WO2018058842A1 - 一种生产线设备的调度方法和装置 - Google Patents

一种生产线设备的调度方法和装置 Download PDF

Info

Publication number
WO2018058842A1
WO2018058842A1 PCT/CN2016/113666 CN2016113666W WO2018058842A1 WO 2018058842 A1 WO2018058842 A1 WO 2018058842A1 CN 2016113666 W CN2016113666 W CN 2016113666W WO 2018058842 A1 WO2018058842 A1 WO 2018058842A1
Authority
WO
WIPO (PCT)
Prior art keywords
task
module
tasks
production line
scheduling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2016/113666
Other languages
English (en)
French (fr)
Inventor
张善贵
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing NMC Co Ltd
Original Assignee
Beijing NMC Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beijing NMC Co Ltd filed Critical Beijing NMC Co Ltd
Priority to KR1020187016005A priority Critical patent/KR102055663B1/ko
Publication of WO2018058842A1 publication Critical patent/WO2018058842A1/zh
Priority to US16/197,997 priority patent/US11990355B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00—Administration; Management
    • G06Q10/06—Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
    • G06Q10/063—Operations research, analysis or management
    • G06Q10/0631—Resource planning, allocation, distributing or scheduling for enterprises or organisations
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00—Administration; Management
    • G06Q10/06—Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
    • G06Q10/063—Operations research, analysis or management
    • G06Q10/0631—Resource planning, allocation, distributing or scheduling for enterprises or organisations
    • G06Q10/06316—Sequencing of tasks or work
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form
    • G05B19/4155—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form characterised by program execution, i.e. part program or machine function execution, e.g. selection of a program
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00—Administration; Management
    • G06Q10/04—Forecasting or optimisation specially adapted for administrative or management purposes, e.g. linear programming or "cutting stock problem"
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00—Administration; Management
    • G06Q10/06—Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q50/00—Information and communication technology [ICT] specially adapted for implementation of business processes of specific business sectors, e.g. utilities or tourism
    • G06Q50/04—Manufacturing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0612—Production flow monitoring, e.g. for increasing throughput
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/34—Director, elements to supervisory
    • G05B2219/34418—Scheduler for sequential control, task planning, control sequence
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45031—Manufacturing semiconductor wafers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/30—Computing systems specially adapted for manufacturing

