TWI620914B - Measuring device - Google Patents

Measuring device Download PDF

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TWI620914B
TWI620914B TW105134828A TW105134828A TWI620914B TW I620914 B TWI620914 B TW I620914B TW 105134828 A TW105134828 A TW 105134828A TW 105134828 A TW105134828 A TW 105134828A TW I620914 B TWI620914 B TW I620914B
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Taiwan
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pair
auxiliary member
pillar
fixed
frame
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TW105134828A
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Chinese (zh)
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TW201816357A (en
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Shota Takemura
Kenji Aizawa
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Toshiba Kk
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Publication of TW201816357A publication Critical patent/TW201816357A/en

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  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

依據實施例的話,測量裝置,具有:基部、一對測距儀及輔助構件。基部,具有:下框、及與前述下框對向設置的上框、及將前述下框及前述上框連結的支柱。一對測距儀,是各別被設置在前述下框及前述上框,彼此對向配置且隔有測量對象可通過的間隙。輔助構件,是設在前述基部,由具有與前述支柱相異的線形膨脹係數的材料所構成,其前述一對測距儀的對向的方向的長度,具有與前述支柱的藉由熱朝前述一對測距儀的對向的方向膨脹的膨脹量成為相同的膨脹量。 According to an embodiment, the measuring device has a base, a pair of range finder and an auxiliary member. The base has a lower frame, an upper frame disposed opposite the lower frame, and a pillar connecting the lower frame and the upper frame. A pair of range finder are respectively disposed in the lower frame and the upper frame, and are arranged opposite to each other with a gap through which the measurement object can pass. The auxiliary member is formed on the base portion and is made of a material having a linear expansion coefficient different from that of the pillar, and the length of the pair of distance measuring devices in the opposing direction has heat with the pillars facing the foregoing The amount of expansion in which the pair of range finder is expanded in the opposite direction becomes the same amount of expansion.

Description

測量裝置 Measuring device

本發明的實施例,是有關於將測量對象的厚度由非接觸測量的測量裝置。 An embodiment of the present invention relates to a measuring device that measures the thickness of a measuring object by non-contact measurement.

已知將測量對象通過被對向地設置在框狀的框架內的一對測距儀之間的測量裝置。這種測量裝置,是藉由從預先測量好的一對測距儀之間的距離,減去從進行測量的各測距儀至測量對象為止的距離,而將對象物的厚度導出。 A measuring device that passes a measurement object between a pair of range finder that is disposed oppositely in a frame-like frame is known. In this measuring apparatus, the thickness of the object is derived by subtracting the distance from each of the distance measuring instruments to be measured to the measuring object from the distance between the pair of distance measuring instruments measured in advance.

此測量裝置所使用的框架,具有:將一對測距儀固定的上框及下框、及將這些上框及下框連接的支柱。支柱,是設於上框及下框的一端或是兩端。 The frame used in the measuring device has an upper frame and a lower frame for fixing a pair of range finder, and a pillar for connecting the upper frame and the lower frame. The pillars are provided at one end or both ends of the upper and lower frames.

厚度測量裝置的習知技術,具有日本專利公開公報日本特開2014-174010號公報。 A conventional technique of the thickness measuring device is disclosed in Japanese Laid-Open Patent Publication No. 2014-174010.

本發明所欲解決的課題,是提供一種測量裝置,即使藉由熱使支柱的長度變動,仍可以由高精度測量 對象物的厚度。 The problem to be solved by the present invention is to provide a measuring device which can be measured with high precision even if the length of the strut is changed by heat. The thickness of the object.

依據本發明的實施例的話,測量裝置,具有:基部、一對測距儀及輔助構件。基部,具有:下框、及與前述下框對向設置的上框、及將前述下框及前述上框連結的支柱。一對測距儀,是各別被設置在前述下框及前述上框,彼此對向配置且隔有測量對象可通過的間隙。輔助構件,是設在前述基部,由與前述支柱相異的線形膨脹係數的材料所構成,其前述一對測距儀的對向的方向的長度,具有與前述支柱的藉由熱朝前述一對測距儀的對向的方向膨脹的膨脹量成為相同的膨脹量。 According to an embodiment of the invention, the measuring device has a base, a pair of range finder and an auxiliary member. The base has a lower frame, an upper frame disposed opposite the lower frame, and a pillar connecting the lower frame and the upper frame. A pair of range finder are respectively disposed in the lower frame and the upper frame, and are arranged opposite to each other with a gap through which the measurement object can pass. The auxiliary member is formed of a material having a linear expansion coefficient different from the struts, and the length of the pair of distance measuring devices in the opposing direction has a heat toward the pillar The amount of expansion that expands in the opposite direction of the range finder becomes the same amount of expansion.

1A、1B、1C、1D、1E‧‧‧測量裝置 1A, 1B, 1C, 1D, 1E‧‧‧ measuring devices

11、11A、11B、11D‧‧‧基部 11, 11A, 11B, 11D‧‧‧ base

12‧‧‧測距儀 12‧‧‧ Rangefinder

13、13A、13B、13C‧‧‧輔助構件 13, 13A, 13B, 13C‧‧‧ auxiliary components

14‧‧‧校正裝置 14‧‧‧ calibration device

15‧‧‧控制部 15‧‧‧Control Department

21‧‧‧下框 21‧‧‧ Lower frame

22、22B‧‧‧支柱 22, 22B‧‧ ‧ pillar

22a‧‧‧第1支柱 22a‧‧‧1st pillar

22b‧‧‧第2支柱 22b‧‧‧2nd pillar

23‧‧‧上框 23‧‧‧上上

31、32‧‧‧固定部 31, 32‧‧‧ Fixed Department

99‧‧‧訊號線 99‧‧‧Signal line

100‧‧‧測量對象 100‧‧‧Measurement object

200‧‧‧設置面 200‧‧‧Setting surface

[第1圖]顯示第1實施例的測量裝置的構成的說明圖。 [Fig. 1] is an explanatory view showing a configuration of a measuring device according to a first embodiment.

[第2圖]顯示第2實施例的測量裝置的構成的說明圖。 [Fig. 2] An explanatory view showing a configuration of a measuring apparatus according to a second embodiment.

[第3圖]顯示第3實施例的測量裝置的構成的說明圖。 [Fig. 3] An explanatory view showing a configuration of a measuring apparatus according to a third embodiment.

[第4圖]顯示第4實施例的測量裝置的構成的說明圖。 [Fig. 4] An explanatory view showing a configuration of a measuring apparatus according to a fourth embodiment.

[第5圖]顯示第5實施例的測量裝置的構成的說明圖。 [Fig. 5] An explanatory view showing a configuration of a measuring apparatus according to a fifth embodiment.

[第6圖]顯示第6實施例的測量裝置的構成的說明 圖。 [Fig. 6] A view showing the configuration of the measuring device of the sixth embodiment Figure.

(第1實施例) (First embodiment)

以下,對於第1實施例的測量裝置1,使用第1圖說明。 Hereinafter, the measurement device 1 of the first embodiment will be described using FIG.

第1圖,是顯示第1實施例的測量裝置1的構成的說明圖。 Fig. 1 is an explanatory view showing the configuration of the measuring device 1 of the first embodiment.

測量裝置1,具備:測量對象100通過的框狀的基部11、及設在基部11且彼此對向配置的一對測距儀12、及設在基部11及一方的測距儀12之間的輔助構件13、及測量一對測距儀12的間隙的距離的校正裝置14、及透過訊號線99各別與一對測距儀12及校正裝置14連接的控制部15。 The measuring device 1 includes a frame-shaped base portion 11 through which the measurement target 100 passes, a pair of distance measuring devices 12 disposed on the base portion 11 and opposed to each other, and a distance between the base portion 11 and one of the range finder 12 The auxiliary member 13 and the correction device 14 for measuring the distance between the gaps of the pair of distance meters 12 and the control unit 15 for transmitting the signal line 99 to the pair of distance measuring device 12 and the correction device 14 respectively.

在此,測量對象100,是例如一方向長的板狀的金屬板等。測量對象100,是例如,進行熱處理之後,由測量裝置1測量厚度。 Here, the measurement object 100 is, for example, a plate-shaped metal plate having a long direction. The measurement object 100 is, for example, measured by the measuring device 1 after the heat treatment.

基部11,具備:下框21、及設在下框21的一側面或是一對側面的一或是一對支柱22、及設在支柱22的上框23。基部11,是正面視方形框狀,或是C字狀。在本實施例中,基部11,是使用具有一對支柱22的方形框狀的構成並如以下說明。 The base portion 11 includes a lower frame 21, one or a pair of side pillars 22 provided on one side surface or a pair of side surfaces of the lower frame 21, and an upper frame 23 provided on the pillars 22. The base portion 11 has a square frame shape in front or a C shape. In the present embodiment, the base portion 11 has a square frame shape having a pair of pillars 22 and is described below.

