WO2017094559A1 - Système de mesure de caractéristiques de réflexion - Google Patents

Système de mesure de caractéristiques de réflexion Download PDF

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Publication number
WO2017094559A1
WO2017094559A1 PCT/JP2016/084552 JP2016084552W WO2017094559A1 WO 2017094559 A1 WO2017094559 A1 WO 2017094559A1 JP 2016084552 W JP2016084552 W JP 2016084552W WO 2017094559 A1 WO2017094559 A1 WO 2017094559A1
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WIPO (PCT)
Prior art keywords
light
correction
unit
opening
characteristic
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PCT/JP2016/084552
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English (en)
Japanese (ja)
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山田　正之
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コニカミノルタ株式会社
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Publication of WO2017094559A1 publication Critical patent/WO2017094559A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/50—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration

Definitions

  • the present invention relates to a system for measuring light reflection characteristics on the surface of a sample.
  • the sample placed in the opening of the integrating sphere is illuminated using the integrating sphere as a colorimetric object, and the reflected light from the sample is received, and the surface color of the sample (specifically, the object color)
  • a color measurement device that measures the above (for example, Patent Document 1).
  • the size of the measurement opening (also referred to as measurement opening) in the integrating sphere is appropriately determined according to the type and size of the sample. And the measurement (average value measurement, spot measurement) which made the part distribute
  • the diameter of the measurement opening is set to about 3 mm to 20 mm according to the size of the integrating sphere. This is because the aperture diameter of the measurement aperture is set within a range in which measurement of the object color is unlikely to occur with respect to the diameter of the integrating sphere.
  • the color measurement device if a two-dimensional distribution of colors in a measurement area of a predetermined size can be measured, the selection of the measurement area, simultaneous measurement of a plurality of distant places, measurement of an elongated area, etc. Intricate shapes such as uneven color and patterned objects in the measurement area can be measured. Such a measurement can be realized in a mode in which the average value of the color of the circular measurement area arranged in the circular measurement opening on the surface of the sample is measured as in the conventional color measurement device. There wasn't.
  • the color measuring device capable of measuring the two-dimensional color distribution is not limited to a large type installed on a desk or the like, but is a small and lightweight portable type that can be carried by hand. Can be considered.
  • the diameter of the measurement opening facing the sample must be larger than the size of the integrating sphere.
  • the light irradiated on the sample is reflected by the sample against the light reflected so as to diffuse in the integrating sphere.
  • the ratio of light reflected from the surface and returning to the inside of the integrating sphere increases.
  • the illumination light in the integrating sphere can be modulated depending on the surface color of the sample.
  • an error is likely to occur in the result of color measurement by the color measuring device.
  • the present invention has been made in view of the above problems, and an object of the present invention is to provide a small reflection characteristic measurement system capable of measuring the reflection characteristic of light on the surface of a sample with high accuracy.
  • the reflection characteristic measurement system includes an integrating sphere, a light source unit, a detection unit, an acquisition unit, a setting unit, and a correction unit.
  • the integrating sphere passes a reflected light from the device under test with a first opening forming a measurement opening arranged to cover the device under test, and facing the first opening. And a second opening forming a detection opening.
  • the light source unit irradiates light on the inner wall surface of the integrating sphere.
  • the detection unit includes the reflected light from the two-dimensional region of the surface of the object to be measured that is incident on the integrating sphere through the measurement opening, and the periphery of the first opening in the integrating sphere.
  • the reflected light from the correction region located at is received through the detection aperture, and signals corresponding to three or more light in different wavelength ranges are output.
  • the acquisition unit acquires a two-dimensional distribution of light reflection characteristics in the two-dimensional region based on a signal output from the detection unit, and acquires a characteristic value related to the light reflection property in the correction region. To do.
  • the setting unit has a reflection characteristic of light in the correction region acquired by the acquisition unit according to a signal output from the detection unit when a reference object is arranged to cover the measurement opening.
  • the first characteristic value according to the above and the light in the correction area acquired by the acquisition unit in response to a signal output from the detection unit when the sample is arranged to cover the measurement opening Based on the second characteristic value related to the reflection characteristic, a conversion rule capable of converting the second characteristic value into the first characteristic value is set.
  • the correction unit is acquired by the acquisition unit according to a signal output from the detection unit when the sample is arranged so as to cover the measurement opening by conversion based on the conversion rule. A two-dimensional distribution of the reflection characteristic in the two-dimensional region of the sample is corrected.
  • the reflection characteristic measurement system since the influence of the modulation of the illumination light according to the reflection characteristic of the light on the surface of the sample is suppressed, the reflection characteristic of the light on the surface of the sample is measured with high accuracy. A small reflection characteristic measuring system can be realized.
  • FIG. 1 is a diagram illustrating a schematic configuration of a reflection characteristic measurement system according to an embodiment.
  • FIG. 2 is a diagram illustrating the bottom of the integrating sphere as viewed from the inside.
  • FIG. 3 is a plan view showing a configuration example of the rotary filter unit.
  • FIG. 4 is a diagram illustrating a variation of the correction area.
  • FIG. 5 is a diagram illustrating a variation of the correction area.
  • FIG. 6 is a block diagram illustrating a configuration example of the information processing unit.
  • FIG. 7 is a block diagram illustrating a functional configuration realized by the information processing unit.
  • FIG. 8 is a top view illustrating the appearance of the top surface of the sample.
  • FIG. 9 is a flowchart illustrating an operation flow related to colorimetry processing in the information processing unit.
  • FIG. 9 is a flowchart illustrating an operation flow related to colorimetry processing in the information processing unit.
  • FIG. 10 is a flowchart illustrating an operation flow related to colorimetry processing in the information processing unit.
  • FIG. 11 is a diagram illustrating the relationship between the correction condition and ⁇ Lab in the simulation.
  • FIG. 12 is a diagram illustrating a cross section of an integrating sphere according to the first modification.
  • FIG. 13 is a diagram illustrating a state in which the bottom of the integrating sphere according to the first modification is viewed from the inside.
  • FIG. 14 is a diagram illustrating the appearance of the bottom of the integrating sphere according to the first modification.
  • FIG. 15 is a diagram illustrating a cross section of an integrating sphere according to the second modification.
  • FIG. 16 is a diagram illustrating a state in which the bottom of the integrating sphere according to the second modification is viewed from the inside.
  • FIG. 1 is a diagram illustrating a schematic configuration of a reflection characteristic measurement system 1 according to an embodiment.
  • FIG. 2 is a diagram illustrating a state in which the bottom of the integrating sphere 21 is viewed from the inside. Specifically, FIG. 2 is a diagram showing an XY cross section at a position indicated by a one-dot chain line II-II in FIG.
  • the reflection characteristic measurement system 1 is a system for measuring a characteristic (also referred to as a reflection characteristic) that reflects light on the surface of the measurement object 4 including the reference object 4st for calibration and the sample 4sm.
  • the reflection characteristic includes, for example, a numerical value related to the object color.
  • a white calibration plate also referred to as a calibration white plate or the like may be employed as the calibration reference object 4st.
