Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
  • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
  • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
  • B65G47/90—Devices for picking-up and depositing articles or materials
  • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
  • B65G47/911—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with air blasts producing partial vacuum
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
  • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
  • H01L21/67706—Mechanical details, e.g. roller, belt
• • H—ELECTRICITY
  • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
  • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
  • H05K13/0061—Tools for holding the circuit boards during processing; handling transport of printed circuit boards
  • H05K13/0069—Holders for printed circuit boards
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G21/00—Supporting or protective framework or housings for endless load-carriers or traction elements of belt or chain conveyors
  • B65G21/20—Means incorporated in, or attached to, framework or housings for guiding load-carriers, traction elements or loads supported on moving surfaces
  • B65G21/2027—Suction retaining means
  • B65G21/2036—Suction retaining means for retaining the load on the load-carrying surface

Definitions

• the invention relates to a device for gripping and transporting substrates, in particular wafers, printed circuit boards, solar cells or the like, with a gripping head having at least one support surface for placement on a substrate and a suction device for sucking the substrate against the support surface.
• devices have emerged that no longer grip the substrate in a form-fitting or mechanical manner, but hold it by a negative pressure or a vacuum, or grasp and transport it.
• devices which have a gripping head, which have at least one support surface for placement on the respective substrate.
• the gripping head is thus not brought from below to the substrate or from the side, but rather from above onto the substrate, or the substrate is brought from below to the gripping head or the support surface.
• a gripping head to a suction device which generates the vacuum or the negative pressure to suck the substrate against the support surface so that it is held or gripped by the negative pressure. This results in a particularly gentle gripping of the substrate.
• the problem underlying the invention is achieved by a device having the features of claim 1.
• This has the advantage that the negative pressure is generated directly where it is needed, and with a cryvo lumigen characteristic.
• the suction device has at least one venturi nozzle on the gripping head.
• the Venturi nozzle ensures the desired negative pressure safely.
• the negative pressure can be generated quickly and also quickly canceled, in order to enable a rapid lifting and settling of a substrate.
• the gripping head has a plurality of Venturi nozzles, which are connected on the suction side with at least two separate vacuum chambers, each having a plurality of the bearing surface associated through holes. Due to the fact that several venturi nozzles are present, different areas or sections of the support surface can be subjected to a vacuum individually.
• each of the vacuum chambers is associated with a venturi, so that each vacuum chamber can be individually activated or deactivated to aspirate or deposit a substrate.
• the passage openings which are connected to one of the vacuum chamber, adjacent to a range of through holes, which are connected to another of the vacuum chambers, so that on the support surface areas are created, which can be subjected to a vacuum individually.
• the regions are distributed over the longitudinal extent of the gripping head or arranged distributed support surface.
• a particular electrically controllable valve is associated with the respective Venturi nozzle, which is designed to release or close a flow cross-section of the Venturi nozzle. Due to the direct assignment of the valve or the Venturi nozzle, this can be switched very directly, so that the negative pressure generated by the Venturi nozzle can be built up and dismantled quickly.
• the respective valve is associated with a suction connection of the respective Venturi nozzle.
• the plurality of venturi nozzles are connected to at least one compressed air generator on the pressure side. It is particularly preferably provided that the compressed air generator is connected to the multiple venturi simultaneously, so that all venturi are subjected to the same compressed air. Different negative pressure can then be achieved by a corresponding control of the respective valve, wherein the respective valve is preferably designed for this purpose as a proportional valve, so that it can also assume conditions between a complete release and a full completeness closing of the respective flow cross-section.
• the Venturi nozzles are connected in series, so that the compressed air through the Venturi nozzles is performed in series. This ensures a simple tubing of the Venturi nozzles on the gripper head, which leads to space and weight savings.
• the vacuum chambers are preferably distributed in the longitudinal extent of the gripping head, so that there is a simple distinction between vacuum chambers.
• the mammal openings are as simple holes through a wall of the respective vacuum chamber designed so that the aforementioned regions of the suction openings can be achieved in a simple and cost-effective manner by the arrangement of the vacuum chambers.
• a transport device for moving the sucked substrate along the support surface is arranged on the gripping head.
• the substrates can therefore be moved along the support surface, and thus, for example, shift from a first region into a second, adjacent region of through openings.
