WO2017191796A1 - Thin-film production device, and thin-film production method - Google Patents
Thin-film production device, and thin-film production method Download PDFInfo
- Publication number
- WO2017191796A1 WO2017191796A1 PCT/JP2017/016584 JP2017016584W WO2017191796A1 WO 2017191796 A1 WO2017191796 A1 WO 2017191796A1 JP 2017016584 W JP2017016584 W JP 2017016584W WO 2017191796 A1 WO2017191796 A1 WO 2017191796A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- film
- film thickness
- thickness sensor
- thin film
- growth rate
- Prior art date
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
- C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
Definitions
- the present invention relates to a technique for forming a thin film, and in particular, to provide a thin film manufacturing apparatus and a thin film manufacturing method in which a film thickness sensor for detecting a growth rate of a thin film has a long usable period.
- a reference numeral 100 in FIG. 3 is a conventional thin film manufacturing apparatus and includes a vacuum chamber 113.
- An evaporation source 112 is disposed inside the vacuum chamber 113.
- the evaporation source 112 has an evaporation container 133, and the film formation target substrate 115 carried into the vacuum chamber 113 passes or is disposed above the evaporation container 133. Yes.
- the evaporation container 133 is hollow, and an organic material 137 made of a powdery organic compound is disposed inside the evaporation container 133.
- the evaporation container 133 is provided with a heating device 134, and the heating device 134 is connected to a film forming power source 145.
- the inside of the vacuum chamber 113 is evacuated by the vacuum evacuation device 139 to form a vacuum atmosphere, and the heating device 134 is energized by the film forming power source 145 to generate heat.
- the heated heating device 134 heats the evaporation container 133.
- the organic material 137 that has been heated and disposed inside the evaporation container 133 is heated by the evaporation container 133 that has been heated.
- the organic material 137 is heated to an evaporation temperature or higher, it evaporates (including sublimation), and a large amount of the vapor of the organic material 137 is released into the evaporation container 133.
- a discharge hole 138 is provided at a position of the evaporation container 133 facing the film formation target substrate 115, and the generated vapor is discharged from the discharge hole 138 into the vacuum chamber 113 and reaches the surface of the film formation target substrate 115. Then, a thin film of the organic material 137 grows in the reached portion.
- a growth rate control circuit 114 that controls the growth rate of the thin film of the organic material 137 is disposed outside the vacuum chamber 113. The procedure by which the growth rate control circuit 114 controls the growth rate will be described.
- a film thickness sensor 131 is provided in the vacuum chamber 113, and the film thickness sensor 131 is provided in the growth rate control circuit 114.
- the growth rate measuring device 141 is connected.
- the film thickness sensor 131 is disposed at a side position of the film formation target substrate 115, and the vapor of the organic material 137 released from the evaporation source 112 reaches the film formation target substrate 115 and the film thickness sensor 131.
- a thin film is grown on the film formation target substrate 115 and the film thickness sensor 131, and the film thickness detected by the film thickness sensor 131 is output to the growth rate measuring device 141 as a signal indicating the film thickness.
- the measuring device 141 obtains the growth rate of the film thickness, and a signal indicating the growth rate is output to the velocity deviation detector 142 as a measurement signal.
- the desired growth rate of the thin film grown on the surface of the film formation target substrate 115 is obtained in advance, converted into the growth rate of the surface of the film thickness sensor 131 and stored in the storage device 143 as a reference value. From this, a reference signal indicating a reference value is output and input to the speed deviation detector 142.
- the speed deviation detector 142 obtains a magnitude relationship and a difference value between the value indicated by the input reference signal and the value indicated by the input measurement signal, and calculates a deviation which is a signed difference value indicating positive / negative.
- a deviation signal is output from the speed deviation detector 142 to the film forming power source 145.
- the film forming power source 145 includes the heating device 134. Is reduced, the amount of vapor generated by the organic material 137 inside the evaporation source 112 is reduced, and the growth rate values of the film formation target substrate 115 and the film thickness sensor 131 are reduced.
- the film-forming power source 145 increases the current output to the heating device 134 to increase the organic content inside the evaporation source 112.
- the growth rate of the film formation target substrate 115 and the film thickness sensor 131 is increased by increasing the amount of vapor generated from the material 137.
- the value of the current supplied to the heating device 134 by adjusting the value of the current supplied to the heating device 134, the variation in the amount of steam generated from the organic material 137 is reduced, the amount of steam generated is maintained at a constant value, and the growth rate is set to the reference value. Maintained.
- the amount of current to be increased and the amount of current to be decreased are proportional to the value of the deviation. When the absolute value of the deviation is large, the deviation quickly approaches zero.
- Reference numeral 105 in FIG. 4 is a curve showing a change in the growth rate over time when the growth rate is controlled by a constant monitoring method, and a small increase or decrease is made while the growth rate approaches the straight line 106 indicating the reference value. As a result of this fine increase / decrease, the difference between the actual growth rate and the reference value is large even when the reference value is approached.
- the present invention was created to solve the above-mentioned disadvantages of the prior art, and an object of the present invention is to provide a thin film manufacturing apparatus capable of detecting the growth rate of a thin film for a long period of time.
- the present invention provides a vacuum chamber, a film formation source in which a film formation material is disposed, power supply to the film formation source, and the film formation material disposed in the film formation source.
- a main controller for discharging fine particles from the discharge part of the film forming source to the inside of the vacuum chamber, and a film thickness of the thin film formed on the surface, arranged at a position where the fine particles reach and the thin film grows A film thickness sensor that outputs a film thickness signal of the content, and the main control device determines the magnitude of electric power supplied to the film formation source based on the film thickness signal output by the film thickness sensor.
