WO2016111266A1 - Position detecting device - Google Patents

Position detecting device Download PDF

Info

Publication number
WO2016111266A1
WO2016111266A1 PCT/JP2016/050052 JP2016050052W WO2016111266A1 WO 2016111266 A1 WO2016111266 A1 WO 2016111266A1 JP 2016050052 W JP2016050052 W JP 2016050052W WO 2016111266 A1 WO2016111266 A1 WO 2016111266A1
Authority
WO
WIPO (PCT)
Prior art keywords
detection
coil
detection coil
voltage
detection device
Prior art date
Application number
PCT/JP2016/050052
Other languages
French (fr)
Japanese (ja)
Inventor
健一 古賀
大谷 和也
Original Assignee
株式会社東海理化電機製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社東海理化電機製作所 filed Critical 株式会社東海理化電機製作所
Publication of WO2016111266A1 publication Critical patent/WO2016111266A1/en

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques

Definitions

  • the present invention relates to a position detection device that detects the position of a detection target.
  • Patent Document 1 describes a conventional example of a position detection device.
  • the position detection device includes a detection coil disposed opposite to the metal portion interlocked with the detection portion, and changes in the distance between the detection coil and the metal portion when the detection portion moves, the inductance of the detection coil Based on changes in
  • the power supply voltage of the detection coil may fluctuate due to a change in the surrounding environment or the like.
  • the power supply voltage that is, the voltage applied to the detection coil fluctuates
  • the output voltage of the detection coil changes, which hinders accurate position detection. Therefore, it is desirable to provide a mechanism for canceling the fluctuation of the power supply voltage.
  • incorporating such a mechanism increases the space required for placement of the sensing coil.
  • An object of the present invention is to provide a position detection device capable of reducing the space required for the arrangement of detection coils.
  • the position detection device includes a position of the detection target having the detection target based on a first detection coil and a second detection coil to which an AC voltage is applied from a power supply, and a distance from the position detection device to the detection target. And a position calculation unit for calculating The first detection coil and the second detection coil are positioned such that the first detection coil is closer to the object to be detected, and the second detection coil is closer to the object to be detected.
  • the first detection coil is arranged side by side along a coil axis direction parallel to a coil axis of the first detection coil.
  • the position calculation unit calculates the position of the detection target based on an output signal of the first detection coil and an output signal of the second detection coil.
  • the first detection coil and the second detection coil are arranged side by side in the coil axial direction, for example, compared with the case where the first detection coil and the second detection coil are arranged side by side in the planar direction, It is possible to reduce the area required for the arrangement of the coils.
  • the space required for the arrangement of the detection coil can be reduced.
  • FIG. 7 is a schematic view illustrating the operation of the position detection device of FIG. 1;
  • the wave form diagram which shows the inductance change when the current of the 1st detection coil and the 2nd detection coil is reverse.
  • FIG. 6 is a waveform diagram showing a change in voltage division ratio when the currents of the first detection coil and the second detection coil are in opposite directions.
  • the position detection device 1 is a type of an eddy current sensor that detects the position of the detection target 2 based on the distance from the position detection device 1 to the detection target 2.
  • the position detection device 1 of the present example includes a first detection coil 4 and a second detection coil 5 to which an AC voltage Ve is applied from a power supply 3 of the position detection device 1.
  • the to-be-detected part 2 includes the to-be-detected target 6 which changes the magnetic field generate
  • the to-be-detected object 6 consists of a metal plate which is a metal plate-shaped member, for example.
  • the detection target 6 is attached and fixed to the detection portion 2. Therefore, the detection target 6 moves integrally with the detection unit 2.
  • the object to be detected 6 is arranged along the coil axis direction K (see the arrow in FIG. 1) parallel to the coil axis L of the first detection coil 4 (second detection coil 5) with the movement of the detection part 2
  • the linear reciprocation which approaches or estranges to 1 detection coil 4 is possible.
  • the first detection coil 4 and the second detection coil 5 are arranged side by side along the coil axis direction K.
  • the first detection coil 4 is disposed closer to the detection target 6, and the second detection coil 5 is disposed farther to the detection target 6.
  • the first detection coil 4 and the second detection coil 5 are opposed to the sensor surface of the position detection device 1 which is the reference for detecting the distance to the detection portion 2 (that is, the position of the detection portion 2).
  • the second detection coil 5 is disposed at a position farther from the sensor surface than the first detection coil 4.
  • the sensor surface of the position detection device 1 is, for example, a coil surface of the first detection coil 4.
  • the sensor surface may be a surface parallel to the coil surface of the first detection coil 4.
  • the second detection coil 5 is provided as a reference coil for canceling the fluctuation of the voltage (power supply voltage) applied to the first detection coil 4.
  • the output voltage (inductance) of each of the first and second detection coils 4 and 5 is used as a signal for position detection in consideration of the fluctuation of the power supply voltage.
  • the first detection coil 4 and the second detection coil 5 are connected in series to the power supply 3.
  • the first and second detection coils 4 and 5 are disposed such that the direction of the current flowing through the first detection coil 4 and the direction of the current flowing through the second detection coil 5 are opposite to each other.
  • the magnetic field of the first detection coil 4 and the magnetic field of the second detection coil 5 are generated in opposite directions to each other.
  • the first detection coil 4 and the second detection coil 5 are formed in the same area with the same number of turns.
  • a voltage detection unit 7 that detects a voltage between both ends of the first detection coil 4 is connected between input and output ends of the first detection coil 4.
  • a voltage detection unit 8 for detecting a voltage between both ends of the second detection coil 5 is connected between input and output ends of the second detection coil 5.
  • the output end of the second detection coil 5 is connected to the ground GND.
  • the position detection device 1 includes a position calculation unit 9 that calculates the position of the detection target 2 based on the output signal of the first detection coil 4 and the output signal of the second detection coil 5.
  • the position calculation unit 9 is based on the output voltage V1 of the first detection coil 4 detected by the voltage detection unit 7 and the output voltage V2 of the second detection coil 5 detected by the voltage detection unit 8.
  • the position of the detection target 2 is determined. For example, based on the value of V1 / V2 obtained by dividing the output voltage V1 of the first detection coil 4 by the output voltage V2 of the second detection coil 5, the position calculation unit 9
  • the distance to the detection target 6, that is, the position of the detection target 2 is determined.
  • the first detection coil 4 and the second detection coil 5 are provided on the substrate 10.
  • the first detection coil 4 is provided on the first layer 10a of the substrate 10 (for example, the first surface of the substrate 10), and the second detection coil 5 is opposite to the second layer 10b of the substrate 10 (for example, the first surface).
  • the first and second detection coils 4 and 5 are disposed on the same substrate 10 at a position where they overlap in plan view (as viewed from the coil axis direction K).
  • the first detection coil 4 is formed only on the first layer 10 a of the substrate 10, and the second detection coil 5 is formed only on the second layer 10 b of the substrate 10.
  • FIG. 3 illustrates a related art position detection device 1A.
  • the voltage of the power supply 3 may fluctuate depending on the ambient environment of the position detection device 1A.
  • the output voltage of the detection coils 4 and 5 also changes accordingly, which hinders accurate position detection. Therefore, in the position detection device 1A, the first detection coil 4 and the second detection coil 5 are arranged side by side in the planar direction so that the inductance of the second detection coil 5 used as a reference coil is always constant.
  • the position detection device 1A performs time-division control of the connection state of the first and second detection coils 4 and 5 with respect to the power supply 3 by the switch 15, and outputs (detection voltage) of the first detection coil 4 and the second detection.
  • the output (detection voltage) of the coil 5 is obtained separately.
  • the position detection device 1A can obtain the output (detection voltage) of the second detection coil 5 and cancel the fluctuation of the voltage of the power supply 3 based on the detection voltage.
  • a space for arranging the first detection coil 4 and the second detection coil 5 on the same surface of the substrate is required.
