WO2018120611A1 - 动态彩色滤光片巨观检查系统及方法 - Google Patents

动态彩色滤光片巨观检查系统及方法 Download PDF

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Publication number
WO2018120611A1
WO2018120611A1 PCT/CN2017/085558 CN2017085558W WO2018120611A1 WO 2018120611 A1 WO2018120611 A1 WO 2018120611A1 CN 2017085558 W CN2017085558 W CN 2017085558W WO 2018120611 A1 WO2018120611 A1 WO 2018120611A1
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Prior art keywords
color filter
unit
glass substrate
color
filter glass
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PCT/CN2017/085558
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English (en)
French (fr)
Inventor
朱厚毅
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惠科股份有限公司
重庆惠科金渝光电科技有限公司
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Priority to US15/578,625 priority Critical patent/US20180306725A1/en
Publication of WO2018120611A1 publication Critical patent/WO2018120611A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/50—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509—Filters, e.g. light shielding masks
    • G02F1/133514—Colour filters
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G01N2021/8427—Coatings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N2021/845—Objects on a conveyor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels

Definitions

  • the present application relates to a dynamic color filter giant inspection system and method, which are mainly used for inspecting a macroscopic abnormality of a color filter substrate for a display, including color unevenness (Mura) of a color filter. Back scraping, back staining, film surface scratching, dirt, bright spots, dark spots, etc.
  • Mura color unevenness
  • the key factor for a thin film transistor liquid crystal display (TFT-LCD) to display a color image is the color filter (CF), which is coated with red, green, and blue. (Blue), the three color pigment photoresists, the light source then through the color filter, immediately form red, green, blue light, and finally mixed in the human eye to form a color image.
  • Color filters are mainly formed by photoresist coating, pre-baking, exposure, development, baking, etc., but the process may be incorrect due to parameter setting on the process or mechanical equipment failure or abnormal operation. Even dust, shavings, etc. in the air cause Defect on the color filter, including Mura, back scraping, back staining, film surface scratching, dirt, bright spots, dark spots, and the like.
  • the type of ruthenium on the color filter and the size of the ruthenium may affect whether the color filter can be judged to pass the test or must be repaired or even discarded. If the detected part is not actually completed, it will affect it.
  • the progress of the segment process, or the poor quality control on the finished product may increase the cost burden of the manufacturer and may also have a negative impact on the goodwill of the company. Therefore, flaw detection on the color filter process is an important step that is indispensable for manufacturers to reduce costs and improve market competitiveness.
  • ruthenium in color filters it can be divided into two categories: Micro Defect detection and Giant Vision (Defect) detection.
  • the microscopic ⁇ mainly refers to ⁇ which is less obvious or difficult to observe with human eyes.
  • the giant view is a larger area or a more obvious flaw.
  • the detection of color filters is mostly performed manually.
  • each technician has different levels of judgment on the type of cockroaches, and the technicians may have eye fatigue after a period of visual inspection. Physiological fatigue causes the detection speed to slow down, and even the situation that causes misjudgment occurs. Therefore, in recent years, it has gradually developed toward automated detection systems, and has gradually replaced manual identification to achieve higher production efficiency and lower labor costs.
  • the present application hopes to realize the detection and classification of the giant scorpion by developing a macroscopic detection system of color filters, so as to facilitate subsequent processing by the technicians, and the main purpose thereof is to make a macroscopic detection system for color filters. It can effectively speed up the detection speed and enhance the competitiveness of manufacturers in the market.
  • Giant ⁇ is relatively large in size and can be recognized by the human eye.
  • the color filter is difficult to observe in the human eye, including white defects, black defects, transparent electrode film defects, film surface damage, metal residues, filter layer defects, chromium (Cr) etching defects, glass bubbles, foreign matter residues, Mura Back scraping, back staining, film surface scratching, dirt, bright spots, dark spots, and so on.
  • Juju detection is to check whether the glass has Mura, scratch and smudge in different directions and angles; When measuring glass, it is a defect specification, and the special personnel can determine the good or bad product of the glass. Especially in the back-end inspection of the finished/semi-finished products of the panel, it is often found that the color unevenness caused by the unevenness of the color filter to be detected is uneven. Phenomenon; common color unevenness, can be divided into cloud-like color (Cloud Mura) and linear color unevenness (Line Mura) and other kinds of cockroaches, such cockroaches will seriously affect the user's Visual perception, it is an important basis for judging the quality of liquid crystal displays.
  • Cloud Mura cloud-like color
  • Line Mura linear color unevenness
  • the color filter industry uses the transmitted light to perform the terminal giant inspection.
  • the color filter to be detected is located between the light source and the examiner, and is provided with red photoresist, green photoresist, and blue.
  • Various photoresists such as color resist and black matrix; the examiner observes the light penetrated by the light source from behind the color filter to be inspected by visual inspection to check whether there is a problem of giant sputum; however, In the manufacturing process of detecting color filters, it is very difficult to test the color unevenness of the finished product/semi-finished product after development, and it is very difficult to pass through the naked eye alone. Therefore, the above test is still not effective. The ground has been tested.
  • the shielding arrangement is between the light source and the color filter to be detected, the light shielding area corresponds to the red photoresist and the blue light resistance of the color filter to be detected, and the light transmission area corresponds to the green photoresist; thus, the shielding and the shielding
  • the function of the color filter to be detected can convert the white light emitted by the light source into green light, and the examiner can check the giant green light according to the filtered green light condition, so as to judge whether there is any Green color unevenness problem.
  • you want to check the red or blue picture you only need to change the color filter or mask to be detected as the displacement of the left and right pixels, so that the light-transmissive areas can correspond to the red or blue photoresist, respectively. .
  • a comprehensive judgment can be made on the giant image of the uneven color.
  • the improved object and method of the color filter color film giant inspection unit are still needed to improve the production efficiency, output and quality of the liquid crystal display panel.
  • the purpose of the present application is to provide a test method for detecting color filters to provide different targeted inspections at different stages of the process.
  • the present application relates to a color filter giant inspection machine, and the color filter giant inspection machine is an important inspection device in the color filter process in the TFT-LCD industry. It is mainly used to check visual macroscopic anomalies of color filter substrates, including Mura (uneven development brightness), back scratching, back staining, film surface scratching, dirt, bright spots, dark spots, and the like.
  • Mura uneven development brightness
  • back scratching back staining
  • film surface scratching dirt, bright spots, dark spots, and the like.
  • the color filter giant inspection machine design device in the main production line provides different targeted inspections at different stages of the process.
