WO2017157747A1 - Suspension céramique - Google Patents

Suspension céramique Download PDF

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Publication number
WO2017157747A1
WO2017157747A1 PCT/EP2017/055505 EP2017055505W WO2017157747A1 WO 2017157747 A1 WO2017157747 A1 WO 2017157747A1 EP 2017055505 W EP2017055505 W EP 2017055505W WO 2017157747 A1 WO2017157747 A1 WO 2017157747A1
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WO
WIPO (PCT)
Prior art keywords
ceramic
group
mixtures
suspension according
suspension
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PCT/EP2017/055505
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German (de)
English (en)
Inventor
Dilyana Markova
Eric SCHWARZER
Mark Kelemen
Uwe Scheithauer
Tassilo Moritz
Original Assignee
Ceramtec Gmbh
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
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Publication of WO2017157747A1 publication Critical patent/WO2017157747A1/fr

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    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/63Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
    • C04B35/632Organic additives
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/63Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
    • C04B35/632Organic additives
    • C04B35/634Polymers
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0037Production of three-dimensional images
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0047Photosensitive materials characterised by additives for obtaining a metallic or ceramic pattern, e.g. by firing
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/029Inorganic compounds; Onium compounds; Organic compounds having hetero atoms other than oxygen, nitrogen or sulfur
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/031Organic compounds not covered by group G03F7/029
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/50Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
    • C04B2235/54Particle size related information
    • C04B2235/5418Particle size related information expressed by the size of the particles or aggregates thereof
    • C04B2235/5436Particle size related information expressed by the size of the particles or aggregates thereof micrometer sized, i.e. from 1 to 100 micron
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/50Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
    • C04B2235/54Particle size related information
    • C04B2235/5418Particle size related information expressed by the size of the particles or aggregates thereof
    • C04B2235/5445Particle size related information expressed by the size of the particles or aggregates thereof submicron sized, i.e. from 0,1 to 1 micron
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/60Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
    • C04B2235/602Making the green bodies or pre-forms by moulding
    • C04B2235/6026Computer aided shaping, e.g. rapid prototyping

