WO2017138479A1 - Position detection device - Google Patents

Position detection device Download PDF

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Publication number
WO2017138479A1
WO2017138479A1 PCT/JP2017/004168 JP2017004168W WO2017138479A1 WO 2017138479 A1 WO2017138479 A1 WO 2017138479A1 JP 2017004168 W JP2017004168 W JP 2017004168W WO 2017138479 A1 WO2017138479 A1 WO 2017138479A1
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Prior art keywords
detection
detection coil
coil
output
target
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PCT/JP2017/004168
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French (fr)
Japanese (ja)
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健一 古賀
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株式会社東海理化電機製作所
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature

Definitions

  • the present invention relates to a position detection device that detects the position of a detection target.
  • a position detection device detects a position of a detection target by disposing a metal part as a detection target to face a detection coil and detecting a change in inductance of the detection coil when the metal part moves. (See Patent Document 1).
  • the objective of this invention is providing the position detection apparatus which can ensure the precision of a position detection.
  • One aspect of the present invention is a position detection device, and includes a plurality of detection coils including a first detection coil and a second detection coil arranged farther from the detection target than the first detection coil.
  • Each of the first detection coil and the second detection coil is supplied with an AC voltage from a power source, and generates an output signal according to a distance from the detection target, and the plurality of detection coils and the first detection coil
  • a position calculator that calculates the position of the detection target based on output signals of the coil and the second detection coil, and the first detection coil and the second detection coil can detect the position of the detection target.
  • the output waveform of the first detection coil and the output waveform of the second detection coil generated over a wide detection range have different shapes.
  • the shapes of these coils were set so that the waveform of the output of the first detection coil and the waveform of the output of the second detection coil were equal. For this reason, it becomes possible to make the dynamic range of the detection circuit which detects the output of a 1st detection coil and a 2nd detection coil low. Therefore, when the outputs of the first detection coil and the second detection coil are detected by the detection circuit, it is possible to suppress an error in the value to be detected, so that the accuracy of position detection can be improved.
  • the position detection accuracy can be ensured in the position detection device.
  • the block diagram of the position detection apparatus of one Embodiment The side view of the board
  • the position detection device 1 is a type of eddy current sensor that detects the position of the detected portion 2 (the distance to the detected portion 2).
  • the eddy current sensor detects the position of the detected portion 2 based on a change in eddy current generated in the metal (in this example, the detection target 3).
  • the position detection device 1 of this example includes a power source 4, a first detection coil 5 and a second detection coil 6 to which an AC voltage Vc is applied from the power source 4, and the first detection coil 5 in accordance with the movement of the detected portion 2. And a detection object 3 that changes the magnetic field generated in the second detection coil 6.
  • the detection object 3 is made of, for example, a plate-like member (conductor plate) made of metal.
  • the detection target 3 in this example is interlocked with the detected portion 2 by being attached and fixed to the detected portion 2.
  • the detection target 3 is moved along the axial direction (coil axis direction: arrow Z direction in FIG. 1) of the coil axis La of the first detection coil 5 (second detection coil 6) along with the movement of the detected portion 2.
  • a linear reciprocation that approaches or separates from the first detection coil 5 is possible.
  • the first detection coil 5 and the second detection coil 6 are arranged side by side along the moving direction of the detection target 3 (the axial direction of the coil axis La).
  • the first detection coil 5 is disposed closer to the detection target 3 than the second detection coil 6. This is because the output voltage (inductance) of the first detection coil 5 is used as a signal for position detection, and the second detection coil 6 is used as a reference coil of the first detection coil 5.
  • the first detection coil 5 and the second detection coil 6 are connected in series to the power supply 4.
  • the winding directions of the first detection coil 5 and the second detection coil 6 are reversed so that the directions of current flow are opposite to each other. That is, when the winding directions of the first detection coil 5 and the second detection coil 6 are opposite to each other, the first detection coil 5 and the second detection coil 6 generate magnetic fields in opposite directions.
  • the first detection coil 5 and the second detection coil 6 have a maximum value V1max (illustrated in FIG. 2) of the output (output signal V1) of the first detection coil 5 in the position detection range K of the detection target 3 (illustrated in FIG. 2). ) Have different shapes so as to have the same value (including the vicinity) as the maximum value V2max (shown in FIG. 2) of the output (output signal V2) of the second detection coil 6.
  • the second detection coil 6 is formed smaller than the first detection coil 5.
  • the small size means that the winding diameter of the first detection coil 5 is X1 and the winding diameter of the second detection coil 6 is X2, and the winding diameter (coil size) is small (X1> X2). .
  • the number of turns of the first detection coil 5 and the second detection coil 6 may be the same or different.
  • a detection circuit 7 for detecting voltages (output signals V1, V2) generated in the first detection coil 5 and the second detection coil 6 is connected to the first detection coil 5 and the second detection coil 6.
  • the detection circuit 7 of this example includes a voltage detection unit 7 a that detects the voltage of the first detection coil 5 and a voltage detection unit 7 b that detects the voltage of the second detection coil 6.
  • the voltage detector 7 a is connected between the input and output ends of the first detection coil 5, and the voltage detector 7 b is connected between the input and output ends of the second detection coil 6.
  • the position detection device 1 includes a position calculation unit 8 that calculates the position of the detection target 3 based on the outputs of the first detection coil 5 and the second detection coil 6.
  • the position calculation unit 8 detects the detection target 3 (detected unit) based on the output signal (output voltage) V1 supplied from the voltage detection unit 7a and the output signal (output voltage) V2 supplied from the voltage detection unit 7b.
  • the position of 2) is calculated. Specifically, the position calculation unit 8 obtains a value (V1 / V2) obtained by dividing the output signal V1 of the voltage detection unit 7a by the output signal V2 of the voltage detection unit 7b, and from this value, the first detection coil 5 is obtained. And the position of the detection target 3, that is, the position of the detected portion 2 is calculated.
  • the first detection coil 5 and the second detection coil 6 of this example the first detection coil 5 is provided on the first layer 10 a (for example, the surface) of the substrate 10, and the second detection coil 6 is By being provided on the second layer 10 b (for example, the back surface) of the substrate 10, they are arranged on the same substrate in a plan view.
