WO2018000495A1 - Chip single-event effect detection method and device - Google Patents

Chip single-event effect detection method and device Download PDF

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WO2018000495A1
WO2018000495A1 PCT/CN2016/092256 CN2016092256W WO2018000495A1 WO 2018000495 A1 WO2018000495 A1 WO 2018000495A1 CN 2016092256 W CN2016092256 W CN 2016092256W WO 2018000495 A1 WO2018000495 A1 WO 2018000495A1
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chip
tested
observation matrix
scan register
random observation
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李慧云
邵翠萍
刘玢玢
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中国科学院深圳先进技术研究院
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    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302Contactless testing
    • G01R31/308Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
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Abstract

A chip single-event effect detection method and device, the method comprising: placing a to-be-detected chip in a testing machine, and triggering the to-be-detected chip to generate a single-event effect; randomly turning off a scanning register for the to-be-detected chip, and forming a random observation matrix; providing an input testing vector for the to-be-detected chip so as to obtain an output testing vector of the to-be-detected chip, and obtaining an error total vector according to the output testing vector; and carrying out compressed sensing signal reconstruction on the error total vector, and determining an internal sensitive region of the to-be-detected chip. The method may be used to efficiently and conveniently detect the single-event effect of a chip.

Description

芯片单粒子效应探测方法及装置Chip single particle effect detecting method and device 技术领域Technical field
本发明涉及集成电路技术领域,尤其涉及芯片单粒子效应探测方法及装置。The present invention relates to the field of integrated circuit technology, and in particular, to a chip single particle effect detecting method and apparatus.
背景技术Background technique
集成电路可靠性研究的重要性随着半导体行业的快速进步而凸显。新型的小封装、高速度、低功耗的高性能芯片对粒子辐射的敏感程度大大增强,能产生诸多半导体电离辐射效应,也称单粒子效应。图1为现有技术中入射高能粒子造成半导体单粒子效应的示意图,如图1所示,单粒子效应会导致电子设备偏离正常功能和性能,导致芯片可靠性降低,甚至失效。The importance of integrated circuit reliability research is highlighted by the rapid advancement of the semiconductor industry. The new small package, high speed, low power high performance chip is greatly sensitive to particle radiation and can generate many semiconductor ionizing radiation effects, also known as single particle effect. FIG. 1 is a schematic diagram of a semiconductor single-particle effect caused by incident high-energy particles in the prior art. As shown in FIG. 1 , a single-particle effect causes an electronic device to deviate from normal functions and performance, resulting in a decrease in chip reliability or even failure.
除了太空射线能导致芯片单粒子效应,现代集成电路芯片制造过程中也引入了大量辐射损伤的加工工艺步骤,如离子注入、干法刻蚀、电子束或X射线光刻、等离子增强化学气相沉积、离子铣、势垒层及金属层建设等。在芯片封装工艺中电离辐射的来源是α粒子,如倒装焊球中的铅基同位素,铀、钍等放射性杂质。这些辐射来源都将严重威胁对芯片单粒子效应可靠性。In addition to space ray can lead to single-particle effect of the chip, modern integrated circuit chip manufacturing process also introduces a large number of processing steps of radiation damage, such as ion implantation, dry etching, electron beam or X-ray lithography, plasma enhanced chemical vapor deposition , ion milling, barrier layer and metal layer construction. The source of ionizing radiation in the chip packaging process is alpha particles, such as lead-based isotopes in flip-chip solder balls, radioactive impurities such as uranium and thorium. These sources of radiation will seriously threaten the reliability of the single-particle effect on the chip.
随着空间技术和核技术的发展,单粒子效应被进一步分类研究,如单粒子闩锁(Single event latch-up,SEL),单粒子翻转(Single event upset,SEU),单粒子功能中断(Single event functional interrupt,SEFI)和单粒子烧毁(Single event burnout,SEB)等。根据单粒子效应对电子元器件造成的影响能否恢复,单粒子效应可以分为不可恢复错误和可恢复错误。“不可恢复错误”,或称“硬错误”,指一旦发生会对器件或系统造成致命的永久性损伤的错误,如SEB;“可恢复错误”,或称“软错误”,指通过重新启动器件或重新写入数据等方法可以恢复正常的错误,如SEU、SET、SED等。其中,单粒子闩锁SEL和单粒子翻转SEU是发生频率较高的两种单粒子效应。With the development of space technology and nuclear technology, single-particle effects are further classified, such as Single event latch-up (SEL), Single event upset (SEU), single-event function interrupt (Single) Event functional interrupt (SEFI) and single event burnout (SEB). According to the single-particle effect on the electronic components can be restored, single-event effects can be divided into unrecoverable errors and recoverable errors. "Unrecoverable error", or "hard error", refers to an error that causes a fatal permanent damage to the device or system, such as SEB; "recoverable error", or "soft error", means restarting Methods such as device or rewriting of data can restore normal errors such as SEU, SET, SED, etc. Among them, the single-particle latch SEL and the single-event flip SEU are two single-particle effects with high frequency of occurrence.
单粒子效应对于深亚微米集成电路,尤其是用于轨道飞船或其他航空电子设备的芯片可靠性具有严重威胁。据美国NGDC(National Geophysical Data Center)的数据统计,自1971年至1986年,国外发射的39颗同步卫星在飞行期间发生的故障共有1589次,空间辐射导致的故障有1129次,占故障总数的71%,而在辐射造成的故障中,单粒子效应造成的故障有621次,占辐射造成总故障的55%。我国发射的航天器也有类似情况出现。中国空间技术研究院统计了1984年到2000年东方红二号系列六颗通信卫星 的故障,其中空间环境效应引起的故障占故障总数的40%。2007年至2010年我国航天器单粒子效应故障的统计表明,单粒子效应在空间环境辐射效应中占据主导地位,对航天器的危害日益严重。Single-event effects pose a serious threat to the reliability of deep sub-micron integrated circuits, especially for orbiting spacecraft or other avionics. According to the statistics of the National Geophysical Data Center (NGDC) of the United States, from 1971 to 1986, 39 synchronous satellites launched abroad had 1589 faults during the flight, and 1129 faults caused by space radiation, accounting for the total number of faults. 71%, and in the failure caused by radiation, the single-event effect caused 621 failures, accounting for 55% of the total failure caused by radiation. A similar situation has occurred in spacecraft launched in China. China Academy of Space Technology counts six communications satellites of the Dongfanghong II series from 1984 to 2000 The fault, in which the space environment effect caused by the fault accounted for 40% of the total number of faults. From 2007 to 2010, the statistics of single-event effect faults of spacecraft in China show that the single-particle effect dominates the radiation effect of space environment, and the damage to spacecraft is becoming more and more serious.
利用高能离子束进行辐照研究需要昂贵的专用设备,通常包括粒子加速器、终端束流机台、示波器等。目前只有少数高校和研究机构才能开展这样的实验。科学家发现可以利用脉冲激光模拟空间宇宙射线重离子在微电子器件和集成电路中产生的单粒子效应。1994年,J.S.Melinger等对激光单粒子效应的试验和基本机理进行研究,对激光和电子器件材料相互作用过程进行了较详细分析,认为虽然激光产生的电子-空穴对等离子体结构和重离子产生的电子-空穴对等离子体径迹结构存在较大差异,但其在单粒子效应测试方面仍可作为实验室重要评估手段。并且在工程设计应用中,激光单粒子效应测试手段比重粒子加速器更实用。脉冲激光辐照下引起单粒子效应,尤其是软错误的过程,称之为“故障注入”。然而即使利用脉冲激光来测试单粒子效应可靠性也面临低效、繁琐的问题。Irradiation studies using high-energy ion beams require expensive specialized equipment, typically including particle accelerators, terminal beam machines, and oscilloscopes. Only a few universities and research institutions can carry out such experiments. Scientists have discovered that pulsed lasers can be used to simulate the single-particle effects of space cosmic ray heavy ions in microelectronic devices and integrated circuits. In 1994, JSMelinger et al. studied the experiment and basic mechanism of laser single-particle effect, and carried out a detailed analysis of the interaction process between laser and electronic device materials, arguing that although the electron-hole-to-plasma structure and heavy ions generated by laser The generated electron-holes have large differences in the plasma track structure, but they can still be used as an important evaluation tool in the laboratory for single-event effect testing. And in engineering design applications, the laser single-event effect test method is more practical than the particle accelerator. The process of single-particle effects caused by pulsed laser irradiation, especially soft errors, is called "fault injection". However, even the use of pulsed lasers to test the reliability of single-particle effects faces inefficiencies and cumbersome problems.
