WO2017017820A1 - Procédé de fabrication d'un dispositif d'affichage à cristaux liquides - Google Patents

Procédé de fabrication d'un dispositif d'affichage à cristaux liquides Download PDF

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Publication number
WO2017017820A1
WO2017017820A1 PCT/JP2015/071548 JP2015071548W WO2017017820A1 WO 2017017820 A1 WO2017017820 A1 WO 2017017820A1 JP 2015071548 W JP2015071548 W JP 2015071548W WO 2017017820 A1 WO2017017820 A1 WO 2017017820A1
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Prior art keywords
liquid crystal
substrate
alignment film
manufacturing
display device
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PCT/JP2015/071548
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English (en)
Japanese (ja)
Inventor
知眞 仲谷
山崎　和幸
健太 竹内
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堺ディスプレイプロダクト株式会社
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Priority to PCT/JP2015/071548 priority Critical patent/WO2017017820A1/fr
Publication of WO2017017820A1 publication Critical patent/WO2017017820A1/fr

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers

Definitions

  • the present invention relates to a method of manufacturing a liquid crystal display device provided in a television receiver, a personal computer, or the like.
  • the liquid crystal display device is thin and has low power consumption.
  • a liquid crystal display device including a TFT substrate (active matrix substrate) including a switching element such as a thin film transistor (TFT) for each pixel has a high contrast ratio, excellent response characteristics, and high performance. It is suitably used for receivers, personal computers and the like.
  • a television receiver (hereinafter referred to as a TV receiver) including a liquid crystal display device includes, for example, a display module having a display panel that displays images on the front side, a backlight unit that irradiates light on the rear side of the display panel, and a display module.
  • the front cabinet which covers the peripheral part and the side part of the front of and the rear cabinet which covers the back of the display module.
  • FIG. 13 is a schematic cross-sectional view showing a conventional display panel.
  • the display panel 600 includes a TFT substrate 1 and a CF substrate (color filter substrate, counter substrate) 3 facing each other, a liquid crystal layer 4 provided as a display medium layer between the TFT substrate 1 and the CF substrate 3, and the TFT substrate 1. And a sealing material 5 provided in a frame shape for adhering the CF substrate 3 to each other and enclosing the liquid crystal layer 4 between the TFT substrate 1 and the CF substrate 3. The distance between the TFT substrate 1 and the CF substrate 3 is held constant by a spacer 41 arranged in the liquid crystal layer 4.
  • the TFT substrate 1 is formed by forming a pixel electrode 18 on an insulating substrate 10 such as a glass substrate, and covering the pixel electrode 18 with an alignment film 19 such as polyimide.
  • an alignment film 19 such as polyimide.
  • a plurality of color filters 31 are formed on an insulating substrate 30 such as a glass substrate, a topcoat film 32 is formed so as to cover the color filter 31, and the common electrode 33 and the topcoat film 32 are formed on the topcoat film 32.
  • the alignment film 34 is laminated in order.
  • the display panel 600 is formed by forming an alignment film 19 made of polyimide on the TFT substrate 1 and baking it, and performing an alignment treatment for imparting anisotropy to the alignment film 19. And obtained by pasting together.
  • the CF substrate 3 is formed by baking an alignment film 34 made of polyimide, and after performing an alignment process on the alignment film 34, a seal material 5 is applied in a frame shape, and a liquid crystal material is applied inside the seal material 5. Can be obtained.
  • FIG. 13 shows a state where bubbles 40 are generated in the liquid crystal layer 4.
  • an organic insulating film made of, for example, a photosensitive acrylic resin is formed (not shown), and the organic insulating film absorbs moisture during the above-described steps. During the bonding, water vapor may be released into the liquid crystal layer 4 to generate bubbles (portions where the liquid crystal is not aligned). When bubbles are generated in the liquid crystal layer 4, uneven gaps, bright spots, and black spots occur, resulting in a display defect.
  • Patent Document 1 the pattern of the alignment film 19 of the TFT substrate 1 and the pattern of the alignment film 34 of the CF substrate 3 are formed so as to be in contact with the surface of the sealing material 5 on the liquid crystal layer 4 side.
