WO2017168827A1 - 電子デバイスパッケージ用テープ - Google Patents
電子デバイスパッケージ用テープ Download PDFInfo
- Publication number
- WO2017168827A1 WO2017168827A1 PCT/JP2016/084926 JP2016084926W WO2017168827A1 WO 2017168827 A1 WO2017168827 A1 WO 2017168827A1 JP 2016084926 W JP2016084926 W JP 2016084926W WO 2017168827 A1 WO2017168827 A1 WO 2017168827A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- metal layer
- tape
- electronic device
- adhesive layer
- device package
- Prior art date
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/482—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body
- H01L23/4827—Materials
- H01L23/4828—Conductive organic material or pastes, e.g. conductive adhesives, inks
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
- H01L23/49572—Lead-frames or other flat leads consisting of thin flexible metallic tape with or without a film carrier
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L24/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
Definitions
- the present invention relates to an electronic device package tape, and more particularly to an electronic device package tape having a metal layer.
- Such an electronic device package includes, for example, a flip chip (FC) package.
- the linear expansion coefficient of the electronic device and the linear expansion coefficient of the circuit board may be greatly different.
- the intermediate product is heated and cooled in the manufacturing process of the electronic device package, there is a difference in the amount of expansion and contraction between the electronic device and the circuit board. This difference causes warpage in the electronic device package.
- a spacer includes a step of bonding a spacer adhesive sheet having a metal layer provided with an adhesive layer on at least one surface to a dicing sheet using the adhesive layer as a bonding surface, and a spacer adhesive sheet.
- the metal layer with the adhesive layer is useful for various electronic device packages, but as disclosed in Patent Document 4, it is picked up using an existing apparatus and fixed to the adherend. It is convenient if possible.
- the present invention suppresses the deformation of the metal layer due to the push-up of the pin of the pickup device when the metal layer with the adhesive layer is picked up from the pressure-sensitive adhesive tape, and the pin mark is formed. It is an object of the present invention to provide an electronic device package tape capable of suppressing the generation of voids between the adherend and the adherend.
- an electronic device package tape is provided by laminating a pressure-sensitive adhesive tape having a base film and a pressure-sensitive adhesive layer on the side opposite to the base film of the pressure-sensitive adhesive layer. And a laminated body of the adhesive layer and the metal layer, wherein the metal layer has a tensile strength of 350 MPa or more.
- the metal layer preferably contains copper or aluminum.
- the copper content of the metal layer is preferably 99.95% or less.
- the metal layer is preferably a copper alloy foil or an aluminum alloy foil.
- the metal layer is one or two selected from the group consisting of copper, nickel, chromium, zirconium, zinc, tin, titanium, silicon, iron, manganese, magnesium, phosphorus, and cobalt. It is preferably made of an alloy containing at least seeds.
- the metal layer is selected from the group consisting of aluminum, nickel, chromium, zirconium, zinc, tin, magnesium, copper, manganese, titanium, silicon, iron, and cobalt. Or it consists of an alloy containing 2 or more types.
- the metal layer may be made of stainless steel.
- the metal layer preferably has a thermal conductivity of 5 W / (m ⁇ K) or more.
- the adhesive layer contains (A) an epoxy resin, (B) a curing agent, (C) an acrylic resin or a phenoxy resin, and (D) a surface-treated inorganic filler. It is preferable.
- the pressure-sensitive adhesive layer contains an acrylic ester represented by CH 2 ⁇ CHCOOR (wherein R is an alkyl group having 4 to 18 carbon atoms) and a hydroxyl group-containing It is preferable to contain an acrylic polymer comprising a monomer and an isocyanate compound having a radical-reactive carbon-carbon double bond in the molecule.
- the metal layer with an adhesive layer is picked up from the pressure-sensitive adhesive tape, the metal layer is prevented from being deformed due to a push-up of the pin of the pickup device, and a pin mark is generated.
- production of a void between adherends can be suppressed.
- (A) is a longitudinal cross-sectional view which shows the bonding process of a metal layer
- (B) is an adhesive agent
- (C) is a transversal direction sectional view which shows a precut process
- (D) is a perspective view which shows the removal process of an unnecessary part.
- (A) is a transversal direction sectional drawing which shows the bonding process of an adhesive tape
- (B) is a pre-cut.
- (C) is a transversal direction sectional view showing an unnecessary part removal process. It is sectional drawing which illustrates typically the usage method of the tape for electronic device packages which concerns on embodiment of this invention. It is sectional drawing which illustrates typically the usage method of the tape for electronic device packages which concerns on embodiment of this invention. It is sectional drawing which shows typically the structure of the electronic device package using the tape for electronic device packages which concerns on embodiment of this invention.
- FIG. 1 is a cross-sectional view showing an electronic device package tape 1 according to an embodiment of the present invention.
- the electronic device package tape 1 has a pressure-sensitive adhesive tape 5 including a base film 51 and a pressure-sensitive adhesive layer 52 provided on the base film 51, and an adhesive layer is formed on the pressure-sensitive adhesive layer 52.
- a laminated body of 4 and the metal layer 3 is provided.
- the adhesive layer 4 and the metal layer 3 provided by being laminated on the adhesive layer 4 are provided on the pressure-sensitive adhesive layer 52.
- the laminated body of the adhesive layer 4 and the metal layer 3 includes a mode in which they are indirectly laminated through a primer layer or the like for improving the adhesion between them.
- the electronic device package tape 1 of the present invention has an adhesive tape 5 cut into a shape corresponding to the ring frame R (see FIG. 7), and a metal layer 3 and an adhesive layer.
- 4 is preferably cut into a predetermined shape (pre-cut processing), and pre-cut processing is performed in this embodiment.
- the electronic device package tape 1 of the present invention has an adhesive tape 5 (label part 5a) cut into a shape corresponding to the metal layer 3, the adhesive layer 4, and the ring frame R.
- the long base tape 2 in which a plurality of laminated bodies are formed is preferably wound into a roll shape, and in the present embodiment, the base tape 2 is wound into a roll shape.
- the laminated body provided in the tape 2 may be cut one by one.
- the electronic device package tape 1 When pre-cut and wound into a roll, as shown in FIGS. 2 and 3, the electronic device package tape 1 has a base tape 2, and the base tape 2 has a predetermined tape.
- a metal layer 3 having a planar shape, an adhesive layer 4 having a predetermined planar shape provided on the opposite side of the metal tape 3 to the base tape 2 side, and having a predetermined planar shape;
- a label portion 5a having a predetermined planar shape provided so as to come into contact with the base tape 2 around the adhesive layer 4 and a peripheral portion 5b surrounding the outside of the label portion 5a Tape 5 is provided.
- the label portion 5a has a shape corresponding to the ring frame R for dicing.
- the shape corresponding to the shape of the ring frame R for dicing is preferably similar in shape to the inside of the ring frame R and larger than the size inside the ring frame R.
- similar to circle is preferable and it is more preferable that it is circular.
- the peripheral part 5b includes a form that completely surrounds the outside of the label part 5a and a form that is not completely enclosed as shown. Note that the peripheral portion 5b may not be provided.
- the adhesive layer 4 has a predetermined planar shape, and this planar shape allows the ring frame R to be bonded to the peripheral edge of the label portion 5a of the adhesive tape 5 so that it can be pushed up by the push-up member of the pickup device. (See FIG. 7C), the shape is smaller than the label portion 5a.
- the adhesive layer 4 is preferably similar in shape to the label portion 5a and smaller in size than the label portion 5a.
- the adhesive layer 4 is not necessarily circular, but a shape close to a circle is preferable, and a circular shape is more preferable.
- the metal layer 3 has the same shape as the adhesive layer 4, and the adhesive layer 4 is laminated on the metal layer 3. In this case, it is sufficient that the main portions are laminated, and the metal layer 3 and the adhesive layer 4 do not necessarily have the same size, but they may have substantially the same shape for convenience of manufacturing. preferable. Each component will be described below.
- Base tape 2 can also be comprised with a well-known separator
- the base tape used for the pre-cut process of the tape for electronic device packages can also be used as it is.
- the base tape 2 needs to hold the metal layer 3 at the time of the pre-cut processing, so for example, on one side of the resin film and the resin film.
- the tape which has the provided adhesive layer for base tapes can be used conveniently.
- polyester PET, PBT, PEN, PBN, PTT
- polyolefin PP, PE
- films obtained by partially replacing these materials copolymers (EVA, EEA, EBA), and further improving adhesion and mechanical strength.
- the laminated body of these films may be sufficient.
- polyethylene terephthalate, polypropylene, and polyethylene are preferably selected.
