WO2017149727A1 - 測定装置 - Google Patents

測定装置 Download PDF

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Publication number
WO2017149727A1
WO2017149727A1 PCT/JP2016/056605 JP2016056605W WO2017149727A1 WO 2017149727 A1 WO2017149727 A1 WO 2017149727A1 JP 2016056605 W JP2016056605 W JP 2016056605W WO 2017149727 A1 WO2017149727 A1 WO 2017149727A1
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WO
WIPO (PCT)
Prior art keywords
pair
auxiliary member
lower frame
fixed
frame
Prior art date
Application number
PCT/JP2016/056605
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
将太 竹村
相沢　健治
Original Assignee
株式会社 東芝
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社 東芝 filed Critical 株式会社 東芝
Priority to KR1020187010919A priority Critical patent/KR102054187B1/ko
Priority to JP2018502453A priority patent/JP6530130B2/ja
Priority to PCT/JP2016/056605 priority patent/WO2017149727A1/ja
Priority to CN201680062433.7A priority patent/CN108351205B/zh
Publication of WO2017149727A1 publication Critical patent/WO2017149727A1/ja

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/08—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/16—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring distance of clearance between spaced objects

Definitions

  • Embodiments of the present invention relate to a measurement apparatus that measures the thickness of a measurement object in a non-contact manner.
  • a measuring device that allows a measurement target to pass through a frame-like frame provided with a pair of distance meters facing each other. Such a measuring device derives the thickness of the object by subtracting the distance from each measured distance meter to the object to be measured from the distance between the pair of distance meters previously measured.
  • the frame used in this measuring apparatus has an upper frame and a lower frame that fix a pair of distance meters, and a column that connects the upper frame and the lower frame.
  • the support columns are provided at one end or both ends of the upper frame and the lower frame.
  • the problem to be solved by the present invention is to provide a measuring apparatus capable of measuring the thickness of an object with high accuracy even if the length of a support column fluctuates due to heat.
  • the measuring device has a base, a pair of distance meters, and an auxiliary member.
  • the base has a lower frame, an upper frame provided to face the lower frame, and a support column connecting the lower frame and the upper frame.
  • a pair of rangefinders are provided on the lower frame and the upper frame, respectively, and are disposed to face each other with a gap that can pass through the measurement target.
  • the auxiliary member is provided on the base portion, is made of a material having a linear expansion coefficient different from that of the support column, and has the same expansion amount as the expansion amount of the support column that expands in the opposite direction of the pair of distance meters due to heat. Have a length in the opposite direction of the distance meter.
  • FIG. 1 is an explanatory diagram illustrating the configuration of the measurement apparatus according to the first embodiment.
  • FIG. 2 is an explanatory diagram showing the configuration of the measuring apparatus according to the second embodiment.
  • FIG. 3 is an explanatory diagram showing the configuration of the measurement apparatus according to the third embodiment.
  • FIG. 4 is an explanatory diagram showing the configuration of the measuring apparatus according to the fourth embodiment.
  • FIG. 5 is an explanatory diagram showing the configuration of the measuring apparatus according to the fifth embodiment.
  • FIG. 6 is an explanatory diagram showing the configuration of the measuring apparatus according to the sixth embodiment.
  • FIG. 1 is an explanatory diagram showing the configuration of the measuring apparatus 1 according to the first embodiment.
  • the measuring apparatus 1 is provided between a frame-shaped base 11 through which a measurement object 100 passes, a pair of distance meters 12 provided on the base 11 and arranged to face each other, and between the base 11 and one distance meter 12.
  • the measurement object 100 is, for example, a plate-like metal plate that is long in one direction.
  • the thickness of the measuring object 100 is measured by the measuring device 1 after heat treatment.
  • the base 11 includes a lower frame 21, one or a pair of support columns 22 provided on one side surface or a pair of side surfaces of the lower frame 21, and an upper frame 23 provided on the support column 22.
  • the base 11 is configured in a rectangular frame shape or a C shape in a front view. In the present embodiment, the base 11 will be described below using a rectangular frame-like configuration having a pair of support columns 22.
  • pillar 22 are fixed to the installation surface 200, for example.
  • the installation surface 200 is, for example, a floor surface of a factory or the like where the measuring device 1 is installed.
  • the lower frame 21 is configured in a square plate shape.