发明内容Summary of the invention
本发明实施例提供一种芯片单粒子效应探测方法,用以高效、便捷地对芯片单粒子效应进行探测,该方法包括:Embodiments of the present invention provide a chip single-event effect detecting method for efficiently and conveniently detecting a single-particle effect of a chip, and the method includes:
将待测芯片放入测试机台,触发待测芯片产生单粒子效应;Putting the chip to be tested into the test machine, triggering the single chip effect of the chip to be tested;
随机关断待测芯片的扫描寄存器,形成随机观测矩阵;Randomly turning off the scan register of the chip to be tested to form a random observation matrix;
向待测芯片提供输入测试向量,获得待测芯片的输出测试向量,根据输出测试向量获得错误总数向量;Providing an input test vector to the chip to be tested, obtaining an output test vector of the chip to be tested, and obtaining an error total vector according to the output test vector;
对错误总数向量进行压缩感知信号重构,确定待测芯片内部敏感区域。The compressed sensing signal is reconstructed from the total number of errors to determine the sensitive area inside the chip to be tested.
本发明实施例还提供一种芯片单粒子效应探测装置,用以高效、便捷地对芯片单粒子效应进行探测,该装置包括:The embodiment of the invention further provides a chip single-event effect detecting device for detecting the single-particle effect of the chip efficiently and conveniently, and the device comprises:
测试机台,用于放入待测芯片,所述待测芯片包括扫描寄存器;a test machine for placing a chip to be tested, the chip to be tested comprising a scan register;
触发装置,用于触发待测芯片产生单粒子效应;a triggering device for triggering a single particle effect of the chip to be tested;
随机观测矩阵形成单元,用于随机关断待测芯片的扫描寄存器,形成随机观测矩阵; a random observation matrix forming unit for randomly turning off a scan register of the chip to be tested to form a random observation matrix;
所述测试机台还用于向待测芯片提供输入测试向量,获得待测芯片的输出测试向量,根据输出测试向量获得错误总数向量;对错误总数向量进行压缩感知信号重构,确定待测芯片内部敏感区域。The test machine is further configured to provide an input test vector to the chip to be tested, obtain an output test vector of the chip to be tested, obtain an error total vector according to the output test vector, perform a compressed sensing signal reconstruction on the total error vector, and determine a chip to be tested. Internal sensitive area.
本发明实施例中,将待测芯片放入测试机台,触发待测芯片产生单粒子效应;随机关断待测芯片的扫描寄存器,形成随机观测矩阵;向待测芯片提供输入测试向量,获得待测芯片的输出测试向量,根据输出测试向量获得错误总数向量;对错误总数向量进行压缩感知信号重构,确定待测芯片内部敏感区域;可以高效地将芯片由于故障注入引发的内部变化快速有效地反映在输出结果,并且减少测试中对芯片设计的了解和对测试经验的依赖;能以较少的观测代价,较少的测试时间,高效的进行观测和信号重构。In the embodiment of the present invention, the chip to be tested is placed in the test machine, triggering the chip to be tested to generate a single particle effect; randomly scanning the scan register of the chip to be tested to form a random observation matrix; providing an input test vector to the chip to be tested, The output test vector of the chip to be tested obtains the error total vector according to the output test vector; performs compression sensing signal reconstruction on the total error vector to determine the sensitive internal area of the chip to be tested; and can efficiently and efficiently make the internal change of the chip due to fault injection The results are reflected in the output, and reduce the understanding of the chip design and the dependence on the test experience; the observation and signal reconstruction can be performed efficiently with less observation cost, less test time.
附图说明DRAWINGS
为了更清楚地说明本发明实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。在附图中:In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the description of the prior art will be briefly described below. Obviously, the drawings in the following description are only It is a certain embodiment of the present invention, and other drawings can be obtained from those skilled in the art without any creative work. In the drawing:
图1为现有技术中入射高能粒子造成半导体单粒子效应的示意图;1 is a schematic view showing a semiconductor single particle effect caused by incident high energy particles in the prior art;
图2为本发明实施例中芯片单粒子效应探测方法的示意图;2 is a schematic diagram of a method for detecting a single particle effect of a chip according to an embodiment of the present invention;
图3为本发明实施例中压缩感知用于探测芯片内部SEU的信号观测与重构原理框图;3 is a block diagram of a signal observation and reconstruction method for detecting a SEU inside a chip by using compressed sensing in an embodiment of the present invention;
图4为本发明实施例中对芯片进行扫描辐照的示意图;4 is a schematic diagram of scanning irradiation of a chip in an embodiment of the present invention;
图5为本发明实施例中SEE敏感点X的信号重构流程示意图;FIG. 5 is a schematic diagram of a signal reconstruction process of a SEE sensitive point X according to an embodiment of the present invention; FIG.
图6为本发明实施例中芯片单粒子效应探测装置的示意图;6 is a schematic diagram of a chip single particle effect detecting device according to an embodiment of the present invention;
图7为本发明实施例中每一次辐照下的逻辑单元需与被随机使能的扫描寄存器相匹配的示意图;7 is a schematic diagram of a logic unit in each irradiation required to match a randomly enabled scan register in an embodiment of the present invention;
图8为本发明实施例中故障注入设备与压缩感知测试机台各自的任务与协同示意图。FIG. 8 is a schematic diagram of tasks and cooperation of a fault injection device and a compression sensing test machine according to an embodiment of the present invention.
具体实施方式 detailed description
为使本发明实施例的目的、技术方案和优点更加清楚明白,下面结合附图对本发明实施例做进一步详细说明。在此,本发明的示意性实施例及其说明用于解释本发明,但并不作为对本发明的限定。The embodiments of the present invention will be further described in detail below with reference to the accompanying drawings. The illustrative embodiments of the present invention and the description thereof are intended to explain the present invention, but are not intended to limit the invention.
发明人发现,现有技术中利用脉冲激光来测试单粒子效应可靠性面临低效、繁琐的问题,这是由于现有芯片的辐射效应测试要求测试工程师在激光辐照下长时间反复扫描抽检芯片,仅凭输出结果来分析和判断芯片内部可靠性。即使得到错误结果,还需结合故障分析方法(Fault Analysis)对数据进行分析判别,才能发现芯片中的漏洞部位。这一方面是由于激光辐照须在时间上与芯片内部关键指令处理同步,在空间上须将故障注入工具聚焦于芯片敏感寄存器区域,这需要具备深厚专业知识的测试人员经过长时间摸索。这样的测试方法费时费力、容易误检漏检,且不能有效帮助防御设计。现有芯片辐射效应可靠性测试方法繁琐低效的另一原因是由于芯片输入输出引脚数目有限,不足以将故障注入引发的内部变化快速有效地反映在输出结果。即使采用DFT(Design for Test)技术,也无法对每一个逻辑门的响应进行观测。目前有文献指出可利用聚焦高能光子或氦离子的核微探针,或内置刃口探测器进行研究,但是均无法有效探测所有内部节点的状况。The inventors have found that the use of pulsed lasers to test the reliability of single-event effects in the prior art faces inefficiencies and cumbersome problems, because the radiation effect test of existing chips requires test engineers to repeatedly scan and scan chips under laser irradiation for a long time. The output is used to analyze and judge the internal reliability of the chip. Even if you get the wrong result, you need to combine the fault analysis method (Fault Analysis) to analyze the data to find the vulnerability in the chip. This aspect is due to the fact that the laser irradiation must be synchronized with the key instruction processing inside the chip in time, and the fault injection tool must be spatially focused on the chip sensitive register area, which requires a long-term exploration by a tester with deep professional knowledge. Such test methods are time-consuming and laborious, are prone to false detections, and do not effectively help defend the design. Another reason for the cumbersome and inefficient operation of the existing chip radiation effect reliability test method is that the number of input and output pins of the chip is limited, so that the internal changes caused by the fault injection are not quickly and effectively reflected in the output result. Even with DFT (Design for Test) technology, it is impossible to observe the response of each logic gate. There are currently reports that nuclear microprobes that focus on high-energy photons or helium ions, or built-in edge detectors, can be used to investigate, but none of them can effectively detect the condition of all internal nodes.