- the thickness of the resin film constituting the base tape 2 is not particularly limited and may be appropriately set, but is preferably 10 to 150 ⁇ m.
- resin used for the adhesive layer for the base tape known chlorinated polypropylene resins, acrylic resins, polyester resins, polyurethane resins, epoxy resins, etc. used for adhesives can be used.
- An acrylic adhesive having a polymer as a base polymer is preferred.
- acrylic polymer examples include (meth) acrylic acid alkyl esters (for example, methyl ester, ethyl ester, propyl ester, isopropyl ester, butyl ester, isobutyl ester, s-butyl ester, t-butyl ester, pentyl ester, Pentyl ester, hexyl ester, heptyl ester, octyl ester, 2-ethylhexyl ester, isooctyl ester, nonyl ester, decyl ester, isodecyl ester, undecyl ester, dodecyl ester, tridecyl ester, tetradecyl ester, hexadecyl ester, A linear or branched alkyl ester of an alkyl group such as octadecyl ester or eicosyl ester having 1 to 30 carbon atoms,
- the acrylic polymer contains units corresponding to other monomer components copolymerizable with the (meth) acrylic acid alkyl ester or cycloalkyl ester, if necessary, for the purpose of modifying cohesive force, heat resistance and the like. May be.
- Such monomer components include, for example, carboxyl group-containing monomers such as acrylic acid, methacrylic acid, carboxyethyl (meth) acrylate, carboxypentyl (meth) acrylate, itaconic acid, maleic acid, fumaric acid, and crotonic acid; maleic anhydride Acid anhydride monomers such as itaconic anhydride; 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 4-hydroxybutyl (meth) acrylate, 6-hydroxyhexyl (meth) acrylate Hydroxyl group-containing monomers such as 8-hydroxyoctyl (meth) acrylate, 10-hydroxydecyl (meth) acrylate, 12-hydroxylauryl (meth) acrylate, (4-hydroxymethylcyclohexyl) methyl (meth) acrylate; Styrene Contains sulfonic acid groups such as phonic acid, allyl sulf
- a polyfunctional monomer or the like can be included as a monomer component for copolymerization as necessary.
- examples of such polyfunctional monomers include hexanediol di (meth) acrylate, (poly) ethylene glycol di (meth) acrylate, (poly) propylene glycol di (meth) acrylate, neopentyl glycol di (meth) acrylate, Pentaerythritol di (meth) acrylate, trimethylolpropane tri (meth) acrylate, pentaerythritol tri (meth) acrylate, dipentaerythritol hexa (meth) acrylate, epoxy (meth) acrylate, polyester (meth) acrylate, urethane (meth) An acrylate etc. are mentioned. These polyfunctional monomers can also be used alone or in combination of two or more. The amount of the polyfunctional monomer used is preferably
- the acrylic polymer can be prepared, for example, by applying an appropriate method such as a solution polymerization method, an emulsion polymerization method, a bulk polymerization method, or a suspension polymerization method to a mixture of one or more component monomers.
- the adhesive layer for the base tape preferably has a composition that suppresses the inclusion of a low molecular weight substance.
- the main component is preferably an acrylic polymer having a weight average molecular weight of 300,000 or more, particularly 400,000 to 3,000,000. Therefore, the pressure-sensitive adhesive can also be of an appropriate crosslinking type by an internal crosslinking method, an external crosslinking method, or the like.
- a polyfunctional isocyanate compound for example, a polyfunctional epoxy compound, a melamine compound, a metal salt compound, An energy beam obtained by mixing a low-molecular compound having two or more carbon-carbon double bonds with a method of crosslinking using an appropriate external crosslinking agent such as a metal chelate compound, an amino resin compound, or a peroxide.
- Appropriate methods such as a method of crosslinking by irradiation or the like can be employed.
- the amount used is appropriately determined depending on the balance with the base polymer to be cross-linked and further depending on the intended use as an adhesive. In general, it is preferable to add about 20 parts by weight or less, and further 0.1 to 20 parts by weight with respect to 100 parts by weight of the base polymer.
- the thickness of the pressure-sensitive adhesive layer for the base tape is not particularly limited and can be appropriately determined, but is generally about 5 to 200 ⁇ m. Moreover, the adhesive layer for base tapes may be composed of a single layer or a plurality of layers.
- Adhesive tape 5 There is no restriction
- the substrate film 51 can be used without particular limitation as long as it is a conventionally known one, but has radiation transparency when a radiation curable material is used as the adhesive layer 52 described later. It is preferable to use one.
- the materials include polyethylene, polypropylene, ethylene-propylene copolymer, polybutene-1, poly-4-methylpentene-1, ethylene-vinyl acetate copolymer, ethylene-ethyl acrylate copolymer, ethylene-acrylic.
- Homopolymers or copolymers of ⁇ -olefins such as methyl acid copolymers, ethylene-acrylic acid copolymers, ionomers or mixtures thereof, polyurethane, styrene-ethylene-butene or pentene copolymers, polyamide-polyols Listed are thermoplastic elastomers such as copolymers, and mixtures thereof.
- the base film may be a mixture of two or more materials selected from these groups, or may be a single layer or a multilayer.
- the thickness of the base film 51 is not particularly limited and may be set as appropriate, but is preferably 50 to 200 ⁇ m.
- the surface of the base film 51 is subjected to chemical or physical treatment such as chromic acid treatment, ozone exposure, flame exposure, high-voltage impact exposure, or ionizing radiation treatment.
- chemical or physical treatment such as chromic acid treatment, ozone exposure, flame exposure, high-voltage impact exposure, or ionizing radiation treatment.
- Surface treatment may be applied.
- the pressure-sensitive adhesive layer 52 is provided directly on the base film 51.
- a primer layer for increasing adhesion an anchor layer for improving machinability during dicing, stress You may provide indirectly through a relaxation layer, an antistatic layer, etc.
- the resin used for the pressure-sensitive adhesive layer 52 of the pressure-sensitive adhesive tape 5 is not particularly limited, and known chlorinated polypropylene resins, acrylic resins, polyester resins, polyurethane resins, epoxy resins and the like used for pressure-sensitive adhesives can be used. Although it can be used, an acrylic adhesive having an acrylic polymer as a base polymer is preferred.
- acrylic polymer examples include (meth) acrylic acid alkyl esters (for example, methyl ester, ethyl ester, propyl ester, isopropyl ester, butyl ester, isobutyl ester, s-butyl ester, t-butyl ester, pentyl ester, Pentyl ester, hexyl ester, heptyl ester, octyl ester, 2-ethylhexyl ester, isooctyl ester, nonyl ester, decyl ester, isodecyl ester, undecyl ester, dodecyl ester, tridecyl ester, tetradecyl ester, hexadecyl ester, A linear or branched alkyl ester of an alkyl group such as octadecyl ester or eicosyl ester having 1 to 30 carbon atoms,
- the acrylic polymer contains units corresponding to other monomer components copolymerizable with the (meth) acrylic acid alkyl ester or cycloalkyl ester, if necessary, for the purpose of modifying cohesive force, heat resistance and the like. May be.
- Such monomer components include, for example, carboxyl group-containing monomers such as acrylic acid, methacrylic acid, carboxyethyl (meth) acrylate, carboxypentyl (meth) acrylate, itaconic acid, maleic acid, fumaric acid, and crotonic acid; maleic anhydride Acid anhydride monomers such as itaconic anhydride; 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 4-hydroxybutyl (meth) acrylate, 6-hydroxyhexyl (meth) acrylate Hydroxyl group-containing monomers such as 8-hydroxyoctyl (meth) acrylate, 10-hydroxydecyl (meth) acrylate, 12-hydroxylauryl (meth) acrylate, (4-hydroxymethylcyclohexyl) methyl (meth) acrylate; Styrene Contains sulfonic acid groups such as phonic acid, allyl sulf
- a polyfunctional monomer or the like can be included as a monomer component for copolymerization as necessary.
- examples of such polyfunctional monomers include hexanediol di (meth) acrylate, (poly) ethylene glycol di (meth) acrylate, (poly) propylene glycol di (meth) acrylate, neopentyl glycol di (meth) acrylate, Pentaerythritol di (meth) acrylate, trimethylolpropane tri (meth) acrylate, pentaerythritol tri (meth) acrylate, dipentaerythritol hexa (meth) acrylate, epoxy (meth) acrylate, polyester (meth) acrylate, urethane (meth) An acrylate etc. are mentioned. These polyfunctional monomers can also be used alone or in combination of two or more. The amount of the polyfunctional monomer used is preferably
- the acrylic polymer can be prepared, for example, by applying an appropriate method such as a solution polymerization method, an emulsion polymerization method, a bulk polymerization method, or a suspension polymerization method to a mixture of one or more component monomers.