  • the lower frame 21 is configured such that the length between the pair of side surfaces on which the support columns 22 are provided is longer than the length in the width direction of the measurement target 100.
  • the support column 22 is configured in a square plate shape or a rod shape.
  • the length of the struts 22 in the opposing direction of the pair of distance meters 12 is such that the measurement object 100 can pass through the gap between the pair of distance meters 12 and the distance meters 12 and the measurement object 100 are separated from each other.
  • pillar 22 the lower frame 21 is fixed to the side surface of a lower end, and the upper frame 23 is fixed to the side surface of an upper end. That is, the support column 22 connects the lower frame 21 and the upper frame 23.
  • the upper frame 23 is formed in a square plate shape.
  • the upper frame 23 is configured to face the lower frame 21 in, for example, substantially the same shape as the lower frame 21.
  • the auxiliary member 13 is fixed to the lower surface of the upper frame 23.
  • the pair of distance meters 12 are arranged to face each other. One of the pair of distance meters 12 is fixed to the upper surface of the lower frame 21 and the other is fixed to the lower surface of the auxiliary member 13. The gap between the pair of distance meters 12 facing each other is configured to have a length that can pass through the measurement object 100. The pair of distance meters 12 is configured to be able to measure the distance to the measurement object 100 that passes therethrough. The pair of distance meters 12 transmits the measured information to the control unit 15 via the signal line 99.
  • the auxiliary member 13 is configured in a square plate shape or a block shape, for example.
  • one of the opposing main surfaces is fixed to the lower surface of the upper frame 23, and the distance meter 12 is fixed to the other of the main surfaces.
  • the other of the pair of distance meters 12 faces one of the pair of distance meters 12 and is separated by a predetermined distance, and the upper frame is interposed between itself and the upper frame 23 via the auxiliary member 13. 23.
  • the auxiliary member 13 is made of a material having a linear expansion coefficient different from the linear expansion coefficient of the support column 22, specifically, a material having a linear expansion coefficient higher than the linear expansion coefficient of the support column 22. Further, the length of the auxiliary member 13 in the direction in which the pair of distance meters 12 face each other has a length that is the same as the amount of expansion of the column 22 that expands in the direction in which the pair of distance meters 12 face each other due to heat.
  • the opposing direction of the pair of distance meters 12 is the vertical direction, that is, the height direction.
  • the vertical length of the column 22 is L1
  • the vertical length of the auxiliary member 13 is L2.
  • the material of the column 22 is a first material having a linear expansion coefficient M1
  • the material of the auxiliary member 13 is a second material having a linear expansion coefficient M2 (M1 ⁇ M2) larger than the linear expansion coefficient M1.
  • the linear expansion coefficient of the aluminum material is about twice the linear expansion coefficient of the iron material.
  • the calibration device 14 is configured to be able to measure the distance between the pair of distance meters 12, in other words, the length of the gap between the pair of distance meters 12.
  • the calibration device 14 transmits the measured information to the control unit 15 via the signal line 99.
  • the control unit 15 can derive the thickness of the measurement target 100 from the difference between the distance between the pair of distance meters 12 measured by the calibration device 14 and the distance to the measurement target 100 measured by the pair of distance meters 12. Configured.
  • the measuring object 100 is passed between the pair of distance meters 12 by a conveying device such as a conveyor.
  • the position through which the measurement object 100 passes is not limited as long as each distance meter 12 and the measurement object 100 are separated from each other.
  • the base 11 and the auxiliary member 13 are heated by the heat of the measurement target 100, and the support column 22 and the auxiliary member 13 expand in the vertical direction.
  • the lower frame 21 and the support column 22 are fixed to the installation surface 200, so that the support column 22 expands upward.
  • the auxiliary member 13 expands downward with respect to the upper frame 23.
  • pillar 22 and the auxiliary member 13 have different linear expansion coefficients, since each length is set to L1 and L2 which become the same expansion amount, the support
  • the pair of distance meters 12 measure the distance to the measurement object 100 that has passed, and transmit the measured information to the control unit 15.
  • the control unit 15 derives the thickness of the measurement target 100 from the difference between the distance between the pair of distance meters 12 detected by the calibration device 14 and the sum of the distances from the received distance meters 12 to the measurement target 100.
