WO2017149727A1 - Measuring device - Google Patents

Measuring device Download PDF

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Publication number
WO2017149727A1
WO2017149727A1 PCT/JP2016/056605 JP2016056605W WO2017149727A1 WO 2017149727 A1 WO2017149727 A1 WO 2017149727A1 JP 2016056605 W JP2016056605 W JP 2016056605W WO 2017149727 A1 WO2017149727 A1 WO 2017149727A1
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WO
WIPO (PCT)
Prior art keywords
pair
auxiliary member
lower frame
fixed
frame
Prior art date
Application number
PCT/JP2016/056605
Other languages
French (fr)
Japanese (ja)
Inventor
将太 竹村
相沢 健治
Original Assignee
株式会社 東芝
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社 東芝 filed Critical 株式会社 東芝
Priority to JP2018502453A priority Critical patent/JP6530130B2/en
Priority to CN201680062433.7A priority patent/CN108351205B/en
Priority to PCT/JP2016/056605 priority patent/WO2017149727A1/en
Priority to KR1020187010919A priority patent/KR102054187B1/en
Publication of WO2017149727A1 publication Critical patent/WO2017149727A1/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/08Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness for measuring thickness
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/16Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring distance of clearance between spaced objects

Definitions

  • Embodiments of the present invention relate to a measurement apparatus that measures the thickness of a measurement object in a non-contact manner.
  • a measuring device that allows a measurement target to pass through a frame-like frame provided with a pair of distance meters facing each other. Such a measuring device derives the thickness of the object by subtracting the distance from each measured distance meter to the object to be measured from the distance between the pair of distance meters previously measured.
  • the frame used in this measuring apparatus has an upper frame and a lower frame that fix a pair of distance meters, and a column that connects the upper frame and the lower frame.
  • the support columns are provided at one end or both ends of the upper frame and the lower frame.
  • the problem to be solved by the present invention is to provide a measuring apparatus capable of measuring the thickness of an object with high accuracy even if the length of a support column fluctuates due to heat.
  • the measuring device has a base, a pair of distance meters, and an auxiliary member.
  • the base has a lower frame, an upper frame provided to face the lower frame, and a support column connecting the lower frame and the upper frame.
  • a pair of rangefinders are provided on the lower frame and the upper frame, respectively, and are disposed to face each other with a gap that can pass through the measurement target.
  • the auxiliary member is provided on the base portion, is made of a material having a linear expansion coefficient different from that of the support column, and has the same expansion amount as the expansion amount of the support column that expands in the opposite direction of the pair of distance meters due to heat. Have a length in the opposite direction of the distance meter.
  • FIG. 1 is an explanatory diagram illustrating the configuration of the measurement apparatus according to the first embodiment.
  • FIG. 2 is an explanatory diagram showing the configuration of the measuring apparatus according to the second embodiment.
  • FIG. 3 is an explanatory diagram showing the configuration of the measurement apparatus according to the third embodiment.
  • FIG. 4 is an explanatory diagram showing the configuration of the measuring apparatus according to the fourth embodiment.
  • FIG. 5 is an explanatory diagram showing the configuration of the measuring apparatus according to the fifth embodiment.
  • FIG. 6 is an explanatory diagram showing the configuration of the measuring apparatus according to the sixth embodiment.
  • FIG. 1 is an explanatory diagram showing the configuration of the measuring apparatus 1 according to the first embodiment.
  • the measuring apparatus 1 is provided between a frame-shaped base 11 through which a measurement object 100 passes, a pair of distance meters 12 provided on the base 11 and arranged to face each other, and between the base 11 and one distance meter 12.
  • the measurement object 100 is, for example, a plate-like metal plate that is long in one direction.
  • the thickness of the measuring object 100 is measured by the measuring device 1 after heat treatment.
  • the base 11 includes a lower frame 21, one or a pair of support columns 22 provided on one side surface or a pair of side surfaces of the lower frame 21, and an upper frame 23 provided on the support column 22.
  • the base 11 is configured in a rectangular frame shape or a C shape in a front view. In the present embodiment, the base 11 will be described below using a rectangular frame-like configuration having a pair of support columns 22.
  • pillar 22 are fixed to the installation surface 200, for example.
  • the installation surface 200 is, for example, a floor surface of a factory or the like where the measuring device 1 is installed.
  • the lower frame 21 is configured in a square plate shape.
  • the lower frame 21 is configured such that the length between the pair of side surfaces on which the support columns 22 are provided is longer than the length in the width direction of the measurement target 100.
  • the support column 22 is configured in a square plate shape or a rod shape.
  • the length of the struts 22 in the opposing direction of the pair of distance meters 12 is such that the measurement object 100 can pass through the gap between the pair of distance meters 12 and the distance meters 12 and the measurement object 100 are separated from each other.
  • pillar 22 the lower frame 21 is fixed to the side surface of a lower end, and the upper frame 23 is fixed to the side surface of an upper end. That is, the support column 22 connects the lower frame 21 and the upper frame 23.
  • the upper frame 23 is formed in a square plate shape.
  • the upper frame 23 is configured to face the lower frame 21 in, for example, substantially the same shape as the lower frame 21.
  • the auxiliary member 13 is fixed to the lower surface of the upper frame 23.
  • the pair of distance meters 12 are arranged to face each other. One of the pair of distance meters 12 is fixed to the upper surface of the lower frame 21 and the other is fixed to the lower surface of the auxiliary member 13. The gap between the pair of distance meters 12 facing each other is configured to have a length that can pass through the measurement object 100. The pair of distance meters 12 is configured to be able to measure the distance to the measurement object 100 that passes therethrough. The pair of distance meters 12 transmits the measured information to the control unit 15 via the signal line 99.
  • the auxiliary member 13 is configured in a square plate shape or a block shape, for example.
  • one of the opposing main surfaces is fixed to the lower surface of the upper frame 23, and the distance meter 12 is fixed to the other of the main surfaces.
  • the other of the pair of distance meters 12 faces one of the pair of distance meters 12 and is separated by a predetermined distance, and the upper frame is interposed between itself and the upper frame 23 via the auxiliary member 13. 23.
  • the auxiliary member 13 is made of a material having a linear expansion coefficient different from the linear expansion coefficient of the support column 22, specifically, a material having a linear expansion coefficient higher than the linear expansion coefficient of the support column 22. Further, the length of the auxiliary member 13 in the direction in which the pair of distance meters 12 face each other has a length that is the same as the amount of expansion of the column 22 that expands in the direction in which the pair of distance meters 12 face each other due to heat.
  • the opposing direction of the pair of distance meters 12 is the vertical direction, that is, the height direction.
  • the vertical length of the column 22 is L1
  • the vertical length of the auxiliary member 13 is L2.
  • the material of the column 22 is a first material having a linear expansion coefficient M1
  • the material of the auxiliary member 13 is a second material having a linear expansion coefficient M2 (M1 ⁇ M2) larger than the linear expansion coefficient M1.
  • the linear expansion coefficient of the aluminum material is about twice the linear expansion coefficient of the iron material.
  • the calibration device 14 is configured to be able to measure the distance between the pair of distance meters 12, in other words, the length of the gap between the pair of distance meters 12.
  • the calibration device 14 transmits the measured information to the control unit 15 via the signal line 99.
  • the control unit 15 can derive the thickness of the measurement target 100 from the difference between the distance between the pair of distance meters 12 measured by the calibration device 14 and the distance to the measurement target 100 measured by the pair of distance meters 12. Configured.
  • the measuring object 100 is passed between the pair of distance meters 12 by a conveying device such as a conveyor.
  • the position through which the measurement object 100 passes is not limited as long as each distance meter 12 and the measurement object 100 are separated from each other.
  • the base 11 and the auxiliary member 13 are heated by the heat of the measurement target 100, and the support column 22 and the auxiliary member 13 expand in the vertical direction.
  • the lower frame 21 and the support column 22 are fixed to the installation surface 200, so that the support column 22 expands upward.
  • the auxiliary member 13 expands downward with respect to the upper frame 23.
  • pillar 22 and the auxiliary member 13 have different linear expansion coefficients, since each length is set to L1 and L2 which become the same expansion amount, the support
  • the pair of distance meters 12 measure the distance to the measurement object 100 that has passed, and transmit the measured information to the control unit 15.
  • the control unit 15 derives the thickness of the measurement target 100 from the difference between the distance between the pair of distance meters 12 detected by the calibration device 14 and the sum of the distances from the received distance meters 12 to the measurement target 100.
  • the calibration device 14 measures the distance between the pair of distance meters 12 in advance before measuring the measurement object 100 and transmits information to the control unit 15. These measurements are performed at some or all of the measurement object 100 in the feed direction, and the thickness of the measurement object 100 is measured.
  • the measuring apparatus 1 in the direction in which the pair of distance meters 12 face each other, the amount of expansion due to the heat of the support column 22 and the auxiliary member 13 is made the same.
  • the expansion of 22 can be offset by the expansion of the auxiliary member 13 to which the distance meter 12 is fixed, and the gap between the pair of distance meters 12 can be made constant.
  • the measuring apparatus 1 can measure the measurement object 100 with high accuracy using the pair of distance meters 12.
  • FIG. 2 is an explanatory diagram showing the configuration of the measuring apparatus 1A according to the second embodiment. Note that in the measurement apparatus 1A according to the second embodiment, the same components as those in the measurement apparatus 1 according to the first embodiment described above are denoted by the same reference numerals, and detailed description thereof is omitted.
  • the measurement apparatus 1A includes a frame-shaped base portion 11A that allows the measurement target 100 to pass through, a pair of distance meters 12, a calibration device 14, and a control unit 15 that are provided on the base portion 11A and are disposed to face each other. ing.
  • the base 11A is provided on the lower frame 21, one or a pair of support columns 22 provided on one side surface or a pair of side surfaces of the lower frame 21, an auxiliary member 13A provided on the support column 22, and the auxiliary member 13A. And an upper frame 23.
  • the base 11A is configured in a rectangular frame shape or a C shape in a front view. In the present embodiment, the base portion 11 ⁇ / b> A will be described below using a rectangular frame configuration having a pair of support columns 22.
  • the auxiliary member 13A is configured in a plate shape, for example.
  • the auxiliary member 13 ⁇ / b> A has an upper end fixed to the upper end of the column 22 and a lower end fixed to the upper frame 23.
  • the auxiliary member 13 ⁇ / b> A has an upper end surface fixed to the upper end surface of the support 22 and the fixing portion 31, and a lower end of the main surface facing the upper frame 23 is fixed to the side surface of the upper frame 23.
  • fixed part 31 is a member which can be fixed mechanically, such as a board
  • the auxiliary member 13 ⁇ / b> A is made of a material having a linear expansion coefficient different from the linear expansion coefficient of the support column 22, specifically, a material having a linear expansion coefficient higher than the linear expansion coefficient of the support column 22.
  • the length of the auxiliary member 13A in the direction in which the pair of distance meters 12 face each other has a length that is the same as the amount of expansion of the column 22 that expands in the direction in which the pair of distance meters 12 face each other due to heat.
  • the opposing direction of the pair of distance meters 12 is the vertical direction, that is, the height direction.
  • the vertical length of the support column 22 is L1
  • the vertical length of the auxiliary member 13A is L2.
  • the material of the column 22 is a first material having a linear expansion coefficient M1
  • the material of the auxiliary member 13 is a second material having a linear expansion coefficient M2 (M1 ⁇ M2) larger than the linear expansion coefficient M1.
  • the linear expansion coefficient of the aluminum material is about twice the linear expansion coefficient of the iron material.
  • the upper frame 23 is formed in a square plate shape.
  • the upper frame 23 is configured to be smaller than the lower frame 21 by the thickness of the auxiliary member 13A, for example.
  • the pair of distance meters 12 are arranged to face each other.
  • One of the pair of distance meters 12 is fixed to the upper surface of the lower frame 21 and the other is fixed to the upper frame 23.
  • the measuring apparatus 1A configured in this manner can keep the gap between the pair of distance meters 12 constant, as with the measuring apparatus 1 described above. Specifically, when the base 11A is heated by the heat of the measuring object 100 and the support column 22 and the auxiliary member 13A expand in the vertical direction, the base frame 11A has the lower frame 21 and the support column 22 fixed to the installation surface 200. Therefore, the support column 22 expands upward. Further, since the auxiliary member 13 ⁇ / b> A is fixed to the support column 22, the auxiliary member 13 ⁇ / b> A expands downward from the fixing portion 31.
  • pillar 22 and the auxiliary member 13A have different linear expansion coefficients, since each length is set to L1 and L2 which become the same expansion amount, the support
  • the measuring apparatus 1A in the direction in which the pair of distance meters 12 face each other, it is possible to make the expansion amount due to heat of the support column 22 and the auxiliary member 13A the same. Become.
