WO2016192290A1 - 涂布系统和涂布方法 - Google Patents

涂布系统和涂布方法 Download PDF

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Publication number
WO2016192290A1
WO2016192290A1 PCT/CN2015/093226 CN2015093226W WO2016192290A1 WO 2016192290 A1 WO2016192290 A1 WO 2016192290A1 CN 2015093226 W CN2015093226 W CN 2015093226W WO 2016192290 A1 WO2016192290 A1 WO 2016192290A1
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WO
WIPO (PCT)
Prior art keywords
coating
film thickness
substrate
illumination light
coating material
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PCT/CN2015/093226
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English (en)
French (fr)
Inventor
张晓妹
王志强
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京东方科技集团股份有限公司
合肥京东方光电科技有限公司
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Application filed by 京东方科技集团股份有限公司, 合肥京东方光电科技有限公司 filed Critical 京东方科技集团股份有限公司
Priority to US15/127,692 priority Critical patent/US10201828B2/en
Publication of WO2016192290A1 publication Critical patent/WO2016192290A1/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1005—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material already applied to the surface, e.g. coating thickness, weight or pattern
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C21/00—Accessories or implements for use in connection with applying liquids or other fluent materials to surfaces, not provided for in groups B05C1/00 - B05C19/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0254—Coating heads with slot-shaped outlet

Definitions

  • Embodiments of the present disclosure relate to a coating system and a coating method.
  • the coating process is an important process.
  • the function of the coating process is to uniformly coat the coating material on the surface of the substrate to form a film on the surface of the substrate. Since the film thickness of the film affects the quality of the product, the manufacturing process of the display device requires a particularly high thickness of the film.
  • the uniformity of the coating determines the pros and cons of the coating process, and the uniformity of the coating affects the film thickness of the film.
  • Embodiments of the present disclosure provide a coating system including: a coating apparatus, a detecting device, and an adjusting device; wherein the coating device is for applying a coating material onto a substrate; the detecting device is for When the coating device coats the coating material, detecting a film thickness of the coating material at a measuring point and transmitting the detected film thickness to the adjusting device; the adjusting device is used according to the adjusting device The film thickness selectively generates a set feed speed, and the set feed speed is transmitted to the coating apparatus when the set feed speed is generated.
  • Another embodiment of the present disclosure provides a coating method comprising: detecting a film thickness of the coating material at a measuring point by using a detecting device when the coating device applies the coating material on the substrate, and detecting The film thickness is sent to the adjusting device; the adjusting device selectively generates the set feed speed according to the film thickness, and sends the set feed speed to the coating if the set feed speed is generated
  • the cloth apparatus is such that the coating apparatus coats the coating material on the substrate at the set feed rate.
  • FIG. 1 is a schematic structural view of a coating system according to Embodiment 1 of the present disclosure.
  • Figure 2 is a plan view of the coating system of Figure 1;
  • FIG. 3 is a flow chart of a coating method according to Embodiment 2 of the present disclosure.
  • Embodiments of the present disclosure provide a coating system and a coating method capable of realizing adjustment of a film thickness of a coating material in real time.
  • FIG. 1 is a schematic structural view of a coating system according to Embodiment 1 of the present disclosure
  • FIG. 2 is a schematic plan view of the coating system of FIG. 1.
  • the coating system includes: coating equipment 1.
  • the coating device 1 is for applying a coating material 40 onto the substrate 5;
  • the detecting device 2 is for detecting the film thickness of the coating material at a measuring point when the coating device 40 is applied with the coating device 1, and will detect The film thickness is sent to the adjusting device 3;
  • the adjusting device 3 is for selectively generating the set feed speed according to the film thickness and transmitting the set feed speed to the coating device 1 when the set feed speed is generated. .
  • the detecting device 2 detects the film thickness of the coating material at a certain measuring point in real time during the coating process, wherein the position of the certain measuring point can be set in advance.
  • the adjusting device 3 is capable of calculating a set feed speed based on the detected film thickness of the coating material at the measurement point, and transmitting the set feed speed to the coating apparatus 1 for the coating apparatus 1 to feed according to the setting.