  • Patent Document 1 it is necessary to change the design of the display panel 600 and add equipment. Then, when the alignment film 19 or the alignment film 34 and the sealing material 5 overlap, the adhesive strength of the sealing material 5 may be reduced. Therefore, accuracy is required to form the pattern.
  • An object of the present invention is to provide a method of manufacturing a liquid crystal display device that can suppress the occurrence of display defects and can manufacture a liquid crystal display device having good display quality.
  • At least one substrate has an organic film containing an organic material
  • an alignment film is formed on each of the pair of substrates
  • the formed alignment films are baked, and the baked alignments
  • each substrate is vacuum degassed, and then the two substrates are bonded together with a liquid crystal material interposed between the two substrates. After that, the environmental humidity of the transport line transported for bonding to the other substrate deaerated in vacuum is controlled to 45.5% or less.
  • the organic film of the substrate absorbs moisture in the transfer line, and moisture is released into the liquid crystal material in the bonding process, thereby causing bubbles.
  • a liquid crystal display device having a good display quality can be manufactured with a high yield by suppressing the occurrence of defects in the display due to the portion where the liquid crystal is not aligned.
  • design changes such as changing the pattern of an alignment film like patent document 1, and it is possible to control environmental humidity using the existing air conditioner, it is new. There is no need to install any equipment. Like patent document 1, there is no possibility that the adhesive strength of a sealing material may fall.
  • the transport line and a second transport line for transporting the one substrate or the other substrate to perform other processing are provided in the same space.
  • the space including the transfer line is partitioned from the same space, and the environmental humidity of the space is controlled to 45.5% or less.
  • the organic film of the substrate absorbs moisture, and in the bonding step, it is suppressed that moisture is released into the liquid crystal material to generate bubbles, and a certain humidity is required.
  • the humidity is controlled to be 45% or more, so that the substrate is charged and electrostatic breakdown is prevented from occurring in elements such as TFTs, and the occurrence of display defects is further suppressed. Is done.
  • moisture absorption of the organic film of the substrate can be suppressed better.
  • At least one substrate has an organic film containing an organic material
  • an alignment film is formed on each of the pair of substrates, the formed alignment films are baked, and the baked alignments
  • both substrates are bonded together with a sealing material, a liquid crystal material is injected from an injection hole provided in the sealing material, and the injection hole is sealed.
  • the alignment film After the alignment film is baked, an alignment treatment is performed, and a transfer line for transferring the substrate to be bonded to the other substrate, the substrates are bonded, the liquid crystal material is injected from the injection hole, and the injection hole In order to seal, the environmental humidity with the transfer line for transferring both the substrates is controlled to 45.5% or less.
  • the organic film of the substrate absorbs moisture in the transfer line, the bonding step, the liquid crystal material injection step, and the injection hole In the sealing step, moisture is released into the liquid crystal material to generate bubbles, that is, a portion where the liquid crystal is not aligned, thereby preventing a display defect.
  • the method for manufacturing a liquid crystal display device according to the present invention is characterized in that the environmental humidity of the device arranged corresponding to the transport line is also controlled to 45.5% or less.
  • the organic film of the substrate is better suppressed from absorbing moisture.
  • the method for manufacturing a liquid crystal display device according to the present invention is characterized in that the environmental humidity is 45% or less.
  • the organic film of the substrate is better suppressed from absorbing moisture.
  • the method for manufacturing a liquid crystal display device according to the present invention is characterized in that the environmental humidity is 35% or more.
  • the lower limit of the environmental humidity is 35%, the natural discharge rate is increased, and the substrate is charged and electrostatic breakdown of elements such as TFTs is suppressed. Therefore, in the present invention, it is possible to achieve both suppression of the generation of bubbles in the liquid crystal layer and suppression of the generation of defects due to electrostatic breakdown of the element.
  • the environmental humidity of the transport line that is transported to be bonded to the other substrate is controlled to 45.5% or less.
  • the organic film absorbs moisture, and in the bonding process, moisture is released into the liquid crystal material, bubbles are generated, display defects are suppressed, and a liquid crystal display device having good display quality is manufactured with high yield. Can do. And it is not necessary to change the design, and it is possible to control the environmental humidity using an existing air conditioner, so that it is not necessary to newly install equipment.
  • FIG. 4 is a schematic cross-sectional view showing the display panel according to Embodiment 1.
