WO2017094565A1 - Dispositif de transport, dispositif de traitement, procédé de transport et procédé de traitement - Google Patents

Dispositif de transport, dispositif de traitement, procédé de transport et procédé de traitement Download PDF

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Publication number
WO2017094565A1
WO2017094565A1 PCT/JP2016/084615 JP2016084615W WO2017094565A1 WO 2017094565 A1 WO2017094565 A1 WO 2017094565A1 JP 2016084615 W JP2016084615 W JP 2016084615W WO 2017094565 A1 WO2017094565 A1 WO 2017094565A1
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WO
WIPO (PCT)
Prior art keywords
stage
processing
moving mechanism
rail
moving
Prior art date
Application number
PCT/JP2016/084615
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English (en)
Japanese (ja)
Inventor
巧 吉田
巌 田中
Original Assignee
株式会社Ｓｃｒｅｅｎホールディングス
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2015237081A external-priority patent/JP6671939B2/ja
Priority claimed from JP2015237083A external-priority patent/JP6681182B2/ja
Priority claimed from JP2015237082A external-priority patent/JP6562825B2/ja
Application filed by 株式会社Ｓｃｒｅｅｎホールディングス filed Critical 株式会社Ｓｃｒｅｅｎホールディングス
Publication of WO2017094565A1 publication Critical patent/WO2017094565A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/34—Devices for discharging articles or materials from conveyor 
    • B65G47/46—Devices for discharging articles or materials from conveyor  and distributing, e.g. automatically, to desired points
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations

Definitions

  • the present invention relates to a transport device that transports an object placed on a stage, a processing device including the transport device, a transport method that transports an object placed on a stage, and a process having the transport method. Regarding the method.
  • an appearance inspection is performed to check whether the appearance of the manufactured product is normal.
  • the appearance inspection is performed by visual inspection of an operator.
  • the time required for the inspection and the inspection result vary among the plurality of workers.
  • even the same worker may take a long time for inspection due to poor physical condition or reduced concentration, and a defect may be overlooked. For this reason, development of the apparatus which can perform the external appearance inspection of industrial products automatically and at high speed is calculated
  • the present invention has been made in view of such circumstances, and in a transport apparatus that transports an object placed on a stage, the object is transported by two stages without providing a return transport path. It aims at providing the technique which can perform efficiently.
  • the first invention of the present application includes a first position, an intermediate position, and a third position that are sequentially arranged in the first direction, and a second that intersects the first direction from the intermediate position.
  • a transport apparatus that transports an object between second positions adjacent to each other in a direction, the stage between at least two stages on which the object can be placed, and between the first position and the intermediate position
  • a first movement mechanism that moves the stage, a second movement mechanism that moves the stage between the second position and the intermediate position, and a second movement mechanism that moves the stage between the third position and the intermediate position.
  • a control unit that controls the first movement mechanism, the second movement mechanism, and the third movement mechanism, and the control unit arranges one stage at the second position.
  • the first moving mechanism and the third moving Machine was allowed to work, the other one of said stages is moved between said third position and said first position.
  • 2nd invention of this application is a conveying apparatus of 1st invention, Comprising: The 1st rail extended in the said 1st direction toward the said intermediate position from the said 1st position, Between the said intermediate position and the said 2nd position A second rail extending in the first direction, a third rail extending in the first direction from the third position toward the intermediate position, and moving between the intermediate position and the standby position.
  • a spare rail extending in the first direction, and a fourth moving mechanism for moving the spare rail between the intermediate position and the standby position
  • the first moving mechanism comprises the first The stage is moved along the first rail and the second rail between the first position and the intermediate position, and the second moving mechanism is between the intermediate position and the second position, The second rail is moved, and the third moving mechanism is Between said intermediate position and the third position, along said third rail and said second rail moves the stage.
  • 3rd invention of this application is a conveying apparatus of 2nd invention, Comprising: The said control part further controls the said 4th moving mechanism, The said 2nd position from the said intermediate position by the said 2nd moving mechanism to the said 2nd position The movement of the two rails and the movement of the spare rail from the standby position to the intermediate position by the fourth movement mechanism are executed in conjunction with each other.
  • 4th invention of this application is a conveying apparatus of 2nd invention or 3rd invention, Comprising: The said 1st position, the said intermediate position, and the said 3rd position are arranged horizontally, The said standby position is said intermediate position It is arranged below.
  • a fifth invention of the present application is the transfer device according to any one of the second to fourth inventions, wherein the fourth moving mechanism is a mechanism for moving the spare rail by advancing and retracting a rod of an air cylinder. Have.
  • a sixth invention of the present application is the transfer device according to any one of the first to fifth inventions, wherein the first moving mechanism, the second moving mechanism, and the third moving mechanism are rotations of a motor. It has a mechanism for converting the movement into a straight movement through a ball screw.
  • the 7th invention of this application is a conveying apparatus of any one invention from 1st invention to 6th invention, Comprising:
  • the said 1st position is a carrying-in position which carries in a target object on the said stage,
  • Said 2nd The position is a processing position for processing the object on the stage, and
  • the third position is an unloading position for unloading the object from the stage.
