WO2016185900A1 - Dispositif d'entraînement - Google Patents

Dispositif d'entraînement Download PDF

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Publication number
WO2016185900A1
WO2016185900A1 PCT/JP2016/063425 JP2016063425W WO2016185900A1 WO 2016185900 A1 WO2016185900 A1 WO 2016185900A1 JP 2016063425 W JP2016063425 W JP 2016063425W WO 2016185900 A1 WO2016185900 A1 WO 2016185900A1
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WO
WIPO (PCT)
Prior art keywords
piezoelectric
elastic body
main surface
piezoelectric element
vibration
Prior art date
Application number
PCT/JP2016/063425
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English (en)
Japanese (ja)
Inventor
亨 今井
愛美 大塚
征士朗 後藤
Original Assignee
株式会社村田製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 株式会社村田製作所 filed Critical 株式会社村田製作所
Priority to JP2017519104A priority Critical patent/JP6406444B2/ja
Publication of WO2016185900A1 publication Critical patent/WO2016185900A1/fr

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/12—Constructional details
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
    • H10N30/063—Forming interconnections, e.g. connection electrodes of multilayered piezoelectric or electrostrictive parts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals

Definitions

  • the present invention relates to a drive device that moves a moving body by driving a piezoelectric element.
  • Patent Document 1 discloses an ultrasonic motor using bending vibration and other vibrations.
  • the cylindrical moving body is inserted into the through hole of the disk-shaped base.
  • the cylindrical moving body is configured to move in the axial direction thereof.
  • Piezoelectric elements are provided on both sides of the disk-shaped substrate. A combined resonance of the bending vibration and radial vibration of the disk is used.
  • An object of the present invention is to provide a drive device with little variation in displacement.
  • the drive device has an opening having first and second main surfaces facing each other and penetrating a central portion from the first main surface toward the second main surface. And an elastic body having a plurality of sides surrounding the opening, and at least one main surface of the first and second main surfaces of the elastic body joined to the plurality of sides.
  • a drive unit including the piezoelectric element, and the first main surface and the second main surface of the elastic body by being inserted into the opening of the elastic body and driving the drive unit.
  • the drive unit is caused to generate bending vibration and at least one other vibration different from the bending vibration, or the bending vibration.
  • the movable body has a vibration state that realizes a release state in which the moving body is in contact with the inner wall of the opening of the elastic body by an engagement force, and the bending unit and the other vibration of the drive unit or
  • the movable body is moved by the vibration of the coupling mode, and the plurality of piezoelectric elements are sandwiched between the plate-like piezoelectric body, the plurality of excitation electrodes for exciting the piezoelectric body, and the excitation electrode.
  • Active region , And a non-active region not sandwiched between the excitation electrode, the inactive region in the plurality of piezoelectric elements are arranged similarly in all of the plurality of side portions.
  • the first and second piezoelectric elements are provided on the surfaces of the piezoelectric bodies opposite to the surfaces bonded to the elastic bodies.
  • the first terminal electrode in the plurality of piezoelectric elements is adjacent to the second terminal electrode of the plurality of piezoelectric elements in each adjacent side portion.
  • the first terminal electrode and the second terminal electrode adjacent to the first terminal electrode in adjacent side portions are electrically connected.
  • a connecting electrode pad is further provided. In this case, the number of portions that electrically connect the driving device to the outside can be reduced. Therefore, electrical connection is facilitated.
  • the opening of the elastic body has a rectangular planar shape
  • the side portions are first to fourth side portions
  • the plurality of piezoelectric elements These are the first to fourth piezoelectric elements joined to the first to fourth sides.
  • the piezoelectric element is a stacked piezoelectric element having the plurality of excitation electrodes stacked via piezoelectric layer portions in the piezoelectric body. In this case, the displacement of the drive unit can be increased.
  • the piezoelectric element is provided on the surface of the piezoelectric body opposite to the elastic body, and the first excitation electrode provided on the surface of the piezoelectric body on the elastic body side.
  • a single-plate-type piezoelectric element may be used.
  • the moving body has a columnar shape extending in a direction connecting the first main surface and the second main surface of the elastic body.
  • the drive device further includes a spring member extrapolated to the movable body, and the spring member is pressed against the inner wall of the opening of the elastic body of the drive unit. Is done. In this case, the moving body can be moved effectively by the drive unit.
  • the drive device it is possible to reduce the variation in the amount of displacement of the plurality of sides surrounding the opening of the elastic body. Therefore, the moving body can be moved stably.
  • FIG. 1A is a perspective view of a drive unit used in the first embodiment of the present invention
  • FIG. 1B is a front sectional view of a piezoelectric element used in the drive unit. is there.