  • the measuring apparatus 1A cancels the upward expansion of the support column 22 by the downward expansion of the auxiliary member 13A to which the upper frame 23 provided with the distance meter 12 is fixed, and the gap between the pair of distance meters 12 is offset. Can be made constant.
  • 1 A of measuring apparatuses can measure the measuring object 100 with a high precision with a pair of distance meter 12.
  • FIG. (Third embodiment) Next, a measuring apparatus 1B according to the third embodiment will be described with reference to FIG. FIG.
  • FIG. 3 is an explanatory diagram illustrating a configuration of a measurement apparatus 1B according to the third embodiment.
  • the same reference numerals are given to the same configurations as those of the measurement apparatus 1 according to the first embodiment and the measurement apparatus 1A according to the second embodiment described above, Detailed description is omitted.
  • the measuring apparatus 1B includes a frame-shaped base portion 11B that allows the measurement object 100 to pass through, a pair of distance meters 12, a calibration device 14, and a control unit 15 that are provided on the base portion 11B and are disposed to face each other. ing.
  • the base 11B includes a lower frame 21, one or a pair of support columns 22B provided on one side surface or a pair of side surfaces of the lower frame 21, and an upper frame 23 provided on the auxiliary member 13B.
  • the base 11B is configured in a rectangular frame shape or a C shape in a front view. In the present embodiment, the base portion 11B will be described below using a rectangular frame-like configuration having a pair of support posts 22B.
  • the support column 22B includes a first support column 22a fixed to the lower frame 21, an auxiliary member 13B fixed to the first support column 22a, and a second support column 22b fixed to the auxiliary member 13B.
  • the length of the struts 22 ⁇ / b> B in the direction in which the pair of distance meters 12 face each other is such that the measurement object 100 can pass through the gap between the pair of distance meters 12 and each distance meter 12 and the measurement object 100 are separated from each other. Configured.
  • the first support column 22a is configured in a square plate shape or a rod shape.
  • the side surface of the lower frame 21 is fixed to the side surface of a lower end, and the auxiliary member 13B is fixed to an upper end.
  • the first support column 22a is fixed to the installation surface 200, for example.
  • pillar 22b is comprised by square plate shape or rod shape.
  • the side surface of the upper frame 23 is fixed to the side surface of an upper end, and the auxiliary member 13B is fixed to a lower end.
  • the auxiliary member 13B is configured in a plate shape, for example.
  • the auxiliary member 13B has an upper end fixed to the upper end of the first support column 22a and a lower end fixed to the lower end of the second support column 22b.
  • the auxiliary member 13B has, for example, an upper end surface fixed by the upper end surface of the first support post 22a and the fixing portion 31, and a lower end surface fixed by the lower end surface of the second support post 22b and the fixing portion 31.
  • the auxiliary member 13B is made of a material having a linear expansion coefficient different from the linear expansion coefficient of the first support column 22a and the second support column 22b. Specifically, the auxiliary member 13B has a linear expansion coefficient higher than the linear expansion coefficient of the first support column 22a and the second support column 22b. It is composed of a material having a coefficient. Further, the length of the auxiliary member 13B in the direction in which the pair of distance meters 12 opposes is the same as the expansion amount of the first support column 22a and the second support column 22b that expand in the direction in which the pair of distance meters 12 oppose each other. Has a length of Here, the opposing direction of the pair of distance meters 12 is the vertical direction, that is, the height direction.
  • the vertical length of the first column 22a is L11
  • the vertical length of the second column 22b is L21
  • the vertical length of the auxiliary member 13B is L2.
  • the material of the first support 22a and the second support 22b is a first material having a linear expansion coefficient M1
  • the material of the auxiliary member 13B is a second material having a linear expansion coefficient M2 (M1 ⁇ M2) larger than the linear expansion coefficient M1.
  • the upper frame 23 is formed in a square plate shape.
  • the upper frame 23 is configured in substantially the same shape as the lower frame 21.
  • the pair of distance meters 12 are arranged to face each other.
  • One of the pair of distance meters 12 is fixed to the upper surface of the lower frame 21 and the other is fixed to the lower surface of the upper frame 23.
  • the measuring apparatus 1B configured as described above can keep the gap between the pair of distance meters 12 constant as in the measuring apparatuses 1 and 1A described above. Specifically, when the base 11B is heated by the heat of the measurement target 100 and expands in the vertical direction of the support 22B, the base 11B is fixed to the installation surface 200 because the lower frame 21 and the first support 22a are fixed. One strut 22a expands upward. Since the upper end of the auxiliary member 13B is fixed to the upper end of the first column 22a, the auxiliary member 13B expands downward from the upper end of the first column 22a. Moreover, since the lower end of the second support column 22b is fixed to the lower end of the auxiliary member 13B, the second support column 22b expands upward from the lower end of the auxiliary member 13B.
  • the first support 22a, the second support 22b, and the auxiliary member 13B have different linear expansion coefficients, but the sum of the lengths of the first support 22a and the second support 22b and the length of the auxiliary member 13B.
  • pillar 22b, and the auxiliary member 13A each expand
  • the upper frame 23 fixed to the auxiliary member 13A and the distance meter 12 fixed to the upper frame 23 are the same as the expansion amount of the first support column 22a and the second support column 22b.
  • the distance between the pair of rangefinders 12 is kept constant.
  • the measuring apparatus 1B in the direction in which the pair of distance meters 12 face each other, the expansion amount due to heat of the first support column 22a, the second support column 22b, and the auxiliary member 13B is determined. It is possible to be the same. Thereby, the measuring apparatus 1B can cancel the upward expansion of the first support column 22a and the second support column 22b by the downward expansion of the auxiliary member 13B, and can keep the gap between the pair of distance meters 12 constant. . By these things, the measuring apparatus 1B can measure the measuring object 100 with high accuracy by the pair of distance meters 12. (Fourth embodiment) Next, a measuring apparatus 1C according to the fourth embodiment will be described with reference to FIG. FIG.
  • FIG. 1 is an explanatory diagram showing the configuration of the measuring apparatus 1 according to the first embodiment. Note that in the measurement apparatus 1C according to the fourth embodiment, the same components as those in the measurement apparatus 1 according to the first embodiment described above are denoted by the same reference numerals, and detailed description thereof is omitted.
  • the measuring device 1 ⁇ / b> C is provided between a frame-shaped base 11 that allows the measurement object 100 to pass through, a pair of distance meters 12 that are provided on the base 11 and face each other, and between the base 11 and one distance meter 12.
  • the auxiliary member 13C is fixed to the upper surface of the lower frame 21.
  • the pair of distance meters 12 are arranged to face each other.
  • One of the pair of distance meters 12 is fixed to the auxiliary member 13 ⁇ / b> C and the other is fixed to the lower surface of the upper frame 23.
  • the auxiliary member 13C is configured, for example, in a rectangular plate shape or a block shape.
  • one of the opposing main surfaces is fixed to the upper surface of the lower frame 21, and the distance meter 12 is fixed to the other of the main surfaces.
  • one of the pair of distance meters 12 faces the other of the pair of distance meters 12 and is separated by a predetermined distance, and the lower frame is interposed between itself and the lower frame 21 via the auxiliary member 13C. 21 is fixed.
  • the auxiliary member 13 ⁇ / b> C is made of a material having a linear expansion coefficient different from the linear expansion coefficient of the support column 22, specifically, a material having a linear expansion coefficient higher than the linear expansion coefficient of the support column 22.
  • the length of the auxiliary member 13C in the direction in which the pair of distance meters 12 face each other has a length that is the same as the amount of expansion of the column 22 that expands in the direction in which the pair of distance meters 12 face each other due to heat.
  • the opposing direction of the pair of distance meters 12 is the vertical direction, that is, the height direction.
  • the vertical length of the support column 22 is L1
  • the vertical length of the auxiliary member 13C is L2.
  • the material of the column 22 is a first material having a linear expansion coefficient M1
  • the material of the auxiliary member 13C is a second material having a linear expansion coefficient M2 (M1 ⁇ M2) larger than the linear expansion coefficient M1.
  • the linear expansion coefficient of the rubber material is about 10 times the linear expansion coefficient of the iron material.
  • the measuring apparatus 1C configured in this manner has the same effects as the measuring apparatus 1 described above. That is, in the direction in which the pair of distance meters 12 face each other, the amount of expansion caused by the heat of the support column 22 and the auxiliary member 13C is the same, so that even if the support column 22 expands upward, the auxiliary member 13C expands upward. Inflates with.
  • the measuring apparatus 1C can reduce the thickness of the auxiliary member 13C by using a rubber member for the auxiliary member 13C. As a result, the measuring apparatus 1C can be reduced in size. Thus, the measuring apparatus 1 can measure the measurement object 100 with high accuracy using the pair of distance meters 12.
  • FIG. 5 is an explanatory diagram showing a configuration of a measuring apparatus 1D according to the fifth embodiment. Note that in the measurement apparatus 1D according to the fifth embodiment, the same components as those in the measurement apparatus 1 according to the first embodiment described above are denoted by the same reference numerals, and detailed description thereof is omitted.
  • the measurement device 1D measures a distance between a frame-shaped base 11D that allows the measurement object 100 to pass through, a pair of distance meters 12 that are provided on the base 11D and face each other, and a gap between the pair of distance meters 12.
  • a calibration device 14 and a control unit 15 connected to the pair of distance meters 12 and the calibration device 14 via signal lines 99 are provided.
  • the measuring apparatus 1D does not have the auxiliary member 13 as a configuration different from the measuring apparatus 1 described above.
  • the base portion 11 ⁇ / b> D includes a lower frame 21, a pair of support columns 22 provided on a pair of side surfaces of the lower frame 21, and an upper frame 23 provided on the support column 22.
  • the base 11D is configured in a rectangular frame shape when viewed from the front.
  • the base 11D is made of a material in which at least the lower frame 21 and the upper frame 23 have the same linear expansion coefficient, and are configured in the same shape.
  • the base 11D is disposed on the installation surface 200.
  • the base portion 11 ⁇ / b> D the lower surface of one support column 22 is fixed to the installation surface 200, and the lower frame 21 and the other support column 22 are supported by the installation surface 200.
  • the base 11 ⁇ / b> D is configured such that the lower frame 21 and the other support column 22 are not fixed to the installation surface 200 but can be moved in the surface direction of the installation surface 200 with respect to the installation surface 200.
  • one support column 22 is fixed by a fixing portion 32 such as a plate member and a bolt.
  • the base 11D is configured such that the lower frame 21 and the other support column 22 are movable with respect to the installation surface 200 by rails, casters, or the like.
  • the installation surface 200 is, for example, a floor surface of a factory or the like where the measuring device 1 is installed.
  • the pair of distance meters 12 are arranged to face each other.
  • One of the pair of distance meters 12 is fixed to the upper surface of the lower frame 21 and the other is fixed to the lower surface of the upper frame 23.
  • the gap between the pair of distance meters 12 facing each other is configured to have a length that can pass through the measurement object 100.
  • the measuring object 100 is passed between the pair of distance meters 12 by a conveying device such as a conveyor.
  • the base 11D is heated by the heat of the measuring object 100, and the lower frame 21 and the upper frame 23 are surface directions of the main surface to which the distance meters 12 of the lower frame 21 and the upper frame 23 are fixed. It expands in a direction perpendicular to the 12 opposing directions, in other words in the lateral direction.
  • one support column 22 is fixed to the installation surface 200, and the lower frame 21 and the other support column 22 are supported to be movable on the installation surface 200. Therefore, the lower frame 21 and the upper frame 23 are shown in FIG. As indicated by the two-dot chain line, the film expands in the lateral direction. As a result, the other support column 22 expands in one of the lateral directions, that is, in a direction away from the one support column 22, and the lower frame 21 and the upper frame 23 maintain a plate shape.
  • the pair of support columns 22 are fixed to the installation surface 200, the pair of side surfaces of the lower frame 21 and the upper frame 23 expanded by heat are fixed to the pair of support columns 22. Therefore, it is distorted in the vertical direction by the amount of expansion. This distortion increases or decreases the distance between the pair of rangefinders 12.
  • the base 11D of the present embodiment has a configuration in which one support column 22 is fixed to the installation surface 200 via the fixing unit 32, and the other support column 22 and the lower frame 21 are not fixed to the installation surface 200. Accordingly, the lower frame 21 and the upper frame 23 are prevented from being distorted, and the lower frame 21 and the upper frame 23 have the same linear expansion coefficient and the same shape, so that the same expansion amount is obtained.
  • the total 12 moves by the same amount in the lateral direction. For this reason, distortion by the heat of the measuring object 100 passing through is prevented, and the distance meter 12 is maintained in a state of facing each other.
  • the pair of rangefinders 12 respectively measure the distance to the measurement object 100 that has passed, and transmit the measured information to the control unit 15.
  • the control unit 15 derives the thickness of the measurement target 100 from the difference between the distance between the pair of distance meters 12 detected by the calibration device 14 and the sum of the distances from the received distance meters 12 to the measurement target 100.