  • the features of the present application are as follows: (1) The color film giant inspection unit is placed before the exposure machine (exposure) after coating and is matched with the color film colorimeter device, and the film thickness abnormality generated after coating is mainly detected. .
  • the advantage is that the abnormality occurring after coating can be found in time, and the subsequent process can be processed for the abnormality and the Mura (uneven development brightness) detected by the color film colorimeter can be confirmed.
  • the disadvantage is that there is a false anomaly in the detected anomaly.
  • the advantage is that the abnormality after coating and exposure can be found in time, and the subsequent process can deal with the abnormality and can eliminate some false abnormalities.
  • the disadvantage is that it is not well matched with the color film colorimeter.
  • (3) The color film giant inspection unit is placed in front of the oven after development, and the abnormality occurring after development is mainly detected.
  • the advantage is that the abnormality occurring after development can be found in time, and the abnormality can be processed subsequently.
  • the disadvantage is that it cannot be matched with the color film colorimeter, the detection frequency and interception ability are limited, and the abnormal product processing process is complicated.
  • the color filter is detected after all the processes are completed.
  • the advantage is that the detection is accurate, and the false anomaly can be excluded to the utmost extent.
  • the disadvantage is that it is impossible to perform subsequent processing when detecting an abnormality, and can only be re-worked, and the abnormal loss is extremely large.
  • the benefits of the present application include four main inspection designs: a glass substrate after normal sampling and coating; a glass substrate after normal sampling; and a color film colorimeter for color film colorimeter detection The abnormal glass substrate is reconsidered; the foreign matter detected by the color film protrusion inspection machine is inspected at a giant view, so that an additional extra floor space is not required to save costs.
  • Another object of the present application is a dynamic color filter giant inspection system, comprising: a color film coating unit for coating a color filter glass substrate; and a color film developing unit for developing the a color filter glass substrate; a color film baking unit for baking the color filter glass substrate; and a color film giant inspection unit for inspecting the color filter glass substrate An abnormality; a color film colorimeter unit for imparting color detection to the color filter glass substrate; and at least one conveyor belt including a first conveyor belt and a second conveyor belt coupled to the color film coating unit
  • the color film developing unit, the color film baking unit, the color film giant inspection unit, and the color film colorimeter unit are configured to transport the color filter glass substrate.
  • the color film inspection unit needs to add a shield to add a shield at a suitable position above or below the shield of the original transmission channel of the color film inspection unit.
  • the software it is necessary to adjust the height of the platform according to the unit of the sheet feeding signal to receive the glass substrate.
  • the color film giant inspection unit needs to add a conveyor belt on the basis of the original conveyor belt. According to the transmission channel, you can add another conveyor belt above the original conveyor.
  • an exposure machine unit is further included, coupled to the conveyor belt, and used to expose the color filter glass substrate.
  • adjustment of the conveyor belt may be utilized to achieve the color filter glass substrate before exposure, the color filter glass substrate after exposure, and the detection result of the color filter color meter unit.
  • the color film inspection unit further includes two shields for providing the color filter glass substrate in and out, and the shields are respectively connected to the first conveyor belt and the second Conveyor belt; the color film inspection unit itself unit adjustment platform is a movable platform.
  • the color filter glass substrate or the color filter colorimeter is not exposed, and the color filter glass substrate is inspected by the second conveyor into the color film. unit.
  • the color filter glass substrate after the exposure, enters the color film giant inspection unit by the first conveyor belt, wherein the color filter glass substrates are all by the second The conveyor belt left.
  • a further object of the present application is a method for macroscopic inspection of a dynamic color filter, comprising: placing a color filter glass substrate on a conveyor belt; and normally sampling the color filter glass after passing through a color film coating unit a color filter glass substrate after being subjected to normal sampling through an exposure machine unit; and a color film colorimeter unit is used to complex the abnormal color filter glass substrate detected by the color film colorimeter unit Judgment; and inspection of the foreign matter detected by a color film protrusion inspection machine in a color film giant inspection unit.
  • the conveyor belt comprises a first conveyor belt and a second conveyor belt for conveying the color filter glass substrate.
  • the color filter glass substrate enters the color film giant inspection unit from the second conveyor belt for inspection.
  • the color filter glass substrate skips the color film giant inspection unit and directly enters the exposure machine unit.
  • the color filter glass substrate skips the color film giant inspection unit and the exposure unit.
  • the color filter is inspected from the first conveyor into the color film inspection unit.
  • the color filter glass substrate exits from the second conveyor after passing through the exposure unit.
  • the macroscopic inspection is placed before the exposure machine (exposure) after coating and in conjunction with the color filter colorimeter device, mainly for detecting the film thickness abnormality generated after coating.
  • the advantage is that the abnormality occurring after coating can be found in time, and the subsequent process can be processed for the abnormality and the Mura (uneven development brightness) detected by the color film colorimeter can be confirmed.
  • the disadvantage is that there is a false anomaly in the detected anomaly.
  • the giant inspection is placed after the exposure machine (exposure) and before the development, the abnormality generated after coating and exposure is mainly detected.
  • the advantage is that the abnormality after coating and exposure can be found in time, and the subsequent process can deal with the abnormality and can eliminate some false abnormalities.
  • the disadvantage is that it is not well matched with the color film colorimeter.
  • the giant inspection is placed in front of the oven after development, and the abnormality occurring after development is mainly detected.
  • the advantage is that the abnormality occurring after development can be found in time, and the abnormality can be processed subsequently.
  • the disadvantage is that it cannot be matched with the color film colorimeter, the detection frequency and interception ability are limited, and the abnormal product processing process is complicated.
  • the giant inspection machine after the giant inspection machine is placed in the oven, all processes of the color filter are detected and completed.
  • the advantage is that the detection is accurate, and the false anomaly can be excluded to the utmost extent.
  • the shortcoming is that it is impossible to carry out subsequent processing when the abnormality is detected, and it can only be reworked, and the abnormal loss is extremely great.
  • 1 is a flow film method (1) of a glass substrate flowing device from the upstream of a glass substrate according to an embodiment of the present application, and enters a color film inspection unit for inspection. (2) In order to skip the color film giant inspection unit directly into the exposure machine. (3) Skip the color film giant inspection unit and the exposure machine directly to the downstream.
  • FIG. 2 is a schematic view showing the detection of a film thickness abnormally produced after coating by placing a giant inspection before exposure (exposure) after coating and in conjunction with a color filter colorimeter apparatus according to an embodiment of the present application.
