WO2017020525A1 - 一种液滴微操作机械手结构及其姿态控制方法 - Google Patents

一种液滴微操作机械手结构及其姿态控制方法 Download PDF

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Publication number
WO2017020525A1
WO2017020525A1 PCT/CN2015/100052 CN2015100052W WO2017020525A1 WO 2017020525 A1 WO2017020525 A1 WO 2017020525A1 CN 2015100052 W CN2015100052 W CN 2015100052W WO 2017020525 A1 WO2017020525 A1 WO 2017020525A1
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tungsten
micro
wire rod
tungsten wire
component
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PCT/CN2015/100052
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English (en)
French (fr)
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张勤
甘裕明
于腾
青山尚之
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华南理工大学
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Publication of WO2017020525A1 publication Critical patent/WO2017020525A1/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/08—Programme-controlled manipulators characterised by modular constructions

Definitions

  • the invention relates to the field of droplet micro-operation technology, in particular to a droplet micro-manipulation robot structure and an attitude control method thereof.
  • the components of electromechanical products are gradually becoming smaller and thinner.
  • the development trend of thinning is more and more demanding in assembly of micro-components, often involving the position and posture of micro-components. Adjustment and non-destructive operation, which puts high demands on the micromanipulator.
  • the operation and assembly of small components at home and abroad mainly include methods based on micro-gripper tools, vacuum adsorption methods, and surface tension methods.
  • the TAMIO of Nagoya University in Japan has developed a two-finger micromanipulator that mimics the mechanism of chopsticks holding objects, and realizes picking, moving, rotating and releasing operations on objects.
  • micro-clamp tool clamping method is relatively stable, the micro-scale imposes high requirements on the accuracy of the sensor, and the clamping operation inevitably causes the stress concentration of the clamping member to be deformed, causing some adverse effects on the component. At the same time, it is difficult to hold some ultra-thin parts.
  • Vacuum adsorption is the most widely used in micro-assembly. It absorbs tiny parts by negative pressure. However, this method is mainly applied to simple action situations where extraction and release are only required. It is difficult to adjust the posture of small parts. Adsorption surfaces are strictly required.
  • the vacuum adsorption method avoids the direct clamping of the object to the extrusion, but the flexibility of the mechanical operation is reduced, and only the movement operation of the component can be realized, and the adjustment of the posture in the three-dimensional space of the component cannot be realized.
  • Imperial College Richard of London proposed an adaptive micromechanical device based on surface tension, which controls the angle of rotation of the joint by the surface tension of the liquid at the joint of the micro-component; Kaiji of Tokyo Institute of Technology Sato proposed a method for adaptive positioning of tiny components driven by liquid surface tension. The influencing factors and improved methods of adaptive motion methods are discussed.
  • the patent can realize the change of the posture of tiny objects, but There are some problems.
  • the gap between the triangular link plates is too small, and the slight vibration of the motor causes the motion between the bars to interfere with each other.
  • the straightness of the tungsten wire rod is high and the processing is difficult; in terms of the control method,
  • the proposed method is limited to the fact that only attitude control can not achieve precise control of the target pose of the tiny components.
  • an aspect of the present invention provides a micromanipulator structure with a droplet, which controls the posture of a tungsten object by changing the posture of the tungsten rod, thereby realizing the position of the space of any shape of the small object. And the control of the attitude, the technical solution adopted is as follows.
  • a droplet micromanipulator structure comprising an injection assembly, a control assembly, a fixed bracket assembly, a drive assembly disposed on the fixed bracket assembly, an execution assembly coupled to the drive assembly and the injection assembly, the injection assembly a syringe, a pusher driving the syringe, and a hose connecting the syringe outlet;
  • the fixing bracket assembly includes a lower fixing plate having a supporting leg, and a motor positioning plate disposed above the lower fixing plate by the pillar, a thrust plate coupled to the motor positioning plate by a bolt and a nut;
  • the drive assembly includes six micro motors that are evenly vertically distributed in a stepped through hole of the motor positioning plate along a circular path, The tops of the six micromotors are pressed by the thrust plates, and the drive connecting plates are respectively disposed directly below the output shafts of the micromotors, and each of the transmission connecting plates is separated by a certain gap, and the transmission connecting plates are embedded with An external thread on the output shaft of the micro motor cooperates with
  • the capillary tube is connected to the hose at one end and the thrust plate and the motor through the other end.
  • the positioning plate, the central fixing hole of the lower fixing plate, and the guiding tube are directly connected to the outlet of the collecting sleeve, and the upper ends of the six tungsten wire rods are respectively connected to the transmission connecting plate, and the pointed lower end passes through the gap between the guiding tube and the capillary micro tube.
  • the tungsten rod Extending from the outlet of the collecting sleeve, the tungsten rod is tangent to the capillary microtube; the control assembly is respectively connected to the injection assembly and the driving assembly circuit; the six tungsten rods have the same diameter and a longer length It is about 140-160 mm, and has a diameter of 100 ⁇ m to 300 ⁇ m.
  • the lower end surface of the tungsten wire rod has a pointed shape, and the pointed height of the tungsten wire rod 11 is 0.5 mm to 1 mm; the radial offset of the tungsten wire rod when it is soft deformed
  • the ratio to the axial length is less than 2/80.
  • control component comprises a computer, a micro-droplet control device, a data acquisition conversion card, a driving circuit, and the micro-droplet control device is configured to control the action of the pusher 1 according to a control signal sent by the computer, the data collection The conversion card and the drive circuit send a control pulse to drive the micro motor according to the attitude parameter provided by the computer.
  • a lubricating groove communicating with the guiding tube is further disposed at a central through hole of the upper end surface of the lower fixing plate, and the lubricating groove is filled with lubricating oil permeable to the guiding tube, and the lubricating groove is provided for storing the lubricating oil It has a lubricating effect on the movement between the tungsten rods, reduces the mutual friction between the six tungsten rods, and improves the control precision.
  • the lubrication groove has a cylindrical shape with an inner diameter of 0.8 to 1.5 cm and a depth of 0.3 to 0.6 cm.
  • control assembly further includes a microscopic magnifying glass for observing and measuring the state of ensuring a flush state at the tip end of the lower end faces of the six tungsten filament rods before injecting the liquid into the capillary microtubes.
  • the invention also provides an attitude control method for a droplet micromanipulator structure, the technical scheme of which is as follows.
