WO2018072302A1 - 柔性显示基板制作方法 - Google Patents
柔性显示基板制作方法 Download PDFInfo
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- WO2018072302A1 WO2018072302A1 PCT/CN2016/111054 CN2016111054W WO2018072302A1 WO 2018072302 A1 WO2018072302 A1 WO 2018072302A1 CN 2016111054 W CN2016111054 W CN 2016111054W WO 2018072302 A1 WO2018072302 A1 WO 2018072302A1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
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- the present invention relates to the field of display technology, and in particular, to a flexible display substrate manufacturing method which can simplify the manufacturing process and avoid damage of the flexible display substrate by the stripping process.
- the flexible display panel is a display panel made of flexible material and can be bent and deformed arbitrarily. Because of its light weight, small size and thinness, it is easy to carry; it is resistant to high and low temperature, impact resistance and shock resistance, and can adapt to the working environment. Wide; can be curled, the shape has more artistic design and other advantages, has become a research hotspot in recent years.
- a plurality of flexible display panels are mixed and designed on the same glass substrate to form a flexible display substrate, and then cut to form a plurality of flexible display panels.
- the manufacturing method of the flexible display substrate is mainly divided into two categories: the first type is a roll-to-roll process, that is, a display device is directly prepared on a flexible display by printing.
- the second type is the method of attaching and removing.
- the flexible display substrate is attached to the rigid substrate to prepare a display device. After the display device is completed, the rigid substrate is peeled off, and the flexible display substrate is removed. This method does not affect the fabrication accuracy of the display device, and the fabrication equipment and process are similar to the conventional TFT-LCD, which is relatively easy to implement. Referring to FIG.
- FIG. 1 a schematic structural view of a conventional flexible display substrate.
- the flexible substrate 13 is attached to the glass substrate 11 by the adhesive 12, and then the display device 14 is prepared thereon, and then the flexible display substrate is peeled off from the glass substrate 11.
- the adhesive has no residue.
- the present invention provides a method of fabricating a flexible display substrate, the method comprising the steps of: providing a carrier substrate, depositing a layer of soluble polymer on the carrier substrate; and making flexibility on the soluble polymer a substrate, wherein the soluble polymer is a hydroalcoholic polymer; a water-oxygen barrier layer is deposited on the other surface of the flexible substrate relative to the soluble polymer, and the water-oxygen barrier layer is opposite A display device is fabricated on the other surface of the flexible substrate and packaged; the flexible substrate and the carrier substrate are peeled off by dissolving the soluble polymer to obtain a flexible display substrate.
- the present invention also provides a method for fabricating a flexible display substrate, the method comprising the steps of: providing a carrier substrate, depositing a layer of soluble polymer on the carrier substrate; and fabricating the soluble polymer a flexible substrate; a display device is fabricated on the other surface of the flexible substrate with respect to the soluble polymer, and is encapsulated; the flexible substrate and the carrier substrate are peeled off by dissolving the soluble polymer, A flexible display substrate is obtained.
- An advantage of the present invention is that by introducing a soluble polymer (for example, a water-soluble polymer) between the flexible display substrate and the carrier substrate, the flexible display is provided between the carrier substrate and the carrier substrate after dissolution by the soluble polymer.
- a soluble polymer for example, a water-soluble polymer
- FIG. 1 is a schematic structural view of a conventional flexible display substrate
- FIG. 2 is a flow chart of a method for fabricating a flexible display substrate according to an embodiment of the invention
- 3A is a schematic view showing deposition of a soluble polymer on a carrier substrate according to an embodiment of the invention
- 3B is a schematic view showing a flexible substrate fabricated on a soluble polymer according to an embodiment of the invention.
- 3C is a schematic diagram of sequentially forming a water oxygen barrier layer and a light emitting panel on a flexible substrate according to an embodiment of the invention
- FIG. 3D is a schematic diagram of the light-emitting panel after being packaged according to an embodiment of the invention.
- 3E is a schematic view showing the dissolution of a flexible substrate and a carrier substrate by dissolving a soluble polymer according to an embodiment of the present invention.
- FIG. 2 is a flow chart of a method for fabricating a flexible display substrate according to an embodiment of the present invention; the method includes the following steps: S22: providing a carrier substrate, and depositing a layer of soluble polymer on the carrier substrate; Making a flexible substrate on the soluble polymer; S26: forming a display device on the other surface of the flexible substrate with respect to the soluble polymer, and performing encapsulation; S28: by dissolving the soluble polymer, The flexible substrate and the carrier substrate are peeled off to obtain a flexible display substrate.
