KR20230137128A - Apparatus for proximity exposure using UV LED light source - Google Patents

Abstract

The present invention relates to a proximity exposure apparatus using a UV LED light source, comprising: a light source system arranged in combination of a plurality of UV LED modules that irradiate ultraviolet light in a preset certain wavelength range; An optical system installed below the light source system, designed to design a circuit pattern to be implemented on a substrate, and transmitting ultraviolet light emitted from the light source system to the substrate; a lens system installed below the optical system and allowing ultraviolet light passing through the optical system to be transferred onto the substrate at a constant magnification; a position alignment system installed below the lens system and adjusting the positions of the substrate and the optical system; and a control unit that controls on/off of the light source system and position adjustment of the position alignment system.

Description

Proximity exposure device using UV LED light source {Apparatus for proximity exposure using UV LED light source}

The present invention relates to an exposure device, and more specifically, to a close-up exposure device using a UV LED light source that can reduce overall facility space and reduce manufacturing and maintenance costs by using a UV LED light source.

In general, forming a fine pattern is necessary for manufacturing parts using thin film technology such as LCD (Liquid Crystal Display Device), PDP (Plasma Display Panel), PCB (Printed Circuit Board), filters, and semiconductors. For this purpose, photo etching is used.

In this photo etching method, an exposure device is essentially used to transfer a reticle or mask pattern to a photosensitive film formed on a substrate (eg, a glass substrate, a semiconductor wafer, hereinafter referred to as a “substrate”).

In this way, among the exposure devices that closely expose the pattern of the substrate, the exposure device using an optical system uses light in the ultraviolet region. Figure 1 is a diagram showing the general configuration of an optical exposure device using light in the ultraviolet region. , With reference to this, the conventional optical exposure apparatus is described as follows.

Referring to FIG. 1, a conventional optical exposure apparatus 10 includes a light source system 20 that supplies ultraviolet light.

In such a conventional optical exposure apparatus 10, the light source system 22 uses a UV lamp as a light source. This UV lamp is an ultra high pressure mercury lamp (Ultra high pressure Hg Lamp) containing mercury and an inert gas (22). ) is used.

However, mercury generates ozone, a substance harmful to the human body, and causes a worsening of the working environment in the manufacturing line, leading to many restrictions on its use.

In addition, as the ultra-high pressure mercury lamp (22) operates at high temperature and pressure, there is a higher risk of explosion, and it is difficult to dispose of environmental pollutants such as mercury when replacing or disposing of the ultra-high pressure mercury lamp (22) when its life has expired. , Due to the nature of the gymnastics process, although it must be continuously turned on for 24 hours, the ultra-high pressure mercury lamp 22 has a short lifespan and has the disadvantage of having to be replaced frequently and regularly.

In particular, since the replacement of the ultra-high pressure mercury lamp 22 as described above takes approximately one hour with the production line stopped, the manufacturing yield of the product is significantly reduced, and in addition, the ultra-high pressure mercury lamp 22 is discharged. This requires a high voltage, and there is a problem in that it takes a lot of time until ultraviolet rays of a certain luminous intensity are emitted when the ultra-high pressure mercury lamp 22 is turned on/off.

In addition, the conventional ultra-high pressure mercury lamp 22 emits light in a complex wavelength band, and emits light in an unnecessary ultraviolet range in addition to the ultraviolet range required during exposure, so the conventional optical exposure apparatus 10 As shown in FIG. 1, unnecessary light in the ultraviolet region is being removed through the illumination system 30.

Therefore, the conventional optical exposure apparatus 10 not only increases the overall size of the equipment due to the addition of the illumination system 30, but also increases the overall cost, such as manufacturing cost and maintenance cost, due to the addition of the illumination system 30. There was a downside to this.

For reference, in FIG. 1, an unexplained symbol 40 represents a reticle or mask (hereinafter referred to as a 'mask') on which a pattern is engraved, and 50 represents a substrate on which the mask pattern is transferred to the photoresist film.

Korean Patent Registration No. 101073671 (2011.10.07.)