- the pressure-sensitive adhesive layer preferably has a composition that suppresses the inclusion of a low molecular weight substance from the viewpoint of preventing contamination of the wafer. From this point, an acrylic polymer having a weight average molecular weight of 300,000 or more, particularly 400,000 to 3,000,000 is a main component. Therefore, the pressure-sensitive adhesive can be of an appropriate crosslinking type by an internal crosslinking method, an external crosslinking method, or the like.
- a polyfunctional isocyanate compound for example, a polyfunctional epoxy compound, a melamine compound, a metal salt compound, a metal chelate compound, an amino resin system
- an appropriate external crosslinking agent such as a compound or a peroxide, or a method of mixing a low molecular compound having two or more carbon-carbon double bonds and crosslinking by irradiation with energy rays, etc.
- a suitable method such as the above can be adopted.
- the amount used is appropriately determined depending on the balance with the base polymer to be cross-linked and further depending on the intended use as an adhesive.
- additives such as various tackifiers and anti-aging agents may be used for the pressure-sensitive adhesive in addition to the above components.
- a radiation curable pressure-sensitive adhesive is suitable.
- the radiation-curable pressure-sensitive adhesive include additive-type radiation-curable pressure-sensitive adhesives in which a radiation-curable monomer component or a radiation-curable oligomer component is blended with the above-mentioned pressure-sensitive adhesive.
- Examples of the radiation curable monomer component to be blended include urethane (meth) acrylate, trimethylolpropane tri (meth) acrylate, tetramethylolmethane tetra (meth) acrylate, pentaerythritol tri (meth) acrylate, pentaerythritol tetra ( And (meth) acrylate, dipentaerystol monohydroxypenta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, 1,4-butanediol di (meth) acrylate, and the like. These monomer components can be used alone or in combination of two or more.
- the radiation curable oligomer component includes various oligomers such as urethane, polyether, polyester, polycarbonate, and polybutadiene, and those having a molecular weight in the range of about 100 to 30000 are suitable.
- the compounding amount of the radiation-curable monomer component or oligomer component can be appropriately determined in accordance with the type of the pressure-sensitive adhesive layer, and the amount capable of reducing the adhesive strength of the pressure-sensitive adhesive layer. Generally, the amount is, for example, about 5 to 500 parts by weight, preferably about 70 to 150 parts by weight with respect to 100 parts by weight of the base polymer such as an acrylic polymer constituting the pressure-sensitive adhesive.
- the radiation curable pressure-sensitive adhesive in addition to the additive-type radiation curable pressure-sensitive adhesive, a base polymer having a carbon-carbon double bond in the polymer side chain or in the main chain or at the main chain terminal was used.
- An internal radiation-curable pressure-sensitive adhesive is also included.
- Intrinsic radiation curable adhesives do not need to contain oligomer components, which are low molecular components, or do not contain much, so they are stable without the oligomer components moving through the adhesive over time. This is preferable because an adhesive layer having a layered structure can be formed.
- the base polymer having a carbon-carbon double bond a polymer having a carbon-carbon double bond and having adhesiveness can be used without particular limitation.
- a base polymer those having an acrylic polymer as a basic skeleton are preferable.
- the basic skeleton of the acrylic polymer include the acrylic polymers exemplified above.
- the method for introducing the carbon-carbon double bond into the acrylic polymer is not particularly limited, and various methods can be adopted. However, it is easy to introduce the carbon-carbon double bond into the polymer side chain in terms of molecular design. is there. For example, after a monomer having a functional group is copolymerized in advance with an acrylic polymer, a compound having a functional group capable of reacting with the functional group and a carbon-carbon double bond is converted into a radiation-curable carbon-carbon double bond. A method of performing condensation or addition reaction while maintaining the above.
- combinations of these functional groups include carboxylic acid groups and epoxy groups, carboxylic acid groups and aziridyl groups, hydroxyl groups and isocyanate groups, and the like.
- a combination of a hydroxyl group and an isocyanate group is preferable because of easy tracking of the reaction.
- the functional group may be on either side of the acrylic polymer and the compound as long as the combination of these functional groups generates an acrylic polymer having the carbon-carbon double bond.
- it is preferable that the acrylic polymer has a hydroxyl group and the compound has an isocyanate group.
- examples of the isocyanate compound having a carbon-carbon double bond include methacryloyl isocyanate, 2-methacryloyloxyethyl isocyanate, m-isopropenyl- ⁇ , ⁇ -dimethylbenzyl isocyanate, and the like.
- the acrylic polymer a copolymer obtained by copolymerizing the above-exemplified hydroxy group-containing monomer, an ether compound such as 2-hydroxyethyl vinyl ether, 4-hydroxybutyl vinyl ether, diethylene glycol monovinyl ether, or the like is used.
- the base polymer having carbon-carbon double bonds can be used alone, but the radiation-curable monomer component does not deteriorate the properties.
- photopolymerizable compounds such as oligomer components can also be blended.
- the amount of the photopolymerizable compound is usually 30 parts by weight or less, preferably 0 to 10 parts by weight, based on 100 parts by weight of the base polymer.
- the radiation curable pressure-sensitive adhesive preferably contains a photopolymerization initiator when cured by ultraviolet rays or the like.
- Acrylic polymer A comprising an isocyanate compound having a radical reactive carbon-carbon double bond is preferred.
- the number of carbon atoms in the alkyl group of the acrylic acid alkyl ester is less than 4, the polarity is high and the peel force becomes too large, so that the pickup property may be lowered.
- the number of carbon atoms of the alkyl group of the acrylic acid alkyl ester exceeds 18, the glass transition temperature of the pressure-sensitive adhesive layer 52 becomes too high, and the adhesive properties at room temperature deteriorate, resulting in dicing or expanding. Separation of the metal layer 3 may occur.
- the acrylic polymer A may contain units corresponding to other monomer components as necessary.
- the acrylic polymer A an isocyanate compound having a radical reactive carbon-carbon double bond is used. That is, it is preferable that the acrylic polymer has a configuration in which a double bond-containing isocyanate compound is subjected to an addition reaction with a polymer based on a monomer composition such as an acrylic ester or a hydroxyl group-containing monomer. Accordingly, the acrylic polymer preferably has a radical reactive carbon-carbon double bond in its molecular structure.
- the active energy ray hardening type adhesive layer (ultraviolet ray hardening type adhesive layer etc.) hardened
- double bond-containing isocyanate compound examples include methacryloyl isocyanate, acryloyl isocyanate, 2-methacryloyloxyethyl isocyanate, 2-acryloyloxyethyl isocyanate, m-isopropenyl- ⁇ , ⁇ -dimethylbenzyl isocyanate, and the like.
- a double bond containing isocyanate compound can be used individually or in combination of 2 or more types.
- an external cross-linking agent can be appropriately used for the active energy ray-curable adhesive in order to adjust the adhesive strength before irradiation with active energy rays and the adhesive strength after irradiation with active energy rays.
- Specific examples of the external crosslinking method include a method of adding a so-called crosslinking agent such as a polyisocyanate compound, an epoxy compound, an aziridine compound, a melamine crosslinking agent, and reacting them.
- a so-called crosslinking agent such as a polyisocyanate compound, an epoxy compound, an aziridine compound, a melamine crosslinking agent, and reacting them.
- the amount used is appropriately determined depending on the balance with the base polymer to be cross-linked and further depending on the intended use as an adhesive.
- the amount of the external crosslinking agent used is generally 20 parts by weight or less (preferably 0.1 to 10 parts by weight) with respect to 100 parts by weight of the base polymer.
- the active energy ray-curable pressure-sensitive adhesive may contain various conventionally known additives such as tackifiers, anti-aging agents, and foaming agents in addition to the above components, if necessary.
- the thickness of the pressure-sensitive adhesive layer 52 is not particularly limited and can be appropriately determined, but is generally about 5 to 200 ⁇ m.
- the pressure-sensitive adhesive layer 52 may be composed of a single layer or a plurality of layers.
- the metal constituting the metal layer 3 is not particularly limited as long as the tensile strength of the metal layer 3 is 350 MPa or more.
- the metal layer 3 is selected from the group consisting of stainless steel, aluminum, iron, titanium, tin, nickel, and copper. It is preferable to contain at least one kind from the viewpoint of heat dissipation and warpage prevention of the electronic device package 8. Among these, it is particularly preferable to contain copper from the viewpoint of high thermal conductivity and obtaining a heat dissipation effect. In addition, from the viewpoint of preventing warpage of the electronic device package 8, it is particularly preferable to include aluminum.