- the manufacturing method of the present invention will be described in detail below.
- step S22 providing a carrier substrate and depositing a layer of soluble polymer on the carrier substrate, please refer to FIG. 2 and FIG. 3A together, wherein FIG. 3A is deposited on the carrier substrate according to an embodiment of the invention.
- the carrier substrate 31 may be a rigid glass substrate.
- the soluble polymer 32 has a minimum temperature resistance of 200 ° C or higher; the soluble polymer 32 can withstand high temperature (>200 ° C), and has good solubility after high temperature treatment to ensure the late stripping process. get on.
- the soluble polymer 32 is a hydroalcoholic polymer; the hydroalcoholic polymer is selected to take into account the environmental friendliness of the manufacturing process.
- the hydroalcoholic polymer may be, but not limited to, poly(3,4-ethylenedioxythiophene)-polystyrenesulfonic acid (PEDOT:PSS).
- PEDOT:PSS is an aqueous solution of high molecular polymer with high conductivity, composed of PEDOT and PSS;
- PEDOT is a polymer of EDOT (3,4-ethylenedioxythiophene monomer), PSS It is polystyrene sulfonic acid; these two substances together greatly improve the solubility of PEDOT.
- step S24 fabricating a flexible substrate on the soluble polymer, please refer to FIG. 2 and FIG. 3B together, wherein FIG. 3B is a schematic diagram of fabricating a flexible substrate on a soluble polymer according to an embodiment of the invention.
- the flexible substrate 33 may be an organic plastic substrate.
- FIG. 3C is a schematic diagram of sequentially forming a water oxygen barrier layer and a light emitting panel on a flexible substrate according to an embodiment of the present invention
- FIG. 3D is an embodiment of the present invention.
- a water-oxygen barrier layer 34 is further deposited between the display device 35 and the flexible substrate 33; preferably, step S26: forming a display on the other surface of the flexible substrate relative to the soluble polymer
- the device, and encapsulating, further includes depositing a water oxygen barrier layer 34 on the other surface of the flexible substrate 33 opposite the soluble polymer 32, and the water oxygen barrier layer 34 is opposite the flexible substrate 33
- the display device 35 is fabricated on the other surface.
- the display device 35 is a light-emitting panel; optionally, step S26: forming a display device on the other surface of the flexible substrate relative to the soluble polymer, and packaging: A flexible substrate 33 is fabricated on the other surface of the soluble polymer 33 to form a light-emitting panel. Further, the light emitting panel is formed over the water oxygen barrier layer 34, and then the entire light emitting panel is packaged to form the encapsulation layer 36 shown in FIG. 3D.
- the display device 35 referred to in the embodiment of the present invention refers to a structure that is indispensable for realizing display and composed of layers of layers.
- the display device when the flexible display substrate is an array substrate of an LCD, for a minimum display unit of the array substrate, the display device includes at least a thin film transistor, a pixel electrode, and the like; and when the flexible display substrate is a color film of the LCD In the case of a substrate, the display device includes a red or green or blue photoresist and a black matrix for a minimum display unit of the color filter substrate; and when the flexible display substrate is an array substrate of the OLED, For a minimum display unit of the substrate, the display device includes at least a cathode, an anode, and a light-emitting layer.
- some necessary pattern layers such as a protective layer or the like or some pattern layers which are added to improve the display effect or some defects may be included.
- the flexible substrate and the carrier substrate are peeled off by dissolving the soluble polymer to obtain a flexible display substrate.
- FIG. 3E is an embodiment of the present invention.
- the soluble polymer 32 is a hydroalcoholic polymer
- the encapsulated substrate can be placed in a hydroalcoholic liquid, and the separation between the flexible display substrate and the carrier substrate can be achieved by dissolution of the water-soluble polymer. .
- the invention provides a flexible display substrate manufacturing method, by depositing a layer of soluble polymer on a carrier substrate, and then fabricating a flexible substrate, then forming a display device on a flexible substrate and packaging, and finally placing the packaged substrate In the liquid in which the soluble polymer used is dissolved, the separation of the flexible display substrate and the carrier substrate is achieved by dissolution of the soluble polymer between the carrier substrate and the flexible display substrate.
