WO2017094565A1 - Conveyance device, processing device, conveyance method, and processing method - Google Patents

Conveyance device, processing device, conveyance method, and processing method Download PDF

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Publication number
WO2017094565A1
WO2017094565A1 PCT/JP2016/084615 JP2016084615W WO2017094565A1 WO 2017094565 A1 WO2017094565 A1 WO 2017094565A1 JP 2016084615 W JP2016084615 W JP 2016084615W WO 2017094565 A1 WO2017094565 A1 WO 2017094565A1
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WO
WIPO (PCT)
Prior art keywords
stage
processing
moving mechanism
rail
moving
Prior art date
Application number
PCT/JP2016/084615
Other languages
French (fr)
Japanese (ja)
Inventor
巧 吉田
巌 田中
Original Assignee
株式会社Ｓｃｒｅｅｎホールディングス
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2015237081A external-priority patent/JP6671939B2/en
Priority claimed from JP2015237082A external-priority patent/JP6562825B2/en
Priority claimed from JP2015237083A external-priority patent/JP6681182B2/en
Application filed by 株式会社Ｓｃｒｅｅｎホールディングス filed Critical 株式会社Ｓｃｒｅｅｎホールディングス
Publication of WO2017094565A1 publication Critical patent/WO2017094565A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/34—Devices for discharging articles or materials from conveyor 
    • B65G47/46—Devices for discharging articles or materials from conveyor  and distributing, e.g. automatically, to desired points
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations

Definitions

  • the present invention relates to a transport device that transports an object placed on a stage, a processing device including the transport device, a transport method that transports an object placed on a stage, and a process having the transport method. Regarding the method.
  • an appearance inspection is performed to check whether the appearance of the manufactured product is normal.
  • the appearance inspection is performed by visual inspection of an operator.
  • the time required for the inspection and the inspection result vary among the plurality of workers.
  • even the same worker may take a long time for inspection due to poor physical condition or reduced concentration, and a defect may be overlooked. For this reason, development of the apparatus which can perform the external appearance inspection of industrial products automatically and at high speed is calculated
  • the present invention has been made in view of such circumstances, and in a transport apparatus that transports an object placed on a stage, the object is transported by two stages without providing a return transport path. It aims at providing the technique which can perform efficiently.
  • the first invention of the present application includes a first position, an intermediate position, and a third position that are sequentially arranged in the first direction, and a second that intersects the first direction from the intermediate position.
  • a transport apparatus that transports an object between second positions adjacent to each other in a direction, the stage between at least two stages on which the object can be placed, and between the first position and the intermediate position
  • a first movement mechanism that moves the stage, a second movement mechanism that moves the stage between the second position and the intermediate position, and a second movement mechanism that moves the stage between the third position and the intermediate position.
  • a control unit that controls the first movement mechanism, the second movement mechanism, and the third movement mechanism, and the control unit arranges one stage at the second position.
  • the first moving mechanism and the third moving Machine was allowed to work, the other one of said stages is moved between said third position and said first position.
  • 2nd invention of this application is a conveying apparatus of 1st invention, Comprising: The 1st rail extended in the said 1st direction toward the said intermediate position from the said 1st position, Between the said intermediate position and the said 2nd position A second rail extending in the first direction, a third rail extending in the first direction from the third position toward the intermediate position, and moving between the intermediate position and the standby position.
  • a spare rail extending in the first direction, and a fourth moving mechanism for moving the spare rail between the intermediate position and the standby position
  • the first moving mechanism comprises the first The stage is moved along the first rail and the second rail between the first position and the intermediate position, and the second moving mechanism is between the intermediate position and the second position, The second rail is moved, and the third moving mechanism is Between said intermediate position and the third position, along said third rail and said second rail moves the stage.
  • 3rd invention of this application is a conveying apparatus of 2nd invention, Comprising: The said control part further controls the said 4th moving mechanism, The said 2nd position from the said intermediate position by the said 2nd moving mechanism to the said 2nd position The movement of the two rails and the movement of the spare rail from the standby position to the intermediate position by the fourth movement mechanism are executed in conjunction with each other.
  • 4th invention of this application is a conveying apparatus of 2nd invention or 3rd invention, Comprising: The said 1st position, the said intermediate position, and the said 3rd position are arranged horizontally, The said standby position is said intermediate position It is arranged below.
  • a fifth invention of the present application is the transfer device according to any one of the second to fourth inventions, wherein the fourth moving mechanism is a mechanism for moving the spare rail by advancing and retracting a rod of an air cylinder. Have.
  • a sixth invention of the present application is the transfer device according to any one of the first to fifth inventions, wherein the first moving mechanism, the second moving mechanism, and the third moving mechanism are rotations of a motor. It has a mechanism for converting the movement into a straight movement through a ball screw.
  • the 7th invention of this application is a conveying apparatus of any one invention from 1st invention to 6th invention, Comprising:
  • the said 1st position is a carrying-in position which carries in a target object on the said stage,
  • Said 2nd The position is a processing position for processing the object on the stage, and
  • the third position is an unloading position for unloading the object from the stage.
  • An eighth invention of the present application is the transfer device according to any one of the first to sixth inventions, wherein the first position is an unloading position for unloading an object from the stage and an object on the stage.
  • the second position is a carry-in position for carrying an object onto the stage, and the third position is the other of the carry-out position and the treatment position. It is.
  • a ninth invention of the present application is the transfer device according to any one of the first to sixth inventions, wherein the first position is a carry-in position for carrying an object onto the stage and an object on the stage.
  • the second position is a carry-out position for carrying out an object from the stage, and the third position is the other of the carry-in position and the treatment position. It is.
  • a tenth invention of the present application is the transfer device according to any one of the first invention to the ninth invention, wherein the first moving mechanism, the second moving mechanism, and the third moving mechanism are A fixing unit fixed to the stage; and an attaching / detaching mechanism for attaching / detaching the fixing unit to / from the stage.
  • the eleventh invention of the present application is the transfer device according to the tenth invention, wherein the stage has a through hole or a recess, and the fixing portion has a pin inserted into the through hole or the recess.
  • the twelfth invention of the present application is the transport apparatus according to the eleventh invention, wherein the attachment / detachment mechanism includes an elastic member that biases the pin in a direction toward the through hole or the recess.
  • the thirteenth invention of the present application is the transport apparatus according to the twelfth invention, wherein the attachment / detachment mechanism further includes an air cylinder for moving the pin in a direction away from the through hole or the recess.
  • the 14th invention of this application is a conveying apparatus of 13th invention, Comprising:
  • the said air cylinder is arrange
  • the said attachment / detachment mechanism is the conversion which converts the horizontal movement of the rod of the said air cylinder into the raising / lowering movement of the said pin. It further has a mechanism.
  • a fifteenth aspect of the present invention is the transport apparatus according to any one of the eleventh aspect to the fourteenth aspect, wherein the stage includes a stage main body on which an object is placed and a receiving member fixed to the stage main body.
  • the receiving member has the through hole or the recess.
  • a sixteenth aspect of the present invention is the transport apparatus according to any one of the tenth to fifteenth aspects of the present invention, wherein the control unit is configured such that the fixed portion of the at least one moving mechanism is always fixed to the stage.
  • the attachment / detachment mechanism is controlled.
  • a seventeenth aspect of the present invention is a processing apparatus including the transport device according to any one of the first to sixteenth aspects of the present invention and a processing unit that performs processing on an object on the stage.
  • the 18th invention of this application is the processing apparatus of 17th invention, Comprising:
  • the said process part is a test
  • a first position, an intermediate position, and a third position that are sequentially arranged in the first direction, and a second position that is adjacent to the second direction intersecting the first direction from the intermediate position.
  • a method of transporting an object placed on a stage between: a) moving one stage from the first position to the second position through the intermediate position; b) after the step a), moving the one stage from the second position through the intermediate position to the third position; c) after the step b), from the first position, Moving the other stage to the second position via the intermediate position; and d) moving the one stage from the third position to the first position via the intermediate position after the step c).
  • a step of causing causing.
  • a twentieth aspect of the present invention is the carrying method according to the nineteenth aspect, wherein the position is between the first position and the intermediate position, between the second position and the intermediate position, and between the third position and the intermediate position.
  • a twenty-first invention of the present application is the carrying method according to the nineteenth or twentieth invention, wherein the first position is a carry-in position for carrying an object onto the stage, and the second position is on the stage.
  • the third position is a carry-out position for carrying out the object from the stage.
  • a twenty-second invention of the present application is the carrying method according to the nineteenth invention or the twentieth invention, wherein the first position performs processing on the unloading position for unloading the object from the stage and the object on the stage.
  • One of the processing positions, the second position is a carry-in position for carrying an object onto the stage, and the third position is the other of the carry-out position and the processing position.
  • a twenty-third invention of the present application is the carrying method according to the nineteenth invention or the twentieth invention, wherein the first position is a loading position for loading an object onto the stage and an object on the stage. Either of the processing positions to be performed, the second position is an unloading position for unloading an object from the stage, and the third position is the other of the loading position and the processing position.
  • a conveying step of conveying an object by the conveying method according to any one of the twenty-first to twenty-third aspects of the present invention, and an object on the stage arranged at the processing position And a processing step for performing processing.
  • the twenty-fifth aspect of the present invention is the processing method according to the twenty-fourth aspect, wherein the processing step is an inspection step for inspecting an object on the stage arranged at the processing position.
  • one stage is moved in the order of the first position, the second position, and the third position, and then the other stage is moved from the first position to the second position. Then, one stage that has been moved first can be moved from the third position to the first position without being obstructed by the other stages. For this reason, the conveyance process of the target object by two stages can be performed efficiently, without providing the conveyance path
  • the stage arranged at the intermediate position can be moved to the second position together with the second rail.
  • a spare rail can be arrange
  • the carry-in position, the intermediate position, and the carry-out position are linearly arranged.
  • route can be arrange
  • the distance between the carry-in position and the carry-out position is reduced. For this reason, it becomes easy to carry in and carry out the object by the same worker or the same robot.
  • the stage can be moved while delivering the stage among a plurality of moving mechanisms.
  • the dimension in the height direction of the attaching / detaching mechanism can be suppressed by arranging the air cylinder horizontally.
  • the stage main body can be prevented from being damaged by the insertion of the pin.
  • the stage can be prevented from moving in an unintended direction.
  • the carry-in position, the intermediate position, and the carry-out position are arranged in a straight line.
  • route can be arrange
  • the distance between the carry-in position and the carry-out position is reduced. For this reason, it becomes easy to carry in and carry out the object by the same worker or the same robot.
  • Configuration of appearance inspection device> 1 and 2 are top views of an inspection apparatus 100 including a transport apparatus 1 according to an embodiment of the present invention.
  • 3 and 4 are front views of the inspection apparatus 100.
  • FIG. This inspection apparatus 100 is an apparatus that inspects the inspection object 9 having a three-dimensional shape with a plurality of cameras 201 and inspects the state of the inspection object 9 based on the obtained images.
  • the inspection apparatus 100 is used, for example, to inspect whether or not the positions or attachment states of a plurality of parts attached to the industrial product that is the inspection object 9 are normal.
  • the inspection apparatus 100 includes a transport apparatus 1 that transports the inspection object 9 and an inspection unit 2 that inspects the inspection object 9. Further, the transport device 1 includes two stages 10, a first rail 21, a second rail 22, a third rail 23, and a spare rail 24 that are separate from each other, a first moving mechanism 31, a second moving mechanism 32, A third moving mechanism 33, a fourth moving mechanism 34, and a conveyance control unit 40 are provided.
  • Stage 10 is a plate-like member on which inspection object 9 is placed.
  • Each of the two stages 10 has an upper surface that extends horizontally.
  • the inspection object 9 is placed on the upper surface of the stage 10 and is fixed to the stage 10. Therefore, the inspection object 9 placed on each stage 10 moves together with the stage 10.
  • the transport apparatus 1 sequentially transports a plurality of inspection objects 9 using two stages 10. Therefore, when the inspection apparatus 100 is in operation, there may be two inspection objects 9 in the inspection apparatus 100 at the same time.
  • the conveyance device 1 conveys the stage 10 among the carry-in position P1, the intermediate position Pm, the inspection position P2, and the carry-out position P3.
  • the carry-in position P1 is a position where the inspection object 9 before inspection is carried onto the stage 10.
  • the inspection position P ⁇ b> 2 is a position (processing position) for inspecting the inspection object 9 placed on the stage 10 in the inspection unit 2.
  • the unloading position P3 is a position where the inspection object 9 after inspection is unloaded from the stage 10.
  • the carry-in position P1 is the first position
  • the inspection position P2 is the second position
  • the carry-out position P3 is the third position.
  • the carry-in position P1, the intermediate position Pm, and the carry-out position P3 are linearly arranged in this order. Further, the inspection position P2 is disposed adjacent to the intermediate position Pm and deviated from a straight line connecting the carry-in position P1, the intermediate position Pm, and the carry-out position P3. Further, the carry-in position P1, the intermediate position Pm, the inspection position P2, and the carry-out position P3 are arranged in the same horizontal plane.
  • the arrangement direction of the carry-in position P1, the intermediate position Pm, and the carry-out position P3 is referred to as a “first direction”.
  • the arrangement direction of the intermediate position Pm and the inspection position P2 is referred to as a “second direction”.
  • the first direction and the second direction are orthogonal to each other.
  • the first rail 21 is a guide rail extending from the carry-in position P1 toward the intermediate position Pm.
  • the first rail 21 has a pair of first rail members 211 that are arranged in the second direction and each extend in the first direction.
  • the pair of guided portions 101 provided on the lower surface of the stage 10 are engaged with the first rail member 211 so as to be slidable in the first direction. . Thereby, the stage 10 is guided in the first direction along the first rail 21.
  • the second rail 22 is a guide rail whose position can be changed between the intermediate position Pm and the inspection position P2. As shown in FIGS. 1 and 3, when the second rail 22 is arranged at the intermediate position Pm, the second rail 22 is inserted between the first rail 21 and the third rail 23.
  • the second rail 22 has a pair of second rail members 221 that are arranged in the second direction and each extend in the first direction.
  • the pair of guided portions 101 provided on the lower surface of the stage 10 are engaged with the second rail member 221 so as to be slidable in the first direction. . Thereby, the stage 10 is guided in the first direction along the second rail 22.
  • the third rail 23 is a guide rail extending from the carry-out position P3 toward the intermediate position Pm.
  • the third rail 23 includes a pair of third rail members 231 that are arranged in the second direction and each extend in the first direction.
  • the spare rail 24 is a guide rail whose position can be changed between the intermediate position Pm and the standby position Pw located below the intermediate position Pm. As shown in FIGS. 2 and 4, the spare rail 24 is arranged at the intermediate position Pm instead of the second rail 22 when the second rail 22 is moved to the inspection position P2. When the spare rail 24 is disposed at the intermediate position Pm, the spare rail 24 is interposed between the first rail 21 and the third rail 23.
  • the spare rail 24 has a pair of spare rail members 241 arranged in the second direction, each extending in the first direction.
  • the first moving mechanism 31 is a mechanism that moves the stage 10 between the carry-in position P1 and the intermediate position Pm.
  • the first moving mechanism 31 moves the stage 10 in the first direction along the first rail 21 and the second rail 22 or the spare rail 24 arranged at the intermediate position Pm.
  • the second moving mechanism 32 is a mechanism that moves the stage 10 between the inspection position P2 and the intermediate position Pm.
  • the second moving mechanism 32 moves the second rail 22 together with the stage 10 in the second direction by moving the stage 10 placed on the second rail 22 in the second direction.
  • the third moving mechanism 33 is a mechanism that moves the stage 10 between the unloading position P3 and the intermediate position Pm.
  • the third moving mechanism 33 moves the stage 10 in the first direction along the third rail 23 and the second rail 22 or the spare rail 24 arranged at the intermediate position Pm.
  • the first moving mechanism 31, the second moving mechanism 32, and the third moving mechanism 33 are the intermediate position Pm, the carry-in position P1, the inspection position P2, and the carry-out position arranged in different directions with respect to the intermediate position Pm.
  • the stage 10 can be moved between the position P3.
  • the transfer device 1 moves the stage 10 while delivering the stage 10 among the first moving mechanism 31, the second moving mechanism 32, and the third moving mechanism 33.
  • the first moving mechanism 31, the second moving mechanism 32, and the third moving mechanism 33 all have the same mechanism.
  • FIG. 5 shows the structure of the mechanism. As shown in FIG. 5, the first moving mechanism 31, the second moving mechanism 32, and the third moving mechanism 33 each include a motor 51 that is a drive source, a ball screw 52, and a nut member 53.
  • the ball screw 52 extends in parallel with the moving direction of the stage 10 in each moving mechanism, and one end thereof is connected to the motor 51.
  • the nut member 53 is attached to the ball screw 52 so as to mesh with a spiral thread groove provided on the outer peripheral surface of the ball screw 52.
  • the motor 51 is driven, the ball screw 52 rotates around its axis.
  • the nut member 53 moves along the ball screw 52. That is, the rotational motion of the motor 51 is converted into the straight motion of the nut member 53 via the ball screw 52.
  • Each moving mechanism 31 to 33 further includes a pair of fixing pins 54 and an attaching / detaching mechanism 55 for attaching / detaching the fixing pins 54 to / from the stage 10.
  • the pair of fixing pins 54 are arranged on the intermediate position Pm side with respect to the nut member 53, and each extend in the vertical direction. Lower portions of the pair of fixing pins 54 are fixed to a common support member 56.
  • FIG. 6 is a top view of the stage 10.
  • the stage 10 includes a rectangular stage main body 11 and three receiving members 12.
  • the inspection object 9 is placed on the upper surface of the stage main body 11.
  • the three receiving members 12 are respectively fixed near the edge of the stage body 11 on the loading position P1 side, near the edge on the inspection position P2 side, and near the edge on the unloading position P3 side.
  • iron is used as the material of the stage body 11.
  • As the material of the receiving member 12 for example, a copper alloy that is hardly damaged by contact with the fixing pin 54 is used.
  • the attachment / detachment mechanism 55 is a mechanism for attaching / detaching the pair of fixing pins 54 to / from the through hole 13 of the stage 10.
  • the attachment / detachment mechanism 55 includes an air cylinder 61, a conversion mechanism 62, and a coil spring 63.
  • the air cylinder 61 is disposed horizontally along the first direction.
  • the air cylinder 61 has a cylinder body 611 and a rod 612. The rod 612 moves forward and backward in the first direction by the air pressure supplied to the cylinder body 611.
  • the conversion mechanism 62 is a mechanism that converts the horizontal movement of the rod 612 into the vertical movement of the fixed pin 54.
  • the conversion mechanism 62 of this embodiment has an L-shaped member 620.
  • the L-shaped member 620 is a plate-like member that rotates about a rotation shaft 629 that is perpendicular and horizontal to the moving direction of the nut member 53.
  • the L-shaped member 620 includes two arms 621 and 622 that are separated by approximately 90 ° around the rotation axis 629.
  • One arm 621 is connected to the tip of the rod 612 of the air cylinder 61.
  • the other arm 622 is connected to the support member 56.
  • the L-shaped member 620 converts the horizontal movement of the rod 612 in the first direction into the up-and-down movement of the support member 56 and the pair of fixing pins 54 by rotating about the rotation shaft 629.
  • the coil spring 63 is an elastic member for biasing the fixing pin 54 in the direction toward the through hole 13 of the stage 10.
  • the coil spring 63 is inserted between the cylinder body 611 of the air cylinder 61 and the tip of the rod 612 in a state compressed more than the natural length. In a state where no air pressure is supplied to the cylinder body 611 of the air cylinder 61, the rod 612 protrudes toward the intermediate position side due to the repulsive force of the coil spring 63. Then.
  • the support member 56 and the pair of fixing pins 54 rise through the L-shaped member 620.
  • the raised pair of fixing pins 54 are respectively inserted into the through holes 13 of the stage 10. Thereby, the nut member 53 and the stage 10 are fixed so as not to be relatively movable in the first direction. That is, in the present embodiment, the pair of fixing pins 54 is a fixing portion that is fixed to the stage 10. When the motor 51 is driven in a state where the pair of fixing pins 54 are inserted into the through holes 13, the stage 10 moves in parallel with the ball screw 52 together with the nut member 53.
  • the fixed pin 54 of at least one of the first moving mechanism 31, the second moving mechanism 32, and the third moving mechanism 33 is always inserted into the through hole 13 of the stage 10.
  • the attachment / detachment mechanism 55 is controlled.
  • the stage 10 is always held by at least one moving mechanism among the first moving mechanism 31, the second moving mechanism 32, and the third moving mechanism 33. This prevents the stage 10 from moving in an unintended direction.
  • the rod 612 protrudes to the intermediate position side due to the repulsive force of the coil spring 63, and the fixing pin 54 is raised. Therefore, the fixing pin 54 is maintained in the state inserted in the through hole 13. Therefore, it is possible to prevent the fixing pin 54 from being removed from the through hole 13 and shifting the position of the stage 10 during a power failure.
  • the fourth moving mechanism 34 is a mechanism that moves the auxiliary rail 24 up and down between the intermediate position Pm and the standby position Pw.
  • the fourth moving mechanism 34 has an air cylinder 70 disposed vertically below the spare rail 24.
  • the air cylinder 70 has a cylinder body 71 and a rod 72.
  • the spare rail 24 is fixed to the upper end portion of the rod 72.
  • the rod 72 is advanced and retracted in the vertical direction by the air pressure supplied to the cylinder body 71. Thereby, the reserve rail 24 can be moved up and down.
  • the stage 10 disposed on the second rail 22 can be moved together with the second rail 22 from the intermediate position Pm to the inspection position P2.
  • the spare rail 24 can be arranged at the intermediate position Pm. Therefore, the other stage 10 can be moved between the carry-in position P1 and the carry-out position P3 while arranging one stage 10 at the inspection position P2.
  • the conveyance control unit 40 is a means for controlling the operation of each unit in the conveyance device 1. As conceptually shown in FIGS. 1 and 2, the conveyance control unit 40 is configured by a computer having an arithmetic processing unit 41 such as a CPU, a memory 42 such as a RAM, and a storage unit 43 such as a hard disk drive. . In the storage unit 43, a computer program 44 for executing the conveyance process of the inspection object 9 is installed.
  • FIG. 8 is a block diagram illustrating a connection configuration between the transport control unit 40 and each unit in the transport apparatus 1.
  • the conveyance control unit 40 includes the motor 51 of the first movement mechanism 31, the air cylinder 61 of the first movement mechanism 31, the motor 51 of the second movement mechanism 32, and the air of the second movement mechanism 32.
  • the cylinder 61, the motor 51 of the third moving mechanism 33, the air cylinder 61 of the third moving mechanism 33, and the air cylinder 70 of the fourth moving mechanism 34 are connected to be communicable.
  • the transport control unit 40 temporarily reads the computer program 44 stored in the storage unit 43 into the memory 42, and the arithmetic processing unit 41 performs arithmetic processing based on the computer program 44, thereby operating each of the above units. Control. Thereby, conveyance of a plurality of inspection objects 9 progresses sequentially.
  • the inspection unit 2 is a processing unit for inspecting the inspection object 9 on the stage 10 arranged at the inspection position P2.
  • the inspection unit 2 includes a plurality of cameras 201, a plurality of light irradiation units 202, and an image processing unit 203.
  • the plurality of cameras 201 are respectively directed to the portions of the inspection object 9 to be inspected.
  • the camera 201 for example, a camera having a light receiving element such as a CCD or a CMOS and capable of acquiring a multi-gradation digital image is used.
  • the light irradiation unit 202 for example, an LED (light emitting diode) is used.
  • the inspection unit 2 obtains an image of a portion to be inspected of the inspection object 9 by photographing with the camera 201 while causing the light irradiation unit 202 to emit light.
  • the acquired image is input to the image processing unit 203.
  • the image processing unit 203 compares the acquired image with the image of the normal inspection object 9. Then, based on the comparison result, it is determined whether or not the state of each inspection object 9 is free from defects.
  • the image processing unit 203 for example, a computer having an arithmetic processing unit such as a CPU, a memory such as a RAM, and a storage unit such as a hard disk drive is used.
  • the conveyance control unit 40 and the image processing unit 203 may be realized by the same computer.
  • FIGS. 9 and 10 are flowcharts showing the flow of the inspection object 9 in the inspection apparatus 100 and the flow of inspection. 11 to 27 are views showing the position of the stage 10 at each time point.
  • the movement of the stage 10 in the following operations is realized by the conveyance control unit 40 controlling the operations of the first moving mechanism 31, the second moving mechanism 32, the third moving mechanism 33, and the fourth moving mechanism 34.
  • first stage 10 a one of the two stages 10
  • second stage 10 b the other of the two stages 10
  • the operator of the inspection apparatus 100 carries the inspection object 9 onto the upper surface of the first stage 10a arranged at the carry-in position P1 (step S1, state of FIG. 11).
  • work of the test target object 9 may be automatically performed by the feeder which is not shown in figure.
  • the inspection object 9 carried in is placed on the upper surface of the first stage 10a in a predetermined direction.
  • the first moving mechanism 31 moves the first stage 10a from the carry-in position P1 to the intermediate position Pm (step S2, state of FIG. 12).
  • the inspection object 9 on the first stage 10a also moves from the carry-in position P1 to the intermediate position Pm.
  • the first stage 10a is transferred from the first moving mechanism 31 to the second moving mechanism 32 (step S3).
  • the second moving mechanism 32 inserts a pair of fixing pins 54 into the pair of through holes 13 provided on the end side on the inspection position P2 side of the first stage 10a.
  • the first stage 10 a is held by the second moving mechanism 32.
  • the 1st moving mechanism 31 pulls out a pair of fixing pin 54 from a pair of through-hole 13 provided in the edge by the side of the carrying-in position P1 of the 1st stage 10a. Thereby, the 1st moving mechanism 31 is cut off from the 1st stage 10a.
  • the second moving mechanism 32 moves the first stage 10a from the intermediate position Pm to the inspection position P2 (step S4, state of FIG. 13).
  • the inspection object 9 on the first stage 10a also moves from the intermediate position Pm to the inspection position P2.
  • the inspection unit 2 inspects the inspection object 9 on the first stage 10a (step S5). Specifically, photographing by the plurality of cameras 201 is performed while causing the plurality of light irradiation units 202 to emit light. Thereby, the image of the location to be inspected of the inspection object 9 is acquired. Based on the acquired image, the image processing unit 203 determines whether or not the portions to be inspected of the inspection target 9 are normal.
  • step S4 the fourth moving mechanism 34 raises the spare rail 24 from the standby position Pw to the intermediate position Pm (step S6).
  • the spare rail 24 is disposed between the first rail 21 and the third rail 23 instead of the second rail 22.
  • the movement of the second rail 22 in step S4 and the movement of the spare rail 24 in step S6 are executed in conjunction with each other.
  • the third moving mechanism 33 moves the second stage 10b from the carry-out position P3 to the intermediate position Pm (step S7, state of FIG. 14).
  • the second stage 10b is transferred from the third moving mechanism 33 to the first moving mechanism 31 (step S8).
  • the first moving mechanism 31 inserts the pair of fixing pins 54 into the pair of through holes 13 provided on the end side of the second stage 10b on the loading position P1 side.
  • the second stage 10 b is held by the first moving mechanism 31.
  • the third moving mechanism 33 pulls out the pair of fixing pins 54 from the pair of through holes 13 provided on the end side of the second stage 10b on the carry-out position P3 side. As a result, the third moving mechanism 33 is disconnected from the second stage 10b.
  • the first moving mechanism 31 moves the second stage 10b from the intermediate position Pm to the carry-in position P1 (step S9, state of FIG. 15).
  • the fourth moving mechanism 34 lowers the spare rail 24 from the intermediate position Pm to the standby position Pw again (step S10).
  • the operator of the inspection apparatus 100 carries the next inspection object 9 on the upper surface of the second stage 10b arranged at the carry-in position P1 (step S11, state of FIG. 16).
  • the second moving mechanism 32 moves the first stage 10a from the inspection position P2 to the intermediate position Pm (step S12, state of FIG. 17).
  • the inspection object 9 on the first stage 10a also moves from the inspection position P2 to the intermediate position Pm.
  • the first stage 10a is transferred from the second moving mechanism 32 to the third moving mechanism 33 (step S13).
  • the third moving mechanism 33 inserts the pair of fixing pins 54 into the pair of through holes 13 provided on the end side on the unloading position P3 side of the first stage 10a.
  • the first stage 10 a is held by the third moving mechanism 33.
  • the second moving mechanism 32 pulls out the pair of fixing pins 54 from the pair of through holes 13 provided on the end side on the inspection position P2 side of the first stage 10a.
  • the second moving mechanism 32 is disconnected from the first stage 10a.
  • the third moving mechanism 33 moves the first stage 10a from the intermediate position Pm to the carry-out position P3 (step S14, state of FIG. 18).
  • the inspection object 9 on the first stage 10a also moves from the intermediate position Pm to the carry-out position P3.
  • the operator of the inspection apparatus 100 unloads the inspection object 9 after inspection from the upper surface of the first stage 10a arranged at the unloading position P3 (step S15, state of FIG. 19).
  • the first moving mechanism 31 moves the second stage 10b from the carry-in position P1 to the intermediate position Pm (step S16, state of FIG. 20). Thereby, the inspection object 9 on the second stage 10b also moves from the carry-in position P1 to the intermediate position Pm.
  • the second stage 10b is transferred from the first moving mechanism 31 to the second moving mechanism 32 (step S17). Specifically, first, the second moving mechanism 32 inserts the pair of fixing pins 54 into the pair of through holes 13 provided on the end side on the inspection position P2 side of the second stage 10b. As a result, the second stage 10 b is held by the second moving mechanism 32. Next, the 1st moving mechanism 31 pulls out a pair of fixing pin 54 from a pair of through-hole 13 provided in the edge by the side of the carrying-in position P1 of the 2nd stage 10b. As a result, the first moving mechanism 31 is separated from the second stage 10b.
  • the second moving mechanism 32 moves the second stage 10b from the intermediate position Pm to the inspection position P2 (step S18, state of FIG. 21).
  • the inspection object 9 on the second stage 10b also moves from the intermediate position Pm to the inspection position P2.
  • the inspection unit 2 inspects the inspection object 9 on the second stage 10b (step S19). Specifically, photographing by the plurality of cameras 201 is performed while causing the plurality of light irradiation units 202 to emit light. Thereby, the image of the location to be inspected of the inspection object 9 is acquired. Based on the acquired image, the image processing unit 203 determines whether or not the portions to be inspected of the inspection target 9 are normal.
  • step S18 the fourth moving mechanism 34 raises the spare rail 24 from the standby position Pw to the intermediate position Pm (step S20).
  • the spare rail 24 is disposed between the first rail 21 and the third rail 23 instead of the second rail 22.
  • the movement of the second rail 22 in step S18 and the movement of the spare rail 24 in step S20 are executed in conjunction with each other.
  • the third moving mechanism 33 moves the first stage 10a from the carry-out position P3 to the intermediate position Pm (step S21, state of FIG. 22).
  • the first stage 10a is transferred from the third moving mechanism 33 to the first moving mechanism 31 (step S22). Specifically, first, the first moving mechanism 31 inserts the pair of fixing pins 54 into the pair of through holes 13 provided on the end side of the first stage 10a on the loading position P1 side. As a result, the first stage 10 a is held by the first moving mechanism 31. Next, the third moving mechanism 33 pulls out the pair of fixing pins 54 from the pair of through holes 13 provided on the end side on the unloading position P3 side of the first stage 10a. As a result, the third moving mechanism 33 is disconnected from the first stage 10a.
  • the first moving mechanism 31 moves the first stage 10a from the intermediate position Pm to the carry-in position P1 (step S23, state of FIG. 23).
  • the fourth moving mechanism 34 lowers the spare rail 24 from the intermediate position Pm to the standby position Pw again (step S24).
  • the operator of the inspection apparatus 100 carries the next inspection object 9 onto the upper surface of the first stage 10a arranged at the carry-in position P1 (step S25, state of FIG. 24).
  • the second moving mechanism 32 moves the second stage 10b from the inspection position P2 to the intermediate position Pm (step S26, state of FIG. 25).
  • the inspection object 9 on the second stage 10b also moves from the inspection position P2 to the intermediate position Pm.
  • the second stage 10b is transferred from the second moving mechanism 32 to the third moving mechanism 33 (step S27). Specifically, first, the third moving mechanism 33 inserts the pair of fixing pins 54 into the pair of through holes 13 provided on the end side on the unloading position P3 side of the second stage 10b. As a result, the second stage 10 b is held by the third moving mechanism 33. Next, the second moving mechanism 32 pulls out the pair of fixing pins 54 from the pair of through holes 13 provided on the end side on the inspection position P2 side of the second stage 10b. As a result, the second moving mechanism 32 is disconnected from the second stage 10b.
  • the third moving mechanism 33 moves the second stage 10b from the intermediate position Pm to the carry-out position P3 (step S28, state of FIG. 26).
  • the inspection object 9 on the second stage 10b also moves from the intermediate position Pm to the carry-out position P3.
  • the operator of the inspection apparatus 100 unloads the inspection object 9 after inspection from the upper surface of the second stage 10b arranged at the unloading position P3 (step S29, state of FIG. 27).
  • step S2 the process returns to step S2, and the inspection apparatus 100 repeats the processes of steps S2 to S29.
  • the other stage 10 can be moved from the carry-out position P3 to the carry-in position P1 via the intermediate position Pm. For this reason, after moving one stage 10 to the unloading position P3 and moving the other stage 10 from the loading position P1 to the inspection position P2, the stage 10 moved first is not obstructed by the other stage 10. In addition, it can be moved from the carry-out position P3 to the carry-in position P1. For this reason, the conveyance process of the inspection target 9 by the two stages 10 can be efficiently performed without providing a separate conveyance path for return.
  • the stage 10 when the stage 10 is moved from the intermediate position Pm to the inspection position P2, the second rail 22 is also moved to the inspection position P2 together with the stage 10. Then, a spare rail 24 is arranged in place of the second rail 22 at the intermediate position Pm.
  • the stage 10 can be moved while delivering the stage 10 between the first moving mechanism 31 and the third moving mechanism 33.
  • the first position is the carry-in position
  • the second position is the inspection position
  • the third position is the carry-out position. That is, the carry-in position, the intermediate position, and the carry-out position are arranged linearly. If it does in this way, the linear conveyance path
  • the second position may be the loading position.
  • the first position may be one of the unloading position and the inspection position
  • the third position may be the other of the unloading position and the inspection position.
  • the second position may be set as the carry-out position.
  • the first position may be one of the carry-in position and the inspection position
  • the third position may be the other of the carry-in position and the inspection position.
  • the second position is set to the carry-in position or the carry-out position, the distance between the carry-in position and the carry-out position becomes closer than in the above embodiment. Therefore, it becomes easy to carry in and carry out the inspection object by the same robot or the same worker arranged at the work position Po between the carry-in position and the carry-out position.
  • two inspection positions P2 may be provided in one inspection apparatus.
  • the two stages 10 on which the inspection object 9 is placed are disposed at the first inspection position P2 and the second inspection position P2, respectively, the other stage 10 is moved from the unloading position P3. What is necessary is just to make it move to carrying-in position P1.
  • three stages 10 can be moved in the transport apparatus.
  • the number of inspection positions may be three or more. In that case, the number of stages may be one less than the total number of carry-in positions, carry-out positions, and inspection positions.
  • the standby position for waiting the spare rail is arranged below the intermediate position. Thereby, the spread of the horizontal direction of the conveying apparatus was suppressed.
  • the standby position for waiting the spare rail may be another position. For example, when there is sufficient space in the second direction, the standby position may be arranged on the opposite side of the second position from the intermediate position.
  • the fixing pin is inserted into the through hole provided in the stage.
  • the stage may have a recess instead of the through hole, and a pin may be inserted into the recess.
  • fixed part may be provided in the moving mechanism side, and the convex part inserted in the said through-hole or recessed part may be provided in the stage side.
  • a coil spring is used as an elastic member for biasing the pin in the direction toward the through hole or the recess.
  • the pin may be biased by using another elastic member such as a leaf spring or rubber instead of the coil spring.
  • the air cylinder is arranged horizontally. And the horizontal movement of the rod was converted into the raising / lowering movement via the L-shaped member.
  • the air cylinder is disposed horizontally, the dimension of the attaching / detaching mechanism in the height direction can be suppressed.
  • the L-shaped member may be omitted and the air cylinder may be arranged in the vertical direction.
  • the application target of the transfer apparatus of the present invention may be a processing apparatus that performs processing other than inspection on an object on a stage.
  • the present invention may be applied to an apparatus that performs processing such as coating, drawing, and printing on an object on a stage.
  • the shape of the details of the transport device or the shape of the details of the inspection device may be different from the drawings in the present application. Moreover, you may combine suitably each element which appeared in said embodiment and modification in the range which does not produce inconsistency.

Abstract

This conveyance device (1) conveys an inspection object (9) between a first position (P1), an intermediate position (Pm), and a third position (P3), which are arranged in a first direction in this order, and a second position (P2) adjacent, in a second direction intersecting the first direction, to the intermediate position (Pm). First, one stage (10) is moved to the first position (P1), the second position (P2), and the third position (P3) in this order. Next, another stage (10) is moved from the first position (P1) to the second position (P2). Thereafter, the one first moved of the stages (10) is moved from the third position (P3) to the first position (P1). Accordingly, a process of conveying the inspection object (9) through the two stages (10) can be efficiently performed without separately providing a conveyance path for return.