The present invention was developed with an eye on the above-mentioned problems, and the technical problem to be solved by the present invention is to reduce the overall size of the equipment by eliminating the need for the addition of an illumination system to remove unnecessary ultraviolet light, and to manufacture the equipment. The aim is to provide a proximity exposure device using a UV LED light source that can reduce costs and maintenance costs.

In addition, another technical problem to be solved by the present invention is a UV LED light source that arranges a plurality of UV LED light source modules as a light source system and controls each UV LED light source module to be individually turned on/off to achieve close exposure. To provide a proximity exposure device using .

In addition, another technical problem to be solved by the present invention is to prevent overheating by dissipating heat generated from a plurality of UV LED light source modules that make up the light source system by applying an ultra-high pressure air cooling module, using a proximity UV LED light source to prevent overheating. An exposure device is provided.

The problems of the present invention are not limited to the problems mentioned above, and other problems not mentioned will be clearly understood by those skilled in the art from the description below.

A proximity illumination device using a UV LED light source according to an embodiment of the present invention to solve the above problem includes a light source system in which a plurality of UV LED modules that irradiate ultraviolet light in a preset certain wavelength range are arranged in combination; An optical system installed below the light source system, designed to design a circuit pattern to be implemented on a substrate, and transmitting ultraviolet light emitted from the light source system to the substrate; a lens system installed below the optical system and allowing ultraviolet light passing through the optical system to be transferred onto the substrate at a constant magnification; a position alignment system installed below the lens system and adjusting the positions of the substrate and the optical system; and a control unit that controls on/off of the light source system and position adjustment of the position alignment system.

Here, a plurality of UV LED modules constituting the light source system emit and irradiate ultraviolet light in a specific wavelength range, and the light source system is installed with UV LED modules that emit light in the same wavelength range or emit light in different wavelength ranges. It is desirable to install the emitting UV LED modules arranged in a certain shape.

In addition, a diffusion sheet is installed at the bottom of the lens system, and ultraviolet light irradiated from the light source system can be diffused to form a surface light source while passing through the lens system and the diffusion sheet.

Meanwhile, it may be configured to further include an ultra-high pressure air cooling module that is installed on the printed circuit board on which the UV LED module is installed and dissipates heat generated from the UV LED module.

At this time, a heat dissipation sheet may be interposed between the ultra-high pressure air cooling module and the printed circuit board.

In addition, the ultra-high-pressure air cooling module includes an ultra-high-pressure air pipe through which compressed air of a certain pressure is supplied, and the compressed air supplied through the ultra-high-pressure air pipe generates a vortex according to rotation and exchanges heat with the printed circuit board, and then some It is configured to include a warm air outlet that discharges compressed air, and a cold air outlet that allows compressed air other than some of the compressed air to contact the printed circuit board in a state of losing heat while passing through the low pressure area, dissipating heat, and then being discharged. You can.

Other specific details of the invention are included in the detailed description and drawings.

According to the proximity exposure device using a UV LED light source according to an embodiment of the present invention, the addition of an illumination system to remove unnecessary ultraviolet light is not required, so the overall size of the equipment is reduced, and the costs of manufacturing and maintaining the equipment are reduced. A reduction effect may be provided.

In addition, according to the proximity exposure device using a UV LED light source according to an embodiment of the present invention, a plurality of UV LED light source modules are arranged as a light source system, and each UV LED light source module is individually controlled to turn on/off, thereby providing proximity exposure. The effect of exposure may also be provided.

In addition, according to the proximity exposure device using a UV LED light source according to an embodiment of the present invention, heat generated from a plurality of UV LED light source modules forming the light source system is dissipated by applying an ultra-high pressure air cooling module, thereby preventing overheating of the components. It can also prevent damage and increase the operating efficiency of equipment.

The effects according to the present invention are not limited to the contents exemplified above, and further various effects are included in the present specification.

