WO2016170589A1 - Système de mesure de vecteur de courant de surface et système de diagnostic de défaillance l'utilisant - Google Patents

Système de mesure de vecteur de courant de surface et système de diagnostic de défaillance l'utilisant Download PDF

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Publication number
WO2016170589A1
WO2016170589A1 PCT/JP2015/062028 JP2015062028W WO2016170589A1 WO 2016170589 A1 WO2016170589 A1 WO 2016170589A1 JP 2015062028 W JP2015062028 W JP 2015062028W WO 2016170589 A1 WO2016170589 A1 WO 2016170589A1
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Prior art keywords
surface current
current vector
vector
measurement
probe
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PCT/JP2015/062028
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English (en)
Japanese (ja)
Inventor
諭 村岡
久亮 金井
李　ウェン
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株式会社日立製作所
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Priority to PCT/JP2015/062028 priority Critical patent/WO2016170589A1/fr
Publication of WO2016170589A1 publication Critical patent/WO2016170589A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
    • G01R15/08—Circuits for altering the measuring range
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Definitions

  • the present invention relates to a surface current vector measurement system and an electronic device failure diagnosis system using the same.
  • a scanning electron beam type semiconductor inspection and measurement device for inspecting and measuring the shape of a wiring pattern formed on a semiconductor wafer is installed in a vacuum housing, an acceleration electrode for accelerating an electron beam, an electron beam diameter
  • a sample on the stage is irradiated with an electron beam through a plurality of electrodes, such as a plurality of diaphragm electrodes for focusing and a plurality of deflection electrodes for adjusting the irradiation position of the electron beam, and secondary electrons and reflected electrons from the sample are irradiated. Is detected, and the wiring pattern shape is inspected and measured.
  • a scanning electron beam type drawing apparatus for forming a wiring pattern on a semiconductor wafer, similarly, by irradiating a resist laminated on the semiconductor wafer with an electron beam through a plurality of electrodes, A wiring pattern is formed.
  • electrodes for controlling a plurality of charged particle beams are provided, and a plurality of control boards for controlling each electrode are mounted.
  • Patent Document 1 Japanese Patent No. 5461799
  • Non-Patent Document 1 As a method for measuring the current and the electromagnetic field generated therewith, the consumption described in Japanese Patent Application Laid-Open No. 2012-44001 (Patent Document 2) and “Measurement of Electromagnetic Field and Visualization thereof” (Non-Patent Document 1) There is a technique for detecting a change in electric current and an electromagnetic field associated therewith. When a circuit is opened due to a failure of a current consumption element or a connector is not properly fitted, or a circuit board wiring is short-circuited, a current different from that during normal operation flows in the power supply circuit. The occurrence of this abnormal current is observed to detect a faulty part of the device.
  • Patent Document 1 When the electromagnetic field distribution measuring method described in Patent Document 1 is applied to a drawing apparatus equipped with a DAC amplifier unit that does not have a circuit diagnosis function, it is necessary to replace all the DAC amplifier units, resulting in high cost. It will take. Further, it is necessary to stop the apparatus in order to replace the DAC amplifier unit.
  • the electromagnetic field distribution measuring method described in Patent Document 2 measures an electromagnetic field of a substrate inside a device or a control unit, and an electromagnetic field corresponding to the electromagnetic field at a place where the electromagnetic field is measured. It realizes that a vector is grasped three-dimensionally. In this case, since the electromagnetic field around the internal substrate and the control device is measured, it is considered that the fluctuation of the electromagnetic field due to the current inside the apparatus can be monitored without stopping the apparatus.
  • the current fluctuation of the power supply circuit that occurs at the time of failure occurs not only in the substrate and power supply device inside the device but also in the device external casing connected to the external ground.
  • a system for detecting an abnormality can be provided by measuring the current flowing through the casing and comparing it with a current measurement value obtained under normal conditions.
  • the housing of the device has a structure with irregularities such as a cylindrical shape and a protruding portion of a cable connector in addition to a flat surface.
  • the conventional electromagnetic field measurement has a problem that an error occurs in the magnetic field measurement value and the measurement coordinate depending on the attitude of the magnetic field probe.
  • the strength of the magnetic field generated by the current on the surface of the conductor is inversely proportional to the square of the distance, it is possible to measure a smaller magnetic field if the magnetic field sensor is close to the housing surface. If the magnetic field sensor is separated from the housing surface, it is necessary to calibrate the magnetic field measurement value by measuring the distance.
