WO2017158854A1 - 流体供給装置 - Google Patents
流体供給装置 Download PDFInfo
- Publication number
- WO2017158854A1 WO2017158854A1 PCT/JP2016/063571 JP2016063571W WO2017158854A1 WO 2017158854 A1 WO2017158854 A1 WO 2017158854A1 JP 2016063571 W JP2016063571 W JP 2016063571W WO 2017158854 A1 WO2017158854 A1 WO 2017158854A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- pipes
- flexible
- rotation
- fluid supply
- piping
- Prior art date
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B41/00—Pumping installations or systems specially adapted for elastic fluids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C70/00—Shaping composites, i.e. plastics material comprising reinforcements, fillers or preformed parts, e.g. inserts
- B29C70/04—Shaping composites, i.e. plastics material comprising reinforcements, fillers or preformed parts, e.g. inserts comprising reinforcements only, e.g. self-reinforcing plastics
- B29C70/28—Shaping operations therefor
- B29C70/54—Component parts, details or accessories; Auxiliary operations, e.g. feeding or storage of prepregs or SMC after impregnation or during ageing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C37/00—Component parts, details, accessories or auxiliary operations, not covered by group B29C33/00 or B29C35/00
- B29C37/006—Degassing moulding material or draining off gas during moulding
- B29C37/0064—Degassing moulding material or draining off gas during moulding of reinforced material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C70/00—Shaping composites, i.e. plastics material comprising reinforcements, fillers or preformed parts, e.g. inserts
- B29C70/04—Shaping composites, i.e. plastics material comprising reinforcements, fillers or preformed parts, e.g. inserts comprising reinforcements only, e.g. self-reinforcing plastics
- B29C70/06—Fibrous reinforcements only
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C70/00—Shaping composites, i.e. plastics material comprising reinforcements, fillers or preformed parts, e.g. inserts
- B29C70/04—Shaping composites, i.e. plastics material comprising reinforcements, fillers or preformed parts, e.g. inserts comprising reinforcements only, e.g. self-reinforcing plastics
- B29C70/28—Shaping operations therefor
- B29C70/30—Shaping by lay-up, i.e. applying fibres, tape or broadsheet on a mould, former or core; Shaping by spray-up, i.e. spraying of fibres on a mould, former or core
- B29C70/32—Shaping by lay-up, i.e. applying fibres, tape or broadsheet on a mould, former or core; Shaping by spray-up, i.e. spraying of fibres on a mould, former or core on a rotating mould, former or core
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J12/00—Pressure vessels in general
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C1/00—Pressure vessels, e.g. gas cylinder, gas tank, replaceable cartridge
- F17C1/02—Pressure vessels, e.g. gas cylinder, gas tank, replaceable cartridge involving reinforcing arrangements
- F17C1/04—Protecting sheathings
- F17C1/06—Protecting sheathings built-up from wound-on bands or filamentary material, e.g. wires
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2031/00—Other particular articles
- B29L2031/712—Containers; Packaging elements or accessories, Packages
- B29L2031/7154—Barrels, drums, tuns, vats
- B29L2031/7156—Pressure vessels
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2201/00—Vessel construction, in particular geometry, arrangement or size
- F17C2201/01—Shape
- F17C2201/0104—Shape cylindrical
- F17C2201/0109—Shape cylindrical with exteriorly curved end-piece
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2203/00—Vessel construction, in particular walls or details thereof
- F17C2203/06—Materials for walls or layers thereof; Properties or structures of walls or their materials
- F17C2203/0634—Materials for walls or layers thereof
- F17C2203/0658—Synthetics
- F17C2203/0663—Synthetics in form of fibers or filaments
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2209/00—Vessel construction, in particular methods of manufacturing
- F17C2209/21—Shaping processes
- F17C2209/2154—Winding
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2209/00—Vessel construction, in particular methods of manufacturing
- F17C2209/22—Assembling processes
- F17C2209/225—Spraying
Definitions
- the present invention relates to a fluid supply apparatus.
- nozzles for jetting or sucking fluid may be used (see, for example, Patent Documents 1 to 3).
- the workpiece holding device described in Patent Document 1 is configured to inject a cleaning coolant from an attachment nozzle (360) toward a crankcase (W) that is a workpiece.
- the component mounting head described in Patent Document 2 is configured to suck the component (120) using the suction nozzle (112).
- the painting robot (1) described in Patent Document 3 has a supply conduit (10) that can be bent and deformed between the robot element (3) and the robot element (6).
- the supply line (10) has a U-shaped loop (12).
- the supply pipe (10) can be displaced in the axial direction of the supply pipe (10) during the turning motion of the robot (1).
- the base material and the resin may be integrated by melting the resin on the surface of the base material of the tank and then curing the resin.
- a configuration for injecting the compressed air a configuration in which a plurality of nozzles for injecting the compressed air are provided and these nozzles rotate around a predetermined rotation axis is conceivable. With this configuration, the position of the nozzle relative to the tank can be changed. Therefore, each nozzle can be arranged at an optimal position for eliminating bubbles on the tank surface.
- Patent Documents 1 to 3 are not particularly disclosed with respect to the configuration for increasing the allowable amount of the rotational operation of the nozzle in such a configuration in which a plurality of pipes are connected to the plurality of nozzles. Not.
- an object of the present invention is to provide a fluid supply device that can further reduce the load acting on the piping while increasing the allowable rotation amount of each nozzle around the rotation axis.
- a fluid supply apparatus includes a plurality of nozzles, a plurality of first pipes connected to the plurality of nozzles, the nozzles, and the first
- a rotation support portion that supports one pipe so as to be rotatable around a predetermined rotation axis, and one end connected to the corresponding first pipe and configured to be rotatable around the rotation axis in conjunction with each first pipe.
- a plurality of second flexible pipes configured to have flexibility and supporting the other end of each of the second flexible pipes, and each of the second flexible pipes as the first pipes rotate.
- a linear guide including a movable guide portion that can be linearly displaced in accordance with the deformation operation of the flexible pipe.
- one end of the second flexible pipe rotates around the rotation axis along with the rotation of each nozzle around the rotation axis.
- the other end of the second flexible pipe receives a force drawn toward one end of the second flexible pipe or a force away from the one end.
- the second flexible pipe is bent and deformed so that the length in the rotation axis direction is short or long.
- the movable guide part of a linear guide carries out a linear motion with such a deformation
- each 2nd flexible piping can be made thinner. Thereby, the flexibility of each 2nd flexible piping can be made higher. As a result, in each second flexible pipe, the allowable value of the relative rotation amount between the one end and the other end around the rotation axis can be further increased. Thereby, in the fluid supply device, the load acting on the pipe can be further reduced, and the allowable rotation amount of each nozzle around the rotation axis can be increased. As described above, it is possible to realize a fluid supply device that can further reduce the load acting on the pipe while increasing the allowable rotation amount of each nozzle around the rotation axis.
- the fluid supply apparatus includes one end connected to the corresponding other end of the plurality of second flexible pipes and linearly displaceable integrally with the other end.