  • the first detection coil 5 is formed only on the first layer 10 a of the substrate 10, and the second detection coil 6 is formed only on the second layer 10 b of the substrate 10.
  • the detection target 3 is a position detection range of the position detection device 1 from a point P1 where the detection target 3 is closest to the first detection coil 5 to a point P2 which is farthest from the first detection coil 5. It is possible to move at K.
  • the detection target 3 moves linearly from the point P1 to the point P2 as the detection target 3 moves away from the first detection coil 5, the inductance of the first detection coil 5 gradually increases, and the first detection coil 5 Output signal V1 rises in a curved line from V1min to V1max.
  • the inductance of the second detection coil 6 gradually decreases, and the output signal V2 of the second detection coil 6 decreases in a curved manner from V2max to V2min.
  • the maximum value V1max of the output of the first detection coil 5 is the same as the maximum value V2max of the output of the second detection coil 6.
  • FIG. 4 shows a configuration of a conventional position detection device 31.
  • the second detection coil 6 has the same size as the first detection coil 5 as compared with the configuration of the position detection device 1 of this example. That is, the first detection coil 5 and the second detection coil 6 have the same winding diameter and number of coil turns.
  • the output signal V1 rises in a curved line from V1min ′ to V1max ′. That is, the voltage of the first detection coil 5 increases from V1min ′ to V1max ′.
  • the output signal V2 of the second detection coil 6 falls in a curve from a high value V2max 'to V2min'. That is, the output voltage of the second detection coil 6 drops from the maximum value V2max ′ to a voltage V2min ′ that is slightly higher than the maximum value of the first detection coil 5.
  • the detection circuit 7 has a predetermined input voltage range (dynamic range of detection voltage), and is set to the maximum value of the output of the detection coil (the first detection coil 5 or the second detection coil 6).
  • the maximum value V2max ′ of the second detection coil 6 is higher than the maximum value V1max ′ of the first detection coil 5, so that the dynamic range (full scale) of the detection circuit 7 is the second.
  • the maximum value V2max ′ of the detection coil 6 is set.
  • the dynamic range of the detection circuit 7 is set to “V2max ′” which is the maximum value of the second detection coil 6. That is, in the case of the conventional position detection device 1, since the dynamic range is as large as “V2max ′”, the detection error generated in the detection circuit 7 increases accordingly.
  • the waveform of the output of the first detection coil 5 at a predetermined point in the position detection range K (see FIG. 5) by making the second detection coil 6 smaller than the first detection coil 5. 3) and the waveform of the output of the second detection coil 6 (downward curve in FIG. 3) are set to intersect each other. That is, the first detection coil 5 and the second detection coil 6 have different shapes so that the output waveform of the first detection coil 5 and the output waveform of the second detection coil 6 intersect within the position detection range K.
  • the maximum value of the detection voltage in the detection circuit 7 is lowered and the dynamic range of the detection circuit 7 is lowered, an error generated in the detection circuit 7 is reduced accordingly. Therefore, it is advantageous to ensure the position detection accuracy of the position detection device 1.
  • the first detection coil 5 and the second detection coil 6 make the second detection coil 6 smaller than the first detection coil 5, so that the maximum value V1max of the output of the first detection coil 5 2
  • the maximum value V2max of the output of the detection coil 6 is equal. Therefore, the dynamic range of the detection circuit 7 can be reduced as much as possible, which is further advantageous for improving the position accuracy of the position detection device 1.
  • the first detection coil 5 and the second detection coil 6 are arranged side by side along the moving direction of the detection target 3 (the arrow Z direction in FIG. 1).
  • the maximum value V1max of the output of the first detection coil 5 and the maximum value V2max of the output of the second detection coil 6 are the same. It can be made easier to match.
  • the winding direction of the first detection coil 5 and the second detection coil 6 is reversed so that the directions of current flow are opposite to each other.
  • the increase / decrease in the inductance of the first detection coil 5 and the second detection coil 6 changes in opposite directions. That is, if the inductance of the first detection coil 5 increases, the inductance of the second detection coil 6 decreases. Conversely, if the inductance of the first detection coil 5 decreases, the inductance of the second detection coil 6 increases. .
  • the position of the detection target 3 is calculated, the fluctuation range of the calculation result increases. Therefore, it is advantageous to more accurately detect the position of the detection target 3 (detected portion 2).
  • the second detection coil 6 When the maximum value V1max of the output of the first detection coil 5 and the maximum value V2max of the output of the second detection coil 6 are set equal, the second detection coil 6 has a smaller winding diameter than the first detection coil 5. It is formed as follows. Therefore, the maximum value V1max of the output of the first detection coil 5 and the maximum value V2max of the output of the second detection coil 6 are set to be the same with a simple configuration in which the winding diameter of the second detection coil 6 is reduced. Can do. In addition, since the size of the second detection coil 6 can be reduced, it contributes to a reduction in the size of the position detection device 1.
  • the embodiment is not limited to the configuration described so far, and may be modified as follows.
  • the first detection coil 5 and the second detection coil instead of changing the size of 6, for example, the second detection coil 6 may be formed by forming fewer turns than the first detection coil 5.
  • the outputs of the first detection coil 5 and the second detection coil can be made the same with a simple configuration in which the number of turns of the second detection coil 6 is reduced.
  • the second detection coil 6 may have a coil shape in which the coil diameter decreases (stepwise decreases) toward the inner diameter direction of the coil.
  • the arrangement pattern in which the first detection coil 5 and the second detection coil 6 are not arranged on the same axis may be used.
  • the coil shape (winding shape) of the 1st detection coil 5 and the 2nd detection coil 6 is not restricted to square shape, For example, it can change into other shapes, such as circular shape.
  • the first detection coil 5 and the second detection coil 6 may have the same direction of flowing current.
  • the connection between the first detection coil 5 and the second detection coil 6 and the voltage detection unit (the voltage detection units 7a and 7b in this example) is time-division controlled by a switch so that the first detection coil 5 and the second detection coil are detected.
  • a configuration in which the output of the coil 6 is selectively detected by one voltage detector may be employed. In this way, the voltage detection unit required for the position detection device 1 can be reduced, which is advantageous in reducing the size of the device.
  • the detection target 3 is not limited to the conductor plate (metal plate) but can be changed to other members such as a coil. That is, any member that can generate an eddy current may be used.