  • An eighth invention of the present application is the transfer device according to any one of the first to sixth inventions, wherein the first position is an unloading position for unloading an object from the stage and an object on the stage.
  • the second position is a carry-in position for carrying an object onto the stage, and the third position is the other of the carry-out position and the treatment position. It is.
  • a ninth invention of the present application is the transfer device according to any one of the first to sixth inventions, wherein the first position is a carry-in position for carrying an object onto the stage and an object on the stage.
  • the second position is a carry-out position for carrying out an object from the stage, and the third position is the other of the carry-in position and the treatment position. It is.
  • a tenth invention of the present application is the transfer device according to any one of the first invention to the ninth invention, wherein the first moving mechanism, the second moving mechanism, and the third moving mechanism are A fixing unit fixed to the stage; and an attaching / detaching mechanism for attaching / detaching the fixing unit to / from the stage.
  • the eleventh invention of the present application is the transfer device according to the tenth invention, wherein the stage has a through hole or a recess, and the fixing portion has a pin inserted into the through hole or the recess.
  • the twelfth invention of the present application is the transport apparatus according to the eleventh invention, wherein the attachment / detachment mechanism includes an elastic member that biases the pin in a direction toward the through hole or the recess.
  • the thirteenth invention of the present application is the transport apparatus according to the twelfth invention, wherein the attachment / detachment mechanism further includes an air cylinder for moving the pin in a direction away from the through hole or the recess.
  • the 14th invention of this application is a conveying apparatus of 13th invention, Comprising:
  • the said air cylinder is arrange
  • the said attachment / detachment mechanism is the conversion which converts the horizontal movement of the rod of the said air cylinder into the raising / lowering movement of the said pin. It further has a mechanism.
  • a fifteenth aspect of the present invention is the transport apparatus according to any one of the eleventh aspect to the fourteenth aspect, wherein the stage includes a stage main body on which an object is placed and a receiving member fixed to the stage main body.
  • the receiving member has the through hole or the recess.
  • a sixteenth aspect of the present invention is the transport apparatus according to any one of the tenth to fifteenth aspects of the present invention, wherein the control unit is configured such that the fixed portion of the at least one moving mechanism is always fixed to the stage.
  • the attachment / detachment mechanism is controlled.
  • a seventeenth aspect of the present invention is a processing apparatus including the transport device according to any one of the first to sixteenth aspects of the present invention and a processing unit that performs processing on an object on the stage.
  • the 18th invention of this application is the processing apparatus of 17th invention, Comprising:
  • the said process part is a test
  • a first position, an intermediate position, and a third position that are sequentially arranged in the first direction, and a second position that is adjacent to the second direction intersecting the first direction from the intermediate position.
  • a method of transporting an object placed on a stage between: a) moving one stage from the first position to the second position through the intermediate position; b) after the step a), moving the one stage from the second position through the intermediate position to the third position; c) after the step b), from the first position, Moving the other stage to the second position via the intermediate position; and d) moving the one stage from the third position to the first position via the intermediate position after the step c).
  • a step of causing causing.
  • a twentieth aspect of the present invention is the carrying method according to the nineteenth aspect, wherein the position is between the first position and the intermediate position, between the second position and the intermediate position, and between the third position and the intermediate position.
  • a twenty-first invention of the present application is the carrying method according to the nineteenth or twentieth invention, wherein the first position is a carry-in position for carrying an object onto the stage, and the second position is on the stage.
  • the third position is a carry-out position for carrying out the object from the stage.
  • a twenty-second invention of the present application is the carrying method according to the nineteenth invention or the twentieth invention, wherein the first position performs processing on the unloading position for unloading the object from the stage and the object on the stage.
  • One of the processing positions, the second position is a carry-in position for carrying an object onto the stage, and the third position is the other of the carry-out position and the processing position.
  • a twenty-third invention of the present application is the carrying method according to the nineteenth invention or the twentieth invention, wherein the first position is a loading position for loading an object onto the stage and an object on the stage. Either of the processing positions to be performed, the second position is an unloading position for unloading an object from the stage, and the third position is the other of the loading position and the processing position.
  • a conveying step of conveying an object by the conveying method according to any one of the twenty-first to twenty-third aspects of the present invention, and an object on the stage arranged at the processing position And a processing step for performing processing.
  • the twenty-fifth aspect of the present invention is the processing method according to the twenty-fourth aspect, wherein the processing step is an inspection step for inspecting an object on the stage arranged at the processing position.
  • one stage is moved in the order of the first position, the second position, and the third position, and then the other stage is moved from the first position to the second position. Then, one stage that has been moved first can be moved from the third position to the first position without being obstructed by the other stages. For this reason, the conveyance process of the target object by two stages can be performed efficiently, without providing the conveyance path
  • the stage arranged at the intermediate position can be moved to the second position together with the second rail.
  • a spare rail can be arrange
  • the carry-in position, the intermediate position, and the carry-out position are linearly arranged.
  • route can be arrange
  • the distance between the carry-in position and the carry-out position is reduced. For this reason, it becomes easy to carry in and carry out the object by the same worker or the same robot.
  • the stage can be moved while delivering the stage among a plurality of moving mechanisms.
  • the dimension in the height direction of the attaching / detaching mechanism can be suppressed by arranging the air cylinder horizontally.