  • the calibration device 14 measures the distance between the pair of distance meters 12 in advance before measuring the measurement object 100 and transmits information to the control unit 15. These measurements are performed at some or all of the measurement object 100 in the feed direction, and the thickness of the measurement object 100 is measured.
  • the measuring apparatus 1 in the direction in which the pair of distance meters 12 face each other, the amount of expansion due to the heat of the support column 22 and the auxiliary member 13 is made the same.
  • the expansion of 22 can be offset by the expansion of the auxiliary member 13 to which the distance meter 12 is fixed, and the gap between the pair of distance meters 12 can be made constant.
  • the measuring apparatus 1 can measure the measurement object 100 with high accuracy using the pair of distance meters 12.
  • FIG. 2 is an explanatory diagram showing the configuration of the measuring apparatus 1A according to the second embodiment. Note that in the measurement apparatus 1A according to the second embodiment, the same components as those in the measurement apparatus 1 according to the first embodiment described above are denoted by the same reference numerals, and detailed description thereof is omitted.
  • the measurement apparatus 1A includes a frame-shaped base portion 11A that allows the measurement target 100 to pass through, a pair of distance meters 12, a calibration device 14, and a control unit 15 that are provided on the base portion 11A and are disposed to face each other. ing.
  • the base 11A is provided on the lower frame 21, one or a pair of support columns 22 provided on one side surface or a pair of side surfaces of the lower frame 21, an auxiliary member 13A provided on the support column 22, and the auxiliary member 13A. And an upper frame 23.
  • the base 11A is configured in a rectangular frame shape or a C shape in a front view. In the present embodiment, the base portion 11 ⁇ / b> A will be described below using a rectangular frame configuration having a pair of support columns 22.
  • the auxiliary member 13A is configured in a plate shape, for example.
  • the auxiliary member 13 ⁇ / b> A has an upper end fixed to the upper end of the column 22 and a lower end fixed to the upper frame 23.
  • the auxiliary member 13 ⁇ / b> A has an upper end surface fixed to the upper end surface of the support 22 and the fixing portion 31, and a lower end of the main surface facing the upper frame 23 is fixed to the side surface of the upper frame 23.
  • fixed part 31 is a member which can be fixed mechanically, such as a board
  • the auxiliary member 13 ⁇ / b> A is made of a material having a linear expansion coefficient different from the linear expansion coefficient of the support column 22, specifically, a material having a linear expansion coefficient higher than the linear expansion coefficient of the support column 22.
  • the length of the auxiliary member 13A in the direction in which the pair of distance meters 12 face each other has a length that is the same as the amount of expansion of the column 22 that expands in the direction in which the pair of distance meters 12 face each other due to heat.
  • the opposing direction of the pair of distance meters 12 is the vertical direction, that is, the height direction.
  • the vertical length of the support column 22 is L1
  • the vertical length of the auxiliary member 13A is L2.
  • the material of the column 22 is a first material having a linear expansion coefficient M1
  • the material of the auxiliary member 13 is a second material having a linear expansion coefficient M2 (M1 ⁇ M2) larger than the linear expansion coefficient M1.
  • the linear expansion coefficient of the aluminum material is about twice the linear expansion coefficient of the iron material.
  • the upper frame 23 is formed in a square plate shape.
  • the upper frame 23 is configured to be smaller than the lower frame 21 by the thickness of the auxiliary member 13A, for example.
  • the pair of distance meters 12 are arranged to face each other.
  • One of the pair of distance meters 12 is fixed to the upper surface of the lower frame 21 and the other is fixed to the upper frame 23.
  • the measuring apparatus 1A configured in this manner can keep the gap between the pair of distance meters 12 constant, as with the measuring apparatus 1 described above. Specifically, when the base 11A is heated by the heat of the measuring object 100 and the support column 22 and the auxiliary member 13A expand in the vertical direction, the base frame 11A has the lower frame 21 and the support column 22 fixed to the installation surface 200. Therefore, the support column 22 expands upward. Further, since the auxiliary member 13 ⁇ / b> A is fixed to the support column 22, the auxiliary member 13 ⁇ / b> A expands downward from the fixing portion 31.
  • pillar 22 and the auxiliary member 13A have different linear expansion coefficients, since each length is set to L1 and L2 which become the same expansion amount, the support
  • the measuring apparatus 1A in the direction in which the pair of distance meters 12 face each other, it is possible to make the expansion amount due to heat of the support column 22 and the auxiliary member 13A the same. Become.
