WO2017140069A1 - 基板表面信息检测装置以及基板表面信息检测方法 - Google Patents

基板表面信息检测装置以及基板表面信息检测方法 Download PDF

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Publication number
WO2017140069A1
WO2017140069A1 PCT/CN2016/084761 CN2016084761W WO2017140069A1 WO 2017140069 A1 WO2017140069 A1 WO 2017140069A1 CN 2016084761 W CN2016084761 W CN 2016084761W WO 2017140069 A1 WO2017140069 A1 WO 2017140069A1
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Prior art keywords
substrate
tested
surface information
information
image information
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PCT/CN2016/084761
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English (en)
French (fr)
Inventor
范宇光
李京鹏
李建
王世超
田立民
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京东方科技集团股份有限公司
北京京东方光电科技有限公司
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Priority to US15/542,179 priority Critical patent/US10184902B2/en
Publication of WO2017140069A1 publication Critical patent/WO2017140069A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/894—Pinholes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P13/00—Indicating or recording presence, absence, or direction, of movement
    • G01P13/0006—Indicating or recording presence, absence, or direction, of movement of fluids or of granulous or powder-like substances
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G01N2021/945—Liquid or solid deposits of macroscopic size on surfaces, e.g. drops, films, or clustered contaminants
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels

Definitions

  • At least one embodiment of the present disclosure is directed to an apparatus and method for substrate surface information detection.
  • PI coating is generally carried out by using a polyamic acid or polyimide solution through a photosensitive resin plate. (Alignment film printing plate), or spray coating, after the PI coating is completed, after leveling, pre-curing, curing, orienting by rubbing orientation or photocuring orientation, and then adding liquid crystal,
  • the box is cut to form a conventional TFT-LCD liquid crystal cell; during the PI coating process, for example, pinhole-like defects may occur due to unevenness of the substrate surface. Such pinhole defects are often displayed as white spots or black dots in the TFT-LCD.
  • At least one embodiment of the present disclosure provides a substrate surface information detecting apparatus, including a shower source, an image sensor, wherein the shower source is configured to uniformly spray a droplet onto a surface of the substrate to be tested or form a surface of the substrate to be tested.
  • the liquid stream, the image sensor is configured to record and transmit liquid image information of the surface of the substrate to be inspected. If the area of the substrate to be inspected is not flat or due to metal residue or foreign matter falling and oil contamination during the manufacturing process, the liquid sprayed on a portion of the surface of the substrate may have a different surface tension due to the above conditions. Presenting different states.
  • the spray source is configured to spray droplets or form a liquid flow onto the substrate to be tested, and the liquid adheres to the surface of the substrate to be tested
  • the image sensor is configured to record liquid image information exhibiting different states due to the surface condition of the substrate, and can analyze the liquid image information. The surface state of the substrate was obtained.
  • At least one embodiment of the present disclosure provides a substrate surface information detecting method, including
  • the liquid adheres to the surface of the substrate to be tested, and stores liquid image information that exhibits different states due to the surface of the substrate.
  • determining the liquid image information a partial region of the surface of the substrate can be obtained. At least one of flatness, cleanliness, and degree of hydrophilicity.
  • the substrate surface information detecting apparatus and method according to the embodiments of the present disclosure can prevent and avoid the existence of defects on the surface of the substrate before PI coating, and has a positive significance for shortening production time, improving production efficiency, and improving product yield.
  • FIG. 1 is a schematic diagram of liquid image information formed by spraying droplets on a surface of a substrate to be tested according to an embodiment of the present disclosure
  • FIG. 2 is a schematic diagram of liquid image information formed by shower droplets when an abnormal region exists on a surface of a substrate to be tested according to an embodiment of the present disclosure
  • FIG. 3 is a schematic diagram of liquid image information formed by forming a liquid flow on a surface of a substrate to be tested according to an embodiment of the present disclosure
  • FIG. 4 is a schematic diagram of liquid image information formed by forming a liquid flow when an abnormal region exists on a surface of a substrate to be tested according to an embodiment of the present disclosure
  • FIG. 5 is a flowchart of a substrate surface information detecting method according to an embodiment of the present disclosure
  • FIG. 6 is a flow chart of another method for detecting substrate surface information according to an embodiment of the present disclosure.
  • FIG. 7 is a flowchart of still another substrate surface information detecting method according to an embodiment of the present disclosure.
  • FIG. 8 is a flow chart of still another method for detecting substrate surface information according to an embodiment of the present disclosure.
  • FIG. 9 is a flow chart showing a step of determining a position where a foreign matter is attached on a surface of a substrate or a region where a hydrophilic/hydrophobic property of the substrate exists or a position where the substrate is uneven, in a substrate surface information detecting method according to an embodiment of the present disclosure
  • FIG. 10 is a system block diagram of a substrate surface information detecting apparatus according to an embodiment of the present disclosure.
  • At least one embodiment of the present disclosure provides a substrate surface information detecting device, as shown in FIG. 10, including a shower source and an image sensor, the shower source 11 being configured to uniformly spray a droplet onto the substrate 1 to be tested 2.