  • the magnetic flux interlinking with the coil cross section is maximized, the voltage generated at both ends of the coil is maximized, and when the coil cross section and the case surface are parallel, the voltage at both ends is minimized.
  • the magnetic field intensity to be measured is also different, and calibration of the magnetic field measurement is necessary.
  • the rotation angle about the vertical axis of the sensor housing surface changes, the magnetic flux linked to the coil cross section changes, so the magnetic field measurement value needs to be calibrated.
  • the angle between the magnetic field probe and the vertical surface of the housing, the distance from the housing surface, and the vertical axis of the housing surface are used as axes.
  • the present application enables measurement by avoiding obstacles such as large devices such as trains, curved housings, cables attached to the devices, and by inserting sensors in narrow places.
  • a failure diagnosis system that can be applied to an existing apparatus without stopping the system is provided.
  • the present invention provides a surface current vector measurement system for measuring a magnetic field generated based on a surface current flowing through a measurement object, a coil for measuring the magnetic flux density of the magnetic field, and detecting the position and orientation of the probe.
  • a surface current measurement probe comprising a position / posture sensor that performs amplification and an amplifier that amplifies the output signal of the coil, and a position of the probe and a position vector orientation information, and a measurement coil cross section vector and a measurement target housing surface vertical vector, And a surface current vector calculating unit that calculates the surface current vector from the corrected magnetic flux density by correcting the magnetic flux density by the angle ⁇ .
  • the surface current vector calculation unit includes a case surface vertical vector based on position information of the probe and case surface information of the measurement target.
  • the angle ⁇ between the measurement coil cross-section vector and the measurement target case surface vertical vector is calculated from the posture information of the probe, and the magnetic field measurement data measured by the probe is corrected by the angle ⁇ to obtain the magnetic flux density.
  • the surface current vector is calculated from the corrected magnetic flux density.
  • a failure diagnosis system is obtained by a surface current vector measurement system that measures the magnetic field intensity generated by a current flowing from a control board of a diagnosis target device, and the surface current vector measurement system.
  • a memory for storing the distribution data of the surface current vector during normal operation of the device to be diagnosed, a comparison unit for comparing the storage data of the memory and the distribution data of the surface current vector obtained by the surface current vector measurement system;
  • a failure diagnosing unit that determines that the diagnosis target device is faulty when the difference data in units of surface current vectors compared by the comparing unit exceeds a predetermined threshold value.
  • a monitor is further connected via an external interface, and the fault diagnosis unit is a surface current measured by the surface current vector measurement system at the time of diagnosis.
  • the surface current vector I at the probe position P on the scanning path on the surface of the case of the diagnosis target device displayed in three dimensions and on the surface of the case of the diagnosis target device displayed in a two-dimensional development view. (f) was configured to be displayed on the monitor.
  • the error due to the position / orientation information of the magnetic field sensor is calibrated to provide a high-precision magnetic field measurement means, which is attached to a large apparatus such as a train, a casing having unevenness and a curved surface, and an apparatus. Therefore, it is possible to provide a fault diagnosis system that can be applied to an existing apparatus without stopping the apparatus. It can be realized at low cost, can be installed without stopping the device, and can detect a failure of the device or the control board.
  • FIG. 1 shows the structure of the failure diagnosis system which is the 1st Embodiment of this invention. It is a figure which shows an example of a structure of the surface current measurement probe provided with the position and attitude
  • FIG. 1 shows a configuration of a failure diagnosis system 100 according to the first embodiment of the present invention.
  • the failure diagnosis system 100 includes, for example, a failure diagnosis device 120 configured on one substrate or a single device configuration and a monitor 108 connected to an external interface 109.
  • the failure diagnosis apparatus 120 includes a surface current vector measurement system 101 that measures a surface current flowing through a casing of a diagnosis target apparatus or a control board in the apparatus, and the surface current vector measurement system 101.
  • Memory 103 for storing the distribution data 110 of the surface current vector acquired at the timing of setting the initial state to the initial state (the timing at which the device to be diagnosed can be regarded as operating normally), the storage data of the memory 103, and the A crest value comparison unit 104 that compares crest values with the distribution data 110 of the surface current vector acquired at an arbitrary timing for diagnosing the diagnosis target device acquired by the surface current vector measurement system 101, and a frequency characteristic that compares the frequency characteristics Comparison of angle of surface current vector with comparison unit 105 and comparison of surface current vector angle And 106, the comparison data outputted from the respective comparator unit is configured to include a fault diagnosis unit 107 for outputting a diagnostic result to determine the fault state of the control board of the diagnosis target device or the apparatus.
