KR20150121530A - exposure apparatus using LED - Google Patents

Abstract

The present invention relates to an LED light source exposure apparatus including: a stage on which a substrate to be treated, which includes a photosensitive material applied thereto, is mounted; a base plate which is formed to have one side in a concave shape and includes an optical axis hole formed thereon; a plurality of light source units which are installed on the base plate and include LED substrates mounted with LED chips in rectangular shapes capable of generating light to which the photosensitive material is exposed; an integrator lens arranged to transmit the light generated by the light source units; and a parallel light mirror which converts the light, having passed through the integrator lens, into parallel light and reflects the parallel light toward the substrate to be treated which is mounted on the stage. Each LED chip is arranged on each light source unit. The LED chips comprise a first group mounted in a vertical direction on the LED substrate and a second group mounted in a horizontal direction on the LED substrate.

Description

[0001] The present invention relates to an LED light source exposure apparatus,

The present invention relates to an LED light source exposure apparatus, and more particularly, to an LED light source exposure apparatus, in which half of LED chips mounted on a plurality of light source units mounted on a base plate are mounted on an LED substrate in a vertical shape, To an LED light source exposure apparatus which improves the exposure quality by making an image formed on an integrator lens square so as to have a uniform light distribution.

2. Description of the Related Art In general, a semiconductor device, a liquid crystal display (LCD), a plasma display panel (PDP), a circuit board (PCB) ), Etc., a photolithography method is widely used in order to precisely form fine patterns in the manufacturing process.

The photolithography method includes: forming a photosensitive material film by uniformly applying a photo-resist on a substrate to be processed; selectively exposing the formed photosensitive material film to exposure light to change the properties of the photosensitive material Forming a desired photosensitive material film pattern by selectively removing a portion having a changed property by using a developer or the like, and then forming a desired photosensitive material film pattern using a photosensitive material film pattern formed thereon, Thereby forming a pattern on the processed substrate.

An exposure process belonging to a photolithography process is a process in which a reticle or a mask designed with a specific pattern is positioned between a light source and a substrate to be processed and light is irradiated from the light source to the substrate to be processed, Or selectively exposing the substrate to be processed according to the pattern on the mask.

A conventional exposure apparatus used in a conventional exposure process is configured in such a manner that a photosensitive material is exposed using light in the ultraviolet band generated in a discharge lamp into which a discharge gas such as mercury is injected.

Such a discharge lamp generally has a short life span of about 1,000 hours, so that the consumable cost of the discharge lamp is increased and a long downtime is required for each replacement. Particularly, during the idle period, the cooling time for the discharge lamp, the time for the replacement work, and the setting time such as the position adjustment of the replaced new discharge lamp are required.

In addition, when the discharge lamp is turned on / off, it takes a considerably long time to operate in a normal state, and cracks may be generated due to thermal stress during frequent on / off operations. . Therefore, there is a problem that an unnecessary power wastage occurs.

In addition, since such a discharge lamp is configured such that the emitted light is radiated in all directions, there is a problem that such outgoing light must be condensed through the elliptical mirror and the efficiency of the light source is reduced.

As a prior art for improving the exposure process using such a discharge lamp, there is an "LED light source exposure apparatus " in Korean Patent Registration No. 10-1104367. The prior art LED light source exposure apparatus includes a stage on which a substrate to be processed is placed, a light source unit including a plurality of LED lamps mounted on the base plate to generate light for exposing a photosensitive material, An integrator lens, and a parallel optical mirror that converts light that has passed through the integrator lens into parallel light and reflects the parallel light toward the substrate to be processed placed on the stage.

This prior art can maintain the replacement cycle for the light source for a long time by using the LED lamp as a light source, and can turn on / off as needed, thereby preventing unnecessary power wastage and improving energy efficiency.

Further, a plurality of LED lamps may be disposed on a base plate having a concave curved surface so that light generated from each LED lamp is intensively incident on the integrator lens directly. Thus, an optical system after the integrator lens can be utilized in a conventional exposure apparatus, By condensing the light generated from the LED lamp through the reflector and the condenser lens, it minimizes the insoluble light that is not used in the exposure process among the light generated from the LED lamp, maximizing the light efficiency and maximizing the exposure performance. Can be further improved.