  • the substrate 10 may be a multilayer substrate, and the first detection coil 5 and the second detection coil 6 may be disposed on a predetermined layer of the multilayer substrate.
  • the first detection coil 5 and the second detection coil 6 may be formed across a plurality of layers of the substrate 10.
  • the first detection coil 5 and the second detection coil 6 are not limited to being connected in series.
  • the first detection coil 5 and the second detection coil 6 can be appropriately changed to other configurations such as a circuit in which a dedicated power source is connected to each of the first detection coil 5 and the second detection coil 6.
  • the voltage of the 2nd detection coil 6 may be detected, and the position of the detection target 3 may be calculated
  • the calculation performed at the time of detecting the position of the detected part 2 is not limited to division, and may be changed to another calculation method.
  • the coil output used for the position detection calculation is not limited to the voltage value, and may be another parameter such as a current value.
  • the small winding diameter of the coil includes a small outer diameter of the winding and a small inner diameter of the winding.
  • the detection target 3 is not limited to a linear reciprocating movement in the vertical direction of the first detection coil 5, but may be moved in a direction orthogonal to the vertical direction (coil axis direction) of the first detection coil 5, for example. Good. That is, the position detection device 1 may detect the position of the detection target 3 that reciprocates in a direction orthogonal to the coil axis La.
  • the position detection device 1 can be applied to various devices and apparatuses. It will be apparent to those skilled in the art that the present invention may be embodied in other specific forms without departing from the technical concept thereof. For example, some of the parts described in the embodiment (or one or more aspects thereof) may be omitted, or some parts may be combined. The scope of the invention should be determined with reference to the appended claims, along with the full scope of equivalents to which such claims are entitled.

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  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

This position detection device is provided with: a plurality of detection coils (5, 6) which include a first detection coil (5), and a second detection coil (6) disposed further away from an object (2) to be detected than the first detection coil (5), and which respectively have AC voltage supplied thereto from a power supply (4), and respectively generate an output signal in accordance with the distance to the object (2) to be detected; and a position calculation unit (8) which, on the basis of the output signals of the first and second detection coils (5, 6), calculates the position of the object (2) to be detected. The first and second detection coils (5, 6) are provided with different shapes such that the output waveforms of the first and second detection coils (5, 6) intersect, said output waveforms being generated over a detection range in which the position of the object (2) to be detected can be detected.

Description

位置検出装置Position detection device
　本発明は、検出対象の位置を検出する位置検出装置に関する。 The present invention relates to a position detection device that detects the position of a detection target.
　従来、位置検出装置は、検出対象としての金属部を検出コイルに対向配置させ、この金属部が移動したときの検出コイルのインダクタンスの変化を検出することにより、検出対象の位置を検出している（特許文献１参照）。 Conventionally, a position detection device detects a position of a detection target by disposing a metal part as a detection target to face a detection coil and detecting a change in inductance of the detection coil when the metal part moves. (See Patent Document 1).
特表２００７－５０５５３４号公報Special table 2007-505534
　この種の位置検出装置においては、検出対象の位置を精度よく行いたいニーズがあった。
　本発明の目的は、位置検出の精度を確保することができる位置検出装置を提供することにある。 In this type of position detection device, there has been a need to accurately position the detection target.
The objective of this invention is providing the position detection apparatus which can ensure the precision of a position detection.
　本発明の一側面は、位置検出装置であって、第１検出コイルと、該第１検出コイルよりも検出対象に対して遠くに配置された第２検出コイルと、を含む複数の検出コイルであって、前記第１検出コイル及び第２検出コイルの各々は、電源から交流電圧を供給され、検出対象との距離に応じて出力信号を生成する、前記複数の検出コイルと、前記第１検出コイル及び第２検出コイルの出力信号に基づいて、前記検出対象の位置を演算する位置演算部と、を備え、前記第１検出コイル及び前記第２検出コイルは、前記検出対象の位置を検出可能な検出範囲にわたって生成される前記第１検出コイルの出力波形と前記第２検出コイルの出力波形とが交差するような異なる形状を有する。 One aspect of the present invention is a position detection device, and includes a plurality of detection coils including a first detection coil and a second detection coil arranged farther from the detection target than the first detection coil. Each of the first detection coil and the second detection coil is supplied with an AC voltage from a power source, and generates an output signal according to a distance from the detection target, and the plurality of detection coils and the first detection coil A position calculator that calculates the position of the detection target based on output signals of the coil and the second detection coil, and the first detection coil and the second detection coil can detect the position of the detection target. The output waveform of the first detection coil and the output waveform of the second detection coil generated over a wide detection range have different shapes.
　本構成によれば、第１検出コイルの出力の波形と第２検出コイルの出力の波形とが等しくなるように、これらコイルの形状を設定した。このため、第１検出コイル及び第２検出コイルの出力を検出する検出回路のダイナミックレンジを低くすることが可能となる。よって、第１検出コイル及び第２検出コイルの出力を検出回路で検出するにあたり、検出する値の誤差を低く抑えることが可能となるので、位置検出の精度を向上することが可能となる。 According to this configuration, the shapes of these coils were set so that the waveform of the output of the first detection coil and the waveform of the output of the second detection coil were equal. For this reason, it becomes possible to make the dynamic range of the detection circuit which detects the output of a 1st detection coil and a 2nd detection coil low. Therefore, when the outputs of the first detection coil and the second detection coil are detected by the detection circuit, it is possible to suppress an error in the value to be detected, so that the accuracy of position detection can be improved.
　本発明によれば、位置検出装置において、位置検出の精度を確保することができる。本発明の他の形態及び利点は、本発明の技術的思想の例を示している図面と共に以下の記載から明らかである。 According to the present invention, the position detection accuracy can be ensured in the position detection device. Other aspects and advantages of the present invention will become apparent from the following description taken in conjunction with the drawings, which illustrate examples of the technical spirit of the present invention.