  • the coating process is performed at a speed to achieve control of the film thickness of the subsequent coating material.
  • the detecting device 2 can continue the detection of the film thickness of the next measurement point, realizing a real-time and continuous adjustment of the film thickness in the single coating process.
  • the distance between each measuring point can be set according to the production needs.
  • the detecting device 2 includes a light source 21, a transmitting end 22, a receiving end 23 and a signal processing module 24.
  • the transmitting end 22 and the receiving end 23 are respectively disposed on opposite sides of the substrate and disposed opposite to each other.
  • the light source 21 is for supplying illumination light to the emission end 22; the emission end 22 is for emitting illumination light to the substrate 5 to transmit illumination light to the substrate 5 and the coating material 40; and the receiving end 23 is for receiving the transmission substrate 5 and coating
  • the light of the material 40 is irradiated and the received illumination light is sent to the signal processing module 24; the signal processing module 24 is configured to generate a film thickness based on the received illumination light.
  • the light source 21 can be connected to the transmitting end 22 through an optical fiber.
  • signal processing module 24 includes spectrometer 241 and first computing module 242.
  • the spectrometer 241 is configured to convert the received illumination light into a spectral line;
  • the first calculation module 242 is configured to calculate a spectral line to generate a film thickness.
  • the film thickness can be calculated by a calculation method in the related art, and will not be specifically described herein.
  • the spectrometer 241 can be connected to the receiving end 23 via an optical fiber, for example.
  • the coating apparatus 1 includes a stage 11, a pump 12, and a nozzle 13.
  • the nozzle 13 is configured, for example, to spray the coating material 40 toward the platform.
  • the nozzle 13 is located above the substrate 5, and the hollow 11 is provided in the platform 11, and the hollow structure 111 is, for example, hollow.
  • the transmitting end 22 is located in the hollow structure 111.
  • the platform 11 is for carrying the substrate 5; the pump 12 is for driving the nozzle 13 to spray the coating material 40 onto the substrate; and the nozzle 13 is for applying the coating material onto the substrate 5.
  • the transmitting end 22 is located in the hollow structure 111 to save space.
  • the hollow structure 111 is provided with a guide rail, and the transmitting end 22 is disposed on the guide rail and is slidable along the guide rail, and the guide rail is not specifically shown in the drawing.
  • the material of the portion 112 of the platform 11 between the emitter end 22 and the substrate 5 is, for example, a transparent material.
  • the transparent material refers to a material that is permeable to the illumination light from the emission end 22.
  • the transparent material can effectively ensure the transmission of the illumination light emitted from the emitting end 22.
  • a transparent material having a high light transmittance can be selected through multiple experiments and debugging to increase the transmittance of the irradiated light.
  • the coating apparatus 1 may further include a moving device 14 disposed above the substrate 5, and the receiving end 23 and the nozzle 13 are located on the moving device 14.
  • the receiving end 23 and the nozzle 13 are fixedly coupled to the mobile device 14.
  • the moving device 14 moves at a constant moving speed above the substrate 5, for example, in a moving direction parallel to the surface of the substrate 5, to drive the receiving end 23 and the nozzle 13 to move synchronously in the moving direction;
  • the transmitting end 22 is below the substrate 5, and It is configured to move at the same speed as the receiving end 23 to move the transmitting end 22 and the receiving end 23 synchronously with the nozzle 13.
  • the transmitting end 22 and the receiving end 23 are located behind the nozzle 13 in the moving direction.
  • the mobile device 14 can have a Gantry structure.
  • the coating system can include a control device 4 that is coupled to the transmitting end 22, the moving device 14, and the nozzle 13, respectively, and the control device 4 can be used for control The transmitting end 22, the moving device 14, and the nozzle 13 are moved.
  • the control device 4 can be connected to the transmitting end 22, the moving device 14, and the nozzle 13 through a power cable.
  • the coating apparatus further includes guide rails 15 on both sides of the platform 11, and the moving device 14 is located above the guide rails 15.
  • the mobile device 14 is coupled to a control device 4 that can be used to control movement of the mobile device 14 along the rail.
  • the control device 4 can control the transmitting end 22 and the receiving end 23 to move at the same speed as the nozzle 13.
