WO2017158931A1 - Procédé de formation de motif d'émission de lumière pour un élément électroluminescent organique - Google Patents

Procédé de formation de motif d'émission de lumière pour un élément électroluminescent organique Download PDF

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Publication number
WO2017158931A1
WO2017158931A1 PCT/JP2016/084448 JP2016084448W WO2017158931A1 WO 2017158931 A1 WO2017158931 A1 WO 2017158931A1 JP 2016084448 W JP2016084448 W JP 2016084448W WO 2017158931 A1 WO2017158931 A1 WO 2017158931A1
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Prior art keywords
organic
mask
light
sheet
light irradiation
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PCT/JP2016/084448
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English (en)
Japanese (ja)
Inventor
新藤　博之
尚裕 奥村
森川　雅弘
棚橋　清一
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コニカミノルタ株式会社
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Publication of WO2017158931A1 publication Critical patent/WO2017158931A1/fr

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources

Definitions

  • the present invention relates to a method for forming a light emission pattern of an organic electroluminescence element using a pattern-forming light irradiation device having a cooling function. More specifically, the present invention suppresses thermal deformation of the mask during pattern formation and thermal damage to the organic electroluminescence element by the cooling function, and the organic electroluminescence capable of forming a light emitting pattern with high productivity and high dimensional accuracy.
  • the present invention relates to a light emitting pattern forming method for an element.
  • organic light emitting panels are attracting attention as thin light emitting devices.
  • an organic light-emitting element (hereinafter also referred to as “organic EL element”) using electroluminescence (EL) of an organic material is a thin film type that can emit light at a low voltage of about several volts to several tens of volts.
  • EL electroluminescence
  • This is a complete solid panel, can obtain high brightness with low power, has excellent features such as excellent visibility, response speed, lifetime, power consumption, etc., and can be reduced in thickness and weight.
  • attention has been focused on various displays using organic EL elements as panels, their backlights, display boards such as signboards and emergency lights, and surface light emitters such as illumination light sources.
  • a light-emitting layer made of an organic material or the like is disposed between two electrodes, and emitted light generated in the light-emitting layer passes through the electrode and is extracted outside.
  • at least one of the two electrodes is configured as a transparent electrode, and emitted light is extracted from the transparent electrode side.
  • the organic functional layer of the manufactured organic EL element is irradiated with an active energy ray such as ultraviolet rays to deactivate the light emission function of the irradiated portion.
  • an active energy ray such as ultraviolet rays
  • a manufacturing method of a light emitting display element in which a light emitting region is formed and a light emitting pattern having the non-light emitting region is formed is disclosed (for example, refer to Patent Document 1).
  • Patent Document 1 a method of forming a light emission pattern by ultraviolet irradiation using a mask is described, but no consideration is given to a method of cooling an organic EL element or a mask. Absent.
  • Patent Document 1 is a method of performing patterning in a so-called batch method in which each individual organic EL element is irradiated with light, and in this method, the productivity is low and the light emitting pattern is provided.
  • this method meets the demands for high productivity and the like that can form light emission patterns on a plurality of organic EL elements at once.
  • an organic EL element is manufactured by a roll-to-roll method or a wet coating method
  • a plurality of organic EL elements are formed on the substrate, and then the substrate is cut by a predetermined length.
  • a plurality of organic EL elements are patterned at once by irradiating light to a plurality of organic EL elements in a state of a sheet having organic EL elements cut to a predetermined length. It is possible to improve production efficiency.
  • the organic EL element itself is more vulnerable to heat because the structure of the organic EL element is more complex than that of a photoresist used in the manufacture of circuits such as semiconductors and liquid crystal display devices.
  • the film quality of the organic material changes due to heat, resulting in a change in luminous efficiency, chromaticity, and a reduction in device lifetime.
  • the color balance is difficult to maintain, so the allowable width is narrow and it is more susceptible to heat, and as a result, the color balance is likely to be lost.
  • problems specific to organic EL elements are problems specific to organic EL elements.
  • the glass substrate of the liquid crystal display (LCD), which is the object to be illuminated is irradiated with near-field light, the glass substrate is transported to the light irradiation table, and cooling of the glass substrate is started.
  • a method of cooling the glass substrate until it is moved to the irradiation position and irradiated with light, and the light irradiation is completed and discharged and conveyed is disclosed (for example, see Patent Document 2).
  • Patent Document 2 it is a method for cooling a crow substrate, a method for cooling a mask used for patterning an organic EL element, preventing thermal deformation at the time of light irradiation, etc., and forming a highly accurate light-emitting pattern.
  • no reference is made to a method for improving productivity by collectively irradiating light to a plurality of irradiated bodies (for example, organic EL elements).
  • Photomasks for near light irradiation are always placed under the light source unit, and it is assumed that air is always blown.
  • the mask cooling air requires a large amount of air of 1000 L / min or more.
  • the running cost for air blowing is at a level that cannot be ignored, and it is desirable to stop the blowing except during light irradiation.
  • Patent Document 3 does not pose any such issues or considerations.
  • no reference is made to a method for improving productivity by collectively irradiating light to a plurality of irradiated bodies (for example, organic EL elements).
  • the present invention has been made in view of the above-described problems and situations, and a solution to the problem is to provide an efficient mask cooling function, thermal deformation of the mask during pattern formation, and thermal damage to a plurality of organic EL elements. It is an object to provide a light emitting pattern forming method for an organic EL element capable of forming a light emitting pattern with excellent productivity and high dimensional accuracy.
  • the present inventor put an organic EL sheet on which a plurality of organic EL elements are arranged on a light irradiation object mounting table having a cooling function. Then, the mask is placed at a predetermined position on the organic EL sheet by alignment, and then the organic EL sheet is irradiated with light through the mask while cooling the mask by spraying a fluid onto the surface of the mask.
  • the present inventors have found that the above problem can be solved by a method of forming a light emission pattern, and stopping the spraying of a cooling fluid to the mask surface after completion of light irradiation, thereby forming the light emission pattern of the organic EL element. .