- a thin film manufacturing apparatus for changing a discharge rate of the film forming source to grow a thin film on the surface of the film formation target at a desired growth rate, wherein a shutter is disposed in the vacuum chamber, and the shutter Is moved by the main controller, and the shutter is connected to the film thickness sensor.
- a shielded state that is located between the discharge part and shields the fine particles from reaching the film thickness sensor, and moves from a position between the film thickness sensor and the discharge part to another place,
- the thin film manufacturing apparatus is configured to switch a reaching state in which fine particles reach the film thickness sensor.
- This invention is a thin film manufacturing apparatus with which the film thickness of the thin film formed in the said film thickness sensor is measured during the arrival period when the said shutter maintains the said arrival state.
- the present invention is a thin film manufacturing apparatus that obtains the measured growth rate on the film thickness sensor from the measured film thickness and changes the magnitude of electric power supplied to the film formation source.
- the present invention provides a vacuum atmosphere inside the vacuum chamber, supplies power to a film forming source disposed inside the vacuum chamber, and discharges fine particles of a film forming material from a discharge portion of the film forming source. The fine particles reach the film formation object and the film thickness sensor located in the atmosphere, and the measurement growth rate is changed by changing the magnitude of the electric power based on the growth rate of the thin film grown on the film thickness sensor.
- a thin film manufacturing method that approaches a reference speed, wherein a shutter is provided inside the vacuum chamber, the shutter is opened and closed while the fine particles reach the film formation target, and the film thickness sensor and the discharge unit The shutter is positioned between the film thickness sensor and the film thickness sensor so that the fine particles do not reach the film thickness sensor.
- Reachable state Which is a thin film manufacturing method of switching alternately.
- the present invention is the thin film manufacturing method according to claim 4, wherein the measured growth rate is obtained for each arrival period in which the shutter maintains the arrival state, and the magnitude of electric power supplied to the film forming source is changed.
- the present invention if the time for one cycle is set and the supplied power is changed once during one cycle, the growth rate oscillation caused by the constant control is eliminated, so that the control becomes easy.
- the time for the thin film to adhere to the film thickness sensor can be shortened, so that the life of the film thickness sensor can be extended.
- the block diagram for demonstrating the thin film manufacturing apparatus of this invention Graph for explaining the relationship between the oscillation frequency and film thickness of crystal units
- Block diagram for explaining a conventional thin film manufacturing apparatus Graph showing growth rate over time A graph comparing the frequency change in the arrival period and the frequency change when the arrival period and the cutoff period are repeated in a short time
- Reference numeral 10 in FIG. 1 indicates a thin film manufacturing apparatus of the present invention.
- the thin film manufacturing apparatus 10 includes a vacuum chamber 13, and a film forming source 12 is disposed inside the vacuum chamber 13.
- the film forming source 12 has a hollow evaporation container 33, and a film forming material 37 is disposed in the hollow portion.
- the film forming material 37 is a powdery organic compound here, but may be an inorganic material such as a metal material or a metal oxide, or a liquid material.
- a vacuum evacuation device 45 is connected to the vacuum chamber 13, and when the vacuum evacuation device 45 is operated and the inside of the vacuum chamber 13 is evacuated, a vacuum atmosphere is formed inside the vacuum chamber 13.
- the inner hollow portion of the evaporation container 33 is evacuated by the evacuation device 45, and a vacuum atmosphere is formed in the same manner as the vacuum chamber 13.
- Another vacuum evacuation device may be connected to the evaporation vessel 33, and the inside of the evaporation vessel 33 may be evacuated by the vacuum evacuation device.
- a main controller 18 is disposed outside the vacuum chamber 13.
- the main controller 18 is provided with a growth rate controller 14, and the growth rate controller 14 is provided with a film forming power source 46 and a power source controller 42 for controlling the operation of the film forming power source 46.
- the power supply controller 42 When the power supply controller 42 operates the film forming power source 46, power is supplied from the film forming power source 46 to the film forming source 12.
- a heating device 34 is provided inside the film forming source 12, and the heating device 34 generates heat by the supplied power to heat the film forming material 37.
- a vapor discharge hole is formed as a discharge part 38 in the ceiling of the evaporation container 33, and the fine particles of the film forming material 37 pass through the vapor discharge hole, so that the inside of the vacuum chamber 13 from the discharge part 38 of the film formation source 12. Then, the fine particles of the film forming material 37 are released. Therefore, when power is supplied from the main controller 18 to the film forming source 12, the fine particles of the film forming material 37 are released from the film forming source 12.
- the discharge part 38 may be a plurality of vapor discharge ports.
- the film formation target is placed stationary at the film formation position where the fine particles of the film formation material 37 reach, or the film formation target passes through the film formation position.
- the substrate holder 39 is provided at the film formation position where the fine particles of the film formation material 37 reach, and the film formation target indicated by reference numeral 15 is held by the substrate holder 39 and is stationary.
- a thin film here, an organic thin film
- a film thickness sensor 31 and a shutter 35 are disposed inside the vacuum chamber 13.
- the main controller 18 is provided with a motor controller 51 and an opening / closing controller 43 connected to the motor controller 51.
- the shutter 35 is connected to a motor 36, and the rotation of the motor 36 is controlled by a motor controller 51.
- the shutter 35 is moved in the vacuum chamber 13 by the rotation of the motor 36 so that the position can be changed.
