WO2017202114A1 - 确定用于检测的光照强度的方法和装置、及光学检测方法和装置 - Google Patents
确定用于检测的光照强度的方法和装置、及光学检测方法和装置 Download PDFInfo
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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Definitions
- Embodiments of the present disclosure relate to the field of automated optical inspection, and more particularly to a method and apparatus for determining illumination intensity for detection, and an optical detection method and apparatus.
- Automated Optical Inspection is an effective method for industrial automation. It uses machine vision as a standard for inspection. It is widely used in LCD/TFT, transistor and PCB industry processes, and can be extended to the security system for people's death applications. . Automated optical inspection is a common method commonly used in industrial processes. It uses optical methods to obtain the surface state of the object to be detected, and image processing to detect foreign matter or pattern anomalies. Because it is a non-contact inspection, semi-finished products can be inspected in the middle. When automatically detecting, the machine automatically scans the detected object through the camera, collects the image, compares the tested solder joint with the qualified parameters in the database, and after image processing, checks the defect on the detected object, and puts the defect through the display or automatic mark. Displayed/marked for repair by maintenance personnel.
- AOI Automated Optical Inspection
- Embodiments of the present disclosure provide a method and apparatus for determining an illumination intensity for detection, and an optical detection method and apparatus capable of obtaining an illumination intensity for detection, when detecting an object to be detected using the illumination intensity, Can improve the accuracy of detection.
- a method of determining light intensity for detection includes:
- the illumination intensity for detection of each imaging element is determined based on the gray scale standard deviation.
- each of the at least one imaging element is configured to take an image of a different region of the sample to be detected.
- determining the illumination intensity for each imaging element based on the grayscale standard deviation comprises:
- the illumination intensity for detection of each imaging element is determined based on the intersection.
- determining the preferred range of illumination intensities for each imaging element includes:
- a range between the illumination intensities corresponding to the normalized gray standard deviation equal to the predetermined value is determined as the preferred range of illumination intensities for each imaging element.
- obtaining an intersection between the preferred ranges of illumination intensities of the at least one imaging element comprises:
- the predetermined value is gradually reduced until there is an intersection between the preferred ranges of the respective illumination intensities of the acquired imaging elements, and the intersection is obtained.
- the predetermined value is not less than 0.8.
- determining the illumination intensity for each imaging element based on the intersection includes:
- the intermediate value of the intersection is determined as the illumination intensity for detection of each imaging element.
- the checking for each imaging element is determined based on the gray standard deviation
- the measured light intensity includes:
- the illumination intensity corresponding to the largest gray standard deviation of the gray standard deviations is determined as the illumination intensity for detection of each imaging element.
- the sample to be inspected is a color film substrate, a thin film transistor array substrate, or a printed circuit board for a liquid crystal display.
- an optical detection method includes:
- the plurality of objects to be inspected are optically detected using the determined illumination intensity.
- an apparatus for determining a light intensity for detection includes:
- At least one imaging element for taking an image of the sample to be detected
- An image acquisition unit configured to acquire an image taken by each imaging element to be detected by the sample under multiple illumination intensities
- a calculating unit configured to calculate, for each imaging element, a gray standard deviation of each of the images acquired under the plurality of illumination intensities
- a light intensity determining unit configured to determine the light intensity for detecting of each imaging element according to the gray standard deviation.
- each of the at least one imaging element is configured to take an image of a different region of the sample to be detected.
- the illumination intensity determining unit includes:
- a normalization unit for normalizing the gray standard deviation for each imaging element
- the illumination intensity range determining unit is configured to determine a preferred illumination intensity range of each imaging element according to the normalized gray standard deviation and its correspondence with the plurality of illumination intensities;
- An intersection acquisition unit configured to acquire an intersection between a preferred range of illumination intensities of the at least one imaging element
- a light intensity determination subunit for determining the illumination intensity for detection of each imaging element based on the intersection.
- the preferred illumination intensity range determining unit is further configured to:
- a range between the illumination intensities corresponding to the normalized gray standard deviation equal to the predetermined value is determined as the preferred range of illumination intensities for each imaging element.
- intersection acquisition unit is further configured to:
- the predetermined value is gradually reduced until there is an intersection between the preferred ranges of illumination intensity of the respective imaging elements that are acquired.
- the predetermined value is greater than or equal to 0.8.