  • FIG. 2 is a perspective view of the drive unit used in the comparative example.
  • FIG. 3 is a perspective view of the driving apparatus according to the first embodiment of the present invention.
  • FIG. 4 is a diagram illustrating a relationship between each resonance frequency of bending vibration and spread vibration excited by the drive unit used in the first embodiment and the thickness of the elastic body.
  • FIG. 5A is a schematic diagram for explaining an initial state.
  • FIG. 5B is a schematic diagram for explaining the movable state.
  • FIG. 6B are schematic views for explaining a state in which each moving body is moved in the driving apparatus according to the first embodiment of the present invention.
  • FIG. 7 is a diagram showing the relationship between the amount of displacement of the portion pressed against the moving body on each side of the drive unit in the drive device according to the first embodiment of the present invention, the applied voltage, and time.
  • FIG. 8 is a diagram showing the relationship between the amount of displacement of the portion pressed against the moving body on each side of the drive unit in the drive device of the comparative example, the applied voltage, and time.
  • FIG. 9 is a perspective view of a drive unit according to the second embodiment of the present invention.
  • FIG. 10 is a front sectional view of a piezoelectric element used in Modification 2 of the first embodiment of the present invention.
  • FIG. 11 is a perspective view of a moving body used in Modification 1 of the first embodiment of the present invention.
  • FIG. 12 is a perspective view showing a spring member attached to the movable body shown in FIG.
  • FIG. 1A is a perspective view showing a drive unit used in the first embodiment of the present invention
  • FIG. 1B is a front sectional view of a piezoelectric element used in the drive unit
  • FIG. 3 is a perspective view showing the driving apparatus according to the first embodiment.
  • the drive device 1 includes a drive unit 2 and a moving body 3.
  • the drive unit 2 includes a base member 10 and an elastic body 5 supported by the base member 10.
  • the elastic body 5 has a first main surface 5a and a second main surface 5b that face each other.
  • the elastic body 5 is made of an appropriate rigid material such as metal.
  • the elastic body 5 has a rectangular frame shape and has an opening 5c in the center.
  • a plurality of piezoelectric elements 6 to 9 are bonded on the first main surface 5a.
  • the plurality of piezoelectric elements 6 to 9 may be bonded to the second main surface 5b instead of the first main surface 5a.
  • a plurality of piezoelectric elements may be bonded to both main surfaces.
  • FIG. 1B is a front sectional view of the piezoelectric element 6.
  • the piezoelectric element 6 is a stacked piezoelectric element.
  • the piezoelectric element 6 has a piezoelectric body 11.
  • the piezoelectric body 11 has a strip-like shape having a lateral direction and a longitudinal direction.
  • the piezoelectric body 11 has a first main surface 11a extending in the longitudinal direction, and a second main surface 11b facing the first main surface 11a.
  • the first end face 11c is located on one end side in the longitudinal direction of the piezoelectric body 11, and the second end face 11d is located on the other end side in the longitudinal direction.
  • an excitation electrode 12 is provided on the first main surface 11 a of the piezoelectric body 11.
  • An excitation electrode 13 is provided in the piezoelectric body 11 so as to face the excitation electrode 12 through the piezoelectric layer.
  • excitation electrodes 14 to 16 are provided in the piezoelectric body 11 so as to be adjacent to each other through the piezoelectric layer.
  • An excitation electrode 17 is provided on the second main surface 11b so as to face the excitation electrode 16 with the piezoelectric layer interposed therebetween.
  • the excitation electrodes 12, 14, and 16 are drawn out to the first end face 11c.
  • a connection electrode 18 is provided on the first end face 11c.
  • the excitation electrodes 12, 14, and 16 are electrically connected by the connection electrode 18.
  • the excitation electrodes 13, 15, and 17 reach the second end face 11d.
  • a connection electrode 19 is provided on the second end face 11d.
  • the excitation electrodes 13, 15, and 17 are electrically connected by the connection electrode 19.
  • connection electrode 18 has a terminal portion 18a reaching the second main surface 11b.
  • the terminal portion 18a and the excitation electrode 17 are formed at positions adjacent to each other via a gap.
  • connection electrode 19 has a terminal portion 19a that reaches the first main surface 11a.
  • the terminal portion 19a and the excitation electrode 12 are formed at positions adjacent to each other via a gap.
  • the piezoelectric element 6 is fixed with the excitation electrode 17 side in close contact with the first main surface 5 a of the elastic body 5.
  • the excitation electrode 12 and the terminal portion 19a of the connection electrode 19 it can be electrically connected to the outside.
  • the excitation electrode 12 also serves as the first terminal electrode
  • the terminal portion 19a serves as the second terminal electrode.
  • the piezoelectric layer between the excitation electrodes 12 to 17 is polarized in the thickness direction. Therefore, when an AC voltage is applied between the excitation electrode 12 serving also as a terminal electrode and the terminal portion 19a, the piezoelectric element 6 vibrates due to bending vibration.