现代半导体制程已大规模采用45nm节点工艺,22nm节点和16nm节点工艺进入芯片也指日可待。在这样的深亚微米工艺条件下,制造中的工艺参数变异必然导致辐射效应可靠性降低。对芯片进行精准全面的故障注入,并对响应进行系统分析的测试成为必然趋势。The modern semiconductor process has adopted the 45nm node process on a large scale, and the 22nm node and 16nm node process into the chip is just around the corner. Under such deep submicron process conditions, variations in process parameters in manufacturing necessarily result in reduced reliability of the radiation effect. It is an inevitable trend to perform accurate and comprehensive fault injection on the chip and perform system analysis on the response.
为了解决现有的单粒子效应可靠性测试方法的弊端,本发明实施例中提供一种采用压缩感知理论探测芯片单粒子效应的方法,该方法具有无损、高效的特点。图2为本发明实施例中芯片单粒子效应探测方法的示意图,如图2所示,该方法可以包括:In order to solve the disadvantages of the existing single-event effect reliability testing method, the embodiment of the present invention provides a method for detecting a single-particle effect of a chip by using a compressed sensing theory, which has the characteristics of losslessness and high efficiency. 2 is a schematic diagram of a method for detecting a single-particle effect of a chip according to an embodiment of the present invention. As shown in FIG. 2, the method may include:
步骤201、将待测芯片放入测试机台,触发待测芯片产生单粒子效应;Step 201: Put the chip to be tested into the testing machine, and trigger the chip to be tested to generate a single particle effect;
步骤202、随机关断待测芯片的扫描寄存器,形成随机观测矩阵;Step 202: Randomly turn off the scan register of the chip to be tested to form a random observation matrix;
步骤203、向待测芯片提供输入测试向量,获得待测芯片的输出测试向量,根据输出测试向量获得错误总数向量; Step 203, providing an input test vector to the chip to be tested, obtaining an output test vector of the chip to be tested, and obtaining an error total vector according to the output test vector;
步骤204、对错误总数向量进行压缩感知信号重构,确定待测芯片内部敏感区域。Step 204: Perform compression sensing signal reconstruction on the error total vector to determine a sensitive area inside the chip to be tested.
由图2所示流程可以得知,本发明实施例中通过将待测芯片放入测试机台,触发待测芯片产生单粒子效应,随机关断待测芯片的扫描寄存器,形成随机观测矩阵,向待测芯片提供输入测试向量,获得待测芯片的输出测试向量,根据输出测试向量获得错误总 数向量,从而进行可测性设计和自动化测试向量,因此可高效地将芯片由于故障注入引发的内部变化快速有效地反映在输出结果,并且减少测试中对芯片设计的了解和对测试经验的依赖;通过对错误总数向量进行压缩感知信号重构,确定待测芯片内部敏感区域,因此能以较少的观测代价,较少的测试时间,高效的进行观测和信号重构。It can be seen from the flow shown in FIG. 2 that in the embodiment of the present invention, by placing the chip to be tested into the testing machine, the chip to be tested is triggered to generate a single particle effect, and the scanning register of the chip to be tested is randomly turned off to form a random observation matrix. Providing an input test vector to the chip to be tested, obtaining an output test vector of the chip to be tested, and obtaining an error total according to the output test vector The number vector enables testability design and automated test vectors, so it can efficiently and efficiently reflect the internal changes caused by fault injection in the output of the chip, and reduce the understanding of the chip design and the dependence on the test experience. By compressing the perceptual signal reconstruction of the total number of errors, the sensitive area inside the chip to be tested is determined, so that observation and signal reconstruction can be performed efficiently with less observation cost and less test time.
本发明实施例基于压缩感知理论研究可测性设计和相应的测试方法,总体设计思想为:1)在芯片设计过程中将寄存器插入扫描链(如为密码芯片,则可以只将不包含密钥信息的寄存器插入扫描链),然后生成辐射效应可靠性测试向量,避免因扫描链的插入而导致的密钥相关信息泄露。控制每一个扫描寄存器,供测试时建立随机观测矩阵用;2)在芯片制造完成后的测试阶段,利用故障注入,基于压缩感知理论,在测试机台上通过控制关断扫描寄存器,形成随机观测矩阵。通过输出测试向量得到错误总数向量,然后通过信号重构算法得到内部敏感点,即可快速判断该密码芯片的安全程度,或航空电子的SEE可靠性。The embodiment of the present invention studies the testability design and the corresponding test method based on the compressed sensing theory. The overall design idea is as follows: 1) Insert the register into the scan chain during the chip design process (if it is a cryptographic chip, it can only contain no key) The information register is inserted into the scan chain), and then a radiation effect reliability test vector is generated to avoid key related information leakage due to the insertion of the scan chain. Control each scan register for establishing a random observation matrix during testing; 2) Using the fault injection in the test phase after the chip is manufactured, based on the compressed sensing theory, control the shutdown scan register on the test machine to form a random observation matrix. By outputting the test vector to obtain the error total vector, and then obtaining the internal sensitive points through the signal reconstruction algorithm, the security level of the cryptographic chip or the SEE reliability of the avionics can be quickly determined.
本发明实施例的芯片单粒子效应探测方法可以将压缩感知、高精度故障注入技术和DFT(Design for Test)技术结合形成观测矩阵,大幅降低现有方法中需要的传感器或探测器数量。图3为本发明实施例中压缩感知用于探测芯片内部SEU的信号观测与重构原理框图。如图3所示,在本发明实施例中,芯片内部SEU敏感点原始信号经随机观测与压缩采样,可以重构出SEU敏感点信号。The single-event effect detection method of the embodiment of the invention can combine the compression sensing, high-precision fault injection technology and DFT (Design for Test) technology to form an observation matrix, which greatly reduces the number of sensors or detectors required in the existing method. FIG. 3 is a block diagram showing the principle of signal observation and reconstruction used by the compressed sensing for detecting the internal SEU of the chip in the embodiment of the present invention. As shown in FIG. 3, in the embodiment of the present invention, the SEU sensitive point original signal of the chip is randomly observed and compressed, and the SEU sensitive point signal can be reconstructed.
实施时先将待测芯片放入测试机台,触发待测芯片产生单粒子效应。在具体的实施例中,将待测芯片放入测试机台,触发待测芯片产生单粒子效应,可以采用激光故障注入技术,当然除了利用激光光束辐照进行故障注入,还可以采用其他单粒子效应触发方式,如重离子微束(ion beam)辐照,或其他辐射环境。In the implementation, the chip to be tested is first placed in the test machine, which triggers the single-particle effect of the chip to be tested. In a specific embodiment, the chip to be tested is placed in the test machine, triggering the single-particle effect of the chip to be tested, and the laser fault injection technology can be used. Of course, in addition to the fault injection by the laser beam irradiation, other single particles can be used. Effect triggering methods, such as heavy ion beam irradiation, or other radiation environments.
实施例中可以结合压缩感知理论和故障注入技术,进行可测性设计和执行相应的测试过程,随机关断待测芯片的扫描寄存器,形成随机观测矩阵;向待测芯片提供输入测试向量,获得待测芯片的输出测试向量,根据输出测试向量获得错误总数向量;对错误总数向量进行压缩感知信号重构,确定待测芯片内部敏感区域。In the embodiment, the compressive sensing theory and the fault injection technology can be combined to perform the testability design and the corresponding test process, randomly turn off the scan register of the chip to be tested, form a random observation matrix, and provide an input test vector to the chip to be tested. The output test vector of the chip to be tested obtains the error total vector according to the output test vector; the compressed sensing signal is reconstructed for the total error vector to determine the sensitive area inside the chip to be tested.
