WO2017135683A1 - Light source module unit for exposure and exposure device having same - Google Patents

Abstract

The present invention provides a light source module unit for exposure. The light source module unit for exposure according to the present invention comprises: a light source panel having multiple ultraviolet light-emitting elements configured in an array structure; and an optical panel having multiple unit light-collecting lenses configured on a lens panel, which is arranged near light emission parts of the light-emitting elements, and positioned to correspond to the unit light-emitting elements, respectively, in a matrix-type array structure such that, with regard to a main optical axis, the unit light-collecting lenses are eccentric toward a predetermined reference center axis that extends through the center of the ultraviolet light-emitting element array, wherein each unit light-collecting lens has a light incident surface formed in the shape of one selected from a flat surface, a concave surface having a curvature (R) of (-) 0.15 or less, and a convex surface having a curvature (R) of (+) 0.15 or less, and has a light emission surface formed as a convex lens, and the distance (C1) of spacing between the ultraviolet light-emitting elements and the unit light-collecting lenses is arranged to satisfy, with regard to the diameter (d) of the light-collecting lenses, the value of 0.15＜C1/d＜0.5. The above configuration is advantageous in that diffused light emitted from each unit ultraviolet light-emitting element is effectively collected in the light-receiving area of the exposure device, making it possible to maximize the amount of light with lower power consumption; particularly, ultraviolet light having a single short wavelength and having high efficiency and high output is implemented, thereby securing an exposure performance that can make the exposure pattern smaller and can substantially improve the resolution; and the light source of an existing exposure device can be replaced in a practical and economical manner.

Description

Light source module unit for exposure and exposure apparatus equipped with the light source module unit

The present invention relates to an exposure light source, and more particularly, to an exposure ultraviolet light emitting device (UV LED) light source module unit used in a photolithography process in order to form a fine circuit pattern on a semiconductor wafer, an image display panel, or the like. In particular, the exposure performance by maximizing the light output power and illuminance distribution by the configuration of an array module in which the optical array structure of the condenser lens and the shape structure of the condenser lens for the light source, the UV light source (UV LED), are optimally combined. UV light emitting device for improving efficiency and exposure efficiency and improving cost performance ratio by easily replacing the light source module set-up with the existing exposure apparatus. LED) A light source module unit and an exposure apparatus provided with the light source module unit.

For example, semiconductor devices, printed circuit boards (PCBs), and liquid crystal displays (LCDs), organic light emitting diodes (OLEDs), and plasma display panels (PDPs) that are embedded as main components of electrical and electronic devices. The display panel is manufactured so that a fine circuit pattern is formed by an optical microfabrication technique, collectively called photolithography, in an exposure process on its manufacturing process.

In general, an ultra-high pressure mercury lamp or a halogen lamp is mainly used as an exposure light source used in a conventional exposure process. However, such a conventional exposure light source is an exposure process due to low efficiency and high cost due to low lifetime and high power consumption. In addition to the efficient problems of the environment as well as environmental problems are exposed.

In particular, the market for ultra-high resolution using micronization of exposure patterns in the manufacture of thin film transistor (TFT) or color filter (CF) in display fields such as liquid crystal display (LCD) and organic light emitting diode (OLED). Unfortunately, due to the technical limitations of the process of minimizing the exposure pattern using the existing exposure light source (Hg Lamp), it is unfortunately impossible to realize the miniaturization of the exposure pattern and ultra high resolution, which is the core technology of the display industry.

In addition, as the demand for miniaturization and high precision of the exposure pattern is increased due to the recent trend of miniaturization, high capacity, high integration, and high density of semiconductor devices, there is a limit to realizing the demand for the current miniaturization pattern with a conventional light source for exposure. There is a problem with.

Therefore, in recent years, the development of new exposure technologies such as immersion exposure and extreme ultraviolet exposure, etc., is actively underway. Especially, UV light emitting devices (UV LEDs) have low power consumption, long life, selective use of single wavelengths, and short wavelengths. In addition, as an environmentally friendly light source for exposure, the trend has been spotlighted as an alternative to the conventional light source for exposure.

However, in the case of an exposure apparatus using an ultraviolet light emitting element (UV LED) as a light source, the ultra-high resolution is realized and miniaturized by the configuration of an optical path that can reduce light loss, the illuminance distribution and the power output of the light output, and the miniaturization of the exposure pattern. Along with the development of high efficiency new light sources (UV LEDs) for high capacity and high density, there is an urgent need for the development of optical components, modules and units.

The present invention is derived under the technical background as described above, and the problems of the background art described above are retained by the applicant for the derivation of the present invention or newly acquired and secured in the derivation process of the present invention. It is not known to the public before the application of the invention.

SUMMARY OF THE INVENTION The present invention has been made to improve this in consideration of the problems of the conventional light source for exposure of an exposure apparatus under the background art as described above, and an object of the present invention is to maximize exposure performance by maximizing light output power and illuminance distribution. And an ultraviolet light emitting device (UV LED) light source module unit capable of effectively improving exposure efficiency and an exposure apparatus provided with the light source module unit.

Another object of the present invention is to provide a low power consumption ultraviolet light emitting device (UV LED) light source module unit capable of miniaturizing an exposure pattern and realizing a high resolution by maximizing light output power and illuminance distribution, and an exposure including the unit as a light source. It is for providing a device.

Another object of the present invention is to replace the light source module that is set-up (up-up) in the existing exposure apparatus to easily increase the cost performance ratio (cost performance ratio) of an economical exposure ultraviolet light emitting device (UV LED) A light source module unit and an exposure apparatus provided with the light source module unit.

In order to achieve the above objects, a light source module unit for exposure according to the present invention includes: a light source panel in which a plurality of unit ultraviolet light emitting elements are mounted in a matrix-type array structure on a circuit board and mounted on a support panel; The center of the ultraviolet light emitting element array on the light source panel with respect to the main light axis in the lens panel disposed on the light output side of the light emitting element so as to face the light source panel, a plurality of unit condensing lenses respectively corresponding to the light emitting element And a first optical panel formed in an array structure in a matrix form eccentric to an arbitrary reference center axis side passing through the light source. The unit condensing lens includes a plane and a light curvature within (−) 0.15. And a light exit surface formed of a convex lens, wherein the light exit surface is formed of a convex lens, and the unit ultraviolet light emitting element and the unit are formed in any one selected from the concave surface having (R) and the convex surface having curvature R within (+) 0.15. The separation distance C1 of the condensing lens is arranged to satisfy a value of 0.15 <C1 / d <0.5 with respect to the diameter d of the unit condensing lens.

