WO2018079742A1 - 検査装置 - Google Patents
検査装置 Download PDFInfo
- Publication number
- WO2018079742A1 WO2018079742A1 PCT/JP2017/038989 JP2017038989W WO2018079742A1 WO 2018079742 A1 WO2018079742 A1 WO 2018079742A1 JP 2017038989 W JP2017038989 W JP 2017038989W WO 2018079742 A1 WO2018079742 A1 WO 2018079742A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- light
- guide plate
- light guide
- article
- housing
- Prior art date
Links
Images
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/56—Cameras or camera modules comprising electronic image sensors; Control thereof provided with illuminating means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21S—NON-PORTABLE LIGHTING DEVICES; SYSTEMS THEREOF; VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLE EXTERIORS
- F21S2/00—Systems of lighting devices, not provided for in main groups F21S4/00 - F21S10/00 or F21S19/00, e.g. of modular construction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
- G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
- G02B6/0013—Means for improving the coupling-in of light from the light source into the light guide
- G02B6/0023—Means for improving the coupling-in of light from the light source into the light guide provided by one optical element, or plurality thereof, placed between the light guide and the light source, or around the light source
- G02B6/0031—Reflecting element, sheet or layer
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
- G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
- G02B6/0033—Means for improving the coupling-out of light from the light guide
- G02B6/0035—Means for improving the coupling-out of light from the light guide provided on the surface of the light guide or in the bulk of it
- G02B6/0036—2-D arrangement of prisms, protrusions, indentations or roughened surfaces
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
- G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
- G02B6/0033—Means for improving the coupling-out of light from the light guide
- G02B6/0035—Means for improving the coupling-out of light from the light guide provided on the surface of the light guide or in the bulk of it
- G02B6/004—Scattering dots or dot-like elements, e.g. microbeads, scattering particles, nanoparticles
- G02B6/0043—Scattering dots or dot-like elements, e.g. microbeads, scattering particles, nanoparticles provided on the surface of the light guide
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/065—Integrating spheres
- G01N2201/0655—Hemispheres
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/08—Optical fibres; light guides
Definitions
- the present invention relates to an inspection apparatus that inspects an article by irradiating the article with light and photographing it with a camera.
- an inspection apparatus that performs inspection (external inspection of defects, scratches, dirt, foreign matter, etc.) by irradiating an article with light and photographing the article with a camera has been used. It was. Among them, light is introduced from the end surface portion of the light guide plate to irradiate the article placed under the light guide plate, and the reflected light from the article enters the camera disposed above the light guide plate. There are those that photograph an article (for example, Patent Document 1 and Patent Document 2). An inspection apparatus using such a light guide plate has an advantage of a small space.
- the light guide plate is provided on the upper surface thereof by, for example, laser processing or mechanical cutting so as to form a straight line having a substantially V-shaped cross section (a straight line in plan view). Many recessed portions formed are formed. The many recesses reflect the introduced light downward and irradiate the article placed below the light guide plate.
- the camera is disposed above the light guide plate, and reflects the light reflected from the article to photograph the article.
- the light guide plate in which a large number of recesses (similar to that in Patent Document 1) is formed has a non-recessed region where no recess is formed, and the light guide plate On the upper side, a reflecting plate having a transmission region that transmits light from the light guide plate at a position overlapping with the non-recessed region, and a periphery of which is a reflection region that reflects light from the light guide plate is disposed.
- the camera is disposed above the light guide plate and the reflection plate at the position of the non-recessed area and the transmissive area, and the reflected light from the article is incident to photograph the article.
- the inspection device of Patent Document 2 allows reflected light from the article to be incident on the camera with almost no influence of the concave portion of the light guide plate. Therefore, when the article must be inspected very finely, In comparison, it is possible to improve the sharpness of imaging by the camera.
- the inspection apparatus of Patent Document 2 requires a reflector in order to irradiate an article with a sufficient amount of light.