  • the stage main body can be prevented from being damaged by the insertion of the pin.
  • the stage can be prevented from moving in an unintended direction.
  • the carry-in position, the intermediate position, and the carry-out position are arranged in a straight line.
  • route can be arrange
  • the distance between the carry-in position and the carry-out position is reduced. For this reason, it becomes easy to carry in and carry out the object by the same worker or the same robot.
  • Configuration of appearance inspection device> 1 and 2 are top views of an inspection apparatus 100 including a transport apparatus 1 according to an embodiment of the present invention.
  • 3 and 4 are front views of the inspection apparatus 100.
  • FIG. This inspection apparatus 100 is an apparatus that inspects the inspection object 9 having a three-dimensional shape with a plurality of cameras 201 and inspects the state of the inspection object 9 based on the obtained images.
  • the inspection apparatus 100 is used, for example, to inspect whether or not the positions or attachment states of a plurality of parts attached to the industrial product that is the inspection object 9 are normal.
  • the inspection apparatus 100 includes a transport apparatus 1 that transports the inspection object 9 and an inspection unit 2 that inspects the inspection object 9. Further, the transport device 1 includes two stages 10, a first rail 21, a second rail 22, a third rail 23, and a spare rail 24 that are separate from each other, a first moving mechanism 31, a second moving mechanism 32, A third moving mechanism 33, a fourth moving mechanism 34, and a conveyance control unit 40 are provided.
  • Stage 10 is a plate-like member on which inspection object 9 is placed.
  • Each of the two stages 10 has an upper surface that extends horizontally.
  • the inspection object 9 is placed on the upper surface of the stage 10 and is fixed to the stage 10. Therefore, the inspection object 9 placed on each stage 10 moves together with the stage 10.
  • the transport apparatus 1 sequentially transports a plurality of inspection objects 9 using two stages 10. Therefore, when the inspection apparatus 100 is in operation, there may be two inspection objects 9 in the inspection apparatus 100 at the same time.
  • the conveyance device 1 conveys the stage 10 among the carry-in position P1, the intermediate position Pm, the inspection position P2, and the carry-out position P3.
  • the carry-in position P1 is a position where the inspection object 9 before inspection is carried onto the stage 10.
  • the inspection position P ⁇ b> 2 is a position (processing position) for inspecting the inspection object 9 placed on the stage 10 in the inspection unit 2.
  • the unloading position P3 is a position where the inspection object 9 after inspection is unloaded from the stage 10.
  • the carry-in position P1 is the first position
  • the inspection position P2 is the second position
  • the carry-out position P3 is the third position.
  • the carry-in position P1, the intermediate position Pm, and the carry-out position P3 are linearly arranged in this order. Further, the inspection position P2 is disposed adjacent to the intermediate position Pm and deviated from a straight line connecting the carry-in position P1, the intermediate position Pm, and the carry-out position P3. Further, the carry-in position P1, the intermediate position Pm, the inspection position P2, and the carry-out position P3 are arranged in the same horizontal plane.
  • the arrangement direction of the carry-in position P1, the intermediate position Pm, and the carry-out position P3 is referred to as a “first direction”.
  • the arrangement direction of the intermediate position Pm and the inspection position P2 is referred to as a “second direction”.
  • the first direction and the second direction are orthogonal to each other.
  • the first rail 21 is a guide rail extending from the carry-in position P1 toward the intermediate position Pm.
  • the first rail 21 has a pair of first rail members 211 that are arranged in the second direction and each extend in the first direction.
  • the pair of guided portions 101 provided on the lower surface of the stage 10 are engaged with the first rail member 211 so as to be slidable in the first direction. . Thereby, the stage 10 is guided in the first direction along the first rail 21.
  • the second rail 22 is a guide rail whose position can be changed between the intermediate position Pm and the inspection position P2. As shown in FIGS. 1 and 3, when the second rail 22 is arranged at the intermediate position Pm, the second rail 22 is inserted between the first rail 21 and the third rail 23.
  • the second rail 22 has a pair of second rail members 221 that are arranged in the second direction and each extend in the first direction.
  • the pair of guided portions 101 provided on the lower surface of the stage 10 are engaged with the second rail member 221 so as to be slidable in the first direction. . Thereby, the stage 10 is guided in the first direction along the second rail 22.
  • the third rail 23 is a guide rail extending from the carry-out position P3 toward the intermediate position Pm.
  • the third rail 23 includes a pair of third rail members 231 that are arranged in the second direction and each extend in the first direction.
  • the spare rail 24 is a guide rail whose position can be changed between the intermediate position Pm and the standby position Pw located below the intermediate position Pm. As shown in FIGS. 2 and 4, the spare rail 24 is arranged at the intermediate position Pm instead of the second rail 22 when the second rail 22 is moved to the inspection position P2. When the spare rail 24 is disposed at the intermediate position Pm, the spare rail 24 is interposed between the first rail 21 and the third rail 23.
  • the spare rail 24 has a pair of spare rail members 241 arranged in the second direction, each extending in the first direction.
  • the first moving mechanism 31 is a mechanism that moves the stage 10 between the carry-in position P1 and the intermediate position Pm.
