WO2016111266A1 - Dispositif de détection de position - Google Patents

Dispositif de détection de position Download PDF

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Publication number
WO2016111266A1
WO2016111266A1 PCT/JP2016/050052 JP2016050052W WO2016111266A1 WO 2016111266 A1 WO2016111266 A1 WO 2016111266A1 JP 2016050052 W JP2016050052 W JP 2016050052W WO 2016111266 A1 WO2016111266 A1 WO 2016111266A1
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WO
WIPO (PCT)
Prior art keywords
detection
coil
detection coil
voltage
detection device
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Application number
PCT/JP2016/050052
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English (en)
Japanese (ja)
Inventor
健一 古賀
大谷 和也
Original Assignee
株式会社東海理化電機製作所
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Application filed by 株式会社東海理化電機製作所 filed Critical 株式会社東海理化電機製作所
Publication of WO2016111266A1 publication Critical patent/WO2016111266A1/fr

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques

Definitions

  • the present invention relates to a position detection device that detects the position of a detection target.
  • Patent Document 1 describes a conventional example of a position detection device.
  • the position detection device includes a detection coil disposed opposite to the metal portion interlocked with the detection portion, and changes in the distance between the detection coil and the metal portion when the detection portion moves, the inductance of the detection coil Based on changes in
  • the power supply voltage of the detection coil may fluctuate due to a change in the surrounding environment or the like.
  • the power supply voltage that is, the voltage applied to the detection coil fluctuates
  • the output voltage of the detection coil changes, which hinders accurate position detection. Therefore, it is desirable to provide a mechanism for canceling the fluctuation of the power supply voltage.
  • incorporating such a mechanism increases the space required for placement of the sensing coil.
  • An object of the present invention is to provide a position detection device capable of reducing the space required for the arrangement of detection coils.
  • the position detection device includes a position of the detection target having the detection target based on a first detection coil and a second detection coil to which an AC voltage is applied from a power supply, and a distance from the position detection device to the detection target. And a position calculation unit for calculating The first detection coil and the second detection coil are positioned such that the first detection coil is closer to the object to be detected, and the second detection coil is closer to the object to be detected.
  • the first detection coil is arranged side by side along a coil axis direction parallel to a coil axis of the first detection coil.
  • the position calculation unit calculates the position of the detection target based on an output signal of the first detection coil and an output signal of the second detection coil.
  • the first detection coil and the second detection coil are arranged side by side in the coil axial direction, for example, compared with the case where the first detection coil and the second detection coil are arranged side by side in the planar direction, It is possible to reduce the area required for the arrangement of the coils.
  • the space required for the arrangement of the detection coil can be reduced.
  • FIG. 7 is a schematic view illustrating the operation of the position detection device of FIG. 1;
  • the wave form diagram which shows the inductance change when the current of the 1st detection coil and the 2nd detection coil is reverse.
  • FIG. 6 is a waveform diagram showing a change in voltage division ratio when the currents of the first detection coil and the second detection coil are in opposite directions.
  • the position detection device 1 is a type of an eddy current sensor that detects the position of the detection target 2 based on the distance from the position detection device 1 to the detection target 2.
  • the position detection device 1 of the present example includes a first detection coil 4 and a second detection coil 5 to which an AC voltage Ve is applied from a power supply 3 of the position detection device 1.
  • the to-be-detected part 2 includes the to-be-detected target 6 which changes the magnetic field generate
  • the to-be-detected object 6 consists of a metal plate which is a metal plate-shaped member, for example.
  • the detection target 6 is attached and fixed to the detection portion 2. Therefore, the detection target 6 moves integrally with the detection unit 2.
  • the object to be detected 6 is arranged along the coil axis direction K (see the arrow in FIG. 1) parallel to the coil axis L of the first detection coil 4 (second detection coil 5) with the movement of the detection part 2
  • the linear reciprocation which approaches or estranges to 1 detection coil 4 is possible.
  • the first detection coil 4 and the second detection coil 5 are arranged side by side along the coil axis direction K.
  • the first detection coil 4 is disposed closer to the detection target 6, and the second detection coil 5 is disposed farther to the detection target 6.
  • the first detection coil 4 and the second detection coil 5 are opposed to the sensor surface of the position detection device 1 which is the reference for detecting the distance to the detection portion 2 (that is, the position of the detection portion 2).
  • the second detection coil 5 is disposed at a position farther from the sensor surface than the first detection coil 4.
  • the sensor surface of the position detection device 1 is, for example, a coil surface of the first detection coil 4.
  • the sensor surface may be a surface parallel to the coil surface of the first detection coil 4.
  • the second detection coil 5 is provided as a reference coil for canceling the fluctuation of the voltage (power supply voltage) applied to the first detection coil 4.
  • the output voltage (inductance) of each of the first and second detection coils 4 and 5 is used as a signal for position detection in consideration of the fluctuation of the power supply voltage.
  • the first detection coil 4 and the second detection coil 5 are connected in series to the power supply 3.
  • the first and second detection coils 4 and 5 are disposed such that the direction of the current flowing through the first detection coil 4 and the direction of the current flowing through the second detection coil 5 are opposite to each other.
  • the magnetic field of the first detection coil 4 and the magnetic field of the second detection coil 5 are generated in opposite directions to each other.