  • the control device 4, the mobile device 14, and the guide rail 15 are not specifically shown in FIG.
  • the adjustment device 3 includes a determination module 31 and a second calculation module 32.
  • the determining module 31 is configured to determine whether
  • Pu 12 at this time, the pump 12 in the coating apparatus 1 drives the nozzle 13 to perform the coating process according to the thus determined feed speed, thereby realizing real-time adjustment of the film thickness.
  • T1 is the standard film thickness
  • T2 is the detected film thickness
  • V is the original feed rate of the coating apparatus 1 (for example, the original feed speed of the nozzle 13) when the film thickness at the corresponding detection point is detected. If the determining module 31 determines that
  • the detecting device detects the film thickness of the measuring point of the coating material when the coating device performs coating, and the adjusting device selectively generates the set feeding speed according to the film thickness, and the coating device is configured according to the film thickness.
  • the coating speed is applied to the substrate by the feed speed, thereby realizing the film thickness adjustment in real time.
  • the film thickness can be measured in real time and the film thickness can be adjusted in real time, thereby facilitating process control and improving the uniformity of the film thickness.
  • the high intelligent automation can effectively save labor costs and avoid human error, precise control, and save raw material cost.
  • the pump drives the nozzle at the recalculated set feed speed to change the discharge speed of the nozzle 13, thereby realizing the film thickness adjustment, and the adjustment method is simple and easy to implement.
  • FIG. 3 is a flow chart of a coating method according to Embodiment 2 of the present disclosure, as shown in FIG. 3, Methods include:
  • Step 101 The detecting device detects the film thickness of the coating material at the measuring point when the coating device applies the coating material on the substrate, and transmits the detected film thickness to the adjusting device.
  • the detecting device includes a light source, a transmitting end, a receiving end and a signal processing module, and the transmitting end and the receiving end are respectively disposed on opposite sides of the substrate and disposed opposite to each other.
  • step 101 can include:
  • Step 1011 The light source provides illumination light to the transmitting end.
  • Step 1012 The emitting end emits illumination light to the substrate to transmit the illumination light through the substrate and the coating material.
  • Step 1013 The receiving end receives the illumination light transmitted through the substrate and the coating material, and sends the illumination light to the signal processing module.
  • Step 1014 The signal processing module generates a film thickness according to the received illumination light.
  • Step 102 The adjusting device selectively generates a set feed speed according to the film thickness, and sends the set feed speed to the coating device when the set feed speed is generated, so that the coating device applies the set feed speed.
  • the cloth material is coated on the substrate.
  • the adjustment device includes a determination module and a second calculation module.
  • step 102 can include:
  • Step 1021 The determining module determines whether
  • Step 1022 The second calculation module calculates a set feed speed according to the formula [1+(T1-T2)/T1]V, and sends the set feed speed to the coating device.
  • T1 is the standard film thickness
  • T2 is the detected film thickness
  • V is the original feed speed of the coating apparatus 1 (for example, the original feed speed of the nozzle 13) when the detecting device detects the film thickness at the corresponding detection point.
  • the coating method provided in this embodiment can be used to implement the coating system provided in the first embodiment.
  • the coating system refer to the first embodiment, and details are not described herein.
  • the detecting device detects the film thickness of the measuring point of the coating material when the coating device is applied, and the adjusting device generates the set feeding speed according to the film thickness, and the coating device according to the set feeding speed
  • the coating material is coated on the substrate, thereby realizing adjustment of the film thickness in real time.
  • the film thickness can be measured in real time and the film thickness can be adjusted in real time, thereby facilitating process control and improving the uniformity of the film thickness.
  • the high intelligent automation can effectively save labor costs and avoid human error, precise control, and save raw material cost.