  • the first moving mechanism 31 moves the stage 10 in the first direction along the first rail 21 and the second rail 22 or the spare rail 24 arranged at the intermediate position Pm.
  • the second moving mechanism 32 is a mechanism that moves the stage 10 between the inspection position P2 and the intermediate position Pm.
  • the second moving mechanism 32 moves the second rail 22 together with the stage 10 in the second direction by moving the stage 10 placed on the second rail 22 in the second direction.
  • the third moving mechanism 33 is a mechanism that moves the stage 10 between the unloading position P3 and the intermediate position Pm.
  • the third moving mechanism 33 moves the stage 10 in the first direction along the third rail 23 and the second rail 22 or the spare rail 24 arranged at the intermediate position Pm.
  • the first moving mechanism 31, the second moving mechanism 32, and the third moving mechanism 33 are the intermediate position Pm, the carry-in position P1, the inspection position P2, and the carry-out position arranged in different directions with respect to the intermediate position Pm.
  • the stage 10 can be moved between the position P3.
  • the transfer device 1 moves the stage 10 while delivering the stage 10 among the first moving mechanism 31, the second moving mechanism 32, and the third moving mechanism 33.
  • the first moving mechanism 31, the second moving mechanism 32, and the third moving mechanism 33 all have the same mechanism.
  • FIG. 5 shows the structure of the mechanism. As shown in FIG. 5, the first moving mechanism 31, the second moving mechanism 32, and the third moving mechanism 33 each include a motor 51 that is a drive source, a ball screw 52, and a nut member 53.
  • the ball screw 52 extends in parallel with the moving direction of the stage 10 in each moving mechanism, and one end thereof is connected to the motor 51.
  • the nut member 53 is attached to the ball screw 52 so as to mesh with a spiral thread groove provided on the outer peripheral surface of the ball screw 52.
  • the motor 51 is driven, the ball screw 52 rotates around its axis.
  • the nut member 53 moves along the ball screw 52. That is, the rotational motion of the motor 51 is converted into the straight motion of the nut member 53 via the ball screw 52.
  • Each moving mechanism 31 to 33 further includes a pair of fixing pins 54 and an attaching / detaching mechanism 55 for attaching / detaching the fixing pins 54 to / from the stage 10.
  • the pair of fixing pins 54 are arranged on the intermediate position Pm side with respect to the nut member 53, and each extend in the vertical direction. Lower portions of the pair of fixing pins 54 are fixed to a common support member 56.
  • FIG. 6 is a top view of the stage 10.
  • the stage 10 includes a rectangular stage main body 11 and three receiving members 12.
  • the inspection object 9 is placed on the upper surface of the stage main body 11.
  • the three receiving members 12 are respectively fixed near the edge of the stage body 11 on the loading position P1 side, near the edge on the inspection position P2 side, and near the edge on the unloading position P3 side.
  • iron is used as the material of the stage body 11.
  • As the material of the receiving member 12 for example, a copper alloy that is hardly damaged by contact with the fixing pin 54 is used.
  • the attachment / detachment mechanism 55 is a mechanism for attaching / detaching the pair of fixing pins 54 to / from the through hole 13 of the stage 10.
  • the attachment / detachment mechanism 55 includes an air cylinder 61, a conversion mechanism 62, and a coil spring 63.
  • the air cylinder 61 is disposed horizontally along the first direction.
  • the air cylinder 61 has a cylinder body 611 and a rod 612. The rod 612 moves forward and backward in the first direction by the air pressure supplied to the cylinder body 611.
  • the conversion mechanism 62 is a mechanism that converts the horizontal movement of the rod 612 into the vertical movement of the fixed pin 54.
  • the conversion mechanism 62 of this embodiment has an L-shaped member 620.
  • the L-shaped member 620 is a plate-like member that rotates about a rotation shaft 629 that is perpendicular and horizontal to the moving direction of the nut member 53.
  • the L-shaped member 620 includes two arms 621 and 622 that are separated by approximately 90 ° around the rotation axis 629.
  • One arm 621 is connected to the tip of the rod 612 of the air cylinder 61.
  • the other arm 622 is connected to the support member 56.
  • the L-shaped member 620 converts the horizontal movement of the rod 612 in the first direction into the up-and-down movement of the support member 56 and the pair of fixing pins 54 by rotating about the rotation shaft 629.
  • the coil spring 63 is an elastic member for biasing the fixing pin 54 in the direction toward the through hole 13 of the stage 10.
  • the coil spring 63 is inserted between the cylinder body 611 of the air cylinder 61 and the tip of the rod 612 in a state compressed more than the natural length. In a state where no air pressure is supplied to the cylinder body 611 of the air cylinder 61, the rod 612 protrudes toward the intermediate position side due to the repulsive force of the coil spring 63. Then.
  • the support member 56 and the pair of fixing pins 54 rise through the L-shaped member 620.
  • the raised pair of fixing pins 54 are respectively inserted into the through holes 13 of the stage 10. Thereby, the nut member 53 and the stage 10 are fixed so as not to be relatively movable in the first direction. That is, in the present embodiment, the pair of fixing pins 54 is a fixing portion that is fixed to the stage 10. When the motor 51 is driven in a state where the pair of fixing pins 54 are inserted into the through holes 13, the stage 10 moves in parallel with the ball screw 52 together with the nut member 53.