  • the reflection characteristic measurement system 1 includes a reflection characteristic measurement unit 2 and an information processing unit 3.
  • the reflection characteristic measuring unit 2 and the information processing unit 3 may be configured integrally, whereby the reflection characteristic measuring system 1 may be configured, or the reflection characteristic measuring unit 2 and the information processing unit 3 may be configured. May be configured separately, so that the reflection characteristic measurement system 1 may be configured.
  • the information processing unit 3 is configured by, for example, a personal computer. Then, the reflection characteristic measurement unit 2 and the information processing unit 3 are connected so that data communication is possible, for example, by a cable or wireless communication.
  • the reflection characteristic measurement unit 2 includes an integrating sphere 21, an illumination unit 22, and a light receiving unit 23.
  • the integrating sphere 21 is a spherical member whose inner wall surface 21si diffuses and reflects light (diffuse reflection) almost completely.
  • the inner wall surface 21si can be formed, for example, by applying a white paint such as barium sulfate to the inner surface of a spherical member.
  • the color of the inner wall surface 21si of the integrating sphere 21 is substantially equivalent to the color of the surface of the calibration white plate.
  • the integrating sphere 21 has openings Hp0, Hp1, and Hp2 that form three openings H0, H1, and H2 whose inner space is open to the outer space. Each opening H0, H1. As H2, for example, a substantially circular one can be adopted.
  • the opening Hp0 is a part where the opening H0 for irradiating the inner wall surface 21si of the integrating sphere 21 with the light from the illumination unit 22 is formed.
  • the opening Hp1 is a portion (also referred to as a first opening) that forms a measurement opening H1 that is arranged so as to cover the DUT 4.
  • the opening Hp ⁇ b> 1 is provided at the bottom of the integrating sphere 21.
  • the opening portion Hp2 is a portion (also referred to as a second opening portion) that forms a detection opening H2 that opposes the first opening portion Hp1 and allows the reflected light from the DUT 4 to pass therethrough.
  • the illumination unit 22 is a part that irradiates light to the object to be measured 4 in order to measure the light reflection characteristics on the surface of the object to be measured 4.
  • the illumination unit 22 includes a light emitting circuit 221 and a light source unit 222.
  • the light emitting circuit 221 is a circuit for causing the light source unit 222 to emit light.
  • the light source part 222 is a part that irradiates the inner wall surface 21si of the integrating sphere 21 with light.
  • a halogen lamp, a xenon lamp, a light emitting diode (LED), or the like may be employed.
  • the light emitted from the light source unit 222 is incident on the integrating sphere 21 through the opening H0 and is irradiated on the inner wall surface 21si of the integrating sphere 21.
  • the light irradiated on the inner wall surface 21si is irradiated, for example, on the object 4 to be measured so as to cover the opening H1 through the opening H1 through one or more irregular reflections on the inner wall surface 21si.
  • the light source unit 222 may be disposed in the integrating sphere 21 without the opening H0 and the opening Hp0, for example.
  • the light receiving unit 23 is a part that receives light from the DUT 4.
  • the reflected light from the DUT 4 irradiated with the light emitted from the light source unit 222 is incident on the light receiving unit 23 through the opening H1 and the opening H2 in this order, so that the light receiving unit 23 Received light.
  • the light receiving unit 23 includes a lens unit 231, a filter unit 232, and a detection unit 233.
  • the lens unit 231 forms an image of the reflected light from the DUT 4 in the detection unit 233.
  • the filter unit 232 is a part that selectively transmits light in a predetermined wavelength range set in advance.
  • the filter unit 232 includes, for example, three or more filters that respectively pass light having three or more different wavelength ranges. And the filter arrange
  • FIG. 3 is a plan view showing a configuration example of the filter unit 232.
  • the filter unit 232 shown in FIG. 3 is a rotary type.
  • the filter unit 232 includes a circular disk Dk1, a rotation axis Ax1, a filter unit F1, and a motor unit M1 (FIG. 1) on a plane orthogonal to the lens optical axis (on the XY plane in the drawing). is doing.
  • a plurality of through holes Th1, Th2, Th3, Th4, Th5, Th6, Th7, Th8 are provided in the circumferential direction along the outer edge.
  • the plurality of through-holes Th1, Th2, Th3, Th4, Th5, Th6, Th7, Th8 are, for example, every 45 ° around the rotation axis Ax1 extending along the Z axis provided at the center of the disk Dk1. Is provided.
  • a plurality of preset through holes for example, three through holes Th1, Th3, Th4.
  • Three or more preset filter units F1 are attached.
  • a filter portion F1x that allows light in the X wavelength range of the XYZ color system to pass is attached to the through hole Th1, and light in the Y wavelength range of the XYZ color system is allowed to pass through the through hole Th2.
  • An example is shown in which a filter part F1y is attached, and a filter part F1z that allows light in the Z wavelength region of the XYZ color system to pass through is attached to the through hole Th3.
  • the three or more filter portions F1 for example, instead of the three filter portions F1x, F1y, and F1z, red (R), green (G), and blue (B) filter portions, cyan (C), and magenta
  • a filter unit for three colors such as (M) and yellow (Y) filter units may be employed.
  • the three or more filter parts F1 for example, four or more filter parts F1 may be employed.
  • the four or more filter units F1 for example, in addition to the three filter units F1x, F1y, and F1z related to the tristimulus values X, Y, and Z, one or more types of filter units related to the wavelength range of light different from them May be adopted.
  • a filter that can approximately represent a spectrum of transmitted light (also referred to as a transmission spectrum) with a Gaussian function may be employed as the one or more types of filter units employed here. That is, the three or more filter units F1 may be a multiband filter having three or more filter units, for example.
  • the disk Dk1 is rotated about the rotation axis Ax1 by the motor unit M1, for example, so that the type of the filter unit F1 disposed between the lens unit 231 and the detection unit 233 is switched.
  • the disk Dk1 rotates 45 ° counterclockwise about the rotation axis Ax1, so that the filter unit F1 is in the order of the filter unit F1x, the filter unit F1y, and the filter unit F1z. Can be switched.
  • the detection unit 233 outputs a signal corresponding to light incident through the filter unit 232.
  • the detection unit 233 has, for example, a plurality of photoelectric conversion elements arranged two-dimensionally.
  • the plurality of photoelectric conversion elements are arranged in a matrix, for example, to constitute an area sensor such as a CCD.
  • the filter unit 232 adjusts the wavelength range of light received by the detection unit 233, and thus the detection unit 233 is configured by a monochrome area sensor or the like.
  • the outer edge of the region that can be imaged by the detection unit 233 is indicated by a two-dot chain line.
  • the detection unit 233 reflects the reflected light from the area (also referred to as a two-dimensional area) Am1 as a measurement target on the surface of the object 4 to be measured that enters the integrating sphere 21 through the opening H1, Reflected light from a region Ac1 located around the first opening Hp1 (also referred to as a peripheral region) Ac1 is received through the second opening Hp2.
  • the detection unit 233 outputs signals corresponding to three or more light beams having different wavelength ranges.