In order to achieve the above objects, an exposure apparatus according to the present invention includes an exposure table for supporting an exposure substrate coated with a photosensitive agent, and driving means for driving the exposure table in a movable state on XY plane coordinates. And an exposure light source module unit provided to emit illumination light to a mask for forming an exposure pattern of the substrate, an optical system provided between the substrate and the light source module unit for exposure, and driving of the exposure means and the light source unit for exposure. An exposure apparatus comprising a control means for controlling the apparatus, the exposure light source module unit comprising: a light source panel configured to mount a plurality of unit ultraviolet light emitting elements in a matrix-type array structure on a circuit board and mounted on a support panel; The center of the ultraviolet light emitting element array on the light source panel with respect to the main light axis in the lens panel disposed on the light output side of the light emitting element so as to face the light source panel, a plurality of unit condensing lenses respectively corresponding to the light emitting element And a first optical panel formed in an array structure in a matrix form eccentric to an arbitrary reference center axis side passing through the light source. The unit condensing lens includes a plane and a light curvature within (−) 0.15. And a light exit surface formed of a convex lens, wherein the light exit surface is formed of a convex lens, and the unit ultraviolet light emitting element and the unit are formed in any one selected from the concave surface having (R) and the convex surface having curvature R within (+) 0.15. The separation distance of the condenser lens may be arranged to satisfy a value of 0.15 <C1 / d <0.5 with respect to the diameter of the unit condenser lens.

In the light source module unit for exposure of the present invention having the configuration as described above, the curvature of the convex lens is defined as (+), and the curvature of the concave lens is defined as (-).

According to the present invention, the diameter of the unit condenser lens of the first optical panel satisfies a value of 2.8 <d / C1 <5.8 with respect to the separation distance between the unit ultraviolet light emitting element and the unit condenser lens of the first optical panel. It is formed to.

According to another aspect of the invention, it may have a configuration further provided with a second optical panel arranged side by side on the light exit side of the first optical panel. In such a configuration, in the second optical panel, a plurality of unit condensing lenses each having a light incident surface and a light emitting surface formed of convex lenses are respectively disposed on the light source panel with respect to the main light axis at positions corresponding to the light emitting elements, respectively. It is provided in an array structure in the form of a matrix eccentrically toward any reference central axis side passing through the center of the ultraviolet light emitting element array.

In the light source module unit for exposure according to the present invention having the configuration as described above, the separation distance C2 between the unit condenser lens of the first optical panel and the unit condenser lens of the second optical panel is the second optical. It is preferable to have a structure arranged so as to satisfy the value of C2 / d2 &lt; 0.8 with respect to the diameter of the unit condensing lens of the panel.

The diameter of the unit condenser lens of the second optical panel is preferably formed so as to satisfy a value of 0.7 <d2 / d <1.2 with respect to the diameter of the unit condenser lens of the first optical panel.

Meanwhile, according to the present invention, the unit condensing lens is gradually spaced apart from an arbitrary reference central axis side passing through the center of the ultraviolet light emitting element array on the light source panel and disposed closer to the edge, so that the main optical axis of the corresponding unit ultraviolet light emitting element is corresponding. The array structure has a matrix form in which the amount of eccentricity increases, and the diffused light emitted from each unit ultraviolet light emitting element is focused on the light receiving area set in the optical system of the exposure apparatus.

In the above-described configuration, ultraviolet rays spaced apart from the reference center axis side passing through the center of the ultraviolet light emitting element array on the light source panel with respect to the optical distance "a" set in the optical system from the ultraviolet light emitting element to the light receiving region. Distance "b" of the light emitting element, facing distance "c" of the ultraviolet light emitting element and the condenser lens, eccentric distance "x" between the central axis of each of the ultraviolet light emitting elements and the central axis of the condensing lens, and light receiving The relationship of the diameter "t" of the area A is set so that the reference of the eccentric distance "x" of the condensing lens satisfies "x = b * c / a", and the range of "x" is "bc (2b). -t) / 2ab < x < bc (2b + t) / 2ab "

According to an aspect of the present invention, the ultraviolet light emitting device may be mounted on the unit circuit board as a packaged LED light source. Accordingly, the support panel constituting the light source panel may have a configuration in which a plurality of packaged LED light sources are mounted on a plurality of unit circuit boards, respectively.

According to another aspect of the invention, the ultraviolet light emitting device may be mounted as a packaged LED light source on a single circuit board.

According to another aspect of the present invention, the ultraviolet light emitting device may be mounted as an LED light source on a single or multiple circuit boards in the form of a single chip or a plurality of chips.

In addition, the light source panel and the optical panel is preferably configured in a unit state that is supported by the housing and detachable to the exposure apparatus, the heat dissipation means may be further provided around the light source panel and the optical panel. .

According to the light source module unit for exposure according to the present invention, the light condensing lens array module optical panel which can maximize the condensing efficiency for the light source panel, which is a plurality of ultraviolet light emitting element (UV LED) array modules, is optimally combined with low power consumption. High power and high efficiency exposure process by single wavelength and short wavelength of ultraviolet rays can be realized. Accordingly, the light source module unit for exposure according to the present invention can provide an exposure apparatus capable of miniaturizing an exposure pattern and achieving breakthrough high resolution by effectively improving exposure performance and exposure efficiency.

In addition, according to the light source module unit for exposure according to the present invention, it is possible to easily replace the light source module that is set-up (set-up) to the existing exposure apparatus can be replaced by a compatible module unit cost (cost performance ratio It is possible to provide a high practical and economical exposure equipment.

In addition, the use of the light source module unit for exposure according to the present invention can be expected to reduce the maintenance cost through the use of low power consumption, reducing the cost of replacing the light source, improving the operating time of the exposure equipment, and solving environmental problems. .

In addition, the light source module unit for exposure according to the present invention can be freely selectively used as a high efficiency high power single wavelength and short wavelength ultraviolet light in particular as needed, so that the high resolution by miniaturization of the pattern which is a key technology that can realize high quality exposure Implementation is possible.

1 is a schematic exploded perspective view showing a light source module unit for exposure according to the present invention.