- the present invention has been made in view of the above-mentioned reasons, and its purpose is to irradiate an article placed under the light guide plate with light introduced from the end surface portion of the light guide plate and reflect the light from the article with a camera. It is an object of the present invention to provide an inspection apparatus that can improve the definition of an image captured by a camera without a reflector.
- an inspection apparatus includes a housing, a light source unit disposed in the housing, and an end surface portion disposed in the housing so as to face the light source unit.
- the light from the light source unit can be introduced, the light can be reflected downward by a number of transparent hemispherical bodies formed on the upper surface and arranged two-dimensionally, and the light placed on the lower surface can be irradiated with the light.
- An illuminator including a light guide plate, and a camera that is disposed above the upper surface of the light guide plate and that reflects the light from the article to photograph the article.
- the illuminator further includes a light transmission plate disposed above the multiple hemispherical bodies with a gap therebetween.
- the inspection apparatus of the present invention it is possible to improve the definition of the image picked up by the camera even without a reflector.
- the inspection apparatus 1 includes an illuminator 2 and a camera 3 as shown in FIG.
- the illuminator 2 includes a housing 4, a light source unit 5, a light guide plate 6, and a light transmission plate 7.
- the inspection apparatus 1 introduces light (indicated by a solid line with an arrow) from an end surface portion 6 a of the light guide plate 6 of the illuminator 2 to an article M placed below the light guide plate 6.
- FIG. 1 (and FIG. 3) is a cross-sectional view taken along the line AA in FIG.
- FIG. 2 shows only the contour shape (surface shape) of an upper wall 4c (and the light transmission plate 7 and the light guide plate 6), which will be described later, of the housing 4 so that the illuminator 2 can be easily understood. And so on.
- the housing 4 has a light source unit 5 and a light guide plate 6 which will be described in detail later arranged and supported therein.
- the housing 4 includes a bottom wall 4a, a peripheral wall 4b that is connected to the bottom wall 4a, and an upper wall 4c that is connected to the peripheral wall 4b. Openings 4aa and 4ca are provided in the bottom wall 4a and the upper wall 4c, respectively, so that light can pass therethrough.
- the housing 4 is made of a metal material such as aluminum or copper or a resin material.
- the light source unit 5 is disposed in the housing 4.
- the light source unit 5 includes a plurality of light emitting elements 51 arranged so as to emit light to end surfaces 6 a of each side (each side of a square in plan view) of the light guide plate 6 described in detail later, and the light guide plate 6. It has a plurality of elongated printed boards 52 provided facing the end surface portions 6a of each side, on which these light emitting elements 51 are mounted (for example, about 10 are mounted per side).
- a light emitting diode or the like is used as the light emitting element 51.
- the light emitting element 51 can be a surface mount type (chip LED or the like) in addition to a shell type as shown in FIG.
- the plurality of light emitting elements 51 (and the printed circuit board 52) can be provided only for specific sides of the light guide plate 6.
- the light guide plate 6 is disposed in the housing 4 so that the end surface portion 6 a faces the light source portion 5.
- the light guide plate 6 is made of a member having a predetermined refractive index and excellent in light guide properties, and usually a resin material such as transparent acrylic is applied.
- the light guide plate 6 is square, but is not limited thereto.
- the size and thickness of the light guide plate 6 are not limited. For example, one having a side length of about 10 to 20 cm and a thickness of about 5 mm can be used.
- the light guide plate 6 introduces light from the light source unit 5 (light emitting element 51).
- storage holes 6 aa for storing the light emitting elements 51 are provided at regular intervals in the end surface portion 6 a of the light guide plate 6. It is also possible to flatten the end surface portion 6a of the light guide plate 6 (without providing the storage hole 6aa), and to make the light emitting element 51 approach or adhere to it.
- hemispherical bodies 6A are formed on the upper surface 6b of the light guide plate 6 and are two-dimensionally arranged. Many hemispherical bodies 6A are transparent.
- the hemispherical shape means a surface that smoothly falls as the surface moves away from the center (center in plan view), and includes a semi-ellipsoidal shape and the like.
- transparent refers to a material that is not colored such as white.
- the hemispherical body 6A can be formed by ink jet printing using an ultraviolet curable ink.