- one end portion of the third flexible pipe is relatively displaced in a direction parallel to the rotation axis with respect to the other end portion of the third flexible pipe.
- the said support part is arrange
- the support portion is disposed in a space below the rotation support portion.
- at least a part of the support part and the third flexible pipe can be arranged in the space generated by the provision of the rotation support part.
- the fluid supply device can be made more compact through effective use of space.
- At least one of one end and the other end of the second flexible pipe is connected to the corresponding first pipe and the third flexible pipe via a rotary joint, and the rotary joint Is configured to allow relative rotation between the first flexible pipe and the third flexible pipe corresponding to the second flexible pipe.
- the allowable value of the relative rotation of the one end part and the other end part of the second flexible pipe around the rotation axis can be further increased. That is, the allowable rotation amount of each nozzle around the rotation axis can be further increased.
- the load which acts on each 2nd flexible piping can be made smaller.
- the fluid supply device includes: a support mechanism that supports the rotation support portion; and a position adjustment mechanism that can adjust a position of the support mechanism in order to adjust a position of the rotation support portion position. It has more.
- the rotation support portion receiving a large load by supporting the plurality of nozzles and the plurality of first pipes is supported by the support mechanism.
- the position adjustment mechanism is provided, the position of the rotation support portion can be adjusted with respect to the storage chamber in which the rotation support portion is installed.
- FIG. 6 is a cross-sectional view taken along line VI-VI in FIG. 5 and illustration of members on the back side of the cross section is omitted. It is a top view which shows the structure of the principal part in the exterior of a storage chamber, and illustration of a one part member is abbreviate
- FIG. 6 is a cross-sectional view taken along line IX-IX in FIG. 5.
- movement of a heat processing apparatus and has shown the mode of transition between the state which manufactures a thick tank, and the state which manufactures a thin tank.
- movement of a heat processing apparatus and has shown the mode of transition between the state which manufactures a thick tank, and the state which manufactures a thin tank.
- FIG. 1 is a schematic side view of a heat treatment apparatus 1 according to an embodiment of the present invention, in which some members are not shown and some members are shown in cross section.
- FIG. 2 is an enlarged view of the main part around the storage chamber 2 of the heat treatment apparatus 1 in FIG. 1 and shows a state in which the thick tank 101 is manufactured.
- FIG. 3 is a view showing the periphery of the main part of the storage chamber 2 of the heat treatment apparatus 1 and shows a state in which the thin tank 102 is manufactured.
- FIG. 4 is a side view showing a part of the storage chamber 2 of the heat treatment apparatus 1 and the outside of the storage chamber 2, omitting illustration of some members and showing some members in cross section.
- FIG. 5 is an enlarged view of a part of FIG.
- FIG. 6 is a cross-sectional view taken along line VI-VI in FIG. 5, and illustration of members on the back side of the cross section is omitted.
- FIG. 7 is a plan view showing the configuration of the main part outside the storage chamber 2, and illustration of some members is omitted.
- FIG. 8 is a front view showing the main part outside the storage chamber 2, and some members are not shown.
- FIG. 9 is a cross-sectional view taken along line IX-IX in FIG.
- FIG. 10 is a schematic side view of the main part for explaining the operation of the heat treatment apparatus 1, and shows a state of transition between a state in which the thick tank 101 is manufactured and a state in which the thin tank 102 is manufactured. Yes.
- FIG. 11 is a schematic plan view of the main part for explaining the operation of the heat treatment apparatus 1, and shows a state of transition between a state in which the thick tank 101 is manufactured and a state in which the thin tank 102 is manufactured. Yes.
- the heat treatment apparatus 1 is provided for performing heat treatment on the thick tank 101 or the thin tank 102.
- a reinforcing fiber impregnated with resin is wound around the surface of a tank base material formed using a hard resin or the like.
- the thick tank 101 or the thin tank 102 is formed by melting the resin in a reinforcement fiber by heating the said reinforcement fiber with the heat processing apparatus 1, and hardening the resin by a cooling process after that.
- An example of the resin impregnated in the reinforcing fiber is an epoxy resin (Epoxy Resin).
- the heat treatment apparatus 1 is used to integrate the resin in the reinforcing fiber with the surface of the tank base material.
- the resin impregnated in the reinforcing fiber is in a molten state on the surface of the tank base material, bubbles are generated from the resin.
- the heat processing apparatus 1 employ adopts the structure which injects compressed gas, such as compressed air, toward this bubble. Thereby, it is comprised so that said bubble may be erased.
- the large tank 101 and the thin tank 102 as a plurality of types of tanks having different shapes such as size and length can be formed.
- the total length of the thick tank 101 is set shorter than the total length of the thin tank 102.
- the diameter of the thick tank 101 is set larger than the diameter of the thin tank 102.
- Each of the tanks 101 and 102 has a cylindrical intermediate portion 103 and end portions 104 and 105 formed in a hemispherical shape at both ends of the intermediate portion 103.
- through holes are formed in the end portions 104 and 105 of the tanks 101 and 102, respectively.
- the heat treatment apparatus 1 includes a storage chamber 2, a heater 3, a tank support device 4, and a fluid supply device 5.
- the storage chamber 2 is provided to store the tanks 101 and 102.
- the storage chamber 2 is formed in a hollow box shape, for example.
- the loading of the tanks 101 and 102 into the storage chamber 2 and the unloading of the tanks 101 and 102 into the storage chamber 2 are performed using a transfer device (not shown).
- a through hole 6 a is formed in one side wall 6 of the storage chamber 2.
- the through hole 6 a is provided for allowing the fluid supply device 5 to pass therethrough.
- a heater 3 is disposed inside the storage chamber 2.
- the heater 3 is provided to bring the resin material integrated on the surface of the base material of the tanks 101 and 102 into a molten state.
- the heater 3 has a heating source such as a gas burner or an electric heater, and is configured to be able to raise the atmospheric temperature in the accommodation chamber 2 to, for example, several hundred degrees Celsius.
- the tanks 101 and 102 heated by the heater 3 are supported in the storage chamber 2 by the tank support device 4.
- the tank support device 4 is configured to support the tanks 101 and 102 so that the tanks 101 and 102 are oriented horizontally, that is, the center axis of the tanks 101 and 102 is oriented horizontally. Yes.
- the tank support device 4 is configured to be able to rotate the tanks 101 and 102 around the central axis of the tanks 101 and 102.
- the tank support device 4 includes a pair of support columns 4a and 4b, a support shaft 4c supported by the pair of support columns 4a and 4b, a pair of stoppers 4d and 4e, and a tank rotation mechanism 4f.
- the pair of support columns 4a and 4b extend upward from the bottom wall of the storage chamber 2, respectively.
- the support shaft 4c extends in the horizontal direction.
- a pair of support columns 4a and 4b are disposed at both ends of the support shaft 4c.
- the support shaft 4c is supported on the support columns 4a and 4b via a bearing (not shown) and can rotate around the central axis of the support shaft 4c.
- the support shaft 4c supports the tanks 101 and 102 so as to penetrate the tanks 101 and 102.
- a pair of stoppers 4d and 4e are attached to the support shaft 4c.