  • the measuring apparatus 1A cancels the upward expansion of the support column 22 by the downward expansion of the auxiliary member 13A to which the upper frame 23 provided with the distance meter 12 is fixed, and the gap between the pair of distance meters 12 is offset. Can be made constant.
  • 1 A of measuring apparatuses can measure the measuring object 100 with a high precision with a pair of distance meter 12.
  • FIG. (Third embodiment) Next, a measuring apparatus 1B according to the third embodiment will be described with reference to FIG. FIG.
  • FIG. 3 is an explanatory diagram illustrating a configuration of a measurement apparatus 1B according to the third embodiment.
  • the same reference numerals are given to the same configurations as those of the measurement apparatus 1 according to the first embodiment and the measurement apparatus 1A according to the second embodiment described above, Detailed description is omitted.
  • the measuring apparatus 1B includes a frame-shaped base portion 11B that allows the measurement object 100 to pass through, a pair of distance meters 12, a calibration device 14, and a control unit 15 that are provided on the base portion 11B and are disposed to face each other. ing.
  • the base 11B includes a lower frame 21, one or a pair of support columns 22B provided on one side surface or a pair of side surfaces of the lower frame 21, and an upper frame 23 provided on the auxiliary member 13B.
  • the base 11B is configured in a rectangular frame shape or a C shape in a front view. In the present embodiment, the base portion 11B will be described below using a rectangular frame-like configuration having a pair of support posts 22B.
  • the support column 22B includes a first support column 22a fixed to the lower frame 21, an auxiliary member 13B fixed to the first support column 22a, and a second support column 22b fixed to the auxiliary member 13B.
  • the length of the struts 22 ⁇ / b> B in the direction in which the pair of distance meters 12 face each other is such that the measurement object 100 can pass through the gap between the pair of distance meters 12 and each distance meter 12 and the measurement object 100 are separated from each other. Configured.
  • the first support column 22a is configured in a square plate shape or a rod shape.
  • the side surface of the lower frame 21 is fixed to the side surface of a lower end, and the auxiliary member 13B is fixed to an upper end.
  • the first support column 22a is fixed to the installation surface 200, for example.
  • pillar 22b is comprised by square plate shape or rod shape.
  • the side surface of the upper frame 23 is fixed to the side surface of an upper end, and the auxiliary member 13B is fixed to a lower end.
  • the auxiliary member 13B is configured in a plate shape, for example.
  • the auxiliary member 13B has an upper end fixed to the upper end of the first support column 22a and a lower end fixed to the lower end of the second support column 22b.
  • the auxiliary member 13B has, for example, an upper end surface fixed by the upper end surface of the first support post 22a and the fixing portion 31, and a lower end surface fixed by the lower end surface of the second support post 22b and the fixing portion 31.
  • the auxiliary member 13B is made of a material having a linear expansion coefficient different from the linear expansion coefficient of the first support column 22a and the second support column 22b. Specifically, the auxiliary member 13B has a linear expansion coefficient higher than the linear expansion coefficient of the first support column 22a and the second support column 22b. It is composed of a material having a coefficient. Further, the length of the auxiliary member 13B in the direction in which the pair of distance meters 12 opposes is the same as the expansion amount of the first support column 22a and the second support column 22b that expand in the direction in which the pair of distance meters 12 oppose each other. Has a length of Here, the opposing direction of the pair of distance meters 12 is the vertical direction, that is, the height direction.
  • the vertical length of the first column 22a is L11
  • the vertical length of the second column 22b is L21
  • the vertical length of the auxiliary member 13B is L2.
  • the material of the first support 22a and the second support 22b is a first material having a linear expansion coefficient M1
  • the material of the auxiliary member 13B is a second material having a linear expansion coefficient M2 (M1 ⁇ M2) larger than the linear expansion coefficient M1.
  • the upper frame 23 is formed in a square plate shape.
  • the upper frame 23 is configured in substantially the same shape as the lower frame 21.
  • the pair of distance meters 12 are arranged to face each other.
  • One of the pair of distance meters 12 is fixed to the upper surface of the lower frame 21 and the other is fixed to the lower surface of the upper frame 23.