Figure 1 is a diagram schematically showing the configuration of a conventional optical exposure device using an ultra-high pressure mercury lamp as a light source.
Figure 2 is a block diagram showing the overall main configuration of a proximity exposure apparatus using a UV LED light source according to an embodiment of the present invention.
3 and 4 are diagrams illustrating the relationship in which light is irradiated from a light source system and spread in a proximity exposure apparatus using a UV LED light source according to an embodiment of the present invention.
5 and 6 are conceptual diagrams showing a process for implementing close-up exposure as a close-up exposure device using a UV LED light source according to an embodiment of the present invention.
Figure 7 is a diagram showing the heat dissipation structure of a proximity exposure apparatus using a UV LED light source according to an embodiment of the present invention.

The advantages and features of the present invention and methods for achieving them will become clear by referring to the embodiments described in detail below along with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below and may be implemented in various different forms. The present embodiments are merely provided to ensure that the disclosure of the present invention is complete and to provide common knowledge in the technical field to which the present invention pertains. It is provided to fully inform those who have the scope of the invention, and the present invention is only defined by the scope of the claims. Like reference numerals refer to like elements throughout the specification.

Accordingly, in some embodiments, well-known process steps, well-known structures, and well-known techniques are not specifically described in order to avoid ambiguous interpretation of the present invention.

The terms used in this specification are for describing embodiments and are not intended to limit the invention. As used herein, singular forms also include plural forms, unless specifically stated otherwise in the context. As used in the specification, "comprises" and/or "comprising" means not excluding the presence or addition of one or more other components, steps and/or operations other than the mentioned components, steps and/or operations. Use it as And, “and/or” includes each and every combination of one or more of the mentioned items.

Additionally, embodiments described in this specification will be described with reference to perspective views, cross-sectional views, side views, and/or schematic diagrams that are ideal illustrations of the present invention. Accordingly, the form of the illustration may be modified depending on manufacturing technology and/or tolerance. Accordingly, embodiments of the present invention are not limited to the specific form shown, but also include changes in form produced according to the manufacturing process. Additionally, in each drawing shown in an embodiment of the present invention, each component may be shown somewhat enlarged or reduced in consideration of convenience of explanation.

Hereinafter, a proximity exposure apparatus using a UV LED light source according to an embodiment of the present invention will be described in detail based on the attached illustration drawings.

Figure 2 is a block diagram showing the overall main configuration of a close-up exposure apparatus using a UV LED light source according to an embodiment of the present invention, and Figures 3 and 4 are a block diagram showing the close-up exposure apparatus using a UV LED light source according to an embodiment of the present invention. , This is a configuration diagram showing the relationship in which light is irradiated and spread from a light source system.

In addition, Figures 5 and 6 are conceptual diagrams showing a process for implementing proximity exposure as a proximity exposure device using a UV LED light source according to an embodiment of the present invention.

First, as shown in FIGS. 2 to 4, the proximity exposure apparatus 100 using a UV LED light source according to an embodiment of the present invention includes a light source system 110 consisting of a plurality of UV LED modules 112, and an optical system. It may be composed of a configuration including 120, a lens system 130, a position alignment system 140, and a control unit 150.

The light source system 110 is equipped with a plurality of UV LED modules 112 that emit and irradiate ultraviolet light in a preset wavelength range, and these plural UV LED modules 112 are arranged in combination, so that when exposed, the UV LED module 112 emits and irradiates UV light in a predetermined wavelength range. The light is emitted and irradiated.

As such, the light source system 110 provided in the exposure apparatus 100 according to an embodiment of the present invention uses a plurality of UV LED modules 112 to filter out unnecessary ultraviolet light as in a conventional ultra-high pressure mercury lamp. Since a lighting system is not required, the overall facility space can be reduced, and facility and maintenance costs can be reduced.

The plurality of UV LED modules 112 applied to this light source system 110 emit ultraviolet light in a specific wavelength band, that is, the 365 nm wavelength band.

At this time, the light source system 110 installs UV LED modules 112 that emit light in the same wavelength range or emits light in different wavelength ranges to enable exposure to the depth required for the thickness of the various photosensitive layers (PR). It may be applied to install the emitting UV LED modules 112 arranged in a certain form.

The optical system 120 is installed below the light source system 110, and a circuit pattern to be implemented on the substrate S, which is the exposure object, is designed so that ultraviolet light emitted from the light source system 110 is transmitted to the substrate S. It performs the function that makes it possible.