- the pair of stoppers 4d and 4e are provided to position the axial positions of the tanks 101 and 102 with respect to the support shaft 4c.
- the pair of stoppers 4d and 4e are arranged so as to sandwich the tanks 101 and 102 therebetween.
- one stopper 4d is fixed to the support shaft 4c.
- the other stopper 4e is configured to be slidable in the axial direction of the support shaft 4c with respect to the support shaft 4c. Thereby, the other stopper 4e can be arrange
- the tank rotation mechanism 4f When the tanks 101 and 102 are supported, the tank rotation mechanism 4f operates to rotate the tanks 101 and 102 around the support shaft 4c.
- the tank rotation mechanism 4f has a drive source such as an electric motor, for example, and is configured to be able to rotate the support shaft 4c at a predetermined rotation speed. Gas from the fluid supply device 5 is supplied to the surfaces of the tanks 101 and 102 rotated by the tank rotation mechanism 4f.
- the fluid supply device 5 is provided to supply compressed gas such as compressed air to the surfaces of the tanks 101 and 102. This compressed gas is applied to bubbles generated on the surfaces of the tanks 101 and 102. Thereby, the said bubble is extinguished.
- the fluid supply device 5 is configured to convey the compressed gas supplied from the outside of the storage chamber 2 to the inside of the storage chamber 2 from the outside of the storage chamber 2 and further inject the compressed gas onto the surfaces of the corresponding tanks 101 and 102.
- the compressed gas include compressed air and an inert gas such as compressed nitrogen gas.
- the fluid supply device 5 is configured to supply a compressed gas having a high temperature of about 200 ° C.
- the fluid supply device 5 includes a rotation support portion 10, a large tank nozzle unit 11 and a thin tank nozzle unit 12 as a plurality of types of nozzle units, a plurality of piping lines 13A to 13L, a side wall flange portion 14, a linear A guide 15, chambers 16 and 17, gas supply pipes 18 and 19, a rotation mechanism 20 for rotationally driving the rotation support unit 10, a mount 21, a support mechanism 61, and a position adjustment mechanism 67 are provided. is doing.
- the rotation support unit 10 rotates a thick tank nozzle unit 11, a thin tank nozzle unit 12, and first pipes 31A to 31L, which will be described later, of the respective pipe lines 13A to 13L. It is provided as a main shaft that is supported so as to be integrally rotatable about the axis L1. In the present embodiment, the rotation support portion 10 can rotate about a maximum of 240 ° around the rotation axis L1 from a predetermined reference position.
- the rotation support portion 10 extends in the horizontal direction, and in this embodiment, the rotation support portion 10 is arranged in parallel with the support shaft 4c for supporting the tanks 101 and 102.
- the rotation support portion 10 extends from the inside of the storage chamber 2 to the outside of the storage chamber 2 through the through hole 6 a of the side wall 6.
- One end portion of the rotation support portion 10 disposed in the accommodation chamber 2 is supported by the support column 22.
- the support column 22 is provided in the storage chamber 2 and supports one end portion of the rotation support portion 10 through a bearing (not shown) so as to be rotatable around the rotation axis L1.
- the other end of the rotation support unit 10 is supported by a post 24 described later of the gantry 21.
- the support column 24 supports the other end portion of the rotation support portion 10 through a bearing (not shown) so as to be rotatable around the rotation axis L1.
- the gantry 21 is provided to support the rotation support unit 10, the linear guide 15, the chambers 16 and 17, the main rotation mechanism 20, and the like.
- the gantry 21 includes a base portion 23, a support column 24, a beam portion 25, a support member 53, and a pedestal portion 56.
- the base part 23 is a part arranged in parallel with the bottom wall of the storage chamber 2, and constitutes a base part of the gantry 21.
- a support column 24 extends upward from the base portion 23.
- the support column 24 extends upward from one end portion of the base portion 23 in the axial direction S1 of the rotation support portion 10 and is disposed apart from the side wall 6 of the storage chamber 2 in the axial direction S1.
- the axial direction S1 of the rotation support portion 10 is simply referred to as “axial direction S1”.
- a beam portion 25 is disposed at the upper end portion of the column 24.
- the beam portion 25 extends in parallel with the axial direction S1.
- One end of the beam portion 25 is fixed to the column 24.
- the other end portion of the beam portion 25 is fixed to the side wall 6 of the storage chamber 2.
- a thick tank nozzle unit 11 and a thin tank nozzle unit 12 are installed on the rotation support portion 10 supported by the gantry 21.
- the thick tank nozzle unit 11 is provided for injecting compressed gas into the thick tank 101.
- the thick tank nozzle unit 11 is disposed around the rotation support portion 10.
- the thick tank nozzle unit 11 injects compressed gas toward the thick tank 101 when the rotation support portion 10 and the thick tank nozzle unit 11 are in the first position P1 as a predetermined rotation position. It is configured to be possible. In the following, description will be given based on the case where each part such as the rotation support part 10 is disposed at the first position P1 unless otherwise specified.
- the thick tank nozzle unit 11 has end nozzles 11A and 11B as a plurality of nozzles and an intermediate nozzle 11C.
- the end nozzles 11 ⁇ / b> A and 11 ⁇ / b> B are provided for injecting compressed gas toward the end portions 104 and 105 of the thick tank 101.
- the outlets of the end nozzles 11A and 11B are arranged to face the corresponding end portions 104 and 105 of the thick tank 101 at the first position P1.
- These end nozzles 11A and 11B are supported by the rotation support portion 10 via corresponding brackets 26a and 26b.
- An intermediate nozzle 11C is disposed between the end nozzles 11A and 11B.
- the intermediate nozzle 11 ⁇ / b> C is provided for injecting compressed gas toward the intermediate portion 103 of the thick tank 101.
- the outlet of the intermediate nozzle 11C extends in parallel with the axial direction S1, and is arranged to face the intermediate portion 103 of the thick tank 101 at the first position P1.
- the intermediate nozzle 11C is supported by the rotation support portion 10 via a bracket 26c.
- a thin tank nozzle unit 12 is arranged at a position shifted from the position around the rotation axis L1 with respect to the thick tank nozzle unit 11 having the above-described configuration.
- FIG. 2 a portion of the thin tank nozzle unit 12 is not shown, and in FIG. 3, the thick tank nozzle unit 11 is not shown.
- the fine tank nozzle unit 12 is provided for injecting compressed gas into the fine tank 102.
- the fine tank nozzle unit 12 is disposed around the rotation support portion 10.
- the fine tank nozzle unit 12 is configured to be able to inject compressed gas toward the fine tank 102 when the rotation support portion 10 and the fine tank nozzle unit 12 are in the second position P2 as a predetermined rotation position. Yes.
- the fine tank nozzle unit 12 has end nozzles 12F, 12G, 12H, 12I and an intermediate nozzle 12J as a plurality of nozzles.
- the end nozzles 12F and 12G are provided for injecting compressed gas toward the end 104 of the thin tank 102.
- the end nozzles 12 ⁇ / b> H and 12 ⁇ / b> I are provided for injecting compressed gas toward the end portion 105 of the thin tank 102.