  • the calibration device 14 measures the distance between the pair of distance meters 12 in advance before measuring the measurement object 100 and transmits information to the control unit 15. These measurements are performed over part or all of the feeding direction of the measuring object 100, and the thickness of the measuring object 100 is measured.
  • FIG. 6 is an explanatory diagram showing a configuration of a measuring apparatus 1E according to the sixth embodiment. Note that in the measurement apparatus 1E according to the sixth embodiment, the same reference numerals are given to the same configurations as those of the measurement apparatus 1 according to the first embodiment and the measurement apparatus 1D according to the fifth embodiment described above. Detailed description is omitted.
  • the measuring device 1E is provided between a frame-shaped base 11D that allows the measurement object 100 to pass through, a pair of distance meters 12 that are provided on the base 11D and face each other, and between the base 11D and one distance meter 12.
  • the pair of distance meters 12 are arranged to face each other.
  • One of the pair of distance meters 12 is fixed to the upper surface of the lower frame 21 and the other is fixed to the auxiliary member 13.
  • the gap between the pair of distance meters 12 facing each other is configured to have a length that can pass through the measurement object 100.
  • the lower frame 21 and the upper frame 23 are made of a material having the same linear expansion coefficient
  • the auxiliary member 13 is made of a material having a linear expansion coefficient higher than the linear expansion coefficient of the support 22.
  • the lower frame 21 and the upper frame 23 are configured in the same shape, and have a length such that the expansion amount that expands in the direction in which the pair of distance meters 12 opposes by heat becomes the same expansion amount.
  • the expansion of the support column 22 is canceled by the expansion of the auxiliary member 13 to which the distance meter 12 is fixed, as in the first embodiment described above. It is possible to prevent the distortion of the lower frame 21 and the upper frame 23 due to heat as in the fifth embodiment described above. As a result, according to the measuring apparatus 1E, it is possible to prevent the gap between the pair of distance meters 12 from changing. By these things, it becomes possible for the measuring apparatus 1E to measure the measuring object 100 with high accuracy by the pair of distance meters 12.
  • the measurement apparatus is not limited to the examples described in the above embodiments.
  • the measuring apparatus 1A includes the lower frame 21, one or a pair of support columns 22 provided on one side or a pair of side surfaces of the lower frame 21, the auxiliary member 13A provided on the support column 22, and the auxiliary
  • the structure provided with the upper frame 23 provided in the member 13A was demonstrated, it is not limited to this.
  • the measurement apparatus 1A fixes one of the pair of support columns 22 to the installation surface 200 by the fixing unit 32 and the other of the pair of support columns 22 to the installation surface 200, similarly to the measurement apparatuses 1D and 1E described above. It may be configured to be movable. By setting it as such a structure, 1 A of measuring apparatuses have an effect similar to the measuring apparatus 1E mentioned above.
  • one of the support columns 22 and 22B is fixed to the installation surface 200 by the fixing unit 32, and the lower frame 21 and the other support columns 22 and 22B are movable with respect to the installation surface 200. It is good also as a structure supported on the installation surface 200.
  • each measuring apparatus 1 to 1E has been described as having any one of the auxiliary members 13, 13A, 13B, and 13C.
  • the present invention is not limited to this.
  • Each measuring device 1 to 1E can be used in appropriate combination. That is, the measuring device may be a measuring device having the auxiliary members 13, 13A, 13B, and 13C in a composite manner.
  • each measuring apparatus 1 to 1E has been described with a configuration in which the support 22 and the auxiliary members 13, 13A, 13B, and 13C are exemplarily made of a metal material or a rubber material, but is not limited thereto.
  • the material of the column 22 and the auxiliary members 13, 13 ⁇ / b> A, 13 ⁇ / b> B, and 13 ⁇ / b> C can be appropriately set as long as the expansion amount due to heat can be offset.
  • the measurement apparatus 1B has been described with the configuration in which the first column 22a and the second column 22b are made of the first material having the same linear expansion coefficient, but the present invention is not limited to this. That is, as long as the expansion amount of the first support column 22a and the second support column 22b can be offset by the expansion amount of the auxiliary member 13B, the first support column 22a and the second support column 22b may have different linear expansion coefficients. Good.
  • the first strut 22a is a first material having a linear expansion coefficient M1
  • the second strut 22b is a third material having a linear expansion coefficient M3
  • the auxiliary member 13B is made of a material having linear expansion coefficients M1 and M3.
  • the second material has a large linear expansion coefficient M2 (M1 ⁇ M2, M3 ⁇ M2).
  • the sum of the respective expansion amounts of the first support column 22a and the second support column 22b is expanded. Can be offset by quantity.
  • the pair of opposed members is arranged by offsetting the expansion amount of the support column by the expansion amount of the auxiliary member. It is possible to measure the thickness of the object with high accuracy while keeping the distance of the distance meter facing each other constant.

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Abstract

According to an embodiment of the present invention, a measuring device has a base section, a pair of distance meters, and an auxiliary member. The base section has: a lower frame; an upper frame that is provided facing the lower frame; and supporting columns that connect the lower frame and the upper frame to each other. The pair of distance meters are provided to the lower frame and the upper frame, respectively, and are disposed facing each other by having therebetween a gap which a subject to be measured can pass through. The auxiliary member is provided to the base section, and is configured from a material having a linear expansion coefficient that is different from that of the supporting columns, and has a length with which the expansion amount of the auxiliary member is equal to that of the supporting columns which, due to heat, expand in the direction in which the pair of distance meters face each other, said length being in the direction in which the pair of distance meters face each other.

Description

測定装置measuring device
 本発明の実施形態は、測定対象の厚さを非接触で測定する測定装置に関する。 Embodiments of the present invention relate to a measurement apparatus that measures the thickness of a measurement object in a non-contact manner.
 一対の距離計を対向して設けた枠状のフレームに測定対象を通過させる測定装置が知られている。このような測定装置は、予め測定しておいた一対の距離計の間の距離から、測定した各距離計から測定対象までの距離を差し引くことで、対象物の厚さを導出する。 A measuring device is known that allows a measurement target to pass through a frame-like frame provided with a pair of distance meters facing each other. Such a measuring device derives the thickness of the object by subtracting the distance from each measured distance meter to the object to be measured from the distance between the pair of distance meters previously measured.
 この測定装置に用いられるフレームは、一対の距離計を固定する上枠及び下枠と、これら上枠及び下枠を接続する支柱と、を有する。支柱は、上枠及び下枠の一端又は両端に設けられる。 The frame used in this measuring apparatus has an upper frame and a lower frame that fix a pair of distance meters, and a column that connects the upper frame and the lower frame. The support columns are provided at one end or both ends of the upper frame and the lower frame.
日本国特開2004-174010号公報Japanese Unexamined Patent Publication No. 2004-174010
 本発明が解決しようとする課題は、熱により支柱の長さが変動しても、高い精度で対象物の厚さを測定できる測定装置を提供することである。 The problem to be solved by the present invention is to provide a measuring apparatus capable of measuring the thickness of an object with high accuracy even if the length of a support column fluctuates due to heat.
 実施形態によれば、測定装置は、基部、一対の距離計及び補助部材を有する。基部は、下枠、前記下枠と対向して設けられる上枠、並びに、前記下枠及び前記上枠を連結する支柱を有する。一対の距離計は、前記下枠及び前記上枠にそれぞれ設けられ、測定対象を通過可能な間隙を有して互いに対向して配置される。補助部材は、前記基部に設けられ、前記支柱と異なる線形膨張係数の材料で構成され、熱により前記一対の距離計の対向する方向に膨張する前記支柱の膨張量と同じ膨張量となる前記一対の距離計の対向する方向の長さを有する。 According to the embodiment, the measuring device has a base, a pair of distance meters, and an auxiliary member. The base has a lower frame, an upper frame provided to face the lower frame, and a support column connecting the lower frame and the upper frame. A pair of rangefinders are provided on the lower frame and the upper frame, respectively, and are disposed to face each other with a gap that can pass through the measurement target. The auxiliary member is provided on the base portion, is made of a material having a linear expansion coefficient different from that of the support column, and has the same expansion amount as the expansion amount of the support column that expands in the opposite direction of the pair of distance meters due to heat. Have a length in the opposite direction of the distance meter.
図1は、第1の実施形態に係る測定装置の構成を示す説明図である。FIG. 1 is an explanatory diagram illustrating the configuration of the measurement apparatus according to the first embodiment. 図2は、第2の実施形態に係る測定装置の構成を示す説明図である。FIG. 2 is an explanatory diagram showing the configuration of the measuring apparatus according to the second embodiment. 図3は、第3の実施形態に係る測定装置の構成を示す説明図である。FIG. 3 is an explanatory diagram showing the configuration of the measurement apparatus according to the third embodiment. 図4は、第4の実施形態に係る測定装置の構成を示す説明図である。FIG. 4 is an explanatory diagram showing the configuration of the measuring apparatus according to the fourth embodiment. 図5は、第5の実施形態に係る測定装置の構成を示す説明図である。FIG. 5 is an explanatory diagram showing the configuration of the measuring apparatus according to the fifth embodiment. 図6は、第6の実施形態に係る測定装置の構成を示す説明図である。FIG. 6 is an explanatory diagram showing the configuration of the measuring apparatus according to the sixth embodiment.
(第1の実施形態)
 以下、第1の実施形態に係る測定装置1について、図1を用いて説明する。 
 図1は、第1の実施形態に係る測定装置1の構成を示す説明図である。
(First embodiment)
Hereinafter, the measuring apparatus 1 according to the first embodiment will be described with reference to FIG.
FIG. 1 is an explanatory diagram showing the configuration of the measuring apparatus 1 according to the first embodiment.
 測定装置1は、測定対象100が通過する枠状の基部11と、基部11に設けられ、互いに対向して配置される一対の距離計12と、基部11及び一方の距離計12の間に設けられた補助部材13と、一対の距離計12の間隙の距離を計測する校正装置14と、一対の距離計12及び校正装置14にそれぞれ信号線99を介して接続された制御部15と、を備えている。 The measuring apparatus 1 is provided between a frame-shaped base 11 through which a measurement object 100 passes, a pair of distance meters 12 provided on the base 11 and arranged to face each other, and between the base 11 and one distance meter 12. The auxiliary member 13, the calibration device 14 for measuring the distance between the pair of distance meters 12, and the control unit 15 connected to the pair of distance meters 12 and the calibration device 14 via signal lines 99, respectively. I have.
 ここで、測定対象100は、例えば、一方向に長い板状の金属板等である。測定対象100は、例えば、熱処理が行われた後に、測定装置1で厚さが測定される。 Here, the measurement object 100 is, for example, a plate-like metal plate that is long in one direction. For example, the thickness of the measuring object 100 is measured by the measuring device 1 after heat treatment.
 基部11は、下枠21と、下枠21の一の側面又は一対の側面に設けられた一又は一対の支柱22と、支柱22に設けられた上枠23と、を備えている。基部11は、正面視で方形枠状、又は、C字状に構成される。本実施形態においては、基部11は、一対の支柱22を有する方形枠状の構成を用いて以下説明する。 The base 11 includes a lower frame 21, one or a pair of support columns 22 provided on one side surface or a pair of side surfaces of the lower frame 21, and an upper frame 23 provided on the support column 22. The base 11 is configured in a rectangular frame shape or a C shape in a front view. In the present embodiment, the base 11 will be described below using a rectangular frame-like configuration having a pair of support columns 22.
 基部11は、例えば、下枠21の下面及び支柱22の下面が、設置面200に固定される。設置面200は、例えば、測定装置1が設置される工場等の床面等である。 As for the base 11, the lower surface of the lower frame 21 and the lower surface of the support | pillar 22 are fixed to the installation surface 200, for example. The installation surface 200 is, for example, a floor surface of a factory or the like where the measuring device 1 is installed.
 下枠21は、方形板状に構成される。下枠21は、支柱22が設けられる一対の側面間の長さが、測定対象100の幅方向の長さよりも長く構成される。 The lower frame 21 is configured in a square plate shape. The lower frame 21 is configured such that the length between the pair of side surfaces on which the support columns 22 are provided is longer than the length in the width direction of the measurement target 100.
 支柱22は、方形の板状又は棒状に構成される。支柱22の一対の距離計12の対向する方向の長さは、一対の距離計12の間隙を測定対象100が通過可能であって、且つ、各距離計12と測定対象100が離間する長さに構成される。支柱22は、下端の側面に下枠21が固定され、上端の側面に上枠23が固定される。即ち、支柱22は、下枠21と上枠23とを連結している。 The support column 22 is configured in a square plate shape or a rod shape. The length of the struts 22 in the opposing direction of the pair of distance meters 12 is such that the measurement object 100 can pass through the gap between the pair of distance meters 12 and the distance meters 12 and the measurement object 100 are separated from each other. Configured. As for the support | pillar 22, the lower frame 21 is fixed to the side surface of a lower end, and the upper frame 23 is fixed to the side surface of an upper end. That is, the support column 22 connects the lower frame 21 and the upper frame 23.