The lens system 130 is installed below the optical system 120 and functions to transfer ultraviolet light that has passed through the optical system 120 to a predetermined position on the substrate S at a certain magnification.

Since the image material of the lens system 130 is determined by the aberration characteristics of the lens and optical factors, in order to obtain a good quality image, a plurality of various lenses are used to obtain optimal imaging conditions.

Typically, the lens system 130 includes a light receiving lens that receives the emitted ultraviolet light, and a converging lens that collects the light received by the light receiving lens into the exposure area. At this time, the distance between the light receiving lens and the condenser lens is adjusted. You can change the size and light density of the exposure area by adjusting it.

In addition, the lens system 130 provided in the exposure apparatus 100 according to an embodiment of the present invention is further equipped with a diffusion sheet 132 at the bottom, so that ultraviolet light emitted from the light source system 110 is transmitted to the lens system 130. Diffusion can be achieved by passing through the diffusion sheet 132.

Therefore, the emitted ultraviolet light is primarily diffused by the lens system 130 and secondarily diffused by the diffusion sheet 132, so that the light forming a point light source due to the characteristics of the LED light is diffused through the lens system 130 and the diffusion sheet 132. As it goes through, it changes into a two-dimensional surface light source.

The position alignment system 140 is installed below the lens system 130 and functions to adjust the positions of the substrate S, which is an exposure object, and the optical system 120 by a control signal from the control unit 150.

Lastly, the control unit 150 performs the function of individually controlling the operation of each UV LED module 112 installed in the light source system 110.

This control unit 150 can enable general exposure work to be performed by turning on all UV LED modules 112 installed in the light source system 110, and can also turn on only specific UV LED modules 112 to light up the substrate ( S) can also be controlled to achieve close exposure.

For example, if there are a total of 24 UV LED modules 112, all 24 UV LED modules 112 can be turned on/off at the same time under the control of the control unit 150, and the light source system 110 Only the specific UV LED module 112 located at the edge may be controlled to light so that the substrate S, which is the exposure object, is exposed.

FIG. 7 is a photographic alternative diagram showing the heat dissipation structure of the proximity exposure apparatus 100 using a UV LED light source according to an embodiment of the present invention. As shown in FIG. 7, a UV LED light source according to an embodiment of the present invention is used. The proximity exposure device 100 used is an ultra-high pressure air cooling module 200 that comes into surface contact on a printed circuit board on which a plurality of UV LED modules 112 are installed and dissipates heat generated from the UV LED modules 112. It can be configured to include.

The specific configuration and operating relationship of this ultra-high pressure air cooling module 200 will be described as follows.

The printed circuit board on which the UV LED module 112 is installed includes an ultra-high pressure air pipe 210 that penetrates the heat sink.

When compressed air of a certain pressure is supplied to the inside of the ultra-high pressure air pipe 210 through the compressed air supply hole 212 formed on one side of the ultra-high pressure air pipe 210, the ultra-high pressure air primarily generates a rotating fluid vortex about the axis like a tornado. At this time, the rotating air reaches approximately 1,000,000 RPM.

This rotating air is directed toward the warm air outlet 220 of the ultra-high pressure air pipe 210, and some of it is discharged to the warm air outlet 220 by the control valve, and the remaining air is returned by the control valve to form other ultra-high pressure air and cold air. You will move towards exit (222).

At this time, the other ultra-high pressure air flow loses heat while passing through the lower pressure area inside the primary ultra-high pressure air flow and is directed toward the cold air outlet 222, thereby cooling the cold air outlet 222. As air comes into surface contact with the printed circuit board, the heat of the UV LED module 112 can be effectively dissipated.

For reference, the ultra-high pressure air pipe 210 is preferably made of a metal material with high thermal conductivity, such as aluminum or stainless steel, to facilitate heat dissipation, and is preferably made of a two-dimensional surface shape for heat dissipation.

Additionally, fins made of similar materials may be installed to expand the heat dissipation area, and these fins are preferably installed to extend outward from the outer surface of the ultra-high pressure air pipe 210.