  • the image sensor 12 is configured to record liquid image information of the surface of the substrate 1 to be tested. If the area of the substrate 1 to be tested is not flat or due to metal residue or foreign matter falling and oil contamination during the manufacturing process, the partial area may have different surface tensions due to the above conditions, so that the liquid is on the substrate 1 to be tested.
  • the surface exhibits different states
  • the shower source 11 is configured to uniformly spray the droplets 2 onto the substrate 1 to be tested or to form a liquid stream 7 on the substrate 1 to be tested, and the liquid adheres to the surface of the substrate 1 to be tested
  • the image sensor 12 is configured as The image information of the liquid exhibiting different states due to the surface condition of the substrate 1 to be tested is recorded, and the surface state of the substrate 1 to be tested is obtained by analyzing the image information.
  • the shower source 11 uniformly sprays the droplets 2 onto the substrate 1 to be tested, the image information shown in FIG. 1 will be presented on the substrate 1 to be tested, wherein the droplet 2 is waiting The substrate 1 is evenly distributed; when the shower source 11 forms a liquid stream 6 on the substrate 1 to be tested in the direction 5, the liquid image information shown in FIG. 3 will be presented on the substrate 1 to be tested, wherein the liquid stream 6 The width is uniform.
  • the shower source 11 uniformly sprays the droplet 2 onto the substrate 1 to be tested
  • the liquid image information shown in Fig. 2 will be presented, wherein in an uneven position or a contaminated position, such as position 4, adjacent droplets will converge together due to an abnormal surface tension to form a larger droplet. , for example, droplet 3; when the shower source 11 is on the substrate 1 to be tested
  • the direction 5 forms the liquid stream 7
  • the image information shown in Fig. 4 will be presented, wherein the liquid stream 7 is subjected to the uneven area at the position 4. Interference or contamination interference, the width of the liquid flow will change at position 4.
  • the substrate 1 surface information detecting apparatus to be tested further includes an image determination processing unit configured to receive image information from the image sensor 13 and determine the substrate 1 to be tested based on the image information.
  • the surface information includes at least one of flatness, cleanliness, and degree of hydrophilicity in at least a portion of the surface of the substrate 1 to be tested. Since at least one of the flatness, the cleanliness, and the degree of hydrophilicity of the portion of the substrate 1 to be tested is different, the state information of the surface of the substrate 1 to be tested can be obtained by determining the liquid image information recorded by the image sensor 12.
  • the image information shown in FIG. 1 and FIG. 3 reflects that the flatness, the cleanliness and the degree of hydrophilicity of the entire surface of the substrate 1 to be tested are consistent, and the image information shown in FIG. 2 and FIG. 4 reflects different regions on the surface of the substrate 1 to be tested. There is a difference in at least one of flatness, cleanliness, and degree of hydrophilicity.
  • the human eye can also be used as the image determination processing unit, and by determining the liquid image information recorded by the image sensor 12, the above state information of the surface of the substrate 1 to be tested can also be obtained.
  • the image determination processing unit 13 is further configured to determine, according to the image information, an area in the surface of the substrate 1 to be tested and/or a degree of cleanliness and/or a degree of hydrophilicity and hydrophobicity exceeding a preset range. The position inside the surface of the substrate 1 was measured. During the implementation process, the preset range of the flatness or cleanliness or the degree of hydrophilicity of the substrate to be tested can be set as needed. When it is found that there is an abnormal region beyond the preset range in the image information, the image determination processing unit 13 can confirm the abnormal region. s position.
  • the droplets 2 have a diameter ranging from 0.1 ⁇ m to 1000 ⁇ m.
  • the substrate 1 to be tested is a liquid crystal display substrate. According to the size of the sub-pixel cells in the liquid crystal display substrate, the droplets 2 sprayed by the shower source 11 having the diameter within the above range can detect that the liquid crystal display substrate corresponds to each Surface area information for sub-pixel cells.
  • the droplets 2 have a diameter ranging from 1 ⁇ m to 30 ⁇ m.
  • the droplets 2 having a diameter within this range can more finely reflect the surface area information of the smaller unit in the substrate 1.
  • the flow rate of the liquid stream 6 ranges from 0.1 mm/s to 100 mm/s.
  • the liquid flow 6 whose flow rate is within this range can clearly judge the information of the surface area of the unit distance of the substrate 1 to be tested.
  • the flow rate of the liquid stream 6 ranges from 1 mm/s to 10 mm/s.
  • the droplet 2 or liquid stream 6 is deionized water.
  • deionized water enables detection of the surface information of the substrate 1 to be tested while not contaminating the surface of the substrate 1 to be tested.
  • the substrate 1 to be tested is placed under the shower source providing the liquid stream 7 at an angle of 3 to 10 degrees with respect to the horizontal direction. Compared with the substrate 1 to be tested placed horizontally, the substrate 1 to be tested placed at an oblique angle facilitates the flow of liquid through the surface of the substrate 1 to be tested, and the surface of the substrate 1 to be tested is more conveniently detected.