Definitions

  • the invention relates to the technical field of process control, in particular to a scheduling method of a production line device and a scheduling device of a production line device.
  • the cluster scheduling problem refers to a class in which the semiconductor manufacturing industry needs to use multiple transmission platforms at the same time and mount multiple process chambers, which leads to a more complicated transmission path and scheduling method of wafers in process production. problem.
  • the production capacity of equipment has become higher and higher in the production process.
  • how to design efficient and reliable scheduling algorithms is of great significance and effect for improving the production capacity of production line equipment.
  • the production line equipment scheduling algorithm is a kind of complicated NP combinatorial optimization problem. In the process of actual solution, there is no mature polynomial algorithm and optimization theory can learn from and quote, but only some specific optimization methods can be used to solve the problem according to the specific problem. .
  • the technical problem to be solved by the present invention is to provide a scheduling method for a production line device to optimize the complex scheduling requirements and increase the production capacity of the production line equipment.
  • the present invention also provides a scheduling device for a production line device to ensure the implementation and application of the above method.
  • the present invention discloses a scheduling method for a production line device, wherein
  • the production line device includes one or more function modules, the function module has a corresponding task sequence, and the task sequence includes one or more tasks, and the method includes:
  • the method further includes:
  • the step of adding a new task in the task sequence includes:
  • the function module has a corresponding state, and the state includes: an idle state, a busy state, and an unavailable state;
  • the step of adding the new task in the task sequence includes:
  • the waiting time is determined by:
  • Obtaining the time required to complete the predecessor tasks of the respective tasks is the third time
  • the first time, the second time, and the third time are totaled as the current waiting time.
  • the corresponding preset numbers of the task sequences of the respective functional modules are the same.
  • the functional module comprises an atmospheric manipulator
  • the tasks of the atmospheric manipulator include:
  • the silicon wafer is taken out from the crystal box and sent to the positioning calibration device.
  • the silicon wafer that has been calibrated by the positioning calibration device is introduced into the locking container, and the silicon wafer is taken out from the locking container and returned to the crystal cassette.
  • the function module comprises a locking container
  • the tasks of the locking container include:
  • the functional module comprises a vacuum manipulator
  • the tasks of the vacuum manipulator include:
  • the functional module comprises a process chamber
  • the tasks of the process chamber include:
  • the present invention also discloses a scheduling device for a production line device, wherein the production line device includes one or more functional modules, the functional module has a corresponding task sequence, and the task sequence includes one or more tasks.
  • the device includes:
  • a waiting time calculation module configured to separately calculate a waiting time required to execute each of the tasks in each task sequence for a task sequence of each function module
  • a target task determining module configured to determine that the task with the shortest waiting time is the target task
  • An execution module configured to execute the target task
  • the calling module is configured to invoke the waiting time calculation module after deleting the target task from the task sequence.
  • the method further includes:
  • a task adding module configured to add a new task to the task sequence after deleting the target task from the task sequence
  • the calling module is configured to invoke the waiting time calculation module after the task adding module deletes the target task from the task sequence.
  • the task adding module includes:
  • the new task gets a sub-module for obtaining a new task
  • a determining sub-module configured to determine whether the number of currently existing tasks in the task sequence reaches a corresponding preset number
  • the stopping submodule is configured to stop adding the new task in the task sequence if the number of currently existing tasks in the task sequence reaches a preset number.
  • the function module has a corresponding state, and the state includes: an idle state, a busy state, and an unavailable state;
  • the adding submodule includes:
  • the waiting time is determined by the following module:
  • a first time acquiring module configured to acquire a time when the function module enters an idle state as a first time
  • a second time acquiring module configured to acquire a time required for completing the adjustment action required for each task as a second time
  • a third time acquiring module configured to acquire a time required to complete the predecessor of each task as a third time
  • a totaling module configured to total the first time, the second time, and the third time as the current waiting time.
  • the corresponding preset numbers of the task sequences of the respective functional modules are the same.
  • the functional module comprises an atmospheric manipulator
  • the tasks of the atmospheric manipulator include:
  • the silicon wafer is taken out from the crystal box and sent to the positioning calibration device.
  • the silicon wafer that has been calibrated by the positioning calibration device is introduced into the locking container, and the silicon wafer is taken out from the locking container and returned to the crystal cassette.
  • the function module comprises a locking container
  • the tasks of the locking container include:
  • the functional module comprises a vacuum manipulator
  • the tasks of the vacuum manipulator include:
  • the functional module comprises a process chamber
  • the tasks of the process chamber include:
  • the present invention includes the following advantages:
  • the invention divides the production line equipment into a plurality of independent functional modules, and analyzes tasks to be performed in the task sequence of each module. For each functional module, the task with the shortest waiting time is always executed first. This ensures that the total waiting time of each functional module of the production line equipment is as small as possible during the scheduling process, thereby improving the scheduling efficiency and increasing the production capacity of the production line equipment.
  • Embodiment 1 is a flow chart showing the steps of Embodiment 1 of a scheduling method for a production line device according to the present invention
  • Embodiment 2 is a flow chart showing the steps of Embodiment 2 of a scheduling method of a production line device according to the present invention
  • FIG. 3 is a block diagram showing the structure of a first embodiment of a scheduling apparatus for a production line apparatus according to the present invention.
  • the heuristic algorithm is proposed relative to the optimization algorithm.
  • the optimization algorithm of a problem refers to the optimal solution for each instance of the problem.
  • the traditional heuristic algorithm mainly adopts some common local optimization ideas.
  • the calculation process of the algorithm is relatively simple, and the implementability (software programming implementation) is relatively strong.
  • the basic idea of applying the traditional heuristic algorithm to solve the cluster scheduling problem is: Some local optimization ideas, such as greedy algorithm and tabu search, are applied in the scheduling process to ensure that certain stages or certain scheduling modules in the scheduling process can save time to maximize the efficiency of the scheduling system.
  • This algorithm is an intuitive or forbidden-based algorithm that gives a feasible solution for each instance of the combinatorial optimization problem to be solved at an acceptable cost (calculating only time and space).
  • the scheduling path designed by this method is not necessarily optimal, and may be only a better solution or a feasible solution, or even a solution with poor performance.
  • this method is only for the scheduling problem with relatively small calculation scale. For the scheduling problem with complex scheduling requirements and large calculation scale, this method is difficult to apply.
  • the basic idea of the mathematical programming method is to transform the cluster scheduling problem into common graph theory problems or mathematical programming problems, and then use the existing algorithm theory (Petri net, integer programming, etc.) to establish a mathematical programming model for scheduling problems (target Functions and constraints), then use traditional mathematical programming methods (genetic algorithms, neural networks, etc.) or other mathematical tools to solve the model to achieve the purpose of solving the problem.
  • the basic idea of using mathematical programming methods to solve scheduling problems is: The cluster scheduling problem is transformed into a common graph theory problem or mathematical programming problem, and then the existing algorithm theory such as Petri net model, integer programming, etc. is used to establish the mathematical programming model of the scheduling problem (including the objective function and constraints), and then adopt The traditional mathematical programming method and other mathematical tools to solve the model to get the optimal solution of the problem.
  • the mathematical programming method Compared with the traditional heuristic algorithm, the mathematical programming method generally obtains the optimal solution of the problem, but this method also has obvious limitations: the mathematical programming method generally needs to establish a very complicated mathematical model, and the solution process of the model It is very complicated and difficult to implement by software programming. It can only be solved offline by means of software tools, which also makes the method poorly implementable and difficult to use. On the other hand, mathematical programming methods can only solve the scheduling requirements. Simple problem, this method is also difficult to use for scheduling complex problems.
  • the present invention adopts a dynamic programming based method to design a scheduling algorithm for semiconductor production line equipment.
  • One of the core concepts of the present invention is to decompose the scheduling transmission system of the device into independent functional modules, and analyze the sequence of tasks to be executed by each module in a certain time range in the future. For each module, under the constraint condition, always Perform tasks that require the shortest waiting time.
  • Embodiment 1 is a flow chart showing the steps of Embodiment 1 of a scheduling method for a production line device according to the present invention, wherein the production line device includes one or more functional modules, and the functional modules have corresponding task sequences,
  • the task sequence includes one or more tasks, and the method may specifically include the following steps:
  • Step 101 Calculate, for each task sequence of the function module, a waiting time required to execute each of the tasks in each task sequence;
  • the production line equipment may be a semiconductor process equipment such as a HardMask process equipment, an Etch equipment, or a Physical Vapor Deposition equipment.
  • the production line equipment can be divided into multiple functional independent functional modules, each of which has The corresponding task sequence, the task sequence includes the tasks to be executed by the module.
  • the functional module includes an atmospheric manipulator, and tasks to be performed in the task sequence of the atmospheric manipulator may include: removing the silicon wafer from the crystal cell to the positioning calibration device, and calibrating the silicon wafer with the calibration device. The incoming lock container is taken out, and the silicon wafer is taken out from the lock container and returned to the crystal cassette.
  • each functional module For production line equipment, optimizing the task scheduling algorithm for each functional module is a key factor in increasing equipment capacity.
  • the invention is based on the idea of dynamic programming. In the working process of the production line equipment, each functional module always prioritizes the task that requires the shortest waiting time.
  • Step 102 Determine that the task with the shortest waiting time is the target task
  • the waiting time of each task is calculated, and the task with the shortest waiting time is used as the target task to be executed first.
  • Step 103 Perform the target task.
  • Step 104 After deleting the target task from the task sequence, return the task sequence for each functional module, and separately calculate the waiting time required to execute each of the tasks in each task sequence.
  • the executed target task is deleted in the task sequence of the function module, and then the waiting time of each task in the task sequence is recalculated, and the task with the shortest waiting time is taken as the target task.
  • the invention divides the production line equipment into a plurality of independent functional modules, and analyzes tasks to be performed in the task sequence of each module. For each functional module, the task with the shortest waiting time is always executed first. This ensures that the total waiting time of each functional module of the production line equipment is as small as possible during the scheduling process, thereby improving the scheduling efficiency and increasing the production capacity of the production line equipment.
  • FIG. 2 a flow chart of the steps of Embodiment 2 of a scheduling method for a production line device according to the present invention is shown, wherein the production line device includes one or more functional modules, and the functional modules have corresponding task sequences, The task sequence includes one or more tasks, and the method is specifically To include the following steps:
  • Step 201 Calculate, for each task sequence of the function module, a waiting time required to execute each of the tasks in each task sequence;
  • the functional modules of the hard mask device can be divided into: an atmospheric manipulator, a locking container, a vacuum manipulator, and a process chamber.
  • the process chamber may include a process chamber performing the first process and a process chamber performing the second process.
  • the specific process of the hard mask device can be: the atmospheric manipulator removes the silicon wafer from the Cassette and places it on the alignment calibration device (Aligner) for positioning calibration.
  • the atmospheric manipulator removes the silicon wafer from the positioning calibration device and transfers it to the atmospherically locked locker (LoadLock).
  • the atmospheric state that is, the pressure of the locked container is equal to the atmospheric pressure.
  • the atmospheric end door of the locking container is immediately closed, and then the locking container is evacuated to a vacuum state.
  • the vacuum robot in the transfer chamber takes out the silicon wafer in the lock container and feeds it into each process chamber for the process flow, at which time the lock container is in a vacuum state.
  • the vacuum manipulator takes the silicon wafer out and puts it into the lock container, and then the atmospheric manipulator takes out the silicon wafer in the lock container and puts it into the crystal box.
  • the vacuum end door of the lock container is closed, and then the lock container is inflated to the atmosphere.
  • the tasks of the atmospheric manipulator may include:
  • the task of locking a container can include:
  • the tasks of a vacuum manipulator can include:
  • the silicon wafer in the locked container is introduced into the process chamber of the first process; 2. the silicon wafer in the process chamber of the first process is introduced into the process chamber of the second process; 3. the second process is The silicon wafer in the process chamber is introduced into the lock container.
  • the tasks of the process chamber can include:
  • Step 202 Determine that the task with the shortest waiting time is the target task
  • the waiting time is the time from the current time to the start of the task.
  • the waiting time can be determined as follows:
  • the first time, the second time, and the third time are totaled as the current waiting time.
  • the waiting time may include: a time required for the function module to complete the current task execution, an adjustment time of the function module, and a waiting time of the predecessor task.
  • the idle state refers to a state in which the function module is not performing a task, and if the function module is performing a task, the function module is defined as being in a busy state.
  • the first time is the time required for the function module to complete the currently executing task.
  • the adjustment action refers to the action required between the two tasks.
  • any two tasks of each functional module are not necessarily continuously executable. After performing a task, you may need to perform certain adjustment actions before the function module can perform the next task.
  • the predecessor task refers to the task before the task in the process flow.
  • the predecessor task of a task can be executed by the same function module or by other function modules.
  • the tasks of the vacuum manipulator include: task 1, transporting the silicon wafer from the container A to the container B; task 2, transporting the wafer container B to the container C; task 3, transporting the silicon wafer from the container C to the container A.
  • the vacuum robot performs task 1
  • the task 2 and task 3 in the task sequence can be selected. After the task 1 is completed, the vacuum robot is in the position of the container B. It can be considered that the vacuum robot can perform task 2 immediately at the position of the container B. That is, task 2 can be executed immediately following task 1.
  • the vacuum manipulator needs to move to the position of container C before starting task 3. That is, the task 3 of the vacuum manipulator cannot be executed immediately after the task 1, and the task 3 can be started after the adjustment action is performed. It can be understood that this adjustment action increases the waiting time of task 3.
  • each task consists of one or more actions, and adjustment actions can be added to the task as part of the task.
  • the tasks of the atmospheric manipulator include: task 1, taking the film from the crystal cassette to the positioning calibration device, task 2, transferring the silicon wafer that has been calibrated by the positioning calibration device into the locking container; task 3, taking the piece from the locking container Return to the crystal box.
  • the atmospheric manipulator task 1 is the first step in the process, that is, the task 1 has no predecessor task.
  • the predecessor task of task 2 is task 1, and task 2 can be executed immediately following task 1.
  • Task 3 also needs to perform the related tasks of Process 1 and Process 2 in order to be executed. which is Task 3 needs to wait for the predecessor task to complete before it can be executed.
  • Step 203 Perform the target task.
  • Step 204 After deleting the target task from the task sequence, adding a new task to the task sequence;
  • the step of adding a new task in the task sequence may include:
  • Sub-step S11 obtaining a new task
  • Sub-step S12 determining whether the number of currently existing tasks in the task sequence reaches a corresponding preset number
  • the task sequence of each function module is set in length; the length refers to the maximum number of tasks that the task sequence can set.
  • the atmospheric robot's task sequence length is 3, that is, up to 3 tasks can be set in the task sequence.
  • the corresponding preset number of task sequences of the respective functional modules is the same. That is, the preset number corresponding to each task sequence is the same.
  • the task sequence of each function module has a length of 3, that is, the number of tasks that can be set in the task sequence of each function module is 3.
  • Sub-step S13 if no, adding the new task to the task sequence
  • Sub-step S14 if yes, stopping adding the new task to the task sequence.
  • the function module has a corresponding state, and the state includes an idle state, a busy state, and an unavailable state.
  • the step of adding the new task in the task sequence includes:
  • Each function module has three states: idle state, busy state, and unavailable state.
  • the idle state means that the function module is not performing the task.
  • a busy state means that the function module is performing a task.
  • the unavailable state means that the function module cannot perform the task. For example, when a function module fails, the function module changes to an unavailable state.
  • the status of each functional module is updated in real time.
  • New tasks are added only when the function module changes from a busy state to an idle state. That is, when the function module performs a task, a new task is added to the task sequence of the function module.
  • Step 205 returning the task sequence for each functional module, and separately calculating the waiting time required to execute each of the tasks in each task sequence.
  • Steps 201 through 205 are repeated until the scheduling is completed.
  • the hard mask device is divided into four functional modules: an atmospheric manipulator, a locking container, a vacuum manipulator, and a process chamber, and the task sequences of each functional module are set to the same length.
  • the preferred execution task sequence of each function performs the task with the shortest waiting time, which ensures that the total waiting time of each functional module of the hard mask device is as small as possible during the scheduling process, thereby improving scheduling efficiency.
  • the hard mask equipment is divided into four functional modules: atmospheric manipulator, locking container, vacuum manipulator and process chamber.
  • the process chamber includes a process chamber that performs Process 1 and a process chamber that performs Process 2.
  • the number of process chambers of Process 1 is 2, Process 2
  • the number of process chambers is 2
  • the number of locked containers is 1
  • the number of positioning calibration devices is 1. Therefore, the set of hard mask devices can accommodate up to seven wafers at the same time.
  • the scheduling process of the hard mask device is to process 25 silicon wafers of one crystal box.
  • the tasks of the atmospheric manipulator may include:
  • Cyclic task sequence (1, 2, 3) loop 18 times
  • the simulation is performed with the idea that the function module preferentially executes the task with the shortest waiting time.
  • the simulation result of the atmospheric manipulator's scheduling task for 25 silicon wafers in the crystal box is as follows: the atmospheric manipulator first executes the cycle of task 1 - task 2 for 7 times, after 7 cycles.
  • the cycle of task 1 - task 2 - task 3 is performed 18 times in succession. After 18 cycles, task 3 was performed 7 times in succession.
  • the simulation result of the task performed by the atmospheric manipulator is also changed according to the device parameters of the hard mask device set at the time of simulation. For example, the number of the same function module, the time the function module performs the task, etc., will affect the simulation results.
  • Embodiment 1 of a scheduling apparatus for a production line apparatus of the present invention wherein the production line apparatus includes one or more functional modules, the functional modules having corresponding task sequences, the tasks The sequence includes one or more tasks, and the device may specifically include the following modules:
  • the waiting time calculation module 301 is configured to separately calculate a waiting time required to execute each of the tasks in each task sequence for a task sequence of each function module;
  • the target task determining module 302 is configured to determine that the task with the shortest waiting time is the target task
  • An execution module 303 configured to execute the target task
  • the calling module 304 is configured to invoke the waiting time calculation module after deleting the target task from the task sequence.
  • the invention divides the production line equipment into a plurality of independent functional modules, and analyzes tasks to be performed in the task sequence of each module. For each functional module, the task with the shortest waiting time is always executed first. This ensures that the total waiting time of each functional module of the production line equipment is as small as possible during the scheduling process, thereby improving the scheduling efficiency and increasing the production capacity of the production line equipment.
  • the device may further include:
  • a task adding module configured to add a new task to the task sequence after deleting the target task from the task sequence
  • the calling module is configured to invoke the waiting time calculation module after the task adding module deletes the target task from the task sequence.
  • the task adding module may include:
  • the new task gets a sub-module for obtaining a new task
  • a determining sub-module configured to determine whether the number of currently existing tasks in the task sequence reaches a corresponding preset number
  • the stopping submodule is configured to stop adding the new task in the task sequence if the number of currently existing tasks in the task sequence reaches a preset number.
  • the function module has a corresponding state, and the state includes an idle state, a busy state, and an unavailable state.
  • the above added submodule may include:
  • the waiting time can be determined by the following module:
  • a first time acquiring module configured to acquire a time when the function module enters an idle state as a first time
  • a second time acquiring module configured to acquire a time required for completing the adjustment action required for each task as a second time
  • a third time acquiring module configured to acquire a time required to complete the predecessor of each task as a third time
  • a totaling module configured to total the first time, the second time, and the third time as the current waiting time.
  • the corresponding preset numbers of the task sequences of the respective functional modules are the same.
  • the functional module includes an atmospheric manipulator, and the tasks of the atmospheric manipulator include:
  • the silicon wafer is taken out from the crystal box and sent to the positioning calibration device.
  • the silicon wafer that has been calibrated by the positioning calibration device is introduced into the locking container, and the silicon wafer is taken out from the locking container and returned to the crystal cassette.
  • the functional module includes a locking container, and the tasks of the locking container include:
  • the functional module includes a vacuum robot, and the tasks of the vacuum robot include:
  • the functional module includes a process chamber, and the tasks of the process chamber include:
  • the description is relatively simple, and the relevant parts can be referred to the description of the method embodiment.
  • embodiments of the invention may be provided as a method, apparatus, or computer program product. Accordingly, the present invention may take the form of an entirely hardware embodiment, an entirely software embodiment, or a combination of software and hardware. Moreover, the invention can take the form of a computer program product embodied on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) including computer usable program code.
  • computer-usable storage media including but not limited to disk storage, CD-ROM, optical storage, etc.
  • the computer program instructions can also be stored in a computer readable memory that can direct a computer or other programmable data processing terminal device to operate in a particular manner, such that the instructions stored in the computer readable memory produce an article of manufacture comprising the instruction device.
  • the instruction device implements the functions specified in one or more blocks of the flowchart or in a flow or block of the flowchart.
  • Scheduling method for a production line device and a production line device provided by the present invention
  • the scheduling device is described in detail, and the principles and implementation manners of the present invention are described in the following.
  • the description of the above embodiments is only used to help understand the method and core idea of the present invention.
  • the present invention is not limited by the scope of the present invention, and the details of the present invention are not limited by the scope of the present invention.