  • the surface current vector measuring system 101 is connected to the surface current measuring probe 200 by, for example, a cable 111 and taken out to the surface of the casing of the target device for failure diagnosis or a control board in the device. It is configured to be able to scan the vicinity.
  • the surface current measurement probe 200 detects a magnetic field generated due to the surface current flowing on the surface of the casing of the device to be diagnosed or a control board mounted in the device.
  • the surface current vector distribution data 110 is calculated by the surface current vector calculation unit 102 based on the detected magnetic field measurement data.
  • Examples of the surface current measurement probe 200 include a method using a magnetic field measurement probe of a loop coil or a flux gate sensor.
  • the loop coil is a method of measuring a magnetic field and a current from a voltage induced at both ends of a coil, which is composed of a conductive wire formed in a loop shape and changes with time in the magnetic flux interlinking with the loop.
  • the fluxgate sensor is composed of a magnetic core, an excitation coil wound around the magnetic core, and a detection coil.
  • An AC magnetic field with a magnitude that causes the magnetic core to be magnetically saturated is applied by the excitation coil. This is a method of measuring a magnetic field and a current from a voltage induced in the.
  • the loop coil is a method of measuring a magnetic field from an induced voltage generated in proportion to a time change of the flux linkage, there is a possibility that the detection sensitivity to a low frequency magnetic field of several Hz to several tens Hz or less may be lowered.
  • the fluxgate sensor uses a magnetic material having a high magnetic permeability, the frequency characteristic of the magnetic material is a rate-determining condition, and the sensitivity is greatly reduced for a magnetic field of several tens of kHz or more.
  • a surface current vector measurement system using a magnetic field measurement probe of a loop coil or a fluxgate sensor can achieve the effect of the present invention.
  • the surface current measurement probe is used in a wide band. It is very useful to increase the sensitivity.
  • FIG. 2 shows an example of the configuration of a surface current measurement probe 200 having a position / posture detection function.
  • the probe includes a coil 201 in the current probe, an analog amplifier 211 that amplifies an output signal of the coil, and a position / posture sensor 206 that outputs probe position / posture information 210.
  • the coil 201 includes, for example, a flux gate sensor, a loop coil, a Hall element, and other sensors that can detect a magnetic field according to the minimum frequency of measurement. Further, an A / D converter for converting the output signal of the amplifier 211 into a digital signal and a digital signal processing means 208 are provided.
  • the surface current measurement probe 200 outputs magnetic field measurement data 209 converted into a digital signal by an A / D converter and digital signal processing means 208, and probe position / posture information 210.
  • the surface current vector calculation unit 102 receives the output of the surface current measurement probe 200 and uses the position information (CAD data or the like) of the housing surface 202 of the diagnosis target device that is separately prepared, and uses the housing surface vertical vector 203. And a distance 204 between the housing surface and the surface current measurement probe, and a vector 205 of the cross section of the magnetic field measurement coil 201 in the current probe, and a magnetic field measurement coil cross section vector 205 in the current probe An angle ⁇ 207 formed with the casing surface vertical vector 203 is calculated. Subsequently, calibration calculation of the magnetic field measurement data 209 that is the output of the surface current measurement probe 200 is performed.
  • CAD data or the like position information
  • FIG. 3 illustrates the processing of the surface current vector calculation unit 102 of the surface current vector measurement system 101.
  • step S101 it calculates the casing surface vertical vector 203 of the probe position output from the position and orientation sensor 206 coordinate P 0 (previously determined representative points P R representing the position of the probe.).
  • a probe position P (x 1 , y 1 , z 1 ) 401 is obtained by mapping the probe position coordinates P 0 onto the housing surface 402 by using a 3D CAD or a digital still camera. Is calculated.
  • step S102 an angle ⁇ 207 formed by the measurement coil cross-section vector 205 of the magnetic field in the current probe and the housing surface vertical vector 203 is calculated.
  • the probe inclination angle ( ⁇ x , ⁇ y , ⁇ z ) output from the position / orientation sensor 206 of the surface current measurement probe 200 is a unit vector C (x 5 , y 5 , z 5 ) of the measurement coil cross section of the probe.
  • step S103 correction calculation of the magnetic field measurement data 209 measured by the surface current measurement probe 200 is performed.
  • step S104 the surface current is calculated from the magnetic flux density calculated in S103.