  • a method for forming a light emission pattern of an organic electroluminescence element wherein the organic electroluminescence element is irradiated with light through a mask to form a light emission pattern
  • a method for forming a light emitting pattern of an organic electroluminescent element wherein a light emitting pattern is formed on the organic electroluminescent element through the following steps 1 to 5.
  • Step 1 Step of placing a sheet-like organic electroluminescence element sheet on which a plurality of organic electroluminescence elements are formed at a predetermined position of a light irradiation object mounting table having a cooling function
  • Step 2 The mask Are arranged and adhered to a predetermined position of the organic electroluminescence element sheet by alignment using an alignment mark.
  • Step 3 A step of spraying a fluid onto the surface of the mask.
  • Step 4 The organic electroluminescence is passed through the mask.
  • Step 5 Stopping spraying of the fluid onto the mask surface after completion of the light irradiation.
  • the step 1 and the step 2 are performed at a position away from the light irradiation position of the step 4, and the light irradiation position is set in a state where the organic electroluminescence element sheet and the mask are mounted on the light irradiation object mounting table.
  • the light irradiation in said step 4 performs light irradiation collectively through the said mask with respect to the total number of the organic electroluminescent elements arrange
  • the light irradiation in said step 4 divides
  • the present invention has an efficient mask cooling function, suppresses thermal deformation of the mask during pattern formation and thermal damage to the plurality of organic EL elements, and pattern formation on a plurality of organic EL elements at once.
  • the light emitting pattern forming method of the organic EL element of the present invention is a method of patterning by irradiating the organic EL element with light, for example, irradiating with ultraviolet rays to form a non-light emitting portion, and this method includes a plurality of organic EL elements. This is an optimal method when patterning is performed by irradiating light of high irradiance on a large organic EL sheet having a planar arrangement.
  • the basic step is to place the organic EL sheet and mask on a light irradiation object mounting table equipped with a cooling function, and blow the airflow, for example, air onto the mask surface to sufficiently cool the organic EL sheet and mask in advance. In this state, light is irradiated to form a light emission pattern, and then the air flow is stopped.
  • the organic EL sheet and the mask are placed in a predetermined position on a light irradiation object mounting table having a cooling function and cooled in advance, and mask cooling air is blown onto the mask before light irradiation.
  • Light irradiation can be started in a state where the organic EL sheet and the mask are sufficiently cooled, and accurate patterning can be performed while suppressing thermal deformation of the mask and thermal damage of the organic EL element.
  • the running cost of air can be reduced by performing the air blowing operation on the mask only when necessary.
  • FIG. 1 is an overall configuration diagram showing an example of a light emission pattern forming apparatus applicable to the present invention.
  • Schematic sectional view showing an example of the configuration of an organic EL element applicable to the present invention Schematic plan view showing an example of the configuration of an organic EL sheet in which a plurality of organic EL elements are arranged
  • Schematic plan view showing an example of the configuration of a mask used for forming a light emitting pattern Schematic which shows an example of a structure of the cooling pipe which a to-be-irradiated body mounting base comprises The perspective view which mounted the organic EL sheet on the to-be-irradiated body mounting stand which has a cooling function
  • Schematic which shows the structure of the light source part in the preparatory process of step 1, a mask alignment apparatus, and a to-be-irradiated body mounting base.
  • Schematic which shows an example of the method of mounting an organic electroluminescent sheet on a to-be-irradiated body mounting stand
  • Schematic which shows an example which moves a to-be-irradiated body mounting stand to the position of a mask alignment apparatus
  • Schematic cross-sectional view showing an example of a method for bringing the organic EL sheet on the irradiated object mounting table and the mask on the mask alignment apparatus into close contact at a predetermined position in Step 2
  • Schematic cross-sectional view showing another example of the method for bringing the organic EL sheet on the irradiated object mounting table and the mask on the mask alignment apparatus into close contact at a predetermined position in Step 2
  • Schematic sectional view showing the method of moving the irradiated object mounting table to the light irradiation position
  • Schematic sectional view showing spraying of cooling fluid on the mask surface before light irradiation in Step 3
  • Schematic sectional view showing step 4 of forming a light emission pattern by ultraviolet irradiation
  • a method for forming a light emission pattern of an organic electroluminescence element according to the present invention is a method for forming a light emission pattern by irradiating an organic electroluminescence element with a light through a mask. A light emission pattern is formed on the electroluminescence element.
  • the flow of starting light irradiation in step 4 according to the present invention after the fluid flow rate in step 3 according to the present invention is 1000 L / min or more. It is preferable that the mask and the like can be reliably cooled before light irradiation, and the light emission pattern can be stably formed with high accuracy.
  • Step 3 is preferably a flow in which a fluid is sprayed onto the mask surface before light irradiation in that the organic EL sheet and the mask can be sufficiently cooled before the light irradiation is started.
  • a method for forming a light emitting pattern a method of irradiating light to all the organic EL elements at once through a mask with respect to the total number of organic EL elements arranged on the organic EL sheet is It is preferable in that the formation time can be shortened and high productivity can be achieved.
  • an organic EL sheet is divided into a plurality of regions, and light is irradiated multiple times through a mask for each of the divided regions. Generation of an excessive amount of heat due to irradiation can be suppressed, mask deformation and the like can be prevented, and a highly accurate light emission pattern can be formed.
  • a method for forming a light emission pattern of an organic EL element of the present invention is a method for forming a light emission pattern of an organic EL element in which a light emission pattern is formed by irradiating the organic EL element with light through a mask. A light emission pattern is formed on the organic EL element through steps 1 to 5 described below.
  • Step 1 Place a sheet-like organic EL sheet on which a plurality of organic EL elements are formed at a predetermined position of a light irradiation object mounting table having a cooling function.
  • Step 2 Align the mask with the mask.
  • Step 3 Arrangement and adhesion of the organic EL sheet at a predetermined position by alignment using marks
  • Step 3 Step of spraying fluid onto the surface of the mask
  • Step 4 Light irradiation of the organic EL sheet through the mask
  • Step 5 Step of stopping spraying of the fluid onto the mask surface after completion of the light irradiation.