  • the arrangement space of the first and second detection coils 4 and 5 for example, the area of the substrate on which the coils 4 and 5 are arranged, increases.
  • the first detection coil 4 and the second detection coil 5 are arranged side by side in the coil axial direction K and connected in series to the power supply 3. Therefore, even if the voltage of the power supply 3 fluctuates, the fluctuation of the power supply voltage affects both the output voltage V1 of the first detection coil 4 and the output voltage V2 of the second detection coil 5 at the same ratio. It becomes a thing. Therefore, the fluctuation of the power supply voltage is canceled by performing the position calculation using the output voltages V1 and V2 (in this example, the position calculation based on the division calculation). For this reason, if the position detection device 1 is used, it is possible to perform accurate position calculation taking into consideration fluctuations in the power supply voltage.
  • the arrangement space of the first and second detection coils 4 and 5, that is, the coil 4 is also possible to minimize the area of the substrate 10 on which 5 is disposed.
  • FIG. 5 shows the first and second detection coils 4 and 5 in the case where the direction of the current flowing through the first detection coil 4 of the position detection device 1 is set to the same direction as the direction of the current flowing through the second detection coil 5.
  • FIG. 6 shows a change in voltage division ratio of the first and second detection coils 4 and 5 in the case of FIG.
  • the inductance of each detection coil 4, 5 also increases (or decreases). For this reason, it is limited to increase the change of the voltage division ratio with respect to the change of the distance to the detection target 6.
  • FIG. 7 shows the first and second detection coils 4 and 5 in the case where the direction of the current flowing through the first detection coil 4 of the position detection device 1 is set in the opposite direction to the direction of the current flowing through the second detection coil 5.
  • the inductance change of each of FIG. 8 illustrates the change in voltage division ratio of the first and second detection coils 4 and 5 in the case of FIG. 7.
  • the distance to the detection target 6 increases (or As it decreases, the inductance of the detection coil 4 increases (or decreases), while the inductance of the detection coil 5 decreases (or increases).
  • the position detection device 1 applies the AC voltage Ve from the power supply 3 to the first detection coil 4 and the second detection coil 5 arranged in line in the coil axial direction K (axial direction of the coil axis L). . Then, the position detection device 1 changes the output voltages V1 and V2 by using the output voltages V1 and V2 of the first detection coil 4 and the second detection coil 5 which change according to the distance to the detection target 2 Calculation for canceling (in this example, division calculation) is performed, and the position of the detection target 2 is detected based on the value obtained by the calculation.
  • the fluctuation of the power supply voltage affects both the output voltages V1 and V2 at the same ratio. Therefore, if division calculations etc. using output voltages V1 and V2 are performed, the fluctuation of the power supply voltage can be canceled, and the position of the detection target 2 is calculated based on the value where the fluctuation of the power supply voltage is canceled. Can. Therefore, even when the voltage of the power supply 3 fluctuates, it is advantageous to perform correct position detection.
  • the first detection coil 4 and the second detection coil 5 are arranged side by side in the coil axial direction K, for example, when the first detection coil 4 and the second detection coil 5 are arranged side by side in the plane direction Compared to the above, the space required for the arrangement of the first detection coil 4 and the second detection coil 5 can be reduced.
  • the first detection coil 4 and the second detection coil 5 are formed on one substrate 10, that is, the same substrate 10.
  • the first detection coil 4 is formed on the first layer 10 a of the substrate 10
  • the second detection coil 5 is formed on the second layer 10 b of the substrate 10. If this configuration is adopted, the first detection coil 4 and the second detection coil 5 aligned in the coil axial direction K can be easily manufactured.
  • the first detection coil 4 and the second detection coil 5 are connected in series. Therefore, a voltage can be applied to the first detection coil 4 and the second detection coil 5 by one power supply 3.
  • the first detection coil 4 and the second detection coil 5 are arranged such that a magnetic field is generated in the reverse direction by the current flowing in the reverse direction in each of the coils 4 and 5. Therefore, when the distance between the detection target 6 and the first detection coil 4 changes, the inductance of the first detection coil 4 and the inductance of the second detection coil 5 change in the opposite direction to each other.
  • the first detection coil 4 is formed on the first layer 10a of the substrate 10
  • the second detection coil 5 is formed on the second layer 10a of the substrate 10
  • each of the first layer 10a and the second layer 10b is a single layer. It is one more layer. Therefore, since it is not necessary to form the first detection coil 4 across the plurality of layers of the substrate 10, the formation of the first detection coil 4 can be simplified. This is also true for the second detection coil 5.
  • the position detection device 1 of this example causes the first detection coil 4 and the second detection coil 5 to oscillate directly, so the outputs of the first detection coil 4 and the second detection coil 5 Can be increased. Therefore, it is advantageous to easily detect the position of the detection target 2.
  • the above embodiment may be changed to the following modes.
  • the direction of the current flowing through the first detection coil 4 and the second detection coil 5 is not limited to the opposite direction, and may be the same direction. That is, if the coils 4 and 5 are arranged side by side along the coil axis direction K, at least the advantage that the arrangement space of the coils 4 and 5 can be reduced can be obtained.
  • the directions of the current flowing through the coils 4 and 5 are the same, it is limited to increase the change in voltage division ratio of the coils 4 and 5. Therefore, in order to detect the position of the detection target 2 more accurately while reducing the arrangement space of the coils 4 and 5, it is more preferable that the direction of the current flowing through the coils 4 and 5 be set in the opposite direction.
  • the first detection coil 4 and the second detection coil 5 may be arranged in an arrangement pattern in which they are not arranged on the same axial center in the coil axial direction K.
  • the arrangement pattern in which the coils 4 and 5 are arranged side by side along the coil axis direction K means not only the arrangement pattern in which the coils 4 and 5 are arranged on the same axis but also a plan view (that is, the coils Also includes an arrangement pattern in which the coils 4 and 5 are arranged so as to partially overlap each other in the axial direction K), and the axis of the coil 4 is offset from the axis of the coil 5.
  • the arrangement pattern in which the coils 4 and 5 are disposed so as to partially overlap with each other as compared with the arrangement pattern in which the coils 4 and 5 are disposed side by side in the planar direction as shown in FIG. Can be made smaller.
  • the first detection coil 4 and the second detection coil 5 may have different shapes.
  • the coil shapes of the first detection coil 4 and the second detection coil 5 can be changed to other shapes than the square shape.
  • the substrate 10 may be a multilayer substrate, and the first detection coil 4 and the second detection coil 5 may be formed in different layers of the multilayer substrate.
  • the first detection coil 4 and the second detection coil 5 may each be formed across multiple layers of the substrate 10.
  • the position of the detection target 2 may be determined by finding it.
  • the connection between each of the first detection coil 4 and the second detection coil 5 and the voltage detection unit may be time-divisionally controlled by using a switch.
  • a single voltage detection unit and a single three-terminal switch may be used instead of the two voltage detection units 7 and 8.
  • one end of the voltage detection unit is connected to the connection node between the coils 4 and 5 and the other end is connected to the common terminal of the switch.
  • the first switching terminal of the switch is connected to the input end of the coil 4, and the second switching terminal of the switch is connected to the output end (ground GND) of the coil 5.
  • the connection of the common terminal (the other end of the voltage detection unit) of the switch is switched between the first switching terminal (the input terminal of the coil 4) and the second switching terminal (ground GND).
  • the calculation performed to detect the position of the detection target 2 is not limited to the division of the output voltages V1 and V2, but may be changed to another calculation method.
  • the first detection coil 4 and the second detection coil 5 are not limited to being connected in series.
  • a dedicated power supply can be connected to each of the first detection coil 4 and the second detection coil 5, or the like, and other configuration can be appropriately changed.
  • the output signal of each of the coils 4 and 5 used for position detection is not limited to the voltage value, and may be changed to another parameter such as a current value.
  • the detection target 6 is not limited to the metal plate, and may be changed to, for example, another member such as a coil.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