- the illumination intensity determination subunit is further configured to:
- the intermediate value of the intersection is determined as the illumination intensity for detection of each imaging element.
- the illumination intensity determining unit is further configured to:
- the illumination intensity corresponding to the largest gray standard deviation of the gray standard deviations is determined as the illumination intensity for detection of each imaging element.
- an optical detection device includes the apparatus for determining the intensity of illumination for detection as described in any of the above embodiments.
- the illumination intensity for detection is determined based on the gray standard deviation of the image. Since the gray standard deviation of the image is larger, indicating that the image contains more detailed information, the more favorable the detection of the defect of the sample to be detected, the detection of the object to be detected by using the method determined by the method described in the embodiments herein, Improve the accuracy of the test.
- 1a and 1b respectively show the relationship between the number of defects and the illumination intensity when reflecting illumination and the illumination intensity when transmitting illumination
- 2a and 2b respectively show images taken by a reflective illumination using a strong light intensity and a weaker light intensity to be detected
- 3a and 3b respectively show images taken by the transmission illumination using the stronger illumination intensity and the weaker illumination intensity to be detected
- FIG. 4 schematically illustrates a flow chart of a method of determining illumination intensity for detection, in accordance with an embodiment
- FIG. 5 schematically illustrates a flow chart of an exemplary method of determining an illumination intensity for detection based on a gray standard deviation
- Figure 6 shows schematically the ⁇ -I curve of a single imaging element
- Figure 7 schematically illustrates a flow chart of an optical detection method in accordance with one embodiment
- Figure 8 is a block diagram schematically showing the structure of an apparatus for determining the intensity of illumination for detection, according to one embodiment
- Figure 9 is a schematic flow diagram showing a method of determining the intensity of illumination for detection in one example
- ⁇ -I curve corresponding to the camera 1/3/7/11/15/19 in the example of Fig. 9 is shown in Fig. 10.
- the amount of illumination intensity used has a large influence on the accuracy of detection.
- people firstly detect the sample under different illumination intensities, and determine whether the illumination intensity is the optimal illumination intensity according to the number of defects detected, and the more the number of defects detected, the light intensity is considered. The result of the test is more accurate Indeed, this light intensity can then be used to perform batch inspection of the object to be tested.
- Fig. 1a and Fig. 1b respectively show the relationship between the number of defects and the illumination intensity at the time of reflection illumination and the illumination intensity at the time of transmission illumination.
- the stronger the illumination intensity the greater the number of defects detected, whether reflective illumination or transmissive illumination, so theoretically, stronger illumination can improve detection accuracy.
- Figures 2a and 2b respectively show images taken by a reflective illumination using a stronger illumination intensity and a weaker illumination intensity to be detected
- Figures 3a and 3b respectively show the treatment with a stronger illumination intensity and a weaker illumination intensity by transmissive illumination. Detect the image taken by the sample.
- the method for determining the illumination intensity for detection provided by the embodiment of the present disclosure can detect defects as much as possible while reducing the probability of false detection and improving the detection accuracy.
- one or more objects to be detected may be selected as a sample to be detected from a plurality of objects to be detected, and the illumination intensity determination provided by the embodiment of the present disclosure is implemented by the sample to be detected.
- the method determines the intensity of the light used for the detection. Single or batch detection of the object to be tested can be performed using the determined illumination intensity.
- a color filter substrate on which the protective layer is formed may be selected as a sample to be detected for detection to determine the light intensity for detection, and then the The determined light intensity is used for batch detection of the protective layer on the color filter substrate.
- FIG. 4 schematically illustrates a flow chart of a method of determining illumination intensity for detection, in accordance with an embodiment.
- a method of determining the intensity of illumination for detection includes the following steps:
- Image acquisition step 41 acquiring images taken by different regions of each imaging element to be detected under a plurality of illumination intensities
- - gray scale standard deviation calculation step 42 for each imaging element, calculating a gray standard deviation of an image acquired under a plurality of illumination intensities;
- - Illumination intensity determination step 43 The illumination intensity for detection of each imaging element is determined from the gray standard deviation.
- At least one imaging element can take an image of the object to be detected/sample under illumination of multiple illumination intensities.
- each imaging element is configured to take an image of a different area of the object/sample to be detected, for example, when there are 5 imaging elements, the 5 imaging elements are responsible for 5 of the object/sample to be inspected Take images in different areas.