  • At least one embodiment of the present disclosure further provides a substrate surface information detecting method, as shown in FIG. 5, including:
  • the liquid adheres to the surface of the substrate 1 to be tested, and records image information of different states due to the surface condition of the substrate 1 to be tested, and can be obtained by judging the image information. At least one of flatness, cleanliness, and degree of hydrophilicity of a partial region of the surface of the substrate 1 is measured.
  • the method before determining the surface information of the substrate to be tested according to the image information, as shown in FIG. 6, the method further includes storing image information of the surface of the substrate to be tested. This facilitates subsequent detailed analysis of the surface information of the substrate to be tested.
  • the liquid stream 6 may partially or completely cover the substrate, and by way of example, image information as shown in FIG. 3 may be presented.
  • the droplet size and/or the spacing between adjacent droplets are relatively uniform, and the formed liquid is formed.
  • the droplet distribution can be schematically represented by FIG. 1; otherwise, for example, if the image information shown in FIG. 2 appears, there are large droplets, such as droplets 3, indicating the surface of the substrate 1 to be tested. There is a foreign matter attached or a region where the substrate 1 to be tested has a hydrophilic or hydrophobic difference or the substrate 1 to be tested is not flat.
  • the surface of the liquid film formed by the liquid flow is relatively flat, as schematically shown in FIG. Otherwise, for example, if the image information shown in FIG. 4 appears, the surface of the liquid film formed by the liquid stream 7 is not flat, indicating that there is adhesion of foreign matter on the surface of the substrate 1 to be tested or that the substrate has a hydrophilic/hydrophobic difference or the substrate is uneven.
  • the substrate 1 to be tested in the process of forming the liquid stream 6 on the substrate 1 to be tested, is placed at an angle of 3° to 10° oblique to the horizontal direction. Compared with the substrate 1 to be tested placed horizontally, the substrate 1 to be tested placed at an oblique angle facilitates the flow of the liquid 7 through the surface of the substrate 1 to easily detect the surface of the substrate 1 to be tested.
  • the diameter of the droplets 2 ranges from 0.1 ⁇ m to 1000 ⁇ m. According to the size of the sub-pixel cells in the substrate 1 to be tested, the droplets 2 whose diameters are within the range can reflect the surface area information of the substrate 1 to be tested corresponding to each sub-pixel cell.
  • the droplets 2 have a diameter ranging from 1 ⁇ m to 30 ⁇ m.
  • the droplets 2 having a diameter within this range are capable of detecting the surface area information of the smaller unit of the substrate 1 to be tested more finely.
  • the liquid flow rate is in the range of 0.1 mm/s to 100 mm/s during the supply of the liquid stream by the spray source 11.
  • the liquid flow having the flow rate within this range can clearly determine the surface area information of the substrate 1 to be tested corresponding to the unit distance.
  • the flow rate of the liquid stream 6 is in the range of 1 mm/s to 10 mm/s.
  • determining surface information of the substrate 1 to be tested according to image information includes:
  • Obtaining the surface information of the substrate 1 to be tested by analyzing whether the spacing between adjacent droplets on the surface of the substrate 1 to be tested in the image information is uniform and/or whether the droplet size is uniform; or
  • the surface information of the substrate 1 to be tested is obtained by detecting whether the liquid film on the surface of the substrate 1 to be tested in the image information is flat.
  • the gap between the adjacent droplets on the surface of the substrate 1 to be tested in the image information is too large, and the droplets at the region 4 are smaller than the droplets between the droplets of the other regions.
  • the distance between them is significantly larger, and/or, for example, the size of the droplet 2 and the droplet 3 differ greatly.
  • the liquid flow 7 on the surface of the substrate 1 to be tested appears uneven or broken at the region 4.
  • step of obtaining the surface information of the substrate 1 to be tested by analyzing whether the spacing between the surface droplets of the substrate 1 to be tested in the image information is uniform and/or the size of the droplets is uniform according to an embodiment of the present disclosure, 6 and shown in Figure 7, including,
  • the diameter of the droplet at a certain position on the surface of the substrate 1 to be tested in the image information is greater than three times the diameter of the droplet around the surface, and/or the difference between the distance between adjacent droplets on the surface of the substrate 1 to be tested exceeds the first threshold
  • Obtaining the surface information of the substrate to be tested includes adhering foreign matter on the surface of the substrate to be tested or a region where the substrate has a hydrophilicity difference or the substrate is uneven.
  • the droplets gather there, for example, the form of the droplets 3,
  • the diameter of the droplet 3 is much larger than the diameter of the peripheral droplet 2, and/or the difference between the spacing of adjacent droplets at the region 4 is significantly larger than the difference between the spacing of adjacent droplets in other regions.
  • the first threshold may be set according to the measurement accuracy requirement. When the difference between the adjacent droplet spacings is greater than the first threshold, it may be determined that there is a foreign matter attached on the surface of the substrate 1 to be tested or a hydrophilic characteristic region or a recessed region.