  • the measuring apparatus 1B configured as described above can keep the gap between the pair of distance meters 12 constant as in the measuring apparatuses 1 and 1A described above. Specifically, when the base 11B is heated by the heat of the measurement target 100 and expands in the vertical direction of the support 22B, the base 11B is fixed to the installation surface 200 because the lower frame 21 and the first support 22a are fixed. One strut 22a expands upward. Since the upper end of the auxiliary member 13B is fixed to the upper end of the first column 22a, the auxiliary member 13B expands downward from the upper end of the first column 22a. Moreover, since the lower end of the second support column 22b is fixed to the lower end of the auxiliary member 13B, the second support column 22b expands upward from the lower end of the auxiliary member 13B.
  • the first support 22a, the second support 22b, and the auxiliary member 13B have different linear expansion coefficients, but the sum of the lengths of the first support 22a and the second support 22b and the length of the auxiliary member 13B.
  • pillar 22b, and the auxiliary member 13A each expand
  • the upper frame 23 fixed to the auxiliary member 13A and the distance meter 12 fixed to the upper frame 23 are the same as the expansion amount of the first support column 22a and the second support column 22b.
  • the distance between the pair of rangefinders 12 is kept constant.
  • the measuring apparatus 1B in the direction in which the pair of distance meters 12 face each other, the expansion amount due to heat of the first support column 22a, the second support column 22b, and the auxiliary member 13B is determined. It is possible to be the same. Thereby, the measuring apparatus 1B can cancel the upward expansion of the first support column 22a and the second support column 22b by the downward expansion of the auxiliary member 13B, and can keep the gap between the pair of distance meters 12 constant. . By these things, the measuring apparatus 1B can measure the measuring object 100 with high accuracy by the pair of distance meters 12. (Fourth embodiment) Next, a measuring apparatus 1C according to the fourth embodiment will be described with reference to FIG. FIG.
  • FIG. 1 is an explanatory diagram showing the configuration of the measuring apparatus 1 according to the first embodiment. Note that in the measurement apparatus 1C according to the fourth embodiment, the same components as those in the measurement apparatus 1 according to the first embodiment described above are denoted by the same reference numerals, and detailed description thereof is omitted.
  • the measuring device 1 ⁇ / b> C is provided between a frame-shaped base 11 that allows the measurement object 100 to pass through, a pair of distance meters 12 that are provided on the base 11 and face each other, and between the base 11 and one distance meter 12.
  • the auxiliary member 13C is fixed to the upper surface of the lower frame 21.
  • the pair of distance meters 12 are arranged to face each other.
  • One of the pair of distance meters 12 is fixed to the auxiliary member 13 ⁇ / b> C and the other is fixed to the lower surface of the upper frame 23.
  • the auxiliary member 13C is configured, for example, in a rectangular plate shape or a block shape.
  • one of the opposing main surfaces is fixed to the upper surface of the lower frame 21, and the distance meter 12 is fixed to the other of the main surfaces.
  • one of the pair of distance meters 12 faces the other of the pair of distance meters 12 and is separated by a predetermined distance, and the lower frame is interposed between itself and the lower frame 21 via the auxiliary member 13C. 21 is fixed.
  • the auxiliary member 13 ⁇ / b> C is made of a material having a linear expansion coefficient different from the linear expansion coefficient of the support column 22, specifically, a material having a linear expansion coefficient higher than the linear expansion coefficient of the support column 22.
  • the length of the auxiliary member 13C in the direction in which the pair of distance meters 12 face each other has a length that is the same as the amount of expansion of the column 22 that expands in the direction in which the pair of distance meters 12 face each other due to heat.
  • the opposing direction of the pair of distance meters 12 is the vertical direction, that is, the height direction.
  • the vertical length of the support column 22 is L1
  • the vertical length of the auxiliary member 13C is L2.
  • the material of the column 22 is a first material having a linear expansion coefficient M1
  • the material of the auxiliary member 13C is a second material having a linear expansion coefficient M2 (M1 ⁇ M2) larger than the linear expansion coefficient M1.
  • the linear expansion coefficient of the rubber material is about 10 times the linear expansion coefficient of the iron material.
  • the measuring apparatus 1C configured in this manner has the same effects as the measuring apparatus 1 described above. That is, in the direction in which the pair of distance meters 12 face each other, the amount of expansion caused by the heat of the support column 22 and the auxiliary member 13C is the same, so that even if the support column 22 expands upward, the auxiliary member 13C expands upward. Inflates with.