基部11,是例如下框21的下面及支柱22的 下面被固定於設置面200。設置面200,是例如,設置測量裝置1的工場等的地面等。 The base portion 11 is, for example, the lower surface of the lower frame 21 and the pillars 22 The lower surface is fixed to the setting surface 200. The installation surface 200 is, for example, a floor or the like in which a factory or the like of the measuring device 1 is installed.

下框21,是方形板狀。下框21的設有支柱22的一對側面間的長度,是比測量對象100的寬度方向的長度更長。 The lower frame 21 is a square plate shape. The length between the pair of side faces of the lower frame 21 on which the pillars 22 are provided is longer than the length of the measurement object 100 in the width direction.

支柱22,是方形的板狀或是棒狀。支柱22的一對測距儀12的對向的方向的長度,是使一對測距儀12的間隙可讓測量對象100通過,且,使各測距儀12可與測量對象100分離的長度。支柱22,是使下框21被固定於下端的側面,使上框23被固定於上端的側面。即,支柱22,是將下框21及上框23連結。 The pillars 22 are square plate-shaped or rod-shaped. The length of the pair of distance measuring devices 12 of the strut 22 is such that the gap between the pair of distance measuring devices 12 allows the measuring object 100 to pass, and the length of each of the distance measuring devices 12 can be separated from the measuring object 100. . The support post 22 is a side surface on which the lower frame 21 is fixed to the lower end, and the upper frame 23 is fixed to the upper end. That is, the pillars 22 are connected to the lower frame 21 and the upper frame 23.

上框23,是方形板狀。上框23,是例如,與下框21大致同一形狀,且與下框21對向。上框23,是使輔助構件13被固定於其下面。 The upper frame 23 is a square plate shape. The upper frame 23 is, for example, substantially the same shape as the lower frame 21 and faces the lower frame 21. The upper frame 23 is such that the auxiliary member 13 is fixed to the lower side thereof.

一對測距儀12,是彼此對向配置。一對測距儀12,其一方被固定於下框21的上面,另一方被固定於輔助構件13的下面。對向的一對測距儀12的間隙,是構成測量對象100可通過的長度。一對測距儀12,是可各別測量至通過的測量對象100為止的距離。一對測距儀12,是將測量到的資訊,透過訊號線99朝控制部15發訊。 A pair of range finder 12 are arranged opposite each other. One pair of range finder 12 is fixed to the upper surface of the lower frame 21, and the other is fixed to the lower surface of the auxiliary member 13. The gap between the opposing pair of range finder 12 is the length through which the measuring object 100 can pass. The pair of range finder 12 is a distance that can be measured to the measurement object 100 that passes through each other. A pair of range finder 12 transmits the measured information to the control unit 15 via the signal line 99.

輔助構件13,是例如方形板狀或是塊體狀。輔助構件13,其相對的主面的一方被固定於上框23的下面,測距儀12被固定於該主面的另一方。換言之,一對 測距儀12的另一方,是與一對測距儀12的一方對向,且只有規定的距離分離,在本身及上框23之間透過輔助構件13被固定於上框23。 The auxiliary member 13 is, for example, a square plate shape or a block shape. The auxiliary member 13 has one of its opposing main faces fixed to the lower surface of the upper frame 23, and the range finder 12 is fixed to the other of the main faces. In other words, a pair The other of the range finder 12 is opposed to one of the pair of distance measuring devices 12, and is separated by a predetermined distance, and is fixed to the upper frame 23 through the auxiliary member 13 between itself and the upper frame 23.

輔助構件13,是具有與支柱22的線形膨脹係數相異的線形膨脹係數的材料,具體而言,由具有比支柱22的線形膨脹係數更高的線形膨脹係數的材料所構成。且,輔助構件13的一對測距儀12的對向的方向的長度,是具有與藉由熱朝一對測距儀12的對向的方向膨脹的支柱22的膨脹量成為相同的膨脹量的長度。在此,一對測距儀12的對向的方向,是上下方向,即高度方向。 The auxiliary member 13 is a material having a linear expansion coefficient different from the linear expansion coefficient of the support 22, and specifically, a material having a linear expansion coefficient higher than the linear expansion coefficient of the support 22. Further, the length of the pair of distance measuring devices 12 of the auxiliary member 13 in the opposing direction is the same as the amount of expansion of the pillars 22 which are expanded in the direction in which the pair of distance measuring devices 12 are opposed to each other by the heat. length. Here, the direction in which the pair of range finder 12 opposes is the up and down direction, that is, the height direction.

以下,對於支柱22及輔助構件13的材料及長度具體說明。如第1圖所示,將支柱22的上下方向的長度設成L1,將輔助構件13的上下方向的長度設成L2。支柱22的材料是線形膨脹係數M1的第1材料,輔助構件13的材料是比線形膨脹係數M1更大的線形膨脹係數M2(M1<M2)的第2材料。此時,輔助構件13的長度L2,是L2=L1/(M2/M1)。 Hereinafter, the materials and lengths of the pillars 22 and the auxiliary members 13 will be specifically described. As shown in Fig. 1, the length of the support member 22 in the vertical direction is set to L1, and the length of the auxiliary member 13 in the vertical direction is set to L2. The material of the pillars 22 is the first material of the linear expansion coefficient M1, and the material of the auxiliary member 13 is the second material having a linear expansion coefficient M2 (M1 < M2) larger than the linear expansion coefficient M1. At this time, the length L2 of the auxiliary member 13 is L2 = L1/(M2/M1).

例如,支柱22的材料是鐵材料,輔助構件13是鋁材料的情況時,鋁材料的線形膨脹係數因為是鐵材料的線形膨脹係數的約2倍,所以輔助構件13的上下方向的長度L2,是L2=L1/2。藉由作成這種構成,支柱22及輔助構件13的由熱所產生的膨脹量是成為大致相同。 For example, when the material of the pillars 22 is an iron material and the auxiliary member 13 is an aluminum material, the linear expansion coefficient of the aluminum material is about twice the linear expansion coefficient of the iron material, so the length L2 of the auxiliary member 13 in the up and down direction, It is L2=L1/2. With such a configuration, the amount of expansion of the strut 22 and the auxiliary member 13 by heat is substantially the same.

校正裝置14,是可測量一對測距儀12間的距離,換言之,一對測距儀12的間隙的長度。校正裝置 14,是將測量到的資訊,透過訊號線99朝控制部15發訊。 The correcting means 14 is a length which can measure the distance between a pair of range finder 12, in other words, the gap of a pair of range finder 12. Correction device 14. The measured information is transmitted to the control unit 15 via the signal line 99.

控制部15,是從:由校正裝置14測量的一對測距儀12間的距離、及由一對測距儀12各別測量的至測量對象100為止的距離的和,的差,可將測量對象100的厚度導出。 The control unit 15 is a difference between the distance between the pair of distance measuring devices 12 measured by the correction device 14 and the distance from the pair of distance measuring devices 12 to the measurement target 100. The thickness of the measurement object 100 is derived.

接著,說明使用如此構成的測量裝置1的測量對象100的測量。 Next, the measurement of the measuring object 100 using the measuring device 1 thus constructed will be described.

首先,將例如藉由熱處理被加熱的測量對象100藉由測量裝置1測量的情況時,藉由輸送帶等的搬運裝置使測量對象100通過一對測距儀12間。又,測量對象100通過的位置,只要各測距儀12及測量對象100是分離的話,無特別限定。 First, when the measurement object 100 heated by the heat treatment is measured by the measurement device 1, the measurement object 100 is passed between the pair of distance meters 12 by a conveyance device such as a conveyor belt. Further, the position at which the measurement target 100 passes is not particularly limited as long as each of the distance measuring device 12 and the measurement target 100 is separated.

測量對象100通過基部11時,藉由測量對象100的熱,使基部11及輔助構件13被加熱,使支柱22及輔助構件13朝上下方向膨脹。基部11,因為是下框21及支柱22被固定於設置面200,所以支柱22是朝上方向膨脹。且,固定有輔助構件13的上框23因為被固定於支柱22,所以輔助構件13是對於上框23朝下方向膨脹。 When the measurement target 100 passes through the base portion 11, the base portion 11 and the auxiliary member 13 are heated by the heat of the measurement object 100, and the pillars 22 and the auxiliary member 13 are expanded in the vertical direction. Since the base portion 11 and the support frame 22 are fixed to the installation surface 200, the support portion 22 is expanded upward. Further, since the upper frame 23 to which the auxiliary member 13 is fixed is fixed to the support post 22, the auxiliary member 13 is inflated in the downward direction with respect to the upper frame 23.