  • FIG. 2 is a schematic plan view showing a pixel of a TFT substrate according to Embodiment 1.
  • FIG. It is typical sectional drawing which shows the part which the gate wiring and source wiring of a TFT substrate cross.
  • FIG. 6 is a schematic cross-sectional view showing a manufacturing area according to Embodiment 2.
  • FIG. It is typical sectional drawing which shows the manufacturing area from the vacuum deaeration apparatus which concerns on Embodiment 3 to a bonding apparatus.
  • FIG. 10 is a block diagram showing a configuration of a display panel manufacturing apparatus according to Embodiment 4; It is a flowchart which shows the process sequence of manufacture of a display panel. It is typical sectional drawing which shows the conventional display panel.
  • FIG. 1 is a schematic perspective view showing a television receiver (hereinafter, referred to as a TV receiver) 100 according to Embodiment 1 including the liquid crystal display device of the present invention
  • FIG. 2 is a display panel 6 according to Embodiment 1.
  • FIG. 3 is a schematic plan view showing a pixel of the TFT substrate 1 according to Embodiment 1
  • FIG. 4 is a schematic view showing a portion where the gate wiring 11 and the source wiring 12 of the TFT substrate 1 cross each other.
  • the TV receiver 100 includes a horizontally long display module 7 that includes a display panel 6 that displays video, a tuner 22 that receives broadcast waves from an antenna (not shown), and a decoder 23 that decodes encoded broadcast waves. Prepare. The TV receiver 100 decodes the broadcast wave received by the tuner 22 by the decoder 23 and displays an image on the display module 7 based on the decoded information. A stand 24 that supports the TV receiver 100 is provided below the TV receiver 100.
  • the display module 7 when the display module 7 is an edge light type, the display module 7 includes a display panel 3, for example, three optical sheets (hereinafter, not shown), a light guide plate, a reflection sheet, and a chassis.
  • the display module 7 is accommodated in a vertical posture in a front cabinet 8 and a rear cabinet 9 that are arranged in a vertical posture in the front-rear direction.
  • the front cabinet 8 is a rectangular frame that covers the peripheral edge of the display module 7 and has a rectangular opening in the center.
  • the front cabinet 8 is made of, for example, an aluminum material.
  • the rear cabinet 9 has a rectangular tray shape with the front side open, and is made of, for example, a plastic material.
  • the front cabinet 8 and the rear cabinet 9 may be made of other materials.
  • the vertical and horizontal dimensions of the front cabinet 8 and the rear cabinet 9 are substantially the same, and the peripheral portions of each other face each other.
  • the vertical and horizontal dimensions of the display panel 3 are slightly larger than the opening of the front cabinet 8, and the peripheral portion of the display panel 6 faces the inner edge portion of the front cabinet 8.
  • the display panel 6 adheres the TFT substrate 1 and the CF substrate 3 facing each other, the liquid crystal layer 4 provided as a display medium layer between the TFT substrate 1 and the CF substrate 3, and the TFT substrate 1 and the CF substrate 3 to each other.
  • a sealing material 5 provided in a frame shape is provided.
  • the distance between the TFT substrate 1 and the CF substrate 3 is held constant by a spacer 41 arranged in the liquid crystal layer 4.
  • the TFT substrate 1 is provided between a plurality of gate wirings 11 provided so as to extend in parallel to each other on an insulating substrate 10 such as a glass substrate, and the gate wirings.
  • a plurality of capacitor lines 13 extending in parallel with each other, a plurality of source lines 12 provided so as to extend in parallel with each other in a direction crossing each gate line, and each crossing portion of each gate line and each source line, that is,
  • the alignment film 19 is omitted.
  • an interlayer insulating film 14 is interposed between the gate wiring 11 formed on the insulating substrate 10 and the source wiring 12 at the intersection of the gate wiring 11 and the source wiring 12 of the TFT substrate 1. And the gate insulating film 15 is laminated
  • FIG. 4 shows the case where the interlayer insulating film 14 and the gate insulating film 15 are sequentially stacked, the interlayer insulating film 14 may not be formed.