  • the surface information of the substrate 1 to be tested is obtained by detecting whether the liquid film on the surface of the substrate 1 to be tested in the image information is flat.
  • liquid film on the surface of the substrate 1 to be tested in the image information is broken or a convex or concave portion of the liquid film is changed or the flow direction is changed, it is judged that there is a foreign matter attached on the surface of the substrate 1 to be tested or a region having a difference in hydrophilic/hydrophobic property of the substrate or the substrate Uneven.
  • the liquid flow 7 will be in the surface defect region 4 of the substrate to be tested.
  • a bulge or depression is formed or a change occurs in the flow direction.
  • An embodiment of the present disclosure provides a substrate surface information detecting method, as shown in FIG. 6 and FIG. 7, and FIG.
  • two executions determine that there is foreign matter attached to the surface of the substrate to be tested or If the difference between the two determined positions is within the error range, the position of the substrate to be tested is determined to be any position on the surface of the substrate to be tested.
  • the foreign matter or the substrate to be tested has a hydrophilic/hydrophobic property region or a position where the substrate to be tested is not flat.
  • determining that there is attached foreign matter on the surface of the substrate to be tested or that the substrate to be tested has a hydrophilic/hydrophobic property region or that the substrate to be tested is not flat is included,
  • the number of times for determining that there is attached foreign matter on the surface of the substrate to be tested or that the substrate to be tested has a hydrophilic/hydrophobic property or that the substrate to be tested is not flat is not limited to two, and if the number of executions is N, where N is greater than 2, Exemplarily, the position of the N times of confirmation is made by two or two. If the difference of more than half is within the error range, the average value of the N times may be determined as the attached foreign matter on the surface of the substrate to be tested or the substrate to be tested is present. The water characteristic area or the position where the substrate to be tested is not flat.