  • Fig. 3 is a schematic view showing the detection of an abnormality caused by coating and exposure before the development of the giant inspection after the exposure machine (exposure) according to an embodiment of the present application.
  • Fig. 4 is a schematic view showing the detection of an abnormality occurring after development by placing a giant inspection in front of the oven after development in an embodiment of the present application.
  • FIG. 5 is a schematic diagram of detecting the color filter after all the processes of the color filter are completed after the giant inspection machine is placed in the oven according to an embodiment of the present application.
  • FIG. 6A-6B illustrate that a color film inspection unit of the embodiment of the present application needs to add a shield. Add a shield to the appropriate position above or below the shield of the original transmission channel of the giant observation machine. On the software, it is necessary to adjust the height of the platform according to the unit of the sheet feeding signal to receive the glass substrate.
  • the word “comprising” is to be understood to include the component, but does not exclude any other component.
  • “on” means located above or below the target component, and does not mean that it must be on the top based on the direction of gravity.
  • the color film giant inspection unit 100 is used to adjust the movable characteristics of the platform, and a shield is added on the basis of the single shield design of the conventional giant inspection machine, and the color filter substrate is appropriately added.
  • the external handling device combined with the glass substrate flow design, can realize a plurality of detection applications of the color film giant inspection unit 100 for the pre-exposure glass substrate, the post-exposure glass substrate, and the combined exposure machine 120 and color film colorimeter unit 130.
  • FIG. 1 is a flow chart method (1) of the glass substrate flowing device from the upstream of the glass substrate according to an embodiment of the present invention, and enters the color film inspection unit 100 for inspection. (2) The exposure machine 120 is directly entered for skipping the color film inspection unit 100. (3) The color film inspection unit 100 and the exposure machine 120 are directly flowed downstream.
  • FIGS. 6A to 6B show that the color film inspection unit 100 of the embodiment of the present application needs to add a shield.
  • a shield 102 is added to a suitable position above or below the original transmission channel shield 101 of the giant inspection machine. In the software, it is necessary to adjust the height of the platform according to the unit sent by the sheet feeding signal to receive the glass substrate.
  • FIG. 1 is a flow chart method (1) of the glass substrate flowing device from the upstream of the glass substrate according to an embodiment of the present invention, and enters the color film inspection unit 100 for inspection.
  • the exposure machine 120 is directly entered for skipping the color film inspection unit 100.
  • the color film inspection unit 100 and the exposure machine 120 are directly flow
  • the glass substrate can be fed three ways from the upstream: a. Entering the color film inspection unit 100 for inspection; b. skip the color film giant inspection unit 100 directly into the exposure machine; c. skip the color film giant inspection unit 100 and the exposure machine 120 directly to the downstream.
  • Fig. 1 after the glass substrate emerges from the exposure machine 120, there are two methods of sheeting: a. flowing downstream through the second conveyor belt 104; b. entering the color film inspection unit 100 through the first conveyor belt 103 for inspection.
  • the unexposed glass substrate or the color film colorimeter unit 130 detects that the marking glass substrate enters the color film giant inspection unit 100 from the second conveyor 104; the exposed glass substrate The first film transfer belt 103 enters the color film giant inspection unit 100; the glass substrates are all separated by the second conveyor belt 104.
  • FIG. 2 is a schematic view of the embodiment of the present application.
  • the macroscopic inspection is placed before the exposure machine (exposure) after coating and is matched with the color filter colorimeter unit, mainly for the film thickness abnormality generated after coating.
  • a schematic diagram of the detection, in FIG. 2, the color film inspection unit 100 is placed before the exposure machine 120 after the coating 110 and with the color filter colorimeter unit 130, mainly for the film thickness abnormality generated after the coating 110 Check out.
  • the abnormality occurring after the coating 110 can be found in time, and the subsequent process can be processed for the abnormality and the Mura (unevenness of the developing brightness) detected by the color filter colorimeter unit 130 can be confirmed.
  • the disadvantage is that there is a false anomaly in the detected anomaly.
  • FIG. 3 is a schematic view of the embodiment of the present application, after placing the giant inspection on the exposure machine (exposure) and before developing (Developer), A schematic diagram for detecting abnormalities generated after coating and exposure.
  • the color film inspection unit 100 is placed after the exposure machine 120 and before the development 140, mainly for coating 110 and after exposure. The exception was detected. The coating 110 and the abnormality after exposure can be found in time, and the subsequent process can be processed for the abnormality and some false abnormalities can be eliminated.
  • the disadvantage is that the color film colorimeter unit 130 is not well matched.
  • FIG. 4 is a schematic diagram showing the detection of an abnormality occurring after development in the front of the oven after the development of the giant inspection according to an embodiment of the present application.
  • the color film inspection unit is 100 is placed in front of the oven 150 after the development 140, and is mainly detected for an abnormality occurring after the development 140.
  • the abnormality that occurs after the development 140 can be found in time, and the subsequent treatment can be performed for the abnormality.
  • the disadvantage is that it cannot cooperate with the color filter colorimeter unit 130, the detection frequency and the interception capability are limited, and the abnormal product processing process is complicated.
  • FIG. 5 is a schematic diagram of detecting the color filter after all the processes of the color filter are completed after the giant inspection machine is placed in the oven according to an embodiment of the present application.
  • the inspection unit 100 is placed in the oven 150, it is detected after all the processes of the color filter are completed.
  • the advantage is that the detection is accurate, and the false anomaly can be excluded to the utmost extent.
  • the shortcoming is that it is impossible to carry out subsequent processing when the abnormality is detected, and it can only be reworked, and the abnormal loss is extremely great.
  • a dynamic color filter giant inspection system comprising: a color film coating unit 110 for coating a color filter glass substrate 10; a color film a developing unit 140 for developing the color filter glass substrate 10; a color film baking unit 150 for baking the color filter glass substrate 10; and a color film giant inspection unit 100 for Checking the visual macroscopic abnormality of the color filter glass substrate 10; a color film colorimeter unit 130 for applying the color filter glass substrate 10 to color detection; and an exposure machine unit 120 Exposing the color filter glass substrate 10; and at least one of the conveyor belts 103, 104, to the color film coating unit 110, the color film developing unit 140, the color film baking unit 150,
  • the color filter giant inspection unit 100, the exposure machine unit 120, and the color filter colorimeter unit 130 are used to transport the color filter glass substrate 10.
  • the adjustment of the conveyor belts 103, 104 can be utilized to achieve the color filter glass substrate 10 before exposure, the color filter glass substrates 11, 12 after exposure, and the color filter color meter.