  • the piezoelectric elements 7 to 9 also have the same structure as the piezoelectric element 6. Therefore, the same parts are denoted by the same reference numerals, and the description thereof is omitted.
  • the driving unit 2 When the piezoelectric elements 6 and 8 and the piezoelectric elements 7 and 9 are driven by bending vibrations having opposite phases, the driving unit 2 generates bending vibrations and spreading vibrations.
  • the moving body 3 shown in FIG. 3 is moved by utilizing the coupling mode of the bending vibration and the spreading vibration.
  • the moving body 3 has a cylindrical shape in the present embodiment, and the moving body 3 is moved in the axial direction of the cylindrical shape. In other words, the moving body 3 is moved in a direction connecting the first main surface 5a and the second main surface 5b of the elastic body 5 of the drive unit 2. The operation of moving the moving body 3 will be described in detail later.
  • a feature of the present embodiment is that in the piezoelectric elements 6 to 9, inactive regions to be described later are similarly arranged on all of the plurality of sides of the elastic body 5 in the rectangular frame shape. This will be described in more detail.
  • the elastic body 5 has a square opening 5c. That is, the elastic body 5 is a rectangular frame having four sides. Piezoelectric elements 6, 7, 8 or 9 are fixed on the first main surface 5 a in the first to fourth sides of the elastic body 5.
  • the entire piezoelectric body 11 is not displaced. That is, the piezoelectric layer portion sandwiched between the excitation electrodes connected to different potentials is displaced by the piezoelectric effect.
  • the hatched portion of the cross is not sandwiched between the excitation electrodes having different potentials. Accordingly, since the portion is not positively displaced due to the piezoelectric effect, the regions indicated by the cross hatching are defined as inactive regions A1 and A2. The remaining area becomes an active area displaced by the piezoelectric effect.
  • the inactive region A1 extends in the thickness direction, which is a direction connecting the first and second main surfaces 11a and 11b of the piezoelectric element 6, along the first end surface 11c. Yes. And it has reached the opposing area
  • the inactive region A2 extends along the second end face 11d. Further, the inactive region A2 extends from the second end surface 11d toward the tip of the excitation electrode 12 along the terminal portion 19a. Therefore, in the front sectional view, the inactive region A2 has an inverted L-shaped shape.
  • the piezoelectric element 6 passes through the center in the direction connecting the first main surface 11a and the second main surface 11b, is parallel to the first main surface 11a, and is parallel to the longitudinal direction.
  • the top and bottom are asymmetrical. Therefore, the piezoelectric element 6 can be fixed to the elastic body 5 so that the first main surface 11a and the second main surface 11b are reversed.
  • the piezoelectric element 6 is fixed to the elastic body 5 so that the surface on which the excitation electrode 12 is provided is the surface opposite to the joint surface with the elastic body 5. .
  • the remaining piezoelectric elements 7 to 9 are also fixed to the elastic body 5 so that the surface on which the excitation electrode 12 is provided is in the same direction as the piezoelectric element 6.
  • the first terminal electrodes of the plurality of piezoelectric elements 6 to 9 are adjacent to the second terminal electrodes of the plurality of piezoelectric elements on the adjacent sides.
  • the excitation electrode 12 in the piezoelectric element 6 is adjacent to the terminal portion 19 a in the piezoelectric element 9.
  • the excitation electrode 12 in the piezoelectric element 9 is adjacent to the terminal portion 19 a in the piezoelectric element 8.
  • the excitation electrode 12 in the piezoelectric element 8 is adjacent to the terminal portion 19 a in the piezoelectric element 7.
  • the excitation electrode 12 in the piezoelectric element 7 is adjacent to the terminal portion 19 a in the piezoelectric element 6.
  • the excitation electrodes 12 in the piezoelectric elements 6 and 8 are electrically connected to each other.
  • the excitation electrodes 12 in the piezoelectric elements 7 and 9 are electrically connected to each other.
  • the terminal portions 19a of the piezoelectric elements 6 and 8 are electrically connected to each other.
  • the terminal portions 19a of the piezoelectric elements 7 and 9 are electrically connected to each other. Therefore, the position of the inactive region of the piezoelectric element in each side portion of the elastic body 5 is similarly arranged in all the side portions of the elastic body 5 in the rectangular frame shape. Therefore, variation in the amount of displacement at each side portion of the drive unit 2 can be reduced. Therefore, the moving body 3 can be stably moved using the driving device 1. This will be clarified by comparing with the comparative example shown in FIG.
  • the drive unit 101 shown in FIG. 2 is the drive unit of the above embodiment except that the piezoelectric elements 6A and 8A are fixed on the first main surface 5a of the elastic body 5 instead of the piezoelectric elements 6 and 8. It is comprised similarly to 2. That is, the piezoelectric element 6 ⁇ / b> A is fixed to the elastic body 5 so that the excitation electrode 17 and the terminal portion 18 a are on the surface opposite to the joint surface with the elastic body 5. The same applies to the piezoelectric element 8A. Further, the excitation electrode 17 of the piezoelectric element 6A and the excitation electrode 17 of the piezoelectric element 8A are electrically connected.