Description

搬送装置、処理装置、搬送方法、および処理方法Conveying apparatus, processing apparatus, conveying method, and processing method
　本発明は、ステージ上に載置された対象物を搬送する搬送装置、当該搬送装置を備えた処理装置、ステージ上に載置された対象物を搬送する搬送方法、および当該搬送方法を有する処理方法に関する。 The present invention relates to a transport device that transports an object placed on a stage, a processing device including the transport device, a transport method that transports an object placed on a stage, and a process having the transport method. Regarding the method.
　自動車部品などの工業製品の製造工程では、製造後の製品の外観に異常がないかどうかを調べる外観検査が行われる。外観検査は、作業者の目視により行われる場合が多い。しかしながら、作業者の目視に依存すると、複数の作業者間で、検査にかかる時間および検査結果にばらつきが生じる。また、同一の作業者であっても、体調不良または集中力の低下により、検査に時間がかかったり、欠陥の見落としが発生したりする虞がある。このため、工業製品の外観検査を、自動かつ高速に行うことができる装置の開発が求められている。 In the manufacturing process of industrial products such as automobile parts, an appearance inspection is performed to check whether the appearance of the manufactured product is normal. In many cases, the appearance inspection is performed by visual inspection of an operator. However, depending on the visual observation of the worker, the time required for the inspection and the inspection result vary among the plurality of workers. Further, even the same worker may take a long time for inspection due to poor physical condition or reduced concentration, and a defect may be overlooked. For this reason, development of the apparatus which can perform the external appearance inspection of industrial products automatically and at high speed is calculated | required.
　外観検査装置における検査対象物の搬送方法としては、例えば、ターンテーブルによる搬送、またはベルト搬送などが考えられる。しかしながら、検査位置において、ターンテーブルまたはベルトに検査対象物を載置したまま検査対象物を撮影すると、搬入・搬出位置の振動が、ターンテーブルまたはベルトを介して検査位置まで伝達する。このため、検査対象物の静止画像を撮影することが困難となる。 As a method for conveying the inspection object in the appearance inspection apparatus, for example, conveyance by a turntable or belt conveyance can be considered. However, when the inspection object is photographed while the inspection object is placed on the turntable or belt at the inspection position, vibrations at the loading / unloading position are transmitted to the inspection position via the turntable or belt. For this reason, it is difficult to capture a still image of the inspection object.
　一方、検査対象物をステージ上に載置して、当該ステージをレール搬送する方式では、搬入・搬出位置の振動が検査位置まで伝達しにくい。したがって、検査位置において検査対象物を静止させつつ撮影することができる。対象物をステージ上に載置して搬送する従来の搬送方法については、例えば、特許文献１に記載されている。 On the other hand, in the system in which the inspection object is placed on the stage and the stage is transported by rail, the vibration at the loading / unloading position is difficult to be transmitted to the inspection position. Therefore, it is possible to take an image while the inspection object is stationary at the inspection position. A conventional transport method for transporting an object placed on a stage is described in Patent Document 1, for example.
特開２０１１－１９２９２７号公報JP 2011-192927 A
　しかしながら、１つのステージで搬入・搬出位置と検査位置との間を往復させると、１つの検査対象物の検査中に、他の検査対象物を搬入または搬出することができない。このため、検査時間に律速されて、処理時間が増大するという問題がある。 However, if the loading / unloading position and the inspection position are reciprocated on one stage, other inspection objects cannot be carried in or out during the inspection of one inspection object. For this reason, there is a problem that the processing time increases due to the rate being controlled by the inspection time.
　一方、複数のステージを用いれば、１つのステージを検査位置に配置して検査対象物を検査する間に、他のステージを搬入・搬出位置に配置して、検査対象物を搬入または搬出することができる。ただし、複数のステージを用いると、搬入・搬出位置と検査位置との間で、各ステージを互いに干渉することなく往復させることが難しい。往路用のレールとは別に、帰還用のレールを設けることも考えられるが、帰還用のレールを別設すると、装置が大型化してしまう。 On the other hand, if a plurality of stages are used, one stage is placed at the inspection position and the inspection object is inspected, while another stage is placed at the loading / unloading position to carry in or out the inspection object. Can do. However, if a plurality of stages are used, it is difficult to reciprocate the stages between the loading / unloading position and the inspection position without interfering with each other. Although it is conceivable to provide a return rail separately from the forward rail, if the return rail is provided separately, the apparatus becomes large.
　本発明は、このような事情に鑑みなされたものであり、対象物をステージ上に載置して搬送する搬送装置において、帰還用の搬送経路を設けることなく、２つのステージによる対象物の搬送を効率よく行うことができる技術を提供することを目的とする。 The present invention has been made in view of such circumstances, and in a transport apparatus that transports an object placed on a stage, the object is transported by two stages without providing a return transport path. It aims at providing the technique which can perform efficiently.
　上記課題を解決するため、本願の第１発明は、第１方向に順に配置された第１位置、中間位置、および第３位置と、前記中間位置から前記第１方向に対して交差する第２方向に隣接する第２位置との間で、対象物を搬送する搬送装置であって、対象物を載置可能な少なくとも２つのステージと、前記第１位置と前記中間位置との間で前記ステージを移動させる第１移動機構と、前記第２位置と前記中間位置との間で前記ステージを移動させる第２移動機構と、前記第３位置と前記中間位置との間で前記ステージを移動させる第３移動機構と、前記第１移動機構、前記第２移動機構、および前記第３移動機構を制御する制御部と、を備え、前記制御部は、１つの前記ステージを前記第２位置に配置しつつ、前記第１移動機構および前記第３移動機を動作させて、他の１つの前記ステージを、前記第１位置と前記第３位置との間で移動させる。 In order to solve the above-described problem, the first invention of the present application includes a first position, an intermediate position, and a third position that are sequentially arranged in the first direction, and a second that intersects the first direction from the intermediate position. A transport apparatus that transports an object between second positions adjacent to each other in a direction, the stage between at least two stages on which the object can be placed, and between the first position and the intermediate position A first movement mechanism that moves the stage, a second movement mechanism that moves the stage between the second position and the intermediate position, and a second movement mechanism that moves the stage between the third position and the intermediate position. And a control unit that controls the first movement mechanism, the second movement mechanism, and the third movement mechanism, and the control unit arranges one stage at the second position. The first moving mechanism and the third moving Machine was allowed to work, the other one of said stages is moved between said third position and said first position.
　本願の第２発明は、第１発明の搬送装置であって、前記第１位置から前記中間位置へ向けて前記第１方向に延びる第１レールと、前記中間位置と前記第２位置との間で移動可能であり、前記第１方向に延びる第２レールと、前記第３位置から前記中間位置へ向けて前記第１方向に延びる第３レールと、前記中間位置と待機位置との間で移動可能であり、前記第１方向に延びる予備レールと、前記中間位置と前記待機位置との間で、前記予備レールを移動させる第４移動機構と、を備え、前記第１移動機構は、前記第１位置と前記中間位置との間で、前記第１レールおよび前記第２レールに沿って、前記ステージを移動させ、前記第２移動機構は、前記中間位置と前記第２位置との間で、前記第２レールを移動させ、前記第３移動機構は、前記第３位置と前記中間位置との間で、前記第３レールおよび前記第２レールに沿って、前記ステージを移動させる。 2nd invention of this application is a conveying apparatus of 1st invention, Comprising: The 1st rail extended in the said 1st direction toward the said intermediate position from the said 1st position, Between the said intermediate position and the said 2nd position A second rail extending in the first direction, a third rail extending in the first direction from the third position toward the intermediate position, and moving between the intermediate position and the standby position. A spare rail extending in the first direction, and a fourth moving mechanism for moving the spare rail between the intermediate position and the standby position, wherein the first moving mechanism comprises the first The stage is moved along the first rail and the second rail between the first position and the intermediate position, and the second moving mechanism is between the intermediate position and the second position, The second rail is moved, and the third moving mechanism is Between said intermediate position and the third position, along said third rail and said second rail moves the stage.
　本願の第３発明は、第２発明の搬送装置であって、前記制御部は、前記第４移動機構をさらに制御し、前記第２移動機構による前記中間位置から前記第２位置への前記第２レールの移動と、前記第４移動機構による前記待機位置から前記中間位置への前記予備レールの移動とを、連動して実行させる。 3rd invention of this application is a conveying apparatus of 2nd invention, Comprising: The said control part further controls the said 4th moving mechanism, The said 2nd position from the said intermediate position by the said 2nd moving mechanism to the said 2nd position The movement of the two rails and the movement of the spare rail from the standby position to the intermediate position by the fourth movement mechanism are executed in conjunction with each other.
　本願の第４発明は、第２発明または第３発明の搬送装置であって、前記第１位置、前記中間位置、および前記第３位置は、水平に配列され、前記待機位置は、前記中間位置の下方に配置される。 4th invention of this application is a conveying apparatus of 2nd invention or 3rd invention, Comprising: The said 1st position, the said intermediate position, and the said 3rd position are arranged horizontally, The said standby position is said intermediate position It is arranged below.
　本願の第５発明は、第２発明から第４発明までのいずれか１発明の搬送装置であって、前記第４移動機構は、エアシリンダのロッドの進退により、前記予備レールを移動させる機構を有する。 A fifth invention of the present application is the transfer device according to any one of the second to fourth inventions, wherein the fourth moving mechanism is a mechanism for moving the spare rail by advancing and retracting a rod of an air cylinder. Have.
　本願の第６発明は、第１発明から第５発明までのいずれか１発明の搬送装置であって、前記第１移動機構、前記第２移動機構、および前記第３移動機構は、モータの回転運動を、ボールねじを介して直進運動に変換する機構を有する。 A sixth invention of the present application is the transfer device according to any one of the first to fifth inventions, wherein the first moving mechanism, the second moving mechanism, and the third moving mechanism are rotations of a motor. It has a mechanism for converting the movement into a straight movement through a ball screw.
　本願の第７発明は、第１発明から第６発明までのいずれか１発明の搬送装置であって、前記第１位置は、前記ステージ上に対象物を搬入する搬入位置であり、前記第２位置は、前記ステージ上の対象物に対して処理を行う処理位置であり、前記第３位置は、前記ステージから対象物を搬出する搬出位置である。 7th invention of this application is a conveying apparatus of any one invention from 1st invention to 6th invention, Comprising: The said 1st position is a carrying-in position which carries in a target object on the said stage, Said 2nd The position is a processing position for processing the object on the stage, and the third position is an unloading position for unloading the object from the stage.
　本願の第８発明は、第１発明から第６発明までのいずれか１発明の搬送装置であって、前記第１位置は、前記ステージから対象物を搬出する搬出位置および前記ステージ上の対象物に対して処理を行う処理位置のいずれか一方であり、前記第２位置は、前記ステージ上に対象物を搬入する搬入位置であり、前記第３位置は、前記搬出位置および前記処理位置の他方である。 An eighth invention of the present application is the transfer device according to any one of the first to sixth inventions, wherein the first position is an unloading position for unloading an object from the stage and an object on the stage. The second position is a carry-in position for carrying an object onto the stage, and the third position is the other of the carry-out position and the treatment position. It is.
　本願の第９発明は、第１発明から第６発明までのいずれか１発明の搬送装置であって、前記第１位置は、前記ステージ上に対象物を搬入する搬入位置および前記ステージ上の対象物に対して処理を行う処理位置のいずれか一方であり、前記第２位置は、前記ステージから対象物を搬出する搬出位置であり、前記第３位置は、前記搬入位置および前記処理位置の他方である。 A ninth invention of the present application is the transfer device according to any one of the first to sixth inventions, wherein the first position is a carry-in position for carrying an object onto the stage and an object on the stage. The second position is a carry-out position for carrying out an object from the stage, and the third position is the other of the carry-in position and the treatment position. It is.
　本願の第１０発明は、第１発明から第９発明までのいずれか１発明の搬送装置であって、前記第１移動機構、前記第２移動機構、および前記第３移動機構は、それぞれ、前記ステージに固定される固定部と、前記固定部を前記ステージに対して着脱する着脱機構と、を有する。 A tenth invention of the present application is the transfer device according to any one of the first invention to the ninth invention, wherein the first moving mechanism, the second moving mechanism, and the third moving mechanism are A fixing unit fixed to the stage; and an attaching / detaching mechanism for attaching / detaching the fixing unit to / from the stage.
　本願の第１１発明は、第１０発明の搬送装置であって、前記ステージは、貫通孔または凹部を有し、前記固定部は、前記貫通孔または前記凹部に挿入されるピンを有する。 The eleventh invention of the present application is the transfer device according to the tenth invention, wherein the stage has a through hole or a recess, and the fixing portion has a pin inserted into the through hole or the recess.
　本願の第１２発明は、第１１発明の搬送装置であって、前記着脱機構は、前記ピンを前記貫通孔または前記凹部へ向かう方向に付勢する弾性部材を有する。 The twelfth invention of the present application is the transport apparatus according to the eleventh invention, wherein the attachment / detachment mechanism includes an elastic member that biases the pin in a direction toward the through hole or the recess.
　本願の第１３発明は、第１２発明の搬送装置であって、前記着脱機構は、前記貫通孔または前記凹部から離れる方向に前記ピンを移動させるエアシリンダをさらに有する。 The thirteenth invention of the present application is the transport apparatus according to the twelfth invention, wherein the attachment / detachment mechanism further includes an air cylinder for moving the pin in a direction away from the through hole or the recess.
　本願の第１４発明は、第１３発明の搬送装置であって、前記エアシリンダは水平に配置され、前記着脱機構は、前記エアシリンダのロッドの水平移動を、前記ピンの昇降移動に変換する変換機構をさらに有する。 14th invention of this application is a conveying apparatus of 13th invention, Comprising: The said air cylinder is arrange | positioned horizontally, The said attachment / detachment mechanism is the conversion which converts the horizontal movement of the rod of the said air cylinder into the raising / lowering movement of the said pin. It further has a mechanism.
　本願の第１５発明は、第１１発明から第１４発明までのいずれか１発明の搬送装置であって、前記ステージは、対象物を載置するステージ本体と、前記ステージ本体に固定された受け部材と、を有し、前記受け部材が、前記貫通孔または前記凹部を有する。 A fifteenth aspect of the present invention is the transport apparatus according to any one of the eleventh aspect to the fourteenth aspect, wherein the stage includes a stage main body on which an object is placed and a receiving member fixed to the stage main body. The receiving member has the through hole or the recess.
　本願の第１６発明は、第１０発明から第１５発明までのいずれか１発明の搬送装置であって、前記制御部は、常時少なくとも１つの前記移動機構の前記固定部が、前記ステージに固定されるように、前記着脱機構を制御する。 A sixteenth aspect of the present invention is the transport apparatus according to any one of the tenth to fifteenth aspects of the present invention, wherein the control unit is configured such that the fixed portion of the at least one moving mechanism is always fixed to the stage. The attachment / detachment mechanism is controlled.
　本願の第１７発明は、第１発明から第１６発明までのいずれか１発明の搬送装置と、前記ステージ上の対象物に対して処理を行う処理部と、を備える処理装置である。 A seventeenth aspect of the present invention is a processing apparatus including the transport device according to any one of the first to sixteenth aspects of the present invention and a processing unit that performs processing on an object on the stage.
　本願の第１８発明は、第１７発明の処理装置であって、前記処理部は、前記ステージ上の対象物を検査する検査部である。 18th invention of this application is the processing apparatus of 17th invention, Comprising: The said process part is a test | inspection part which test | inspects the target object on the said stage.
　本願の第１９発明は、第１方向に順に配置された第１位置、中間位置、および第３位置と、前記中間位置から前記第１方向に対して交差する第２方向に隣接する第２位置との間で、ステージ上に載置された対象物を搬送する搬送方法であって、ａ）前記第１位置から前記中間位置を経て前記第２位置へ、一のステージを移動させる工程と、ｂ）前記工程ａ）の後、前記第２位置から前記中間位置を経て前記第３位置へ、前記一のステージを移動させる工程と、ｃ）前記工程ｂ）の後、前記第１位置から前記中間位置を経て前記第２位置へ、他のステージを移動させる工程と、ｄ）前記工程ｃ）の後、前記第３位置から前記中間位置を経て前記第１位置へ、前記一のステージを移動させる工程と、を有する。 According to a nineteenth aspect of the present invention, a first position, an intermediate position, and a third position that are sequentially arranged in the first direction, and a second position that is adjacent to the second direction intersecting the first direction from the intermediate position. A method of transporting an object placed on a stage between: a) moving one stage from the first position to the second position through the intermediate position; b) after the step a), moving the one stage from the second position through the intermediate position to the third position; c) after the step b), from the first position, Moving the other stage to the second position via the intermediate position; and d) moving the one stage from the third position to the first position via the intermediate position after the step c). And a step of causing.