  • Unit 130 detects a plurality of detected applications of the results.
  • the color film inspection unit 100 further includes two shields 101 and 102 for providing the color filter glass substrate 10 in and out, and the shields 101 and 102 are respectively connected to a first conveyor belt 103. And a second conveyor belt 104.
  • the color filter glass substrate 10 is not exposed or the color filter color meter is detected.
  • the color filter glass substrate 10 is inserted into the color film by the second conveyor 104.
  • the inspection unit 100 is observed.
  • the color filter glass substrate 11 enters the color film giant inspection unit 100 by the first conveyor belt 103, wherein the color filter glass substrates 12 are all covered by the first The second conveyor belt 104 leaves.
  • a method for macroscopic inspection of a dynamic color filter comprising: placing a color filter glass substrate 10 on a conveyor belt; and normal sampling through a color film coating unit 110 The color filter glass substrate 10; The color filter glass substrates 11 and 12 after passing through an exposure unit 120 are normally sampled; and the abnormal color filter detected by the color film colorimeter unit 130 is matched with a color film colorimeter unit 130.
  • the glass substrate is subjected to the reconsideration; and the foreign matter detected by the color film protrusion inspection machine 125 is inspected by the color film inspection unit 100.
  • the color film inspection unit 100 further includes two shields 101 and 102 for providing the color filter glass substrate 10 in and out, and the shields 101 and 102 are respectively connected to a first conveyor belt 103. And a second conveyor belt 104.
  • the color filter glass substrate 10 enters the color film giant inspection unit 100 from the second conveyor belt 104 for inspection.
  • the color filter glass substrate 10 skips the color film giant inspection unit 100 and directly enters the exposure unit 120.
  • the color filter glass substrate 10 skips the color film giant inspection unit 100 and the exposure unit 120.
  • the color filter glass substrate 11 After the color filter glass substrate 11 passes through the exposure unit 120, it enters the color film giant inspection unit 100 from the first conveyor belt 103 for inspection.
  • the color filter glass substrate 12 exits the second conveyor belt 104 after passing through the exposure unit unit 120.

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Abstract

一种动态彩色滤光片巨观检查系统及方法，动态彩色滤光片巨观检查系统包括：一彩膜涂布单元（110），用以涂布一彩色滤光片玻璃基板（10）；一彩膜显影单元（140），用以显影彩色滤光片玻璃基板（10）；一彩膜烘烤单元（150），用以烘烤彩色滤光片玻璃基板（10）；一彩膜巨观检查单元（100），用以检查彩色滤光片玻璃基板（10）的目视巨观异常；一彩膜色度计单元（130），用以将彩色滤光片玻璃基板（10）给予色度检测；以及至少一传送带（103、104），包括第一传送带（103）和第二传送带（104），连接于彩膜涂布单元（110）、彩膜显影单元（140）、彩膜烘烤单元（150）、彩膜巨观检查单元（100）及彩膜色度计单元（130）之间，用以输送彩色滤光片玻璃基板（10）。