  • the method for detecting substrate surface information to be tested according to an embodiment of the present disclosure can prevent and avoid defects of the surface of the substrate before PI coating, and has positive significance for shortening production time, improving production efficiency, and improving product yield.

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Abstract

一种基板表面信息检测装置和方法，所述装置包括喷淋源(11)和图像传感器(12)，其中，所述喷淋源(11)配置为向待测基板(1)表面均匀地喷洒液滴(2)或在待测基板(1)表面形成液体流(6)，所述图像传感器(12)配置为记录所述液滴(2)或所述液体流(6)的图像信息。根据所述基板表面信息检测装置和方法，能够预防和避免PI涂覆前基板表面的不良，可以缩短生产时间和提高生产效率以及改善产品良率。

Description

基板表面信息检测装置以及基板表面信息检测方法 技术领域
本公开的至少一个实施例涉及一种基板表面信息检测的装置以及方法。
背景技术
薄膜晶体管液晶显示器(TFT-LCD)制备过程中，聚酰亚胺(PI)涂覆工艺是一个非常重要的环节，PI涂覆一般是采用聚酰胺酸或者聚酰亚胺溶液，经过光敏树脂板(配向膜印刷版)，或者喷洒的方式进行涂覆的，PI涂覆完毕后，经过流平、预固化、固化后，采用摩擦取向或者采用光固化取向的方式进行取向，然后滴加液晶，对盒，切割形成传统的TFT-LCD液晶盒；在PI涂覆过程中，可能会由于基板表面不平整等原因导致出现例如针孔状不良。这种针孔状不良在TFT-LCD常常显示为白点或者黑点。
目前针对上述问题主要以出现不良后补救修复的方式解决。因此需要采用预防措施来避免产生这类不良。
发明内容
本公开的至少一个实施例提供了一种基板表面信息检测装置，包括，喷淋源，图像传感器，其中，喷淋源配置为向待测基板表面均匀地喷洒液滴或在待测基板表面形成液体流，图像传感器配置为记录并传输待检测基板表面的液体图像信息。如果待检测基板部分区域不平整或者由于制作过程中出现金属残留或者异物掉落以及油污等污染的情况，则喷淋在基板表面部分区域的液体会因为上述情况具有不同的表面张力而在基板表面呈现出不同的状态。喷淋源配置为向待测基板上喷洒液滴或者形成液体流，液体附着在待测基板表面，图像传感器配置为记录因基板表面状况呈现出不同状态的液体图像信息，能够通过分析液体图像信息得到基板表面状态。
本公开的至少一个实施例提供了一种基板表面信息检测方法，包括，
向水平放置的待测基板上均匀地喷洒液滴，或者，在待测基板表面形成液体流；
根据所述待测基板表面的液体图像信息判断所述待测基板的表面信息，所述表面信息包括基板表面至少部分区域内的平整度、清洁度和亲疏水程度中的至少之一。
通过向待测基板上喷洒液滴或者形成液体流，液体附着在待测基板表面，存储记录因基板表面而呈现出不同状态的液体图像信息，通过判断液体图像信息，可以得到基板表面的部分区域的平整度、清洁度和亲疏水程度中的至少之一。根据本公开实施例的基板表面信息检测装置和方法，能够预防和避免PI涂覆前基板表面存在的不良，对于缩短生产时间，提高生产效率改善产品良率有积极意义。
附图说明
为了更清楚地说明本公开实施例的技术方案，下面将对实施例的附图作简单地介绍，显而易见地，下面描述中的附图仅仅涉及本公开的一些实施例，而非对本公开的限制。
图1为根据本公开实施例的在待测基板表面上喷淋液滴形成的液体图像信息示意图；
图2为根据本公开实施例的在待测基板表面上存在异常区域时喷淋液滴形成的液体图像信息示意图；
图3为根据本公开实施例的在待测基板表面上形成液体流所形成的液体图像信息示意图；
图4为根据本公开实施例的在待测基板表面上存在异常区域时形成液体流所形成的液体图像信息示意图；
图5为根据本公开实施例的一种基板表面信息检测方法的流程图；
图6为根据本公开实施例的另一种基板表面信息检测方法的流程图；
图7为根据本公开实施例的又一种基板表面信息检测方法的流程图；
图8为根据本公开实施例的再一种基板表面信息检测方法的流程图；
图9为根据本公开实施例的一种基板表面信息检测方法中确定基板表面上有附着异物或者基板存在亲疏水特性区域或者基板不平整的位置的步骤流程图；以及
图10为根据本公开时实施例的基板表面信息检测装置的系统框图。
附图标记说明：
1，待测基板；2，液滴；3待测基板表面不良区域的液滴；4，待测基板表面不良区域；5，液体流方向；6，液体流；7，待测基板表面不良区域的液体流；11，喷淋源；12，图像传感器；13，图像判断处理单元。
具体实施方式
为使本公开实施例的目的、技术方案和优点更加清楚，下面将结合本公开实施例的附图，对本公开实施例的技术方案进行清楚、完整地描述。显然，所描述的实施例是本公开的一部分实施例，而不是全部的实施例。基于所描述的本公开的实施例，本领域普通技术人员在无需创造性劳动的前提下所获得的所有其他实施例，都属于本公开保护的范围。