  • the measuring apparatus 1C can reduce the thickness of the auxiliary member 13C by using a rubber member for the auxiliary member 13C. As a result, the measuring apparatus 1C can be reduced in size. Thus, the measuring apparatus 1 can measure the measurement object 100 with high accuracy using the pair of distance meters 12.
  • FIG. 5 is an explanatory diagram showing a configuration of a measuring apparatus 1D according to the fifth embodiment. Note that in the measurement apparatus 1D according to the fifth embodiment, the same components as those in the measurement apparatus 1 according to the first embodiment described above are denoted by the same reference numerals, and detailed description thereof is omitted.
  • the measurement device 1D measures a distance between a frame-shaped base 11D that allows the measurement object 100 to pass through, a pair of distance meters 12 that are provided on the base 11D and face each other, and a gap between the pair of distance meters 12.
  • a calibration device 14 and a control unit 15 connected to the pair of distance meters 12 and the calibration device 14 via signal lines 99 are provided.
  • the measuring apparatus 1D does not have the auxiliary member 13 as a configuration different from the measuring apparatus 1 described above.
  • the base portion 11 ⁇ / b> D includes a lower frame 21, a pair of support columns 22 provided on a pair of side surfaces of the lower frame 21, and an upper frame 23 provided on the support column 22.
  • the base 11D is configured in a rectangular frame shape when viewed from the front.
  • the base 11D is made of a material in which at least the lower frame 21 and the upper frame 23 have the same linear expansion coefficient, and are configured in the same shape.
  • the base 11D is disposed on the installation surface 200.
  • the base portion 11 ⁇ / b> D the lower surface of one support column 22 is fixed to the installation surface 200, and the lower frame 21 and the other support column 22 are supported by the installation surface 200.
  • the base 11 ⁇ / b> D is configured such that the lower frame 21 and the other support column 22 are not fixed to the installation surface 200 but can be moved in the surface direction of the installation surface 200 with respect to the installation surface 200.
  • one support column 22 is fixed by a fixing portion 32 such as a plate member and a bolt.
  • the base 11D is configured such that the lower frame 21 and the other support column 22 are movable with respect to the installation surface 200 by rails, casters, or the like.
  • the installation surface 200 is, for example, a floor surface of a factory or the like where the measuring device 1 is installed.
  • the pair of distance meters 12 are arranged to face each other.
  • One of the pair of distance meters 12 is fixed to the upper surface of the lower frame 21 and the other is fixed to the lower surface of the upper frame 23.
  • the gap between the pair of distance meters 12 facing each other is configured to have a length that can pass through the measurement object 100.
  • the measuring object 100 is passed between the pair of distance meters 12 by a conveying device such as a conveyor.
  • the base 11D is heated by the heat of the measuring object 100, and the lower frame 21 and the upper frame 23 are surface directions of the main surface to which the distance meters 12 of the lower frame 21 and the upper frame 23 are fixed. It expands in a direction perpendicular to the 12 opposing directions, in other words in the lateral direction.
  • one support column 22 is fixed to the installation surface 200, and the lower frame 21 and the other support column 22 are supported to be movable on the installation surface 200. Therefore, the lower frame 21 and the upper frame 23 are shown in FIG. As indicated by the two-dot chain line, the film expands in the lateral direction. As a result, the other support column 22 expands in one of the lateral directions, that is, in a direction away from the one support column 22, and the lower frame 21 and the upper frame 23 maintain a plate shape.
  • the pair of support columns 22 are fixed to the installation surface 200, the pair of side surfaces of the lower frame 21 and the upper frame 23 expanded by heat are fixed to the pair of support columns 22. Therefore, it is distorted in the vertical direction by the amount of expansion. This distortion increases or decreases the distance between the pair of rangefinders 12.
  • the base 11D of the present embodiment has a configuration in which one support column 22 is fixed to the installation surface 200 via the fixing unit 32, and the other support column 22 and the lower frame 21 are not fixed to the installation surface 200. Accordingly, the lower frame 21 and the upper frame 23 are prevented from being distorted, and the lower frame 21 and the upper frame 23 have the same linear expansion coefficient and the same shape, so that the same expansion amount is obtained.