On the other hand, in the prior art, a plurality of light sources are arranged on a base plate to irradiate light with an integrator lens. The light source is mounted on a base plate and inside a lens barrel and a lens barrel on which LED substrates are mounted. And a condenser lens for condensing light generated by the LED chip with an integrator lens.

At this time, the LED chip has a rectangular shape and is mounted on the LED substrate. The LED substrate is installed in each barrel, and the light irradiated through each barrel is condensed by the integrator lens.

That is, in the prior art, as shown in Fig. 1, each of the LED chips 10 is mounted on the LED substrate in the longitudinal direction to irradiate the light with the integrator lens. Accordingly, the light condensed by the integrator lens forms a rectangular image corresponding to the shape of the LED chip 10 as shown in FIG.

However, such a rectangular image formation has a problem of lowering the uniformity of the light irradiated from the intergator lens to the substrate through the parallel optical mirror, thereby lowering the exposure quality of the substrate to be processed.

That is, it is preferable that the image formed on the integrator lens is formed in a square shape. However, if a rectangular image is formed as shown in FIG. 2, the light distribution is not uniform and the exposure quality of the substrate to be processed deteriorates.

In addition, the LED chip 10 that emits light with the integrator lens has a minute dark line with respect to the area formed when forming an image on the integrator lens due to its characteristics.

Such a dark line does not adversely affect the image quality when one LED chip 10 forms an image on the integrator lens. However, when the light emitted from the plurality of LED chips 10 is condensed by the integrator lens, The dark lines irradiated from the light source 10 are superimposed to form a clear dark line.

In this way, when the dark line is clearly imaged on the integrator lens, even if light is irradiated onto the substrate through the parallel optical mirror in the integrator lens, there is a problem that the part where the dark line is formed is not exposed and the exposure quality is lowered.

KR, B, 10-1104367 (Jan. 3, 2012)

SUMMARY OF THE INVENTION The present invention has been made in order to solve the above-mentioned problems, and it is an object of the present invention to provide an image forming apparatus which has a uniform light distribution by forming an image of a square shape when light emitted from an LED chip of a light source forms an image on an integrator lens, And an LED light source for emitting light.

Another object of the present invention is to provide an LED light source exposure apparatus capable of preventing degradation of exposure quality due to a dark line by preventing a plurality of dark lines formed on an integrator lens from overlapping due to the characteristics of the LED chip.

According to an aspect of the present invention, there is provided a lithographic apparatus including a stage having a substrate to which a photosensitive material is applied, a base plate having a concave curved surface, A plurality of light source units mounted on the LED substrate and mounted on the LED substrate, the LED substrates each having a rectangular LED chip mounted thereon for generating light for exposing the photosensitive material, an integrator lens arranged to allow light generated from the light source unit to pass therethrough, And a parallel optical mirror for converting the light passing through the parallel light mirror into parallel light and reflecting the parallel light toward the substrate to be mounted on the stage, wherein the LED chip is separately provided in the plurality of light source portions, And a second group which is mounted in a lateral form. And is achieved by an LED light source exposure apparatus.

In the first group, half of the LED chips individually mounted on the plurality of light sources are mounted on the LED substrate in a vertical shape, and the remaining LED chips, which are excluded from the first group, It is preferable to be mounted.

It is preferable that the light source unit is mounted on the base plate so that the first group in which the LED chips are mounted on the LED substrate in a longitudinal shape and the second group in which the LED chips are mounted on the LED substrate in a transverse shape are alternately arranged.

It is preferable that the light source unit is mounted on the base plate such that the first group in which the LED chips are vertically mounted on the LED substrate and the second group in which the LED chips are mounted on the LED substrate in a horizontal shape are symmetrically arranged.

It is preferable that the light source unit is mounted on the base plate such that a first group in which the LED chips are vertically mounted on the LED substrate and a second group in which the LED chips are mounted on the LED substrate in a horizontal shape are arranged asymmetrically.