  • the pump drives the nozzle at the set feed speed obtained after the calculation to change the discharge speed of the nozzle 13, thereby realizing the film thickness adjustment, and the adjustment method is simple and easy to implement.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Coating Apparatus (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

一种涂布系统和涂布方法。该涂布系统包括：涂布设备(1)、检测装置(2)和调节装置(3)；涂布设备(1)，用于将涂布材料(40)涂布于基板(5)上；检测装置(2)，用于在涂布设备(1)涂布时检测涂布材料(40)的测量点的膜厚，并将检测出的膜厚发送给调节装置(3)；调节装置(3)，用于根据所述膜厚选择性地生成设定送料速度，并将设定送料速度发送给涂布设备(1)。该涂布系统和涂布方法能够实现实时调整涂布材料的膜厚。

Description

涂布系统和涂布方法 技术领域
本公开实施例涉及一种涂布系统和涂布方法。
背景技术
目前，在显示装置(例如：TFT-LCD和AMOLED)制造工艺中，尤其是彩膜基板制造工艺中，涂布工艺是重要的一段工艺制程。涂布工艺的作用是将涂布材料均匀的涂覆在基板表面以在基板表面形成薄膜。由于薄膜的膜厚会影响产品的质量，因此显示装置的制造工艺对薄膜的厚度要求特别高。在涂布工艺中，涂布的均匀性决定了涂布工艺的优劣，而涂布的均匀性又会影响薄膜的膜厚。
发明内容
本公开实施例提供了一种涂布系统，包括：涂布设备、检测装置和调节装置；其中，所述涂布设备用于将涂布材料涂布于基板上；所述检测装置用于在所述涂布设备涂布所述涂布材料时检测所述涂布材料的在一测量点的膜厚并将检测出的所述膜厚发送给所述调节装置；所述调节装置用于根据所述膜厚选择性地生成设定送料速度，并在生成了所述设定送料速度的情况下将所述设定送料速度发送给所述涂布设备。
本公开另一实施例提供了一种涂布方法，包括：在涂布设备将涂布材料涂布于基板上时，采用检测装置检测所述涂布材料在测量点的膜厚，并将检测出的膜厚发送给调节装置；调节装置根据所述膜厚选择性地生成设定送料速度，并在生成了所述设定送料速度的情况下将所述设定送料速度发送给所述涂布设备以使得所述涂布设备以所述设定送料速度将涂布材料涂布于基板上。
附图说明
为了更清楚地说明本公开实施例的技术方案，下面将对实施例或相关技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅涉及本公开的一些实施例，并非对本公开的限制。
图1为本公开实施例一提供的一种涂布系统的结构示意图；
图2为图1中涂布系统的平面示意图；
图3为本公开实施例二提供的一种涂布方法的流程图。
具体实施方式
下面将结合附图，对本公开实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本公开一部分实施例，而不是全部的实施例。基于本公开中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本公开保护的范围。
现有技术中存在多种控制膜厚的方法，但是在发明人已知的相关技术中还没有一种能够实现实时调整膜厚的方案。
本公开实施例提供一种涂布系统和涂布方法，能够实现实时调整涂布材料的膜厚。
图1为本公开实施例一提供的一种涂布系统的结构示意图，图2为图1中涂布系统的平面示意图，如图1和图2所示，该涂布系统包括：涂布设备1、检测装置2和调节装置3。涂布设备1用于将涂布材料40涂布于基板5上；检测装置2用于在涂布设备1涂布涂布材料40时检测涂布材料在一测量点的膜厚，并将检测出的膜厚发送给调节装置3；调节装置3用于根据膜厚选择性地生成设定送料速度并在生成了该设定送料速度的情况下将该设定送料速度发送给涂布设备1。