- each of the plurality of imaging elements is to be imaged for detection of the sample under illumination of a plurality of different illumination intensities to obtain a plurality of images of the sample to be detected.
- each imaging element is responsible for taking images of different areas of the sample to be tested.
- the imaging element can be configured to capture an image of the sample to be detected by a pattern of reflected light illumination, and can also be configured to detect an image of the sample to be detected by a pattern of transmitted light illumination.
- the illumination intensity can be set to 0-255 levels to correspond to 0-255 gray levels of the image.
- the plurality of light intensities are selected from the 0-255 levels.
- the illumination intensity is gradually increased from 10 to 250 at intervals of 10 to sequentially take a sample image to be detected, so that each imaging element can take 25 pictures.
- the gray standard deviation calculation step 42 the larger the gray standard deviation of the image, the more detailed information the image contains, the more favorable the detection of the defect of the sample to be detected, so in the embodiment described herein, the image is The gray standard deviation is used as the basis for judging whether the light intensity is optimal.
- the gray standard deviation of each image can be calculated by the following equation:
- ⁇ is the standard deviation
- M and N represent the number of pixels in the x and y directions
- I(x, y) represents the gray value of a point on the image
- I 0 represents the average gray value of the image.
- the illumination intensity corresponding to the largest gray standard deviation can be determined as the illumination intensity for each imaging element for detection.
- the light intensity determined by this method can obtain the best light intensity for each imaging element, but by The hardware performance of each imaging element may not be exactly the same, so the optimal illumination intensity of each imaging element may be different.
- the illumination intensity for detection can also be determined by the following steps:
- Normalization step 431 normalizing the gray standard deviation for each imaging element
- ⁇ -I curve drawing step 432 for each imaging element, plot a normalized gray standard deviation-light intensity curve ( ⁇ -I curve);
- the illumination intensity range determining step 433 determining a preferred illumination intensity range of each imaging element according to a correspondence between the normalized gray standard deviation and the illumination intensity;
- An intersection obtaining step 434 obtaining an intersection between preferred light intensity ranges of the respective imaging elements
- a step 435 of determining the illumination intensity of each imaging element for each imaging element is determined based on the intersection acquired in step 434.
- the illumination intensity determined by the exemplary method illustrated in FIG. 5 can be such that each of the imaging elements is illuminated with the same illumination intensity when batch detection is performed on the object to be inspected, without setting different illumination intensities for each imaging element.
- the operation is simple and facilitates the unification of the detection standard.
- normalization can be performed by:
- ⁇ is the normalized gray standard deviation of the image
- ⁇ is the gray standard deviation of the image
- ⁇ max is the maximum gray standard deviation corresponding to a single imaging element. It can be understood that the gray standard deviation can also be normalized by other methods, for example, by a logarithmic function or an inverse tangent function.
- ⁇ -I curve drawing step 432 step for each imaging element, a ⁇ -I curve can be plotted.
- Figure 6 shows schematically the ⁇ -I curve of a single imaging element. As can be seen from Figure 6, the plotted ⁇ -I curve has a peak, so the preferred illumination intensity for detection can be determined from the curve.
- a preferred range of illumination intensities for each imaging element can be obtained from the ⁇ -I curve plotted in step 432.
- a range between illumination intensities corresponding to a normalized gray standard deviation equal to a predetermined value may be determined as the preferred range of illumination intensities for each imaging element.
- a predetermined value of a can be set, where 0 ⁇ a ⁇ 1.
- the illumination intensity ranges between I 1 and I 2 are determined as imaging corresponding to the two illumination intensities I 1 and I 2 .
- intersection acquisition step 434 an intersection between these preferred illumination intensity ranges is obtained based on the preferred illumination intensity ranges of the respective imaging elements acquired in the preferred illumination intensity determination step 433.
- intersection can be obtained as follows:
- the individual imaging elements of the optical detection device have the same or similar hardware configuration, and when the value of a is reduced sufficiently small, for example less than a predetermined threshold b, there is still no intersection between the preferred illumination intensities of the respective imaging elements, meaning
- the hardware of the optical detection device may have problems, so the hardware needs to be debugged. After the debugging, the intersection is obtained again by the above method, so as to obtain the illumination intensity for detection according to the intersection.
- the predetermined threshold is set to 0.8.