压缩感知理论的实现包含三个关键要素:稀疏性、非相关观测、非线性优化重建。其中信号的稀疏性是压缩感知的必备条件,非相关观测是压缩感知的关键,非线性优化是压缩感知重建信号的手段。其中对于进行非相关观测,假定X为待测芯片的内部SEE敏感区域,X为
Figure PCTCN2016092256-appb-000001
的数组。若xji=0,表示该逻辑 单元Gi在第j次辐照下具有SEE可靠性,xji=1,表示该逻辑单元Gi在第j次辐照下为SEE敏感区域。将其在某组N维正交基
Figure PCTCN2016092256-appb-000002
上展开,即:
The realization of the theory of compressed sensing contains three key elements: sparsity, uncorrelated observation, and nonlinear optimization reconstruction. The sparseness of the signal is a necessary condition for the compressed sensing. The uncorrelated observation is the key to the compressed sensing. The nonlinear optimization is the means of compressing the perceived signal. For the non-correlated observation, assume X is the internal SEE sensitive area of the chip to be tested, X is
Figure PCTCN2016092256-appb-000001
Array. If x ji =0, it indicates that the logic unit G i has SEE reliability under the jth irradiation, x ji =1, indicating that the logic unit G i is an SEE sensitive area under the jth irradiation. Put it in a certain set of N-dimensional orthogonal bases
Figure PCTCN2016092256-appb-000002
Expand on, ie:
Figure PCTCN2016092256-appb-000003
Figure PCTCN2016092256-appb-000003
若写成矩阵形式,可得:X=Ψθ,其中Ψ=[ψ12...,ψN]为正交基矩阵,满足ΨΨT=ΨTΨ=I;展开系数向量θ=[θ12...,θN]T。假设系数向量θ是K-稀疏的,及其中非零稀疏的个数K<<N,那么采用另一个与正交基字典Ψ不相关的观测矩阵Φ:M×N(M<<N),对信号X执行一次压缩观测,得到:If written in matrix form, we can get: X = Ψ θ, where Ψ = [ψ 1 , ψ 2 ..., ψ N ] is an orthogonal basis matrix, satisfying ΨΨ T = Ψ T Ψ = I; expansion coefficient vector θ = [ θ 1 , θ 2 ..., θ N ] T . Assuming that the coefficient vector θ is K-sparse, and the number of non-zero sparse K<<N, then another observation matrix Φ that is not related to the orthogonal base dictionary Φ: M×N (M<<N), Perform a compression observation on signal X to get:
Y=ΦXY=ΦX
Figure PCTCN2016092256-appb-000004
or
Figure PCTCN2016092256-appb-000004
其中,yj(j∈1,2,...,M)表示每次辐照后的故障总数目。这样就可以得到M个结果y∈RM,可根据这M个结果重构出X。Where y j (j∈1, 2, ..., M) represents the total number of faults after each irradiation. In this way, M results y ∈ R M can be obtained, and X can be reconstructed based on the M results.
在运用非相关观测时需设计一个与不相关的观测矩阵Φ:M×N(M<<N),使得内部故障点X从N维降到M维时信号能量不被破坏。利用随机关断扫描寄存器的方法,可以得到随机观测矩阵如下:In the application of uncorrelated observations, an unrelated observation matrix Φ: M × N (M < < N) is designed, so that the signal energy is not destroyed when the internal fault point X is reduced from N to M dimensions. Using the method of randomly turning off the scan register, the random observation matrix can be obtained as follows:
Figure PCTCN2016092256-appb-000005
Figure PCTCN2016092256-appb-000005
其中,Φ为随机观测矩阵,其中的元素aji=0表示在第j次辐照时关断第i个被辐照的逻辑单元对应的扫描寄存器,j∈1,2,...,M,i∈1,2,...,N。比如在第j次辐照,只有数个至数十个逻辑单元被辐照(具体数量取决于半导体工艺尺寸和激光聚焦光斑尺寸),控制开关矩阵,随机关断其相关的扫描寄存器。如关断第i个逻辑单元对应的扫描寄存器,则aji=0。这个逻辑单元的SEE敏感性产生的错误不会反映在第j次辐照的错误总数yj统计中。如同压缩感知成像技术中,该像素的光未计入观测矩阵。反之则aji=1。这样在M次辐照后,通过压缩感知信号重构可以恢复出第i个逻辑单元是否 SEE敏感,即xi=0或1。xi=0,表示该逻辑单元Gi在辐照下具有SEE可靠性,xi=1,表示该逻辑单元Gi在辐照下为SEE敏感区域。Where Φ is a random observation matrix, wherein the element a ji =0 indicates that the scan register corresponding to the i-th irradiated logic unit is turned off at the jth irradiation, j∈1, 2, ..., M , i∈1, 2,...,N. For example, in the jth irradiation, only a few to tens of logic cells are irradiated (the number depends on the size of the semiconductor process and the size of the laser focus spot), and the switch matrix is controlled to randomly turn off its associated scan register. If the scan register corresponding to the i-th logical unit is turned off, a ji =0. The error caused by the SEE sensitivity of this logical unit is not reflected in the total number of errors y j of the jth irradiation. As in the compressed sensing imaging technique, the light of the pixel is not counted in the observation matrix. Otherwise a ji =1. Thus, after M-irradiation, it is possible to recover whether the i-th logical unit is SEE-sensitive by compressing the perceptual signal reconstruction, that is, x i =0 or 1. x i =0, indicating that the logic unit G i has SEE reliability under irradiation, x i =1, indicating that the logic unit G i is an SEE sensitive area under irradiation.
在测试的每次辐照过程中,按照激光光束或重离子微束聚焦大小建立扫描单元,图4为本发明实施例中对芯片进行扫描辐照的示意图,如图4所示芯片,其中ALU(算术逻辑单元)和decoder(译码器)区域是重点辐照范围,以激光光束辐照为例,图4中小框为一次光束聚焦范围(仅为图示,实际比例比图示小),图4中用方框近似表示光束圆形范围。以0.18μm工艺为例,实验数据显示表明辐照光斑直径约3.7μm,覆盖大约10~15个逻辑单元(也称逻辑门)。当工艺节点减小到28nm,则3.7μm的激光光斑覆盖160-240个逻辑门,以此类推。也可以采用光斑聚焦半径小的技术,比如飞秒激光。因此在实施例中触发待测芯片产生单粒子效应,可以包括:利用激光光束或重离子微束辐照对待测芯片进行故障注入。利用激光光束或重离子微束辐照对待测芯片进行故障注入,可以包括:在测试的每次辐照过程中,按照激光光束或重离子微束辐照聚集大小建立扫描单元。利用激光光束或重离子微束辐照对待测芯片进行故障注入时,可以利用激光光束或重离子微束辐照对待测芯片的算术逻辑单元和译码器区域进行辐照。In each irradiation process of the test, the scanning unit is established according to the laser beam or the heavy ion microbeam focusing size. FIG. 4 is a schematic diagram of the scanning irradiation of the chip in the embodiment of the present invention, as shown in FIG. 4, wherein the ALU The (arithmetic logic unit) and decoder (decoder) regions are the key irradiation ranges, taking the laser beam irradiation as an example. The small frame in Fig. 4 is the primary beam focusing range (only the illustration, the actual ratio is smaller than the illustration), The circular extent of the beam is approximated by a square in Figure 4. Taking the 0.18 μm process as an example, the experimental data shows that the irradiation spot diameter is about 3.7 μm, covering about 10 to 15 logic cells (also called logic gates). When the process node is reduced to 28 nm, the 3.7 μm laser spot covers 160-240 logic gates, and so on. It is also possible to use a technique in which the spot focus radius is small, such as a femtosecond laser. Therefore, in the embodiment, triggering the chip to be tested to generate a single particle effect may include: performing a fault injection on the chip to be tested by using a laser beam or a heavy ion microbeam. Using the laser beam or heavy ion microbeam irradiation to perform fault injection on the chip to be tested may include: establishing a scanning unit according to the laser beam or the heavy ion microbeam irradiation aggregation size during each irradiation of the test. When a laser beam or a heavy ion microbeam is irradiated to the test chip for fault injection, the arithmetic logic unit and the decoder region of the chip to be tested may be irradiated by laser beam or heavy ion microbeam irradiation.
如图4所示芯片在两次辐照下覆盖的不同逻辑单元。假设其中第p次辐照的逻辑单元(G1,G4,G6,G9,...),其SEE敏感性信号分别为[x1,x4,x6,x9,...],则需控制随机观测矩阵,使得公式(1)中数组xpi的系数api,即[ap1,ap4,ap6,ap9,...]中一些系数为1,其余为0;第q次辐照的逻辑门(G3,G5,G7,G8,...),其SEE敏感性信号分别为[x3,x5,x7,x8,...],则需控制随机观测矩阵,使得数组[aq3,aq5,aq7,aq8,...]中一些系数为1,其余为0。Figure 4 shows the different logic cells covered by the chip under two exposures. Assuming that the logical unit (G 1 , G 4 , G 6 , G 9 , ...) of the p-th irradiation, the SEE sensitivity signals are [x 1 , x 4 , x 6 , x 9 , .. .], then the random observation matrix needs to be controlled so that the coefficient a pi of the array x pi in the formula (1), that is, some coefficients of [a p1 , a p4 , a p6 , a p9 ,...] are 1, and the rest are 0; the logical gates of the qth irradiation (G 3 , G 5 , G 7 , G 8 , ...), whose SEE sensitivity signals are [x 3 , x 5 , x 7 , x 8 , .. .], the random observation matrix needs to be controlled so that some coefficients in the array [a q3 , a q5 , a q7 , a q8 ,...] are 1 and the rest are 0.