- the metal layer 3 is made of an alloy containing copper and one or more selected from the group consisting of nickel, chromium, zirconium, zinc, tin, titanium, silicon, iron, manganese, magnesium, phosphorus and cobalt. It is preferable. When the metal layer 3 is made of a copper alloy, the copper content is preferably 99.95% or less.
- the metal layer 3 is an alloy containing aluminum and one or more selected from the group consisting of nickel, chromium, zirconium, zinc, tin, magnesium, copper, manganese, titanium, silicon, iron and cobalt. It may be from.
- the metal layer 3 is also preferably made of stainless steel. Stainless steel contains iron as a main component and chromium. Stainless steel has an iron content of 50% or more and a chromium content of 10.5% or more, more preferably 11% or more. By configuring the metal layer 3 with such a copper alloy, aluminum alloy or stainless steel, the tensile strength can be increased.
- the tensile strength of the metal layer 3 is 350 MPa or more, when the metal layer with the adhesive layer is picked up from the adhesive tape, it is possible to prevent the metal layer from being deformed due to the push-up of the pin of the pick-up device, thereby causing pin marks. can do.
- the tensile strength of the metal layer 3 is not particularly limited, but is preferably 1000 MPa or less from the viewpoint of thin film processability.
- the tensile strength of the metal layer 3 is a value measured at 25 ° C. according to JISJZ 2241.
- the metal layer 3 preferably has a thermal conductivity of 5 W / (m ⁇ K) or more.
- the thermal conductivity is 5 W / (m ⁇ K) or more, the heat dissipation is superior to the sealing material. If it is 85 W / (m ⁇ K) or more, it is more preferable because it has better heat dissipation than a wafer.
- the thickness of the metal layer 3 is not less than 5 ⁇ m and less than 200 ⁇ m. By setting it as 5 micrometers or more, it can suppress that a metal layer deform
- a metal foil can be used as the metal layer 3.
- the adhesive layer 4 is a film obtained by previously forming an adhesive.
- the adhesive layer 4 is formed of at least a thermosetting resin, and is preferably formed of at least a thermosetting resin and a thermoplastic resin.
- thermoplastic resin examples include natural rubber, butyl rubber, isoprene rubber, chloroprene rubber, ethylene-vinyl acetate copolymer, ethylene-acrylic acid copolymer, ethylene-acrylic acid ester copolymer, polybutadiene resin, polycarbonate resin, Thermoplastic polyimide resin, polyamide resin such as 6-nylon and 6,6-nylon, phenoxy resin, acrylic resin, saturated polyester resin such as PET (polyethylene terephthalate) and PBT (polybutylene terephthalate), polyamideimide resin, or fluorine resin Etc.
- a thermoplastic resin can be used individually or in combination of 2 or more types. Among these thermoplastic resins, acrylic resins are less ionic impurities and have excellent stress relaxation properties, phenoxy resins are both high flexibility and strength and high toughness. This is particularly preferable because reliability can be easily secured.
- the acrylic resin is not particularly limited, and one or more esters of acrylic acid or methacrylic acid having a linear or branched alkyl group having 30 or less carbon atoms (preferably 1 to 18 carbon atoms) are used. And the like. That is, in the present invention, acrylic resin has a broad meaning including methacrylic resin.
- alkyl group examples include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, a t-butyl group, an isobutyl group, a pentyl group, an isopentyl group, a hexyl group, a heptyl group, and a 2-ethylhexyl group.
- Octyl group isooctyl group, nonyl group, isononyl group, decyl group, isodecyl group, undecyl group, dodecyl group (lauryl group), tridecyl group, tetradecyl group, stearyl group, octadecyl group and the like.
- the other monomer for forming the acrylic resin is not particularly limited.
- acrylic acid Carboxyl group-containing monomers such as methacrylic acid, carboxyethyl acrylate, carboxypentyl acrylate, itaconic acid, maleic acid, fumaric acid or crotonic acid, acid anhydride monomers such as maleic anhydride or itaconic anhydride, (meth) 2-hydroxyethyl acrylate, 2-hydroxypropyl (meth) acrylate, 4-hydroxybutyl (meth) acrylate, 6-hydroxyhexyl (meth) acrylate, 8-hydroxyoctyl (meth) acrylate, (meth) Acrylic acid 10-hydroxydec , Hydroxyl group-containing monomers such as 12-hydroxylauryl (meth) acrylic acid or (4-hydroxymethylcyclohexyl)
- thermosetting resin examples include an epoxy resin, a phenol resin, an amino resin, an unsaturated polyester resin, a polyurethane resin, a silicone resin, a thermosetting polyimide resin, and the like.
- a thermosetting resin can be used individually or in combination of 2 or more types.
- an epoxy resin containing a small amount of ionic impurities that corrode semiconductor elements is particularly suitable.
- a phenol resin can be used suitably as a hardening
- the epoxy resin is not particularly limited.
- bisphenol A type epoxy resin bisphenol F type epoxy resin, bisphenol S type epoxy resin, brominated bisphenol A type epoxy resin, hydrogenated bisphenol A type epoxy resin, bisphenol AF type epoxy.
- Bifunctional epoxy such as resin, biphenyl type epoxy resin, naphthalene type epoxy resin, fluorene type epoxy resin, phenol novolac type epoxy resin, orthocresol novolak type epoxy resin, trishydroxyphenylmethane type epoxy resin, tetraphenylolethane type epoxy resin
- Epoxy such as resin, polyfunctional epoxy resin, hydantoin type epoxy resin, trisglycidyl isocyanurate type epoxy resin or glycidylamine type epoxy resin Resin can be used.
- epoxy resin among the examples, novolak type epoxy resin, biphenyl type epoxy resin, trishydroxyphenylmethane type epoxy resin, and tetraphenylolethane type epoxy resin are particularly preferable. This is because these epoxy resins are rich in reactivity with a phenol resin as a curing agent and are excellent in heat resistance and the like.
- the phenol resin acts as a curing agent for the epoxy resin.
- a novolak type phenol resin such as a phenol novolak resin, a phenol aralkyl resin, a cresol novolak resin, a tert-butylphenol novolak resin, a nonylphenol novolak resin, or a resol type.
- examples thereof include phenol resins and polyoxystyrene such as polyparaoxystyrene.
- a phenol resin can be used individually or in combination of 2 or more types. Of these phenol resins, phenol novolac resins and phenol aralkyl resins are particularly preferred. This is because the connection reliability of the semiconductor device can be improved.
- the mixing ratio of the epoxy resin and the phenol resin is preferably such that, for example, the hydroxyl group in the phenol resin is 0.5 equivalent to 2.0 equivalents per equivalent of epoxy group in the epoxy resin component. More preferred is 0.8 equivalents to 1.2 equivalents. That is, if the blending ratio of both is out of the above range, sufficient curing reaction does not proceed and the properties of the cured epoxy resin are likely to deteriorate.
- thermosetting acceleration catalyst is not particularly limited, and can be appropriately selected from known thermosetting acceleration catalysts.
- stimulation catalyst can be used individually or in combination of 2 or more types.
- thermosetting acceleration catalyst for example, an amine-based curing accelerator, a phosphorus-based curing accelerator, an imidazole-based curing accelerator, a boron-based curing accelerator, a phosphorus-boron-based curing accelerator, or the like can be used.
- epoxy resin curing agent a phenol resin is preferably used as described above, but known curing agents such as imidazoles, amines, and acid anhydrides can also be used.
- the adhesive layer 4 has adhesiveness (adhesiveness) to the adherend 9 such as an electronic device. Therefore, in order to crosslink the adhesive layer 4 to some extent in advance, a polyfunctional compound that reacts with the functional group at the end of the molecular chain of the polymer may be added as a crosslinking agent. Thereby, the adhesive property under high temperature can be improved and heat resistance can be improved.
- the crosslinking agent is not particularly limited, and a known crosslinking agent can be used. Specifically, for example, an isocyanate crosslinking agent, an epoxy crosslinking agent, a melamine crosslinking agent, a peroxide crosslinking agent, a urea crosslinking agent, a metal alkoxide crosslinking agent, a metal chelate crosslinking agent, a metal salt Examples thereof include a system crosslinking agent, a carbodiimide crosslinking agent, an oxazoline crosslinking agent, an aziridine crosslinking agent, and an amine crosslinking agent.
- the crosslinking agent an isocyanate crosslinking agent or an epoxy crosslinking agent is suitable.