　本願の第２０発明は、第１９発明の搬送方法であって、前記第１位置と前記中間位置との間、前記第２位置と前記中間位置との間、および、前記第３位置と前記中間位置との間それぞれで、異なる移動機構により、前記ステージを移動させ、前記工程ａ）、前記工程ｂ）および前記工程ｃ）それぞれにおいて、前記ステージを、前記中間位置を経由させる場合、前記中間位置へ前記ステージを移動させた一の移動機構と異なる、他の移動機構を前記ステージに固定した後、前記一の移動機構を前記ステージから切り離す。 A twentieth aspect of the present invention is the carrying method according to the nineteenth aspect, wherein the position is between the first position and the intermediate position, between the second position and the intermediate position, and between the third position and the intermediate position. When the stage is moved by a different moving mechanism between each of the positions, and in each of the step a), the step b) and the step c), the stage passes through the intermediate position. After the other moving mechanism different from the one moving mechanism that moved the stage to the stage is fixed to the stage, the one moving mechanism is separated from the stage.
　本願の第２１発明は、第１９発明または第２０発明の搬送方法であって、前記第１位置は、前記ステージ上に対象物を搬入する搬入位置であり、前記第２位置は、前記ステージ上の対象物に対して処理を行う処理位置であり、前記第３位置は、前記ステージから対象物を搬出する搬出位置である。 A twenty-first invention of the present application is the carrying method according to the nineteenth or twentieth invention, wherein the first position is a carry-in position for carrying an object onto the stage, and the second position is on the stage. The third position is a carry-out position for carrying out the object from the stage.
　本願の第２２発明は、第１９発明または第２０発明の搬送方法であって、前記第１位置は、前記ステージから対象物を搬出する搬出位置および前記ステージ上の対象物に対して処理を行う処理位置のいずれか一方であり、前記第２位置は、前記ステージ上に対象物を搬入する搬入位置であり、前記第３位置は、前記搬出位置および前記処理位置の他方である。 A twenty-second invention of the present application is the carrying method according to the nineteenth invention or the twentieth invention, wherein the first position performs processing on the unloading position for unloading the object from the stage and the object on the stage. One of the processing positions, the second position is a carry-in position for carrying an object onto the stage, and the third position is the other of the carry-out position and the processing position.
　本願の第２３発明は、第１９発明または第２０発明の搬送方法であって、前記第１位置は、前記ステージ上に対象物を搬入する搬入位置および前記ステージ上の対象物に対して処理を行う処理位置のいずれか一方であり、前記第２位置は、前記ステージから対象物を搬出する搬出位置であり、前記第３位置は、前記搬入位置および前記処理位置の他方である。 A twenty-third invention of the present application is the carrying method according to the nineteenth invention or the twentieth invention, wherein the first position is a loading position for loading an object onto the stage and an object on the stage. Either of the processing positions to be performed, the second position is an unloading position for unloading an object from the stage, and the third position is the other of the loading position and the processing position.
　本願の第２４発明は、第２１発明から第２３発明までのいずれか１発明の搬送方法により、対象物を搬送する搬送工程と、前記処理位置に配置された前記ステージ上の対象物に対して処理を行う処理工程と、を備える処理方法である。 According to a twenty-fourth aspect of the present invention, a conveying step of conveying an object by the conveying method according to any one of the twenty-first to twenty-third aspects of the present invention, and an object on the stage arranged at the processing position And a processing step for performing processing.
　本願の第２５発明は、第２４発明の処理方法であって、前記処理工程は、前記処理位置に配置された前記ステージ上の対象物を検査する検査工程である。 The twenty-fifth aspect of the present invention is the processing method according to the twenty-fourth aspect, wherein the processing step is an inspection step for inspecting an object on the stage arranged at the processing position.
　本願の第１発明～第１６発明によれば、第１位置、第２位置、および第３位置の順に１つのステージを移動させ、続いて、他のステージを第１位置から第２位置に移動させた後、先に移動させた１つのステージを、他のステージに妨害されずに、第３位置から第１位置へ移動させることができる。このため、帰還用の搬送経路を別に設けることなく、２つのステージによる対象物の搬送処理を、効率よく行うことができる。 According to the first to sixteenth aspects of the present invention, one stage is moved in the order of the first position, the second position, and the third position, and then the other stage is moved from the first position to the second position. Then, one stage that has been moved first can be moved from the third position to the first position without being obstructed by the other stages. For this reason, the conveyance process of the target object by two stages can be performed efficiently, without providing the conveyance path | route for return separately.
　特に、本願の第２発明によれば、中間位置に配置されたステージを、第２レールごと第２位置に移動させることができる。そして、第２レールの代わりに、中間位置に予備レールを配置することができる。したがって、１つのステージを第２位置に配置しつつ、第１位置と第３位置との間で他のステージを移動させることができる。 Particularly, according to the second invention of the present application, the stage arranged at the intermediate position can be moved to the second position together with the second rail. And a spare rail can be arrange | positioned in an intermediate position instead of a 2nd rail. Therefore, it is possible to move another stage between the first position and the third position while arranging one stage at the second position.
　特に、本願の第４発明によれば、搬送装置の水平方向の広がりを抑制しつつ、予備レールを待機させることができる。 In particular, according to the fourth aspect of the present invention, it is possible to make the spare rail stand by while suppressing the horizontal spread of the transport device.
　特に、本願の第７発明によれば、搬入位置、中間位置、および搬出位置が直線状に配置される。このため、搬入位置から搬出位置までの直線状の搬送経路と、搬送経路に隣接する処理位置を含む処理部とを、コンパクトに配置することができる。 In particular, according to the seventh invention of the present application, the carry-in position, the intermediate position, and the carry-out position are linearly arranged. For this reason, the linear conveyance path | route from a carrying-in position to a carrying-out position and the process part containing the processing position adjacent to a conveyance path | route can be arrange | positioned compactly.
　特に、本願の第８発明または第９発明によれば、搬入位置と搬出位置との距離が近くなる。このため、同一の作業者または同一のロボットによって、対象物の搬入および搬出を行いやすくなる。 In particular, according to the eighth or ninth invention of the present application, the distance between the carry-in position and the carry-out position is reduced. For this reason, it becomes easy to carry in and carry out the object by the same worker or the same robot.
　特に、本願の第１０発明によれば、複数の移動機構の間でステージを受け渡しながら、ステージを移動させることができる。 Particularly, according to the tenth aspect of the present invention, the stage can be moved while delivering the stage among a plurality of moving mechanisms.
　特に、本願の第１２発明によれば、着脱機構への電力供給が停止した場合に、貫通孔または凹部からピンが外れてステージの位置がずれることを防止できる。 Particularly, according to the twelfth aspect of the present invention, when the power supply to the attaching / detaching mechanism is stopped, it is possible to prevent the pin from being removed from the through hole or the recessed portion and the stage from being displaced.
　特に、本願の第１４発明によれば、エアシリンダを水平に配置することで、着脱機構の高さ方向の寸法を抑制できる。 In particular, according to the fourteenth aspect of the present invention, the dimension in the height direction of the attaching / detaching mechanism can be suppressed by arranging the air cylinder horizontally.
　特に、本願の第１５発明によれば、ピンの挿入によりステージ本体が損傷することを抑制できる。 Particularly, according to the fifteenth aspect of the present invention, the stage main body can be prevented from being damaged by the insertion of the pin.
　特に、本願の第１６発明または第２０発明によれば、ステージが意図しない方向へ移動することを防止できる。 In particular, according to the sixteenth or twentieth invention of the present application, the stage can be prevented from moving in an unintended direction.
　また、本願の第１９発明～第２５発明によれば、第１位置、第２位置、および第３位置の順に第１ステージを移動させ、続いて、第２ステージを第１位置から第２位置に移動させた後、先に移動させた第１ステージを、第２ステージに妨害されずに、第３位置から第１位置へ移動させることができる。このため、帰還用の搬送経路を別に設けることなく、２つのステージによる対象物の搬送処理を、効率よく行うことができる。 According to the nineteenth to twenty-fifth aspects of the present invention, the first stage is moved in the order of the first position, the second position, and the third position, and then the second stage is moved from the first position to the second position. After being moved to, the first stage moved first can be moved from the third position to the first position without being obstructed by the second stage. For this reason, the conveyance process of the target object by two stages can be performed efficiently, without providing the conveyance path | route for return separately.
　特に、本願の第２１発明によれば、搬入位置、中間位置、および搬出位置が直線状に配置される。このため、搬入位置から搬出位置までの直線状の搬送経路と、搬送経路に隣接する処理位置を含む処理部とを、コンパクトに配置することができる。 Particularly, according to the twenty-first invention of the present application, the carry-in position, the intermediate position, and the carry-out position are arranged in a straight line. For this reason, the linear conveyance path | route from a carrying-in position to a carrying-out position and the process part containing the processing position adjacent to a conveyance path | route can be arrange | positioned compactly.
　特に、本願の第２２発明または第２３発明によれば、搬入位置と搬出位置との距離が近くなる。このため、同一の作業者または同一のロボットによって、対象物の搬入および搬出を行いやすくなる。 In particular, according to the twenty-second or twenty-third invention of the present application, the distance between the carry-in position and the carry-out position is reduced. For this reason, it becomes easy to carry in and carry out the object by the same worker or the same robot.
検査装置の上面図である。It is a top view of an inspection device. 検査装置の上面図である。It is a top view of an inspection device. 検査装置の正面図である。It is a front view of an inspection device. 検査装置の正面図である。It is a front view of an inspection device. 第１移動機構、第２移動機構、および第３移動機構の構造を示した図である。It is the figure which showed the structure of the 1st movement mechanism, the 2nd movement mechanism, and the 3rd movement mechanism. ステージの上面図である。It is a top view of a stage. 受け部材の付近におけるステージの部分縦断面図である。It is a partial longitudinal cross-sectional view of the stage in the vicinity of a receiving member. 搬送制御部と搬送装置内の各部との接続構成を示したブロック図である。It is the block diagram which showed the connection structure of a conveyance control part and each part in a conveying apparatus. 検査対象物の搬送および検査の流れを示したフローチャートである。It is the flowchart which showed the flow of inspection object conveyance and inspection. 検査対象物の搬送および検査の流れを示したフローチャートである。It is the flowchart which showed the flow of inspection object conveyance and inspection. 処理中のある時点におけるステージの位置を示した図である。It is the figure which showed the position of the stage in a certain time in process. 処理中のある時点におけるステージの位置を示した図である。It is the figure which showed the position of the stage in a certain time in process. 処理中のある時点におけるステージの位置を示した図である。It is the figure which showed the position of the stage in a certain time in process. 処理中のある時点におけるステージの位置を示した図である。It is the figure which showed the position of the stage in a certain time in process. 処理中のある時点におけるステージの位置を示した図である。It is the figure which showed the position of the stage in a certain time in process. 処理中のある時点におけるステージの位置を示した図である。It is the figure which showed the position of the stage in a certain time in process. 処理中のある時点におけるステージの位置を示した図である。It is the figure which showed the position of the stage in a certain time in process. 処理中のある時点におけるステージの位置を示した図である。It is the figure which showed the position of the stage in a certain time in process. 処理中のある時点におけるステージの位置を示した図である。It is the figure which showed the position of the stage in a certain time in process. 処理中のある時点におけるステージの位置を示した図である。It is the figure which showed the position of the stage in a certain time in process. 処理中のある時点におけるステージの位置を示した図である。It is the figure which showed the position of the stage in a certain time in process. 処理中のある時点におけるステージの位置を示した図である。It is the figure which showed the position of the stage in a certain time in process. 処理中のある時点におけるステージの位置を示した図である。It is the figure which showed the position of the stage in a certain time in process. 処理中のある時点におけるステージの位置を示した図である。It is the figure which showed the position of the stage in a certain time in process. 処理中のある時点におけるステージの位置を示した図である。It is the figure which showed the position of the stage in a certain time in process. 処理中のある時点におけるステージの位置を示した図である。It is the figure which showed the position of the stage in a certain time in process. 処理中のある時点におけるステージの位置を示した図である。It is the figure which showed the position of the stage in a certain time in process. 変形例に係る検査装置のレイアウトを示した図である。It is the figure which showed the layout of the inspection apparatus which concerns on a modification. 変形例に係る検査装置のレイアウトを示した図である。It is the figure which showed the layout of the inspection apparatus which concerns on a modification. 変形例に係る検査装置のレイアウトを示した図である。It is the figure which showed the layout of the inspection apparatus which concerns on a modification.
　以下、本発明の実施形態について、図面を参照しつつ説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
　＜１．外観検査装置の構成＞
　図１および図２は、本発明の一実施形態に係る搬送装置１を備えた検査装置１００の上面図である。図３および図４は、検査装置１００の正面図である。この検査装置１００は、立体的な形状を有する検査対象物９を複数のカメラ２０１で撮影し、得られた画像に基づいて、検査対象物９の状態を検査する装置である。検査装置１００は、例えば、検査対象物９となる工業製品に取り付けられた複数の部品の位置または取り付け状態が、正常であるか否かを検査するために用いられる。 <1. Configuration of appearance inspection device>
1 and 2 are top views of an inspection apparatus 100 including a transport apparatus 1 according to an embodiment of the present invention. 3 and 4 are front views of the inspection apparatus 100. FIG. This inspection apparatus 100 is an apparatus that inspects the inspection object 9 having a three-dimensional shape with a plurality of cameras 201 and inspects the state of the inspection object 9 based on the obtained images. The inspection apparatus 100 is used, for example, to inspect whether or not the positions or attachment states of a plurality of parts attached to the industrial product that is the inspection object 9 are normal.
　図１～図４に示すように、本実施形態の検査装置１００は、検査対象物９を搬送する搬送装置１と、検査対象物９を検査する検査部２と、を備えている。また、搬送装置１は、２つのステージ１０と、互いに別体の第１レール２１、第２レール２２、第３レール２３、および予備レール２４と、第１移動機構３１、第２移動機構３２、第３移動機構３３、および第４移動機構３４と、搬送制御部４０とを備えている。 As shown in FIGS. 1 to 4, the inspection apparatus 100 according to the present embodiment includes a transport apparatus 1 that transports the inspection object 9 and an inspection unit 2 that inspects the inspection object 9. Further, the transport device 1 includes two stages 10, a first rail 21, a second rail 22, a third rail 23, and a spare rail 24 that are separate from each other, a first moving mechanism 31, a second moving mechanism 32, A third moving mechanism 33, a fourth moving mechanism 34, and a conveyance control unit 40 are provided.
　ステージ１０は、検査対象物９を載置する板状の部材である。２つのステージ１０は、それぞれ、水平に広がる上面を有する。検査対象物９は、ステージ１０上面に載置されるとともに、ステージ１０に対して固定される。したがって、各ステージ１０に載置された検査対象物９は、ステージ１０とともに移動する。搬送装置１は、複数の検査対象物９を、２つのステージ１０を用いて順次に搬送する。したがって、検査装置１００の稼働時には、検査装置１００内に、２つの検査対象物９が同時に存在する場合がある。 Stage 10 is a plate-like member on which inspection object 9 is placed. Each of the two stages 10 has an upper surface that extends horizontally. The inspection object 9 is placed on the upper surface of the stage 10 and is fixed to the stage 10. Therefore, the inspection object 9 placed on each stage 10 moves together with the stage 10. The transport apparatus 1 sequentially transports a plurality of inspection objects 9 using two stages 10. Therefore, when the inspection apparatus 100 is in operation, there may be two inspection objects 9 in the inspection apparatus 100 at the same time.
　搬送装置１は、搬入位置Ｐ１、中間位置Ｐｍ、検査位置Ｐ２、および搬出位置Ｐ３の間で、ステージ１０を搬送する。搬入位置Ｐ１は、検査前の検査対象物９をステージ１０上に搬入する位置である。検査位置Ｐ２は、検査部２内において、ステージ１０上に載置された検査対象物９を検査する位置（処理位置）である。搬出位置Ｐ３は、検査後の検査対象物９をステージ１０から搬出する位置である。本実施形態では、搬入位置Ｐ１が第１位置となり、検査位置Ｐ２が第２位置となり、搬出位置Ｐ３が第３位置となる。 The conveyance device 1 conveys the stage 10 among the carry-in position P1, the intermediate position Pm, the inspection position P2, and the carry-out position P3. The carry-in position P1 is a position where the inspection object 9 before inspection is carried onto the stage 10. The inspection position P <b> 2 is a position (processing position) for inspecting the inspection object 9 placed on the stage 10 in the inspection unit 2. The unloading position P3 is a position where the inspection object 9 after inspection is unloaded from the stage 10. In the present embodiment, the carry-in position P1 is the first position, the inspection position P2 is the second position, and the carry-out position P3 is the third position.