  • ⁇ 0 is the Coulomb magnetic constant.
  • the output of the surface current vector calculation unit 102 of the surface current vector measurement system 101 is the probe position P (x 1 , y 1) obtained by mapping the probe position coordinates P 0 onto the housing surface. , z 1 ) and the surface current vector I (f) are output by the number of measurement points. That is, surface current vector distribution data 110 is output.
  • FIG. 6 is a flowchart for explaining failure diagnosis processing of the failure diagnosis system 100 according to the present embodiment.
  • the surface current measurement probe 200 is scanned manually or by mechanical means along the surface of the casing of the diagnosis target device or the surface of the control board in the diagnosis target device, for example, probe position information. Each time 210 changes by a predetermined scanning distance, the surface current is measured, and the surface current vector calculation unit 102 calculates and outputs the surface current vector.
  • step S201 the failure diagnosis system 100 measures the surface current by scanning the surface of the casing of the diagnosis target device or the surface of the control board in the diagnosis target device at the first timing by the surface current vector measurement system 101 to be mounted.
  • step S 202 the measured surface current vector distribution data 110 is stored in the memory 103.
  • the “first timing” at which the surface current vector measurement system 101 measures the distribution of the surface current is a timing measured when it is confirmed that the diagnosis target device is operating normally prior to the failure diagnosis process. .
  • the distribution data 110 of the surface current vector measured here is stored in the memory 103, and the stored data in the memory 103 is always read and used in subsequent failure diagnosis processing. If it is determined that there is no change in the surface current vector during normal operation, such as when the specification of the diagnosis target device is changed, the data stored in the memory is not updated.
  • the processing up to storing the surface current vector distribution data in the memory in S202 is implemented as a program for registering surface current vector distribution data during normal operation, and the subsequent failure diagnosis processing is implemented as a separate program. However, in the flowchart of FIG. 6, the steps of both programs are described in succession.
  • step S ⁇ b> 203 the surface current vector measurement system 101 scans the surface of the casing of the diagnostic target device or the surface of the control board in the diagnostic target device at the second timing to scan the surface current. Measure.
  • step S204 the surface current vector distribution data 110 stored in the memory 103 is compared with the surface current vector distribution data 110 measured at the second timing.
  • the “second timing” means that when a failure diagnosis process of the diagnosis target device is started and a predetermined diagnosis cycle time provided in the failure diagnosis system 100 is reached, or an instruction to start diagnosis is input to the failure diagnosis system 100 It is the time.
  • the comparison process of the distribution data of the surface current vector in step S204 is executed by the peak value comparison unit 104, the frequency characteristic comparison unit 105, and the surface current vector angle comparison unit 106 of the failure diagnosis apparatus 120.
  • the surface current vector distribution data 110 cannot always accurately compare surface current vectors at the same position depending on the scanning method of the probe and the difference in the position where the data is captured. However, in the measurement of the surface current at the first and second timings, the probe scanning method and the data capturing position are operated as close as possible. In the comparison process of the distribution data 110 of the surface current vectors, the surface current vectors I (f) whose probe positions P (x 1 , y 1 , z 1 ) are within the allowable error range are compared.
  • the peak value comparison unit 104 extracts the difference in current intensity of the surface current vector I (f) at the same frequency f.
  • One or more frequencies f to be compared are set in advance.
  • the frequency characteristic comparison unit 105 for example, when the difference in current intensity at a specific frequency f in the frequency spectrum of both surface current vectors I (f) to be compared is equal to or greater than an allowable error, the frequency characteristics do not match. Is determined. In the main frequency f (a frequency is designated in advance) in the frequency spectrum of the surface current vector I (f), a match / mismatch is similarly determined. The frequency characteristic comparison unit 105 executes the processing for comparing the above frequency characteristics. If the number of mismatches occurs at one or more locations, for example, the frequency spectra of both surface current vectors I (f) to be compared are determined to be mismatched.
  • the surface current vector angle comparison unit 106 extracts a difference between angles of both surface current vectors I (f) to be compared.
  • step S205 it is determined whether or not the difference in surface current is within a predetermined threshold. That is, in the surface current vector distribution data 110 to be compared, step S204 is performed for all combinations of surface current vectors I (f) whose probe positions P (x 1 , y 1 , z 1 ) are within an allowable error range. Then, the result of the comparison process is input to determine whether it is normal.
  • the output of the difference between the surface currents in the peak value comparison unit 104, the frequency characteristic comparison unit 105, and the surface current vector angle comparison unit 106 is compared with a preset threshold value.