- the shutter 35 is moved from the blocking position in the blocking state, which is located at the blocking position, which is a position between the film thickness sensor 31 and the discharge portion 38, by the opening / closing controller 43 controlling the motor controller 51.
- the shutter 35 is to be opened and closed by being in the shielding state and the reaching state.
- the film thickness sensor 31 When the shutter 35 is in the reaching state, the film thickness sensor 31 is located at a location where the fine particles of the film forming material 37 emitted from the film forming source 12 can reach, and at that time, the film forming object 15 and the film thickness. Fine particles of the film forming material 37 released from the same film forming source 12 reach the sensor 31, and a thin film made of the same kind of fine particles is formed on the surface of the film thickness sensor 31 and the surface of the film formation target 15. grow up. Since the film formation target 15 and the film thickness sensor 31 have different distances from the film formation source 12, the film formation target 15 and the film thickness sensor 31 have a film thickness at a certain place ratio corresponding to the distance. A thin film grows.
- the main controller 18 is provided with a growth rate measuring device 41, and the film thickness sensor 31 is connected to the growth rate measuring device 41.
- the film thickness sensor 31 outputs a film thickness signal indicating the film thickness of the thin film attached to the surface to the main controller 18.
- the film thickness signal output from the film thickness sensor 31 is input to the growth rate measuring device 41 of the main control device 18, and the growth rate measuring device 41 continues (for example, within 1 second) while the shutter 35 is continuously reached. ),
- the film thickness of the thin film on the film thickness sensor 31 is measured at different times.
- the main control device 18 operates the shutter 35 so as to alternately repeat a certain arrival period and a certain shielding period, and a total of one arrival period and one shielding period adjacent to the arrival period.
- the growth rate of the thin film grown on the film thickness sensor 31 is calculated.
- the growth rate is “the increase in film thickness / the time required for the increase”.
- the main controller 18 can calculate the growth rate of the thin film on the film formation target 15 from the proportional relationship and the growth rate of the thin film on the film thickness sensor 31.
- the growth rate measuring device 41 outputs the calculated growth rate of the thin film on the film thickness sensor 31 as the measured growth rate.
- the main controller 18 is provided with a storage device 49, which stores a reference value for the growth rate of the thin film on the film thickness sensor 31 as a reference rate.
- a reference speed and a measured growth speed are input to the power supply controller 42.
- the power supply controller 42 compares the reference speed and the measured growth speed, calculates a deviation consisting of a value corresponding to the difference and a sign indicating which is larger, and forms a film forming power supply 46 as a control signal indicating the speed deviation. Output to.
- the reference value of the growth rate for the film formation target 15 is set as the target growth rate. If this is the case, the growth rate of the thin film on the film thickness sensor 31 and the reference speed for the film thickness sensor 31 are compared.
- the magnitude of the electric power supplied from the film formation power source 46 to the heating device 34 is controlled by a control signal output from the power supply controller 42.
- the film formation is performed.
- the film forming power source 46 is controlled to reduce the power supplied to the heating device 34.
- the “release rate” of the film forming source 12 is a value of “release amount / release time of the film forming source 12”.
- the film forming power source 46 is controlled to increase the power supplied to the heating device 34 in order to increase the particle release rate.
- the vapor emitted from the discharge unit 38 does not reach the film thickness sensor 31 even if it reaches the film formation target 15 and does not reach the film formation target 15. Even if a thin film grows on the film thickness sensor 15, no thin film grows on the film thickness sensor 31.
- the thin film formed on the film thickness sensor 31 is thinner than the film thickness of the thin film formed on the single film formation object 15, and therefore, a plurality of film formation objects are obtained by the single film thickness sensor 31. 15 can be formed one by one.
- the graph of FIG. 2 shows the relationship between the oscillation frequency (horizontal axis) of the film thickness sensor 31 composed of a crystal resonator and the weight of the thin film per unit area of the surface of the film thickness sensor 31 (vertical axis: film thickness ⁇ density). This graph shows that the oscillation frequency decreases as the thin film on the surface of the thin film grows. “Z” in the figure is a symbol indicating the acoustic impedance ratio between the thin film adhering to the crystal unit and the crystal unit.
- the linearity of the graph is higher than the other portions between a frequency (for example, 4.8 MHz) that is a few tenths of a MHz lower than 5 MHz to 5 MHz. Within the range, it can be seen that the thickness of the thin film having a known density can be accurately obtained from the measured oscillation frequency value.
- the film thickness sensor 31 When the vapor discharged from the discharge portion 38 reaches the film formation target 15 and the film thickness sensor 31, the growth rate of the thin film formed on the film thickness sensor 31 is measured. When maintaining, the reaching state and shielding state of the shutter 35 are repeated. Then, when reaching the state during the repetition, the measurement growth rate is obtained and the power supplied to the film forming source 12 is controlled so that the film formation target 15 is the same vacuum chamber 13 as the film thickness sensor 31. While the thin film having a predetermined thickness is formed on the surface of the film formation target 15, the film thickness sensor 31 indicates the time for the thin film to grow on the surface of the film formation target 15. It can be made shorter than the growth time.
- the shutter 35 alternately repeats the shielding state and the reaching state, and by measuring the film thickness when the shutter 35 is in the reaching state, the film thickness of the thin film formed on the surface of the film thickness sensor 31 is reduced to the reaching state without the shielding state. Can be made thinner than when maintaining.
- the shielding period for maintaining the shielding state and the reaching period for maintaining the reaching state are stored in the storage device 49, and a period signal indicating the length of each period is output to the opening / closing controller 43 as a set value.