  • the light emitting pattern forming apparatus applied to the light emitting pattern forming method of the organic EL element of the present invention mainly includes an irradiation light generating unit for irradiating ultraviolet rays or the like for forming a pattern by reducing the light emitting function of the organic EL element.
  • a light source unit configured by a casing that reflects and guides ultraviolet rays emitted from the irradiation light generation unit, a mask irradiated with ultraviolet rays, and an organic EL sheet for forming a light emission pattern are placed below the light source unit. It is comprised from a to-be-irradiated body mounting stand.
  • a pair of fluid generators arranged to blow a mask cooling fluid, for example, air in parallel with the mask and toward the center of the mask through the gap between the mask and the housing is provided.
  • a mask cooling fluid for example, air in parallel with the mask and toward the center of the mask through the gap between the mask and the housing
  • FIG. 1 is an overall configuration diagram showing an example of a light emission pattern forming apparatus applicable to the present invention.
  • the light emission pattern forming apparatus (1) shown in FIG. 1 mainly includes a light source unit (2) including an ultraviolet ray generation unit (8), a light irradiated object mounting table (14), a fluid generation unit (10), and the like. It is made up of.
  • LEDs (5) having a light emission wavelength of 365 nm or 385 nm are arranged in parallel on the LED substrate (4) as a light source for emitting ultraviolet rays on the LED substrate (4).
  • the emitted divergent light is shaped into a light beam having a predetermined divergence angle by the lens array (7), and the light emission pattern is passed through the casing (9) that reflects and guides the light, and through the mask (12) positioned below the casing (9).
  • Light is emitted to the organic EL sheet (13) held on the light irradiation object mounting table (14).
  • the ultraviolet light emitted from the lens array (7) is confined in the housing (9) whose inner surface is a reflection surface, prevents the light amount from decreasing, and is irradiated to the mask (12) with a uniform light amount.
  • the distance (WD) between the lower end of the housing (9) and the mask (12) should be as narrow as possible, preferably about 5 mm. If it is this space
  • the LED (5) performs intermittent light irradiation by controlling the irradiation output and irradiation time during lighting, extinguishing and lighting by a controller (not shown).
  • the lens array (7) is used as the divergence angle shaping means, but a condensing mirror such as a compound parabolic concentrator may be used.
  • a heat radiating plate (3) for releasing heat generated by the light emission of the LED to the outside is provided on the upper part of the ultraviolet ray generating part (8).
  • the organic EL sheet (13) is placed on the irradiated object placing base (14), and the mask (12) is adjusted to a predetermined relative position with the organic EL sheet (13) and placed on the organic EL sheet (13). Placed. At this time, it is preferable to apply a method of adsorbing and fixing the organic EL sheet (13) to the irradiated body mounting table (14).
  • the organic EL sheet (13) is, for example, a resin film containing polyethylene terephthalate (abbreviation: PET) or polyethylene naphthalate (abbreviation: PEN) as a resin component
  • PET polyethylene terephthalate
  • PEN polyethylene naphthalate
  • the organic EL sheet (13) is preferable in that the entire surface of the organic EL sheet (13) is adhering and fixed to the irradiated body mounting table (14) to fix the light irradiation blur at the time of forming the light emission pattern with good flatness. It is.
  • the light irradiated body mounting table (14) has a function of cooling the organic EL sheet (13) by a water cooling method.
  • a means for cooling the heat pipe generated in the mask (12) or the organic EL sheet (13) by ultraviolet irradiation with cooling water or the like is provided inside the irradiated object mounting table (14). It is preferable.
  • a mask cooling fluid (11), for example, air is parallel to the mask (12), and It is characterized by comprising a pair of fluid generators (10) arranged so as to be sprayed in the central direction of the mask (12).
  • the mask cooling fluid (11) sprayed in the central direction in parallel with the mask (12) uniformly cools the mask (12) surface and joins at the central portion.
  • the air flow rises to the upper part of the housing (9), reaches the ultraviolet light emitting part (8), and further descends along the side surface of the housing (9) to convect.
  • air circulation (convection) inside the housing (9) is promoted to cool the air whose temperature has risen inside the housing (9), and the housing (9) can also be efficiently cooled. it can.
  • the blown air absorbs heat, circulates inside the housing (9), and is exhausted from the side surface adjacent to the surface provided with the air flow generation unit (10).
  • a light source that emits ultraviolet light is attached to the ultraviolet light emitting unit.
  • the light source is not particularly limited as long as it is a light source that emits desired ultraviolet light.
  • the ultraviolet ray referred to in the present invention refers to an electromagnetic wave having a wavelength longer than that of X-rays and shorter than the shortest wavelength of visible light.
  • the wavelength region is in the range of 1 to 400 nm, preferably As the wavelength of irradiation light to be applied, it is preferable to use irradiation light having a maximum wavelength at 355 nm, 365 nm, 380 nm, 405 nm, or the like.
  • Examples of light sources that emit ultraviolet light that can be applied to the present invention include LEDs, ultra-high pressure mercury lamps, high-pressure mercury lamps, low-pressure mercury lamps, carbon arcs, metal halide lamps, xenon arc lamps, carbon arc lamps, excimer lamps, and UV light lasers. Can be used.
  • UV-LED an LED that emits ultraviolet rays as illustrated in FIG. 1
  • UV-LED an LED that emits ultraviolet rays as illustrated in FIG. 1
  • the UV-LED is an LED having a wavelength of 250 to 400 nm, and the UV-LED is further a UVA-LED having an emission wavelength in the range of 350 to 400 nm, and an UVB ⁇ having an emission wavelength in the range of 280 to 350 nm.
  • UVC-LEDs having an emission wavelength in the range of 250 to 280 nm, which are appropriately selected and used depending on the respective applications.
  • nitride semiconductors such as GaN, InGaN, AlGaN and the like can be mentioned.
  • a plurality of LEDs (5) are arranged in a planar shape on the LED substrate (4) to form a light emitting part.
  • a lens array (7) is provided via a lens array support (6), and diverging light emitted from the LED (5) is converted into a light flux having a predetermined spread angle. Shape it.
  • the irradiation amount of ultraviolet rays depends on the size of the organic EL sheet, but can be irradiated with an integrated light amount of 200 to 5000 J / cm 2 . Further, it is preferable that the irradiation time of one pulse of ultraviolet light in the intermittent irradiation is in the range of 1 to 300 seconds.