  • the output of signals corresponding to light of three or more mutually different wavelength ranges in the detection unit 233 includes output of signals corresponding to the tristimulus values X, Y, and Z.
  • a value (also referred to as a characteristic value) related to the corresponding reflection characteristic can be easily obtained.
  • the two-dimensional region Am1 is set so as not to include, for example, a region near the outer edge of the opening H1 in the surface of the DUT 4.
  • a signal related to the reflected light from the two-dimensional region Am1 in which the influence of the shadow that can be generated on the surface of the measurement object 4 due to the edge of the first opening Hp1 and the decrease in the amount of irradiation light is reduced is obtained.
  • the peripheral area Ac1 includes a correction area (also referred to as a correction area) P1. That is, the detection unit 233 receives the reflected light from the correction region P1 located around the first opening Hp1 in the integrating sphere 21 through the second opening Hp2.
  • the correction area P1 for example, one or more correction reference plates (also referred to as correction reference plates) are arranged.
  • the correction here refers to an error that occurs in the measurement value of the reflection characteristic on the surface of the object 4 to be measured by the illumination light in the integrating sphere 21 being modulated by the retro-reflecting light according to the surface color of the object 4 to be measured. It means to correct.
  • the correction reference plate is, for example, a flat plate.
  • FIG. 2 shows an example in which a red correction reference plate P1r, a green correction reference plate P1g, and a blue correction reference plate P1b are arranged as correction reference plates.
  • the manner in which the correction reference plates are arranged in the correction region P1 is not limited to the manner in which the three-color correction reference plates P1r, P1g, and P1b are arranged.
  • 4 and 5 are diagrams illustrating variations of the correction area P1.
  • the correction reference plate may not be provided in the correction region P1.
  • the inner wall surface 21si of the integrating sphere 21 is white, it is equivalent to a state where the white correction reference plate P1w is arranged in the correction region P1.
  • a mode in which one or more correction reference plates are provided in the correction region P1 may be employed.
  • a mode in which one or more correction reference plates include the white correction reference plate P1w may be employed.
  • one or more correction reference plates may include four or more color correction reference plates.
  • four or more correction reference plates include a red correction reference plate P1r, a green correction reference plate P1g, a blue correction reference plate P1b, a white correction reference plate P1w, and a yellow correction reference plate.
  • An example is shown in which five color correction reference plates called the reference plate P1y are arranged.
  • FIG. 6 is a block diagram illustrating a configuration example of the information processing unit 3.
  • the information processing unit 3 includes an input unit 31, an output unit 32, a storage unit 33, an input / output (I / O) unit 34, interface (I / F) units 35, 36, and 37, and a control unit 38. Are connected via a bus 3b so that data can be transmitted and received.
  • the input unit 31 is a part that inputs a signal in accordance with, for example, a user operation.
  • the input unit 31 for example, an operation unit that inputs a signal according to the operation of various buttons by the user, a voice input unit that performs speech recognition according to a voice uttered by the user, and the like are adopted. obtain.
  • the output unit 32 is a part that outputs various types of information in a manner that can be recognized by the user, for example.
  • a display device or a projector that outputs various types of information in a manner that can be visually recognized by the user, and a speaker that outputs various types of information in a manner that allows the user to recognize each other may be employed.
  • the storage unit 33 is a part that stores, for example, the program 3P and various information.
  • a non-volatile storage medium such as a ROM may be employed.
  • the I / O unit 34 is a part that receives the storage medium 39 and exchanges data between the storage medium 39 and the control unit 38.
  • a USB port and a card reader can be employed.
  • the storage medium 39 for example, a flash memory, an SD memory card, or the like can be adopted.
  • the I / F units 35, 36, and 37 are portions that transmit and receive various signals and various data to and from portions other than the information processing unit 3 through communication lines or cables.
  • the I / F unit 35 is connected to the illumination unit 22
  • the I / F unit 36 is connected to the detection unit 233
  • the I / F unit 37 is connected to the motor unit M1. ing.
  • the control unit 38 is an electric circuit including a processor 38a and a memory 38b.
  • a central processing unit CPU: Central Processing Unit
  • a volatile memory such as RAM (Random Access Memory) or the like can be adopted as the memory 38b.
  • the control unit 38 reads and executes the program 3P stored in the storage unit 33, thereby realizing various functions and various types of information processing in cooperation with the program 3P stored in the storage unit 33. Thereby, operation
  • FIG. 7 is a block diagram illustrating a functional configuration realized by the control unit 38 of the information processing unit 3.
  • the information processing unit 3 implements, for example, a plurality of functional configurations by reading and executing the program 3P. That is, the information processing unit 3 has a plurality of functional configurations.
  • the plurality of functional configurations include, for example, a motor control unit 381, a light source control unit 382, an acquisition unit 383, a storage control unit 384, a setting unit 385, a correction unit 386, and the like.
  • the motor control unit 381 switches the type of the filter unit F1 disposed between the lens unit 231 and the detection unit 233 by controlling the rotation of the motor unit M1.
  • one of the filter units F1x, F1y, and F1z of the tristimulus values X, Y, and Z is disposed between the lens unit 231 and the detection unit 233.
  • the detection unit 233 can output a signal related to one wavelength region among the tristimulus values X, Y, and Z.
  • the filter unit F1x of the tristimulus value X is disposed between the lens unit 231 and the detection unit 233, so that the detection unit 233 outputs a signal related to the wavelength range of the tristimulus value X. obtain.
  • the filter unit F1y having the tristimulus value Y is disposed between the lens unit 231 and the detection unit 233, so that the detection unit 233 can output a signal related to the wavelength range of the tristimulus value Y.
  • the filter unit F1z of the tristimulus value Z is disposed between the lens unit 231 and the detection unit 233, so that the detection unit 233 can output a signal related to the wavelength range of the tristimulus value Z.
  • the light source control unit 382 controls irradiation of illumination light to the inner wall surface 21si of the integrating sphere 21 by the illumination unit 22. Specifically, the light source control unit 382 controls the light emission of the light source unit 222 via the light emitting circuit 221.
  • the acquisition unit 383 Based on the signal output from the detection unit 233, the acquisition unit 383 acquires a two-dimensional distribution (also referred to as a two-dimensional distribution) of light reflection characteristics in the two-dimensional region Am1 of the sample 4sm as the object to be measured 4. .
  • the acquisition unit 383 After the signal output from the detection unit 233 is corrected for linearity related to the sensor output of the detection unit 233, the acquisition unit 383 generates a two-dimensional distribution of light reflection characteristics.
  • the two-dimensional distribution of the light reflection characteristic may be acquired directly from the signal output from the detection unit 233.
  • the light reflection characteristics in the two-dimensional area Am1 are, for example, in accordance with the color in the two-dimensional area Am1.
  • the acquisition unit 383 acquires image data indicating a two-dimensional distribution of light reflection characteristics in the two-dimensional region Am1 for the wavelength range of light associated with each of the tristimulus values X, Y, and Z. Can be done.
  • FIG. 8 is a view showing an example of the surface of a sample 4 sm as the DUT 4.