Landscapes

  • Business, Economics & Management (AREA)
  • Engineering & Computer Science (AREA)
  • Human Resources & Organizations (AREA)
  • Economics (AREA)
  • Strategic Management (AREA)
  • Entrepreneurship & Innovation (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Business, Economics & Management (AREA)
  • Tourism & Hospitality (AREA)
  • Theoretical Computer Science (AREA)
  • Marketing (AREA)
  • Quality & Reliability (AREA)
  • Game Theory and Decision Science (AREA)
  • Development Economics (AREA)
  • Operations Research (AREA)
  • Educational Administration (AREA)
  • Manufacturing & Machinery (AREA)
  • Automation & Control Theory (AREA)
  • General Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Primary Health Care (AREA)
  • Human Computer Interaction (AREA)
  • General Factory Administration (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Management, Administration, Business Operations System, And Electronic Commerce (AREA)

Abstract

一种生产线设备的调度方法，其中，生产线设备包括一个或多个功能模块，功能模块具有对应的任务序列，任务序列中包括一个或多个任务，所述的方法包括：针对各个功能模块的任务序列，分别计算各个任务序列中执行每个任务所需的等待时间（101）；确定当前等待时间最短的任务为目标任务（102）；执行目标任务（103）；从任务序列中删除目标任务后，返回针对各个功能模块的任务序列，分别计算各个任务序列中执行每个任务所需的等待时间的步骤（104）。所述方法将生产线设备划分成多个独立的功能模块，对于每个功能模块，永远先执行需要等待时间最短的任务，这样可保证在调度过程中，生产线设备的各个功能模块总的等待时间尽可能少，从而提高调度效率。