- a trigger is output to the growth rate controller 14 during the arrival period, and the power supplied to the film forming source 12 is changed to the power source controller 42.
- the supply of power changed to the immediately preceding arrival period may be continuously performed during the shielding period.
- the magnitude of the power output in the immediately preceding arrival period may be changed during the shielding period.
- Reference numeral 5 in FIG. 4 is a polygonal line showing the change over time of the growth rate when the magnitude of the power changed at each measurement time t 1 to t 5 is maintained between the measurement times t 1 to t 5. Between t 1 and t 5 , the growth rate changes linearly, and is a constant value near the straight line 6 indicating the reference value.
- the total time of one arrival period and one shielding period adjacent to the arrival period is one cycle.
- the time of arrival state / one period is smaller than “1” and the film thickness is “arrival” "Time of state / one cycle” times. Accordingly, the usable time of the film thickness sensor 31 used in the present invention is doubled by “one period / time of arrival state”.
- FIG. 5 shows the relationship between the elapsed time (horizontal axis) and the frequency (vertical axis) of the film thickness sensor when the short arrival period and the shielding period are repeated after the long arrival period.
- the slope of the curve L 1 indicating the relationship between the elapsed time and the frequency between the start time A of the arrival period and the cutoff time B of the arrival period shows the arrival period and the cutoff period after time B. It can be seen that the slope of the curve L 2 when repeated is larger, and therefore, when the reaching period and the cutoff period are repeated, the thickness of the thin film formed on the surface of the film thickness sensor 31 is small.
- the measured growth rate was obtained within one arrival period, but the film thickness value obtained at the first time, which is the time during one arrival period, and the time during the previous arrival period.
- the measurement growth rate is obtained from the film thickness difference that is the difference between the film thickness value obtained at the second time and the total time of the arrival period between the first time and the second time. You may do it.
- the present invention is not limited to obtaining the measured growth rate based only on the value of the film thickness during one arrival period.
- the desired growth rate on the film formation target 15 is converted into the growth rate on the film thickness sensor 31.
- the main controller 18 sets the growth rate on the film thickness sensor 31 as a reference value, compares the growth rate of the film thickness sensor 31 with the reference value, and controls the power supplied to the heating device 34 to control the film thickness sensor.
- the growth rate of 31 may be a reference value.
- the film thickness of the film thickness sensor 31 is measured during the arrival period, but may be measured during the shielding period. In this case, the film thickness of the film formation target 15 at the measured time can also be obtained by the measurement value and calculation at another time.
- a resistance heater is used for the heating device 34, the evaporation container 33 is heated by heat conduction, and the film forming material 37 is heated by the evaporation container 33 whose temperature has been raised by heat conduction.
- the temperature of the film forming material 37 is controlled by controlling the amount of heat generated by the heating device 34, and the evaporation vessel 33 is heated using an infrared lamp as the heating device 34.
- An induced current may be passed through the evaporation container 33 to heat the evaporation container 33.
- a sputtering target is used as a film forming source
- the main controller 18 is provided with a sputtering power source for supplying power to the sputtering target as a film forming power source.
- the plasma is generated on the emission part which is the surface of the film formation source by the power supplied from the film formation power source to the film formation source, the film formation source is sputtered, and the fine particles of the film formation material composed of the sputtered particles are emitted from the emission part.
- a sputtering apparatus that discharges and forms a thin film by allowing fine particles to reach the surface of the film formation target and the surface of the film thickness sensor.
- the present invention includes a film forming apparatus provided with a shutter that can move between a blocking location between the film thickness sensor and the film forming source and another location, in the thin film manufacturing apparatus of the present invention.
- the evaporation container 33 was arrange
- the “evaporation rate” in the above description means the amount of vapor released per unit time, and does not mean the vapor flight speed.
Abstract
Description
蒸発源112は、蒸発容器133を有しており、蒸発容器133の上方位置に於いて、真空槽113の内部に搬入された成膜対象基板115が通過、又は、配置されるようになっている。 A
The
蒸発容器133には、加熱装置134が設けられており、加熱装置134は、成膜電源145に接続されている。 The
The
有機材料137が蒸発温度以上に昇温されると、蒸発(昇華を含む)して多量の有機材料137の蒸気が蒸発容器133の内部に放出される。 The inside of the
When the
成長速度制御回路114が、成長速度を制御する手順を説明すると、真空槽113の内部には、膜厚センサ131が設けられており、膜厚センサ131は、成長速度制御回路114内に設けられた成長速度測定器141に接続されている。 In the thin
The procedure by which the growth
増加させる電流量と減少させる電流量は、偏差の値に比例しており、偏差の絶対値が大きい場合は、偏差が早くゼロに近づくようになっている。 In this way, by adjusting the value of the current supplied to the
The amount of current to be increased and the amount of current to be decreased are proportional to the value of the deviation. When the absolute value of the deviation is large, the deviation quickly approaches zero.