本公开的至少一个实施例提供一种的基板表面信息检测装置，如图10所示，其包括喷淋源和图像传感器，所述喷淋源11配置为向待测基板1均匀地喷洒液滴2，图像传感器12配置为记录待测基板1表面的液体图像信息。如果待测基板1部分区域不平整或者由于制作过程中出现金属残留或者异物掉落以及油污等污染的情况，则该部分区域会因为上述情况具有不同的表面张力，从而使液体在待测基板1表面呈现出不同的状态，喷淋源11配置为向待测基板1上均匀地喷洒液滴2或者在待测基板1形成液体流7，液体附着在待测基板1表面，图像传感器12配置为记录液体因待测基板1表面状况呈现出不同状态的图像信息，通过分析所述图像信息得到待测基板1表面状态。
若待测基板1表面状况良好，当喷淋源11向待测基板1上均匀喷洒液滴2时，在待测基板1上将呈现图1所示的图像信息，其中，液滴2在待测基板1上均匀分布；当喷淋源11沿方向5在待测基板1上形成液体流6时，在待测基板1上将呈现图3所示的液体图像信息，其中，液体流6的宽度是均匀的。
若待测基板1表面状况不良，例如，部分区域不平整或者由于制作过程中出现金属残留或者异物掉落以及油污等污染，当喷淋源11向待测基板1上均匀喷洒液滴2时，将呈现图2所示的液体图像信息，其中，在不平整的位置或存在污染的位置，例如位置4，由于表面张力的异常，相邻的液滴会汇聚在一起，形成较大的液滴，例如液滴3；当喷淋源11向待测基板1上沿 方向5形成液体流7时，由于待测基板1的部分区域不平整或存在污染，例如位置4，将呈现图4所示的图像信息，其中，液体流7受到位置4处的不平整区域的干扰或污染的干扰，其液体流的宽度在位置4处会发生变化。
在本公开的另一个实施例中，待测基板1表面信息检测装置还包括图像判断处理单元，图像判断处理单元13配置为从图像传感器13接收图像信息，并根据图像信息判断待测基板1的表面信息，表面信息包括待测基板1表面至少部分区域内的平整度、清洁度和亲疏水程度中的至少一个。由于待测基板1部分区域的平整度、清洁度和亲疏水程度中的至少一个不同，通过判断图像传感器12记录的液体图像信息，可以得到待测基板1表面的上述状态信息。
图1和图3所示的图像信息反应出待测基板1表面整体的平整度、清洁度和亲疏水程度一致，图2和图4所示的图像信息反应出待测基板1表面不同区域的平整度、清洁度和亲疏水程度中的至少之一存在差异。
需要说明的是，人眼也可以作为图像判断处理单元，通过判断图像传感器12记录的液体图像信息，同样能够得到待测基板1表面的上述状态信息。
在本公开的另一个实施例中，图像判断处理单元13还用于根据该图像信息确定待测基板1表面内平整度和/或清洁度和/或亲疏水程度超出预设范围的区域在待测基板1表面内的位置。实施过程中，可以根据需要设定待测基板1平整度或清洁度或亲疏水程度的预设范围，当发现图像信息中存在超出预设范围异常区域，则图像判断处理单元13可以确认异常区域的位置。
在本公开的一个实施例中，液滴2的直径范围为0.1μm到1000μm。在该实施例中，待测基板1为液晶显示基板，根据液晶显示基板中亚像素单元格的尺寸，喷淋源11喷洒的直径位于上述范围内的液滴2能够检测液晶显示基板对应于每个亚像素单元格的表面区域信息。
在本公开的另一个实施例中，液滴2的直径范围为1μm到30μm。直径位于该范围内的液滴2能够更细致地反映出基板1中更小单元的表面区域信息。
在本公开的一个实施例中，液体流6的流速范围为0.1mm/s到100mm/s。流速在该范围内的液体流6能够清晰地判断待测基板1的单位距离的表面区域的信息。
在本公开的一个实施例中，液体流6的流速范围为1mm/s-10mm/s。
在本公开的一个实施例中，液滴2或液体流6为去离子水。使用去离子水能够在不污染待测基板1的表面的同时检测待测基板1表面信息。
在本公开的一个实施例中，待测基板1相对于水平方向角度倾斜3°-10°地放置在提供液体流7的喷淋源的下方。相较于水平放置的待测基板1，倾斜一定角度放置的待测基板1便于液体流流过待测基板1表面，更加方便地对待测基板1的表面的进行检测。
本公开的至少一个实施例还提供一种基板表面信息检测方法，如图5所示，包括：
向水平放置的待测基板1上均匀地喷洒液滴2，或者，在待测基板1表面形成液体流6；以及
根据所述待测基板1表面的图像信息判断所述待测基板1的表面信息，表面信息包括待测基板1表面至少部分区域内的平整度、清洁度和亲疏水程度中的至少一个。
通过向待测基板1上喷洒液滴2或者形成液体流6，液体附着在待测基板1表面，记录因待测基板1表面状况呈现出不同状态的图像信息，通过判断图像信息，可以得到待测基板1表面的部分区域的平整度、清洁度和亲疏水程度中的至少一个。
在本公开的一个实施例中，在根据所述图像信息判断所述待测基板的表面信息前，如图6所示，所述方法还包括，存储所述待测基板表面的图像信息。这样便于后续更细致地分析待测基板的表面信息。
若待测基板1表面状况良好，当喷淋源11向待测基板1上喷洒液滴2时，示例性地呈现如图1所示的图像信息。图1中的液滴尺寸与待测基板尺寸的比例关系并不反映真实比例，仅为示意性的图示。
当喷淋源11在待测基板1上形成液体流6时，液体流6可部分或全部覆盖基板，示例性地，可能呈现出如图3所示的图像信息。
若待测基板1表面上没有附着异物或者待测基板1表面的亲疏水性一致或者待测基板表面整体平整，则液滴尺寸和/或相邻液滴之间的间距较为均匀，所形成的液滴分布可示意性地由如图1所示；否则，例如若出现图2所示的图像信息，其中存在较大的液滴，例如液滴3，说明待测基板1表面上 有附着异物或者待测基板1存在亲疏水性差异区域或者待测基板1不平整。