Description

一种生产线设备的调度方法和装置 技术领域
本发明涉及工艺控制技术领域，特别是涉及一种生产线设备的调度方法和一种生产线设备的调度装置。
背景技术
集簇调度问题是指半导体制造行业因工艺生产需求须同时使用多个传输平台、挂载多个工艺腔室，从而导致工艺生产中硅片(wafer)的传输路径与调度方法更加复杂的一类问题。近年来，随着半导体行业制造技术的快速发展，在生产过程中对设备的产能要求也越来越高。针对不同生产工艺的生产线设备，如何设计高效可靠的调度算法，对于提高生产线设备的产能有着非常重要的意义与作用。
生产线设备调度算法作为一类比较复杂的NP组合优化问题，在实际解决的过程中并没有成熟的多项式算法及优化理论可以借鉴和引用，而只能根据具体的问题采用一些特定的优化方法进行求解。
因此，目前需要本领域技术人员迫切解决的一个技术问题就是：提供一种调度方法以用于复杂的调度需求，提高生产线设备的产能。
发明内容
本发明所要解决的技术问题是提供一种生产线设备的调度方法，以实现对复杂调度需求的优化，提高生产线设备的产能。
相应的，本发明还提供了一种生产线设备的调度装置，用以保证上述方法的实现及应用。
为了解决上述问题，本发明公开了一种生产线设备的调度方法，其中， 所述生产线设备包括一个或多个功能模块，所述功能模块具有对应的任务序列，所述任务序列中包括一个或多个任务，所述的方法包括：
针对各个功能模块的任务序列，分别计算各个任务序列中执行每个所述任务所需的等待时间；
确定当前等待时间最短的任务为目标任务；
执行所述目标任务；
从所述任务序列中删除所述目标任务后，返回所述针对各个功能模块的任务序列，分别计算各个任务序列中执行每个所述任务所需的等待时间的步骤。
优选的，在所述从所述任务序列中删除所述目标任务的步骤后，所述的方法还包括：
在所述任务序列中增加新任务。
优选的，所述在所述任务序列中增加新任务的步骤包括：
获得新任务；
判断所述任务序列中当前已有任务的数量是否达到对应的预设数量；
若否，则在所述任务序列中增加所述新任务；
若是，则停止在所述任务序列中增加所述新任务。
优选的，所述功能模块具有对应的状态，所述状态包括：空闲状态、忙碌状态和不可用状态；
所述在所述任务序列中增加所述新任务的步骤包括：
若所述功能模块处于空闲状态，则在所述任务序列中增加所述新任务；
若所述功能模块处于忙碌状态或不可用状态时，则停止在所述任务序列中增加所述新任务。
优选的，所述等待时间通过如下方式确定：
获取所述功能模块进入空闲状态的时间为第一时间；
获取完成所述各个任务所需的调整动作所需的时间为第二时间；
获取完成所述各个任务的前置任务所需的时间为第三时间；
合计所述第一时间、第二时间和第三时间为当前等待时间。
优选的，所述各个功能模块的任务序列的对应的预设数量相同。
优选的，所述功能模块包括大气机械手，所述大气机械手的任务包括：
从晶盒取出硅片传给定位校准设备、将定位校准设备校准完成的硅片传入加锁容器、从加锁容器中取出硅片传回晶盒。
优选的，所述功能模块包括加锁容器，所述加锁容器的任务包括：
充气至大气状态、抽气至真空状态、硅片传出或者传入。
优选的，所述功能模块包括真空机械手，所述真空机械手的任务包括：
将加锁容器中的硅片传入第一工艺的工艺腔室、将第一工艺的工艺腔室中的硅片传入第二工艺的工艺腔室、将第二工艺的工艺腔室中的硅片传入加锁容器。
优选的，所述功能模块包括工艺腔室，所述工艺腔室的任务包括：
开启腔室阀门、执行硅片的工艺流程、关闭腔室阀门。
同时，本发明还公开了一种生产线设备的调度装置，其中，所述生产线设备包括一个或多个功能模块，所述功能模块具有对应的任务序列，所述任务序列中包括一个或多个任务，所述的装置包括：
等待时间计算模块，用于针对各个功能模块的任务序列，分别计算各个任务序列中执行每个所述任务所需的等待时间；
目标任务确定模块，用于确定当前等待时间最短的任务为目标任务；
执行模块，用于执行所述目标任务；
调用模块，用于从所述任务序列中删除所述目标任务后，调用所述等待时间计算模块。
优选的，还包括：
任务增加模块，用于从所述任务序列中删除所述目标任务后，在所述任务序列中增加新任务；
所述调用模块，用于当所述任务增加模块从所述任务序列中删除所述目标任务后，调用所述等待时间计算模块。
优选的，所述任务增加模块包括：
新任务获得子模块，用于获得新任务；
判断子模块，用于判断所述任务序列中当前已有任务的数量是否达到对应的预设数量；
增加子模块，用于若所述任务序列中当前已有任务的数量未达到预设数量，则在所述任务序列中增加所述新任务；
停止子模块，用于若所述任务序列中当前已有任务的数量达到预设数量，则停止在所述任务序列中增加所述新任务。
优选的，所述功能模块具有对应的状态，所述状态包括：空闲状态、忙碌状态和不可用状态；
所述增加子模块包括：
增加单元，用于若所述功能模块处于空闲状态，则在所述任务序列中增加所述新任务；
停止单元，用于若所述功能模块处于忙碌状态或不可用状态时，则停止在所述任务序列中增加所述新任务。
优选的，所述等待时间通过如下模块确定：
第一时间获取模块，用于获取所述功能模块进入空闲状态的时间为第一时间；
第二时间获取模块，用于获取完成所述各个任务所需的调整动作所需的时间为第二时间；
第三时间获取模块，用于获取完成所述各个任务的前置任所需的时间为第三时间；
合计模块，用于合计所述第一时间、第二时间和第三时间为当前等待时间。
优选的，所述各个功能模块的任务序列的对应的预设数量相同。
优选的，所述功能模块包括大气机械手，所述大气机械手的任务包括：
从晶盒取出硅片传给定位校准设备、将定位校准设备校准完成的硅片传入加锁容器、从加锁容器中取出硅片传回晶盒。
优选的，所述功能模块包括加锁容器，所述加锁容器的任务包括：
充气至大气状态、抽气至真空状态、硅片传出或者传入。
优选的，所述功能模块包括真空机械手，所述真空机械手的任务包括：
将加锁容器中的硅片传入第一工艺的工艺腔室、将第一工艺的工艺腔室中的硅片传入第二工艺的工艺腔室、将第二工艺的工艺腔室中的硅片传入加锁容器。
优选的，所述功能模块包括工艺腔室，所述工艺腔室的任务包括：
开启腔室阀门、执行硅片的工艺流程、关闭腔室阀门。
与现有技术相比，本发明包括以下优点：
本发明将生产线设备划分成多个独立的功能模块，分析各个模块的任务序列中即将要执行的任务。对于每个功能模块，永远先执行需要等待时间最短的任务，这样可保证在调度过程中，生产线设备的各个功能模块总的等待时间尽可能少，从而提高调度效率，进而提高生产线设备的产能。
附图说明
图1是本发明的一种生产线设备的调度方法实施例1的步骤流程图；
图2是本发明的一种生产线设备的调度方法实施例2的步骤流程图；
图3是本发明一种生产线设备的调度装置实施例1的结构框图。
具体实施方式
为使本发明的上述目的、特征和优点能够更加明显易懂，下面结合附图和具体实施方式对本发明作进一步详细的说明。
对于一些计算规模比较小，调度需求不是很复杂的调度问题，可以采用传统的启发式方法或数学规划的方法进行求解。
启发式算法，是相对于最优化算法提出的，一个问题的最优化算法是指求得该问题每个实例的最优解。传统的启发式算法主要采用一些常用的局部优化的思想，算法的计算过程比较简单，可实施性(软件编程实现)比较强，应用传统的启发式算法解决集簇调度问题的基本思想是：在调度过程中应用一些局部优化的思想，如贪心算法、禁忌算法(Tabu Search)，保证调度过程中某些阶段或某些特定的调度模块能够最大限度地节省时间，从而局部地提高调度系统的效率，达到解决问题的目的。这种算法是一种基于直观或禁言构造的算法，在可接受的花费(只计算时间和空间)下给出待解决组合优化问题每一个实例的一个可行解，该可行解与最优解的偏离程度事先不能预计，因此，采取这种方法设计的调度路径不一定是最优的，可能只是一种较优解或可行解，甚至是一种性能很差的解。而且这种方法只针对计算规模比较小的调度问题，对于调度需求复杂，计算规模很大的调度问题，该方法很难应用。
数学规划方法的基本思想是：将集簇调度问题转化成常见的图论问题或者数学规划问题，然后采用现有的算法理论(Petri网、整数规划等)建立起调度问题的数学规划模型(目标函数以及约束条件)，再采用传统的数学规划求解方法(遗传算法、神经网络等)或借助其它的数学工具来求解模型，从而达到解决问题的目的。采用数学规划方法解决调度问题的基本思想是：将 集簇调度问题转化成常见的图论问题或者数学规划问题，然后采用现有的算法理论如Petri网模型、整数规划等建立起调度问题的数学规划模型(包括目标函数以及约束条件)，再采用传统的数学规划求解方法并借助其它的数学工具来求解模型，从而得到问题的最优解。与传统的启发式算法相比，数学规划方法一般可得到问题的最优解，但是这种方法也存在非常明显的局限性：数学规划方法一般需要建立非常复杂的数学模型，并且模型的求解过程非常复杂，很难采用软件编程来实现，只能借助软件工具来进行离线求解，这也导致该方法的可实施性很差，不易使用；另一方面，数学规划方法一般只能解决调度需求比较简单的问题，对于调度比较复杂的问题，这种方法也很难使用。
针对现有的调度算法设计方法在实际应用中存在的一些不足，本发明采用了一种基于动态规划的方法，来设计半导体生产线设备的调度算法。
本发明的核心构思之一在于，将设备的调度传输系统分解成各个独立的功能模块，分析各个模块在未来一定时间范围内将要执行的任务序列，对于每个模块，在约束条件下，永远先执行需要等待时间最短的任务。
参照图1，示出了本发明的一种生产线设备的调度方法实施例1的步骤流程图，其中所述生产线设备包括一个或多个功能模块，所述功能模块具有对应的任务序列，所述任务序列中包括一个或多个任务，所述的方法具体可以包括如下步骤：
步骤101，针对各个功能模块的任务序列，计算各个任务序列中执行每个所述任务所需的等待时间；
生产线设备可以是硬掩膜(HardMask)工艺设备、刻蚀(Etch)设备、物理气相沉积(Physical Vapor Deposition)设备等半导体工艺设备。
生产线设备可以划分为多个功能独立的功能模块，每个功能模块都具有 对应的任务序列，任务序列中包括该模块即将执行的任务。例如，在硬掩膜工艺设备中，功能模块包括大气机械手，大气机械手的任务序列中即将执行的任务可以包括：从晶盒取出硅片传给定位校准设备、将定位校准设备校准完成的硅片传入加锁容器、从加锁容器中取出硅片传回晶盒。
对生产线设备而言，优化各个功能模块的任务调度算法是提高设备产能的关键因素。本发明基于动态规划的思想，在生产线设备的工作过程中，各个功能模块永远优先执行需要等待时间最短的任务。
步骤102，确定当前等待时间最短的任务为目标任务；
在功能模块的任务序列中，计算各个任务的等待时间，将等待时间最短的任务作为功能最先执行的目标任务。
步骤103，执行所述目标任务；
步骤104，从所述任务序列中删除所述目标任务后，返回所述针对各个功能模块的任务序列，分别计算各个任务序列中执行每个所述任务所需的等待时间的步骤。
功能模块开始执行目标任务后，在该功能模块的任务序列中将已执行的目标任务删除，然后重新计算任务序列中各个任务的等待时间，将等待时间最短的任务作为目标任务。
本发明将生产线设备划分成多个独立的功能模块，分析各个模块的任务序列中即将要执行的任务。对于每个功能模块，永远先执行需要等待时间最短的任务，这样可保证在调度过程中，生产线设备的各个功能模块总的等待时间尽可能少，从而提高调度效率，进而提高生产线设备的产能。
参照图2，示出了本发明的一种生产线设备的调度方法实施例2的步骤流程图，其中所述生产线设备包括一个或多个功能模块，所述功能模块具有对应的任务序列，所述任务序列中包括一个或多个任务，所述的方法具体可 以包括如下步骤：
步骤201，针对各个功能模块的任务序列，分别计算各个任务序列中执行每个所述任务所需的等待时间；
在本发明中，以生产线设备为硬掩膜设备为例进行说明。
具体的，硬掩膜设备的功能模块可以划分为：大气机械手、加锁容器、真空机械手、工艺腔室。其中，工艺腔室可以包括执行第一工艺的工艺腔室和执行第二工艺的工艺腔室。
硬掩膜设备的具体工艺流程可以为：大气机械手从晶盒(Cassette)里取出硅片并放在定位校准设备(Aligner)上进行定位校准。
完成校准后，大气机械手再将硅片从定位校准设备上取下，并传送到处于大气状态的加锁容器(LoadLock)中。大气状态，即加锁容器的压强与大气压强相等。
加锁容器被放入硅片后，立即关闭加锁容器的大气端门，然后对加锁容器进行抽气至真空状态。
传输腔室里的真空机械手取出加锁容器中的硅片，并送入各个工艺腔室进行工艺流程，此时加锁容器处于真空状态。
当硅片在工艺腔室中完成相关工艺后，真空机械手再将硅片取出并放入加锁容器中，然后大气机械手把加锁容器中的硅片取出，并放入晶盒。
硅片从加锁容器取出后，立即关闭加锁容器的真空端门，然后对加锁容器充气至大气状态。
其中，所述大气机械手的任务可以包括：
1、从晶盒取片传给定位校准设备；2、将定位校准设备校准完成的硅片传入加锁容器；3、从加锁容器中取片传回晶盒。
加锁容器的任务可以包括：
1、充气至大气状态；2、抽气至真空状态；3、硅片传出或者传入。
真空机械手的任务可以包括：
1、将加锁容器中的硅片传入第一工艺的工艺腔室；2、将第一工艺的工艺腔室中的硅片传入第二工艺的工艺腔室；3、将第二工艺的工艺腔室中的硅片传入加锁容器。
工艺腔室的任务可以包括：
1开启腔室阀门；2、执行硅片的工艺流程；3、关闭腔室阀门。其中，不同工艺的工艺腔室对硅片执行相应的工艺流程。