This position detecting device (1) is provided with a first detecting coil (4) and a second detecting coil (5) to which AC voltage (VE) is applied from a power supply (3), and a position calculating unit (9) that calculates the position of a portion to be detected (2) on the basis of the distance from the position detecting device (1) and an object to be detected (6). The first and second detecting coils are disposed collaterally along a coil axial direction (K) such that the first detecting coil is located closer to the object to be detected, and the second detecting coil is located farther from the object to be detected. The position calculating unit (9) calculates the position of the portion to be detected on the basis of an output signal (V1) by the first detecting coil and an output signal by the second detecting coil.

Description

位置検出装置Position detection device
 本発明は、被検出部の位置を検出する位置検出装置に関する。 The present invention relates to a position detection device that detects the position of a detection target.
 従来、被検出部の位置を検出する位置検出装置が周知である。特許文献1は、位置検出装置の一従来例を記載している。この位置検出装置は、被検出部と連動する金属部に対向配置される検出コイルを備え、被検出部が移動したときの検出コイルと金属部との間の距離の変化を、検出コイルのインダクタンスの変化を基に検出する。 BACKGROUND Conventionally, a position detection device that detects the position of a detection target is known. Patent Document 1 describes a conventional example of a position detection device. The position detection device includes a detection coil disposed opposite to the metal portion interlocked with the detection portion, and changes in the distance between the detection coil and the metal portion when the detection portion moves, the inductance of the detection coil Based on changes in
特表2007-505534号公報Japanese Patent Application Publication No. 2007-505534
 ところで、この種の位置検出装置においては、検出コイルの電源電圧が周囲環境の変化等を要因として変動する可能性がある。電源電圧、つまり、検出コイルに印加される電圧が変動してしまうと、検出コイルの出力電圧が変化してしまい、正確な位置検出に支障を来す。そこで、電源電圧の変動をキャンセルする機構を設けることが望ましい。しかし、このような機構を組み込むと、検出コイルの配置に必要となるスペースが増大する。 By the way, in this type of position detection device, the power supply voltage of the detection coil may fluctuate due to a change in the surrounding environment or the like. When the power supply voltage, that is, the voltage applied to the detection coil fluctuates, the output voltage of the detection coil changes, which hinders accurate position detection. Therefore, it is desirable to provide a mechanism for canceling the fluctuation of the power supply voltage. However, incorporating such a mechanism increases the space required for placement of the sensing coil.
 本発明の目的は、検出コイルの配置に必要となるスペースを小さく抑えることができる位置検出装置を提供することにある。 An object of the present invention is to provide a position detection device capable of reducing the space required for the arrangement of detection coils.
 本発明における一態様は、位置検出装置である。位置検出装置は、電源から交流電圧が印加される第1検出コイル及び第2検出コイルと、前記位置検出装置から被検出対象までの距離に基づいて、前記被検出対象を有する被検出部の位置を演算する位置演算部と、を備えている。前記第1検出コイル及び前記第2検出コイルは、前記第1検出コイルが前記被検出対象に対し近い側に位置し、前記第2検出コイルが前記被検出対象に対し遠い側に位置するように、前記第1検出コイルのコイル軸に平行なコイル軸方向に沿って並び配置されている。前記位置演算部は、前記第1検出コイルの出力信号及び前記第2検出コイルの出力信号を基に前記被検出部の位置を演算する。 One aspect of the present invention is a position detection device. The position detection device includes a position of the detection target having the detection target based on a first detection coil and a second detection coil to which an AC voltage is applied from a power supply, and a distance from the position detection device to the detection target. And a position calculation unit for calculating The first detection coil and the second detection coil are positioned such that the first detection coil is closer to the object to be detected, and the second detection coil is closer to the object to be detected The first detection coil is arranged side by side along a coil axis direction parallel to a coil axis of the first detection coil. The position calculation unit calculates the position of the detection target based on an output signal of the first detection coil and an output signal of the second detection coil.
 この構成によれば、第1検出コイル及び第2検出コイルがコイル軸方向に並び配置されるため、例えば第1検出コイル及び第2検出コイルを平面方向に並び配置する場合に比較して、それらコイルの配置に必要となる面積を小さく抑えることが可能となる。 According to this configuration, since the first detection coil and the second detection coil are arranged side by side in the coil axial direction, for example, compared with the case where the first detection coil and the second detection coil are arranged side by side in the planar direction, It is possible to reduce the area required for the arrangement of the coils.
 本発明の位置検出装置によれば、検出コイルの配置に必要となるスペースを小さく抑えることができる。 According to the position detection device of the present invention, the space required for the arrangement of the detection coil can be reduced.
一実施形態の位置検出装置を示す概略構成図。BRIEF DESCRIPTION OF THE DRAWINGS The schematic block diagram which shows the position detection apparatus of one Embodiment. 図1の位置検出装置に設けられる基板の概略側面図。The schematic side view of the board | substrate provided in the position detection apparatus of FIG. 関連技術の位置検出装置を示す概略構成図。The schematic block diagram which shows the position detection apparatus of related technology. 図1の位置検出装置の作用を説明する概略図。FIG. 7 is a schematic view illustrating the operation of the position detection device of FIG. 1; 第1検出コイル及び第2検出コイルの電流が同じ向きのときのインダクタンス変化を示す波形図。The wave form diagram which shows the inductance change when the current of the 1st detection coil and the 2nd detection coil is the same direction. 第1検出コイル及び第2検出コイルの電流が同じ向きのときの分圧比変化を示す波形図。The wave form diagram which shows voltage division ratio change when the current of the 1st detection coil and the 2nd detection coil is the same direction. 第1検出コイル及び第2検出コイルの電流が逆向きのときのインダクタンス変化を示す波形図。The wave form diagram which shows the inductance change when the current of the 1st detection coil and the 2nd detection coil is reverse. 第1検出コイル及び第2検出コイルの電流が逆向きのときの分圧比変化を示す波形図。FIG. 6 is a waveform diagram showing a change in voltage division ratio when the currents of the first detection coil and the second detection coil are in opposite directions.
 以下、位置検出装置の一実施形態を図面に従って説明する。
 図1に示すように、位置検出装置1は、被検出部2の位置を、その位置検出装置1から被検出部2までの距離に基づき検出する渦電流センサの一種である。本例の位置検出装置1は、位置検出装置1の電源3から交流電圧Veが印加される第1検出コイル4及び第2検出コイル5を備える。被検出部2は、その被検出部2の動きに応じて第1検出コイル4及び第2検出コイル5に発生する磁界を変化させる被検出対象6を含む。
Hereinafter, one embodiment of a position detection device will be described according to the drawings.
As shown in FIG. 1, the position detection device 1 is a type of an eddy current sensor that detects the position of the detection target 2 based on the distance from the position detection device 1 to the detection target 2. The position detection device 1 of the present example includes a first detection coil 4 and a second detection coil 5 to which an AC voltage Ve is applied from a power supply 3 of the position detection device 1. The to-be-detected part 2 includes the to-be-detected target 6 which changes the magnetic field generate | occur | produced in the 1st detection coil 4 and the 2nd detection coil 5 according to the motion of the to-be-detected part 2.
 被検出対象6は、例えば金属板状部材である金属板からなる。本例では、被検出対象6は、被検出部2に取り付けられて固定されている。従って、被検出対象6は、被検出部2と一体に移動する。被検出対象6は、被検出部2の動きに伴って、第1検出コイル4(第2検出コイル5)のコイル軸Lに平行なコイル軸方向K(図1の矢印参照)に沿い、第1検出コイル4に接近又は離間する直線往復動が可能である。 The to-be-detected object 6 consists of a metal plate which is a metal plate-shaped member, for example. In the present example, the detection target 6 is attached and fixed to the detection portion 2. Therefore, the detection target 6 moves integrally with the detection unit 2. The object to be detected 6 is arranged along the coil axis direction K (see the arrow in FIG. 1) parallel to the coil axis L of the first detection coil 4 (second detection coil 5) with the movement of the detection part 2 The linear reciprocation which approaches or estranges to 1 detection coil 4 is possible.