Meanwhile, it is preferable that a heat dissipation sheet is disposed between the ultra-high pressure cooling module 200 and the printed circuit board so that the heat of the UV LED module 112 is more effectively transferred to the ultra-high pressure air cooling module 200 through the heat dissipation sheet. .

As described above, according to the proximity exposure apparatus 100 using a UV LED light source according to an embodiment of the present invention, the addition of an illumination system to remove unnecessary ultraviolet light is not required, so the overall size of the equipment is reduced, and the size of the equipment is reduced. This can provide the effect of reducing production and maintenance costs.

In addition, according to the proximity exposure apparatus 100 using a UV LED light source according to an embodiment of the present invention, a plurality of UV LED light source modules are arranged as the light source system 110, and each UV LED light source module is individually turned on/off. By being controlled to turn off, the effect of close exposure can also be provided.

In addition, according to the proximity exposure device 100 using a UV LED light source according to an embodiment of the present invention, an ultra-high pressure air cooling module 200 is applied to heat generated from a plurality of UV LED light source modules forming the light source system 110. By dissipating heat, overheating can be prevented, damage to parts can be prevented, and the operating efficiency of the equipment can be increased.

Those skilled in the art to which the present invention pertains will understand that the present invention can be implemented in other specific forms without changing its technical idea or essential features. Therefore, the embodiments described above should be understood in all respects as illustrative and not restrictive. The scope of the present invention is indicated by the claims described below rather than the detailed description above, and all changes or modified forms derived from the meaning and scope of the claims and their equivalent concepts should be construed as being included in the scope of the present invention. do.

100: exposure device 110: light source system
112: UV LED module 120: Optical system
130: Lens system 132: Diffusion sheet
140: position alignment system 150: control unit
200: Cooling module 210: Ultra-high pressure air pipe
212: Compressed air supply hole 220: Warmth outlet
222: cold air outlet 230: heat dissipation sheet

Claims (6)

A light source system in which a plurality of UV LED modules that irradiate ultraviolet light in a preset certain wavelength range are arranged in combination;
An optical system installed below the light source system, designed to design a circuit pattern to be implemented on a substrate, and transmitting ultraviolet light emitted from the light source system to the substrate;
a lens system installed below the optical system and allowing ultraviolet light passing through the optical system to be transferred onto the substrate at a constant magnification;
a position alignment system installed below the lens system and adjusting the positions of the substrate and the optical system; and
A proximity exposure device using a UV LED light source, comprising a control unit that controls on/off of the light source system and position adjustment of the position alignment system.
According to clause 1,
A plurality of UV LED modules that make up the light source system emit ultraviolet light in a specific wavelength range and irradiate,
The light source system is characterized by installing UV LED modules that emit light in the same wavelength band, or installing UV LED modules that emit light in different wavelength bands arranged in a certain form. Proximity exposure using a UV LED light source. Device.
According to clause 1,
A diffusion sheet is installed at the lower part of the lens system,
A proximity exposure device using a UV LED light source, characterized in that ultraviolet light irradiated from the light source system passes through the lens system and the diffusion sheet to form a surface light source.
According to any one of claims 1 to 3,
A close-up exposure device using a UV LED light source, further comprising an ultra-high pressure air cooling module installed on the printed circuit board on which the UV LED module is installed to dissipate heat generated from the UV LED module.
In clause 4
A proximity exposure device using a UV LED light source, characterized in that a heat dissipation sheet is interposed between the ultra-high pressure air cooling module and the printed circuit board.
According to clause 4,
The ultra-high pressure air cooling module,
An ultra-high pressure air pipe through which compressed air of a certain pressure is supplied,
A warm air outlet for discharging part of the compressed air after the compressed air supplied through the ultra-high pressure air pipe exchanges heat with the printed circuit board while generating a vortex due to rotation;
Proximity exposure using a UV LED light source, characterized in that it includes a cold air outlet that allows compressed air other than some of the compressed air to be discharged after being in contact with the printed circuit board and dissipating heat while passing through the low pressure area and losing heat. Device.

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