且支柱22及輔助構件13,雖具有不同的線形膨脹係數,但是因為各長度是設定成成為相同的膨脹量的L1、L2,所以支柱22及輔助構件13是由相同膨脹量各別朝上下方向膨脹。結果,藉由輔助構件13的膨脹,被固定於輔助構件13的測距儀12是只有與支柱22的膨脹量 相同的量朝下方移動,使一對測距儀12的間隙一定地被保持。 The pillars 22 and the auxiliary members 13 have different linear expansion coefficients. However, since the lengths are L1 and L2 which are set to have the same amount of expansion, the pillars 22 and the auxiliary members 13 are vertically moved from the same amount of expansion. Swell. As a result, the range finder 12 fixed to the auxiliary member 13 by the expansion of the auxiliary member 13 is only the amount of expansion with the struts 22. The same amount is moved downward so that the gap of the pair of range finder 12 is held constant.

一對測距儀12,是各別測量至通過的測量對象100為止的距離,將測量到的資訊朝控制部15發訊。控制部15,是從:由校正裝置14檢出的一對測距儀12之間的距離、及收訊到的從各測距儀12至測量對象100為止的距離的和,的差,將測量對象100的厚度導出。又,例如,校正裝置14,是在測量對象100的測量之前,預先測量一對測距儀12之間的距離,朝控制部15將資訊發訊。這些的測量,是在測量對象100的給進方向的一部分或是全處進行,將測量對象100的厚度測量。 The pair of distance measuring devices 12 are distances measured to the passing measurement target 100, and the measured information is transmitted to the control unit 15. The control unit 15 is the difference between the distance between the pair of range finder 12 detected by the correction device 14 and the sum of the distances from the range finder 12 to the measurement target 100 received. The thickness of the measurement object 100 is derived. Further, for example, the correction device 14 measures the distance between the pair of distance measuring devices 12 in advance before the measurement of the measurement target 100, and transmits the information to the control unit 15. These measurements are made in a part or all of the feeding direction of the measuring object 100, and the thickness of the measuring object 100 is measured.

依據如此構成的第1實施例的測量裝置1的話,在一對測距儀12的對向的方向,藉由將支柱22及輔助構件13的由熱所產生的膨脹量作成相同,將支柱22的膨脹藉由固定有測距儀12的輔助構件13的膨脹抵消,就可以使一對測距儀12的間隙成為一定。藉由這些,測量裝置1,是成為可藉由一對測距儀12,將測量對象100由高精度測量。 According to the measuring device 1 of the first embodiment configured as described above, the strut 22 is formed by the same amount of expansion by the heat of the strut 22 and the auxiliary member 13 in the direction opposite to the pair of distance measuring devices 12. The expansion is offset by the expansion of the auxiliary member 13 to which the range finder 12 is fixed, so that the gap between the pair of distance meters 12 can be made constant. With these, the measuring device 1 is such that the measuring object 100 can be measured with high precision by a pair of distance measuring devices 12.

如上述,依據第1實施例的測量裝置1的話,即使藉由熱使支柱22的長度變動,仍可以由高精度將測量對象100的厚度測量。 As described above, according to the measuring apparatus 1 of the first embodiment, even if the length of the strut 22 is changed by heat, the thickness of the measuring object 100 can be measured with high precision.

(第2實施例) (Second embodiment)

接著,對於第2實施例的測量裝置1A,使用第2圖 說明。 Next, with respect to the measuring device 1A of the second embodiment, the second drawing is used. Description.

第2圖,是顯示第2實施例的測量裝置1A的構成的說明圖。又,在第2實施例的測量裝置1A中,對於與上述的第1實施例的測量裝置1同樣的構成附加同一符號,省略其詳細的說明。 Fig. 2 is an explanatory view showing the configuration of the measuring device 1A of the second embodiment. In the measurement device 1A of the second embodiment, the same components as those of the measurement device 1 of the above-described first embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted.

測量裝置1A,具備:使測量對象100通過的框狀的基部11A、及設在基部11A且彼此對向配置的一對測距儀12、及校正裝置14、及控制部15。 The measuring device 1A includes a frame-shaped base portion 11A through which the measurement target 100 passes, a pair of distance measuring devices 12 disposed on the base portion 11A and opposed to each other, a correction device 14, and a control portion 15.

基部11A,具備:下框21、及設在下框21的一側面或是一對側面的一或是一對支柱22、及設在支柱22的輔助構件13A、及設在輔助構件13A的上框23。基部11A,是正面視方形框狀,或是C字狀。在本實施例中,基部11A,是使用具有一對支柱22的方形框狀的構成並如以下說明。 The base portion 11A includes a lower frame 21, one or a pair of side walls 22 provided on one side surface or a pair of side surfaces of the lower frame 21, an auxiliary member 13A provided on the support post 22, and an upper frame provided on the auxiliary member 13A. twenty three. The base portion 11A has a square frame shape in front or a C shape. In the present embodiment, the base portion 11A has a square frame shape having a pair of pillars 22 and is described below.

輔助構件13A,是例如板狀。輔助構件13A,其上端被固定於支柱22的上端,下端被固定於上框23。又,輔助構件13A,是例如,其上端面是藉由固定部31被固定於支柱22的上端面,與上框23對向的主面的下端是被固定於上框23的側面。固定部31,可以是例如,板材及螺栓等的機械性地固定的構件、或焊接部等的機械性地固定的構件。 The auxiliary member 13A is, for example, a plate shape. The auxiliary member 13A has an upper end fixed to the upper end of the stay 22 and a lower end fixed to the upper frame 23. Further, the auxiliary member 13A is, for example, an upper end surface thereof is fixed to the upper end surface of the support post 22 by the fixing portion 31, and a lower end of the main surface opposed to the upper frame 23 is fixed to the side surface of the upper frame 23. The fixing portion 31 may be, for example, a mechanically fixed member such as a plate material or a bolt, or a mechanically fixed member such as a welded portion.

輔助構件13A,是具有與支柱22的線形膨脹係數相異的線形膨脹係數的材料,具體而言,由具有比支柱22的線形膨脹係數更高的線形膨脹係數的材料所構 成。且,輔助構件13A的一對測距儀12的對向的方向的長度,是具有與支柱22的藉由熱朝一對測距儀12的對向的方向膨脹的膨脹量成為相同的膨脹量的長度。在此,一對測距儀12的對向的方向,是上下方向,即高度方向。 The auxiliary member 13A is a material having a linear expansion coefficient different from the linear expansion coefficient of the strut 22, specifically, a material having a linear expansion coefficient higher than the linear expansion coefficient of the strut 22. to make. Further, the length of the pair of distance measuring devices 12 of the auxiliary member 13A in the opposing direction is the same as the amount of expansion of the pillars 22 which is expanded by the direction in which the pair of distance gauges 12 are opposed to each other by the heat. length. Here, the direction in which the pair of range finder 12 opposes is the up and down direction, that is, the height direction.

以下,對於支柱22及輔助構件13A的材料及長度具體說明。如第2圖所示,將支柱22的上下方向的長度設成L1,將輔助構件13A的上下方向的長度設成L2。支柱22的材料是線形膨脹係數M1的第1材料,輔助構件13的材料是比線形膨脹係數M1更大的線形膨脹係數M2(M1<M2)的第2材料。此時,輔助構件13的長度L2,是L2=L1/(M2/M1)。 Hereinafter, the materials and lengths of the pillars 22 and the auxiliary members 13A will be specifically described. As shown in Fig. 2, the length of the support member 22 in the vertical direction is set to L1, and the length of the auxiliary member 13A in the vertical direction is set to L2. The material of the pillars 22 is the first material of the linear expansion coefficient M1, and the material of the auxiliary member 13 is the second material having a linear expansion coefficient M2 (M1 < M2) larger than the linear expansion coefficient M1. At this time, the length L2 of the auxiliary member 13 is L2 = L1/(M2/M1).

例如,支柱22的材料是鐵材料,輔助構件13是鋁材料的情況時,鋁材料的線形膨脹係數因為是鐵材料的線形膨脹係數的約2倍,所以輔助構件13A的上下方向的長度L2,是L2=L1/2。藉由作成這種構成,支柱22及輔助構件13A的由熱所產生的膨脹量是成為大致相同。 For example, when the material of the pillars 22 is an iron material and the auxiliary member 13 is an aluminum material, the linear expansion coefficient of the aluminum material is about twice the linear expansion coefficient of the iron material, so the length L2 of the auxiliary member 13A in the up and down direction, It is L2=L1/2. With such a configuration, the amount of expansion of the strut 22 and the auxiliary member 13A by heat is substantially the same.

上框23,是方形板狀。上框23,是例如,只有輔助構件13A的厚度比下框21更小地構成。 The upper frame 23 is a square plate shape. The upper frame 23 is configured, for example, only the thickness of the auxiliary member 13A is smaller than that of the lower frame 21.

一對測距儀12,是彼此對向配置。一對測距儀12,其一方被固定於下框21的上面,另一方被固定於上框23。 A pair of range finder 12 are arranged opposite each other. One pair of range finder 12 is fixed to the upper surface of the lower frame 21 and the other to the upper frame 23.