  • An attitude control method for a droplet micromanipulator structure comprising the steps of:
  • the computer sends a control signal to each micro motor according to the set target posture parameter, and controls the up and down movement amount of each tungsten wire rod to control the position of the tip end of the tungsten wire rod as the constraint point,
  • the attitude of the component will follow the change of the attitude of the tungsten rod and realize the self-balancing of the micro-component under the constraint of the attitude of the tungsten rod to realize the control of the posture of the micro-component, the target attitude being the inclination ⁇ degree or the rotation ⁇ angle
  • the step By controlling the amount of up and down movement of each tungsten wire rod to control the position of the tip end of the tungsten wire rod as a constraint point, the minute part adsorbed on the liquid droplet based on the surface tension of the droplet is much larger than the volume force due to the surface force, and the posture of the minute part
  • the control of the posture of the minute parts can be achieved by following the change of the posture of the tungsten rod
  • the step 2) specifically includes:
  • the plane in which the micro-component is defined is the XOY plane, and the XOY plane is the origin of the projection point of the capillary micro-tube (center) in the XOY plane.
  • Step 22) The coordinate value of the projection point of the tungsten wire rod tip on the XOY plane is substituted into the plane equation after the inclination ⁇ degree, and the target height values of the remaining tungsten wire rod tips on the XOY plane after the inclination ⁇ degree are obtained, and the micro motor control each The tungsten rod moves to the target height at a certain speed, so that the tiny parts are tilted by ⁇ degrees.
  • the step 2) specifically includes:
  • the micro-component when the micro-component is in the horizontal adsorption initial state, establish a spatial rectangular coordinate system in which the plane of the micro-component is the XOY plane and the direction of the XOY plane is Z-direction, and the space rectangular coordinate system is in the capillary micro-tube
  • the projection point in the XOY plane is the origin.
  • R 1 is a transformation matrix
  • R 1 [cos10 0 0 sin10 0 ; 0 1 0; - sin10 0 0 cos10 0 ]
  • P 1 [x1 y1 z1]
  • step 203 Substituting the coordinate values of the remaining tungsten filament rod tips obtained in step 202) on the XOY plane into the plane equation, and obtaining the target height values of the remaining tungsten filament rod tips on the plane after tilting 10 0 , the micro motor Control each tungsten rod to move to a target height at a certain speed, so that the tiny member is inclined by 10 0 around the Y axis;
  • step 205) Substituting the coordinate values of the remaining tungsten filament rod tips obtained in step 202) on the XOY plane into the plane equation, and obtaining the target height values on the planes of the remaining tungsten filament rod tips after rotating the ⁇ angle around the Z axis.
  • the micro motor controls each tungsten rod to move to a target height at a certain speed, so that the minute part is located at a spatial position when the normal vector is P 2 ;
  • the lowest position tungsten wire rod remains stationary, and the remaining tungsten wire rods are simultaneously moved to a position with the lowest position tungsten wire rod at a certain speed ratio, wherein the speed ratio is the tungsten wire to the lowest position tungsten wire.
  • step 22 When the micro motor controls each tungsten rod to move to a target height at a certain speed, each tungsten rod moves to a target height through a certain speed ratio, wherein the speed ratio is a tungsten filament rod to a stationary tungsten wire.
  • the speed ratio is a tungsten filament rod to a stationary tungsten wire. The ratio between the height values of the bars.
  • FIG. 1 is a schematic view showing the structure of a droplet micromanipulator with a lubrication groove according to the present invention.
  • Figure 2 is a schematic view of the tip of a tungsten wire rod adsorbing minute parts based on the surface tension of the droplet.
  • FIG 3 is a partial cross-sectional view showing the structure of a droplet micromanipulator with a lubrication groove according to the present invention.
  • Figure 4 is an enlarged schematic view of a portion B in Figure 3.
  • Figure 5 is a cross-sectional view taken along line A-A of Figure 3;
  • Figure 6 is an enlarged schematic view of a portion C in Figure 5.
  • Fig. 7 is a schematic view showing the principle of the structure control of the droplet micromanipulator with a lubrication groove.
  • Fig. 8 is a schematic view showing the process of controlling the tilting posture of the minute components.
  • FIG. 9 is a schematic diagram of a spatial rectangular coordinate system established before controlling the rotation of a small component posture.
  • Fig. 10 is a schematic view showing the process of controlling the rotation of the minute parts.
  • the figure shows: 1-propeller; 2-injector; 3-hose; 4-bolt; 5-nut; 6-capillary microtube; 7-thrust plate; 8-motor positioning plate; 10-drive connecting plate; 11-tungsten rod; 12-pillar; 13-lower fixing plate; 14-guide tube; 15-contracting sleeve; 16-support leg; 17-droplet; ; 19 - transmission nut; 20 - transmission nut guide rod; 21 - motor output shaft; 22 - lubrication groove.
  • a droplet micromanipulator structure includes an injection assembly, a control assembly, a fixing bracket assembly, a driving assembly disposed on the fixing bracket assembly, and the driving assembly and the injection assembly.
  • An attached actuator assembly comprising a syringe 2, a pusher 1 driving the syringe 2, and a hose 3 connecting the liquid outlet of the syringe 2;
  • the fixed bracket assembly including a lower fixed plate 13 having a support leg 16, Supporting a motor positioning plate 8 disposed above the lower fixing plate 13 by a strut 12, a thrust plate 7 connected above the motor positioning plate 8 by a bolt 5 and a nut;
  • the driving assembly includes six circular tracks a micromotor 9 uniformly distributed vertically in the stepped through hole of the motor positioning plate 8, the top of the six micromotors 9 being supported by a thrust plate 7 Pressed, a transmission connecting plate 10 is disposed directly below the output shaft of each of the micro-motors 9, and each of the transmission connecting plates 10 is separated by a certain gap (
  • the transmission connecting plate 10 is Embedding a transmission nut 19 that cooperates with an external thread on the output shaft of the micro motor 9;
  • the actuator assembly includes a guide tube 14 having an upper end connected to a central through hole of the lower fixing plate 13, and a sleeve disposed on the guide a collecting sleeve 15 at the lower end of the traveling tube 14, a capillary micro tube having a diameter of 500 ⁇ m, and six tungsten rods, the capillary tube 6 is connected to the hose 3 at one end, and the other end is passed through the thrust plate 7, the motor positioning plate 8, and the lower end.
  • the central through hole of the fixing plate 13 and the guiding tube 14 are directly connected to the outlet of the collecting sleeve 15.