- the outlets of the end nozzles 12F, 12G, 12H, and 12I are arranged to face the corresponding end portions 104 and 105 of the thin tank 102 at the second position P2.
- These end nozzles 12F, 12G, 12H, and 12I are supported by the rotation support portion 10 via corresponding brackets 28a and 28b.
- An intermediate nozzle 12J is disposed between the end nozzles 12F and 12G and the end nozzles 12H and 12I.
- the intermediate nozzle 12J is provided for injecting compressed gas toward the intermediate portion 103 of the thin tank 102.
- the outlet of the intermediate nozzle 12J extends in parallel with the axial direction S1, and is disposed so as to face the intermediate portion 103 of the thick tank 101 at the second position P2.
- the intermediate nozzle 12J is supported by the rotation support portion 10 via a bracket 28c.
- the thick tank nozzle unit 11 and the thin tank nozzle unit 12 having the above-described configuration are connected to corresponding piping lines 13A to 13L.
- the piping lines 13A to 13E are provided as piping lines for supplying compressed gas to the nozzles 11A to 11C of the thick tank nozzle unit 11.
- the piping lines 13F to 13L are provided as piping lines for supplying compressed gas to the nozzles 12F to 12J of the nozzle unit 12 for the fine tank.
- a plurality of piping lines (12 in this embodiment) are provided.
- the piping lines 13A to 13L have first piping 31A to 31L, a rotary joint 32, second flexible piping 33A to 33L, folded piping 34A to 34L, and third flexible piping 35A to 35L, respectively. ing.
- the piping line 13A includes a first piping 31A, a rotary joint 32, a second flexible piping 33A, a folded piping 34A, and a third flexible piping 35A. That is, the piping line 13x (where x represents any alphabet of A to L) includes the first piping 31x, the rotary joint 32, the second flexible piping 33x, the folded piping 34x, and the third piping. Flexible piping 35x.
- the first pipes 31A to 31L are mainly disposed in the storage chamber 2. Each of the first pipes 31A to 31L is configured to extend along the axial direction S1 as a whole.
- the first pipes 31A to 31L are aggregates of pipes connected to any one of the nozzles 11A, 11B, 11C, 12F, 12G, 12H, 12I, and 12J of the tank nozzle units 11 and 12.
- the first pipes 13A to 13E are provided as pipes connected to the thick tank nozzle unit 11.
- the first pipes 13F to 13L are provided as pipes connected to the fine tank nozzle unit 12.
- Each of the first pipes 31A to 31L has a first part 36, a second part 37, and a third part 38.
- the first portion 36 is provided as a portion directly connected to the corresponding nozzles 11A to 11C and 12F to 12J.
- the first portion 36 is provided as a rigid metal pipe that is not intended to be deformed.
- one end portion of the first portion 36 of the first pipe 31A is connected to the end nozzle 11A of the thick tank nozzle unit 11.
- One end of the first portion 36 of the first pipe 31 ⁇ / b> B is connected to the end nozzle 11 ⁇ / b> B of the thick tank nozzle unit 11.
- One end portions of the first pipes 31C to 31E are connected to the intermediate nozzle 11C of the thick tank nozzle unit 11, respectively.
- the one end part of the 1st part 36 of the 1st piping 31F and 31G is connected to the edge part nozzles 12F and 12G of the nozzle unit 12 for thin tanks.
- One ends of the first portions 36 of the first pipes 31H and 31I are connected to the end nozzles 12H and 12I of the thin tank nozzle unit 12.
- One end of each of the first pipes 31J to 31L is connected to the intermediate nozzle 12J of the fine tank nozzle unit 12.
- each of the first pipes 31A to 31L is disposed around the rotation support part 10 and connected to the corresponding second part 37.
- the second portion 37 of each of the first pipes 31A to 31L is formed using, for example, a flexible pipe having flexibility.
- a flexible pipe having flexibility examples include a flexible pipe such as a stainless bellows hose.
- Each second portion 37 has flexibility and can be bent and twisted.
- each 2nd part 37 may be formed with not only flexible piping but general rigid body piping which is not intended to be used for a deformable use.
- the second portion 37 connects the other end portion of the first portion 36 and one end portion of the corresponding third portion 38.
- the third part 38 of each of the first pipes 31A to 31L is formed using a rigid pipe similar to the first part 36 in this embodiment.
- Each third portion 38 extends in parallel with the axial direction S ⁇ b> 1 across the inside and outside of the storage chamber 2.
- these third portions 38 are arranged at equal intervals in the circumferential direction of the rotation support portion 10 around the rotation support portion 10.
- the third portions 38 are arranged at a pitch of 30 ° in the circumferential direction of the rotation support portion 10.
- Each third portion 38 is supported by the rotation support portion 10 via the side wall flange portion 14 so as to be integrally rotatable.
- the side wall flange portion 14 is a member arranged so as to close the through hole portion 6 a of the side wall 6.
- the side wall flange portion 14 has, for example, a configuration in which a heat insulating material is disposed between a pair of annular metal plates, and is connected to the rotation support portion 10 so as to be integrally rotatable.
- the side wall flange portion 14 is formed in a substantially circular shape.
- the third portion 38 is connected to the one end portion 33a of the corresponding second flexible pipe 33A to 33L via the rotary joint 32.
- one end 33a is connected to the corresponding first pipe 31A to 31L via the rotary joint 32.
- the rotary joint 32 allows relative rotation between the second flexible pipes 33A to 33L and the corresponding first pipes 31A to 31L.
- the rotary joint 32 is attached to each of the second flexible pipes 33A to 33L.
- Each rotary joint 32 is a cylindrical tube member extending in parallel with the axial direction S1.
- Each rotary joint 32 is configured such that one end portion 32 a and the other end portion 32 b of the rotary joint 32 are relatively rotatable around the central axis of the rotary joint 32.
- each rotary joint 32 is set to a small value that is about twice the outer diameter of each of the second flexible pipes 33A to 33L.
- Each rotary joint 32 is adjacent to the side wall 6.
- One end 32a of each rotary joint 32 includes a male screw portion. This male screw portion is screwed to a fixing nut 39 provided at the other end portion of the corresponding third portion 38 of the corresponding first pipe 31A to 31L.
- each rotary joint 32 is connected to the other end of the corresponding third portion 38.
- Each third portion 38 is provided with a locking mechanism 40 for locking the fixing nut 39.
- the locking mechanism 40 includes a fixed flange portion 41 and a pair of receiving members 42 and 43.
- the fixed flange portion 41 is adjacent to the side wall flange portion 14 in this embodiment.
- the fixed flange portion 41 has a pair of divided bodies 41a and 41b.
- Each of the pair of divided bodies 41a and 41b is formed in a sector shape of 180 °, and faces each other to form an annular flange. With such a configuration, after the rotary joint 32 is connected to the third portion 38, the fixing flange portion 41 can be fitted to the outer peripheral portion of the third portion 38.
- the pair of divided bodies 41a and 41b are fixed to each other using a fixing member 41c such as a fixing screw.