一実施形態の位置検出装置の構成図。The block diagram of the position detection apparatus of one Embodiment. 位置検出装置の基板の側面図。The side view of the board | substrate of a position detection apparatus. 検出対象の距離変化に対するコイル出力の特性図。The characteristic view of the coil output with respect to the distance change of a detection target. 従来位置付けの位置検出装置の構成図。The block diagram of the conventional position detection apparatus. 検出対象の距離変化に対するコイル出力の特性図。The characteristic view of the coil output with respect to the distance change of a detection target. 別例の第２検出コイルの形状を示す概略図。Schematic which shows the shape of the 2nd detection coil of another example. 他の別例の第２検出コイルの形状を示す概略図。Schematic which shows the shape of the 2nd detection coil of another example.
　以下、位置検出装置の一実施形態を図１～図５に従って説明する。
　図１に示すように、位置検出装置１は、被検出部２の位置（被検出部２との間の距離）を検出する渦電流センサの一種である。渦電流センサは、金属（本例は検出対象３）に発生する渦電流の変化を基に被検出部２の位置を検出する。本例の位置検出装置１は、電源４と、電源４から交流電圧Ｖｃが印加される第１検出コイル５及び第２検出コイル６と、被検出部２の動きに応じて第１検出コイル５及び第２検出コイル６に発生する磁界を変化させる検出対象３とを備える。 Hereinafter, an embodiment of the position detection device will be described with reference to FIGS.
As shown in FIG. 1, the position detection device 1 is a type of eddy current sensor that detects the position of the detected portion 2 (the distance to the detected portion 2). The eddy current sensor detects the position of the detected portion 2 based on a change in eddy current generated in the metal (in this example, the detection target 3). The position detection device 1 of this example includes a power source 4, a first detection coil 5 and a second detection coil 6 to which an AC voltage Vc is applied from the power source 4, and the first detection coil 5 in accordance with the movement of the detected portion 2. And a detection object 3 that changes the magnetic field generated in the second detection coil 6.
　検出対象３は、例えば金属から形成された板状の部材（導体板）からなる。本例の検出対象３は、被検出部２に取り付け固定されることにより、被検出部２と連動する。検出対象３は、被検出部２の動きに伴って、第１検出コイル５（第２検出コイル６）のコイル軸Ｌａの軸方向（コイル軸方向：図１の矢印Ｚ方向）に沿って、第１検出コイル５に接近又は離間する直線往復動が可能である。 The detection object 3 is made of, for example, a plate-like member (conductor plate) made of metal. The detection target 3 in this example is interlocked with the detected portion 2 by being attached and fixed to the detected portion 2. The detection target 3 is moved along the axial direction (coil axis direction: arrow Z direction in FIG. 1) of the coil axis La of the first detection coil 5 (second detection coil 6) along with the movement of the detected portion 2. A linear reciprocation that approaches or separates from the first detection coil 5 is possible.
　第１検出コイル５及び第２検出コイル６は、検出対象３の移動方向（コイル軸Ｌａの軸方向）に沿って並び配置されている。本例の場合、第１検出コイル５は、第２検出コイル６よりも検出対象３の近くに配置されている。これは、第１検出コイル５の出力電圧（インダクタンス）を位置検出のための信号として用い、第２検出コイル６を第１検出コイル５の基準コイル（reference coil）とするためである。 The first detection coil 5 and the second detection coil 6 are arranged side by side along the moving direction of the detection target 3 (the axial direction of the coil axis La). In the case of this example, the first detection coil 5 is disposed closer to the detection target 3 than the second detection coil 6. This is because the output voltage (inductance) of the first detection coil 5 is used as a signal for position detection, and the second detection coil 6 is used as a reference coil of the first detection coil 5.
　第１検出コイル５及び第２検出コイル６は、電源４に対して直列接続されている。第１検出コイル５及び第２検出コイル６の巻き方向は、電流が流れる方向が互いに逆となるように逆となっている。すなわち、第１検出コイル５及び第２検出コイル６の巻き方向が互いに逆であることにより、第１検出コイル５及び第２検出コイル６は互いに逆方向の磁界を生成する。 The first detection coil 5 and the second detection coil 6 are connected in series to the power supply 4. The winding directions of the first detection coil 5 and the second detection coil 6 are reversed so that the directions of current flow are opposite to each other. That is, when the winding directions of the first detection coil 5 and the second detection coil 6 are opposite to each other, the first detection coil 5 and the second detection coil 6 generate magnetic fields in opposite directions.
　第１検出コイル５及び第２検出コイル６は、検出対象３の位置検出範囲Ｋ（図２に図示）において、第１検出コイル５の出力（出力信号Ｖ１）の最大値Ｖ１max（図２に図示）が、第２検出コイル６の出力（出力信号Ｖ２）の最大値Ｖ２max（図２に図示）と同じ値（近傍も含む）を有するような互いに異なる形状を有する。本例の場合、第２検出コイル６は、第１検出コイル５よりも小型に形成されている。なお、小型とは、第１検出コイル５の巻線径をＸ１とし、第２検出コイル６の巻線径をＸ２とすると、巻線径（コイルサイズ）が小さいこと（Ｘ１＞Ｘ２）をいう。なお、第１検出コイル５及び第２検出コイル６の巻数は、同一又は異なる巻数のいずれでもよい。 The first detection coil 5 and the second detection coil 6 have a maximum value V1max (illustrated in FIG. 2) of the output (output signal V1) of the first detection coil 5 in the position detection range K of the detection target 3 (illustrated in FIG. 2). ) Have different shapes so as to have the same value (including the vicinity) as the maximum value V2max (shown in FIG. 2) of the output (output signal V2) of the second detection coil 6. In the case of this example, the second detection coil 6 is formed smaller than the first detection coil 5. The small size means that the winding diameter of the first detection coil 5 is X1 and the winding diameter of the second detection coil 6 is X2, and the winding diameter (coil size) is small (X1> X2). . The number of turns of the first detection coil 5 and the second detection coil 6 may be the same or different.
　第１検出コイル５及び第２検出コイル６には、第１検出コイル５及び第２検出コイル６に発生する電圧（出力信号Ｖ１，Ｖ２）を検出する検出回路７が接続されている。本例の検出回路７は、第１検出コイル５の電圧を検出する電圧検出部７ａと、第２検出コイル６の電圧を検出する電圧検出部７ｂとを備える。電圧検出部７ａは、第１検出コイル５の入出力端の間に接続され、電圧検出部７ｂは、第２検出コイル６の入出力端の間に接続されている。 A detection circuit 7 for detecting voltages (output signals V1, V2) generated in the first detection coil 5 and the second detection coil 6 is connected to the first detection coil 5 and the second detection coil 6. The detection circuit 7 of this example includes a voltage detection unit 7 a that detects the voltage of the first detection coil 5 and a voltage detection unit 7 b that detects the voltage of the second detection coil 6. The voltage detector 7 a is connected between the input and output ends of the first detection coil 5, and the voltage detector 7 b is connected between the input and output ends of the second detection coil 6.