- the said crosslinking agent can be used individually or in combination of 2 or more types.
- additives can be appropriately blended in the adhesive layer 4 as necessary.
- additives include fillers (fillers), flame retardants, silane coupling agents, ion trapping agents, bulking agents, antioxidants, antioxidants, and surfactants.
- the soot filler may be either an inorganic filler or an organic filler, but an inorganic filler is preferred.
- a filler such as an inorganic filler
- the adhesive layer 4 can be improved in thermal conductivity, adjusted in elastic modulus, and the like.
- the inorganic filler include silica, clay, gypsum, calcium carbonate, barium sulfate, alumina, beryllium oxide, silicon carbide, aluminum nitride, silicon nitride and other ceramics, aluminum, copper, silver, gold, nickel, chromium,
- examples include various inorganic powders made of metals such as lead, tin, zinc, palladium, solder, alloys, and other carbon.
- a filler can be used individually or in combination of 2 or more types. Among these, silica or alumina is particularly suitable as the filler, and fused silica is particularly suitable as the silica.
- the average particle size of the inorganic filler is preferably in the range of 0.001 ⁇ m to 80 ⁇ m. The average particle diameter of the inorganic filler can be measured by, for example, a laser diffraction type particle size distribution measuring apparatus.
- the blending amount of the filler is preferably 98% by weight or less (0% by weight to 98% by weight) with respect to the organic resin component, and particularly in the case of silica, 0% by weight to 70% by weight.
- the content is preferably 10% by weight to 98% by weight.
- examples of the flame retardant include antimony trioxide, antimony pentoxide, brominated epoxy resin, and the like.
- a flame retardant can be used individually or in combination of 2 or more types.
- examples of the silane coupling agent include ⁇ - (3,4-epoxycyclohexyl) ethyltrimethoxysilane, ⁇ -glycidoxypropyltrimethoxysilane, ⁇ -glycidoxypropylmethyldiethoxysilane, and the like.
- a silane coupling agent can be used individually or in combination of 2 or more types.
- examples of the ion trapping agent include hydrotalcites and bismuth hydroxide. An ion trap agent can be used individually or in combination of 2 or more types.
- the adhesive layer 4 contains, in particular, (A) an epoxy resin, (B) a curing agent, (C) an acrylic resin or a phenoxy resin, and (D) a surface-treated inorganic filler from the viewpoints of adhesiveness and reliability. It is preferable to do.
- epoxy resin By using an epoxy resin, high adhesiveness, water resistance, and heat resistance can be obtained.
- epoxy resin the above-described known epoxy resins can be used.
- curing agent The above-mentioned well-known hardening
- Acrylic resin has both high flexibility and strength and high toughness.
- a preferred acrylic resin has a Tg (glass transition temperature) of ⁇ 50 ° C. to 50 ° C., and is obtained by polymerizing a monomer having an epoxy group, glycidyl group, alcoholic hydroxyl group, phenolic hydroxyl group or carboxyl group as a crosslinkable functional group. It is a crosslinkable functional group-containing (meth) acrylic copolymer.
- higher toughness can be obtained by containing acrylonitrile or the like and exhibiting rubber properties.
- the phenoxy resin has a long molecular chain and a structure similar to that of an epoxy resin, and acts as a flexible material in a composition having a high cross-linking density and imparts high toughness. A composition is obtained.
- Preferable phenoxy resins are those having a main skeleton of bisphenol A type, and other preferable examples include commercially available phenoxy resins such as bisphenol F type phenoxy resin, bisphenol A / F mixed type phenoxy resin and brominated phenoxy resin.
- the surface-treated inorganic filler includes inorganic filler surface-treated with a coupling agent.
- the inorganic filler the above-described known inorganic fillers can be used, and silica and alumina are preferable. Due to the surface treatment with the coupling agent, the dispersibility of the inorganic filler is improved. For this reason, since it is excellent in fluidity
- the surface treatment of the inorganic filler with the silane coupling agent is performed by dispersing the inorganic filler in the silane coupling agent solution by a known method, so that the hydroxyl group and the silane coupling agent present on the surface of the inorganic filler are mixed.
- This is performed by reacting a hydrolyzable group such as an alkoxy group with a hydrolyzed silanol group to form a Si—O—Si bond on the surface of the inorganic filler.
- the thickness of the adhesive layer 4 is not particularly limited, but is usually 3 ⁇ m or more, more preferably 5 ⁇ m or more from the viewpoint of easy handling, and preferably 150 ⁇ m or less in order to contribute to thinning of the semiconductor package, 100 ⁇ m or less is more preferable.
- the adhesive layer 4 may be composed of a single layer or a plurality of layers.
- the adhesive layer 4 has a peeling force (23 ° C., peeling angle of 180 degrees, linear speed of 300 mm / min) with the metal layer 3 in the B stage (uncured state or semi-cured state) of 0.3 N or more. Is preferred. If the peeling force is less than 0.3 N, peeling may occur between the adhesive layer 4 and the metal layer 3 during singulation (dicing).
- the water absorption rate of the adhesive layer 4 is preferably 1.5 vol% or less.
- the method for measuring the water absorption rate is as follows. That is, using a 50 ⁇ 50 mm adhesive layer 4 (film adhesive) as a sample, the sample was dried in a vacuum dryer at 120 ° C. for 3 hours, allowed to cool in a desiccator, and then measured for dry mass. M1. The sample is immersed in distilled water at room temperature for 24 hours and then taken out. The surface of the sample is wiped off with a filter paper and quickly weighed to obtain M2.
- the water absorption rate is calculated by the following equation (1).
- d is the density of the film. If the water absorption exceeds 1.5 vol%, package cracks may occur during solder reflow due to the absorbed water.
- the saturated moisture absorption rate of the adhesive layer 4 is preferably 1.0 vol% or less.
- the method for measuring the saturated moisture absorption rate is as follows. That is, a circular adhesive layer 4 (film adhesive) having a diameter of 100 mm was used as a sample, the sample was dried in a vacuum dryer at 120 ° C. for 3 hours, allowed to cool in a desiccator, and then the dry mass was measured. To do. The sample is absorbed in a constant temperature and humidity chamber at 85 ° C. and 85% RH for 168 hours, then taken out, and weighed quickly to obtain M2.
- the saturated moisture absorption rate is calculated by the following equation (2).
- d is the density of the film.
- the residual volatile content of the adhesive layer 4 is preferably 3.0 wt% or less.
- the method for measuring the remaining volatile components is as follows. That is, using an adhesive layer 4 (film adhesive) having a size of 50 ⁇ 50 mm as a sample, measuring the initial mass of the sample as M1, and heating the sample at 200 ° C. for 2 hours in a hot air circulating thermostat, Weigh to M2.
- the remaining volatile content is calculated by the following equation (3).
- Residual volatile matter (wt%) [(M2-M1) / M1] ⁇ 100 (3) If the residual volatile content exceeds 3.0 wt%, the solvent is volatilized by heating during packaging, and voids are generated inside the adhesive layer 4, which may cause package cracks.
- the ratio of the linear expansion coefficient of the metal layer 3 to the linear expansion coefficient of the adhesive layer 4 is preferably 0.2 or more. If the ratio is less than 0.2, peeling between the metal layer 3 and the adhesive layer 4 is likely to occur, and package cracking may occur during packaging, which may reduce reliability.
- a method for manufacturing the electronic device package tape 1 according to the present embodiment will be described.
- a long metal layer 3 is prepared.
- the metal layer 3 a commercially available metal foil may be used.
- the metal layer 3 is bonded to the adhesion surface of the elongate base-material tape 2 using the bonding roller r.
- a long film adhesive layer 4 is formed.
- the adhesive layer 4 can be formed using a conventional method of preparing a resin composition and forming it into a film-like layer. Specifically, for example, the resin composition is applied on a suitable separator (such as release paper) and dried (in the case where heat curing is necessary, heat treatment is performed as necessary to dry), Examples include a method of forming the adhesive layer 4.
- the resin composition may be a solution or a dispersion.
- the adhesive layer 4 peeled from the separator is bonded onto the metal layer 3 bonded to the base tape 2 using a bonding roller r or the like.
- the adhesive layer 4 was bonded onto the metal layer 3, but the metal layer 3 and the adhesive layer 4 were bonded together. Then, the surface on the metal layer 3 side may be bonded to the base tape 2.
- the adhesive layer 4 and the metal layer 3 are pre-cut into a predetermined shape (here circular shape) using a press cutting blade or the like, and as shown in FIG.
- the unnecessary portion 6 is peeled off from the base tape 2 and removed.