Description

动态彩色滤光片巨观检查系统及方法 技术领域
本申请涉及一种动态彩色滤光片巨观检查系统及方法，主要用于检查显示器用的彩色滤光片基板的目视巨观异常，包括彩色滤光片的彩色上的不均匀(Mura)、背刮、背污、膜面刮伤、脏污、亮点、暗点等。
背景技术
薄膜晶体管液晶显示器(TFT-LCD)之所以能够显示出彩色的影像，其关键因素在于彩色滤光片(CF)，因彩色滤光片上涂布着红(Red)、绿(Green)、蓝(Blue)，此三种颜色的颜料光阻，光源再透过彩色滤光后，立即形成红、绿、蓝色光，最后在人眼中混合形成彩色的影像。彩色滤光片主要是由光阻涂布、预烤、曝光、显影、烘烤等数道制程形成，但其过程中可能会因为制程上的参数设定错误或是机械设备发生故障、运作异常甚至是空气中的粉尘、毛屑等所导致彩色滤光片上出现瑕疵(Defect)，包括Mura、背刮、背污、膜面刮伤、脏污、亮点、暗点等。彩色滤光片上的瑕疵种类及瑕疵的大小都有可能影响到彩色滤光片是否可以判定通过检测或是必须进行修复甚至是丢弃等结果，若瑕疵检测的部分没有确实做好而影响到后段制程的进度，或是交货成品上的品管不良，这些都有可能增加厂商在成本上的负担，更有可能会造成公司在商誉上的负面影响。因此，在彩色滤光片制程上的瑕疵检测是厂商降低成本及提高市场竞争力不可或缺的一项重要的步骤。彩色滤光片中的瑕疵检测方面，可分为微观瑕疵(Micro Defect)检测及巨观瑕疵(巨观Defect)检测两大类，其微观瑕疵主要是指较不明显或不易用人眼观察的瑕疵，必须藉由显微镜头进行检测。而巨观瑕疵则是指较大区域或是较明显的瑕疵。彩色滤光片的瑕疵检测作业多以人工方式来进行检测，然而，每一位技术人员对于瑕疵种类的判定水平都不太相同，且技术人员经过一段时间的目视检查，会因为眼睛疲劳及生理疲惫而造成检测速度变慢，甚至是造成误判的情形发生。于是，近年来逐渐朝着自动化检测系统来发展，并且逐渐取代人工辨识，以达到提升生产效率及降低人力成本。本申请希望经由发展一套彩色滤光片的巨观检测系统，以达到巨观瑕疵检测及分类瑕疵种类，以方便技术人员后续的处理，其主要目的为使彩色滤光片的巨观检测系统能有效地加快瑕疵检测速度及提升厂商的在市场上竞争力。
巨观瑕疵相对微观瑕疵于尺寸上来说是较大且可由人眼辨识。彩色滤光片中人眼不易观察的瑕疵包括：白缺陷、黑缺陷、透明电极膜缺陷、膜面伤、金属残留、滤光层缺陷、铬(Cr)蚀刻不良、玻璃气泡、异物残留、Mura、背刮、背污、膜面刮伤、脏污、亮点、暗点等等。
巨观检测是在不同方位及角度时，以不同灯源来检查玻璃是否有Mura、磨刮及膜污等；于检 测玻璃时是以缺陷规格，由专门人员来判定玻璃的良品或不良品，尤其，在面板成品/半成品的后段检验中，时常会发现由待检测彩色滤光片不均匀所造成色不均现象；常见的色不均现象，又可分为云状色不均(Cloud Mura)与线状色不均(Line Mura)等各式各样的瑕疵，此类瑕疵由于会严重影响使用者的视觉感受，故为判别液晶显示器品质的重要依据。目前彩色滤光片业界所开发出来的光阻涂饰后、显影前的相关检查机制，例如：Sampling Na巨观、Auto-Thickness Measure与Virtual Image Check等等，仅局限于检验出显影前的巨观瑕疵，对于显影后至彩色滤光片出货前，其终端巨观瑕疵检验，并无法提供有效的帮助。
目前彩色滤光片业界是采用透过光，进行终端巨观瑕疵检验，其中，待检测彩色滤光片座落在光源与检验者之间，其上配置有红色光阻、绿色光阻、蓝色光阻与黑色矩阵等各式光阻；检验者是藉由目视的方式，观察光源自待检测彩色滤光片后方所穿透的光线，检验是否有巨观瑕疵的问题；然而，在待检测彩色滤光片的制造过程中，要对显影后的成品/半成品，进行色不均的检验，要透过单独地透过肉眼判定，是非常困难的，因此，上述的检验，仍然无法有效地检验出巨观瑕疵。
另外，过去在彩色滤光片为小片出货时，虽然会利用屏蔽检验的方式，确认R/G/B三个颜色是否有色不均的现象，成效也相当良好。但是到了整片出货以及负型树脂黑色矩阵导入以后，由于治具制作与处理上的困难，便无法再应用了，以致于造成出货时的巨观瑕疵检出能力低落。
屏蔽配置在光源与待检测彩色滤光片之间，其遮光区域对应于待检测彩色滤光片的红色光阻与蓝色光阻，透光区域则对应于绿色光阻；如此，透过屏蔽与待检测彩色滤光片的作用，便可将光源所发射出的白光转换为绿光，检验者便可根据所过滤后绿光状况，即单一绿色画面，以便于检验巨观瑕疵，判断是否有绿色的色不均问题。同理，如欲检验红色或蓝色画面时，只需将待检测彩色滤光片或屏蔽，作左右一个次画素的位移即可，使得透光区域得以分别对应至红色光阻或蓝色光阻。在完成R/G/B单色画面的检验后，即可对色不均的巨观瑕疵，作出综合性的判断。
综合上述，仍需要彩色滤光片彩膜巨观检查单元的改良对象与方法，以提高液晶显示器面板的生产效率、产量及质量。
发明内容
为了解决上述技术问题以及在不同制程阶段中可以快速地检测出巨观瑕疵，本申请的目的在于提供一种检测彩色滤光片的检验方法，以达到在制程的不同阶段提供不同针对性的检查。本申请是有关于一种彩色滤光片巨观检查机，彩色滤光片巨观检查机是TFT-LCD产业中彩色滤光片制程中重要的检查设备。主要用于检查彩色滤光片基板的目视巨观异常，包括Mura(显影亮度不均匀)、背刮、背污、膜面刮伤、脏污、亮点、暗点等。在彩色滤光片产线制程中为主生产线内彩色滤光片巨观检查机设计装置，于制程中的不同阶段提供不同针对性的检查。