 上枠23は、方形板状に構成される。上枠23は、例えば、下枠21と略同一形状に、下枠21と対向して構成される。上枠23は、その下面に補助部材13が固定される。 The upper frame 23 is formed in a square plate shape. The upper frame 23 is configured to face the lower frame 21 in, for example, substantially the same shape as the lower frame 21. The auxiliary member 13 is fixed to the lower surface of the upper frame 23.
 一対の距離計12は、互いに対向して配置される。一対の距離計12は、一方が下枠21の上面に、他方が補助部材13の下面に、それぞれ固定される。対向する一対の距離計12の間隙は、測定対象100を通過可能な長さに構成される。一対の距離計12は、通過する測定対象100までの距離をそれぞれ測定可能に構成される。一対の距離計12は、測定した情報を、信号線99を介して制御部15に送信する。 The pair of distance meters 12 are arranged to face each other. One of the pair of distance meters 12 is fixed to the upper surface of the lower frame 21 and the other is fixed to the lower surface of the auxiliary member 13. The gap between the pair of distance meters 12 facing each other is configured to have a length that can pass through the measurement object 100. The pair of distance meters 12 is configured to be able to measure the distance to the measurement object 100 that passes therethrough. The pair of distance meters 12 transmits the measured information to the control unit 15 via the signal line 99.
 補助部材13は、例えば方形板状又はブロック状に構成される。補助部材13は、相対する主面の一方が上枠23の下面に固定され、当該主面の他方に距離計12が固定される。換言すると、一対の距離計12の他方は、一対の距離計12の一方と対向し、且つ、所定の距離だけ離間して、自身と上枠23との間に補助部材13を介して上枠23に固定される。 The auxiliary member 13 is configured in a square plate shape or a block shape, for example. As for the auxiliary member 13, one of the opposing main surfaces is fixed to the lower surface of the upper frame 23, and the distance meter 12 is fixed to the other of the main surfaces. In other words, the other of the pair of distance meters 12 faces one of the pair of distance meters 12 and is separated by a predetermined distance, and the upper frame is interposed between itself and the upper frame 23 via the auxiliary member 13. 23.
 補助部材13は、支柱22の線形膨張係数と異なる線形膨張係数を有する材料、具体的には、支柱22の線形膨張係数よりも高い線形膨張係数を有する材料で構成される。また、補助部材13の一対の距離計12の対向する方向の長さは、熱により一対の距離計12の対向する方向に膨張する支柱22の膨張量と同じ膨張量となる長さを有する。ここで、一対の距離計12の対向する方向は、上下方向、即ち高さ方向である。 The auxiliary member 13 is made of a material having a linear expansion coefficient different from the linear expansion coefficient of the support column 22, specifically, a material having a linear expansion coefficient higher than the linear expansion coefficient of the support column 22. Further, the length of the auxiliary member 13 in the direction in which the pair of distance meters 12 face each other has a length that is the same as the amount of expansion of the column 22 that expands in the direction in which the pair of distance meters 12 face each other due to heat. Here, the opposing direction of the pair of distance meters 12 is the vertical direction, that is, the height direction.
 以下、支柱22及び補助部材13の材料及び長さについて具体的に説明する。図1に示すように、支柱22の上下方向の長さをL1とし、補助部材13の上下方向の長さをL2とする。支柱22の材料を線形膨張係数がM1の第1材料とし、補助部材13の材料を線形膨張係数M1よりも大きい線形膨張係数M2(M1<M2)の第2材料とする。このとき、補助部材13の長さL2は、L2=L1/(M2/M1)に構成される。 Hereinafter, the materials and lengths of the support column 22 and the auxiliary member 13 will be specifically described. As shown in FIG. 1, the vertical length of the column 22 is L1, and the vertical length of the auxiliary member 13 is L2. The material of the column 22 is a first material having a linear expansion coefficient M1, and the material of the auxiliary member 13 is a second material having a linear expansion coefficient M2 (M1 <M2) larger than the linear expansion coefficient M1. At this time, the length L2 of the auxiliary member 13 is configured as L2 = L1 / (M2 / M1).
 例えば、支柱22の材料を鉄材料とし、補助部材13をアルミニウム材料とした場合には、アルミニウム材料の線形膨張係数は鉄材料の線形膨張係数の約2倍であることから、補助部材13の上下方向の長さL2は、L2=L1/2に構成される。このような構成とすることで、支柱22及び補助部材13の熱による膨張量が略同一となる。 For example, when the material of the support 22 is an iron material and the auxiliary member 13 is an aluminum material, the linear expansion coefficient of the aluminum material is about twice the linear expansion coefficient of the iron material. The length L2 in the direction is configured as L2 = L1 / 2. By setting it as such a structure, the expansion amount by the heat | fever of the support | pillar 22 and the auxiliary member 13 becomes substantially the same.
 校正装置14は、一対の距離計12間の距離、換言すると、一対の距離計12の間隙の長さを測定可能に構成される。校正装置14は、測定した情報を、信号線99を介して制御部15に送信する。 The calibration device 14 is configured to be able to measure the distance between the pair of distance meters 12, in other words, the length of the gap between the pair of distance meters 12. The calibration device 14 transmits the measured information to the control unit 15 via the signal line 99.
 制御部15は、校正装置14で測定された一対の距離計12間の距離及び一対の距離計12でそれぞれ測定された測定対象100までの距離の差から、測定対象100の厚さを導出可能に構成される。 The control unit 15 can derive the thickness of the measurement target 100 from the difference between the distance between the pair of distance meters 12 measured by the calibration device 14 and the distance to the measurement target 100 measured by the pair of distance meters 12. Configured.
 次に、このように構成された測定装置1を用いた測定対象100の測定について説明する。 
 先ず、例えば熱処理により加熱された測定対象100を測定装置1により測定する場合において、測定対象100をコンベア等の搬送装置によって一対の距離計12間を通過させる。なお、測定対象100を通過させる位置は、各距離計12と測定対象100とが離間していれば、限定されない。
Next, the measurement of the measuring object 100 using the measuring apparatus 1 configured as described above will be described.
First, for example, when measuring the measuring object 100 heated by the heat treatment with the measuring device 1, the measuring object 100 is passed between the pair of distance meters 12 by a conveying device such as a conveyor. The position through which the measurement object 100 passes is not limited as long as each distance meter 12 and the measurement object 100 are separated from each other.
 測定対象100が基部11を通過するとき、測定対象100の熱により、基部11及び補助部材13が加熱され、支柱22及び補助部材13が上下方向に膨張する。基部11は、下枠21及び支柱22が設置面200に固定されることから、支柱22は上方向に膨張する。また、補助部材13が固定された上枠23は支柱22に固定されていることから、補助部材13は上枠23に関して下方向に膨張する。 When the measurement target 100 passes through the base 11, the base 11 and the auxiliary member 13 are heated by the heat of the measurement target 100, and the support column 22 and the auxiliary member 13 expand in the vertical direction. In the base 11, the lower frame 21 and the support column 22 are fixed to the installation surface 200, so that the support column 22 expands upward. Further, since the upper frame 23 to which the auxiliary member 13 is fixed is fixed to the support 22, the auxiliary member 13 expands downward with respect to the upper frame 23.
 また、支柱22及び補助部材13は、異なる線形膨張係数を有するが、それぞれの長さが同じ膨張量となるL1、L2に設定されていることから、支柱22及び補助部材13は同じ膨張量でそれぞれ上下方向に膨張する。結果、補助部材13の膨張により、補助部材13に固定された距離計12が支柱22の膨張量と同一量だけ下方に移動し、一対の距離計12の間隙は、一定に保たれる。 Moreover, although the support | pillar 22 and the auxiliary member 13 have different linear expansion coefficients, since each length is set to L1 and L2 which become the same expansion amount, the support | pillar 22 and the auxiliary member 13 are the same expansion amount. Each expands vertically. As a result, due to the expansion of the auxiliary member 13, the distance meter 12 fixed to the auxiliary member 13 moves downward by the same amount as the expansion amount of the support column 22, and the gap between the pair of distance meters 12 is kept constant.
 一対の距離計12は、通過した測定対象100までの距離をそれぞれ測定し、測定した情報を制御部15に送信する。制御部15は、校正装置14で検出した一対の距離計12の間の距離と、受信した各距離計12から測定対象100までの距離の和との差から、測定対象100の厚さを導出する。なお、例えば、校正装置14は、測定対象100の測定前に、予め一対の距離計12の間の距離を測定し、制御部15に情報を送信する。これらの測定を、測定対象100の送り方向の一部又は全箇所で行い、測定対象100の厚さを測定する。 The pair of distance meters 12 measure the distance to the measurement object 100 that has passed, and transmit the measured information to the control unit 15. The control unit 15 derives the thickness of the measurement target 100 from the difference between the distance between the pair of distance meters 12 detected by the calibration device 14 and the sum of the distances from the received distance meters 12 to the measurement target 100. To do. For example, the calibration device 14 measures the distance between the pair of distance meters 12 in advance before measuring the measurement object 100 and transmits information to the control unit 15. These measurements are performed at some or all of the measurement object 100 in the feed direction, and the thickness of the measurement object 100 is measured.
 このように構成された第1の実施形態に係る測定装置1によれば、一対の距離計12の対向する方向において、支柱22及び補助部材13の熱による膨張量を同じとすることで、支柱22の膨張を距離計12が固定された補助部材13の膨張により相殺し、一対の距離計12の間隙を一定とすることができる。これらのことにより、測定装置1は、一対の距離計12により、測定対象100を、高い精度で測定することが可能となる。 According to the measuring apparatus 1 according to the first embodiment configured as described above, in the direction in which the pair of distance meters 12 face each other, the amount of expansion due to the heat of the support column 22 and the auxiliary member 13 is made the same. The expansion of 22 can be offset by the expansion of the auxiliary member 13 to which the distance meter 12 is fixed, and the gap between the pair of distance meters 12 can be made constant. Thus, the measuring apparatus 1 can measure the measurement object 100 with high accuracy using the pair of distance meters 12.
 上述したように、第1の実施形態に係る測定装置1によれば、熱により支柱22の長さが変動しても、高い精度で測定対象100の厚さを測定できる。
(第2の実施形態)
 次に、第2の実施形態に係る測定装置1Aについて、図2を用いて説明する。 
 図2は、第2の実施形態に係る測定装置1Aの構成を示す説明図である。なお、第2の実施形態に係る測定装置1Aにおいて、上述した第1の実施形態に係る測定装置1と同様の構成には同一符号を付し、その詳細な説明は省略する。
As described above, according to the measuring apparatus 1 according to the first embodiment, the thickness of the measurement object 100 can be measured with high accuracy even if the length of the support column 22 varies due to heat.
(Second Embodiment)
Next, a measuring apparatus 1A according to the second embodiment will be described with reference to FIG.
FIG. 2 is an explanatory diagram showing the configuration of the measuring apparatus 1A according to the second embodiment. Note that in the measurement apparatus 1A according to the second embodiment, the same components as those in the measurement apparatus 1 according to the first embodiment described above are denoted by the same reference numerals, and detailed description thereof is omitted.
 測定装置1Aは、測定対象100を通過させる枠状の基部11Aと、基部11Aに設けられ、互いに対向して配置される一対の距離計12と、校正装置14と、制御部15と、を備えている。 The measurement apparatus 1A includes a frame-shaped base portion 11A that allows the measurement target 100 to pass through, a pair of distance meters 12, a calibration device 14, and a control unit 15 that are provided on the base portion 11A and are disposed to face each other. ing.
 基部11Aは、下枠21と、下枠21の一の側面又は一対の側面に設けられた一又は一対の支柱22と、支柱22に設けられた補助部材13Aと、補助部材13Aに設けられた上枠23と、を備えている。基部11Aは、正面視で方形枠状、又は、C字状に構成される。本実施形態においては、基部11Aは、一対の支柱22を有する方形枠状の構成を用いて以下説明する。 The base 11A is provided on the lower frame 21, one or a pair of support columns 22 provided on one side surface or a pair of side surfaces of the lower frame 21, an auxiliary member 13A provided on the support column 22, and the auxiliary member 13A. And an upper frame 23. The base 11A is configured in a rectangular frame shape or a C shape in a front view. In the present embodiment, the base portion 11 </ b> A will be described below using a rectangular frame configuration having a pair of support columns 22.