本発明は、前記膜厚センサに形成された薄膜の膜厚は、前記シャッタが前記到達状態を維持する到達期間中に測定される薄膜製造装置である。
本発明は、測定された前記膜厚から前記膜厚センサ上の前記測定成長速度を求め、前記成膜源に供給する電力の大きさを変更する薄膜製造装置である。
本発明は、真空槽の内部を真空雰囲気にし、前記真空槽の内部に配置された成膜源に電力を供給し、前記成膜源の放出部から成膜材料の微粒子を放出させ、前記真空雰囲気中に位置する成膜対象物と膜厚センサとに前記微粒子を到達させ、前記膜厚センサに成長する薄膜の成長速度に基づいて前記電力の大きさを変化させて前記測定成長速度を前記基準速度に近づける薄膜製造方法であって、前記真空槽の内部にシャッタを設け、前記成膜対象物に前記微粒子が到達している間に前記シャッタを開閉させ、前記膜厚センサと前記放出部との間に前記シャッタを位置させて前記膜厚センサに前記微粒子が到達しない遮蔽状態と、前記膜厚センサと前記放出部との間から前記シャッタを移動させて前記膜厚センサに前記微粒子が到達する到達状態とを交互に切り替える薄膜製造方法である。
本発明は、前記シャッタが前記到達状態を維持する到達期間毎に前記測定成長速度を求め、前記成膜源に供給する電力の大きさを変更する請求項4記載の薄膜製造方法である。 In order to solve the above-described problems, the present invention provides a vacuum chamber, a film formation source in which a film formation material is disposed, power supply to the film formation source, and the film formation material disposed in the film formation source. A main controller for discharging fine particles from the discharge part of the film forming source to the inside of the vacuum chamber, and a film thickness of the thin film formed on the surface, arranged at a position where the fine particles reach and the thin film grows A film thickness sensor that outputs a film thickness signal of the content, and the main control device determines the magnitude of electric power supplied to the film formation source based on the film thickness signal output by the film thickness sensor. A thin film manufacturing apparatus for changing a discharge rate of the film forming source to grow a thin film on the surface of the film formation target at a desired growth rate, wherein a shutter is disposed in the vacuum chamber, and the shutter Is moved by the main controller, and the shutter is connected to the film thickness sensor. A shielded state that is located between the discharge part and shields the fine particles from reaching the film thickness sensor, and moves from a position between the film thickness sensor and the discharge part to another place, The thin film manufacturing apparatus is configured to switch a reaching state in which fine particles reach the film thickness sensor.
This invention is a thin film manufacturing apparatus with which the film thickness of the thin film formed in the said film thickness sensor is measured during the arrival period when the said shutter maintains the said arrival state.
The present invention is a thin film manufacturing apparatus that obtains the measured growth rate on the film thickness sensor from the measured film thickness and changes the magnitude of electric power supplied to the film formation source.
The present invention provides a vacuum atmosphere inside the vacuum chamber, supplies power to a film forming source disposed inside the vacuum chamber, and discharges fine particles of a film forming material from a discharge portion of the film forming source. The fine particles reach the film formation object and the film thickness sensor located in the atmosphere, and the measurement growth rate is changed by changing the magnitude of the electric power based on the growth rate of the thin film grown on the film thickness sensor. A thin film manufacturing method that approaches a reference speed, wherein a shutter is provided inside the vacuum chamber, the shutter is opened and closed while the fine particles reach the film formation target, and the film thickness sensor and the discharge unit The shutter is positioned between the film thickness sensor and the film thickness sensor so that the fine particles do not reach the film thickness sensor. Reachable state Which is a thin film manufacturing method of switching alternately.
The present invention is the thin film manufacturing method according to
この薄膜製造装置10は、真空槽13を有しており、真空槽13の内部には、成膜源12が配置されている。
The thin
蒸発容器33の内部中空部分は、この真空排気装置45によって真空排気されて、真空槽13と同様に、真空雰囲気が形成される。蒸発容器33に別の真空排気装置を接続し、その真空排気装置によって蒸発容器33の内部を真空排気しても良い。 A
The inner hollow portion of the
主制御装置18には成長速度制御器14が配置され、成長速度制御器14には、成膜電源46と、成膜電源46の動作を制御する電源制御器42とが配置されている。 A main controller 18 is disposed outside the
The main controller 18 is provided with a growth rate controller 14, and the growth rate controller 14 is provided with a film forming
成膜源12の内部には、加熱装置34が設けられており、供給された電力によって加熱装置34は発熱し、成膜材料37を加熱する。 When the
A
従って、主制御装置18から成膜源12に電力が供給されると、成膜源12から成膜材料37の微粒子が放出される。放出部38は複数の蒸気放出口であってもよい。 A vapor discharge hole is formed as a
Therefore, when power is supplied from the main controller 18 to the
成膜対象物15の表面に、成膜材料37の微粒子が到達すると、成膜対象物15の表面に成膜材料37の成分を含有する薄膜(ここでは有機薄膜)が成長する。 In the
When the fine particles of the
主制御装置18には、モータ制御器51と、モータ制御器51に接続された開閉制御器43とが設けられている。 A
The main controller 18 is provided with a
シャッタ35は、モータ36の回転によって真空槽13内で移動され、位置を変更できるようにされている。このシャッタ35は、開閉制御器43がモータ制御器51を制御することで、膜厚センサ31と放出部38との間の場所である遮断場所に位置する遮蔽状態と、また、遮断場所から移動して、遮断場所とは異なり、膜厚センサ31と放出部38との間ではない場所に位置するときの到達状態とのいずれかの状態を採れるようにされている。従って、シャッタ35は、遮蔽状態と到達状態とにされることで、開閉されることになっている。 The