本申请的特点为：(1)将彩膜巨观检查单元置于涂布之后曝光机(曝光)之前并且配合彩膜色度计设备，主要针对涂布后所产生的膜厚异常进行检出。其优点为可及时发现涂布后出现的异常，后续制程可针对异常进行处理以及可对彩膜色度计检出的Mura(显影亮度不均匀)进行确认。其缺点为检出的异常会存在假性异常。(2)将彩膜巨观检查单元置于曝光机(曝光)后而在显影前，主要针对涂布及曝光后产生的异常进行检出。其优点为可及时发现涂布及曝光后出现的异常，后续制程可针对异常进行处理及可以消除部分假性异常。其缺点为与彩膜色度计配合情况不佳。(3)将彩膜巨观检查单元置于显影后烤箱前，主要针对显影后出现的异常进行检出。其优点为可及时发现显影后出现的异常，后续可以针对异常进行处理。其缺点为不能与彩膜色度计配合，检出频度及拦截能力有限及异常品处理过程复杂。(4)将彩膜巨观检查单元置于烤箱后，对彩色滤光片所有制程完成之后进行检出。其优点为检出准确，可最大限度的排除假性异常。其缺点为检出异常无法进行后续处理，只能重新作业，发生异常损失极大。上述之外，本申请的效益更包括可实现四种主要检查设计：正常抽检涂布机后玻璃基板；正常抽检曝光后玻璃基板；与彩膜色度计配合，对彩膜色度计检出的异常玻璃基板进行复判；对彩膜突起检查机所检查出的异物在巨观进行检查，因此可不需要额外增加额外占地面积，以节省成本。
本申请的目的及解决其技术问题还可采用以下技术措施进一步实现。
本申请的另一目的一种动态彩色滤光片巨观检查系统，包括：一彩膜涂布单元，用以涂布一彩色滤光片玻璃基板；一彩膜显影单元，用以显影所述彩色滤光片玻璃基板；一彩膜烘烤单元，用以烘烤所述彩色滤光片玻璃基板；一彩膜巨观检查单元，用以检查所述彩色滤光片玻璃基板的目视巨观异常；一彩膜色度计单元，用以将所述彩色滤光片玻璃基板给予色度检测；以及至少一传送带，包括第一传送带和第二传送带，连接于所述彩膜涂布单元、所述彩膜显影单元、所述彩膜烘烤单元、所述彩膜巨观检查单元及所述彩膜色度计单元之间，用以输送所述彩色滤光片玻璃基板。
在本申请的一实施例中，彩膜巨观检查单元需增加一个屏蔽，在彩膜巨观检查单元原本传输通道屏蔽的上方或者下方合适位置增加一个屏蔽。在软体上需要根据送片信号发出的单位调整平台高度以接受玻璃基板。
在本申请的一实施例中，彩膜巨观检查单元外在原有传送带基础上需增加一条传送带。根据传输通道的情况可以在原传送带上方再增加一条传送带即可。
在本申请的一实施例中，更包括一曝光机单元，连接于所述传送带，并用以曝光所述彩色滤光片玻璃基板。
在本申请的一实施例中，可利用传送带的调整以实现曝光前所述彩色滤光片玻璃基板、曝光后所述彩色滤光片玻璃基板以及结合所述彩膜色度计单元检测结果的多项检出应用。
在本申请的一实施例中，所述彩膜巨观检查单元，更包括两个提供所述彩色滤光片玻璃基板进出的屏蔽，该些屏蔽分别连接所述第一传送带及所述第二传送带；所述彩膜巨观检查单元自身单位调整平台为可移动平台。
在本申请的一实施例中，未曝光所述彩色滤光片玻璃基板或彩膜色度计检出标记所述彩色滤光片玻璃基板由所述第二传送带进入所述彩膜巨观检查单元。
在本申请的一实施例中，曝光后所述彩色滤光片玻璃基板由所述第一传送带进入所述彩膜巨观检查单元，其中该些彩色滤光片玻璃基板均由所述第二传送带离开。
本申请的再一目的一种动态彩色滤光片巨观检查方法，包括：将一彩色滤光片玻璃基板放置于一传送带；正常抽检经过一彩膜涂布单元后所述彩色滤光片玻璃基板；正常抽检经过一曝光机单元后所述彩色滤光片玻璃基板；与一彩膜色度计单元配合，对所述彩膜色度计单元检出的异常彩色滤光片玻璃基板进行复判；以及对一彩膜突起检查机所检查出的异物在一彩膜巨观检查单元进行检查。其中，所述传送带包括第一传送带和第二传送带，用以传送所述彩色滤光片玻璃基板。
在本申请的一实施例中，所述彩色滤光片玻璃基板自所述第二传送带，进入所述彩膜巨观检查单元进行检查。
在本申请的一实施例中，所述彩色滤光片玻璃基板跳过所述彩膜巨观检查单元直接进入所述曝光机单元。
在本申请的一实施例中，所述彩色滤光片玻璃基板跳过所述彩膜巨观检查单元及所述曝光机单元。
在本申请的一实施例中，所述彩色滤光片玻璃基板通过所述曝光机单元后，自所述第一传送带进入所述彩膜巨观检查单元进行检查。
在本申请的一实施例中，所述彩色滤光片玻璃基板通过所述曝光机单元后，自所述第二传送带离开。
在本申请的一实施例中，将巨观检查置于涂布之后曝光机(曝光)之前并且配合彩膜色度计设备，主要针对涂布后所产生的膜厚异常进行检出。其优点为可及时发现涂布后出现的异常，后续制程可针对异常进行处理以及可对彩膜色度计检出的Mura(显影亮度不均匀)进行确认。其缺点为检出的异常会存在假性异常。
在本申请的一实施例中，将巨观检查置于曝光机(曝光)后而在显影前，主要针对涂布及曝光后产生的异常进行检出。其优点为可及时发现涂布及曝光后出现的异常，后续制程可针对异常进行处理及可以消除部分假性异常。其缺点为与彩膜色度计配合情况不佳。
在本申请的一实施例中，将巨观检查置于显影后烤箱前，主要针对显影后出现的异常进行检出。 其优点为可及时发现显影后出现的异常，后续可以针对异常进行处理。其缺点为不能与彩膜色度计配合，检出频度及拦截能力有限及异常品处理过程复杂。
在本申请的一实施例中，将巨观检测机台置于烤箱后，对彩色滤光片所有制程完成之后进行检出。其优点为检出准确，可最大限度的排除假性异常。其缺点为检出异常无法进行后续处理，只能重工，发生异常损失极大。
附图说明
图1是本申请一实施例的玻璃基板自上游前来其玻璃基板流动设备的流片方法(1)进入彩膜巨观检查单元进行检查。(2)为跳过彩膜巨观检查单元直接进入曝光机。(3)跳过彩膜巨观检查单元及曝光机直接流向下游。
图2是本申请一实施例的将巨观检查置于涂布之后曝光机(曝光)之前并且配合彩膜色度计设备，主要针对涂布后所产生的膜厚异常进行检出的示意图。
图3是本申请一实施例的将巨观检查置于曝光机(曝光)后而在显影前，主要针对涂布及曝光后产生的异常进行检出的示意图。
图4是本申请一实施例的将巨观检查置于显影后烤箱前，主要针对显影后出现的异常进行检出的示意图。
图5是本申请一实施例的将巨观检测机台置于烤箱后，对彩色滤光片所有制程完成之后进行检出的示意图。
图6A～6B是本申请一实施例的彩膜巨观检查单元需增加一个屏蔽。在巨观检测机台原本传输通道屏蔽的上方或者下方合适位置增加一个屏蔽。在软体上需要根据送片信号发出的单位调整平台高度以接受玻璃基板。
具体实施方式
以下各实施例的说明是参考附加的图式，用以例示本申请可用以实施的特定实施例。本申请所提到的方向用语，例如「上」、「下」、「前」、「后」、「左」、「右」、「内」、「外」、「侧面」等，仅是参考附加图式的方向。因此，使用的方向用语是用以说明及理解本申请，而非用以限制本申请。
附图和说明被认为在本质上是示出性的，而不是限制性的。在图中，结构相似的单元是以相同标号表示。另外，为了理解和便于描述，附图中示出的每个组件的尺寸和厚度是任意示出的，但是本申请不限于此。