 補助部材13Aは、例えば板状に構成される。補助部材13Aは、上端が支柱22の上端と固定され、下端が上枠23と固定される。なお、補助部材13Aは、例えば、上端面が支柱22の上端面と、固定部31により固定され、上枠23と対向する主面の下端が上枠23の側面と固定される。固定部31は、例えば、板材及びボルト等による機械的に固定できる部材や、溶接部等の機械的に固定できる部材である。 The auxiliary member 13A is configured in a plate shape, for example. The auxiliary member 13 </ b> A has an upper end fixed to the upper end of the column 22 and a lower end fixed to the upper frame 23. For example, the auxiliary member 13 </ b> A has an upper end surface fixed to the upper end surface of the support 22 and the fixing portion 31, and a lower end of the main surface facing the upper frame 23 is fixed to the side surface of the upper frame 23. The fixing | fixed part 31 is a member which can be fixed mechanically, such as a board | plate material, a volt | bolt, etc., and a mechanical part, such as a welding part, for example.
 補助部材13Aは、支柱22の線形膨張係数と異なる線形膨張係数を有する材料、具体的には、支柱22の線形膨張係数よりも高い線形膨張係数を有する材料で構成される。また、補助部材13Aの一対の距離計12の対向する方向の長さは、熱により一対の距離計12の対向する方向に膨張する支柱22の膨張量と同じ膨張量となる長さを有する。ここで、一対の距離計12の対向する方向は、上下方向、即ち高さ方向である。 The auxiliary member 13 </ b> A is made of a material having a linear expansion coefficient different from the linear expansion coefficient of the support column 22, specifically, a material having a linear expansion coefficient higher than the linear expansion coefficient of the support column 22. Further, the length of the auxiliary member 13A in the direction in which the pair of distance meters 12 face each other has a length that is the same as the amount of expansion of the column 22 that expands in the direction in which the pair of distance meters 12 face each other due to heat. Here, the opposing direction of the pair of distance meters 12 is the vertical direction, that is, the height direction.
 以下、支柱22及び補助部材13Aの材料及び長さについて具体的に説明する。図2に示すように、支柱22の上下方向の長さをL1とし、補助部材13Aの上下方向の長さをL2とする。支柱22の材料を線形膨張係数がM1の第1材料とし、補助部材13の材料を線形膨張係数M1よりも大きい線形膨張係数M2(M1<M2)の第2材料とする。このとき、補助部材13の長さL2は、L2=L1/(M2/M1)に構成される。 Hereinafter, the materials and lengths of the support column 22 and the auxiliary member 13A will be specifically described. As shown in FIG. 2, the vertical length of the support column 22 is L1, and the vertical length of the auxiliary member 13A is L2. The material of the column 22 is a first material having a linear expansion coefficient M1, and the material of the auxiliary member 13 is a second material having a linear expansion coefficient M2 (M1 <M2) larger than the linear expansion coefficient M1. At this time, the length L2 of the auxiliary member 13 is configured as L2 = L1 / (M2 / M1).
 例えば、支柱22の材料を鉄材料とし、補助部材13をアルミニウム材料とした場合には、アルミニウム材料の線形膨張係数は鉄材料の線形膨張係数の約2倍であることから、補助部材13Aの上下方向の長さL2は、L2=L1/2に構成される。このような構成とすることで、支柱22及び補助部材13Aの熱による膨張量が略同一となる。 For example, when the material of the support 22 is an iron material and the auxiliary member 13 is an aluminum material, the linear expansion coefficient of the aluminum material is about twice the linear expansion coefficient of the iron material. The length L2 in the direction is configured as L2 = L1 / 2. By setting it as such a structure, the expansion amount by the heat | fever of the support | pillar 22 and the auxiliary member 13A becomes substantially the same.
 上枠23は、方形板状に構成される。上枠23は、例えば、補助部材13Aの厚さだけ、下枠21よりも小さく構成される。 The upper frame 23 is formed in a square plate shape. The upper frame 23 is configured to be smaller than the lower frame 21 by the thickness of the auxiliary member 13A, for example.
 一対の距離計12は、互いに対向して配置される。一対の距離計12は、一方が下枠21の上面に、他方が上枠23に、それぞれ固定される。 The pair of distance meters 12 are arranged to face each other. One of the pair of distance meters 12 is fixed to the upper surface of the lower frame 21 and the other is fixed to the upper frame 23.
 このように構成された測定装置1Aは、上述した測定装置1と同様に、一対の距離計12の間の間隙を一定に保つことが可能となる。具体的には、測定対象100の熱により、基部11Aが加熱され、支柱22及び補助部材13Aが上下方向に膨張すると、基部11Aは、下枠21及び支柱22が設置面200に固定されることから、支柱22は上方向に膨張する。また、補助部材13Aは、支柱22に固定されることから、固定部31から下方向に膨張する。 The measuring apparatus 1A configured in this manner can keep the gap between the pair of distance meters 12 constant, as with the measuring apparatus 1 described above. Specifically, when the base 11A is heated by the heat of the measuring object 100 and the support column 22 and the auxiliary member 13A expand in the vertical direction, the base frame 11A has the lower frame 21 and the support column 22 fixed to the installation surface 200. Therefore, the support column 22 expands upward. Further, since the auxiliary member 13 </ b> A is fixed to the support column 22, the auxiliary member 13 </ b> A expands downward from the fixing portion 31.
 また、支柱22及び補助部材13Aは、異なる線形膨張係数を有するが、それぞれの長さが同じ膨張量となるL1、L2に設定されていることから、支柱22及び補助部材13Aは同じ膨張量でそれぞれ上下方向に膨張する。結果、補助部材13Aの膨張により、補助部材13Aに固定された上枠23及び上枠23に固定された距離計12が支柱22の膨張量と同一量だけ下方に移動し、一対の距離計12の間隙は、一定に保たれる。 Moreover, although the support | pillar 22 and the auxiliary member 13A have different linear expansion coefficients, since each length is set to L1 and L2 which become the same expansion amount, the support | pillar 22 and the auxiliary member 13A have the same expansion amount. Each expands vertically. As a result, due to the expansion of the auxiliary member 13A, the upper frame 23 fixed to the auxiliary member 13A and the distance meter 12 fixed to the upper frame 23 move downward by the same amount as the expansion amount of the support column 22, and the pair of distance meters 12 The gap is kept constant.
 このように構成された第2の実施形態に係る測定装置1Aによれば、一対の距離計12の対向する方向において、支柱22及び補助部材13Aの熱による膨張量を同じとすることが可能となる。これにより、測定装置1Aは、支柱22の上方向の膨張を、距離計12が設けられた上枠23が固定された補助部材13Aの下方向の膨張により相殺し、一対の距離計12の間隙を一定とすることができる。これらのことにより、測定装置1Aは、一対の距離計12により、測定対象100を、高い精度で測定することが可能となる。
(第3の実施形態)
 次に、第3の実施形態に係る測定装置1Bについて、図3を用いて説明する。 
 図3は、第3の実施形態に係る測定装置1Bの構成を示す説明図である。なお、第3の実施形態に係る測定装置1Bにおいて、上述した第1の実施形態に係る測定装置1及び第2の実施形態に係る測定装置1Aと同様の構成には同一符号を付し、その詳細な説明は省略する。
According to the measuring apparatus 1A according to the second embodiment configured as described above, in the direction in which the pair of distance meters 12 face each other, it is possible to make the expansion amount due to heat of the support column 22 and the auxiliary member 13A the same. Become. Thus, the measuring apparatus 1A cancels the upward expansion of the support column 22 by the downward expansion of the auxiliary member 13A to which the upper frame 23 provided with the distance meter 12 is fixed, and the gap between the pair of distance meters 12 is offset. Can be made constant. By these things, 1 A of measuring apparatuses can measure the measuring object 100 with a high precision with a pair of distance meter 12. FIG.
(Third embodiment)
Next, a measuring apparatus 1B according to the third embodiment will be described with reference to FIG.
FIG. 3 is an explanatory diagram illustrating a configuration of a measurement apparatus 1B according to the third embodiment. In the measurement apparatus 1B according to the third embodiment, the same reference numerals are given to the same configurations as those of the measurement apparatus 1 according to the first embodiment and the measurement apparatus 1A according to the second embodiment described above, Detailed description is omitted.
 測定装置1Bは、測定対象100を通過させる枠状の基部11Bと、基部11Bに設けられ、互いに対向して配置される一対の距離計12と、校正装置14と、制御部15と、を備えている。 The measuring apparatus 1B includes a frame-shaped base portion 11B that allows the measurement object 100 to pass through, a pair of distance meters 12, a calibration device 14, and a control unit 15 that are provided on the base portion 11B and are disposed to face each other. ing.
 基部11Bは、下枠21と、下枠21の一の側面又は一対の側面に設けられた一又は一対の支柱22Bと、補助部材13Bに設けられた上枠23と、を備えている。基部11Bは、正面視で方形枠状、又は、C字状に構成される。本実施形態においては、基部11Bは、一対の支柱22Bを有する方形枠状の構成を用いて以下説明する。 The base 11B includes a lower frame 21, one or a pair of support columns 22B provided on one side surface or a pair of side surfaces of the lower frame 21, and an upper frame 23 provided on the auxiliary member 13B. The base 11B is configured in a rectangular frame shape or a C shape in a front view. In the present embodiment, the base portion 11B will be described below using a rectangular frame-like configuration having a pair of support posts 22B.
 支柱22Bは、下枠21に固定される第1支柱22aと、第1支柱22aに固定される補助部材13Bと、補助部材13Bに固定される第2支柱22bと、を備えている。支柱22Bの一対の距離計12の対向する方向の長さは、一対の距離計12の間隙を測定対象100が通過可能であって、且つ、各距離計12と測定対象100が離間する長さに構成される。 The support column 22B includes a first support column 22a fixed to the lower frame 21, an auxiliary member 13B fixed to the first support column 22a, and a second support column 22b fixed to the auxiliary member 13B. The length of the struts 22 </ b> B in the direction in which the pair of distance meters 12 face each other is such that the measurement object 100 can pass through the gap between the pair of distance meters 12 and each distance meter 12 and the measurement object 100 are separated from each other. Configured.
 第1支柱22aは、方形の板状又は棒状に構成される。第1支柱22aは、下端の側面に下枠21の側面が固定され、上端に補助部材13Bが固定される。第1支柱22aは、例えば、設置面200に固定される。第2支柱22bは、方形の板状又は棒状に構成される。第2支柱22bは、上端の側面に上枠23の側面が固定され、下端に補助部材13Bが固定される。 The first support column 22a is configured in a square plate shape or a rod shape. As for the 1st support | pillar 22a, the side surface of the lower frame 21 is fixed to the side surface of a lower end, and the auxiliary member 13B is fixed to an upper end. The first support column 22a is fixed to the installation surface 200, for example. The 2nd support | pillar 22b is comprised by square plate shape or rod shape. As for the 2nd support | pillar 22b, the side surface of the upper frame 23 is fixed to the side surface of an upper end, and the auxiliary member 13B is fixed to a lower end.
 補助部材13Bは、例えば板状に構成される。補助部材13Bは、上端が第1支柱22aの上端と固定され、下端が第2支柱22bの下端と固定される。なお、補助部材13Bは、例えば、上端面が第1支柱22aの上端面と、固定部31により固定され、下端面が第2支柱22bの下端面と、固定部31により固定される。 The auxiliary member 13B is configured in a plate shape, for example. The auxiliary member 13B has an upper end fixed to the upper end of the first support column 22a and a lower end fixed to the lower end of the second support column 22b. The auxiliary member 13B has, for example, an upper end surface fixed by the upper end surface of the first support post 22a and the fixing portion 31, and a lower end surface fixed by the lower end surface of the second support post 22b and the fixing portion 31.
 補助部材13Bは、第1支柱22a及び第2支柱22bの線形膨張係数と異なる線形膨張係数を有する材料、具体的には、第1支柱22a及び第2支柱22bの線形膨張係数よりも高い線形膨張係数を有する材料で構成される。また、補助部材13Bの一対の距離計12の対向する方向の長さは、熱により一対の距離計12の対向する方向に膨張する第1支柱22a及び第2支柱22bの膨張量と同じ膨張量となる長さを有する。ここで、一対の距離計12の対向する方向は、上下方向、即ち高さ方向である。 The auxiliary member 13B is made of a material having a linear expansion coefficient different from the linear expansion coefficient of the first support column 22a and the second support column 22b. Specifically, the auxiliary member 13B has a linear expansion coefficient higher than the linear expansion coefficient of the first support column 22a and the second support column 22b. It is composed of a material having a coefficient. Further, the length of the auxiliary member 13B in the direction in which the pair of distance meters 12 opposes is the same as the expansion amount of the first support column 22a and the second support column 22b that expand in the direction in which the pair of distance meters 12 oppose each other. Has a length of Here, the opposing direction of the pair of distance meters 12 is the vertical direction, that is, the height direction.