The
成膜対象物15と膜厚センサ31とは、成膜源12からの距離が異なるので、成膜対象物15と膜厚センサ31とには、距離に応じた一定の場所比率の膜厚で薄膜が成長する。 When the
Since the
膜厚センサ31は、表面に付着した薄膜の膜厚を示す内容の膜厚信号を、主制御装置18に出力する。膜厚センサ31から出力された膜厚信号は、主制御装置18の成長速度測定器41に入力され、成長速度測定器41は、シャッタ35が継続して到達状態にある間(例えば1秒以内の時間)に、異なる時刻で膜厚センサ31上の薄膜の膜厚を測定する。
主制御装置18は、シャッタ35を、一定の到達期間と一定の遮蔽期間を交互に繰り返えすように動作させており、一個の到達期間とその到達期間に隣接する一個の遮蔽期間との合計時間を一周期とすると、到達期間毎に測定する膜厚センサ31上の膜厚の変化量と、隣接する到達期間の異なる測定時刻と測定時刻の間の時間と、一周期の時間とから、膜厚センサ31上に成長する薄膜の成長速度が算出される。ここで成長速度とは、「膜厚の増加分/増加に要した時間」である。 The main controller 18 is provided with a growth
The
The main control device 18 operates the
主制御装置18には記憶装置49が設けられており、記憶装置49には膜厚センサ31上の薄膜の成長速度の基準値が基準速度として記憶されている。 There is a certain proportional relationship between the growth rate of the thin film grown on the
The main controller 18 is provided with a
電源制御器42は、基準速度と測定成長速度とを比較し、その差に応じた値と、どちらが大きいかを示す符号とからなる偏差を算出し、速度偏差を示す制御信号として成膜電源46に出力する。 A reference speed and a measured growth speed are input to the
The
測定成長速度が基準速度よりも小さいときは、微粒子の放出速度を増大させるために、成膜電源46を制御して、加熱装置34に供給する電力を増加させる。 In any case, the magnitude of the electric power supplied from the film
When the measured growth rate is lower than the reference rate, the film forming
従って、シャッタ35が遮蔽状態と到達状態を交互に繰り返し、到達状態のときに膜厚を測定することで、膜厚センサ31の表面に形成される薄膜の膜厚を、遮蔽状態が無い到達状態を維持するときよりも薄くすることができる。 When the vapor discharged from the
Therefore, the
また、成膜対象物15と膜厚センサ31との間の成長速度の比例関係が分かっているので、成膜対象物15上の所望の成長速度を膜厚センサ31上の成長速度に換算し、主制御装置18に膜厚センサ31上の成長速度を基準値として設定し、膜厚センサ31の成長速度を基準値と比較して、加熱装置34に供給する電力を制御して膜厚センサ31の成長速度が基準値になるようにしてもよい。
また、上記例では膜厚センサ31の膜厚は、到達期間中に測定されていたが、遮蔽期間に測定してもよい。この場合、他の時刻の測定値と計算によって、測定した時刻の成膜対象物15の膜厚を求めることもできる。 In the above embodiment, the measured growth rate was obtained within one arrival period, but the film thickness value obtained at the first time, which is the time during one arrival period, and the time during the previous arrival period. The measurement growth rate is obtained from the film thickness difference that is the difference between the film thickness value obtained at the second time and the total time of the arrival period between the first time and the second time. You may do it. In short, the present invention is not limited to obtaining the measured growth rate based only on the value of the film thickness during one arrival period.
In addition, since the proportional relationship of the growth rate between the
In the above example, the film thickness of the
また、上記実施例では、蒸発容器33は真空槽13の内部に配置されていたが、蒸発容器は真空槽13の外部に配置されていてもよい。 Furthermore, although the vapor deposition apparatus is used in the above example, in the present invention, a sputtering target is used as a film forming source, and the main controller 18 is provided with a sputtering power source for supplying power to the sputtering target as a film forming power source. The plasma is generated on the emission part which is the surface of the film formation source by the power supplied from the film formation power source to the film formation source, the film formation source is sputtered, and the fine particles of the film formation material composed of the sputtered particles are emitted from the emission part. Also included is a sputtering apparatus that discharges and forms a thin film by allowing fine particles to reach the surface of the film formation target and the surface of the film thickness sensor. In short, the present invention includes a film forming apparatus provided with a shutter that can move between a blocking location between the film thickness sensor and the film forming source and another location, in the thin film manufacturing apparatus of the present invention.
Moreover, in the said Example, although the
13……真空槽
14……成長速度制御器
15……成膜対象物
31……膜厚センサ
35……シャッタ
33……蒸発容器
37……成膜材料
41……成長速度測定器
42……電源制御器
45……真空排気装置
46……成膜電源
49……記憶装置
51……モータ制御器
DESCRIPTION OF
Claims (5)
- 真空槽と、
成膜材料が配置される成膜源と、
前記成膜源に電力を供給し、前記成膜源に配置された前記成膜材料の微粒子を前記成膜源の放出部から前記真空槽の内部に放出させる主制御装置と、
前記微粒子が到達して薄膜が成長する位置に配置され、表面に形成される前記薄膜の膜厚を示す内容の膜厚信号を出力する膜厚センサと、
を有し、
前記主制御装置は、前記膜厚センサが出力する前記膜厚信号に基づいて、前記成膜源に供給する電力の大きさを変化させて前記成膜源の放出速度を変化させ、所望の成長速度で前記成膜対象物表面に薄膜を成長させる薄膜製造装置であって、
前記真空槽内にはシャッタが配置され、
前記シャッタは主制御装置によって移動され、
前記シャッタは、前記膜厚センサと前記放出部との間に位置して前記微粒子の前記膜厚センサへの到達を遮蔽する遮蔽状態と、前記膜厚センサと前記放出部との間の位置から他の場所へ移動して、前記微粒子を前記膜厚センサへ到達させる到達状態とが切り替えられるようにされた薄膜製造装置。 A vacuum chamber;
A deposition source where the deposition material is disposed;
A main control device for supplying electric power to the film forming source and discharging fine particles of the film forming material arranged in the film forming source from the discharge part of the film forming source into the vacuum chamber;
A film thickness sensor that outputs a film thickness signal that indicates the film thickness of the thin film that is disposed on the surface where the fine particles reach and the thin film grows.