  • the casing (9) that reflects and guides light has a function of preventing a decrease in the amount of ultraviolet (L) light emitted from the ultraviolet light emitting section (8) and irradiating the mask with a uniform amount of light. Therefore, it is preferable that the inner surface is coated with a reflective material.
  • a reflective material a metal material can be used because it has heat resistance and durability.
  • aluminum can be preferably used because it is lightweight.
  • the ultraviolet light emitting part (8) is attached to the upper part of the housing (9) and has a gap (WD) with the mask (12) at the lower end, its height and bottom area are particularly limited. It can set according to the magnitude
  • the bottom surface is preferably larger than the pattern to be produced.
  • the organic EL sheet (13) is large and particularly effective for cooling during ultraviolet irradiation when the amount of irradiation light is large, for example, an organic EL sheet having a size of 0.1 to 7 m 2 is used. It is effective for manufacturing.
  • productivity can be increased by manufacturing a plurality of organic EL elements by a single ultraviolet irradiation process.
  • the height of the housing can be adjusted as appropriate based on variations in the amount of ultraviolet light and the amount of irradiation light.
  • the gap between the housing and the mask 5.0mm [Fluid generator]
  • the fluid generator (10) passes the gap (WD) between the mask (12) and the housing (9) at a position facing the upper surface of the mask (12).
  • a cooling fluid 11, also simply referred to as “fluid” hereinafter, for example, air is arranged to be blown in parallel to the mask (12) and toward the center of the mask (12).
  • a pair of fluid generators (10) arranged at both ends are positioned on the upper surface of the mask (12), and the fluid (11) sprayed is sprayed by spraying fluid parallel to the mask (12). Instead, it proceeds on the mask (12) and joins at the center of the mask (12).
  • Spraying in parallel means spraying at an angle within ⁇ 2 degrees with respect to the plane of the mask (12).
  • the cooling of the mask (12) becomes insufficient.
  • the air blown to the mask (12) is turbulent, causing uneven cooling of the mask (12) and joining at the center.
  • the generated air generates turbulent flow inside the housing (9), and the above-described convection does not occur and cooling is not efficient.
  • the fluid (11) sprayed on the mask (12) joins at the center of the mask (12).
  • the mask (12) and the housing (9) can be cooled uniformly.
  • the two fluid generating parts (10) are arranged in parallel to the opposing positions on the upper surface of the mask (12).
  • the side surface of the casing (9) on the side to be sprayed is also parallel.
  • the distance (d) between the housing (9) and the fluid generator (10) is not particularly limited as long as air is efficiently blown onto the mask (12), but is preferably within a range of 10 to 200 mm. More preferably, it is in the range of 50 to 100 mm.
  • the length of the fluid generating part (10) is preferably the same as or larger than the width of the casing (9) on the blowing side.
  • the fluid (11) sprayed from the fluid generator (10) is sprayed to the mask (12) through the gap (WD) between the mask (12) and the housing (9).
  • This gap (WD) functions as an air inlet / outlet for the inside of the housing, but the sprayed fluid (11), for example, air efficiently circulates in the housing (9). Also affects.
  • the gap (WD) is preferably in the range of 2 to 20 mm, and more preferably in the range of 3 to 10 mm. If the gap is within 20 mm, the fluid is efficiently circulated in the housing (9), and if it is 2 mm or more, a sufficient air volume for cooling can be obtained.
  • the pair of fluid generating parts (10) is arranged at symmetrical positions with respect to the central part of the housing (9) and the mask (12).
  • a lower part of the mask (12) is provided with a light irradiation object mounting table (14) having a water cooling tube, and cools the mask through the organic EL sheet. It is desirable.
  • the fluid generator (10) is provided with a slit-like or nozzle-like spraying portion. It is preferable that It is more preferable to have a slit-shaped spraying part.
  • the fluid generating part provided with the slit-like spraying part can spray the layered fluid.
  • air blown at a high speed from a thin slit with a gap of about 50 to 100 ⁇ m can engulf a large amount of surrounding air and spray layered air onto the mask (12) surface and the housing (9) surface. .
  • the mask (12) and the housing (9) can be efficiently cooled.
  • nozzle-shaped spraying part In place of the slit-shaped spraying part, one having a nozzle-shaped spraying part can also be used. In that case, the number of nozzles is preferably large, and the number of nozzles is arranged at an interval of 5 to 20 mm. A structure is preferred. The size of the nozzle diameter can be adjusted as appropriate.
  • a commercially available product can be used as the slit-shaped spraying section applied to the fluid generating section (10).
  • “Layered air flow generator 750” manufactured by Sanwa Enterprise Co., Ltd., “Blower knife air nozzle” manufactured by Spraying System Japan Co., Ltd., or the like can be used.
  • the air volume blown from the pair of blowing parts is the same.
  • the air volume is preferably 1000 to 4000 L / min.
  • the fluid generator is preferably connected to an air compressor. According to the irradiation light quantity of an ultraviolet-ray, it can adjust to a desired air volume and a wind speed suitably.
  • a known air compressor can be used.
  • the air to be blown is temperature-adjusted. If necessary, the cooling efficiency can be increased by using air whose temperature is adjusted to about 5 to 15 degrees, for example.
  • the organic EL device according to the present invention includes one or a plurality of organic functional layers between at least a pair of electrodes (anode and cathode).
  • the organic functional layer in the present invention refers to a layer containing an organic compound. Examples thereof include a hole injection layer, a hole transport layer, a light emitting layer (including a blue light emitting layer, a green light emitting layer, and a red light emitting layer), an electron transport layer, and an electron injection layer.
  • the organic EL element according to the present invention can take various configurations, and an example is shown in FIG. In FIG. 2, the aspect ratio is not accurate for explanation.
  • the organic EL element (16) As shown in FIG. 2, the organic EL element (16) according to the present invention is provided on a substrate (113), and in order from the substrate (113) side, a first electrode (transparent electrode, 51), an organic material, and the like.