- a pair of receiving members 42 and 43 extend from the fixed flange portion 41.
- the receiving members 42 and 43 are configured to be detachable from the fixing flange portion 41 using screw members.
- Each of the receiving portions 42 and 43 has a flat tip portion extending in parallel with the axial direction S1.
- the front end portion of one receiving portion 42 is in surface contact with a flat portion formed on the outer peripheral portion of the one end portion 32 a of the rotary joint 32.
- the other receiving portion 43 is in surface contact with the flat portion of the outer peripheral portion of the fixing nut 39.
- each rotary joint 32 is connected to one end 33a of the corresponding second flexible pipe 33A to 33L, and the one end 33a. It is fixed to.
- the second flexible pipes 33A to 33L are arranged so as to surround the rotation support portion 10 and extend substantially along the axial direction S1.
- the second flexible pipes 33A to 33L are arranged between the beam portion 25 and the base portion 23 of the gantry 21 in the vertical direction. More specifically, in the present embodiment, in a side view, the rotary joint 32 and the second joints are formed in a space surrounded by the base portion 23, the support column 24, the beam portion 25, and the side wall 6 of the storage chamber 2. Accommodates flexible pipes 33A to 33L, folded pipes 34A to 34L, linear guide 15, third flexible pipes 35A to 35L, chambers 16 and 17, part of gas supply pipes 18 and 19, and part of main rotation mechanism 20. Has been.
- each of the second flexible pipes 33A to 33L is set to a value that is slightly larger than the outer diameter of the third portion 38 of each of the first pipes 31A to 31L, that is, a small value. As a result, each of the second flexible pipes 33A to 33L has a large allowable amount of bending deformation.
- Each of the second flexible pipes 33A to 33L is formed using a flexible pipe having flexibility.
- Each of the second flexible pipes 33A to 33L can be bent and twisted. Note that the allowable amount of bending deformation of each of the second flexible pipes 33A to 33L is larger than the allowable amount of torsional deformation.
- the one end 33a of each of the second flexible pipes 33A to 33L is fixed to the other end 32b of the corresponding rotary joint 32 using a nut or the like.
- the one end portion 33a of each of the second flexible pipes 33A to 33L is configured to be rotatable around the rotation axis L1 in conjunction with each of the first pipes 31A to 31L (in the present embodiment, it can be integrally rotated). And connected to the third portion 38 of the corresponding first piping 31A to 31L via the corresponding rotary joint 32.
- the other end 33b of each of the second flexible pipes 33A to 33L is fixed to one end of the corresponding folded pipe 34A to 34L using a nut or the like, and is connected to the one end.
- the folded pipes 34A to 34L extend away from the corresponding second flexible pipes 33A to 33L toward one side in the axial direction S1, then extend away from the rotation support portion 10, and then the other side in the axial direction S1. It is provided as a pipe facing the side (side wall 6 side of the storage chamber 2). As described above, by using the folded pipes 34A to 34L, the pipe lines 13A to 13L can be arranged at a high density in a limited space.
- the folded pipes 34A to 34L are arranged on the column 24 side of the gantry 21 in this embodiment.
- the folded pipes 34A to 34L each have a first portion 45, a second portion 46, and a valve 47 provided in the second portion 46.
- the first portions 45 of the folded pipes 34A to 34L are provided as portions extending away from the corresponding second flexible pipes 33A to 33L along the axial direction S1. One end portion of each first portion 45 is connected to the other end portion 33b of the corresponding second flexible pipe 33A to 33L, and is fixed to the other end portion 33b. In each of the return pipes 34A to 34L, the first portion 45 is connected to the second portion 46 through a 90 ° elbow.
- the first portion 45 that is, each of the folded pipes 34A to 34L is configured to be linearly displaced by the linear guide 15 in a direction parallel to the axial direction S1.
- the movable guide 51 of the linear guide 15 supports the other end 33b of each of the second flexible pipes 33A to 33L via the return pipes 34A to 34L.
- the linear guide 15 supports the other end portions 33b of the folded pipes 34A to 34L and the second flexible pipes 33A to 33L.
- the linear guide 15 has a movable guide part 51 and a fixed guide part 52.
- the movable guide 51 is parallel to the axial direction S1 in accordance with the deformation operation (bending operation in this embodiment) of the second flexible pipes 33A to 33L accompanying the rotation of the first pipes 31A to 31L around the rotation axis L1. It can be linearly displaced in any direction.
- the movable guide part 51 is formed using, for example, a sheet metal member.
- the movable guide part 51 has a first part 51a, a second part 51b, and a third part 51c.
- the first portion 51a is formed in a rectangular flat plate shape orthogonal to the axial direction S1.
- a plurality of through-hole portions are formed in the first portion 51a. Each through hole is passed through the first portion 45 of the corresponding folded pipe 34A to 34L and supports the first portion 45.
- the first portion 51a is fixed to the second portion 51b using a bolt or the like.
- the 2nd part 51b of the movable guide part 51 is arrange
- the second portion 51b includes a columnar portion extending in the vertical direction. A lower end portion of the second portion 51b is fixed to the third portion 51c.
- the third portion 51c of the movable guide portion 51 is a portion extending in parallel with the axial direction S1.
- a pair of third portions 51c are provided on the left and right in the front view shown in FIG.
- a concave strip extending along the axial direction S1 is formed on the lower surface of each third portion 51c.
- the third portion 51 c is received by the fixed guide portion 52.
- the fixed guide portion 52 includes a pair of rails 52a and 52a arranged on the left and right in the front view shown in FIG.
- Each rail 52a is a convex portion extending in parallel with the axial direction S1, and supports a corresponding third portion 51c of the movable guide portion 51 so as to be displaceable in the axial direction S1.
- Each rail 52a, 52a receives the corresponding movable guide part 51c, 51c so that sliding is possible. Thereby, the movable guide part 51 can slide in the axial direction S ⁇ b> 1 with respect to the fixed guide part 52.
- the fixed guide portion 52 is fixed to a support member 53 arranged above the base portion 23 of the gantry 21 and is supported by the support member 53.
- each folded pipe 34A to 34L is provided as a portion extending away from the rotation support portion 10. One end of each second portion 46 is connected to the corresponding first portion 45.
- the folded pipes 34A to 34L are arranged around the rotation axis L1.
- each second portion 46 of the folded pipes 34A to 34E which is a pipe for the thick tank nozzle unit 11, faces the left side of the virtual vertical plane V1 that includes the rotation axis L1 of the rotation support portion 10 and extends vertically. Extending from the corresponding first portion 45.
- the second portions 46 of the folded pipes 34A and 34B extend from the corresponding first portion 45 toward the upper left in a front view.
- the second portion 46 of the folded pipe 34C extends substantially horizontally from the corresponding first portion 45 toward the left in a front view.
- the second portions 46 of the folded pipes 34D and 34E extend from the corresponding first portions 45 toward the lower left in a front view.
- the second portions 46 of the folded pipes 34F to 34L which are pipes for the thin tank nozzle unit 12, extend from the corresponding first parts 45 toward the right side of the vertical plane V1.