  • the fixed pin 54 of at least one of the first moving mechanism 31, the second moving mechanism 32, and the third moving mechanism 33 is always inserted into the through hole 13 of the stage 10.
  • the attachment / detachment mechanism 55 is controlled.
  • the stage 10 is always held by at least one moving mechanism among the first moving mechanism 31, the second moving mechanism 32, and the third moving mechanism 33. This prevents the stage 10 from moving in an unintended direction.
  • the rod 612 protrudes to the intermediate position side due to the repulsive force of the coil spring 63, and the fixing pin 54 is raised. Therefore, the fixing pin 54 is maintained in the state inserted in the through hole 13. Therefore, it is possible to prevent the fixing pin 54 from being removed from the through hole 13 and shifting the position of the stage 10 during a power failure.
  • the fourth moving mechanism 34 is a mechanism that moves the auxiliary rail 24 up and down between the intermediate position Pm and the standby position Pw.
  • the fourth moving mechanism 34 has an air cylinder 70 disposed vertically below the spare rail 24.
  • the air cylinder 70 has a cylinder body 71 and a rod 72.
  • the spare rail 24 is fixed to the upper end portion of the rod 72.
  • the rod 72 is advanced and retracted in the vertical direction by the air pressure supplied to the cylinder body 71. Thereby, the reserve rail 24 can be moved up and down.
  • the stage 10 disposed on the second rail 22 can be moved together with the second rail 22 from the intermediate position Pm to the inspection position P2.
  • the spare rail 24 can be arranged at the intermediate position Pm. Therefore, the other stage 10 can be moved between the carry-in position P1 and the carry-out position P3 while arranging one stage 10 at the inspection position P2.
  • the conveyance control unit 40 is a means for controlling the operation of each unit in the conveyance device 1. As conceptually shown in FIGS. 1 and 2, the conveyance control unit 40 is configured by a computer having an arithmetic processing unit 41 such as a CPU, a memory 42 such as a RAM, and a storage unit 43 such as a hard disk drive. . In the storage unit 43, a computer program 44 for executing the conveyance process of the inspection object 9 is installed.
  • FIG. 8 is a block diagram illustrating a connection configuration between the transport control unit 40 and each unit in the transport apparatus 1.
  • the conveyance control unit 40 includes the motor 51 of the first movement mechanism 31, the air cylinder 61 of the first movement mechanism 31, the motor 51 of the second movement mechanism 32, and the air of the second movement mechanism 32.
  • the cylinder 61, the motor 51 of the third moving mechanism 33, the air cylinder 61 of the third moving mechanism 33, and the air cylinder 70 of the fourth moving mechanism 34 are connected to be communicable.
  • the transport control unit 40 temporarily reads the computer program 44 stored in the storage unit 43 into the memory 42, and the arithmetic processing unit 41 performs arithmetic processing based on the computer program 44, thereby operating each of the above units. Control. Thereby, conveyance of a plurality of inspection objects 9 progresses sequentially.
  • the inspection unit 2 is a processing unit for inspecting the inspection object 9 on the stage 10 arranged at the inspection position P2.
  • the inspection unit 2 includes a plurality of cameras 201, a plurality of light irradiation units 202, and an image processing unit 203.
  • the plurality of cameras 201 are respectively directed to the portions of the inspection object 9 to be inspected.
  • the camera 201 for example, a camera having a light receiving element such as a CCD or a CMOS and capable of acquiring a multi-gradation digital image is used.
  • the light irradiation unit 202 for example, an LED (light emitting diode) is used.
  • the inspection unit 2 obtains an image of a portion to be inspected of the inspection object 9 by photographing with the camera 201 while causing the light irradiation unit 202 to emit light.
  • the acquired image is input to the image processing unit 203.
  • the image processing unit 203 compares the acquired image with the image of the normal inspection object 9. Then, based on the comparison result, it is determined whether or not the state of each inspection object 9 is free from defects.
  • the image processing unit 203 for example, a computer having an arithmetic processing unit such as a CPU, a memory such as a RAM, and a storage unit such as a hard disk drive is used.
  • the conveyance control unit 40 and the image processing unit 203 may be realized by the same computer.
  • FIGS. 9 and 10 are flowcharts showing the flow of the inspection object 9 in the inspection apparatus 100 and the flow of inspection. 11 to 27 are views showing the position of the stage 10 at each time point.
  • the movement of the stage 10 in the following operations is realized by the conveyance control unit 40 controlling the operations of the first moving mechanism 31, the second moving mechanism 32, the third moving mechanism 33, and the fourth moving mechanism 34.
  • first stage 10 a one of the two stages 10
  • second stage 10 b the other of the two stages 10
  • the operator of the inspection apparatus 100 carries the inspection object 9 onto the upper surface of the first stage 10a arranged at the carry-in position P1 (step S1, state of FIG. 11).
  • work of the test target object 9 may be automatically performed by the feeder which is not shown in figure.
  • the inspection object 9 carried in is placed on the upper surface of the first stage 10a in a predetermined direction.
  • the first moving mechanism 31 moves the first stage 10a from the carry-in position P1 to the intermediate position Pm (step S2, state of FIG. 12).