本领域技术人员应该可以理解，功能模块的划分和各个功能模块的任务设定仅仅是本发明的示例，本领域技术人员可以采用其他划分方式功能模块，采用其他方式设定模块的任务，本发明在此不作限制。
步骤202，确定当前等待时间最短的任务为目标任务；
等待时间是指当前时刻到任务可以开始执行的时间。
在本发明中，所述等待时间可以通过如下方式确定：
1)获取所述功能模块进入空闲状态的时间为第一时间；
2)获取完成所述各个任务所需的调整动作所需的时间为第二时间；
3)获取完成所述各个任务的前置任务所需的时间为第三时间；
4)合计所述第一时间、第二时间和第三时间为当前等待时间。
在本发明中，等待时间可以包括：功能模块完成当前执行任务所需的时间，功能模块的调整时间，以及前置任务的等候时间。
空闲状态是指功能模块不在执行任务的状态，假如功能模块正在执行任务，则功能模块定义为处于忙碌状态。第一时间即功能模块完成当前执行的任务所需的时间。
调整动作是指两个任务之间所需的动作。实际上，每个功能模块的任意两个任务不一定是能够连续执行的。执行完成一个任务后，可能需要功能模块执行一定的调整动作后，才能执行下一个任务。
前置任务是指在工艺流程上在该任务之前的任务，一个任务的前置任务可以是同一个功能模块所执行的，也可以是其他功能模块所执行的。
以下，以示例对调整动作所需的时间进一步进行说明。
例如：真空机械手的任务包括：任务1、将硅片从容器A搬运到容器B；任务2、将硅片容器B搬运到容器C；任务3、将硅片从容器C搬运到容器A。
如果容器B的数量为2，当真空机械手执行完成任务1后，任务序列中有任务2和任务3可以选择。在执行完任务1后，真空机械手在容器B的位置。可以认为，真空机械手可以在容器B的位置马上执行任务2。即任务2可以紧跟任务1执行。
而如果要执行任务3的话，真空机械手需要移动到容器C的位置后，才能开始执行任务3。即真空机械手的任务3不能紧跟任务1执行，而需要在执行调整动作后才能开始执行任务3。可以理解，这个调整动作增加了任务3的等待时间。
需要说明的是，调整动作根据任务设定的不同也会有所不同。实际上，每个任务都是由一个或多个动作组成的，调整动作也可以加入到任务中，作为任务的一部分。
以下，以示例对前置任务所需的时间进一步进行说明。
例如，大气机械手的任务包括：任务1、从晶盒取片传给定位校准设备、任务2、将定位校准设备校准完成的硅片传入加锁容器；任务3、从加锁容器中取片传回晶盒。
根据上述的硬掩膜设备的具体工艺流程可以知道，大气机械手任务1是工艺上的第一个步骤，即任务1没有前置任务。任务2的前置任务是任务1，任务2可以紧跟任务1执行。
而任务3还需要依次进行工艺1和工艺2的相关任务后才能被执行。即 任务3需要等待前置任务完成后才能被执行。
步骤203，执行所述目标任务；
步骤204，从所述任务序列中删除所述目标任务后，在所述任务序列中增加新任务；
在本发明中，所述在所述任务序列中增加新任务的步骤可以包括：
子步骤S11，获得新任务；
获得功能模块即将要执行的新任务；
子步骤S12，判断所述任务序列中当前已有任务的数量是否达到对应的预设数量；
具体的，每个功能模块的任务序列设定了长度；长度是指任务序列可设置的任务的最大数量。例如，大气机械手的任务序列长度为3，即任务序列中最多可设置3个任务。
在获得新任务后，如果任务序列中已有任务数量已经达到预设数量，则停止在任务序列中添加该新任务。如果任务序列中已有任务数量未达到预设数量，则在任务序列中添加该新任务。
在本发明的一种优选示例中，所述各个功能模块的任务序列的对应的预设数量相同。亦即是每个任务序列对应的预设数量是相同的。例如，各个功能模块的任务序列的长度都为3，即各个功能模块的任务序列中可设置的任务数量都为3。
子步骤S13，若否，则在所述任务序列中增加所述新任务；
子步骤S14，若是，则停止在所述任务序列中增加所述新任务。
进一步的，在本发明中，所述功能模块具有对应的状态，所述状态包括：空闲状态、忙碌状态和不可用状态。
所述在所述任务序列中增加所述新任务的步骤包括：
若所述功能模块处于空闲状态，则在所述任务序列中增加所述新任务；
若所述功能模块处于忙碌状态或不可用状态时，则停止在所述任务序列中增加所述新任务。
每个功能模块具有三种状态：空闲状态、忙碌状态、不可用状态。空闲状态，是指功能模块不在执行任务。忙碌状态，是指功能模块正在执行任务。不可用状态是指功能模块不能执行任务。例如，功能模块故障时，则功能模块变化为不可用状态。
在生产线设备调度过程中，各个功能模块的状态实时更新。
若功能模块处于空闲状态，则在功能模块的任务序列中增加新任务；
若功能模块处于忙碌状态或不可用状态时，则停止在功能模块的任务序列中增加新任务。
只有当功能模块从忙碌状态变化到空闲状态后，才增加新任务。即当功能模块执行完成一个任务后，才在功能模块的任务序列中增加新任务。
步骤205，返回所述针对各个功能模块的任务序列，分别计算各个任务序列中执行每个所述任务所需的等待时间的步骤。
重复步骤201至步骤205直至调度完成。
在本发明中，将硬掩膜设备划分为大气机械手、加锁容器、真空机械手、工艺腔室这4个功能模块，每个功能模块的任务序列都设置为相同的长度。在调度过程中，各个功能的优选执行任务序列中等待时间最短的任务，这样可保证在调度过程中，硬掩膜设备的各个功能模块总的等待时间尽可能少，从而提高调度效率。
以下，以根据本发明的功能模块的任务的仿真结果进行说明。
在硬掩膜设备的仿真实验中，硬掩膜设备划分为大气机械手、加锁容器、真空机械手、工艺腔室这4个功能模块。工艺腔室包括：执行工艺1的工艺腔室和执行工艺2的工艺腔室。其中工艺1的工艺腔室的数量为2，工艺2 的工艺腔室的数量为2，加锁容器的数量为1，定位校准设备的数量为1。因此，该套硬掩膜设备最多可同时容纳的硅片数量为7片。在晶盒容量为25片时，硬掩膜设备的调度过程即是对一个晶盒的25个硅片进行工艺加工。
在仿真实验中，为方便描述，将功能模块的任务以编号表示。
例如，所述大气机械手的任务可以包括：
1、从晶盒取片传给定位校准设备；
2、将定位校准设备校准完成的硅片传入加锁容器；
3、从加锁容器中取片传回晶盒。
仿真结果为：
初始任务序列：(1，2，1，2，1，2，1，2，1，2，1，2，1，2)
循环任务序列：(1，2，3)循环18次
结束任务序列：(3，3，3，3，3，3，3)
在按本发明的方法进行仿真，即以功能模块优先执行等待时间最短的任务的思路进行仿真。大气机械手对晶盒中25块硅片的调度任务的仿真结果为：大气机械手首先连续执行7次任务1-任务2的循环，7次循环后。
连续执行18次任务1-任务2-任务3的循环。18次循环后，连续执行7次任务3。
上述内容仅是本发明中的一种示例，大气机械手执行的任务的仿真结果，还会根据仿真时设定的硬掩膜设备的设备参数进行相应的变化。例如，同一功能模块的数量、功能模块执行任务的时间等，都会影响仿真结果。
需要说明的是，对于方法实施例，为了简单描述，故将其都表述为一系列的动作组合，但是本领域技术人员应该知悉，本发明并不受所描述的动作顺序的限制，因为依据本发明，某些步骤可以采用其他顺序或者同时进行。其次，本领域技术人员也应该知悉，说明书中所描述的实施例均属于优选实 施例，所涉及的动作并不一定是本发明所必须的。
参照图3，示出了本发明的一种生产线设备的调度装置实施例1的结构框图，其中所述生产线设备包括一个或多个功能模块，所述功能模块具有对应的任务序列，所述任务序列中包括一个或多个任务，所述的装置具体可以包括如下模块：
等待时间计算模块301，用于针对各个功能模块的任务序列，分别计算各个任务序列中执行每个所述任务所需的等待时间；
目标任务确定模块302，用于确定当前等待时间最短的任务为目标任务；
执行模块303，用于执行所述目标任务；
调用模块304，用于从所述任务序列中删除所述目标任务后，调用所述等待时间计算模块。
本发明将生产线设备划分成多个独立的功能模块，分析各个模块的任务序列中即将要执行的任务。对于每个功能模块，永远先执行需要等待时间最短的任务，这样可保证在调度过程中，生产线设备的各个功能模块总的等待时间尽可能少，从而提高调度效率，进而提高生产线设备的产能。
在本发明中，所述的装置还可以包括：
任务增加模块，用于从所述任务序列中删除所述目标任务后，在所述任务序列中增加新任务；
所述调用模块，用于当所述任务增加模块从所述任务序列中删除所述目标任务后，调用所述等待时间计算模块。
在本发明中，所述任务增加模块可以包括：
新任务获得子模块，用于获得新任务；
判断子模块，用于判断所述任务序列中当前已有任务的数量是否达到对应的预设数量；
增加子模块，用于若所述任务序列中当前已有任务的数量未达到预设数量，则在所述任务序列中增加所述新任务；
停止子模块，用于若所述任务序列中当前已有任务的数量达到预设数量，则停止在所述任务序列中增加所述新任务。
在本发明中，所述功能模块具有对应的状态，所述状态包括：空闲状态、忙碌状态和不可用状态。
在这种情况下，上述增加子模块可以包括：
增加单元，用于若所述功能模块处于空闲状态，则在所述任务序列中增加所述新任务；
停止单元，用于若所述功能模块处于忙碌状态或不可用状态时，则停止在所述任务序列中增加所述新任务。
在本发明中，所述等待时间可以通过如下模块确定：
第一时间获取模块，用于获取所述功能模块进入空闲状态的时间为第一时间；
第二时间获取模块，用于获取完成所述各个任务所需的调整动作所需的时间为第二时间；
第三时间获取模块，用于获取完成所述各个任务的前置任所需的时间为第三时间；
合计模块，用于合计所述第一时间、第二时间和第三时间为当前等待时间。
在本发明中，所述各个功能模块的任务序列的对应的预设数量相同。
在本发明中，所述功能模块包括大气机械手，所述大气机械手的任务包括：
从晶盒取出硅片传给定位校准设备、将定位校准设备校准完成的硅片传入加锁容器、从加锁容器中取出硅片传回晶盒。
在本发明中，所述功能模块包括加锁容器，所述加锁容器的任务包括：
充气至大气状态、抽气至真空状态、硅片传出或者传入。
在本发明中，所述功能模块包括真空机械手，所述真空机械手的任务包括：
将加锁容器中的硅片传入第一工艺的工艺腔室、将第一工艺的工艺腔室中的硅片传入第二工艺的工艺腔室、将第二工艺的工艺腔室中的硅片传入加锁容器。
在本发明中，所述功能模块包括工艺腔室，所述工艺腔室的任务包括：
开启腔室阀门、执行硅片的工艺流程、关闭腔室阀门。
对于装置实施例而言，由于其与方法实施例基本相似，所以描述的比较简单，相关之处参见方法实施例的部分说明即可。
本说明书中的各个实施例均采用递进的方式描述，每个实施例重点说明的都是与其他实施例的不同之处，各个实施例之间相同相似的部分互相参见即可。
本领域内的技术人员应明白，本发明的实施例可提供为方法、装置、或计算机程序产品。因此，本发明可采用完全硬件实施例、完全软件实施例、或结合软件和硬件方面的实施例的形式。而且，本发明可采用在一个或多个其中包含有计算机可用程序代码的计算机可用存储介质(包括但不限于磁盘存储器、CD-ROM、光学存储器等)上实施的计算机程序产品的形式。
本发明是参照根据本发明的方法、终端设备(系统)、和计算机程序产品的流程图和/或方框图来描述的。应理解可由计算机程序指令实现流程图和/或方框图中的每一流程和/或方框、以及流程图和/或方框图中的流程和/或方框的结合。可提供这些计算机程序指令到通用计算机、专用计算机、嵌入式处理机或其他可编程数据处理终端设备的处理器以产生一个机器，使 得通过计算机或其他可编程数据处理终端设备的处理器执行的指令产生用于实现在流程图一个流程或多个流程和/或方框图一个方框或多个方框中指定的功能的装置。
这些计算机程序指令也可存储在能引导计算机或其他可编程数据处理终端设备以特定方式工作的计算机可读存储器中，使得存储在该计算机可读存储器中的指令产生包括指令装置的制造品，该指令装置实现在流程图一个流程或多个流程和/或方框图一个方框或多个方框中指定的功能。
这些计算机程序指令也可装载到计算机或其他可编程数据处理终端设备上，使得在计算机或其他可编程终端设备上执行一系列操作步骤以产生计算机实现的处理，从而在计算机或其他可编程终端设备上执行的指令提供用于实现在流程图一个流程或多个流程和/或方框图一个方框或多个方框中指定的功能的步骤。
尽管已描述了本发明的优选实施例，但本领域内的技术人员一旦得知了基本创造性概念，则可对这些实施例做出另外的变更和修改。所以，所附权利要求意欲解释为包括优选实施例以及落入本发明范围的所有变更和修改。
最后，还需要说明的是，在本文中，诸如第一和第二等之类的关系术语仅仅用来将一个实体或者操作与另一个实体或操作区分开来，而不一定要求或者暗示这些实体或操作之间存在任何这种实际的关系或者顺序。而且，术语“包括”、“包含”或者其任何其他变体意在涵盖非排他性的包含，从而使得包括一系列要素的过程、方法、物品或者终端设备不仅包括那些要素，而且还包括没有明确列出的其他要素，或者是还包括为这种过程、方法、物品或者终端设备所固有的要素。在没有更多限制的情况下，由语句“包括一个……”限定的要素，并不排除在包括所述要素的过程、方法、物品或者终端设备中还存在另外的相同要素。
以上对本发明所提供的一种生产线设备的调度方法和一种生产线设备 的调度装置，进行了详细介绍，本文中应用了具体个例对本发明的原理及实施方式进行了阐述，以上实施例的说明只是用于帮助理解本发明的方法及其核心思想；同时，对于本领域的一般技术人员，依据本发明的思想，在具体实施方式及应用范围上均会有改变之处，综上所述，本说明书内容不应理解为对本发明的限制。