• the transport device has at least one transport belt, which extends in the longitudinal extent of the gripping head and forms the support surface. This ensures that no relative movement arises during transport between the support surface and the respective substrate, through which the substrate could be damaged.
• the transport belt is expediently designed as endless drawing means in order to enable a simple continuous operation.
• the transport device further preferably has at least one drive device by means of which the at least one transport belt can be moved.
• the transport device has a plurality of deflection rollers around which the transport belt is guided, wherein at least one of the deflection rollers is designed as a drive roller and is operatively connected or coupled to the drive device.
• the transport device also has a belt tensioner, which acts on the belt with a bias, so that it is safely guided along a tread, and in particular not unintentionally detached from the gripping head, which among other things, the vacuum could be partially lifted.
• the transport belt is held on a hollow profile forming the respective vacuum chamber, the hollow profile having the through openings associated with the transport belt and opening into the vacuum chamber.
• the negative pressure generated in the respective vacuum chamber thus acts on the transport belt through the passage opening connected to or opening into this vacuum chamber.
• the passage openings are formed as through holes in the particular also the vacuum chambers having hollow profile and evenly distributed over the longitudinal extent of the hollow profile or the gripping head.
• the transport belt has the plurality of suction openings, which are aligned in at least one position of the conveyor belt with at least one of the passage openings or at least overlap them.
• the mammalian openings and the passage openings are arranged or designed such that along the entire movement path of the conveyor belt or along the entire support surface of the gripper head, the respective substrate is held securely on the gripper head by the negative pressure.
• the passage openings are formed as a slot opening extending over the entire length of the hollow profile or at least over the length of the support surface or opening into a longitudinal groove in the running surface, so that the negative pressure in particular consistently throughout the length of the support surface or tread acts on the conveyor belt.
• the suction openings of the conveyor belt are arranged at the level of the passage slot and are thus independent of the transport point of the conveyor belt always in alignment with the passage slot, so that the negative pressure at the suction openings is available throughout.
• one passage slot or one longitudinal groove extends over one of the aforementioned areas or vacuum chambers.
• the transport device has at least or exactly two transport belts which are arranged parallel to one another and at a distance from one another on the gripping head.
• the respective substrate can be gripped and transported, for example, on its outer edges.
• the substrates are spared and
• the transport of substrates allows, which were already equipped with components / components.
• the respective transport belts are formed as previously described and guided along a respective hollow profile.
• the transport device is expediently associated with both transport belts.
• a belt tensioner is assigned to each transport belt in order to optimally adjust an individual belt tension.
• the two transport belts assigned a common belt tensioner whereby the effort and the manufacturing cost can be reduced.
• the common belt tensioner preferably has at least one spring element which is assigned to only one of the transport belts in order to allow tolerances.
• the gripping head may also have three or more transport belts, as described above.
• FIG. 1 shows a device for gripping and transporting substrates in a simplified side view
• FIG. 2 shows the device in a top view
• FIG. 3 shows a first detail view of the device in a longitudinal section
• Figure 4 is a second detail view of the device in a cross-sectional view
• Figure 5 shows an advantageous development of the device in a perspective
• FIG. 1 shows, in a simplified longitudinal sectional representation, an advantageous device 1 for gripping and transporting substrates, which are not shown here, which is shown in FIG. 2 in a plan view.
• the longitudinal section is indicated in FIG. 2 by a dashed line BB.
• the device 1 has a gripping head 2, which is elongate and for this purpose has a length which is significantly greater than a width and height.
• the gripping head 2 is formed in several parts. In this case, the gripping head 2 on a support structure 3, which consists of two formed parallel to each other and spaced from each other hollow sections 4 and by a plurality of the two hollow sections 4 interconnecting intermediate elements 5 is formed.
• three of the intermediate elements 5 each carry a Venturi nozzle 6 which has at least one pressure port 7 and a suction port 8.
• the pressure ports 7 are connectable or connected to a compressed air generator not shown here.
• the suction ports 8 are connected to a through the respective intermediate element 5 transversely extending suction channel 9, which opens at its two ends in the hollow sections 4.
• the hollow profiles 4 each have three vacuum chambers 10, 11, 12, which are arranged one behind the other as seen in the longitudinal extension of the gripping head 2.
• the vacuum chambers 10, 11, 12 of the two hollow sections 4 are parallel to one another, the hollow sections 4 are in this respect mirror images of each other.