如此構成的測量裝置1A,是與上述的測量裝置1同樣地,成為可將一對測距儀12之間的間隙一定地保持。具體而言,藉由測量對象100的熱,使基部11A被 加熱,使支柱22及輔助構件13A朝上下方向膨脹的話,基部11A,因為是下框21及支柱22被固定於設置面200,所以支柱22是朝上方向膨脹。且,輔助構件13A,因為被固定於支柱22,所以從固定部31朝下方向膨脹。 In the measurement device 1A configured as described above, similarly to the above-described measurement device 1, the gap between the pair of distance measuring devices 12 can be kept constant. Specifically, by measuring the heat of the object 100, the base 11A is When the pillars 22 and the auxiliary members 13A are heated to expand in the vertical direction, the base portion 11A is fixed to the installation surface 200 by the lower frame 21 and the pillars 22, so that the pillars 22 are expanded upward. Further, since the auxiliary member 13A is fixed to the stay 22, it is swollen from the fixed portion 31 in the downward direction.

且支柱22及輔助構件13A,雖具有不同的線形膨脹係數,但是因為各長度設定成相同的膨脹量的L1、L2,所以支柱22及輔助構件13A是由相同膨脹量各別朝上下方向膨脹。結果,藉由輔助構件13A的膨脹,被固定於輔助構件13A的上框23及被固定於上框23的測距儀12是只有與支柱22的膨脹量相同的量朝下方移動,使一對測距儀12的間隙一定地被保持。 Further, the pillars 22 and the auxiliary members 13A have different linear expansion coefficients. However, since the lengths are set to L1 and L2 of the same expansion amount, the pillars 22 and the auxiliary members 13A are respectively expanded in the vertical direction by the same amount of expansion. As a result, by the expansion of the auxiliary member 13A, the upper frame 23 fixed to the auxiliary member 13A and the range finder 12 fixed to the upper frame 23 are moved downward only in the same amount as the expansion amount of the stay 22, so that a pair The gap of the range finder 12 is necessarily maintained.

依據如此構成的第2實施例的測量裝置1A的話,在一對測距儀12的對向的方向,支柱22及輔助構件13A的由熱所產生的膨脹量可成為相同。由此,測量裝置1A,是藉由將支柱22的上方向的膨脹,與被固定設有測距儀12的上框23下的輔助構件13A的下方向的膨脹抵消,就可以將一對測距儀12的間隙成為一定。藉由這些,測量裝置1A,是成為可藉由一對測距儀12,將測量對象100由高精度測量。 According to the measuring apparatus 1A of the second embodiment configured as above, the amount of expansion by the heat of the strut 22 and the auxiliary member 13A can be the same in the direction in which the pair of distance measuring devices 12 oppose each other. Thereby, the measuring device 1A can cancel the expansion in the vertical direction of the support column 22 and the downward expansion of the auxiliary member 13A under the upper frame 23 to which the distance measuring device 12 is fixed, so that a pair of tests can be performed. The gap of the distance meter 12 becomes constant. With these, the measuring device 1A makes it possible to measure the measuring object 100 with high precision by a pair of distance measuring devices 12.

(第3實施例) (Third embodiment)

接著,對於第3實施例的測量裝置1B,使用第3圖說明。 Next, the measurement apparatus 1B of the third embodiment will be described using FIG.

第3圖,是顯示第3實施例的測量裝置1B的構成的 說明圖。又,在第3實施例的測量裝置1B中,對於與上述的第1實施例的測量裝置1及第2實施例的測量裝置1A同樣的構成附加同一符號,省略其詳細的說明。 Fig. 3 is a view showing the configuration of the measuring device 1B of the third embodiment. Illustrating. In the measurement device 1B of the third embodiment, the same components as those of the measurement device 1 of the first embodiment and the measurement device 1A of the second embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted.

測量裝置1B,具備:讓測量對象100通過的框狀的基部11B、及設在基部11B且彼此對向配置的一對測距儀12、及校正裝置14、及控制部15。 The measuring device 1B includes a frame-shaped base portion 11B through which the measurement target 100 passes, a pair of distance measuring devices 12 disposed on the base portion 11B and opposed to each other, a correction device 14, and a control portion 15.

基部11B,具備:下框21、及設在下框21的一側面或是一對側面的一或是一對支柱22B、及設在輔助構件13B的上框23。基部11B,是正面視方形框狀,或是C字狀。在本實施例中,基部11B,是使用具有一對支柱22B的方形框狀的構成並如以下說明。 The base portion 11B includes a lower frame 21, one or a pair of side walls 22B provided on one side surface or a pair of side surfaces of the lower frame 21, and an upper frame 23 provided on the auxiliary member 13B. The base portion 11B has a square frame shape in front or a C shape. In the present embodiment, the base portion 11B is formed in a square frame shape having a pair of pillars 22B and will be described below.

支柱22B,具備:被固定於下框21的第1支柱22a、及被固定於第1支柱22a的輔助構件13B、及被固定於輔助構件13B的第2支柱22b。支柱22B的一對測距儀12的對向的方向的長度,是具有讓測量對象100可通過一對測距儀12的間隙,且,各測距儀12及測量對象100可分離的長度。 The pillar 22B includes a first pillar 22a that is fixed to the lower frame 21, an auxiliary member 13B that is fixed to the first pillar 22a, and a second pillar 22b that is fixed to the auxiliary member 13B. The length of the pair of distance measuring devices 12 of the strut 22B in the opposing direction is a length having a gap in which the measuring object 100 can pass through the pair of distance measuring devices 12, and each of the distance measuring devices 12 and the measuring object 100 can be separated.

第1支柱22a,是方形的板狀或是棒狀。第1支柱22a,是下框21的側面被固定於下端的側面,輔助構件13B被固定於上端。第1支柱22a,是例如,被固定於設置面200。第2支柱22b,是方形的板狀或是棒狀。第2支柱22b,是上框23的側面被固定於上端的側面,輔助構件13B被固定於下端。 The first pillar 22a has a square plate shape or a rod shape. The first pillar 22a is a side surface on which the side surface of the lower frame 21 is fixed to the lower end, and the auxiliary member 13B is fixed to the upper end. The first pillar 22a is fixed to the installation surface 200, for example. The second pillar 22b is a square plate shape or a rod shape. The second pillar 22b is a side surface on which the side surface of the upper frame 23 is fixed to the upper end, and the auxiliary member 13B is fixed to the lower end.

輔助構件13B,是例如板狀。輔助構件13B, 其上端被固定於第1支柱22a的上端,下端被固定於第2支柱22b的下端。又,輔助構件13B,是例如,上端面是藉由固定部31被固定於第1支柱22a的上端面,下端面是藉由固定部31被固定於第2支柱22b的下端面。 The auxiliary member 13B is, for example, a plate shape. Auxiliary member 13B, The upper end is fixed to the upper end of the first post 22a, and the lower end is fixed to the lower end of the second post 22b. Further, in the auxiliary member 13B, for example, the upper end surface is fixed to the upper end surface of the first pillar 22a by the fixing portion 31, and the lower end surface is fixed to the lower end surface of the second pillar 22b by the fixing portion 31.

輔助構件13B,是具有與第1支柱22a及第2支柱22b的線形膨脹係數相異的線形膨脹係數的材料,具體而言,由具有比第1支柱22a及第2支柱22b的線形膨脹係數更高的線形膨脹係數的材料所構成。且,輔助構件13B的一對測距儀12的對向的方向的長度,是具有與第1支柱22a及第2支柱22b的藉由熱朝一對測距儀12的對向的方向膨脹的膨脹量相同成為膨脹量的長度。在此,一對測距儀12的對向的方向,是上下方向,即高度方向。 The auxiliary member 13B is a material having a linear expansion coefficient different from the linear expansion coefficient of the first pillar 22a and the second pillar 22b, and specifically has a linear expansion coefficient larger than that of the first pillar 22a and the second pillar 22b. A material with a high coefficient of linear expansion. Further, the length of the pair of distance measuring devices 12 of the auxiliary member 13B in the opposing direction is such that the first column 22a and the second column 22b are inflated in the direction in which the pair of distance measuring devices 12 oppose each other. The same amount is the length of the amount of expansion. Here, the direction in which the pair of range finder 12 opposes is the up and down direction, that is, the height direction.

以下,對於第1支柱22a、第2支柱22b及輔助構件13B的材料及長度具體說明。如第3圖所示,將第1支柱22a的上下方向的長度設成L11,將第2支柱22b的上下方向的長度設成L21,將輔助構件13B的上下方向的長度設成L2。第1支柱22a及第2支柱22b的材料是線形膨脹係數M1的第1材料,輔助構件13B的材料是比線形膨脹係數M1更大的線形膨脹係數M2(M1<M2)的第2材料。此時,輔助構件13B的長度L2,是L2=(L11+L12)/(M2/M1)。 Hereinafter, the materials and lengths of the first pillar 22a, the second pillar 22b, and the auxiliary member 13B will be specifically described. As shown in FIG. 3, the length of the first pillar 22a in the vertical direction is L11, the length of the second pillar 22b in the vertical direction is L21, and the length of the auxiliary member 13B in the vertical direction is L2. The material of the first pillar 22a and the second pillar 22b is a first material having a linear expansion coefficient M1, and the material of the auxiliary member 13B is a second material having a linear expansion coefficient M2 (M1 < M2) larger than the linear expansion coefficient M1. At this time, the length L2 of the auxiliary member 13B is L2 = (L11 + L12) / (M2 / M1).