- the second portions 46 of the folded pipes 34F to 34H extend from the corresponding first portion 45 toward the upper right in the front view.
- the second portion 46 of the folded pipe 34I extends substantially horizontally from the corresponding first portion 45 toward the right in a front view.
- the second portions 46 of the folded pipes 34J to 34L extend from the corresponding first portions 45 toward the lower right in the front view.
- a valve 47 is provided at an intermediate portion of the second portion 46 of each of the return pipes 34A to 34L.
- the valve 47 is, for example, a manually open / close type flow rate adjustment valve, and is configured to be able to adjust the flow rate of the compressed gas in the corresponding piping lines 13A to 13L from zero to a predetermined value.
- Each valve 47 is arranged around the rotation support portion 10 so as to avoid contact with the adjacent valve 47.
- the handle provided in each valve 47 is disposed at a position that advances from the second portion 46 toward the support column 24 along the axial direction S1.
- a 90 ° elbow 55 is provided at the other end of the second portion 46 of each of the folded pipes 34A to 34L, and the opening at the other end formed by the 90 ° elbow 55 extends along the axial direction S1. Facing the containment chamber 2 side.
- the 90 ° elbow 55 at the other end of each second portion 46 is connected to one end 35a of the corresponding third flexible pipe 35A to 35L.
- the third flexible pipes 35A to 35L are arranged in a U shape.
- the third flexible pipes 35A to 35L extend from the elbow 55, which is the other end of the corresponding folded pipes 34A to 34L, toward the storage chamber 2, and then move downward and then move away from the storage chamber 2 side. It extends to.
- the third flexible pipes 35A to 35L extend toward the first pipes 31A to 31L, then go downward, and then extend away from the first pipes 31A to 31L.
- each of the third flexible pipes 35A to 35L includes a portion extending in a curved shape toward the lower side of the rotation support portion 10.
- Each of the third flexible pipes 35A to 35L is formed using a flexible pipe having flexibility, and can be bent and twisted. Note that, for each of the third flexible pipes 35A to 35L, the allowable amount of bending deformation is larger than the allowable amount of torsional deformation. With the above configuration, even if the relative positions of the folded pipes 34A to 34L and the corresponding chambers 16 and 17 are not accurately set, the third flexible pipes 35A to 35L are connected to the corresponding folded pipes 34A to 34L. The chambers 16 and 17 can be reliably connected.
- the one end 35a and the other end 35b of each of the third flexible pipes 35A to 35L in the longitudinal direction of each of the third flexible pipes 35A to 35L are disposed on one end side in the axial direction S1 of the heat treatment apparatus 1.
- the other end portion in the axial direction S1 extends in a curved shape that is convex toward the storage chamber 2.
- One end 35a of each of the third flexible pipes 35A to 35L is connected to the other end 33b of the corresponding second flexible pipe 33A to 33L via the corresponding folded pipe 34A to 34L, and the other end 33b. Linear displacement is possible.
- the other end 35b of each of the third flexible pipes 35A to 35L is connected to the corresponding chambers 16 and 17.
- the chamber 16 is provided to distribute the compressed gas supplied from the gas supply pipe 18 to each of the piping lines 13A to 13E of the thick tank nozzle unit 11.
- the chamber 17 is provided to distribute the compressed gas supplied from the gas supply pipe 19 to the pipe lines 13F to 13L of the fine tank nozzle unit 12.
- Each of the chambers 16 and 17 is an example of the “support portion” in the present invention, and is configured to support the other end portion 35b of each of the third flexible pipes 35A to 35L.
- the chambers 16 and 17 are disposed below the rotation support unit 10. More specifically, each chamber 16, 17 is fixed to a pedestal portion 56 provided on the base portion 23 of the gantry 21.
- Each chamber 16 and 17 is formed in a hollow box shape, and in this embodiment, it is formed in a hollow quadrangular prism shape. When the heat treatment apparatus 1 is viewed from the front, the chamber 16 is disposed on the left side of the gantry 21, and the chamber 17 is disposed on the right side of the gantry 21.
- a plurality of ports 57 are formed on one side of the chamber 16 facing the storage chamber 2 side.
- the other ends 35b of the corresponding third flexible pipes 35A to 35E are connected to these ports 57, respectively.
- one end of the gas supply pipe 18 is connected to the upper surface of the chamber 16.
- the gas supply pipe 18 is connected to a compressed gas supply source (not shown) including a tank and a compressor.
- a plurality of ports 58 are formed on one side of the chamber 17 facing the storage chamber 2 side.
- the other end portions 35b of the corresponding third flexible pipes 35F to 35L are connected to these ports 58, respectively.
- One end of a gas supply pipe 19 is connected to, for example, the upper side surface of the chamber 17.
- the gas supply pipe 19 is connected to a compressed gas supply source (not shown) including a tank and a compressor.
- the main rotation mechanism 20 is disposed at a location adjacent to the chambers 16 and 17 having the above-described configuration.
- the main rotation mechanism 20 is provided to rotate the rotation support portion 10 around the central axis L1 of the rotation support portion 10.
- the main rotation mechanism 20 has an electric motor 59 as a drive source and a chain 60 as a power transmission member that transmits the output of the electric motor 59.
- the electric motor 59 is disposed on the base portion 23 below the chambers 16 and 17.
- the rotation axis of the electric motor 59 extends in parallel with the axial direction S1.
- the chain 60 includes a sprocket 70 that is connected to the output shaft of the electric motor 59 so as to be integrally rotatable, and a sprocket 71 that is connected to the rotation support portion 10 in the vicinity of the column 24 so as to be integrally rotatable with the rotation support portion 10. , Is wrapped around.
- both ends of the rotation support portion 10 that is rotationally driven by the main rotation mechanism 20 are supported by the pair of support columns 22 and 24.
- the intermediate part of the rotation support part 10 is supported by the support mechanism 61.
- the support mechanism 61 is provided to rotatably support an intermediate portion of the rotation support portion 10 in the axial direction S1.
- the support mechanism 61 supports a portion of the rotation support portion 10 that passes through the through-hole portion 6 a of the side wall 6 of the storage chamber 2.
- the support mechanism 61 supports the intermediate portion of the rotation support portion 10 via the side wall flange portion 14 and supports the side wall flange portion 14 so as to lift up.
- the support mechanism 61 is a roller 62 having a configuration in which a cylindrical outer shell member is formed outside the bearing, a bracket 63 that supports the roller 62, and a connecting member for connecting the roller 62 and the bracket 63. And a bolt 64.
- the roller 62 is in rolling contact with the lower end portion of the outer peripheral surface 14a of the side wall flange portion 14.
- the central axis of the roller 62 extends in parallel with the axial direction S1.
- the roller 62 includes a rolling bearing.
- an example in which one roller 62 is provided will be described, but a plurality of rollers 62 may be provided.
- the roller 62 receives one end portion of the side wall flange portion 14 in the axial direction S1.
- the roller 62 is rotatably supported on the upper part 63 a of the bracket 63 by a bolt 64.