　位置検出装置１は、第１検出コイル５及び第２検出コイル６の出力を基に検出対象３の位置を演算する位置演算部８を備える。位置演算部８は、電圧検出部７ａから供給される出力信号（出力電圧）Ｖ１と、電圧検出部７ｂから供給される出力信号（出力電圧）Ｖ２とを基に、検出対象３（被検出部２）の位置を演算する。具体的にいうと、位置演算部８は、電圧検出部７ａの出力信号Ｖ１を、電圧検出部７ｂの出力信号Ｖ２で除算した値（Ｖ１／Ｖ２）を求め、この値から第１検出コイル５と検出対象３の位置、すなわち被検出部２の位置を演算する。 The position detection device 1 includes a position calculation unit 8 that calculates the position of the detection target 3 based on the outputs of the first detection coil 5 and the second detection coil 6. The position calculation unit 8 detects the detection target 3 (detected unit) based on the output signal (output voltage) V1 supplied from the voltage detection unit 7a and the output signal (output voltage) V2 supplied from the voltage detection unit 7b. The position of 2) is calculated. Specifically, the position calculation unit 8 obtains a value (V1 / V2) obtained by dividing the output signal V1 of the voltage detection unit 7a by the output signal V2 of the voltage detection unit 7b, and from this value, the first detection coil 5 is obtained. And the position of the detection target 3, that is, the position of the detected portion 2 is calculated.
　図２に示すように、本例の第１検出コイル５及び第２検出コイル６は、第１検出コイル５が基板１０の第１層１０ａ（例えば表面）に設けられ、第２検出コイル６が基板１０の第２層１０ｂ（例えば裏面）に設けられることにより、平面視で同一基板上に重ね配置されている。第１検出コイル５は、基板１０の第１層１０ａのみに形成され、第２検出コイル６は、基板１０の第２層１０ｂのみに形成されている。 As shown in FIG. 2, in the first detection coil 5 and the second detection coil 6 of this example, the first detection coil 5 is provided on the first layer 10 a (for example, the surface) of the substrate 10, and the second detection coil 6 is By being provided on the second layer 10 b (for example, the back surface) of the substrate 10, they are arranged on the same substrate in a plan view. The first detection coil 5 is formed only on the first layer 10 a of the substrate 10, and the second detection coil 6 is formed only on the second layer 10 b of the substrate 10.
　次に、図３～図５を用いて、位置検出装置１の作用及び効果を説明する。
　図３に示すように、検出対象３は、検出対象３が第１検出コイル５に最も近づいた地点Ｐ１から、第１検出コイル５から最も離れた地点Ｐ２までの位置検出装置１の位置検出範囲Ｋにおいて移動可能である。検出対象３が地点Ｐ１から地点Ｐ２まで直線移動したとき、検出対象３が第１検出コイル５から離れていくに従って、第１検出コイル５のインダクタンスが徐々に増加していき、第１検出コイル５の出力信号Ｖ１は、Ｖ１minからＶ１maxに曲線状に上昇していく。一方、第２検出コイル６のインダクタンスは徐々に低下していき、第２検出コイル６の出力信号Ｖ２は、Ｖ２maxからＶ２minに曲線状に下降していく。この場合、第１検出コイル５の出力の最大値Ｖ１maxは、第２検出コイル６の出力の最大値Ｖ２maxと同じになっている。 Next, the operation and effect of the position detection apparatus 1 will be described with reference to FIGS.
As shown in FIG. 3, the detection target 3 is a position detection range of the position detection device 1 from a point P1 where the detection target 3 is closest to the first detection coil 5 to a point P2 which is farthest from the first detection coil 5. It is possible to move at K. When the detection target 3 moves linearly from the point P1 to the point P2, as the detection target 3 moves away from the first detection coil 5, the inductance of the first detection coil 5 gradually increases, and the first detection coil 5 Output signal V1 rises in a curved line from V1min to V1max. On the other hand, the inductance of the second detection coil 6 gradually decreases, and the output signal V2 of the second detection coil 6 decreases in a curved manner from V2max to V2min. In this case, the maximum value V1max of the output of the first detection coil 5 is the same as the maximum value V2max of the output of the second detection coil 6.
　図４は、従来の位置検出装置３１の構成を示す。位置検出装置３１では、本例の位置検出装置１の構成と比較すると、第２検出コイル６が、第１検出コイル５と同じサイズとなっている。すなわち、第１検出コイル５及び第２検出コイル６が、互いに同じ巻線径及びコイル巻数を有する。 FIG. 4 shows a configuration of a conventional position detection device 31. In the position detection device 31, the second detection coil 6 has the same size as the first detection coil 5 as compared with the configuration of the position detection device 1 of this example. That is, the first detection coil 5 and the second detection coil 6 have the same winding diameter and number of coil turns.
　図５に示すように、従来の位置検出装置３１の場合、位置検出範囲Ｋにおいて被検出部２が地点Ｐ１から地点Ｐ２に移動したとき、検出対象３が第１検出コイル５から離れていくに従い、出力信号Ｖ１は、Ｖ１min’からＶ１max’に曲線状に上昇していく。すなわち、第１検出コイル５の電圧は、Ｖ１min’からＶ１max’に上昇する。一方、第２検出コイル６の出力信号Ｖ２は、高い値のＶ２max’からＶ２min’に曲線状に下降していく。すなわち、第２検出コイル６の出力電圧は、最大値のＶ２max’から、第１検出コイル５の最大値より少し高い電圧のＶ２min’まで下降する。 As shown in FIG. 5, in the case of the conventional position detection device 31, when the detected part 2 moves from the point P <b> 1 to the point P <b> 2 in the position detection range K, as the detection target 3 moves away from the first detection coil 5. The output signal V1 rises in a curved line from V1min ′ to V1max ′. That is, the voltage of the first detection coil 5 increases from V1min ′ to V1max ′. On the other hand, the output signal V2 of the second detection coil 6 falls in a curve from a high value V2max 'to V2min'. That is, the output voltage of the second detection coil 6 drops from the maximum value V2max ′ to a voltage V2min ′ that is slightly higher than the maximum value of the first detection coil 5.