  • the organic functional layer group (53) configured by using and the second electrode (counter electrode, 55a) are stacked in this order.
  • An extraction electrode (116) is provided at the end of the first electrode (51, composed of the base layer 51a and the electrode layer 51b).
  • the first electrode (51) and an external power source (not shown) are electrically connected via the extraction electrode (116).
  • the organic EL element (16) shows a configuration example in which generated light (emitted light h) is extracted at least from the substrate (113) side. That is, the case where the first electrode is a transparent electrode and the second electrode is a non-transparent electrode is shown.
  • the layer structure constituting the applied organic EL element (16) is not limited and may be a general layer structure.
  • the first electrode (51) functions as an anode (anode)
  • the second electrode (55a) functions as a cathode (cathode).
  • the structure of the organic functional layer group (53) includes a hole injection layer (53a) / a hole transport layer (53b) / a light emitting layer (in order from the first electrode (51) side which is an anode).
  • 53c) / electron transport layer (53d) / electron injection layer (53e) are illustrated as examples.
  • a light emitting layer (53c) containing at least a light emitting compound is essential to have a light emitting layer (53c) containing at least a light emitting compound.
  • the hole injection layer (53a) and the hole transport layer (53b) may be provided as a hole transport injection layer.
  • the electron transport layer (53d) and the electron injection layer (53e) may be provided as an electron transport injection layer.
  • the organic functional layer group (53) may be laminated with a hole blocking layer, an electron blocking layer, and the like in addition to these constituent layers, if necessary.
  • the light emitting layer (53c) may have a structure in which each color light emitting layer for generating light emitted in each wavelength region is laminated, and each of these color light emitting layers is laminated via a non-light emitting intermediate layer.
  • the intermediate layer may function as a hole blocking layer and an electron blocking layer.
  • the second electrode (55a) as the cathode may also have a laminated structure as necessary. In such a configuration, only a portion where the organic functional layer group 13 is sandwiched between the first electrode (51) and the second electrode (55a) becomes a light emitting region in the organic EL element (16).
  • the auxiliary electrode (115) is provided in contact with the electrode layer (51b) of the first electrode (51) for the purpose of reducing the resistance of the first electrode (51). It may be done.
  • the organic EL element (16) configured as described above is formed on the substrate (113) for the purpose of preventing deterioration of the organic functional layer group (53) configured using an organic material or the like due to harmful gas or the like. It is sealed with a sealing material (117).
  • This sealing material (117) is being fixed to the board
  • the extraction electrode (116) of the first electrode (51) and the terminal portion of the second electrode (55a) are kept insulated from each other by the organic functional layer group (53) on the substrate (113). It is provided in a state exposed from the sealing material (117).
  • Organic EL sheet is a sheet in which a plurality of organic EL elements are arranged on a substrate sheet.
  • substrate which comprises the organic EL element demonstrated above is used as a base material sheet.
  • FIG. 3 is a schematic plan view showing an example of the configuration of an organic EL sheet in which a plurality of organic EL elements are arranged.
  • the organic EL sheet (13) has a plurality of organic EL elements (16) formed on a base sheet (F), and alignment marks (17) for organic EL sheets are provided at the four corners. Is formed.
  • This organic EL sheet alignment mark (17) is also used as an alignment of a film-forming mask when forming each electrode or each organic functional layer in the production of an organic EL element, and the pattern according to the present invention.
  • the light irradiation apparatus for formation it can be used when the organic EL sheet (13) and the mask (12) are brought into close contact with each other at an accurate position and fixed.
  • the mask (12) has a role of changing the amount of light applied to each organic EL element (16) to form a desired light emission pattern.
  • a glass mask having a negative pattern on a glass substrate can be used by using a known mask material that can change the amount of transmitted ultraviolet light that is irradiation light for pattern formation.
  • An organic EL sheet having an organic EL element group having a desired light-emitting pattern can be produced by irradiating the organic EL element with ultraviolet rays through the glass mask (12).
  • the “pattern” here means a design (design or pattern of a figure), characters, images, etc. displayed by the organic EL element. “Patterning” refers to providing these pattern display functions.
  • the “light emission pattern” refers to a light emission intensity (brightness) that varies depending on the position of the light emitting surface based on a predetermined design (pattern or pattern), characters, images, etc. when the organic EL panel emits light.
  • FIG. 4 is a schematic plan view showing an example of the configuration of a mask used for forming a light emitting pattern.
  • a predetermined pattern in the example of FIG. 4, the letter “A” is placed on the mask (12) at a position corresponding to each organic EL element (16) formed on the organic EL sheet (13).
  • the mask alignment mark (20) is formed at a position corresponding to the organic EL sheet alignment mark (17) of the organic EL sheet (13).
  • the blackened portion shields ultraviolet light by a light shielding film (FM). Accordingly, the organic EL element (16) is irradiated with ultraviolet light in the light emitting area other than the letter A, the organic functional layer in the area irradiated with the ultraviolet light is deactivated, and a non-light emitting area is formed. , Only the letter A emits light.
  • a dotted line portion of the mask (12) is a light irradiation area (18), which is an area where all the organic EL elements (16) arranged on the organic EL sheet (13) can be irradiated.
  • Hard masks and emulsion masks are made of chrome thin films, and emulsion masks are made of blackened metal silver.
  • the hard mask is made of glass, the emulsion mask is made of glass, or a polymer film.
  • the hard mask forms a thin film layer of chromium on a glass substrate by vapor deposition, etc., applies a resist, performs etching by light irradiation such as laser drawing, etc. A thin film pattern is formed.
  • a silver halide emulsion layer containing high-resolution silver halide grains is formed on a glass substrate, and light irradiation and monochrome development are performed in a desired pattern, for example, silver in a gelatin film.
  • a black and white negative image mask pattern in which fine particles are dispersed is formed corresponding to each of the plurality of organic EL elements.
  • the mask pattern may be the same pattern for a plurality of organic EL elements or may be an individual pattern for each organic EL element.
  • the glass substrate is not particularly limited as a material, and for example, a known glass material used for optics or a substrate can be used. Specifically, glass ceramics such as aluminosilicate glass, soda lime glass, soda aluminosilicate glass, aluminoborosilicate glass, borosilicate glass, quartz glass, chain silicate glass, crystallized glass, phosphate glass or lanthanum glass Etc.