检测装置2在涂布过程中实时检测出某一测量点处的涂布材料的膜厚，其中，该某一测量点的位置可以预先设置。调节装置3能够根据检测出的该测量点处的涂布材料的膜厚计算出设定送料速度，并将该设定送料速度发送给涂布设备1以供涂布设备1根据该设定送料速度进行涂布工艺，从而实现对后续涂布材料膜厚的控制。进而，检测装置2可继续进行下一个测量点的膜厚的检测，实现在一次涂布工艺中对膜厚的实时且持续的调整。每个测量点之间的距离可根据生产需要进行设置。
检测装置2包括光源21、发射端22、接收端23和信号处理模块24，发射端22和接收端23分别位于基板的两侧且相对设置。光源21用于向发射端22提供照射光；发射端22用于向基板5发射照射光以使照射光透过基板5和涂布材料40；接收端23用于接收透过基板5和涂布材料40的照射光，并将接收到的照射光发送至信号处理模块24；信号处理模块24用于根据接收到的照射光生成膜厚。其中，光源21可通过光纤与发射端22连接。
例如，信号处理模块24包括光谱仪241和第一计算模块242。光谱仪241用于将接收到的照射光转换成光谱线；第一计算模块242用于对光谱线计算处理，生成膜厚。例如，可采用相关技术中的计算方法计算出膜厚，此处不再具体描述。其中，光谱仪241例如可通过光纤与接收端23连接。
例如，涂布设备1包括平台11、泵浦12和喷嘴13。喷嘴13例如构造为朝向平台喷射涂布材料40。例如，喷嘴13位于基板5的上方，平台11中设置有镂空结构111，镂空结构111例如为中空的。发射端22位于镂空结构111中。平台11用于承载基板5；泵浦12用于驱动喷嘴13向所述基板喷射涂布材料40；喷嘴13用于将涂布材料涂布于基板5上。发射端22位于镂空结构111可有效节省空间。例如，镂空结构111中设置有导轨，发射端22设置于导轨上并能够沿导轨滑动，导轨在图中未具体画出。
例如，平台11中位于发射端22和基板5之间的部分112的材料例如为透明材料。这里，透明材料是指对于来自发射端22的照射光是可透过的材料。采用透明材料可有效保证发射端22发射的照射光透过。例如，可通过多次实验和调试选择出透光率较高的透明材料，以提高照射光的透过率。
进一步地，涂布设备1还可包括设置于基板5上方的移动装置14，接收端23和喷嘴13位于移动装置14上。例如，接收端23和喷嘴13固定连接到移动装置14上。移动装置14在基板5上方例如沿平行于基板5的表面的移动方向以一恒定移动速度移动，以带动接收端23与喷嘴13在此移动方向上同步移动；发射端22在基板5下方，且构造为以与接收端23相同的速度移动，以使发射端22和接收端23与喷嘴13同步移动。发射端22和接收端23在所述移动方向上位于喷嘴13的后方。例如，移动装置14可以具有龙门结构(Gantry)。例如，如图2所示，该涂布系统可包括控制装置4，该控制装置4分别与发射端22、移动装置14和喷嘴13连接，控制装置4可用于控 制发射端22、移动装置14和喷嘴13移动。其中，控制装置4可通过电力线(cable)与发射端22、移动装置14、喷嘴13连接。
进一步地，该涂布设备还包括位于平台11两侧的导轨15，移动装置14位于导轨15之上。该移动装置14与控制装置4连接，控制装置4可用于控制移动装置14沿导轨移动。例如，由于发射端22和接收端23与喷嘴13需要同步移动，因此控制装置4可控制发射端22和接收端23与喷嘴13以相同的速度移动。其中，控制装置4、移动装置14和导轨15在图1中均未具体画出。