　ところで、検出回路７には、入力電圧範囲（検出電圧のダイナミックレンジ）が決まっており、検出コイル（第１検出コイル５又は第２検出コイル６）の出力の最大値に設定される。例えば、従来の位置検出装置３１の場合、第１検出コイル５の最大値Ｖ１max’よりも第２検出コイル６の最大値Ｖ２max’が高いので、検出回路７のダイナミックレンジ（フルスケール）は第２検出コイル６の最大値Ｖ２max’に設定される。 Incidentally, the detection circuit 7 has a predetermined input voltage range (dynamic range of detection voltage), and is set to the maximum value of the output of the detection coil (the first detection coil 5 or the second detection coil 6). For example, in the case of the conventional position detection device 31, the maximum value V2max ′ of the second detection coil 6 is higher than the maximum value V1max ′ of the first detection coil 5, so that the dynamic range (full scale) of the detection circuit 7 is the second. The maximum value V2max ′ of the detection coil 6 is set.
　一般的に、検出回路７には検出誤差が生じ、誤差は検出回路７のダイナミックレンジに対し、そのダイナミックレンジの何％の値で発生する。よって、検出回路７のダイナミックレンジが高いと、その分だけ位置検出の誤差が大きくなってしまう。従来の位置検出装置３１では、検出回路７のダイナミックレンジが、第２検出コイル６の最大値である「Ｖ２max’」に設定されている。すなわち、従来の位置検出装置１の場合、ダイナミックレンジが「Ｖ２max’」と大きいので、その分、検出回路７において発生する検出誤差が大きくなる。 Generally, a detection error occurs in the detection circuit 7, and the error occurs at a value of what percentage of the dynamic range with respect to the dynamic range of the detection circuit 7. Therefore, if the dynamic range of the detection circuit 7 is high, the position detection error increases accordingly. In the conventional position detection device 31, the dynamic range of the detection circuit 7 is set to “V2max ′” which is the maximum value of the second detection coil 6. That is, in the case of the conventional position detection device 1, since the dynamic range is as large as “V2max ′”, the detection error generated in the detection circuit 7 increases accordingly.
　一方、本例の位置検出装置１の場合、第２検出コイル６を第１検出コイル５よりも小型にすることにより、位置検出範囲Ｋの所定地点において第１検出コイル５の出力の波形（図３の右上がり曲線）と第２検出コイル６の出力の波形（図３の右下がり曲線）とが交差するように設定されている。すなわち、第１検出コイル５及び第２検出コイル６は、位置検出範囲Ｋの範囲内において第１検出コイル５の出力波形と第２検出コイル６の出力波形とが交差するように、互いに異なる形状を有する。このため、検出回路７における検出電圧の最大値が低くなって、検出回路７のダイナミックレンジが低くなるので、その分、検出回路７において発生する誤差が小さくなる。よって、位置検出装置１の位置検出精度を確保するのに有利となる。 On the other hand, in the case of the position detection device 1 of this example, the waveform of the output of the first detection coil 5 at a predetermined point in the position detection range K (see FIG. 5) by making the second detection coil 6 smaller than the first detection coil 5. 3) and the waveform of the output of the second detection coil 6 (downward curve in FIG. 3) are set to intersect each other. That is, the first detection coil 5 and the second detection coil 6 have different shapes so that the output waveform of the first detection coil 5 and the output waveform of the second detection coil 6 intersect within the position detection range K. Have For this reason, since the maximum value of the detection voltage in the detection circuit 7 is lowered and the dynamic range of the detection circuit 7 is lowered, an error generated in the detection circuit 7 is reduced accordingly. Therefore, it is advantageous to ensure the position detection accuracy of the position detection device 1.
　本例の場合、第１検出コイル５及び第２検出コイル６は、第２検出コイル６を第１検出コイル５よりも小型にすることにより、第１検出コイル５の出力の最大値Ｖ１maxと第２検出コイル６の出力の最大値Ｖ２maxとが等しくなっている。よって、検出回路７のダイナミックレンジを極力低くすることが可能となるので、位置検出装置１の位置精度の向上に一層有利となる。 In the case of this example, the first detection coil 5 and the second detection coil 6 make the second detection coil 6 smaller than the first detection coil 5, so that the maximum value V1max of the output of the first detection coil 5 2 The maximum value V2max of the output of the detection coil 6 is equal. Therefore, the dynamic range of the detection circuit 7 can be reduced as much as possible, which is further advantageous for improving the position accuracy of the position detection device 1.
　第１検出コイル５及び第２検出コイル６は、検出対象３の移動方向（図１の矢印Ｚ方向）に沿って並んで配置されている。このように、第１検出コイル５及び第２検出コイル６をバランスよく配置するので、第１検出コイル５の出力の最大値Ｖ１maxと第２検出コイル６の出力の最大値Ｖ２maxとを、同一に合わせ易くすることができる。 The first detection coil 5 and the second detection coil 6 are arranged side by side along the moving direction of the detection target 3 (the arrow Z direction in FIG. 1). Thus, since the first detection coil 5 and the second detection coil 6 are arranged in a balanced manner, the maximum value V1max of the output of the first detection coil 5 and the maximum value V2max of the output of the second detection coil 6 are the same. It can be made easier to match.