  • the first detection coil 4 and the second detection coil 5 are formed in the same area with the same number of turns.
  • a voltage detection unit 7 that detects a voltage between both ends of the first detection coil 4 is connected between input and output ends of the first detection coil 4.
  • a voltage detection unit 8 for detecting a voltage between both ends of the second detection coil 5 is connected between input and output ends of the second detection coil 5.
  • the output end of the second detection coil 5 is connected to the ground GND.
  • the position detection device 1 includes a position calculation unit 9 that calculates the position of the detection target 2 based on the output signal of the first detection coil 4 and the output signal of the second detection coil 5.
  • the position calculation unit 9 is based on the output voltage V1 of the first detection coil 4 detected by the voltage detection unit 7 and the output voltage V2 of the second detection coil 5 detected by the voltage detection unit 8.
  • the position of the detection target 2 is determined. For example, based on the value of V1 / V2 obtained by dividing the output voltage V1 of the first detection coil 4 by the output voltage V2 of the second detection coil 5, the position calculation unit 9
  • the distance to the detection target 6, that is, the position of the detection target 2 is determined.
  • the first detection coil 4 and the second detection coil 5 are provided on the substrate 10.
  • the first detection coil 4 is provided on the first layer 10a of the substrate 10 (for example, the first surface of the substrate 10), and the second detection coil 5 is opposite to the second layer 10b of the substrate 10 (for example, the first surface).
  • the first and second detection coils 4 and 5 are disposed on the same substrate 10 at a position where they overlap in plan view (as viewed from the coil axis direction K).
  • the first detection coil 4 is formed only on the first layer 10 a of the substrate 10, and the second detection coil 5 is formed only on the second layer 10 b of the substrate 10.
  • FIG. 3 illustrates a related art position detection device 1A.
  • the voltage of the power supply 3 may fluctuate depending on the ambient environment of the position detection device 1A.
  • the output voltage of the detection coils 4 and 5 also changes accordingly, which hinders accurate position detection. Therefore, in the position detection device 1A, the first detection coil 4 and the second detection coil 5 are arranged side by side in the planar direction so that the inductance of the second detection coil 5 used as a reference coil is always constant.
  • the position detection device 1A performs time-division control of the connection state of the first and second detection coils 4 and 5 with respect to the power supply 3 by the switch 15, and outputs (detection voltage) of the first detection coil 4 and the second detection.
  • the output (detection voltage) of the coil 5 is obtained separately.
  • the position detection device 1A can obtain the output (detection voltage) of the second detection coil 5 and cancel the fluctuation of the voltage of the power supply 3 based on the detection voltage.
  • a space for arranging the first detection coil 4 and the second detection coil 5 on the same surface of the substrate is required.
  • the arrangement space of the first and second detection coils 4 and 5 for example, the area of the substrate on which the coils 4 and 5 are arranged, increases.
  • the first detection coil 4 and the second detection coil 5 are arranged side by side in the coil axial direction K and connected in series to the power supply 3. Therefore, even if the voltage of the power supply 3 fluctuates, the fluctuation of the power supply voltage affects both the output voltage V1 of the first detection coil 4 and the output voltage V2 of the second detection coil 5 at the same ratio. It becomes a thing. Therefore, the fluctuation of the power supply voltage is canceled by performing the position calculation using the output voltages V1 and V2 (in this example, the position calculation based on the division calculation). For this reason, if the position detection device 1 is used, it is possible to perform accurate position calculation taking into consideration fluctuations in the power supply voltage.
  • the arrangement space of the first and second detection coils 4 and 5, that is, the coil 4 is also possible to minimize the area of the substrate 10 on which 5 is disposed.
  • FIG. 5 shows the first and second detection coils 4 and 5 in the case where the direction of the current flowing through the first detection coil 4 of the position detection device 1 is set to the same direction as the direction of the current flowing through the second detection coil 5.
  • FIG. 6 shows a change in voltage division ratio of the first and second detection coils 4 and 5 in the case of FIG.
  • the inductance of each detection coil 4, 5 also increases (or decreases). For this reason, it is limited to increase the change of the voltage division ratio with respect to the change of the distance to the detection target 6.
  • FIG. 7 shows the first and second detection coils 4 and 5 in the case where the direction of the current flowing through the first detection coil 4 of the position detection device 1 is set in the opposite direction to the direction of the current flowing through the second detection coil 5.
  • the inductance change of each of FIG. 8 illustrates the change in voltage division ratio of the first and second detection coils 4 and 5 in the case of FIG. 7.
  • the distance to the detection target 6 increases (or As it decreases, the inductance of the detection coil 4 increases (or decreases), while the inductance of the detection coil 5 decreases (or increases).
  • the position detection device 1 applies the AC voltage Ve from the power supply 3 to the first detection coil 4 and the second detection coil 5 arranged in line in the coil axial direction K (axial direction of the coil axis L). . Then, the position detection device 1 changes the output voltages V1 and V2 by using the output voltages V1 and V2 of the first detection coil 4 and the second detection coil 5 which change according to the distance to the detection target 2 Calculation for canceling (in this example, division calculation) is performed, and the position of the detection target 2 is detected based on the value obtained by the calculation.