• the opposing vacuum chambers 10, 11, 12 are in each case connected to a suction channel 9 of the associated intermediate element 5.
• the vacuum chambers 10, 11, 12 are each connected to one of the Venturi nozzles 6 on the suction side, so that when the Venturi nozzles 6 are pressurized at the respective pressure connection 7, a negative pressure is generated at the respective vacuum chamber 10, 11, 12.
• the vacuum chambers 10, 11, 12 each extend along the respective hollow profile.
• the hollow profile also has a plurality of juxtaposed passage openings 14, which are presently formed as through holes, and open on one side in the respective vacuum chamber 10, 11 or 12 and the other end to a running surface 15 of a conveyor belt 16 ends.
• the transport belt 16 is part of a transport device 17, which comprises two transport belts 16, each of which circulates one of the hollow sections 4 in their longitudinal extent.
• two deflection rollers 18 and 19 are respectively arranged on the longitudinal ends of the hollow profiles 4 and on the end-side intermediate elements 5, which are held rotatably on the support structure 3.
• the axes of rotation of the deflection rollers 18 and 19 are aligned parallel to one another and perpendicular to the longitudinal extent of the gripping head 2.
• the respective transport belt 16, which rotates around the gripping head 2 thus revolves it both on the underside and on its upper side.
• the previously mentioned tread 15 is associated with the underside of the gripping head 2.
• a drive device 20 is expediently provided, which according to the present embodiment is coupled to the deflection rollers 19 in order to drive them as required, so that the respective transport belt 16 is guided around the gripping head 2.
• the running surface 15 has a longitudinal groove 21 which extends over the longitudinal extent of the respective hollow profile 4 and into which the passage openings 14 open.
• the longitudinal groove 21 is formed open to the conveyor belt 16, so that the negative pressure on the hollow profile 4 facing back of the conveyor belt 16 effects, so pulled at existing vacuum in the respective hollow section 4 of the conveyor belt 16 against the tread 15 and the respective Hohlproftl 4 becomes.
• the transport belts 16 themselves have a plurality of suction openings 22.
• the suction openings 22 are formed in the respective carrying strap 16 in such a way that they are in groups, wherein a group in the present case comprises seven suction openings 22, which are formed one behind the other in the longitudinal extent of the transport belt 16, and wherein the groups 23 of sucking openings 22 in the longitudinal extent of the conveyor belt 23 have a relatively large distance from each other, wherein according to the present embodiment, the groups 23 are equally spaced, but so far apart that when one group 23 is completely in the vacuum chamber 10, the next group 23 completely in the vacuum chamber 12th lies.
• the groups 23 of the adjacent conveyor belts 16 are arranged side by side, as shown in FIG.
• the suction openings 22 may be evenly distributed, so not grouped, distributed along the conveyor belt 16.
• FIG. 3 shows, in an enlarged detailed sectional view, a detail from FIG. 1, which is identified by a circle A in FIG.
• the vacuum chambers 10, 11, 12 are in the respective Hohlpro fil 4 formed by a longitudinal extent of the hollow section 4 extending hollow chamber 25, wherein the hollow chamber 25 is subdivided by separating elements 24 into the individual vacuum chambers 10, 11, 12.
• This allows cost-effective production, because the hollow sections 4 can be produced, for example, as extruded profiles.
• the respective separating element 24 is subsequently inserted into the hollow chamber 25, so that the three vacuum chambers 10, 11, 12 are formed, each associated with one of the Venturi nozzles 6. So that this separation is also effective with respect to the respective transport belt 16, the longitudinal groove 21 is also divided by dividing elements 26 into three sections corresponding to the vacuum chambers 10, 11, 12.
• separating elements 26 are formed for example as projections which bridge the longitudinal groove 21, and on which the respective transport belt 16 rests, as shown by way of example in FIG.
• the separating elements 24 expediently have an outer contour which corresponds to the cross section of the hollow chamber 25 in order to separate the vacuum chambers 10, 11, 12 as well as possible from each other in terms of flow.
• the separating elements are after their insertion into the hollow chamber 25 with a sealant, in particular silicone, which preferably hardens permanently elastic, encapsulated to ensure a secure seal.
• the separating elements each have a circumferential groove into which the sealing compound is introduced from the outside.
• the hollow sections 4 expediently transverse bores, through which the sealant can be introduced.
• sealant protrudes from one of the transverse bores, this transverse bore then opening in particular into the longitudinal groove 21.
• the then protruding sealing compound forms the separating elements 26, by which the longitudinal groove 21 in the respective areas, the vacuum chambers 10, 11, 12 assigned, is divided.
• FIG. 4 shows a cross section through the gripping head 2.
• the cross section along the line CC from FIG. 2 is shown, so that the cross section leads through the vacuum chamber 10.
• the transport belt 16 is guided securely on the respective hollow profile 4, this particular has a guide 27 for the transport belt 16.
• the guide is designed in particular form-fitting and can be realized in different ways.