 第1検出コイル4及び第2検出コイル5は、コイル軸方向Kに沿って並び配置されている。本例の場合、第1検出コイル4は、被検出対象6に対し近い側に配置され、第2検出コイル5は、被検出対象6に対し遠い側に配置されている。換言すれば、第1検出コイル4及び第2検出コイル5は、被検出部2までの距離(つまり、被検出部2の位置)を検出する基準とされる位置検出装置1のセンサ面に対して同じ側に配置されており、かつ第2検出コイル5は第1検出コイル4よりもセンサ面から離れた位置に配置されている。位置検出装置1のセンサ面は、例えば第1検出コイル4のコイル面である。あるいは、センサ面は第1検出コイル4のコイル面に平行な面であってもよい。第2検出コイル5は、第1検出コイル4に印加される電圧(電源電圧)の変動をキャンセルするためのリファレンスコイルとして設けられている。後述するように、本例では、この電源電圧の変動を考慮して、第1及び第2検出コイル4,5の各々の出力電圧(インダクタンス)を位置検出のための信号として用いている。 The first detection coil 4 and the second detection coil 5 are arranged side by side along the coil axis direction K. In the case of this example, the first detection coil 4 is disposed closer to the detection target 6, and the second detection coil 5 is disposed farther to the detection target 6. In other words, the first detection coil 4 and the second detection coil 5 are opposed to the sensor surface of the position detection device 1 which is the reference for detecting the distance to the detection portion 2 (that is, the position of the detection portion 2). The second detection coil 5 is disposed at a position farther from the sensor surface than the first detection coil 4. The sensor surface of the position detection device 1 is, for example, a coil surface of the first detection coil 4. Alternatively, the sensor surface may be a surface parallel to the coil surface of the first detection coil 4. The second detection coil 5 is provided as a reference coil for canceling the fluctuation of the voltage (power supply voltage) applied to the first detection coil 4. As described later, in this example, the output voltage (inductance) of each of the first and second detection coils 4 and 5 is used as a signal for position detection in consideration of the fluctuation of the power supply voltage.
 第1検出コイル4及び第2検出コイル5は、電源3に対して直列接続されている。本例では、第1検出コイル4に流れる電流の方向と第2検出コイル5に流れる電流の方向とが逆方向となるように第1及び第2検出コイル4,5が配置されている。これにより、第1検出コイル4の磁界及び第2検出コイル5の磁界は互いに逆方向に生成される。第1検出コイル4及び第2検出コイル5は、同じ巻数で同一面積に形成されている。 The first detection coil 4 and the second detection coil 5 are connected in series to the power supply 3. In this example, the first and second detection coils 4 and 5 are disposed such that the direction of the current flowing through the first detection coil 4 and the direction of the current flowing through the second detection coil 5 are opposite to each other. Thereby, the magnetic field of the first detection coil 4 and the magnetic field of the second detection coil 5 are generated in opposite directions to each other. The first detection coil 4 and the second detection coil 5 are formed in the same area with the same number of turns.
 第1検出コイル4の入出力端の間には、第1検出コイル4の両端間電圧を検出する電圧検出部7が接続されている。第2検出コイル5の入出力端の間には、第2検出コイル5の両端間電圧を検出する電圧検出部8が接続されている。本例において、第2検出コイル5の出力端はグランドGNDに接続されている。 A voltage detection unit 7 that detects a voltage between both ends of the first detection coil 4 is connected between input and output ends of the first detection coil 4. A voltage detection unit 8 for detecting a voltage between both ends of the second detection coil 5 is connected between input and output ends of the second detection coil 5. In this example, the output end of the second detection coil 5 is connected to the ground GND.
 位置検出装置1は、第1検出コイル4の出力信号及び第2検出コイル5の出力信号を基に被検出部2の位置を演算する位置演算部9を備える。本例では、位置演算部9は、電圧検出部7で検出された第1検出コイル4の出力電圧V1と、電圧検出部8で検出された第2検出コイル5の出力電圧V2とを基に、被検出部2の位置を求める。例えば、位置演算部9は、第1検出コイル4の出力電圧V1を第2検出コイル5の出力電圧V2で除算して得られたV1/V2の値を基に、第1検出コイル4と被検出対象6との間の距離、すなわち被検出部2の位置を求める。 The position detection device 1 includes a position calculation unit 9 that calculates the position of the detection target 2 based on the output signal of the first detection coil 4 and the output signal of the second detection coil 5. In this example, the position calculation unit 9 is based on the output voltage V1 of the first detection coil 4 detected by the voltage detection unit 7 and the output voltage V2 of the second detection coil 5 detected by the voltage detection unit 8. The position of the detection target 2 is determined. For example, based on the value of V1 / V2 obtained by dividing the output voltage V1 of the first detection coil 4 by the output voltage V2 of the second detection coil 5, the position calculation unit 9 The distance to the detection target 6, that is, the position of the detection target 2 is determined.
 図2に示すように、本例では、第1検出コイル4及び第2検出コイル5は、基板10に設けられている。例えば、第1検出コイル4は基板10の第1層10a(例えば、基板10の第1面)に設けられ、第2検出コイル5が基板10の第2層10b(例えば、第1面と反対側の第2面)に設けられている。従って、第1及び第2検出コイル4,5は、同一の基板10上に平面視で(コイル軸方向Kから見て)重なる位置に配置されている。第1検出コイル4は、基板10の第1層10aのみに形成され、第2検出コイル5は、基板10の第2層10bのみに形成されている。 As shown in FIG. 2, in this example, the first detection coil 4 and the second detection coil 5 are provided on the substrate 10. For example, the first detection coil 4 is provided on the first layer 10a of the substrate 10 (for example, the first surface of the substrate 10), and the second detection coil 5 is opposite to the second layer 10b of the substrate 10 (for example, the first surface). Provided on the second side). Therefore, the first and second detection coils 4 and 5 are disposed on the same substrate 10 at a position where they overlap in plan view (as viewed from the coil axis direction K). The first detection coil 4 is formed only on the first layer 10 a of the substrate 10, and the second detection coil 5 is formed only on the second layer 10 b of the substrate 10.
 次に、図3~図8を用いて、位置検出装置1の動作を説明する。
 図3に、関連技術の位置検出装置1Aを図示する。なお、理解を容易にするために、図3において、図1の構成と同じ構成には同じ符号を付している。位置検出装置1Aの周囲環境によっては電源3の電圧が変動することがある。電源電圧が変動すると、検出コイル4,5の出力電圧もそれに応じて変化してしまうため、正確な位置検出に支障を来す。そこで、位置検出装置1Aでは、リファレンスコイルとして用いられる第2検出コイル5のインダクタンスが常に一定となるように、第1検出コイル4及び第2検出コイル5が平面方向に並べて配置されている。なお、この位置検出装置1Aは、電源3に対する第1及び第2検出コイル4,5の接続状態をスイッチ15によって時分割制御して、第1検出コイル4の出力(検出電圧)と第2検出コイル5の出力(検出電圧)を別々に得る。
Next, the operation of the position detection device 1 will be described using FIG. 3 to FIG.
FIG. 3 illustrates a related art position detection device 1A. Note that, in FIG. 3, the same components as those in FIG. 1 are denoted by the same reference numerals for easy understanding. The voltage of the power supply 3 may fluctuate depending on the ambient environment of the position detection device 1A. When the power supply voltage changes, the output voltage of the detection coils 4 and 5 also changes accordingly, which hinders accurate position detection. Therefore, in the position detection device 1A, the first detection coil 4 and the second detection coil 5 are arranged side by side in the planar direction so that the inductance of the second detection coil 5 used as a reference coil is always constant. The position detection device 1A performs time-division control of the connection state of the first and second detection coils 4 and 5 with respect to the power supply 3 by the switch 15, and outputs (detection voltage) of the first detection coil 4 and the second detection. The output (detection voltage) of the coil 5 is obtained separately.
 第1検出コイル4及び第2検出コイル5が前述の配置をとる場合、第2検出コイル5のインダクタンスは被検出対象6(金属板)の距離によらず一定となる。従って、位置検出装置1Aは、第2検出コイル5の出力(検出電圧)を取得し、この検出電圧を基に電源3の電圧の変動をキャンセルすることが可能となる。しかし、この配置の場合、例えば基板の同一面上に第1検出コイル4及び第2検出コイル5を配置するためのスペースが必要となる。また、第2検出コイル5のインダクタンスを一定に保つためには、第2検出コイル5を被検出部(被検出対象6)から平面方向に十分に離す必要がある。結果として、第1及び第2検出コイル4,5の配置スペース、例えば、コイル4,5を配置する基板の面積が増大してしまう。 When the first detection coil 4 and the second detection coil 5 have the above-described arrangement, the inductance of the second detection coil 5 is constant regardless of the distance of the detection target 6 (metal plate). Therefore, the position detection device 1A can obtain the output (detection voltage) of the second detection coil 5 and cancel the fluctuation of the voltage of the power supply 3 based on the detection voltage. However, in the case of this arrangement, for example, a space for arranging the first detection coil 4 and the second detection coil 5 on the same surface of the substrate is required. Further, in order to keep the inductance of the second detection coil 5 constant, it is necessary to separate the second detection coil 5 from the detection target (the detection target 6) sufficiently in the planar direction. As a result, the arrangement space of the first and second detection coils 4 and 5, for example, the area of the substrate on which the coils 4 and 5 are arranged, increases.