  • the upper ends of the six tungsten wires are respectively connected to the transmission connecting plate 10, and the pointed lower end passes between the guiding tube 14 and the capillary micro tube 6. After the gap, a certain length extends from the outlet of the collecting sleeve 15 (see FIGS.
  • the six tungsten rods 11 have the same diameter, the length is about 140-160 mm, the diameter is 300 ⁇ m, and the lower end of the tungsten rod 11 In a pointed shape, the tip height of the tungsten wire rod 11 is 0.5 mm to 1 mm; the diameter of the tungsten wire rod when it is soft deformed The ratio of the offset to the axial length is less than 2/80, and the six tungsten filament rods can undergo slight compliant deformation, which can improve the processing difficulty and make the movement between the six transmission connecting plates not interdependent.
  • the control component includes a computer, a micro drip control device, a data acquisition conversion card, and a driving circuit, and the micro drip control device is configured to be issued according to a computer.
  • the control signal controls the action of the propeller 1, the data acquisition conversion card and the drive circuit send a control pulse to drive the micro motor 9 according to the attitude parameter provided by the computer, and the computer adjusts the number of pulses of each channel in the LabVIEW program and the sequence of turning on the motor.
  • the robot can be moved according to a specified motion strategy to achieve control of the target posture of the minute component 18.
  • the upper end surface of the lower fixing plate 13 is also provided with a lubrication groove 22 communicating with the guide pipe 14 at the center through hole position.
  • the lubrication groove 22 is filled with lubricating oil permeable to the guide pipe 14, and the lubricating groove is provided. 22 Storage of lubricating oil has a lubricating effect on the movement between the tungsten rods, reduces the mutual friction between the six tungsten rods, and improves the control precision.
  • the lubrication groove 22 has a cylindrical shape with an inner diameter of 0.8 to 1.5 cm and a depth of 0.3 to 0.6 cm.
  • control component further includes a microscopic magnifying glass for observing and measuring before the liquid is injected into the capillary microtube 6 to ensure that the lower end of the six tungsten filament rods 11 is flush with the tip end. .
  • An attitude control method for a droplet micromanipulator structure using the droplet micromanipulator structure described in the first embodiment, comprising the steps of:
  • Adjusting the posture of the minute member 18 according to the preset target posture, and the computer sends a control signal to each of the micro motors according to the set target posture parameter, and controls the amount of up and down movement of each tungsten wire rod 11 to control the tip end of the tungsten wire rod 11 as a constraint point.
  • Position, the attitude of the minute member 18 will closely follow the attitude change of the tungsten rod 11 and achieve self-balancing of the minute member 18 under the constraint of the attitude of the tungsten rod to achieve control of the posture of the minute member 18, which is about the Y-axis. Tilt 27.
  • the step 2) specifically includes:
  • the plane in which the minute member 18 is defined is the XOY plane, and the XOY plane is the origin of the projection point of the capillary tube 6 in the XOY plane.
  • Step 22) The coordinate value of the projection point of the tip end of the tungsten wire rod 11 on the XOY plane is substituted into the plane equation after the inclination ⁇ degree, and the target height value of the tip of each of the tungsten wire rods 11 on the XOY plane after the inclination of 27° is obtained, the micro motor 9 controlling each tungsten wire rod 11 to move to a target height at a certain speed, so that the minute member 18 is inclined by 27°, and the tilting process is as shown in FIG. 8.
  • the micro motor 9 is kept numbered as the d tungsten wire rod 11
  • the tungsten rods 11 numbered c and e were simultaneously raised by 0.1 mm
  • the tungsten rods 11 numbered b and f were simultaneously raised by 0.31 mm
  • the tungsten rods 11 numbered a were raised by 0.4 mm.
  • the micro-motor 9 controls each tungsten rod 11 to move to a target height at a certain speed
  • each tungsten rod 11 moves to a target height through a certain speed ratio at the same time.
  • the speed ratio is the ratio between the height values of the respective tungsten filament rods 11 to the stationary tungsten filament rods 11.
  • An attitude control method for a droplet micromanipulator structure comprising the steps of:
  • Adjusting the posture of the minute member 18 according to the preset target posture, and the computer sends a control signal to each of the micro motors according to the set target posture parameter, and controls the amount of up and down movement of each tungsten wire rod 11 to control the tip end of the tungsten wire rod 11 as a constraint point.
  • Position, the posture of the minute member 18 will closely follow the attitude change of the tungsten rod 11 and achieve self-balancing of the minute member 18 under the constraint of the attitude of the tungsten rod to achieve control of the posture of the minute member 18, which is about the Z-axis. Rotate 20°.
  • the step 2) specifically includes:
  • P 1 is the time number of tip height of each tungsten rod 11 to B f are respectively 0.0353mm, 0.1058mm, 0.1411mm, 0.1058mm, 0.0353mm, as shown in FIG 10b, the micro-motor 119 controls the respective tungsten rod Move to the target height at a certain speed, so that the minute member 18 is tilted by 10 0 around the Y axis;
  • the motor 9 controls each tungsten wire rod 11 to move to a target height at a certain speed, and the obtained posture P 2 is rotated by 20° around the Z axis with respect to the posture P 1 as shown by 10C;
  • the tungsten rod 11 with the lowest position number a remains stationary, and the remaining tungsten rods 11 are simultaneously moved to a position with the lowest position tungsten rod 11 at a certain speed ratio, wherein the speed ratio is the rod b to Height of rod a: height of rod c to rod a: The height of the rod f to the rod a, and the like. That is, the speed ratio is 0.0541:0.1203:0.1326:0.0786:0.0123, at which time the posture of the minute member 18 is rotated by an angle of 20° with respect to the original initial state, as shown in Fig. 10d.