若待测基板1表面上没有附着异物或者待测基板1表面的亲疏水性一致或者待测基板1的表面整体平整，则液体流所形成的液体膜表面较平整，示意性地可如图3所示，否则，例如若出现图4所示的图像信息，液体流7所形成的液体膜表面不平整，说明待测基板1表面上有附着异物或者基板存在亲疏水性差异区域或者基板不平整。
在本公开的一个实施例中，在待测基板1上形成液体流6的过程中，所述待测基板1呈倾斜于水平方向角度为3°-10°放置。相较于水平放置的待测基板1，倾斜一定角度放置的待测基板1便于液体流7流过基板1表面，易于检测待测基板1表面。
在本公开的一个实施例中，向水平放置的待测基板1上均匀地喷洒液滴2的过程中，液滴2的直径范围为0.1μm到1000μm。根据待测基板1中亚像素单元格的尺寸，喷洒的直径在该范围内的液滴2能够反映出每个亚像素单元格对应的待测基板1表面区域信息。
在本公开的一个实施例中，液滴2的直径范围为1μm到30μm。直径在该范围内的液滴2能够更细致的检测到待测基板1的更小单元的表面区域信息。
在本公开的一个实施例中，在喷淋源11提供液体流的过程中，液体流流速在0.1mm/s到100mm/s范围内。流速在这个范围内的液体流能够清晰地判断单位距离下对应的待测基板1表面区域信息。
在本公开的一个实施例中，液体流6的流速在1mm/s-10mm/s范围内。
在本公开的一个实施例中，如图7和图8所示，根据图像信息判断所述待测基板1的表面信息包括，
通过分析图像信息中待测基板1表面相邻液滴之间的间距是否均匀和/或液滴尺寸是否均匀来得到待测基板1表面信息；或
通过检测图像信息中待测基板1表面的液体膜是否平整来得到待测基板1表面信息。
示例性地，如图2所示，图像信息中待测基板1表面相邻液滴之间的间距差距过大，区域4处的液滴比其他区域的液滴两两相邻间的液滴之间的距离明显要大，和/或，例如液滴2与液滴3的尺寸差异很大。
或者，示例性地，如图4所示，待测基板1表面的液体流7在区域4处出现不平整或者断裂。
在根据本公开的一个实施例，通过分析图像信息中待测基板1表面液滴之间的间距是否均匀和/或液滴的尺寸是否均匀来得到待测基板1表面信息的步骤中，如图6和图7所示，包括，
判断若图像信息中待测基板1表面某位置处的液滴直径大于其周围液滴直径的三倍，和/或，待测基板1表面相邻液滴之间间距的差值超出第一阈值，获得待测基板表面信息包括待测基板表面上有附着异物或者基板存在亲疏水性差异区域或者基板不平整。
示例性地，如图2所示，当待测基板1表面上有附着异物或者存在亲水特性区域或者凹陷区域等表面不良区域4时，液滴在该处聚集，例如液滴3的形态，液滴3直径远远大于周边液滴2直径，和/或，区域4处的相邻液滴间距的差值比其他区域的相邻液滴间距的差值明显要大，需要说明的是，可以根据测量精度要求设定第一阈值，当存在相邻液滴间距的差值大于第一阈值时，则可以判定待测基板1表面上有附着异物或者存在亲水特性区域或者凹陷区域。
在本公开的一个实施例中，通过检测图像信息中待测基板1表面的液体膜是否平整来得到待测基板1表面信息包括，
若图像信息中待测基板1表面的液体膜出现断裂或者液体膜部分区域出现凸起或者凹陷或者流向发生改变，则判断待测基板1表面上有附着异物或者基板存在亲疏水特性差异区域或者基板不平整。
示例性地，如图4所示，当待测基板1表面上有附着异物或者存在亲水特性区域或者凹陷区域等表面不良区域4时，液体流7将会在待测基板的表面不良区域4处形成凸起或者凹陷或者流向发生改变出现断裂。
本公开的一个实施例的提供一种基板表面信息检测方法，如图6和图7，图8所示，还包括，
确定待测基板表面上有附着异物或者基板存在亲疏水特性区域或者基板不平整的位置。当确定出待测基板表面不良区域的位置后，能够采取补救等相应措施，避免该不良影响后续工艺。
在本公开的一个实施例中，两次执行确定待测基板表面上有附着异物或 者待测基板存在亲疏水特性区域或者基板不平整的位置，如果两次确定的位置的差值在误差范围内，则将两次确定的位置中任一位置确定为待测基板表面上有附着异物或者待测基板存在亲疏水特性区域或者待测基板不平整的位置。如图9所示，确定待测基板表面上有附着异物或者待测基板存在亲疏水特性区域或者待测基板不平整的位置包括，
确定待测基板表面上有附着异物或者待测基板存在亲疏水特性区域或者待测基板不平整的位置X1；
确定待测基板表面上有附着异物或者待测基板存在亲疏水特性区域或者待测基板不平整的位置X2；
计算两个位置X1与X2的差值，若两次位置的差值|X1-X2|小于预设误差范围，其中，选择预设误差范围的区间取值，则将待测基板表面上有附着异物或者待测基板存在亲疏水特性区域或者待测基板不平整的位置确认为X1或者X2。
这样，可以更准确有针对性地对不良区域采取相应的补救措施。
需要说明的是，执行确定待测基板表面上有附着异物或者待测基板存在亲疏水特性区域或者待测基板不平整的位置的次数不限于两次，如果执行次数为N，其中N大于2，示例性地，N次确认的位置进行两两做差，超过半数的差值在误差范围内，则可以将N次的结果取均值确定为待测基板表面上有附着异物或者待测基板存在亲疏水特性区域或者待测基板不平整的位置。
根据本公开实施例的待测基板表面信息检测方法能够预防和避免PI涂覆前基板表面的不良，对于缩短生产时间，提高生产效率改善产品良率有积极意义。