  • the excitation electrode 12 of the piezoelectric element 7 and the excitation electrode 12 of the piezoelectric element 9 are electrically connected.
  • the terminal portion 18a of the piezoelectric element 6A and the terminal portion 18a of the piezoelectric element 8A are electrically connected.
  • the terminal portion 19a of the piezoelectric element 7 and the terminal portion 19a of the piezoelectric element 9 are electrically connected.
  • the excitation electrodes 12 and 17 are first terminal electrodes, and the terminal portions 18a and 19a are second terminal electrodes.
  • the position of the inactive region is the same at the side of the rectangular frame shape of the elastic body 5, but the piezoelectric elements 6A and 8A and the piezoelectric elements 7 and 9 have the rectangular shape of the elastic body 5.
  • the position of the inactive region is different in the frame-shaped side portion. Therefore, the positions of the inactive regions A1 and A2 described above are not similarly arranged in all the sides of the elastic frame 5 in the rectangular frame shape.
  • a coupling mode of bending vibration and spreading vibration of the elastic body 5 is used.
  • a plurality of coupled modes can be generated by adjusting the resonance frequency of the bending vibration and the spreading vibration.
  • FIG. 4 is a diagram showing the relationship between the resonance frequency of bending vibration and the resonance frequency of spread vibration and the thickness of the elastic body 5. As shown in FIG. 4, by adjusting the thickness of the elastic body 5, the resonance frequency of the bending vibration and the resonance frequency of the spreading vibration can be adjusted, and a coupling mode of both can be generated. As will be described later, two coupling modes of a first coupling mode and a second coupling mode among a plurality of coupling modes are used.
  • the first coupling mode and the second coupling mode are used.
  • the vibration in the first and second coupling modes is caused by the movable state in which the inner wall of the opening 5c of the elastic body 5 is pressed against the moving body 3 and the inner wall of the opening 5c being separated from the moving body 3. Or a vibration state that realizes a released state in contact with the moving body 3 with a frictional engagement force lower than that in the movable state. That is, in any case of the first coupling mode and the second coupling mode, a vibration state that realizes the two states is generated.
  • the movable body 3 is moved to one side in the axial direction of the movable body 3 in the movable state in the first coupling mode. If this is a forward movement, in the second coupling mode, the inner wall of the opening part moves the moving body 3 backward in the movable state. That is, the moving body 3 can be moved forward or backward by switching the driving frequency so that the first coupling mode and the second coupling mode are generated.
  • the first and second coupling modes in which the vibration state realizing the release state and the movable state are generated are used.
  • the resonance frequency of the bending vibration and the resonance frequency of the spreading vibration are matched.
  • the resonance frequencies of both may not be exactly the same, and the absolute value of the difference between the resonance frequency of the bending vibration and the resonance frequency of the spread vibration is the resonance frequency in the first coupling mode and the second coupling mode. What is necessary is just to be in the range within 15% of the average value of resonance frequency.
  • a coupled mode of bending vibration and spreading vibration is used, but bending vibration and coupled mode may be used. Further, bending vibration and vibration modes other than bending vibration such as spreading vibration may be used.
  • FIG. 5 (a) shows an initial state when operating the drive device 1, and as shown in FIG. 5 (b), by driving the drive unit 2 to generate the first coupling mode as described above.
  • the movable state is set. That is, the opening 5 c of the elastic body 5 is pressed against the outer peripheral surface of the moving body 3.
  • the moving body 3 can be advanced in the direction of the arrow, that is, one side in the axial direction, as shown in FIG. And in a 1st coupling
  • the moving body 3 can be pitched forward.
  • the movable body 3 can be retreated by generating the second coupling mode and driving in the second coupling mode.
  • the movable body 3 may be moved forward or backward by bending vibration, and the release state and the movable state may be realized by spreading vibration.
  • the inactive regions of the piezoelectric elements 6 to 9 are similarly arranged in all of the plurality of sides of the elastic body 5 in the rectangular frame shape. Therefore, it will be described with reference to FIG. 7 and FIG. 8 that the variation in the side of the displacement amount of the moving body can be reduced, thereby reducing the variation in the entire displacement amount of the moving body.
  • the 7 represents a driving voltage waveform in the driving device of the first embodiment.
  • the broken line, the alternate long and short dash line, the alternate long and two short dashes line, and the thin line indicate the amount of displacement of the inner wall portion of the central opening 5c of each side where the piezoelectric elements 6 to 9 are provided.
  • the central inner wall portion of each side portion is a portion pressed against the moving body 3.
  • FIG. 8 is a diagram showing a displacement amount of a central inner wall portion of each side portion and a driving voltage waveform in the driving device of the comparative example described above.