　第１検出コイル５及び第２検出コイル６の巻き方向は、電流が流れる方向が互いに逆となるように、逆となっている。これにより、検出対象３が第１検出コイル５に対して接近又は離隔するとき、第１検出コイル５及び第２検出コイル６のインダクタンスの増減が、互いに逆方向に変化する。すなわち、第１検出コイル５のインダクタンスが増加すれば、第２検出コイル６のインダクタンスが減少し、逆に、第１検出コイル５のインダクタンスが減少すれば、第２検出コイル６のインダクタンスが増加する。このため、検出対象３の位置を演算した場合に、演算結果の変動幅が大きくなる。よって、検出対象３（被検出部２）の位置を、より正しく検出するのに有利となる。 The winding direction of the first detection coil 5 and the second detection coil 6 is reversed so that the directions of current flow are opposite to each other. Thereby, when the detection target 3 approaches or separates from the first detection coil 5, the increase / decrease in the inductance of the first detection coil 5 and the second detection coil 6 changes in opposite directions. That is, if the inductance of the first detection coil 5 increases, the inductance of the second detection coil 6 decreases. Conversely, if the inductance of the first detection coil 5 decreases, the inductance of the second detection coil 6 increases. . For this reason, when the position of the detection target 3 is calculated, the fluctuation range of the calculation result increases. Therefore, it is advantageous to more accurately detect the position of the detection target 3 (detected portion 2).
　第１検出コイル５の出力の最大値Ｖ１maxと第２検出コイル６の出力の最大値Ｖ２maxとを等しく設定するにあたり、第２検出コイル６は、第１検出コイル５よりも巻線径が小さくなるように形成されている。よって、第２検出コイル６の巻線径を小さくするという簡素な構成で、第１検出コイル５の出力の最大値Ｖ１maxと第２検出コイル６の出力の最大値Ｖ２maxとを同一に設定することができる。また、第２検出コイル６のサイズが小さく済むので、位置検出装置１の装置サイズの小型化にも寄与する。 When the maximum value V1max of the output of the first detection coil 5 and the maximum value V2max of the output of the second detection coil 6 are set equal, the second detection coil 6 has a smaller winding diameter than the first detection coil 5. It is formed as follows. Therefore, the maximum value V1max of the output of the first detection coil 5 and the maximum value V2max of the output of the second detection coil 6 are set to be the same with a simple configuration in which the winding diameter of the second detection coil 6 is reduced. Can do. In addition, since the size of the second detection coil 6 can be reduced, it contributes to a reduction in the size of the position detection device 1.
　なお、実施形態はこれまでに述べた構成に限らず、以下の態様に変更してもよい。
　・図６に示すように、第１検出コイル５の出力の最大値Ｖ１maxと第２検出コイル６の出力の最大値Ｖ２maxとを等しく設定するにあたっては、例えば第１検出コイル５及び第２検出コイル６のサイズを変えるのではなく、例えば第２検出コイル６を第１検出コイル５よりも巻数を少なく形成することで実現してもよい。この場合、第２検出コイル６の巻数を少なくするという簡素な構成で、第１検出コイル５及び第２検出コイルの出力を同一にすることができる。 Note that the embodiment is not limited to the configuration described so far, and may be modified as follows.
As shown in FIG. 6, in setting the maximum value V1max of the output of the first detection coil 5 and the maximum value V2max of the output of the second detection coil 6, for example, the first detection coil 5 and the second detection coil Instead of changing the size of 6, for example, the second detection coil 6 may be formed by forming fewer turns than the first detection coil 5. In this case, the outputs of the first detection coil 5 and the second detection coil can be made the same with a simple configuration in which the number of turns of the second detection coil 6 is reduced.
　・図７に示すように、第２検出コイル６は、コイルの内径方向に向かうに従ってコイル径が小さく（段階的に小さく）なっていくコイル形状としてもよい。
　・第１検出コイル５及び第２検出コイル６は、同一軸心上に配置されない配置パターンでもよい。 As shown in FIG. 7, the second detection coil 6 may have a coil shape in which the coil diameter decreases (stepwise decreases) toward the inner diameter direction of the coil.
The arrangement pattern in which the first detection coil 5 and the second detection coil 6 are not arranged on the same axis may be used.
　・第１検出コイル５及び第２検出コイル６のコイル形状（巻線形状）は、四角形状に限らず、例えば円形状などの他の形状に変更可能である。
　・第１検出コイル５及び第２検出コイル６は、流れる電流の方向が同じでもよい。 -The coil shape (winding shape) of the 1st detection coil 5 and the 2nd detection coil 6 is not restricted to square shape, For example, it can change into other shapes, such as circular shape.
The first detection coil 5 and the second detection coil 6 may have the same direction of flowing current.
　・第１検出コイル５及び第２検出コイル６と電圧検出部（本例でいう電圧検出部７ａ，７ｂ）との接続を、スイッチにより時分割制御して、第１検出コイル５及び第２検出コイル６の出力を、１つの電圧検出部によって選択的に検出する構成でもよい。こうすれば、位置検出装置１に必要となる電圧検出部が少なく済むので、装置サイズの小型化に有利となる。 The connection between the first detection coil 5 and the second detection coil 6 and the voltage detection unit (the voltage detection units 7a and 7b in this example) is time-division controlled by a switch so that the first detection coil 5 and the second detection coil are detected. A configuration in which the output of the coil 6 is selectively detected by one voltage detector may be employed. In this way, the voltage detection unit required for the position detection device 1 can be reduced, which is advantageous in reducing the size of the device.
　・検出対象３は、導体板（金属板）に限らず、例えばコイルなどの他の部材に変更可能である。すなわち、渦電流を発生できる部材であればよい。
　・基板１０は、多層基板でもよく、多層基板の所定層に第１検出コイル５及び第２検出コイル６が配置されてもよい。 The detection target 3 is not limited to the conductor plate (metal plate) but can be changed to other members such as a coil. That is, any member that can generate an eddy current may be used.
The substrate 10 may be a multilayer substrate, and the first detection coil 5 and the second detection coil 6 may be disposed on a predetermined layer of the multilayer substrate.
　・第１検出コイル５及び第２検出コイル６は、基板１０の複数層に横断して形成されてもよい。
　・第１検出コイル５及び第２検出コイル６は、直列接続されることに限定されない。例えば、第１検出コイル５及び第２検出コイル６の各々に専用の電源を接続した回路とするなど、他の構成に適宜変更することができる。 The first detection coil 5 and the second detection coil 6 may be formed across a plurality of layers of the substrate 10.
The first detection coil 5 and the second detection coil 6 are not limited to being connected in series. For example, the first detection coil 5 and the second detection coil 6 can be appropriately changed to other configurations such as a circuit in which a dedicated power source is connected to each of the first detection coil 5 and the second detection coil 6.