具体在利用使能信号随机关断待测芯片的扫描寄存器,形成随机观测矩阵时,可以包括:通过串并联译码器形成随机观测矩阵开关阵列,向待测芯片的扫描寄存器的使能端口输出使能信号,随机关断待测芯片的扫描寄存器,形成随机观测矩阵;或者,可以通过控制输入测试向量,随机关断待测芯片的扫描寄存器,形成随机观测矩阵,即由输入测试向量随机控制是否将某个扫描寄存器可能出现的错误结果纳入总错误数,形成随机观测矩阵。实施例中随机关断待测芯片的扫描寄存器,形成随机观测矩阵时,还可以包括通过显微镜的二维载物台对待测芯片进行二维移动,将每一次被随机关断的扫描寄存器与被触发产生单粒子效应的待测芯片逻辑单元相匹配。 Specifically, when the randomization matrix is formed by randomly turning off the scan register of the chip to be tested by using the enable signal, the method may include: forming a random observation matrix switch array by the serial-parallel decoder, and outputting to the enable port of the scan register of the chip to be tested. Enable the signal, randomly turn off the scan register of the chip to be tested, and form a random observation matrix; or, by controlling the input test vector, randomly turn off the scan register of the chip to be tested to form a random observation matrix, that is, randomly controlled by the input test vector Whether the error result that may occur in a scan register is included in the total number of errors to form a random observation matrix. In the embodiment, the scan register of the chip to be tested is randomly turned off, and when the random observation matrix is formed, the two-dimensional movement of the chip to be tested by the two-dimensional stage of the microscope may be further included, and the scan register that is randomly turned off each time is The logic cells of the chip under test that trigger the single-particle effect are matched.
图5为本发明实施例中SEE敏感点X的信号重构流程示意图。重构算法的设计直接影响了信号的重构质量。在实施中对错误总数向量进行压缩感知信号重构,确定待测芯片内部敏感区域,可以包括:采用线性规划算法或非线性算法对错误总数向量进行压缩感知信号重构,确定待测芯片内部敏感区域。其中非线性算性例如可以是贪婪算法。贪婪算法计算复杂度低,可以简化硬件集成度。贪婪算法经多次迭代,可以使得误差逐渐减小,最终完成SEE敏感点X的信号重构,获得芯片内部SEU可靠性故障所在。实施例中,还可以采用线性规划算法和非线性算法的组合算法对错误总数向量进行压缩感知信号重构,或者是其他相关算法。FIG. 5 is a schematic diagram of a signal reconstruction process of a SEE sensitive point X according to an embodiment of the present invention. The design of the reconstruction algorithm directly affects the quality of signal reconstruction. In the implementation, the compressed sensing signal reconstruction of the total number of errors is performed to determine the sensitive area inside the chip to be tested, which may include: performing a compressed sensing signal reconstruction on the total number of errors using a linear programming algorithm or a nonlinear algorithm to determine the internal sensitivity of the chip to be tested. region. The nonlinear computing property can be, for example, a greedy algorithm. The greedy algorithm has low computational complexity and can simplify hardware integration. After repeated iterations, the greedy algorithm can gradually reduce the error, and finally complete the signal reconstruction of the SEE sensitive point X, and obtain the SEU reliability fault inside the chip. In an embodiment, a combination of a linear programming algorithm and a nonlinear algorithm may be used to perform compressed sensing signal reconstruction on the error total vector, or other related algorithms.
图6为本发明实施例中芯片单粒子效应探测装置的示意图,如图6所示,该装置可以包括:FIG. 6 is a schematic diagram of a single-particle effect detecting device for a chip according to an embodiment of the present invention. As shown in FIG. 6, the device may include:
测试机台601,用于放入待测芯片,所述待测芯片包括扫描寄存器;a test machine 601, configured to put a chip to be tested, the chip to be tested includes a scan register;
触发装置602,用于触发待测芯片产生单粒子效应;The triggering device 602 is configured to trigger a single particle effect of the chip to be tested;
随机观测矩阵形成单元603,用于随机关断待测芯片的扫描寄存器,形成随机观测矩阵;The random observation matrix forming unit 603 is configured to randomly turn off the scan register of the chip to be tested to form a random observation matrix;
测试机台601还用于向待测芯片提供输入测试向量,获得待测芯片的输出测试向量,根据输出测试向量获得错误总数向量;对错误总数向量进行压缩感知信号重构,确定待测芯片内部敏感区域。The test machine 601 is further configured to provide an input test vector to the chip to be tested, obtain an output test vector of the chip to be tested, obtain an error total vector according to the output test vector, and perform compression sensing signal reconstruction on the total error vector to determine the internal chip to be tested. Sensitive area.
如前所述,在实施例中触发装置可以是故障注入设备,例如可以是激光器,如纳秒激光、皮秒激光或飞秒激光器;或者可以是重离子微束发生器等。在实施例中激光器或重离子微束发生器可以进一步用于对待测芯片的算术逻辑单元和译码器区域进行辐照。As previously mentioned, in an embodiment the triggering device may be a fault injecting device, such as a laser, such as a nanosecond laser, a picosecond laser or a femtosecond laser; or may be a heavy ion microbeam generator or the like. In an embodiment the laser or heavy ion microbeam generator can be further used to irradiate the arithmetic logic unit and decoder region of the chip under test.
具体实例中,随机观测矩阵形成单元可以包括由串并联译码器形成的随机观测矩阵开关阵列,所述随机观测矩阵开关阵列用于向待测芯片的扫描寄存器的使能端口输出使能信号,随机关断待测芯片的扫描寄存器,形成随机观测矩阵;或者,随机观测矩阵形成单元可以进一步用于通过控制所述输入测试向量,随机关断待测芯片的扫描寄存器,形成随机观测矩阵。In a specific example, the random observation matrix forming unit may include a random observation matrix switch array formed by a parallel-parallel decoder, and the random observation matrix switch array is configured to output an enable signal to an enable port of a scan register of the chip to be tested, The scan register of the chip to be tested is randomly turned off to form a random observation matrix; or, the random observation matrix forming unit may be further configured to randomly turn off the scan register of the chip to be tested by controlling the input test vector to form a random observation matrix.
具体实例中,测试机台还可以包括显微镜的二维载物台,用于对待测芯片进行二维移动,将每一次被随机关断的扫描寄存器与被触发产生单粒子效应的待测芯片逻辑单元相匹配。In a specific example, the test machine may further include a two-dimensional stage of the microscope for performing two-dimensional movement of the chip to be tested, and each of the scan registers that are randomly turned off and the logic of the chip to be tested that are triggered to generate a single particle effect The units match.
具体实例中,随机观测矩阵形成单元进一步用于形成如下随机观测矩阵: In a specific example, the random observation matrix forming unit is further used to form a random observation matrix as follows:
Figure PCTCN2016092256-appb-000006
Figure PCTCN2016092256-appb-000006
其中,Φ为所述随机观测矩阵,其中的元素aji=0表示判断在第j次辐照时关断第i个被辐照的逻辑单元对应的扫描寄存器,j∈1,2,...,M,i∈1,2,...,N。Where Φ is the random observation matrix, wherein the element a ji =0 indicates that the scan register corresponding to the i-th irradiated logic unit is turned off at the jth irradiation, j∈1, 2, .. .,M,i∈1,2,...,N.
具体实例中,测试机台进一步用于对信号X执行一次压缩观测,得到:In a specific example, the test machine is further configured to perform a compression observation on the signal X to obtain:
Figure PCTCN2016092256-appb-000007
Figure PCTCN2016092256-appb-000007
其中,yj(j∈1,2,...,M)表示每次辐照后的故障总数目;X为待测芯片的内部SEE敏感区域,X为
Figure PCTCN2016092256-appb-000008
的数组,xji=0表示该逻辑单元Gi在第j次辐照下具有SEE可靠性,xji=1表示该逻辑单元Gi在第j次辐照下为SEE敏感区域。
Where y j (j∈1, 2, ..., M) represents the total number of faults after each irradiation; X is the internal SEE sensitive area of the chip to be tested, X is
Figure PCTCN2016092256-appb-000008
An array of x ji =0 indicates that the logical unit G i has SEE reliability under the jth irradiation, and x ji =1 indicates that the logical unit G i is an SEE sensitive region under the jth irradiation.