  • the fluctuation of the power supply voltage affects both the output voltages V1 and V2 at the same ratio. Therefore, if division calculations etc. using output voltages V1 and V2 are performed, the fluctuation of the power supply voltage can be canceled, and the position of the detection target 2 is calculated based on the value where the fluctuation of the power supply voltage is canceled. Can. Therefore, even when the voltage of the power supply 3 fluctuates, it is advantageous to perform correct position detection.
  • the first detection coil 4 and the second detection coil 5 are arranged side by side in the coil axial direction K, for example, when the first detection coil 4 and the second detection coil 5 are arranged side by side in the plane direction Compared to the above, the space required for the arrangement of the first detection coil 4 and the second detection coil 5 can be reduced.
  • the first detection coil 4 and the second detection coil 5 are formed on one substrate 10, that is, the same substrate 10.
  • the first detection coil 4 is formed on the first layer 10 a of the substrate 10
  • the second detection coil 5 is formed on the second layer 10 b of the substrate 10. If this configuration is adopted, the first detection coil 4 and the second detection coil 5 aligned in the coil axial direction K can be easily manufactured.
  • the first detection coil 4 and the second detection coil 5 are connected in series. Therefore, a voltage can be applied to the first detection coil 4 and the second detection coil 5 by one power supply 3.
  • the first detection coil 4 and the second detection coil 5 are arranged such that a magnetic field is generated in the reverse direction by the current flowing in the reverse direction in each of the coils 4 and 5. Therefore, when the distance between the detection target 6 and the first detection coil 4 changes, the inductance of the first detection coil 4 and the inductance of the second detection coil 5 change in the opposite direction to each other.
  • the first detection coil 4 is formed on the first layer 10a of the substrate 10
  • the second detection coil 5 is formed on the second layer 10a of the substrate 10
  • each of the first layer 10a and the second layer 10b is a single layer. It is one more layer. Therefore, since it is not necessary to form the first detection coil 4 across the plurality of layers of the substrate 10, the formation of the first detection coil 4 can be simplified. This is also true for the second detection coil 5.
  • the position detection device 1 of this example causes the first detection coil 4 and the second detection coil 5 to oscillate directly, so the outputs of the first detection coil 4 and the second detection coil 5 Can be increased. Therefore, it is advantageous to easily detect the position of the detection target 2.
  • the above embodiment may be changed to the following modes.
  • the direction of the current flowing through the first detection coil 4 and the second detection coil 5 is not limited to the opposite direction, and may be the same direction. That is, if the coils 4 and 5 are arranged side by side along the coil axis direction K, at least the advantage that the arrangement space of the coils 4 and 5 can be reduced can be obtained.
  • the directions of the current flowing through the coils 4 and 5 are the same, it is limited to increase the change in voltage division ratio of the coils 4 and 5. Therefore, in order to detect the position of the detection target 2 more accurately while reducing the arrangement space of the coils 4 and 5, it is more preferable that the direction of the current flowing through the coils 4 and 5 be set in the opposite direction.
  • the first detection coil 4 and the second detection coil 5 may be arranged in an arrangement pattern in which they are not arranged on the same axial center in the coil axial direction K.
  • the arrangement pattern in which the coils 4 and 5 are arranged side by side along the coil axis direction K means not only the arrangement pattern in which the coils 4 and 5 are arranged on the same axis but also a plan view (that is, the coils Also includes an arrangement pattern in which the coils 4 and 5 are arranged so as to partially overlap each other in the axial direction K), and the axis of the coil 4 is offset from the axis of the coil 5.
  • the arrangement pattern in which the coils 4 and 5 are disposed so as to partially overlap with each other as compared with the arrangement pattern in which the coils 4 and 5 are disposed side by side in the planar direction as shown in FIG. Can be made smaller.
  • the first detection coil 4 and the second detection coil 5 may have different shapes.
  • the coil shapes of the first detection coil 4 and the second detection coil 5 can be changed to other shapes than the square shape.
  • the substrate 10 may be a multilayer substrate, and the first detection coil 4 and the second detection coil 5 may be formed in different layers of the multilayer substrate.
  • the first detection coil 4 and the second detection coil 5 may each be formed across multiple layers of the substrate 10.
  • the position of the detection target 2 may be determined by finding it.
  • the connection between each of the first detection coil 4 and the second detection coil 5 and the voltage detection unit may be time-divisionally controlled by using a switch.
  • a single voltage detection unit and a single three-terminal switch may be used instead of the two voltage detection units 7 and 8.
  • one end of the voltage detection unit is connected to the connection node between the coils 4 and 5 and the other end is connected to the common terminal of the switch.
  • the first switching terminal of the switch is connected to the input end of the coil 4, and the second switching terminal of the switch is connected to the output end (ground GND) of the coil 5.
  • the connection of the common terminal (the other end of the voltage detection unit) of the switch is switched between the first switching terminal (the input terminal of the coil 4) and the second switching terminal (ground GND).
  • the calculation performed to detect the position of the detection target 2 is not limited to the division of the output voltages V1 and V2, but may be changed to another calculation method.
  • the first detection coil 4 and the second detection coil 5 are not limited to being connected in series.
  • a dedicated power supply can be connected to each of the first detection coil 4 and the second detection coil 5, or the like, and other configuration can be appropriately changed.
  • the output signal of each of the coils 4 and 5 used for position detection is not limited to the voltage value, and may be changed to another parameter such as a current value.
  • the detection target 6 is not limited to the metal plate, and may be changed to, for example, another member such as a coil.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