- step 435 the intermediate value of the intersection of the preferred illumination intensity ranges of the respective imaging elements is taken as the illumination intensity for each imaging element for detection such that each imaging element uses the same Illumination captures images for ease of operation and facilitates uniformity of inspection standards.
- the sample to be tested may be a color film substrate, a thin film transistor (TFT) array substrate, or a printed circuit board (PCB) for a liquid crystal display.
- TFT thin film transistor
- PCB printed circuit board
- the method for providing the light intensity for the detection may be determined for each forming process of the product using the method provided by the embodiments described herein, and then the light intensity is used to detect whether the element formed by the process is defective. In order to repair defects in time.
- the light intensity for detecting the black matrix can be determined using the method provided by the embodiments described herein, and then Using the determined illumination intensity to detect whether a defect exists in the black matrix on the color filter substrate to repair the defect of the black matrix in time; after forming the color filter on the color filter substrate, using the embodiments provided herein
- the method determines the illumination intensity for detecting the color filter, and then uses the determined illumination intensity to detect whether a defect exists in the color filter, so as to timely repair the defect of the color filter.
- defect detection can be performed after each element (such as a protective layer and a column spacer) is formed in order to perform repair in time when there is a defect.
- the illumination intensity for detection is determined based on the gray standard deviation of the image, as indicated above, the greater the gray standard deviation of the image, the more detailed information the image contains. The more favorable the detection of the defect of the sample to be detected, the detection of the object to be detected by using the light intensity determined by the method described in the above embodiment can improve the accuracy of the detection.
- Figure 7 schematically illustrates a flow chart of an optical detection method in accordance with one embodiment.
- the light intensity detecting method includes:
- Step 73 of optically detecting the object to be detected using the determined illumination intensity is
- step 72 in order to realize the detection of the object to be detected, one of the objects to be detected may be selected as the sample to be detected, and then the sample shown in FIGS. 4-6 is implemented for the sample to be detected.
- the method determines the illumination intensity for detection to perform batch optical inspection of the object to be detected using the determined illumination intensity.
- step 72 since the illumination intensity for detection is determined by the same method as that described in the above embodiment and shown in FIGS. 4-6, in the above embodiment, reference is made to FIGS. 4-6.
- the explanation and description of the method for determining the light intensity for detection and the advantages thereof are equally applicable to the present embodiment.
- the accuracy of the detection can be improved by detecting the illumination intensity determined by the method provided by the embodiment described herein.
- the flowchart depicted in this disclosure is merely an example. Many variations of the flowchart or the steps described therein may exist without departing from the spirit of the present disclosure. For example, the steps may be performed in a different order, or steps may be added, deleted, or modified.
- the normalization step 431 can be omitted, and the gray standard deviation-light intensity curve can be directly drawn; the gray standard deviation-light intensity curve can also be replaced by the gray scale standard deviation-light intensity correspondence table, and these variations are considered It is part of the claimed aspect.
- Figure 8 is a schematic block diagram showing the structure of an apparatus for determining the intensity of illumination for detection, according to one embodiment.
- the means 80 for determining the illumination intensity for detection includes at least one imaging element 81, an image acquisition unit 82, a calculation unit 83, and a light intensity determination unit 84.
- At least one imaging element 81 can be used to capture an image of the sample to be detected, in particular, the at least one imaging element can be used to capture an image of a different region of the sample to be detected.
- the image acquisition unit 82 is configured to acquire an image of each of the imaging elements to be detected by the sample under a plurality of illumination intensities.
- the calculating unit 83 is configured to calculate, for each imaging element, a gray standard deviation of each of the images acquired under the plurality of illumination intensities;
- the illumination intensity determining unit 84 is configured to determine the illumination intensity for detection of each imaging element based on the grayscale standard deviation.
- the illumination intensity unit 84 may further include a normalization unit, a preferred illumination intensity range determination unit, an intersection acquisition unit, and a light intensity determination subunit, wherein the normalization unit is configured for each imaging The component normalizes the gray standard deviation; preferably the illumination is strong a range determining unit, configured to determine a preferred range of illumination intensity of each imaging element according to a normalized gray standard deviation and a correspondence between the plurality of illumination intensities; and an intersection obtaining unit configured to acquire the at least An intersection between a preferred range of illumination intensities of an imaging element; an illumination intensity determination sub-unit for determining the illumination intensity for detection of each imaging element based on the intersection.