- the adhesive layer 4 and the metal layer 3 may be separated into a predetermined size such as a size corresponding to the semiconductor chip C by using a circular cutting edge with a circular outer edge. Good.
- the method for forming the metal layer 3 and the adhesive layer 4 having a predetermined shape on the base tape 2 is not limited to the above, and the long metal layer 3 is formed on the long base tape 2.
- the adhesive layer 4 formed in a predetermined shape may be bonded onto the metal layer 3 having a predetermined shape
- the metal layer 3 and the adhesive layer 4 formed on the substrate may be bonded to the base tape 2, but from the simplicity of the manufacturing process, the metal layer 3 and the adhesive layer 4 are manufactured by the steps shown in FIGS. It is preferable.
- the base film can be formed by a conventionally known film forming method.
- the film forming method include a calendar film forming method, a casting method in an organic solvent, an inflation extrusion method in a closed system, a T-die extrusion method, a co-extrusion method, and a dry lamination method.
- the pressure-sensitive adhesive composition is applied onto the substrate film and dried (heat-crosslinked as necessary) to form a pressure-sensitive adhesive layer.
- the coating method include roll coating, screen coating, and gravure coating.
- the pressure-sensitive adhesive composition may be directly applied to the base film to form a pressure-sensitive adhesive layer on the base film, or the pressure-sensitive adhesive composition may be applied to release paper or the like that has been subjected to release treatment on the surface. Then, after forming the pressure-sensitive adhesive layer, the pressure-sensitive adhesive layer may be transferred to the base film. Thereby, the adhesive tape 5 in which the adhesive layer was formed on the base film is produced.
- the pressure-sensitive adhesive layer 52 of the pressure-sensitive adhesive tape 5 is formed on the surface of the metal layer 3 and the adhesive layer 4 on the side of the adhesive layer 4 on the base tape 2.
- the adhesive tape 5 is laminated so that the side surface contacts.
- the adhesive tape 5 is pre-cut into a predetermined shape using a press cutting blade or the like, and the surrounding unnecessary portion 7 is removed from the base tape 2 as shown in FIG. 5 (C).
- the tape 1 for electronic device package is made by peeling and removing.
- the base tape 2 used for the precut processing may be peeled off and a known separator may be bonded to the adhesive layer 52 of the adhesive tape 5.
- a separate dicing tape D similar to the adhesive tape 5 of the electronic device package tape 1 of the present invention is prepared, and a semiconductor as shown in FIG.
- the wafer W is adhered and held and fixed by adhering (mounting process of the semiconductor wafer W), and the ring frame R is adhered to the peripheral portion of the dicing tape D.
- the dicing tape D is attached to the back surface of the semiconductor wafer W.
- the back surface of the semiconductor wafer W means a surface opposite to the circuit surface (also referred to as a non-circuit surface or a non-electrode forming surface).
- the sticking method is not specifically limited, the method by thermocompression bonding is preferable.
- the crimping is usually performed while pressing with a pressing means such as a crimping roll.
- the semiconductor wafer W is diced.
- the semiconductor wafer W is cut into a predetermined size and divided into pieces (small pieces), whereby the semiconductor chip C is manufactured.
- the dicing is performed from the circuit surface side of the semiconductor wafer W according to a conventional method.
- a cutting method called full cut that cuts up to the adhesive tape 5 can be adopted. It does not specifically limit as a dicing apparatus used at this process, A conventionally well-known thing can be used.
- the expanding can be performed using a conventionally known expanding apparatus.
- the pickup method is not particularly limited, and various conventionally known methods can be employed.
- a dicing tape D to which a semiconductor chip C and a ring frame R are bonded is placed on a stage S of a pickup device with the base film side down, and the ring frame R is fixed in a hollow cylindrical shape.
- the push-up member T is raised and the dicing tape D is expanded. In this state, a method of pushing up each semiconductor chip C from the base film side of the dicing tape D with a pin N and picking up the pushed-up semiconductor chip C with a pickup device can be used.
- the picked-up semiconductor chip C is fixed to an adherend 9 such as a substrate by a flip chip bonding method (flip chip mounting method).
- the semiconductor chip C is always placed on the adherend 9 such that the circuit surface (also referred to as a surface, a circuit pattern formation surface, an electrode formation surface, etc.) of the semiconductor chip C faces the adherend 9.
- the circuit surface also referred to as a surface, a circuit pattern formation surface, an electrode formation surface, etc.
- flux is attached to the bumps 10 as connection portions formed on the circuit surface side of the semiconductor chip C.
- the bump 10 and the conductive material 11 are melted while bringing the bump 10 of the semiconductor chip C into contact with the bonding conductive material 11 (solder or the like) attached to the connection pad of the adherend 9 and pressing it.
- the electrical conduction between the semiconductor chip C and the adherend 9 can be ensured, and the semiconductor chip C can be fixed to the adherend 9 (flip chip bonding step).
- a gap is formed between the semiconductor chip C and the adherend 9, and the gap distance is generally about 30 ⁇ m to 300 ⁇ m.
- the flux remaining on the opposing surface or gap between the semiconductor chip C and the adherend 9 is removed by washing.
- various substrates such as a lead frame and a circuit substrate (such as a wiring circuit substrate) can be used.
- the material of such a substrate is not particularly limited, and examples thereof include a ceramic substrate and a plastic substrate.
- the plastic substrate include an epoxy substrate, a bismaleimide triazine substrate, and a polyimide substrate.
- a chip-on-chip structure can be obtained by using another semiconductor chip as the adherend 9 and flip-chip connection of the semiconductor chip C.
- the base tape 2 of the electronic device package tape 1 according to the present embodiment is peeled to expose the adhesive layer 52 of the metal layer 3 and the adhesive tape 5, The peripheral edge of the adhesive layer 52 is fixed to the ring frame R.
- the metal layer 3 and the adhesive layer 4 are cut into pieces corresponding to the semiconductor chip C and separated into pieces.
- the cutting can be performed in the same process as the dicing process of the semiconductor wafer W described above. In addition, this process is not performed when the pre-cut process which separates the metal layer 3 and the adhesive bond layer 4 previously is performed.
- the separated metal layer 3 and adhesive layer 4 are picked up and peeled off from the adhesive tape 5.
- the pickup can be performed in the same process as the semiconductor chip C pickup process described above.
- the picked-up metal layer 3 and the adhesive layer 4 side of the adhesive layer 4 are bonded to the back surface of the flip-chip connected semiconductor chip C as shown in FIG. Thereafter, the periphery of the semiconductor chip C with the metal layer 3 and the gap between the semiconductor chip C and the adherend 9 are filled with a sealing material (such as a sealing resin) and sealed. Sealing is performed according to a conventional method.
- a sealing material such as a sealing resin
- Sealing is performed according to a conventional method.
- the metal layer 3 is provided on the back surface of the semiconductor chip C, warping caused by a difference in thermal expansion coefficient between the semiconductor chip C and the adherend 9 in the flip chip bonding process is caused. 3 is offset by the difference in coefficient of thermal expansion from 3.
- the metal layer 3 is provided on the back surface of the semiconductor chip C, heat generated during use as an electronic device is dissipated by the metal layer 3.
- the package structure in which the metal layer 3 is directly provided on the back surface of the semiconductor chip C via the adhesive layer 4 and the metal layer 3 is also sealed together with the semiconductor chip C has been described.
- the semiconductor chip C is sealed.
- the metal layer 3 may be provided on the upper surface of the sealing body via the adhesive layer 4. Since the electronic device package 8 warps during sealing, the warping during sealing can be offset by providing the metal layer 3 on the upper surface of the sealing body.
- the semiconductor chip C flip-chip connected on the adherend 9 is described as an example of the electronic device package 8, but the present invention is not limited to this, and for example, the same size on the semiconductor chip.
- the lower semiconductor chip is interposed via an adhesive layer 4 in order to use the metal layer 3 of the electronic device package tape 1 of the present invention as a spacer between the two chips.
- the metal layer 3 may be provided thereon.
- the pressure-sensitive adhesive layer 52, the adhesive layer 4, and the metal layer 3 are provided in this order.
- the pressure-sensitive adhesive layer 52, the metal layer 3, and the adhesive layer 4 are provided in this order. Also good.
- a semiconductor wafer can be bonded onto the adhesive layer 4, the semiconductor wafer, the metal layer 3, and the adhesive layer 4 can be diced and picked up together.
- the semiconductor wafer, the metal layer 3 and the adhesive layer 4 are separately diced and picked up, and after the semiconductor chip is flip-chip connected, the metal layer 3 is attached to the semiconductor chip on the semiconductor chip.