  • glass ceramics such as aluminosilicate glass, soda lime glass, soda aluminosilicate glass, aluminoborosilicate glass, borosilicate glass, quartz glass, chain silicate glass, crystallized glass, phosphate glass or lanthanum glass Etc.
  • a glass substrate having a linear expansion coefficient of 3 ⁇ 10 ⁇ 6 / ° C. or less is preferable.
  • examples of such a glass substrate include heat-resistant glass such as quartz glass, glass ceramic, and borosilicate glass (for example, Tempax Float (registered trademark) manufactured by Schott).
  • Tempax Float registered trademark
  • the thickness of the glass mask is not particularly limited, but a glass mask having a thickness of 3 to 10 mm can be used.
  • the light irradiation object mounting table has a function of mounting and fixing the organic EL sheet (13) at the time of forming the light emission pattern, and in addition to cooling by the air flow blown from the fluid generating unit, the organic EL sheet is cooled by a water cooling method. It is a preferable aspect that a function of cooling the sheet from the back surface is provided.
  • FIG. 5 shows a schematic diagram of a configuration of a cooling pipe included in the irradiated object mounting table.
  • FIG. 5 shows an example of two series of cooling pipe lines.
  • the water that has absorbed heat by the irradiated object mounting table (14) is sent from the cooling pipe (exit side) (15b) to a chiller unit installed outside (not shown), and heat is exchanged inside the chiller unit.
  • the cooling water whose temperature has been lowered is supplied again from the cooling pipe (incoming side) (15a) to the irradiated object mounting table (14).
  • Cooling water circulates through the cooling pipe inside the chiller unit and the irradiated object mounting table (14).
  • the water temperature of the cooling water introduced into the irradiated object mounting table (14) is preferably 30 ° C. or less, within the range where the mask (12) and the organic EL sheet (13) are not condensed, and is within the range of 10 to 20 ° C. It is more preferable.
  • the material of the irradiated object mounting table is preferably a metal having high thermal conductivity, such as aluminum.
  • reference lines (22) are formed at predetermined positions on the surface, for example, at the four corners of the irradiated object mounting table surface. ) Is provided.
  • the reference line (22) may be a marking line or may be drawn with paint or the like.
  • a plurality of suction portions (E) are provided on the surface of the light irradiation object mounting table (14) on the organic EL sheet (13), and the organic EL sheet is securely sucked into a predetermined position by suction. It is preferable to place it.
  • FIG. 6 is a perspective view showing an example of a typical irradiated object mounting table having the above-described functions.
  • Two pairs of cooling pipes (incoming side) (15a) and cooling pipes (outgoing side) (15b) are provided on the side surface portion of the irradiated object mounting table (14) shown in FIG. Then, a cooling pipe as shown in FIG. 5 is inserted to cool the irradiated body mounting table (14).
  • Crossed reference lines (22) are provided at the four corners on the surface of the light irradiation object mounting table (14), and the organic EL elements (13) are formed at the four corners. It can be arranged at a predetermined position so as to coincide with the frame.
  • the organic EL sheet (13) is sucked from the suction unit (E), and the organic EL sheet is placed on the irradiated body mounting table (14). The sheet (13) is brought into close contact.
  • an organic EL sheet and a mask are placed on a light irradiation object mounting table having a cooling function, a cooling fluid is sprayed on the mask surface, and the organic EL sheet and the mask are attached.
  • Light irradiation is performed in a sufficiently cooled state in advance to form a predetermined light emission pattern on the organic EL element, and then the supply of the cooling fluid is stopped after the light irradiation is completed. Is formed through the following steps.
  • Step 1 Place a sheet-like organic EL sheet on which a plurality of organic EL elements are formed at a predetermined position of a light irradiation object mounting table having a cooling function.
  • Step 2 The mask is arranged and adhered to a predetermined position of the organic EL sheet by alignment using an alignment mark.
  • Step 3 spraying fluid on the surface of the mask
  • Step 4 Irradiate the organic EL sheet through the mask
  • Step 5 After the light irradiation is completed, the spraying of the fluid onto the mask surface is stopped.
  • Step 1 is a process of placing a sheet-like organic EL sheet on which a plurality of organic EL elements are formed at a predetermined position of a light irradiation object mounting table having a cooling function.
  • the light emitting pattern forming apparatus (1) has a configuration as shown in FIG. 1 in the final form at the time of light irradiation. However, in the preparation stage, the light source unit, the ask alignment apparatus, and the irradiated object mounting table are provided. These are arranged at separate positions by a predetermined configuration.
  • FIG. 7 is a schematic layout diagram showing the configuration of the light source unit, the mask alignment apparatus, and the irradiated object mounting table in the preparation step of Step 1, and the light source unit (2) is positioned as the position A at the light irradiation position. Is the retreat position of the separated position C, the operation of placing the organic EL sheet (13) on the irradiated object placing table (14), and the position of the mask (12) in the mask alignment position on the mask alignment device (23). ) Is placed.
  • the light irradiated object mounting table (14) is movable, and the organic EL sheet is installed at a retracted position away from the light source unit, and the organic EL sheet is collected after the light emission pattern is formed.
  • FIG. 8 is a schematic diagram for explaining a specific method of placing the organic EL sheet on the irradiated object placing table.
  • the organic EL sheet (13) is placed on a predetermined position of the irradiated object mounting table (14) in a state where the irradiated object mounting table (14) is in the retracted position.
  • a predetermined position of the irradiated object mounting table (14) in a state where the irradiated object mounting table (14) is in the retracted position.
  • the reference line (22) may be a marking line or a line drawn with paint or the like.
  • the positioning of the organic EL sheet (13) to the irradiated object mounting table (14) is not the outer shape of the organic EL element (16) as described above, but the electrode portion (21) and a plurality of organic EL elements (16 ) May be used, an alignment mark that is given when manufacturing the device, a cut position indicating mark for cutting the organic EL element into individual pieces, a discard pattern, or the like.