- the bolt 64 penetrates the upper part 63 a of the bracket 63 and is inserted into the center hole of the roller 62.
- the bracket 63 is formed using, for example, a sheet metal member.
- the bracket 63 is formed in a crank shape in a side view.
- the upper part 63a of the bracket 63 extends vertically.
- the intermediate part 63b of the bracket 63 extends horizontally. Further, the lower portion 63c of the bracket 63 extends vertically. A vertically long hole 63d is formed in the lower portion 63c. Bolts 65 are passed through the vertically long holes 63d. The bolt 65 is screwed to a female thread portion formed on the side wall 6 of the storage chamber 2, and the bracket 63 is fixed to the side wall 6. With the above configuration, the position of the vertically elongated hole 63d of the bracket 63 with respect to the bolt 65 can be adjusted. That is, the position of the rotation support portion 10 can be adjusted by changing the positions of the bracket 63 and the roller 62 in the vertical direction. A position adjustment mechanism 67 that can adjust the position of the support mechanism 61 in order to adjust the position of the rotation support unit 10 is provided.
- the position adjustment mechanism 67 has a bracket 68 and an adjustment bolt 69.
- the bracket 68 is, for example, a sheet metal member formed in an L shape. A portion of the bracket 68 that extends in the vertical direction is fixed to the side wall 6 of the storage chamber 2 by a bolt 65. A nut 68a is fixed to a portion of the bracket 68 that extends in the horizontal direction, and a through-hole portion that is continuous with the female thread portion of the nut 68a is formed. The adjustment bolt 69 passes through the through hole portion and is screwed to the nut 68a, and is held by the nut 68a.
- the adjustment bolt 69 is disposed below the intermediate portion 63 b of the bracket 63.
- the upper end portion of the adjustment bolt 69 receives the intermediate portion 63 b of the bracket 63.
- the above is the schematic configuration of the heat treatment apparatus 1. Next, an example of the operation in the heat treatment apparatus 1 will be described.
- each member such as the rotation support portion 10 is disposed at the first position P1.
- the second flexible pipes 33A to 33L extend substantially parallel to the axial direction S1.
- the rotation support unit 10 moves from the first position P ⁇ b> 1 to the second position P ⁇ b> 2 by the operation of the main rotation mechanism 20. Rotate.
- the first pipes 31A to 31L of the pipe lines 13A to 13L, the rotary joints 32, and the one end portions 33a of the second flexible pipes 33A to 33L are integrated with the rotation support part 10 into the first position P1.
- the positions of the one end 33a and the position of the other end 33b around the rotation axis L1 of each of the second flexible pipes 33A to 33L are shifted.
- each of the second flexible pipes 33A to 33L is bent as shown in FIG. 10, so that the total length in the axial direction S1 is shortened. That is, the distance between the one end portion 33a and the other end portion 33b in the axial direction S1 is shortened.
- each of the second flexible pipes 33A to 33L, the folded pipes 34A to 34L, the movable guide part 51, and the one end 35a of each of the third flexible pipes 35A to 35L are along the axial direction S1.
- the first pipes 31A to 31L are linearly displaced.
- the third flexible pipe 35A to 35L since each of the third flexible pipes 35A to 35L has flexibility, the third flexible pipe 35A to 35L is flexibly deformed, and an intermediate portion of each of the third flexible pipes 35A to 35L is displaced toward the storage chamber 2.
- each of the second flexible pipes 33A to 33A is associated with the rotational movement of the rotation support portion 10 of the rotation support portion 10 and the nozzles 11A to 11C and 12F to 12J around the rotation axis L1.
- One end 33a of 33L rotates around the rotation axis L1.
- the other end 33b of each of the second flexible pipes 33A to 33L generates a force attracted toward the one end 33a of the second flexible pipes 33A to 33L or a force in a direction away from the one end 33a. receive.
- the second flexible pipes 33A to 33L are bent and deformed so that the length in the axial direction S1 is short or long.
- each of the second flexible pipes 33A to 33L can be made thinner. Thereby, the flexibility of each of the second flexible pipes 33A to 33L can be further increased.
- the allowable value of the relative rotation amount between the one end portion 33a and the other end portion 33b around the rotation axis L1 can be further increased.
- the load acting on each of the piping lines 13A to 13L can be further reduced, and the allowable rotation amount of each of the nozzles 11A to 11C and 12F to 12J around the rotation axis L1 can be increased.
- the fluid supply device 5 is realized that can further reduce the load acting on each of the piping lines 13A to 13L while increasing the allowable rotation amount of each of the nozzles 11A to 11C and 12F to 12J around the rotation axis L1. it can.
- the one end 35a of each of the third flexible pipes 35A to 35L is relative to the other end 35b of the third flexible pipe 35A to 35L.
- Relative displacement occurs in a direction parallel to the axial direction S1.
- the chambers 16 and 17 as the support portions are disposed below the rotation support portion 10, and at least a part of each of the third flexible pipes 35 A to 35 L is below the rotation support portion 10. It extends in a curved shape toward the side. According to this configuration, the chambers 16 and 17 are disposed in a space below the rotation support unit 10. In this manner, the chambers 16 and 17 and at least a part of the third flexible pipes 35A to 35L can be arranged in the space generated by providing the rotation support portion 10. As a result, the fluid supply device 5 can be made more compact through effective use of space.
- the rotary joint 32 is configured to allow relative rotation between the second flexible pipes 33A to 33L and the corresponding first pipes 33A to 33L.
- the rotary joint 32 in which the rotary joint 32 is provided, the occurrence of twisting motion between the one end portion 33a and the other end portion 33b is remarkably suppressed.
- the allowable value of the relative rotation of the one end portion 33a and the other end portion 33b can be further increased. That is, the allowable rotation amount of each of the nozzles 11A to 11C and 12F to 12J around the rotation axis L1 can be further increased. Further, the load acting on each of the second flexible pipes 33A to 33L can be further reduced.
- the number of rotary joints 32 is one in each of the piping lines 13A to 13L.
- the number of rotary joints 32 provided for each of the piping lines 13A to 13L is set to the minimum value.
- the fluid supply device 5 can be formed at a lower cost.
- the rotation support unit 10 receiving a large load by supporting the plurality of nozzles 11A to 11C, 12F to 12J and the plurality of first pipes 31A to 31L is supported by the support mechanism 61.
- The can suppress more reliably that the rotation support part 10 produces position shift from an original position by rotational movement.
- the position adjustment mechanism 67 the position of the rotation support unit 10 with respect to the storage chamber 2 in which the rotation support unit 10 is installed can be adjusted.
- the rotary joint 32 has been described as an example in which the rotary joint 32 is connected to the one end portion 33a of each of the second flexible pipes 33A to 33L.
- a rotary joint 32 may be disposed between the other end 33b of each of the second flexible pipes 33A to 33L and one end of the corresponding folded pipe 34A to 34L.
- the one end portion 33a is connected to the third portion 38 of the corresponding first piping 13A to 13L without passing through the rotary joint 32.
- the rotary joint 32 is configured to allow relative rotation between the corresponding second flexible pipes 33A to 33L and the corresponding third flexible pipes 35A to 35L.