　本実施形態では、搬入位置Ｐ１、中間位置Ｐｍ、および搬出位置Ｐ３が、この順に、直線状に配列されている。また、検査位置Ｐ２は、中間位置Ｐｍに隣接し、かつ、搬入位置Ｐ１、中間位置Ｐｍ、および搬出位置Ｐ３を結ぶ直線から外れた位置に配置されている。また、搬入位置Ｐ１、中間位置Ｐｍ、検査位置Ｐ２、および搬出位置Ｐ３は、同一の水平面内に配置されている。 In this embodiment, the carry-in position P1, the intermediate position Pm, and the carry-out position P3 are linearly arranged in this order. Further, the inspection position P2 is disposed adjacent to the intermediate position Pm and deviated from a straight line connecting the carry-in position P1, the intermediate position Pm, and the carry-out position P3. Further, the carry-in position P1, the intermediate position Pm, the inspection position P2, and the carry-out position P3 are arranged in the same horizontal plane.
　なお、以下では、搬入位置Ｐ１、中間位置Ｐｍ、および搬出位置Ｐ３の配列方向を「第１方向」と称する。また、中間位置Ｐｍおよび検査位置Ｐ２の配列方向を「第２方向」と称する。本実施形態では、第１方向と第２方向とは、互いに直交する。 In the following, the arrangement direction of the carry-in position P1, the intermediate position Pm, and the carry-out position P3 is referred to as a “first direction”. The arrangement direction of the intermediate position Pm and the inspection position P2 is referred to as a “second direction”. In the present embodiment, the first direction and the second direction are orthogonal to each other.
　第１レール２１は、搬入位置Ｐ１から中間位置Ｐｍへ向けて延びるガイドレールである。第１レール２１は、第２方向に配列され、各々が第１方向に延びる一対の第１レール部材２１１を有する。第１レール２１上にステージ１０を配置したときには、ステージ１０の下面に設けられた一対の被案内部１０１が、第１レール部材２１１に対して、第１方向にスライド移動可能に係合される。これにより、ステージ１０は、第１レール２１に沿って、第１方向に案内される。 The first rail 21 is a guide rail extending from the carry-in position P1 toward the intermediate position Pm. The first rail 21 has a pair of first rail members 211 that are arranged in the second direction and each extend in the first direction. When the stage 10 is disposed on the first rail 21, the pair of guided portions 101 provided on the lower surface of the stage 10 are engaged with the first rail member 211 so as to be slidable in the first direction. . Thereby, the stage 10 is guided in the first direction along the first rail 21.
　第２レール２２は、中間位置Ｐｍと検査位置Ｐ２との間で位置を変更することが可能なガイドレールである。図１および図３のように、第２レール２２を中間位置Ｐｍに配置すると、第１レール２１と第３レール２３との間に、第２レール２２が介挿される。第２レール２２は、第２方向に配列され、各々が第１方向に延びる一対の第２レール部材２２１を有する。第２レール２２上にステージ１０を配置したときには、ステージ１０の下面に設けられた一対の被案内部１０１が、第２レール部材２２１に対して、第１方向にスライド移動可能に係合される。これにより、ステージ１０は、第２レール２２に沿って、第１方向に案内される。 The second rail 22 is a guide rail whose position can be changed between the intermediate position Pm and the inspection position P2. As shown in FIGS. 1 and 3, when the second rail 22 is arranged at the intermediate position Pm, the second rail 22 is inserted between the first rail 21 and the third rail 23. The second rail 22 has a pair of second rail members 221 that are arranged in the second direction and each extend in the first direction. When the stage 10 is disposed on the second rail 22, the pair of guided portions 101 provided on the lower surface of the stage 10 are engaged with the second rail member 221 so as to be slidable in the first direction. . Thereby, the stage 10 is guided in the first direction along the second rail 22.
　第３レール２３は、搬出位置Ｐ３から中間位置Ｐｍへ向けて延びるガイドレールである。第３レール２３は、第２方向に配列され、各々が第１方向に延びる一対の第３レール部材２３１を有する。第３レール２３上にステージ１０を配置したときには、ステージ１０の下面に設けられた一対の被案内部１０１が、第３レール部材２３１に対して、第１方向にスライド移動可能に係合される。これにより、ステージ１０は、第３レール２３に沿って、第１方向に案内される。 The third rail 23 is a guide rail extending from the carry-out position P3 toward the intermediate position Pm. The third rail 23 includes a pair of third rail members 231 that are arranged in the second direction and each extend in the first direction. When the stage 10 is disposed on the third rail 23, the pair of guided portions 101 provided on the lower surface of the stage 10 are engaged with the third rail member 231 so as to be slidable in the first direction. . Thereby, the stage 10 is guided in the first direction along the third rail 23.
　予備レール２４は、中間位置Ｐｍと、中間位置Ｐｍの下方に位置する待機位置Ｐｗとの間で、位置を変更することが可能なガイドレールである。予備レール２４は、図２および図４のように、第２レール２２を検査位置Ｐ２に移動させたときに、第２レール２２に代わって、中間位置Ｐｍに配置される。予備レール２４を中間位置Ｐｍに配置すると、第１レール２１と第３レール２３との間に、予備レール２４が介在する。予備レール２４は、第２方向に配列され、各々が第１方向に延びる一対の予備レール部材２４１を有する。予備レール２４上にステージ１０を配置したときには、ステージ１０の下面に設けられた一対の被案内部１０１が、予備レール部材２４１に対して、第１方向にスライド移動可能に係合される。これにより、ステージ１０は、予備レール２４に沿って、第１方向に案内される。 The spare rail 24 is a guide rail whose position can be changed between the intermediate position Pm and the standby position Pw located below the intermediate position Pm. As shown in FIGS. 2 and 4, the spare rail 24 is arranged at the intermediate position Pm instead of the second rail 22 when the second rail 22 is moved to the inspection position P2. When the spare rail 24 is disposed at the intermediate position Pm, the spare rail 24 is interposed between the first rail 21 and the third rail 23. The spare rail 24 has a pair of spare rail members 241 arranged in the second direction, each extending in the first direction. When the stage 10 is disposed on the spare rail 24, the pair of guided portions 101 provided on the lower surface of the stage 10 are engaged with the spare rail member 241 so as to be slidable in the first direction. Thereby, the stage 10 is guided in the first direction along the spare rail 24.
　第１移動機構３１は、搬入位置Ｐ１と中間位置Ｐｍとの間で、ステージ１０を移動させる機構である。第１移動機構３１は、第１レール２１と、中間位置Ｐｍに配置された第２レール２２または予備レール２４とに沿って、ステージ１０を第１方向に移動させる。第２移動機構３２は、検査位置Ｐ２と中間位置Ｐｍとの間で、ステージ１０を移動させる機構である。第２移動機構３２は、第２レール２２上に載置されたステージ１０を第２方向に移動させることによって、ステージ１０とともに第２レール２２を第２方向に移動させる。第３移動機構３３は、搬出位置Ｐ３と中間位置Ｐｍとの間で、ステージ１０を移動させる機構である。第３移動機構３３は、第３レール２３と、中間位置Ｐｍに配置された第２レール２２または予備レール２４とに沿って、ステージ１０を第１方向に移動させる。 The first moving mechanism 31 is a mechanism that moves the stage 10 between the carry-in position P1 and the intermediate position Pm. The first moving mechanism 31 moves the stage 10 in the first direction along the first rail 21 and the second rail 22 or the spare rail 24 arranged at the intermediate position Pm. The second moving mechanism 32 is a mechanism that moves the stage 10 between the inspection position P2 and the intermediate position Pm. The second moving mechanism 32 moves the second rail 22 together with the stage 10 in the second direction by moving the stage 10 placed on the second rail 22 in the second direction. The third moving mechanism 33 is a mechanism that moves the stage 10 between the unloading position P3 and the intermediate position Pm. The third moving mechanism 33 moves the stage 10 in the first direction along the third rail 23 and the second rail 22 or the spare rail 24 arranged at the intermediate position Pm.
　すなわち、第１移動機構３１、第２移動機構３２、および第３移動機構３３は、中間位置Ｐｍと、中間位置Ｐｍに対して互いに異なる向きに配置された搬入位置Ｐ１、検査位置Ｐ２、および搬出位置Ｐ３との間で、それぞれステージ１０を移動させることができる。搬送装置１は、第１移動機構３１、第２移動機構３２、および第３移動機構３３の間でステージ１０を受け渡しながら、ステージ１０を移動させる。 That is, the first moving mechanism 31, the second moving mechanism 32, and the third moving mechanism 33 are the intermediate position Pm, the carry-in position P1, the inspection position P2, and the carry-out position arranged in different directions with respect to the intermediate position Pm. The stage 10 can be moved between the position P3. The transfer device 1 moves the stage 10 while delivering the stage 10 among the first moving mechanism 31, the second moving mechanism 32, and the third moving mechanism 33.
　第１移動機構３１、第２移動機構３２、および第３移動機構３３は、いずれも同等の機構を有する。図５は、当該機構の構造を示した図である。図５に示すように、第１移動機構３１、第２移動機構３２、および第３移動機構３３は、それぞれ、駆動源であるモータ５１と、ボールねじ５２と、ナット部材５３とを有する。 The first moving mechanism 31, the second moving mechanism 32, and the third moving mechanism 33 all have the same mechanism. FIG. 5 shows the structure of the mechanism. As shown in FIG. 5, the first moving mechanism 31, the second moving mechanism 32, and the third moving mechanism 33 each include a motor 51 that is a drive source, a ball screw 52, and a nut member 53.
　ボールねじ５２は、各移動機構におけるステージ１０の移動方向と平行に延び、その一端がモータ５１に接続されている。ナット部材５３は、ボールねじ５２の外周面に設けられた螺旋状のねじ溝と噛み合うように、ボールねじ５２に取り付けられている。モータ５１を駆動させると、ボールねじ５２がその軸心周りに回転する。これにより、ナット部材５３が、ボールねじ５２に沿って移動する。すなわち、モータ５１の回転運動が、ボールねじ５２を介してナット部材５３の直進運動に変換される。 The ball screw 52 extends in parallel with the moving direction of the stage 10 in each moving mechanism, and one end thereof is connected to the motor 51. The nut member 53 is attached to the ball screw 52 so as to mesh with a spiral thread groove provided on the outer peripheral surface of the ball screw 52. When the motor 51 is driven, the ball screw 52 rotates around its axis. As a result, the nut member 53 moves along the ball screw 52. That is, the rotational motion of the motor 51 is converted into the straight motion of the nut member 53 via the ball screw 52.
　また、各移動機構３１～３３は、さらに、一対の固定ピン５４と、ステージ１０に対して固定ピン５４を着脱する着脱機構５５とを有する。一対の固定ピン５４は、ナット部材５３よりも中間位置Ｐｍ側に配列され、各々が上下方向に延びている。一対の固定ピン５４の下部は、共通の支持部材５６に固定されている。 Each moving mechanism 31 to 33 further includes a pair of fixing pins 54 and an attaching / detaching mechanism 55 for attaching / detaching the fixing pins 54 to / from the stage 10. The pair of fixing pins 54 are arranged on the intermediate position Pm side with respect to the nut member 53, and each extend in the vertical direction. Lower portions of the pair of fixing pins 54 are fixed to a common support member 56.
　ここで、本実施形態のステージ１０の構造について、説明する。図６は、ステージ１０の上面図である。図６に示すように、ステージ１０は、矩形状のステージ本体１１と、３つの受け部材１２とを有する。検査対象物９は、ステージ本体１１の上面に載置される。３つの受け部材１２は、ステージ本体１１の搬入位置Ｐ１側の端縁付近、検査位置Ｐ２側の端縁付近、および搬出位置Ｐ３側の端縁付近に、それぞれ固定されている。ステージ本体１１の材料には、例えば、鉄が用いられる。受け部材１２の材料には、例えば、固定ピン５４との接触により損傷が生じにくい銅合金が用いられる。 Here, the structure of the stage 10 of this embodiment will be described. FIG. 6 is a top view of the stage 10. As shown in FIG. 6, the stage 10 includes a rectangular stage main body 11 and three receiving members 12. The inspection object 9 is placed on the upper surface of the stage main body 11. The three receiving members 12 are respectively fixed near the edge of the stage body 11 on the loading position P1 side, near the edge on the inspection position P2 side, and near the edge on the unloading position P3 side. For example, iron is used as the material of the stage body 11. As the material of the receiving member 12, for example, a copper alloy that is hardly damaged by contact with the fixing pin 54 is used.
　図７は、受け部材１２の付近におけるステージ１０の部分縦断面図である。図６および図７に示すように、各受け部材１２には、一対の貫通孔１３が設けられている。一対の貫通孔１３は、ステージ１０の端縁に沿って配列され、各々が受け部材１２を上下方向に貫通する。貫通孔１３への固定ピン５４の挿入を円滑に行うために、各貫通孔１３の下部には、下方へ向かうにつれて拡径するテーパ面１３１が設けられている。また、本実施形態では、ステージ本体１１とは別の部材である受け部材１２に、貫通孔１３が設けられている。このため、固定ピン５４の挿入によるステージ本体１１の損傷が抑制される。 FIG. 7 is a partial longitudinal sectional view of the stage 10 in the vicinity of the receiving member 12. As shown in FIGS. 6 and 7, each receiving member 12 is provided with a pair of through holes 13. The pair of through holes 13 are arranged along the edge of the stage 10, and each penetrates the receiving member 12 in the vertical direction. In order to smoothly insert the fixing pin 54 into the through hole 13, a tapered surface 131 whose diameter increases toward the lower side is provided at the lower part of each through hole 13. In the present embodiment, the through hole 13 is provided in the receiving member 12 which is a member different from the stage main body 11. For this reason, damage to the stage main body 11 due to insertion of the fixing pin 54 is suppressed.
　図５に戻る。着脱機構５５は、ステージ１０の貫通孔１３に対して、一対の固定ピン５４を着脱するための機構である。図５に示すように、着脱機構５５は、エアシリンダ６１、変換機構６２、およびコイルばね６３を有する。エアシリンダ６１は、第１方向に沿って水平に配置されている。エアシリンダ６１は、シリンダ本体６１１とロッド６１２とを有する。ロッド６１２は、シリンダ本体６１１に供給される空気圧によって第１方向に進退する。 Return to FIG. The attachment / detachment mechanism 55 is a mechanism for attaching / detaching the pair of fixing pins 54 to / from the through hole 13 of the stage 10. As shown in FIG. 5, the attachment / detachment mechanism 55 includes an air cylinder 61, a conversion mechanism 62, and a coil spring 63. The air cylinder 61 is disposed horizontally along the first direction. The air cylinder 61 has a cylinder body 611 and a rod 612. The rod 612 moves forward and backward in the first direction by the air pressure supplied to the cylinder body 611.
　変換機構６２は、ロッド６１２の水平移動を、固定ピン５４の昇降移動に変換する機構である。本実施形態の変換機構６２は、Ｌ字部材６２０を有する。Ｌ字部材６２０は、ナット部材５３の移動方向に対して垂直かつ水平な回転軸６２９を中心として回転する板状の部材である。Ｌ字部材６２０は、回転軸６２９の周りにおいて略９０°離れた２つのアーム６２１，６２２を有する。一方のアーム６２１は、エアシリンダ６１のロッド６１２の先端に接続されている。他方のアーム６２２は、支持部材５６に接続されている。Ｌ字部材６２０は、回転軸６２９を中心として回転することで、ロッド６１２の第１方向の水平移動を、支持部材５６および一対の固定ピン５４の昇降移動に変換する。 The conversion mechanism 62 is a mechanism that converts the horizontal movement of the rod 612 into the vertical movement of the fixed pin 54. The conversion mechanism 62 of this embodiment has an L-shaped member 620. The L-shaped member 620 is a plate-like member that rotates about a rotation shaft 629 that is perpendicular and horizontal to the moving direction of the nut member 53. The L-shaped member 620 includes two arms 621 and 622 that are separated by approximately 90 ° around the rotation axis 629. One arm 621 is connected to the tip of the rod 612 of the air cylinder 61. The other arm 622 is connected to the support member 56. The L-shaped member 620 converts the horizontal movement of the rod 612 in the first direction into the up-and-down movement of the support member 56 and the pair of fixing pins 54 by rotating about the rotation shaft 629.
　コイルばね６３は、固定ピン５４を、ステージ１０の貫通孔１３へ向かう方向に付勢するための弾性部材である。コイルばね６３は、エアシリンダ６１のシリンダ本体６１１とロッド６１２の先端との間に、自然長よりも圧縮された状態で介挿されている。エアシリンダ６１のシリンダ本体６１１に空気圧が供給されていない状態では、コイルばね６３の反発力によって、ロッド６１２は中間位置側へ突出した状態となる。そうすると。Ｌ字部材６２０を介して、支持部材５６および一対の固定ピン５４が上昇する。 The coil spring 63 is an elastic member for biasing the fixing pin 54 in the direction toward the through hole 13 of the stage 10. The coil spring 63 is inserted between the cylinder body 611 of the air cylinder 61 and the tip of the rod 612 in a state compressed more than the natural length. In a state where no air pressure is supplied to the cylinder body 611 of the air cylinder 61, the rod 612 protrudes toward the intermediate position side due to the repulsive force of the coil spring 63. Then. The support member 56 and the pair of fixing pins 54 rise through the L-shaped member 620.
　上昇した一対の固定ピン５４は、ステージ１０の貫通孔１３に、それぞれ挿入される。これにより、ナット部材５３とステージ１０とが、第１方向に相対移動不能に固定される。すなわち、本実施形態では、一対の固定ピン５４が、ステージ１０に固定される固定部となる。一対の固定ピン５４が貫通孔１３に挿入された状態で、モータ５１を駆動させると、ナット部材５３とともにステージ１０が、ボールねじ５２と平行に移動する。 The raised pair of fixing pins 54 are respectively inserted into the through holes 13 of the stage 10. Thereby, the nut member 53 and the stage 10 are fixed so as not to be relatively movable in the first direction. That is, in the present embodiment, the pair of fixing pins 54 is a fixing portion that is fixed to the stage 10. When the motor 51 is driven in a state where the pair of fixing pins 54 are inserted into the through holes 13, the stage 10 moves in parallel with the ball screw 52 together with the nut member 53.
　一方、エアシリンダ６１のシリンダ本体６１１に空気圧を供給すると、ロッド６１２は、コイルばね６３の反発力に抗して、シリンダ本体６１１側へ移動する。そうすると、Ｌ字部材６２０を介して、支持部材５６および一対の固定ピン５４が下降する。これにより、ステージ１０の貫通孔１３から、一対の固定ピン５４が引き抜かれる。その結果、ナット部材５３に対するステージ１０の固定が解除される。 On the other hand, when air pressure is supplied to the cylinder body 611 of the air cylinder 61, the rod 612 moves toward the cylinder body 611 against the repulsive force of the coil spring 63. Then, the support member 56 and the pair of fixing pins 54 are lowered via the L-shaped member 620. Thereby, the pair of fixing pins 54 are pulled out from the through hole 13 of the stage 10. As a result, the fixing of the stage 10 to the nut member 53 is released.
　後述する搬送制御部４０は、常時、第１移動機構３１、第２移動機構３２、および第３移動機構３３のうちの少なくとも１つの移動機構の固定ピン５４が、ステージ１０の貫通孔１３に挿入されるように、着脱機構５５を制御する。ステージ１０は、常に、第１移動機構３１、第２移動機構３２、および第３移動機構３３のうちの少なくとも１つの移動機構によって保持される。これにより、ステージ１０が意図しない方向へ移動することが、防止されている。 In the transfer control unit 40 described later, the fixed pin 54 of at least one of the first moving mechanism 31, the second moving mechanism 32, and the third moving mechanism 33 is always inserted into the through hole 13 of the stage 10. Thus, the attachment / detachment mechanism 55 is controlled. The stage 10 is always held by at least one moving mechanism among the first moving mechanism 31, the second moving mechanism 32, and the third moving mechanism 33. This prevents the stage 10 from moving in an unintended direction.
