WO2016139856A1 - 圧電アクチュエーター装置及びその制御方法 - Google Patents

圧電アクチュエーター装置及びその制御方法 Download PDF

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Publication number
WO2016139856A1
WO2016139856A1 PCT/JP2015/083667 JP2015083667W WO2016139856A1 WO 2016139856 A1 WO2016139856 A1 WO 2016139856A1 JP 2015083667 W JP2015083667 W JP 2015083667W WO 2016139856 A1 WO2016139856 A1 WO 2016139856A1
Authority
WO
WIPO (PCT)
Prior art keywords
piezoelectric
resonance
actuator device
driving
piezoelectric element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2015/083667
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English (en)
French (fr)
Japanese (ja)
Inventor
悠 西村
敏章 枝光
山形　仁
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to US15/545,118 priority Critical patent/US20180006584A1/en
Publication of WO2016139856A1 publication Critical patent/WO2016139856A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/025—Inertial sliding motors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
    • G02B7/08—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification adapted to co-operate with a remote control mechanism
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06—Drive circuits; Control arrangements or methods
    • H02N2/065—Large signal circuits, e.g. final stages
    • H02N2/067—Large signal circuits, e.g. final stages generating drive pulses
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B2205/00—Adjustment of optical system relative to image or object surface other than for focusing
    • G03B2205/0053—Driving means for the movement of one or more optical element
    • G03B2205/0061—Driving means for the movement of one or more optical element using piezoelectric actuators
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B3/00—Focusing arrangements of general interest for cameras, projectors or printers
    • G03B3/10—Power-operated focusing

Definitions

  • the driving member can be displaced with an optimum sawtooth wave using a piezoelectric element, and the driving target coupled with the driving member with a predetermined frictional force can be moved at high speed.
  • An excellent piezoelectric actuator device and a control method thereof can be provided.
  • FIG. 3 shows a mechanical model of the piezoelectric actuator device 100 using the drive circuit 104 shown in FIG.
  • m 1 is the mass of the support member 105
  • m 2 is the mass of the driving member 102
  • m 3 is the mass of the driven object 106
  • k is a spring constant of the piezoelectric element 101
  • c v is the damping coefficient of the piezoelectric element 101
  • F is the force
  • N is a pressing force of the engaging member 103
  • ⁇ is a coefficient of friction between the driving member 102 and the engaging member 103, and therefore ⁇ N is a frictional force.
  • (A1) The difference between the time t f during which the drive member 102 moves fast and the time t s during which the drive member 102 moves slowly is increased as much as possible.
  • (A2) The maximum speed (v 102, p ) of the driving member 102 at the time t s is increased as much as possible.
  • (A3) At time t s , the time during which the drive member 102 is near the maximum speed (v 102, p ) is made as long as possible.
  • FIG. 6 shows a drive circuit 104 ′ that inputs a drive voltage to the piezoelectric element 101 according to another configuration example.
  • the difference from the drive circuit 104 shown in FIG. 2 is that an inductor 27 and a resistor 28 are connected in series to both ends of the piezoelectric element 101. It is assumed that a drive control circuit (not shown) controls the switching operations of the switches 21 to 24.
  • the governing equation of the piezoelectric actuator device 700 becomes the fourth-order differential equation (18) (of the displacement x of the driving member 102) as described above, and two resonance phenomena appear because the inductor 27 and the resistor 28 are connected in series. This is brought about by a new configuration (see FIG. 6 or FIG. 7) in which a driving voltage is applied to the piezoelectric element 101.
  • FIG. 8 shows an example of the frequency response of the transfer function expressed by the above equation (22).
  • the first term on the right side represents piezoelectric mechanical resonance
  • the second term represents piezoelectric electrical resonance
  • the speed of the piezoelectric actuator device 700 (driving member 102) is similarly superposed of two vibrations.
  • the angular frequency of this vibration is ⁇ 1 and ⁇ 2 for both position and velocity.
  • ⁇ 1 and ⁇ 2 are the following equation (40) from the above equation (25). Therefore, if the damping ratio ⁇ is small, the natural circular frequencies ⁇ n1 and ⁇ n2 are almost equal to each other.
  • FIGS. 11A and 11B show waveforms of the position and speed of the drive member 102 in the piezoelectric actuator device 700 when the drive circuit 104 ′ shown in FIG. 6 is used.
  • the waveform shown in FIG. 11 is an analytical solution of the response waveform of the piezoelectric actuator device 700 obtained from the above equations (36) and (38).
  • the speed of the driving member 120 is the sum of the speeds of the first component and the second component.
  • FIGS. 12A and 12B show the position and velocity waveforms of the drive member 102 in the piezoelectric actuator device 700 when the drive circuit 104 shown in FIG. 2 is used as a comparison with FIG. Show.
  • the speed, if the damping ratio zeta 1 of the first component is small, the time t pmin time t pmax and first MIN values of first MAX value of the first component are respectively the following formulas ( 45).
  • the piezoelectric actuator device includes, for example, adjustment of a photographing lens position of a camera, adjustment of a projection lens position of an overhead projector, adjustment of a lens position of binoculars (or a telescope or a microscope), and XY movement. It can be used to move the stage.
  • the first resonance phenomenon has an electrical influence on the series connection body due to the piezoelectric effect of the piezoelectric element while mainly driving mechanical resonance of the piezoelectric actuator device with respect to driving by the piezoelectric element.
  • the second resonance phenomenon is a piezoelectric electrical resonance that is influenced by the mechanical vibration of the driving member due to the piezoelectric effect of the piezoelectric element while mainly conducting electrical resonance.
  • the first resonance phenomenon mainly includes a two-mass mechanical resonance frequency defined based on an equivalent spring constant determined from a physical property value of the piezoelectric element and a mass of the driving member.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Lens Barrels (AREA)
PCT/JP2015/083667 2015-03-02 2015-11-30 圧電アクチュエーター装置及びその制御方法 Ceased WO2016139856A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US15/545,118 US20180006584A1 (en) 2015-03-02 2015-11-30 Piezoelectric actuator apparatus and control method therefor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015040732A JP2016163437A (ja) 2015-03-02 2015-03-02 圧電アクチュエーター装置及びその制御方法
JP2015-040732 2015-03-02