  • the interlayer insulating film 14 is made of, for example, an SOG (spin-on glass) material or an organic material such as the above-described acrylic resin. Then, a passivation film 16 is formed so as to cover the source wiring 12, and an interlayer insulating film 17 made of an organic material such as acrylic resin is formed so as to cover the passivation film 16 and flatten it. A pixel electrode 18 is patterned on the interlayer insulating film 17.
  • a capacitor electrode 21 is formed on the gate insulating film 15 at a position corresponding to the capacitor wiring 13 (see FIG. 3).
  • a pixel electrode 18 is formed on the capacitor electrode 21.
  • a plurality of color filters 31 are formed on an insulating substrate 30 such as a glass substrate, and a top coat film 32 is formed so as to cover the color filters 31.
  • a common electrode 33 is formed on the topcoat film 32, and an alignment film 34 is formed on the common electrode 33 so as to face the alignment film 19.
  • the common electrode 33 may be directly formed on the color filter 31.
  • FIG. 5 is a block diagram showing the configuration of the manufacturing apparatus 200 for the display panel 6.
  • the one-dot chain line arrows indicate the transfer lines of the TFT substrate 1 (indicated by “TFT” in the figure) and the CF substrate 3 (indicated by “CF” in the figure).
  • wiring between the control device 60 and each device is omitted.
  • the manufacturing apparatus 200 of the display panel 6 includes an alignment film forming apparatus 51, a baking apparatus 52, an alignment processing apparatus 53, a sealing material applying apparatus 54, a vacuum degassing apparatus 55, a liquid crystal material dropping apparatus 56, a bonding apparatus 56, and a sealing material curing.
  • a device 58 and a control device 60 are provided.
  • the alignment film forming apparatus 51 applies polyimide, for example, to the TFT substrate 1 and the CF substrate 3 to form alignment films 19 and 34.
  • the baking apparatus 52 performs a baking process on each of the TFT substrate 1 and the CF substrate 3 on which the alignment film 19 is formed.
  • the alignment processing device 53 irradiates the alignment films 19 and 34 of the TFT substrate 1 and the CF substrate 3 subjected to the baking treatment with linearly polarized ultraviolet rays or performs a rubbing process on the surfaces of the alignment films 19 and 34 to align the alignment films 19 and 34. Anisotropy is generated in the films 19 and 34.
  • the rubbing process is performed using a rubbing cloth wound around a rubbing roller.
  • the sealing material application device 54 applies the sealing material 5 in a frame shape on the outer peripheral side of the alignment film 34 of the CF substrate 3 on which the alignment process has been performed.
  • the vacuum deaerator 55 performs a vacuum deaeration process on each of the TFT substrate 1 and the CF substrate 3.
  • the liquid crystal material dropping device 56 has a nozzle for dropping the liquid crystal material, and includes a liquid crystal dropping head (not shown) that is relatively movable in the surface direction of the CF substrate 3. The liquid crystal dropping head drops the liquid crystal material onto a plurality of portions inside the sealing material 5.
  • the bonding apparatus 57 includes two stages (not shown) that hold the TFT substrate 1 and the CF substrate 3 in a horizontal state in a vacuum chamber. 1 and the CF substrate 3 are bonded together.
  • the sealing material curing device 58 irradiates the sealing material 5 with ultraviolet rays when using an ultraviolet curable sealing material. When the sealing material 5 is not an ultraviolet curing type, the sealing material curing device 58 is configured to cure the sealing material 5.
  • the control device 60 includes an alignment film forming device 51, a baking device 52, an alignment processing device 53, a sealing material applying device 54, a vacuum degassing device 55, a liquid crystal material dropping device 56, a bonding device 57, and a sealing material curing device 58.
  • a central processing unit (CPU) that centrally controls each device and a storage unit that stores manufacturing information, various programs, and the like related to the manufacturing of the display panel 6 are provided.
  • the TFT substrate 1 and the CF substrate 3 are transferred between the devices by a transfer device such as a conveyor or a robot.
  • FIG. 6 is a flowchart showing a processing procedure for manufacturing the display panel 6.
  • the control device 60 patterns the TFT 20, the pixel electrode 18 and the like on the insulating substrate 10, and then forms the alignment film 19 using, for example, polyimide so as to cover the pixel electrode 18 by the alignment film forming device 51 (S1). ).
  • the controller 60 uses the firing device 52 to fire the alignment film 19 at 200 ° C. for 1 hour (S2).