　また、本実施形態では、停電等でエアシリンダ６１への電力供給が停止した場合には、コイルばね６３の反発力によって、ロッド６１２が中間位置側へ突出し、固定ピン５４が上昇状態となる。したがって、固定ピン５４は、貫通孔１３に挿入された状態に維持される。したがって、停電時に、貫通孔１３から固定ピン５４が外れてステージ１０の位置がずれることを防止できる。 Further, in this embodiment, when the power supply to the air cylinder 61 is stopped due to a power failure or the like, the rod 612 protrudes to the intermediate position side due to the repulsive force of the coil spring 63, and the fixing pin 54 is raised. Therefore, the fixing pin 54 is maintained in the state inserted in the through hole 13. Therefore, it is possible to prevent the fixing pin 54 from being removed from the through hole 13 and shifting the position of the stage 10 during a power failure.
　図３および図４に戻る。第４移動機構３４は、中間位置Ｐｍと待機位置Ｐｗとの間で、予備レール２４を昇降移動させる機構である。第４移動機構３４は、予備レール２４の下方に鉛直に配置されたエアシリンダ７０を有する。エアシリンダ７０は、シリンダ本体７１とロッド７２とを有する。予備レール２４は、ロッド７２の上端部に固定される。ロッド７２は、シリンダ本体７１に供給される空気圧によって上下方向に進退する。これにより、予備レール２４を上下に昇降移動させることができる。 Return to FIG. 3 and FIG. The fourth moving mechanism 34 is a mechanism that moves the auxiliary rail 24 up and down between the intermediate position Pm and the standby position Pw. The fourth moving mechanism 34 has an air cylinder 70 disposed vertically below the spare rail 24. The air cylinder 70 has a cylinder body 71 and a rod 72. The spare rail 24 is fixed to the upper end portion of the rod 72. The rod 72 is advanced and retracted in the vertical direction by the air pressure supplied to the cylinder body 71. Thereby, the reserve rail 24 can be moved up and down.
　本実施形態では、第２レール２２上に配置されたステージ１０を、中間位置Ｐｍから検査位置Ｐ２へ、第２レール２２ごと移動させることができる。そして、第２レール２２の代わりに、中間位置Ｐｍに予備レール２４を配置することができる。したがって、１つのステージ１０を検査位置Ｐ２に配置しつつ、搬入位置Ｐ１と搬出位置Ｐ３との間で他のステージ１０を移動させることができる。 In the present embodiment, the stage 10 disposed on the second rail 22 can be moved together with the second rail 22 from the intermediate position Pm to the inspection position P2. In place of the second rail 22, the spare rail 24 can be arranged at the intermediate position Pm. Therefore, the other stage 10 can be moved between the carry-in position P1 and the carry-out position P3 while arranging one stage 10 at the inspection position P2.
　搬送制御部４０は、搬送装置１内の各部を動作制御するための手段である。図１および図２中に概念的に示したように、搬送制御部４０は、ＣＰＵ等の演算処理部４１、ＲＡＭ等のメモリ４２、およびハードディスクドライブ等の記憶部４３を有するコンピュータにより構成される。記憶部４３内には、検査対象物９の搬送処理を実行するためのコンピュータプログラム４４が、インストールされている。 The conveyance control unit 40 is a means for controlling the operation of each unit in the conveyance device 1. As conceptually shown in FIGS. 1 and 2, the conveyance control unit 40 is configured by a computer having an arithmetic processing unit 41 such as a CPU, a memory 42 such as a RAM, and a storage unit 43 such as a hard disk drive. . In the storage unit 43, a computer program 44 for executing the conveyance process of the inspection object 9 is installed.
　図８は、搬送制御部４０と、搬送装置１内の各部との接続構成を示したブロック図である。図８に示すように、搬送制御部４０は、上述した第１移動機構３１のモータ５１、第１移動機構３１のエアシリンダ６１、第２移動機構３２のモータ５１、第２移動機構３２のエアシリンダ６１、第３移動機構３３のモータ５１、第３移動機構３３のエアシリンダ６１、および第４移動機構３４のエアシリンダ７０と、それぞれ通信可能に接続されている。搬送制御部４０は、記憶部４３に記憶されたコンピュータプログラム４４をメモリ４２に一時的に読み出し、当該コンピュータプログラム４４に基づいて、演算処理部４１が演算処理を行うことにより、上記の各部を動作制御する。これにより、複数の検査対象物９の搬送が、順次に進行する。 FIG. 8 is a block diagram illustrating a connection configuration between the transport control unit 40 and each unit in the transport apparatus 1. As illustrated in FIG. 8, the conveyance control unit 40 includes the motor 51 of the first movement mechanism 31, the air cylinder 61 of the first movement mechanism 31, the motor 51 of the second movement mechanism 32, and the air of the second movement mechanism 32. The cylinder 61, the motor 51 of the third moving mechanism 33, the air cylinder 61 of the third moving mechanism 33, and the air cylinder 70 of the fourth moving mechanism 34 are connected to be communicable. The transport control unit 40 temporarily reads the computer program 44 stored in the storage unit 43 into the memory 42, and the arithmetic processing unit 41 performs arithmetic processing based on the computer program 44, thereby operating each of the above units. Control. Thereby, conveyance of a plurality of inspection objects 9 progresses sequentially.
　検査部２は、検査位置Ｐ２に配置されたステージ１０上の検査対象物９を検査するための処理部である。図１および図２に示すように、検査部２は、複数のカメラ２０１と、複数の光照射部２０２と、画像処理部２０３とを有する。複数のカメラ２０１は、検査対象物９の検査すべき箇所に、それぞれ向けられている。カメラ２０１には、例えば、ＣＣＤまたはＣＭＯＳ等の受光素子を有し、多階調のデジタル画像を取得可能なカメラが用いられる。光照射部２０２には、例えば、ＬＥＤ（発光ダイオード）が用いられる。 The inspection unit 2 is a processing unit for inspecting the inspection object 9 on the stage 10 arranged at the inspection position P2. As shown in FIGS. 1 and 2, the inspection unit 2 includes a plurality of cameras 201, a plurality of light irradiation units 202, and an image processing unit 203. The plurality of cameras 201 are respectively directed to the portions of the inspection object 9 to be inspected. As the camera 201, for example, a camera having a light receiving element such as a CCD or a CMOS and capable of acquiring a multi-gradation digital image is used. For the light irradiation unit 202, for example, an LED (light emitting diode) is used.
　検査部２は、光照射部２０２を発光させつつ、カメラ２０１による撮影を行うことにより、検査対象物９の検査すべき箇所の画像を取得する。取得された画像は、画像処理部２０３へ入力される。画像処理部２０３は、取得された画像と、正常な検査対象物９の画像とを比較する。そして、その比較結果に基づいて、各検査対象物９の状態に、欠陥がないかどうかを判断する。 The inspection unit 2 obtains an image of a portion to be inspected of the inspection object 9 by photographing with the camera 201 while causing the light irradiation unit 202 to emit light. The acquired image is input to the image processing unit 203. The image processing unit 203 compares the acquired image with the image of the normal inspection object 9. Then, based on the comparison result, it is determined whether or not the state of each inspection object 9 is free from defects.
　なお、画像処理部２０３には、例えば、ＣＰＵ等の演算処理部、ＲＡＭ等のメモリ、およびハードディスクドライブ等の記憶部を有するコンピュータが用いられる。搬送制御部４０と画像処理部２０３とは、同一のコンピュータにより実現されていてもよい。 For the image processing unit 203, for example, a computer having an arithmetic processing unit such as a CPU, a memory such as a RAM, and a storage unit such as a hard disk drive is used. The conveyance control unit 40 and the image processing unit 203 may be realized by the same computer.
　＜２．検査装置の動作について＞
　続いて、上述した検査装置１００における検査対象物９の搬送および検査の流れについて、説明する。図９および図１０は、検査装置１００における検査対象物９の搬送および検査の流れを示したフローチャートである。図１１～図２７は、各時点におけるステージ１０の位置を示した図である。以下の動作におけるステージ１０の動きは、搬送制御部４０が、第１移動機構３１、第２移動機構３２、第３移動機構３３、および第４移動機構３４を動作制御することによって実現される。 <2. About operation of inspection equipment>
Subsequently, the conveyance of the inspection object 9 and the inspection flow in the inspection apparatus 100 described above will be described. FIGS. 9 and 10 are flowcharts showing the flow of the inspection object 9 in the inspection apparatus 100 and the flow of inspection. 11 to 27 are views showing the position of the stage 10 at each time point. The movement of the stage 10 in the following operations is realized by the conveyance control unit 40 controlling the operations of the first moving mechanism 31, the second moving mechanism 32, the third moving mechanism 33, and the fourth moving mechanism 34.
　この検査装置１００では、最初の検査対象物９を搬入する前に、まず、第２レール２２を中間位置Ｐｍに配置し、予備レール２４を待機位置Ｐｗに配置する。また、２つのステージ１０のうちの一方（以下、「第１ステージ１０ａ」と称する）を、第１レール２１上の搬入位置Ｐ１に配置する。そして、２つのステージ１０のうちの他方（以下、「第２ステージ１０ｂ」と称する）を、第３レール２３上の搬出位置Ｐ３に配置する。 In this inspection apparatus 100, before the first inspection object 9 is carried in, first, the second rail 22 is disposed at the intermediate position Pm, and the spare rail 24 is disposed at the standby position Pw. In addition, one of the two stages 10 (hereinafter referred to as “first stage 10 a”) is disposed at the loading position P <b> 1 on the first rail 21. The other of the two stages 10 (hereinafter referred to as “second stage 10 b”) is disposed at the carry-out position P 3 on the third rail 23.
　検査装置１００のオペレータは、まず、搬入位置Ｐ１に配置された第１ステージ１０ａの上面に、検査対象物９を搬入する（ステップＳ１，図１１の状態）。なお、検査対象物９の搬入作業は、図示しないフィーダによって、自動的に行われてもよい。搬入された検査対象物９は、第１ステージ１０ａの上面に、予め定められた向きで載置される。 First, the operator of the inspection apparatus 100 carries the inspection object 9 onto the upper surface of the first stage 10a arranged at the carry-in position P1 (step S1, state of FIG. 11). In addition, the carrying-in operation | work of the test target object 9 may be automatically performed by the feeder which is not shown in figure. The inspection object 9 carried in is placed on the upper surface of the first stage 10a in a predetermined direction.
　次に、第１移動機構３１は、第１ステージ１０ａを、搬入位置Ｐ１から中間位置Ｐｍへ移動させる（ステップＳ２，図１２の状態）。これにより、第１ステージ１０ａ上の検査対象物９も、搬入位置Ｐ１から中間位置Ｐｍへ移動する。 Next, the first moving mechanism 31 moves the first stage 10a from the carry-in position P1 to the intermediate position Pm (step S2, state of FIG. 12). As a result, the inspection object 9 on the first stage 10a also moves from the carry-in position P1 to the intermediate position Pm.
　続いて、第１移動機構３１から第２移動機構３２への、第１ステージ１０ａの受け渡しが行われる（ステップＳ３）。具体的には、まず、第２移動機構３２が、第１ステージ１０ａの検査位置Ｐ２側の端辺に設けられた一対の貫通孔１３に、一対の固定ピン５４を挿入する。これにより、第１ステージ１０ａが第２移動機構３２に保持される。次に、第１移動機構３１が、第１ステージ１０ａの搬入位置Ｐ１側の端辺に設けられた一対の貫通孔１３から、一対の固定ピン５４を引き抜く。これにより、第１ステージ１０ａから第１移動機構３１が切り離される。 Subsequently, the first stage 10a is transferred from the first moving mechanism 31 to the second moving mechanism 32 (step S3). Specifically, first, the second moving mechanism 32 inserts a pair of fixing pins 54 into the pair of through holes 13 provided on the end side on the inspection position P2 side of the first stage 10a. As a result, the first stage 10 a is held by the second moving mechanism 32. Next, the 1st moving mechanism 31 pulls out a pair of fixing pin 54 from a pair of through-hole 13 provided in the edge by the side of the carrying-in position P1 of the 1st stage 10a. Thereby, the 1st moving mechanism 31 is cut off from the 1st stage 10a.
　その後、第２移動機構３２は、第１ステージ１０ａを、中間位置Ｐｍから検査位置Ｐ２へ移動させる（ステップＳ４，図１３の状態）。これにより、第１ステージ１０ａ上の検査対象物９も、中間位置Ｐｍから検査位置Ｐ２へ移動する。 Thereafter, the second moving mechanism 32 moves the first stage 10a from the intermediate position Pm to the inspection position P2 (step S4, state of FIG. 13). As a result, the inspection object 9 on the first stage 10a also moves from the intermediate position Pm to the inspection position P2.
　検査対象物９を載置した第１ステージ１０ａが、検査位置Ｐ２に配置されると、検査部２は、第１ステージ１０ａ上の検査対象物９を検査する（ステップＳ５）。具体的には、複数の光照射部２０２を発光させつつ、複数のカメラ２０１による撮影を行う。これにより、検査対象物９の検査すべき箇所の画像が取得される。画像処理部２０３は、取得された画像に基づいて、検査対象物９の検査すべき箇所が、それぞれ正常であるか否かを判断する。 When the first stage 10a on which the inspection object 9 is placed is placed at the inspection position P2, the inspection unit 2 inspects the inspection object 9 on the first stage 10a (step S5). Specifically, photographing by the plurality of cameras 201 is performed while causing the plurality of light irradiation units 202 to emit light. Thereby, the image of the location to be inspected of the inspection object 9 is acquired. Based on the acquired image, the image processing unit 203 determines whether or not the portions to be inspected of the inspection target 9 are normal.
　一方、ステップＳ４の後、第４移動機構３４は、予備レール２４を、待機位置Ｐｗから中間位置Ｐｍへ上昇させる（ステップＳ６）。これにより、第１レール２１と第３レール２３との間に、第２レール２２に代わって、予備レール２４が配置される。この搬送装置１では、ステップＳ４における第２レール２２の移動と、ステップＳ６における予備レール２４の移動とが、連動して実行される。 On the other hand, after step S4, the fourth moving mechanism 34 raises the spare rail 24 from the standby position Pw to the intermediate position Pm (step S6). As a result, the spare rail 24 is disposed between the first rail 21 and the third rail 23 instead of the second rail 22. In the transport device 1, the movement of the second rail 22 in step S4 and the movement of the spare rail 24 in step S6 are executed in conjunction with each other.
　予備レール２４が中間位置Ｐｍに配置されると、第３移動機構３３は、第２ステージ１０ｂを、搬出位置Ｐ３から中間位置Ｐｍへ移動させる（ステップＳ７，図１４の状態）。 When the spare rail 24 is arranged at the intermediate position Pm, the third moving mechanism 33 moves the second stage 10b from the carry-out position P3 to the intermediate position Pm (step S7, state of FIG. 14).
　続いて、第３移動機構３３から第１移動機構３１への、第２ステージ１０ｂの受け渡しが行われる（ステップＳ８）。具体的には、まず、第１移動機構３１が、第２ステージ１０ｂの搬入位置Ｐ１側の端辺に設けられた一対の貫通孔１３に、一対の固定ピン５４を挿入する。これにより、第２ステージ１０ｂが第１移動機構３１に保持される。次に、第３移動機構３３が、第２ステージ１０ｂの搬出位置Ｐ３側の端辺に設けられた一対の貫通孔１３から、一対の固定ピン５４を引き抜く。これにより、第２ステージ１０ｂから第３移動機構３３が切り離される。 Subsequently, the second stage 10b is transferred from the third moving mechanism 33 to the first moving mechanism 31 (step S8). Specifically, first, the first moving mechanism 31 inserts the pair of fixing pins 54 into the pair of through holes 13 provided on the end side of the second stage 10b on the loading position P1 side. As a result, the second stage 10 b is held by the first moving mechanism 31. Next, the third moving mechanism 33 pulls out the pair of fixing pins 54 from the pair of through holes 13 provided on the end side of the second stage 10b on the carry-out position P3 side. As a result, the third moving mechanism 33 is disconnected from the second stage 10b.
　その後、第１移動機構３１は、第２ステージ１０ｂを、中間位置Ｐｍから搬入位置Ｐ１へ移動させる（ステップＳ９，図１５の状態）。第２ステージ１０ｂが搬入位置Ｐ１に配置されると、第４移動機構３４は、予備レール２４を、中間位置Ｐｍから再び待機位置Ｐｗへ下降させる（ステップＳ１０）。また、検査装置１００のオペレータは、搬入位置Ｐ１に配置された第２ステージ１０ｂの上面に、次の検査対象物９を搬入する（ステップＳ１１，図１６の状態）。 Thereafter, the first moving mechanism 31 moves the second stage 10b from the intermediate position Pm to the carry-in position P1 (step S9, state of FIG. 15). When the second stage 10b is disposed at the carry-in position P1, the fourth moving mechanism 34 lowers the spare rail 24 from the intermediate position Pm to the standby position Pw again (step S10). The operator of the inspection apparatus 100 carries the next inspection object 9 on the upper surface of the second stage 10b arranged at the carry-in position P1 (step S11, state of FIG. 16).
　検査部２による検査が終了すると、第２移動機構３２は、第１ステージ１０ａを、検査位置Ｐ２から中間位置Ｐｍへ移動させる（ステップＳ１２，図１７の状態）。これにより、第１ステージ１０ａ上の検査対象物９も、検査位置Ｐ２から中間位置Ｐｍへ移動する。 When the inspection by the inspection unit 2 is completed, the second moving mechanism 32 moves the first stage 10a from the inspection position P2 to the intermediate position Pm (step S12, state of FIG. 17). As a result, the inspection object 9 on the first stage 10a also moves from the inspection position P2 to the intermediate position Pm.
　続いて、第２移動機構３２から第３移動機構３３への、第１ステージ１０ａの受け渡しが行われる（ステップＳ１３）。具体的には、まず、第３移動機構３３が、第１ステージ１０ａの搬出位置Ｐ３側の端辺に設けられた一対の貫通孔１３に、一対の固定ピン５４を挿入する。これにより、第１ステージ１０ａが第３移動機構３３に保持される。次に、第２移動機構３２が、第１ステージ１０ａの検査位置Ｐ２側の端辺に設けられた一対の貫通孔１３から、一対の固定ピン５４を引き抜く。これにより、第１ステージ１０ａから第２移動機構３２が切り離される。 Subsequently, the first stage 10a is transferred from the second moving mechanism 32 to the third moving mechanism 33 (step S13). Specifically, first, the third moving mechanism 33 inserts the pair of fixing pins 54 into the pair of through holes 13 provided on the end side on the unloading position P3 side of the first stage 10a. As a result, the first stage 10 a is held by the third moving mechanism 33. Next, the second moving mechanism 32 pulls out the pair of fixing pins 54 from the pair of through holes 13 provided on the end side on the inspection position P2 side of the first stage 10a. As a result, the second moving mechanism 32 is disconnected from the first stage 10a.
　その後、第３移動機構３３は、第１ステージ１０ａを、中間位置Ｐｍから搬出位置Ｐ３へ移動させる（ステップＳ１４，図１８の状態）。これにより、第１ステージ１０ａ上の検査対象物９も、中間位置Ｐｍから搬出位置Ｐ３へ移動する。検査装置１００のオペレータは、搬出位置Ｐ３に配置された第１ステージ１０ａの上面から、検査後の検査対象物９を搬出する（ステップＳ１５，図１９の状態）。 Thereafter, the third moving mechanism 33 moves the first stage 10a from the intermediate position Pm to the carry-out position P3 (step S14, state of FIG. 18). As a result, the inspection object 9 on the first stage 10a also moves from the intermediate position Pm to the carry-out position P3. The operator of the inspection apparatus 100 unloads the inspection object 9 after inspection from the upper surface of the first stage 10a arranged at the unloading position P3 (step S15, state of FIG. 19).
　次に、第１移動機構３１は、第２ステージ１０ｂを、搬入位置Ｐ１から中間位置Ｐｍへ移動させる（ステップＳ１６，図２０の状態）。これにより、第２ステージ１０ｂ上の検査対象物９も、搬入位置Ｐ１から中間位置Ｐｍへ移動する。 Next, the first moving mechanism 31 moves the second stage 10b from the carry-in position P1 to the intermediate position Pm (step S16, state of FIG. 20). Thereby, the inspection object 9 on the second stage 10b also moves from the carry-in position P1 to the intermediate position Pm.