在实际中还要考虑观测矩阵的硬件实现复杂性。图7为本发明实施例中每一次辐照下的逻辑单元需与被随机使能的扫描寄存器相匹配的示意图。图7中显示了随机观测矩阵开关阵列及测试机台上的待测芯片母板。随机观测矩阵开关阵列连接待测芯片的扫描寄存器使能端口,利用使能信号随机关断扫描寄存器。由于内部信号点数据巨大,考虑到开关速度,可采用串并联译码器的方法得到随机观测矩阵Φ。In practice, the hardware implementation complexity of the observation matrix should also be considered. FIG. 7 is a schematic diagram of the logic unit under each irradiation in the embodiment of the present invention matched with the randomly enabled scan register. Figure 7 shows the random observation matrix switch array and the chip mother board to be tested on the test machine. The random observation matrix switch array is connected to the scan register enable port of the chip to be tested, and the scan register is randomly turned off by the enable signal. Due to the huge internal signal point data, considering the switching speed, the random observation matrix Φ can be obtained by the method of serial-parallel decoder.
利用激光器和显微镜的配套软件进行二次开发,对激光光强和同步策略进行控制。如图7所示,通过压缩感知信号重构设备上的随机观测矩阵开关阵列数据,利用显微镜的二维载物台实现对芯片的二维移动,使得每一次被随机观测矩阵开关阵列使能的扫描寄存器与被辐照的芯片逻辑单元相匹配。实施例中可以利用样品位移控制命令实现对芯片激光注入的控制并返回控制状态信号。Secondary development using laser and microscope software to control laser intensity and synchronization strategy. As shown in FIG. 7, the random observation matrix switch array data on the device is reconstructed by compressing the sensing signal, and the two-dimensional movement of the chip is realized by the two-dimensional stage of the microscope, so that each time the matrix array array is randomly observed, the array is enabled. The scan register is matched to the irradiated chip logic unit. In the embodiment, the sample displacement control command can be used to control the laser injection of the chip and return to the control state signal.
在具体的实施例中,可以将待测的集成电路开盖去封,然后放置入压缩感知信号重构的测试机台,结合故障注入设备(触发装置),输入相应的测试向量与测试协议,直到下一次辐照。图8为本发明实施例中故障注入设备与压缩感知测试机台各自的任务与协同示意图,如图8所示,对故障注入设备和压缩感知测试机台进行同步控制,故障注 入设备控制第p次激光辐照范围,测试机台进行图像处理,对比芯片后端版图(Layout),取得被辐照的逻辑单元列表Gpi,控制随机关断[api],建立方程Y=ΦX,并控制移动台继续移动,进行下一次辐照处理。In a specific embodiment, the integrated circuit to be tested can be unsealed and then placed in a test machine for reconstructing the compressed sensing signal, and combined with the fault injection device (trigger device), the corresponding test vector and test protocol are input. Until the next irradiation. FIG. 8 is a schematic diagram of tasks and cooperation between a fault injection device and a compression sensing test machine according to an embodiment of the present invention. As shown in FIG. 8 , the fault injection device and the compression sensing test machine are synchronously controlled, and the fault injection device controls the p. The sub-laser irradiation range, the test machine performs image processing, compares the chip back layout (Layout), obtains the irradiated logic unit list G pi , controls the random shutdown [a pi ], establishes the equation Y=ΦX, and controls The mobile station continues to move for the next irradiation process.
这样在每次辐照测试后,可在测试向量较少的情况下以较高的测试覆盖率得到每次辐照后的故障总数目yj(j∈1,2,...,M),再通过非线性优化公式(1),重建信号
Figure PCTCN2016092256-appb-000009
表示该逻辑单元在辐照下具有SEE可靠性,xi=1,表示该逻辑单,属于辐照下的SEE敏感区域。从而获得芯片内部SEU可靠性故障所在。
In this way, after each irradiation test, the total number of faults after each irradiation can be obtained with a high test coverage with less test vectors y j (j∈1, 2,..., M) And reconstruct the signal by nonlinear optimization formula (1)
Figure PCTCN2016092256-appb-000009
Indicates that the logic unit has SEE reliability under irradiation, x i =1, indicating that the logic sheet belongs to the SEE sensitive area under irradiation. Therefore, the SEU reliability fault inside the chip is obtained.
由上述实施例可知,本发明实施例中,将芯片内部单粒子效应(SEE)敏感点类比为具有稀疏性的待观测信号,因此可采用压缩感知的方法来无损高效地进行探测。目前芯片的辐射效应可靠性测试要求测试工程师长时间反复扫描抽检芯片,仅凭输出结果来分析和判断芯片内部可靠性。即使得到错误结果,还需结合故障分析方法(Fault Analysis)对数据进行分析判别,才能发现芯片中的漏洞部位。如何对芯片进行辐射效应可靠性测试,并高效地将芯片由于故障注入引发的内部变化快速有效地反映在输出结果,是本发明实施例拟解决的关键问题之一。本发明实施例基于压缩感知理论通过建立辐照下随机观测矩阵,和可测性设计测试结合,得到每次辐照后的错误数目,然后通过非线性优化,以较少的观测代价,较少的测试时间,高效地将芯片由于故障注入引发的内部变化快速有效地反映在输出结果。It can be seen from the above embodiments that in the embodiment of the present invention, the single-particle effect (SEE) sensitive point in the chip is analogized to the signal to be observed with sparsity, so the method of compressed sensing can be used to perform the detection without loss and high efficiency. At present, the radiation effect reliability test of the chip requires the test engineer to repeatedly scan the sampling chip for a long time, and analyze and judge the internal reliability of the chip only by the output result. Even if you get the wrong result, you need to combine the fault analysis method (Fault Analysis) to analyze the data to find the vulnerability in the chip. How to perform the radiation effect reliability test on the chip and efficiently and efficiently reflect the internal change caused by the fault injection on the output result is one of the key problems to be solved by the embodiment of the present invention. The embodiment of the present invention combines the random observation matrix under irradiation based on the compressed sensing theory, and combines with the testability design test to obtain the number of errors after each irradiation, and then through nonlinear optimization, with less observation cost and less The test time efficiently and efficiently reflects the internal changes caused by the fault injection of the chip in the output.
传统故障注入须在时间上与芯片内部关键指令处理同步,在空间上须将故障注入工具聚焦于芯片敏感寄存器区域,这需要具备深厚专业知识的测试人员经过长时间摸索或进行白盒测试。而在本发明实施例中,可以采用激光精确聚焦待测芯片的故障注入时间和区域,并将聚焦光斑覆盖下的扫描寄存器,利用随机开关控制扫描寄存器的使能端口,形成随机观测矩阵,用以建立压缩感知的随机观测矩阵。The traditional fault injection must be synchronized with the key instruction processing inside the chip. In space, the fault injection tool must be focused on the chip sensitive register area. This requires a deep knowledge of the tester to perform a white box test. In the embodiment of the present invention, the laser can accurately focus the fault injection time and region of the chip to be tested, and the scanning register covered by the focused spot is used to control the enable port of the scan register by using a random switch to form a random observation matrix. To establish a stochastic observation matrix of compressed sensing.
本发明实施例中,通过输出测试向量得到错误总数,然后通过信号重构算法得到内部敏感点,即可快速判断该芯片的辐射效应可靠性程度。本发明实施例中以贪婪算法为例进行信号重构,也可以采用其他相关算法。In the embodiment of the present invention, the total number of errors is obtained by outputting the test vector, and then the internal sensitive point is obtained by the signal reconstruction algorithm, so that the reliability degree of the radiation effect of the chip can be quickly determined. In the embodiment of the present invention, the greedy algorithm is taken as an example for signal reconstruction, and other related algorithms may also be used.
综上所述,本发明实施例由于进行了可测性设计和自动化测试向量,因此可高效地将芯片由于故障注入引发的内部变化快速有效地反映在输出结果,并且减少测试中对芯片设计的了解和对测试经验的依赖。由于采用压缩感知理论,因此能以较少的观测代价,较少的测试时间,高效的进行观测和信号重构。 In summary, the embodiment of the present invention can efficiently and effectively reflect the internal changes caused by the fault injection in the output result, and reduce the chip design in the test, because the testability design and the automatic test vector are performed. Understand and rely on testing experience. Due to the theory of compressed sensing, observation and signal reconstruction can be performed efficiently with less observation cost and less test time.