在附图中，为了清晰起见，夸大了层、膜、面板、区域等的厚度。在附图中，为了理解和便于描述，夸大了一些层和区域的厚度。将理解的是，当例如层、膜、区域或基底的组件被称作“在”另一组件“上”时，所述组件可以直接在所述另一组件上，或者也可以存在中间组件。
另外，在说明书中，除非明确地描述为相反的，否则词语“包括”将被理解为意指包括所述组件，但是不排除任何其它组件。此外，在说明书中，“在......上”意指位于目标组件上方或者下方，而不意指必须位于基于重力方向的顶部上。
为更进一步阐述本申请为达成预定发明目的所采取的技术手段及功效，以下结合附图及较佳实施例，对依据本申请提出的一种动态彩色滤光片巨观检查系统及方法，其具体实施方式、结构、特征及其功效，详细说明如后。
在图1中，运用彩膜巨观检查单元100自身单位调整平台可移动的特性，在传统巨观检测机台单屏蔽设计基础上增加一个屏蔽，再适当增加用以搬运彩色滤光片基板的外部搬运设备，结合玻璃基板流动设计可以实现彩膜巨观检查单元100针对曝光前玻璃基板、曝光后玻璃基板以及结合曝光机120和彩膜色度计单元130检查结果的多项检出应用。
请参阅图1和图6A、图6B，图1是本申请一实施例的玻璃基板自上游前来其玻璃基板流动设备的流片方法(1)进入彩膜巨观检查单元100进行检查。(2)为跳过彩膜巨观检查单元100直接进入曝光机120。(3)跳过彩膜巨观检查单元100及曝光机120直接流向下游，图6A～6B是本申请一实施例的彩膜巨观检查单元100需增加一个屏蔽。在巨观检测机台原本传输通道屏蔽101的上方或者下方合适位置增加一个屏蔽102。在软体上需要根据送片信号发出的单位调整平台高度以接受玻璃基板，在图1中，玻璃基板自上游前来可有三种流片方法：a.进入彩膜巨观检查单元100进行检查；b.跳过彩膜巨观检查单元100直接进入曝光机；c.跳过彩膜巨观检查单元100及曝光机120直接流向下游。
在图1中，玻璃基板自曝光机120出来后有两种流片方法：a.通过第二传送带104流向下游；b.经过第一传送带103进入彩膜巨观检查单元100进行检查。
在图1中，在彩膜巨观检查单元100方面，未曝光玻璃基板或彩膜色度计单元130检出标记玻璃基板由第二传送带104进入彩膜巨观检查单元100；曝光后玻璃基板由第一传送带103进入彩膜巨观检查单元100；该些玻璃基板均由第二传送带104离开。
请参阅图2，图2是本申请一实施例的将巨观检查置于涂布之后曝光机(曝光)之前并且配合彩膜色度计单元，主要针对涂布后所产生的膜厚异常进行检出的示意图，在图2中，将彩膜巨观检查单元100置于涂布110之后曝光机120之前并且配合彩膜色度计单元130，主要针对涂布110后所产生的膜厚异常进行检出。可及时发现涂布110后出现的异常，后续制程可针对异常进行处理以及可对彩膜色度计单元130检出的Mura(显影亮度不均匀)进行确认。其缺点为检出的异常会存在假性异常。
请参阅图3，图3是本申请一实施例的将巨观检查置于曝光机(曝光)后而在显影(Developer)前， 主要针对涂布及曝光后产生的异常进行检出的示意图，在图3中，将彩膜巨观检查单元100置于曝光机120后而在显影140前，主要针对涂布110及曝光后产生的异常进行检出。可及时发现涂布110及曝光后出现的异常，后续制程可针对异常进行处理及可以消除部分假性异常。其缺点为与彩膜色度计单元130配合情况不佳。
请参阅图4，图4是本申请一实施例的将巨观检查置于显影后烤箱前，主要针对显影后出现的异常进行检出的示意图，在图4中，将彩膜巨观检查单元100置于显影140后烤箱150前，主要针对显影140后出现的异常进行检出。可及时发现显影140后出现的异常，后续可以针对异常进行处理。其缺点为不能与彩膜色度计单元130配合，检出频度及拦截能力有限及异常品处理过程复杂。
请参阅图5，图5是本申请一实施例的将巨观检测机台置于烤箱后，对彩色滤光片所有制程完成之后进行检出的示意图，在图5中，将彩膜巨观检查单元100置于烤箱150后，对彩色滤光片所有制程完成之后进行检出。其优点为检出准确，可最大限度的排除假性异常。其缺点为检出异常无法进行后续处理，只能重工，发生异常损失极大。
请继续参阅图1至图6A及图6B，一种动态彩色滤光片巨观检查系统，包括：一彩膜涂布单元110，用以涂布一彩色滤光片玻璃基板10；一彩膜显影单元140，用以显影所述彩色滤光片玻璃基板10；一彩膜烘烤单元150，用以烘烤所述彩色滤光片玻璃基板10；一彩膜巨观检查单元100，用以检查所述彩色滤光片玻璃基板10的目视巨观异常；一彩膜色度计单元130，用以将所述彩色滤光片玻璃基板10给予色度检测；一曝光机单元120，用以曝光所述彩色滤光片玻璃基板10；以及至少一传送带103、104，连接于所述彩膜涂布单元110、所述彩膜显影单元140、所述彩膜烘烤单元150、所述彩膜巨观检查单元100、所述曝光机单元120及所述彩膜色度计单元130之间，用以输送所述彩色滤光片玻璃基板10。
在一实施例中，可利用传送带103、104的调整以实现曝光前所述彩色滤光片玻璃基板10、曝光后所述彩色滤光片玻璃基板11、12以及结合所述彩膜色度计单元130检测结果的多项检出应用。
在一实施例中，所述彩膜巨观检查单元100，更包括两个提供所述彩色滤光片玻璃基板10进出的屏蔽101、102，该些屏蔽101、102分别连接一第一传送带103及一第二传送带104。
在一实施例中，未曝光所述彩色滤光片玻璃基板10或所述彩膜色度计检出标记所述彩色滤光片玻璃基板10由所述第二传送带104进入所述彩膜巨观检查单元100。
在一实施例中，曝光后所述彩色滤光片玻璃基板11由所述第一传送带103进入所述彩膜巨观检查单元100，其中该些彩色滤光片玻璃基板12均由所述第二传送带104离开。
请继续参阅图1至图6A及图6B，一种动态彩色滤光片巨观检查方法，包括：将一彩色滤光片玻璃基板10放置于一传送带；正常抽检经过一彩膜涂布单元110后所述彩色滤光片玻璃基板10； 正常抽检经过一曝光机单元120后所述彩色滤光片玻璃基板11、12；与一彩膜色度计单元130配合，对所述彩膜色度计单元130检出的异常彩色滤光片玻璃基板进行复判；以及对一彩膜突起检查机125所检查出的异物在一彩膜巨观检查单元100进行检查。
在一实施例中，所述彩膜巨观检查单元100，更包括两个提供所述彩色滤光片玻璃基板10进出的屏蔽101、102，该些屏蔽101、102分别连接一第一传送带103及一第二传送带104。
在一实施例中，所述彩色滤光片玻璃基板10自所述第二传送带104，进入所述彩膜巨观检查单元100进行检查。