The light source unit may include a barrel mounted on the other side of the base plate and having an LED substrate mounted on the rear side of the LED chip mounted in a horizontal or vertical shape, A condenser lens for converging the condensed light by an integrator lens, a heat pipe extending rearward of the barrel in a state of being in contact with the LED substrate and receiving heat generated by operation of the LED chip, And a heat dissipation fin and a heat dissipation fan for dissipating heat.

Preferably, the light source unit includes a rotation adjusting unit that rotates the LED substrate installed at the back of the barrel in a direction perpendicular to the LED substrate.

The protrusion protrudes from the inner circumferential surface of the lens barrel to a locking protrusion protruding toward the axial line of the lens barrel, so that the rear end of the lens barrel An elastic member which is installed to be rotatable in the lens barrel and fixed to the LED substrate and which is provided at a portion where the projecting jaw of the rotation plate opposes the engagement jaw of the barrel and exerts an elastic repulsive force so that the rotation plate faces the end of the barrel, And a stopper for interrupting rotation of the rotary plate rotating at the rear end by 90 degrees.

The stopper is formed on the entire surface of the protruding jaw of the rotary plate and has protrusions formed at 90-degree intervals about the axis of the barrel, and protrusions formed on the front surface of the protrusions, .

According to the LED light source exposure apparatus of the present invention, when the LED chip is mounted on the LED substrate of each light source unit in the horizontal or vertical form, the vertical and the horizontal imaging images formed on the integrator lens overlap each other, So that it is possible to irradiate light having a uniform light distribution on the substrate to be processed, thereby improving the exposure quality.

In addition, when the LED chip is mounted on the LED substrate of each light source unit in the horizontal / vertical shape, the overlap of the dark lines formed on the integrator lens can be minimized due to the characteristics of the LED chip, have.

In addition, the LED chip provided in the light source unit can be rotated in a transverse or vertical shape as needed, and the light distribution formed on the integrator lens can be adjusted to improve the exposure quality.

1 is a view showing an arrangement of LED chips provided in a light source unit of an LED light source exposure apparatus according to the prior art.
2 is a view showing a light distribution formed on an integrator lens in an LED light source exposure apparatus according to the prior art.
3 is a conceptual diagram schematically showing a configuration of an LED light source exposure apparatus according to the present invention.
4 is a perspective view illustrating a light source unit mounted on a base plate of an LED light source exposure apparatus according to the present invention.
5 is a sectional view showing the light source unit of the present invention.
6 is a schematic view showing the arrangement of LED chips in an LED light source exposure apparatus according to the present invention.
7 is a view showing a light distribution formed on an integrator lens in an LED light source exposure apparatus according to the present invention.
8 to 10 are schematic views showing another embodiment of the LED chip among the LED light source exposure apparatus according to the present invention.
11 is a cross-sectional view showing a rotation control unit of the LED light source exposure apparatus according to the present invention.
12 is a cross-sectional view illustrating an operation state of the rotation control unit of the LED light source exposure apparatus according to the present invention.

The terms and words used in the present specification and claims should not be construed as limited to ordinary or dictionary meanings and the inventor may properly define the concept of the term to describe its invention in the best possible way And should be construed in accordance with the principles and meanings and concepts consistent with the technical idea of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

4 is a perspective view illustrating a light source unit mounted on a base plate of the LED light source exposure apparatus according to the present invention. FIG. 5 is a cross- Fig.

The LED light source exposure apparatus according to the present invention includes a stage 100 on which a substrate P on which a photosensitive material is coated is placed, A plurality of light source units 200 provided with an LED substrate 221 mounted on the base plate 210 and mounted with a rectangular LED chip 220 for generating light for exposing a photosensitive material, And an integrator lens 300 and an integrator lens 300 disposed so as to allow the light generated from the light source unit 200 to pass therethrough into parallel light, And the LED chip 220 is separately provided in the plurality of light source units 200 and the LED chip 220 is mounted on the LED substrate 221 in the vertical direction The first group G1 and the second group G2, which are mounted in a lateral form, It is configured.

The stage 100 is formed in a flat plate shape so that the target substrate P for the exposure process is placed thereon and the target substrate P placed on the stage 100 is coated with the photosensitive material P1 on the top surface .