目前发明人已初步搭建了一个激光故障注入测试实验平台,采用美国Spectra-Physics公司的Mai Tai Deepsee激光器以及Nikon公司的A1MP+系列共聚焦显微镜。前者可在680nm-1040nm范围内提供可调功率的辐照,其采用超稳再生所模具技术,波长调节和激励配置简单易调,光束指向稳定,功率波动小,消除了波长漂移。后者直接内置飞秒激光器并进行了光路设计,可将激光聚焦在1μm空间范围内,若采用合适的物镜,可将激光束聚焦在更小的空间范围内。共聚焦显微镜本身具有二维电动载物台,可实现样品的二维移动,实现电子芯片整个表面范围的故障注入攻击。发明人已在实验平台上得到初步结果,能够以900nm左右的波长从正面辐照电路,产生稳定的错误。At present, the inventor has initially set up a laser fault injection test platform, using the Mai Tai Deepsee laser from Spectra-Physics of the United States and the A1MP+ series confocal microscope from Nikon. The former can provide adjustable power irradiation in the range of 680nm-1040nm. It adopts ultra-stable regenerative mold technology, the wavelength adjustment and excitation configuration are simple and easy to adjust, the beam direction is stable, the power fluctuation is small, and the wavelength drift is eliminated. The latter directly incorporates a femtosecond laser and has an optical path design that focuses the laser in a 1 μm space. With a suitable objective, the laser beam can be focused in a smaller space. The confocal microscope itself has a two-dimensional motorized stage that enables two-dimensional movement of the sample to achieve a fault injection attack across the entire surface of the electronic chip. The inventors have obtained preliminary results on the experimental platform that the circuit can be irradiated from the front side at a wavelength of around 900 nm, resulting in a stable error.
本领域内的技术人员应明白,本发明的实施例可提供为方法、系统、或计算机程序产品。因此,本发明可采用完全硬件实施例、完全软件实施例、或结合软件和硬件方面的实施例的形式。而且,本发明可采用在一个或多个其中包含有计算机可用程序代码的计算机可用存储介质(包括但不限于磁盘存储器、CD-ROM、光学存储器等)上实施的计算机程序产品的形式。Those skilled in the art will appreciate that embodiments of the present invention can be provided as a method, system, or computer program product. Accordingly, the present invention may take the form of an entirely hardware embodiment, an entirely software embodiment, or a combination of software and hardware. Moreover, the invention can take the form of a computer program product embodied on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) including computer usable program code.
本发明是参照根据本发明实施例的方法、设备(系统)、和计算机程序产品的流程图和/或方框图来描述的。应理解可由计算机程序指令实现流程图和/或方框图中的每一流程和/或方框、以及流程图和/或方框图中的流程和/或方框的结合。可提供这些计算机程序指令到通用计算机、专用计算机、嵌入式处理机或其他可编程数据处理设备的处理器以产生一个机器,使得通过计算机或其他可编程数据处理设备的处理器执行的指令产生用于实现在流程图一个流程或多个流程和/或方框图一个方框或多个方框中指定的功能的装置。The present invention has been described with reference to flowchart illustrations and/or block diagrams of methods, apparatus (system), and computer program products according to embodiments of the invention. It will be understood that each flow and/or block of the flowchart illustrations and/or FIG. These computer program instructions can be provided to a processor of a general purpose computer, special purpose computer, embedded processor, or other programmable data processing device to produce a machine for the execution of instructions for execution by a processor of a computer or other programmable data processing device. Means for implementing the functions specified in one or more of the flow or in a block or blocks of the flow chart.
这些计算机程序指令也可存储在能引导计算机或其他可编程数据处理设备以特定方式工作的计算机可读存储器中,使得存储在该计算机可读存储器中的指令产生包括指令装置的制造品,该指令装置实现在流程图一个流程或多个流程和/或方框图一个方框或多个方框中指定的功能。The computer program instructions can also be stored in a computer readable memory that can direct a computer or other programmable data processing device to operate in a particular manner, such that the instructions stored in the computer readable memory produce an article of manufacture comprising the instruction device. The apparatus implements the functions specified in one or more blocks of a flow or a flow and/or block diagram of the flowchart.
这些计算机程序指令也可装载到计算机或其他可编程数据处理设备上,使得在计算机或其他可编程设备上执行一系列操作步骤以产生计算机实现的处理,从而在计算机或其他可编程设备上执行的指令提供用于实现在流程图一个流程或多个流程和/或方框图一个方框或多个方框中指定的功能的步骤。These computer program instructions can also be loaded onto a computer or other programmable data processing device such that a series of operational steps are performed on a computer or other programmable device to produce computer-implemented processing for execution on a computer or other programmable device. The instructions provide steps for implementing the functions specified in one or more of the flow or in a block or blocks of a flow diagram.
以上所述的具体实施例,对本发明的目的、技术方案和有益效果进行了进一步详细说明,所应理解的是,以上所述仅为本发明的具体实施例而已,并不用于限定本发明的 保护范围,凡在本发明的精神和原则之内,所做的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。 The above described specific embodiments of the present invention are further described in detail, and are intended to be illustrative of the embodiments of the present invention. All modifications, equivalent substitutions, improvements, etc., made within the spirit and scope of the invention are intended to be included within the scope of the invention.

Claims (16)

  1. 一种芯片单粒子效应探测方法,其特征在于,包括:A chip single particle effect detecting method, comprising:
    将待测芯片放入测试机台,触发待测芯片产生单粒子效应;Putting the chip to be tested into the test machine, triggering the single chip effect of the chip to be tested;
    随机关断待测芯片的扫描寄存器,形成随机观测矩阵;Randomly turning off the scan register of the chip to be tested to form a random observation matrix;
    向待测芯片提供输入测试向量,获得待测芯片的输出测试向量,根据输出测试向量获得错误总数向量;Providing an input test vector to the chip to be tested, obtaining an output test vector of the chip to be tested, and obtaining an error total vector according to the output test vector;
    对错误总数向量进行压缩感知信号重构,确定待测芯片内部敏感区域。The compressed sensing signal is reconstructed from the total number of errors to determine the sensitive area inside the chip to be tested.
  2. 如权利要求1所述的方法,其特征在于,所述触发待测芯片产生单粒子效应,包括:利用激光光束或重离子微束辐照对待测芯片进行故障注入。The method according to claim 1, wherein the triggering the chip to be tested to generate a single particle effect comprises: performing a fault injection on the chip to be tested by using a laser beam or a heavy ion microbeam.
  3. 如权利要求2所述的方法,其特征在于,所述利用激光光束或重离子微束辐照对待测芯片进行故障注入,包括:在测试的每次辐照过程中,按照激光光束或重离子微束聚集大小建立扫描单元。The method according to claim 2, wherein said laser beam or heavy ion microbeam irradiation is used to perform fault injection on the chip to be tested, including: according to the laser beam or heavy ion during each irradiation of the test The microbeam aggregation size establishes a scanning unit.
  4. 如权利要求2所述的方法,其特征在于,所述利用激光光束或重离子微束辐照对待测芯片进行故障注入,包括:利用激光光束或重离子微束对待测芯片的算术逻辑单元和译码器区域进行辐照。The method according to claim 2, wherein said using the laser beam or the heavy ion microbeam to irradiate the chip to be tested for fault injection comprises: using a laser beam or a heavy ion microbeam to perform an arithmetic logic unit of the chip to be tested The decoder area is irradiated.
  5. 如权利要求1所述的方法,其特征在于,所述随机关断待测芯片的扫描寄存器,形成随机观测矩阵,包括:The method of claim 1 wherein said randomly turning off a scan register of the chip under test to form a random observation matrix comprises:
    通过串并联译码器形成随机观测矩阵开关阵列,向待测芯片的扫描寄存器的使能端口输出使能信号,随机关断待测芯片的扫描寄存器,形成随机观测矩阵;Forming a random observation matrix switch array by a serial-parallel decoder, outputting an enable signal to an enable port of a scan register of the chip to be tested, and randomly turning off a scan register of the chip to be tested to form a random observation matrix;
    或,通过控制所述输入测试向量,随机关断待测芯片的扫描寄存器,形成随机观测矩阵。Or, by controlling the input test vector, the scan register of the chip to be tested is randomly turned off to form a random observation matrix.