Claims (20)

  1. 一种生产线设备的调度方法，其特征在于，所述生产线设备包括一个或多个功能模块，所述功能模块具有对应的任务序列，所述任务序列中包括一个或多个任务，所述的方法包括：
    针对各个功能模块的任务序列，分别计算各个任务序列中执行每个所述任务所需的等待时间；
    确定当前等待时间最短的任务为目标任务；
    执行所述目标任务；
    从所述任务序列中删除所述目标任务后，返回所述针对各个功能模块的任务序列，分别计算各个任务序列中执行每个所述任务所需的等待时间的步骤。
  2. 根据权利要求1所述的生产线设备的调度方法，其特征在于，在所述从所述任务序列中删除所述目标任务的步骤后，所述的方法还包括：
    在所述任务序列中增加新任务。
  3. 根据权利要求2所述的生产线设备的调度方法，其特征在于，所述在所述任务序列中增加新任务的步骤包括：
    获得新任务；
    判断所述任务序列中当前已有任务的数量是否达到对应的预设数量；
    若否，则在所述任务序列中增加所述新任务；
    若是，则停止在所述任务序列中增加所述新任务。
  4. 根据权利要求2所述的生产线设备的调度方法，其特征在于，所述功能模块具有对应的状态，所述状态包括：空闲状态、忙碌状态和不可用状态；
    所述在所述任务序列中增加所述新任务的步骤包括：
    若所述功能模块处于空闲状态，则在所述任务序列中增加所述新任务；
    若所述功能模块处于忙碌状态或不可用状态时，则停止在所述任务序列中增加所述新任务。
  5. 根据权利要求4所述的生产线设备的调度方法，其特征在于，所述等待时间通过如下方式确定：
    获取所述功能模块进入空闲状态的时间为第一时间；
    获取完成所述各个任务所需的调整动作所需的时间为第二时间；
    获取完成所述各个任务的前置任务所需的时间为第三时间；
    合计所述第一时间、第二时间和第三时间为当前等待时间。
  6. 根据权利要求3所述的生产线设备的调度方法，其特征在于，所述各个功能模块的任务序列的对应的预设数量相同。
  7. 根据权利要求1所述的，其特征在于，所述功能模块包括大气机械手，所述大气机械手的任务包括：
    从晶盒取出硅片传给定位校准设备、将定位校准设备校准完成的硅片传入加锁容器、从加锁容器中取出硅片传回晶盒。
  8. 根据权利要求1所述的生产线设备的调度方法，其特征在于，所述功能模块包括加锁容器，所述加锁容器的任务包括：
    充气至大气状态、抽气至真空状态、硅片传出或者传入。
  9. 根据权利要求1所述的生产线设备的调度方法，其特征在于，所述功能模块包括真空机械手，所述真空机械手的任务包括：
    将加锁容器中的硅片传入第一工艺的工艺腔室、将第一工艺的工艺腔室 中的硅片传入第二工艺的工艺腔室、将第二工艺的工艺腔室中的硅片传入加锁容器。
  10. 根据权利要求1所述的生产线设备的调度方法，其特征在于，所述功能模块包括工艺腔室，所述工艺腔室的任务包括：
    开启腔室阀门、执行硅片的工艺流程、关闭腔室阀门。
  11. 一种生产线设备的调度装置，其特征在于，所述生产线设备包括一个或多个功能模块，所述功能模块具有对应的任务序列，所述任务序列中包括一个或多个任务，所述的装置包括：
    等待时间计算模块，用于针对各个功能模块的任务序列，分别计算各个任务序列中执行每个所述任务所需的等待时间；
    目标任务确定模块，用于确定当前等待时间最短的任务为目标任务；
    执行模块，用于执行所述目标任务；
    调用模块，用于从所述任务序列中删除所述目标任务后，调用所述等待时间计算模块。
  12. 根据权利要求11所述的生产线设备的调度装置，其特征在于，还包括：
    任务增加模块，用于从所述任务序列中删除所述目标任务后，在所述任务序列中增加新任务；
    所述调用模块，用于当所述任务增加模块从所述任务序列中删除所述目标任务后，调用所述等待时间计算模块。
  13. 根据权利要求12所述的生产线设备的调度装置，其特征在于，所述任务增加模块包括：
    新任务获得子模块，用于获得新任务；
    判断子模块，用于判断所述任务序列中当前已有任务的数量是否达到对应的预设数量；
    增加子模块，用于若所述任务序列中当前已有任务的数量未达到预设数量，则在所述任务序列中增加所述新任务；
    停止子模块，用于若所述任务序列中当前已有任务的数量达到预设数量，则停止在所述任务序列中增加所述新任务。
  14. 根据权利要求12所述的生产线设备的调度装置，其特征在于，所述功能模块具有对应的状态，所述状态包括：空闲状态、忙碌状态和不可用状态；
    所述任务增加模块包括：
    增加单元，用于若所述功能模块处于空闲状态，则在所述任务序列中增加所述新任务；
    停止单元，用于若所述功能模块处于忙碌状态或不可用状态时，则停止在所述任务序列中增加所述新任务。
  15. 根据权利要求14所述的生产线设备的调度装置，其特征在于，所述等待时间通过如下模块确定：
    第一时间获取模块，用于获取所述功能模块进入空闲状态的时间为第一时间；
    第二时间获取模块，用于获取完成所述各个任务所需的调整动作所需的时间为第二时间；
    第三时间获取模块，用于获取完成所述各个任务的前置任务所需的时间为第三时间；
    合计模块，用于合计所述第一时间、第二时间和第三时间为当前等待时间。
  16. 根据权利要求13所述的生产线设备的调度装置，其特征在于，所述各个功能模块的任务序列的对应的预设数量相同。
  17. 根据权利要求11所述的生产线设备的调度装置，其特征在于，所述功能模块包括大气机械手，所述大气机械手的任务包括：
    从晶盒取出硅片传给定位校准设备、将定位校准设备校准完成的硅片传入加锁容器、从加锁容器中取出硅片传回晶盒。
  18. 根据权利要求11所述的生产线设备的调度装置，其特征在于，所述功能模块包括加锁容器，所述加锁容器的任务包括：
    充气至大气状态、抽气至真空状态、硅片传出或者传入。
  19. 根据权利要求11所述的生产线设备的调度装置，其特征在于，所述功能模块包括真空机械手，所述真空机械手的任务包括：
    将加锁容器中的硅片传入第一工艺的工艺腔室、将第一工艺的工艺腔室中的硅片传入第二工艺的工艺腔室、将第二工艺的工艺腔室中的硅片传入加锁容器。
  20. 根据权利要求11所述的生产线设备的调度装置，其特征在于，所述功能模块包括工艺腔室，所述工艺腔室的任务包括：
    开启腔室阀门、执行硅片的工艺流程、关闭腔室阀门。
PCT/CN2016/113666 2016-09-28 2016-12-30 一种生产线设备的调度方法和装置 Ceased WO2018058842A1 (zh)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020187016005A KR102055663B1 (ko) 2016-09-28 2016-12-30 생산 라인 설비의 스케쥴링 방법 및 장치
US16/197,997 US11990355B2 (en) 2016-09-28 2018-11-21 Method and system for scheduling apparatuses on production line