 以下、第1支柱22a、第2支柱22b及び補助部材13Bの材料及び長さについて具体的に説明する。図3に示すように、第1支柱22aの上下方向の長さをL11とし、第2支柱22bの上下方向の長さをL21とし、補助部材13Bの上下方向の長さをL2とする。第1支柱22a及び第2支柱22bの材料を線形膨張係数がM1の第1材料とし、補助部材13Bの材料を線形膨張係数M1よりも大きい線形膨張係数M2(M1<M2)の第2材料とする。このとき、補助部材13Bの長さL2は、L2=(L11+L12)/(M2/M1)に構成される。 Hereinafter, the materials and lengths of the first support 22a, the second support 22b, and the auxiliary member 13B will be described in detail. As shown in FIG. 3, the vertical length of the first column 22a is L11, the vertical length of the second column 22b is L21, and the vertical length of the auxiliary member 13B is L2. The material of the first support 22a and the second support 22b is a first material having a linear expansion coefficient M1, and the material of the auxiliary member 13B is a second material having a linear expansion coefficient M2 (M1 <M2) larger than the linear expansion coefficient M1. To do. At this time, the length L2 of the auxiliary member 13B is configured as L2 = (L11 + L12) / (M2 / M1).
 例えば、第1支柱22a及び第2支柱22bの材料を鉄材料とし、補助部材13Bをアルミニウム材料とした場合には、アルミニウム材料の線形膨張係数は鉄材料の線形膨張係数の約2倍であることから、補助部材13Bの上下方向の長さL2は、L2=(L11+L12)/2に構成される。例えば、L11及びL12を同一長さとすると、第1支柱22a、第2支柱22b及び補助部材13Bの上下方向の長さが略等しくなる。このような構成とすることで、第1支柱22a及び第2支柱22bの熱による膨張量の和と、補助部材13Bの熱による膨張量が略同一となる。 For example, when the material of the first column 22a and the second column 22b is an iron material and the auxiliary member 13B is an aluminum material, the linear expansion coefficient of the aluminum material is approximately twice the linear expansion coefficient of the iron material. Therefore, the length L2 of the auxiliary member 13B in the vertical direction is configured as L2 = (L11 + L12) / 2. For example, if L11 and L12 have the same length, the vertical lengths of the first column 22a, the second column 22b, and the auxiliary member 13B are substantially equal. By setting it as such a structure, the sum of the expansion amount by the heat of the 1st support | pillar 22a and the 2nd support | pillar 22b and the expansion amount by the heat of the auxiliary member 13B become substantially the same.
 上枠23は、方形板状に構成される。上枠23は、例えば、下枠21と略同一形状に構成される。 The upper frame 23 is formed in a square plate shape. For example, the upper frame 23 is configured in substantially the same shape as the lower frame 21.
 一対の距離計12は、互いに対向して配置される。一対の距離計12は、一方が下枠21の上面に、他方が上枠23の下面に、それぞれ固定される。 The pair of distance meters 12 are arranged to face each other. One of the pair of distance meters 12 is fixed to the upper surface of the lower frame 21 and the other is fixed to the lower surface of the upper frame 23.
 このように構成された測定装置1Bは、上述した測定装置1、1Aと同様に、一対の距離計12の間の間隙を一定に保つことが可能となる。具体的には、測定対象100の熱により、基部11Bが加熱され、支柱22B上下方向に膨張すると、基部11Bは、下枠21及び第1支柱22aが設置面200に固定されることから、第1支柱22aは上方向に膨張する。補助部材13Bの上端は、第1支柱22aの上端に固定されることから、補助部材13Bは、第1支柱22aの上端から下方向に膨張する。また、第2支柱22bの下端は、補助部材13Bの下端に固定されていることから、第2支柱22bは、補助部材13Bの下端から上方向に膨張する。 The measuring apparatus 1B configured as described above can keep the gap between the pair of distance meters 12 constant as in the measuring apparatuses 1 and 1A described above. Specifically, when the base 11B is heated by the heat of the measurement target 100 and expands in the vertical direction of the support 22B, the base 11B is fixed to the installation surface 200 because the lower frame 21 and the first support 22a are fixed. One strut 22a expands upward. Since the upper end of the auxiliary member 13B is fixed to the upper end of the first column 22a, the auxiliary member 13B expands downward from the upper end of the first column 22a. Moreover, since the lower end of the second support column 22b is fixed to the lower end of the auxiliary member 13B, the second support column 22b expands upward from the lower end of the auxiliary member 13B.
 また、第1支柱22a及び第2支柱22b、並びに、補助部材13Bは、異なる線形膨張係数を有するが、第1支柱22a及び第2支柱22bの長さの和、及び、補助部材13Bの長さが同じ膨張量となるL11、L12、L2に設定されている。このため、第1支柱22a及び第2支柱22b並びに補助部材13Aは同じ膨張量でそれぞれ上下方向に膨張する。結果、補助部材13Aの膨張により、補助部材13Aに固定された上枠23及び上枠23に固定された距離計12が、上方に膨張する第1支柱22a及び第2支柱22bの膨張量と同一量だけ下方に移動し、一対の距離計12の間隙は、一定に保たれる。 The first support 22a, the second support 22b, and the auxiliary member 13B have different linear expansion coefficients, but the sum of the lengths of the first support 22a and the second support 22b and the length of the auxiliary member 13B. Are set to L11, L12, and L2 having the same expansion amount. For this reason, the 1st support | pillar 22a, the 2nd support | pillar 22b, and the auxiliary member 13A each expand | swell in the up-down direction by the same expansion amount. As a result, due to the expansion of the auxiliary member 13A, the upper frame 23 fixed to the auxiliary member 13A and the distance meter 12 fixed to the upper frame 23 are the same as the expansion amount of the first support column 22a and the second support column 22b. The distance between the pair of rangefinders 12 is kept constant.
 このように構成された第3の実施形態に係る測定装置1Bによれば、一対の距離計12の対向する方向において、第1支柱22a及び第2支柱22b並びに補助部材13Bの熱による膨張量を同じとすることが可能となる。これにより、測定装置1Bは、第1支柱22a及び第2支柱22bの上方向の膨張を、補助部材13Bの下方向の膨張により相殺し、一対の距離計12の間隙を一定とすることができる。これらのことにより、測定装置1Bは、一対の距離計12により、測定対象100を、高い精度で測定することが可能となる。
(第4の実施形態)
 次に、第4の実施形態に係る測定装置1Cについて、図4を用いて説明する。 
 図1は、第1の実施形態に係る測定装置1の構成を示す説明図である。なお、第4の実施形態に係る測定装置1Cにおいて、上述した第1の実施形態に係る測定装置1と同様の構成には同一符号を付し、その詳細な説明は省略する。
According to the measuring apparatus 1B according to the third embodiment configured as described above, in the direction in which the pair of distance meters 12 face each other, the expansion amount due to heat of the first support column 22a, the second support column 22b, and the auxiliary member 13B is determined. It is possible to be the same. Thereby, the measuring apparatus 1B can cancel the upward expansion of the first support column 22a and the second support column 22b by the downward expansion of the auxiliary member 13B, and can keep the gap between the pair of distance meters 12 constant. . By these things, the measuring apparatus 1B can measure the measuring object 100 with high accuracy by the pair of distance meters 12.
(Fourth embodiment)
Next, a measuring apparatus 1C according to the fourth embodiment will be described with reference to FIG.
FIG. 1 is an explanatory diagram showing the configuration of the measuring apparatus 1 according to the first embodiment. Note that in the measurement apparatus 1C according to the fourth embodiment, the same components as those in the measurement apparatus 1 according to the first embodiment described above are denoted by the same reference numerals, and detailed description thereof is omitted.
 測定装置1Cは、測定対象100を通過させる枠状の基部11と、基部11に設けられ、互いに対向して配置される一対の距離計12と、基部11及び一方の距離計12の間に設けられた補助部材13Cと、一対の距離計12の間隙の距離を計測する校正装置14と、一対の距離計12及び校正装置14にそれぞれ信号線99を介して接続された制御部15と、を備えている。 The measuring device 1 </ b> C is provided between a frame-shaped base 11 that allows the measurement object 100 to pass through, a pair of distance meters 12 that are provided on the base 11 and face each other, and between the base 11 and one distance meter 12. The auxiliary member 13C, the calibration device 14 for measuring the distance between the pair of distance meters 12, and the control unit 15 connected to the pair of distance meters 12 and the calibration device 14 via signal lines 99, respectively. I have.
 下枠21は、その上面に補助部材13Cが固定される。 The auxiliary member 13C is fixed to the upper surface of the lower frame 21.
 一対の距離計12は、互いに対向して配置される。一対の距離計12は、一方が補助部材13Cに、他方が上枠23の下面に、それぞれ固定される。 The pair of distance meters 12 are arranged to face each other. One of the pair of distance meters 12 is fixed to the auxiliary member 13 </ b> C and the other is fixed to the lower surface of the upper frame 23.
 補助部材13Cは、例えば方形板状又はブロック状に構成される。補助部材13Cは、相対する主面の一方が下枠21の上面に固定され、当該主面の他方に距離計12が固定される。換言すると、一対の距離計12の一方は、一対の距離計12の他方と対向し、且つ、所定の距離だけ離間して、自身と下枠21との間に補助部材13Cを介して下枠21に固定される。 The auxiliary member 13C is configured, for example, in a rectangular plate shape or a block shape. In the auxiliary member 13C, one of the opposing main surfaces is fixed to the upper surface of the lower frame 21, and the distance meter 12 is fixed to the other of the main surfaces. In other words, one of the pair of distance meters 12 faces the other of the pair of distance meters 12 and is separated by a predetermined distance, and the lower frame is interposed between itself and the lower frame 21 via the auxiliary member 13C. 21 is fixed.
 補助部材13Cは、支柱22の線形膨張係数と異なる線形膨張係数を有する材料、具体的には、支柱22の線形膨張係数よりも高い線形膨張係数を有する材料で構成される。また、補助部材13Cの一対の距離計12の対向する方向の長さは、熱により一対の距離計12の対向する方向に膨張する支柱22の膨張量と同じ膨張量となる長さを有する。ここで、一対の距離計12の対向する方向は、上下方向、即ち高さ方向である。 The auxiliary member 13 </ b> C is made of a material having a linear expansion coefficient different from the linear expansion coefficient of the support column 22, specifically, a material having a linear expansion coefficient higher than the linear expansion coefficient of the support column 22. Further, the length of the auxiliary member 13C in the direction in which the pair of distance meters 12 face each other has a length that is the same as the amount of expansion of the column 22 that expands in the direction in which the pair of distance meters 12 face each other due to heat. Here, the opposing direction of the pair of distance meters 12 is the vertical direction, that is, the height direction.
 以下、支柱22及び補助部材13Cの材料及び長さについて具体的に説明する。図4に示すように、支柱22の上下方向の長さをL1とし、補助部材13Cの上下方向の長さをL2とする。支柱22の材料を線形膨張係数がM1の第1材料とし、補助部材13Cの材料を線形膨張係数M1よりも大きい線形膨張係数M2(M1<M2)の第2材料とする。このとき、補助部材13Cの長さL2は、L2=L1/(M2/M1)に構成される。 Hereinafter, the materials and lengths of the support column 22 and the auxiliary member 13C will be specifically described. As shown in FIG. 4, the vertical length of the support column 22 is L1, and the vertical length of the auxiliary member 13C is L2. The material of the column 22 is a first material having a linear expansion coefficient M1, and the material of the auxiliary member 13C is a second material having a linear expansion coefficient M2 (M1 <M2) larger than the linear expansion coefficient M1. At this time, the length L2 of the auxiliary member 13C is configured as L2 = L1 / (M2 / M1).
 例えば、支柱22の材料を鉄材料とし、補助部材13Cをゴム材料とした場合には、ゴム材料の線形膨張係数は鉄材料の線形膨張係数の約10倍であることから、補助部材13Cの上下方向の長さL2は、L2=L1/10に構成される。このような構成とすることで、支柱22及び補助部材13Cの熱による膨張量が略同一となる。 For example, when the material of the support 22 is an iron material and the auxiliary member 13C is a rubber material, the linear expansion coefficient of the rubber material is about 10 times the linear expansion coefficient of the iron material. The length L2 in the direction is configured as L2 = L1 / 10. By setting it as such a structure, the expansion amount by the heat | fever of the support | pillar 22 and the auxiliary member 13C becomes substantially the same.
 このように構成された測定装置1Cによれば、上述した測定装置1と同様の効果を奏する。即ち、一対の距離計12の対向する方向において、支柱22及び補助部材13Cの熱による膨張量を同じとすることで、支柱22が上方へ膨張しても、補助部材13Cが上方へ同じ膨張量で膨張する。 The measuring apparatus 1C configured in this manner has the same effects as the measuring apparatus 1 described above. That is, in the direction in which the pair of distance meters 12 face each other, the amount of expansion caused by the heat of the support column 22 and the auxiliary member 13C is the same, so that even if the support column 22 expands upward, the auxiliary member 13C expands upward. Inflates with.