　・第１検出コイル５及び第２検出コイル６の間の電圧を検出するとともに、第２検出コイル６の電圧を検出し、これらを除算した結果から検出対象３の位置を求めてもよい。
　・被検出部２の位置検出時に行う演算は、除算に限定されず、他の計算方法に変更してもよい。 -While detecting the voltage between the 1st detection coil 5 and the 2nd detection coil 6, the voltage of the 2nd detection coil 6 may be detected, and the position of the detection target 3 may be calculated | required from the result of dividing these.
The calculation performed at the time of detecting the position of the detected part 2 is not limited to division, and may be changed to another calculation method.
　・位置検出の演算に用いるコイル出力は、電圧値に限らず、例えば電流値などの他のパラメータとしてもよい。
　・コイルの巻線径が小さいとは、巻線の外径が小さいことや、巻線の内径が小さいことなどを含む。 The coil output used for the position detection calculation is not limited to the voltage value, and may be another parameter such as a current value.
The small winding diameter of the coil includes a small outer diameter of the winding and a small inner diameter of the winding.
　・検出対象３は、第１検出コイル５の鉛直方向に直線往復動するものに限らず、例えば第１検出コイル５の鉛直方向（コイル軸方向）に対して直交する方向に移動する動きをとってもよい。すなわち、位置検出装置１は、コイル軸Ｌａに対して直交する方向に往復動する検出対象３の位置を検出するものでもよい。 The detection target 3 is not limited to a linear reciprocating movement in the vertical direction of the first detection coil 5, but may be moved in a direction orthogonal to the vertical direction (coil axis direction) of the first detection coil 5, for example. Good. That is, the position detection device 1 may detect the position of the detection target 3 that reciprocates in a direction orthogonal to the coil axis La.
　・第１検出コイル５の出力波形と第２検出コイル６の出力波形とを交差させるにあたり、これは各コイルの最大値を等しくすることで実現することに限定されない。要は、最大値が一致していなくても、これらコイル出力が位置検出範囲Ｋの所定の地点で交差する波形をとっていればよい。 When crossing the output waveform of the first detection coil 5 and the output waveform of the second detection coil 6, this is not limited to being realized by equalizing the maximum value of each coil. In short, even if the maximum values do not match, it is sufficient that the coil outputs have a waveform that intersects at a predetermined point in the position detection range K.
　・位置検出装置１は、種々の機器や装置に適用可能である。
　本発明がその技術的思想から逸脱しない範囲で他の特有の形態で具体化されてもよいということは当業者であって明らかであろう。例えば、実施形態（あるいはその１つ又は複数の態様）において説明した部品のうちの一部を省略したり、いくつかの部品を組合わせてもよい。本発明の範囲は、添付の請求の範囲を参照して、請求の範囲が権利を与えられる均等物の全範囲と共に確定されるべきである。 The position detection device 1 can be applied to various devices and apparatuses.
It will be apparent to those skilled in the art that the present invention may be embodied in other specific forms without departing from the technical concept thereof. For example, some of the parts described in the embodiment (or one or more aspects thereof) may be omitted, or some parts may be combined. The scope of the invention should be determined with reference to the appended claims, along with the full scope of equivalents to which such claims are entitled.

Claims (6)

  1. 　位置検出装置であって、
    　第１検出コイルと、該第１検出コイルよりも検出対象に対して遠くに配置された第２検出コイルと、を含む複数の検出コイルであって、前記第１検出コイル及び第２検出コイルの各々は、電源から交流電圧を供給され、検出対象との距離に応じて出力信号を生成する、前記複数の検出コイルと、
    　前記第１検出コイル及び第２検出コイルの出力信号に基づいて、前記検出対象の位置を演算する位置演算部と、を備え、
    　前記第１検出コイル及び前記第２検出コイルは、
    　前記検出対象の位置を検出可能な検出範囲にわたって生成される前記第１検出コイルの出力波形と前記第２検出コイルの出力波形とが交差するような異なる形状を有する、位置検出装置。     A position detecting device,
    A plurality of detection coils including a first detection coil and a second detection coil disposed farther to the detection object than the first detection coil, wherein the first detection coil and the second detection coil Each of the plurality of detection coils is supplied with an AC voltage from a power source and generates an output signal in accordance with the distance to the detection target.
    A position calculation unit that calculates the position of the detection target based on output signals of the first detection coil and the second detection coil;
    The first detection coil and the second detection coil are:
    A position detection device having different shapes such that an output waveform of the first detection coil and an output waveform of the second detection coil generated over a detection range in which the position of the detection target can be detected intersect.
  2. 　前記検出範囲にわたって生成される前記第１検出コイルの出力信号と前記第２検出コイルの出力信号とは、互いに同じ最大値を有する、請求項１に記載の位置検出装置。 The position detection device according to claim 1, wherein an output signal of the first detection coil and an output signal of the second detection coil generated over the detection range have the same maximum value.
  3. 　前記第１検出コイル及び第２検出コイルは、前記検出対象の移動方向に沿って並んで配置されている、請求項１又は２に記載の位置検出装置。 The position detection device according to claim 1 or 2, wherein the first detection coil and the second detection coil are arranged side by side along a moving direction of the detection target.
  4. 　前記第１検出コイル及び第２検出コイルの巻き方向は、電流が流れる方向が互いに逆となるように逆となっている、請求項１～３のうちいずれか一項に記載の位置検出装置。 The position detection device according to any one of claims 1 to 3, wherein winding directions of the first detection coil and the second detection coil are reversed so that currents flow in opposite directions.
  5. 　前記第２検出コイルの巻線径は、前記第１検出コイルの巻線径よりも小さい、請求項１～４のうちいずれか一項に記載の位置検出装置。 The position detection device according to any one of claims 1 to 4, wherein a winding diameter of the second detection coil is smaller than a winding diameter of the first detection coil.
  6. 　前記第２検出コイルの巻数は、前記第１検出コイルの巻数よりも少ない、請求項１～４のうちいずれか一項に記載の位置検出装置。 The position detection device according to any one of claims 1 to 4, wherein the number of turns of the second detection coil is smaller than the number of turns of the first detection coil.
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JPS62225986A (en) * 1986-03-12 1987-10-03 エルデツク　コ−ポレイシヨン Induction partial pressure sensor
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