Have
Based on the film thickness signal output from the film thickness sensor, the main control device changes the discharge rate of the film formation source by changing the magnitude of the power supplied to the film formation source, thereby achieving a desired growth. A thin film manufacturing apparatus for growing a thin film on the surface of the film formation object at a speed,
A shutter is disposed in the vacuum chamber,
The shutter is moved by a main control unit;
The shutter is located between the film thickness sensor and the discharge portion and shields the fine particles from reaching the film thickness sensor, and from a position between the film thickness sensor and the discharge portion. A thin film manufacturing apparatus configured to be switched to an arrival state in which the fine particles reach the film thickness sensor by moving to another place. - 前記膜厚センサに形成された薄膜の膜厚は、前記シャッタが前記到達状態を維持する到達期間中に測定される請求項1記載の薄膜製造装置。 The thin film manufacturing apparatus according to claim 1, wherein the film thickness of the thin film formed on the film thickness sensor is measured during an arrival period in which the shutter maintains the arrival state.
- 測定された前記膜厚から前記膜厚センサ上の前記測定成長速度を求め、前記成膜源に供給する電力の大きさを変更する請求項1記載の薄膜製造装置。 2. The thin film manufacturing apparatus according to claim 1, wherein the measured growth rate on the film thickness sensor is obtained from the measured film thickness, and the magnitude of electric power supplied to the film forming source is changed.
- 真空槽の内部を真空雰囲気にし、前記真空槽の内部に配置された成膜源に電力を供給し、前記成膜源の放出部から成膜材料の微粒子を放出させ、前記真空雰囲気中に位置する成膜対象物と膜厚センサとに前記微粒子を到達させ、前記膜厚センサに成長する薄膜の成長速度に基づいて前記電力の大きさを変化させて前記測定成長速度を前記基準速度に近づける薄膜製造方法であって、
前記真空槽の内部にシャッタを設け、
前記成膜対象物に前記微粒子が到達している間に前記シャッタを開閉させ、前記膜厚センサと前記放出部との間に前記シャッタを位置させて前記膜厚センサに前記微粒子が到達しない遮蔽状態と、前記膜厚センサと前記放出部との間から前記シャッタを移動させて前記膜厚センサに前記微粒子が到達する到達状態とを交互に切り替える薄膜製造方法。 The inside of the vacuum chamber is made into a vacuum atmosphere, power is supplied to the film forming source disposed inside the vacuum chamber, and the fine particles of the film forming material are discharged from the discharge portion of the film forming source, and the vacuum chamber is positioned in the vacuum atmosphere. The fine particles reach the film formation target and the film thickness sensor, and the measurement growth rate is brought close to the reference speed by changing the magnitude of the electric power based on the growth rate of the thin film grown on the film thickness sensor. A thin film manufacturing method,
A shutter is provided inside the vacuum chamber,
The shutter is opened and closed while the fine particles reach the film formation target, and the shutter is positioned between the film thickness sensor and the discharge portion so that the fine particles do not reach the film thickness sensor. A thin film manufacturing method that alternately switches between a state and an arrival state in which the fine particles reach the film thickness sensor by moving the shutter from between the film thickness sensor and the discharge portion. - 前記シャッタが前記到達状態を維持する到達期間毎に前記測定成長速度を求め、前記成膜源に供給する電力の大きさを変更する請求項4記載の薄膜製造方法。 The thin film manufacturing method according to claim 4, wherein the measured growth rate is obtained for each arrival period in which the shutter maintains the arrival state, and the magnitude of electric power supplied to the film forming source is changed.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201780028113.4A CN109154071B (en) | 2016-05-06 | 2017-04-26 | Thin film manufacturing apparatus and thin film manufacturing method |
KR1020187025289A KR102193817B1 (en) | 2016-05-06 | 2017-04-26 | Thin film manufacturing device, thin film manufacturing method |
JP2018515709A JP6628869B2 (en) | 2016-05-06 | 2017-04-26 | Thin film manufacturing apparatus and thin film manufacturing method |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016093400 | 2016-05-06 | ||
JP2016-093400 | 2016-05-06 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2017191796A1 true WO2017191796A1 (en) | 2017-11-09 |
Family
ID=60202993
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2017/016584 WO2017191796A1 (en) | 2016-05-06 | 2017-04-26 | Thin-film production device, and thin-film production method |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP6628869B2 (en) |
KR (1) | KR102193817B1 (en) |
CN (1) | CN109154071B (en) |
TW (1) | TW201809327A (en) |
WO (1) | WO2017191796A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110872695A (en) * | 2018-08-31 | 2020-03-10 | 佳能特机株式会社 | Film forming apparatus and method for controlling film forming apparatus |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108342699B (en) * | 2018-02-11 | 2020-06-30 | 中国科学院上海光学精密机械研究所 | Comprehensive deposition coating equipment and comprehensive coating method |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5910339A (en) * | 1982-07-09 | 1984-01-19 | Hitachi Ltd | Continuous film forming device |
JPH07283281A (en) * | 1994-04-05 | 1995-10-27 | Toshiba Corp | Method of judging life of target and sputtering device |
JP2007039762A (en) * | 2005-08-04 | 2007-02-15 | Sony Corp | Vapor deposition apparatus and vapor deposition method |
