and the tab wires 20 can be easily joined.
  • the high bus portion 336 is arranged closer to the substrate end than the substrate center, and closer to the substrate center than the substrate end. be able to.
  • the back surface aluminum electrode 342 most of the region on the back surface side is covered with the back surface aluminum electrode 342, and since aluminum has a larger thermal expansion coefficient than silicon constituting the substrate, the back surface side is pulled by contraction of aluminum after firing. Therefore, there is a tendency to be deformed to be convex on the light receiving surface side and concave on the back surface side.
  • the bonding strength can be increased.
  • the configuration described in the above embodiment shows an example of the contents of the present invention, and can be combined with another known technique, and can be combined with other configurations without departing from the gist of the present invention. It is also possible to omit or change the part.

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Photovoltaic Devices (AREA)

Abstract

L'invention concerne un procédé de fabrication d'une cellule de batterie solaire, le procédé étant caractérisé en ce qu'il comprend une étape d'application pour appliquer une pâte qui est un matériau d'électrode et qui contient un matériau électroconducteur sur une surface de formation d'électrode d'un substrat pour une cellule de batterie solaire, et en ce que l'étape d'application comprend : une étape de montage de substrat pour monter le substrat pour une cellule de batterie solaire sur un étage (104) pour laquelle la position peut être commandée; une première étape de commande de direction pour commander la position de première direction de l'étage (104); et une étape de décharge de pâte pour commander la position de seconde direction de l'étage (104) orthogonale à la première direction, et également, par l'utilisation d'un dispositif d'application de liquide comprenant une buse de décharge (103) pour décharger la pâte, pour appliquer la pâte à la surface de formation d'électrode tout en commandant la quantité d'application par la quantité de décharge par unité de temps à partir de la buse de décharge (103).
PCT/JP2017/017399 2017-02-16 2017-05-08 Procédé de fabrication de cellule de batterie solaire et cellule de batterie solaire WO2018150598A1 (fr)

Priority Applications (3)

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JP2019500171A JP6735894B2 (ja) 2017-02-16 2017-05-08 太陽電池セルの製造方法および太陽電池セル
CN201780085042.1A CN110268532A (zh) 2017-02-16 2017-05-08 太阳能电池单元的制造方法以及太阳能电池单元
TW107104496A TWI667806B (zh) 2017-02-16 2018-02-08 Solar cell manufacturing method and solar cell unit

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JP2017-026803 2017-11-30

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JP2011071156A (ja) * 2009-09-24 2011-04-07 Dainippon Screen Mfg Co Ltd 電極形成方法および電極形成装置
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CN110268532A (zh) 2019-09-20
TW201832374A (zh) 2018-09-01

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