2 is a schematic perspective view schematically showing a unit light source and a condenser lens array structure of an exposure light source module unit according to the present invention;

3 is a schematic plan view schematically showing an array structure of an ultraviolet light emitting element composed of a unit light source of an exposure light source module unit according to the present invention;

4 and 5 are schematic diagrams shown for explaining the eccentric array structure of the unit light source and the condenser lens of the light source module unit for exposure according to the present invention, respectively.

6 and 7 are schematic cross-sectional views schematically showing the range of the light incident surface curvature of the unit condenser lens of the light source module unit for exposure according to the present invention, respectively.

8 to 10 are graphs respectively measured by illuminance of a light irradiation surface (arget) according to the curvature of the light incident surface of the unit condenser lens of the light source module unit for exposure according to the present invention.

Figure 11 is a schematic exploded perspective view showing a light source module unit for exposure according to another embodiment of the present invention.

FIG. 12 is a schematic perspective view schematically illustrating a unit light source and a condenser lens array structure of an exposure light source module unit according to another embodiment of the present invention shown in FIG. 11; FIG.

FIG. 13 is a schematic cross-sectional view schematically showing the relationship between an optical structure and an arrangement state of a unit condenser lens of an exposure light source module unit according to another embodiment of the present invention illustrated in FIGS. 11 and 12. .

FIG. 14 and FIG. 15 are light irradiation surfaces according to the relationship between the optical structure and the arrangement state of the unit condenser lens of the light source module unit for exposure according to another embodiment of the present invention shown in FIGS. 11 and 11, respectively. Figure shows the measurement of the roughness of the graph.

16 is a view showing the photographed light irradiation state of the light source module unit for exposure according to the present invention.

17 is an external perspective view schematically showing a state in which a light source module unit for exposure according to the present invention is unitized by a housing;

18 illustrates the results of measuring CD values according to mask line widths by photographing main portions of circuit patterns formed on a wafer by an exposure light source module unit and a conventional exposure light source, a mercury lamp (Hg Lamp) according to the present invention. Shown.

19 is a graph illustrating measurement results of CD values according to mask line widths of circuit patterns formed on a wafer by a light source module unit for exposure according to the present invention and a mercury lamp (Hg Lamp) that is a conventional light source for comparison, respectively.

Fig. 20 is a schematic structural diagram schematically showing an essential part of an exposure apparatus to which an exposure light source module unit according to the present invention is applied.

Hereinafter, a light source module head unit for exposure according to the present invention will be described in detail with reference to the accompanying drawings. The following description and the accompanying drawings are only focused on the preferred embodiments of the present invention and are not intended to limit the light source module unit for exposure of the present invention described in the claims.

1 and 2, in the light source module unit 100 for exposure according to the present invention, a plurality of unit ultraviolet light emitting devices (UV LEDs) 111 are mounted on a circuit board 112 in a matrix-type array structure. A plurality of unit condensing on the light source panel 110 configured to be mounted on the support panel 113 and the lens panel 122 disposed on the light output side of the ultraviolet light emitting element 111 to face the light source panel 110. The lens 121 of the array of ultraviolet light emitting elements 111 on the light source panel 110 with respect to the main optical axis at the position of the interval p corresponding to the interval p of the ultraviolet light emitting element 111 array, respectively. And an optical panel 120 provided in an array structure in the form of a matrix eccentrically to the side of any reference central axis passing through the center O (see FIG. 2).

In the light source module unit for exposure 100 according to the present invention having the configuration as described above, the unit condensing lens 121 is a concave surface having a light incident surface and a curvature R within (−) 0.15. And a convex surface having a curvature R within (+) 0.15, and a light exit surface is formed of a convex lens, and the unit ultraviolet light emitting element 111 and the unit condenser lens 121 are formed. ), The separation distance C1 is arranged to satisfy a value of 0.15 <C1 / d <0.5 with respect to the diameter d of the unit condensing lens 121.

Here, the curvature of the convex lens is defined as (+), and the curvature of the concave lens is defined as (-).

In other words, the light source module unit 100 for exposure according to the present invention combines the optical arrangement structure of the unit condensing lens and the shape structure of the light incident surface and the emitting surface in an optimal state with respect to the unit ultraviolet light emitting device (UV LED) as a light source. By configuring the array module, it is possible to effectively improve the exposure performance and exposure efficiency by maximizing the light output power and illuminance distribution, thereby miniaturizing the exposure pattern and realizing high resolution.

A detailed configuration of the optical array structure of the unit condenser lens of the exposure light source module unit 100 and the range of the curvature R of the light incident surface and the exit surface according to the present invention will be described later with reference to the accompanying drawings.

According to the present invention, as shown in FIG. 1, the ultraviolet light emitting element 111 emits ultraviolet light in a range of 100 nm to 410 nm in a band or more on a strip-shaped unit circuit board 112. to be mounted to the chip package or the chip and the package of the horn form of the LED light source the sum is preferred.

Accordingly, the light source panel 110 is mounted in a state in which a plurality of strip-shaped unit circuit boards 112 are arranged side by side on the support panel 113 and mounted on the unit circuit boards 112, respectively. Reference numeral 111 constitutes an array module in matrix form on xy coordinates.

On the other hand, the ultraviolet light emitting element 111 and the chip, package or chip that emits ultraviolet light in the range of 100nm wavelength range to 410nm wavelength to form a matrix array structure on a single circuit board 112 of a larger area; The package can be mounted as a mixed LED light source.

3 is a schematic plan view schematically showing an array structure of the ultraviolet light emitting element 111 provided as a unit light source of the exposure light source module unit 100 according to the present invention.

Referring to FIG. 3, the exposure light source module unit 100 according to the present invention includes a plurality of xy rectangular coordinates whose origin is the center O of the array of ultraviolet light emitting elements 111 on the light source panel 110. The ultraviolet light emitting element 111 is configured to form an array structure of a matrix form spaced apart at regular intervals p.

Meanwhile, the support panel 113 is illustrated as a rectangular panel, but the shape structure of the support panel 113 is shown as an embodiment, and the light source module unit 100 for exposure according to the present invention is limited. no.

Therefore, the light source module unit 100 for exposure according to the present invention may be applied to an embodiment modified in various shape structures such as, for example, a disc shaped panel.