- the metal layer 3 and the adhesive layer 4 can be picked up from the pressure-sensitive adhesive tape 5 without causing pin marks. .
- the acrylic copolymer (A1) having a functional group is composed of butyl acrylate, 2-ethylhexyl acrylate, 2-hydroxyethyl acrylate and acrylic acid, the ratio of 2-ethylhexyl acrylate is 50 mol%, and the mass average molecular weight is 65
- a product (1) was prepared.
- ethylene-methacrylic acid copolymer Nucleel NO35C (trade name) manufactured by Mitsui DuPont Polychemical Co., Ltd. was used.
- the pressure-sensitive adhesive composition (1) was applied to a release liner composed of a polyethylene-terephthalate film subjected to a release treatment so that the thickness after drying was 10 ⁇ m, and dried at 110 ° C. for 3 minutes to form a pressure-sensitive adhesive layer. Then, it was bonded to the base film (1) to produce an adhesive tape (1).
- This adhesive composition solution was applied on a release film (release liner) made of a polyethylene terephthalate film having a thickness of 50 ⁇ m after the silicone release treatment, and then dried at 130 ° C. for 5 minutes. Thereby, an adhesive layer (1) having a thickness of 20 ⁇ m was produced.
- the remaining aluminum alloy is melted, ingot is formed by a semi-continuous casting method, and the resulting ingot is homogenized at a temperature of 480 ° C. for 5 hours, followed by hot rolling in a temperature range of 450 to 260 ° C.
- an intermediate heat treatment is performed using a rapid heating furnace at a temperature of 400 ° C. for 1 minute and cooling at a cooling rate of 20 ° C./s. After the heat treatment, cold rolling was repeated to obtain a 20 ⁇ m aluminum alloy foil.
- a single-sided adhesive film was prepared by bonding the adhesive layer (1) formed on the release liner and the metal layer (1) under the conditions of a bonding angle of 120 °, a pressure of 0.2 MPa, and a speed of 10 mm / s.
- the single-sided adhesive film was pre-cut into a circular shape smaller than the pressure-sensitive adhesive tape (1) so that the pressure-sensitive adhesive tape (1) could be bonded to the ring frame.
- the adhesive layer (1) side exposed by peeling the release treatment film of the single-sided adhesive film and the adhesive layer of the adhesive tape (1) are exposed so that the adhesive layer is exposed around the single-sided adhesive film. Then, an electronic device package tape according to Example 1 as shown in FIG. 1 was produced.
- Examples 2 to 4 Comparative Examples 1 and 2>
- the electronic device package tapes of Examples 2 to 4 and Comparative Examples 1 and 2 were prepared in the same manner as in Example 1 except that the combination of the adhesive tape, the adhesive composition, and the metal layer was changed to the combination shown in Table 1. Was made.
- the electronic device package tapes according to Examples 1 to 4 have a tensile strength of the metal layer of 356 MPa or more and 350 MPa or more as defined in the claims. became.
- the electronic device package tapes according to Comparative Examples 1 and 2 had inferior results in the pin mark suppression evaluation because the tensile strength of the metal layer was less than 350 MPa.
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- Microelectronics & Electronic Packaging (AREA)
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Abstract
Description
基材テープ2は、公知のセパレータで構成することもできるが、電子デバイスパッケージ用テープのプリカット加工に使用する基材テープをそのまま使用することもできる。電子デバイスパッケージ用テープのプリカット加工に使用する基材テープをそのまま使用する場合、基材テープ2はプリカット加工時に金属層3を粘着保持する必要があるため、例えば、樹脂フィルムと樹脂フィルムの片面に設けられた基材テープ用粘着剤層とを有するテープを好適に使用することができる。
粘着テープ5としては、特に制限はなく、従来の粘着テープを使用することができる。粘着テープ5として、例えば、基材フィルム51に粘着剤層52を設けたものを好適に使用できる。
金属層3を構成する金属としては、金属層3の引張強度が350MPa以上であれば特に限定されず、例えば、ステンレス鋼、アルミニウム、鉄、チタン、スズ、ニッケル及び銅からなる群より選択される少なくとも1種を含むことが放熱性、電子デバイスパッケージ8の反り防止の点から好ましい。これらの中でも、熱伝導性が高く放熱の効果が得られる観点から、銅を含むことが特に好ましい。また、電子デバイスパッケージ8の反り防止の観点からは、アルミニウムを含むことが特に好ましい。
接着剤層4は、接着剤を予めフィルム化したものである。
また、フェノキシ樹脂は、フェノキシ樹脂は分子鎖が長くエポキシ樹脂と構造が似ており、高架橋密度の組成物中で可とう性材料として作用し、高靭性を付与するので高強度でありながらタフネスな組成物が得られる。好ましいフェノキシ樹脂は、主骨格がビスフェノールA型のものであるが、その他にビスフェノールF型フェノキシ樹脂、ビスフェノールA/F混合型フェノキシ樹脂や臭素化フェノキシ樹脂等市販のフェノキシ樹脂が好ましいものとして挙げられる。
ここで、dはフィルムの密度である。
吸水率が1.5vol%を超えると、吸水した水分によりはんだリフロー時にパッケージクラックを生じるおそれがある。
ここで、dはフィルムの密度である。
飽和吸湿率が1.0vol%を超えると、リフロー時の吸湿により蒸気圧の値が高くなり、良好なリフロー特性が得られないおそれがある。
残存揮発分(wt%)=[(M2-M1)/M1]×100 (3)
残存揮発分が3.0wt%を超えると、パッケージングの際の加熱により溶媒が揮発し、接着剤層4の内部にボイドが発生して、パッケージクラックが発生するおそれがある。
次に、本実施形態の電子デバイスパッケージ用テープ1を使用して電子デバイスパッケージ8を製造する方法について、図6~図8を参照しながら説明する。なお、本実施形態においては、電子デバイスパッケージ8として、被着体9上にフリップチップ接続された半導体チップCを例にして説明する。
先ず、本発明の電子デバイスパッケージ用テープ1の粘着テープ5と同様の別体のダイシングテープDを用意し、該ダイシングテープD上の中央部に、図6(A)で示されるように、半導体ウエハWを貼着して、これを粘着保持させ固定する(半導体ウエハWのマウント工程)とともに、ダイシングテープDの周縁部にリングフレームRを貼合する。このとき、ダイシングテープDは、半導体ウエハWの裏面に貼着される。半導体ウエハWの裏面とは、回路面とは反対側の面(非回路面、非電極形成面などとも称される)を意味する。貼着方法は特に限定されないが、加熱圧着による方法が好ましい。圧着は、通常、圧着ロール等の押圧手段により押圧しながら行われる。