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Abstract

一种液滴微操作机械手结构及其姿态控制方法，该机械手包括六个均匀分布的微型电机(9)，每个微型电机(9)输出轴下方设置有传动连接板(10)，各个传动连接板(10)之间相隔一定间隙，执行组件包括导行管(14)、收束套筒(15)、毛细微管(6)和六根钨丝棒。通过控制各钨丝棒的上下移动量，移动顺序，约束点的位置，改变基于表面张力吸附在液滴上的微小部件的姿态，实现对于微小部件姿态的精确控制，适用于任意形状微小物体的无损操作。

Description

一种液滴微操作机械手结构及其姿态控制方法
技术领域
本发明涉及的是液滴微操作技术领域，尤其涉及一种液滴微操作机械手结构及其姿态控制方法。
背景技术
随着机械电子产品的小型化，机电产品的元器件也逐渐趋向小型化，薄型化的发展趋势，在微型部件的装配中对装配精度要求越来越高，往往涉及到微型部件位置和姿态的调整和无损操作，这对微操作装置提出了很高的要求。目前国内外对于微小部件的操作与装配，主要有基于微夹持器工具的方法，真空吸附法，基于表面张力法等。在微夹持器方面如日本名古屋大学的TAMIO模仿筷子夹持物体的机理开发出一种双指微操作手，实现了对物体的拾取，移动，旋转和释放操作。虽然微夹持器工具夹持方法比较稳定，但是微尺度对于传感器的精度提出了很高的要求，而且夹持操作难免会导致夹持部件的应力集中产生变形，对部件造成一些不良的影响，同时难于夹持一些超薄的零部件。真空吸附法在微装配中应用最为广泛，通过负压的方式来吸持微小部件，但这种方法主要应用于只需提取与释放的简单动作场合，很难实现微小部件的姿态调整，而且对吸附表面有严格要求。真空吸附方法避免了直接夹持对物体带来的挤压，但是机械操作的灵活性降低，只能实现部件的移动操作，而无法实现部件三维空间内姿态的调整。Imperial College London的Richard提出基于表面张力的自适应微型机械装置，装置通过微型部件连接部位处的液体表面张力来控制连接部位的转动角度；东京工业大学的Kaiji Sato提出了一种液体表面张力驱动微小部件自适应定位方法，讨论了自适应运动方法的影响因素和改进方法，这些方法都是将表面张力应用到微小物体的姿态调整中，但只能调整特定的姿态，哈尔滨工业大学荣伟彬团队也利用了液滴的表面张力特性设计了一种运用于微操作的机械手，通过往微管内注入液体，在微管底端吸附微小物体实现了对微小物体的拾取与释放的操作。除了上述的方法之外，微小机器人在微装配中应用也越来越多，但由于系统的复杂性和应用环境的限制，目前还没有得到广泛的应用。本研究团队在前人研究的基础之上，在一种液滴微操作机械手及控制方法专利中提出了一种多棒型的液滴微操作机械手，该专利可以实现微小物体的姿态改变，但是存在一些问题，在机构方面，三角形链接板之间间隙过小，电机存在微小振动造成各棒之间的运动相互扰动，对钨丝棒的直线度要求高，加工难度大；在控制方法方面，提出的方法局限于仅能实现姿态控制不能实现对微小部件的目标姿态的精确控制。
发明内容
针对上述技术问题，本发明一方面提供了一种带液滴微操作机械手结构，该结构通过控制钨丝棒的姿态，改变吸附的微小物体的姿态，从而实现任何形状的微小物体空间范围内位置和姿态的控制，其采用的技术方案如下。
一种液滴微操作机械手结构，包括注射组件、控制组件、固定支架组件、设置在所述固定支架组件上的驱动组件、与所述驱动组件及注射组件相连接的执行组件，所述注射组件包括注射器、驱动所述注射器的推进器以及连接注射器出液口的软管；所述固定支架组件包括具有支撑腿的下固定板、由支柱支撑设置于所述下固定板上方的电机定位板、通过螺栓和螺母连接在所述电机定位板上方的止推板；所述驱动组件包括六个沿圆形轨迹均匀地竖直分布在所述电机定位板的阶梯通孔内的微型电机，所述六个微型电机顶部由止推板所压制，每个所述微型电机输出轴的正下方均设置有传动连接板，各个传动连接板之间相隔一定间隙，所述传动连接板内均嵌有与所述微型电机输出轴上的外螺纹相配合的传动螺母；所述执行组件包括上端连接于所述下固定板中心通孔的导行管、套设置于所述导行管下端的收束套筒、毛细微管、六根钨丝棒，所述毛细微管一端连接软管，另一端穿过止推板、电机定位板、下固定板中心通孔、导行管直达收束套筒出口，所述六根钨丝棒上端分别连接传动连接板，尖状下端穿过导行管与毛细微管之间的空隙后从收束套筒的出口伸出一定长度，所述钨丝棒与毛细微管相切；所述控制组件分别与所述注射组件和驱动组件电路连接；六根钨丝棒直径一致，长度较长约为140～160mm，直径为100μｍ～300μｍ，钨丝棒下端面呈尖状，钨丝棒11的尖状高度为0.5mm～1mm；所述钨丝棒发生柔顺变形时的径向偏移量与轴向长度之比小于2/80。
进一步地，所述控制组件包括计算机、微量滴液控制装置、数据采集转换卡、驱动电路，所述微量滴液控制装置用于根据计算机的发出的控制信号控制推进器1动作，所述数据采集转换卡及驱动电路根据计算机提供的姿态参数发出控制脉冲驱动微型电机。
进一步地，所述下固定板的上端面中心通孔位置还设置有与导行管相通的润滑槽，润滑槽内填充有可渗透至导行管内的润滑油，所带的润滑槽储存润滑油对钨丝棒之间的运动具有润滑作用，减小了六根钨丝棒之间的相互摩擦影响，提高控制精度。
进一步地，润滑槽呈圆柱形，内径为0.8～1.5cm,深度为0.3～0.6cm。
进一步地，所述的控制组件还包括显微放大镜，用于在往毛细微管注入液体之前观察和测量确保六个钨丝棒下端面尖状顶尖处平齐状态。
本发明还提供了一种液滴微操作机械手结构的姿态控制方法，其技术方案如下。
一种液滴微操作机械手结构的姿态控制方法，包括步骤：
1 ） 液滴吸附微小部件， 通过注射器向毛细微管中 注入液体在钨丝棒尖端面形成液滴，钨丝棒缓慢靠近微小部件，当液体接触到微小部件时，微小部件被吸附在钨丝棒下端呈水平状态，该步骤通过注射装置往毛细微管注入一定量的液体，在钨丝棒底端形成微小液滴，控制钨丝棒运动靠近微小部件以吸附起微小部件；