  6. 如权利要求1所述的方法,其特征在于,所述随机关断待测芯片的扫描寄存器,形成随机观测矩阵,还包括:The method of claim 1, wherein the randomly turning off the scan register of the chip to be tested to form a random observation matrix further comprises:
    通过显微镜的二维载物台对待测芯片进行二维移动,将每一次被随机关断的扫描寄存器与被触发产生单粒子效应的待测芯片逻辑单元相匹配。The two-dimensional movement of the chip to be tested is performed by the two-dimensional stage of the microscope, and the scan register that is randomly turned off is matched with the logic unit of the chip to be tested that is triggered to generate a single particle effect.
  7. 如权利要求1所述的方法,其特征在于,所述随机观测矩阵如下:The method of claim 1 wherein said random observation matrix is as follows:
    Figure PCTCN2016092256-appb-100001
    Figure PCTCN2016092256-appb-100001
    其中,Φ为所述随机观测矩阵,其中的元素aji=0表示在第j次辐照时关断第i个被辐照的逻辑单元对应的扫描寄存器,j∈1,2,...,M,i∈1,2,...,N。Where Φ is the random observation matrix, wherein the element a ji =0 indicates that the scan register corresponding to the i-th irradiated logic unit is turned off at the jth irradiation, j∈1, 2,... , M, i∈1, 2,..., N.
  8. 如权利要求7所述的方法,其特征在于,所述向待测芯片提供输入测试向量,获得待测芯片的输出测试向量,根据输出测试向量获得错误总数向量,包括对信号X执行一次压缩观测,得到:The method according to claim 7, wherein the input test vector is provided to the chip to be tested, the output test vector of the chip to be tested is obtained, and the error total vector is obtained according to the output test vector, including performing a compression observation on the signal X. ,get:
    Figure PCTCN2016092256-appb-100002
    Figure PCTCN2016092256-appb-100002
    其中,yj(j∈1,2,...,M)表示每次辐照后的故障总数目;X为待测芯片的内部SEE敏感区域,X为
    Figure PCTCN2016092256-appb-100003
    的数组,xji=0表示该逻辑单元Gi在第j次辐照下具有SEE可靠性,xji=1表示该逻辑单元Gi在第j次辐照下为SEE敏感区域。
    Where y j (j∈1, 2, ..., M) represents the total number of faults after each irradiation; X is the internal SEE sensitive area of the chip to be tested, X is
    Figure PCTCN2016092256-appb-100003
    An array of x ji =0 indicates that the logical unit G i has SEE reliability under the jth irradiation, and x ji =1 indicates that the logical unit G i is an SEE sensitive region under the jth irradiation.
  9. 如权利要求1所述的方法,其特征在于,所述对错误总数向量进行压缩感知信号重构,确定待测芯片内部敏感区域,包括:采用线性规划算法或非线性算法对错误总数向量进行压缩感知信号重构,确定待测芯片内部敏感区域。The method according to claim 1, wherein the reconstructing the perceptual signal vector for the error total vector to determine a sensitive area inside the chip to be tested comprises: compressing the total number of errors by using a linear programming algorithm or a nonlinear algorithm Perceive signal reconstruction to determine the sensitive area inside the chip to be tested.
  10. 一种芯片单粒子效应探测装置,其特征在于,包括:A chip single-event effect detecting device, comprising:
    测试机台,用于放入待测芯片,所述待测芯片包括扫描寄存器;a test machine for placing a chip to be tested, the chip to be tested comprising a scan register;
    触发装置,用于触发待测芯片产生单粒子效应;a triggering device for triggering a single particle effect of the chip to be tested;
    随机观测矩阵形成单元,用于随机关断待测芯片的扫描寄存器,形成随机观测矩阵;a random observation matrix forming unit for randomly turning off a scan register of the chip to be tested to form a random observation matrix;
    所述测试机台还用于向待测芯片提供输入测试向量,获得待测芯片的输出测试向量,根据输出测试向量获得错误总数向量;对错误总数向量进行压缩感知信号重构,确定待测芯片内部敏感区域。The test machine is further configured to provide an input test vector to the chip to be tested, obtain an output test vector of the chip to be tested, obtain an error total vector according to the output test vector, perform a compressed sensing signal reconstruction on the total error vector, and determine a chip to be tested. Internal sensitive area.
  11. 如权利要求10所述的芯片单粒子效应探测装置,其特征在于,所述触发装置为激光器或重离子微束发生器。The chip single particle effect detecting apparatus according to claim 10, wherein said triggering means is a laser or a heavy ion microbeam generator.
  12. 如权利要求11所述的芯片单粒子效应探测装置,其特征在于,所述激光器或重离子微束发生器进一步用于对待测芯片的算术逻辑单元和译码器区域进行辐照。 The chip single particle effect detecting apparatus according to claim 11, wherein said laser or heavy ion microbeam generator is further used for irradiating an arithmetic logic unit and a decoder area of a chip to be tested.
  13. 如权利要求10所述的芯片单粒子效应探测装置,其特征在于,所述随机观测矩阵形成单元包括由串并联译码器形成的随机观测矩阵开关阵列,所述随机观测矩阵开关阵列用于向待测芯片的扫描寄存器的使能端口输出使能信号,随机关断待测芯片的扫描寄存器,形成随机观测矩阵;The chip single-event effect detecting apparatus according to claim 10, wherein said random observation matrix forming unit comprises a random observation matrix switch array formed by a series-parallel decoder, said random observation matrix switch array being used for The enable port of the scan register of the chip to be tested outputs an enable signal, and randomly turns off the scan register of the chip to be tested to form a random observation matrix;
    或,所述随机观测矩阵形成单元进一步用于通过控制所述输入测试向量,随机关断待测芯片的扫描寄存器,形成随机观测矩阵。Alternatively, the random observation matrix forming unit is further configured to randomly turn off the scan register of the chip to be tested by controlling the input test vector to form a random observation matrix.
  14. 如权利要求10所述的芯片单粒子效应探测装置,其特征在于,所述测试机台还包括显微镜的二维载物台,用于对待测芯片进行二维移动,将每一次被随机观测矩阵形成单元关断的扫描寄存器与被触发产生单粒子效应的待测芯片逻辑单元相匹配。The chip single-event effect detecting apparatus according to claim 10, wherein the testing machine further comprises a two-dimensional stage of the microscope, wherein the chip to be tested is moved two-dimensionally, and each time the matrix is randomly observed. The scan register that forms the cell turn-off matches the logic cell of the chip under test that is triggered to produce a single particle effect.
  15. 如权利要求10所述的芯片单粒子效应探测装置,其特征在于,所述随机观测矩阵形成单元进一步用于形成如下随机观测矩阵:The chip single-event effect detecting apparatus according to claim 10, wherein said random observation matrix forming unit is further configured to form a random observation matrix as follows:
    Figure PCTCN2016092256-appb-100004
    Figure PCTCN2016092256-appb-100004
    其中,Φ为所述随机观测矩阵,其中的元素aji=0表示判断在第j次辐照时关断第i个被辐照的逻辑单元对应的扫描寄存器,j∈1,2,...,M,i∈1,2,...,N。Where Φ is the random observation matrix, wherein the element a ji =0 indicates that the scan register corresponding to the i-th irradiated logic unit is turned off at the jth irradiation, j∈1, 2, .. .,M,i∈1,2,...,N.
  16. 如权利要求15所述的芯片单粒子效应探测装置,其特征在于,所述测试机台进一步用于对信号X执行一次压缩观测,得到:The chip single-event effect detecting apparatus according to claim 15, wherein the testing machine is further configured to perform a compression observation on the signal X to obtain:
    Figure PCTCN2016092256-appb-100005
    Figure PCTCN2016092256-appb-100005
    其中,yj(j∈1,2,...,M)表示每次辐照后的故障总数目;X为待测芯片的内部SEE敏感区域,X为
    Figure PCTCN2016092256-appb-100006
    的数组,xji=0表示该逻辑单元Gi在第j次辐照下具有SEE可靠性,xji=1表示该逻辑单元Gi在第j次辐照下为SEE敏感区域。
    Where y j (j∈1, 2, ..., M) represents the total number of faults after each irradiation; X is the internal SEE sensitive area of the chip to be tested, X is
    Figure PCTCN2016092256-appb-100006
    An array of x ji =0 indicates that the logical unit G i has SEE reliability under the jth irradiation, and x ji =1 indicates that the logical unit G i is an SEE sensitive region under the jth irradiation.
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