Definitions

  • the project that led to this patent application was funded by the European Union research and innovation program Horizon2020 under grant contract number 678503.
  • the present invention relates to suspensions containing ceramic particles (ceramic suspensions), a process for their preparation, and the use of the ceramic suspensions for additive (additive) manufacturing processes, in particular ceramic stereolithography-based additive manufacturing (ceramic SLA).
  • Ceramic SLA ceramic stereolithography-based additive manufacturing
  • a method that can be used for the additive production of ceramic materials is the laser-light or DLP-based stereolithography, wherein a ceramic powder is homogeneously dispersed in a photo-polymerizable organic binder system and can be prepared by selective exposure of the suspension, a ceramic green body, which can then be debinded into a finished product and, depending on the application, porous or dense sintered.
  • the individual components such as ceramic powder, solvents, binders and other components must be suitably coordinated so that both the processability of the suspension is given and after sintering densely sintered product is formed.
  • Known ceramic suspensions for the ceramic SLA process have the disadvantage that these compositions for some ceramic powders, in particular for non-surface modified alumina (Al 2 O 3 ), zirconia (ZrO 2 ) or silicon nitride (Si 3 N 4 ), unsuitable are.
  • suspensions are known which contain surface-modified ceramic or glass particles. The disadvantage of such particle surface modifications is that it means an additional overhead in the preparation of the ceramic powder to be used in the suspension.
  • known ceramic suspensions have the problem that they do not have a suitable viscosity at all shear rates.
  • the object of the present invention was therefore to develop suspensions with which unfunctionalized ceramic powder such.
  • unfunctionalized ceramic powder such as alumina (Al 2 O 3 ), zirconia (ZrO 2 ) and silicon nitride (Si 3 N 4 ), but also other ceramic materials can be processed by ceramic SLA method.
  • the object could be achieved by the ceramic suspension of claim 1 according to the invention. Preferred embodiments are specified in the subclaims.
  • the ceramic suspensions according to the invention comprise a) a solvent; b) a dispersant; c) an unfunctionalized ceramic powder; d) a monofunctional binder; e) a multifunctional binder (crosslinker); and f) a polymerization initiator.
  • the solvent (a) for the ceramic suspension according to the invention may be an organic solvent. Suitable organic solvents are organic Solvents which have a relatively high boiling point and a low vapor pressure and in which the binders used are soluble.
  • the solvent is preferably a branched or linear, monohydric or polyhydric, preferably mono- or dihydric, aliphatic alcohol having 2 to 10 carbon atoms, preferably 3 to 9 carbon atoms.
  • nonanol and 1, 2-propanediol are particularly preferred.
  • the solvent is contained in the suspension in an amount of 0.01 to 20 wt .-%, preferably 0.1 to 12 wt .-% based on the weight of the total suspension. It is also possible to use mixtures of two or more different solvents.
  • the dispersant (b) must be a dispersant which is capable of sufficiently dispersing the ceramic particles of the ceramic powder in the suspension. It is also possible to use mixtures of two or more dispersants.
  • the dispersant should be inert to free radicals that may occur in the polymerization, ie, for example, have no groups that are radically polymerizable.
  • Suitable dispersants are selected from the group consisting of organic compounds having a polar functional group, preferably amphiphilic homo- or copolymers having at least one polar functional group, more preferably an amphiphilic homopolymer having at least one polar functional group.
  • a suitable commercially available dispersant is, for example, BYK LPC 22124 (BYK) or Solsperse 3000.
  • the dispersant functions via a steric mechanism, ie a physical adsorption.
  • the amount of dispersant in the suspension is preferably less than 5% by weight, based on the weight of the ceramic powder, preferably between 0.5 and 3% by weight, based on the weight of the ceramic powder.
  • the non-functionalized ceramic powder (c) is selected from the group of oxide and non-oxide ceramics.
  • the unfunctionalized ceramic powder (c) is selected from the group consisting of powders of alumina (Al 2 O 3 ), zirconia (ZrO 2 ), silicon nitride (Si 3 N 4 ), silicon carbide (SIC), aluminum nitride (AIN ), Glass ceramic (SiO 2 ), titanium dioxide (TiO 2 ) and hydroxyapatite, and mixtures of aluminum oxide (Al 2 O 3 ) and zirconium oxide (ZrO 2 ) and mixtures of said ceramic powder or mixtures with other inorganic oxides, for example with the respective ceramic powder or mixtures of known sintering additives.
  • the unfunctionalized ceramic powder (c) is selected from the group consisting of powders of alumina (Al 2 O 3 ), zirconia (ZrO 2 ) and silicon nitride (Si 3 N 4 ), and mixtures of alumina (Al 2 O 3 ) and zirconium oxide (ZrO 2 ) and mixtures of said ceramic powders or mixtures with other inorganic oxides, for example with sintering additives known for the respective ceramic powders or mixtures.
  • non-functionalized in the sense of the present invention means that the ceramic powder is not surface-modified, in the sense that the ceramic powder, no organic substance is chemically applied to the surface or the surface of the ceramic particles is not chemically changed in the ceramic powder. Under the definition of the term fall both untreated, "bare" ceramic powder and the steric stabilization of the ceramic powder, for example by predispersing, because it does not cause a chemical change in the surface but the dispersant is at most physically adsorbed.
  • the particle size of the ceramic powder is in the range of 0.02 to 200 ⁇ (d50) (particle size measured by laser diffraction (eg Mastersizer 2000, Malvern, wet measurement)), preferably less than 10 ⁇ .
  • the ceramic powder is contained in the ceramic suspension in an amount of 30 to 90 wt .-% based on the weight of the total suspension, preferably in an amount of 50 to 90% by weight, based on the weight of the total suspension. With these amounts of ceramic powder, a suitable ratio to the organic components is given, so that a mechanically stable green body is formed.
  • the ceramic powder prior to preparation of the suspension, is ground in a mill together with dispersant and mixed (predispersed) to achieve the desired particle size and low viscosity of the ceramic suspension. Preferably, this also achieves a monomodal particle size distribution of the ceramic powder.