That is, the shape structure of the support panel 113 in which the ultraviolet light emitting element 111 is arrayed according to the specification or configuration of an exposure apparatus to which the exposure light source module unit 100 according to the present invention is mounted as a light source, an exposure target or an exposure pattern, etc. It may be modified in various forms to be employed in an optimal state.

According to an aspect of the present invention, the ultraviolet light emitting element 111 is arranged in the horizontal and vertical rows of an odd number (9) in the support panel 113, as illustrated in FIG. The unit ultraviolet light emitting device 111 may be disposed at the center O of the ultraviolet light emitting device array.

On the other hand, in the structure in which the ultraviolet light emitting element 111 is arranged in an even number of horizontal and vertical columns on the support panel 113, unit ultraviolet light is emitted at the center O of the ultraviolet light emitting element array of the light source panel 110. It has an array structure in which the arrangement of the elements 111 is excluded.

That is, in the center O of the ultraviolet light emitting element array on the light source panel 110, a light receiving region in which diffused light irradiated from each unit ultraviolet light emitting element is collected by the condensing lens 121 (FIGS. 4 and 5). It is arranged coaxially with the center of reference numeral "A" of the reference numeral, and serves as a reference for determining the amount of eccentricity (see e1, e2, en in FIGS. 2 and 4) of each unit condensing lens 121.

The light receiving region (see reference numeral “A” in FIGS. 4 and 5) is apertured so as to form a focusing target through which focused light passes through a reflecting mirror provided in an optical system of an exposure apparatus, which is not shown. It is prepared in the form.

Accordingly, in the light source module unit 100 for exposure according to the present invention, the diffused light emitted from each unit ultraviolet light emitting element 111 is collected and refracted by the condensing lens 121 to be formed as a condensing target of the light receiving region. Condensed to pass through the aperture.

That is, in the exposure light source module unit 100 according to the present invention, the center O of the ultraviolet light emitting element 111 array on the light source panel 110 and the center of the lens panel 120 are coaxially disposed. The condensing lens 121, which is gradually spaced apart from the reference center axis side passing through the center O and is disposed close to the edge, is eccentric to the reference center axis side described above with respect to the main light axis of the ultraviolet light emitting element 111 corresponding thereto. Distance is gradually increased.

In other words, the light source module unit 100 for exposure according to the present invention is disposed so that the condenser lens 121 is eccentric with respect to the main light axis of the ultraviolet light emitting element 111, so as to perform the role and function of a strabismus lens. Done. As a result, the light emitting efficiency of the diffused light emitted from each unit UV light emitting device 111 may be maximized.

That is, the optical arrangement structure of the unit condenser lens with respect to the unit ultraviolet light emitting device (UV LED) of the light source module unit 100 for exposure according to the present invention, the condensing efficiency of the diffused light emitted from each unit ultraviolet light emitting device 111 Each unit condenser lens 121 is arranged so as to be eccentric with respect to the main optical axis of the ultraviolet light emitting element 111 in order to maximize the specific constitution and operation thereof.

4 and 5 are schematic views illustrating an array structure in which the condenser lens 121 of the light source module unit 100 for exposure according to the present invention is eccentric with respect to the main light axis of the ultraviolet light emitting element 111.

In FIG. 4 and FIG. 5, "a" shows the optical distance from the ultraviolet light emitting element 111 to an aperture set to the light receiving region A which is a light collecting target.

In addition, "b" indicates a separation distance of the ultraviolet light emitting device 111 disposed to be spaced apart from the reference center axis side passing through the center O of the ultraviolet light emitting device array of the light source panel 110.

In addition, "c" represents a distance between the ultraviolet light emitting element 111 and the condenser lens 121 at a facing distance, and "x" represents an eccentricity between the central axis of the ultraviolet light emitting element 111 and the central axis of the condensing lens 121. "T" represents the diameter of the light-receiving area A. In FIG.

4 and 5, the light source module unit 100 for exposure according to the present invention is optical from an ultraviolet light emitting element 111 to an aperture set to a light receiving region A that is a light collecting target. With respect to the distance "a", it is preferable that the relationship of "b" and "c", "x" and "t" mentioned above is comprised so that it may be defined by following Formula.

That is, the reference of the eccentric distance "x" of the condensing lens 121 is set to satisfy "x = b * c / a", and the range of "x" is "bc (2b-t) / 2ab <x < bc (2b + t) / 2ab "is set to be satisfied.

Hereinafter, the range of the curvature R of the light incident surface and the exit surface of the unit light collecting lens 121 for maximizing the light output power and illuminance distribution of the light source module unit 100 for exposure according to the present invention and its The effect will be described in detail.

6 and 7 are schematic cross-sectional views schematically showing the range of the light incident surface curvature R of the unit condenser lens of the light source module unit for exposure according to the present invention, respectively.

6 and 7, the exposure light source module unit 100 according to the present invention includes light of the unit condenser lens 121 in order to maximize the condensing efficiency of the diffused light emitted from the ultraviolet light emitting element 111. The incident surface is formed in any one of a plane, a concave surface having a curvature R within (-) 0.15 and a convex surface having a curvature R within (+) 0.15, and the light exit surface is convex. It is formed into a lens.

According to the present invention, the range of the light incident surface curvature R of the unit condensing lens 121 as described above is the separation distance C1 of the unit condensing lens 121 with respect to the unit ultraviolet light emitting element 111 and the The arrangement in which the relationship with respect to the diameter d of the unit condensing lens 121 satisfies the value of 0.15 &lt; C1 / d &lt; 0.5 has a light irradiation surface (with the actual value of &quot; C1 / d &quot; Target (exposure surface) by measuring the illuminance of the light emitted from the ultraviolet light emitting element 111 through the maximization of the light condensing efficiency is set to a condition that can be obtained effective and effective best illuminance.

8 to 10 are graphs respectively measured by illuminance of the light irradiation surface (exposure surface) according to the light incident surface curvature R of the unit condenser lens of the light source module unit 100 for exposure according to the present invention. to be.

Referring to FIG. 8, when the light incident surface of the unit condenser lens 121 is formed in a plane, the exposure light source module unit 100 according to the present invention has a maximum value of 1 on a light irradiation surface. It can be seen that the output to form the illuminance.

On the other hand, when the light incident surface of the unit condensing lens 121 is formed as a concave surface having a curvature R of (-) 0.15 and a convex surface having a curvature R of (+) 0.15, respectively, It can be confirmed that the illuminance of the light irradiation surface (Target) is output so as to form an illuminance of about 90% of the maximum value 1.