- a soluble polymer for example, a water-soluble polymer
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Abstract
提供了一种柔性显示基板制作方法，方法包括：提供一载体基板，并在所述载体基板上沉积一层可溶性聚合物；在所述可溶性聚合物上制作柔性衬底；在所述柔性衬底相对所述可溶性聚合物的另一表面上制作显示器件，并进行封装；通过溶解所述可溶性聚合物，将所述柔性衬底和所述载体基板剥离，得到柔性显示基板。提供的柔性显示基板制作方法简化了制作工艺，避免了剥离工艺对柔性显示基板的损伤。
Description
本发明涉及显示技术领域，尤其是涉及一种可以简化制作工艺，避免剥离工艺对柔性显示基板的损伤的柔性显示基板制作方法。
柔性显示面板是采用柔性材料制成的可以任意弯曲变形的显示面板，由于其重量轻、体积小、薄型化，携带方便；耐高低温、耐冲击、抗震能力更强，能适应的工作环境更广；可卷曲，外形更具有艺术设计的美感等优点，近年来成为了研究的热点。将多个柔性显示面板混合设计在同一玻璃基板上形成柔性显示基板，再进行切割即可制成多个柔性显示面板。
现有技术中，柔性显示基板制作方法主要分为两类：第一类是采用卷对卷的生产工艺（roll-to-roll），即通过印刷的方式直接在柔性显示上制备显示器件。但是这种工艺由于受到印刷技术和显示墨水材料的限制，只能制备一些显示精度要求较低的产品，且成品率和可靠性较差；第二类是采用贴附取下的方法，先将柔性显示基板贴附在硬质基板上制备显示器件，制备完成显示器件之后再剥离硬质基板，取下柔性显示基板。这种方法不影响显示器件的制作精度，且制作设备和工艺与制作传统的TFT-LCD相仿，是目前比较容易实现的做法。参考图1，现有的柔性显示基板结构示意图。利用黏结剂12将柔性衬底13贴附在玻璃基板11上，然后在其上制备显示器件14，之后再将柔性显示基板从玻璃基板11上剥离下来。但是现有的生产工艺难以做到在保证玻璃基板与柔性衬底之间具有较好的粘接性的情况下，还能容易将柔性衬底剥离下来，且粘接剂无残留。
因此，现有柔性显示基板制作技术有待改进和发展。
本发明的目的在于，提供一种柔性显示基板制作方法，可以简化制作工艺，避免剥离工艺对柔性显示基板的损伤。
为实现上述目的，本发明提供了一种柔性显示基板制作方法，方法包括如下步骤：提供一载体基板，并在所述载体基板上沉积一层可溶性聚合物；在所述可溶性聚合物上制作柔性衬底，其中，所述可溶性聚合物为水醇溶性聚合物；在所述柔性衬底相对所述可溶性聚合物的另一表面上沉积水氧阻挡层，并在所述水氧阻挡层相对所述柔性衬底的另一表面上制作显示器件，并进行封装；通过溶解所述可溶性聚合物，将所述柔性衬底和所述载体基板剥离，得到柔性显示基板。
为实现上述目的，本发明还提供了一种柔性显示基板制作方法，方法包括如下步骤：提供一载体基板，并在所述载体基板上沉积一层可溶性聚合物；在所述可溶性聚合物上制作柔性衬底；在所述柔性衬底相对所述可溶性聚合物的另一表面上制作显示器件，并进行封装；通过溶解所述可溶性聚合物，将所述柔性衬底和所述载体基板剥离，得到柔性显示基板。
本发明的优点在于，通过在柔性显示基板与载体基板之间引入可溶性聚合物（例如，水醇溶性聚合物），在具备制作完成后通过可溶性聚合物的溶解实现柔性显示具备与载体基板之间的剥离，简化了制作工艺，避免了剥离工艺对柔性显示基板的损伤。
图1，现有的柔性显示基板结构示意图；
图2，本发明一实施例所述的柔性显示基板制作方法的流程图；
图3A，本发明一实施例所述的在载体基板上沉积可溶性聚合物的示意图；
图3B，本发明一实施例所述的在可溶性聚合物上制作柔性衬底的示意图；
图3C，本发明一实施例所述的在柔性衬底上依次形成水氧阻挡层和发光面板的示意图；
图3D，本发明一实施例所述的对发光面板进行封装后的示意图；
图3E，本发明一实施例所述的溶解可溶性聚合物将柔性衬底和载体基板剥离的示意图。
下面结合附图以及实施例，对本发明提供的柔性显示基板制作方法作详细说明。显然，所描述的实施例仅是本发明一部分实施例，