In addition, the base plate 210 is formed to have a concave curved surface at one side thereof, and an optical axis hole 211 is formed. The light source unit 200 is mounted on the other side of the base plate 210 so that the light emitted from the LED lamp 220 is incident on the integrator lens 300 through the optical axis hole 211.

When one side of the base plate 210 forms a concave curved surface, when the light source unit 200 is mounted on the other side of the base plate 210, the optical axis of each light source unit 200 faces a certain point, 220, respectively.

The light source unit 200 mounted on the other side of the base plate 210 includes an LED chip 220 for generating exposure light for exposing the photosensitive material P1 of the substrate P and a barrel 230, And a condenser lens 240. A heat dissipation fin 260 and a heat dissipation fan 270 are installed behind the lens barrel 230 to cool the heat generated by the operation of the LED chip 220. [

The LED chip 220 is generally mounted on the LED substrate 221. A UV LED lamp capable of generating light in the ultraviolet region may be used and the LED chip 220 may be an individual operation And the LED chip 221 is mounted on one LED chip.

The LED chip 220 is provided on the other side of the lens barrel 230 on which the focusing lens 240 is mounted and one side of the lens barrel 230 is fixed to the base plate 210 with the same axis as the optical axis hole 211 formed in the base plate 210. [ And is mounted on the other side of the plate 210.

A condenser lens 240 is provided in front of the LED chip 220 so that the light emitted from the LED chip 220 can be condensed by the integrator lens 300. The condenser lens 240 is mounted on the lens barrel 230, Respectively.

In other words, unlike the discharge lamp of the related art, the LED chip 220 has a directivity in which light generated in the nature of the LED chip 220 is directed in a relatively constant direction. Therefore, the light generated from the LED chip 220 is transmitted to the integrator lens 300 A lens barrel 230 to which a condenser lens 240 is mounted is provided for each of the optical axis holes 211 formed in the base plate 210 to be incident thereon.

When the barrel 230 is formed between the base plate 210 and the LED chip 220, light emitted from the outside of the barrel 230, which is not related to light generated from the LED lamp 220, And the light emitted from the LED chip 220 is efficiently focused on the integrator lens 300 through the condenser lens 240 mounted on the barrel 230.

The barrel 230 may have a hollow tube shape and a reflection plate (not shown) may be disposed on the inner circumferential surface of the barrel 230 to reflect the light generated from the LED chip 220 to the condenser lens 240. Such a barrel 230 may be formed in a polygonal column shape such as a hollow square or triangular column as well as a cylindrical shape.

 The light emitted from the LED chip 220 of the light source unit 200 is incident on the integrator lens 300 as described above. The integrator lens 300 includes a fly's eye lens And a fly-eye lens, which functions to improve the light distribution.

The parallel optical mirror 400 is configured to convert the light having passed through the integrator lens 300 into parallel light and reflect it toward the stage 100. As shown in FIG. 3, the parallel optical mirror 400 includes a single spherical mirror Or alternatively, it may be constituted by a plurality of spherical mirrors and a plane mirror or the like, and the configuration thereof may be variously changed according to the needs of the user.

A heat pipe 250 receiving heat from the LED chip 220 is mounted on the lens barrel 230 in order to rapidly cool the heat generated by the operation of the LED chip 220 installed on the other side of the lens barrel 230, As shown in Fig.

A heat dissipation fin 260 is formed in the heat pipe 250 to dissipate the heat transferred from the LED chip 220 to the heat pipe 250 into the air and a heat dissipation fin 260 And a heat-dissipating fan 270 is installed so that air can be smoothly contacted with the air.

Accordingly, the heat generated by the operation of the LED chip 220 is transferred to the heat pipe 250, transferred to the heat dissipation fin 260, and is discharged to the atmosphere. Thus, heat is dissipated through the heat dissipation fin 260 Exchanged air is blown away from the heat dissipation fin 260 while the heat dissipation fan 270 is operated so that the cold air is blown to the heat dissipation fin 260.

Particularly, the LED light source exposing apparatus according to the present invention includes an LED chip (not shown) provided individually in the light source unit 200 so as to form a square image when the light emitted from the LED chip 220 is imaged on the integrator lens 300 220 are mounted on the LED substrate 221 in a vertical shape and a horizontal shape. This will be described with reference to FIG.