 一方、図4に示すように、本例の位置検出装置1では、第1検出コイル4及び第2検出コイル5がコイル軸方向Kに並び配置され、電源3に直列に接続されている。このため、仮に電源3の電圧が変動しても、この電源電圧の変動は、第1検出コイル4の出力電圧V1と第2検出コイル5の出力電圧V2との両方に同じ比率で影響を与えるものとなる。従って、出力電圧V1,V2を用いた位置演算(本例では、除算計算に基づく位置演算)を行うことにより電源電圧の変動がキャンセルされる。このため、位置検出装置1を用いれば、電源電圧の変動を考慮に入れた正確な位置演算を行うことが可能となる。また、本例の場合、第1検出コイル4及び第2検出コイル5がコイル軸方向Kに並び配置されているので、第1及び第2検出コイル4,5の配置スペース、つまり、コイル4,5を配置する基板10の面積を極力少なく抑えることも可能である。 On the other hand, as shown in FIG. 4, in the position detection device 1 of this example, the first detection coil 4 and the second detection coil 5 are arranged side by side in the coil axial direction K and connected in series to the power supply 3. Therefore, even if the voltage of the power supply 3 fluctuates, the fluctuation of the power supply voltage affects both the output voltage V1 of the first detection coil 4 and the output voltage V2 of the second detection coil 5 at the same ratio. It becomes a thing. Therefore, the fluctuation of the power supply voltage is canceled by performing the position calculation using the output voltages V1 and V2 (in this example, the position calculation based on the division calculation). For this reason, if the position detection device 1 is used, it is possible to perform accurate position calculation taking into consideration fluctuations in the power supply voltage. Further, in the case of this example, since the first detection coil 4 and the second detection coil 5 are arranged side by side in the coil axis direction K, the arrangement space of the first and second detection coils 4 and 5, that is, the coil 4, It is also possible to minimize the area of the substrate 10 on which 5 is disposed.
 図5は、位置検出装置1の第1検出コイル4に流れる電流の方向が第2検出コイル5に流れる電流の方向と同じ方向に設定された場合における第1及び第2検出コイル4,5の各々のインダクタンス変化を示す。図6は、図5の場合における第1及び第2検出コイル4,5の分圧比の変化を示す。図5及び図6に示されるように、第1検出コイル4に流れる電流の方向が第2検出コイル5に流れる電流の方向と同じ方向の場合、被検出対象6までの距離が増加(又は減少)するにつれて、各検出コイル4,5のインダクタンスも増加(又は減少)する。このため、被検出対象6までの距離の変化に対する分圧比の変化を大きくすることが制限される。 FIG. 5 shows the first and second detection coils 4 and 5 in the case where the direction of the current flowing through the first detection coil 4 of the position detection device 1 is set to the same direction as the direction of the current flowing through the second detection coil 5. Indicate each inductance change. FIG. 6 shows a change in voltage division ratio of the first and second detection coils 4 and 5 in the case of FIG. As shown in FIGS. 5 and 6, when the direction of the current flowing through the first detection coil 4 is the same as the direction of the current flowing through the second detection coil 5, the distance to the detection target 6 increases (or decreases) ), The inductance of each detection coil 4, 5 also increases (or decreases). For this reason, it is limited to increase the change of the voltage division ratio with respect to the change of the distance to the detection target 6.
 図7は、位置検出装置1の第1検出コイル4に流れる電流の方向が第2検出コイル5に流れる電流の方向と逆方向に設定されている場合における第1及び第2検出コイル4,5の各々のインダクタンス変化を示す。図8は、図7の場合における第1及び第2検出コイル4,5の分圧比の変化を図示する。図7及び図8に示されるように、第1検出コイル4に流れる電流の方向が第2検出コイル5に流れる電流の方向と逆方向である場合、被検出対象6までの距離が増加(又は減少)するにつれて、検出コイル4のインダクタンスは増加(又は減少)する一方、検出コイル5のインダクタンスは減少(又は増加)する。このため、被検出対象6までの距離の変化に対する分圧比の変化を大きくすることができる。よって、第1検出コイル4と第2検出コイル5とに流れる電流の方向を逆方向に設定すれば、被検出部2の位置を精度よく検出するのに有利となる。 FIG. 7 shows the first and second detection coils 4 and 5 in the case where the direction of the current flowing through the first detection coil 4 of the position detection device 1 is set in the opposite direction to the direction of the current flowing through the second detection coil 5. The inductance change of each of FIG. 8 illustrates the change in voltage division ratio of the first and second detection coils 4 and 5 in the case of FIG. 7. As shown in FIGS. 7 and 8, when the direction of the current flowing through the first detection coil 4 is opposite to the direction of the current flowing through the second detection coil 5, the distance to the detection target 6 increases (or As it decreases, the inductance of the detection coil 4 increases (or decreases), while the inductance of the detection coil 5 decreases (or increases). For this reason, it is possible to make the change of the voltage division ratio to the change of the distance to the detection target 6 large. Therefore, setting the direction of the current flowing through the first detection coil 4 and the second detection coil 5 in opposite directions is advantageous for detecting the position of the detection target 2 with high accuracy.
 本実施形態の構成によれば、以下に記載の効果を得ることができる。
 (1)位置検出装置1は、コイル軸方向K(コイル軸Lの軸方向)に並び配置された第1検出コイル4及び第2検出コイル5に対して、電源3から交流電圧Veを印加する。そして、位置検出装置1は、被検出部2までの距離に応じて変化する第1検出コイル4及び第2検出コイル5の出力電圧V1,V2を用いることによって、各出力電圧V1,V2の変動をキャンセルする計算(本例では、除算計算)を実行し、その計算により得られた値を基に被検出部2の位置を検出する。ここで、仮に電源3の電圧が変動したとしても、この電源電圧の変動は、双方の出力電圧V1,V2に同じ比率で影響を与えるものとなる。従って、出力電圧V1,V2を用いた除算計算などを行えば、電源電圧の変動をキャンセルすることができ、電源電圧の変動がキャンセルされた値に基づいて被検出部2の位置を演算することができる。このため、電源3の電圧が変動する場合であっても、正しい位置検出を行うのに有利となる。また、本例の場合、第1検出コイル4及び第2検出コイル5がコイル軸方向Kに並び配置されるので、例えば第1検出コイル4及び第2検出コイル5を平面方向に並び配置する場合に比較して、第1検出コイル4及び第2検出コイル5の配置に必要となるスペースを小さく抑えることが可能となる。
According to the configuration of the present embodiment, the following effects can be obtained.
(1) The position detection device 1 applies the AC voltage Ve from the power supply 3 to the first detection coil 4 and the second detection coil 5 arranged in line in the coil axial direction K (axial direction of the coil axis L). . Then, the position detection device 1 changes the output voltages V1 and V2 by using the output voltages V1 and V2 of the first detection coil 4 and the second detection coil 5 which change according to the distance to the detection target 2 Calculation for canceling (in this example, division calculation) is performed, and the position of the detection target 2 is detected based on the value obtained by the calculation. Here, even if the voltage of the power supply 3 fluctuates, the fluctuation of the power supply voltage affects both the output voltages V1 and V2 at the same ratio. Therefore, if division calculations etc. using output voltages V1 and V2 are performed, the fluctuation of the power supply voltage can be canceled, and the position of the detection target 2 is calculated based on the value where the fluctuation of the power supply voltage is canceled. Can. Therefore, even when the voltage of the power supply 3 fluctuates, it is advantageous to perform correct position detection. Further, in the case of this example, since the first detection coil 4 and the second detection coil 5 are arranged side by side in the coil axial direction K, for example, when the first detection coil 4 and the second detection coil 5 are arranged side by side in the plane direction Compared to the above, the space required for the arrangement of the first detection coil 4 and the second detection coil 5 can be reduced.
 (2)第1検出コイル4及び第2検出コイル5は、1つの基板10、つまり、同一基板10上に形成されている。本例では、基板10の第1層10aに第1検出コイル4が形成され、基板10の第2層10bに第2検出コイル5が形成されている。この構成を採用すれば、コイル軸方向Kに並ぶ第1検出コイル4及び第2検出コイル5を容易に製造することができる。 (2) The first detection coil 4 and the second detection coil 5 are formed on one substrate 10, that is, the same substrate 10. In this example, the first detection coil 4 is formed on the first layer 10 a of the substrate 10, and the second detection coil 5 is formed on the second layer 10 b of the substrate 10. If this configuration is adopted, the first detection coil 4 and the second detection coil 5 aligned in the coil axial direction K can be easily manufactured.
 (3)第1検出コイル4及び第2検出コイル5は直列接続されている。このため、1つの電源3で第1検出コイル4及び第2検出コイル5に電圧を印加することができる。
 (4)第1検出コイル4及び第2検出コイル5は、それらコイル4,5の各々に逆方向に電流が流れることで磁界が逆方向に発生するように配置される。このため、被検出対象6と第1検出コイル4との間の距離が変化するとき、第1検出コイル4のインダクタンスと第2検出コイル5のインダクタンスは、互いに逆方向に変化する。すなわち、第1検出コイル4のインダクタンスが増加すれば、第2検出コイル5のインダクタンスが減少し、逆に、第1検出コイル4のインダクタンスが減少すれば、第2検出コイル5のインダクタンスが増加する。これにより、被検出部2の位置を計算(除算)するにあたって、計算結果(除算結果)の変動幅を大きくすることが可能となる。よって、被検出部2の位置を、より正しく検出するのに有利となる。
(3) The first detection coil 4 and the second detection coil 5 are connected in series. Therefore, a voltage can be applied to the first detection coil 4 and the second detection coil 5 by one power supply 3.
(4) The first detection coil 4 and the second detection coil 5 are arranged such that a magnetic field is generated in the reverse direction by the current flowing in the reverse direction in each of the coils 4 and 5. Therefore, when the distance between the detection target 6 and the first detection coil 4 changes, the inductance of the first detection coil 4 and the inductance of the second detection coil 5 change in the opposite direction to each other. That is, if the inductance of the first detection coil 4 increases, the inductance of the second detection coil 5 decreases, and conversely, if the inductance of the first detection coil 4 decreases, the inductance of the second detection coil 5 increases. . Thus, when calculating (dividing) the position of the detection target 2, it is possible to increase the fluctuation range of the calculation result (division result). Therefore, it is advantageous to detect the position of the detection target 2 more correctly.