而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
参考图2，本发明一实施例所述的柔性显示基板制作方法的流程图；所述方法包括如下步骤：S22：提供一载体基板，并在所述载体基板上沉积一层可溶性聚合物；S24：在所述可溶性聚合物上制作柔性衬底；S26：在所述柔性衬底相对所述可溶性聚合物的另一表面上制作显示器件，并进行封装；S28：通过溶解所述可溶性聚合物，将所述柔性衬底和所述载体基板剥离，得到柔性显示基板。以下对本发明所述制作方法做详细说明。
关于步骤S22：提供一载体基板，并在所述载体基板上沉积一层可溶性聚合物，请一并参考图2以及图3A，其中图3A为本发明一实施例所述的在载体基板上沉积可溶性聚合物的示意图。所述载体基板31可以为具有刚性的玻璃基板。优选的，所述可溶性聚合物32最低耐温大于等于200℃；所述可溶性聚合物32能耐高温（>200℃），且经高温处理后仍具良好的溶解性，以保证后期脱膜工艺的进行。可选的，所述可溶性聚合物32为水醇溶性聚合物；选择水醇溶性聚合物是为了考虑制备工艺的环境友好性。可选的，所述的水醇溶性聚合物可以是但不限于是聚(3,4-乙烯二氧噻吩)-聚苯乙烯磺酸（PEDOT:PSS）。其中，PEDOT:PSS是一种高分子聚合物的水溶液，导电率很高，由PEDOT和PSS两种物质构成；PEDOT是EDOT（3,4-乙烯二氧噻吩单体）的聚合物，PSS
是聚苯乙烯磺酸；这两种物质在一起极大的提高了PEDOT的溶解性。
关于步骤S24：在所述可溶性聚合物上制作柔性衬底，请一并参考图2以及图3B，其中图3B为本发明一实施例所述的在可溶性聚合物上制作柔性衬底的示意图。所述柔性衬底33可以为有机塑料基板。
关于步骤S26：在所述柔性衬底相对所述可溶性聚合物的另一表面上制作显示器件，并进行封装。请一并参考图2以及图3C-3D，其中图3C为本发明一实施例所述的在柔性衬底上依次形成水氧阻挡层和发光面板的示意图，图3D为本发明一实施例所述的对发光面板进行封装后的示意图。本实施例中，显示器件35与柔性衬底33之间还沉积有一层水氧阻挡层34；优选的，步骤S26：在所述柔性衬底相对所述可溶性聚合物的另一表面上制作显示器件，并进行封装进一步包括：在所述柔性衬底33相对所述可溶性聚合物32的另一表面上沉积水氧阻挡层34，并在所述水氧阻挡层34相对所述柔性衬底33的另一表面上制作所述显示器件35。本实施例中，所述显示器件35为发光面板；可选的，步骤S26：在所述柔性衬底相对所述可溶性聚合物的另一表面上制作显示器件，并进行封装为：在所述柔性衬底33相对所述可溶性聚合物33的另一表面上制作发光面板。进一步，所述发光面板形成在所述水氧阻挡层34之上，之后对整个发光面板进行封装，以形成图3D所示的封装层36。
需要说明的是，本发明实施例所指的显示器件35是指实现显示的必不可少的、且由各层图案组成的结构。例如当所述柔性显示基板为LCD的阵列基板时，则对于该阵列基板的一个最小显示单元来说，该显示器件至少包括薄膜晶体管、像素电极等；当所述柔性显示基板为LCD的彩膜基板时，则对于该彩膜基板的一个最小显示单元来说，该显示器件包括红色或绿色或蓝色光阻以及黑矩阵等；当所述柔性显示基板为OLED的阵列基板时，则对于该阵列基板的一个最小显示单元来说，该显示器件至少包括阴极、阳极和发光层。当然除此之外，还可以包括一些必要的图案层例如保护层等或为改善显示效果或某些缺陷增加的一些图案层。
关于步骤S28：通过溶解所述可溶性聚合物，将所述柔性衬底和所述载体基板剥离，得到柔性显示基板，请一并参考图2以及图3E，其中图3E为本发明一实施例所述的溶解可溶性聚合物将柔性衬底和载体基板剥离的示意图。例如，当所述可溶性聚合物32为水醇溶性聚合物时，可以将封装好的基板置于水醇液体中，通过水醇溶性聚合物的溶解，实现柔性显示基板与载体基板之间的分离。