  • the control device 60 performs an alignment process on the baked alignment film 19 (S3). As described above, the control device 60 irradiates linearly polarized ultraviolet rays onto the alignment film 19 by the alignment processing device 53 and selectively reacts the polymer chains in the polarization direction to generate anisotropy, thereby aligning the liquid crystal. The surface of the alignment film 19 is rubbed, the polymer chain on the surface of the alignment film 19 is crushed in a certain direction to cause anisotropy on the alignment film 19, and the alignment direction of the liquid crystal molecules is changed. Stipulate.
  • control device 60 transports the TFT substrate 1 to the vacuum degassing device 55 and performs vacuum degassing (S4), and then transports it to the bonding device 57 and bonds it to the CF substrate 2 under vacuum (S5). ).
  • the CF substrate 2 is manufactured as follows.
  • the control device 60 forms the color filter 31, the black matrix, the common electrode 34, and the like on the insulating substrate 30, and then uses the alignment film forming device 51 to form the alignment film 34 on the common electrode 34 using, for example, polyimide. It is formed (S11), and is baked at 200 ° C. for 1 hour by the baking device 52 (S12).
  • the control device 60 performs alignment processing on the baked alignment film 34 by the alignment processing device 53 (S13). In the alignment treatment, the alignment film 34 is irradiated with linearly polarized ultraviolet light on the polymer film, or the surface of the alignment film 34 is rubbed to cause anisotropy in the polymer film.
  • the control device 60 applies the sealing material 5 having adhesiveness in a frame shape to the inside of the peripheral edge portion of the CF substrate 3 by the sealing material application device 54.
  • the sealing material is patterned by a method such as application with a dispenser, and the sealing material is cured by baking to form the frame-shaped sealing material 5 (S14).
  • the control device 60 performs vacuum deaeration on the CF substrate 3 on which the sealing material is formed by the vacuum deaeration device 55 (S15), and thereafter, the liquid crystal material is placed inside the sealing material 5 by the liquid crystal material dropping device 56. It is dropped (S16).
  • the liquid crystal material is dropped by moving the liquid crystal dropping head of the liquid crystal material dropping device 56 over the entire surface of the TFT substrate 1.
  • the control device 60 conveys the CF substrate 3 onto which the liquid crystal material has been dropped to the bonding device 57, and advances the process to S5.
  • the control device 60 conveys the bonded TFT substrate 1 and CF substrate 3 to the seal material curing device 58, and irradiates the seal material 5 with, for example, ultraviolet rays to cure (S6).
  • FIG. 7 is a schematic cross-sectional view showing the manufacturing area 25 from the vacuum degassing device 55 to the bonding device 57.
  • the TFT substrate 1 is conveyed by the conveying device 27 from the back side to the near side of the drawing.
  • the control device 60 controls at least the environmental humidity of the transfer line in the manufacturing area 25 to 45.5% or less by the air conditioner 26.
  • the environmental humidity of the vacuum degassing device 55 and the bonding device 57 is preferably controlled to 45.5% or less.
  • the environmental humidity of the transfer line is more preferably 45% or less.
  • the organic material such as the interlayer insulating film 17 included in the TFT substrate 1 absorbs moisture in the transfer line, and the liquid crystal layer 4 at any time after bonding. It is possible to suppress the occurrence of defects in the display due to the release of moisture and the generation of bubbles, that is, the liquid crystal is not aligned. Therefore, in the present embodiment, the occurrence of display defects is suppressed, and a liquid crystal display device having a good display quality can be manufactured with a high yield. And in this Embodiment, it is not necessary to perform design changes, such as changing the pattern of an alignment film like patent document 1, and it is possible to control environmental humidity using the existing air conditioner 26. FIG. So there is no need to install new equipment.
  • the environmental humidity of the transfer line from the baking device 52 to the vacuum deaeration device 55 it is preferable to control the environmental humidity of the transfer line from the baking device 52 to the vacuum deaeration device 55 to 45.5% or less. It is preferable to control the environmental humidity of the devices on both ends of each conveyance line to 45.5% or less.
  • the environmental humidity is more preferably 45% or less. Thereby, generation
  • FIG. 8 is a graph showing the results of examining the relationship between the environmental humidity of the transfer line between the vacuum degassing device 55 and the bonding device 57 and the bubble generation rate when the 60-type liquid crystal display device 100 is manufactured. is there.