 (5)第1検出コイル4が基板10の第1層10aに形成され、第2検出コイル5が基板10の第2層10aに形成され、第1層10a及び第2層10bの各々が単一層である。よって、第1検出コイル4を基板10の複数層に亘って形成せずに済むので、第1検出コイル4の形成を簡素に済ますことができる。また、これは第2検出コイル5についても同様である。 (5) The first detection coil 4 is formed on the first layer 10a of the substrate 10, the second detection coil 5 is formed on the second layer 10a of the substrate 10, and each of the first layer 10a and the second layer 10b is a single layer. It is one more layer. Therefore, since it is not necessary to form the first detection coil 4 across the plurality of layers of the substrate 10, the formation of the first detection coil 4 can be simplified. This is also true for the second detection coil 5.
 (6)金属体(被検出部2の被検出対象6)の接近又は離間に応じた検出コイルの出力から被検出部2の位置を検出する位置検出装置としては、励磁コイルとの相互誘導によって検出コイルに誘導起電力を発生させ、被検出対象6との距離に応じて変化する誘導起電力を基に被検出部2の位置を検出するものがある。この構成の位置検出装置に比較して、本例の位置検出装置1は第1検出コイル4及び第2検出コイル5を直に発振させるため、第1検出コイル4及び第2検出コイル5の出力を大きくすることができる。よって、被検出部2の位置を容易に検出するのに有利となる。 (6) As a position detection device that detects the position of the detection target 2 from the output of the detection coil according to the approach or separation of the metal body (the detection target 6 of the detection target 2), mutual induction with the excitation coil There is a system that generates an induced electromotive force in a detection coil and detects the position of the detection target 2 based on the induced electromotive force that changes according to the distance to the detection target 6. As compared with the position detection device of this configuration, the position detection device 1 of this example causes the first detection coil 4 and the second detection coil 5 to oscillate directly, so the outputs of the first detection coil 4 and the second detection coil 5 Can be increased. Therefore, it is advantageous to easily detect the position of the detection target 2.
 なお、上記実施形態は、以下の態様に変更してもよい。
 ・第1検出コイル4及び第2検出コイル5に流れる電流の方向は、逆方向であることに限定されず、同一方向であってもよい。つまり、コイル4,5をコイル軸方向Kに沿って並び配置すれば、コイル4,5の配置スペースを小さくできる利点は少なくとも得られる。ただし、上記したように、コイル4,5に流れる電流の方向が同一方向である場合には、コイル4,5の分圧比変化を大きくすることが制限される。従って、コイル4,5の配置スペースを小さくしつつ、被検出部2の位置をより精度よく検出するには、コイル4,5に流れる電流の方向が逆方向に設定されることがより好ましい。
The above embodiment may be changed to the following modes.
The direction of the current flowing through the first detection coil 4 and the second detection coil 5 is not limited to the opposite direction, and may be the same direction. That is, if the coils 4 and 5 are arranged side by side along the coil axis direction K, at least the advantage that the arrangement space of the coils 4 and 5 can be reduced can be obtained. However, as described above, when the directions of the current flowing through the coils 4 and 5 are the same, it is limited to increase the change in voltage division ratio of the coils 4 and 5. Therefore, in order to detect the position of the detection target 2 more accurately while reducing the arrangement space of the coils 4 and 5, it is more preferable that the direction of the current flowing through the coils 4 and 5 be set in the opposite direction.
 ・第1検出コイル4及び第2検出コイル5は、それらがコイル軸方向Kにおいて同一軸心上に配置されない配置パターンで配置されていてもよい。換言すれば、コイル4,5がコイル軸方向Kに沿って並び配置される配置パターンとは、コイル4,5が同一軸心上に配置される配置パターンだけでなく、平面視(すなわち、コイル軸方向Kに見たとき)においてコイル4,5が部分的に重なるように配置され、コイル4の軸がコイル5の軸からずれている配置パターンも含む。コイル4,5が部分的に重なって配置される配置パターンであれば、図3のようにコイル4,5が平面方向に並び配置される配置パターンに比べて、コイル4,5を配置するスペースを小さくすることができる。 The first detection coil 4 and the second detection coil 5 may be arranged in an arrangement pattern in which they are not arranged on the same axial center in the coil axial direction K. In other words, the arrangement pattern in which the coils 4 and 5 are arranged side by side along the coil axis direction K means not only the arrangement pattern in which the coils 4 and 5 are arranged on the same axis but also a plan view (that is, the coils Also includes an arrangement pattern in which the coils 4 and 5 are arranged so as to partially overlap each other in the axial direction K), and the axis of the coil 4 is offset from the axis of the coil 5. In the arrangement pattern in which the coils 4 and 5 are disposed so as to partially overlap with each other, as compared with the arrangement pattern in which the coils 4 and 5 are disposed side by side in the planar direction as shown in FIG. Can be made smaller.
 ・第1検出コイル4及び第2検出コイル5は、互いに異なる形状としてもよい。
 ・第1検出コイル4及び第2検出コイル5のコイル形状は、四角形状以外の他の形状に変更可能である。
The first detection coil 4 and the second detection coil 5 may have different shapes.
The coil shapes of the first detection coil 4 and the second detection coil 5 can be changed to other shapes than the square shape.
 ・基板10は多層基板でもよく、多層基板の異なる層に第1検出コイル4及び第2検出コイル5が形成されてもよい。
 ・第1検出コイル4及び第2検出コイル5は各々、基板10の複数層に亘って形成されてもよい。
The substrate 10 may be a multilayer substrate, and the first detection coil 4 and the second detection coil 5 may be formed in different layers of the multilayer substrate.
The first detection coil 4 and the second detection coil 5 may each be formed across multiple layers of the substrate 10.
 ・第1検出コイル4と第2検出コイル5との間の電圧(例えば、V1+V2)を検出するとともに、第2検出コイル5の電圧(V2)を検出し、(V1+V2)/V2を除算値として求めることによって被検出部2の位置を求めてもよい。 -While detecting the voltage (for example, V1 + V2) between the 1st detection coil 4 and the 2nd detection coil 5, the voltage (V2) of the 2nd detection coil 5 is detected, (V1 + V2) / V2 is made into the division value The position of the detection target 2 may be determined by finding it.
 ・第1検出コイル4及び第2検出コイル5の各々と電圧検出部との接続を、スイッチを用いることにより時分割制御してもよい。例えば、2つの電圧検出部7,8に代えて単一の電圧検出部と単一の3端子スイッチとを用いてもよい。この場合、例えば、電圧検出部の一端はコイル4,5間の接続ノードに接続され、他端はスイッチの共通端子に接続される。また、スイッチの第1切替端子はコイル4の入力端に接続され、スイッチの第2切替端子はコイル5の出力端(グランドGND)に接続される。そして、時分割制御により、スイッチの共通端子(電圧検出部の他端)の接続が、第1切替端子(コイル4の入力端)と第2切替端子(グランドGND)との間で切り替えられる。この構成により、位置検出装置1に必要となる電圧検出部の数が少なく済むので、位置検出装置1のサイズの小型化に一層寄与する。 The connection between each of the first detection coil 4 and the second detection coil 5 and the voltage detection unit may be time-divisionally controlled by using a switch. For example, instead of the two voltage detection units 7 and 8, a single voltage detection unit and a single three-terminal switch may be used. In this case, for example, one end of the voltage detection unit is connected to the connection node between the coils 4 and 5 and the other end is connected to the common terminal of the switch. Further, the first switching terminal of the switch is connected to the input end of the coil 4, and the second switching terminal of the switch is connected to the output end (ground GND) of the coil 5. Then, by time division control, the connection of the common terminal (the other end of the voltage detection unit) of the switch is switched between the first switching terminal (the input terminal of the coil 4) and the second switching terminal (ground GND). With this configuration, the number of voltage detection units required for the position detection device 1 can be reduced, which further contributes to downsizing of the position detection device 1.
 ・被検出部2の位置検出に行う計算は、出力電圧V1,V2の除算に限定されず、他の計算方法に変更してもよい。
 ・第1検出コイル4及び第2検出コイル5は、直列接続されることに限定されない。例えば、第1検出コイル4及び第2検出コイル5の各々に専用の電源を接続するなど、他の構成に適宜変更することができる。
The calculation performed to detect the position of the detection target 2 is not limited to the division of the output voltages V1 and V2, but may be changed to another calculation method.
The first detection coil 4 and the second detection coil 5 are not limited to being connected in series. For example, a dedicated power supply can be connected to each of the first detection coil 4 and the second detection coil 5, or the like, and other configuration can be appropriately changed.
 ・位置検出に使用する各コイル4,5の出力信号は、電圧値に限らず、例えば電流値などの他のパラメータに変更可能である。
 ・被検出対象6は、金属板に限らず、例えばコイルなどの他の部材に変更してもよい。
The output signal of each of the coils 4 and 5 used for position detection is not limited to the voltage value, and may be changed to another parameter such as a current value.
The detection target 6 is not limited to the metal plate, and may be changed to, for example, another member such as a coil.