2 ）按预设目标姿态调整微小部件的姿态，计算机根据设定的目标姿态参数向各微型电机发出控制信号，控制各钨丝棒的上下移动量来控制钨丝棒尖端作为约束点的位置，微小部件的姿态将紧跟钨丝棒姿态变化并且在钨丝棒姿态的约束下实现微小部件的自平衡从而实现对于微小部件姿态的控制，所述目标姿态为倾斜β度或旋转θ角，该步骤通过控制各钨丝棒的上下移动量来控制钨丝棒尖端作为约束点的位置，基于液滴表面张力吸附在液滴上的微小部件由于所受到的表面力远大于体积力，微小部件的姿态将紧跟钨丝棒姿态变化并且在钨丝棒姿态的约束下实现微小部件的自平衡从而可以实现对于微小部件姿态的控制。
进一步地，当所述目标姿态为倾斜β度时，所述步骤2）具体包括：
21 ）在 微小部件处于被水平吸附初始状态时，定义微小部件所在平面为XOY平面，所述XOY平面以毛细微管（中心）在XOY平面中的投影点为原点，此时，微小部件法向量初始状态为P0=[0 0 1]，将微小部件绕Y轴倾斜角度β得到表征姿态的法向量P1=R1·P0 ，其中R1为变换矩阵，R1=[cosβ 0 sinβ ; 0 1 0; - sinβ 0 cosβ],求得倾斜后的微小部件18的法向量P1=[x1 y1 z1]；
22 ）求取各 钨丝棒尖端在XOY平面上投影点的坐标值，选取离微小部件最边缘的一根钨丝棒尖端保持不动，根据保持不动的钨丝棒尖端的坐标值和倾斜β度后通过该点的微小部件的法向量P1求得倾斜β度后的平面方程；
23 ）将步骤 22 ）求得的其余 钨丝棒尖端在XOY平面上投影点的坐标值代入倾斜β度后的平面方程中，得出其余各钨丝棒尖端在倾斜β度后XOY平面上的目标高度值，所述微型电机控制各钨丝棒以一定的速度运动至目标高度，使微小部件倾斜β度。
进一步地，当所述目标姿态为旋转 θ 角时，所述步骤2）具体包括：
201 ） 在 微小部件处于被水平吸附初始状态时，建立以微小部件所在平面为XOY平面、垂直所述XOY平面的方向为Z向的空间直角坐标系，所述空间直角坐标系以毛细微管在XOY平面中的投影点为原点，此时，微小部件法向量初始状态为P0=[0 0 1]，将微小部件绕Y轴倾斜角度100得到法向量P1=R1·P0 ，其中R1为变换矩阵，R1=[cos100 0 sin100 ; 0 1 0; - sin100 0 cos100],求得倾斜后的微小部件的法向量P1=[x1 y1 z1]；
202 ） 求取各 钨丝棒尖端在XOY平面上的投影点的坐标值，选取离微小部件最边缘的一根钨丝棒尖端保持不动，根据保持不动的钨丝棒尖端的坐标值和通过该点的微小部件的法向量P1求得平面方程；
203 ） 将步骤 202 ）求得的其余 钨丝棒尖端在XOY平面投影的坐标值代入平面方程中，得出其余各钨丝棒尖端在倾斜100后平面上的目标高度值，所述微型电机控制各钨丝棒以一定的速度运动至目标高度，使微小部件绕Y轴倾斜100；
204 ） 在姿态由 法向量P1表征 的情况下，若目标状态为绕 Z 轴旋转 θ 角，则在 法向量P1 的基础上得到法向量 P2=R2 ·P1，其中R2=[cos θ -sinθ 0 ; sinθ cos θ 0; 0 0 1], 根据步骤202）所述保持不动的钨丝棒尖端的坐标值和通过该的微小部件的法向量P2求得微小部件 绕 Z 轴旋转 θ 角 后的平面方程；
205 ） 将步骤 202 ）求得的其余 钨丝棒尖端在XOY平面投影的坐标值代入平面方程中，得出其余各钨丝棒尖端在 绕 Z 轴旋转 θ 角 后平面上的目标高度值，所述微型电机控制各钨丝棒以一定的速度运动至目标高度，使微小部件位于法向量为P2时的空间位置；
206 ）最后，位置最低的钨丝棒保持不动，其余钨丝棒以一定的速度比同时运动至与位置最低的钨丝棒平齐，其中该速度比为各钨丝棒到位置最低的钨丝棒的高度值之间的比值，此时，微小部件的姿态为相对与原初始水平状态绕Z轴旋转了θ角。
进一步地， 步骤 22 ）中 所述微型电机控制各钨丝棒以一定的速度运动至目标高度时，各钨丝棒通过一定的速度比同时运动至目标高度，其中该速度比为各钨丝棒到保持不动的钨丝棒的高度值之间的比值。
（1） 可以实现对超薄微小部件的姿态精确控制和实现无损操作。
（2） 利用钨丝棒的柔顺变形与及导行管和收束套筒的使用大大减小了加工难度。
（3） 可实现对微小元件的目标姿态的精确控制且控制方法简单。
（4） 结构简单、加工方便、适用范围广。
附图说明
图1为本发明的带有润滑槽的液滴微操作机械手结构整装示意图。
图2为钨丝棒尖端基于液滴表面张力吸附微小部件示意图。
图3为本发明的带有润滑槽的液滴微操作机械手结构局部剖视示意图。
图4为图3中B处放大示意图。
图5为图3中A-A向剖视示意图。
图6为图5中C处放大示意图。
图7为带有润滑槽的液滴微操作机械手结构控制原理示意图。
图8为控制微小部件倾斜姿态过程示意图。
图9为控制微小部件姿态旋转前建立的空间直角坐标系示意图。
图10为控制微小部件姿态旋转过程示意图。
图中所示为：1-推进器；2-注射器；3-软管；4-螺栓；5-螺母；6-毛细微管；7-止推板；8-电机定位板；9-微型电机；10-传动连接板；11-钨丝棒；12-支柱；13-下固定板；14-导行管；15-收束套筒；16-支撑腿；17-液滴；18-微小部件；19-传动螺母；20-传动螺母导行杆；21-电机输出轴；22-润滑槽。
具体实施方式
下面通过具体实施例对本发明的目的作进一步详细地描述，实施例不能在此一一赘述，但本下面结合附图和具体实施发明的实施方式并不因此限定于以下实施例。除非特别说明，本发明采用的材料和加工方法为本技术领域常规材料和加工方法。
实施例一