Therefore, the light source module unit 100 for exposure according to the present invention has the light incident surface curvature R of the unit condenser lens 121 (-) 0.15 &lt; R &lt; (+) Has a configuration set in the range of 0.15.

Referring to FIG. 9, when the diameter d of the unit condenser lens 121 is formed to have a standard size, a setting relationship C1 of the separation distance C1 with respect to the unit UV light emitting element 111 is shown. / d) value can be confirmed to output so as to form the illuminance of the maximum value (1) on the light irradiation surface (arget (exposure surface)) around 0.3.

When the setting relationship C1 / d of the separation distance C1 with respect to the unit ultraviolet light emitting element 111 is about 0.15 and about 0.5, respectively, the illuminance of the light-targeting surface (exposure surface) of the unit ultraviolet light emitting element 111 is the maximum value (1). It can be seen that the output to form a roughness of about 80%.

Accordingly, the exposure light source module unit 100 according to the present invention may be disposed at a separation distance C1 of the unit condensing lens 121 with respect to the unit UV light emitting element 111 and a diameter d of the unit condensing lens 121. Has a configuration arranged such that the relation value satisfies the range of 0.15 &lt; C1 / d &lt; 0.5.

Referring to FIG. 10, when the separation distance C1 of the unit condensing lens 121 with respect to the unit ultraviolet light emitting element 111 is arranged to be set to a constant value, the separation distance C1 of the unit condensing lens 121 is set. ) And the relationship (d / C1) of the diameter d of the unit condenser lens 121 to output the illuminance of the maximum value 1 to the light irradiation surface (exposure surface) at about 4.0 to 5.8. You can check it.

 The relationship d / C1 of the separation distance C1 of the unit condensing lens 121 and the diameter d of the unit condensing lens 121 is about 2.8 from the light irradiation surface. It can be seen that the illuminance outputs to form an illuminance of about 80% of the maximum value 1.

Therefore, the light source module unit 100 for exposure according to the present invention is spaced apart from the unit condenser lens 121 so as to obtain maximum illuminance by guiding through the maximization of the condensing efficiency of the diffused light emitted from the ultraviolet light emitting element 111. The relationship d / C1 of the distance C1 and the diameter d of the unit condenser lens 121 is arranged so as to satisfy the value of 2.8 <d / C1 <5.8.

FIG. 11 is a schematic exploded perspective view illustrating a light source module unit for exposure according to another embodiment of the present invention, and FIG. 12 is a unit light source and a condenser lens of the light source module unit for exposure according to another embodiment of the present invention shown in FIG. 11. It is a schematic perspective view which was shown typically for demonstrating an array structure.

11 and 12, a light source module unit 100 for exposure according to another embodiment of the present invention is provided with a second optical panel provided to be arranged side by side on the light exit side of the first optical panel 120. It has a configuration that further includes (130).

The second optical panel 130 has a plurality of unit condenser lenses 131 each having a light incident surface and a light emitting surface formed as convex lenses, respectively, with respect to the main light axis at positions corresponding to the light emitting elements 111. It is provided in a matrix-like array structure eccentric to any reference center axis side passing through the center of the ultraviolet light emitting element array on the panel 110.

That is, the unit condensing lens 131 of the second optical panel 130 is disposed so as to be eccentric with respect to the main light axis of the unit ultraviolet light emitting element 111 of the light source panel 110. By performing the role and function of the lens, it serves to maximize the light condensing efficiency of the diffused light emitted from each unit ultraviolet light emitting element 111. As described above, the configuration in which the unit condenser lens 131 of the second optical panel 130 is eccentric is arranged in the unit of the first optical panel 120 as described with reference to FIGS. 4 and 5. Since the condenser lens 121 is substantially the same as the array arrangement structure in which the condensing lens 121 is eccentric, a detailed description thereof will be omitted.

FIG. 13 is a schematic cross-sectional view schematically showing the relationship between an optical structure and an arrangement state of a unit condenser lens of an exposure light source module unit according to another embodiment of the present invention illustrated in FIGS. 11 and 12. to be.

Referring to FIG. 13, the exposure light source module unit 100 according to another embodiment of the present invention may include a unit condenser lens 121 of the first optical panel 120 and a unit of the second optical panel 130. The separation distance C2 of the condenser lens 131 has an array structure arranged to satisfy a value of C2 / d2 <0.8 with respect to the diameter d2 of the unit condenser lens 131 of the second optical panel 130. .

The diameter d2 of the unit condenser lens 131 of the second optical panel 130 is 0.7 <d2 with respect to the diameter d1 of the unit condenser lens 121 of the first optical panel 120. It is formed to satisfy the value of / d <1.2.

The distance C2 and the diameter d2 of the unit light collecting lens 131 of the second optical panel 130 as described above satisfy the values of C2 / d2 <0.8 and 0.7 <d2 / d <1.2, respectively. The arrangement is arranged to measure the illuminance of the target (exposure surface) in a state where the value of "d2 / d" is set at regular intervals, thereby maximizing the condensing efficiency of the diffused light emitted from the ultraviolet light emitting element 111. It is set to the condition that can obtain effective and strong best illumination.

14 and 15 are measured by the light incident surface shape of the unit condenser lens of the light source module unit for exposure according to another embodiment of the present invention shown in FIGS. 11 and 12 and the illuminance of the light irradiation surface according to the arrangement It is a graph shown.

Referring to FIG. 14, when the diameter d2 of the unit condenser lens 131 of the second optical panel 130 is formed at a constant value, the unit condenser lens 121 of the first optical panel 120 is formed. ) And the relationship value C2 between the separation distance C2 of the unit condenser lens 131 of the second optical panel 130 and the diameter d2 of the unit condenser lens 131 of the second optical panel 130. / d2) can be seen that the illuminance of the maximum value (1) is formed on the light irradiation surface (Target (exposure surface)) at 0.1 and then gradually decrease the illuminance from about 0.8 to 90% of the maximum value (1).

Therefore, the exposure light source module unit 100 according to another embodiment of the present invention may be induced by maximizing the light condensing efficiency of the diffused light emitted from the ultraviolet light emitting element 111 to obtain the maximum illuminance. The separation distance C2 and the diameter d2 of the unit light collecting lens 131 of the panel 130 each have a value of C2 / d2 &lt; 0.8.