 このため、距離計12が設けられた上枠23が上方へ移動しても、対となる距離計12も、補助部材13Cによって上方へ移動する。このように、支柱22の上方向の膨張を、補助部材13Cの上方向の膨張により相殺し、一対の距離計12の間隙を一定とすることができる。また、測定装置1Cは、補助部材13Cにゴム部材を用いることで、補助部材13Cの厚さを薄くすることが可能となり、結果、測定装置1Cを小型とすることが可能となる。これらのことにより、測定装置1は、一対の距離計12により、測定対象100を、高い精度で測定することが可能となる。
(第5の実施形態)
 次に、第5の実施形態に係る測定装置1Dについて、図5を用いて説明する。 
 図5は、第5の実施形態に係る測定装置1Dの構成を示す説明図である。なお、第5の実施形態に係る測定装置1Dにおいて、上述した第1の実施形態に係る測定装置1と同様の構成には同一符号を付し、その詳細な説明は省略する。
For this reason, even if the upper frame 23 provided with the distance meter 12 moves upward, the pair of distance meters 12 also moves upward by the auxiliary member 13C. In this way, the upward expansion of the support column 22 can be offset by the upward expansion of the auxiliary member 13C, and the gap between the pair of distance meters 12 can be made constant. Moreover, the measuring apparatus 1C can reduce the thickness of the auxiliary member 13C by using a rubber member for the auxiliary member 13C. As a result, the measuring apparatus 1C can be reduced in size. Thus, the measuring apparatus 1 can measure the measurement object 100 with high accuracy using the pair of distance meters 12.
(Fifth embodiment)
Next, a measuring apparatus 1D according to the fifth embodiment will be described with reference to FIG.
FIG. 5 is an explanatory diagram showing a configuration of a measuring apparatus 1D according to the fifth embodiment. Note that in the measurement apparatus 1D according to the fifth embodiment, the same components as those in the measurement apparatus 1 according to the first embodiment described above are denoted by the same reference numerals, and detailed description thereof is omitted.
 測定装置1Dは、測定対象100を通過させる枠状の基部11Dと、基部11Dに設けられ、互いに対向して配置される一対の距離計12と、一対の距離計12の間隙の距離を計測する校正装置14と、一対の距離計12及び校正装置14にそれぞれ信号線99を介して接続された制御部15と、を備えている。また、測定装置1Dは、上述した測定装置1と異なる構成として、補助部材13を有さない。 The measurement device 1D measures a distance between a frame-shaped base 11D that allows the measurement object 100 to pass through, a pair of distance meters 12 that are provided on the base 11D and face each other, and a gap between the pair of distance meters 12. A calibration device 14 and a control unit 15 connected to the pair of distance meters 12 and the calibration device 14 via signal lines 99 are provided. Moreover, the measuring apparatus 1D does not have the auxiliary member 13 as a configuration different from the measuring apparatus 1 described above.
 基部11Dは、下枠21と、下枠21の一対の側面に設けられた一対の支柱22と、支柱22に設けられた上枠23と、を備えている。基部11Dは、正面視で方形枠状に構成される。また、基部11Dは、少なくとも下枠21及び上枠23が同じ線形膨張係数を有する材料で、同じ形状に構成される。 The base portion 11 </ b> D includes a lower frame 21, a pair of support columns 22 provided on a pair of side surfaces of the lower frame 21, and an upper frame 23 provided on the support column 22. The base 11D is configured in a rectangular frame shape when viewed from the front. The base 11D is made of a material in which at least the lower frame 21 and the upper frame 23 have the same linear expansion coefficient, and are configured in the same shape.
 基部11Dは、設置面200に配置される。基部11Dは、一方の支柱22の下面が設置面200に固定され、下枠21及び他方の支柱22が設置面200に支持される。具体的には、基部11Dは、下枠21及び他方の支柱22が、設置面200に固定されず、設置面200に対して、設置面200の面方向に移動可能に構成される。 The base 11D is disposed on the installation surface 200. In the base portion 11 </ b> D, the lower surface of one support column 22 is fixed to the installation surface 200, and the lower frame 21 and the other support column 22 are supported by the installation surface 200. Specifically, the base 11 </ b> D is configured such that the lower frame 21 and the other support column 22 are not fixed to the installation surface 200 but can be moved in the surface direction of the installation surface 200 with respect to the installation surface 200.
 例えば、基部11Dは、板部材及びボルト等の固定部32により一方の支柱22が固定される。また、例えば、基部11Dは、下枠21及び他方の支柱22がレールやキャスター等により、設置面200に対して移動可能に構成される。設置面200は、例えば、測定装置1が設置される工場等の床面等である。 For example, in the base portion 11D, one support column 22 is fixed by a fixing portion 32 such as a plate member and a bolt. Further, for example, the base 11D is configured such that the lower frame 21 and the other support column 22 are movable with respect to the installation surface 200 by rails, casters, or the like. The installation surface 200 is, for example, a floor surface of a factory or the like where the measuring device 1 is installed.
 一対の距離計12は、互いに対向して配置される。一対の距離計12は、一方が下枠21の上面に、他方が上枠23の下面に、それぞれ固定される。対向する一対の距離計12の間隙は、測定対象100を通過可能な長さに構成される。 The pair of distance meters 12 are arranged to face each other. One of the pair of distance meters 12 is fixed to the upper surface of the lower frame 21 and the other is fixed to the lower surface of the upper frame 23. The gap between the pair of distance meters 12 facing each other is configured to have a length that can pass through the measurement object 100.
 次に、このように構成された測定装置1を用いた測定対象100の測定について説明する。 
 先ず、例えば熱処理により加熱された測定対象100を測定装置1により測定する場合において、測定対象100をコンベア等の搬送装置によって一対の距離計12間を通過させる。
Next, the measurement of the measuring object 100 using the measuring apparatus 1 configured as described above will be described.
First, for example, when measuring the measuring object 100 heated by the heat treatment with the measuring device 1, the measuring object 100 is passed between the pair of distance meters 12 by a conveying device such as a conveyor.
 このとき、測定対象100の熱により、基部11Dが加熱され、下枠21及び上枠23が下枠21及び上枠23の距離計12が固定される主面の面方向、換言すると、距離計12の対向する方向に直交する方向、さらに換言すれば横方向に膨張する。 At this time, the base 11D is heated by the heat of the measuring object 100, and the lower frame 21 and the upper frame 23 are surface directions of the main surface to which the distance meters 12 of the lower frame 21 and the upper frame 23 are fixed. It expands in a direction perpendicular to the 12 opposing directions, in other words in the lateral direction.
 基部11Dは、一方の支柱22が設置面200に固定され、下枠21及び他方の支柱22が設置面200に移動可能に支持されることから、下枠21及び上枠23は、図5に二点鎖線で示すように、横方向に膨張する。結果、他方の支柱22は、横方向の一方、即ち、一方の支柱22から離間する方向に膨張し、下枠21及び上枠23は、板状を維持する。 In the base 11D, one support column 22 is fixed to the installation surface 200, and the lower frame 21 and the other support column 22 are supported to be movable on the installation surface 200. Therefore, the lower frame 21 and the upper frame 23 are shown in FIG. As indicated by the two-dot chain line, the film expands in the lateral direction. As a result, the other support column 22 expands in one of the lateral directions, that is, in a direction away from the one support column 22, and the lower frame 21 and the upper frame 23 maintain a plate shape.
 具体的に説明すると、仮に、一対の支柱22が設置面200に固定されているとすると、熱により膨張した下枠21及び上枠23は、一対の側面が一対の支柱22に固定されていることから、膨張した分だけ上下方向に歪む。この歪みによって、一対の距離計12の間の距離が大きくなるか、又は、小さくなる。 More specifically, assuming that the pair of support columns 22 are fixed to the installation surface 200, the pair of side surfaces of the lower frame 21 and the upper frame 23 expanded by heat are fixed to the pair of support columns 22. Therefore, it is distorted in the vertical direction by the amount of expansion. This distortion increases or decreases the distance between the pair of rangefinders 12.
 これに対し、本実施形態の基部11Dは、一方の支柱22を設置面200に固定部32を介して固定し、他方の支柱22及び下枠21を設置面200に固定しない構成である。これにより、下枠21及び上枠23が歪むことを防止し、また、下枠21及び上枠23は同じ線形膨張係数及び同一形状とすることで、同じ膨張量となることから、一対の距離計12は、横方向に同量だけ移動する。このため、通過する測定対象100の熱による歪みが防止され、且つ、距離計12は互いに対向した状態が維持される。 On the other hand, the base 11D of the present embodiment has a configuration in which one support column 22 is fixed to the installation surface 200 via the fixing unit 32, and the other support column 22 and the lower frame 21 are not fixed to the installation surface 200. Accordingly, the lower frame 21 and the upper frame 23 are prevented from being distorted, and the lower frame 21 and the upper frame 23 have the same linear expansion coefficient and the same shape, so that the same expansion amount is obtained. The total 12 moves by the same amount in the lateral direction. For this reason, distortion by the heat of the measuring object 100 passing through is prevented, and the distance meter 12 is maintained in a state of facing each other.
 次に、一対の距離計12は、通過した測定対象100までの距離をそれぞれ測定し、測定した情報を制御部15に送信する。制御部15は、校正装置14で検出した一対の距離計12の間の距離と、受信した各距離計12から測定対象100までの距離の和との差から、測定対象100の厚さを導出する。なお、例えば、校正装置14は、測定対象100の測定前に、予め一対の距離計12の間の距離を測定し、制御部15に情報を送信する。これらの測定を、測定対象100の送り方向の一部又は全てに渡って行い、測定対象100の厚さを測定する。 Next, the pair of rangefinders 12 respectively measure the distance to the measurement object 100 that has passed, and transmit the measured information to the control unit 15. The control unit 15 derives the thickness of the measurement target 100 from the difference between the distance between the pair of distance meters 12 detected by the calibration device 14 and the sum of the distances from the received distance meters 12 to the measurement target 100. To do. For example, the calibration device 14 measures the distance between the pair of distance meters 12 in advance before measuring the measurement object 100 and transmits information to the control unit 15. These measurements are performed over part or all of the feeding direction of the measuring object 100, and the thickness of the measuring object 100 is measured.
 このように構成された第5の実施形態に係る測定装置1Dによれば、一方の支柱22のみを設置面200に固定し、下枠21及び他方の支柱22を設置面200上に移動可能に支持される構成とすることで、熱による下枠21及び上枠23の歪みが発生することを防止できる。結果、熱により生じる歪みによって一対の距離計12の間隙が変化することを防止できる。これらのことにより、測定装置1Dは、一対の距離計12により、測定対象100を、高い精度で測定することが可能となる。
(第6の実施形態)
 次に、第6の実施形態に係る測定装置1Eについて、図6を用いて説明する。 
 図6は、第6の実施形態に係る測定装置1Eの構成を示す説明図である。なお、第6の実施形態に係る測定装置1Eにおいて、上述した第1の実施形態に係る測定装置1及び第5の実施形態に係る測定装置1Dと同様の構成には同一符号を付し、その詳細な説明は省略する。
According to the measuring apparatus 1D according to the fifth embodiment configured as described above, only one support column 22 is fixed to the installation surface 200, and the lower frame 21 and the other support column 22 are movable on the installation surface 200. By setting it as the structure supported, it can prevent that the distortion of the lower frame 21 and the upper frame 23 by heat | fever generate | occur | produces. As a result, it is possible to prevent the gap between the pair of distance meters 12 from being changed due to distortion caused by heat. Accordingly, the measuring apparatus 1D can measure the measurement object 100 with high accuracy using the pair of distance meters 12.
(Sixth embodiment)
Next, a measuring apparatus 1E according to the sixth embodiment will be described with reference to FIG.
FIG. 6 is an explanatory diagram showing a configuration of a measuring apparatus 1E according to the sixth embodiment. Note that in the measurement apparatus 1E according to the sixth embodiment, the same reference numerals are given to the same configurations as those of the measurement apparatus 1 according to the first embodiment and the measurement apparatus 1D according to the fifth embodiment described above. Detailed description is omitted.
 測定装置1Eは、測定対象100を通過させる枠状の基部11Dと、基部11Dに設けられ、互いに対向して配置される一対の距離計12と、基部11D及び一方の距離計12の間に設けられた補助部材13と、一対の距離計12の間隙の距離を計測する校正装置14と、一対の距離計12及び校正装置14にそれぞれ信号線99を介して接続された制御部15と、を備えている。 The measuring device 1E is provided between a frame-shaped base 11D that allows the measurement object 100 to pass through, a pair of distance meters 12 that are provided on the base 11D and face each other, and between the base 11D and one distance meter 12. The auxiliary member 13, the calibration device 14 for measuring the distance between the pair of distance meters 12, and the control unit 15 connected to the pair of distance meters 12 and the calibration device 14 via signal lines 99, respectively. I have.