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201610861929.2 2016-09-28
CN201610861929.2A CN107871194B (zh) 2016-09-28 2016-09-28 一种生产线设备的调度方法和装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US16/197,997 Continuation US11990355B2 (en) 2016-09-28 2018-11-21 Method and system for scheduling apparatuses on production line

Publications (1)

Publication Number Publication Date
WO2018058842A1 true WO2018058842A1 (zh) 2018-04-05

Family

ID=61762185

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2016/113666 Ceased WO2018058842A1 (zh) 2016-09-28 2016-12-30 一种生产线设备的调度方法和装置

Country Status (5)

Country Link
US (1) US11990355B2 (zh)
KR (1) KR102055663B1 (zh)
CN (1) CN107871194B (zh)
TW (1) TWI639069B (zh)
WO (1) WO2018058842A1 (zh)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112631268A (zh) * 2019-10-09 2021-04-09 北京京东乾石科技有限公司 调度机器人的方法和装置
CN113341896A (zh) * 2021-06-07 2021-09-03 电子科技大学 面向离散制造的动态集成车间调度与装配序列规划方法
CN114284173A (zh) * 2021-12-03 2022-04-05 西安北方华创微电子装备有限公司 一种动作清除方法和半导体工艺设备
CN116579466A (zh) * 2023-04-25 2023-08-11 上海赛美特软件科技有限公司 一种晶圆加工过程中的预约方法和预约装置
CN118469265A (zh) * 2024-07-15 2024-08-09 长春易加科技有限公司 一种线束生产线工位平衡与资源调配方法、系统及装置

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110895733B (zh) * 2018-09-12 2021-04-09 北京北方华创微电子装备有限公司 生产调度方法及装置、半导体处理设备、存储介质
CN111081590B (zh) * 2018-10-19 2022-04-22 北京北方华创微电子装备有限公司 半导体设备的调度方法、调度装置及系统
CN111105062B (zh) * 2018-10-26 2024-06-25 北京北方华创微电子装备有限公司 基于设备状态的物料调度方法及物料调度系统
CN110188023B (zh) * 2019-05-21 2021-09-14 联想(北京)有限公司 资源健康检查方法和资源健康检查装置
CN110606344A (zh) * 2019-08-23 2019-12-24 杭州优智物联科技有限公司 一种智能化的生产线调度系统
KR20210061138A (ko) 2019-11-19 2021-05-27 주식회사 엘지화학 배터리 관리 시스템 및 그 제어방법
CN113298333A (zh) * 2020-06-05 2021-08-24 阿里巴巴集团控股有限公司 服装生产工序生成方法、装置、设备和可读存储介质
CN112184053B (zh) * 2020-10-14 2024-05-10 浙江华睿科技股份有限公司 一种任务调度的方法、装置及其设备
CN112484922A (zh) * 2020-11-13 2021-03-12 北京北方华创微电子装备有限公司 一种工艺腔室漏率检测方法、半导体工艺设备
CN112508449B (zh) * 2020-12-21 2023-06-30 北京元心科技有限公司 任务执行方法、装置、电子设备及计算机可读存储介质
CN112686471B (zh) * 2021-01-21 2024-08-13 成都博智云创科技有限公司 基于贪婪策略的钢材生产优化调度方法
CN113259215A (zh) * 2021-05-25 2021-08-13 东莞铭普光磁股份有限公司 一种主从机通信方法和主从机通信系统
CN113689075B (zh) * 2021-07-22 2024-05-24 深圳泰德激光技术股份有限公司 针对双加工线的加工控制方法、装置及计算机存储介质
CN113780747B (zh) * 2021-08-16 2024-03-22 成都天奥测控技术有限公司 一种生产线任务自动划分抓取调度系统及方法
CN114242616A (zh) * 2021-11-29 2022-03-25 西安北方华创微电子装备有限公司 一种工艺故障处理方法和一种半导体工艺设备
CN114462781A (zh) * 2021-12-28 2022-05-10 西安北方华创微电子装备有限公司 一种任务调度方法和半导体工艺设备
CN114496846A (zh) * 2021-12-30 2022-05-13 西安北方华创微电子装备有限公司 一种半导体工艺设备的调度控制方法和半导体工艺设备
CN114442582B (zh) * 2022-04-07 2022-08-16 广东祥利科技有限公司 一种聚烯烃改性电缆粒料生产监测控制方法及系统
CN115169997B (zh) * 2022-09-06 2022-12-06 埃克斯工业(广东)有限公司 物料加工进出时机的规划方法、设备及可读存储介质
CN115794506B (zh) * 2022-10-26 2023-10-13 北京北方华创微电子装备有限公司 一种晶片调度方法和一种电子设备
CN116079480A (zh) * 2023-03-07 2023-05-09 上海爱堃智能系统有限公司 一种对多台数控机床上下料的方法、装置及系统
CN116749179B (zh) * 2023-06-07 2026-02-17 杭州程天科技发展有限公司 一种任务排布方法、装置、设备和存储介质
CN118761607B (zh) * 2024-09-05 2024-12-17 南通优好佳包装材料有限公司 一种pet瓶生产线能效优化方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5568623A (en) * 1991-02-18 1996-10-22 Nec Corporation Method for rearranging instruction sequence in risc architecture
CN101179043A (zh) * 2006-11-10 2008-05-14 北京北方微电子基地设备工艺研究中心有限责任公司 硅片加工过程中的调度方法
CN102129393A (zh) * 2011-03-09 2011-07-20 南京恩瑞特实业有限公司 通用定时任务管理的实现方法
CN102662744A (zh) * 2012-04-19 2012-09-12 上海大学 一种基于条件抢占的fpga任务调度方法
CN103902375A (zh) * 2014-04-11 2014-07-02 北京工业大学 一种基于改进遗传算法的云任务调度方法