例如，调节装置3包括：判断模块31和第二计算模块32。判断模块31用于判断|(T1-T2)/T1|是否小于或者等于设定差值；若判断模块31判断出|(T1-T2)/T1|大于设定差值时，表明检测出的膜厚不符合标准膜厚，则第二计算模块32根据公式[1+(T1-T2)/T1]V计算出设定送料速度，并将设定送料速度发送至涂布设备1中的泵浦12，此时涂布设备1中的泵浦12将根据如此计算得到的设定送料速度驱动喷嘴13进行涂布工艺，从而实现对膜厚的实时调整。其中，T1为标准膜厚，T2为检测出的膜厚，V为检测对应检测点处的膜厚时涂布设备1的原有送料速度(例如，喷嘴13的原有送料速度)。若判断模块31判断出|(T1-T2)/T1|小于或者等于设定差值时，表明检测出的膜厚符合标准膜厚，此时第二计算模块32不再计算设定送料速度，进而也不向涂布设备1发送设定送料速度。此时，涂布设备1采用原有送料速度进行涂布工艺。由于生产需要的规定膜厚为T1±1‰nm，因此设定差值为1‰nm。在涂布工艺执行过程中，可重复执行上述过程检测多个测量点的膜厚，以实现在整个涂布工艺中对膜厚的实时调整。
本实施例提供的涂布系统中，检测装置在涂布设备执行涂布时检测涂布材料的测量点的膜厚，调节装置根据膜厚选择性地生成设定送料速度，涂布设备根据设定送料速度将涂布材料涂布于基板上，从而实现了实时调整膜厚。本实施例可实时测量出膜厚并实时调整膜厚，从而有利于工艺管控，提高了膜厚的均匀性，高度智能自动化可有效节省人力成本且避免人为错误，控制精准，节省了原材料成本。泵浦以重新计算后的设定送料速度驱动喷嘴以改变喷嘴13的吐出速度，从而实现膜厚调节，调节方法简单且易于实现。
图3为本公开实施例二提供的一种涂布方法的流程图，如图3所示，该 方法包括：
步骤101、检测装置在涂布设备将涂布材料涂布于基板上时检测涂布材料在测量点的膜厚，并将检测出的膜厚发送给调节装置。
例如，检测装置包括光源、发射端、接收端和信号处理模块，所述发射端和所述接收端分别位于基板的两侧且相对设置。例如，步骤101可包括：
步骤1011、光源向发射端提供照射光。
步骤1012、发射端向基板发射照射光以使照射光透过基板和涂布材料。
步骤1013、接收端接收透过基板和涂布材料的照射光，并将照射光发送至信号处理模块。
步骤1014、信号处理模块根据接收到的照射光生成膜厚。
步骤102、调节装置根据膜厚选择性地生成设定送料速度，并在生成了设定送料速度的情况下将设定送料速度发送给涂布设备，使得涂布设备以设定送料速度将涂布材料涂布于基板上。
例如，所述调节装置包括：判断模块和第二计算模块。例如，步骤102可包括：
步骤1021、判断模块判断|(T1-T2)/T1|是否小于或者等于设定差值，若否则执行步骤1022，若是则流程结束。
步骤1022、第二计算模块根据公式[1+(T1-T2)/T1]V计算出设定送料速度，并将设定送料速度发送至涂布设备。其中，T1为标准膜厚，T2为检测出的膜厚，V为检测装置检测对应检测点处的膜厚时涂布设备1的原有送料速度(例如，喷嘴13的原有送料速度)。
本实施例提供的涂布方法可用于采用上述实施例一提供的涂布系统实现，对涂布系统的描述可参见上述实施例一，此处不再赘述。
本实施例提供的涂布方法中，检测装置在涂布设备涂布时检测涂布材料的测量点的膜厚，调节装置根据膜厚生成设定送料速度，涂布设备根据设定送料速度将涂布材料涂布于基板上，从而实现了实时调整膜厚。本实施例可实时测量出膜厚并实时调整膜厚，从而有利于工艺管控，提高了膜厚的均匀性，高度智能自动化可有效节省人力成本且避免人为错误，控制精准，节省了原材料成本。泵浦以计算后得到的设定送料速度驱动喷嘴以改变喷嘴13的吐出速度，从而实现膜厚调节，调节方法简单且易于实现。
虽然上文中已经用一般性说明及具体实施方式，对本公开作了详尽的描述，但在本公开基础上，可以对之作一些修改或改进，这对本领域技术人员而言是显而易见的。因此，在不偏离本公开精神的基础上所做的这些修改或改进，均属于本公开要求保护的范围。
本申请要求于2015年6月1日递交的中国专利申请第201510297672.8号的优先权，在此全文引用上述中国专利申请公开的内容以作为本申请的一部分。

Claims (10)

  1. 一种涂布系统，包括：涂布设备、检测装置和调节装置；
    其中，所述涂布设备用于将涂布材料涂布于基板上；所述检测装置用于在所述涂布设备涂布所述涂布材料时检测所述涂布材料的在一测量点的膜厚并将检测出的所述膜厚发送给所述调节装置；所述调节装置用于根据所述膜厚选择性地生成设定送料速度，并在生成了所述设定送料速度的情况下将所述设定送料速度发送给所述涂布设备。