  • the total 12 moves by the same amount in the lateral direction. For this reason, distortion by the heat of the measuring object 100 passing through is prevented, and the distance meter 12 is maintained in a state of facing each other.
  • the pair of rangefinders 12 respectively measure the distance to the measurement object 100 that has passed, and transmit the measured information to the control unit 15.
  • the control unit 15 derives the thickness of the measurement target 100 from the difference between the distance between the pair of distance meters 12 detected by the calibration device 14 and the sum of the distances from the received distance meters 12 to the measurement target 100.
  • the calibration device 14 measures the distance between the pair of distance meters 12 in advance before measuring the measurement object 100 and transmits information to the control unit 15. These measurements are performed over part or all of the feeding direction of the measuring object 100, and the thickness of the measuring object 100 is measured.
  • FIG. 6 is an explanatory diagram showing a configuration of a measuring apparatus 1E according to the sixth embodiment. Note that in the measurement apparatus 1E according to the sixth embodiment, the same reference numerals are given to the same configurations as those of the measurement apparatus 1 according to the first embodiment and the measurement apparatus 1D according to the fifth embodiment described above. Detailed description is omitted.
  • the measuring device 1E is provided between a frame-shaped base 11D that allows the measurement object 100 to pass through, a pair of distance meters 12 that are provided on the base 11D and face each other, and between the base 11D and one distance meter 12.
  • the pair of distance meters 12 are arranged to face each other.
  • One of the pair of distance meters 12 is fixed to the upper surface of the lower frame 21 and the other is fixed to the auxiliary member 13.
  • the gap between the pair of distance meters 12 facing each other is configured to have a length that can pass through the measurement object 100.
  • the lower frame 21 and the upper frame 23 are made of a material having the same linear expansion coefficient
  • the auxiliary member 13 is made of a material having a linear expansion coefficient higher than the linear expansion coefficient of the support 22.
  • the lower frame 21 and the upper frame 23 are configured in the same shape, and have a length such that the expansion amount that expands in the direction in which the pair of distance meters 12 opposes by heat becomes the same expansion amount.
  • the expansion of the support column 22 is canceled by the expansion of the auxiliary member 13 to which the distance meter 12 is fixed, as in the first embodiment described above. It is possible to prevent the distortion of the lower frame 21 and the upper frame 23 due to heat as in the fifth embodiment described above. As a result, according to the measuring apparatus 1E, it is possible to prevent the gap between the pair of distance meters 12 from changing. By these things, it becomes possible for the measuring apparatus 1E to measure the measuring object 100 with high accuracy by the pair of distance meters 12.
  • the measurement apparatus is not limited to the examples described in the above embodiments.
  • the measuring apparatus 1A includes the lower frame 21, one or a pair of support columns 22 provided on one side or a pair of side surfaces of the lower frame 21, the auxiliary member 13A provided on the support column 22, and the auxiliary
  • the structure provided with the upper frame 23 provided in the member 13A was demonstrated, it is not limited to this.
  • the measurement apparatus 1A fixes one of the pair of support columns 22 to the installation surface 200 by the fixing unit 32 and the other of the pair of support columns 22 to the installation surface 200, similarly to the measurement apparatuses 1D and 1E described above. It may be configured to be movable. By setting it as such a structure, 1 A of measuring apparatuses have an effect similar to the measuring apparatus 1E mentioned above.
  • one of the support columns 22 and 22B is fixed to the installation surface 200 by the fixing unit 32, and the lower frame 21 and the other support columns 22 and 22B are movable with respect to the installation surface 200. It is good also as a structure supported on the installation surface 200.
  • each measuring apparatus 1 to 1E has been described as having any one of the auxiliary members 13, 13A, 13B, and 13C.
  • the present invention is not limited to this.
  • Each measuring device 1 to 1E can be used in appropriate combination. That is, the measuring device may be a measuring device having the auxiliary members 13, 13A, 13B, and 13C in a composite manner.
  • each measuring apparatus 1 to 1E has been described with a configuration in which the support 22 and the auxiliary members 13, 13A, 13B, and 13C are exemplarily made of a metal material or a rubber material, but is not limited thereto.
  • the material of the column 22 and the auxiliary members 13, 13 ⁇ / b> A, 13 ⁇ / b> B, and 13 ⁇ / b> C can be appropriately set as long as the expansion amount due to heat can be offset.