Family Cites Families (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5345587A (en) * 1988-09-14 1994-09-06 Digital Equipment Corporation Extensible entity management system including a dispatching kernel and modules which independently interpret and execute commands
US5050088A (en) * 1989-03-29 1991-09-17 Eastman Kodak Company Production control system and method
US6016478A (en) 1996-08-13 2000-01-18 Starfish Software, Inc. Scheduling system with methods for peer-to-peer scheduling of remote users
US5928389A (en) * 1996-10-21 1999-07-27 Applied Materials, Inc. Method and apparatus for priority based scheduling of wafer processing within a multiple chamber semiconductor wafer processing tool
US6714830B2 (en) * 2000-02-28 2004-03-30 Canon Kabushiki Kaisha Push-type scheduling for semiconductor fabrication
US20050080660A1 (en) 2003-10-02 2005-04-14 Desilva Anura H. System and method for optimizing equipment schedules
US7474934B2 (en) * 2004-07-12 2009-01-06 Applied Materials, Inc. Methods and apparatus for enhancing electronic device manufacturing throughput
US7440811B2 (en) 2004-09-28 2008-10-21 Siemens Aktiengesellschaft Dynamic-state waiting time analysis method for complex discrete manufacturing
TWI271669B (en) 2004-12-03 2007-01-21 Inventec Appliances Corp Labor-hour system for calculating the standard labor hour
US20080216077A1 (en) * 2007-03-02 2008-09-04 Applied Materials, Inc. Software sequencer for integrated substrate processing system
US8397236B2 (en) * 2007-08-24 2013-03-12 Virtualmetrix, Inc. Credit based performance managment of computer systems
WO2009052383A1 (en) * 2007-10-18 2009-04-23 Washington State University Computer implemented scheduling systems and associated methods
US8060252B2 (en) * 2007-11-30 2011-11-15 Novellus Systems, Inc. High throughput method of in transit wafer position correction in system using multiple robots
KR100957401B1 (ko) * 2009-06-05 2010-05-11 (주)베오스솔루션 반도체 제조 클러스터 장비용 스케줄러
JP5586271B2 (ja) * 2010-03-02 2014-09-10 株式会社日立ハイテクノロジーズ 真空処理装置及びプログラム
JP5476162B2 (ja) * 2010-03-02 2014-04-23 株式会社日立ハイテクノロジーズ 真空処理装置及びプログラム
US8473247B2 (en) * 2010-04-30 2013-06-25 Applied Materials, Inc. Methods for monitoring processing equipment
US8501499B2 (en) * 2011-03-28 2013-08-06 Tokyo Electron Limited Adaptive recipe selector
EP2733558B1 (en) * 2011-07-15 2020-03-18 Tokyo Electron Limited Processing indicating device, processing indicating method, computer program and processing device
JP6026801B2 (ja) * 2011-10-19 2016-11-16 株式会社日立国際電気 基板処理装置、基板搬送方法及び半導体装置の製造方法
JP6022908B2 (ja) * 2012-01-16 2016-11-09 東京エレクトロン株式会社 処理装置及びバルブ動作確認方法
CN103513580A (zh) 2012-06-19 2014-01-15 富泰华工业（深圳）有限公司 矩阵式生产系统及其控制方法
US9659799B2 (en) * 2012-08-28 2017-05-23 Asm Ip Holding B.V. Systems and methods for dynamic semiconductor process scheduling
CN103049334B (zh) * 2012-12-14 2015-09-30 华为技术有限公司 一种任务处理的方法和虚拟机
KR101460295B1 (ko) * 2013-02-15 2014-11-13 동서대학교산학협력단 생산일정 자동 스케쥴링 방법
US9595460B2 (en) * 2013-04-10 2017-03-14 Hitachi Kokusai Electric Inc. Substrate processing apparatus, recording medium and method of manufacturing semiconductor device
CN103474991B (zh) 2013-09-18 2015-11-18 国电南瑞科技股份有限公司 基于时间尺度的配电网全局优化调度方法
US9606532B2 (en) * 2014-01-29 2017-03-28 Taiwan Semiconductor Manufacturing Company Limited Method and manufacturing system
US10162341B2 (en) * 2014-10-10 2018-12-25 Applied Materials, Inc. Method for sequencing a plurality of tasks performed by a processing system and a processing system for implementing the same
KR101639912B1 (ko) * 2014-12-23 2016-07-25 주식회사 포스코 철강 공정 미들웨어의 이벤트 관리 시스템
WO2016157402A1 (ja) * 2015-03-31 2016-10-06 株式会社日立国際電気 基板処理装置、半導体装置の製造方法及び記録媒体
JP6562744B2 (ja) * 2015-07-13 2019-08-21 キヤノン株式会社 システム、及び制御方法
US10001772B2 (en) * 2015-09-20 2018-06-19 Macau University Of Science And Technology Optimally scheduling of close-down process for single-arm cluster tools with wafer residency time constraints
US10001773B2 (en) * 2015-09-20 2018-06-19 Macau University Of Science And Technology Optimal one-wafer scheduling of single-arm multi-cluster tools with tree-like topology
US9618930B1 (en) * 2015-09-20 2017-04-11 Macau University Of Science And Technology Scheduling start-up process for time-constrained single-arm cluster tools
JP6600081B2 (ja) * 2016-04-08 2019-10-30 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 基板処理装置、半導体装置の製造方法及びプログラム
US10134613B2 (en) * 2016-09-22 2018-11-20 Macau University Of Science And Technology Cluster tool apparatus and a method of controlling a cluster tool apparatus

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5568623A (en) * 1991-02-18 1996-10-22 Nec Corporation Method for rearranging instruction sequence in risc architecture
CN101179043A (zh) * 2006-11-10 2008-05-14 北京北方微电子基地设备工艺研究中心有限责任公司 硅片加工过程中的调度方法
CN102129393A (zh) * 2011-03-09 2011-07-20 南京恩瑞特实业有限公司 通用定时任务管理的实现方法
CN102662744A (zh) * 2012-04-19 2012-09-12 上海大学 一种基于条件抢占的fpga任务调度方法
CN103902375A (zh) * 2014-04-11 2014-07-02 北京工业大学 一种基于改进遗传算法的云任务调度方法

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112631268A (zh) * 2019-10-09 2021-04-09 北京京东乾石科技有限公司 调度机器人的方法和装置
CN113341896A (zh) * 2021-06-07 2021-09-03 电子科技大学 面向离散制造的动态集成车间调度与装配序列规划方法
CN113341896B (zh) * 2021-06-07 2022-08-05 电子科技大学 面向离散制造的动态集成车间调度与装配序列规划方法
CN114284173A (zh) * 2021-12-03 2022-04-05 西安北方华创微电子装备有限公司 一种动作清除方法和半导体工艺设备
CN116579466A (zh) * 2023-04-25 2023-08-11 上海赛美特软件科技有限公司 一种晶圆加工过程中的预约方法和预约装置
CN116579466B (zh) * 2023-04-25 2024-05-14 上海赛美特软件科技股份有限公司 一种晶圆加工过程中的预约方法和预约装置
CN118469265A (zh) * 2024-07-15 2024-08-09 长春易加科技有限公司 一种线束生产线工位平衡与资源调配方法、系统及装置

Also Published As

Publication number Publication date
TW201814412A (zh) 2018-04-16
TWI639069B (zh) 2018-10-21
CN107871194A (zh) 2018-04-03
US11990355B2 (en) 2024-05-21
US20190096724A1 (en) 2019-03-28
KR20180084843A (ko) 2018-07-25
KR102055663B1 (ko) 2019-12-13
CN107871194B (zh) 2020-10-16

Similar Documents

Publication Publication Date Title
WO2018058842A1 (zh) 一种生产线设备的调度方法和装置
TWI748159B (zh) 深度學習處理中乘法與累加運算的非對稱量化
KR102463977B1 (ko) 웨이퍼들을 이송하기 위한 장비 프런트 엔드 모듈 및 웨이퍼들을 이송하는 방법
Ding et al. Multicluster tools scheduling: An integrated event graph and network model approach
US9805962B2 (en) Substrate conveyance method, and substrate conveyance device
CN111316416B (zh) 基板路由与产量建模
Lee et al. Scheduling lot switching operations for cluster tools
CN112301322B (zh) 具有工艺参数智能调节功能的气相沉积设备及方法
CN113871330B (zh) 一种物料调度方法和一种半导体工艺设备
JP7556047B2 (ja) マルチチャンバ半導体機器のための予測ウエハスケジューリング
Qiao et al. Cycle time analysis of dual-arm cluster tools for wafer fabrication processes with multiple wafer revisiting times
WO2009089715A1 (en) A method and device for optimized dispatch of wafer
CN118116854B (zh) 一种晶圆调度方法、装置、设备及存储介质
CN110895733B (zh) 生产调度方法及装置、半导体处理设备、存储介质
CN108363362A (zh) 半导体机台产能模拟方法及半导体机台产能模拟系统
CN110850819A (zh) 单臂组合设备调度方法、系统、移动终端及存储介质
TWI902854B (zh) 用於製造系統處的時間約束管理的方法、系統及非暫時性電腦可讀儲存媒體
CN114496846A (zh) 一种半导体工艺设备的调度控制方法和半导体工艺设备
US20160103713A1 (en) Method for sequencing a plurality of tasks performed by a processing system and a processing system for implementing the same
CN107275248B (zh) 机台控制方法和机台控制系统
JP5947030B2 (ja) 基板処理方法、基板処理装置
TW202205038A (zh) 排程基板繞線與處理
TWI661326B (zh) 半導體機台產能模擬方法及半導體機台產能模擬系統
JP2024509520A (ja) 製造システムコントローラの更新プロセス中の入出力（ｉｏ）ハンドリング
KR101842039B1 (ko) 웨이퍼 처리 방법

Legal Events

Date Code Title Description
ENP Entry into the national phase

Ref document number: 20187016005

Country of ref document: KR

Kind code of ref document: A

WWE Wipo information: entry into national phase

Ref document number: 1020187016005

Country of ref document: KR

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 16917586

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 16917586

Country of ref document: EP

Kind code of ref document: A1