次に、図6(B)で示されるように、半導体ウエハWのダイシングを行う。これにより、半導体ウエハWを所定のサイズに切断して個片化(小片化)し、半導体チップCを製造する。ダイシングは、例えば、半導体ウエハWの回路面側から常法に従い行われる。また、本工程では、例えば、粘着テープ5まで切り込みを行うフルカットと呼ばれる切断方式等を採用できる。本工程で用いるダイシング装置としては特に限定されず、従来公知のものを用いることができる。なお、ダイシングテープDのエキスパンドを行う場合、該エキスパンドは従来公知のエキスパンド装置を用いて行うことができる。
図6(C)で示されるように、半導体チップCのピックアップを行って、半導体チップCをダイシングテープDより剥離させる。ピックアップの方法としては特に限定されず、従来公知の種々の方法を採用できる。例えば、半導体チップCおよびリングフレームRが貼り合わされたダイシングテープDを、基材フィルム側を下にして、ピックアップ装置のステージS上に載置し、リングフレームRを固定した状態で、中空円柱形状の突き上げ部材Tを上昇させ、ダイシングテープDを拡張する。この状態で、個々の半導体チップCをダイシングテープDの基材フィルム側からピンNによって突き上げ、突き上げられた半導体チップCをピックアップ装置によってピックアップする方法等が挙げられる。
ピックアップした半導体チップCは、図6(D)で示されるように、基板等の被着体9に、フリップチップボンディング方式(フリップチップ実装方式)により固定させる。具体的には、半導体チップCを、半導体チップCの回路面(表面、回路パターン形成面、電極形成面などとも称される)が被着体9と対向する形態で、被着体9に常法に従い固定させる。例えば、まず半導体チップCの回路面側に形成されている接続部としてのバンプ10にフラックスを付着させる。次いで、半導体チップCのバンプ10を被着体9の接続パッドに被着された接合用の導電材11(半田など)に接触させて押圧しながらバンプ10及び導電材11を溶融させることにより、半導体チップCと被着体9との電気的導通を確保し、半導体チップCを被着体9に固定させることができる(フリップチップボンディング工程)。このとき、半導体チップCと被着体9との間には空隙が形成されており、その空隙間距離は、一般的に30μm~300μm程度である。半導体チップCと被着体9との対向面や間隙に残存するフラックスは洗浄除去する。
次に、本発明の効果をさらに明確にするために、実施例および比較例について詳細に説明するが、本発明はこれら実施例に限定されるものではない。
<粘着剤組成物(1)>
官能基を有するアクリル系共重合体(A1)として、ブチルアクリレート、2-エチルヘキシルアクリレート、2-ヒドロキシエチルアクリレートおよびアクリル酸からなり、2-エチルヘキシルアクリレートの比率が50モル%であり、質量平均分子量65万、ガラス転移温度-60℃、水酸基価25mgKOH/g、酸価6mgKOH/gのアクリル系共重合体(a-1)を調製した。
<基材フィルム(1)>
エチレン-メタクリル酸共重合体の樹脂ビーズを200℃で溶融し、押出機を用いて厚さ150μmの長尺フィルム状に成形して基材フィルム(1)を作製した。エチレン-メタクリル酸共重合体は、三井デュポンポリケミカル株式会社製のニュクレルNO35C(商品名)を使用した。
<粘着テープ(1)>
<接着剤層(1)>
ビスフェノールA型フェノキシ樹脂(新日鉄住金化学株式会社製、商品名「YP-50S」、Mw6万、Tg84℃)28質量部と、固形ビスフェノールA型エポキシ樹脂(新日鉄住金化学株式会社製、商品名「YD-011」、Mw1000、エポキシ当量450)55質量部、液体ビスフェノールA型エポキシ樹脂(新日鉄住金化学株式会社、商品名「YD-128」、Mw400、エポキシ当量190)49質量部、硬化剤としてのイミダゾール(四国化成工業株式会社製、商品名「2PHZ-PW」)9質量部、シリカフィラー(株式会社アドマテックス製、商品名「SO-C2」、平均粒径0.5μm)74質量部とをメチルエチルケトンに溶解または分散させ、接着剤組成物溶液を調製した。この接着剤組成物溶液を、シリコーン離型処理した厚さが50μmのポリエチレンテレフタレートフィルムからなる離型処理フィルム(剥離ライナー)上に塗布した後、130℃で5分間乾燥させた。これにより、厚さ20μmの接着剤層(1)を作製した。
<金属層(1)>
圧延銅箔(株式会社UACJ製、タフピッチ銅箔、厚さ18μm、引張強度450MPa、391W/m・K)
<金属層(2)>
C18040(株式会社UACJ製、銅合金箔、厚さ18μm、引張強度658MPa、322W/m・K)
<金属層(3)>
サンプルA(アルミニウム合金箔、厚さ20μm、引張強度356MPa、110W/m・K)
<金属層(4)>
SUS304(新日鉄住金マテリアルズ株式会社製、ステンレス箔、厚さ20μm、引張強度1225MPa、16.3W/m・K)
<金属層(5)>
F0-WS(古河電気工業株式会社製、銅箔、厚さ18μm、引張強度310MPa、378W/m・K)
<金属層(6)>
1085(株式会社UACJ製、アルミニウム箔、厚さ20μm、引張強度180MPa、221W/m・K)
Siを0.27質量%、Feを0.31質量%、Cuを0.02質量%、Mnを1.1質量%、Mgを0.51質量%、Tiを0.01質量%含有し、残部がAlからなるアルミニウム合金を溶解、半連続鋳造法により造塊し、得られた鋳塊を480℃の温度で5h均質化処理した後、450~260℃の温度範囲で熱間圧延を行い、厚さ3mmの熱間圧延板を得た。熱間圧延板を厚さ0.5mmまで冷間圧延した後、急速加熱炉を用いて400℃の温度で1分間保持し、20℃/sの冷却速度で冷却する中間熱処理を実施し、中間熱処理以後は、冷間圧延を繰り返して20μmのアルミニウム合金箔とした。
<実施例1>
上述の剥離ライナー上に形成された接着剤層(1)と金属層(1)とを貼り合わせ角度120°、圧力0.2MPa、速度10mm/sの条件で貼り合わせ片面接着フィルムを作製した。粘着テープ(1)をリングフレームに貼合できるように円形形状に、片面接着フィルムを粘着テープ(1)より小さい円形形状にプリカットした。前記片面接着フィルムの離型処理フィルムを剥離して露出させた接着剤層(1)側と前記粘着テープ(1)の粘着剤層とを、片面接着フィルムの周囲に粘着剤層が露出するように貼り合わせ、図1に示すような実施例1に係る電子デバイスパッケージ用テープを作製した。
粘着テープ、接着剤組成物、金属層の組合せを表1に記載の組合せにした以外は、実施例1と同様の手法により、実施例2~4、比較例1~2の電子デバイスパッケージ用テープを作製した。
上記実施例及び比較例の各サンプルの電子デバイスパッケージ用テープの金属層および接着剤層を、5mm×5mmの大きさの個片サンプルができるようダイシングした。その後、基材フィルム側から粘着剤層に空冷式高圧水銀灯(80W/cm、照射距離10cm)により紫外線を200mJ/cm2照射した。電子デバイスパッケージ用テープ中央部の個片サンプル100個について、キャノンマシナリー株式会社製のダイスピッカー装置(商品名「CAP-300II」)を用いてピックアップ試験を行い、金属層に対するピン痕の有無を確認した。ピックアップされた金属層において、目視にてピンの痕が見られないものを成功サンプルとし、ピン痕の抑制成功率を算出した。その算出結果において成功率が90%以上のものを良品として○、90%未満のものを不良品として×で評価した。評価結果を表1に示す。
2:基材テープ
3:金属層
4:接着剤層
5:粘着テープ
5a:ラベル部
5b:周辺部
Claims (10)
- 基材フィルムと粘着剤層とを有する粘着テープと、
前記粘着剤層の前記基材フィルムと反対側に積層して設けられた接着剤層と金属層との積層体とを有し、
前記金属層は、引張強度が350MPa以上であることを特徴とする電子デバイスパッケージ用テープ。 - 前記金属層は、銅またはアルミニウムを含有することを特徴とする請求項1に記載の電子デバイスパッケージ用テープ。
- 前記金属層は、銅の含有量が99.95%以下であることを特徴とする請求項1または請求項2に記載の電子デバイスパッケージ用テープ。
- 前記金属層が銅合金箔またはアルミニウム合金箔であることを特徴とする請求項1から請求項3のいずれか一項に記載の電子デバイスパッケージ用テープ。
- 前記金属層が、銅と、ニッケル、クロム、ジルコニウム、亜鉛、スズ、チタン、ケイ素、鉄、マンガン、マグネシウム、リンおよびコバルトからなる群から選択される1種または2種以上とを含む合金からなることを特徴とする請求項1から請求項4のいずれか一項に記載の電子デバイスパッケージ用テープ。
- 前記金属層が、アルミニウムと、ニッケル、クロム、ジルコニウム、亜鉛、スズ、マグネシウム、銅、マンガン、チタン、ケイ素、鉄およびコバルトからなる群から選択される1種または2種以上とを含む合金からなることを特徴とする請求項1から請求項4のいずれか一項に記載の電子デバイスパッケージ用テープ。
- 前記金属層が、ステンレス鋼からなることを特徴とする請求項1から請求項4のいずれか一項に記載の電子デバイスパッケージ用テープ。
- 前記金属層は、熱伝導率が5W/( m・K)以上であることを特徴とする請求項1から請求項7のいずれか一項に記載の電子デバイスパッケージ用テープ。
- 前記接着剤層が、(A)エポキシ樹脂、(B)硬化剤、(C)アクリル樹脂またはフェノキシ樹脂、および(D)表面処理された無機充填材を含有することを特徴とする請求項1から請求項8のいずれか一項に記載の電子デバイスパッケージ用テープ。
- 前記粘着剤層が、CH2=CHCOOR(式中、Rは炭素数が4~18のアルキル基である。)で表されるアクリル酸エステルと、ヒドロキシル基含有モノマーと、分子内にラジカル反応性炭素-炭素二重結合を有するイソシアネート化合物とを含んで構成されるアクリル系ポリマーを含有することを特徴とする請求項1から請求項9のいずれか一項に記載の電子デバイスパッケージ用テープ。
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JP2010120239A (ja) * | 2008-11-19 | 2010-06-03 | Nippon Steel Chem Co Ltd | 金属張積層体およびその製造方法 |
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