  • the inspection object 9 on the first stage 10a also moves from the carry-in position P1 to the intermediate position Pm.
  • the first stage 10a is transferred from the first moving mechanism 31 to the second moving mechanism 32 (step S3).
  • the second moving mechanism 32 inserts a pair of fixing pins 54 into the pair of through holes 13 provided on the end side on the inspection position P2 side of the first stage 10a.
  • the first stage 10 a is held by the second moving mechanism 32.
  • the 1st moving mechanism 31 pulls out a pair of fixing pin 54 from a pair of through-hole 13 provided in the edge by the side of the carrying-in position P1 of the 1st stage 10a. Thereby, the 1st moving mechanism 31 is cut off from the 1st stage 10a.
  • the second moving mechanism 32 moves the first stage 10a from the intermediate position Pm to the inspection position P2 (step S4, state of FIG. 13).
  • the inspection object 9 on the first stage 10a also moves from the intermediate position Pm to the inspection position P2.
  • the inspection unit 2 inspects the inspection object 9 on the first stage 10a (step S5). Specifically, photographing by the plurality of cameras 201 is performed while causing the plurality of light irradiation units 202 to emit light. Thereby, the image of the location to be inspected of the inspection object 9 is acquired. Based on the acquired image, the image processing unit 203 determines whether or not the portions to be inspected of the inspection target 9 are normal.
  • step S4 the fourth moving mechanism 34 raises the spare rail 24 from the standby position Pw to the intermediate position Pm (step S6).
  • the spare rail 24 is disposed between the first rail 21 and the third rail 23 instead of the second rail 22.
  • the movement of the second rail 22 in step S4 and the movement of the spare rail 24 in step S6 are executed in conjunction with each other.
  • the third moving mechanism 33 moves the second stage 10b from the carry-out position P3 to the intermediate position Pm (step S7, state of FIG. 14).
  • the second stage 10b is transferred from the third moving mechanism 33 to the first moving mechanism 31 (step S8).
  • the first moving mechanism 31 inserts the pair of fixing pins 54 into the pair of through holes 13 provided on the end side of the second stage 10b on the loading position P1 side.
  • the second stage 10 b is held by the first moving mechanism 31.
  • the third moving mechanism 33 pulls out the pair of fixing pins 54 from the pair of through holes 13 provided on the end side of the second stage 10b on the carry-out position P3 side. As a result, the third moving mechanism 33 is disconnected from the second stage 10b.
  • the first moving mechanism 31 moves the second stage 10b from the intermediate position Pm to the carry-in position P1 (step S9, state of FIG. 15).
  • the fourth moving mechanism 34 lowers the spare rail 24 from the intermediate position Pm to the standby position Pw again (step S10).
  • the operator of the inspection apparatus 100 carries the next inspection object 9 on the upper surface of the second stage 10b arranged at the carry-in position P1 (step S11, state of FIG. 16).
  • the second moving mechanism 32 moves the first stage 10a from the inspection position P2 to the intermediate position Pm (step S12, state of FIG. 17).
  • the inspection object 9 on the first stage 10a also moves from the inspection position P2 to the intermediate position Pm.
  • the first stage 10a is transferred from the second moving mechanism 32 to the third moving mechanism 33 (step S13).
  • the third moving mechanism 33 inserts the pair of fixing pins 54 into the pair of through holes 13 provided on the end side on the unloading position P3 side of the first stage 10a.
  • the first stage 10 a is held by the third moving mechanism 33.
  • the second moving mechanism 32 pulls out the pair of fixing pins 54 from the pair of through holes 13 provided on the end side on the inspection position P2 side of the first stage 10a.
  • the second moving mechanism 32 is disconnected from the first stage 10a.
  • the third moving mechanism 33 moves the first stage 10a from the intermediate position Pm to the carry-out position P3 (step S14, state of FIG. 18).
  • the inspection object 9 on the first stage 10a also moves from the intermediate position Pm to the carry-out position P3.
  • the operator of the inspection apparatus 100 unloads the inspection object 9 after inspection from the upper surface of the first stage 10a arranged at the unloading position P3 (step S15, state of FIG. 19).
  • the first moving mechanism 31 moves the second stage 10b from the carry-in position P1 to the intermediate position Pm (step S16, state of FIG. 20). Thereby, the inspection object 9 on the second stage 10b also moves from the carry-in position P1 to the intermediate position Pm.
  • the second stage 10b is transferred from the first moving mechanism 31 to the second moving mechanism 32 (step S17). Specifically, first, the second moving mechanism 32 inserts the pair of fixing pins 54 into the pair of through holes 13 provided on the end side on the inspection position P2 side of the second stage 10b. As a result, the second stage 10 b is held by the second moving mechanism 32. Next, the 1st moving mechanism 31 pulls out a pair of fixing pin 54 from a pair of through-hole 13 provided in the edge by the side of the carrying-in position P1 of the 2nd stage 10b. As a result, the first moving mechanism 31 is separated from the second stage 10b.
  • the second moving mechanism 32 moves the second stage 10b from the intermediate position Pm to the inspection position P2 (step S18, state of FIG. 21).
  • the inspection object 9 on the second stage 10b also moves from the intermediate position Pm to the inspection position P2.