Claims (8)

  1.  位置検出装置であって、
     電源から交流電圧が印加される第1検出コイル及び第2検出コイルと、
     前記位置検出装置から被検出対象までの距離に基づいて、前記被検出対象を有する被検出部の位置を演算する位置演算部と、を備え、
     前記第1検出コイル及び前記第2検出コイルは、前記第1検出コイルが前記被検出対象に対し近い側に位置し、前記第2検出コイルが前記被検出対象に対し遠い側に位置するように、前記第1検出コイルのコイル軸に平行なコイル軸方向に沿って並び配置されており、
     前記位置演算部は、前記第1検出コイルの出力信号及び前記第2検出コイルの出力信号を基に前記被検出部の位置を演算する
    ことを特徴とする位置検出装置。
    A position detection device,
    A first detection coil and a second detection coil to which an AC voltage is applied from a power supply;
    And a position calculation unit that calculates the position of the detection target having the detection target based on the distance from the position detection device to the detection target.
    The first detection coil and the second detection coil are positioned such that the first detection coil is closer to the object to be detected, and the second detection coil is closer to the object to be detected The first detection coil is arranged side by side along a coil axis direction parallel to a coil axis of the first detection coil;
    The position detection device, wherein the position calculation unit calculates the position of the detection target based on an output signal of the first detection coil and an output signal of the second detection coil.
  2.  前記第1検出コイル及び前記第2検出コイルは、同一基板上に形成されている
    ことを特徴とする請求項1に記載の位置検出装置。
    The position detection device according to claim 1, wherein the first detection coil and the second detection coil are formed on the same substrate.
  3.  前記第1検出コイル及び前記第2検出コイルは、直列接続されている
    ことを特徴とする請求項1又は2に記載の位置検出装置。
    The position detection device according to claim 1, wherein the first detection coil and the second detection coil are connected in series.
  4.  前記第1検出コイル及び前記第2検出コイルは、該第1及び第2検出コイルの各々に逆方向に電流が流れることで磁界が逆方向に発生するように配置される
    ことを特徴とする請求項1~3のうちいずれか一項に記載の位置検出装置。
    The first detection coil and the second detection coil are disposed such that a magnetic field is generated in the opposite direction by the current flowing in the opposite direction in each of the first and second detection coils. The position detection device according to any one of Items 1 to 3.
  5.  前記第1検出コイルが前記基板の第1層に形成されており、
     前記第2検出コイルが前記基板の第2層に形成されており、
     前記第1層及び第2層の各々が単一層である
    ことを特徴とする請求項2に記載の位置検出装置。
    The first detection coil is formed on a first layer of the substrate,
    The second detection coil is formed on a second layer of the substrate,
    The position detection device according to claim 2, wherein each of the first layer and the second layer is a single layer.
  6.  前記第1検出コイル及び前記第2検出コイルが前記コイル軸方向において同一軸心上に配置されている
    ことを特徴とする請求項1~5のうちいずれか一項に記載の位置検出装置。
    The position detection device according to any one of claims 1 to 5, wherein the first detection coil and the second detection coil are disposed on the same axial center in the coil axial direction.
  7.  前記第1検出コイル及び前記第2検出コイルは、前記コイル軸方向に見て前記第1及び第2検出コイルが部分的に重なるように配置されている
    ことを特徴とする請求項1~5のうちいずれか一項に記載の位置検出装置。
    The first detection coil and the second detection coil are arranged such that the first and second detection coils partially overlap when viewed in the coil axis direction. The position detection device according to any one of the above.
  8.  前記位置演算部は、
     前記第1検出コイルの両端間電圧を示す第1出力電圧を前記第1検出コイルの出力信号として受け取るとともに、前記第2検出コイルの両端間電圧を示す第2出力電圧を前記第2検出コイルの出力信号として受け取り、
     前記第1出力電圧及び前記第2出力電圧の各々の変動をキャンセルする除算計算を行うことにより得られた値に基づいて前記被検出部の位置を演算する
    ことを特徴とする請求項1~7のうちいずれか一項に記載の位置検出装置。
    The position calculation unit
    A first output voltage indicating a voltage across the first detection coil is received as an output signal of the first detection coil, and a second output voltage indicating a voltage across the second detection coil is a voltage of the second detection coil. Received as an output signal,
    The position of the detected portion is calculated based on a value obtained by performing division calculation that cancels each variation of the first output voltage and the second output voltage. The position detection device according to any one of the above.
PCT/JP2016/050052 2015-01-06 2016-01-04 Position detecting device WO2016111266A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015-000986 2015-01-06
JP2015000986A JP2016125940A (en) 2015-01-06 2015-01-06 Position sensing device