  • FIG. 8 shows an aspect in which the outer edge of the region Ar0 corresponding to the opening H1 is indicated by a two-dot chain line, and the region corresponding to the two-dimensional region Am1 includes the region Ar1 different from the surrounding color. .
  • the acquisition unit 383 acquires a characteristic value related to the light reflection characteristic in the correction region P1 based on the signal output from the detection unit 233.
  • the light in the correction region P1 is output in accordance with a signal output from the detection unit 233 when the calibration white plate as the reference object 4st is disposed so as to cover the measurement opening H1.
  • a characteristic value related to the reflection characteristic (also referred to as a first characteristic value) is acquired.
  • a characteristic value also referred to as a second characteristic value
  • the two-dimensional distribution of the light reflection characteristic in the two-dimensional area Am1 and the second characteristic value can be acquired under the same illumination condition.
  • each of the first characteristic value and the second characteristic value includes, for example, one or more characteristic values relating to the light reflection characteristic of the correction reference plate P1, the surface of the sample 4sm as the object 4 to be measured Thus, the measurement accuracy of the light reflection characteristics can be improved.
  • the acquisition unit 383 can acquire the characteristic value related to the reflection characteristic of the light in the correction region P1 for the light in the wavelength range related to each of the tristimulus values X, Y, and Z.
  • the characteristic value for example, a representative value for each color portion of the image data indicating the two-dimensional distribution of the light reflection characteristic in the correction region P1 may be employed.
  • the representative value for example, a statistical value such as an average value or a mode value may be employed.
  • an average value for each color portion in the image data indicating the two-dimensional distribution of the light reflection characteristic in the correction region P1 is employed as the first characteristic value and the second characteristic value.
  • the storage control unit 384 acquires image data indicating the two-dimensional distribution of the light reflection characteristics in the two-dimensional area Am1 acquired by the acquisition unit 383, the first characteristic value and the first characteristic value related to the light reflection characteristics in the correction area P1. Two characteristic values are stored in the storage unit 33.
  • the setting unit 385 sets a conversion rule that can convert the second characteristic value to the first characteristic value based on the first characteristic value and the second characteristic value acquired by the acquisition unit 383.
  • the correction unit 386 converts the sample 4sm acquired by the acquisition unit 383 in accordance with a signal output from the detection unit 233 when the sample 4sm is arranged so as to cover the measurement opening H1 by conversion based on the conversion rule.
  • the two-dimensional distribution of the light reflection characteristics in the two-dimensional area Am1 is corrected.
  • the image data indicating the two-dimensional distribution of the light reflection characteristics in the two-dimensional region Am1 on the surface of the sample 4sm as the object to be measured 4 can be corrected by conversion based on the conversion rule.
  • the conversion rule is defined by, for example, a conversion formula.
  • the form of this conversion formula differs depending on the mode of the correction region P1 and the filter unit 232, for example.
  • the relationship of Expression (1) is established between the first characteristic value Vx and the second characteristic value Vx ′, and the wavelength range related to the tristimulus value Y
  • the relationship of the expression (2) is established between the first characteristic value Vy and the second characteristic value Vy ′, and the first characteristic value Vz and the first characteristic value for the light in the wavelength range related to the tristimulus value Z are established.
  • the relationship of the formula (3) is established between the two characteristic values Vz ′.
  • k, l, and m are coefficients.
  • Vx k ⁇ Vx ′ (1)
  • Vy 1 ⁇ Vy ′ (2)
  • Vz m ⁇ Vz ′ (3).
  • the pixel value Vx ′ ( ⁇ of image data indicating the two-dimensional distribution of the reflection characteristics of the light in the two-dimensional region Am1 of the sample 4sm with respect to the light in the wavelength region related to each of the tristimulus values X, Y, and Z. ) 'Vy' ( ⁇ ), Vz '( ⁇ ) and the pixel values Vx ( ⁇ ), Vy ( ⁇ ), Vz ( ⁇ ) of the corrected image data based on the conversion formula, The relationship from 4) to (6) is established.
  • ⁇ represents a wavelength.
  • Vx ( ⁇ ) k ⁇ Vx ′ ( ⁇ ) (4)
  • Vy ( ⁇ ) 1 ⁇ Vy ′ ( ⁇ ) (5)
  • Vz ( ⁇ ) m ⁇ Vz ′ ( ⁇ ) (6).
  • the first characteristic value Vxr and the second characteristic value Vxr ′ related to the light in the wavelength range related to the tristimulus value X, and the light in the wavelength range related to the tristimulus value Y are represented by the relations (7) to (9). Is established.
  • k1, k2, k3, l1, l2, l3, m1, m2, and m3 are coefficients.
  • Vxr k1 * Vxr '+ k2 * Vyr' + k3 * Vzr '(7)
  • Vyr l1 ⁇ Vxr ′ + l2 ⁇ Vyr ′ + l3 ⁇ Vzr ′ (8)
  • Vzr m1 * Vxr '+ m2 * Vyr' + m3 * Vzr '(9).
  • the first characteristic value Vxg and the second characteristic value Vxg ′ related to the light in the wavelength range related to the tristimulus value X, and the second related to the light in the wavelength range related to the tristimulus value Y have the relations of equations (10) to (12). To establish.
  • Vxg k1 * Vxg '+ k2 * Vyg' + k3 * Vzg '(10)
  • Vyg l1 ⁇ Vxg ′ + l2 ⁇ Vyg ′ + l3 ⁇ Vzg ′ (11)
  • Vzg m1 * Vxg '+ m2 * Vyg' + m3 * Vzg '(12).
  • the first characteristic value Vxb and the second characteristic value Vxb ′ relating to the light in the wavelength range related to the tristimulus value X and the second characteristic value relating to the light in the wavelength range relating to the tristimulus value Y are obtained.
  • the first characteristic value Vyb, the second characteristic value Vyb ′, and the first characteristic value Vzb and the second characteristic value Vzb ′ related to the light in the wavelength range related to the tristimulus value Z have the relations of equations (13) to (15).
  • Vxb k1 * Vxb '+ k2 * Vyb' + k3 * Vzb '(13)
  • Vyb l1 ⁇ Vxb ′ + l2 ⁇ Vyb ′ + l3 ⁇ Vzb ′ (14)
  • Vzb m1 * Vxb '+ m2 * Vyb' + m3 * Vzb '(15).
  • the pixel value Vx ′ ( ⁇ of image data indicating the two-dimensional distribution of the reflection characteristics of the light in the two-dimensional region Am1 of the sample 4sm with respect to the light in the wavelength region related to each of the tristimulus values X, Y, and Z. ), Vy ′ ( ⁇ ), Vz ′ ( ⁇ ) and the pixel values Vx ( ⁇ ), Vy ( ⁇ ), Vz ( ⁇ ) of the corrected image data based on the conversion formula, 16) to (18) are established.
  • ⁇ represents a wavelength.