  • the amount of displacement is determined by, for example, irradiating the inner wall portion of the central opening of each side of the drive device with a Doppler vibrometer manufactured by Ono Sokki Co., Ltd. under the trade name “LV-1710”, and reflecting the irradiated laser The light was measured by receiving light with a Doppler vibrometer.
  • the drive voltage having the same waveform is applied to the drive device of the first embodiment and the drive device of the comparative example. However, in the drive device of the comparative example, the center of each side portion is applied.
  • the amount of displacement of the inner wall portion of the opening varies greatly.
  • the displacement amount of the inner wall portion of the opening at the center of each side portion is almost the same, and the variation in the displacement amount is effectively reduced. It can be seen that it can be reduced.
  • FIG. 9 is a perspective view showing a drive unit used in the drive apparatus according to the second embodiment of the present invention.
  • the drive unit 22 is the same as the drive unit 2 except that connection pads 23a to 23d are provided. Therefore, the same reference numerals are assigned to the same parts, and the description of the first embodiment is incorporated.
  • connection pads 23a to 23d are made of a conductive material.
  • the electrode pad electrically connects the first terminal electrode and the second terminal electrode adjacent to the first terminal electrode in the adjacent side portion.
  • connection pad 23 a electrically connects the terminal portion 19 a of the piezoelectric element 6 and the excitation electrode 12 as the first terminal portion of the piezoelectric element 7.
  • connection pad 23 b electrically connects the terminal portion 19 a of the piezoelectric element 7 and the excitation electrode 12 of the piezoelectric element 8.
  • the connection pad 23 c electrically connects the terminal portion 19 a of the piezoelectric element 8 and the excitation electrode 12 of the piezoelectric element 9.
  • connection pad 23 d electrically connects the terminal portion 19 a of the piezoelectric element 9 and the excitation electrode 12 of the piezoelectric element 6. More specifically, the terminal portion 19a of the piezoelectric element 6, the excitation electrode 12 of the piezoelectric element 7, the terminal portion 19a of the piezoelectric element 8, and the excitation electrode 12 of the piezoelectric element 9 are electrically connected. The excitation electrode 12 of the piezoelectric element 6, the terminal portion 19 a of the piezoelectric element 7, the excitation electrode 12 of the piezoelectric element 8, and the terminal portion 19 a of the piezoelectric element 9 are electrically connected.
  • the four locations on the first main surface 11a side of the piezoelectric body 11 of the piezoelectric elements 6 to 9 may be electrically connected by bonding wires or the like. That is, since the terminal portion 19a of the adjacent piezoelectric element and the excitation electrode 12 are electrically connected in advance by the connection pads 23a to 23d, the number of electrical connection locations with the outside may be four.
  • the terminal electrodes connected to the same potential are connected in common on the first main surface 11a side.
  • the elastic body 5 has a square opening 5c and has a rectangular frame shape.
  • the elastic body 5 may have another polygonal opening. Good.
  • the inner surface of the opening part 5c of the said elastic body 5 was press-contacted to the outer peripheral surface of the cylindrical moving body 3, and the moving body 3 was made the movable state.
  • a spring member made of metal or the like may be fixed to the outer peripheral surface of the moving body 3.
  • the moving body 3 is not limited to a columnar shape, and may have a substantially prismatic shape like a moving body 3A shown in FIG. In this case, the spring member 4 shown in FIG. 12 may be attached to the moving body 3A.
  • the inner diameter of the spring member 4 made of metal or the like is made smaller than the maximum dimension in the cross-sectional direction orthogonal to the axial direction of the moving body 3A. Therefore, the spring member 4 may be attached to the moving body 3A while expanding the slit 4a of the spring member 4 having the slit 4a. In this case, the outer peripheral surface of the spring member 4 is pressed against the inner wall of the opening 5 c of the elastic body 5 of the drive unit 2, and the moving body 3 ⁇ / b> A is moved together with the spring member 4.
  • the piezoelectric element 31 includes a piezoelectric body 32, a first excitation electrode 33 provided on the first main surface of the piezoelectric body 32, and a second excitation electrode 34 provided on the second main surface. Also in the piezoelectric element 31, connection electrodes 35 and 36 are provided on both end faces of the piezoelectric body 32, and terminal portions 35 a and 36 a are connected to the connection electrodes 35 and 36, respectively.
  • the inactive region is located asymmetrically on both sides of a cross section that passes through the center in the direction connecting the first and second main surfaces of the piezoelectric body 32 and extends parallel to the first main surface. Yes. Therefore, the piezoelectric element 31 is also provided so that the inactive region is located at the same position on all the sides of the elastic body 5 in the rectangular frame shape, similarly to the piezoelectric elements 6 to 9 described above. Thereby, the same effect as in the case of the first embodiment can be obtained.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