Publications (1)

Publication Number Publication Date
WO2016111266A1 true WO2016111266A1 (en) 2016-07-14

Family

ID=56355954

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2016/050052 WO2016111266A1 (en) 2015-01-06 2016-01-04 Position detecting device

Country Status (2)

Country Link
JP (1) JP2016125940A (en)
WO (1) WO2016111266A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6440921B1 (en) * 2017-03-02 2018-12-19 三菱電機株式会社 Position detection device and power transmission device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5692804U (en) * 1979-12-17 1981-07-23
JPS62225986A (en) * 1986-03-12 1987-10-03 エルデツク コ−ポレイシヨン Induction partial pressure sensor
JP2011137748A (en) * 2009-12-28 2011-07-14 Jtekt Corp Displacement sensor device and roller bearing apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5692804U (en) * 1979-12-17 1981-07-23
JPS62225986A (en) * 1986-03-12 1987-10-03 エルデツク コ−ポレイシヨン Induction partial pressure sensor
JP2011137748A (en) * 2009-12-28 2011-07-14 Jtekt Corp Displacement sensor device and roller bearing apparatus

Also Published As

Publication number Publication date
JP2016125940A (en) 2016-07-11

Similar Documents

Publication Publication Date Title
CN110494760B (en) Magnetic sensor
US10036656B2 (en) Position detecting system based on inductive sensing
US11226211B2 (en) Inductive position detection
JP5562333B2 (en) Position detector for moving magnet linear motor
CN106197238B (en) For using inductosyn to determine moving parts along the method for the position of axis
US11293744B2 (en) Method for increasing the position measurement accuracy using inductive position sensor
JP2013246051A (en) Displacement detector
US10704930B2 (en) Electromagnetic induction type displacement detection apparatus and measuring instrument using the same
EP2902749A1 (en) Displacement sensor
JP6147658B2 (en) Electromagnetic induction type position detector and detection method
JP6395942B2 (en) Position sensor
WO2017126341A1 (en) Proximity sensor
WO2016111266A1 (en) Position detecting device
JP2019002778A (en) Position sensor
CN113710997A (en) Magnetic sensing system, detection device and magnetic interference biasing method
CN114577101B (en) Eddy current sensor device for measuring linear displacement
JP2015194488A (en) position detecting device
CN106895774B (en) Apparatus and method for determining relative offset
JP4692723B2 (en) Non-contact displacement sensor device
WO2017138479A1 (en) Position detection device
JP2017075919A (en) Position detector
JP2017142202A (en) Position detector
JP6368185B2 (en) Linear motion device position sensor and linear motion device position control apparatus using the position sensor
JP2019100848A (en) Magnetic sensor device
JP2017142201A (en) Position detector

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 16735005

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 16735005

Country of ref document: EP

Kind code of ref document: A1