  • Vx ( ⁇ ) k1 ⁇ Vx ′ ( ⁇ ) + k2 ⁇ Vy ′ ( ⁇ ) + k3 ⁇ Vz ′ ( ⁇ ) (16)
  • Vy ( ⁇ ) l1 ⁇ Vx ′ ( ⁇ ) + l2 ⁇ Vy ′ ( ⁇ ) + l3 ⁇ Vz ′ ( ⁇ ) (17)
  • Vz ( ⁇ ) m1 ⁇ Vx ′ ( ⁇ ) + m2 ⁇ Vy ′ ( ⁇ ) + m3 ⁇ Vz ′ ( ⁇ ) (18)
  • the five color correction reference plates for example, a red correction reference plate P1r, a green correction reference plate P1g, a blue correction reference plate P1b, a white correction reference plate P1w, and a yellow correction reference plate.
  • a plate P1y is employed.
  • the first characteristic value Vxr and the second characteristic value Vxr ′ related to the light in the wavelength range related to the tristimulus value X, and the light in the wavelength range related to the tristimulus value Y The first characteristic value Vyr and the second characteristic value Vyr ′, the first characteristic value Vzr and the second characteristic value Vzr ′ related to the light in the wavelength range related to the tristimulus value Z, the first related to the light in the wavelength range of the transmission spectrum A
  • the relationship of Expressions (19) to (23) is established between the characteristic value Var, the second characteristic value Var ′, and the first characteristic value Vbr and the second characteristic value Vbr ′ relating to light in the wavelength region of the transmission spectrum B.
  • k1, k2, k3, k4, k5, l1, l2, l3, l4, l5, m1, m2, m3, m4, m5, n1, n2, n3, n4, n5, o1, o2, o3, o4 , O5 is a coefficient.
  • Vxr k1 * Vxr '+ k2 * Vyr' + k3 * Vzr '+ k4 * Var' + k5 * Vbr '(19)
  • Vyr l1 ⁇ Vxr ′ + l2 ⁇ Vyr ′ + l3 ⁇ Vzr ′ + l4 ⁇ Var ′ + l5 ⁇ Vbr ′
  • Vzr m1 ⁇ Vxr ′ + m2 ⁇ Vyr ′ + m3 ⁇ Vzr ′ + m4 ⁇ Var ′ + m5 ⁇ Vbr ′
  • Var n1 ⁇ Vxr ′ + n2 ⁇ Vyr ′ + n3 ⁇ Vzr ′ + n4 ⁇ Var ′ + n5 ⁇ Vbr ′
  • Vbr o1 * Vxr '+ o2 * Vyr' + o3 * Vzr
  • the first characteristic value Vxg and the second characteristic value Vxg ′ related to the light in the wavelength range related to the tristimulus value X, and the second related to the light in the wavelength range related to the tristimulus value Y are related to the first characteristic value Vxg and the second characteristic value Vxg ′ related to the light in the wavelength range related to the tristimulus value X, and the second related to the light in the wavelength range related to the tristimulus value Y.
  • the relationship of Expressions (24) to (28) is established between the value Vag, the second characteristic value Vag ′, and the first characteristic value Vbg and the second characteristic value Vbg ′ relating to light in the wavelength band of the transmission spectrum B.
  • Vxg k1 * Vxg '+ k2 * Vyg' + k3 * Vzg '+ k4 * Vag' + k5 * Vbg '(24)
  • Vyg l1 ⁇ Vxg ′ + l2 ⁇ Vyg ′ + l3 ⁇ Vzg ′ + l4 ⁇ Vag ′ + l5 ⁇ Vbg ′
  • Vzg m1 * Vxg '+ m2 * Vyg' + m3 * Vzg '+ m4 * Vag' + m5 * Vbg '(26)
  • Vag n1 ⁇ Vxg ′ + n2 ⁇ Vyg ′ + n3 ⁇ Vzg ′ + n4 ⁇ Vag ′ + n5 ⁇ Vbg ′
  • Vbg o1 * Vxg '+ o2 * Vyg' + o3 * Vzg '
  • the first characteristic value Vxb and the second characteristic value Vxb ′ relating to the light in the wavelength range related to the tristimulus value X and the second characteristic value relating to the light in the wavelength range relating to the tristimulus value Y are obtained.
  • the relationship of Expressions (29) to (33) is established between the value Vab, the second characteristic value Vab ′, and the first characteristic value Vbb and the second characteristic value Vbb ′ relating to light in the wavelength region of the transmission spectrum B.
  • Vxb k1 * Vxb '+ k2 * Vyb' + k3 * Vzb '+ k4 * Vab' + k5 * Vbb '(29)
  • Vyb l1 ⁇ Vxb ′ + l2 ⁇ Vyb ′ + l3 ⁇ Vzb ′ + l4 ⁇ Vab ′ + l5 ⁇ Vbb ′
  • Vzb m1 ⁇ Vxb ′ + m2 ⁇ Vyb ′ + m3 ⁇ Vzb ′ + m4 ⁇ Vab ′ + m5 ⁇ Vbb ′ (31)
  • Vab n1 ⁇ Vxb ′ + n2 ⁇ Vyb ′ + n3 ⁇ Vzb ′ + n4 ⁇ Vab ′ + n5 ⁇ Vbb ′ (32)
  • Vbb o1 * Vxb '+ o2 * Vyb' +
  • the first characteristic value Vxw and the second characteristic value Vxw ′ related to the light in the wavelength range related to the tristimulus value X, and the second related to the light in the wavelength range related to the tristimulus value Y are related to the white correction reference plate P1w.
  • the relationship of Expressions (34) to (38) is established between the value Vaw, the second characteristic value Vaw ′, and the first characteristic value Vbw and the second characteristic value Vbw ′ relating to light in the wavelength region of the transmission spectrum B.
  • Vxw k1 ⁇ Vxw ′ + k2 ⁇ Vyw ′ + k3 ⁇ Vzw ′ + k4 ⁇ Vaw ′ + k5 ⁇ Vbw ′ (34)
  • Vyw l1 ⁇ Vxw ′ + l2 ⁇ Vyw ′ + l3 ⁇ Vzw ′ + l4 ⁇ Vaw ′ + l5 ⁇ Vbw ′ (35)
  • Vzw m1 ⁇ Vxw ′ + m2 ⁇ Vyw ′ + m3 ⁇ Vzw ′ + m4 ⁇ Vaw ′ + m5 ⁇ Vbw ′ (36)
  • Vaw n1 ⁇ Vxw ′ + n2 ⁇ Vyw ′ + n3 ⁇ Vzw ′ + n4 ⁇ Vaw ′ + n5 ⁇ Vbw ′ (37)
  • Vbw o1 * Vxw '+ o
  • the first characteristic value Vxy and the second characteristic value Vxy ′ related to the light in the wavelength range related to the tristimulus value X, and the second related to the light in the wavelength range related to the tristimulus value Y are related to the yellow correction reference plate P1y.