Referring to FIG. 15, the diameter d of the unit condenser lens 121 of the first optical panel 120 and the diameter d2 of the unit condenser lens 131 of the second optical panel 130 are determined. It can be seen that the relationship value d2 / d forms the illuminance of the maximum value 1 on the light irradiation surface at about 1.2, and then gradually decreases the illuminance at about 90% of the maximum value 1 at about 0.7. have.

Accordingly, the exposure light source module unit 100 according to another embodiment of the present invention may be induced by maximizing the light condensing efficiency of the diffused light emitted from the ultraviolet light emitting element 111 to obtain the maximum illuminance. The relationship d2 / d between the diameter d of the unit condenser lens 121 of the panel 120 and the diameter d2 of the unit condenser lens 131 of the second optical panel 130 is 0.7 <d2. It has a configuration that satisfies the condition of /d<1.2.

Meanwhile, FIG. 16 illustrates a light irradiation state of an exposure light source module unit according to the present invention, and FIG. 16A illustrates a light irradiation state of the light source panel 110 in which the optical panel 120 is excluded. In FIG. 16, (b) shows a light irradiation state through the optical panel 120.

Referring to FIG. 16, it can be seen that the brightness of the light irradiation state through the optical panel 120 appears brighter than the light irradiation state in which the optical panel 120 is excluded.

According to one aspect of the invention, the light source module unit 100 for exposure is mounted to be unitized so that the light source panel 110 and the optical panel 120 is supported by the housing 140 as shown in FIG. It can have a configured configuration.

Therefore, the light source module unit 100 for exposure of the present invention unitized to be mounted on the housing 140 as described above can be used in a removable state as a light source of an exposure apparatus (not shown). As a result, it is possible to provide a practical and economical exposure apparatus having a high cost performance ratio by retaining compatibility that can be partially replaced and improved by eliminating mercury or halogen lamps mounted as a light source of an existing exposure apparatus. Do.

On the other hand, the light source module unit 100 for exposure according to the present invention is a structure such as a bracket or a flange provided in the exposure apparatus in a state in which the light source panel 110 and the optical panel 120, 130 are combined to form a pair It may be installed as a light source supported by.

The light source module unit for exposure 100 according to the present invention may further include heat dissipation means provided in the housing 140 to be provided around the light source panel 110 and the optical panel 120.

As illustrated in FIG. 17, the heat dissipation means may be a water-cooled heat dissipation means connected to a chiller to circulate the coolant through the coolant inlet 141 and the outlet 142.

The heat dissipation means may include, for example, a heat sink embedded in the housing 140 to mount the light source panel 110 and the optical panel 120.

In addition, the heat dissipation means may be an air-cooled heat dissipation means using a fan or blower for the circulation of air, may be installed in a state in which the air-cooled heat dissipation means and the water-cooled heat dissipation means are merged.

According to another aspect of the present invention, the light source module unit 100 for exposure according to the present invention, although not shown by the drawings, the ultraviolet light emitting element 111 and the condenser lens 121, 131 is arranged in a circular array It can be configured to have a structure. Such a circular array structure has an advantage of eliminating light loss generated from the ultraviolet light emitting element 111 arranged at the corner portion spaced farthest from the center O in the rectangular array structure.

Meanwhile, FIG. 18 illustrates photographing and comparing the exposure performance of the light source module unit 100 for exposure according to the present invention having the configuration as described above and the exposure performance of the conventional light source Hg Lamp. Drawing.

The test results shown in FIG. 18 apply 1.5 μm thick photoresist (PR: DTFR-JC800) to the 3.5 inch wafer, and the mask line widths are spaced at intervals of 0.2 (or 0.3 μm) from 1.0 to 3.5 μm, respectively. After exposure by setting and developing with 2.38 wt% developer of tetramethylammonium hydroxide (TMAH), critical line width (CD) of the fine circuit pattern formed through photolithography used in a typical LCD manufacturing process Was measured by taking a picture.

Referring to FIG. 18, the limit of the critical line width (CD) of the fine circuit pattern which can be realized by using a mercury lamp, which is a conventional light source for exposure, is around 2.0 μm, while using the light source module unit for exposure according to the present invention. It can be seen that the critical line width (CD) of the fine circuit pattern that can be realized can be around 1.4um.

In addition, FIG. 19 illustrates the critical line width fine dimension CD measured by the photographing in FIG. 18 in a graph so as to be compared with the ideal critical line width fine dimension CD.

Referring to FIG. 19, the critical line width fine dimension (CD) of the fine circuit pattern that can be implemented using the light source module unit for exposure according to the present invention is a threshold of the fine circuit pattern that can be implemented using a mercury lamp that is a conventional light source. It can be seen that it is formed in a pattern closer to the ideal critical line width CD than the line width CD.

Therefore, the line width of the fine circuit pattern formed using the light source module unit for exposure according to the present invention may be formed finer and more precisely than the line width of the circuit pattern formed using a mercury lamp (Hg Lamp) which is a conventional light source for exposure. can confirm. Accordingly, the light source module unit for exposure according to the present invention enables a breakthrough high resolution in the exposure process.

20 is a schematic structural diagram schematically showing an essential part of an exposure apparatus to which an exposure light source module unit according to the present invention is applied. Here, the same reference numerals as the reference numerals of the drawings shown above represent the same components.

Referring to FIG. 20, the exposure apparatus 200 according to the present invention moves an exposure table 250 for supporting the exposure glass substrate 10 to which the photosensitive agent is applied, and moves the exposure table 250 on XY plane coordinates. Driving means (not shown) for driving in a possible state, an exposure light source module unit 100 provided to emit exposure illumination light onto the glass substrate 10, the glass substrate 10 and the exposure light source module It comprises an optical system (210 to 230) provided between the unit 100 and the control means (not shown) for controlling the driving means and the drive of the exposure light source unit 100 in conjunction with. Here, reference numeral 240 denotes an exposure mask on which an exposure pattern is formed.

The glass substrate 10 is coated with a photosensitive agent on a surface on which the illumination light irradiated from the light source module unit 100 for exposure is incident, and the mask 240 having the same pattern as the photosensitive pattern formed on the photosensitive surface is formed in an air layer. It is provided so as to be supported by the exposure table 250 with the space between. Accordingly, the illumination light emitted from the light source module unit 100 for exposure is focused on the photosensitive surface of the glass substrate 10 by passing through the mask 240 while being condensed through the optical systems 210 to 230, thereby forming the mask 240. An exposure process is performed in which the exposure pattern is transferred to the photosensitive surface of the glass substrate 3.