如图1至图7所示，一种液滴微操作机械手结构，包括注射组件、控制组件、固定支架组件、设置在所述固定支架组件上的驱动组件、与所述驱动组件及注射组件相连接的执行组件，所述注射组件包括注射器2、驱动所述注射器2的推进器1以及连接注射器2出液口的软管3；所述固定支架组件包括具有支撑腿16的下固定板13、由支柱12支撑设置于所述下固定板13上方的电机定位板8、通过螺栓5和螺母连接在所述电机定位板8上方的止推板7；所述驱动组件包括六个沿圆形轨迹均匀地竖直分布在所述电机定位板8的阶梯通孔内的微型电机9，所述六个微型电机9顶部由止推板7 所压制，每个所述微型电机9输出轴的正下方均设置有传动连接板10，各个传动连接板10之间相隔一定间隙(见图5、图6)，所述传动连接板10内均嵌有与所述微型电机9输出轴上的外螺纹相配合的传动螺母19；所述执行组件包括上端连接于所述下固定板13中心通孔的导行管14、套设置于所述导行管14下端的收束套筒15、直径500μｍ毛细微管6、六根钨丝棒，所述毛细微管6一端连接软管3，另一端穿过止推板7、电机定位板8、下固定板13中心通孔、导行管14直达收束套筒15出口，所述六根钨丝棒上端分别连接传动连接板10，尖状下端穿过导行管14与毛细微管6之间的空隙后从收束套筒15的出口伸出一定长度(见图3、图4)；六根钨丝棒11直径一致，长度较长约为140-160mm，直径为300μｍ，钨丝棒11下端面呈尖状，钨丝棒11的尖状高度为0.5mm～1mm；所述钨丝棒发生柔顺变形时的径向偏移量与轴向长度之比小于2/80，六根钨丝棒能发生微小的柔顺变形，对于加工难度能够起到很好的改善作用，使得六个传动连接板之间的运动不会相互影响。
具体来说，本实施例中，如图7所示，所述控制组件包括计算机、微量滴液控制装置、数据采集转换卡、驱动电路，所述微量滴液控制装置用于根据计算机的发出的控制信号控制推进器1动作，所述数据采集转换卡及驱动电路根据计算机提供的姿态参数发出控制脉冲驱动微型电机9，计算机通过调整LabVIEW程序中各通道脉冲的个数及电机的接通顺序，便可以使机械手按照指定运动策略移动，实现对微小元件18目标姿态的控制。
具体来说，本实施例中， 所述下固定板13的上端面中心通孔位置还设置有与导行管14相通的润滑槽22，润滑槽22内填充有可渗透至导行管14内的润滑油，所带的润滑槽22储存润滑油对钨丝棒之间的运动具有润滑作用，减小了六根钨丝棒之间的相互摩擦影响，提高控制精度。
具体来说，本实施例中，润滑槽22呈圆柱形，内径为0.8～1.5cm,深度为0.3～0.6cm。
具体来说，本实施例中，所述的控制组件还包括显微放大镜，用于在往毛细微管6注入液体之前观察和测量确保六个钨丝棒11下端面尖状顶尖处平齐状态。
实施例二
一种液滴微操作机械手结构的姿态控制方法，采用实施例一所述的液滴微操作机械手结构，包括步骤：
1 ） 液滴吸附微小部件18， 通过注射器向毛细微管 6 中 注入液体在钨丝棒尖端面形成液滴17，注入的液滴量约为10μl，钨丝棒11缓慢靠近微小部件，当液体接触到微小部件18时，微小部件18被吸附在钨丝棒11下端呈水平状态，此时，微小部件18、液滴和钨丝棒之间构成一液桥系统(见图2)，该步骤通过注射装置往毛细微管注入一定量的液体，在钨丝棒底端形成微小液滴，控制钨丝棒运动靠近微小部件以吸附起微小部件；
2 ）按预设目标姿态调整微小部件18的姿态，计算机根据设定的目标姿态参数向各微型电机发出控制信号，控制各钨丝棒11的上下移动量来控制钨丝棒11尖端作为约束点的位置，微小部件18的姿态将紧跟钨丝棒11姿态变化并且在钨丝棒姿态的约束下实现微小部件18的自平衡从而实现对于微小部件18姿态的控制，所述目标姿态为绕Y轴倾斜27。
具体而言，本实施例中，所述步骤2）具体包括：
21 ）在 微小部件18处于被水平吸附初始状态时，定义微小部件18所在平面为XOY平面，所述XOY平面以毛细微管6在XOY平面中的投影点为原点，此时，微小部件18法向量初始状态为P0=[0 0 1]，将微小部件绕Y轴倾斜角度27°得到表征姿态的法向量P1=R1·P0 ，其中R1为变换矩阵，R1=[cos27° 0 sin27°; 0 1 0; - sin27° 0 cos27°],求得倾斜后的微小部件18的法向量P1=[x1 y1 z1]；
22 ）求取各 钨丝棒11尖端在XOY平面上投影点的坐标值，选取离微小部件18最边缘的一根钨丝棒11尖端保持不动，根据保持不动的钨丝棒11尖端的坐标值和倾斜27°后通过该点的微小部件18的法向量P1求得倾斜27°后的平面方程；
23 ）将步骤 22 ）求得的其余 钨丝棒11尖端在XOY平面上投影点的坐标值代入倾斜β度后的平面方程中，得出其余各钨丝棒11尖端在倾斜27°后XOY平面上的目标高度值，所述微型电机9控制各钨丝棒11以一定的速度运动至目标高度，使微小部件18倾斜27°，倾斜过程如图8所示，根据所得的目标高度值，微型电机9保持编号为d钨丝棒11不动，编号为c、e的钨丝棒11同时上升0.1mm，编号为b、f的钨丝棒11同时上升0.31mm，编号为a的钨丝棒11上升0.4mm。同时，为了提高姿态控制精度，本实施例中，所述微型电机9控制各钨丝棒11以一定的速度运动至目标高度时，各钨丝棒11通过一定的速度比同时运动至目标高度，其中该速度比为各钨丝棒11到保持不动的钨丝棒11的高度值之间的比值。
实施例三
一种液滴微操作机械手结构的姿态控制方法，包括步骤：
1 ） 液滴吸附微小部件18， 通过注射器向毛细微管 6 中 注入液体在钨丝棒尖端面形成液滴17，注入的液滴量约为10μl，钨丝棒11缓慢靠近微小部件，当液体接触到微小部件18时，微小部件18被吸附在钨丝棒11下端呈水平状态，此时，微小部件18、液滴和钨丝棒之间构成一液桥系统(见图2)，该步骤通过注射装置往毛细微管注入一定量的液体，在钨丝棒底端形成微小液滴，控制钨丝棒运动靠近微小部件以吸附起微小部件；
2 ）按预设目标姿态调整微小部件18的姿态，计算机根据设定的目标姿态参数向各微型电机发出控制信号，控制各钨丝棒11的上下移动量来控制钨丝棒11尖端作为约束点的位置，微小部件18的姿态将紧跟钨丝棒11姿态变化并且在钨丝棒姿态的约束下实现微小部件18的自平衡从而实现对于微小部件18姿态的控制，所述目标姿态为绕Z轴旋转20°。