例如,第1支柱22a及第2支柱22b的材料是鐵材料,輔助構件13B是鋁材料的情況時,鋁材料的線形膨脹係數因為是鐵材料的線形膨脹係數的約2倍,所以 輔助構件13B的上下方向的長度L2,是L2=(L11+L12)/2。例如,將L11及L12作成同一長度的話,第1支柱22a、第2支柱22b及輔助構件13B的上下方向的長度是大致相等。藉由作成這種構成,第1支柱22a及第2支柱22b的由熱所產生的膨脹量的和、及輔助構件13B的由熱所產生的膨脹量是成為大致相同。 For example, when the material of the first pillar 22a and the second pillar 22b is an iron material and the auxiliary member 13B is an aluminum material, since the linear expansion coefficient of the aluminum material is about twice the linear expansion coefficient of the iron material, The length L2 of the auxiliary member 13B in the vertical direction is L2 = (L11 + L12)/2. For example, when L11 and L12 are formed to have the same length, the lengths of the first pillar 22a, the second pillar 22b, and the auxiliary member 13B in the vertical direction are substantially equal. With such a configuration, the sum of the amounts of expansion by the heat of the first support 22a and the second support 22b and the amount of expansion by the heat of the auxiliary member 13B are substantially the same.

上框23,是方形板狀。上框23,是例如,與下框21大致同一形狀。 The upper frame 23 is a square plate shape. The upper frame 23 is, for example, substantially the same shape as the lower frame 21.

一對測距儀12,是彼此對向配置。一對測距儀12,其一方被固定於下框21的上面,另一方被固定於上框23的下面。 A pair of range finder 12 are arranged opposite each other. One pair of range finder 12 is fixed to the upper surface of the lower frame 21, and the other is fixed to the lower surface of the upper frame 23.

如此構成的測量裝置1B,是與上述的測量裝置1、1A同樣地,成為可將一對測距儀12之間的間隙一定地保持。具體而言,藉由測量對象100的熱,使基部11B被加熱,支柱22B朝上下方向膨脹的話,基部11B,因為是下框21及第1支柱22a被固定於設置面200,所以第1支柱22a朝上方向膨脹。輔助構件13B的上端,因為是被固定於第1支柱22a的上端,所以輔助構件13B是從第1支柱22a的上端朝下方向膨脹。且,第2支柱22b的下端,因為是被固定於輔助構件13B的下端,所以第2支柱22b,是從輔助構件13B的下端朝上方向膨脹。 In the measurement device 1B configured as described above, similarly to the above-described measurement devices 1 and 1A, the gap between the pair of distance measuring devices 12 can be kept constant. Specifically, when the base portion 11B is heated by the heat of the measuring object 100 and the pillar 22B is expanded in the vertical direction, the base portion 11B is fixed to the installation surface 200 by the lower frame 21 and the first pillar 22a, so the first pillar 22a expands upwards. Since the upper end of the auxiliary member 13B is fixed to the upper end of the first stay 22a, the auxiliary member 13B is expanded downward from the upper end of the first stay 22a. Further, since the lower end of the second pillar 22b is fixed to the lower end of the auxiliary member 13B, the second pillar 22b is expanded upward from the lower end of the auxiliary member 13B.

且第1支柱22a及第2支柱22b以及輔助構件13B,雖具有不同的線形膨脹係數,但是設定成第1支柱22a及第2支柱22b的長度的和、及輔助構件13B的長 度是成為相同膨脹量的L11、L12、L2。因此,第1支柱22a及第2支柱22b以及輔助構件13A是由相同膨脹量各別朝上下方向膨脹。結果,藉由輔助構件13A的膨脹,被固定於輔助構件13A的上框23及被固定於上框23的測距儀12,是只有與朝上方膨脹的第1支柱22a及第2支柱22b的膨脹量相同的量朝下方移動,使一對測距儀12的間隙一定地被保持。 The first pillar 22a, the second pillar 22b, and the auxiliary member 13B have different linear expansion coefficients, but are set to have a length of the first pillar 22a and the second pillar 22b, and a length of the auxiliary member 13B. The degree is L11, L12, and L2 which are the same amount of expansion. Therefore, the first pillar 22a, the second pillar 22b, and the auxiliary member 13A are respectively expanded in the vertical direction by the same amount of expansion. As a result, the upper frame 23 fixed to the auxiliary member 13A and the range finder 12 fixed to the upper frame 23 by the expansion of the auxiliary member 13A are only the first support 22a and the second support 22b which are inflated upward. The amount of the same amount of expansion moves downward, so that the gap of the pair of range finder 12 is kept constant.

依據如此構成的第3實施例的測量裝置1B的話,在一對測距儀12的對向的方向中,第1支柱22a及第2支柱22b以及輔助構件13B的由熱將所產生的膨脹量可成為相同。由此,測量裝置1B,是將第1支柱22a及第2支柱22b的上方向的膨脹,由輔助構件13B的下方向的膨脹抵消,就可以將一對測距儀12的間隙成為一定。藉由這些,測量裝置1B,是成為可藉由一對測距儀12,將測量對象100由高精度測量。 According to the measuring device 1B of the third embodiment configured as described above, the amount of expansion of the first strut 22a, the second strut 22b, and the auxiliary member 13B due to heat in the opposing direction of the pair of distance measuring devices 12 Can be the same. As a result, the measurement device 1B can expand the gap between the pair of distance measuring devices 12 by expanding the upward direction of the first support 22a and the second support 22b and canceling the expansion of the auxiliary member 13B in the downward direction. With these, the measuring device 1B is such that the measuring object 100 can be measured with high precision by a pair of distance measuring devices 12.

(第4實施例) (Fourth embodiment)

接著,對於第4實施例的測量裝置1C,使用第4圖說明。 Next, the measurement apparatus 1C of the fourth embodiment will be described using FIG.

第1圖,是顯示第1實施例的測量裝置1的構成的說明圖。又,在第4實施例的測量裝置1C中,對於與上述的第1實施例的測量裝置1同樣的構成附加同一符號,省略其詳細的說明。 Fig. 1 is an explanatory view showing the configuration of the measuring device 1 of the first embodiment. In the measurement device 1C of the fourth embodiment, the same components as those of the measurement device 1 of the above-described first embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted.

測量裝置1C,具備:讓測量對象100通過的 框狀的基部11、及設在基部11且彼此對向配置的一對測距儀12、及設在基部11及一方的測距儀12之間的輔助構件13C、及測量一對測距儀12的間隙的距離的校正裝置14、及透過訊號線99各別與一對測距儀12及校正裝置14連接的控制部15。 The measuring device 1C includes: a measurement object 100 is passed through a frame-shaped base portion 11 and a pair of distance measuring devices 12 disposed on the base portion 11 and facing each other, and an auxiliary member 13C provided between the base portion 11 and one of the range finder 12, and a pair of distance measuring devices The correction device 14 for the gap of 12 gaps and the control unit 15 for transmitting the signal line 99 to the pair of range finder 12 and the correction device 14 respectively.

輔助構件13C是被固定下框21的上面。 The auxiliary member 13C is fixed to the upper surface of the lower frame 21.

一對測距儀12,是彼此對向配置。一對測距儀12,其一方被固定於輔助構件13C,另一方被固定於上框23的下面。 A pair of range finder 12 are arranged opposite each other. One pair of range finder 12 is fixed to the auxiliary member 13C, and the other is fixed to the lower surface of the upper frame 23.

輔助構件13C,是例如方形板狀或是塊體狀。輔助構件13C,其相對的主面的一方被固定於下框21的上面,測距儀12被固定於該主面的另一方。換言之,一對測距儀12的一方,是與一對測距儀12的另一方對向,且,只有規定的距離分離,在本身及下框21之間透過輔助構件13C被固定於下框21。 The auxiliary member 13C is, for example, a square plate shape or a block shape. The auxiliary member 13C has one of the opposing main faces fixed to the upper surface of the lower frame 21, and the range finder 12 is fixed to the other of the main faces. In other words, one of the pair of range finder 12 faces the other of the pair of range finder 12, and is separated by a predetermined distance, and is fixed to the lower frame through the auxiliary member 13C between itself and the lower frame 21. twenty one.