- the preferred illumination intensity range determining unit is further configured to: determine a range between the illumination intensities corresponding to the normalized gray standard deviation equal to the predetermined value as the preferred illumination intensity of each imaging element. range.
- the intersection acquisition unit is further configured to: determine whether there is an intersection between the preferred illumination intensity ranges of the respective imaging elements, and if present, obtain a preferred illumination intensity range of the at least one imaging element The intersection between; otherwise, the predetermined value is gradually reduced until there is an intersection between the preferred ranges of illumination intensity of the respective imaging elements that are acquired.
- the predetermined value takes a value greater than or equal to 0.8.
- the illumination intensity determination sub-unit is further configured to determine an intermediate value of the intersection as the illumination intensity for detection of each imaging element.
- the illumination intensity determining unit 84 is further configured to determine, for each imaging element, the illumination intensity corresponding to the largest gray standard deviation of the gray standard deviations as the illumination intensity for each imaging element for detection.
- the illumination intensity for detection can be determined by means for determining the illumination intensity for detection provided by the embodiments described herein. Specifically, the method of determining the illumination intensity for detection as described in the above embodiment and shown in FIGS. 4-6 is used to determine the illumination intensity. Therefore, the explanation and explanation of the method of determining the illumination intensity for detection and the advantages thereof produced in the above embodiment with reference to Figs. 4-6 are also suitable for the present embodiment.
- an optical detection device is also provided for automated optical detection of an object to be detected.
- the optical detecting device includes the means for determining the intensity of illumination for detection provided by the foregoing embodiments.
- the optical detecting device includes the device for determining the light intensity for detection provided by the foregoing embodiment, an explanation and explanation of the device for determining the light intensity for detection in the foregoing embodiment The same applies to this embodiment.
- the protective layer on the color filter substrate is detected by an automated optical inspection device having 19 Reflective Cameras to determine the illumination intensity for detection. Further, the protective layer on the color filter substrate can be mass-detected using the determined illumination intensity.
- Figure 9 is a schematic flow diagram showing a method of determining the intensity of illumination for detection in one example.
- the illumination intensity is set to gradually increase from 10 to 10 at intervals of 10, in which case each camera can take 25 images at 25 different illumination intensities.
- the method of determining the illumination intensity for detection includes the following steps:
- Step 91 Acquire an image taken by the 19 cameras to be detected under different reflected light intensities
- Step 92 Calculate the gray standard deviation of each image by image processing software for each camera;
- Step 93 For each camera, draw a gray standard deviation-light intensity curve
- the gray standard deviation can be normalized, in which case a normalized gray standard deviation-light intensity curve ( ⁇ -I curve) can be drawn.
- ⁇ -I curve corresponding to the camera 1/3/7/11/15/19 is shown in FIG. 10, and in FIG. 10, the ordinate is the normalized gradation standard deviation, and the abscissa is the illumination intensity;
- Step 95 Decrease the value of a at intervals of 0.02;
- Step 96 Determine whether a is less than a predetermined threshold (such as 0.8), and if so, debug the device, and then return to step 91; if not, execute step 97;
- a predetermined threshold such as 0.8
- step 96 if a is less than the predetermined threshold, the intersection is still not found, indicating that there is a problem with the device, and the device can be debugged, for example, adjusting the focus position of the camera lens, adjusting the camera gain, and the like.
- the illumination intensity range of each camera has an intersection [148, 168], so the preferred illumination intensity range of the automatic optical detection device is [148, 168], and the intermediate value of the preferred illumination intensity range is 158 is set to the light intensity for detection. Using this light intensity to perform automatic optical inspection of the object to be inspected can improve the accuracy of the detection.