  • Vxy k1 * Vxy '+ k2 * Vyy' + k3 * Vzy '+ k4 * Vay' + k5 * Vby '(39)
  • Vyy l1 ⁇ Vxy ′ + l2 ⁇ Vyy ′ + l3 ⁇ Vzy ′ + l4 ⁇ Vay ′ + l5 ⁇ Vby ′ (40)
  • Vzy m1 ⁇ Vxy ′ + m2 ⁇ Vyy ′ + m3 ⁇ Vzy ′ + m4 ⁇ Vay ′ + m5 ⁇ Vby ′ (41)
  • Vay n1 ⁇ Vxy ′ + n2 ⁇ Vyy ′ + n3 ⁇ Vzy ′ + n4 ⁇ Vay ′ + n5 ⁇ Vby ′ (42)
  • Vby o1 * Vxy '+ o2 * Vyy' + o3 * Vzy '
  • Vx ( ⁇ ) k1 ⁇ Vx ′ ( ⁇ ) + k2 ⁇ Vy ′ ( ⁇ ) + k3 ⁇ Vz ′ ( ⁇ ) + k4 ⁇ Va ′ ( ⁇ ) + k5 ⁇ Vb ′ ( ⁇ ) (44)
  • Vy ( ⁇ ) l1 ⁇ Vx ′ ( ⁇ ) + l2 ⁇ Vy ′ ( ⁇ ) + l3 ⁇ Vz ′ ( ⁇ ) + l4 ⁇ Va ′ ( ⁇ ) + l5 ⁇ Vb ′ ( ⁇ ) (45)
  • Vz ( ⁇ ) m1 ⁇ Vx ′ ( ⁇ ) + m2 ⁇ Vy ′ ( ⁇ ) + m3 ⁇ Vz ′ ( ⁇ ) + m4 ⁇ Va ′ ( ⁇ ) + m5 ⁇ Vb ′ ( ⁇ ) (46)
  • Va ( ⁇ ) n1 ⁇ Vx ′ ( ⁇ ) + n2 ⁇ Vy ′ ( ⁇ ) + n3 ⁇ Vz
  • FIG. 9 and FIG. 10 are diagrams illustrating an example of an operation flow related to color measurement processing in the reflection characteristic measurement system 1. This operation flow is started, for example, by turning on the power of the reflection characteristic measurement system 1 according to the user's operation, and proceeds to step S1 in FIG.
  • step S1 a white plate for calibration as the reference object 4st is set to the reflection characteristic measuring unit 2.
  • the calibration white plate as the reference object 4st is arranged so as to cover the measurement opening H1.
  • step S2 the control unit 38 sets a numerical value m to 1 to identify the number of the filter unit F1 used by the filter unit F1.
  • the numerical value m can be sequentially set to a natural number from 1 to a natural number M of 3 or more.
  • step S3 the mth filter unit F1 is set in the filter unit 232.
  • the mth filter unit F1 is disposed between the lens unit 231 and the detection unit 233.
  • step S4 the light source unit 222 is turned on.
  • the light source unit 222 is turned on under the control of the light source control unit 382 in accordance with a signal input from the input unit 31 according to the user's operation.
  • step S5 imaging by the detection unit 233 is performed.
  • the reflected light from the light enters the detection unit 233 via the lens unit 231 and the filter unit 232.
  • the acquisition unit 383 can acquire the first characteristic value related to the reflection characteristic of the light in the correction region P1 for the light in the wavelength region related to the m-th filter unit F1.
  • the first characteristic value can be acquired for each correction reference plate.
  • step S6 the storage control unit 384 stores the first characteristic value acquired in step S5 in the storage unit 33.
  • step S7 the light source unit 222 is turned off under the control of the light source control unit 382.
  • step S8 the control unit 38 determines whether or not the numerical value m has reached the number M of the filter units F1. If the numerical value m has not reached M, the process proceeds to step S9. If the numerical value m has reached M, the process proceeds to step S11 in FIG.
  • step S9 the control unit 38 increments the numerical value m by one and returns to step S4. That is, the processing from step S4 to step S9 is repeated until the first characteristic value is acquired for the M filter units F1.
  • step S11 the sample 4sm is set to the reflection characteristic measurement unit 2.
  • the sample 4sm is disposed so as to cover the measurement opening H1.
  • step S12 the control unit 38 sets a numerical value m to 1 to identify the number of the filter unit F1 to be used.
  • step S13 the mth filter unit F1 is set in the filter unit 232.
  • the mth filter unit F1 is disposed between the lens unit 231 and the detection unit 233.
  • step S14 the light source unit 222 is turned on.
  • the light source unit 222 is turned on under the control of the light source control unit 382 in accordance with a signal input from the input unit 31 according to the user's operation.
  • step S15 imaging by the detection unit 233 is performed.
  • the reflected light from the two-dimensional area Am1 of the sample 4sm that enters the integrating sphere 21 through the opening H1 and the peripheral area Ac1 positioned around the first opening Hp1 in the integrating sphere 21.
  • the reflected light enters the detection unit 233 via the lens unit 231 and the filter unit 232.
  • the acquisition unit 383 causes the second characteristic value related to the reflection characteristic of the light in the correction region P1 and the reflection of the light in the two-dimensional region Am1 of the sample 4sm with respect to the light in the wavelength region related to the mth filter unit F1.
  • Image data showing a two-dimensional distribution of characteristics can be obtained.
  • the second characteristic value can be acquired for each correction reference plate.
  • step S16 the storage control unit 384 stores the second characteristic value acquired in step S15 and the image data related to the two-dimensional area Am1 of the sample 4sm in the storage unit 33.
  • step S17 the light source unit 222 is turned off under the control of the light source control unit 382.
  • step S18 the control unit 38 determines whether or not the numerical value m has reached the number M of the filter units F1. If the numerical value m has not reached M, the process proceeds to step S19. If the numerical value m has reached M, the process proceeds to step S20.
  • step S19 the numerical value m is incremented by 1, and the process returns to step S14. That is, for the M filter units F1, the processing from step S14 to step S19 is repeated until image data relating to the second characteristic value and the two-dimensional area Am1 of the sample 4sm is acquired.
  • a conversion rule is set by the setting unit 385.
  • the conversion rule is set based on the first characteristic value obtained in step S5 and the second characteristic value obtained in step S15. Further, for example, the first characteristic value and the second characteristic value are applied to the relational expression corresponding to the number of filter portions F1 in the filter unit 232 and the correction reference plate provided in the correction region P1. A coefficient is calculated. Thereby, a conversion formula as a conversion rule including the coefficient can be set. And by such a process, whenever the sample 4sm is set, the conversion formula as a conversion rule according to the surface color of the sample 4sm can be set.
  • step S21 the correction unit 386 corrects the two-dimensional distribution of the light reflection characteristics in the two-dimensional region Am1 related to the sample 4sm obtained in step S15 by the conversion based on the conversion rule set in step S20.
  • the image data indicating the two-dimensional distribution of the light reflection characteristics in the two-dimensional region Am1 on the surface of the sample 4sm as the DUT 4 can be corrected by conversion based on the conversion formula as the conversion rule.
  • the present invention is not limited to this.
  • a calibration white plate as the reference object 4st may be set and the first characteristic value may be acquired.
  • a mode in which the first characteristic value is acquired by setting the calibration white plate as the reference object 4st at the timing before the start of the measurement for the plurality of samples 4sm is conceivable. Thereby, the load of measurement and calculation can be reduced.
  • the first characteristic value is acquired by setting the calibration white plate as the reference object 4st at the timing after measurement of the plurality of samples 4sm.