  • the organic EL sheet (13) After placing the organic EL sheet (13) at a predetermined position on the irradiated body placing table (14), the organic EL sheet (13) is sucked and fixed from the sucking part (E). Further, if necessary, a roller or the like is pressed against the entire organic EL sheet (13) in order to fit the entire organic EL sheet (13) to the surface of the irradiated object mounting table (14) having flatness. A means for close contact is also preferred.
  • the irradiated object mounting table (14) has a cooling function using a chiller.
  • a chiller having a water-cooled tube having a diameter of 10 mm ⁇ in aluminum having a thickness of 60 mm is used, and the temperature is 20 ° C. Of water can be circulated at a rate of 5 m 3 / min for cooling.
  • the mask (12) is placed on the mask holder (24).
  • an elevating part (25) for moving the mask holding table (24) up and down and a support base (26) for holding them are configured.
  • This mask holder (24) can adjust X, Y, Z, and ⁇ in the XY plane.
  • the mask (12) for example, a photosensitive material applied to a glass substrate (quartz glass), a line and space with a half pitch of 0.3 mm (a length of 2 mm in which white (transparent) and black alternate every 0.3 mm).
  • a glass mask in which a large number of patterns in which a linear pattern is arranged at 45 degrees in the vertical, horizontal, and diagonal directions can be used.
  • the light irradiation device section has a narrow WD in order to secure high irradiance, and it is difficult to replace the mask (12) at the light irradiation position. is there. Therefore, a mask alignment apparatus is arranged next to the light source unit so that mask exchange and mask alignment are possible.
  • Step 2 moves the irradiated object mounting table including the organic EL sheet to the alignment position of the mask alignment apparatus including the mask, and then associates the mask and the organic EL sheet at a predetermined position. It is the process of making it adhere.
  • the irradiated object mounting table is moved to the position of the mask alignment apparatus.
  • FIG. 9 is a schematic view showing an example of moving the irradiated object mounting table (14) to the position of the mask alignment apparatus (23).
  • the mask (12) is placed on the mask holder (24) by its own weight, and the mask holder (24) is raised by the elevating part (25).
  • the irradiated object mounting table (14) on which the organic EL sheet (13) is mounted is moved to just below the mask (12) of the mask alignment apparatus (23).
  • the mask holding table (24) is lowered to the point where the organic EL sheet (13) and the mask (12) are in close contact with each other.
  • FIG. 10A and FIG. 10B are schematic cross-sectional views observed from different positions in an example of a method in which the organic EL sheet on the irradiated object mounting table and the mask on the mask alignment apparatus are brought into close contact with each other at a predetermined position.
  • the plurality of cameras (28) are moved to the alignment unit (27) position on the mask (12), and the organic EL
  • the organic EL sheet alignment mark (17) provided in the sheet (13) and the mask alignment mark (20) provided in the mask (12) are recognized.
  • each alignment mark may be performed using only two diagonal positions.
  • FIG. 10B is a schematic cross-sectional view of the mask alignment apparatus shown in FIG. 10A described above as viewed from a position moved 90 degrees.
  • the mask holding base (24) is further lowered, and the mask (12) is separated from the mask holding base (24), and due to the weight of the mask (12).
  • the organic EL sheet adheres at a predetermined position.
  • Arranging the light shielding film of the mask (12) on the surface side of the organic EL sheet (13) allows the heat of the light shielding film, which generates heat by absorbing ultraviolet rays, to pass through the organic EL sheet (13). It is desirable in that it can escape to the light irradiation body mounting table (14). Further, it is preferable in that curling of the organic EL sheet (13) is suppressed, the floating portion is eliminated, and accurate patterning is possible.
  • the organic EL sheet (13) and the mask (12) are cooled by the cooling function of the irradiated object mounting table (14).
  • Step 3 is a step of spraying a fluid onto the surface of the mask of the irradiated object mounting table moved to the light irradiation position.
  • FIG. 12 is a schematic cross-sectional view showing spraying of a cooling fluid onto the mask surface before light irradiation for forming a light emitting pattern.
  • the layered mask cooling fluid (11) is applied from the fluid generator (10) to the surface of the mask (12) on which the irradiated object mounting table (14) moved to the light irradiation position is mounted.
  • Spray A flow meter is installed between the fluid generator (10) and a fluid supply source (not shown), and constantly monitors the flow rate of the fluid, for example, air.
  • An anemometer may be installed in front of the blowout port of the part that is outside the light irradiation area in the longitudinal direction of the fluid generating part (10), and the wind speed may be monitored.
  • the mask and the like are sufficiently cooled before light irradiation.
  • Slit position of spraying part 3mm above glass
  • Angle of sprayed part of air flow generating part parallel to mask (0 degree)
  • a distance (d) between the air flow generator and the housing was 72 mm, and a pair of fluid generators were attached at positions facing the side surface of the housing.
  • Step 4 Light irradiation through a mask
  • the fluid generating part (10) forms a layer.
  • ultraviolet light (8) is irradiated to form a light emission pattern.
  • the irradiation of the ultraviolet ray at the light source unit (2) is started after the flow rate of the mask cooling fluid (11) reaches 1000 L / min or more.
  • the ultraviolet irradiation condition in the present invention there is a method in which 40 W of a cycle of irradiation time of 15 seconds and turn-off of 15 seconds is performed 40 times with intermittent irradiation of 4 W / cm 2 as irradiance, and light irradiation is performed for 10 minutes as an integration time.
  • a cycle of irradiation time of 15 seconds and turn-off of 15 seconds is performed 40 times with intermittent irradiation of 4 W / cm 2 as irradiance, and light irradiation is performed for 10 minutes as an integration time.
  • the light emission pattern formation method of this invention is the method of performing light irradiation collectively through a mask with respect to all the organic EL elements arrange
  • the organic EL sheet may be divided into a plurality of regions, and a divided light irradiation method in which light is irradiated through a mask for each divided region may be used.
  • FIGS. 14A and 14B are schematic plan views showing an example of a light irradiation pattern (collective light irradiation method, split light irradiation method) for the organic EL sheet.
  • FIG. 14A shows an example of a method of performing collective light irradiation in the light irradiation area (A) for the total number of organic EL elements (16) arranged on the organic EL sheet (13).