  • the inspection unit 2 inspects the inspection object 9 on the second stage 10b (step S19). Specifically, photographing by the plurality of cameras 201 is performed while causing the plurality of light irradiation units 202 to emit light. Thereby, the image of the location to be inspected of the inspection object 9 is acquired. Based on the acquired image, the image processing unit 203 determines whether or not the portions to be inspected of the inspection target 9 are normal.
  • step S18 the fourth moving mechanism 34 raises the spare rail 24 from the standby position Pw to the intermediate position Pm (step S20).
  • the spare rail 24 is disposed between the first rail 21 and the third rail 23 instead of the second rail 22.
  • the movement of the second rail 22 in step S18 and the movement of the spare rail 24 in step S20 are executed in conjunction with each other.
  • the third moving mechanism 33 moves the first stage 10a from the carry-out position P3 to the intermediate position Pm (step S21, state of FIG. 22).
  • the first stage 10a is transferred from the third moving mechanism 33 to the first moving mechanism 31 (step S22). Specifically, first, the first moving mechanism 31 inserts the pair of fixing pins 54 into the pair of through holes 13 provided on the end side of the first stage 10a on the loading position P1 side. As a result, the first stage 10 a is held by the first moving mechanism 31. Next, the third moving mechanism 33 pulls out the pair of fixing pins 54 from the pair of through holes 13 provided on the end side on the unloading position P3 side of the first stage 10a. As a result, the third moving mechanism 33 is disconnected from the first stage 10a.
  • the first moving mechanism 31 moves the first stage 10a from the intermediate position Pm to the carry-in position P1 (step S23, state of FIG. 23).
  • the fourth moving mechanism 34 lowers the spare rail 24 from the intermediate position Pm to the standby position Pw again (step S24).
  • the operator of the inspection apparatus 100 carries the next inspection object 9 onto the upper surface of the first stage 10a arranged at the carry-in position P1 (step S25, state of FIG. 24).
  • the second moving mechanism 32 moves the second stage 10b from the inspection position P2 to the intermediate position Pm (step S26, state of FIG. 25).
  • the inspection object 9 on the second stage 10b also moves from the inspection position P2 to the intermediate position Pm.
  • the second stage 10b is transferred from the second moving mechanism 32 to the third moving mechanism 33 (step S27). Specifically, first, the third moving mechanism 33 inserts the pair of fixing pins 54 into the pair of through holes 13 provided on the end side on the unloading position P3 side of the second stage 10b. As a result, the second stage 10 b is held by the third moving mechanism 33. Next, the second moving mechanism 32 pulls out the pair of fixing pins 54 from the pair of through holes 13 provided on the end side on the inspection position P2 side of the second stage 10b. As a result, the second moving mechanism 32 is disconnected from the second stage 10b.
  • the third moving mechanism 33 moves the second stage 10b from the intermediate position Pm to the carry-out position P3 (step S28, state of FIG. 26).
  • the inspection object 9 on the second stage 10b also moves from the intermediate position Pm to the carry-out position P3.
  • the operator of the inspection apparatus 100 unloads the inspection object 9 after inspection from the upper surface of the second stage 10b arranged at the unloading position P3 (step S29, state of FIG. 27).
  • step S2 the process returns to step S2, and the inspection apparatus 100 repeats the processes of steps S2 to S29.
  • the other stage 10 can be moved from the carry-out position P3 to the carry-in position P1 via the intermediate position Pm. For this reason, after moving one stage 10 to the unloading position P3 and moving the other stage 10 from the loading position P1 to the inspection position P2, the stage 10 moved first is not obstructed by the other stage 10. In addition, it can be moved from the carry-out position P3 to the carry-in position P1. For this reason, the conveyance process of the inspection target 9 by the two stages 10 can be efficiently performed without providing a separate conveyance path for return.
  • the stage 10 when the stage 10 is moved from the intermediate position Pm to the inspection position P2, the second rail 22 is also moved to the inspection position P2 together with the stage 10. Then, a spare rail 24 is arranged in place of the second rail 22 at the intermediate position Pm.
  • the stage 10 can be moved while delivering the stage 10 between the first moving mechanism 31 and the third moving mechanism 33.
  • the first position is the carry-in position
  • the second position is the inspection position
  • the third position is the carry-out position. That is, the carry-in position, the intermediate position, and the carry-out position are arranged linearly. If it does in this way, the linear conveyance path
  • the second position may be the loading position.
  • the first position may be one of the unloading position and the inspection position
  • the third position may be the other of the unloading position and the inspection position.
  • the second position may be set as the carry-out position.
  • the first position may be one of the carry-in position and the inspection position
  • the third position may be the other of the carry-in position and the inspection position.
  • the second position is set to the carry-in position or the carry-out position, the distance between the carry-in position and the carry-out position becomes closer than in the above embodiment. Therefore, it becomes easy to carry in and carry out the inspection object by the same robot or the same worker arranged at the work position Po between the carry-in position and the carry-out position.
  • two inspection positions P2 may be provided in one inspection apparatus.
  • the two stages 10 on which the inspection object 9 is placed are disposed at the first inspection position P2 and the second inspection position P2, respectively, the other stage 10 is moved from the unloading position P3. What is necessary is just to make it move to carrying-in position P1.