The exposure table 250 moves in the XY plane coordinates by the driving means according to the relative sizes of the glass substrate 10 and the mask 240 while the positions of the glass substrate 10 and the mask 240 are aligned. The exposure process is performed.

In the exposure apparatus 200 according to the present invention, the glass substrate 10 and the mask 240 are illustrated to be spaced apart from each other, but such a configuration does not limit the present invention.

On the other hand, the mask 240 may be configured to be in close contact with the photosensitive surface of the glass substrate 10. In such a configuration, the photosensitive surface of the glass substrate 10 is closely exposed and the pattern of the mask 240 is transferred to the photosensitive surface.

In addition, the gap formed between the glass substrate 10 and the mask 240 is widened to form a pattern formed in the mask 240 by a configuration in which a reduction projection lens is interposed between the glass substrate 10 and the mask 240. The reduced projection exposure can be performed on the photosensitive surface of the glass substrate 10.

In addition, the optical systems 210 to 230 are provided to efficiently condense the illumination light onto the mask 240, and the illumination light emitted from the light source module unit 100 for exposure is set to a light receiving area. Ply for refracting the reflector 210 for reflecting through (A) and the reflector 230 for condensing the illumination light passing through the aperture (A) to the mask 240 A fly eye lens 221, a condense lens 222, and a plate lens 223, 224. The configuration of the optical system 210 to 230 is not limited to the exposure apparatus 200 according to the present invention, and various modified configurations may be applied according to the exposure target and the standard of the mask.

The light source module unit 100 for exposure is a component for characterizing the exposure apparatus 200 according to the present invention, and a plurality of unit ultraviolet light emitting devices (UV LEDs) 111 are arranged in a matrix form on the circuit board 112. A plurality of light source panels 110 mounted in a structure to be mounted on the support panel 113 and lens panels 122 disposed on the light exit side of the ultraviolet light emitting element 111 to face the light source panel 110. The unit light collecting lens 121 of the ultraviolet light emitting element 111 on the light source panel 110 with respect to the main optical axis at the position of the interval p corresponding to the interval p of the ultraviolet light emitting element 111 array, respectively. ) Includes an optical panel 120 provided in an array structure in a matrix form in a state eccentric to the reference center axis side passing through the center O of the array (see FIG. 2).

In the exposure light source module unit 100 having the above-described configuration, the unit condensing lens 121 has a flat light incident surface, a concave surface having a curvature R within (−) 0.15, and ( +) Is formed in any one form selected from the convex surface having a curvature (R) within 0.15 and at the same time the light output surface is formed of a convex lens, and the unit ultraviolet light emitting element 111 and the unit The separation distance C1 is arranged to satisfy a value of 0.15 < C1 / d < 0.5 with respect to the diameter d of the unit condenser lens 121.

According to the exposure apparatus 200 according to the present invention, the ultraviolet light emitting element 111 has a band-like unit circuit board 112 in a range of 100 nm to 410 nm, as illustrated in FIG. 1. It is preferable to be mounted as an LED light source in the form of a chip, a package or a mixture of chips and packages that emit ultraviolet light in the range.

The exposure light source module unit 100 having the configuration as described above is a combination of an optical panel that is a condensing lens array module capable of maximizing condensing efficiency with respect to a light source panel that is a plurality of UV LED array modules. It is demonstrated in detail by FIGS. 1-20, and has the structure as described in Claims 1-12 of a claim, The detailed description is abbreviate | omitted.

In short, the exposure apparatus 200 according to the present invention has a configuration in which the exposure light source module unit 100 is replaced with respect to a conventional conventional exposure apparatus, thereby using low power consumption, reducing the cost of replacing the light source, and exposing the light. Not only can we expect significant reduction in maintenance costs by improving the device uptime and solving environmental problems, but also it is possible to realize high output and high efficiency with single wavelength and short wavelength of ultraviolet rays. By the improvement, the exposure pattern can be miniaturized and breakthrough high resolution can be realized.

The present invention as described above is not limited to the specific preferred embodiment described above, and anyone skilled in the art to which the invention belongs without departing from the gist of the invention claimed in the claims. Various modifications are possible, of course, and such changes fall within the scope of the claims set forth.

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an exposure light source, and more particularly, to an exposure ultraviolet light emitting device (UV LED) light source module unit used in a photolithography process for forming a fine circuit pattern on a semiconductor wafer, an image display panel, or the like.

Claims (15)

1. A plurality of unit ultraviolet light emitting devices 111 mounted on the circuit board 112 in a matrix-like array structure and mounted on the support panel 113;

   A plurality of unit condenser lenses 121 are positioned at the positions corresponding to the light emitting elements 111 on the lens panel 122 disposed on the light output side of the light emitting element 111 so as to face the light source panel 110. The first optical panel 120 is provided in an array structure in the form of a matrix eccentric with respect to any reference center axis side passing through the center of the ultraviolet light emitting element array on the light source panel 110 with respect to the optical axis. ,

   The unit condensing lens 121 has any one selected from a plane having a light incident surface, a concave surface having a curvature R within (−) 0.15, and a convex surface having a curvature R within (+) 0.15. At the same time the light exit surface is formed of a convex lens,

   The separation distance C1 of the unit UV light emitting element 111 and the unit condenser lens 121 is arranged to satisfy a value of 0.15 <C1 / d <0.5 with respect to the diameter d of the unit condenser lens 121. Light source module unit for exposure, characterized in that.
2. The method of claim 1,

   The diameter d of the unit condenser lens 121 is formed to satisfy a value of 2.8 <d / C1 <5.8 for the separation distance C1 of the unit ultraviolet light emitting element 111 and the unit condenser lens 121. Light source module unit for exposure, characterized in that.
3. The method of claim 1,

   The second optical panel 130 is further provided side by side on the light exit side of the first optical panel 120,

   The second optical panel 130 has a plurality of unit condenser lenses 131 each having a light incident surface and a light emitting surface formed as convex lenses, respectively, with respect to the main light axis at positions corresponding to the light emitting elements 111. The light source module unit for exposure, characterized in that it is provided in an array structure of a matrix form eccentrically toward any reference center axis side passing through the center of the ultraviolet light emitting element array on the panel (110).
4. The method of claim 3, wherein