6 is a schematic view showing the arrangement of LED chips in an LED light source exposure apparatus according to the present invention. The LED chip 220 is mounted on the plurality of light source units 200 and the LED chip 220 mounted on the plurality of light source units 200 is mounted on the LED substrate 220 in a first group And a second group G2 mounted in a lateral shape.

The light source unit 200 mounted on the base plate 210 is provided with an optical integrator lens 300 and an optical integrator lens 300. The light source unit 200 is mounted on the base plate 210, Emitting diode (LED) chip 220 for emitting light.

The LED chip 220 is mounted on the LED substrate 221 mounted on the rear side of the lens barrel 230 in a rectangular shape and a part of the LED chip 220 provided in each light source 200 is mounted on the LED substrate 221, And the remaining LED chips 220 form a second group G2 that is mounted in a transverse shape.

That is, as shown in FIG. 6, sixteen light source units are mounted on the base plate 210 in equal rows and columns, and each light source unit 200 is provided with an LED chip 220 are provided.

Eight LED chips 220 among the LED chips 220 provided in each light source 200 are mounted on the LED substrate 221 in a horizontal shape and the remaining eight LED chips 220 are mounted on the LED substrate 220 in a horizontal shape. (Not shown).

The horizontal and vertical mounting of the LED chip 220 may be variously modified. For example, the LED chip 220 may be mounted on one of the plurality of light sources 200 mounted on the base plate 210, The LED chip 220 mounted on the light source 200 is mounted on the LED substrate 221 in a vertical shape and the LED chip 220 mounted on the light source 200 located on the third and fourth rows is mounted on the LED substrate 220 (Not shown).

The LED chips 220 provided in the light source unit 200 located in the first and second columns of the plurality of light source units 200 mounted on the base plate 210 are mounted on the LED substrate 221 in a vertical shape, The LED chip 220 provided in the light source unit 200 located in the column may be mounted on the LED substrate 221 in a horizontal form.

One half of the LED chips 220 included in the plurality of light source units 200 are formed in a vertical shape on the LED substrate 221 and the other half of the LED chips 220 are mounted on the LED substrate 221 in a horizontal shape. The second group G2 may be formed.

When the arrangement of the LED chips 220 mounted on the LED substrate 221 is divided into the first group G1 and the second group G2 and the light is irradiated to the integrator lens 300, The same vertical image formation and horizontal image formation are formed on the integrator lens 300 and the overlapping area where the vertical image formation and the horizontal image formation overlap each other becomes a square.

When a uniform light distribution image is formed on the integrator lens 300, the illumination light is emitted from the light source to expose the light. The treatment substrate P can be irradiated with light having a uniform light distribution, thereby improving the exposure quality.

The horizontal and vertical mounting of the LED chip 220 provided in the light source unit 200 may be implemented in various forms. For example, as shown in FIG. 8, the light source unit 200 may be individually mounted The LED chips 220 may be arranged such that the lateral type mounting and the vertical type mounting are alternately performed.

For this purpose, the light source unit 200 includes a first group G1 in which the LED chips 220 are mounted on the LED substrate 221 in a longitudinal shape, and a first group G2 in which the LED chips 220 are mounted on the LED substrate 221 in a transverse form Two groups G2 may be alternately arranged on the base plate 210. [

9, the light source unit 200 includes a first group G1 in which the LED chips 220 are mounted on the LED substrate 221 in a vertical shape, and a first group G1 in which the LED chips 220 are mounted on the LED substrate The first group G1 and the second group G2 mounted on the base plate 210 are symmetrically arranged so that the first group G1 and the second group G2 are arranged asymmetrically as shown in FIG. Can be mounted on the base plate 210.

When the LED chip 220 is composed of the first group G1 mounted vertically and the second group G2 mounted horizontally on the LED substrate 221 of each light source 200, 300 are overlapped with each other to form an image having a uniform light distribution. Thus, light having a uniform light distribution can be irradiated onto the substrate P to be processed, .