具体而言，本实施例中，所述步骤2）具体包括：
201 ）如图10a所示， 在 微小部件18处于被水平吸附初始状态时，建立以微小部件18所在平面为XOY平面、垂直所述XOY平面的方向为Z向的空间直角坐标系，所述空间直角坐标系以毛细微管6在XOY平面中的投影点为原点，此时，微小部件18法向量初始状态为P0=[0 0 1]，将微小部件绕Y轴倾斜角度100得到法向量P1=R1·P0 ，其中R1为变换矩阵，R1=[cos100 0 sin100; 0 1 0; - sin100 0 cos100],求得倾斜后的微小部件18的法向量P1=[ 0.1736; 0; 0.9848]；
202 ） 求取编号为 a 至 f 的各 钨丝棒11尖端在XOY平面上的投影点的坐标值分别为（0.4 ，0 ）、（0.2，-0.3464）、（-0.2，-0.3464）、（-0.4，0）、（-0.2，0.3464）、（0.2，0.3464），选取离微小部件18最边缘的编号为a的钨丝棒11尖端保持不动，则可以将点（0.4 0 0）代入方程0.1736·x+0·y+0.9848·z+D=0求得参数D= -0.0695,得到法向量为P1的平面方程为0.1736·x+0·y+0.9848·z-0.0695=0；
203 ） 将步骤 202 ）求得的其余 钨丝棒11尖端在XOY平面投影的的坐标值代入平面方程中，求得z=-(0.1736·x+0·y -0.0695)/0.9848可以求得法向量为P1时 编号为 b 至 f 的各 钨丝棒11尖端的高度分别为0.0353mm、0.1058mm、0.1411mm、0.1058mm、0.0353mm，如图10b，所述微型电机9控制各钨丝棒11以一定的速度运动至目标高度，使微小部件18绕Y轴倾斜100；
204 ）在姿态由法向量 P1 表征的情况下，目标状态为绕 Z 轴旋转 20 °，则在法向量 P1 的基础上得到法向量 P2=R2 · P1 ，其中 R2=[cos20 ° -sin20 ° 0 ; sin20 ° cos20 ° 0; 0 0 1], 求得 P2=[ 0.1632; 0.0594; 0.9848] ，若还是保持棒 a 不动，则可以将点（ 0.4 0 0 ）代入方程 0.1632 · x+0.0594 · y+0.9848 · z+D1=0 求得参数 D1=-0.0653 ，得到平面方程为 0.1632 · x+0.0594 · y+0.9848 · z-0.0653=0 ；
205 ） 将步骤 202 ）求得的其余 钨丝棒11尖端在XOY平面投影的坐标值代入平面方程中，编号为b、c、d、e、f的钨丝棒11的尖端在XOY平面中的投影坐标值（0.2，-0.3464）、（-0.2，-0.3464）、（-0.4，0）、（-0.2，0.3464）、（0.2，0.3464）分别将投影坐标代入z=-(0.1632·x+0.0594·y -0.0653)/0.9848，求得法向量为P2时 编号为 b 至 f 的各 钨丝棒11尖端的高度分别为0.0541mm、0.1203mm、0.1326mm、0.0786mm、 0.0123mm，所述微型电机9控制各钨丝棒11以一定的速度运动至目标高度，此时得到的姿态P2相对于姿态P1绕Z轴旋转了20°角，如10C所示；
206 ）最后，位置最低的编号为a的钨丝棒11保持不动，其余钨丝棒11以一定的速度比同时运动至与位置最低的钨丝棒11平齐，其中该速度比为棒b到棒a的高度:棒c到棒a的高度: 棒f到棒a的高度等。即速度比为0.0541:0.1203:0.1326:0.0786:0.0123，此时微小部件18的姿态为相对与原初始状态旋转了20°角，如图10d所示。
本发明的上述实施例仅仅是为清楚地说明本发明所作的举例，而并非是对本发明的实施方式的限定。对于所属领域的普通技术人员来说，在上述说明的基础上还可以做出其它不同形式的变化或变动。这里无需也无法对所有的实施方式予以穷举。凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等，均应包含在本发明权利要求的保护范围之内。

Claims (9)

  1. 一种液滴微操作机械手结构，其特征在于：包括注射组件、控制组件、固定支架组件、设置在所述固定支架组件上的驱动组件、与所述驱动组件及注射组件相连接的执行组件，所述注射组件包括注射器(2)、驱动所述注射器(2)的推进器(1)以及连接注射器(2)出液口的软管(3)；所述固定支架组件包括具有支撑腿(16)的下固定板(13)、由支柱(12)支撑设置于所述下固定板(13)上方的电机定位板(8)、通过螺栓(5)和螺母连接在所述电机定位板(8)上方的止推板(7)；所述驱动组件包括六个沿圆形轨迹均匀地竖直分布在所述电机定位板(8)的阶梯通孔内的微型电机(9)，所述六个微型电机(9)顶部由止推板(7) 所压制，每个所述微型电机(9)输出轴的正下方均设置有传动连接板(10)，各个传动连接板(10)之间相隔一定间隙，所述传动连接板(10)内均嵌有与所述微型电机(9)输出轴上的外螺纹相配合的传动螺母(19)；所述执行组件包括上端连接于所述下固定板(13)中心通孔的导行管(14)、套设置于所述导行管(14)下端的收束套筒(15)、毛细微管(6)、六根钨丝棒，所述毛细微管(6)一端连接软管(3)，另一端穿过止推板(7)、电机定位板(8)、下固定板(13)中心通孔、导行管(14)直达收束套筒(15)出口，所述六根钨丝棒(11)上端分别连接传动连接板(10)，尖状下端穿过导行管(14)与毛细微管(6)之间的空隙后从收束套筒(15)的出口伸出一定长度，所述钨丝棒(11)与毛细微管(6)相切；所述控制组件分别与所述注射组件和驱动组件电路连接；六根钨丝棒(11)直径一致，长度较长约为140～160mm，直径为100μｍ～300μｍ，钨丝棒(11)下端面呈尖状，钨丝棒(11)的尖状高度为0.5mm～1mm；所述钨丝棒发生柔顺变形时的径向偏移量与轴向长度之比小于2/80。