• the respective transport belt 16 on the inside a receptacle 28, in which the support structure 3, in particular the respective hollow profile 4 or a guide profile arranged thereon 29, which will be discussed in more detail later, with the tread 15 rests in regions, so that the transport belt 16 each Tread 15 laterally surrounds.
• the side of the transport belt 16 is thereby guided in a simple manner by the support structure 3 in a form-fitting manner in the longitudinal direction.
• Each of the venturi nozzles 6 furthermore has a controllable valve 30, which is assigned to the suction connection 9 of the respective venturi nozzle 6.
• the switching valves 30 are in particular designed to completely release the flow cross-section of the suction connection or to completely close it.
• the valves 30 are designed as proportional valves, which also allow an intermediate position in which, for example, the flow cross-section will only partially release.
• the gripping head 2 is first guided downwards and placed on a substrate, for example a waver, or the substrate is guided from below to the gripping head 2. This is done, for example, such that the gripping head 2 is placed in the region of the vacuum chamber 10 on the substrate.
• a negative pressure in the vacuum chamber 10 is generated, which affects the substrate through the vacuum chamber 10, the passage openings 14, the longitudinal groove 21 and the mammalian openings 22 and this attracts against the transport belt 16.
• the drive device 20 is actuated to move the transport belts 16, so that the substrate is moved along the support surface 29 on the gripper head 2.
• FIG. 5 shows an advantageous development of the device 1 in a perspective detail view. This shows the pulleys 18 of the transport device 17, which are mounted on a common shaft.
• the shaft 30 is rotatably mounted in a housing part 31.
• the housing part 31 is displaceable relative to the support structure 3 of the gripping head 2 in its longitudinal extent.
• the housing part 31 is associated with a pneumatic actuator 32, which moves the housing 31 with the deflection rollers 18 against the clamping force of the transport belt 16 in order to set a desired belt tension.
• the actuator 32 to a pneumatic cylinder 33, in which a pneumatic piston 34 is arranged axially displaceable.
• the pneumatic piston 34 is connected to the housing part 31 in order to displace it against the tensioning force of the transport belts 16, as indicated by an arrow 35.
• the pneumatic actuator 32 can be acted upon, for example, by the same compressed air generator, as well as the venturi 6.
• the actuator 32 has its own compressed air generator. Because compressed air is used here as a means of generating force, it is ensured that the transport belt 16 is not overstretched.
• the housing part 31 is also urged against the clamping force of the conveyor belt 16 to the outside. This ensures that the transport belts 16 do not jump off the deflection rollers 18 in the event of a pressure failure of the pneumatic actuator 32. As a result, a safe and permanent operation of the device 1 is ensured.
• the actuator 32 thus forms together with the movably mounted deflection rollers 18, a belt tensioner 38, by means of which the tension of the transport belt 16 is adjustable.
• the support structure 3 or the hollow profiles 4 are designed such that the running surface 15 is formed curved downwards or in the direction of the substrate to be gripped. It extends the curvature over the entire running surface 15 or over the length of the respective hollow profile 4.
• the curvature is designed such that it biases the respective transport belt over the entire length of the running surface 15. This takes into account that due to the weight of the transport belt 16, this could sag in the direction of the substrate, if a sufficient belt tension is not present.
• the curvature is formed by the respective hollow profile 4 itself.
• the curvature is formed by the attached to the respective hollow profile 4 guide profile 39, which forms the tread 15 on the Hohlpro fil 4.
• the passage openings 14 are formed as through holes in the guide profile 39, as can also be seen in Figure 1, and thereby connect the respective longitudinal groove 21 with the vacuum chambers 10, 11 and 12.
• the vacuum chambers 10, 11, 12 and the through holes 14 in the hollow section 4 are thus not directly, but indirectly connected by the guide profile 39 with the tread 15 and the transport belt 16. It can also be seen from FIG. 5 that the transport belts 16 on the upper side of the support structure 3 essentially run freely, so that frictional forces are minimized.
• optional lateral guide rollers 37 are provided, which are assigned to the respective transport belt 16 on both sides, so that it is passed between them.
• the transport rollers 37 are expediently distributed uniformly over the longitudinal extent of the support structure 3 on the upper side in order to ensure a secure transport belt guide.

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• Engineering & Computer Science (AREA)
• Manufacturing & Machinery (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Physics & Mathematics (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• General Physics & Mathematics (AREA)
• Computer Hardware Design (AREA)
• Power Engineering (AREA)
• Mechanical Engineering (AREA)
• Manipulator (AREA)

Priority Applications (2)

Applications Claiming Priority (2)

Publications (1)

Family

ID=59745250

Family Applications (1)

Country Status (4)

Citations (6)

Family Cites Families (7)

• 2016
  • 2016-07-29 DE DE102016214094.9A patent/DE102016214094A1/de not_active Withdrawn
• 2017
  • 2017-07-28 CN CN201780047325.7A patent/CN109690753A/zh active Pending
  • 2017-07-28 EP EP17758803.5A patent/EP3491664A1/de not_active Withdrawn
  • 2017-07-28 WO PCT/EP2017/069215 patent/WO2018020027A1/de unknown

Patent Citations (6)

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