　続いて、第１移動機構３１から第２移動機構３２への、第２ステージ１０ｂの受け渡しが行われる（ステップＳ１７）。具体的には、まず、第２移動機構３２が、第２ステージ１０ｂの検査位置Ｐ２側の端辺に設けられた一対の貫通孔１３に、一対の固定ピン５４を挿入する。これにより、第２ステージ１０ｂが第２移動機構３２に保持される。次に、第１移動機構３１が、第２ステージ１０ｂの搬入位置Ｐ１側の端辺に設けられた一対の貫通孔１３から、一対の固定ピン５４を引き抜く。これにより、第２ステージ１０ｂから第１移動機構３１が切り離される。 Subsequently, the second stage 10b is transferred from the first moving mechanism 31 to the second moving mechanism 32 (step S17). Specifically, first, the second moving mechanism 32 inserts the pair of fixing pins 54 into the pair of through holes 13 provided on the end side on the inspection position P2 side of the second stage 10b. As a result, the second stage 10 b is held by the second moving mechanism 32. Next, the 1st moving mechanism 31 pulls out a pair of fixing pin 54 from a pair of through-hole 13 provided in the edge by the side of the carrying-in position P1 of the 2nd stage 10b. As a result, the first moving mechanism 31 is separated from the second stage 10b.
　その後、第２移動機構３２は、第２ステージ１０ｂを、中間位置Ｐｍから検査位置Ｐ２へ移動させる（ステップＳ１８，図２１の状態）。これにより、第２ステージ１０ｂ上の検査対象物９も、中間位置Ｐｍから検査位置Ｐ２へ移動する。 Thereafter, the second moving mechanism 32 moves the second stage 10b from the intermediate position Pm to the inspection position P2 (step S18, state of FIG. 21). As a result, the inspection object 9 on the second stage 10b also moves from the intermediate position Pm to the inspection position P2.
　検査対象物９を載置した第２ステージ１０ｂが、検査位置Ｐ２に配置されると、検査部２は、第２ステージ１０ｂ上の検査対象物９を検査する（ステップＳ１９）。具体的には、複数の光照射部２０２を発光させつつ、複数のカメラ２０１による撮影を行う。これにより、検査対象物９の検査すべき箇所の画像が取得される。画像処理部２０３は、取得された画像に基づいて、検査対象物９の検査すべき箇所が、それぞれ正常であるか否かを判断する。 When the second stage 10b on which the inspection object 9 is placed is arranged at the inspection position P2, the inspection unit 2 inspects the inspection object 9 on the second stage 10b (step S19). Specifically, photographing by the plurality of cameras 201 is performed while causing the plurality of light irradiation units 202 to emit light. Thereby, the image of the location to be inspected of the inspection object 9 is acquired. Based on the acquired image, the image processing unit 203 determines whether or not the portions to be inspected of the inspection target 9 are normal.
　一方、ステップＳ１８の後、第４移動機構３４は、予備レール２４を、待機位置Ｐｗから中間位置Ｐｍへ上昇させる（ステップＳ２０）。これにより、第１レール２１と第３レール２３との間に、第２レール２２に代わって、予備レール２４が配置される。この搬送装置１では、ステップＳ１８における第２レール２２の移動と、ステップＳ２０における予備レール２４の移動とが、連動して実行される。 On the other hand, after step S18, the fourth moving mechanism 34 raises the spare rail 24 from the standby position Pw to the intermediate position Pm (step S20). As a result, the spare rail 24 is disposed between the first rail 21 and the third rail 23 instead of the second rail 22. In the transport device 1, the movement of the second rail 22 in step S18 and the movement of the spare rail 24 in step S20 are executed in conjunction with each other.
　予備レール２４が中間位置Ｐｍに配置されると、第３移動機構３３は、第１ステージ１０ａを、搬出位置Ｐ３から中間位置Ｐｍへ移動させる（ステップＳ２１，図２２の状態）。 When the spare rail 24 is arranged at the intermediate position Pm, the third moving mechanism 33 moves the first stage 10a from the carry-out position P3 to the intermediate position Pm (step S21, state of FIG. 22).
　続いて、第３移動機構３３から第１移動機構３１への、第１ステージ１０ａの受け渡しが行われる（ステップＳ２２）。具体的には、まず、第１移動機構３１が、第１ステージ１０ａの搬入位置Ｐ１側の端辺に設けられた一対の貫通孔１３に、一対の固定ピン５４を挿入する。これにより、第１ステージ１０ａが第１移動機構３１に保持される。次に、第３移動機構３３が、第１ステージ１０ａの搬出位置Ｐ３側の端辺に設けられた一対の貫通孔１３から、一対の固定ピン５４を引き抜く。これにより、第１ステージ１０ａから第３移動機構３３が切り離される。 Subsequently, the first stage 10a is transferred from the third moving mechanism 33 to the first moving mechanism 31 (step S22). Specifically, first, the first moving mechanism 31 inserts the pair of fixing pins 54 into the pair of through holes 13 provided on the end side of the first stage 10a on the loading position P1 side. As a result, the first stage 10 a is held by the first moving mechanism 31. Next, the third moving mechanism 33 pulls out the pair of fixing pins 54 from the pair of through holes 13 provided on the end side on the unloading position P3 side of the first stage 10a. As a result, the third moving mechanism 33 is disconnected from the first stage 10a.
　その後、第１移動機構３１は、第１ステージ１０ａを、中間位置Ｐｍから搬入位置Ｐ１へ移動させる（ステップＳ２３，図２３の状態）。第１ステージ１０ａが搬入位置Ｐ１に配置されると、第４移動機構３４は、予備レール２４を、中間位置Ｐｍから再び待機位置Ｐｗへ下降させる（ステップＳ２４）。また、検査装置１００のオペレータは、搬入位置Ｐ１に配置された第１ステージ１０ａの上面に、次の検査対象物９を搬入する（ステップＳ２５，図２４の状態）。 Thereafter, the first moving mechanism 31 moves the first stage 10a from the intermediate position Pm to the carry-in position P1 (step S23, state of FIG. 23). When the first stage 10a is disposed at the carry-in position P1, the fourth moving mechanism 34 lowers the spare rail 24 from the intermediate position Pm to the standby position Pw again (step S24). Further, the operator of the inspection apparatus 100 carries the next inspection object 9 onto the upper surface of the first stage 10a arranged at the carry-in position P1 (step S25, state of FIG. 24).
　検査部２による検査が終了すると、第２移動機構３２は、第２ステージ１０ｂを、検査位置Ｐ２から中間位置Ｐｍへ移動させる（ステップＳ２６，図２５の状態）。これにより、第２ステージ１０ｂ上の検査対象物９も、検査位置Ｐ２から中間位置Ｐｍへ移動する。 When the inspection by the inspection unit 2 is completed, the second moving mechanism 32 moves the second stage 10b from the inspection position P2 to the intermediate position Pm (step S26, state of FIG. 25). As a result, the inspection object 9 on the second stage 10b also moves from the inspection position P2 to the intermediate position Pm.
　続いて、第２移動機構３２から第３移動機構３３への、第２ステージ１０ｂの受け渡しが行われる（ステップＳ２７）。具体的には、まず、第３移動機構３３が、第２ステージ１０ｂの搬出位置Ｐ３側の端辺に設けられた一対の貫通孔１３に、一対の固定ピン５４を挿入する。これにより、第２ステージ１０ｂが第３移動機構３３に保持される。次に、第２移動機構３２が、第２ステージ１０ｂの検査位置Ｐ２側の端辺に設けられた一対の貫通孔１３から、一対の固定ピン５４を引き抜く。これにより、第２ステージ１０ｂから第２移動機構３２が切り離される。 Subsequently, the second stage 10b is transferred from the second moving mechanism 32 to the third moving mechanism 33 (step S27). Specifically, first, the third moving mechanism 33 inserts the pair of fixing pins 54 into the pair of through holes 13 provided on the end side on the unloading position P3 side of the second stage 10b. As a result, the second stage 10 b is held by the third moving mechanism 33. Next, the second moving mechanism 32 pulls out the pair of fixing pins 54 from the pair of through holes 13 provided on the end side on the inspection position P2 side of the second stage 10b. As a result, the second moving mechanism 32 is disconnected from the second stage 10b.
　その後、第３移動機構３３は、第２ステージ１０ｂを、中間位置Ｐｍから搬出位置Ｐ３へ移動させる（ステップＳ２８，図２６の状態）。これにより、第２ステージ１０ｂ上の検査対象物９も、中間位置Ｐｍから搬出位置Ｐ３へ移動する。検査装置１００のオペレータは、搬出位置Ｐ３に配置された第２ステージ１０ｂの上面から、検査後の検査対象物９を搬出する（ステップＳ２９，図２７の状態）。 Thereafter, the third moving mechanism 33 moves the second stage 10b from the intermediate position Pm to the carry-out position P3 (step S28, state of FIG. 26). As a result, the inspection object 9 on the second stage 10b also moves from the intermediate position Pm to the carry-out position P3. The operator of the inspection apparatus 100 unloads the inspection object 9 after inspection from the upper surface of the second stage 10b arranged at the unloading position P3 (step S29, state of FIG. 27).
　その後、ステップＳ２に戻り、検査装置１００は、ステップＳ２～Ｓ２９の処理を繰り返す。 Thereafter, the process returns to step S2, and the inspection apparatus 100 repeats the processes of steps S2 to S29.
　以上のように、この搬送装置１では、１つのステージ１０を検査位置Ｐ２に配置しつつ、他のステージ１０を、搬出位置Ｐ３から中間位置Ｐｍを経て搬入位置Ｐ１へ移動させることができる。このため、１つのステージ１０を搬出位置Ｐ３まで移動させ、他のステージ１０を搬入位置Ｐ１から検査位置Ｐ２に移動させた後、先に移動させたステージ１０を、他のステージ１０に妨害されずに、搬出位置Ｐ３から搬入位置Ｐ１へ移動させることができる。このため、帰還用の搬送経路を別に設けることなく、２つのステージ１０による検査対象物９の搬送処理を、効率よく行うことができる。 As described above, in this transport apparatus 1, while placing one stage 10 at the inspection position P2, the other stage 10 can be moved from the carry-out position P3 to the carry-in position P1 via the intermediate position Pm. For this reason, after moving one stage 10 to the unloading position P3 and moving the other stage 10 from the loading position P1 to the inspection position P2, the stage 10 moved first is not obstructed by the other stage 10. In addition, it can be moved from the carry-out position P3 to the carry-in position P1. For this reason, the conveyance process of the inspection target 9 by the two stages 10 can be efficiently performed without providing a separate conveyance path for return.
　特に、本実施形態では、ステージ１０を中間位置Ｐｍから検査位置Ｐ２に移動させるときに、ステージ１０とともに第２レール２２も、検査位置Ｐ２に移動させる。そして、中間位置Ｐｍに、第２レール２２に代えて予備レール２４を配置する。このような構造では、第１レール２１と第３レール２３との間で、１つの搬送機構でステージ１０を搬送することが困難である。しかしながら、本実施形態の構造では、第１移動機構３１と第３移動機構３３との間でステージ１０を受け渡しながら、ステージ１０を移動させることができる。 In particular, in this embodiment, when the stage 10 is moved from the intermediate position Pm to the inspection position P2, the second rail 22 is also moved to the inspection position P2 together with the stage 10. Then, a spare rail 24 is arranged in place of the second rail 22 at the intermediate position Pm. With such a structure, it is difficult to transfer the stage 10 between the first rail 21 and the third rail 23 with one transfer mechanism. However, in the structure of this embodiment, the stage 10 can be moved while delivering the stage 10 between the first moving mechanism 31 and the third moving mechanism 33.
　＜３．変形例＞
　以上、本発明の主たる実施形態について説明したが、本発明は、上記の実施形態に限定されるものではない。 <3. Modification>
As mentioned above, although main embodiment of this invention was described, this invention is not limited to said embodiment.
　上記の実施形態では、第１位置を搬入位置とし、第２位置を検査位置とし、第３位置を搬出位置としていた。すなわち、搬入位置、中間位置、および搬出位置が、直線状に配置されていた。このようにすれば、搬入位置から搬出位置までの直線状の搬送経路と、搬送経路に隣接する処理位置を含む処理部とを、コンパクトに配置することができる。 In the above embodiment, the first position is the carry-in position, the second position is the inspection position, and the third position is the carry-out position. That is, the carry-in position, the intermediate position, and the carry-out position are arranged linearly. If it does in this way, the linear conveyance path | route from a carrying-in position to a carrying-out position and the process part containing the processing position adjacent to a conveyance path | route can be arranged compactly.
　しかしながら、例えば、図２８のように、第２位置を搬入位置としてもよい。この場合、第１位置を、搬出位置および検査位置のいずれか一方とし、第３位置を搬出位置および検査位置の他方とすればよい。また、例えば、図２９のように、第２位置を搬出位置としてもよい。この場合、第１位置を、搬入位置および検査位置のいずれか一方とし、第３位置を搬入位置および検査位置の他方とすればよい。 However, for example, as shown in FIG. 28, the second position may be the loading position. In this case, the first position may be one of the unloading position and the inspection position, and the third position may be the other of the unloading position and the inspection position. Further, for example, as shown in FIG. 29, the second position may be set as the carry-out position. In this case, the first position may be one of the carry-in position and the inspection position, and the third position may be the other of the carry-in position and the inspection position.
　このように、第２位置を搬入位置または搬出位置にすれば、上記の実施形態よりも、搬入位置と搬出位置との距離が近くなる。したがって、搬入位置と搬出位置との間の作業位置Ｐｏに配置された同一のロボットまたは同一の作業者によって、検査対象物の搬入および搬出を行いやすくなる。 Thus, if the second position is set to the carry-in position or the carry-out position, the distance between the carry-in position and the carry-out position becomes closer than in the above embodiment. Therefore, it becomes easy to carry in and carry out the inspection object by the same robot or the same worker arranged at the work position Po between the carry-in position and the carry-out position.
　また、上記の実施形態では、１つの検査装置内に存在する検査位置が１箇所のみであった。しかしながら、図３０のように、１つの検査装置内に、２つの検査位置Ｐ２を設けてもよい。この場合、検査対象物９が載置された２つのステージ１０を、第１検査位置Ｐ２および第２検査位置Ｐ２にそれぞれ配置している間に、他の１つのステージ１０を、搬出位置Ｐ３から搬入位置Ｐ１へ移動させるようにすればよい。図３０の例では、搬送装置内において、３つのステージ１０を移動させることができる。 In the above embodiment, only one inspection position exists in one inspection apparatus. However, as shown in FIG. 30, two inspection positions P2 may be provided in one inspection apparatus. In this case, while the two stages 10 on which the inspection object 9 is placed are disposed at the first inspection position P2 and the second inspection position P2, respectively, the other stage 10 is moved from the unloading position P3. What is necessary is just to make it move to carrying-in position P1. In the example of FIG. 30, three stages 10 can be moved in the transport apparatus.
　同様に、検査位置の数を３つ以上としてもよい。その場合、ステージの数は、搬入位置、搬出位置、および検査位置の合計数よりも１少ない数とすればよい。 Similarly, the number of inspection positions may be three or more. In that case, the number of stages may be one less than the total number of carry-in positions, carry-out positions, and inspection positions.
　また、上記の実施形態では、予備レールを待機させるための待機位置が、中間位置の下方に配置されていた。これにより、搬送装置の水平方向の広がりが抑制されていた。しかしながら、予備レールを待機させるための待機位置は、他の位置であってもよい。例えば、第２方向に十分なスペースがある場合には、中間位置に対して第２位置とは反対側に、待機位置を配置してもよい。 Further, in the above embodiment, the standby position for waiting the spare rail is arranged below the intermediate position. Thereby, the spread of the horizontal direction of the conveying apparatus was suppressed. However, the standby position for waiting the spare rail may be another position. For example, when there is sufficient space in the second direction, the standby position may be arranged on the opposite side of the second position from the intermediate position.
　また、上記の実施形態では、ステージに設けられた貫通孔に、固定ピンが挿入されていた。しかしながら、ステージは、貫通孔に代えて凹部を有し、当該凹部にピンを挿入する構造であってもよい。あるいは、移動機構側に、固定部としての貫通孔または凹部を設け、ステージ側に、当該貫通孔または凹部に挿入される凸部を設けてもよい。また、一対の部材による挟持などの他の方法で、ナット部材に対してステージを固定してもよい。 In the above embodiment, the fixing pin is inserted into the through hole provided in the stage. However, the stage may have a recess instead of the through hole, and a pin may be inserted into the recess. Or the through-hole or recessed part as a fixing | fixed part may be provided in the moving mechanism side, and the convex part inserted in the said through-hole or recessed part may be provided in the stage side. Moreover, you may fix a stage with respect to a nut member by other methods, such as clamping by a pair of member.
　また、上記の実施形態では、貫通孔または凹部へ向かう方向にピンを付勢するための弾性部材として、コイルばねが用いられていた。しかしながら、コイルばねに代えて、板ばねまたはゴムなどの他の弾性部材を用いて、ピンを付勢してもよい。 In the above embodiment, a coil spring is used as an elastic member for biasing the pin in the direction toward the through hole or the recess. However, the pin may be biased by using another elastic member such as a leaf spring or rubber instead of the coil spring.
　また、上記の実施形態では、エアシリンダを水平に配置していた。そして、ロッドの水平移動を、Ｌ字部材を介して昇降移動に変換していた。このように、エアシリンダを水平に配置すれば、着脱機構の高さ方向の寸法を抑制できる。しかしながら、高さ方向のスペースが十分にある場合には、Ｌ字部材を省略し、エアシリンダを鉛直方向に配置してもよい。 Further, in the above embodiment, the air cylinder is arranged horizontally. And the horizontal movement of the rod was converted into the raising / lowering movement via the L-shaped member. Thus, if the air cylinder is disposed horizontally, the dimension of the attaching / detaching mechanism in the height direction can be suppressed. However, when there is sufficient space in the height direction, the L-shaped member may be omitted and the air cylinder may be arranged in the vertical direction.
　また、上記の実施形態では、検査位置に配置されたステージ上の検査対象物に対して、検査を行う装置について説明した。しかしながら、本発明の搬送装置の適用対象は、ステージ上の対象物に対して、検査以外の処理を行う処理装置であってもよい。例えば、ステージ上の対象物に対して、塗布、描画、印刷等の処理を行う装置に、本発明を適用してもよい。 In the above embodiment, an apparatus for inspecting an inspection object on a stage arranged at an inspection position has been described. However, the application target of the transfer apparatus of the present invention may be a processing apparatus that performs processing other than inspection on an object on a stage. For example, the present invention may be applied to an apparatus that performs processing such as coating, drawing, and printing on an object on a stage.
　また、搬送装置の細部の形状、または検査装置の細部の形状については、本願の各図と相違していてもよい。また、上記の実施形態および変形例に登場した各要素を、矛盾が生じない範囲で、適宜に組み合わせてもよい。 Also, the shape of the details of the transport device or the shape of the details of the inspection device may be different from the drawings in the present application. Moreover, you may combine suitably each element which appeared in said embodiment and modification in the range which does not produce inconsistency.
　１　搬送装置
　２　検査部
　９　検査対象物
　１０　ステージ
　１０ａ　第１ステージ
　１０ｂ　第２ステージ
　１１　ステージ本体
　１２　受け部材
　１３　貫通孔
　２１　第１レール
　２２　第２レール
　２３　第３レール
　２４　予備レール
　３１　第１移動機構
　３２　第２移動機構
　３３　第３移動機構
　３４　第４移動機構
　４０　搬送制御部
　５１　モータ
　５２　ボールねじ
　５３　ナット部材
　５４　固定ピン
　５５　着脱機構
　５６　支持部材
　６１　エアシリンダ
　６２　変換機構
　６３　コイルばね
　７０　エアシリンダ
　１００　検査装置
　１０１　被案内部
　１３１　テーパ面
　２０１　カメラ
　２０２　光照射部
　２０３　画像処理部
　Ｐ１　搬入位置
　Ｐ２　検査位置
　Ｐ３　搬出位置
　Ｐｍ　中間位置
　Ｐｗ　待機位置
　Ｐｏ　作業位置