- the ultraviolet curable ink can be, for example, an acrylic resin-based transparent ink.
- the size of the hemispherical body 6A is not limited.
- the diameter D can be about 20 ⁇ m to about 100 ⁇ m
- the height H can be about 10 ⁇ m to about 40 ⁇ m.
- the interval (pitch) P between the hemispherical bodies 6A and 6A is determined in relation to the size of the hemispherical body 6A, and can be, for example, about 100 ⁇ m to about 300 ⁇ m.
- the interval P between the hemispherical bodies 6A and 6A is changed according to the location (for example, shortened from the peripheral part of the light guide plate 6 toward the central part), or the diameter D and the height of the hemispherical bodies 6A and 6A are increased. It is also possible to change the height H according to the location (for example, the height H is increased from the peripheral part to the central part of the light guide plate 6).
- the light guide plate 6 can reflect the light introduced from the light source unit 5 toward the article M so as to irradiate the article M placed below the lower surface 6c by a large number of hemispherical bodies 6A. Specifically, when light introduced from the light source unit 5 tries to go outside from the light guide plate 6 due to a difference in refractive index between the light guide plate 6 and air, the interface (the upper surface 6b and the lower surface 6c of the light guide plate 6). If the incident angle is smaller than the critical angle (for example, 35 to 40 °), part of the light is transmitted and the rest is reflected. As shown by the broken line with an arrow in FIG. .
- the light having an incident angle larger than the critical angle is repeatedly reflected and reaches a wide range including the central portion of the light guide plate 6. Then, the light entering the hemispherical body 6A, due to the difference in refractive index between the hemispherical body 6A and the air, as shown by the solid line with an arrow in FIG. If the incident angle to (the surface of the hemispherical body 6A) is smaller than a critical angle (for example, 35 to 40 °), a part is transmitted and the rest is reflected, and if it is larger than the critical angle, the whole is reflected. Since the surface of the hemispherical body 6A is a curved surface, the light reflected by the hemispherical body 6A travels toward the article M from various directions.
- a critical angle for example, 35 to 40 °
- the reflected light from the article M enters from the lower surface 6c of the light guide plate 6, passes through the upper surface 6b or the hemispherical body 6A, and most of the light is emitted upward.
- the light guide plate 6 in which such a large number of hemispherical bodies 6A are formed is more of the light emitted from the light source unit 5 than the light guide plate in which a large number of recesses are formed as described in the background art section.
- the ratio of those passing through the lower surface 6c of the light guide plate 6 so as to irradiate the article M is large.
- the light guide plate 6 having a large number of hemispherical bodies 6A is about 90%, and the light guide plate having a large number of concave portions is about 70%.
- the light guide plate 6 on which a large number of hemispherical bodies 6A are formed emits light emitted from the light source unit 5 from the upper surface 6b of the light guide plate 6 without passing through the lower surface 6c of the light guide plate 6.
- the ratio is small.
- the reflected light from the article M is emitted toward the camera 3 through the hemispherical body 6A as well as the portion where the hemispherical body 6A is not formed on the upper surface 6b of the light guide plate 6. Therefore, it is possible to improve the definition of the image picked up by the camera 3. That is, it is possible to improve the definition of the image picked up by the camera 3 without disposing a reflection plate on the upper side of the light guide plate 6 as in Patent Document 2 described above.
- the proportion of the light emitted from the light source unit 5 that does not pass through the lower surface 6c of the light guide plate 6 but exits from the upper surface 6b of the light guide plate 6 is high. Since there are few, the moire (interference fringe) resulting from arrangement
- the light transmission plate 7 is disposed above the numerous hemispherical bodies 6A with a gap.
- a member that transmits light well is used, and usually a transparent resin material such as acrylic is applied.
- the light transmission plate 7 is fixed to the housing 4 by being directly attached to the housing 4 or, in some cases, attached to the light guide plate 6 or the light source unit 5. This attachment is performed by a member 7A (for example, a double-sided tape or the like) having such a thickness that the gap is formed.