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Abstract
Description
Claims (19)
- 一种确定用于检测的光照强度的方法,包括:获取至少一个成像元件中的每个成像元件在多个光照强度下对待检测样品拍摄的图像;对于每个成像元件,计算在所述多个光照强度下获取的图像中的每幅图像的灰度标准差;根据所述灰度标准差确定每个成像元件的所述用于检测的光照强度。
- 根据权利要求1所述的方法,其中,所述至少一个成像元件中的每个成像元件被配置为对所述待检测样品的不同区域拍摄图像。
- 根据权利要求2所述的方法,其中,根据所述灰度标准差确定每个成像元件的所述用于检测的光照强度包括:对于每个成像元件,归一化所述灰度标准差;根据归一化的灰度标准差及其与所述多个光照强度之间的对应关系,确定每个成像元件的优选光照强度范围;获取所述至少一个成像元件的优选光照强度范围之间的交集;根据所述交集确定每个成像元件的所述用于检测的光照强度。
- 根据权利要求3所述的方法,其中,确定每个成像元件的所述优选光照强度范围包括:将等于预定值的归一化的灰度标准差所对应的光照强度之间的范围确定为每个成像元件的所述优选光照强度范围。
- 根据权利要求4所述的方法,其中,获取所述至少一个成像元件的优选光照强度范围之间的交集包括:判断各个成像元件的所述优选光照强度范围之间是否存在交集,若存在,则获取所述交集;否则,逐渐减小所述预定值,直到获取的各个成像元件的所述优选光照强度范围之间存在交集,并获取所述交集。
- 根据权利要求5所述的方法,其中,所述预定值不小于0.8。
- 根据权利要求3至6中任一项所述的方法,其中,根据所述交集确定每个成像元件的所述用于检测的光照强度包括:将所述交集中的中间值确定为每个成像元件的所述用于检测的光照强度。
- 根据权利要求1或2所述的方法,其中,根据所述灰度标准差确定每个成像元件的所述用于检测的光照强度包括:对于每个成像元件,将所述灰度标准差中最大的灰度标准差对应的光照强度确定为每个成像元件的所述用于检测的光照强度。
- 根据权利要求1至8中任一项所述的方法,其中,所述待检测样品为用于液晶显示器的彩膜基板、薄膜晶体管阵列基板、或印刷电路板。
- 一种光学检测方法,包括:从多个待检测对象中选择至少一个待检测对象作为待检测样品;使用所述待检测样品,根据权利要求1-9中任一项所述的方法确定至少一个成像元件中的每个成像元件的用于检测的光照强度;使用所确定的光照强度对所述多个待检测对象进行光学检测。
- 一种确定用于检测的光照强度的装置,包括:至少一个成像元件,用于对待检测样品拍摄图像;图像获取单元,用于获取每个成像元件在多个光照强度下对待检测样品拍摄的图像;计算单元,用于对于每个成像元件计算在所述多个光照强度下获取的图像中的每幅图像的灰度标准差;光照强度确定单元,用于根据所述灰度标准差确定每个成像元件的所述用于检测的光照强度。
- 根据权利要求11所述的装置,其中,所述至少一个成像元件中的每个成像元件用于对所述待检测样品的不同区域拍摄图像。
- 根据权利要求12所述的装置,其中,所述光照强度确定单元包括:归一化单元,用于对于每个成像元件归一化所述灰度标准差;优选光照强度范围确定单元,用于根据归一化的灰度标准差及其与所 述多个光照强度之间的对应关系,确定每个成像元件的优选光照强度范围;交集获取单元,用于获取所述至少一个成像元件的优选光照强度范围之间的交集;光照强度确定子单元,用于根据所述交集确定每个成像元件的所述用于检测的光照强度。
- 根据权利要求13所述的装置,其中,所述优选光照强度范围确定单元还用于:将等于预定值的归一化的灰度标准差所对应的光照强度之间的范围确定为每个成像元件的所述优选光照强度范围。
- 根据权利要求14所述的装置,其中,所述交集获取单元还用于:判断各个成像元件的所述优选光照强度范围之间是否存在交集,若存在,则获取所述至少一个成像元件的优选光照强度范围之间的交集;否则,逐渐减小所述预定值,直到获取的各个成像元件的所述优选光照强度范围之间存在交集。
- 根据权利要求15所述的装置,其中,所述预定值为大于或等于0.8。
- 根据权利要求13至16中任一项所述的装置,其中,所述光照强度确定子单元还用于:将所述交集中的中间值确定为每个成像元件的所述用于检测的光照强度。
- 根据权利要求11或12所述的装置,其中,所述光照强度确定单元还用于:对于每个成像元件,将所述灰度标准差中最大的灰度标准差对应的光照强度确定为每个成像元件的所述用于检测的光照强度。
- 一种光学检测装置,包括权利要求11至18中任一项所述的确定用于检测的光照强度的装置。
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