  • a preferred dispersant is BYK LPC 22124 (BYK).
  • the grinding of the ceramic powder is preferably carried out for 1 to 3 hours at a speed between 50 and 500 rpm, more preferably between 100 and 350 rpm.
  • the mill used may be, for example, a planetary ball mill.
  • the monofunctional binder (d) is one of the reactive compounds in the suspension through which an organic matrix is formed.
  • the binder is a monofunctional compound (has only one reactive group), which can be subjected to polymerization.
  • the binder is selected from the group consisting of (meth) acrylates and acrylamides, preferably acrylates.
  • the binder can also be a mixture of two or more binders. Suitable commercially available monofunctional binders are Laromer 8887 (BASF), SR217 (Arkema), A-SA NK ester (Kowa), HECLA (BASF), LA (lauryl acrylate) (BASF) and 4-HBA (4-hydroxybutyl acrylate). (BASF).
  • the binder is added to the suspension in an amount of from 1 to 50% by weight, based on the weight of the total suspension, preferably in an amount of from 1 to 10% by weight, based on the weight of the total suspension.
  • the crosslinker (e) is a multifunctional binder which has at least two reactive groups via which a polymerization is possible, or a mixture of two or more multifunctional binders.
  • the addition of a crosslinker results in the formation of a crosslinked polymer matrix.
  • the multifunctional binder (crosslinker) can be a di-, tri- or tetra-functional compound or a mixture of differently functional compounds.
  • the multifunctional binder (crosslinker) is preferably selected from the group consisting of functional (meth) acrylates.
  • the multifunctional binder (crosslinker) is added to the suspension in an amount of up to 40% by weight, based on the weight of the total suspension, preferably in an amount of from 1 to 20% by weight, based on the weight of the total suspension .
  • Suitable commercially available difunctional binders are Laromer TPGDA (BASF) and bisphenol A ethoxylate diacrylate (CAS: 64401 -02-1).
  • Suitable commercially available trifunctional binders are Ebecryl 83 (Allnex) and Ebecryl 160 (Allnex).
  • Suitable commercially available tetrafunctional binders are ATM 35E (Kowa), Ebecryl 40 (allnex) and di (trimethylolpropane) tetraacrylate (CAS: 94108-97-1).
  • the suspension according to the invention also comprises a polymerization initiator (f).
  • a photoinitiator is preferably used. Upon absorption of light, the photoinitiator decomposes, forms reactive species, and initiates polymerization.
  • the polymerization initiator is preferably selected from the group consisting of (bis) acylphosphine oxides and mixtures thereof, as well as camphor quinone / amine mixtures.
  • the amount of initiator contained in the ceramic suspension is in the range of 0.001 to 4 wt .-%, preferably 0.1 to 3 wt .-% based on the weight of entire suspension.
  • Suitable commercially available polymerization initiators are Irgacure 2022 (BASF), Genocure ITX (Rahn AG), Genocure CQ (Rahn AG), and Irgacure 819 (BASF).
  • the ceramic suspension has a shear-thinning or pseudoplastic behavior at a shear rate of between 0.1 and 100 l / s and preferably has a dynamic viscosity of 0.1 to 600 Pas.
  • the dynamic viscosity is preferably up to 300 Pas for a shear rate in the Range between 0.1 - 1 s "1 , more preferably the dynamic viscosity ⁇ 200 Pas in a shear rate range of 0.1 - 1 s " 1 and the dynamic viscosity is ⁇ 100 Pas in a shear rate range of 1 - 1000 s '
  • the dynamic viscosity can be measured with a commercially available rheometer, for example an Anton Paar MCR 302 (cone plate 25 mm, rotation mode). It is important that the ceramic suspension has a low viscosity in a wide range of different shear rates. Only then can complicated ceramic moldings with the ceramic SLA process can be produced.
  • the ceramic suspension thus prepared should be curable under blue or ultraviolet light.
  • the curing rate (curing rate) of the ceramic suspension according to the invention, within the process sequence of the respective ceramic stereolithography-based additive manufacturing process, should in particular be between 0.1 and 20 seconds.
  • the hardness rate depends on the layer thickness of the ceramic suspension produced in each case.
  • the conversion rate of the binders to the organic matrix (network) should be as high as possible.
  • the degree of crosslinking, together with the amount of ceramic powder, has an influence on the stability of the printed green body, which of course should be as high as possible.
  • the storage modulus G 'of the green body should be in the range of 10 5 to 10 8 Pa, preferably in the range of 10 6 to 10 7 Pa.
  • the memory module can be determined by means of known vibration rheometric measurements, for example an Anton Paar MCR 302 (oscillation mode).
  • the suspensions according to the invention can be prepared by successively adding the individual components (a) to (e) to a mixing container and mixing them.
  • the mixer is a high-speed planetary mixer (optionally in vacuum operation).
  • other mixing devices such as a drum mill can be used.
  • the duration of the mixing process should be comparatively short in order to save time as much as possible.
  • the finished suspension is to be prepared by a mixing time of less than 15 minutes, preferably less than 10 minutes, more preferably less than 3 minutes. It is important that a complete deagglomeration of the ceramic powder, as well as an effective dispersion can be achieved.
  • the ceramic suspensions of the invention may preferably be used for ceramic stereolithography-based additive manufacturing processes.
  • the ceramic green body is produced by means of ceramic stereolithography-based additive manufacturing processes.
  • individual points of the suspension by means of irradiation with light, preferably blue light, selectively cured and thus the green body formed successively.
  • the individual layers of ceramic suspension produced in the respective method have layer thicknesses ⁇ 100 ⁇ , preferably ⁇ 50 ⁇ , particularly preferably 5 to 25 ⁇ on.
  • the ceramic green body thus produced is first cleaned (cleaning with compressed air and subsequent cleaning with a solvent (eg an alcohol)) and then subjected to a heat treatment in a subsequent step.
  • the heat treatment includes curing the green body, debinding the green body to remove the binder or polymeric matrix, and sintering the green body.
  • the conditions in which the green body is debinded and sintered may vary depending on the composition of the organic matrix.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Compositions Of Oxide Ceramics (AREA)