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Publication Number Publication Date
WO2016139856A1 true WO2016139856A1 (ja) 2016-09-09

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US (1) US20180006584A1 (enExample)
JP (1) JP2016163437A (enExample)
WO (1) WO2016139856A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109831116A (zh) * 2019-03-26 2019-05-31 合肥工业大学 一种由合成方波驱动的直线压电马达

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6143321B1 (ja) * 2017-01-26 2017-06-07 オーツェイド株式会社 イヤホン及びヘッドホン
WO2021044198A1 (en) * 2019-09-06 2021-03-11 Arcelormittal Front structure for an electric vehicle
CN120825081B (zh) * 2025-09-15 2025-12-05 中国科学院长春光学精密机械与物理研究所 基于延迟准锯齿波信号的压电陶瓷驱动方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001268951A (ja) * 2000-03-23 2001-09-28 Minolta Co Ltd 駆動装置
JP2006522579A (ja) * 2003-04-02 2006-09-28 ピエゾモーター ウプサラ エイビー 近共振広範囲動作電気機械式モータ

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JPH11146655A (ja) * 1997-11-05 1999-05-28 Taiyo Yuden Co Ltd 圧電トランス駆動方法及びその装置
IT1318880B1 (it) * 2000-09-19 2003-09-10 St Microelectronics Srl Circuito elettronico per il pilotaggio ad alta efficienza di carichipiezo-elettrici con cablaggio induttivo-resisitivo.
TW523582B (en) * 2000-11-24 2003-03-11 Shr-Guang Li Fourth-order partial differential equation piezoelectric transducer with mutually independent gain and phase functions
JP3595808B2 (ja) * 2002-07-11 2004-12-02 コニカミノルタホールディングス株式会社 電圧発生回路及び該回路を備えた駆動装置
JP2012005957A (ja) * 2010-06-24 2012-01-12 Maxell Finetech Ltd 駆動装置、画像取得装置、及び電子機器
JP4744636B1 (ja) * 2010-02-12 2011-08-10 マクセルファインテック株式会社 駆動装置、画像取得装置および電子機器
JP6579778B2 (ja) * 2014-05-14 2019-09-25 キヤノン株式会社 振動型駆動装置、振動型駆動装置を備える交換用レンズ、撮像装置、及び振動型駆動装置の製造方法
CN204465480U (zh) * 2015-03-31 2015-07-08 合肥航太电物理技术有限公司 一种雷电流c分量专控电路

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001268951A (ja) * 2000-03-23 2001-09-28 Minolta Co Ltd 駆動装置
JP2006522579A (ja) * 2003-04-02 2006-09-28 ピエゾモーター ウプサラ エイビー 近共振広範囲動作電気機械式モータ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109831116A (zh) * 2019-03-26 2019-05-31 合肥工业大学 一种由合成方波驱动的直线压电马达
CN109831116B (zh) * 2019-03-26 2020-01-03 合肥工业大学 一种由合成方波驱动的直线压电马达

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US20180006584A1 (en) 2018-01-04
JP2016163437A (ja) 2016-09-05

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