When the LED chip 220 is mounted on the LED substrate 221 of each light source 200 in a horizontal / vertical shape, the dark lines formed on the integrator lens 300 due to the characteristics of the LED chip 220 are overlapped Can be minimized, and deterioration of exposure quality due to the dark line can be prevented.

That is, the LED chip 220 mounted on the LED substrate 221 in the vertical shape forms a vertical dark line on the integrator lens 300, and the LED chip 220 mounted on the LED substrate 221 220 form a transverse dark line in the intergator lens 300, thereby minimizing the overlap of the dark lines and preventing the degradation of the exposure quality due to the dark lines.

While the present invention has been described with reference to exemplary embodiments, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims. .

For example, when the LED chip 220 of the light source unit 200 is rotated as needed, the rotation control unit 500 may be positioned so that the LED chip 220 may be positioned vertically or horizontally in the light source unit 200 . This will be described with reference to FIGS. 11 and 12. FIG.

FIG. 11 is a cross-sectional view of a rotation control unit of an LED light source exposure apparatus according to the present invention, and FIG. 12 is a cross-sectional view illustrating an operation state of a rotation control unit of an LED light source exposure apparatus according to the present invention.

The rotation control unit 500 includes a rotation plate 520 provided at the rear end of the lens barrel 230 and a rotating bar 520 interposed between the barrel 230 and the rotation plate 520, And a stopper 540 for controlling the rotation of the motor 520 by 90 degrees.

The rotation plate 520 is positioned at the rear end of the lens barrel 230 and the protrusion protrusion 510 protruding toward the inner circumferential surface of the lens barrel 230 is formed on the front surface of the rotation plate 520. The protruding jaws 510 are formed on the inner circumferential surface of the barrel 230 so as to be able to rotate in a state of being engaged with the engagement protrusions 231 protruding from the axis of the barrel 230 and facing the rear end of the barrel 230.

11, the protrusion protrusion 510 and the protrusion protrusion 231 form a clearance A so that the protrusion protrusion 510 of the rotation plate 520 is linearly moved to the tip or rear end of the barrel 230 Thereby forming a free space.

The LED chip 220 mounted on the front surface of the rotary plate 520 is fixed and the LED chip 220 is rotated according to the rotation of the rotary plate 520. The heat dissipation fin 260 and the heat dissipation fan 270 are installed on the rear surface of the rotary plate 520. The heat dissipation fin 260 is connected to the heat pipe 250 drawn out from the LED substrate 221, The heat generated by the operation of the heat pipe 220 is transmitted to the heat dissipation fin 260 through the heat pipe 250.

An elastic member 530 such as a coil spring is interposed between the protrusion protrusion 510 of the rotation plate 520 and the engagement protrusion 231 of the lens barrel 230 so that the rotation plate 520 protrudes from the lens barrel 230 So that an elastic repulsive force is exerted so as to face the tip.

Therefore, when the rotary plate 520 is pulled backward, the elastic member 530 is compressed as the distance between the protruding jaws 510 and the engagement jaws 231 becomes close to each other. When the force of pulling the rotary plate 520 backward is lost, The rotation plate 520 is moved toward the front of the barrel 230 by the elastic repulsive force exerted on the barrel 530.

The stopper 540 is interlocked so that the rotation plate 520 rotates by 90 degrees when the rotation plate 520 rotates at the rear end of the lens barrel 230. The stopper 540 rotates about the protruding jaws 510 formed on the front surface of the barrel 230 and having protrusions 511 formed at 90 degree intervals about the axis of the barrel 230 and protrusions 511 formed on the entire surface of the protrusion 510, And a groove 232.

The rotation control unit 500 having such a structure pulls the rotation plate 520 backward to change the protrusion 511 of the stopper 540 into the engagement groove 232 .

When the swinging of the swinging plate 520 is slowly released while the swinging plate 520 is rotated 90 degrees, the protrusion 510 of the swinging plate 520 is moved toward the front of the barrel 230 by the repulsive force of the elastic member 530 .