  • the method shown in FIG. 14B shows a method in which the organic EL sheet (13) is divided into four areas (divided area I, divided area II, divided area III, divided area IV), and light is irradiated for each divided area. is there.
  • Step 5 is a step of stopping spraying the fluid onto the mask surface after the light irradiation is completed.
  • the mask holder (24) is raised at the mask alignment position, and the mask (12) and the organic EL sheet (13) on which the light emission pattern is formed are separated.
  • the irradiated object mounting table (14) on which the organic EL sheet (13) on which the light emission pattern is formed is placed is moved to the evacuation position which is the position C shown in FIG. 7, and suction by the suction unit (E) is stopped. Then, the organic EL sheet (13) is collected.
  • the mask alignment device (23) and the irradiated object mounting base (14) may be integrated and moved as a whole.
  • the entire position of the apparatus can be saved by setting the alignment position and the retracted position at the same position.
  • organic EL sheet placement / recovery, mask alignment, and mask replacement are performed at the same position of the alignment position and the retracted position.
  • a light emission pattern is formed on an organic EL element mainly through S101 to S113 shown in FIG.
  • S101 Preliminarily set conditions for irradiating the organic EL sheet with light (setting conditions: irradiance, one pulse irradiation time and extinguishing time and number of cycles, and in the case of divided irradiation method, irradiation order of each irradiation area)
  • S102 Place the organic EL sheet on the light irradiation object mounting table and perform suction fixation (see FIGS. 6 and 8).
  • S103 Refer to placing a mask on the mask alignment apparatus (position B in FIG. 7). (Normally, the mask is placed on the mask alignment apparatus while it is installed.
  • S104 The irradiated object mounting table and the mask alignment apparatus are associated with each other at the mask alignment position (see FIG. 9).
  • S105 The alignment mark of the organic EL sheet and the alignment mark of the mask are used to align the positions of the organic EL sheet and the mask, the mask holder of the mask alignment apparatus is lowered, and the organic EL sheet and the mask are brought into contact with each other (see FIG. 10)
  • S106 Move the irradiated object mounting table on which the mask and the organic EL sheet are mounted to the light irradiation position (see FIG. 11).
  • S107 The cooling fluid is started to be sprayed from the fluid generating portion to the mask surface (see FIG.
  • S108 Confirm that the flow rate of the cooling airflow reaches 1000 L / min.
  • S109 Irradiate the organic EL sheet according to a predetermined light irradiation pattern (see FIGS. 1, 13, and 14).
  • S110 The formation of the light emission pattern is completed and the light irradiation to the organic EL sheet is stopped.
  • S111 The blowing of the cooling airflow to the mask is stopped.
  • S112 The irradiated object mounting table is moved to the mask alignment position (see FIG. 15).
  • S113 Raise the mask holding table of the mask alignment apparatus to separate the mask and the organic EL sheet.
  • S114 Move the irradiated object mounting table to the retracted position, stop the suction, and form the light emission pattern. Collect the sheet.
  • the method for forming a light emitting pattern of an organic EL element according to the present invention suppresses thermal deformation of a mask during pattern formation and thermal damage to a plurality of organic EL elements, and can form a pattern on a plurality of organic EL elements at a time.
  • a light-emitting pattern can be formed with excellent and high dimensional accuracy, and the organic electroluminescence element can be patterned and applied to various displays used as a panel.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

La présente invention traite le problème de fourniture d'un procédé de formation de motif d'émission de lumière pour un élément électroluminescent (EL) organique, de telle sorte que le procédé inhibe la déformation thermique d'un masque de formation de motif et les dommages thermiques au niveau de multiples éléments EL organiques, permet de former un motif sur de multiples éléments EL organiques à la fois, a un excellent rendement, et permet une formation de motif d'émission de lumière ayant une précision dimensionnelle élevée. Le procédé de formation de motif d'émission de lumière pour un élément EL organique de la présente invention est caractérisé en ce que : 1) une feuille d'élément EL organique de type feuille, dans laquelle de multiples éléments EL organiques sont formés, est placée à une position prédéterminée sur un socle de positionnement pour un corps à exposer à une lumière, ledit socle de positionnement ayant une fonction de refroidissement ; 2) au moyen d'un alignement à l'aide d'un masque d'alignement, un masque est positionné à et étroitement lié à une position prédéterminée sur la feuille d'élément EL organique ; 3) un fluide est pulvérisé sur la surface du masque ; 4) la feuille d'élément EL organique est exposée à une lumière par l'intermédiaire du masque ; et 5) après que l'exposition à une lumière est achevée, une formation se produit après une étape pour arrêter la pulvérisation du fluide sur la surface de masque.
PCT/JP2016/084448 2016-03-18 2016-11-21 Procédé de formation de motif d'émission de lumière pour un élément électroluminescent organique WO2017158931A1 (fr)

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JP2016054620A JP2019079594A (ja) 2016-03-18 2016-03-18 有機エレクトロルミネッセンス素子の発光パターン形成方法
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004039905A (ja) * 2002-07-04 2004-02-05 Nikon Corp 露光装置、ミラーの冷却方法、反射マスクの冷却方法及び露光方法
JP2008103409A (ja) * 2006-10-17 2008-05-01 Fujitsu Hitachi Plasma Display Ltd 露光装置
JP2014130188A (ja) * 2012-12-28 2014-07-10 Kyushu Univ 露光装置および露光方法
JP2016029484A (ja) * 2011-11-04 2016-03-03 株式会社ニコン パターン形成方法、及びパターン形成装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004039905A (ja) * 2002-07-04 2004-02-05 Nikon Corp 露光装置、ミラーの冷却方法、反射マスクの冷却方法及び露光方法
JP2008103409A (ja) * 2006-10-17 2008-05-01 Fujitsu Hitachi Plasma Display Ltd 露光装置
JP2016029484A (ja) * 2011-11-04 2016-03-03 株式会社ニコン パターン形成方法、及びパターン形成装置
JP2014130188A (ja) * 2012-12-28 2014-07-10 Kyushu Univ 露光装置および露光方法

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