 一対の距離計12は、互いに対向して配置される。一対の距離計12は、一方が下枠21の上面に、他方が補助部材13に、それぞれ固定される。対向する一対の距離計12の間隙は、測定対象100を通過可能な長さに構成される。 The pair of distance meters 12 are arranged to face each other. One of the pair of distance meters 12 is fixed to the upper surface of the lower frame 21 and the other is fixed to the auxiliary member 13. The gap between the pair of distance meters 12 facing each other is configured to have a length that can pass through the measurement object 100.
 ここで、下枠21及び上枠23は、同じ線形膨張係数を有する材料により構成され、補助部材13は、支柱22の線形膨張係数よりも高い線形膨張係数を有する材料で構成される。 Here, the lower frame 21 and the upper frame 23 are made of a material having the same linear expansion coefficient, and the auxiliary member 13 is made of a material having a linear expansion coefficient higher than the linear expansion coefficient of the support 22.
 また、下枠21及び上枠23は、同じ形状に構成されるとともに、熱により一対の距離計12の対向する方向に膨張する膨張量が同じ膨張量となる長さを有する。 Further, the lower frame 21 and the upper frame 23 are configured in the same shape, and have a length such that the expansion amount that expands in the direction in which the pair of distance meters 12 opposes by heat becomes the same expansion amount.
 このように構成された第6の実施形態に係る測定装置1Eによれば、上述した第1の実施形態と同様に、支柱22の膨張を距離計12が固定された補助部材13の膨張により相殺することができるとともに、上述した第5の実施形態と同様に、熱による下枠21及び上枠23の歪みが発生することを防止できる。結果、測定装置1Eによれば、一対の距離計12の間隙が変化することを防止できる。これらのことにより、測定装置1Eは、一対の距離計12により、測定対象100を、高い精度で測定することが可能となる。 According to the measuring apparatus 1E according to the sixth embodiment configured as described above, the expansion of the support column 22 is canceled by the expansion of the auxiliary member 13 to which the distance meter 12 is fixed, as in the first embodiment described above. It is possible to prevent the distortion of the lower frame 21 and the upper frame 23 due to heat as in the fifth embodiment described above. As a result, according to the measuring apparatus 1E, it is possible to prevent the gap between the pair of distance meters 12 from changing. By these things, it becomes possible for the measuring apparatus 1E to measure the measuring object 100 with high accuracy by the pair of distance meters 12.
 なお、測定装置は、上記各実施形態に記載された例に限定されない。 
 上述した例では、測定装置1Aは、下枠21と、下枠21の一の側面又は一対の側面に設けられた一又は一対の支柱22と、支柱22に設けられた補助部材13Aと、補助部材13Aに設けられた上枠23と、を備える構成を説明したがこれに限定されない。例えば、測定装置1Aは、上述した測定装置1D、1Eと同様に、一対の支柱22の一方を固定部32により設置面200に固定し、一対の支柱22の他方を、設置面200に対して移動可能とする構成であってもよい。このような構成とすることで、測定装置1Aは、上述した測定装置1Eと同様の効果を奏する。
Note that the measurement apparatus is not limited to the examples described in the above embodiments.
In the example described above, the measuring apparatus 1A includes the lower frame 21, one or a pair of support columns 22 provided on one side or a pair of side surfaces of the lower frame 21, the auxiliary member 13A provided on the support column 22, and the auxiliary Although the structure provided with the upper frame 23 provided in the member 13A was demonstrated, it is not limited to this. For example, the measurement apparatus 1A fixes one of the pair of support columns 22 to the installation surface 200 by the fixing unit 32 and the other of the pair of support columns 22 to the installation surface 200, similarly to the measurement apparatuses 1D and 1E described above. It may be configured to be movable. By setting it as such a structure, 1 A of measuring apparatuses have an effect similar to the measuring apparatus 1E mentioned above.
 同様に、測定装置1B、1Cは、一方の支柱22、22Bを固定部32により設置面200に固定し、下枠21及び他方の支柱22、22Bを、設置面200に対して移動可能に、設置面200上に支持する構成としてもよい。 Similarly, in the measuring apparatuses 1B and 1C, one of the support columns 22 and 22B is fixed to the installation surface 200 by the fixing unit 32, and the lower frame 21 and the other support columns 22 and 22B are movable with respect to the installation surface 200. It is good also as a structure supported on the installation surface 200. FIG.
 また、上述した例では、各測定装置1乃至1Eは、それぞれ補助部材13、13A、13B、13Cのいずれかを有する構成を説明したがこれに限定されない。各測定装置1乃至1Eは、適宜組み合わせて用いることが可能である。即ち、測定装置は、複合的に各補助部材13、13A、13B、13Cを有する測定装置としてもよい。 In the example described above, each measuring apparatus 1 to 1E has been described as having any one of the auxiliary members 13, 13A, 13B, and 13C. However, the present invention is not limited to this. Each measuring device 1 to 1E can be used in appropriate combination. That is, the measuring device may be a measuring device having the auxiliary members 13, 13A, 13B, and 13C in a composite manner.
 また、上述した例では、各測定装置1乃至1Eは、支柱22及び補助部材13、13A、13B、13Cを例示的に金属材料又はゴム材料を用いる構成で説明したがこれに限定されない。支柱22及び補助部材13、13A、13B、13Cの材料は、熱による膨張量を相殺可能であれば、材料は適宜設定可能である。 Further, in the above-described example, each measuring apparatus 1 to 1E has been described with a configuration in which the support 22 and the auxiliary members 13, 13A, 13B, and 13C are exemplarily made of a metal material or a rubber material, but is not limited thereto. The material of the column 22 and the auxiliary members 13, 13 </ b> A, 13 </ b> B, and 13 </ b> C can be appropriately set as long as the expansion amount due to heat can be offset.
 また、上述した例では、測定装置1Bは、第1支柱22a及び第2支柱22bの材料を同一の線形膨張係数を有する第1材料とする構成を説明したがこれに限定されない。即ち、補助部材13Bの膨張量により第1支柱22a及び第2支柱22bの膨張量を相殺できる構成であれば、第1支柱22a及び第2支柱22bを異なる線形膨張係数とする構成であってもよい。 In the above-described example, the measurement apparatus 1B has been described with the configuration in which the first column 22a and the second column 22b are made of the first material having the same linear expansion coefficient, but the present invention is not limited to this. That is, as long as the expansion amount of the first support column 22a and the second support column 22b can be offset by the expansion amount of the auxiliary member 13B, the first support column 22a and the second support column 22b may have different linear expansion coefficients. Good.
 例えば、第1支柱22aを線膨張係数がM1の第1材料とし、第2支柱22bの材料を線形膨張係数がM3の第3材料とし、補助部材13Bの材料を線形膨張係数M1、M3よりも大きい線形膨張係数M2(M1<M2、M3<M2)の第2材料とする。このとき、補助部材13Bの長さL2を、L2=(L11・M1+L12・M3)/M2に構成すれば、第1支柱22a及び第2支柱22bのそれぞれの膨張量の和を補助部材13Bの膨張量で相殺できる。 For example, the first strut 22a is a first material having a linear expansion coefficient M1, the second strut 22b is a third material having a linear expansion coefficient M3, and the auxiliary member 13B is made of a material having linear expansion coefficients M1 and M3. The second material has a large linear expansion coefficient M2 (M1 <M2, M3 <M2). At this time, if the length L2 of the auxiliary member 13B is configured as L2 = (L11 · M1 + L12 · M3) / M2, the sum of the respective expansion amounts of the first support column 22a and the second support column 22b is expanded. Can be offset by quantity.
 以上述べた少なくともひとつの実施形態の測定装置によれば、熱により支柱の長さが変動しても、支柱の膨張量を補助部材の膨張量により相殺することで、対向して配置された一対の距離計の対向する距離を一定に保ち、高い精度で対象物の厚さを測定できる。 According to the measuring device of at least one embodiment described above, even if the length of the support column is fluctuated due to heat, the pair of opposed members is arranged by offsetting the expansion amount of the support column by the expansion amount of the auxiliary member. It is possible to measure the thickness of the object with high accuracy while keeping the distance of the distance meter facing each other constant.
 本発明のいくつかの実施形態を説明したが、これらの実施形態は、例として提示したものであり、発明の範囲を限定することは意図していない。これら新規な実施形態は、その他の様々な形態で実施されることが可能であり、発明の要旨を逸脱しない範囲で、種々の省略、置き換え、変更を行うことができる。これら実施形態やその変形は、発明の範囲や要旨に含まれるとともに、特許請求の範囲に記載された発明とその均等の範囲に含まれる。 Although several embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

Claims (7)

  1.  下枠、前記下枠と対向して設けられる上枠、並びに、前記下枠及び前記上枠を連結する支柱を有する基部と、
     前記下枠及び前記上枠にそれぞれ設けられ、測定対象を通過可能な間隙を有して互いに対向して配置された一対の距離計と、
     前記基部に設けられ、前記支柱と異なる線形膨張係数を有する材料で構成され、熱により前記一対の距離計の対向する方向に膨張する前記支柱の膨張量と同じ膨張量となる前記一対の距離計の対向する方向の長さを有する補助部材と、
     を備える測定装置。
    A lower frame, an upper frame provided to face the lower frame, and a base portion having a column connecting the lower frame and the upper frame;
    A pair of rangefinders provided on the lower frame and the upper frame, respectively, and arranged to face each other with a gap that can pass through the measurement object;
    The pair of rangefinders that are provided on the base and are made of a material having a linear expansion coefficient different from that of the columns, and that have the same expansion amount as the columns that expand in the opposite direction of the pair of rangefinders due to heat. An auxiliary member having a length in the opposite direction;
    A measuring apparatus comprising:
  2.  前記補助部材は、前記上枠及び前記上枠に設けられる前記距離計の間に固定されることを備える請求項1に記載の測定装置。 The measuring apparatus according to claim 1, wherein the auxiliary member is fixed between the upper frame and the distance meter provided on the upper frame.
  3.  前記補助部材は、上端が前記支柱の上端に固定され、下端が前記上枠に固定される請求項1に記載の測定装置。 The measuring device according to claim 1, wherein the auxiliary member has an upper end fixed to an upper end of the support column and a lower end fixed to the upper frame.
  4.  前記支柱は、前記下枠に下端が固定される第1支柱と、前記上枠に上端が固定される第2支柱とを有し、
     前記補助部材は、前記第1支柱の側面及び前記第2支柱の側面の間に配置され、上端が前記第1支柱の上端に固定され、下端が前記第2支柱の下端に固定される請求項1に記載の測定装置。
    The column has a first column whose lower end is fixed to the lower frame, and a second column whose upper end is fixed to the upper frame,
    The auxiliary member is disposed between a side surface of the first support column and a side surface of the second support column, and has an upper end fixed to an upper end of the first support column and a lower end fixed to a lower end of the second support column. The measuring apparatus according to 1.
  5.  前記支柱は鉄材料で構成され、
     前記補助部材は、ゴム材料で構成され、前記下枠及び前記下枠に設けられる前記距離計に固定される請求項1に記載の測定装置。
    The strut is made of iron material,
    The measuring device according to claim 1, wherein the auxiliary member is made of a rubber material and is fixed to the lower frame and the distance meter provided on the lower frame.
  6.  前記基部は、前記支柱を一対有し、
     前記支柱は、前記下枠の対向する側面にそれぞれが対向して配置され、前記支柱の一方は、前記基部を設置する設置面に固定され、前記支柱の他方は、前記設置面に対して移動可能に前記設置面上に支持される請求項1に記載の測定装置。
    The base has a pair of struts,
    The support columns are respectively arranged to face the opposite side surfaces of the lower frame, one of the support columns is fixed to an installation surface on which the base is installed, and the other of the support columns moves with respect to the installation surface. The measuring apparatus according to claim 1, wherein the measuring apparatus is supported on the installation surface as possible.
  7.  下枠、前記下枠と対向して設けられる上枠、並びに、前記下枠の対向する側面及び前記上枠の対向する側面に両端がそれぞれ配置される一対の支柱を有し、前記一対の支柱の一方が設置面に固定され、前記一対の支柱の他方が前記設置面に対して移動可能に前記設置面上に支持される基部と、
     前記下枠及び前記上枠にそれぞれ設けられ、測定対象を通過可能な間隙を有して互いに対向して配置された一対の距離計と、
     を備える測定装置。
    A pair of struts each having a lower frame, an upper frame provided facing the lower frame, a side surface facing the lower frame, and a side surface facing the upper frame. One of the two is fixed to the installation surface, the other of the pair of columns is supported on the installation surface movably with respect to the installation surface;
    A pair of rangefinders provided on the lower frame and the upper frame, respectively, and arranged to face each other with a gap that can pass through the measurement object;
    A measuring apparatus comprising:
PCT/JP2016/056605 2016-03-03 2016-03-03 Measuring device WO2017149727A1 (en)

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