輔助構件13C,是具有與支柱22的線形膨脹係數相異的線形膨脹係數的材料,具體而言,由具有比支柱22的線形膨脹係數更高的線形膨脹係數的材料所構成。且,輔助構件13C的一對測距儀12的對向的方向的長度,是具有與支柱22的藉由熱朝一對測距儀12的對向的方向膨脹的膨脹量成為相同的膨脹量的長度。在此,一對測距儀12的對向的方向,是上下方向,即高度方向。 The auxiliary member 13C is a material having a linear expansion coefficient different from the linear expansion coefficient of the strut 22, and specifically, a material having a linear expansion coefficient higher than the linear expansion coefficient of the strut 22. Further, the length of the pair of distance measuring devices 12 of the auxiliary member 13C in the opposing direction is the same as the amount of expansion of the pillars 22 which is expanded by the direction in which the pair of distance gauges 12 are opposed to each other by the heat. length. Here, the direction in which the pair of range finder 12 opposes is the up and down direction, that is, the height direction.

以下,對於支柱22及輔助構件13C的材料及長度具體說明。如第4圖所示,將支柱22的上下方向的 長度設成L1,將輔助構件13C的上下方向的長度設成L2。支柱22的材料是線形膨脹係數M1的第1材料,輔助構件13C的材料是比線形膨脹係數M1更大的線形膨脹係數M2(M1<M2)的第2材料。此時,輔助構件13C的長度L2,是L2=L1/(M2/M1)。 Hereinafter, the materials and lengths of the pillars 22 and the auxiliary members 13C will be specifically described. As shown in Fig. 4, the up and down direction of the pillar 22 is The length is set to L1, and the length of the auxiliary member 13C in the vertical direction is set to L2. The material of the strut 22 is the first material having the linear expansion coefficient M1, and the material of the auxiliary member 13C is the second material having a linear expansion coefficient M2 (M1 < M2) larger than the linear expansion coefficient M1. At this time, the length L2 of the auxiliary member 13C is L2 = L1/(M2/M1).

例如,支柱22的材料是鐵材料,輔助構件13C是橡膠材料的情況時,橡膠材料的線形膨脹係數因為是鐵材料的線形膨脹係數的約10倍,所以輔助構件13C的上下方向的長度L2,是L2=L1/10。藉由作成這種構成,支柱22及輔助構件13C的由熱所產生的膨脹量是成為大致相同。 For example, when the material of the pillar 22 is an iron material and the auxiliary member 13C is a rubber material, the linear expansion coefficient of the rubber material is about 10 times the linear expansion coefficient of the iron material, so the length L2 of the auxiliary member 13C in the up and down direction, It is L2=L1/10. With such a configuration, the amount of expansion of the strut 22 and the auxiliary member 13C by heat is substantially the same.

依據如此構成的測量裝置1C的話,可達成與上述的測量裝置1同樣的效果。即,在一對測距儀12的對向的方向中,藉由將支柱22及輔助構件13C的由熱所產生的膨脹量作成相同,即使支柱22朝上方膨脹,輔助構件13C仍可朝上方由相同膨脹量膨脹。 According to the measuring device 1C configured as described above, the same effects as those of the measuring device 1 described above can be achieved. That is, in the opposing direction of the pair of distance measuring devices 12, the expansion amount by the heat of the strut 22 and the auxiliary member 13C is made the same, and even if the strut 22 is expanded upward, the auxiliary member 13C can still face upward. Expanded by the same amount of expansion.

因此,設有測距儀12的上框23即使朝上方移動,成對的測距儀12,也可藉由輔助構件13C朝上方移動。如此,將支柱22的上方向的膨脹,由輔助構件13C的上方向的膨脹抵消,就可以使一對測距儀12的間隙成為一定。且,測量裝置1C,是藉由在輔助構件13C使用橡膠構件,就成為可將輔助構件13C的厚度變薄,結果,成為可將測量裝置1C小型化。藉由這些,測量裝置1,是成為可藉由一對測距儀12,將測量對象100由高精 度測量。 Therefore, even if the upper frame 23 provided with the range finder 12 moves upward, the pair of distance measuring instruments 12 can be moved upward by the auxiliary member 13C. As described above, the expansion of the strut 22 in the upward direction is offset by the expansion of the auxiliary member 13C in the upward direction, so that the gap between the pair of distance measuring devices 12 can be made constant. In the measuring device 1C, the thickness of the auxiliary member 13C can be reduced by using the rubber member in the auxiliary member 13C. As a result, the measuring device 1C can be downsized. With these, the measuring device 1 is made possible by the pair of distance measuring devices 12, and the measuring object 100 is made of high precision. Degree measurement.

(第5實施例) (Fifth Embodiment)

接著,對於第5實施例的測量裝置1D,使用第5圖說明。 Next, the measurement apparatus 1D of the fifth embodiment will be described using FIG.

第5圖,是顯示第5實施例的測量裝置1D的構成的說明圖。又,在第5實施例的測量裝置1D中,對於與上述的第1實施例的測量裝置1同樣的構成附加同一符號,省略其詳細的說明。 Fig. 5 is an explanatory view showing the configuration of the measuring device 1D of the fifth embodiment. In the measurement device 1D of the fifth embodiment, the same components as those of the measurement device 1 of the above-described first embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted.

測量裝置1D,具備:讓測量對象100通過的框狀的基部11D、及設在基部11D且彼此對向配置的一對測距儀12、及測量一對測距儀12的間隙的距離的校正裝置14、及透過訊號線99各別與一對測距儀12及校正裝置14連接的控制部15。且,測量裝置1D,是與上述的測量裝置1相異的構成,不具有輔助構件13。 The measuring device 1D includes a frame-shaped base portion 11D through which the measurement target 100 passes, a pair of distance measuring devices 12 disposed on the base portion 11D and opposed to each other, and a correction for measuring the distance between the gaps of the pair of distance measuring devices 12 The device 14 and the control unit 15 connected to the pair of range finder 12 and the correction device 14 via the signal line 99 are respectively provided. Further, the measuring device 1D is different from the above-described measuring device 1, and does not have the auxiliary member 13.

基部11D,具備:下框21、及設在下框21的一對側面的一對支柱22、及設在支柱22的上框23。基部11D,是正面視方形框狀。且,基部11D,是至少下框21及上框23具有相同線形膨脹係數的材料,且相同形狀。 The base portion 11D includes a lower frame 21, a pair of pillars 22 provided on a pair of side faces of the lower frame 21, and an upper frame 23 provided on the pillars 22. The base portion 11D has a square frame shape in front view. Further, the base portion 11D is a material having at least the lower linear expansion coefficient of the lower frame 21 and the upper frame 23, and has the same shape.

基部11D,是被配置於設置面200。基部11D,其一方的支柱22的下面被固定於設置面200,下框21及另一方的支柱22被支撐於設置面200。具體而言,基部11D,是使下框21及另一方的支柱22不被固定於設置面200,而是對於設置面200,朝設置面200的面方向 可移動地構成。 The base portion 11D is disposed on the installation surface 200. In the base portion 11D, the lower surface of one of the pillars 22 is fixed to the installation surface 200, and the lower frame 21 and the other pillar 22 are supported by the installation surface 200. Specifically, in the base portion 11D, the lower frame 21 and the other pillar 22 are not fixed to the installation surface 200, but the installation surface 200 faces the surface of the installation surface 200. It is movably constructed.

例如,基部11D,是藉由板構件及螺栓等的固定部32使一方的支柱22被固定。且,例如,基部11D,是使下框21及另一方的支柱22藉由軌道和腳輪等對於設置面200可移動地構成。設置面200,是例如,設置測量裝置1的工場等的地面等。 For example, in the base portion 11D, one of the pillars 22 is fixed by the fixing portion 32 such as a plate member or a bolt. Further, for example, the base portion 11D is configured such that the lower frame 21 and the other pillar 22 are movably attached to the installation surface 200 by rails, casters, or the like. The installation surface 200 is, for example, a floor or the like in which a factory or the like of the measuring device 1 is installed.

一對測距儀12,是彼此對向配置。一對測距儀12,其一方被固定於下框21的上面,另一方被固定於上框23的下面。對向的一對測距儀12的間隙,是測量對象100可通過的長度。 A pair of range finder 12 are arranged opposite each other. One pair of range finder 12 is fixed to the upper surface of the lower frame 21, and the other is fixed to the lower surface of the upper frame 23. The gap between the opposing pair of range finder 12 is the length through which the measurement object 100 can pass.

接著,說明使用如此構成的測量裝置1的測量對象100的測量。 Next, the measurement of the measuring object 100 using the measuring device 1 thus constructed will be described.

首先,將藉由例如熱處理被加熱的測量對象100藉由測量裝置1測量的情況時,藉由輸送帶等的搬運裝置使測量對象100通過一對測距儀12間。 First, when the measurement object 100 heated by, for example, heat treatment is measured by the measurement device 1, the measurement object 100 is passed between the pair of distance meters 12 by a conveyance device such as a conveyor belt.