   The separation distance C2 between the unit condenser lens 121 of the first optical panel 120 and the unit condenser lens 131 of the second optical panel 130 is a unit of the second optical panel 130. The light source module unit for exposure characterized in that it is arranged so as to satisfy the value of C2 / d2 &lt; 0.8 with respect to the diameter (d2) of the condensing lens (131).
5. The method of claim 4, wherein

   The diameter d2 of the unit condenser lens 131 of the second optical panel 130 is 0.7 <d2 / d with respect to the diameter d of the unit condenser lens 121 of the first optical panel 120. The light source module unit for exposure characterized in that it is formed so as to satisfy the value of <1.2.
6. The method according to any one of claims 1 to 4,

   The unit condenser lenses 121 and 131 are gradually spaced apart from the reference center axis side passing through the center of the ultraviolet light emitting element array on the light source panel, and closer to the edge thereof, so that the unit condensing lenses 121 and 131 are disposed on the main optical axis of the corresponding unit ultraviolet light emitting element. The light source module unit for exposure characterized in that it is formed in an array structure of a matrix form in which the amount of eccentricity is increased to focus diffused light emitted from each unit ultraviolet light emitting element in a light receiving area set in the optical system of the exposure apparatus.
7. The method according to any one of claims 1 to 4,

   A distance of the ultraviolet light emitting element spaced apart from the ultraviolet light emitting element from the reference center axis side passing through the center O of the ultraviolet light emitting element array on the light source panel with respect to the optical distance "a" from the light receiving region A. " b ", the facing distance " c " between the ultraviolet light emitting element and the condenser lens of the first optical panel, the central axis of the respective ultraviolet light emitting elements and the central axis of the condenser lens of the first optical panel. The relationship between the eccentric distance " x " and the diameter " t " of the light-receiving area A between the reference indicates that the reference of the eccentric distance " x " of the condensing lens of the first optical panel is " x = b * c / a ". And a range of "x" is set to satisfy "bc (2b-t) / 2ab <x <bc (2b + t) / 2ab".
8. The method according to any one of claims 1 to 4,

   The ultraviolet light emitting device is a light source module unit for exposure, characterized in that mounted on the band-shaped unit circuit board as a LED light source of any one selected from a chip or a package or a mixture of both.
9. The method according to any one of claims 1 to 4,

   The ultraviolet light emitting device is a light source module unit for exposure, characterized in that mounted on a single circuit board as a LED light source of any one type selected from the chip or package or a mixture of both.
10. The method according to any one of claims 1 to 4,

    And the light source panel and the optical panel are supported by the housing to be united in a detachable state to the exposure apparatus.
11. The method according to any one of claims 1 to 4,

    The light source module unit for exposure, characterized in that the heat radiation means is further provided around the light source panel and the optical panel.
12. An exposure table for supporting an exposure substrate coated with a photosensitive agent, driving means for driving the exposure table in a movable state on XY plane coordinates, and emitting illumination light to a mask for forming an exposure pattern of the substrate An exposure apparatus comprising: an exposure light source module unit provided; an optical system provided between the substrate and the exposure light source module unit; and control means for controlling the driving means and the driving of the exposure light source unit in association with each other.

    The light source module unit for exposure,

    A plurality of unit ultraviolet light emitting devices 111 mounted on the circuit board 112 in a matrix-like array structure and mounted on the support panel 113;

    A plurality of unit condenser lenses 121 are positioned at the positions corresponding to the light emitting elements 111 on the lens panel 122 disposed on the light output side of the light emitting element 111 so as to face the light source panel 110. The first optical panel 120 is provided in an array structure in the form of a matrix eccentric to the reference center axis side passing through the center of the ultraviolet light emitting element array on the light source panel 110 with respect to the optical axis; ,

    The unit condenser lens 121 has any one selected from a plane having a light incident surface, a concave surface having a curvature R within (−) 0.15, and a convex surface having a curvature R within (+) 0.15. At the same time the light exit surface is formed of a convex lens,

    The separation distance C1 of the unit UV light emitting element 111 and the unit condenser lens 121 is arranged to satisfy a value of 0.15 <C1 / d <0.5 with respect to the diameter d of the unit condenser lens 121. Exposure apparatus, characterized in that.
13. The method of claim 12,

    The second optical panel 130 is further provided side by side on the light exit side of the first optical panel 120,

    In the second optical panel 130, a plurality of unit condensing lenses 131 are positioned on the light source panel 110 with respect to the main light axis at positions corresponding to the light emitting elements 111, respectively. It is provided in an array structure of a matrix form eccentric to any reference center axis side passing through,

    The separation distance C2 between the unit condenser lens 121 of the first optical panel 120 and the unit condenser lens 131 of the second optical panel 130 is a unit of the second optical panel 130. An exposure apparatus characterized by being arranged so as to satisfy the value of C2 / d2 &lt; 0.8 with respect to the diameter (d2) of the condenser lens (131).
14. The method according to claim 12 or 13,

    The unit condensing lenses 121 and 131 are gradually spaced apart from an arbitrary reference center axis side passing through the center of the ultraviolet light emitting element array of the light source panel and closer to the edge, so that the unit eccentricity with respect to the main light axis of the corresponding unit ultraviolet light emitting element is increased. An exposure apparatus characterized by comprising an array structure in the form of an elongated matrix to focus diffused light irradiated from each unit ultraviolet light emitting element in a light receiving region set in an optical system of the exposure apparatus.
15. The method according to claim 12 or 13,

    The distance of the ultraviolet light emitting element spaced apart from the ultraviolet light emitting element from the reference center axis side passing through the center O of the ultraviolet light emitting element array on the light source panel with respect to the optical distance "a" from the light receiving region A. " b ", the facing distance " c " between the ultraviolet light emitting element and the condensing lens of the first optical panel, the central axis of the respective ultraviolet light emitting elements and the central axis of the condensing lens of the first optical panel. The relationship between the eccentric distance " x " and the diameter " t " of the light-receiving area A between the reference indicates that the reference of the eccentric distance " x " of the condensing lens of the first optical panel is " x = b * c / a ". And the range of "x" is set to satisfy "bc (2b-t) / 2ab <x <bc (2b + t) / 2ab".

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