  • the measurement apparatus 1B has been described with the configuration in which the first column 22a and the second column 22b are made of the first material having the same linear expansion coefficient, but the present invention is not limited to this. That is, as long as the expansion amount of the first support column 22a and the second support column 22b can be offset by the expansion amount of the auxiliary member 13B, the first support column 22a and the second support column 22b may have different linear expansion coefficients. Good.
  • the first strut 22a is a first material having a linear expansion coefficient M1
  • the second strut 22b is a third material having a linear expansion coefficient M3
  • the auxiliary member 13B is made of a material having linear expansion coefficients M1 and M3.
  • the second material has a large linear expansion coefficient M2 (M1 ⁇ M2, M3 ⁇ M2).
  • the sum of the respective expansion amounts of the first support column 22a and the second support column 22b is expanded. Can be offset by quantity.
  • the pair of opposed members is arranged by offsetting the expansion amount of the support column by the expansion amount of the auxiliary member. It is possible to measure the thickness of the object with high accuracy while keeping the distance of the distance meter facing each other constant.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
PCT/JP2016/056605 2016-03-03 2016-03-03 測定装置 WO2017149727A1 (ja)

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KR1020187010919A KR102054187B1 (ko) 2016-03-03 2016-03-03 측정 장치
JP2018502453A JP6530130B2 (ja) 2016-03-03 2016-03-03 測定装置
PCT/JP2016/056605 WO2017149727A1 (ja) 2016-03-03 2016-03-03 測定装置
CN201680062433.7A CN108351205B (zh) 2016-03-03 2016-03-03 测量装置

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JPS5964511U (ja) * 1982-10-21 1984-04-28 日本電気株式会社 直線型スケ−ル
JPH01313705A (ja) * 1988-06-14 1989-12-19 Mitsubishi Electric Corp 厚み測定装置
JPH03252516A (ja) * 1990-03-02 1991-11-11 Mitsubishi Electric Corp 厚み測定装置
JP2002304785A (ja) * 2001-04-09 2002-10-18 Canon Inc 走査型プローブによる情報検出装置、及び該情報検出装置によって構成した表面観察装置
JP2014048057A (ja) * 2012-08-29 2014-03-17 Aisin Seiki Co Ltd 板厚測定装置
US20140101954A1 (en) * 2011-04-15 2014-04-17 Micro-Epsilon Messtechnik Gmbh & Co. Kg Apparatus and Method for Measuring the Thickness of a Measurement Object

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JPS56112604A (en) * 1980-02-12 1981-09-05 Mitsutoyo Mfg Co Ltd Linear-scale type measuring apparatus
JPH1038551A (ja) * 1996-07-19 1998-02-13 Daido Steel Co Ltd 寸法測定方法および寸法測定装置
JP2004174010A (ja) 2002-11-28 2004-06-24 Sankosha:Kk トンネルフィニッシャー
JP2009180525A (ja) * 2008-01-29 2009-08-13 Mitsutoyo Corp 測定装置
DE102009044917A1 (de) * 2009-09-23 2011-04-07 Dr. Johannes Heidenhain Gmbh Längenmesseinrichtung

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5964511U (ja) * 1982-10-21 1984-04-28 日本電気株式会社 直線型スケ−ル
JPH01313705A (ja) * 1988-06-14 1989-12-19 Mitsubishi Electric Corp 厚み測定装置
JPH03252516A (ja) * 1990-03-02 1991-11-11 Mitsubishi Electric Corp 厚み測定装置
JP2002304785A (ja) * 2001-04-09 2002-10-18 Canon Inc 走査型プローブによる情報検出装置、及び該情報検出装置によって構成した表面観察装置
US20140101954A1 (en) * 2011-04-15 2014-04-17 Micro-Epsilon Messtechnik Gmbh & Co. Kg Apparatus and Method for Measuring the Thickness of a Measurement Object
JP2014048057A (ja) * 2012-08-29 2014-03-17 Aisin Seiki Co Ltd 板厚測定装置

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CN108351205A (zh) 2018-07-31
CN108351205B (zh) 2020-12-01
JP6530130B2 (ja) 2019-06-12
KR102054187B1 (ko) 2019-12-10
KR20180056703A (ko) 2018-05-29
JPWO2017149727A1 (ja) 2018-09-13

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