此時,藉由測量對象100的熱,使基部11D被加熱,下框21及上框23是朝下框21及上框23的固定有測距儀12的主面的面方向,換言之,朝與測距儀12的對向的方向垂直交叉的方向,進一步換言之朝橫方向膨脹。 At this time, the base portion 11D is heated by the heat of the measuring object 100, and the lower frame 21 and the upper frame 23 are facing the surface of the lower frame 21 and the upper frame 23 to which the main surface of the range finder 12 is fixed, in other words, The direction perpendicular to the direction in which the range finder 12 is perpendicularly intersects, and in other words, expands in the lateral direction.

基部11D,因為其一方的支柱22被固定於設置面200,下框21及另一方的支柱22是可移動地被支撐於設置面200,所以下框21及上框23,是如第5圖二點鎖線所示,朝橫方向膨脹。結果,另一方的支柱22,是 朝從橫方向的一方,即,一方的支柱22分離的方向膨脹,下框21及上框23,是維持板狀。 In the base portion 11D, since one of the pillars 22 is fixed to the installation surface 200, the lower frame 21 and the other pillar 22 are movably supported by the installation surface 200, and the lower frame 21 and the upper frame 23 are as shown in FIG. As shown by the two-point lock line, it expands in the horizontal direction. As a result, the other pillar 22 is One of the lateral direction, that is, one of the pillars 22 is expanded, and the lower frame 21 and the upper frame 23 are maintained in a plate shape.

具體說明的話,假設,一對支柱22是被作成固定於設置面200的話,藉由熱而膨脹的下框21及上框23,因為其一對側面是被固定於一對支柱22,所以只有膨脹的量朝上下方向變形。藉由此變形,而使一對測距儀12之間的距離變大,或是變小。 Specifically, if the pair of struts 22 are fixed to the installation surface 200, the lower frame 21 and the upper frame 23 which are inflated by heat are fixed to the pair of struts 22, so that only The amount of expansion is deformed in the up and down direction. By this deformation, the distance between the pair of range finder 12 becomes larger or smaller.

對於此,本實施例的基部11D,是將一方的支柱22透過固定部32固定在設置面200,將另一方的支柱22及下框21不固定在設置面200。由此,防止下框21及上框23變形,且,因為下框21及上框23是藉由作成相同線形膨脹係數及同一形狀,成為相同膨脹量,所以一對測距儀12,是朝橫方向只有同量地移動。因此,防止通過的測量對象100的由熱所產生的變形,且,測距儀12被維持於彼此對向的狀態。 In the base portion 11D of the present embodiment, one of the pillars 22 is fixed to the installation surface 200 through the fixing portion 32, and the other pillars 22 and the lower frame 21 are not fixed to the installation surface 200. Thereby, the lower frame 21 and the upper frame 23 are prevented from being deformed, and since the lower frame 21 and the upper frame 23 are formed into the same linear expansion coefficient and the same shape and have the same expansion amount, the pair of distance measuring devices 12 are The horizontal direction moves only by the same amount. Therefore, the deformation of the passing measurement object 100 due to heat is prevented, and the range finder 12 is maintained in a state of being opposed to each other.

接著,一對測距儀12,是各別測量至通過的測量對象100為止的距離,將測量到的資訊朝控制部15發訊。控制部15,是從:由校正裝置14檢出的一對測距儀12之間的距離、及收訊到的從各測距儀12至測量對象100為止的距離的和,的差,將測量對象100的厚度導出。又,例如,校正裝置14,是在測量對象100的測量之前,預先測量一對測距儀12之間的距離,朝控制部15將資訊發訊。這些的測量,橫跨測量對象100的給進方向的一部分或是全部地進行,將測量對象100的厚度測量。 Next, the pair of distance measuring devices 12 are distances measured to the passing measurement target 100, and the measured information is transmitted to the control unit 15. The control unit 15 is the difference between the distance between the pair of range finder 12 detected by the correction device 14 and the sum of the distances from the range finder 12 to the measurement target 100 received. The thickness of the measurement object 100 is derived. Further, for example, the correction device 14 measures the distance between the pair of distance measuring devices 12 in advance before the measurement of the measurement target 100, and transmits the information to the control unit 15. These measurements are performed across a part or all of the feeding direction of the measuring object 100, and the thickness of the measuring object 100 is measured.

依據如此構成的第5實施例的測量裝置1D的話,藉由只有將一方的支柱22固定在設置面200,將下框21及另一方的支柱22可移動地支撐於設置面200上的構成,就可防止由熱所產生的下框21及上框23的變形發生。結果,可防止藉由熱發生的變形而使一對測距儀12的間隙變化。藉由這些,測量裝置1D,是成為可藉由一對測距儀12,將測量對象100由高精度測量。 According to the measuring device 1D of the fifth embodiment configured as described above, the lower frame 21 and the other pillar 22 are movably supported on the installation surface 200 by fixing only one of the pillars 22 to the installation surface 200. It is possible to prevent deformation of the lower frame 21 and the upper frame 23 caused by heat. As a result, the gap of the pair of range finder 12 can be prevented from being changed by the deformation of heat. With these, the measuring device 1D is such that the measuring object 100 can be measured with high precision by a pair of distance measuring devices 12.

(第6實施例) (Sixth embodiment)

接著,對於第6實施例的測量裝置1E,使用第6圖說明。 Next, the measurement apparatus 1E of the sixth embodiment will be described using FIG.

第6圖,是顯示第6實施例的測量裝置1E的構成的說明圖。又,在第6實施例的測量裝置1E中,對於與上述的第1實施例的測量裝置1及第5實施例的測量裝置1D同樣的構成附加同一符號,省略其詳細的說明。 Fig. 6 is an explanatory view showing the configuration of the measuring device 1E of the sixth embodiment. In the measurement device 1E of the sixth embodiment, the same components as those of the measurement device 1 of the first embodiment and the measurement device 1D of the fifth embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted.

測量裝置1E,具備:讓測量對象100通過的框狀的基部11D、及設在基部11D且彼此對向配置的一對測距儀12、及設在基部11D及一方的測距儀12之間的輔助構件13、及測量一對測距儀12的間隙的距離的校正裝置14、及透過訊號線99各別與一對測距儀12及校正裝置14連接的控制部15。 The measuring device 1E includes a frame-shaped base portion 11D through which the measurement target 100 passes, a pair of distance measuring devices 12 disposed on the base portion 11D and opposed to each other, and a distance between the base portion 11D and one of the range finder 12 The auxiliary member 13 and the correction device 14 for measuring the distance between the gaps of the pair of rangefinders 12 and the control unit 15 connected to the pair of range finder 12 and the correction device 14 via the signal line 99 are respectively provided.

一對測距儀12,是彼此對向配置。一對測距儀12,其一方被固定於下框21的上面,另一方被固定於輔助構件13。對向的一對測距儀12的間隙,是測量對象 100可通過的長度。 A pair of range finder 12 are arranged opposite each other. One of the pair of distance meters 12 is fixed to the upper surface of the lower frame 21, and the other is fixed to the auxiliary member 13. The gap between the opposite pair of range finder 12 is the measurement object The length that 100 can pass.

在此,下框21及上框23,是由具有相同線形膨脹係數的材料所構成,輔助構件13,是由具有比支柱22的線形膨脹係數更高的線形膨脹係數的材料所構成。 Here, the lower frame 21 and the upper frame 23 are made of a material having the same linear expansion coefficient, and the auxiliary member 13 is made of a material having a linear expansion coefficient higher than that of the pillars 22.

且下框21及上框23,是相同形狀,並且具有膨脹量與藉由熱朝一對測距儀12的對向的方向膨脹的膨脹量成為相同的長度。 Further, the lower frame 21 and the upper frame 23 have the same shape, and have the same amount of expansion as the amount of expansion which is expanded by the direction of the pair of distance measuring devices 12 by heat.

依據如此構成的第6實施例的測量裝置1E的話,與上述的第1實施例同樣地,可以將支柱22的膨脹藉由固定有測距儀12的輔助構件13的膨脹抵消,並且與上述的第5實施例同樣地,可防止由熱所產生的下框21及上框23的變形發生。結果,依據測量裝置1E的話,可防止一對測距儀12的間隙變化。藉由這些,測量裝置1E,是成為可藉由一對測距儀12,將測量對象100由高精度測量。 According to the measuring device 1E of the sixth embodiment configured as described above, similarly to the first embodiment described above, the expansion of the strut 22 can be offset by the expansion of the auxiliary member 13 to which the distance measuring device 12 is fixed, and the above-described Similarly to the fifth embodiment, deformation of the lower frame 21 and the upper frame 23 caused by heat can be prevented from occurring. As a result, according to the measuring device 1E, the gap change of the pair of range finder 12 can be prevented. With these, the measuring device 1E makes it possible to measure the measuring object 100 with high precision by a pair of distance measuring devices 12.

又,測量裝置,不限定於上述各實施例的例。 Further, the measuring device is not limited to the examples of the above embodiments.