JP2007231303A (en) * | 2006-02-27 | 2007-09-13 | Shincron:Kk | Thin film deposition apparatus |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58217673A (en) * | 1982-06-11 | 1983-12-17 | Anelva Corp | Control of film thickness |
JP5474089B2 (en) * | 2009-12-09 | 2014-04-16 | 株式会社アルバック | Organic thin film forming apparatus and organic material film forming method |
KR20120023273A (en) * | 2010-09-01 | 2012-03-13 | (주)알파플러스 | Thickness monitoring method for vacuum metallizing film using shutter and vacuum metallizing apparatus using the method |
JP5910339B2 (en) * | 2012-06-13 | 2016-04-27 | 富士通株式会社 | Couplers, sockets and plugs |
KR101959975B1 (en) * | 2012-07-10 | 2019-07-16 | 삼성디스플레이 주식회사 | Apparatus for organic layer deposition, method for manufacturing of organic light emitting display apparatus using the same, and organic light emitting display apparatus manufactured by the method |
SG11201608133PA (en) | 2014-05-26 | 2016-11-29 | Ulvac Inc | Film-forming device, method for measuring film thickness of organic film, and film thickness sensor for organic film |
CN105177520B (en) * | 2015-08-05 | 2016-06-08 | 京东方科技集团股份有限公司 | Thickness actuator and manufacture method, control method, evaporated device |
-
2017
- 2017-04-26 WO PCT/JP2017/016584 patent/WO2017191796A1/en active Application Filing
- 2017-04-26 CN CN201780028113.4A patent/CN109154071B/en active Active
- 2017-04-26 JP JP2018515709A patent/JP6628869B2/en active Active
- 2017-04-26 KR KR1020187025289A patent/KR102193817B1/en active IP Right Grant
- 2017-05-03 TW TW106114677A patent/TW201809327A/en unknown
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5910339A (en) * | 1982-07-09 | 1984-01-19 | Hitachi Ltd | Continuous film forming device |
JPH07283281A (en) * | 1994-04-05 | 1995-10-27 | Toshiba Corp | Method of judging life of target and sputtering device |
JP2007039762A (en) * | 2005-08-04 | 2007-02-15 | Sony Corp | Vapor deposition apparatus and vapor deposition method |
JP2007231303A (en) * | 2006-02-27 | 2007-09-13 | Shincron:Kk | Thin film deposition apparatus |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110872695A (en) * | 2018-08-31 | 2020-03-10 | 佳能特机株式会社 | Film forming apparatus and method for controlling film forming apparatus |
CN110872695B (en) * | 2018-08-31 | 2023-06-02 | 佳能特机株式会社 | Film forming apparatus and control method for film forming apparatus |
Also Published As
Publication number | Publication date |
---|---|
TW201809327A (en) | 2018-03-16 |
CN109154071A (en) | 2019-01-04 |
CN109154071B (en) | 2020-10-27 |
KR102193817B1 (en) | 2020-12-22 |
JP6628869B2 (en) | 2020-01-15 |
KR20180110004A (en) | 2018-10-08 |
JPWO2017191796A1 (en) | 2018-10-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5081899B2 (en) | Vapor deposition source, vapor deposition apparatus, film formation method | |
WO2017191796A1 (en) | Thin-film production device, and thin-film production method | |
CN107532290B (en) | Method for producing a coated substrate | |
TWI681066B (en) | Vacuum deposition apparatus | |
JP2008223141A (en) | Method and control system for depositing layer | |
KR101976254B1 (en) | Film forming apparatus and film forming method | |
KR101899722B1 (en) | Apparatus for measuring film thickness | |
JP5024075B2 (en) | Vacuum deposition equipment | |
JP6318254B2 (en) | Method and controller for controlling gas supply | |
Pajdarová et al. | Optical emission spectroscopy during the deposition of zirconium dioxide films by controlled reactive high-power impulse magnetron sputtering | |
CN109072415B (en) | Organic thin film manufacturing apparatus and organic thin film manufacturing method | |
CN106191779A (en) | A kind of polymer vacuum electron beam evaporation coating machine | |
JP4167780B2 (en) | Atomic absorption rate monitor | |
JP4735291B2 (en) | Deposition method | |
Oskirko et al. | Effect of duty cycle and frequency on the ion current density on substrate and ion/atom ratio in magnetron sputtering of aluminum | |
JP2010242202A (en) | Vapor deposition apparatus | |
JP2010255025A (en) | Vapor deposition apparatus | |
CN107043917A (en) | Magnetron sputtering apparatus and system | |
JPS62211376A (en) | Control device for film growth | |
JP2015209559A (en) | Vapor deposition apparatus | |
JP6513514B2 (en) | Temperature measurement method | |
JP2000323442A (en) | Frequency adjuster of piezoelectric element | |
Spencer et al. | System design for high rate deposition of indium oxide solar coatings | |
JP2002129327A (en) | Method and apparatus for forming thin film | |
JP2003204236A (en) | Frequency controller for piezoelectric element |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 2018515709 Country of ref document: JP |
|
ENP | Entry into the national phase |
Ref document number: 20187025289 Country of ref document: KR Kind code of ref document: A |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 17792729 Country of ref document: EP Kind code of ref document: A1 |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 17792729 Country of ref document: EP Kind code of ref document: A1 |