  • the image data relating to the plurality of samples 4sm can be collectively corrected.
  • the two-dimensional distribution of the light reflection characteristics in the two-dimensional area Am1 related to the sample 4sm is corrected by the conversion rule, and then further corrected by the white calibration coefficient, so that the sample 4sm is corrected.
  • a two-dimensional distribution of the light reflection characteristics after correction may be acquired.
  • the integrating sphere 21 has an inner diameter of 100 mm, the diameter of the opening H1 is set to 40 mm, and the diameter of the two-dimensional region Am1 is set to 35 mm.
  • the light source unit 222 employs an A light source that emits light so that the color temperature is 2854K.
  • the A light source can be realized by a tungsten light bulb (also called an incandescent bulb).
  • the light receiving sensitivity in the light receiving unit 23 is such that an ideal color matching function of XYZ corresponds to a 10 ° field of view.
  • the value (it is also called evaluation value) Lab which shows the object color about 13 types of to-be-measured objects 4, the true value on condition that the illumination light in the integrating sphere 21 is not modulated by recursive illumination light (both true value) Say) was calculated. Further, with respect to the object color evaluation value Lab for the 12 types of samples 4sm, a measurement value (also referred to as an uncorrected value) under the condition that the illumination light in the integrating sphere 21 is modulated by the recursive illumination light, and the measurement value A value (correction value) obtained by correcting according to the conversion rule was calculated.
  • the object color evaluation value Lab was calculated by conversion from the tristimulus values X, Y, and Z obtained by the detection unit 233.
  • the evaluation value ⁇ Lab indicating the error in the measurement result caused by the recursive illumination light
  • the difference between the true value and the uncorrected value and the difference between the true value and the corrected value were calculated for 12 types of samples 4sm.
  • the evaluation value ⁇ Lab is smaller, it means that the measurement accuracy of the light reflection characteristic is improved by the correction based on the conversion rule.
  • FIG. 11 is a diagram showing the relationship between the correction condition under simulation and the evaluation value ⁇ Lab. As shown in FIG. 11, when three filter portions F1x, F1y, and F1z corresponding to the tristimulus values X, Y, and Z are used, the following three types of conditions [i] to [iii] are used. A simulation was performed.
  • FIG. 11 shows the relationship between the correction condition in the simulation and the evaluation value ⁇ Lab.
  • FIG. 11 shows the maximum value of the evaluation values ⁇ Lab calculated for 12 types of samples 4sm for each correction condition.
  • the evaluation value ⁇ Lab was about 15 under the condition where no correction was performed.
  • the evaluation value ⁇ Lab is about 4.9 under the correction condition [ii]. For this reason, it was found that the evaluation value ⁇ Lab is greatly improved by the correction using the conversion rule.
  • the evaluation value ⁇ Lab was about 3.7, and the evaluation value ⁇ Lab was greatly improved by the correction using the conversion rule. For this reason, by using the three-color correction reference plates P1r, P1g, and P1b, it is possible to correct colors existing in a wider color space, and the light reflection characteristics on the surface of the sample 4 sm are highly accurate. It was estimated that it could be measured.
  • the evaluation value ⁇ Lab is about 0.55 under the correction condition [iv].
  • the types of filter portions F1 increase and the yellow (Y) correction reference plate P1y and the white (W) correction reference plate P1w are employed, the evaluation value ⁇ Lab is corrected using the conversion rule. It has been found that this can be further improved.
  • the use of the five color correction reference plates including yellow and white makes it possible to correct colors existing in a wider color space, and the light reflection characteristics on the surface of the sample 4 sm are higher. It was estimated that it could be measured accurately.
  • the acquisition unit according to the signal output from the detection unit 233 when the reference object 4st is arranged so as to cover the measurement opening H1.
  • the first characteristic value related to the light reflection characteristic in the correction region P1 is acquired.
  • the acquisition unit 383 performs a second operation related to the light reflection characteristic in the correction region P1 according to a signal output from the detection unit 233.
  • a characteristic value is obtained.
  • the setting unit 385 sets a conversion rule that can convert the second characteristic value into the first characteristic value based on the first characteristic value and the second characteristic value.
  • the correction unit 386 corrects the two-dimensional distribution of the reflection characteristics related to the two-dimensional region Am1 on the surface of the sample 4sm acquired by the acquisition unit 383 by conversion based on the conversion rule. Thereby, the influence by the modulation
  • the two-dimensional area Am1 as the measurement target area in the sample 4sm is expanded by expanding the measurement opening H1 to some extent. obtain.
  • the number of the detection units 233 is one, high-precision measurement of light reflection characteristics can be realized.
  • a conversion formula as a conversion rule corresponding to the surface color of the sample 4sm for each sample 4sm, even if there is a slight deviation in the modulation of the illumination light by the recursive illumination light, The influence of modulation can be suppressed.
  • the integrating sphere 21 is described only as a sphere.
  • a configuration in which a spherical portion forming the integrating sphere 21 is formed by two or more portions may be employed.
  • the first modified example having such a configuration will be described with a specific example.
  • FIG. 12 is a diagram illustrating a schematic configuration of the reflection characteristic measurement system 1A according to the first modification.
  • FIG. 13 is a diagram illustrating a state in which the bottom of the integrating sphere 21A is viewed from the inside. Specifically, FIG. 13 is a diagram showing an XY cross section at a position indicated by a one-dot chain line XIII-XIII in FIG.
  • the reflection characteristic measurement system 1A is based on the reflection characteristic measurement system 1 according to the above-described embodiment, and the reflection characteristic measurement unit 2 is changed from the integrating sphere 21 to the integrating sphere 21A. Part 2A is replaced.
  • the integrating sphere 21A has a main body portion 21Bd and a mounting portion 21At.
  • the main body 21Bd includes the second opening Hp2.
  • the attachment portion 21At is attached to the main body portion 21Bd and includes the first opening Hp1 and the correction region P1. If such a configuration is adopted, it becomes easy to manufacture a portion provided with the correction reference plate. As a result, the integrating sphere 21 can be easily manufactured.
  • FIG. 14 is a diagram illustrating a schematic configuration of the attachment portion 21At that is not attached to the main body portion 21Bd.
  • the attachment portion 21At may have a configuration that can be attached to and detached from the main body portion 21Bd, or a configuration that can only be attached to the main body portion 21Bd by bonding or the like. May be.
  • worn by rotating in the state engaged mutually for example may be employ
  • FIG. 15 is a diagram illustrating a schematic configuration of a reflection characteristic measurement system 1B according to the second modification.
  • FIG. 16 is a diagram illustrating a state in which the bottom of the integrating sphere 21B is viewed from the inside. Specifically, FIG. 16 is a diagram showing an XY cross section at a position indicated by a one-dot chain line XVI-XVI in FIG.
  • the reflection characteristic measurement system 1B is based on the reflection characteristic measurement system 1A according to the first modification, and the reflection characteristic measurement unit 2A is changed from the integrating sphere 21A to the integrating sphere 21B.
  • the measurement unit 2B is replaced.