  • the horizontal axis represents the environmental humidity (%) of the transfer line, and the vertical axis represents the bubble generation rate (%). From FIG. 8, when the environmental humidity of the transfer line is 45.5% or less, the bubble generation rate is about 0.5% or less, and when the environmental humidity is 45%, the bubble generation rate is about 0.4%. It is as follows and it can be seen that the bubbles are well suppressed.
  • FIG. FIG. 9 is a schematic cross-sectional view showing the manufacturing area 28 according to the second embodiment.
  • the manufacturing area 28 includes a manufacturing area 29 from the vacuum degassing device 55 to the bonding device 57.
  • the TFT substrate 1 is transported by the transport device 43 from the back side to the near side of the paper surface by the control device 60, and the environmental humidity is 45.degree. It is controlled to 5% or less.
  • the environmental humidity is preferably 45% or less.
  • the control device 60 controls the environmental humidity of this transport line to 45% or more by the air conditioner 44. It is preferable to control the environmental humidity of the devices on both ends of the transport line to 45% or more.
  • the interlayer insulating film 17 of the TFT substrate 1 absorbs moisture, moisture is released into the liquid crystal layer 4, and bubbles are generated. Occurrence, that is, the occurrence of defects in the display due to the portion where the liquid crystal is not aligned is suppressed.
  • the environmental humidity is controlled to be 45% or more. Therefore, the TFT substrate 1 is charged and the TFT 20 may be electrostatically damaged. It is prevented.
  • the alignment treatment is performed by rubbing.
  • the environmental humidity in the manufacturing area 29 is 45.5% or less.
  • the bubble generation rate was about 0.5% or less, and when the environmental humidity was 45%, it was confirmed that the bubble generation rate was about 0.4% or less.
  • FIG. 10 is a schematic cross-sectional view showing the manufacturing area 46 from the vacuum degassing device 55 to the bonding device 57.
  • the TFT substrate 1 is transported from the back side to the near side of the paper by the transport device 48.
  • the control device 60 controls the environmental humidity of the transfer line between the vacuum deaeration device 55 and the bonding device 57 in the manufacturing area 46 to 35% or more and 45.5% or less by the air conditioner 47.
  • the environmental humidity of the vacuum degassing device 55 and the bonding device 57 is also preferably controlled to 35% or more and 45.5% or less.
  • the upper limit of environmental humidity is preferably 45% or less.
  • the interlayer insulating film 17 of the TFT substrate 1 absorbs moisture in the transfer line, and moisture is released into the liquid crystal layer 4 to generate bubbles. It becomes a part which does not orientate and it is suppressed that a malfunction arises in a display. Since the lower limit of the environmental humidity is 35%, the natural discharge rate is increased and the occurrence of electrostatic breakdown of the TFT 20 is suppressed. As described above, in the present embodiment, the suppression of the generation of bubbles in the liquid crystal layer 4 and the suppression of the generation of defects due to electrostatic breakdown of the TFT 20 are compatible.
  • the environmental humidity of the transfer line from the baking device 52 to the vacuum deaeration device 55 is preferably controlled to 35% or more and 45.5% or less. It is preferable to control the environmental humidity of the apparatuses on both ends of each conveyance line to 35% or more and 45.5% or less.
  • the upper limit is more preferably 45% or less.
  • FIG. 11 is a block diagram illustrating a configuration of the manufacturing apparatus 300 for the display panel 6.
  • the one-dot chain line arrows indicate the transfer lines of the TFT substrate 1 (indicated by “TFT” in the figure) and the CF substrate 3 (indicated by “CF” in the figure).
  • wiring between the control device 60 and each device is omitted.
  • the manufacturing apparatus 300 of the display panel 6 includes an alignment film forming device 61, a baking device 62, an alignment processing device 63, a sealing material applying device 64, a bonding device 65, a sealing material curing device 66, a liquid crystal material injecting device 67, and a sealing device. 68 and a control device 60.
  • Each substrate may be vacuum degassed before the TFT substrate 1 and the CF substrate 3 are bonded together, and in this case, a vacuum degassing device is further provided.