L'invention fournit un dispositif d'entraînement qui présente peu d'irrégularités de quantité de déplacement. Ce dispositif d'entraînement (1) possède : une unité d'entraînement (2) ; et un corps de déplacement (3) qui est déplacé dans une direction reliant une première face principale (5a) et une seconde face principale (5b) d'un corps élastique (5). L'unité d'entraînement (2) possède le corps élastique (5) et une pluralité d'éléments piézoélectriques (６～９). Les éléments piézoélectriques (６～９) sont agencés sur des parties côté entourant une partie ouverture (5c) du corps élastique (5). Les éléments piézoélectriques (６～９) possèdent une région active enserrée entre des électrodes d'excitation, et des régions inactives (A1, A2) non enserrées entre des électrodes d'excitation, et les régions inactives (A1, A2) sont disposées sur la pluralité de parties côté du corps élastique (5) de manière similaire sur l'ensemble des parties côté.
PCT/JP2016/063425 2015-05-15 2016-04-28 Dispositif d'entraînement WO2016185900A1 (fr)

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JP2015-100192 2015-05-15

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023210823A1 (fr) * 2022-04-28 2023-11-02 ミネベアミツミ株式会社 Actionneur de vibration et dispositif d'entrée de type à contact

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013201813A (ja) * 2012-03-23 2013-10-03 Murata Mfg Co Ltd 駆動装置及びモータ
JP2015027154A (ja) * 2013-07-25 2015-02-05 Tdk株式会社 圧電アクチュエータ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013201813A (ja) * 2012-03-23 2013-10-03 Murata Mfg Co Ltd 駆動装置及びモータ
JP2015027154A (ja) * 2013-07-25 2015-02-05 Tdk株式会社 圧電アクチュエータ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023210823A1 (fr) * 2022-04-28 2023-11-02 ミネベアミツミ株式会社 Actionneur de vibration et dispositif d'entrée de type à contact

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JPWO2016185900A1 (ja) 2018-03-29

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