L'invention concerne un dispositif (1) de détection de position pourvu d'une première bobine de détection (4) et d'une seconde bobine de détection (5) auxquelles une tension alternative (VE) est appliquée à partir d'une alimentation électrique (3) et d'une unité (9) de calcul de position qui calcule la position d'une partie à détecter (2) sur la base de la distance depuis le dispositif (1) de détection de position et d'un objet à détecter (6). Les première et seconde bobines de détection sont disposées de manière collatérale le long d'une direction axiale (K) de bobine, de telle sorte que la première bobine de détection soit située plus près de l'objet à détecter et que la seconde bobine de détection soit située plus loin de l'objet à détecter. L'unité (9) de calcul de position calcule la position de la partie à détecter sur la base d'un signal de sortie (V1) par la première bobine de détection et d'un signal de sortie par la seconde bobine de détection.
PCT/JP2016/050052 2015-01-06 2016-01-04 Dispositif de détection de position WO2016111266A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015000986A JP2016125940A (ja) 2015-01-06 2015-01-06 位置検出装置
JP2015-000986 2015-01-06

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WO2016111266A1 true WO2016111266A1 (fr) 2016-07-14

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018158918A1 (fr) * 2017-03-02 2018-09-07 三菱電機株式会社 Dispositif de détection de position et dispositif de transmission d'énergie électrique

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5692804U (fr) * 1979-12-17 1981-07-23
JPS62225986A (ja) * 1986-03-12 1987-10-03 エルデツク コ−ポレイシヨン 物体の接近感知方法及び接近センサ
JP2011137748A (ja) * 2009-12-28 2011-07-14 Jtekt Corp 変位センサ装置及び転がり軸受装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5692804U (fr) * 1979-12-17 1981-07-23
JPS62225986A (ja) * 1986-03-12 1987-10-03 エルデツク コ−ポレイシヨン 物体の接近感知方法及び接近センサ
JP2011137748A (ja) * 2009-12-28 2011-07-14 Jtekt Corp 変位センサ装置及び転がり軸受装置

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