When the rotary plate 520 is continuously rotated in this state, the protrusions 511 formed on the entire surface of the protrusion 510 are inserted into the coupling grooves 232 formed at intervals of 90 degrees from the inner peripheral surface of the lens barrel 230, The degree of rotation of the rotary plate 520 can be easily recognized.

When the rotation control unit 500 is provided in the light source unit 200 as described above, the LED chip 220 provided in the light source unit 200 can be easily and quickly changed from the vertical direction to the horizontal direction.

100: stage
200: light source 210: base plate
211: optical axis hole 220: LED chip
221: LED substrate 230: lens barrel
240: condenser lens 250: heat pipe
260: heat dissipating fin 270: heat dissipating fan
280: cooling control unit 290: temperature sensor
300: Intergrating lens 400: Parallel optical mirror
500: rotation adjusting unit 510: protruding jaw
520: spindle 530: elastic member
540: stopper 511: projection

Claims (9)

A stage on which a substrate to be processed with a photosensitive material is placed;
A base plate having one side surface formed to be concavely curved and having an optical axis hole;
A plurality of light sources mounted on the base plate and provided with an LED substrate mounted with a rectangular LED chip for generating light for exposing the photosensitive material;
An integrator lens arranged to allow light generated from the light source unit to pass therethrough; And
And a parallel optical mirror for converting the light having passed through the integrator lens into parallel light and reflecting the light toward the target substrate placed on the stage,
Wherein the LED chip is comprised of a first group in which the LED chips are vertically mounted on the LED substrate and a second group in which the LED chips are mounted in a lateral form, .
The method according to claim 1,
In the first group, half of the LED chips individually mounted on the plurality of light source units are mounted on the LED substrate in a vertical shape, and the remaining LED chips of the second group are mounted on the LED substrate in a lateral form Wherein the LED light source is disposed on the light source side.
The method according to claim 1 or 2,
The light source unit includes:
Wherein the LED chip is mounted on the base plate such that a first group in which the LED chips are mounted on the LED substrate in a vertical shape and a second group in which the LED chips are mounted on the LED substrate in a horizontal shape are alternately arranged.
The method according to claim 1 or 2,
The light source unit includes:
Wherein the LED chip is mounted on the base plate such that a first group in which the LED chips are mounted on the LED substrate in a longitudinal shape and a second group in which the LED chips are mounted on the LED substrate in a transverse shape are symmetrically arranged.
The method according to claim 1 or 2,
The light source unit includes:
Wherein a first group in which the LED chips are mounted on the LED substrate in a vertical shape and a second group in which the LED chips are mounted on the LED substrate in a transverse form are mounted on the base plate in an asymmetrical arrangement.
The method according to claim 1 or 2,
The light source unit
A lens barrel mounted on the other side of the base plate and having an LED substrate mounted on the rear side in a horizontal or vertical shape;
A condenser lens mounted inside the barrel and condensing the light emitted from the LED chip with the integrator lens;
A heat pipe extending rearward of the barrel in a state of being in contact with the LED substrate and receiving heat generated by operation of the LED chip;
And a heat dissipation fin and a heat dissipation fan connected to the heat pipe to dissipate the heat transferred from the heat pipe.
The method of claim 6,
The light source unit
And a rotation control unit for rotating the LED substrate installed at the back of the barrel.
The method of claim 7,
The rotation adjustment unit
A protruding protrusion protruding toward the inner circumferential surface of the barrel is formed so as to face the rear end of the barrel, the protruding protruding protrusion being mounted on a rear end of the barrel so as to be caught by a protrusion protruding from the inner circumferential surface of the barrel toward the axis of the barrel, A rotating plate on which a substrate is fixed;
An elastic member interposed between the protruding jaws of the rotary plate and the engagement jaws of the lens barrel and exerting an elastic repulsive force such that the rotary plate faces the end of the lens barrel; And
And a stopper interlocked to rotate the rotating plate rotating at a rear end of the barrel by 90 degrees.
The method of claim 8,
The stopper
Protrusions formed on the protruding jaw front surface of the rotary plate and spaced apart from each other by 90 degrees about the axial line of the barrel; And
And an engaging groove formed on an inner circumferential surface of the barrel to face the protrusion formed on the front surface of the protruding jaw and in which protrusions are placed.

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