  • three stages 10 can be moved in the transport apparatus.
  • the number of inspection positions may be three or more. In that case, the number of stages may be one less than the total number of carry-in positions, carry-out positions, and inspection positions.
  • the standby position for waiting the spare rail is arranged below the intermediate position. Thereby, the spread of the horizontal direction of the conveying apparatus was suppressed.
  • the standby position for waiting the spare rail may be another position. For example, when there is sufficient space in the second direction, the standby position may be arranged on the opposite side of the second position from the intermediate position.
  • the fixing pin is inserted into the through hole provided in the stage.
  • the stage may have a recess instead of the through hole, and a pin may be inserted into the recess.
  • fixed part may be provided in the moving mechanism side, and the convex part inserted in the said through-hole or recessed part may be provided in the stage side.
  • a coil spring is used as an elastic member for biasing the pin in the direction toward the through hole or the recess.
  • the pin may be biased by using another elastic member such as a leaf spring or rubber instead of the coil spring.
  • the air cylinder is arranged horizontally. And the horizontal movement of the rod was converted into the raising / lowering movement via the L-shaped member.
  • the air cylinder is disposed horizontally, the dimension of the attaching / detaching mechanism in the height direction can be suppressed.
  • the L-shaped member may be omitted and the air cylinder may be arranged in the vertical direction.
  • the application target of the transfer apparatus of the present invention may be a processing apparatus that performs processing other than inspection on an object on a stage.
  • the present invention may be applied to an apparatus that performs processing such as coating, drawing, and printing on an object on a stage.
  • the shape of the details of the transport device or the shape of the details of the inspection device may be different from the drawings in the present application. Moreover, you may combine suitably each element which appeared in said embodiment and modification in the range which does not produce inconsistency.

Abstract

L'invention concerne un dispositif de transport (1) qui transporte un objet d'inspection (9) entre une première position (P1), une position intermédiaire (Pm) et une troisième position (P3), qui sont agencées dans une première direction dans cet ordre, et une deuxième position (P2) adjacente, dans une seconde direction croisant la première direction, à la position intermédiaire (Pm). D'abord, une platine (10) est déplacée vers la première position (P1), la deuxième position (P2) et la troisième position (P3) dans cet ordre. Ensuite, une autre platine (10) est déplacée de la première position (P1) à la seconde position (P2). Puis, la première des platines déplacées (10) est déplacée de la troisième position (P3) à la première position (P1). Par conséquent, un processus de transport de l'objet d'inspection (9) par les deux platines (10) peut être effectué de manière efficace sans fournir séparément un trajet de transport pour le retour.
PCT/JP2016/084615 2015-12-04 2016-11-22 Dispositif de transport, dispositif de traitement, procédé de transport et procédé de traitement WO2017094565A1 (fr)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2015-237083 2015-12-04
JP2015-237082 2015-12-04
JP2015237081A JP6671939B2 (ja) 2015-12-04 2015-12-04 搬送装置、処理装置、搬送方法、および処理方法
JP2015237083A JP6681182B2 (ja) 2015-12-04 2015-12-04 搬送装置、処理装置、および搬送方法
JP2015-237081 2015-12-04
JP2015237082A JP6562825B2 (ja) 2015-12-04 2015-12-04 搬送装置および処理装置

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WO2017094565A1 true WO2017094565A1 (fr) 2017-06-08

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09186207A (ja) * 1996-01-08 1997-07-15 Mitsubishi Electric Corp 検査装置
JP2006260675A (ja) * 2005-03-17 2006-09-28 Hitachi High-Technologies Corp ディスク搬送機構およびこれを利用したディスク検査装置
JP2008034620A (ja) * 2006-07-28 2008-02-14 Victor Co Of Japan Ltd 基板検査装置及びこの基板検査装置を用いた基板検査方法
JP2008032415A (ja) * 2006-07-26 2008-02-14 Hitachi High-Technologies Corp ディスク搬送機構、これを利用したディスク検査装置およびディスク検査方法
JP2008064668A (ja) * 2006-09-08 2008-03-21 Olympus Corp 外観検査装置の基板排出機構
JP2013505178A (ja) * 2009-09-22 2013-02-14 レイトラム，エル．エル．シー． ホイール付容器を有するチェックポイントシステム

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09186207A (ja) * 1996-01-08 1997-07-15 Mitsubishi Electric Corp 検査装置
JP2006260675A (ja) * 2005-03-17 2006-09-28 Hitachi High-Technologies Corp ディスク搬送機構およびこれを利用したディスク検査装置
JP2008032415A (ja) * 2006-07-26 2008-02-14 Hitachi High-Technologies Corp ディスク搬送機構、これを利用したディスク検査装置およびディスク検査方法
JP2008034620A (ja) * 2006-07-28 2008-02-14 Victor Co Of Japan Ltd 基板検査装置及びこの基板検査装置を用いた基板検査方法
JP2008064668A (ja) * 2006-09-08 2008-03-21 Olympus Corp 外観検査装置の基板排出機構
JP2013505178A (ja) * 2009-09-22 2013-02-14 レイトラム，エル．エル．シー． ホイール付容器を有するチェックポイントシステム

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