  • the difference in current intensity of the surface current vector I (f) at the set frequency f is set to the first threshold value (a plurality of threshold values may be set for each frequency f) and the difference in frequency characteristics.
  • the comparison between the output of each of these comparison units and the threshold value may be determined by only the output of one of the comparison units, if necessary, or any combination or output of all the comparison units.
  • step S208 is performed. Migrate to
  • step S206 the probe position P (x 1 , y 1 , z 1 ) of the surface current vector I (f) determined to be abnormal is used as the surface current vector I (f) at the same frequency f that is, for example, a crest value comparison.
  • the difference value to be compared may be a difference in frequency characteristics or an angle difference between both surface current vectors I (f).
  • step S207 the probe position P (x 1 , y 1 , z 1 ) of the surface current vector I (f) having the maximum surface current difference compared in step S206 is determined as the failure location, An internal module or the like closest to the position is specified and displayed on the monitor 108.
  • step S208 at the second timing, no abnormality is found in the surface current measured by scanning the surface of the casing of the diagnosis target device or the surface of the control board in the diagnosis target device, and the result determined to be normal is monitored. The failure diagnosis process is terminated.
  • the surface current vector measurement system 101 of the present embodiment scans the surface of the cylindrical casing of the diagnostic target device, and the distribution data 110 of the surface current vector I (f) is obtained.
  • An example is shown in which the distribution data 110 of the surface current vector I (f) as a measurement result is displayed on the monitor 108 by the fault diagnosis system 100 after measurement.
  • a measurement result at the second timing for example, 3 result of scanning lines, the probe position P on the scanning path (x 1, y 1, z 1) by the surface current vector I (f ) Is displayed.
  • 5A is an example in which a cylindrical housing surface 502 is displayed in a three-dimensional manner
  • FIG. 5B is an example of a housing surface 503 in a two-dimensional development view.
  • the surface current vector I (f) 501 determined to be an abnormal surface current vector as a result of the failure diagnosis process in the failure diagnosis system 100 is displayed thickly or by changing its color. Further, in FIG. 5B, the fault location 504 causing the abnormal current is identified and displayed upstream of the abnormal surface current vector 501. Further, when the internal modules 505-1 to 505-4 of the structure inside the housing are displayed in accordance with the development view 503, the failed module can be specified.
  • FIG. 9 shows an embodiment in which this fault diagnosis system is applied to a scanning electron beam type semiconductor inspection / measurement apparatus.
  • the scanning electron beam type semiconductor inspection / measurement apparatus includes an electron gun 901 that emits an electron beam, an acceleration electrode 912 that accelerates the electron beam, aperture electrodes 902-1 and 902-2 for reducing the electron beam diameter, Deflection electrodes 903-1 and 903-2 for adjusting the irradiation position of the electron beam, a stage 904 on which the sample 905 is set, a detector 906 for detecting secondary electrons emitted from the sample 905, and a detection signal are amplified.
  • a signal detection board 907 that performs signal processing by converting it into a digital signal
  • a monitor 908 that displays an image of the signal processed data
  • control boards 911-1 and 911- for applying a control voltage or control current to each electrode.
  • This is an electron microscope composed of 2,911-3 and 911-4.
  • a fault diagnosis system composed of a surface current measuring probe 200 and a fault diagnosis device 120 includes a current that flows from the control board to the electrode, and a surface current that flows from the control board to the ground through the housing of the electron microscope. It is installed to scan the control board and the surface of the housing, measure the surface current, and perform fault diagnosis of the scanning electron beam semiconductor inspection / measurement device Yes.
  • FIG. 10 is a diagram showing a form in which the failure diagnosis system of the present embodiment is applied to an automobile.
  • a plurality of control units 1004 and 1005 for controlling an engine, a brake system, a navigation system, and the like are mounted in the automobile, and an inverter 1002 and a power supply unit 1003 for controlling the motor 1001 are mounted.
  • FIG. 7 shows an example of the configuration of a surface current measurement probe 700 having a position / attitude detection function used in the surface current vector measurement system 101 according to the second embodiment of the present invention.
  • This probe includes a current-in-probe coil 701, an analog amplifier 711 that amplifies the output signal of the coil, and a position / posture sensor 706 that outputs probe position / posture information 710.
  • the coil 701 includes, for example, a flux gate sensor, a loop coil, a Hall element, and other sensors that can detect a magnetic field according to the minimum frequency of measurement. Further, an A / D converter for converting the output signal of the amplifier 711 into a digital signal and a digital signal processing means 708 are provided.