- FIG. 12 one second flexible pipe 33B among the second flexible pipes 33A to 33L is illustrated.
- Each of the second flexible pipes 33A to 33L is connected to one end of the corresponding third flexible pipe 35A to 35L via a corresponding folded pipe 34A to 34L.
- the one end portion 32a and the other end portion 32b of the rotary joint 32 rotate relative to each other as the rotation support portion 10 rotates, so that it is possible to suppress the twisting motion from occurring in the second flexible pipes 33A to 33L.
- the rotary joint 32 may be provided on both the one end 33a and the other end 33b.
- one end 33a of each of the second flexible pipes 33A to 33L is connected to the corresponding first pipes 31A to 31L via the corresponding rotary joint 32.
- the other end 33b of each of the second flexible pipes 33A to 33L is connected to the corresponding third flexible pipe 35A to 35L via the corresponding rotary joint 32 and the corresponding folded pipe 34A to 34L.
- the mode in which the fluid supply device 5 supplies gas has been described as an example.
- the fluid supply device may be a device that supplies a liquid such as water.
- the rotation support portion 10 may be configured to support the nozzle and the first pipe so as to be rotatable around the rotation axis L1, and is not limited to the shaft-shaped member.
- the movable guide portion 51 has been described as an example in which the other end portion 33b of the second flexible pipes 33A to 33L is supported via the folded pipes 34A to 34L. However, this need not be the case.
- the movable guide portion 51 may directly support the other end portion 33b of each of the second flexible pipes 33A to 33L.
- the fluid supply device includes a plurality of nozzles, a plurality of first pipes, a rotation support portion, a plurality of second flexible pipes, and a linear guide.
- one or more other configurations may be provided or may not be provided.
- the present invention can be widely applied as a fluid supply device.
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Abstract
Description
10 回転支持部
11A,11B,11C,12F,12G,12H,12I,12J ノズル
15 リニアガイド
16,17 チャンバー(支持部)
31A~31L 第1配管
32 ロータリージョイント
33A~33L 第2フレキシブル配管
33a 第2フレキシブル配管の一端部
33b 第2フレキシブル配管の他端部
35A~35L 第3フレキシブル配管
35a 第3フレキシブル配管の一端部
35b 第3フレキシブル配管の他端部
51 可動ガイド部
61 支持機構
67 位置調整機構
L1 回転軸線
Claims (5)
- 複数のノズルと、
複数の前記ノズルに接続された複数の第1配管と、
各前記ノズルおよび各前記第1配管を所定の回転軸線回りに回転可能に支持する回転支持部と、
各前記第1配管と連動して前記回転軸線回りを回転可能に構成され且つ対応する前記第1配管に接続される一端部を含むともに、可撓性を有するように構成された複数の第2フレキシブル配管と、
各前記第2フレキシブル配管の他端部を支持し、各前記第1配管の回転に伴う各前記第2フレキシブル配管の変形動作に合わせて直線変位可能な可動ガイド部、を含むリニアガイドと、
を備えていることを特徴とする、流体供給装置。 - 請求項1に記載の流体供給装置であって、
複数の前記第2フレキシブル配管の対応する前記他端部に接続され当該他端部と一体的に直線変位可能な一端部を含む、可撓性を有する複数の第3フレキシブル配管と、
複数の前記第3フレキシブル配管の他端部を支持する支持部と、
をさらに備えていることを特徴とする、流体供給装置。 - 請求項2に記載の流体供給装置であって、
前記支持部は、前記回転支持部の下方に配置されており、
各前記第3フレキシブル配管の少なくとも一部は、回転支持部の下方側に向けて湾曲状に延びていることを特徴とする、流体供給装置。 - 請求項1~請求項3の何れか1項に記載の流体供給装置であって、
前記第2フレキシブル配管の一端部および他端部の少なくとも一方は、対応する前記第1配管および前記第3フレキシブル配管に、ロータリージョイントを介して接続されており、
前記ロータリージョイントは、前記第2フレキシブル配管と対応する前記第1配管および前記第3フレキシブル配管との相対回転を許容するように構成されていることを特徴とする、流体供給装置。 - 請求項1~請求項4の何れか1項に記載の流体供給装置であって、
前記回転支持部を支持する支持機構と、
前記回転支持部の位置を調整するために前記支持機構の位置を調整可能な位置調整機構と、
をさらに備えていることを特徴とする、流体供給装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE112016006600.7T DE112016006600T5 (de) | 2016-03-15 | 2016-05-02 | Fluidzufuhrvorrichtung |
JP2017506960A JP6208917B1 (ja) | 2016-03-15 | 2016-05-02 | 流体供給装置およびこれを備える熱処理装置 |
US15/760,039 US20180252364A1 (en) | 2016-03-15 | 2016-05-02 | Fluid supply device |
KR1020187009423A KR20180051562A (ko) | 2016-03-15 | 2016-05-02 | 유체 공급 장치 |
CN201680082760.9A CN108700057A (zh) | 2016-03-15 | 2016-05-02 | 流体供给装置 |
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JP2016-050487 | 2016-03-15 | ||
JP2016050487 | 2016-03-15 |
Publications (1)
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WO2017158854A1 true WO2017158854A1 (ja) | 2017-09-21 |
Family
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PCT/JP2016/063571 WO2017158854A1 (ja) | 2016-03-15 | 2016-05-02 | 流体供給装置 |
Country Status (6)
Country | Link |
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US (1) | US20180252364A1 (ja) |
JP (2) | JP6208917B1 (ja) |
KR (1) | KR20180051562A (ja) |
CN (1) | CN108700057A (ja) |
DE (1) | DE112016006600T5 (ja) |
WO (1) | WO2017158854A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115555198A (zh) * | 2022-10-11 | 2023-01-03 | 山东三维重工有限公司 | 一种装配钢结构板材防腐涂层装置 |
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2016
- 2016-05-02 US US15/760,039 patent/US20180252364A1/en not_active Abandoned
- 2016-05-02 WO PCT/JP2016/063571 patent/WO2017158854A1/ja active Application Filing
- 2016-05-02 KR KR1020187009423A patent/KR20180051562A/ko not_active Application Discontinuation
- 2016-05-02 DE DE112016006600.7T patent/DE112016006600T5/de not_active Withdrawn
- 2016-05-02 JP JP2017506960A patent/JP6208917B1/ja active Active
- 2016-05-02 CN CN201680082760.9A patent/CN108700057A/zh active Pending
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2017
- 2017-06-19 JP JP2017119284A patent/JP6694853B2/ja active Active
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Also Published As
Publication number | Publication date |
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KR20180051562A (ko) | 2018-05-16 |
US20180252364A1 (en) | 2018-09-06 |
JP6208917B1 (ja) | 2017-10-04 |
JPWO2017158854A1 (ja) | 2018-03-22 |
JP2017164747A (ja) | 2017-09-21 |
CN108700057A (zh) | 2018-10-23 |
JP6694853B2 (ja) | 2020-05-20 |
DE112016006600T5 (de) | 2018-12-13 |
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