在一实施例中，所述彩色滤光片玻璃基板10跳过所述彩膜巨观检查单元100直接进入所述曝光机单元120。
在一实施例中，所述彩色滤光片玻璃基板10跳过所述彩膜巨观检查单元100及所述曝光机单元120。
在一实施例中，所述彩色滤光片玻璃基板11通过曝光机单元120后，自所述第一传送带103进入所述彩膜巨观检查单元100进行检查。
在一实施例中，所述彩色滤光片玻璃基板12通过曝光机单元后120，自所述第二传送带104离开。
“在一些实施例中”及“在各种实施例中”等用语被重复地使用。所述用语通常不是指相同的实施例；但它亦可以是指相同的实施例。“包含”、“具有”及“包括”等用词是同义词，除非其前后文意显示出其它意思。
以上所述，仅是本申请的较佳实施例而已，并非对本申请作任何形式上的限制，虽然本申请已以较佳实施例揭露如上，然而并非用以限定本申请，任何熟悉本专业的技术人员，在不脱离本申请技术方案范围内，当可利用上述揭示的技术内容作出些许更动或修饰为等同变化的等效实施例，但凡是未脱离本申请技术方案的内容，依据本申请的技术实质对以上实施例所作的任何简单修改、等同变化与修饰，均仍属于本申请技术方案的范围内。

Claims (15)

  1. 一种动态彩色滤光片巨观检查系统，包括：
    一彩膜涂布单元，用以涂布一彩色滤光片玻璃基板；
    一彩膜显影单元，用以显影所述彩色滤光片玻璃基板；
    一彩膜烘烤单元，用以烘烤所述彩色滤光片玻璃基板；
    一彩膜巨观检查单元，用以检查所述彩色滤光片玻璃基板的目视巨观异常；
    一彩膜色度计单元，用以将所述彩色滤光片玻璃基板给予色度检测；以及
    至少一传送带，包括第一传送带和第二传送带，连接于所述彩膜涂布单元、所述彩膜显影单元、所述彩膜烘烤单元、所述彩膜巨观检查单元及所述彩膜色度计单元之间，用以输送所述彩色滤光片玻璃基板。
  2. 如权利要求1所述的动态彩色滤光片巨观检查系统，其中更包括一曝光机单元，连接于所述传送带，并用以曝光所述彩色滤光片玻璃基板。
  3. 如权利要求1所述的动态彩色滤光片巨观检查系统，利用所述传送带的调整以实现曝光前所述彩色滤光片玻璃基板、曝光后所述彩色滤光片玻璃基板以及结合所述彩膜色度计单元检测结果的多项检出应用。
  4. 如权利要求1所述的动态彩色滤光片巨观检查系统，其中所述彩膜巨观检查单元，更包括两个提供所述彩色滤光片玻璃基板进出的屏蔽，该些屏蔽分别连接所述第一传送带及所述第二传送带。
  5. 如权利要求1所述的动态彩色滤光片巨观检查系统，未曝光所述彩色滤光片玻璃基板或所述彩膜色度计检出标记所述彩色滤光片玻璃基板由所述第二传送带进入所述彩膜巨观检查单元。
  6. 如权利要求1所述的动态彩色滤光片巨观检查系统，曝光后所述彩色滤光片玻璃基板由所述第一传送带进入所述彩膜巨观检查单元，该些彩色滤光片玻璃基板均由所述第二传送带离开。
  7. 一种动态彩色滤光片巨观检查方法，包括：
    将一彩色滤光片玻璃基板放置于一传送带；
    正常抽检经过一彩膜涂布单元后所述彩色滤光片玻璃基板；
    正常抽检经过一曝光机单元后所述彩色滤光片玻璃基板；
    与一彩膜色度计单元配合，对所述彩膜色度计单元检出的异常彩色滤光片玻璃基板进行复判；以及
    对一彩膜突起检查机所检查出的异物在一彩膜巨观检查单元进行检查；
    其中，一传送带，包括第一传送带和第二传送带，用以输送所述彩色滤光片玻璃基板。
  8. 如权利要求7所述的动态彩色滤光片巨观检查方法，其中所述彩色滤光片玻璃基板自所述第二 传送带，进入所述彩膜巨观检查单元进行检查。
  9. 如权利要求7所述的动态彩色滤光片巨观检查方法，其中所述彩色滤光片玻璃基板跳过所述彩膜巨观检查单元直接进入所述曝光机单元。
  10. 如权利要求7所述的动态彩色滤光片巨观检查方法，其中所述彩色滤光片玻璃基板跳过所述彩膜巨观检查单元及所述曝光机单元。
  11. 如权利要求7所述的动态彩色滤光片巨观检查方法，其中所述彩色滤光片玻璃基板通过所述曝光机单元后，自所述第一传送带进入所述彩膜巨观检查单元进行检查。
  12. 如权利要求7所述的动态彩色滤光片巨观检查方法，其中所述彩色滤光片玻璃基板通过所述曝光机单元后，自所述第二传送带离开。
  13. 如权利要求7所述的动态彩色滤光片巨观检查方法，利用传送带的调整以实现曝光前所述彩色滤光片玻璃基板、曝光后所述彩色滤光片玻璃基板以及结合所述彩膜色度计单元检测结果的多项检出应用。
  14. 如权利要求7所述的动态彩色滤光片巨观检查方法，其中所述彩膜巨观检查单元，更包括两个提供所述彩色滤光片玻璃基板进出的屏蔽，该些屏蔽分别连接所述第一传送带及所述第二传送带。
  15. 一种动态彩色滤光片巨观检查系统，包括：
    一彩膜涂布单元，用以涂布一彩色滤光片玻璃基板；
    一彩膜显影单元，用以显影所述彩色滤光片玻璃基板；
    一彩膜烘烤单元，用以烘烤所述彩色滤光片玻璃基板；
    一彩膜巨观检查单元，用以检查所述彩色滤光片玻璃基板的目视巨观异常；
    一彩膜色度计单元，用以将所述彩色滤光片玻璃基板给予色度检测；
    一曝光机单元，用以曝光所述彩色滤光片玻璃基板；以及
    至少一传送带，包括第一传送带和第二传送带，连接于所述彩膜涂布单元、所述彩膜显影单元、所述彩膜烘烤单元、所述彩膜巨观检查单元、所述曝光机单元及所述彩膜色度计单元之间，用以输送所述彩色滤光片玻璃基板；
    其中，所述彩膜巨观检查单元，更包括两个提供所述彩色滤光片玻璃基板进出的屏蔽，该些屏蔽分别连接所述第一传送带及所述第二传送带；
    其中，未曝光所述彩色滤光片玻璃基板或彩膜色度计检出标记所述彩色滤光片玻璃基板由所述第二传送带进入所述彩膜巨观检查单元；
    其中，曝光后所述彩色滤光片玻璃基板由所述第一传送带进入所述彩膜巨观检查单元，该些彩色滤光片玻璃基板均由第二传送带离开；
    其中，利用传送带的调整以实现曝光前所述彩色滤光片玻璃基板、曝光后所述彩色滤光片玻璃基板以及结合所述彩膜色度计单元检测结果的多项检出应用；
    其中，所述彩膜巨观检查单元自身单位调整平台为可移动平台。
PCT/CN2017/085558 2016-12-29 2017-05-23 动态彩色滤光片巨观检查系统及方法 WO2018120611A1 (zh)

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