  • the surface current measurement probe 700 outputs magnetic field measurement data 709 converted into a digital signal by an A / D converter and digital signal processing means 708, and probe position / posture information 710.
  • the surface current vector calculation unit 102 receives the output of the surface current measurement probe 700, and uses the position information (CAD data or the like) of the housing surface 702 of the diagnosis target device that is separately prepared, and uses the housing surface vertical vector 703. And a distance 704 between the housing surface 702 and the surface current measurement probe 700 is calculated, and further, a cross-sectional vector 705 of the magnetic field measurement coil 701 in the current probe is used to calculate the magnetic field measurement coil cross section in the current probe. An angle ⁇ 707 formed by the vector 705 and the casing surface vertical vector 703 is calculated. Further, the magnetic field measurement data 709 which is the output of the surface current measurement probe 700 is calibrated and calculated using the curvature ⁇ ′ 712 of the housing surface.
  • FIG. 8 illustrates the processing of the surface current vector calculation unit 102 of the surface current vector measurement system 101.
  • step S301 similarly to step S101, and calculates the casing surface vertical vector 703 of the probe position output from the position and orientation sensor 706 coordinate P 0 (previously determined representative points P R representing the position of the probe.) .
  • step S302 as in step S102, the angle ⁇ 707 formed by the measurement coil cross-section vector 705 of the magnetic field in the current probe and the casing surface vertical vector 703 is calculated.
  • step S303 similarly to step S103, correction calculation of the magnetic field measurement data 709 measured by the surface current measurement probe 700 is performed.
  • step S304 the surface current is calculated from the magnetic flux density B (f) calculated in S303.
  • the surface current vector I (f) is given by the following equation according to Bio-Savart's law.
  • I (f) B (f) * 2 ⁇ a / ⁇ 0
  • a represents the distance between the surface current and the probe
  • ⁇ 0 represents the magnetic constant of Coulomb
  • Measurement of the surface current vector based on this flowchart makes it possible to measure the surface current vector on the surface of the housing with unevenness with high sensitivity.
  • this invention is not limited to the above-mentioned Example, Various modifications are included.
  • the above-described embodiments have been described in detail for easy understanding of the present invention, and are not necessarily limited to those having all the configurations described.
  • a part of the configuration of one embodiment can be replaced with the configuration of another embodiment, and the configuration of another embodiment can be added to the configuration of one embodiment.
  • Each of the above-described configurations, functions, processing units, processing means, and the like may be realized by hardware by designing a part or all of them with, for example, an integrated circuit.
  • Each of the above-described configurations, functions, and the like may be realized by software by interpreting and executing a program that realizes each function by the processor.
  • Information such as programs, tables, and files for realizing each function can be stored in a recording device such as a memory, a hard disk, or an SSD (Solid State Drive), or a recording medium such as an IC card, an SD card, or a DVD.

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Abstract

L'invention concerne un système de diagnostic de défaillance destiné à des dispositifs industriels et médicaux, qui est peu coûteux et est facile à installer. Le présent système de diagnostic de défaillance est conçu de manière à être doté d'un système de mesure de vecteur de courant de surface permettant de mesurer l'intensité du champ magnétique généré par le courant circulant dans une carte de commande d'un dispositif qui doit subir un diagnostic, d'une mémoire permettant de stocker les données de distribution du vecteur de courant de surface pour le dispositif qui doit subir un diagnostic acquises par le système de mesure de vecteur de courant de surface pendant un fonctionnement normal, d'une unité de comparaison permettant de comparer les données sauvegardées dans la mémoire et les données de distribution de vecteur de courant de surface acquises par le système de mesure de vecteur de courant de surface, et d'une unité de diagnostic de défaillance permettant de déterminer qu'il y a une défaillance dans le dispositif devant être diagnostiqué si les données de différence par vecteur de courant de surface comparées par l'unité de comparaison dépassent un seuil prescrit.
PCT/JP2015/062028 2015-04-21 2015-04-21 Système de mesure de vecteur de courant de surface et système de diagnostic de défaillance l'utilisant WO2016170589A1 (fr)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114000178A (zh) * 2021-11-26 2022-02-01 中南大学 一种电解槽极板的故障检测方法及其装置、终端和可读存储介质
US11372048B2 (en) * 2019-11-29 2022-06-28 Hitachi, Ltd. Diagnostic device and diagnostic method

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