本发明提供的柔性显示基板制作方法，通过在载体基板上沉积一层可溶性聚合物，然后再制作柔性衬底，随后在柔性衬底上制作显示器件并进行封装，最后将封装好的基板置有溶解所使用的可溶性聚合物的液体中，通过载体基板与柔性显示基板之间的可溶性聚合物的溶解，实现柔性显示基板与载体基板的剥离。本发明通过在柔性显示基板与载体基板之间引入可溶性聚合物（例如，水醇溶性聚合物），在具备制作完成后通过可溶性聚合物的溶解实现柔性显示具备与载体基板之间的剥离，简化了制作工艺，避免了剥离工艺对柔性显示基板的损伤。
以上所述仅是本发明的优选实施方式，应当指出，对于本技术领域的普通技术人员，在不脱离本发明原理的前提下，还可以做出若干改进和润饰，这些改进和润饰也应视为本发明的保护范围。
Claims (12)
- 一种柔性显示基板制作方法，其中，包括：提供一载体基板，并在所述载体基板上沉积一层可溶性聚合物；在所述可溶性聚合物上制作柔性衬底，其中，所述可溶性聚合物为水醇溶性聚合物；在所述柔性衬底相对所述可溶性聚合物的另一表面上沉积水氧阻挡层，并在所述水氧阻挡层相对所述柔性衬底的另一表面上制作显示器件，并进行封装；通过溶解所述可溶性聚合物，将所述柔性衬底和所述载体基板剥离，得到柔性显示基板。
- 如权利要求1所述的制作方法，其中，所述载体基板为玻璃基板。
- 如权利要求1所述的制作方法，其中，所述水醇溶性聚合物最低耐温大于等于200℃。
- 如权利要求1所述的制作方法，其中，所述水醇溶性聚合物为聚(3,4-乙烯二氧噻吩)-聚苯乙烯磺酸。
- 如权利要求1所述的制作方法，其中，所述显示器件为发光面板。
- 一种柔性显示基板制作方法，其中，包括：提供一载体基板，并在所述载体基板上沉积一层可溶性聚合物；在所述可溶性聚合物上制作柔性衬底；在所述柔性衬底相对所述可溶性聚合物的另一表面上制作显示器件，并进行封装；通过溶解所述可溶性聚合物，将所述柔性衬底和所述载体基板剥离，得到柔性显示基板。
- 如权利要求6所述的制作方法，其中，所述载体基板为玻璃基板。
- 如权利要求6所述的制作方法，其中，所述可溶性聚合物最低耐温大于等于200℃。
- 如权利要求6所述的制作方法，其中，所述可溶性聚合物为水醇溶性聚合物。
- 如权利要求9所述的制作方法，其中，所述水醇溶性聚合物为聚(3,4-乙烯二氧噻吩)-聚苯乙烯磺酸。
- 如权利要求6所述的制作方法，其中，在所述柔性衬底相对所述可溶性聚合物的另一表面上制作显示器件包括：在所述柔性衬底相对所述可溶性聚合物的另一表面上沉积水氧阻挡层，并在所述水氧阻挡层相对所述柔性衬底的另一表面上制作所述显示器件。
- 如权利要求6所述的制作方法，其中，所述显示器件为发光面板。
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| CN1517749A (zh) * | 2003-01-10 | 2004-08-04 | 日本电气株式会社 | 柔性电子器件及其制造方法 |
| CN104319263A (zh) * | 2014-11-14 | 2015-01-28 | 昆山工研院新型平板显示技术中心有限公司 | 柔性显示装置的制备方法及用于制作柔性显示装置的基板 |
| CN104992944A (zh) * | 2015-05-26 | 2015-10-21 | 京东方科技集团股份有限公司 | 一种柔性显示母板及柔性显示面板的制作方法 |
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| CN1517749A (zh) * | 2003-01-10 | 2004-08-04 | 日本电气株式会社 | 柔性电子器件及其制造方法 |
| CN104319263A (zh) * | 2014-11-14 | 2015-01-28 | 昆山工研院新型平板显示技术中心有限公司 | 柔性显示装置的制备方法及用于制作柔性显示装置的基板 |
| CN104992944A (zh) * | 2015-05-26 | 2015-10-21 | 京东方科技集团股份有限公司 | 一种柔性显示母板及柔性显示面板的制作方法 |
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