Abstract

L'invention concerne des suspensions qui contiennent des particules céramiques (suspensions céramiques), un procédé de fabrication de ces suspensions, ainsi que l'utilisation desdites suspensions céramiques pour un procédé de fabrication additive (générative), en particulier la fabrication additive par stéréolithographie céramique (SLA céramique).
PCT/EP2017/055505 2016-03-14 2017-03-09 Suspension céramique WO2017157747A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE102016204126.6 2016-03-14
DE102016204126 2016-03-14
DE102016218050 2016-09-20
DE102016218050.9 2016-09-20

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WO2017157747A1 true WO2017157747A1 (fr) 2017-09-21

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Cited By (2)

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CN111328374A (zh) * 2017-11-20 2020-06-23 安捷伦科技有限公司 借助增材制造工艺制造微流体构件
CN116217242A (zh) * 2022-12-29 2023-06-06 兴核科学研究(福建)有限责任公司 一种适用于光固化成型工艺的氮化硅陶瓷浆料制备方法

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US10953597B2 (en) 2017-07-21 2021-03-23 Saint-Gobain Performance Plastics Corporation Method of forming a three-dimensional body
CN108395249B (zh) * 2018-02-08 2021-01-05 西北工业大学 一种适用于立体光刻技术的陶瓷类材料SiC晶须及制备方法

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EP2404590A1 (fr) * 2010-07-08 2012-01-11 Ivoclar Vivadent AG Barbotine en céramique durcissant à la lumière pour la fabrication stéréo-lithographique de céramiques à haute résistance

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EP2151214A1 (fr) 2008-07-30 2010-02-10 Ivoclar Vivadent AG Barbotine durcissant à la lumière pour la fabrication stéréolithographique de céramiques dentaires
EP2404590A1 (fr) * 2010-07-08 2012-01-11 Ivoclar Vivadent AG Barbotine en céramique durcissant à la lumière pour la fabrication stéréo-lithographique de céramiques à haute résistance

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111328374A (zh) * 2017-11-20 2020-06-23 安捷伦科技有限公司 借助增材制造工艺制造微流体构件
US11931918B2 (en) 2017-11-20 2024-03-19 Agilent Technologies, Inc. Manufacture of a microfluidic component by additive manufacturing
CN116217242A (zh) * 2022-12-29 2023-06-06 兴核科学研究(福建)有限责任公司 一种适用于光固化成型工艺的氮化硅陶瓷浆料制备方法
CN116217242B (zh) * 2022-12-29 2024-02-09 兴核科学研究(福建)有限责任公司 一种适用于光固化成型工艺的氮化硅陶瓷浆料制备方法

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