  2. 根据权利要求1所述的液滴微操作机械手结构，其特征在于:所述控制组件包括计算机、微量滴液控制装置、数据采集转换卡、驱动电路，所述微量滴液控制装置用于根据计算机的发出的控制信号控制推进器(1)动作，所述数据采集转换卡及驱动电路根据计算机提供的姿态参数发出控制脉冲驱动微型电机(9)。
  3. 根据权利要求1所述的液滴微操作机械手结构，其特征在于: 所述下固定板（(13)）的上端面中心通孔位置还设置有与导行管(14)相通的润滑槽(22)，润滑槽(22)内填充有可渗透至导行管(14)内的润滑油。
  4. 根据权利要求3所述的液滴微操作机械手结构，其特征在于: 润滑槽22呈圆柱形，内径为0.8～1.5cm,深度为0.3～0.6cm。
  5. 根据权利要求1所述的液滴微操作机械手结构，其特征在于:所述的控制组件还包括显微放大镜，用于在往毛细微管(6)注入液体之前观察和测量确保六个钨丝棒(11)下端面尖状顶尖处平齐状态。
  6. 一种权利要求1至5任一项所述的液滴微操作机械手结构的姿态控制方法，其特征在于，包括步骤：
    1）液滴吸附微小部件(18)，通过注射器向毛细微管(6)中注入液体在钨丝棒尖端面形成液滴(17)，钨丝棒(11)缓慢靠近微小部件，当液体接触到微小部件(18)时，微小部件(18)被吸附在钨丝棒(11)下端呈水平状态；
    2）按预设目标姿态调整微小部件(18)的姿态，计算机根据设定的目标姿态参数向各微型电机发出控制信号，控制各钨丝棒(11)的上下移动量来控制钨丝棒(11)尖端作为约束点的位置，微小部件(18)的姿态将紧跟钨丝棒(11)姿态变化并且在钨丝棒姿态的约束下实现微小部件(18)的自平衡从而实现对于微小部件(18)姿态的控制，所述目标姿态为倾斜β度或旋转θ角。
  7. 根据权利要求6所述的姿态控制方法，其特征在于，当所述目标姿态为倾斜β度时，所述步骤2）具体包括：
    21）在微小部件(18)处于被水平吸附初始状态时，定义微小部件(18)所在平面为XOY平面，所述XOY平面以毛细微管(6)在XOY平面中的投影点为原点，此时，微小部件(18)法向量初始状态为P0=[0 0 1]，将微小部件绕Y轴倾斜角度β得到表征姿态的法向量P1=R1•P0，其中R1为变换矩阵，R1=[cosβ 0 sinβ ; 0 1 0; - sinβ 0 cosβ],求得倾斜后的微小部件(18)的法向量P1=[x1 y1 z1]；
    22）求取各钨丝棒(11)尖端在XOY平面上投影点的坐标值，选取离微小部件(18)最边缘的一根钨丝棒(11)尖端保持不动，根据保持不动的钨丝棒(11)尖端的坐标值和倾斜β度后通过该点的微小部件(18)的法向量P1求得倾斜β度后的平面方程；
    23）将步骤22）求得的其余钨丝棒(11)尖端在XOY平面上投影点的坐标值代入倾斜β度后的平面方程中，得出其余各钨丝棒(11)尖端在倾斜β度后XOY平面上的目标高度值，所述微型电机(9)控制各钨丝棒(11)以一定的速度运动至目标高度，使微小部件(18)倾斜β度。
  8. 根据权利要求6所述的姿态控制方法，其特征在于，当所述目标姿态为旋转θ角时，所述步骤(2)）具体包括：
    201）在微小部件(18)处于被水平吸附初始状态时，建立以微小部件(18)所在平面为XOY平面、垂直所述XOY平面的方向为Z向的空间直角坐标系，所述空间直角坐标系以毛细微管(6)在XOY平面中的投影点为原点，此时，微小部件(18)法向量初始状态为P0=[0 0 1]，将微小部件绕Y轴倾斜角度100得到法向量P1=R1•P0，其中R1为变换矩阵，R1=[cos100 0 sin100 ; 0 1 0; - sin100 0 cos100],求得倾斜后的微小部件(18)的法向量P1=[x1 y1 z1]；
    202）求取各钨丝棒(11)尖端在XOY平面上的投影点的坐标值，选取离微小部件(18)最边缘的一根钨丝棒(11)尖端保持不动，根据保持不动的钨丝棒(11)尖端的坐标值和通过该点的微小部件(18)的法向量P1求得平面方程；
    203）将步骤202）求得的其余钨丝棒(11)尖端在XOY平面投影的坐标值代入平面方程中，得出其余各钨丝棒(11)尖端在倾斜100后平面上的目标高度值，所述微型电机(9)控制各钨丝棒(11)以一定的速度运动至目标高度，使微小部件(18)绕Y轴倾斜100；
    204）在姿态由法向量P1表征的情况下，若目标状态为绕Z轴旋转θ角，则在法向量P1的基础上得到法向量P2=R2•P1，其中R2=[cosθ -sinθ 0; sinθ cosθ 0; 0 0 1], 根据步骤202）所述保持不动的钨丝棒(11)尖端的坐标值和通过该点的微小部件(18)的法向量P2求得微小部件(18)绕Z轴旋转θ角后的平面方程；
    205）将步骤202）求得的其余钨丝棒(11)尖端在XOY平面投影的坐标值代入平面方程中，得出其余各钨丝棒(11)尖端在绕Z轴旋转θ角后平面上的目标高度值，所述微型电机(9)控制各钨丝棒(11)以一定的速度运动至目标高度，使微小部件(18)位于法向量为P2时的空间位置；
    206）最后，位置最低的钨丝棒(11)保持不动，其余钨丝棒(11)以一定的速度比同时运动至与位置最低的钨丝棒(11)平齐，其中该速度比为各钨丝棒(11)到位置最低的钨丝棒(11)的高度值之间的比值，此时，微小部件(18)的姿态为相对与原初始水平状态绕Z轴旋转了θ角。
  9. 根据权利要求7所述的姿态控制方法，其特征在于，步骤22）中所述微型电机(9)控制各钨丝棒(11)以一定的速度运动至目标高度时，各钨丝棒(11)通过一定的速度比同时运动至目标高度，其中该速度比为各钨丝棒(11)到保持不动的钨丝棒(11)的高度值之间的比值。
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