  DESCRIPTION OF SYMBOLS 1 Transfer apparatus 2 Inspection part 9 Inspection object 10 Stage 10a 1st stage 10b 2nd stage 11 Stage main body 12 Receiving member 13 Through-hole 21 1st rail 22 2nd rail 23 3rd rail 24 Preliminary rail 31 1st moving mechanism 32 2nd movement mechanism 33 3rd movement mechanism 34 4th movement mechanism 40 Conveyance control part 51 Motor 52 Ball screw 53 Nut member 54 Fixing pin 55 Detachment mechanism 56 Support member 61 Air cylinder 62 Conversion mechanism 63 Coil spring 70 Air cylinder 100 Inspection apparatus DESCRIPTION OF SYMBOLS 101 Guide part 131 Tapered surface 201 Camera 202 Light irradiation part 203 Image processing part P1 Loading position P2 Inspection position P3 Unloading position Pm Intermediate position Pw Waiting position Po Work position

Claims (25)

  1. 　第１方向に順に配置された第１位置、中間位置、および第３位置と、前記中間位置から前記第１方向に対して交差する第２方向に隣接する第２位置との間で、対象物を搬送する搬送装置であって、
    　対象物を載置可能な少なくとも２つのステージと、
    　前記第１位置と前記中間位置との間で前記ステージを移動させる第１移動機構と、
    　前記第２位置と前記中間位置との間で前記ステージを移動させる第２移動機構と、
    　前記第３位置と前記中間位置との間で前記ステージを移動させる第３移動機構と、
    　前記第１移動機構、前記第２移動機構、および前記第３移動機構を制御する制御部と、
    を備え、
    　前記制御部は、１つの前記ステージを前記第２位置に配置しつつ、前記第１移動機構および前記第３移動機を動作させて、他の１つの前記ステージを、前記第１位置と前記第３位置との間で移動させる搬送装置。     An object between a first position, an intermediate position, and a third position that are sequentially arranged in the first direction, and a second position that is adjacent to the second direction intersecting the first direction from the intermediate position. A conveying device for conveying
    At least two stages on which the object can be placed;
    A first moving mechanism for moving the stage between the first position and the intermediate position;
    A second moving mechanism for moving the stage between the second position and the intermediate position;
    A third moving mechanism for moving the stage between the third position and the intermediate position;
    A controller that controls the first movement mechanism, the second movement mechanism, and the third movement mechanism;
    With
    The control unit operates the first moving mechanism and the third mobile unit while placing the one stage at the second position, and moves the other stage to the first position and the first position. A transfer device that moves between three positions.
  2. 　請求項１に記載の搬送装置であって、
    　前記第１位置から前記中間位置へ向けて前記第１方向に延びる第１レールと、
    　前記中間位置と前記第２位置との間で移動可能であり、前記第１方向に延びる第２レールと、
    　前記第３位置から前記中間位置へ向けて前記第１方向に延びる第３レールと、
    　前記中間位置と待機位置との間で移動可能であり、前記第１方向に延びる予備レールと、
    　前記中間位置と前記待機位置との間で、前記予備レールを移動させる第４移動機構と、
    をさらに備え、
    　前記第１移動機構は、
    　前記第１位置と前記中間位置との間で、前記第１レールおよび前記第２レールに沿って、前記ステージを移動させ、
    　前記第２移動機構は、
    　前記中間位置と前記第２位置との間で、前記第２レールを移動させ、
    　前記第３移動機構は、
    　前記第３位置と前記中間位置との間で、前記第３レールおよび前記第２レールに沿って、前記ステージを移動させる搬送装置。     It is a conveying apparatus of Claim 1, Comprising:
    A first rail extending in the first direction from the first position toward the intermediate position;
    A second rail movable between the intermediate position and the second position and extending in the first direction;
    A third rail extending in the first direction from the third position toward the intermediate position;
    A spare rail movable between the intermediate position and the standby position and extending in the first direction;
    A fourth moving mechanism for moving the spare rail between the intermediate position and the standby position;
    Further comprising
    The first moving mechanism includes:
    Moving the stage along the first rail and the second rail between the first position and the intermediate position;
    The second moving mechanism includes:
    Moving the second rail between the intermediate position and the second position;
    The third moving mechanism is
    A transfer device that moves the stage along the third rail and the second rail between the third position and the intermediate position.
  3. 　請求項２に記載の搬送装置であって、
    　前記制御部は、前記第４移動機構をさらに制御し、前記第２移動機構による前記中間位置から前記第２位置への前記第２レールの移動と、前記第４移動機構による前記待機位置から前記中間位置への前記予備レールの移動とを、連動して実行させる搬送装置。     It is a conveyance apparatus of Claim 2, Comprising:
    The control unit further controls the fourth movement mechanism, the movement of the second rail from the intermediate position to the second position by the second movement mechanism, and the standby position by the fourth movement mechanism. A transfer device that executes the movement of the spare rail to an intermediate position in conjunction with each other.
  4. 　請求項２または請求項３に記載の搬送装置であって、
    　前記第１位置、前記中間位置、および前記第３位置は、水平に配列され、
    　前記待機位置は、前記中間位置の下方に配置される搬送装置。     It is a conveyance apparatus of Claim 2 or Claim 3, Comprising:
    The first position, the intermediate position, and the third position are arranged horizontally,
    The standby position is a transfer device arranged below the intermediate position.
  5. 　請求項２から請求項４までのいずれか１項に記載の搬送装置であって、
    　前記第４移動機構は、エアシリンダのロッドの進退により、前記予備レールを移動させる機構を有する搬送装置。     It is a conveying apparatus of any one of Claim 2 to Claim 4, Comprising:
    The fourth moving mechanism is a transport device having a mechanism for moving the spare rail by advancing and retracting a rod of an air cylinder.
  6. 　請求項１から請求項５までのいずれか１項に記載の搬送装置であって、
    　前記第１移動機構、前記第２移動機構、および前記第３移動機構は、モータの回転運動を、ボールねじを介して直進運動に変換する機構を有する搬送装置。     It is a conveying apparatus of any one of Claim 1- Claim 5, Comprising:
    The first moving mechanism, the second moving mechanism, and the third moving mechanism have a mechanism that converts a rotational motion of a motor into a straight motion via a ball screw.
  7. 　請求項１から請求項６までのいずれか１項に記載の搬送装置であって、
    　前記第１位置は、前記ステージ上に対象物を搬入する搬入位置であり、
    　前記第２位置は、前記ステージ上の対象物に対して処理を行う処理位置であり、
    　前記第３位置は、前記ステージから対象物を搬出する搬出位置である搬送装置。     It is a conveyance apparatus of any one of Claim 1- Claim 6, Comprising:
    The first position is a loading position for loading an object on the stage;
    The second position is a processing position for performing processing on an object on the stage,
    Said 3rd position is a conveying apparatus which is a carrying-out position which carries out a target object from the said stage.
  8. 　請求項１から請求項６までのいずれか１項に記載の搬送装置であって、
    　前記第１位置は、前記ステージから対象物を搬出する搬出位置および前記ステージ上の対象物に対して処理を行う処理位置のいずれか一方であり、
    　前記第２位置は、前記ステージ上に対象物を搬入する搬入位置であり、
    　前記第３位置は、前記搬出位置および前記処理位置の他方である搬送装置。     It is a conveyance apparatus of any one of Claim 1- Claim 6, Comprising:
    The first position is either one of an unloading position for unloading an object from the stage and a processing position for processing the object on the stage;
    The second position is a loading position for loading an object onto the stage,
    The third position is a transfer device that is the other of the unloading position and the processing position.
  9. 　請求項１から請求項６までのいずれか１項に記載の搬送装置であって、
    　前記第１位置は、前記ステージ上に対象物を搬入する搬入位置および前記ステージ上の対象物に対して処理を行う処理位置のいずれか一方であり、
    　前記第２位置は、前記ステージから対象物を搬出する搬出位置であり、
    　前記第３位置は、前記搬入位置および前記処理位置の他方である搬送装置。     It is a conveyance apparatus of any one of Claim 1- Claim 6, Comprising:
    The first position is one of a loading position for loading an object on the stage and a processing position for processing the object on the stage,
    The second position is an unloading position for unloading an object from the stage,
    The third position is a transfer device that is the other of the carry-in position and the processing position.
  10. 　請求項１から請求項９までのいずれか１項に記載の搬送装置であって、
    　前記第１移動機構、前記第２移動機構、および前記第３移動機構は、それぞれ、
    　　前記ステージに固定される固定部と、
    　　前記固定部を前記ステージに対して着脱する着脱機構と、
    を有する搬送装置。     It is a conveying apparatus of any one of Claim 1- Claim 9, Comprising:
    The first moving mechanism, the second moving mechanism, and the third moving mechanism are respectively
    A fixing portion fixed to the stage;
    An attachment / detachment mechanism for attaching / detaching the fixing portion to / from the stage;
    Conveying device having
  11. 　請求項１０に記載の搬送装置であって、
    　前記ステージは、貫通孔または凹部を有し、
    　前記固定部は、前記貫通孔または前記凹部に挿入されるピンを有する搬送装置。     It is a conveying apparatus of Claim 10, Comprising:
    The stage has a through hole or a recess,
    The conveying device having a pin inserted into the through hole or the recess.
  12. 　請求項１１に記載の搬送装置であって、
    　前記着脱機構は、
    　　前記ピンを前記貫通孔または前記凹部へ向かう方向に付勢する弾性部材
    を有する搬送装置。     It is a conveyance apparatus of Claim 11, Comprising:
    The attachment / detachment mechanism is
    A conveying apparatus having an elastic member that urges the pin in a direction toward the through hole or the recess.
  13. 　請求項１２に記載の搬送装置であって、
    　前記着脱機構は、
    　　前記貫通孔または前記凹部から離れる方向に前記ピンを移動させるエアシリンダ
    をさらに有する搬送装置。     It is a conveyance apparatus of Claim 12, Comprising:
    The attachment / detachment mechanism is
    The conveying apparatus which further has an air cylinder which moves the said pin in the direction away from the said through-hole or the said recessed part.
  14. 　請求項１３に記載の搬送装置であって、
    　前記エアシリンダは水平に配置され、
    　前記着脱機構は、
    　　前記エアシリンダのロッドの水平移動を、前記ピンの昇降移動に変換する変換機構
    をさらに有する搬送装置。     It is a conveying apparatus of Claim 13, Comprising:
    The air cylinder is arranged horizontally;
    The attachment / detachment mechanism is
    The conveying apparatus which further has the conversion mechanism which converts the horizontal movement of the rod of the said air cylinder into the raising / lowering movement of the said pin.
  15. 　請求項１１から請求項１４までのいずれか１項に記載の搬送装置であって、
    　前記ステージは、
    　　対象物を載置するステージ本体と、
    　　前記ステージ本体に固定された受け部材と、
    を有し、
    　前記受け部材が、前記貫通孔または前記凹部を有する搬送装置。     It is a conveying apparatus of any one of Claim 11 to Claim 14, Comprising:
    The stage is
    A stage body on which an object is placed;
    A receiving member fixed to the stage body;
    Have
    The conveying apparatus in which the receiving member has the through hole or the concave portion.
  16. 　請求項１０から請求項１５までのいずれか１項に記載の搬送装置であって、
    　前記制御部は、常時少なくとも１つの前記移動機構の前記固定部が、前記ステージに固定されるように、前記着脱機構を制御する搬送装置。     The transfer device according to any one of claims 10 to 15,
    The control unit is a transport device that controls the attachment / detachment mechanism such that the fixing unit of the at least one moving mechanism is always fixed to the stage.
  17. 　請求項１から請求項１６までのいずれか１項に記載の搬送装置と、
    　前記ステージ上の対象物に対して処理を行う処理部と、
    を備える処理装置。     A transport device according to any one of claims 1 to 16,
    A processing unit for processing an object on the stage;
    A processing apparatus comprising:
  18. 　請求項１７に記載の処理装置であって、
    　前記処理部は、前記ステージ上の対象物を検査する検査部である処理装置。     The processing apparatus according to claim 17, wherein
    The processing unit is a processing unit that is an inspection unit that inspects an object on the stage.
  19. 　第１方向に順に配置された第１位置、中間位置、および第３位置と、前記中間位置から前記第１方向に対して交差する第２方向に隣接する第２位置との間で、ステージ上に載置された対象物を搬送する搬送方法であって、
    　ａ）前記第１位置から前記中間位置を経て前記第２位置へ、一のステージを移動させる工程と、
    　ｂ）前記工程ａ）の後、前記第２位置から前記中間位置を経て前記第３位置へ、前記一のステージを移動させる工程と、
    　ｃ）前記工程ｂ）の後、前記第１位置から前記中間位置を経て前記第２位置へ、他のステージを移動させる工程と、
    　ｄ）前記工程ｃ）の後、前記第３位置から前記中間位置を経て前記第１位置へ、前記一のステージを移動させる工程と、
    を有する搬送方法。     On the stage between a first position, an intermediate position, and a third position, which are sequentially arranged in the first direction, and a second position adjacent to the second direction intersecting the first direction from the intermediate position. A transport method for transporting an object placed on
    a) moving one stage from the first position through the intermediate position to the second position;
    b) after the step a), moving the one stage from the second position to the third position through the intermediate position;
    c) after the step b), moving another stage from the first position to the second position via the intermediate position;
    d) after the step c), moving the one stage from the third position to the first position via the intermediate position;
    Conveying method.
  20. 　請求項１９に記載の搬送方法であって、
    　前記第１位置と前記中間位置との間、前記第２位置と前記中間位置との間、および、前記第３位置と前記中間位置との間それぞれで、異なる移動機構により、前記ステージを移動させ、
    　前記工程ａ）、前記工程ｂ）および前記工程ｃ）それぞれにおいて、前記ステージを、前記中間位置を経由させる場合、前記中間位置へ前記ステージを移動させた一の移動機構と異なる、他の移動機構を前記ステージに固定した後、前記一の移動機構を前記ステージから切り離す搬送方法。     The transport method according to claim 19, wherein
    The stage is moved by a different moving mechanism between the first position and the intermediate position, between the second position and the intermediate position, and between the third position and the intermediate position. ,
    In each of the step a), the step b), and the step c), when moving the stage through the intermediate position, another moving mechanism that is different from the one moving mechanism that moved the stage to the intermediate position A conveying method of separating the one moving mechanism from the stage after fixing the stage to the stage.
  21. 　請求項１９または請求項２０に記載の搬送方法であって、
    　前記第１位置は、前記ステージ上に対象物を搬入する搬入位置であり、
    　前記第２位置は、前記ステージ上の対象物に対して処理を行う処理位置であり、
    　前記第３位置は、前記ステージから対象物を搬出する搬出位置である搬送方法。     The transport method according to claim 19 or 20, wherein
    The first position is a loading position for loading an object on the stage;
    The second position is a processing position for performing processing on an object on the stage,
    The transfer method, wherein the third position is an unloading position for unloading an object from the stage.
  22. 　請求項１９または請求項２０に記載の搬送方法であって、
    　前記第１位置は、前記ステージから対象物を搬出する搬出位置および前記ステージ上の対象物に対して処理を行う処理位置のいずれか一方であり、
    　前記第２位置は、前記ステージ上に対象物を搬入する搬入位置であり、
    　前記第３位置は、前記搬出位置および前記処理位置の他方である搬送方法。     The transport method according to claim 19 or 20, wherein
    The first position is either one of an unloading position for unloading an object from the stage and a processing position for processing the object on the stage;
    The second position is a loading position for loading an object onto the stage,
    The transfer method, wherein the third position is the other of the unloading position and the processing position.
  23. 　請求項１９または請求項２０に記載の搬送方法であって、
    　前記第１位置は、前記ステージ上に対象物を搬入する搬入位置および前記ステージ上の対象物に対して処理を行う処理位置のいずれか一方であり、
    　前記第２位置は、前記ステージから対象物を搬出する搬出位置であり、
    　前記第３位置は、前記搬入位置および前記処理位置の他方である搬送方法。     The transport method according to claim 19 or 20, wherein
    The first position is one of a loading position for loading an object on the stage and a processing position for processing the object on the stage,
    The second position is an unloading position for unloading an object from the stage,
    The transfer method, wherein the third position is the other of the carry-in position and the processing position.
  24. 　請求項２１から請求項２３までのいずれか１項に記載の搬送方法により、対象物を搬送する搬送工程と、
    　前記処理位置に配置された前記ステージ上の対象物に対して処理を行う処理工程と、
    を備える処理方法。     A transport process for transporting an object by the transport method according to any one of claims 21 to 23,
    A processing step of processing the object on the stage arranged at the processing position;
    A processing method comprising:
  25. 　請求項２４に記載の処理方法であって、
    　前記処理工程は、前記処理位置に配置された前記ステージ上の対象物を検査する検査工程である処理方法。

          A processing method according to claim 24, wherein
    The processing method, wherein the processing step is an inspection step for inspecting an object on the stage arranged at the processing position.

PCT/JP2016/084615 2015-12-04 2016-11-22 Conveyance device, processing device, conveyance method, and processing method WO2017094565A1 (en)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2015-237083 2015-12-04
JP2015237081A JP6671939B2 (en) 2015-12-04 2015-12-04 Transport device, processing device, transport method, and processing method
JP2015-237082 2015-12-04
JP2015237082A JP6562825B2 (en) 2015-12-04 2015-12-04 Conveying device and processing device
JP2015-237081 2015-12-04
JP2015237083A JP6681182B2 (en) 2015-12-04 2015-12-04 Transfer device, processing device, and transfer method

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JPH09186207A (en) * 1996-01-08 1997-07-15 Mitsubishi Electric Corp Inspection apparatus
JP2006260675A (en) * 2005-03-17 2006-09-28 Hitachi High-Technologies Corp Disk conveyance mechanism and disk inspection device using the same
JP2008034620A (en) * 2006-07-28 2008-02-14 Victor Co Of Japan Ltd Substrate inspection device and substrate inspection method using same
JP2008032415A (en) * 2006-07-26 2008-02-14 Hitachi High-Technologies Corp Disk feeding mechanism, disk inspection device and method using it
JP2008064668A (en) * 2006-09-08 2008-03-21 Olympus Corp Substrate discharge mechanism of visual inspection system
JP2013505178A (en) * 2009-09-22 2013-02-14 レイトラム，エル．エル．シー． Checkpoint system with a container with wheels

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09186207A (en) * 1996-01-08 1997-07-15 Mitsubishi Electric Corp Inspection apparatus
JP2006260675A (en) * 2005-03-17 2006-09-28 Hitachi High-Technologies Corp Disk conveyance mechanism and disk inspection device using the same
JP2008032415A (en) * 2006-07-26 2008-02-14 Hitachi High-Technologies Corp Disk feeding mechanism, disk inspection device and method using it
JP2008034620A (en) * 2006-07-28 2008-02-14 Victor Co Of Japan Ltd Substrate inspection device and substrate inspection method using same
JP2008064668A (en) * 2006-09-08 2008-03-21 Olympus Corp Substrate discharge mechanism of visual inspection system
JP2013505178A (en) * 2009-09-22 2013-02-14 レイトラム，エル．エル．シー． Checkpoint system with a container with wheels

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