在上述的例中雖說明了,測量裝置1A,具備:下框21、及設在下框21的一側面或是一對側面的一或是一對支柱22、及設在支柱22的輔助構件13A、及設在輔助構件13A的上框23,的構成但不限定於此。例如,測量裝置1A,是與上述的測量裝置1D、1E同樣地,將一對支柱22的一方藉由固定部32固定在設置面200,將一對支柱22的另一方,對於設置面200可移動的構成也可以。藉 由作成這種構成,測量裝置1A,可達成與上述的測量裝置1E同樣的效果。 In the above-described example, the measuring device 1A includes the lower frame 21, one or a pair of struts 22 provided on one side or a pair of side faces of the lower frame 21, and an auxiliary member 13A provided on the struts 22. The configuration of the upper frame 23 provided in the auxiliary member 13A is not limited thereto. For example, in the measurement device 1A, similarly to the above-described measurement devices 1D and 1E, one of the pair of pillars 22 is fixed to the installation surface 200 by the fixing portion 32, and the other of the pair of pillars 22 is provided to the installation surface 200. The composition of the movement is also ok. borrow With such a configuration, the measuring device 1A can achieve the same effects as the above-described measuring device 1E.

同樣地,測量裝置1B、1C,是將一方的支柱22、22B藉由固定部32固定在設置面200,將下框21及另一方的支柱22、22B,對於設置面200可移動地被支撐於設置面200上的構成也可以。 Similarly, in the measuring devices 1B and 1C, one of the pillars 22 and 22B is fixed to the installation surface 200 by the fixing portion 32, and the lower frame 21 and the other pillars 22 and 22B are movably supported by the installation surface 200. The configuration on the installation surface 200 is also possible.

且在上述的例中雖說明了,各測量裝置1至1E,是各別具有輔助構件13、13A、13B、13C的其中任一的構成,但不限定於此。各測量裝置1至1E,是可適宜地組合使用。即,測量裝置,是複合地具有各輔助構件13、13A、13B、13C的測量裝置也可以。 Further, in the above-described example, each of the measuring devices 1 to 1E has a configuration in which each of the auxiliary members 13, 13A, 13B, and 13C is provided, but the present invention is not limited thereto. Each of the measuring devices 1 to 1E can be used in combination as appropriate. That is, the measuring device may be a measuring device having the auxiliary members 13, 13A, 13B, and 13C in combination.

且在上述的例中雖說明了,各測量裝置1至1E,是例示支柱22及輔助構件13、13A、13B、13C是使用金屬材料或是橡膠材料的構成但不限定於此。支柱22及輔助構件13、13A、13B、13C的材料,是可將由熱所產生的膨脹量抵消的話,材料可適宜地設定。 In the above-described examples, each of the measuring devices 1 to 1E is a configuration in which the pillars 22 and the auxiliary members 13, 13A, 13B, and 13C are made of a metal material or a rubber material, but are not limited thereto. The material of the pillars 22 and the auxiliary members 13, 13A, 13B, and 13C can be appropriately set if the amount of expansion by heat is canceled.

且在上述的例中雖說明了,測量裝置1B的第1支柱22a及第2支柱22b的材料是具有同一的線形膨脹係數的第1材料的構成但不限定於此。即,可以藉由輔助構件13B的膨脹量將第1支柱22a及第2支柱22b的膨脹量抵消的構成的話,第1支柱22a及第2支柱22b是不同的線形膨脹係數的構成也可以。 In the above-described example, the material of the first pillar 22a and the second pillar 22b of the measuring device 1B is a first material having the same linear expansion coefficient, but is not limited thereto. In other words, the first pillar 22a and the second pillar 22b may have different linear expansion coefficients, and the first pillar 22a and the second pillar 22b may be configured to cancel the expansion amount of the first pillar 22a and the second pillar 22b by the amount of expansion of the auxiliary member 13B.

例如,第1支柱22a是線膨脹係數M1的第1材料,第2支柱22b的材料是線形膨脹係數M3的第3材 料,輔助構件13B的材料是比線形膨脹係數M1、M3更大的線形膨脹係數M2(M1<M2、M3<M2)的第2材料。此時,輔助構件13B的長度L2,是L2=(L11‧M1+L12‧M3)/M2的話,可以將第1支柱22a及第2支柱22b的各膨脹量的和由輔助構件13B的膨脹量抵消。 For example, the first pillar 22a is a first material having a linear expansion coefficient M1, and the material of the second pillar 22b is a third material having a linear expansion coefficient M3. The material of the auxiliary member 13B is a second material having a linear expansion coefficient M2 (M1 < M2, M3 < M2) larger than the linear expansion coefficients M1, M3. In this case, when the length L2 of the auxiliary member 13B is L2=(L11‧M1+L12‧M3)/M2, the sum of the expansion amounts of the first support 22a and the second support 22b can be increased by the expansion amount of the auxiliary member 13B. offset.

依據以上所述的至少一個實施例的測量裝置的話,即使藉由熱使支柱的長度變動,藉由將支柱的膨脹量由輔助構件的膨脹量抵消,就可將對向配置的一對測距儀的對向的距離一定地保持,可以由高精度將對象物的厚度測量。 According to the measuring device of at least one of the above-described embodiments, even if the length of the strut is varied by heat, by adjusting the amount of expansion of the strut by the amount of expansion of the auxiliary member, a pair of distance measuring can be arranged in the opposite direction. The distance of the opposite direction of the instrument is kept constant, and the thickness of the object can be measured with high precision.

雖說明了本發明的一些的實施例,但是這些的實施例,只是作為例提示者,未意圖限定發明的範圍。這些新穎的實施例,可由其他的各式各樣的形態被實施,在不脫離發明的實質範圍內,可以進行各種省略、置換、變更。這些實施例和其變形,是被包含於發明的範圍和實質,並且被包含於與申請專利範圍的發明均等的範圍。 Although some embodiments of the invention have been described, these embodiments are intended to be illustrative only and not intended to limit the scope of the invention. The present invention may be embodied in a variety of other forms and various modifications, substitutions and changes can be made without departing from the scope of the invention. The embodiments and the modifications thereof are included in the scope and spirit of the invention, and are included in the scope of the invention as claimed.

Claims (1)

一種測量裝置,具備:基部,具有:下框、及與前述下框對向設置的上框、及將前述下框及前述上框連結的支柱;及一對測距儀,各別被設置在前述下框及前述上框,彼此對向配置且隔有測量對象可通過的間隙;及輔助構件,是設在前述基部,由具有與前述支柱相異的線形膨脹係數的材料所構成,其前述一對測距儀的對向的方向的長度,具有與前述支柱的藉由熱朝前述一對測距儀的對向的方向膨脹的膨脹量成為相同的膨脹量;前述支柱,具有:下端被固定於前述下框的第1支柱、及上端被固定於前述上框的第2支柱,前述輔助構件,是被配置於前述第1支柱的側面及前述第2支柱的側面之間,上端被固定於前述第1支柱的上端,下端被固定於前述第2支柱的下端。 A measuring device comprising: a base frame, a lower frame, an upper frame disposed opposite the lower frame, and a pillar connecting the lower frame and the upper frame; and a pair of distance measuring devices respectively disposed at The lower frame and the upper frame are disposed opposite to each other and have a gap through which the measurement target can pass; and the auxiliary member is formed on the base and is made of a material having a linear expansion coefficient different from the support. The length of the pair of distance measuring devices in the opposing direction has the same amount of expansion as the amount of expansion of the above-mentioned strut by the heat in the direction opposite to the pair of distance measuring devices; the pillar has: the lower end is The first pillar and the upper end fixed to the lower frame are fixed to the second pillar of the upper frame, and the auxiliary member is disposed between the side surface of the first pillar and the side surface of the second pillar, and the upper end is fixed The lower end of the first pillar is fixed to the lower end of the second pillar.
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Publication number Priority date Publication date Assignee Title
TW201200972A (en) * 2010-05-18 2012-01-01 Asml Netherlands Bv Lithographic apparatus and device manufacturing method
TWI427431B (en) * 2008-09-22 2014-02-21 Asml Netherlands Bv Lithographic apparatus, programmable patterning device and lithographic method
TWI437205B (en) * 2009-09-30 2014-05-11 Og Technologies Inc A method and apparatus of a portable imaging-based measurement with self calibration
TW201447006A (en) * 2013-04-02 2014-12-16 Kobe Steel Ltd Processing device and method for measuring workpiece temperature in processing device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI427431B (en) * 2008-09-22 2014-02-21 Asml Netherlands Bv Lithographic apparatus, programmable patterning device and lithographic method
TWI437205B (en) * 2009-09-30 2014-05-11 Og Technologies Inc A method and apparatus of a portable imaging-based measurement with self calibration
TW201200972A (en) * 2010-05-18 2012-01-01 Asml Netherlands Bv Lithographic apparatus and device manufacturing method
TW201447006A (en) * 2013-04-02 2014-12-16 Kobe Steel Ltd Processing device and method for measuring workpiece temperature in processing device

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