- Such a light transmission plate 7 is arranged with a large gap from many hemispherical bodies 6A, air exists in the gap, and a large number of hemispherical bodies 6A (and the light guide plate 6) and the air The interface can be protected to ensure the characteristics.
- the inspection apparatus has been described above, but the present invention is not limited to the one described in the embodiment, and various design changes can be made within the scope of the matters described in the claims. It is.
- the light transmission plate 7 can be omitted or replaced by other means as long as the properties can be secured by protecting the interface between the plurality of hemispherical bodies 6A (and the light guide plate 6) and air. is there.
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Biochemistry (AREA)
- Pathology (AREA)
- Immunology (AREA)
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Signal Processing (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Multimedia (AREA)
- General Engineering & Computer Science (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Planar Illumination Modules (AREA)
- Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
Abstract
Description
2 照明器
3 カメラ
4 ハウジング
5 光源部
51 発光素子
6 導光板
6a 導光板の端面部
6b 導光板の上面
6c 導光板の下面
6A 半球状体
7 光透過板
M 物品
Claims (2)
- ハウジングと、
該ハウジング内に配置された光源部と、
端面部が前記光源部に対向するように前記ハウジング内に配置されて前記光源部からの光を導入し、上面に形成され二次元配列した透明な多数の半球状体によって光を下方に向けて反射し、下面の下方に置かれた物品に光を照射し得る導光板と、
を具備する照明器と、
前記導光板の上面の上方に配置されており前記物品からの反射光を入射して該物品を撮影するカメラと、
を有することを特徴とする検査装置。 - 請求項1に記載の検査装置において、
前記照明器は、前記多数の半球状体の上方に隙間をあけて配置された光透過板を更に具備することを特徴とする検査装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US16/345,609 US20190342477A1 (en) | 2016-10-31 | 2017-10-27 | Inspection device |
JP2018547800A JPWO2018079742A1 (ja) | 2016-10-31 | 2017-10-27 | 検査装置 |
KR1020197014940A KR20190077440A (ko) | 2016-10-31 | 2017-10-27 | 검사 장치 |
EP17866132.8A EP3540411A4 (en) | 2016-10-31 | 2017-10-27 | INSPECTION DEVICE |
CN201780066422.0A CN109891219A (zh) | 2016-10-31 | 2017-10-27 | 检查装置 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016212579 | 2016-10-31 | ||
JP2016-212579 | 2016-10-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2018079742A1 true WO2018079742A1 (ja) | 2018-05-03 |
Family
ID=62023614
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2017/038989 WO2018079742A1 (ja) | 2016-10-31 | 2017-10-27 | 検査装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20190342477A1 (ja) |
EP (1) | EP3540411A4 (ja) |
JP (1) | JPWO2018079742A1 (ja) |
KR (1) | KR20190077440A (ja) |
CN (1) | CN109891219A (ja) |
WO (1) | WO2018079742A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112585451A (zh) * | 2018-08-31 | 2021-03-30 | Ccs株式会社 | 光照射装置 |
JP2021085808A (ja) * | 2019-11-29 | 2021-06-03 | シーシーエス株式会社 | 光照射装置 |
WO2022158431A1 (ja) * | 2021-01-20 | 2022-07-28 | 株式会社アイテックシステム | 照明装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH1164639A (ja) * | 1997-08-13 | 1999-03-05 | Seiko Epson Corp | 照明装置、液晶装置及び電子機器 |
JP2003114430A (ja) * | 2001-10-02 | 2003-04-18 | Nitto Jushi Kogyo Kk | フロントライト型液晶ディスプレイ |
JP2010112735A (ja) | 2008-11-04 | 2010-05-20 | Imac Co Ltd | 検査用照明装置 |