以上所述仅是本公开的示范性实施方式，而非用于限制本公开的保护范围，本公开的保护范围由所附的权利要求确定。
本申请要求于2016年2月16日递交的中国专利申请No.201610087753.X的优先权，在此全文引用上述中国专利申请公开的内容以作为本申请的一部分。

Claims (22)

  1. 一种基板表面信息检测装置，包括喷淋源和图像传感器，其中，所述喷淋源配置为向待测基板表面均匀地喷洒液滴或在待测基板表面形成液体流，所述图像传感器配置为记录所述液滴或所述液滴流的图像信息。
  2. 如权利要求1所述的基板表面信息检测装置，其还包括图像判断处理单元，所述图像判断处理单元配置为从所述图像传感器接收所述图像信息，并从所述图像信息获取所述待测基板的表面信息，所述表面信息包括所述待测基板表面的至少部分区域内的平整度、清洁度和亲疏水程度中的至少一个。
  3. 如权利要求2所述的基板表面信息检测装置，其中，
    所述图像判断处理单元配置为根据所述图像信息中液滴的分布和/或尺寸是否均匀来获取所述待测基板的表面信息；或者，配置为根据所述图像信息中的所述液体流形成的液体膜表面的平整度来得到所述待测基板的表面信息。
  4. 如权利要求2或3所述的基板表面信息检测装置，其中，所述图像判断处理单元还配置为根据该图像信息确定所述基板表面内平整度、清洁度和亲疏水程度中的至少一个超出预预定值的区域在所述待测基板表面内的位置。
  5. 如权利要求1至4中任何一项所述的基板表面信息检测装置，其中，所述液滴的直径范围为0.01μm到1000μm。
  6. 如权利要求1至4中任何一项所述的基板表面信息检测装置，其中，所述液滴的直径范围为1μm到30μm。
  7. 如权利要求1至4中任何一项所述的基板表面信息检测装置，其中，所述液体流的流速范围为0.1mm/s到100mm/s。
  8. 如权利要求1至4中任何一项所述的基板表面信息检测装置，其中，所述液体流的流速范围为1mm/s-10mm/s。
  9. 如权利要求1至8中任何一项所述的基板表面信息检测装置，其中，所述液滴或所述液体流为去离子水。
  10. 如权利要求1至4以及7至9中任何一项所述的基板表面信息检测装置，其中，所述待测基板相对于水平方向倾斜角度3°-10°放置在所述喷淋 源的下方。
  11. 一种基板表面信息检测方法，其包括，
    向水平放置的待测基板上均匀地喷洒液滴，或者，在待测基板表面形成液体流；
    获取所述待测基板表面的图像信息，根据所述图像信息获取所述待测基板的表面信息，所述表面信息包括所述待测基板表面的至少部分区域内的平整度、清洁度和亲疏水程度中的至少一个。
  12. 如权利要求11所述的基板表面信息检测方法，其中，在根据所述图像信息判断所述待测基板的表面信息之前，所述方法还包括存储所述图像信息。
  13. 如权利要求11所述的基板表面信息检测方法，其中，在所述待测基板上形成液体流时，所述待测基板相对于水平方向倾斜3°-10°放置。
  14. 如权利要求11或12所述的基板表面信息检测方法，其中，所述液滴的直径范围为0.1μm到1000μm。
  15. 如权利要求11或12所述的基板表面信息检测方法，其中，所述液滴的直径范围为1μm到30μm。
  16. 如权利要求11或12所述的基板表面信息检测方法，其中，所述液体流流速在0.1mm/s到100mm/s范围内。
  17. 如权利要求11或12所述的基板表面信息检测方法，所述液体流流速在1mm/s-10mm/s范围内。
  18. 如权利要求11至17中任何一项所述的基板表面信息检测方法，其中，根据所述图像信息获取所述待测基板的表面信息包括：
    通过分析所述图像信息中所述待测基板表面液滴的分布间距是否均匀和/或尺寸是否均匀来获取所述待测基板的表面信息，或者，通过检测所述图像信息中基板表面的液体膜是否平整来获取所述待测基板的表面信息。
  19. 如权利要求18所述的基板表面信息检测方法，其中，通过分析所述图像信息中所述待测基板表面液滴的分布间距是否均匀和/或尺寸是否均匀来获取所述待测基板的表面信息，包括：
    如果所述图像信息中某位置处的液滴直径大于其周围液滴直径的三倍，和/或，相邻液滴之间间距的差值超出第一阈值，则所述待测基板表面上附着 异物或者所述待测基板存在亲疏水性差异区域或者所述待测基板不平整。
  20. 如权利要求18所述的基板表面信息检测方法，其中，通过检测所述图像信息中基板表面的液体膜是否平整来获取所述待测基板的表面信息，包括：
    如果所述图像信息中液体膜出现断裂或者液体膜部分区域出现凸起或者凹陷或者流向发生改变，则所述待测基板表面上附有异物或者所述待测基板存在疏水特性区域或者所述待测基板不平整。
  21. 如权利要求18-20任一项所述的基板表面信息检测方法，其还包括，确定所述待测基板表面上附有异物或者所述待测基板存在亲疏水特性区域或者所述待测基板不平整的位置。
  22. 如权利要求21所述的基板表面信息检测方法，其中，执行确定所述待测基板表面上附有异物或者所述待测基板存在亲疏水特性区域或者所述待测基板不平整的位置两次，如果两次确定的位置的差值在误差范围内，则以所述两次确定的位置中任一位置作为所述待测基板表面上附有异物或者所述待测基板存在亲疏水特性区域或者所述待测基板不平整的位置。
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