  2. 根据权利要求1所述的涂布系统，其中，所述检测装置包括光源、发射端、接收端和信号处理模块，所述发射端和所述接收端分别位于基板的两侧且相对设置；
    所述光源，用于向所述发射端提供照射光；
    所述发射端，用于向所述基板发射所述照射光以使所述照射光透过所述基板和所述涂布材料；
    所述接收端，用于接收透过所述基板和所述涂布材料的照射光，并将接收到的照射光发送至所述信号处理模块；
    所述信号处理模块，用于根据接收到的照射光生成所述膜厚。
  3. 根据权利要求2所述的涂布系统，其中，所述信号处理模块包括光谱仪和第一计算模块；
    所述光谱仪，用于将接收到的照射光转换成光谱线；
    所述第一计算模块，用于对所述光谱线计算处理，生成所述膜厚。
  4. 根据权利要求2或3所述的涂布系统，其中，所述涂布设备包括平台、泵浦和喷嘴，所述喷嘴位于所述基板的上方，所述平台中设置有镂空结构，所述发射端位于所述镂空结构中；
    所述平台，用于承载所述基板；
    所述泵浦，用于驱动所述喷嘴喷射所述涂布材料；
    所述喷嘴，用于将涂布材料涂布于基板上。
  5. 根据权利要求4所述的涂布系统，其中，所述平台中位于发射端和基板之间的部分的材料为透明材料。
  6. 根据权利要求4或5所述的涂布系统，其中，所述涂布设备还包括： 设置于所述基板上方的移动装置，所述接收端和所述喷嘴位于所述移动装置上，且所述发射端和所述接收端位于所述喷嘴的后方；
    所述移动装置能够在所述基板上方移动，以使所述接收端与所述喷嘴同步移动；
    所述发射端在所述基板下方并构造为与所述接收端以及所述喷嘴同步移动。
  7. 根据权利要求1至6中任一项所述的涂布系统，其中，所述调节装置包括：判断模块和第二计算模块；
    所述判断模块，用于判断|(T1-T2)/T1|是否小于或者等于设定差值；
    所述第二计算模块，用于在所述判断模块判断出|(T1-T2)/T1|大于设定差值的情况下，根据公式[1+(T1-T2)/T1]V计算出设定送料速度，并将设定送料速度发送至所述涂布设备使得所述涂布设备以所述设定送料速度驱动所述喷嘴喷射所述涂布材料；
    其中，T1为标准膜厚，T2为检测出的膜厚，V为所述检测装置检测所述涂布材料在所述测量点的膜厚时所述涂布设备的原有送料速度。
  8. 一种涂布方法，包括：
    在涂布设备将涂布材料涂布于基板上时，采用检测装置检测所述涂布材料在测量点的膜厚，并将检测出的膜厚发送给调节装置；
    调节装置根据所述膜厚选择性地生成设定送料速度，并在生成了所述设定送料速度的情况下将所述设定送料速度发送给所述涂布设备以使得所述涂布设备以所述设定送料速度将涂布材料涂布于基板上。
  9. 根据权利要求8所述的涂布方法，其中，所述检测装置包括光源、发射端、接收端和信号处理模块，所述发射端和所述接收端分别位于基板的两侧且相对设置；
    所述光源向所述发射端提供照射光；
    所述发射端向所述基板发射所述照射光以使所述照射光透过所述基板和所述涂布材料；
    所述接收端接收透过所述基板和所述涂布材料的照射光，并将接收到的照射光发送至所述信号处理模块；
    所述信号处理模块根据接收到的照射光生成所述膜厚。
  10. 根据权利要求8或9所述的涂布方法，其中，所述调节装置包括：判断模块和第二计算模块；
    所述判断模块判断|(T1-T2)/T1|是否小于或者等于设定差值；
    在所述判断模块判断出|(T1-T2)/T1|大于设定差值的情况下，所述第二计算模块根据公式[1+(T1-T2)/T1]V计算出设定速度，并将设定速度发送至所述涂布设备；
    其中，T1为标准膜厚，T2为检测出的膜厚，V为所述检测装置检测所述涂布材料的在所述测量点的膜厚时所述涂布设备的原有送料速度。
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