EP3040605A1 (en) * | 2015-01-02 | 2016-07-06 | Goodrich Lighting Systems GmbH | Light unit with an extended light emission surface |
JP2016136124A (ja) | 2015-01-24 | 2016-07-28 | 株式会社イマック | 検査用照明装置 |
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JP4122187B2 (ja) * | 2002-08-08 | 2008-07-23 | 松下電器産業株式会社 | 照明装置、及びこれを備えた認識装置並びに部品実装装置 |
JP4584312B2 (ja) * | 2005-08-26 | 2010-11-17 | シーシーエス株式会社 | 光照射装置及び光学部材 |
JP4840121B2 (ja) * | 2006-04-20 | 2011-12-21 | 三菱電機株式会社 | 面状光源装置 |
US7905650B2 (en) * | 2006-08-25 | 2011-03-15 | 3M Innovative Properties Company | Backlight suitable for display devices |
JP2008161938A (ja) * | 2006-12-07 | 2008-07-17 | Imac Co Ltd | 半田ごて清掃装置 |
DE102012200903A1 (de) * | 2012-01-23 | 2013-07-25 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Optikanordnung und Verfahren zur optischen Abtastung einer Objektebene mit einem Mehrkanalabbildungssystem |
CN102679232B (zh) * | 2012-05-28 | 2014-06-18 | 中山生动力健身器材有限公司 | 台灯 |
US20140268879A1 (en) * | 2013-03-14 | 2014-09-18 | Panasonic Corporation | Transparent waveguide diffuser for lighting and methods of manufacturing transparent waveguide diffuser |
CN105455796A (zh) * | 2016-01-02 | 2016-04-06 | 无锡桑尼安科技有限公司 | 一种智能化生理参数确定方法 |
-
2017
- 2017-10-27 WO PCT/JP2017/038989 patent/WO2018079742A1/ja unknown
- 2017-10-27 JP JP2018547800A patent/JPWO2018079742A1/ja not_active Withdrawn
- 2017-10-27 CN CN201780066422.0A patent/CN109891219A/zh active Pending
- 2017-10-27 KR KR1020197014940A patent/KR20190077440A/ko unknown
- 2017-10-27 EP EP17866132.8A patent/EP3540411A4/en not_active Withdrawn
- 2017-10-27 US US16/345,609 patent/US20190342477A1/en not_active Abandoned
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JPH1164639A (ja) * | 1997-08-13 | 1999-03-05 | Seiko Epson Corp | 照明装置、液晶装置及び電子機器 |
JP2003114430A (ja) * | 2001-10-02 | 2003-04-18 | Nitto Jushi Kogyo Kk | フロントライト型液晶ディスプレイ |
JP2010112735A (ja) | 2008-11-04 | 2010-05-20 | Imac Co Ltd | 検査用照明装置 |
EP3040605A1 (en) * | 2015-01-02 | 2016-07-06 | Goodrich Lighting Systems GmbH | Light unit with an extended light emission surface |
JP2016136124A (ja) | 2015-01-24 | 2016-07-28 | 株式会社イマック | 検査用照明装置 |
Non-Patent Citations (1)
Title |
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See also references of EP3540411A4 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112585451A (zh) * | 2018-08-31 | 2021-03-30 | Ccs株式会社 | 光照射装置 |
JPWO2020045557A1 (ja) * | 2018-08-31 | 2021-09-24 | シーシーエス株式会社 | 光照射装置 |
EP3845888A4 (en) * | 2018-08-31 | 2022-05-04 | CCS Inc. | LIGHT PROJECTION DEVICE |
US11761900B2 (en) | 2018-08-31 | 2023-09-19 | Ccs Inc. | Light projecting device |
JP2021085808A (ja) * | 2019-11-29 | 2021-06-03 | シーシーエス株式会社 | 光照射装置 |
WO2022158431A1 (ja) * | 2021-01-20 | 2022-07-28 | 株式会社アイテックシステム | 照明装置 |
Also Published As
Publication number | Publication date |
---|---|
EP3540411A1 (en) | 2019-09-18 |
JPWO2018079742A1 (ja) | 2019-09-19 |
CN109891219A (zh) | 2019-06-14 |
EP3540411A4 (en) | 2020-07-15 |
KR20190077440A (ko) | 2019-07-03 |
US20190342477A1 (en) | 2019-11-07 |
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