  • the integrating sphere 21B has a main body portion 21Bd and a mounting portion 21AtB.
  • the attachment portion 21AtB is attached to the main body portion 21Bd and includes the first opening Hp1 and the correction region P1.
  • the attachment portion 21AtB is provided with three types of correction reference plates P1 (P1r, P1g, P1b) as one or more correction reference plates.
  • Each correction reference plate is arranged toward the internal space of the integrating sphere 21B and has one main surface having a virtual normal passing through the detection opening H2.
  • the one main surface may be a flat surface, for example.
  • virtual normals are drawn with thin arrows.
  • correction reference plates P1r, P1g, and P1b are provided.
  • one or more correction reference plates may be provided. At least one correction reference plate among the one or more correction reference plates is disposed toward the internal space of the integrating sphere and has a virtual normal line passing through the detection opening H2. If the main surface is provided, the light reflection characteristic on the surface of the sample 4 sm can be measured with higher accuracy.
  • the detection unit 233 outputs a signal corresponding to the light incident through the filter unit 232, but the present invention is not limited to this.
  • the detection unit 233 may be a color area sensor having a three-plate type (3CCD type) configuration, or a color area sensor having a single-plate type configuration. Also good. That is, the detection unit 233 only needs to output signals corresponding to three or more light beams in different wavelength ranges.
  • a filter related to the three colors R, G, and B or a filter related to the three colors C, M, and Y Filters relating to the three wavelength bands of light may be employed.
  • the photoelectric conversion element directly outputs signals respectively corresponding to light of three mutually different wavelength ranges corresponding to the tristimulus values X, Y, and Z. Although it output, it is not restricted to this.
  • the photoelectric conversion element after the photoelectric conversion element once obtains signals corresponding respectively to light in three or more wavelength ranges different from the tristimulus values X, Y, and Z such as R, G, and B, these Based on the signal, a configuration may be adopted in which signals respectively corresponding to light of three mutually different wavelength ranges corresponding to the tristimulus values X, Y, and Z are output.
  • the stimulus value X of the three stimulus values X, Y, and Z may be obtained by being decomposed into values X1 and X2, for example. In this case, for example, the value X1 can be calculated from the stimulus value Z.
  • the detection unit 233 is an area sensor, but is not limited thereto.
  • the detection unit 233 has a configuration in which a plurality of photoelectric conversion elements are arranged in the first direction, and the detection unit 233 is scanned in the second direction intersecting the first direction.
  • a configuration that performs substantially the same function as the area sensor may be employed.
  • a first line sensor provided with a filter corresponding to the tristimulus value X
  • a second line sensor provided with a filter corresponding to the tristimulus value Y
  • a filter corresponding to the tristimulus value Z A sensor having three line sensors composed of a third line sensor in which is arranged may be employed.
  • the calibration white plate is used as the calibration reference object 4st.
  • the present invention is not limited to this.
  • an object of another color different from white may be employed as the reference object 4st for calibration.
  • the two-dimensional distribution of the reflection characteristic corrected by the conversion based on the conversion rule indicates a value under illumination affected by the retro-illumination light of the calibration reference object 4st.
  • the conversion rule is defined in the form of a conversion formula, but the present invention is not limited to this.
  • the conversion rule may be defined by a table (also referred to as a conversion table) in which values obtained in advance by actual measurement or simulation are described.
  • the numerical value related to the object color is adopted as the reflection characteristic, but the present invention is not limited to this, and the reflectance of light in a specific wavelength region may be adopted.
  • the present invention includes, for example, reflection characteristic measurement systems according to the following second to seventh aspects.
  • a reflection characteristic measurement system is the reflection characteristic measurement system according to the first aspect, wherein outputs of signals respectively corresponding to light in the three or more different wavelength ranges in the detection unit are output. 3. Includes output of signals corresponding to tristimulus values.
  • the value relating to the reflection characteristic of light corresponding to the color matching function can be easily obtained.
  • a reflection characteristic measurement system is the reflection characteristic measurement system according to the first or second aspect, further comprising one or more correction reference plates arranged in the correction region.
  • the first characteristic value and the second characteristic value each include characteristic values relating to light reflection characteristics of the one or more correction reference plates.
  • the reflection characteristic measurement system is the reflection characteristic measurement system according to the third aspect, wherein the one or more correction reference plates include a white correction reference plate.
  • the reflection characteristic measurement system can improve the measurement accuracy of the light reflection characteristic on the surface of the sample.
  • a reflection characteristic measurement system is the reflection characteristic measurement system according to the third or fourth aspect, wherein the one or more correction reference plates are red, green and blue correction reference plates. including.
  • the reflection characteristic measurement system it is possible to correct a color existing in a wider color space, so that the reflection characteristic of light on the surface of the sample can be measured with high accuracy.
  • a reflection characteristic measurement system is the reflection characteristic measurement system according to any one of the third to fifth aspects, wherein at least one of the one or more correction reference plates is used for correction.
  • a reference plate is disposed facing the internal space of the integrating sphere and has a principal surface having a virtual normal passing through the detection opening.
  • the reflection characteristic measurement system since the influence of the reflection of the inner wall of the integrating sphere is reduced in the detection result of one main surface of the correction reference plate, the reflection characteristic of light on the surface of the sample is reduced. Can be measured with higher accuracy.
  • a reflection characteristic measurement system is the reflection characteristic measurement system according to any one of the third to sixth aspects, wherein the integrating sphere includes a main body including the second opening, And an attachment portion that is attached to the main body portion and includes the first opening and the correction region.
  • the manufacture of the integrating sphere can be facilitated because the manufacture of the portion provided with the correction reference plate is facilitated.

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Abstract

L'objet de la présente invention est de fournir un système compact de mesure de caractéristiques de réflexion permettant de mesurer, avec une précision élevée, les caractéristiques de réflexion de la lumière sur une surface d'un échantillon. Pour ce faire, sur la base d'une première valeur de caractéristique en fonction des caractéristiques de réflexion de la lumière dans une région de correction disposée autour d'une première section d'ouverture dans une sphère d'intégration, qui est acquise en fonction d'un signal émis par une unité de détection tandis qu'un objet de référence est placé de manière à recouvrir une ouverture pour la mesure dans la sphère d'intégration, et d'une seconde valeur de caractéristique en fonction des caractéristiques de réflexion de la lumière dans la région de correction, qui est acquise en fonction d'un signal émis par l'unité de détection tandis qu'un échantillon est placé de manière à recouvrir l'ouverture pour la mesure, est définie une règle de conversion sur la base de laquelle la seconde valeur de caractéristique peut être convertie en la première valeur de caractéristique. Une distribution bidimensionnelle de caractéristiques de réflexion de l'échantillon dans une région bidimensionnelle, qui est acquise en fonction du signal émis par l'unité de détection lorsque l'échantillon est placé de manière à recouvrir l'ouverture pour la mesure, est corrigée par l'intermédiaire de la conversion basée sur la règle de conversion.
PCT/JP2016/084552 2015-12-04 2016-11-22 Système de mesure de caractéristiques de réflexion WO2017094559A1 (fr)

Applications Claiming Priority (2)

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