  • the alignment film forming device 61 applies, for example, polyimide or the like to the TFT substrate 1 and the CF substrate 3 to form alignment films 19 and 34.
  • the firing device 62 performs a firing process on each of the TFT substrate 1 and the CF substrate 3 on which the alignment film is formed.
  • the alignment processing device 63 irradiates the alignment films 19 and 34 of the TFT substrate 1 and the CF substrate 3 subjected to the baking treatment with linearly polarized ultraviolet rays or performs a rubbing process on the surfaces of the alignment films 19 and 34 to align the alignment films 19 and 34. Anisotropy is generated in the films 19 and 34.
  • the sealing material application device 64 applies the sealing material 5 in a frame shape on the outer peripheral side of the alignment film 34 of the CF substrate 3 on which the alignment process has been performed.
  • the bonding apparatus 65 includes two stages (not shown) that hold the TFT substrate 1 and the CF substrate 3 in a horizontal state in a vacuum chamber. 1 and the CF substrate 3 are bonded together.
  • the sealing material curing device 66 irradiates the sealing material 5 with ultraviolet rays when using an ultraviolet curing sealing material. When the sealing material 5 is not an ultraviolet curing type, the sealing material curing device 58 is configured to cure the sealing material 5.
  • the sealing material 5 is provided with an injection hole for injecting a liquid crystal material.
  • the liquid crystal material injecting device 67 includes a vacuum chamber, the bonded TFT substrate 1 and CF substrate 3 and the liquid crystal material are put into the vacuum chamber, the inside of the vacuum chamber is evacuated, and the injection hole is immersed in the liquid crystal material. The liquid crystal material is sealed between the two substrates by returning the inside to atmospheric pressure.
  • the sealing device 68 seals the injection hole.
  • the control device 60 includes an alignment film forming device 61, a baking device 62, an alignment processing device 63, a sealing material applying device 64, a bonding device 65, a sealing material curing device 66, a liquid crystal material injecting device 67, and a sealing device 68.
  • a CPU that centrally controls the apparatus and a storage unit that stores manufacturing information relating to the manufacture of the display panel 6, various programs, and the like are provided.
  • wiring between the control device 60 and each device is omitted.
  • the TFT substrate 1 and the CF substrate 3 are transferred between the devices by a transfer device such as a conveyor or a robot.
  • FIG. 12 is a flowchart showing a processing procedure for manufacturing the display panel 6.
  • the control device 60 after patterning the TFT 20, the pixel electrode 18 and the like on the insulating substrate 10, forms the alignment film 19 by using the alignment film forming device 61 using polyimide or the like so as to cover the pixel electrode 18 (S1). ).
  • the control device 60 uses the firing device 62 to fire the alignment film 19 at 200 ° C. for 1 hour (S2).
  • the control device 60 performs an alignment process on the baked alignment film 19 (S3). Whether the control device 60 irradiates the alignment film 19 with the linearly polarized ultraviolet light by the alignment processing device 63 and selectively reacts the polymer chain in the polarization direction to generate anisotropy to give the liquid crystal alignment ability. Alternatively, the surface of the alignment film 19 is rubbed, and the polymer chain on the surface of the alignment film 19 is crushed in a certain direction to cause anisotropy on the alignment film 19, thereby defining the alignment direction of the liquid crystal molecules. Then, the control device 60 conveys the TFT substrate 1 to the bonding device 65 and bonds it to the CF substrate 2 under vacuum (S7).
  • the CF substrate 2 is manufactured as follows.
  • the control device 60 forms the color filter 31, the black matrix, the common electrode 34, and the like on the insulating substrate 30, and then uses the alignment film forming device 61 to form the alignment film 34 on the common electrode 34 using, for example, polyimide. It is formed (S11), and is baked at 200 ° C. for 1 hour by the baking device 62 (S12).
  • the control device 60 performs an alignment process on the baked alignment film 34 (S13). In the alignment treatment, the alignment film 34 is irradiated with linearly polarized ultraviolet light on the polymer film, or the surface of the alignment film 34 is rubbed to cause anisotropy in the polymer film.
  • the control device 60 applies the sealing material 5 having adhesiveness in a frame shape to the inside of the peripheral edge portion of the CF substrate 3 by the sealing material application device 64.
  • the sealing material is patterned by a method such as application with a dispenser, and the sealing material is cured by baking to form the frame-shaped sealing material 5 (S14).
  • the control apparatus 60 conveys the CF board
  • the control device 60 conveys the TFT substrate 1 and the CF substrate 3 bonded together by the bonding device 65 to the sealing material curing device 66, and irradiates the sealing material 5 with, for example, ultraviolet rays to cure (S8).
  • the control device 60 conveys both substrates to the liquid crystal material injecting device 67, and injects the liquid crystal material from the injection hole of the sealing material 5 between the substrates by the liquid crystal material injecting device 67 (S9).
  • the control device 60 seals the injection hole with the sealing device 68 (S10).
  • the environmental humidity of each transport line when transporting is controlled to 45.5% or less. It is preferable to control the environmental humidity of the devices on both ends of each conveyance line to 45.5% or less.
  • the environmental humidity is preferably 45% or less.
  • the interlayer insulating film 17 of the TFT substrate 1 absorbs moisture in the transfer line, moisture is released into the liquid crystal layer 4, and bubbles are generated. It becomes a part where the liquid crystal is not aligned, and the occurrence of defects in display is suppressed.
  • the present invention is not limited to the contents of Embodiments 1 to 4 described above, and various modifications can be made within the scope of the claims. In other words, embodiments obtained by combining technical means appropriately modified within the scope of the claims are also included in the technical scope of the present invention.
  • the liquid crystal display device is not limited to the case where it is provided in a TV receiver.
  • the control of the environmental humidity is not limited to the case where the control device 60 performs, but may be performed by an operator. And it is not limited to controlling the environmental humidity of the conveyance line of the TFT substrate 1.

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mathematical Physics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Liquid Crystal (AREA)

Abstract

L'invention a trait à un procédé de fabrication d'un dispositif d'affichage à cristaux liquides, qui permet de fabriquer un dispositif d'affichage à cristaux liquides présentant une bonne qualité d'affichage sans qu'il soit nécessaire de modifier la conception d'un panneau d'affichage ou d'utiliser un équipement supplémentaire, l'apparition de bulles d'air qui peut se produire dans une couche de cristaux liquides lorsqu'un film organique sur le substrat absorbe l'humidité étant réduite au minimum, et l'apparition d'une défaillance d'affichage étant ainsi réduite au minimum. Le procédé de fabrication d'un dispositif d'affichage à cristaux liquides comprend : la formation d'un film d'alignement pour chaque substrat d'une paire de substrats, au moins un substrat ayant un film organique qui contient un matériau organique (S1) ; la cuisson de chaque film d'alignement formé (S2) ; l'alignement de chaque film d'alignement cuit (S3) ; la désaération de chaque substrat à l'aide d'un vide (S4) ; puis la liaison des deux substrats avec un matériau à cristaux liquides placé entre ces deux substrats (S5). L'humidité ambiante est régulée de manière à être inférieure ou égale à 45,5 % dans une ligne de transfert utilisée pour transférer un substrat désaéré devant être lié à l'autre substrat désaéré.
PCT/JP2015/071548 2015-07-29 2015-07-29 Procédé de fabrication d'un dispositif d'affichage à cristaux liquides WO2017017820A1 (fr)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112731697A (zh) * 2021-01-04 2021-04-30 河北光兴半导体技术有限公司 液晶显示面板的加工系统及其加工方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003107481A (ja) * 2001-10-01 2003-04-09 Fujitsu Display Technologies Corp 液晶表示パネルの製造方法
JP2006201236A (ja) * 2005-01-18 2006-08-03 Seiko Epson Corp 液晶装置の製造方法、液晶装置の製造装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003107481A (ja) * 2001-10-01 2003-04-09 Fujitsu Display Technologies Corp 液晶表示パネルの製造方法
JP2006201236A (ja) * 2005-01-18 2006-08-03 Seiko Epson Corp 液晶装置の製造方法、液晶装置の製造装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112731697A (zh) * 2021-01-04 2021-04-30 河北光兴半导体技术有限公司 液晶显示面板的加工系统及其加工方法
CN112731697B (zh) * 2021-01-04 2022-09-27 河北光兴半导体技术有限公司 液晶显示面板的加工系统及其加工方法

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